%PDF-1.1 % 1 0 obj << /Type /Catalog /Pages 3 0 R >> endobj 2 0 obj << /CreationDate (D:20190206135101) /ModDate (D:20190206135101) /Producer (libtiff / tiff2pdf - 20100615) /Title (US00000010215692B220190226) /Subject (00180001) >> endobj 3 0 obj << /Type /Pages /Kids [ 4 0 R 9 0 R 14 0 R 19 0 R 24 0 R 29 0 R 34 0 R 39 0 R 44 0 R 49 0 R 54 0 R 59 0 R 64 0 R 69 0 R 74 0 R 79 0 R 84 0 R 89 0 R ] /Count 18 >> endobj 4 0 obj << /Type /Page /Parent 3 0 R /MediaBox [0.0000 0.0000 612.0000 792.0000] /Contents 5 0 R /Resources << /XObject << /Im1 7 0 R >> /ProcSet [ /ImageB ] >> >> endobj 5 0 obj << /Length 6 0 R >> stream q 614.4000 0.0000 0.0000 792.0000 -1.2000 0.0000 cm /Im1 Do Q endstream endobj 6 0 obj 63 endobj 7 0 obj << /Length 8 0 R /Type /XObject /Subtype /Image /Name /Im1 /Width 2560 /Height 3300 /BitsPerComponent 1 /ColorSpace /DeviceGray /Filter /CCITTFaxDecode /DecodeParms << /K -1 /Columns 2560 /Rows 3300>> >> stream l$20`(3`3 !A3P`0e`3P`3`0e`0e 3 3`3`3 3`20`DDDDDDDDDDDDDDDDDDDDDDDDDDDDDDDDDDDDG$OdfKLΆKNS+!&f`A cFaT 44aRmZA Fѱ[!9Ҕ]-֓zN{o[+cA[֚FJ;Ji%o_[ڥ׾ , ~bP~--$w//K%}$zޒ(ZI-$ҴH%ժIH%mon(tCHv(a&MNJ $$B@إ!( K &aDb"""?` MQ00 y(4Ik0t-l0 70y4L`dֺN_ӪUU_UW꽪aHhQ<C"gz۪gU 0 FL` gY:DaB' "p#`a?n4 ii^_Ui*apni*ԨJ=N*"L*I${pA }!h5aeD43­].m~PA5 L!MB`5&ʁHO%$/7 c <"X¢8nRlVà nwF+_> tIBXxA7?zM{"dmIG(p%m$A:I$jת_Oj=}o}W?^/t}:IOOSo^J~od/ rJ?\iT$Qɔ/KaDB}Wo< #@l|dtH?*6 ARmDa 7~Ikm뷵!ׯHӷmQ7n4]ȗ},IRA7^8x!ullJ20+7tx_Wo:_oIo R&BM#D+K,iWxAwkq~ ~K/koKD/_o[dWu%K h:[i~/ ?K_D:"BT $/oi}x}/%./O_^~/_//T_H/ޟFyoI ]{kks݄=K:>ݭOΎ~V[mumoum_OJIz_hҊm;I_m(m/z/zM6ޕt`M60Tj *)}\m/ͯҺm.ҶI-$J$MpM0$NI]6nVoZ -i4 4…6A4PAAL5Zl8tpvAm/M[i.Z M6a5"a0L š"aa0AaTB L47bi> #A1 Ԝ60axAaLTaaP0BB#Maa40T ,x0LMUDDDDDD[HDDDDDGVm/i*IA$2e$T #B0dT*24V64aU0AA>4"ݔ᜷$p¢<zv6p2Zd[ "i6[_mWMl'Ӆ[ڨan64ƶH=tO޷\([kN\$C2/)E Hi.7)Ȑ$L5$?!|_ au*M AfbD v8hz\=.ڢn8]Dݺjn[M22i%Ili6 M#:mQF7޶u^*oIoR8޶~-ow~/Kֶ2k[Ru/Lj]RwB~~_X_$?L&?F7"cp/'[_~K?/N[ץ^_ru}~'_ϴI^Skk}ho_ޭ/}/'>פKڶmZzUkMk_^]tծzcm(˯4QMMvZ(J! ! ?!2pi&!&=:;KVVM&`D&jA6 Ad`1 i4M bJV(C ! &GhC0C !hC &aB(#JP(A((m01ɲtJ$h!e-C "UEA C#2ȣ١ A lJʲ ܁!A ܇+"6(2-Av*ZG+>`AP#"|0 G`#F˲W  O0##2NBan;'Ai tøm Npᰑ ! \22AT*ɌY[:ZS}=ޓIOmiag #nÆ]00czI+i7[zoui$m}tE#mo]JpmWIIߎ:g]8i%I5[uWoov}kW[?w:oeC]Wa(wy?Q.^8R^۫3< Cˣ]D$̄ M 37,6u_ֻiz=pa(@4506F=0>}_[?z. /W'pn%;JwK z~Y'|B$Cm^It;]ӿIvtTOm?;O'?ða)-_m a_~_VA_y G[}nB{[CKᥬo=tBq_=&U~yJ_co"OX:O^[_d4:{Z{oC[z_mܣK֛K'^iE\W{KZkki{m[imkyom__t_6M4 $t j&$Ia$ؤL*v K׵J0+^K.a 0`uA(V!@ ȚAl!A@! KUB}m-뮿b#vI2:د8 O~%҆KdJ]L+zM;I'viI-@ 0 5 @j B & &abiʱ0h 4"""""""""""""""""6m+i}J PJ" E #nH!@`(5"!50 aئC%h)r! )6sYEXxdp]`>kFG05"05 2;2?˲W 0/ kEaan} pAL7 ӆ' A&azMt4'ݽ'Ioۿ&tޓ{uޮ{}?IoOzOw{~o][{|uYC,qhei׽^~| + avmVPYC]{~[տ_\8$vooo ~aǷ -9/a'!W$JGoO&۾c~>` ~ $o ^o#`{ӵ}5 yz߮?޺6oM<>}[ʣ~Urׯ/uJ_O>m}zo[~ /zWZtWO_~m/i~w:o}/m/omi/zM[^^ M0 'i 5N+I0A&ޝOM0m+H6OoA0D0A0bo9V!J!AyV!!  Ap@abBDDDDDDDDDDDOb"""""""";~N~wb&4MAK0ˆ7- C@B@r h)# @C6C#GG>%p^%p2?GG#ni ,;A& Nn$pm{II=qC>y_(w޿KKK=3<Њ2TfO,.z8 0 *x<%a}&¤BQJ!}2ORO(4???OVZU}/oo_ﷷ~CC}*U[~yZR'zņ$ND>a晡D'x&4")'DaF`a 䁓9# ħ0y'̎!8.7%oloW=0aAAB40f#`4GȈ#`h #`{ { #=0T4#gPMzo_im-m-i6aT*PM tUI uA6l:**WI&tIoE_E\*O[{i/뷫il=bT0bT<ջon%:][%C%:^۶VSjIa tM0P 0Jҿ^ =uB0A! D0A@0A( m(1 aQkQ[}nb"""""""""""!41_=sa0ߛ\A~ /K%o ޻ݥnN4IuEu:tuO4_m/mKm_ݴmP4kҵ^k4]X[b-[o[YttX]EFO ivm27 $M4Mm0M4$a &IiII7PaL(DsG0L4 a a0d0d08Ds  A pDrxtDDGDDDDDDDDDDDqzSM>al(6NB;$H9>K:3vD;hdgkCg[p59vJI kwzS{iL~Jv0^۔?UqTyOyhDi0K8xό fbhGhg`$` 42@76D` 0<(F5 3{;h 8L#@mM0Fh hEtp~up&l:*Kq)0ħkkzJwkuPPuޝ'KzoV-'tztn;Wz^+k}׿0~o~OWW-ծBZֿ_ׯ_^K j! mOOh?ɇ2"R/?/TmK_8bdK^뢵g9y{*߿O /Ϧa/a.a+I>҆׵]ױVMud')&+d'v) Km%x_i&LM6'MW4}7i4MzD&Iiġþ:0G8Ds M0 頁a&aa0 baa&aaibA!Ci4P\GlDEDDDDEDDm5)PF+izNV9KmZml41a(AD2A=DDDD,ԙTԴJFa&3te&IGFlF:eC'i$ vzJm[( 42f & 3 E+ j0Gæ<'aASEXaPaL#}[[Wn%;aLޛ êMI::w]; V [NVPu$J woħ[} <,$f!MdA D%Bn iagodx0'$ -cW$mk4Oۍoa2K:pOۓ X@mI$چ_/$K?%4/K\W"i}Iu뽿]~g_+_i~ߪ40A3730ePf]P!8Jҵᄼu5{/4h :aFCFl2G[ =lUڷK#- oUmn'EvIݴ|0M4푸v $ %m3nIT-'_^6 i $yV(&aL(Ds O*U߄N~""""""""2Dq+i|qirzɇ0aV_{P[i)6]?}" )Mkuym[g"[C^DEk./|Nҵi].!'d' ݊d&iY 6)u{tia-x8w dAl0aaaP@D8l AqDDDDDDDDDmi[JVP(Q:%BRPs !$TA,% Ў >3) M"J:ZlA 4a×dzA&@:I&Mkä$vi )FvN)SIUmaV+I*vWC޸㍺V;q?M335恰 B8l: qEGN28g02*g33g0N$qg3>3N H6gPEOd'GXcV>3N Bf3`6 27xpMe̞0E g nlS GSiL#L# aA{ 0a~00{ ;M$[nmjIWzIêO0SaC7&ªAt`ӭoI=ioո;Ӵaj߃q)^twNo >] W 1ki?x㶓j88T[ ukuokoP_H4i|7 /fF$!a~N_'[~XE@ma?[_%"O/D_=%]m/]a/h?m$?IߓD_!iR_y:o1 =ǷǷi~(S_+Oi~ע ḅON5;~ 9}k端79xnd{I _݊Tk72:#NbսSm(OiIa4KVIi";zilôi& a/M7ӐE'?' ZAAKÂ#LB0M&0i'bam„G0paP1N0A!&0Ȅ& ԟE!ڷ!?DDDDDDDDD[H"8""؈?WKJ'zsZ:-5;V~ׯm$%I'KSN[Vo[K-&N=oH6m&ߵ(a-Za-4MRMPa $$$8amA h!a1 V)A AA* bP"IX $XBd]%-C0 te.bSo6H#`7. a8"|:NI8Aow qJ'm=I+ZWnn2jfy'"AAf#1=hg#jlff30e2pJ0=L#aA{ 0arxFai;{ 8M<#@aaw‡E]&oMTa&釾7N).aj߃q)[;ut7OO0=t)^x0X_k]Z~׊c_Cxi3#[/ 0mcޝ%h?oi%?_Iu뽿IEK BO~^_׆tGo[_W9mKan*[5BzXVoO M;dnI6a zwlJ;M88oI V%PL P/ 0U 0 A†I BM8` "#)DGDDDDDDDDEKI'KimIa jI`e) ȍ1)ERR43 0GAMPm?ȸT5= g DpM5IrN)S$n2:Le>hȪ;42!ɁL x+Iz B<k90a0 UT{ji¤MӿJޙGTi6/z?%>PCPO[ M3< 3V՞؆Ȏ363S sP30d닮l(*aȶk * #`{NxH#@a\&00}0WIaU uIaӼJwħk[ij|2윬0{m[bT5n%:Xy@[k޾M'It/m/x`00=t)^x0X\_}kerCabS(ok[{\6muI{n7 ոo<7?ZZ^M~0%n8KN 6nU۠zۓ Xz뮴dH{$?unZ'PohCB! xwۮ_~ZHii%[b{vY/"U^U_o<dtgF`5:30elCd3C32(<30d ͑30e/=#„{"0a{ 9CFÄ4kta00hFpF\GAa Ru' 4諤Mk oXkzJvħq)޶OJ).Z;Vkzt-I[KztIoIw_=o}+JmoSuO]=_Vmk_֗Z[Axp4=|z /߫a2?ڈ_ _oRz}AL?ɕOA?0o_=A TmKs'د(y:I?$]_}U}ItV>޻>/pEC<g3PF" !<<& Z0fR]U%_= GӰ„{ #@`Y{ #X`0<#XaASL#`4{ { 0T< Ӧ#%תæ&﷤ I&MAN'A7PhuUoImt'ĊItwK{0%CV~oxNտ )=/I$i7_+A괮+Һk 4SK}mQJ 0/_?=$m?m???j̣6aZ_h$ _~/DD-uڴz7/%ޗ?7z_ҽ$uׂ)|i:דv3W[ZiMj$+Bvӽ m&[ (j{^Ki sKk__Bd`ICV]lSlSeՂ*5a~ _+N˯bb޻.DDDDDDDD~a\0dn4ai27 4݉ClM4i=m0M4a 4ӆ 2HA0a5*5 B5T!aL( A6A00 z0 * 00L:0"""""#8KKTFQ$qQBa"2Fv:ʁA: d}m K[-/K_UU}'K u66:_uU|t/a/_~-YPAJxB<ɎRXECJgh$<Њ *1PY`D'A!9#',Ѝ3]?E;Kl$Kn0f0T$#=a5aa0a0c 8G4akp੄kGSJ7?HªM6|*NoZME]'I uI+ONt&êFKm/{nzun%:pzN 7J=:ZI~m֖֕CiZZWBZյcMDhn+Cb?] }UzWzJ?9y6F5W[\Q_m/  ti6iZ $ m}A6__}aA BA`Hg w8Ouwiwq?)~N~_OOﶓﶗKk|5 o[k~|5"Wu+v]1^LP)=vvՂ*6#E`YQim&FM6pimi(vl4dn{#piCFᦛm&("9 0 40 PA‚ G* &PAl( 6E DDDDDDDDGMn6GP@aYLe7I_ PZ33"YC Q*$vۃ0A]R "0$ݦtp*@탤:I?t]8J޷ZG+NL3 <%dHG_Pa ӂ8G5 kAaa᭑N# E_ wtIlh#V?:o^OVᴵP%CC_oKuku?7^?_aXIޞ%S(wuPi?O+ֺ:_OWޖhJտ-{m'Eb 'ֵw=al4Mm1(wI;TI=4]*l&Cn2^AL aAU\0 %ġ#p^""""""<1 V)Ȉ@ *!Pb Aɦ҈㊈Jm%VҶ(;'$ QQA %m0L(MP8H̎),Le~HOHdB: η 0A 4xaBL+x;m*M I)]BaBA;렎;;~x QznPqooM 0IW_PaPxG=^aT*zA81*1*W=OOu~޷z~67_ɏ|?fT2\!9rC1pMf $ eR7e|e0a2d7^ ﾓנuM;nM8mAݤm~]u$í}: 0F-#;O'WKOih4zot&Z]i}XAmsi'46)&)0ޓOE8DsG0A:h0X`Q9zuM>#㈈_^}m/t_Z;izq!~/53C_7?_h$}onE DFwRo΋ct[~洓K{.OCh/KK]6 &jl4a$L0Il0o  aC0!  "xa yV*""""""""""#ɲtJ"|$fDeJȶT1 vT!C#FC3^HI4`eӅ xPA<0$mA 0 IHѭ>j6i h ~ޒ5?j.'yL K}}m}'xNC~92D ת { #X[G:׾]&&%zz_p^+KKIq t6C_,g7hΑTXɹ0|^.Ȱ^__~ᅨekᗁ]8akK/v:"p.J!ݢ?I/?$ky9$֫گ#DKzsOM *K[i[ %^{փKU__U!KLm&+_V,."q9grKzܺǟgٙe?(3نNDp4˿6A8|3<" 0L%CDN'3\aBT;BS]0 &iġA4iIX*ag ; G 3T#‚ 3TX  Ⴂ ?Fvx`o3 C6&g *ag ; G 30ȁL&L(& Ѩ1 Պ4 I(bS&ߤ/P%Cpħi6j&lbS$l1)ޓq*ZMbS&`Not JvDDDDDDDHx 7 ҡI[It:M}/n?~t<'n'_!}_/?PY:I/i/s|/6 {i%kwk %K [%_/_m?fK݂)ٚ/_3__ _^_M׷__~z_/nK"u]m6}_]tiV!u݄;MZ[mZM]6vin(vᄻtIS[[eKvaaAM] 0 AL &. 0͊6a0al00 ] &l:6( l00 ˶AAaa8""""""""""""""""""""#M,rZDGyFKhd 䐉%AΤm3#Slt$!P;92*d6tgÆ205#pa11@a5 # q"[iaAakJ+GMiGT{iXPOI:Nn:=JM68t=oW_m'CI[(wc/G:Ww]v;fas>A,%Cj5UDg,}ffl"/fy\ B ; G =u NІg\n&h¥I67M5$km2M&5I$m#x[[_.xOKv}㎷W>AJٜe5 =tto7ޗUoݭt~+x .K0ihK ~K_r#4/I/OHz_ihWZ3tBJ"Rkï-[KK6Zw;ӴzOB AAk hDDDq:"6m-mm, eH8UO4̋sN[*Ҁ L(PHm ^B`a (e` ӧMppwmj?q!K<\4,&E4AyN,7 `hzI.I%g "v/_>X_ץ#qr9 K$ f3n33dn.FxPT={ #XaN׈_mUް`&0NG`{`puM7Z tII_߿{^/K)i.$޺;X>Ii}tSOOP{o_1^I%i#KKtKI+IuI#-/[ҿK__㧪}RK-tHU*K}!}[oKKⴒtkKuI+0?iR3O_^_^I%% PT\GPo k_ouKziTIi 4ziӽ!_%_uףJDaӤ]R!߄ۻu_OKzޟzKjWiMүc R]C4I[Km.K KkKK W_U^:KsZ0 &#pᥦ4p ^m$I鴓/R$r)JﶗW zd@ bABj1 X0p- BbKa$aizFpҗ^O ~tHqKt-#Zmii*-E@ LC6N_i*ÊM9;m%N{4ӆ F(wKLBAXLpakb:apDri‚p X""""-8*؈8Km/KmI$P(MKID[HxHm! [A!L0(BEj ,6 R(;fyÛaC.daB PA]zpޘT„m'I*Tѭw[[K8kp^_mU'z_lϐD'\ό8}=a4a(v:#K&Sݭk8} ұ[N|B_C_t=?] ~Z_GFkH=ֿKtf\I_i/֚uK5=zoEOJ"Rkï_Va$dn4&FӸDqީiB0ajB AAX@p(""&up44B<nPdԕYK۩C#5]dx'vJI  Jp{iOiIV߶[u&;k㏪~4~?;a(v?I/ 7~[Y׷{foo:% C?me70eB#Џe Gr@vG dvw m{ ׶d5)}ڹ>T޷MIoIWm/_ҵWjViI:Zmj `BbA 0AD>""""#]~\f431.y89̎ mZ]+:a4?wxp{ Ch 8OaGYdZz;كpn%;pJa]&KN&;Ӷ( ~i} [/ֿ_RUCK\4PcXA_____zpE?*]~J0+\NwITdu_kvҊӽbPKd[i v2N3A!@P 0iaIL&8m+i[J E #Bgb,+%ydfdLl SL(T¦0S_  …ohvjMxfGC5d! y Cy/ΦDf|Y9REiA44@P0i4 i TM&¤8FN|ѭ:pE=4SѭӢ9tml^[AA$|]m[}W$u֒H$PFyѯ03>)9fEO2\ "BG%Ie6g 6GrȈ2:%dK/do$<A*L4,g2rGSPc L#a a0a00f#@a 5Aa{"8PcG6S.Äh 0aL#@xp0dSbq__zWIaRpR Im'I諤 Ti7$M;Im'ë :P諠pWI+c*ߤ龛4#dhZ޷{ħ[1*JtO?j1*뺷zħ[kNmÇEt)_KJ?%ZWCХ}t_ 9-n3 ƮkQkG_}Vit?{t5WtV] oms$?@=m10i~$mO}mm/}$K7__ oz ~i}I}[iKᴿZT ۯדK%Liw'_by:O]+IW)E!O]~[i{ǾO׶^Hio6YRKR5׵k / oaSw^UzI$FTOw~V}]oOL/]YuV» Ca⺲P*˫EؤbEl&G_!#h^4I/[YzH=zim' +I6Tm1(v4ai0ii27FġPa6lM4i6F(vi[%='TIS_W 0 0pDrG0 P 0PM0 %@A0L L' &ڂ TmA ' AmA0amJ ҫT) KM+nCjk""""8"""""#)qHa մ~)M4dn鶖1 UP Ab2u`0j ?DDDGIzV/a 0tM+i$a 0Xa 0Qm$̂e<;gbڌg T…L(P\(\(PvhEZUIu]_U-dR#edGAx7 CɎS_3 L<I$̏ pϑb* ?2A Ƞ3 PDт6YPdt gq,!<(F=8}0cl0f0a0c3|0dRa*a# =a0a L#a>G6S3P&w}47ME\(tUw}&WI]&ޒl:Rpm'I tUtI|:ޓPN{oVxPտޝ[oCWWBA+K~c_c_n_խcVt1_!xhka?0`S0{k0?aġ?۬ ]aa@o_7K o_o7o7/aߥKm-.7dKtO_d<'tF'''_E 6I~Sw׿[[5]oh]Yu[./բ˯&#dt]{բuealbÆ#p &la7 4M8i27 6FM;MnlJ +I4bP톒iMi27Pa6VPDrjG*6TN &aG&m0&aMApDrG0P / 01 Tm00"""""""""""""""#)QDDDDDDDDDDDDGҴ, C Eqb0">MP#3:*E6,pRd$0ņ `) FZGL28a:In pߓ W2ɞvkk/䢷B_}ChuI7E]&‡E]'wo tm&èP諠tIl:*6:AH6Ci? o /TzoST7op{oVx_}NV[N_J+++K&E,}n?-~Վuw? t=C! W~m/Gk^ #5_ja^}%m _u a ~O^yhu~_N%넷KWzV^kkk/[i~iժèuTdu_i~k=1NtN8+Kzh'F_i(wA6տ N?ivoIWT&I;m/B_m-I. 1  ᦘ@aM40$AbA BiM55ᮯ5_Kk[""-㈈""#[V]{V[.E LW({a0q]X_e6#i?ImCIii &F6ii7 M4i6F(v4lM8i&I $M6;Fw0 bPAa M  0Ah& 0 L  %Aa0\"""*""""""""#)Qiuҽ[K_Kh$ӆ2dMhTDDF*J+]  "?'L!<ȞvIIxT=PBL,.xPB]ppppv岭cA*c?_U_Z PFEHg3#Ђ! { 0aL#X`8*a 0f0T„k5h#`{p0T5#a0 { 0f0ak (*aDŽ{ }t6:*7'âzMP76a'wIªME]'I M_E]&l(uINS%:N{nzuo]SSտ֕Х};_]I]JKJJzҿwV?nV?cWn__V:CWHb5Y#?{kay6f?/@~.~/%Kz߆_ ~}o/K[~7'^NK?_KeZ8uw_%V__񶗿i{m_ = ~5˯b+/Yu E`Mخ˯b/YuaIiM4M4i4lv#pi4lJġ *i6i4ӆl4z0 A0Aʂ Aam00MAA L( U 0i8"9$qQDDDDDDDDDDDDGr.4:rl3 dC3VDa#1GAMSs3L2ZA1'2U28)\ /a lF;uFU@0#A INA iUI &¤ H5tSvOFNNAhtAuI]-uml]VK6UWqi%߭+ze^o~׭$әD a^k~l1h )W~M.LK2#$^d5r 0ɊaBaB_kZiml0B/?n </&xa8;MGK7xo"4EQ4CEК"aKa[?t_U^xm/Ѓ|7꾪ItI={'_U_Z2<b>YxS P@1a1ʂ<&r\Bq* *s2<)>FyDQ2s#N<^A Lr%l.H%ĬBC"r(G/}+2oҿ#+ = GM73N G0t3L*aB5a40T40T=nj0a k 0AExp0{ 0aII'zjUl:ޛע~R|:**7t4zIm tU|.Nm5I6i3}¤6m uI4Ou=$^MRg<30L(PpPphppv&CIQZ^wh]}W믪u_^[$(D%9dQaz9*Hٞ#3PG慚Vdt %+!%dn$&Hg$<"L̊3PY3NAJgqHGf0a{ * FAah#aȯ#X=`Lxp7Â0aa0ah #`k*ik { 0E]& \* jm&fIm'ë :ME]'I&MNmtl:I J=>ħ^)mmmJt+?i}W{?O W]=ut?