Title : Optimization of a two-step Ni(5% Pt) germanosilicidation process and the redistribution of Pt in Ni(Pt)Si1-xGex germanosilicide
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Affiliation of Author(s):晶体材料研究院
Title of Paper:Optimization of a two-step Ni(5% Pt) germanosilicidation process and the redistribution of Pt in Ni(Pt)Si1-xGex germanosilicide
Journal:Vacuum
All the Authors:liuhong
First Author:Liu Hong
Indexed by:Applied Research
Document Code:lw-173032
Translation or Not:no
Date of Publication:2015-01-06
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