[GQ[{⻦Hp1_\VPak-0FÛO?@ _[u?-@_ӨKm}7/% /%mo/,7w~'W_Kޘ:)'IzYSz__cm$U_}mKݴWm/k mui~ W^k /^4~ا.*Wb(~LP+.EbPNa2:1LS׶#-LW^I6iJa#pӪdn5lMCMm0[#pMCFIi&i#pm&#pӆJaAaH΂aA7vNMaA ڂ SPAN  A l( 0iAa6A96NBDDDDDDe""""""""""""""""""""""""0(,mȸUǫ`}$I}tOOoP$ ziءުAU BjEM'ofvo#3)+?…L(T… ..(Phppp_f8s)}6kOQK_K_Rzia{t4a4ᵙN3E9gC#نH"AљDN4A0djqM8)>ExNYdNEF\Sg24G0 p!"`23pS|"""#k GS00cF{ 0ALL#mA G=^(F{ #@aL#mZaL#zl&{ h#XazI꓅IªA&toI6}tiII'IiêMhuI7E]&jm&ħT J޻ħ]=>q)JuJmK/ރ׺V]WC֕I_BZWBu֕I]_j~_Vu~XHn!nn!A`=sijc(}0Y̓(}|f2#uR!`e, ]akx@[%N-_޿u m[ ^^_פz[N|Nu4t~NE;'OL']=4u6IKcm$U_}WҎm(K^mo5Puҵ_^Vk-1[a2:zl&GONv]{v*A1)1O[[V]{v*YRMnlJ +I4bP톕4 4ڪdn5lMCaUImCIiS#p7[Nd4 83ȆgC# 37  PA8"9B#dA‚ :0 'vNMaAh2^a;AA1 0a8aAhh0d0I #CI0h A n+DDDDDDDDDDe""""""""""""""0i+ aIZVi6h$ j :i*뤍n OoO=I.I[[Il]ZZ]?Ii}kki-7'%ERQtUU-n+IZURZKK]mo[`0 DtXA"UV_j (6I:u3 }0R]UUtTuUUfv(ȞvIrL?$KKI޽0 0BI/-u  (_UI.UUZW;@$]t׎>vɅUW='T%zzu=uЫ[[u}un%Ti+jM[i'1 IbC&t:}u"""97>FNY"'"|L2:.Fa0dAd#< sNDy2:"8)("ЉȠ3N]=b(F{ #@aL#aB=#Ç00aa0ah#`4{ #XaAS<#`̮ fa0ah #`kf¤6m uI:NTNi:AMP7E]&tA6l:*=un%:{nzuo]SSվ%CV{ii]=t)_JKJJzҿwJJ._cc5c>m?C W~ ׆Vҗ Nay6f??[@al7_7m/a Wi~_7w+u)y:' S/4:"<]}U}W鴽}6m/ݴWfGiIuҵ}߬5  oҵlB9 0DDi$fD3:e9vQNha0qLS}uh]1^LP)=;uU.˯bbl&GPDa ( H44F0m4I64 +IbP%iSIMFᦜ4aÆMi4 $bPM%a:l JM&ma[m 0A'G("95G(Ds 6a0%T0 L  1 0Axa‚tӄ:)DDDDDDDDDDqQ~A[m_Z]?Tֶߥ*UKIUU-m}k_ZUq- _T޷0_T'VD-_G/ aVb ULGRpk$t %T]WKUIwZUUI_uUZ_Ҿ#$#;Rѕ\k)'dߪI%]/zzz…;P0S uzCuKzt,n  o-z*;]Z-<7N 7KVm&IC\W apF=5Y0FNl9? @_/Al? /[ xo_BXl7o}_~i{i%w:KzNgu~z_/bͧ5'לOum/K}}mEkݴw_5|5_ ~_E@aiد u>LP)X_zb/ =tMl6Mi7i=4i6#pӆ +I6Tm1(v4ai0ii#p &NL4AL* aPa@AANM0pDr paaA Ad&imApDr DDDDDDGH^Y֑ykHSi0OH|<+;BC:J;@|0$!Ml 0`*o։2(D&𕒡#}B= 3|0=~aW‡E]&wx=/&k%e p#isbbiA\ 0`$m4t)5' ?I$mWKWݿW޿T hu }0ȃ#2\3gP߷T >aN?m/@QQĕ)KQTU__#7Yffb=9BqIu0diAꑢN6kL#dkL03N0Tt= G=O\I%Ku~za* ¤a& M$)[Ko%CN[oxuoK]K+` V!4}֢׭GwW=i0UO _/i%m/Ku}~hׂ)vO2 /_3/_at]o_eױ[alÆi6l4Mm& $d a &iA0xaAaa)DDDDDDDDDDDDrtvܐSh!ShȠB9 k22:x$fGC:C* ղȎs `LMe0Ehd $ i #CTPF³hh0d0I #Ch V & R*ꕤi64 A4鰂+i8IZ&ӢnNJtۤ:={TAxN.O=I.ԡOUZ]kzNit%ҥUuUT}T]-%UUP~?I/}P7I Uo _Iiu__UA_]~k tkZ@MVKVD-Z ?XD: J ?)8N!tf~/KYј_U-[uT/a*ꪫ/I/KҪ׮ƒӿ%-t(zI/M KKK_}}}$ksZ}%Zҿ]~i_Z!'RI*u[i??_$yJI'imiiiTh+Br~6תa 0t]SXh(KմAIn%Ti+C"LdDiiA@LBCȡ Aӆ!1 BbLBbDDDDDDDDDDDDGDDDF_i%m$em)D,h)đRȆfeAvPQrd9 3LPȆfeASi &00g+'`@`GF„4DIV 'MIZITl+tӢnNJHOFN{tAxN.O=I'$ml^[uKKoo>iRZJo>|zI$ǯ߭Kj[K5IJ~k$Bj?XD:?_:Oz_$t_UKmut .J%/zK}-'޿>JK_WRKi_H=tIWKhzZ޺?:!::JhUOvZIuhUOvմAIn%Ti*n O@dRb !1 @؄6E !"""#m-I&JI6V 6J[A 2+iJ"#̆dhSʸ2"s"fFѱ:;;m<0Dh 2;F$P)VS86wmzAܒ*@YRl$ޓIvѭ}I' v?+Iﱷ׫~]s13he`fUvݮ%;X(q)d?Pa L8pak_M6wӷN E_ wtI/w%:[a}unޞ7o_?Ҵ/W;__d!m^kc"ǽkN÷?~__Fim-um+z BE_^ iuɳ߸"Cޝ{_tZ[Ҵ OiqXAiqJҽKd馜4TNNAM݊ICئdtDm4i!N i NL0 W 0 $aliCDDDDDDlDDDDn2^AL aAVDDDDDDzIRմ [i m ȌMRQMGGE#ԛWV/G/_ "?$^꺭/ RJPJS`a46h Z)4XxxVGZhPSt]_Kwj"?-D_Hg2Y3_/;"Vm+ABWKJ"?׬NLVpkx0A \ ü+ ZIP<>";} F7Z^_Ҟ\GAx A{A &k{ DDz@u] mh}5bX~YFD~mtIT8d^;c =H~ -Fh#K=YAG3lqE9#^?gqH`"> +K OO iha4^:MGϫ6*#dZG {r_\џ=ZM%?Ot=:G=}=o,?p:">{?q_KȦ5Ժ/kV]7]Gqq~Y:9?F8z@E^qLaVG_IC+ 6# %a'ODDDDF?**<=4ZߧLJ_ \Fzw@}_z_Fi}t}uq_麷]*Ii+GNKKMu%oktF#MR7)P6?] ">#㬎q_ӠDDDDDED{~VHZ3DBv_ W|CH[]j莈쎈莈쎈莈쎈莈쎈莈쎈쎈莈쎈:#;#:SdtGDvGEzqDGD\DDDDDDDDDDDDDDDDDDDDDDDDDDDDDDDDDDDDDDDDDDG־o~ޒzV((r*ʲ*ʲ(r(r*ʲ*ʲ(r(r*?KePPXXPPXPPXPPPXPPXPPXHr,r(r(r,r(r(r,r,r(r(r,r(r(r,r(r(r(r,r(r(rDu(r(| 9C#(r,r(r(r,r(r(r(r,r(r(pDDDDDDDDDDDDDDDDDDePXXPPXPPXPPP~aI$HHHI$I$HHHI$I$HHHI$I$HHHI$I$HHHI$H"i/I$Dui"i$I$I"i"i"i+I$(v(v(vI$I$(v(whDhDGD\DDDDDDDDDDFDDDDDDDDDDDEzvuU,r({(r,pD~PP莥PXXPPXPPXP(r(r,r(r(r,r,r(r(r,r(r(r\$FhKő(v(vI$I$(v(v(vI$I$(v(v(vI$I$(v(v(vI$I$(v(v(vI$I$(vGHJI$#I;JI$CCCI$I$DtHI$I$HHHI$DuA֧dAI$I$CCCI$I$CCCI$I$CCCI$I$CCCI$I$CCCICEZI$#I;I$I$I;I;I;IZI$CCCI$I$CCo]=hDhDGqy+}j ǿۂo nmcsq>@'_wЄ 3wwPPXPPXPPPXPPXPPXXPPXHr(r(r,r,r(r(r,r(r(r,r(r(r(r,r(r(r,r(r(r,rGLC9C#:9C9c9c9C9C9c9C9C9c9C8"?(r,r(r(r,r(r(r(r,r(r(r,r(uyG#|>GA>G#|>Gଵm"i"i$I$I"i"i"i$I$I"i"i"i$I$HHHI$I$HHHI$I$H"i*I$$P*I$EEEI$I$An$CI$I$CCCI$K39"""""""""""".A tI$I;I;I;I$I$I;I;I;I$I$M$P$P$I$I$P$P$P$I$I$P$P$P$i$PCI$EI$I$EEE\z~I$CCCI$I$CC_Aփ ]DDDDDDDDDDDDDDDDDDDDDDDDDDDDDDDDDDDDDDDDDEDEDDDDDDDDDDy8\""""""""""""/:MmȰJs,sx0QJ 9Þ9#_{"KxFxFq (0 t.W]WS`?ῥ a,%VZZZ;߭}#'mcc6{oo~׿/T”2(r(rGPXPPPXPPXPPX NS ePPXPPXXPPXPP8 G8pAp@<70cEEI$I$EEEI$I$EEEI$I$EEEI$I$EEEI$I$E;IRI$Dui"iRI$(v(v(vI$I$GI$P$I$I$P$P$P$I":u]u D~"?DDqۧ Xbņ0҆8ض-%{ɗ##G=H]}pppA]A]W]u~" 6灤ƓB *B Zx@oXK ijw Mt7MtNP)|0X`ߥePPXXPPXPPXPPPXPPXPP(r(r,r(r(r,r(r(r,r,r(r(r,r(r(r,r(r(r(r,r(r(rDu(r(|":r(pDu0PPXPPXXPPXJ":qqqqqw 8TI$I"i"i"i$I$I"i"i"i$I$$I$I$I$I$M$(vI$ZHI$I$HHHJI$I$I$ɦq8p@8 G# xc a15I&CCI$I$CCCI$I$CCI$I$I;I;I;I$I$I;I;I;I$I$I;#P%I$AդI$HHHI$I$H":I$P$I$I$P$P$P$I":u]u;#D~Ј"#":#h#h#:6莍:#h#h#:6莍:#|1a Xbpűlb#GG?{#ZUDt8Dt8Dt p\/4 &4HU!TRHUZi$}ZZZZZZZ;޸JMt@'A AD} o L9c9c9C9C9c9C9C9c9C9C9C9c9C9C9c9C9C9c9c9C9C9c9C:9c>PXN9C8":r(r(r,r(r(r,r,r(r(r,r(r(r,r(r(r(r,r(r(r,r(r(r,r,r(r(r,r(r(r,r(r(r(r,r(r(r,r(r(r,r,r(p뷼DDDDDDDDDDDDGuI$I$P$P$P$I$I$P$P$P$I$CCCI$I$CCCI$I$CCCICEZI$#I;I$I$I;I;I;I$I$I;I;I;I$I$I;I;I;I$I$I;I;I;I$I$I;I;?sANh(s̩2TTʙ^w&CCI$I$CCCI$I$CCaI$I$HHHI$I$HHHI$I$H"i*I$$P*I$EEEI$I$EEEI$I$EEEI$I$EEEI$I$EEEI$#At[:B"""""""""""""""""""""""""""""""""""""""""#"""""""""""""""""""""""""""""""""""""""""""">#b514fґњ3@{{|5w8 CL!0lD`_`#98 tG_yfԡYخp,D;IG[7ؐq3ۊ&ЛBmfh)ԔWM @GG(_E(r,r(r(r(r,r(r(r,r(r(r,r,r(r(r,r(r(r,sXXPPXPPXPPPXPPXPPXXPPXP莥X9C9CGSP":8,L!0ABa 13^I$I$CCi$I$P$Pcu)IDDDDDEDDDDE]@t]S"""";#b514fњ3FhOoo|>=/”9PTGBa &Ba &C(u""1m} @. E\4"8d2A.6PXPPXPeXPPXP뢇8sq98sqG!GVfњ3Fk1182 rcrcrcrcrcrcrcrcv(v(vI$i"i"i$I׎%9(%Paa,fx0d{#щ&Ba &BaG=8惎h8q9 A(1M$4I4I3xI$I$(v(v$I$ c pppA]AEu \.B## 8++HDDDDE(\)4gI&4HU!#hB"""#B_ < &4J4RHU!T @Gz;Z IPZ Aiiia,%c3Fh4f"wZ KKK ia----.ۦnn),0X`xo ۦn A0X}a.....!խ&Ba &Bakk}}qqqpDz. 8ki <0xaq88sCa10ƿaᇆ? <0p@8 G Vq7"?G.aFhO#Da(r(r,r(r(r[(r(r,r(r(r^űl[,1a Xb,1ccbضGVfњ3Fkűl[bņ,1a Xc aI$GZHHI$Du=d{#pppppy{#щ&Ba &BaG=`A#G?I$I$CCI$CCp\/ 8Dt8Dt8Dt A]\.p_ Dt8Dt8Dt ++BpduǮΜgsq9 )q98@T q!9#9C9C9c9c9CGK(r,r(r(r(rI(b%aQ !D/ϲ(Gmm*MI$HHI$HHǮT aGz Dtmt5HHI$DuI$G_߿]umJЈ~=u a}{vݱ 6mc|'#|?A axa^vmd_7*~Ј`?wmm?Z. a{obm(}/e#a}u⢢mېخ]uTmﲇ(r(r,r,r(p9C9C9c9c9CG[^6LUPPa0B]GfI$I$$I$vP0a:mw> GvhZEEI$#$P$P$I":DG!]t؋oB""""#ma}~illadxد YPl00l7pE":#m=Be+Iwߎn-؆a-\= 6v_&0a a]u7mGv#m۲(r(r,r,r(pPXPPP}CaB]m}mm@wh8p +h `V"#[Gz4 @Í؍}6 `HuQ8nm"omlS(r,r(r(r(r>YP֕(r(r,r,r(p]ZQ(pI$I$QIE1QI[☦)I$CChÇpl6 P$P$I":0B /pa0EEI$#m(3ўg 6mDDDDGhÇSt#kIC, DDG(&M Asq98sq9 98sq98sq98sq8m[&91ɎLrc C㍍n[n[n[&91ɎLrc866666[-rܱɹn[nLrcG/UUUUUWUUUUUꪪUUUz(r(r,r(r(r^($ A H$ A A H$$I$I$ A H$ A H$$ I$I$I$H$ A H$ 4I$G^(v(vI$xH$I$I$I$A H$H$H$ A H$ I$I$I$H$  A H$ A H$ $I$I$I$CC;M}$I$ꪪ]UUUUUUUUUUU"""""91bB""""/        H A H$ A H         H H H$ A     "zM؈UUUUUUU (UIU$I$I$I%UUUUUU (UUTI$I$I$UUSM4]UUUUWUUUUUU_ A H$ A A H$II$I$IA H$ A H$  A$I$I$I$ A H$ ֑1 I$I$I$H$  $ A H$ A I$I$I$ A A H$ A H$ I$I$J/UUUUUU몪UUUUUUUU\ׄAAAAAAAA@$ @ @H$ A AAAAAAAAA@$ @$ A H$ AAAAAEi;I;I$HI;I;I$H$PBJ$I$I$I*PBI$I$I$I$I$I$I"i"uUUUU_UUUUUUꪪ;5B""""/A H$ A H$H$ AI$I$A H$ A H$ AA I$I$I$IA H$ A/_H$I$I$I$A H I H$ A H$ I$I$I$H$  A H$ A H$I$I'uUUUUU_ꪪUUUUUU_ꪪ        H A H$ A H         H H H$ A     "k]kI%UUUUUUPBTRI$I$I$UUUUUUPBUUI$I$I$IUUU>UUUUUU_UUUUUUUUW(r,r(r(r,r(uxH$ A H$  A H I$I$H$ A H$ A H H$ $I$I$I H$ A H$(v(vI$kHHI$Du I$I$I$IA A A H$ A H$ $I$I$I H$$ A H$ A H$I$M$I$EEYi$I$P$PUUUUUU_ꪪUUUUUUꪪUUWjDDDD_AAAAAAAA@$ @ @H$ A AAAAAAAAA@$ @$ A H$ AAAAAEֵTW$UUUUUUB RUI$I$I$IUUUUUUB UU$I$I$I%UUTު/UUUUUUꪪUUUUU_UU~($ A H$ A A H$$I$I$ A H$ A H$$ I$I$I$H$ A H$ j(((((((PB (UUPB (PB (PB (PAAAAAAAAAAAAABPXPPPu":ij(PB(PBa0M4M4MUUUT(PB (PBa0M4M4MU$I$EE/I$I;I;        H HA H A H$         H H H$ A H     M"i"i$IEi-HHI$Du(PBUUUUUPB (PB (PB (UVDDDDF2dM4M5UUUU (PT(PBa0M4M4MUUUUB (PB & iijK 0~ ~($ A H$ A A H$$I$I$ A H$ A H$$ I$I$I$H$ A H$ a+J4X,%(((((((PB (UUPB (PB (PB (PAAAAAAAAAAAAAB-iiiB *aB (L& M4M4UUUB (PB (L& M4M4t A]         H HA H A H$         H H H$ A H     ]]6 (PUUUU}UT(PB (PBꪡB (PB U(r(r,r,r(pPXPPP}4M4UUUUPB B (L& M4M4UUUT(PB (PBa0L&ii$I$(v(v_zҴI$(v(wA H$ A H$$ I I$I$I H$ A H$ A A H$I$I$I$A H$ A \t(v(vI$%uI5I"i"i$II(PB *PB (PPPPPPPPPPPPPPB (UUPB (PYaaDDDDG_x~"""""< ͙ǴM4UUUUPB 0B & iijB (PB & iijPQz}xh)HAAAAAAAA$ @$ $ A H$ AAAAAAAA$ @$ @$ A H$AAAAA[[*ouB (P(PB (PUUUUUPB (PB {ij(PBPB a0ii (PB (L& M4M4VKkx$ҭA H$ A H$H$ AI$I$A H$ A H$ AA I$I$I$IA H$ A&)vvPPPPPPPB (PB (PAAAAAAAAAAAAAB (PUUB (PBoNC9c9C9C9C8Du[(r(r,r,r(p)?}i (P (P0L&M4M4UUUU (PB (P0L&M4M4U@" X(($ @$ A H$UT(PB ((((((((($ @$ A H*PB (PPPPPPPPPH H$o^C4q vij(PB(PBa0M4M4MUUUT(PB (PBa0M4M4MU,rNܷ-rc9NSAx]u x^dA$I$I$I$ A H$ A H$A H$I$I$I$A H$ A H$ H$ I$@ؐeﴒ)HI%w@ﻶۚA<𠠠$ @H$ A UUUPB HA H$ UUUUUT(PAAAAA H W۰nۆ8l7m馚i (P(PBa0L&iiB (PB  a4M4M5U mS#$D| 63aۨ6[ b"""""A$I$I$I$ A$A$I$I$H$ I$I$I$ A$I$I$I$ A$I$!ȣG"Ew{]I$Wwv@{`$ @H$ A UUPB (P$ @H$ A B (PAAAAAAAAA H a%BP%BP#mŨ"=pDo[66mJA<m]i (P (P0L&M4M4UUUU (PB (P0L&M4M4U~qq!!(pDx6"#t] yZm$ $I$I$I H$ A H$ A A$I$I$I$ A H$ A H$A H$I$GWwCrc $nm.aAAA H H$ A%UUPB @$ A H$ *PB@$ A 7b#a۸m؈GM4M5UUUU (PT(PBa0M4M4MUUUUB (PB & iij߶ݶ] @G̏:.*sFg*eL2T2Tʙ^qFvmmhA I$I$I$ A H I$I$H$ I$I$I$ A I$I$I$ A I$I0$GIZ  WuB""-&ЛBm"m4fPx*A<_R H A H$ (PB  H A H$UT(PB ((((((((($ @$av F[ v?Womqi (P (P0L&M4M4UUUU (PB (P0L&M4M4U tNG4. ቄ&Ba &ba &C b"""""~oBI$I$I$H$  H$ A IA I$I$I$ A H$ A H$ H$I$I#A"H(tI;{ n=.YDA H H$ A%UUPB @$ A H$ *PB@$ A =ЍX}DDE!aݶ۶ǂ g7ij(PBPB a0ii (PB (L& M4M4Wv#6#"&G29# V{?G3)њ3Fkm6lr(Q퇈\?ʌ(I$I$I$IA I$I$I$I$ A$I$I$IA I$I$I$IA I$I$GGG;}IWЈޝ&G0ds#s#soi6@$ A H$ AUUB (PB@$ A H$  (PB HOl6 l6GEECn4"""""""""mmml6%A I$I$I$IA H A H$ H$ $I$I$I H$ A H$ A A$I$":mI CP"H$J@vûmmFG B@$ A H$ JUUUB  H A H$UUUUUUPB HA_mmaޜZse=m mm!sM4 AiiPB B & ih4 iiB (PB  a4M4 M5mՔ i.ݶmmPH H$ A H$ A I$I$I$I$ AA H$ A H$ I$I$I$H$  A mm*IM$IG< mmH`$ @H$ A UUPB (P$ @H$ A B (PAAAAAAAAA H mm!/M-nmmmih4iiaB *aB (L& M4 Aii (PB (PL& h4 M{mmoGIL+)rw mA A H$ A H$ A A$ A H$ H$H$ A H$ A H$ A H$ H$  A ":B""""#B"""""""""""""""MXPPPH H$ A IUUT*PB@$ A H$ J(P$ @H+MAiij(PBPB a0i AiiPB (PBa0M4MAMf9cr0arNaÖ9,sX9cr0aD,sX9cr0aÖ9,sXsg0aÖ99cr0aÖ9Ù9Ö9,sX9cr0QÖ9Ù9Ö9,sX9cr0aɎq9ܐsg0aAA H$ A H$ I I$I$I H$$ A H$ A H$I$I$I$A H H$ $I$I$L&# $H$I$I$I$$I I$I$I$I A$H$I$I$I$I A$H$I$I$,tI$H$I $I$I$HRIqA$H$Kࠠ$ @H$ A UUPB (P$ @H$ A B (PAAAAAAAAA H I I$IqA$II A$I$KA$II A$I$HRI$I A$H$I$I$I$I A$I$I$I$H$I $H$II$IM4 M4M4L(PBL(PB a0iAh4M4M0B (PB  a4MAi%IBJPsq:(IBJSg0⪪(IBJUIRUUR(꒤% (IRT%UUT%IBJP*J*Ja9;*JA A H$ A H$ A A$ A H$ H$H$ A H$ A H$ A H$ H$  A ":I$I$ d}A$II$I$I$H$ $H$I$I$I#A$I A$I$I$I$I $I $I$I$H$I H$I I$I$A) $I𠠠$ @H$ A UUUPB HA H$ UUUUUT(PAAAAA H WI $I$DE$I $I $I$I#I A$I A$I$I$I $ $H$I$I$I A$I A$I$I$I$ $H$ $H$HDE$I A/MAiij(PBPB a0i AiiPB (PBa0M4MAMt%H*ARsq=%UUT%IR TRJH*ART%UUIRT H*J*AR T%IUUU%IRTCswJAA H$ A H$ I I$I$I H$$ A H$ A H$I$I$I$A H H$ RI$!HL; dy I$I$I$I$I A $H$I$B) BI$I$I$I$I A$I$I$) B) I$I$I$IqI$A$II#?AA H H$ A B (PAAAAAAAAA H H$ AUUB (PB@$ A'H$Häa0a!H I $I$I$) A$H$I Häa0t:A)H$I$I$I$I $A$I:F#Häa!H I $B""I$ $ih4iiaB *aB (L& M4 Aii (PB (PL& h4 MiRTI$D8㊥IRTI$JIRTI$Ji%IRI$I*JIRTI$JiiiRT$D8iA A H$ A H$ A A$ A H$ H$H$ A H$ A H$ A H$ H$  A ":I$I$ dvA$II$I$I$I  A$I$I$I$H$I $g $I$I$I A$H$I I$I$I$ $H$I $I$I$)$8 A$H%𠠠$ @H$ A UUUPB HA H$ UUUUUT(PAAAAA H WA$I$0")$I A$I$I$I$ $H$I $I$I$I A $H$I$I$I$I A$I$I$I$H$I $H$II$I4h4 iiB * (PL& ih4ii (PB (L& M4h4 4֒% (IL98RUUUIRT$% *JJ*J$%IRTUU%IRP$*JJ% (IRT%UUT%IBJw0T%U_  A H$ A H$ $ $I$I$A H H$ A H$ A I$I$I$ A A H$TI$I$a0LH$I I$I$I$II A$I$I$I$ $H$ $I$I$I$A$IA$II$I$I$H$I$H$I$I$I I IA$(($ @$ A H$UT(PB ((((((((($ @$ A H*PB (PPPPPPPPPH H$ A$I$I A$I A$I$I$a A$I A$I$I$I$ $I$H$I$I$I$A$IA$II$I$I$H$I$H$I$I$A$_iAiii (P (P0L&M4h4 ii(PB (PBa0L&ih4 5T H"198UURT%H*AR *AR T%IUURT%H*AR **JT%IRUUUIRT Ҥ*  A H$ A H$  H$ A IA A H$ A H$ A H$ A H$A H H$ RI$!HL; dy I$I$I$I$I A $H$I$B) BI$I$I$I$I A$I$I$) B) I$I$I$IqI$A$II#?‚@$ A H$ JUUUB  H A H$UUUUUUPB HA] A#Hä""H R $H$I$I$I A$H$I Häa0t:A!)H$I$I$I$I $A$I:F#Häa!H I $B""I$ $馃Ah4M4M5 (PT(PBa0M4MAM4M4(PB (PBa0L&iAi*I$I"csqRҤ*I$I%IU---*JI$T%KҤ*I$I%IRT*JI$IRT---*JHT-/AA H$ A H$ I I$I$I H$$ A H$ A H$I$I$I$A H H$ $I$I$L&# $H$I$I$I$IX$I $I$I$I A$H$H$I$I$I$I A$I$I$I$H$I $H$I$I$㤂II ]UUUUWUUUUUU_ (IRT#L&URT% (IBJ**JP%IRUUUHҤ% (IRT%UUT%IBJP*J*J$%IL?# I$I$I$H$ IA H$ AA I$I$I$ A H$ A H$  I$I$I$H$IXL&#I$I$I$H$I$H*A$I$I$I $I $I$I$I$I A$I A$I$I$I $I $I$I$I$I A0M A$I$$$ A H$ A H$$A H$ A$  A H$ A H$ A H$ A IA A H$GTI$I$a0LH$I I$I$I$I $I $I$I$H$I I $I$I$I$I A$I A$I$I$I $I $I$I$BH @ A$I (TI$I$I$UUB (I$I$I$IUUUUUUUUB $I$%IRAa0j*AR T%IUP%IRT *JI*JT%IRUUUIRT H*J*AR TURTꪪB * (PB B (PB (PUUUUUSI$I a29I$I$I$ $H$I $I$I$I A$H$I I$I$I$I A$I$I$I$H$I $H$I$I$I$H L&I $_$ A H$ A H$II$I$IA A H$ A H$ A$I$I$I$ AA H$I$) BaL&#RI$I$I$I$I $A$II$HR!HRI$I$I$I$I A$H$I$I$!HR!I$I$I$I#)$8$I $gUUUUUWUUUUUꪪUUUIt:F a0BB)$I$*J%IRI$It:F$I!HRI$IRT---*JI$0t:I$) I$I*KIWA I$I$I$ A I H$ A H H$I$I$I$A H$ A H$ A A I$I$$I$I$L&#y:EcI$ $H$I $I$I$I$I$#:Ft,t$I$I A$H$I$I$I$I$I$3X:EI$H$Aa4) $I}AA H$ A H$ AH$ A H$A A H$ A H$ A H$ A H$ H$H$ @I$I$L& I $I$I$I$A$II A$I$I$I$H$I $I$I$I$A$II A$I$I$I$H$I $I$I$HRIqA$H$KBI$I$I$IUUT*PBI$I$I$UUUUUUUT(PBI$I/$*J& **J$%IRTUURT% (IBJ*(IBJT%IUUU%IRP$*JJ% (IRS*@UUUUUUUB (U (PB UUUUUUUUB (PB (PBI A$Ja0H$I$I$I A$I A$I$I$I$ $H$ $H$$I$I$I $I $I$I$H$I H$I I$I$I$I i $I$$ A H$ A H$II$I$IA A H$ A H$ A$I$I$I$ AA H$$I$I$a0A$I A$I$I$I $I $I$I$I$I A$A$I$I$I$ $H$ $H$I$I$I A$I A$I$I$HRIH$ $]UUUUWUUUUUU_T*H L&RT%H*AR **JT%IRUUUT%H*AR **JT%IRUUUIRT H*Jꪩ*K I$I$I$IA H$H$ A H$H$ $I$I$I H$ A H$ A A H$I$NI$ $H& I$I$I$H$I $H$I$I$I$I A$I$I$I$ $H$I $I$I$I A$H$I I$I$I$ a0 $H$I}AA H$ A H$ AH$ A H$A A H$ A H$ A H$ A H$ H$H$ @)$B&a2<$I$I$I$I$I A$H$I$I$!HR!8$I$I$I$I A$H$I I$I B) BI$I$I$FRIqI A$HBI$I$I$UUUUT(PBI$I$I$J(P$I$I$0t:Aa0$!HRI$IRT---*JI$0t:I$) I$I*JIRTI$F#I$!I$I%I*UUUUUUUT(PBPB (PUUUUUUUUT(PB (PB *tI$I$a0LEX:uUUT%IBJP*JI$I$I3gI"HI$I $A$II$I$I$I$HΑ#:EcX$I$IL&BI I$ A H$ A H$ AI$I$A H$H$ A H$ A I$I$I$IA A H$ *I$I$I0L&Ga$H!I$I$ $H$ $I$I$I$A$II A$I$I$I$H$I $I$I$HRIqA$H$KUUUUUU_UUUUUUUUW$*J& **IBJ*J$%IRTUURT% (IBJ**JP%0ꪪb:$ $I$I$I H$  A H$  A$I$I$I$ A H$ A H$$ I$I$H$I L&G $I A$I A$I$I$I$I $I $I$I$H$I H$I I$I$I$I i $I$=A A H$ A H$ A H$ A H$A H H$ A H$ A H$ A H$ H$$ A DuI$I$I& $EI$I$I A$F $I$I$I$I A$I A$I$I$I $I $I$I$BH @ A$I QPBI$I$I$UUUUT(PBI$I$I$J(P$I$ *J& #TU IRTUUcIRT *JJH*ART%UUT%IR TA (P(PB * (PB (PBUUUUUNI$ $H& I$$I A$H$I I$I$I$I A$I$I$I$H$I $H$I$I$I$H L&I $]q|PH H$ A H$ A I$I$I$I$ AA H$ A H$ I$I$I$H$  A I$) a0L!I(i$B) BI$I$I$I$I A$I$I$) B) I$I$I$IqI$A$II#?ꪪUUUUUꪪUUUUUUI$:F#A0L!I!I$Häa0$) I$I*JIRTI$F#I$!I$I%I* I$I$I$H$ IA H$ AA I$I$I$ A H$ A H$  I$I$$I$I$a0ȱI$I$I$gHΑ:EcI$ $H$I $I$I$I$I$#:Ft"HI$I L& A$I/<=uU (PB B (PB (PAAAAAAAAAAAAAB (PUUB (PD~*J")(IuIRUUUIRT8IBJT%IUUU%IRP$*JJ% (IRT%Ua0!T% (KAH$ A H(PBA*I$I   A H$  *I$I$  $ A*I H$I 98㤒I*A$I A$I$Ii$I A$I A$I$I$I$ $H$ $H$I$I$I A$I 0&#y$I$@]UUUUUUUT(PBPB (PUUUUUUUUT(PB (PB *qI$ $H$& I$U#FI A$I A$I$I$H$I H$I I$I$I$I $I $I$I$H$H L&I A$K^(PB ((PB (UUPB (PB (PUUB (^Di*AHiJJT%IRUUUIRT H*J*AR T%IUS T 8 (PB  a4M4 (PB (PL&M4M4UUUUPB (PBTI $H$XqI$ $A$II$I$I$H$I $I$I$I$A$II A$I$I$I$H$Ia0#I$I$i*#h I$I$I$H$ A$A H$ A A I$I$I$IA H$ A H$  A$I$tI$I A0L&G4I%I$I $A$ItI$I$I$H$I $I$I$I$A$II A$I$I$I$Aa4H$I$͠PB (PPPPPPPPPPU (PBUU (PB (PB (PB#T--,ÈI%E] IRT*KI$I%IRT*JI$IRT---*JI$T%KI`$GDp A H$ AB UUB U$I$IAA A H$(PUUUURI$I$AAA H$ U R!HÜsqfv^06( q \FIA A)) B"($I $H$I$I$I$I R!HR!HRH$I3LI$I%PB B (PBPB (PB (UUUUUT$I$I$a0ȱa~I$I$HΑ#9t"I$I$H$I $I$I$I$I$I#:Ft:EcI$ $A0M A$I$_B (PB (PB (PB (PB *PB JJ\?q2Ǣ,-RTUURT $*JJ% (IRT%UUT%IBJP*Ja0B*JP(PB (L& M4L*j(PB (PBa0M4M4MUUUUB (PB h$I$H$FsqI$ЭIA$II$I$I $I $I$I$I$I A$I A$I$I$I $Ia0#$I$G$ $I$I$I H$  A H$  A$I$I$I$ A H$ A H$$ I$I$H$I L&G $I$A$IA$HäI$I$I $I $I$I$I$I A$I A$I$I$I  $H$I~B (PAAAAAAAAAAT(PB UT(PB ((((((((((((((PB *PB *JDF*J*J IRTUURT%H*AR **JT%IRUTa0B4%H*A|  H$ A PBUUPUI$I$AAAA H$  (UUUUTI$I$AAH$ UI A$Eq9I/kA$H$I I$I$I$ $H$I $I$I$I A$H$I I$I$I$ $H$I0L$I$_ (P(PB * (PB (PBUUUUUNI$ $H& I$ _d{kI$I $A$II$I$I$I A$H$I$I$I$I $A$II$I$I$I I A$KPB (PPPPPPPPPPPPB (PUUB (PB (PBUU (PqT--,ÈI%?JIRTI$JiiiRT$I$*ZZZT%I$I$*J %IRI$… (PB a0iiMUUUUB (PB (L& iiPB (P* $A)B8) õI !H !HR!A$II A$I$I$I$H$IBA B) BA$H$d|I$I/A$I$I$I$ A A H$ A A H$I$I$I$A H$ A H$ AA I$I:I$I$I0L&G",tGΨDC 0B#3I$I$I$gHΑ"H,tI$A$II A$I$I$I$I$3gHΑcX:I$I A ФH$I%U (PB B (PB (PAAAAAAAAAAAAAB (PUUB (PD~*J")(Ib"8%IUUU%IRP$*JJ% (IRT%UUT%IBJP*Ja0B*JP A H$  (UUU%TI$I$AAH$ A PBUUUUI$I$AAAA H%Z $I $8tI% $I $I$I$I$I A$I A$I$I$I $I $I$I$I$I A$Iv G#|98sw)r)pA0LB a0L& ̏>G#wI$H$A H$ L!L& a0La0L&  ݄a0L& """"#q98rܧ)rL&#Ђa0L& d|>G#|RI$I $ &v a0L&L& a2=""""""a2;L& a285y8sq9)r)a2=& a0L&G#|>G$I$H! $ &v a0L&L& a2=""""""a2;L& aA98sw(sNS9N& A0L& ds#|>G#I$A$H$ &v a0L&Ga0L& dxAq ݄a0L&XB"""#)98sw-r)pA0LB a0L&##|>G)$I$8ᄂA H a0a0L& a0L& dxqDDDDDDDDEoִA*KTfE^ִKK־W_#ȐR8ǢȜ)r.^OR o/va ÿ⷏+^7 !`#+dѢ"U{nbhu҃^^w|C勵KE+AR|B  endstream endobj 8 0 obj 78183 endobj 9 0 obj << /Type /Page /Parent 3 0 R /MediaBox [0.0000 0.0000 612.0000 792.0000] /Contents 10 0 R /Resources << /XObject << /Im2 12 0 R >> /ProcSet [ /ImageB ] >> >> endobj 10 0 obj << /Length 11 0 R >> stream q 614.4000 0.0000 0.0000 792.0000 -1.2000 0.0000 cm /Im2 Do Q endstream endobj 11 0 obj 63 endobj 12 0 obj << /Length 13 0 R /Type /XObject /Subtype /Image /Name /Im2 /Width 2560 /Height 3300 /BitsPerComponent 1 /ColorSpace /DeviceGray /Filter /CCITTFaxDecode /DecodeParms << /K -1 /Columns 2560 /Rows 3300>> >> stream 43ȉa*3̠;p(AB š0*AT 0AEL*A&bv*M%m6Ei i$<6-:I.m0*/6>w0t*?#/*EүԎ_8wZI},ґp_ iVKcKm/h7.}-KuuKKћI|[~CZozMt%oVkuk[JWV봂KaJI m PObH1NA(JKu C x0@F""8#%I(H% #Z`a2wm>5}$ k #aI&fo_]b_Y} .aOipKm+KY:K*FTYHU6FKL& b#). X0Q&?l Q&܋Y g ^A[h))~B_'U BjEM'om iܣK u붗M %  ih2!k"""6m+h(e(Ҕ_'3\xCAJs)l FdC3VDdvRh(<FHpA45I0PgMIX$%HVIUIN:7n?oz=Htz kb.-.z[ǭ*U]]WUUK}ۯ%ׯ)uMRH4u-oR *kZ@MV_W`IjꛤAߪ]_ӿ~ WTmR_UWIR_T_v4/K zO^_i}R]zZZ}%Zҿ#+~Ik֤7h_$qJ{VVJZ]%hUk7Nkk z~I&!n i0lP A!"""""8m+h(em)D(&WGiJM0 E FdC3Se&#`˰4F0@ $SM&ma[=l n OntI.$mmm%vPZKK%]-n/~=u_k^[[R"},$UJ_*^p]o i% ֒RKK_[~I.׽}/ҭ--u~u륥}$KH==]=}t?:GI^Oo]^CT$;BmnVK 6*Zi6Ib <bbd΃QDDD{i~VҶ2?MP#A ɔCVP 0KM, 0DMH:Aޔ~6߫I۫ _4?E7K_P_#7#Em֝4Z_i!J]خ % a5*&"P6"""#m/JVҶQB-!M)7$0k+C$8!&fudEE LdGg\eAPQ Aal/| |0FƘ24cJ|#@ja VrpcLvA Om4 $SZMITl+aAi}'Vhյl i:=HOFN{i:n.KKI[b턝.j.Pu:ֶ..U-m.K뮕zic~/믪몮]o=]WUtUdBjI}/_5TKK }t M|A}=)4վk㓄Ba-$IRZnKYZIC~m}j֖KKZۯ^o$UUuIUZ_T]/K]}U-Rz/tZUIik_sZ֯._]-R+T]$]$]$F맯Im ??I#:GIZ]WI#M4M4M4M7$> vZ'ko]!P &a/ai%m&m*TH մAI [I,% 0a&iii&NBzBP@Փ8'u B"N A2g""""""""""""""#"#m/V [A 2?K;RGiHcjgFKO̧ft0՝ 3V "H,g ^1FH2(j# &C Fa VrpcLva1%>IAMI4S{i6i64 AZ{iI"&uAGalzzm$kt解[E=[GMVհG:=AiK]$ml^tKKI.J.PַZغkiU IzIW_|}%]t_ic~/뮺UIj^[5U]i/^UUU KMUtUdD*)' U%_~a$8j. 6? MP8㓄VJ[ZJ&5 %6i*JUKm/KZkz&nzUU]RU$UUuIRU_UItIwRR_u֕ik^]iV-uR-uuI$K֑zT뤒I%t}#QӫZ]WI#GIuN>WVZ'ko]!H}ui%IIRXմAI [I,$i6iR6Y0!( j` 1l B81BVOBzJQDDDpqiJaZΎҔ$|uΆTe6RL#@aBa 3I4 Mn5tSѭӢ$ml^[u꿮}/??~=n-__H=tI^3޺k[I4Amu B"\DDD{i~VҶ2?&(PCe7 d\+XFSK;{#ч >A6'=a7߄^I7Ɲ']zC>3q>3NENe ɠFL#@aa@u~EJvOᓞp:6蘭IIuIxMK{ }zixcI}z?۾E]׶ym^yn {g(uKJҷu ҵi].!'d' d'iY |SiiH0[(p a 40 @A8KҶP?(C1 C00C^h r(\d@pbS B8l>3 le>n7C,ႛ˙= `0A2);M$[nmjIOo}oL4woӤqIv?(mnqooz'[ammIooKoaO?[n!SSN߆?m/K7R}j+?~OE浥t[&ҴI[K_ߺv~Ai6׮\0M4$5&H0L0OMRMӆP&XaC7 ! ADBC7U9b2(Vvɺ5KђVH2g #Hg\IX(^B5<#a =#$jnm&6l*=V+ .wZu[G!6~l: MӇI?oo[W/_[.~ImѬ͙4˳<]]adDԔm$ҿ*CL0Fv L# KħaN1)LJvaP%CI&n'a:M҆ ~nIii$ ֡--/0p$!]xGoVIzom/ K~دK֗W]osZRKI-$zޛK_Km&qRItgiZ(ZuKm- PhV6 $[[[՗VdNv ! A(b "AL aa6 &. 0l2&ADDDDDDDDDDDEOI(iDY &o;2 Y,qnBa!C: #6tffc!AFvIM#Hd6t0EBFrH:N F5cPx B-pg=#@k?(Fƃ Vm+JJ„MAaHuMҴqqqq Z=pV-=:>: & UMӣ߇J8ַIkuuWT_}_]_~;Ό]u_[ $m/[[@r͑˳B42:˳>r~Kѝ34gh=0 /3:o_7q)M)K7 AA N'&__oooE;I/$?I XVw|#wG{==i=~Nׄ_IzO_K]]~K]}/m/뿺ZoK8ҤKOOK">4}Fh>}ozKzF}]I*m&Wۭ#>˭.4M4M4M4oHSi6 %A MZvZM 'a [ao0մm+!!0i! 0ff 0a` % B B` ] eAe"9L iiiib B """""""""""""""""""""""""""""#k)k̆48Ak9nmmT|_ե@m+Ά7 7 )iwPKޗ__Rhn* &A= @qddS;-  f 9:ddQ| ll@@@3'3 C2H! F0<ƃT#Yī0ca_a F< F0Ҵ&JPMQ(]VM;p {o Wi]=:MNnyC8tMӤh&A7N=?[(|kq}Wu_}~_iWHz]uuiW_[[oүKomoг`r03l2Knmo_RZ^K睦i*-J*_u:oKIw 0_kMO)nZ_ &~c+nnK^>_턽_ &CKCi?_&APZ_$!KOOI$O$t[KI'Z^f{%iko{/KK]oﾓI=%_$3GfGњ>-'vtkj__馚iii$g m&-m-;Цm M6ҿw]-m$)4)m*!!AK &0 !!ACaa0M4M4M4AAAbAAQ̐d1xa~a1n{zmmM'[돾*ti^Ά 7p So[[޾믮oR I7Gf+Z &AMda4bDDGr[;Zl&d6uzG$ y(2*H:dX,-##kM̆Ι 3eH2A 3;CH$h0ƃA zxAƨ0 %J£Ҵ{hm z=*=9TtMNm6nA7IMӇA7oo'.8_G ^$3BdI_H*ARi<0w]zo/PoI_IA~_7%$Ma$)Kt$d~uTG}'$KKI$z%K$Ko߯z-.~uzI$$z_kgIIZF}h6 m+BBHR $+N BJФl8a&Ұ:! R BUds9 w! B 1 a˸&ȷvllFl̟(2#H4!r B AƫơP~-#akG]+ AQm$„m+ 9 A&êTA鵹àA7Ni?[c^/KJUwu~[/m./[w.a*%~A6/r#<0 3 3Z_ه i4tI&_  ޗ6pI_)I~CzO0C !iECפz=?Kk]߫5ٚE=/uokߥ'zҴ#>]4uJii" m+ҶҴMvZWV]XC@ B`&A !6 a0eMn,|Gj~M̆ΙOf d<ђ Ȫ#34!r A0@j@h0(@a#a1 Z=*Z=TZaRoGVt*th%6 pCJPm?[׋.үiuzoK/5yvKDMIOI~(*afNg_Kޓ}/$m?/NKߤKKKI%_?KKd_סzzGI$_K\z"֯-s]fkK}_BK=zOI~%zI$}R3Hm.J_KHϵ/.Si_[i m-;- m+u}CbA P A &L6vj"""""""""""""""?MőwDe6Nll(3̆2Ȫ#;$#Hg\2*FR`$rL>d1Aa11 BcT#eB7 F4ea B5aakJ=*VRF4ah  Z= zA6nn:>9 z{uIMӇGO&6FMoo'm=/o}]ozﯸS׸/*GFGD{QkJzum-mҿG_,Z JCKRMcI&i) }/0~oIOJ) 6oM᷇&oŰI~އzXahiR-}ͧ6ot=%NI={ITTK_UPo~OI.WOZH}>}3Gf-/K_JkR3*>>W3ruMǶiiiii}FMn3SiZ % A )a 5m$)BMAI b 4dg0 0A@`"Miiiii A!(B`dg?DDDDDDDDDDDDDDDDDDDDDDDDDDG(RS2AƑk{*鵴zu_(|__WVI :]pp߯ KvZ]7wKBV/RI< &A2t T(@9@g6)le yl. B8l: qEGN28g02(e|e e0Sqs'x |0a6Y7wAݷv;m;}nUAvzwm'I[[0 ']z~ӤI^qIv?+?Cgku3;5O:oo=koc/׿mmk~߮߰( ?AGm ooKo7hsSm jv7OK7w~i?V$'~޶:-'5/߿ziZM^߭}'ҵm-~[z~Ai6׮6I6 $iIjL0aa   ! 7A a 01 x a 9V*""""""""""""""#-!ԛ B8s% }̫c'4dQd6CfeaA1k8:Ǯ@8maj+L.&l NSi6~TiUWWKuݥ֎;mhZ__K̐u7هao){_e)i[a&[P!_+=:ZI]_Onu~i%պUI&&mV [iiaMaAbdˆxbA $`""""""""#Hu&PlFF2A8sPdQGlp #@a c  F0Zp=+$ZHGh{iZV_t*znyoA6 ztukit~/ubH.Kz/ z#U0_ ߄~7a_~$b'x[OO__WU}Rm:z+I$F}iZIZBHI]#?Hϵm-hSi6i6 &TH4Э m&m+ 110aL1 dt#VAJ8-!ԛxM$tUU‡E]&ìq\ޞ%Cvm{oxV=V}W֕kHlP0޴_nq_;zMNkI?ixi|5Wױ]LSa2:Ҧ)[vaġ4FᦚiIA: &1 4aAL 0"""*"""""":Md^  endstream endobj 13 0 obj 11923 endobj 14 0 obj << /Type /Page /Parent 3 0 R /MediaBox [0.0000 0.0000 612.0000 792.0000] /Contents 15 0 R /Resources << /XObject << /Im3 17 0 R >> /ProcSet [ /ImageB ] >> >> endobj 15 0 obj << /Length 16 0 R >> stream q 614.4000 0.0000 0.0000 792.0000 -1.2000 0.0000 cm /Im3 Do Q endstream endobj 16 0 obj 63 endobj 17 0 obj << /Length 18 0 R /Type /XObject /Subtype /Image /Name /Im3 /Width 2560 /Height 3300 /BitsPerComponent 1 /ColorSpace /DeviceGray /Filter /CCITTFaxDecode /DecodeParms << /K -1 /Columns 2560 /Rows 3300>> >> stream qJL2@ l@k`3aA|)hQvw }__R2,2dB KT,6 )1d 2j"\0 @8i 0UARm0\ m6BcOM$V pO)RdPpI$Otc@!0hoČ$ % d|VҎfIY&[P]5 ȸf AaB 0Ș/JIyx^?DDp0Jt 4\0 "x7 v]tbzM{"i6[AsAWV~I'>an& &M*N}AWIU}nӅ/]^/a'}=?64ƶH} ba/E ߵ}_@__:ӭ_*+?\/0Bߛ2fЇ_!z_c '0@ÿ܇^nUozhM?]ȗ},I|7^?&H8IdcT :oWæooȀ]nH:uuOzJDA"1I$/o_K_u__"߿K7u_u^$꾿KK ]+}/H%^G___ƌ#Ԏ$/H"BjwDKKzwv?/ҷK/'zzTNuVAH/__4+zHWHVN>=KϴI^ܝ9:'GA?K׶uk_kk}$-//WizkjVi6}%l0KmOZZ^M]i]vi[i$V!5i6iij+KI^0֩KzA*aB 4aX-[[I44Nm1Pa$KbA TMa0A FI1 SP {L4 C`aOl Bu4 'bXY600 aaBL0 TB!B!! e < """""#:VU$K$ W`LM]GM~f{V. RTTGwx J8~ߵ#EڂP\mK4,\:M*qAe0"#77}+ꖩ8OM*R+V*K jA:lP$ԵIʚa1T  ũCAщECmBi" "1)-#UM4ZFaB & x HB!6SeoEz15^Oz@0D~Hr1քhE(r1wC+iDEj Lr1֙8MM5p¶TQaÑF<0"""TҡYcMm,VRԵLRl_#Ag@ Iom+ (sFo0D~COBHiU^GKGXjduI.ЏT?k^^-x Ic]ƶbK|ȃ2DJC0(x" "I"$ N}P}Rm馛(rEō&Ma ^ r1cZM8m44Yh"ii[CG;.Ӹt% SP@[G_U5]Pc">_\]'*v5mcU/T":RMPoZQ-3#">T0i-ȆD2>=QdF";*%> 0D A&C[ &GI]2>vGJ٦A&MRVҲe)ժih4-]"XA6AH%h\\^^#y#:MA"8m,ZrBػ54u+*-M4OT RlmtDcHiXQ! 8!Fޗ#kx"<":W#[G5]u5OT"@ou 5P@T":}? B$-;MI}A[#Um [G[X"?DzX bUI6A[#$ݠ@ڪX]0YjJow`h/лTW RImU*enFJWD~%4( ]%L5T4%:Hi+Mn#[URK"ƻ (}R_#$Iuh tzm!v0`MATTVհҵM4馄RB)l&/ThEA DsFt}z&9Dx0A8H#"pD~""""""""ӈA>>>=w`aaD~Xm^LD|X">v'w AZ o1qq|^kd~#q]8V0@+J#-+fv":6 mvS#vOzn޶ޫ[V_GPD}zzmjPm+O|oƟzv귔:t[[mmR }=[uwiүdtݮ7؃}{#0Dq#PC(j\^Z:PC#švDCO_?\w#("? iS UEJcO(?xн${#V> t/Um]S[+c#D~0x">WXGdApItݺe !IItZ`-Ԯ44- Ža$ 㕅GOۄ^q‡pDu!V5Y=!]v[[#q{vBZvч Pw`_kwTI8T%l%#MSH% [ khSV|0#B#qҿi'ޒzh%##GJ:^8tGPDv+aޚz骤j#%:LR5mUX㻸UV/">h*oT= CTmAIl%[IS &HmkzHmw Ȏ28#28 Gdq GdqGdqGdqGdqGdqGdqGdqi[-̅] 馚iiiiiiiiiit֡A8d*iiiiiiiiii=TKCb*Q""""""""""""""""""""#T)R_ ) PB#rI'%2?NH$ '$sI9$䓒J $-дa!hj[wwza-U$`!niӲ?duj`)U0J`L$%0I:L%0J`%[M4 SB)iFzhE1PE 90@"?8"?8"?8"?8"?8#"?8"?8s>>acEF8"> (CON =8$$ON =8ӂM8$ӂON =;}6ڂ(pC6mA8Ckh!P "iZ(pC(pC6!P "ߎ868"888]%DtG뮤]u&ﮦ}u] PU GhhZhhjRkwdt 0@ۻN5۽+P>q>q>P8c(||>"Yꪆ^[ t0ņaS qaTÕ ņaS §N,3 aT0ņaS §"W[:: [MmAmmAmmAmoJqqqqqqqwߵaG#=v'\zt]6G%UUUU[#UU[IA>NI9$䓒NI9$NrIʼn'OjiNGW0B >>;I4Aj`)S L%ML%0J`)ݶaqjv@"##,vD~qD~qD~qD~qD~qD~qD~qD~q|||||A("?s%a BhvzpI'zpI'zpI'zwTq>P8C|>q>PU #epӋ §N,3 Xf8*qaT0ņ0ņaS §N,3 X`uIP#AmmAmmAmmAӴ8888888I<"?AC-N......- )5P=UUUU5UUmS#[{!NI9$䓒NI9#d2*rI'$*ЭB#L??PBSNM ?dtGV L%0J`)S+S L%0V(ucظ?CCl":DuGGGGGG%[Qi'zpI'zzi'zpI޶PEڂ(pC6!P "mA8Ckh!PmA8CjPEڂ(pCA:ݍ8888888㏤+pD~뮺뮺]uH%^`+ivGWwvin;lYg+O؟GQFFF=Kp+ b㏻n)PoGqqGd{J8N4NN4NPI:AD"RD"!(uiŒУ[[ 3BjU:w!ﻻ$8VzޞzzjiG5LDDlDFG58HM8bD__g\[DDTe<2 a,r1#;%^%^%!ļKЁaGH#pQ#4ӘMUUSU =4L!r Ši92:>GB!vUTU`vGB6hi)oiA|q)Gww}B'B"38w:s̎#1#rP,r1;1TO&hFjCBQICDB"YtB"+#LgͰ;0Q(܉Af aG">yǿCP 6.v$մ J T*""*"#j`S ŧ^>:/ G"?8"?8 X"5#q#28#28#28#28#28#28#&GdqGdqGdqGdqG(B""""""""""""""""""""".8!bظШ"""""""""""""""""""""!r1#r1#r1#r1#r1#r1#r1#r1#r1#r1#r1#GDu(r1#r1#l {#O GdqGdqX!1#r1#r1#r1#r1#r1#r1#r1#r1#r1#r1#~iiiiiiiiiii4""M4M?4M4B ЋM4M4M4M4M4M4M4M4M4M4M4qG #8#T8 ii"""#jɌ Hdutfb|'O1>dv'O1>b|%0J`(ML%0J`)S)SiƜT)UL%0J`G`)S L%0K"`)S ////##GGGGGGGGGGrª########t>>>>>>a'zpI'zpI'zpI''z 8$ӂON =8$UUUUA'zpI'>zpI'zpI'm'zpI'!P "mA8CjAC6!P "mA8CjBڂ(pC6G]"mA8CjPEڂ(p "mA8CjPEQ(pC6!P "mA8CjPEڂ(pP "mA8CjPEڂ(pQqq0888㉇qQqq"""0qqp8888888]uMu]u]]u]t]uC]u]t>뮺} CCCCCCB7cCCCCJNDB"D"!!:Qwwwmwwkwwwwqwwqݥwwwg+q>PP8Cy8C(|xUUUUC(|>q>PB|>q>P8C(|㡔>q>P8C(|n,3 Xf8*qaTçN,3 Xf8*qaT0ņj,3 Xf8dt0ņaS §N,3 Cꪪ ņaS §N,3 XvG]Ӌ §N,3 Xf8*qaT0ņaU*qaT0ņaS §NmmAmmAmmAcxѝ6ڃkj wwwwq(x6ڃkj 6ڃkj 6ڃkj 6`ڃkj 6ڃkk88qqqqqqq"""#qqA888?888COP'\GqqqqqtB"D"!EZN.....7UPUUVOjݪqBx HeO!q>P8C(||>q>P8C<8C(|xUUUUC(|>q>PC>P8C(||>q>P8C(||}*qaT0ņaS §N,3 Xf8*qaT0ņaS ¦ *qmaS §N,3 Xf8"UUUXA §N,3 Xf8쎮Xf8*qaT0ņaS §N,3 Xf8*qaT0ņaS §\`ڃkj 6ڃkj 6ڃkj 6ڱ;Fvڃkj 6ڃkj 6j 6ڃkj 6ڃkj 6ڃkj 6888888;?88>>>>>>>>>>>>>a'zpI'zpI'zpI'zZpI'zpION =8$ӂOOON =8$ӂON =8$ӂON =8$ӂON =8%xCjPEڂ(pC6!P "mA8CjPEڂ(pC6!P 5P "mA8CjPEwww|!P "mA8Cj^0Eڂ(pC6!P "mA8CjPEڂ(pC6!P "mA8W888888Ac88788G\qqqqqqq~뮺뮺뮺뮺鮺뮇뮺뮺뮺} ty'D"!DB"Vt44444444444444/[[+v""""""""""""""""""""}5dqGDFGdtDdqGZ; D~i4G]44CM 44=8$ӂO)'~hihh]#&"ZduiզGVZdumA8CjPEÄ6!P "^#L2:#L JHMH"NuDB$&88@85DB$'P:E0Jx9GDFGdtDdqGDFGW]u]udtDdqGDFGdtDdqWTCM 44C(t445SCM 44CM<":DMUGVZduiզGV wwCBZduiզGVZduiӋ"NuDB$'Bg+=3g"NuDB$$$fdtDdqGDFGdtDdqBJ!GDFGdtDdqGDFG4#M 44CM 4=UU 44CM 44_I2:#L2:DNVNVN[uDwddd8쎭2:#L2:5UDB$'P:I$'P:I"Nu } 8###2:"28#1>P8Cr8C(|dtDdqGDFGdtDdsTCM 44C(t0ņaS §B#,3 Xf8*qt4CM 44#uE!3aUGVZduiզGV j 6ۨ6ڃkkVGVZduiզGVZ(y3`:l]mn;M4F9I"NuDB$(qqqwuDB$'P:d#4Ml%^g\2:"28###2:"288GDFGdtDdqGDC!dmƸ">cF9cF;#hi^qqܽ"M 44CM 44`#28#28e;ii:#L2:(zҪZduiզGVZdt $M4Ј/%mR3Ik'P:I"Nu 'Bx B$'P:I"NxHvi#F""Bjq###2:"28?]p###2:"28#똂#vGtCM 44wxDtwwzhicGaDQt'6aVZduiզGVS h\[u0J`-ZduiզGVZdt L 8[NiDB$'P:GIquDB$'3LVRG]XiD":"28GDFGdtDdq>>>ǦD~qD~qD~qD~8###2:"28ei4GdrhizpIa觧zpIhii DcNGUΩ&#9ZduiՠC6!PM70 "mA8Cj#L2:hVC J &hId4,IbqqGLqqƢĘ& IiiE\D&*N8Dtk'":pq#뮸ۮpq#":"8Dui((y Ä) 4 r1CM 43ӰDvCCUM 44BÑL"hp@ (&GV]4aZduiզGT6wVZduiզG@VGV8$'PquDM3gdu 3g$'P:IB$'}8###dtDdqGLB 8###2:%y2:44'hi꫄GA8}UtCM 4M 45{L2:PvZduiԉ e # qZduiզduiV"NuP"Nu}KDB$'P$dqGDFGQL2:"28#1>P8C .XC(||FGdtDdq"28#CM 42N,3 Xf8*qa c,3 Xf8*qhiC}ZduiզGBݦGVZdt-6ڃkkCM4cummj#L2:#M?quD$'P:88AqDB$'SBNufdtDdqGNQGDFGduLj1 !GDFGdtGDFGOM 44hi^qq2c/HCM 44CM^#L2:2:#UqpiUV#L2:#JuD$'PLF8ʼn1 M4$ 1L@#":pq "$J>q>P8C(|p sN8Du8GWCM 44КdqGN,3 Xf8D}Xf8*qaTTИdqGduM 44C2:#L2:M4`ummj 4B6ZduiզGODB$'P:jGZqհJq`dqiuDB$>GdtDdqGDFG ůp㑎F9cF9 M 44CM ^#L2:#L4M4ӮJM4I%iզGVZduiV"NuDB$&ER'9 M4B DB$'P:I"/###2:"28###hGȌ2:"28###2:"28hihi#wwzhi}ZduiզGVZduiк%0J`L%0KVZduiզGVZhDB$'P:Idtdw'P:I"NufdtDdqGDFGdtDdqpD~qD~qD~qD~<#>>>":"28###2:"28zhihizpI'&IG@GKӂON = 44CM 442:#L2:ڂ(pC6!ɷ*&A3ڂ(pC6!l2:#L2:'P:I"Nuqq#GF4X8 :I"NuDB#2:"28###2:1{,-uP###2:"28###hiPhhj7PD~hN4450ihiզGVZduiզGV wwBӋCYZduiզGVZduhDB$'P:IPY`(s%$+#3gNuDB$'Pf2:"28###2:"28*+J'":"28###2:"28~hihzꪚhihjZduiզGVZa99Y9Y9t==ݓ#L2:#'P:I"Nu%:I"NuDOdtDdqGDFGdtDdpzP8C(zS3fr8C(|]p###2:"28#¦hi!Ӌ §N,3 XDu GD}|KqaT0ņaSSCM 44CM#L2:#ImmhRzt^PmmA֭2:#L2:'P:I"NuZqq].qI"NuDB$dtDdqGDFGdtDdp@qGDFGdtDdqG^M 44CLqqCDuGC\"CM 44dqCVј6#L2:Uqz'U{L2:#IiPME1L@$K!PD~DqGnTCM 44!ds 4О#L2:#u0J`- ;ӋӺ%0J`2:#L0i:yh[M(:I"NuGJjC:I"Nu!Gk"a":"28###2:"28>>>ǷkGGGGՑGDFGdtDdqGF_A4Dd|,r1M 44CM 41ON =8$"8#➜zpI'顦hi""8ꥐ 2:#L2:ڂ(pC6!馞!P "mA8BZduiզGVSMA2:V4 b$'P:I"Na8㏴NHqqƱuDB$'P4j###2:"28###Ј u]dFGdtDdqGDFG.h1ªhihi:GR6F8"?N445TCM 44#t2:#L2:[v]#L2:#IDB$'P:I"N+q>Pxc|>q2:"28###2:"29/9ߙuM 44CM 42N,3 Xf8*qaPD#0ņaS §CM 44CM ?\MUGVZduiզGV j 66ڃkj YZduiզGVZduh)2hI"NuDB$(qqЈqqI"NuDB$T5qGDFGdtDdq?'":"28###2:"28m":#뒄G"1#CM 44CM b..4CM 44COjC0m48#L2:#L"JduiզGVZdui7:: RM4$'P:I"N!ީhiG_f .2:#L2:L%0KB`)Z#L2:#Vw'P:I"NuZdtDB$'P:I"Lk":"28###2:"28GGGGX"?8"?8"?8"?fydtDdqGDFGdtDdqGPD~hibzpI'➜zpI'顦hiB/CMզGVZduiզGVPEڂ(pC<Ä6!P "^#L2:#L OdthIb& Ib1qqj,Ib& IsvG@;^N8Du8GSN8Du]u]u8GSN8Du8GV0Pihit445hhjhitwMi#L2:#n^#L2:#LZt(rKq'P:I"NuxYLP8C叔>q>PDdqGDFGdtDdqG0r]thiCN,3 Xf8Xf8*qaTTCM 44NǑDt#D}/VZduiզGVZdt-6ڃkkB 6զGVZduiզGV(xЋ[DB$'P:IСqvGHqqdw'P:I"NuYY#2:"28###2:_DtDdqGDFGdtDdq"LqƗ顦hi^qqhihif"8IiզGVZduiզGZզGVZduiզGVу'DB$'P:I"O%O!<]O!q>Pc|>q8Du8GSN8Du8t4CM 44:qaT0ņaSņaS §N5M 44CM 4>#L2:#Lmmh]A#L2:#I"NuDB$hqqdtqw'P:I"NudtDdqGDFGdtDdqƿf2:"28###2:"28CM 44C/X􋋏M 44CM 45{L2:#L2:WU{L2:#L2:I"NuDB$×!A#r1#r1#r1#r1#r1#r1#r1#r1#r1#r1#r1#r1#r1#r1#r1#r1#r1#r1#r1#r1#r1U"F9cF9cF9cF9cF9cF9cM4M4M4M4M4M4Ә3`0f 3`iiiiiiiiiiiiiiiiiiiii0f 3`0f M4M4M4M4M4MSM4M4M4M4M4M4M4M4M4M4M4M4M4M4M4M4M4M4M4M4M4M4M4M4M4M4M4M4M4M4M4M4M4M4M4M4M4M4M4FPePePePePePePePePePeP衔AAAAAAAAAAAAAAAAAA2(2(8 Bt '@t '@t '@DudududududududududududududududududududududuYYYYYYYYYYYYYYYYYYYYYYYYYYYYYYYYYYYYYY:::::############YÛl9Ûl9Ûl9Ûl9Ûl9ŌSa͇6sa͇6sa͇6sa͇6sa͇6sa͇6sa͇6sa͇6sa͇6sa͇6sa͇b3a͇6sa͇6sa͇6d*d*d*d*d*d*d*d*d*d*d*d*d*d*d*d*d*d*d*d*d*a*t4444444444444444444445CCCCCCCCCCCCCCCCCCCCCCCCCCCCCCCCCCCCCCCCCCCCCCCCCCCCCC######################::::::::::::::::::::::::::::::::::::::::::::::::::::::Ûl9Ûl9Ûl9Ûl9Ûl9Ûp)Ûl9Ûl9Ûl9Ûl9Ûl9Ûl9Ûl9Ûl9Ûl9Ûl9Ûl9Ûl9Ûl9ÛC2C2C2C2C2C2C2C2C2C2C2C2C2C2C2C2C2C2C2C2C2CBC#ކVGVGVGVGVGVGVGVGVGVGVGVGVGVGVGVGVGVGVGVGVGVGVGVGVGVGVGVGVGVGVGVGVGVGVGVGVGVGVGVGVGVGVGVGVGVGVGVGVGVGVGVGVGVGVGVGVGVGVGVGVGVGVGVGVGVGVGVGVGVGVGVGVGVGVGVGVGW sa͇6sa͇6sa͇6sa͇6sa͇6s6sa͇6sa͇6sa͇6sa͇6sa͇6sa͇6sa͇6sa͇6sa͇6sa͇6sa͇6sa͇6sa͇6R=*d*d*d*d*d*d*d*d*d*d*d*d*d*d*d*d*d*d*d*d*d*+TTTTTTTTTTTTTTTTTTTTTTTTTTTTTTTTTTTTTTTTTTTTTTTTTTTTTT qCCCCCCCCCCCCCCCCCCCCCCCCCCCCCCCCCCCCCCCCCCCCCCCCCCCCCCCCCCCCCCCCCCCCCCCCCCCCCC쎬bDآlQ6(M&bDآlQ6(M&bDآlQ6(pBlQ6(M&bDآlQ6(M&bDآlQ6(M&bDآlQ6(M&bDآlQ6(M&bDآlQ6(M&bDآlQ6(M&bVB#Du":GPB#Du":GPB#Du":GPB#Du":GPB#Du":GPB#Du":GPB#Du":GPB#Du":GPB#Du":GPB#DuzhhhhhhhhhhhhhhhhhhhhhhhhhhhhhhhhhhhhhhhhhhhhhhhhhhhhhhhoDudududududududududududududududududududududuYYYYYYYYYYYYYYYYYYYYYYYYYYYYYYYYYYYYYYYYYYYYYYYYYYYYYYYz͇6sa͇6sa͇6sa͇6sa͇6sa͇6,f›l9Ûl9Ûl9Ûl9Ûl9Ûl9Ûl9Ûl9Ûl9Ûl9Ûl9Ûl9Ûl9Ûl8#TTTTTTTTTTTTTTTTTTTTT 2T$9S$9S$9S$9S$9S$9S$9S$9S$9S$9S$9S$9S$9S$9S$9S$9S$9S$9S$9S$9S$9S$9S$9S$9S$9S$9S$9S$9S$9S$9S$9S$9S$9S$9S$9S$9S$9S$9S$9S$9S$9S$9S$9S$9S$9S$9S$9S$9S$9S$9S$9S$9S$9S$9ShhhhhhhhhhhhhhhhhhhhhjGVGVGVGVGVGVGVGVGVGVGVGVGVGVGVGVGVGVGVGVGVGWdudududududududududududududududududududududududududududududududududududududududududududududududududududududuW#6sa͇6sa͇6sa͇6sa͇6sa͇6Sa͇6sa͇6sa͇6sa͇6sa͇6sa͇6sa͇6sa͇6sa͇6sa͇6sa͇6sa͇6sa͇6sa͇6%d*d*d*d*d*d*d*d*d*d*d*d*d*d*d*d*d*d*d*d*d*d*$9S$9S$9S$9S$9S$9S$9S$9S$9S$9S$9S$9S$9S$9S$9S$9S$9S$9S$9S$9S$9S$9S$9S$9S$9S$9S$9S$9S$9S$9S$9S$9S$9S$9S$9S$9S$9S$9S$9S$9S$9S$9S$9S$9S$9S$9S$9S$9S$9S$9S$9S$9S$9S$9SG ^Ûl9Ûl9Ûl9Ûl9Ûl9l9Ûl9Ûl9Ûl9Ûl9Ûl9Ûl9Ûl9Ûl9Ûl9Ûl9Ûl9Ûl9Ûl9{sTTTTTTTTTTTTTTTTTTTTTU WↆYYYYYYYYYYYYYYYYYYYYYYYYYYYYYYYYYYYYYYYYYYYYYYYYYYYYYYYYYYYYYYYYYYYYYYYYYYYYYU&bDآlQ6(M&bDآlQ6(M&bDآlQ6 آlQ6(M&bDآlQ6(M&bDآlQ6(M&bDآlQ6(M&bDآlQ6(M&bDآlQ6(M&bDآlQ6(M&":GPB#Du":GPB#Du":GPB#B#Du":GPB#Du":GPB#Du":GPB#Du":GPB#Du":GPB#Du":GPB#Du":GPCCCCCCCCCCCCCCCCCCCCCވ::::::::::::::::::::::::::::::::::::::::::::::::::::::::l9Ûl9Ûl9Ûl9Ûl9ÛlXͅ6sa͇6sa͇6sa͇6sa͇6sa͇6sa͇6sa͇6sa͇6sa͇6sa͇6sa͇6sa͇6sa͇6pFdHrHrHrHrHrHrHrHrHrHrHrHrHrHrHrHrHrHrHrHrHrHrHrHrHrHrHrHrHrHrHrHrHrHrHrHrHrHrHrHrHrHrHrHrHrHrHrHrHrHrHrHrHrHr= 쎬Gl9Ûl9Ûl9Ûl9Ûl9Ûl9Ûl9Ûl9Ûl9Ûl9Ûl9Ûl9Ûl9Ûl9Ûl9Ûl9Ûl9Ûl9Ûl9ÛlJTTTTTTTTTTTTTTTTTTTTTU  HrHrHrHrHrHrHrHrHrHrHrHrHrHrHrHrHrHrHrHrHrHrHrHrHrHrHrHrHrHrHrHrHrHrHrHrHrHrHrHrHrHrHrHrHrHrHrHrHrHrHrHrHrHrzYYYYYYYYYYYYYYYYYYYYYYYYYYYYYYYYYYYYYYYYYYYYYYYYYYYYYYYYYYYYYYYYYYYYYYYYYYYYY_3a͇6sa͇6sa͇6sa͇6sa͇6sa0sa͇6sa͇6sa͇6sa͇6sa͇6sa͇6sa͇6sa͇6sa͇6sa͇6sa͇6sa͇6sa͇6saH$9S$9S$9S$9S$9S$9S$9S$9S$9S$9S$9S$9S$9S$9S$9S$9S$9S$9S$9S$9S$9S$9S$9S$9S$9S$9S$9S$9S$9S$9S$9S$9S$9S$9S$9S$9S$9S$9S$9S$9S$9S$9S$9S$9S$9S$9S$9S$9S$9S$9S$9S$9S$9S$9S$8% ::::::::::::::::::::::::::::::::::::::::::::::::::::::::::::::::::::::::::::::M&bDآlQ6(M&bDآlQ6(M&bDآmA DآlQ6(M&bDآlQ6(M&bDآlQ6(M&bDآlQ6(M&bDآlQ6(M&bDآlQ6(M&bDآlQ6(M5XDu":GPB#Du":GPB#Du":G\":GPB#Du":GPB#Du":GPB#Du":GPB#Du":GPB#Du":GPB#Du":GPB#DuꆆՑՑՑՑՑՑՑՑՑՑՑՑՑՑՑՑՑՑՑՑՑdudududududududududududududududududududududududududududududududududududududududududududududududududududududududu6sa͇6sa͇6sa͇6sa͇6sa͇6ر l9Ûl9Ûl9Ûl9Ûl9Ûl9Ûl9Ûl9Ûl9Ûl9Ûl9Ûl9Ûl9Ûl9?c$9S$9S$9S$9S$9S$9S$9S$9S$9S$9S$9S$9S$9S$9S$9S$9S$9S$9S$9S$9S$9S(PLLLLLLLLLLLLLLLLLLLLLLLLLLLLLLLLLLLLLLLLLLLLLLLLLLLLLL{YYYYYYYYYYYYYYYYYYYYY]ՑՑՑՑՑՑՑՑՑՑՑՑՑՑՑՑՑՑՑՑՑՑՑՑՑՑՑՑՑՑՑՑՑՑՑՑՑՑՑՑՑՑՑՑՑՑՑՑՑՑՑՑՑ\sa͇6sa͇6sa͇6sa͇6sa͇6sM6sa͇6sa͇6sa͇6sa͇6sa͇6sa͇6sa͇6sa͇6sa͇6sa͇6sa͇6sa͇6sa͇6ؕLLLLLLLLLLLLLLLLLLLLLLLLLLLLLLLLLLLLLLLLLLLLLLLLLLLLLL44444444444444444444444444444444444444444444444444444444444444444444444444445z:::::::::::::::::::::::::::::::::::::::::::::::::::::::::::::::::::::::::::::HfÛl9Ûl9Ûl9Ûl9Ûl9Ü`9Ûl9Ûl9Ûl9Ûl9Ûl9Ûl9Ûl9Ûl9Ûl9Ûl9Ûl9Ûl9Ûl9‘9S$9S$9S$9S$9S$9S$9S$9S$9S$9S$9S$9S$9S$9S$9S$9S$9S$9S$9S$9S$9S$9T$9^HrHrHrHrHrHrHrHrHrHrHrHrHrHrHrHrHrHrHrHrHrHrHrHrHrHrHrHrHrHrHrHrHrHrHrHrHrHrHrHrHrHrHrHrHrHrHrHrHrHrHrHrHrHrHpKdudududududududududududududududududududududududududududududududududududududududududududududududududududududududududududududududududududududududududududududuVM&bDآlQ6(M&bDآlQ6(M&bDۄ bDآlQ6(M&bDآlQ6(M&bDآlQ6(M&bDآlQ6(M&bDآlQ6(M&bDآlQ6(M&bDآlQ6(jB#Du":GPB#Du":GPB#DuDu":GPB#Du":GPB#Du":GPB#Du":GPB#Du":GPB#Du":GPB#Du":GPB# CCCCCCCCCCCCCCCCCCCCCCCCCCCCCCCCCCCCCCCCCCCCCCCCCCCCCCCCz######################l9Ûl9Ûl9Ûl9Ûl9Ûl9c6sa͇6sa͇6sa͇6sa͇6sa͇6sa͇6sa͇6sa͇6sa͇6sa͇6sa͇6sa͇6sa͇6sa~HrHrHrHrHrHrHrHrHrHrHrHrHrHrHrHrHrHrHrHrHrQ!ʙ!ʙ!ʙ!ʙ!ʙ!ʙ!ʙ!ʙ!ʙ!ʙ!ʙ!ʙ!ʙ!ʙ!ʙ!ʙ!ʙ!ʙ!ʙ!ʙ!ʙ!ʙ!ʙ!ʙ!ʙ!ʙ!ʙ!ʙ!ʙ!ʙ!ʙ!ʙ!ʙ!ʙ!ʙ!ʙ!ʙ!ʙ!ʙ!ʙ!ʙ!ʙ!ʙ!ʙ!ʙ!ʙ!ʙ!ʙ!ʙ!ʙ!ʙ!ʙ!ʙ!ʘCCCCCCCCCCCCCCCCCCCCCCT44444444444444444444444444444444444444444444444444444?::::::::::::::::::::::######################################################9Ûl9Ûl9Ûl9Ûl9Ûl9l9Ûl9Ûl9Ûl9Ûl9Ûl9Ûl9Ûl9Ûl9Ûl9Ûl9Ûl9Ûl9Ûl9+$9S$9S$9S$9S$9S$9S$9S$9S$9S$9S$9S$9S$9S$9S$9S$9S$9S$9S$9S$9S$9S$9T$8)!ʙ!ʙ!ʙ!ʙ!ʙ!ʙ!ʙ!ʙ!ʙ!ʙ!ʙ!ʙ!ʙ!ʙ!ʙ!ʙ!ʙ!ʙ!ʙ!ʙ!ʙ!ʙ!ʙ!ʙ!ʙ!ʙ!ʙ!ʙ!ʙ!ʙ!ʙ!ʙ!ʙ!ʙ!ʙ!ʙ!ʙ!ʙ!ʙ!ʙ!ʙ!ʙ!ʙ!ʙ!ʙ!ʙ!ʙ!ʙ!ʙ!ʙ!ʙ!ʙ!ʙ!ʘ"=hhhhhhhhhhhhhhhhhhhhhhhhhhhhhhhhhhhhhhhhhhhhhhhhhhhhhhhhhhhhhhhhhhhhhhhhhhhhjdududududududududududududududududududududududududududududududududududududududududududududududududududududududududududududududududududududududududududududu~͇6sa͇6sa͇6sa͇6sa͇6sa͇8sa͇6sa͇6sa͇6sa͇6sa͇6sa͇6sa͇6sa͇6sa͇6sa͇6sa͇6sa͇6sa͇6saͅ#ۘrHrHrHrHrHrHrHrHrHrHrHrHrHrHrHrHrHrHrHrHrHrHrLLLLLLLLLLLLLLLLLLLLLLLLLLLLLLLLLLLLLLLLLLLLLLLLLLLLLL44444444444444444444444444444444444444444444444444444444444444444444444444444>!6(M&bDآlQ6(M&bDآlQ6(M&bA&bDآlQ6(M&bDآlQ6(M&bDآlQ6(M&bDآlQ6(M&bDآlQ6(M&bDآlQ6(M&bDآlQ6(a":GPB#Du":GPB#Du":GPpB#Du":GPB#Du":GPB#Du":GPB#Du":GPB#Du":GPB#Du":GPB#Du":GWGVGVGVGVGVGVGVGVGVGVGVGVGVGVGVGVGVGVGVGVGVG]ՑՑՑՑՑՑՑՑՑՑՑՑՑՑՑՑՑՑՑՑՑՑՑՑՑՑՑՑՑՑՑՑՑՑՑՑՑՑՑՑՑՑՑՑՑՑՑՑՑՑՑՑՑՑՑ׬sa͇6sa͇6sa͇6sa͇6sa͇6sbl)Ûl9Ûl9Ûl9Ûl9Ûl9Ûl9Ûl9Ûl9Ûl9Ûl9Ûl9Ûl9Ûl9Â0LLLLLLLLLLLLLLLLLLLLL %BC2C2C2C2C2C2C2C2C2C2C2C2C2C2C2C2C2C2C2C2C2C2C2C2C2C2C2C2C2C2C2C2C2C2C2C2C2C2C2C2C2C2C2C2C2C2C2C2C2C2C2C2C2C1hhhhhhhhhhhhhhhhhhhhhhhhhhhhhhhhhhhhhhhhhhhhhhhhhhhhhdudududududududududududududududududududududuvGVGVGVGVGVGVGVGVGVGVGVGVGVGVGVGVGVGVGVGVGVGVGVGVGVGVGVGVGVGVGVGVGVGVGVGVGVGVGVGVGVGVGVGVGVGVGVGVGVGVGVGVGVGUr8sa͇6sa͇6sa͇6sa͇6sa͇6sa6sa͇6sa͇6sa͇6sa͇6sa͇6sa͇6sa͇6sa͇6sa͇6sa͇6sa͇6sa͇6sa͇6sbVHrHrHrHrHrHrHrHrHrHrHrHrHrHrHrHrHrHrHrHrHrHrHpRC2C2C2C2C2C2C2C2C2C2C2C2C2C2C2C2C2C2C2C2C2C2C2C2C2C2C2C2C2C2C2C2C2C2C2C2C2C2C2C2C2C2C2C2C2C2C2C2C2C2C2C2C2C0D{!l9Ûl9Ûl9Ûl9Ûl9Ûp9Ûl9Ûl9Ûl9Ûl9Ûl9Ûl9Ûl9Ûl9Ûl9Ûl9Ûl9Ûl9Ûl9Û G0LLLLLLLLLLLLLLLLLLLLLPy!ʙ!ʙ!ʙ!ʙ!ʙ!ʙ!ʙ!ʙ!ʙ!ʙ!ʙ!ʙ!ʙ!ʙ!ʙ!ʙ!ʙ!ʙ!ʙ!ʙ!ʙ!ʙ!ʙ!ʙ!ʙ!ʙ!ʙ!ʙ!ʙ!ʙ!ʙ!ʙ!ʙ!ʙ!ʙ!ʙ!ʙ!ʙ!ʙ!ʙ!ʙ!ʙ!ʙ!ʙ!ʙ!ʙ!ʙ!ʙ!ʙ!ʙ!ʙ!ʙ!ʙ!ʙ!.(hhhhhhhhhhhhhhhhhhhhhhhhhhhhhhhhhhhhhhhhhhhhhhhhhhhhhhhhhhhhhhhhhhhhhhhhhhhhh}ՑՑՑՑՑՑՑՑՑՑՑՑՑՑՑՑՑՑՑՑՑՑՑՑՑՑՑՑՑՑՑՑՑՑՑՑՑՑՑՑՑՑՑՑՑՑՑՑՑՑՑՑՑՑՑՑՑՑՑՑՑՑՑՑՑՑՑՑՑՑՑՑՑՑՑՑՑXBlQ6(M&bDآlQ6(M&bDآlQ6(M&nM&bDآlQ6(M&bDآlQ6(M&bDآlQ6(M&bDآlQ6(M&bDآlQ6(M&bDآlQ6(M&bDآlQ#Du":GPB#Du":GPB#Du":":GPB#Du":GPB#Du":GPB#Du":GPB#Du":GPB#Du":GPB#Du":GPB#DuT44444444444444444444= 莬########################################################YÛl9Ûl9Ûl9Ûl9Ûl9ŌSa͇6sa͇6sa͇6sa͇6sa͇6sa͇6sa͇6sa͇6sa͇6sa͇6sa͇6sa͇6sa͇6sa͇a!ʙ!ʙ!ʙ!ʙ!ʙ!ʙ!ʙ!ʙ!ʙ!ʙ!ʙ!ʙ!ʙ!ʙ!ʙ!ʙ!ʙ!ʙ!ʙ!ʙ!ʘAFJ*d*d*d*d*d*d*d*d*d*d*d*d*d*d*d*d*d*d*d*d*d*d*d*d*d*d*d*d*d*d*d*d*d*d*d*d*d*d*d*d*d*d*d*d*d*d*d*d*d*d*d*d*d*c P쎬pÛl9Ûl9Ûl9Ûl9Ûl9Ü l9Ûl9Ûl9Ûl9Ûl9Ûl9Ûl9Ûl9Ûl9Ûl9Ûl9Ûl9Ûl9Ûl9ĬLLLLLLLLLLLLLLLLLLLLLPइ*d*d*d*d*d*d*d*d*d*d*d*d*d*d*d*d*d*d*d*d*d*d*d*d*d*d*d*d*d*d*d*d*d*d*d*d*d*d*d*d*d*d*d*d*d*d*d*d*d*d*d*d*d*`ՑՑՑՑՑՑՑՑՑՑՑՑՑՑՑՑՑՑՑՑՑՑՑՑՑՑՑՑՑՑՑՑՑՑՑՑՑՑՑՑՑՑՑՑՑՑՑՑՑՑՑՑՑՑՑՑՑՑՑՑՑՑՑՑՑՑՑՑՑՑՑՑՑՑՑՑՑC6sa͇6sa͇6sa͇6sa͇6sa͇6s͇6sa͇6sa͇6sa͇6sa͇6sa͇6sa͇6sa͇6sa͇6sa͇6sa͇6sa͇6sa͇6sa͇6naʙ!ʙ!ʙ!ʙ!ʙ!ʙ!ʙ!ʙ!ʙ!ʙ!ʙ!ʙ!ʙ!ʙ!ʙ!ʙ!ʙ!ʙ!ʙ!ʙ!ʙ!ʡ!C2C2C2C2C2C2C2C2C2C2C2C2C2C2C2C2C2C2C2C2C2C2C2C2C2C2C2C2C2C2C2C2C2C2C2C2C2C2C2C2C2C2C2C2C2C2C2C2C2C2C2C2C2C2C\P##############################################################################آlQ6(M&bDآlQ6(M&bDآlQ6(M&!M&bDآlQ6(M&bDآlQ6(M&bDآlQ6(M&bDآlQ6(M&bDآlQ6(M&bDآlQ6(M&bDأUGPB#Du":GPB#Du":GPB#Du#Du":GPB#Du":GPB#Du":GPB#Du":GPB#Du":GPB#Du":GPB#Du":GP^hhhhhhhhhhhhhhhhhhhhzYYYYYYYYYYYYYYYYYYYYYvGVGVGVGVGVGVGVGVGVGVGVGVGVGVGVGVGVGVGVGVGVGVGVGVGVGVGVGVGVGVGVGVGVGVGVGVGVGVGVGVGVGVGVGVGVGVGVGVGVGVGVGVGVGVGVG^a͇6sa͇6sa͇6sa͇6sa͇6sa͋Ûl9Ûl9Ûl9Ûl9Ûl9Ûl9Ûl9Ûl9Ûl9Ûl9Ûl9Ûl9Ûl9Û2C2C2C2C2C2C2C2C2C2C2C2C2C2C2C2C2C2C2C2C2C0 TTTTTTTTTTTTTTTTTTTTTTTTTTTTTTTTTTTTTTTTTTTTTTTTTTTTTTǺՑՑՑՑՑՑՑՑՑՑՑՑՑՑՑՑՑՑՑՑՑYYYYYYYYYYYYYYYYYYYYYYYYYYYYYYYYYYYYYYYYYYYYYYYYYYYYYU͇6sa͇6sa͇6sa͇6sa͇6sa͇8sa͇6sa͇6sa͇6sa͇6sa͇6sa͇6sa͇6sa͇6sa͇6sa͇6sa͇6sa͇6sa͇6sa͉Y!ʙ!ʙ!ʙ!ʙ!ʙ!ʙ!ʙ!ʙ!ʙ!ʙ!ʙ!ʙ!ʙ!ʙ!ʙ!ʙ!ʙ!ʙ!ʙ!ʙ!ʙ!ʡ!ITTTTTTTTTTTTTTTTTTTTTTTTTTTTTTTTTTTTTTTTTTTTTTTTTTTTTTCCCCCCCCCCCCCCCCCCCCCCCCCCCCCCCCCCCCCCCCCCCCCCCCCCCCCCCCCCCCCCCCCCCCCCCCCCCCCW#############################################################################l9Ûl9Ûl9Ûl9Ûl9Ûl9l9Ûl9Ûl9Ûl9Ûl9Ûl9Ûl9Ûl9Ûl9Ûl9Ûl9Ûl9Ûl9Ûl)Õ2C2C2C2C2C2C2C2C2C2C2C2C2C2C2C2C2C2C2C2C2CBC*d*d*d*d*d*d*d*d*d*d*d*d*d*d*d*d*d*d*d*d*d*d*d*d*d*d*d*d*d*d*d*d*d*d*d*d*d*d*d*d*d*d*d*d*d*d*d*d*d*d*d*d*d*dGVGVGVGVGVGVGVGVGVGVGVGVGVGVGVGVGVGVGVGVGVGVGVGVGVGVGVGVGVGVGVGVGVGVGVGVGVGVGVGVGVGVGVGVGVGVGVGVGVGVGVGVGVGVGVGVGVGVGVGVGVGVGVGVGVGVGVGVGVGVGVGVGVGVGVGVGVGUa DآlQ6(M&bDآlQ6(M&bDآlQ6(MB!6(M&bDآlQ6(M&bDآlQ6(M&bDآlQ6(M&bDآlQ6(M&bDآlQ6(M&bDآlQ6(M&bF":GPB#Du":GPB#Du":GPGPB#Du":GPB#Du":GPB#Du":GPB#Du":GPB#Du":GPB#Du":GPB#Du":P44444444444444444444444444444444444444444444444444444447::::::::::::::::::::::쎬fÛl9Ûl9Ûl9Ûl9Ûl9Û3aM6sa͇6sa͇6sa͇6sa͇6sa͇6sa͇6sa͇6sa͇6sa͇6sa͇6sa͇6sa͇6sa͇6d*d*d*d*d*d*d*d*d*d*d*d*d*d*d*d*d*d*d*d*d*a*t4444444444444444444445CCCCCCCCCCCCCCCCCCCCCCCCCCCCCCCCCCCCCCCCCCCCCCCCCCCCCC######################::::::::::::::::::::::::::::::::::::::::::::::::::::::Ûl9Ûl9Ûl9Ûl9Ûl9Ûp)Ûl9Ûl9Ûl9Ûl9Ûl9Ûl9Ûl9Ûl9Ûl9Ûl9Ûl9Ûl9Ûl9ÛC2C2C2C2C2C2C2C2C2C2C2C2C2C2C2C2C2C2C2C2C2CBC#ކVGVGVGVGVGVGVGVGVGVGVGVGVGVGVGVGVGVGVGVGVGVGVGVGVGVGVGVGVGVGVGVGVGVGVGVGVGVGVGVGVGVGVGVGVGVGVGVGVGVGVGVGVGVGVGVGVGVGVGVGVGVGVGVGVGVGVGVGVGVGVGVGVGVGVGVGVGW sa͇6sa͇6sa͇6sa͇6sa͇6s6sa͇6sa͇6sa͇6sa͇6sa͇6sa͇6sa͇6sa͇6sa͇6sa͇6sa͇6sa͇6sa͇6R=*d*d*d*d*d*d*d*d*d*d*d*d*d*d*d*d*d*d*d*d*d*+TTTTTTTTTTTTTTTTTTTTTTTTTTTTTTTTTTTTTTTTTTTTTTTTTTTTTT qCCCCCCCCCCCCCCCCCCCCCCCCCCCCCCCCCCCCCCCCCCCCCCCCCCCCCCCCCCCCCCCCCCCCCCCCCCCCCC쎬bDآlQ6(M&bDآlQ6(M&bDآlQ6(pBlQ6(M&bDآlQ6(M&bDآlQ6(M&bDآlQ6(M&bDآlQ6(M&bDآlQ6(M&bDآlQ6(M&bVB#Du":GPB#Du":GPB#Du":GPB#Du":GPB#Du":GPB#Du":GPB#Du":GPB#Du":GPB#Du":GPB#DuzhhhhhhhhhhhhhhhhhhhhhhhhhhhhhhhhhhhhhhhhhhhhhhhhhhhhhhhoDudududududududududududududududududududududuYYYYYYYYYYYYYYYYYYYYYYYYYYYYYYYYYYYYYYYYYYYYYYYYYYYYYYYz͇6sa͇6sa͇6sa͇6sa͇6sa͇6,f›l9Ûl9Ûl9Ûl9Ûl9Ûl9Ûl9Ûl9Ûl9Ûl9Ûl9Ûl9Ûl9Ûl8#TTTTTTTTTTTTTTTTTTTTT 2T$9S$9S$9S$9S$9S$9S$9S$9S$9S$9S$9S$9S$9S$9S$9S$9S$9S$9S$9S$9S$9S$9S$9S$9S$9S$9S$9S$9S$9S$9S$9S$9S$9S$9S$9S$9S$9S$9S$9S$9S$9S$9S$9S$9S$9S$9S$9S$9S$9S$9S$9S$9S$9S$9ShhhhhhhhhhhhhhhhhhhhhjGVGVGVGVGVGVGVGVGVGVGVGVGVGVGVGVGVGVGVGVGVGWdudududududududududududududududududududududududududududududududududududududududududududududududududududududuW#6sa͇6sa͇6sa͇6sa͇6sa͇6Sa͇6sa͇6sa͇6sa͇6sa͇6sa͇6sa͇6sa͇6sa͇6sa͇6sa͇6sa͇6sa͇6sa͇6%d*d*d*d*d*d*d*d*d*d*d*d*d*d*d*d*d*d*d*d*d*d*$9S$9S$9S$9S$9S$9S$9S$9S$9S$9S$9S$9S$9S$9S$9S$9S$9S$9S$9S$9S$9S$9S$9S$9S$9S$9S$9S$9S$9S$9S$9S$9S$9S$9S$9S$9S$9S$9S$9S$9S$9S$9S$9S$9S$9S$9S$9S$9S$9S$9S$9S$9S$9S$9SG ^Ûl9Ûl9Ûl9Ûl9Ûl9l9Ûl9Ûl9Ûl9Ûl9Ûl9Ûl9Ûl9Ûl9Ûl9Ûl9Ûl9Ûl9Ûl9{sTTTTTTTTTTTTTTTTTTTTTU WↆYYYYYYYYYYYYYYYYYYYYYYYYYYYYYYYYYYYYYYYYYYYYYYYYYYYYYYYYYYYYYYYYYYYYYYYYYYYYYU&bDآlQ6(M&bDآlQ6(M&bDآlQ6 آlQ6(M&bDآlQ6(M&bDآlQ6(M&bDآlQ6(M&bDآlQ6(M&bDآlQ6(M&bDآlQ6(M&":GPB#Du":GPB#Du":GPB#B#Du":GPB#Du":GPB#Du":GPB#Du":GPB#Du":GPB#Du":GPB#Du":GPCCCCCCCCCCCCCCCCCCCCCވ::::::::::::::::::::::::::::::::::::::::::::::::::::::::l9Ûl9Ûl9Ûl9Ûl9ÛlXͅ6sa͇6sa͇6sa͇6sa͇6sa͇6sa͇6sa͇6sa͇6sa͇6sa͇6sa͇6sa͇6sa͇6pFdHrHrHrHrHrHrHrHrHrHrHrHrHrHrHrHrHrHrHrHrHrHrHrHrHrHrHrHrHrHrHrHrHrHrHrHrHrHrHrHrHrHrHrHrHrHrHrHrHrHrHrHrHrHr= 쎬Gl9Ûl9Ûl9Ûl9Ûl9Ûl9Ûl9Ûl9Ûl9Ûl9Ûl9Ûl9Ûl9Ûl9Ûl9Ûl9Ûl9Ûl9Ûl9ÛlJTTTTTTTTTTTTTTTTTTTTTU  HrHrHrHrHrHrHrHrHrHrHrHrHrHrHrHrHrHrHrHrHrHrHrHrHrHrHrHrHrHrHrHrHrHrHrHrHrHrHrHrHrHrHrHrHrHrHrHrHrHrHrHrHrHrzYYYYYYYYYYYYYYYYYYYYYYYYYYYYYYYYYYYYYYYYYYYYYYYYYYYYYYYYYYYYYYYYYYYYYYYYYYYYY_3a͇6sa͇6sa͇6sa͇6sa͇6sa0sa͇6sa͇6sa͇6sa͇6sa͇6sa͇6sa͇6sa͇6sa͇6sa͇6sa͇6sa͇6sa͇6saH$9S$9S$9S$9S$9S$9S$9S$9S$9S$9S$9S$9S$9S$9S$9S$9S$9S$9S$9S$9S$9S$9S$9S$9S$9S$9S$9S$9S$9S$9S$9S$9S$9S$9S$9S$9S$9S$9S$9S$9S$9S$9S$9S$9S$9S$9S$9S$9S$9S$9S$9S$9S$9S$9S$8% ::::::::::::::::::::::::::::::::::::::::::::::::::::::::::::::::::::::::::::::M&bDآlQ6(M&bDآlQ6(M&bDآmA DآlQ6(M&bDآlQ6(M&bDآlQ6(M&bDآlQ6(M&bDآlQ6(M&bDآlQ6(M&bDآlQ6(M5XDu":GPB#Du":GPB#Du":G\":GPB#Du":GPB#Du":GPB#Du":GPB#Du":GPB#Du":GPB#Du":GPB#DuꆆՑՑՑՑՑՑՑՑՑՑՑՑՑՑՑՑՑՑՑՑՑdudududududududududududududududududududududududududududududududududududududududududududududududududududududududu6sa͇6sa͇6sa͇6sa͇6sa͇6ر l9Ûl9Ûl9Ûl9Ûl9Ûl9Ûl9Ûl9Ûl9Ûl9Ûl9Ûl9Ûl9Ûl9?c$9S$9S$9S$9S$9S$9S$9S$9S$9S$9S$9S$9S$9S$9S$9S$9S$9S$9S$9S$9S$9S(PLLLLLLLLLLLLLLLLLLLLLLLLLLLLLLLLLLLLLLLLLLLLLLLLLLLLLL{YYYYYYYYYYYYYYYYYYYYY]ՑՑՑՑՑՑՑՑՑՑՑՑՑՑՑՑՑՑՑՑՑՑՑՑՑՑՑՑՑՑՑՑՑՑՑՑՑՑՑՑՑՑՑՑՑՑՑՑՑՑՑՑՑ\sa͇6sa͇6sa͇6sa͇6sa͇6sM6sa͇6sa͇6sa͇6sa͇6sa͇6sa͇6sa͇6sa͇6sa͇6sa͇6sa͇6sa͇6sa͇6ؕLLLLLLLLLLLLLLLLLLLLLLLLLLLLLLLLLLLLLLLLLLLLLLLLLLLLLL4$p^VG@F8"?dudududududududududududududududududududududududududududududududududududududududududududududududududududududududududududududududududududududududududu~is͇6sa͇6sa͇6sa͇6sa͇6s͇6sa͇6sa͇6sa͇6sa͇6sa͇6sa͇6sa͇6sa͇6sa͇6sa͇6sa͇6sa͇6sa͇6nM4HrHrHrHrHrHrHrHrHrHrHrHrHrHrHrHrHrHrHrHrLLLLLLLLLLLLLLLLLLLLLLLLLLLLLLLLLLLLLLLLLLLLLLLLLLLLLL -NF9c6GVGVGVGVGVGVGVGVGVGVGVGVGVGVGVGVGVGVGVGVGVGVGVGVGVGVGVGVGVGVGVGVGVGVGVGVGVGVGVGVGVGVGVGVGVGVGVGVGVGVGVGVGVGVGVGVGVGVGVGVGVGVGVGVGVGVGVGVGVGVGVGVGVGVGVGU 4آlQ6(M&bDآlQ6(M&bDآlQ6(MB!6(M&bDآlQ6(M&bDآlQ6(M&bDآlQ6(M&bDآlQ6(M&bDآlQ6(M&bDآlQ6(M&bFcMFB#Du":GPB#Du":GPB#Du":GPB#Du":GPB#Du":GPB#Du":GPB#Du":GPB#Du":GPB#Du":GPB#Dur%FB!P44444444444444444444444444444444444444444444444444444447LC#F9P::::::::::::::::::::::::::::::::::::::::::::::::::::::::(biisa͇6sa͇6sa͇6sa͇6sa͇6sbl)Ûl9Ûl9Ûl9Ûl9Ûl9Ûl9Ûl9Ûl9Ûl9Ûl9Ûl9Ûl9Ûl9Â0ihLLLLLLLLLLLLLLLLLLLLL %BC2C2C2C2C2C2C2C2C2C2C2C2C2C2C2C2C2C2C2C2C2C2C2C2C2C2C2C2C2C2C2C2C2C2C2C2C2C2C2C2C2C2C2C2C2C2C2C2C2C2C2C2C2C1!] PDuDu(p######################:::::::::::::::::::::::::::::::::::::::::::::::::::::: M BNGl9Ûl9Ûl9Ûl9Ûl9Ûl9Ûl9Ûl9Ûl9Ûl9Ûl9Ûl9Ûl9Ûl9Ûl9Ûl9Ûl9Ûl9Ûl9ÛlMdtLLLLLLLLLLLLLLLLLLLLLPइ*d*d*d*d*d*d*d*d*d*d*d*d*d*d*d*d*d*d*d*d*d*d*d*d*d*d*d*d*d*d*d*d*d*d*d*d*d*d*d*d*d*d*d*d*d*d*d*d*d*d*d*d*d*`0!] _ް:#############################################################################cOHfÛl9Ûl9Ûl9Ûl9Ûl9Ü`9Ûl9Ûl9Ûl9Ûl9Ûl9Ûl9Ûl9Ûl9Ûl9Ûl9Ûl9Ûl9Ûl9‘@aʙ!ʙ!ʙ!ʙ!ʙ!ʙ!ʙ!ʙ!ʙ!ʙ!ʙ!ʙ!ʙ!ʙ!ʙ!ʙ!ʙ!ʙ!ʙ!ʙ!ʙ!ʡ!C2C2C2C2C2C2C2C2C2C2C2C2C2C2C2C2C2C2C2C2C2C2C2C2C2C2C2C2C2C2C2C2C2C2C2C2C2C2C2C2C2C2C2C2C2C2C2C2C2C2C2C2C2C2C_ GPvG:::::::::::::::::::::::::::::::::::::::::::::::::::::::::::::::::::::::::::::: *M&bDآlQ6(M&bDآlQ6(M&bDۄ bDآlQ6(M&bDآlQ6(M&bDآlQ6(M&bDآlQ6(M&bDآlQ6(M&bDآlQ6(M&bDآlQ6(kdudt䑂iB#Du":GPB#Du":GPB#Du":GPB#Du":GPB#Du":GPB#Du":GPB#Du":GPB#Du":GPB#Du":GPB#DuxIH5P44444444444444444444444444444444444444444444444444444447c#"1#YՑՑՑՑՑՑՑՑՑՑՑՑՑՑՑՑՑՑՑՑՑdudududududududududududududududududududududududududududududududududududududududududududududududududududududududui͇6sa͇6sa͇6sa͇6sa͇6sa͇6,f›l9Ûl9Ûl9Ûl9Ûl9Ûl9Ûl9Ûl9Ûl9Ûl9Ûl9Ûl9Ûl9Ûl8#u4E*1dHrHrHrHrHrHrHrHrHrHrHrHrHrHrHrHrHrHrHrHrHrHrHrHrHrHrHrHrHrHrHrHrHrHrHrHrHrHrHrHrHrHrHrHrHrHrHrHrHrHrHrHrHrHr?Fhhhhhhhhhhhhhhhhhhhhhj#DuG{######################::::::::::::::::::::::::::::::::::::::::::::::::::::::9Ûl9Ûl9Ûl9Ûl9Ûl9l9Ûl9Ûl9Ûl9Ûl9Ûl9Ûl9Ûl9Ûl9Ûl9Ûl9Ûl9Ûl9Ûl96GD4G2:!LLLLLLLLLLLLLLLLLLLLLLLLLLLLLLLLLLLLLLLLLLLLLLLLLLLLLLkHfÛl9Ûl9Ûl9Ûl9Ûl9Ü`9Ûl9Ûl9Ûl9Ûl9Ûl9Ûl9Ûl9Ûl9Ûl9Ûl9Ûl9Ûl9Ûl9‘EÕ2C2C2C2C2C2C2C2C2C2C2C2C2C2C2C2C2C2C2C2C2CBC*d*d*d*d*d*d*d*d*d*d*d*d*d*d*d*d*d*d*d*d*d*d*d*d*d*d*d*d*d*d*d*d*d*d*d*d*d*d*d*d*d*d*d*d*d*d*d*d*d*d*d*d*d*d%44444444444444444444444444444444444444444444444444444444444444444444444444444>6#:::::::::::::::::::::::::::::::::::::::::::::::::::::::::::::::::::::::::::::: a&vM&bDآlQ6(M&bDآlQ6(M&bDۄ bDآlQ6(M&bDآlQ6(M&bDآlQ6(M&bDآlQ6(M&bDآlQ6(M&bDآlQ6(M&bDآlQ6(jai,":GPB#Du":GPB#Du":GPB#B#Du":GPB#Du":GPB#Du":GPB#Du":GPB#Du":GPB#Du":GPB#Du":GPbP44444444444444444444444444444444444444444444444444444447######################l9Ûl9Ûl9Ûl9Ûl9Ûl9c6sa͇6sa͇6sa͇6sa͇6sa͇6sa͇6sa͇6sa͇6sa͇6sa͇6sa͇6sa͇6sa͇6sa~HrHrHrHrHrHrHrHrHrHrHrHrHrHrHrHrHrHrHrHrHrQ!ʙ!ʙ!ʙ!ʙ!ʙ!ʙ!ʙ!ʙ!ʙ!ʙ!ʙ!ʙ!ʙ!ʙ!ʙ!ʙ!ʙ!ʙ!ʙ!ʙ!ʙ!ʙ!ʙ!ʙ!ʙ!ʙ!ʙ!ʙ!ʙ!ʙ!ʙ!ʙ!ʙ!ʙ!ʙ!ʙ!ʙ!ʙ!ʙ!ʙ!ʙ!ʙ!ʙ!ʙ!ʙ!ʙ!ʙ!ʙ!ʙ!ʙ!ʙ!ʙ!ʙ!ʘCCCCCCCCCCCCCCCCCCCCCCT44444444444444444444444444444444444444444444444444444?::::::::::::::::::::::######################################################9Ûl9Ûl9Ûl9Ûl9Ûl9l9Ûl9Ûl9Ûl9Ûl9Ûl9Ûl9Ûl9Ûl9Ûl9Ûl9Ûl9Ûl9Ûl9+$9S$9S$9S$9S$9S$9S$9S$9S$9S$9S$9S$9S$9S$9S$9S$9S$9S$9S$9S$9S$9S$9T$8)!ʙ!ʙ!ʙ!ʙ!ʙ!ʙ!ʙ!ʙ!ʙ!ʙ!ʙ!ʙ!ʙ!ʙ!ʙ!ʙ!ʙ!ʙ!ʙ!ʙ!ʙ!ʙ!ʙ!ʙ!ʙ!ʙ!ʙ!ʙ!ʙ!ʙ!ʙ!ʙ!ʙ!ʙ!ʙ!ʙ!ʙ!ʙ!ʙ!ʙ!ʙ!ʙ!ʙ!ʙ!ʙ!ʙ!ʙ!ʙ!ʙ!ʙ!ʙ!ʙ!ʙ!ʘ"=hhhhhhhhhhhhhhhhhhhhhhhhhhhhhhhhhhhhhhhhhhhhhhhhhhhhhhhhhhhhhhhhhhhhhhhhhhhhjdududududududududududududududududududududududududududududududududududududududududududududududududududududududududududududududududududududududududududududu~͇6sa͇6sa͇6sa͇6sa͇6sa͇8sa͇6sa͇6sa͇6sa͇6sa͇6sa͇6sa͇6sa͇6sa͇6sa͇6sa͇6sa͇6sa͇6saͅ#ۘrHrHrHrHrHrHrHrHrHrHrHrHrHrHrHrHrHrHrHrHrHrHrLLLLLLLLLLLLLLLLLLLLLLLLLLLLLLLLLLLLLLLLLLLLLLLLLLLLLL44444444444444444444444444444444444444444444444444444444444444444444444444444>!6(M&bDآlQ6(M&bDآlQ6(M&bA&bDآlQ6(M&bDآlQ6(M&bDآlQ6(M&bDآlQ6(M&bDآlQ6(M&bDآlQ6(M&bDآlQ6(a":GPB#Du":GPB#Du":GPpB#Du":GPB#Du":GPB#Du":GPB#Du":GPB#Du":GPB#Du":GPB#Du":GWGVGVGVGVGVGVGVGVGVGVGVGVGVGVGVGVGVGVGVGVGVG]ՑՑՑՑՑՑՑՑՑՑՑՑՑՑՑՑՑՑՑՑՑՑՑՑՑՑՑՑՑՑՑՑՑՑՑՑՑՑՑՑՑՑՑՑՑՑՑՑՑՑՑՑՑՑՑ׬sa͇6sa͇6sa͇6sa͇6sa͇6sbl)Ûl9Ûl9Ûl9Ûl9Ûl9Ûl9Ûl9Ûl9Ûl9Ûl9Ûl9Ûl9Ûl9Â0LLLLLLLLLLLLLLLLLLLLL %BC2C2C2C2C2C2C2C2C2C2C2C2C2C2C2C2C2C2C2C2C2C2C2C2C2C2C2C2C2C2C2C2C2C2C2C2C2C2C2C2C2C2C2C2C2C2C2C2C2C2C2C2C2C1hhhhhhhhhhhhhhhhhhhhhhhhhhhhhhhhhhhhhhhhhhhhhhhhhhhhhdudududududududududududududududududududududuvGVGVGVGVGVGVGVGVGVGVGVGVGVGVGVGVGVGVGVGVGVGVGVGVGVGVGVGVGVGVGVGVGVGVGVGVGVGVGVGVGVGVGVGVGVGVGVGVGVGVGVGVGVGUr8sa͇6sa͇6sa͇6sa͇6sa͇6sa6sa͇6sa͇6sa͇6sa͇6sa͇6sa͇6sa͇6sa͇6sa͇6sa͇6sa͇6sa͇6sa͇6sbVHrHrHrHrHrHrHrHrHrHrHrHrHrHrHrHrHrHrHrHrHrHrHpRC2C2C2C2C2C2C2C2C2C2C2C2C2C2C2C2C2C2C2C2C2C2C2C2C2C2C2C2C2C2C2C2C2C2C2C2C2C2C2C2C2C2C2C2C2C2C2C2C2C2C2C2C2C0D{!l9Ûl9Ûl9Ûl9Ûl9Ûp9Ûl9Ûl9Ûl9Ûl9Ûl9Ûl9Ûl9Ûl9Ûl9Ûl9Ûl9Ûl9Ûl9Û G0LLLLLLLLLLLLLLLLLLLLLPy!ʙ!ʙ!ʙ!ʙ!ʙ!ʙ!ʙ!ʙ!ʙ!ʙ!ʙ!ʙ!ʙ!ʙ!ʙ!ʙ!ʙ!ʙ!ʙ!ʙ!ʙ!ʙ!ʙ!ʙ!ʙ!ʙ!ʙ!ʙ!ʙ!ʙ!ʙ!ʙ!ʙ!ʙ!ʙ!ʙ!ʙ!ʙ!ʙ!ʙ!ʙ!ʙ!ʙ!ʙ!ʙ!ʙ!ʙ!ʙ!ʙ!ʙ!ʙ!ʙ!ʙ!ʙ!.(hhhhhhhhhhhhhhhhhhhhhhhhhhhhhhhhhhhhhhhhhhhhhhhhhhhhhhhhhhhhhhhhhhhhhhhhhhhhh}ՑՑՑՑՑՑՑՑՑՑՑՑՑՑՑՑՑՑՑՑՑՑՑՑՑՑՑՑՑՑՑՑՑՑՑՑՑՑՑՑՑՑՑՑՑՑՑՑՑՑՑՑՑՑՑՑՑՑՑՑՑՑՑՑՑՑՑՑՑՑՑՑՑՑՑՑՑXBlQ6(M&bDآlQ6(M&bDآlQ6(M&nM&bDآlQ6(M&bDآlQ6(M&bDآlQ6(M&bDآlQ6(M&bDآlQ6(M&bDآlQ6(M&bDآlQ#Du":GPB#Du":GPB#Du":":GPB#Du":GPB#Du":GPB#Du":GPB#Du":GPB#Du":GPB#Du":GPB#DuT44444444444444444444= 莬########################################################YÛl9Ûl9Ûl9Ûl9Ûl9ŌSa͇6sa͇6sa͇6sa͇6sa͇6sa͇6sa͇6sa͇6sa͇6sa͇6sa͇6sa͇6sa͇6sa͇a!ʙ!ʙ!ʙ!ʙ!ʙ!ʙ!ʙ!ʙ!ʙ!ʙ!ʙ!ʙ!ʙ!ʙ!ʙ!ʙ!ʙ!ʙ!ʙ!ʙ!ʘAFJ*d*d*d*d*d*d*d*d*d*d*d*d*d*d*d*d*d*d*d*d*d*d*d*d*d*d*d*d*d*d*d*d*d*d*d*d*d*d*d*d*d*d*d*d*d*d*d*d*d*d*d*d*d*c P쎬pÛl9Ûl9Ûl9Ûl9Ûl9Ü l9Ûl9Ûl9Ûl9Ûl9Ûl9Ûl9Ûl9Ûl9Ûl9Ûl9Ûl9Ûl9Ûl9ĬLLLLLLLLLLLLLLLLLLLLLPइ*d*d*d*d*d*d*d*d*d*d*d*d*d*d*d*d*d*d*d*d*d*d*d*d*d*d*d*d*d*d*d*d*d*d*d*d*d*d*d*d*d*d*d*d*d*d*d*d*d*d*d*d*d*`ՑՑՑՑՑՑՑՑՑՑՑՑՑՑՑՑՑՑՑՑՑՑՑՑՑՑՑՑՑՑՑՑՑՑՑՑՑՑՑՑՑՑՑՑՑՑՑՑՑՑՑՑՑՑՑՑՑՑՑՑՑՑՑՑՑՑՑՑՑՑՑՑՑՑՑՑՑC6sa͇6sa͇6sa͇6sa͇6sa͇6s͇6sa͇6sa͇6sa͇6sa͇6sa͇6sa͇6sa͇6sa͇6sa͇6sa͇6sa͇6sa͇6sa͇6naʙ!ʙ!ʙ!ʙ!ʙ!ʙ!ʙ!ʙ!ʙ!ʙ!ʙ!ʙ!ʙ!ʙ!ʙ!ʙ!ʙ!ʙ!ʙ!ʙ!ʙ!ʡ!C2C2C2C2C2C2C2C2C2C2C2C2C2C2C2C2C2C2C2C2C2C2C2C2C2C2C2C2C2C2C2C2C2C2C2C2C2C2C2C2C2C2C2C2C2C2C2C2C2C2C2C2C2C2C\P##############################################################################آlQ6(M&bDآlQ6(M&bDآlQ6(M&!M&bDآlQ6(M&bDآlQ6(M&bDآlQ6(M&bDآlQ6(M&bDآlQ6(M&bDآlQ6(M&bDأUGPB#Du":GPB#Du":GPB#Du#Du":GPB#Du":GPB#Du":GPB#Du":GPB#Du":GPB#Du":GPB#Du":GP^hhhhhhhhhhhhhhhhhhhhzYYYYYYYYYYYYYYYYYYYYYvGVGVGVGVGVGVGVGVGVGVGVGVGVGVGVGVGVGVGVGVGVGVGVGVGVGVGVGVGVGVGVGVGVGVGVGVGVGVGVGVGVGVGVGVGVGVGVGVGVGVGVGVGVGVGVG^a͇6sa͇6sa͇6sa͇6sa͇6sa͋Ûl9Ûl9Ûl9Ûl9Ûl9Ûl9Ûl9Ûl9Ûl9Ûl9Ûl9Ûl9Ûl9Û2C2C2C2C2C2C2C2C2C2C2C2C2C2C2C2C2C2C2C2C2C0 TTTTTTTTTTTTTTTTTTTTTTTTTTTTTTTTTTTTTTTTTTTTTTTTTTTTTTǺՑՑՑՑՑՑՑՑՑՑՑՑՑՑՑՑՑՑՑՑՑYYYYYYYYYYYYYYYYYYYYYYYYYYYYYYYYYYYYYYYYYYYYYYYYYYYYYU͇6sa͇6sa͇6sa͇6sa͇6sa͇8sa͇6sa͇6sa͇6sa͇6sa͇6sa͇6sa͇6sa͇6sa͇6sa͇6sa͇6sa͇6sa͇6sa͉Y!ʙ!ʙ!ʙ!ʙ!ʙ!ʙ!ʙ!ʙ!ʙ!ʙ!ʙ!ʙ!ʙ!ʙ!ʙ!ʙ!ʙ!ʙ!ʙ!ʙ!ʙ!ʡ!ITTTTTTTTTTTTTTTTTTTTTTTTTTTTTTTTTTTTTTTTTTTTTTTTTTTTTTCCCCCCCCCCCCCCCCCCCCCCCCCCCCCCCCCCCCCCCCCCCCCCCCCCCCCCCCCCCCCCCCCCCCCCCCCCCCCW#############################################################################l9Ûl9Ûl9Ûl9Ûl9Ûl9l9Ûl9Ûl9Ûl9Ûl9Ûl9Ûl9Ûl9Ûl9Ûl9Ûl9Ûl9Ûl9Ûl)Õ2C2C2C2C2C2C2C2C2C2C2C2C2C2C2C2C2C2C2C2C2CBC*d*d*d*d*d*d*d*d*d*d*d*d*d*d*d*d*d*d*d*d*d*d*d*d*d*d*d*d*d*d*d*d*d*d*d*d*d*d*d*d*d*d*d*d*d*d*d*d*d*d*d*d*d*dGVGVGVGVGVGVGVGVGVGVGVGVGVGVGVGVGVGVGVGVGVGVGVGVGVGVGVGVGVGVGVGVGVGVGVGVGVGVGVGVGVGVGVGVGVGVGVGVGVGVGVGVGVGVGVGVGVGVGVGVGVGVGVGVGVGVGVGVGVGVGVGVGVGVGVGVGVGUa DآlQ6(M&bDآlQ6(M&bDآlQ6(MB!6(M&bDآlQ6(M&bDآlQ6(M&bDآlQ6(M&bDآlQ6(M&bDآlQ6(M&bDآlQ6(M&bF":GPB#Du":GPB#Du":GPGPB#Du":GPB#Du":GPB#Du":GPB#Du":GPB#Du":GPB#Du":GPB#Du":P44444444444444444444444444444444444444444444444444444447::::::::::::::::::::::쎬fÛl9Ûl9Ûl9Ûl9Ûl9Û3aM6sa͇6sa͇6sa͇6sa͇6sa͇6sa͇6sa͇6sa͇6sa͇6sa͇6sa͇6sa͇6sa͇6d*d*d*d*d*d*d*d*d*d*d*d*d*d*d*d*d*d*d*d*d*a*t4444444444444444444445CCCCCCCCCCCCCCCCCCCCCCCCCCCCCCCCCCCCCCCCCCCCCCCCCCCCCC######################::::::::::::::::::::::::::::::::::::::::::::::::::::::Ûl9Ûl9Ûl9Ûl9Ûl9Ûp)Ûl9Ûl9Ûl9Ûl9Ûl9Ûl9Ûl9Ûl9Ûl9Ûl9Ûl9Ûl9Ûl9ÛC2C2C2C2C2C2C2C2C2C2C2C2C2C2C2C2C2C2C2C2C2CBC#ކVGVGVGVGVGVGVGVGVGVGVGVGVGVGVGVGVGVGVGVGVGVGVGVGVGVGVGVGVGVGVGVGVGVGVGVGVGVGVGVGVGVGVGVGVGVGVGVGVGVGVGVGVGVGVGVGVGVGVGVGVGVGVGVGVGVGVGVGVGVGVGVGVGVGVGVGVGW sa͇6sa͇6sa͇6sa͇6sa͇6s6sa͇6sa͇6sa͇6sa͇6sa͇6sa͇6sa͇6sa͇6sa͇6sa͇6sa͇6sa͇6sa͇6R=*d*d*d*d*d*d*d*d*d*d*d*d*d*d*d*d*d*d*d*d*d*+TTTTTTTTTTTTTTTTTTTTTTTTTTTTTTTTTTTTTTTTTTTTTTTTTTTTTT qCCCCCCCCCCCCCCCCCCCCCCCCCCCCCCCCCCCCCCCCCCCCCCCCCCCCCCCCCCCCCCCCCCCCCCCCCCCCCC쎬bDآlQ6(M&bDآlQ6(M&bDآlQ6(pBlQ6(M&bDآlQ6(M&bDآlQ6(M&bDآlQ6(M&bDآlQ6(M&bDآlQ6(M&bDآlQ6(M&bVB#Du":GPB#Du":GPB#Du":GPB#Du":GPB#Du":GPB#Du":GPB#Du":GPB#Du":GPB#Du":GPB#DuzhhhhhhhhhhhhhhhhhhhhhhhhhhhhhhhhhhhhhhhhhhhhhhhhhhhhhhhoDudududududududududududududududududududududuYYYYYYYYYYYYYYYYYYYYYYYYYYYYYYYYYYYYYYYYYYYYYYYYYYYYYYYz͇6sa͇6sa͇6sa͇6sa͇6sa͇6,f›l9Ûl9Ûl9Ûl9Ûl9Ûl9Ûl9Ûl9Ûl9Ûl9Ûl9Ûl9Ûl9Ûl8#TTTTTTTTTTTTTTTTTTTTT 2T$9S$9S$9S$9S$9S$9S$9S$9S$9S$9S$9S$9S$9S$9S$9S$9S$9S$9S$9S$9S$9S$9S$9S$9S$9S$9S$9S$9S$9S$9S$9S$9S$9S$9S$9S$9S$9S$9S$9S$9S$9S$9S$9S$9S$9S$9S$9S$9S$9S$9S$9S$9S$9S$9ShhhhhhhhhhhhhhhhhhhhhjGVGVGVGVGVGVGVGVGVGVGVGVGVGVGVGVGVGVGVGVGVGWdudududududududududududududududududududududududududududududududududududududududududududududududududududududuW#6sa͇6sa͇6sa͇6sa͇6sa͇6Sa͇6sa͇6sa͇6sa͇6sa͇6sa͇6sa͇6sa͇6sa͇6sa͇6sa͇6sa͇6sa͇6sa͇6%d*d*d*d*d*d*d*d*d*d*d*d*d*d*d*d*d*d*d*d*d*d*$9S$9S$9S$9S$9S$9S$9S$9S$9S$9S$9S$9S$9S$9S$9S$9S$9S$9S$9S$9S$9S$9S$9S$9S$9S$9S$9S$9S$9S$9S$9S$9S$9S$9S$9S$9S$9S$9S$9S$9S$9S$9S$9S$9S$9S$9S$9S$9S$9S$9S$9S$9S$9S$9SG ^Ûl9Ûl9Ûl9Ûl9Ûl9l9Ûl9Ûl9Ûl9Ûl9Ûl9Ûl9Ûl9Ûl9Ûl9Ûl9Ûl9Ûl9Ûl9{sTTTTTTTTTTTTTTTTTTTTTU WↆYYYYYYYYYYYYYYYYYYYYYYYYYYYYYYYYYYYYYYYYYYYYYYYYYYYYYYYYYYYYYYYYYYYYYYYYYYYYYU&bDآlQ6(M&bDآlQ6(M&bDآlQ6 آlQ6(M&bDآlQ6(M&bDآlQ6(M&bDآlQ6(M&bDآlQ6(M&bDآlQ6(M&bDآlQ6(M&":GPB#Du":GPB#Du":GPB#B#Du":GPB#Du":GPB#Du":GPB#Du":GPB#Du":GPB#Du":GPB#Du":GPCCCCCCCCCCCCCCCCCCCCCވ::::::::::::::::::::::::::::::::::::::::::::::::::::::::l9Ûl9Ûl9Ûl9Ûl9ÛlXͅ6sa͇6sa͇6sa͇6sa͇6sa͇6sa͇6sa͇6sa͇6sa͇6sa͇6sa͇6sa͇6sa͇6pFdHrHrHrHrHrHrHrHrHrHrHrHrHrHrHrHrHrHrHrHrHrHrHrHrHrHrHrHrHrHrHrHrHrHrHrHrHrHrHrHrHrHrHrHrHrHrHrHrHrHrHrHrHrHr= 쎬Gl9Ûl9Ûl9Ûl9Ûl9Ûl9Ûl9Ûl9Ûl9Ûl9Ûl9Ûl9Ûl9Ûl9Ûl9Ûl9Ûl9Ûl9Ûl9ÛlJTTTTTTTTTTTTTTTTTTTTTU  HrHrHrHrHrHrHrHrHrHrHrHrHrHrHrHrHrHrHrHrHrHrHrHrHrHrHrHrHrHrHrHrHrHrHrHrHrHrHrHrHrHrHrHrHrHrHrHrHrHrHrHrHrHrzYYYYYYYYYYYYYYYYYYYYYYYYYYYYYYYYYYYYYYYYYYYYYYYYYYYYYYYYYYYYYYYYYYYYYYYYYYYYY_3a͇6sa͇6sa͇6sa͇6sa͇6sa0sa͇6sa͇6sa͇6sa͇6sa͇6sa͇6sa͇6sa͇6sa͇6sa͇6sa͇6sa͇6sa͇6saH$9S$9S$9S$9S$9S$9S$9S$9S$9S$9S$9S$9S$9S$9S$9S$9S$9S$9S$9S$9S$9S$9S$9S$9S$9S$9S$9S$9S$9S$9S$9S$9S$9S$9S$9S$9S$9S$9S$9S$9S$9S$9S$9S$9S$9S$9S$9S$9S$9S$9S$9S$9S$9S$9S$8% ::::::::::::::::::::::::::::::::::::::::::::::::::::::::::::::::::::::::::::::M&bDآlQ6(M&bDآlQ6(M&bDآmA DآlQ6(M&bDآlQ6(M&bDآlQ6(M&bDآlQ6(M&bDآlQ6(M&bDآlQ6(M&bDآlQ6(M5XDu":GPB#Du":GPB#Du":G\":GPB#Du":GPB#Du":GPB#Du":GPB#Du":GPB#Du":GPB#Du":GPB#DuꆆՑՑՑՑՑՑՑՑՑՑՑՑՑՑՑՑՑՑՑՑՑdudududududududududududududududududududududududududududududududududududududududududududududududududududududududu6sa͇6sa͇6sa͇6sa͇6sa͇6ر l9Ûl9Ûl9Ûl9Ûl9Ûl9Ûl9Ûl9Ûl9Ûl9Ûl9Ûl9Ûl9Ûl9?c$9S$9S$9S$9S$9S$9S$9S$9S$9S$9S$9S$9S$9S$9S$9S$9S$9S$9S$9S$9S$9S(PLLLLLLLLLLLLLLLLLLLLLLLLLLLLLLLLLLLLLLLLLLLLLLLLLLLLLL{YYYYYYYYYYYYYYYYYYYYY]ՑՑՑՑՑՑՑՑՑՑՑՑՑՑՑՑՑՑՑՑՑՑՑՑՑՑՑՑՑՑՑՑՑՑՑՑՑՑՑՑՑՑՑՑՑՑՑՑՑՑՑՑՑ\sa͇6sa͇6sa͇6sa͇6sa͇6sM6sa͇6sa͇6sa͇6sa͇6sa͇6sa͇6sa͇6sa͇6sa͇6sa͇6sa͇6sa͇6sa͇6ؕLLLLLLLLLLLLLLLLLLLLLLLLLLLLLLLLLLLLLLLLLLLLLLLLLLLLLL44444444444444444444444444444444444444444444444444444444444444444444444444445z:::::::::::::::::::::::::::::::::::::::::::::::::::::::::::::::::::::::::::::HfÛl9Ûl9Ûl9Ûl9Ûl9Ü`9Ûl9Ûl9Ûl9Ûl9Ûl9Ûl9Ûl9Ûl9Ûl9Ûl9Ûl9Ûl9Ûl9‘9S$9S$9S$9S$9S$9S$9S$9S$9S$9S$9S$9S$9S$9S$9S$9S$9S$9S$9S$9S$9S$9T$9^HrHrHrHrHrHrHrHrHrHrHrHrHrHrHrHrHrHrHrHrHrHrHrHrHrHrHrHrHrHrHrHrHrHrHrHrHrHrHrHrHrHrHrHrHrHrHrHrHrHrHrHrHrHrHpKdudududududududududududududududududududududududududududududududududududududududududududududududududududududududududududududududududududududududududududududuVM&bDآlQ6(M&bDآlQ6(M&bDۄ bDآlQ6(M&bDآlQ6(M&bDآlQ6(M&bDآlQ6(M&bDآlQ6(M&bDآlQ6(M&bDآlQ6(jB#Du":GPB#Du":GPB#DuDu":GPB#Du":GPB#Du":GPB#Du":GPB#Du":GPB#Du":GPB#Du":GPB# CCCCCCCCCCCCCCCCCCCCCCCCCCCCCCCCCCCCCCCCCCCCCCCCCCCCCCCCz######################l9Ûl9Ûl9Ûl9Ûl9Ûl9c6sa͇6sa͇6sa͇6sa͇6sa͇6sa͇6sa͇6sa͇6sa͇6sa͇6sa͇6sa͇6sa͇6sa~HrHrHrHrHrHrHrHrHrHrHrHrHrHrHrHrHrHrHrHrHrQ!ʙ!ʙ!ʙ!ʙ!ʙ!ʙ!ʙ!ʙ!ʙ!ʙ!ʙ!ʙ!ʙ!ʙ!ʙ!ʙ!ʙ!ʙ!ʙ!ʙ!ʙ!ʙ!ʙ!ʙ!ʙ!ʙ!ʙ!ʙ!ʙ!ʙ!ʙ!ʙ!ʙ!ʙ!ʙ!ʙ!ʙ!ʙ!ʙ!ʙ!ʙ!ʙ!ʙ!ʙ!ʙ!ʙ!ʙ!ʙ!ʙ!ʙ!ʙ!ʙ!ʙ!ʘCCCCCCCCCCCCCCCCCCCCCCT44444444444444444444444444444444444444444444444444444?::::::::::::::::::::::######################################################9Ûl9Ûl9Ûl9Ûl9Ûl9l9Ûl9Ûl9Ûl9Ûl9Ûl9Ûl9Ûl9Ûl9Ûl9Ûl9Ûl9Ûl9Ûl9+$9S$9S$9S$9S$9S$9S$9S$9S$9S$9S$9S$9S$9S$9S$9S$9S$9S$9S$9S$9S$9S$9T$8)!ʙ!ʙ!ʙ!ʙ!ʙ!ʙ!ʙ!ʙ!ʙ!ʙ!ʙ!ʙ!ʙ!ʙ!ʙ!ʙ!ʙ!ʙ!ʙ!ʙ!ʙ!ʙ!ʙ!ʙ!ʙ!ʙ!ʙ!ʙ!ʙ!ʙ!ʙ!ʙ!ʙ!ʙ!ʙ!ʙ!ʙ!ʙ!ʙ!ʙ!ʙ!ʙ!ʙ!ʙ!ʙ!ʙ!ʙ!ʙ!ʙ!ʙ!ʙ!ʙ!ʙ!ʘ"=hhhhhhhhhhhhhhhhhhhhhhhhhhhhhhhhhhhhhhhhhhhhhhhhhhhhhhhhhhhhhhhhhhhhhhhhhhhhjdududududududududududududududududududududududududududududududududududududududududududududududududududududududududududududududududududududududududududududu~͇6sa͇6sa͇6sa͇6sa͇6sa͇8sa͇6sa͇6sa͇6sa͇6sa͇6sa͇6sa͇6sa͇6sa͇6sa͇6sa͇6sa͇6sa͇6saͅ#ۘrHrHrHrHrHrHrHrHrHrHrHrHrHrHrHrHrHrHrHrHrHrHrLLLLLLLLLLLLLLLLLLLLLLLLLLLLLLLLLLLLLLLLLLLLLLLLLLLLLL44444444444444444444444444444444444444444444444444444444444444444444444444444>!6(M&bDآlQ6(M&bDآlQ6(M&bA&bDآlQ6(M&bDآlQ6(M&bDآlQ6(M&bDآlQ6(M&bDآlQ6(M&bDآlQ6(M&bDآlQ6(a":GPB#Du":GPB#Du":GPpB#Du":GPB#Du":GPB#Du":GPB#Du":GPB#Du":GPB#Du":GPB#Du":GWGVGVGVGVGVGVGVGVGVGVGVGVGVGVGVGVGVGVGVGVGVG]ՑՑՑՑՑՑՑՑՑՑՑՑՑՑՑՑՑՑՑՑՑՑՑՑՑՑՑՑՑՑՑՑՑՑՑՑՑՑՑՑՑՑՑՑՑՑՑՑՑՑՑՑՑՑՑ׬sa͇6sa͇6sa͇6sa͇6sa͇6sbl)Ûl9Ûl9Ûl9Ûl9Ûl9Ûl9Ûl9Ûl9Ûl9Ûl9Ûl9Ûl9Ûl9Â0LLLLLLLLLLLLLLLLLLLLL %BC2C2C2C2C2C2C2C2C2C2C2C2C2C2C2C2C2C2C2C2C2C2C2C2C2C2C2C2C2C2C2C2C2C2C2C2C2C2C2C2C2C2C2C2C2C2C2C2C2C2C2C2C2C1hhhhhhhhhhhhhhhhhhhhhhhhhhhhhhhhhhhhhhhhhhhhhhhhhhhhhdudududududududududududududududududududududuvGVGVGVGVGVGVGVGVGVGVGVGVGVGVGVGVGVGVGVGVGVGVGVGVGVGVGVGVGVGVGVGVGVGVGVGVGVGVGVGVGVGVGVGVGVGVGVGVGVGVGVGVGVGUr8sa͇6sa͇6sa͇6sa͇6sa͇6sa6sa͇6sa͇6sa͇6sa͇6sa͇6sa͇6sa͇6sa͇6sa͇6sa͇6sa͇6sa͇6sa͇6sbVHrHrHrHrHrHrHrHrHrHrHrHrHrHrHrHrHrHrHrHrHrHrHpRC2C2C2C2C2C2C2C2C2C2C2C2C2C2C2C2C2C2C2C2C2C2C2C2C2C2C2C2C2C2C2C2C2C2C2C2C2C2C2C2C2C2C2C2C2C2C2C2C2C2C2C2C2C0D{!l9Ûl9Ûl9Ûl9Ûl9Ûp9Ûl9Ûl9Ûl9Ûl9Ûl9Ûl9Ûl9Ûl9Ûl9Ûl9Ûl9Ûl9Ûl9Û G0LLLLLLLLLLLLLLLLLLLLLPy!ʙ!ʙ!ʙ!ʙ!ʙ!ʙ!ʙ!ʙ!ʙ!ʙ!ʙ!ʙ!ʙ!ʙ!ʙ!ʙ!ʙ!ʙ!ʙ!ʙ!ʙ!ʙ!ʙ!ʙ!ʙ!ʙ!ʙ!ʙ!ʙ!ʙ!ʙ!ʙ!ʙ!ʙ!ʙ!ʙ!ʙ!ʙ!ʙ!ʙ!ʙ!ʙ!ʙ!ʙ!ʙ!ʙ!ʙ!ʙ!ʙ!ʙ!ʙ!ʙ!ʙ!ʙ!.(hhhhhhhhhhhhhhhhhhhhhhhhhhhhhhhhhhhhhhhhhhhhhhhhhhhhhhhhhhhhhhhhhhhhhhhhhhhhh}ՑՑՑՑՑՑՑՑՑՑՑՑՑՑՑՑՑՑՑՑՑՑՑՑՑՑՑՑՑՑՑՑՑՑՑՑՑՑՑՑՑՑՑՑՑՑՑՑՑՑՑՑՑՑՑՑՑՑՑՑՑՑՑՑՑՑՑՑՑՑՑՑՑՑՑՑՑXBlQ6(M&bDآlQ6(M&bDآlQ6(M&nM&bDآlQ6(M&bDآlQ6(M&bDآlQ6(M&bDآlQ6(M&bDآlQ6(M&bDآlQ6(M&bDآlQ#Du":GPB#Du":GPB#Du":":GPB#Du":GPB#Du":GPB#Du":GPB#Du":GPB#Du":GPB#Du":GPB#DuT44444444444444444444= 莬########################################################YÛl9Ûl9Ûl9Ûl9Ûl9ŌSa͇6sa͇6sa͇6sa͇6sa͇6sa͇6sa͇6sa͇6sa͇6sa͇6sa͇6sa͇6sa͇6sa͇a!ʙ!ʙ!ʙ!ʙ!ʙ!ʙ!ʙ!ʙ!ʙ!ʙ!ʙ!ʙ!ʙ!ʙ!ʙ!ʙ!ʙ!ʙ!ʙ!ʙ!ʘAFJ*d*d*d*d*d*d*d*d*d*d*d*d*d*d*d*d*d*d*d*d*d*d*d*d*d*d*d*d*d*d*d*d*d*d*d*d*d*d*d*d*d*d*d*d*d*d*d*d*d*d*d*d*d*c P쎬pÛl9Ûl9Ûl9Ûl9Ûl9Ü l9Ûl9Ûl9Ûl9Ûl9Ûl9Ûl9Ûl9Ûl9Ûl9Ûl9Ûl9Ûl9Ûl9ĬLLLLLLLLLLLLLLLLLLLLLPइ*d*d*d*d*d*d*d*d*d*d*d*d*d*d*d*d*d*d*d*d*d*d*d*d*d*d*d*d*d*d*d*d*d*d*d*d*d*d*d*d*d*d*d*d*d*d*d*d*d*d*d*d*d*`ՑՑՑՑՑՑՑՑՑՑՑՑՑՑՑՑՑՑՑՑՑՑՑՑՑՑՑՑՑՑՑՑՑՑՑՑՑՑՑՑՑՑՑՑՑՑՑՑՑՑՑՑՑՑՑՑՑՑՑՑՑՑՑՑՑՑՑՑՑՑՑՑՑՑՑՑՑC6sa͇6sa͇6sa͇6sa͇6sa͇6s͇6sa͇6sa͇6sa͇6sa͇6sa͇6sa͇6sa͇6sa͇6sa͇6sa͇6sa͇6sa͇6sa͇6naʙ!ʙ!ʙ!ʙ!ʙ!ʙ!ʙ!ʙ!ʙ!ʙ!ʙ!ʙ!ʙ!ʙ!ʙ!ʙ!ʙ!ʙ!ʙ!ʙ!ʙ!ʡ!C2C2C2C2C2C2C2C2C2C2C2C2C2C2C2C2C2C2C2C2C2C2C2C2C2C2C2C2C2C2C2C2C2C2C2C2C2C2C2C2C2C2C2C2C2C2C2C2C2C2C2C2C2C2C\P##############################################################################آlQ6(M&bDآlQ6(M&bDآlQ6(M&!M&bDآlQ6(M&bDآlQ6(M&bDآlQ6(M&bDآlQ6(M&bDآlQ6(M&bDآlQ6(M&bDأUGPB#Du":GPB#Du":GPB#Du#Du":GPB#Du":GPB#Du":GPB#Du":GPB#Du":GPB#Du":GPB#Du":GP^hhhhhhhhhhhhhhhhhhhhzYYYYYYYYYYYYYYYYYYYYYvGVGVGVGVGVGVGVGVGVGVGVGVGVGVGVGVGVGVGVGVGVGVGVGVGVGVGVGVGVGVGVGVGVGVGVGVGVGVGVGVGVGVGVGVGVGVGVGVGVGVGVGVGVGVGVG^a͇6sa͇6sa͇6sa͇6sa͇6sa͋Ûl9Ûl9Ûl9Ûl9Ûl9Ûl9Ûl9Ûl9Ûl9Ûl9Ûl9Ûl9Ûl9Û2C2C2C2C2C2C2C2C2C2C2C2C2C2C2C2C2C2C2C2C2C0 TTTTTTTTTTTTTTTTTTTTTTTTTTTTTTTTTTTTTTTTTTTTTTTTTTTTTTǺՑՑՑՑՑՑՑՑՑՑՑՑՑՑՑՑՑՑՑՑՑYYYYYYYYYYYYYYYYYYYYYYYYYYYYYYYYYYYYYYYYYYYYYYYYYYYYYU͇6sa͇6sa͇6sa͇6sa͇6sa͇8sa͇6sa͇6sa͇6sa͇6sa͇6sa͇6sa͇6sa͇6sa͇6sa͇6sa͇6sa͇6sa͇6sa͉Y!ʙ!ʙ!ʙ!ʙ!ʙ!ʙ!ʙ!ʙ!ʙ!ʙ!ʙ!ʙ!ʙ!ʙ!ʙ!ʙ!ʙ!ʙ!ʙ!ʙ!ʙ!ʡ!ITTTTTTTTTTTTTTTTTTTTTTTTTTTTTTTTTTTTTTTTTTTTTTTTTTTTTTCCCCCCCCCCCCCCCCCCCCCCCCCCCCCCCCCCCCCCCCCCCCCCCCCCCCCCCCCCCCCCCCCCCCCCCCCCCCCW#############################################################################l9Ûl9Ûl9Ûl9Ûl9Ûl9l9Ûl9Ûl9Ûl9Ûl9Ûl9Ûl9Ûl9Ûl9Ûl9Ûl9Ûl9Ûl9Ûl)Õ2C2C2C2C2C2C2C2C2C2C2C2C2C2C2C2C2C2C2C2C2CBC*d*d*d*d*d*d*d*d*d*d*d*d*d*d*d*d*d*d*d*d*d*d*d*d*d*d*d*d*d*d*d*d*d*d*d*d*d*d*d*d*d*d*d*d*d*d*d*d*d*d*d*d*d*dGVGVGVGVGVGVGVGVGVGVGVGVGVGVGVGVGVGVGVGVGVGVGVGVGVGVGVGVGVGVGVGVGVGVGVGVGVGVGVGVGVGVGVGVGVGVGVGVGVGVGVGVGVGVGVGVGVGVGVGVGVGVGVGVGVGVGVGVGVGVGVGVGVGVGVGVGVGUa DآlQ6(M&bDآlQ6(M&bDآlQ6(MB!6(M&bDآlQ6(M&bDآlQ6(M&bDآlQ6(M&bDآlQ6(M&bDآlQ6(M&bDآlQ6(M&bF":GPB#Du":GPB#Du":GPGPB#Du":GPB#Du":GPB#Du":GPB#Du":GPB#Du":GPB#Du":GPB#Du":P44444444444444444444444444444444444444444444444444444447::::::::::::::::::::::쎬fÛl9Ûl9Ûl9Ûl9Ûl9Û3aM6sa͇6sa͇6sa͇6sa͇6sa͇6sa͇6sa͇6sa͇6sa͇6sa͇6sa͇6sa͇6sa͇6d*d*d*d*d*d*d*d*d*d*d*d*d*d*d*d*d*d*d*d*d*a*t4444444444444444444445CCCCCCCCCCCCCCCCCCCCCCCCCCCCCCCCCCCCCCCCCCCCCCCCCCCCCC######################::::::::::::::::::::::::::::::::::::::::::::::::::::::Ûl9Ûl9Ûl9Ûl9Ûl9Ûp)Ûl9Ûl9Ûl9Ûl9Ûl9Ûl9Ûl9Ûl9Ûl9Ûl9Ûl9Ûl9Ûl9ÛC2C2C2C2C2C2C2C2C2C2C2C2C2C2C2C2C2C2C2C2C2CBC#ކVGVGVGVGVGVGVGVGVGVGVGVGVGVGVGVGVGVGVGVGVGVGVGVGVGVGVGVGVGVGVGVGVGVGVGVGVGVGVGVGVGVGVGVGVGVGVGVGVGVGVGVGVGVGVGVGVGVGVGVGVGVGVGVGVGVGVGVGVGVGVGVGVGVGVGVGVGW sa͇6sa͇6sa͇6sa͇6sa͇6s6sa͇6sa͇6sa͇6sa͇6sa͇6sa͇6sa͇6sa͇6sa͇6sa͇6sa͇6sa͇6sa͇6R=*d*d*d*d*d*d*d*d*d*d*d*d*d*d*d*d*d*d*d*d*d*+TTTTTTTTTTTTTTTTTTTTTTTTTTTTTTTTTTTTTTTTTTTTTTTTTTTTTT qCCCCCCCCCCCCCCCCCCCCCCCCCCCCCCCCCCCCCCCCCCCCCCCCCCCCCCCCCCCCCCCCCCCCCCCCCCCCCC쎬bDآlQ6(M&bDآlQ6(M&bDآlQ6(pBlQ6(M&bDآlQ6(M&bDآlQ6(M&bDآlQ6(M&bDآlQ6(M&bDآlQ6(M&bDآlQ6(M&bVB#Du":GPB#Du":GPB#Du":GPB#Du":GPB#Du":GPB#Du":GPB#Du":GPB#Du":GPB#Du":GPB#DuzhhhhhhhhhhhhhhhhhhhhhhhhhhhhhhhhhhhhhhhhhhhhhhhhhhhhhhhoDudududududududududududududududududududududuYYYYYYYYYYYYYYYYYYYYYYYYYYYYYYYYYYYYYYYYYYYYYYYYYYYYYYYzd2p8L&N' d2p8L&N' d2p8L&N'N' d2p8L&N' d2p8L&N' d2p8L&N' d2p8L&N' d2p8L&N' d2p8L&N' d2p8Lviiiiiiiiiiiiiiiiiiiiiiiiiiiiiiiiiiiiiii"""""""""""""""""""""""""""""""""""""""""""""""""""""""""""""""""""""""""""""##r1#r1#r1#r1#r1#r1#r1#r1#r1#r1#r1#r1#r1#r1#r1#r1#r1#r1#r1#r1#r1#r1#r1#r1#r1#r1#r1#r1#r1#r1#r1#r1#r1#r1#r1#r1#r1#r1#ulI\\pB B\dqG`Ɏ"CLi$QVP6>4)j$qqhZhE({`1:GOGOCqLƆ1XCBS4GIj<YA2qڂ(wk\ydžB#1Zq}:LHdG(~50b aHuGNMS{Tqǜx#(~ih_jZ(vP`68ӏG1ø"?izz}iд,7h]=8"<#":F 4c`ŰIhA&Q[U2^###@rI"iUMғA/_ӠDt=,F[#q`u{[Z#Du^dudt:_/&A*HYHCJ[#L{"H% iQ#I&aSMCh """? j^_KGCT jP(FRjJ #)M#mXi1T& Ђ$¦5Lu)I\###2:"29###dtDdqGDFGdtDdqGDFGdtDdqGDFGdtDdqGDFGdtDdqGDFGdtDdqjhihihihihihihovZduiխզGVZduiզGVZduiզGVZduiզGVZduiզGVZduiզGVZdux"9DI"Nu$'P:I"NuDB$'P:I"NuDB$'P:I"NuD###2:"28###dtDdqGDFGdtDdqGDFGdtDdqGDFGdtDdqGDFGdtDdqGDFGdtDdqhiihihihihihiqduiզGVXE쎭2:#L2:#L2:#L2:#L2:#L2:Ib&\Ib& Ib& Ib& Ib& Ib& IbGSN8Du8GSN8Du8GSN8Du8GSN8Du8GSN8Du8GSN8Du8GSN8Du8,t4CM 44CM 44CM 44CM 44CM 44CM 44CLőզGVZduiզGVZduiզGVZduiզGVZduiզGVZduiզGVZduiզGVZq'P:I"NzDB$'P:I"NuDB$'P:I"NuDB$'P:I=q###2:"28#3#2:"28###2:"28###2:"28###2:"28###2:"28###2:"2,2:#L2:#L2:##:I"NuDB$'P:F""#uDB$'P:I"NuDB$К8###2:%8|2:"28###2:"28###2:"28###2:"28###2:}44CM 5M 44CM 6fDB"RCM 44CM 44CM 44Ю;L2:#N#L2:#[:#L2:#L2:#LI"Nu$=B$'P:I"N$>:I"NuDB$'P:I"N|GDFGdtDdsGDFG":"28###2:"28_c8GDFGdtDdqGDFGdtDdqGDFGduZhiihiDA;AFM 44CM 44CM 44C{#Ll2:#L2:Ћ;L2:#L2:#L2:#"Nuq'P:I"NuDC""^Dc#ЈKĽI"NuDB$'P:I"Nu~DtDdqGDFGXDtDdr###2:"28###TOCUY̎2:"28###2:"28###2:"28###CM 4445CM 44CM (vU]44CM 44CM 44CM #L2:ZduiզGVZdu!ZduiզGVZduiզGVZduiզL@$ 2L`$ 1L@$`CB#1L@$ 1L@$ 1L@"q#":pq#":pq#hg":pq#":pq#":pq#Ychihi3D"LtB"YSCM 44CM 44CM 44YZduiզGVZduiզGVZduidqiզGVZduiզGVZduiզGVZq'P:I"NzDB$'P:IwDB$'P:I"NuDB$8GDFGdtKqGDFGdtDdqGDFGWC###2:"28###2:"28###2:"2\":"28###2:"28###2:"28###2:"28###2:"28###2:"28OCM 44CM 44CM 44CM 44CM 44CM #L2:#L2:#L2:#L2:#L2:#8DB$'P:I"NuDB$'P:I"NuDB$'P:IL":"8DtDdqGDFGdtDdqGDFGdtDdqGDFGdtDdqGDFGdtDdqGDFGdtDdqhihihihihiqduvGVZduiզGVZduiզGVZduiզGVZduiզGVZduiզGV"9*1L@$ 1L@$ 1L@$ 1L@$ 1L@$ 1+":pq#":pq#":pq#":pq#":pq#":u:hihihihihihi#ز:#L2:#L2:#L2:#L2:#L2:м9DB$'P:I"NuDB$'P:I"NuDB$'P:8DtdGDFGdtDdqGDFGdtDdqGDFGdtDdqGDFGdtDdqGDFGdtDdqGDFGM 44CM 44CM 44CM 44CM 44CM 44ǎ#L2:#L2:#L2:#L2:#L2:#L|DI"NuDB$'P:I"NuDB$'P:I"NuDB̎2:2U###2:"28###2:"28###2:"28###2:"28###2:"28#!hihihihihihi##L2:#L2:#L2:#L2:#L2:#L"NAb$'P:I"NuDB$'P:I"NuDB$'P:I"N#r8###2:"28###2:"28###2:"28###2:"28###2:"28duM 44CM 44CM 44CM 44CM 44CM 4+#+L2:#L2:#L2:#L2:#L2:#L&VF9q٭G$'P:I"NuDB$'P:I"NuDB$'P:I"OEydtL:pI <2:"28###2:"28###2:"28###2:"28###2:"28###2:M ijMM 44CM 44CM 44CM 44CM 44CM LL2:#L2:#L2:#L2:#L2:#L!#GH#I"NuDB$'P:I"NuDB$'P:I"NuD^GM4 M4dtDdqGDFGdtDdqGDFGdtDdqGDFGdtDdqGDFGdtDdqGDFGdt#j3SAkM 44CM 44CM 44CM 44CM 44CM Q #L2:#L2:#L2:#L2:#L2:t(æLyXquDB$'P:I"NuDB$'P:I"NuDB$'ˑiGDFGdtDdqGDFGdtDdqGDFGdtDdqGDFGdtDdqGDFGdtDdqGUtDG;Vֆhihihihihiݬ8Ш쎭2:#L2:#L2:#L2:#L2:#L2:g#DB$'P:I"NuDB$'P:I"NuDB$'P:IL":":zGDFGdtDdqGDFGdtDdqGDFGdtDdqGDFGdtDdqGDFGdtDdqGDFG+!Lꆚhihihihihiőձ զGVZduiզGVZduiզGVZduiզGVZduiզGVZduiզMT:>>$ 1L@$ 1L@$ 1L@$ 1L@$ 1L@$":i}4N8Du8GSN8Du8GSN8Du8GSN8Du8GSN8Du8GSN: iCM 44CM 44CM 44CM 44CM 44Gdt82:#L2:#L2:#L2:#L2:#L2:/8LÄGԡ"NuDB$'P:I"NuDB$'P:I"NuDB$8д Z###2:"28###2:"28###2:"28###2:"28###2:"28###{a5:P#hihihihihihiGA7#L2:#L2:#L2:#L2:#L2:#_&>#$'P:I"NuDB$'P:I"NuDB$'P:I"N\G4/ONL8###2:"28###2:"28###2:"28###2:"28###2:"28~>#44CM 44CM 44CM 44CM 44CM 40D{duqšA #L2:#L2:#L2:#L2:#L2:/$L:GM"#I"NuDB$'P:I"NuDB$'P:I"NuD] G}'hZ dtDdqGDFGdtDdqGDFGdtDdqGDFGdtDdqGDFGdtDdqGDFGdt:5:B#Du":G\":GPB#Du":GPB#Du":GPB#Du":GPB#Du":GPB#Du":GPB#DuiP4444444444444444444444444444444444444444444444+:::::::쎬l9Ûl9Û3aM6sa͇6sa͇6sa͇6sa͇6sa͇6sa͇6sa͇6sa͇6sa͇6sa͇6sa͇ jHrHrHrHrHrHrHrQ!ʙ!ʙ!ʙ!ʙ!ʙ!ʙ!ʙ!ʙ!ʙ!ʙ!ʙ!ʙ!ʙ!ʙ!ʙ!ʙ!ʙ!ʙ!ʙ!ʙ!ʙ!ʙ!ʙ!ʙ!ʙ!ʙ!ʙ!ʙ!ʙ!ʙ!ʙ!ʙ!ʙ!ʙ!ʙ!ʙ!ʙ!ʙ!ʙ!ʙ!ʙ!ʙ!ʙ!ʙ!ʚ44444445CCCCCCCCCCCCCCCCCCCCCCCCCCCCCCCCCCCCCCCCCCCCC~쎬͇6sa͇6sM6sa͇6sa͇6sa͇6sa͇6sa͇6sa͇6sa͇6sa͇6sa͇6sa͇6sa͇6C$9S$9S$9S$9S$9S$9S$9S$9T$8)!ʙ!ʙ!ʙ!ʙ!ʙ!ʙ!ʙ!ʙ!ʙ!ʙ!ʙ!ʙ!ʙ!ʙ!ʙ!ʙ!ʙ!ʙ!ʙ!ʙ!ʙ!ʙ!ʙ!ʙ!ʙ!ʙ!ʙ!ʙ!ʙ!ʙ!ʙ!ʙ!ʙ!ʙ!ʙ!ʙ!ʙ!ʙ!ʙ!ʙ!ʙ!ʙ!ʙ!ʙ!ʙ!::::::::::::::::::::::::::::::::::::::::::::::::::::::l9Ûl9l9Ûl9Ûl9Ûl9Ûl9Ûl9Ûl9Ûl9Ûl9Ûl9Ûl9Ûl#$9S$9S$9S$9S$9S$9S$9S$9S$9S$9S$9S$9S$9S$9S$9S$9S$9S$9S$9S$9S$9S$9S$9S$9S$9S$9S$9S$9S$9S$9S$9S$9S$9S$9S$9S$9S$9S$9S$9S$9S$9S$9S$9S$9S$9S$9N4444444444444444444444444444444444444444444444444444447::::::::::::::::::::::::::::::::::::::::::::::::::::::E;8BlQ6(M&bDۄ bDآlQ6(M&bDآlQ6(M&bDآlQ6(M&bDآlQ6(M&bDآlQ6(M&bDآlQ6(xDu":GPpB#Du":GPB#Du":GPB#Du":GPB#Du":GPB#Du":GPB#Du":}CCCCCCCЮ.:::::::::::::::::::::::::::::::::::::::::::::::Ûl9ÛlXͅ6sa͇6sa͇6sa͇6sa͇6sa͇6sa͇6sa͇6sa͇6sa͇6sa͇6sa͇6%!ʙ!ʙ!ʙ!ʙ!ʙ!ʙ!ʘAFJ*d*d*d*d*d*d*d*d*d*d*d*d*d*d*d*d*d*d*d*d*d*d*d*d*d*d*d*d*d*d*d*d*d*d*d*d*d*d*d*d*d*d*d*d*k ########:::::::::::::::::::::::::::::::::::::::::::::":#6sa͇6sa6sa͇6sa͇6sa͇6sa͇6sa͇6sa͇6sa͇6sa͇6sa͇6sa͇6sa͇6M LLLLLLLPइ*d*d*d*d*d*d*d*d*d*d*d*d*d*d*d*d*d*d*d*d*d*d*d*d*d*d*d*d*d*d*d*d*d*d*d*d*d*d*d*d*d*d*d*d*d"CCCCCCCCCCCCCCCCCCCCCCCCCCCCCCCCCCCCCCCCCCCCCCCCCCCCCCKB#Du":G\":GPB#Du":GPB#Du":GPB#Du":GPB#Du":GPB#Du":GPB#DuiP4444444444444444444444444444444444444444444444+:::::::쎬l9Ûl9Û3aM6sa͇6sa͇6sa͇6sa͇6sa͇6sa͇6sa͇6sa͇6sa͇6sa͇6sa͇ jHrHrHrHrHrHrHrQ!ʙ!ʙ!ʙ!ʙ!ʙ!ʙ!ʙ!ʙ!ʙ!ʙ!ʙ!ʙ!ʙ!ʙ!ʙ!ʙ!ʙ!ʙ!ʙ!ʙ!ʙ!ʙ!ʙ!ʙ!ʙ!ʙ!ʙ!ʙ!ʙ!ʙ!ʙ!ʙ!ʙ!ʙ!ʙ!ʙ!ʙ!ʙ!ʙ!ʙ!ʙ!ʙ!ʙ!ʙ!ʚ44444445CCCCCCCCCCCCCCCCCCCCCCCCCCCCCCCCCCCCCCCCCCCCC~쎬͇6sa͇6sM6sa͇6sa͇6sa͇6sa͇6sa͇6sa͇6sa͇6sa͇6sa͇6sa͇6sa͇6C$9S$9S$9S$9S$9S$9S$9S$9T$8)!ʙ!ʙ!ʙ!ʙ!ʙ!ʙ!ʙ!ʙ!ʙ!ʙ!ʙ!ʙ!ʙ!ʙ!ʙ!ʙ!ʙ!ʙ!ʙ!ʙ!ʙ!ʙ!ʙ!ʙ!ʙ!ʙ!ʙ!ʙ!ʙ!ʙ!ʙ!ʙ!ʙ!ʙ!ʙ!ʙ!ʙ!ʙ!ʙ!ʙ!ʙ!ʙ!ʙ!ʙ!ʙ!::::::::::::::::::::::::::::::::::::::::::::::::::::::l9Ûl9l9Ûl9Ûl9Ûl9Ûl9Ûl9Ûl9Ûl9Ûl9Ûl9Ûl9Ûl#$9S$9S$9S$9S$9S$9S$9S$9S$9S$9S$9S$9S$9S$9S$9S$9S$9S$9S$9S$9S$9S$9S$9S$9S$9S$9S$9S$9S$9S$9S$9S$9S$9S$9S$9S$9S$9S$9S$9S$9S$9S$9S$9S$9S$9S$9N4444444444444444444444444444444444444444444444444444447::::::::::::::::::::::::::::::::::::::::::::::::::::::E;8BlQ6(M&bDۄ bDآlQ6(M&bDآlQ6(M&bDآlQ6(M&bDآlQ6(M&bDآlQ6(M&bDآlQ6(xDu":GPpB#Du":GPB#Du":GPB#Du":GPB#Du":GPB#Du":GPB#Du":}CCCCCCCЮ.:::::::::::::::::::::::::::::::::::::::::::::::Ûl9ÛlXͅ6sa͇6sa͇6sa͇6sa͇6sa͇6sa͇6sa͇6sa͇6sa͇6sa͇6sa͇6%!ʙ!ʙ!ʙ!ʙ!ʙ!ʙ!ʘAFJ*d*d*d*d*d*d*d*d*d*d*d*d*d*d*d*d*d*d*d*d*d*d*d*d*d*d*d*d*d*d*d*d*d*d*d*d*d*d*d*d*d*d*d*d*k ########:::::::::::::::::::::::::::::::::::::::::::::":#6sa͇6sa6sa͇6sa͇6sa͇6sa͇6sa͇6sa͇6sa͇6sa͇6sa͇6sa͇6sa͇6M LLLLLLLPइ*d*d*d*d*d*d*d*d*d*d*d*d*d*d*d*d*d*d*d*d*d*d*d*d*d*d*d*d*d*d*d*d*d*d*d*d*d*d*d*d*d*d*d*d*d"CCCCCCCCCCCCCCCCCCCCCCCCCCCCCCCCCCCCCCCCCCCCCCCCCCCCCCKҡNꆆqvGXbvGVGVGVGVGVGVGVGVGVGVGVGVGVGVGVGVGVGVGVGVGVGVGVGVGVGVGVGVGVGVGVGVGVGVGVGVGVGVGVGVGVGVGVGVGVG_6F;<6sa͇6sa͇6sa͇6sa͇6sa͇6sa͇6sa͇6sa͇6sa͇6sa͇6sa͇6%!ʜ4T$9S$9S$9S$9S$9S$9S$9S$9S$9S$9S$9S$9S$9S$9S$9S$9S$9S$9S$9S$9S$9S$9S$9S$9S$9S$9S$9S$9S$9S$9S$9S$9S$9S$9S$9S$9S$9S$9S$9S$9S$9S$9S$9S$9S$9S^i(}P߲:YYYYYYYYYYYYYYYYYYYYYYYYYYYYYYYYYYYYYYYYYYYY^Û#&sa͇6sa͇6sa͇6sa͇6sa͇6sa͇6sa͇6sa͇6sa͇6sa͇6sa͇6sa42C2C HrHrHrHrHrHrHrHrHrHrHrHrHrHrHrHrHrHrHrHrHrHrHrHrHrHrHrHrHrHrHrHrHrHrHrHrHrHrHrHrHrHrHrHrHrH~(t46GT4444444444444444444444444444444444444444444444쎬^qC2C2C2C2C2C2C2C2C2C2C2C2C2C2C2C2C2C2C2C2C2C2C2C2C2C2C2C2C2C2C2C2C2C2C2C2C2C2C2C2C2C2C2C2C2CCBPChhhhhhhhhhhhhhhhhhhhhhhhhhhhhhhhhhhhhhhhhhhhhhodudu"8쎬NMd~M&bDآlQ6(M&bDآlQ6(M&bDآlQ6(M&bDآlQ6(M&bDآlQ6(M&bDأM440B#Du":GPB#Du":GPB#Du":GPB#Du":GPB#Du":GPB#Du*NꆆqvG[dudududududududududududududududududududududududududududududududududududududududududududududua͐3F8RpÛl9Ûl9Ûl9Ûl9Ûl9Ûl9Ûl9Ûl9Ûl9Ûl9Ûl9Ä$9SDdHrHrHrHrHrHrHrHrHrHrHrHrHrHrHrHrHrHrHrHrHrHrHrHrHrHrHrHrHrHrHrHrHrHrHrHrHrHrHrHrHrHrHrHrHr P߲::::::::::::::::::::::::::::::::::::::::::::::":#6)Ûl9Ûl9Ûl9Ûl9Ûl9Ûl9Ûl9Ûl9Ûl9Ûl9Ûl9hd*d HpRC2C2C2C2C2C2C2C2C2C2C2C2C2C2C2C2C2C2C2C2C2C2C2C2C2C2C2C2C2C2C2C2C2C2C2C2C2C2C2C2C2C2C2C2C2CCdudududududududududududududududududududududududududududududududududududududududududududududududu#63͇6sa͇6sa͇6sa͇6sa͇6sa͇6sa͇6sa͇6sa͇6sa͇6sa͇6sa͂dc2CCWZYYYYYYYYYYYYYYYYYYYYYYYYYYYYYYYYYYYYYYYYYYYYYYYX"!6(A&bDآlQ6(M&bDآlQ6(M&bDآlQ6(M&bDآlQ6(M&bDآlQ6(M&bDآlQGPB#Du":GPB#Du":GPB#Du":GPB#Du":GPB#Du":GPB#DuiP444444444444444444444444444444444444444444444+:쎬l9;, l9Ûl9Ûl9Ûl9Ûl9Ûl9Ûl9Ûl9Ûl9Ûl9Ûl9Ûl8KRC< TTTTTTTTTTTTTTTTTTTTTTTTTTTTTTTTTTTTTTTTTTTTTסduwdududududududududududududududududududududududududududududududududududududududududududududuxDtGl!@Sa͇6sa͇6sa͇6sa͇6sa͇6sa͇6sa͇6sa͇6sa͇6sa͇6sa͇6sä́Tइ*d*d*d*d*d*d*d*d*d*d*d*d*d*d*d*d*d*d*d*d*d*d*d*d*d*d*d*d*d*d*d*d*d*d*d*d*d*d*d*d*d*d*d*d*d"CCCCCCCCCCCCCCCCCCCCCCCCCCCCCCCCCCCCCCCCCCCCCCCCKҡhhhhhhhhhhhhhhhhhhhhhhhhhhhhhhhhhhhhhhhhhhhhhWduYYYYYYYYYYYYYYYYYYYYYYYYYYYYYYYYYYYYYYYYYYYYY|sa͇6sa͇6) l9Ûl9Ûl9Ûl9Ûl9Ûl9Ûl9Ûl9Ûl9Ûl9Ûl9Ûl8KRC2C2C2C2C2C2C0 TTTTTTTTTTTTTTTTTTTTTTTTTTTTTTTTTTTTTTTTTTTTTסGVGVGVGVGVGVGVGWdududududududududududududududududududududududududududududududududududududududududududududuxDtGl9Ûl9Ü l9Ûl9Ûl9Ûl9Ûl9Ûl9Ûl9Ûl9Ûl9Ûl9Ûl9Ûl9!ʙ!ʙ!ʙ!ʙ!ʙ!ʙ!ʙ!ʡ!ITTTTTTTTTTTTTTTTTTTTTTTTTTTTTTTTTTTTTTTTTTTTTEՑՑՑՑՑՑՑՑՑՑՑՑՑՑՑՑՑՑՑՑՑՑՑՑՑՑՑՑՑՑՑՑՑՑՑՑՑՑՑՑՑՑՑՑՑՑՑՑՑՑՑՑՑxsa͇6sa͇8sa͇6sa͇6sa͇6sa͇6sa͇6sa͇6sa͇6sa͇6sa͇6sa͇6sa͇6s`LLLLLLLPy!ʙ!ʙ!ʙ!ʙ!ʙ!ʙ!ʙ!ʙ!ʙ!ʙ!ʙ!ʙ!ʙ!ʙ!ʙ!ʙ!ʙ!ʙ!ʙ!ʙ!ʙ!ʙ!ʙ!ʙ!ʙ!ʙ!ʙ!ʙ!ʙ!ʙ!ʙ!ʙ!ʙ!ʙ!ʙ!ʙ!ʙ!ʙ!ʙ!ʙ!ʙ!ʙ!ʙ!ʙ!ʙ!uՑՑՑՑՑՑՑՑՑՑՑՑՑՑՑՑՑՑՑՑՑՑՑՑՑՑՑՑՑՑՑՑՑՑՑՑՑՑՑՑՑՑՑՑՑՑՑՑՑՑՑՑՑՂ)qbDآlQ6(M&!M&bDآlQ6(M&bDآlQ6(M&bDآlQ6(M&bDآlQ6(M&bDآlQ6(M&bG#Du":GPGPB#Du":GPB#Du":GPB#Du":GPB#Du":GPB#Du":GPB#Du*qvGVGVGVGVGVGVG]ՑՑՑՑՑՑՑՑՑՑՑՑՑՑՑՑՑՑՑՑՑՑՑՑՑՑՑՑՑՑՑՑՑՑՑՑՑՑՑՑՑՑՑՑՑՑ͇6sa͇6sbl)Ûl9Ûl9Ûl9Ûl9Ûl9Ûl9Ûl9Ûl9Ûl9Ûl9Ûl9-ITTTTTTT 2T$9S$9S$9S$9S$9S$9S$9S$9S$9S$9S$9S$9S$9S$9S$9S$9S$9S$9S$9S$9S$9S$9S$9S$9S$9S$9S$9S$9S$9S$9S$9S$9S$9S$9S$9S$9S$9S$9S$9S$9S$9S$9S$9S$9S$9S^hhhhhhhhhhhhhhhhhhhhhhhhhhhhhhhhhhhhhhhhhhhhoYYYYYYY]ՑՑՑՑՑՑՑՑՑՑՑՑՑՑՑՑՑՑՑՑՑՑՑՑՑՑՑՑՑՑՑՑՑՑՑՑՑՑՑՑՑՑՑՑ9Ûl9Ûp)Ûl9Ûl9Ûl9Ûl9Ûl9Ûl9Ûl9Ûl9Ûl9Ûl9Ûl9hd*d*d*d*d*d*d*d*$9S$9S$9S$9S$9S$9S$9S$9S$9S$9S$9S$9S$9S$9S$9S$9S$9S$9S$9S$9S$9S$9S$9S$9S$9S$9S$9S$9S$9S$9S$9S$9S$9S$9S$9S$9S$9S$9S$9S$9S$9S$9S$9S$9S$9S$?a$F:DcF:DcF:DcF:Dc"1#"1#"1#"1#"1#"1#"1#"1#"1#"1#"1#"1#"1#"1#"1#"1#"1#"1#"1#"1#"1#"1#"1""""""""""""""""""""""""""""""""""""""""""""""""""""""> /ProcSet [ /ImageB ] >> >> endobj 20 0 obj << /Length 21 0 R >> stream q 614.4000 0.0000 0.0000 792.0000 -1.2000 0.0000 cm /Im4 Do Q endstream endobj 21 0 obj 63 endobj 22 0 obj << /Length 23 0 R /Type /XObject /Subtype /Image /Name /Im4 /Width 2560 /Height 3300 /BitsPerComponent 1 /ColorSpace /DeviceGray /Filter /CCITTFaxDecode /DecodeParms << /K -1 /Columns 2560 /Rows 3300>> >> stream qJL2@ l@k`3aA|)hQvw }__R2,2dB KT,6 )1d 2j"\0 @8i 0UARm0\ m6BcOM$V pO)RdPpI$Otc@!0hoČ$ % d|VIVIV.kaMB`52.@@AP<a1>^3c aLphaQpDn-.w[ъ?~M6KIUm&O?Cq4Ha0h$Rt?^_z}RZp]^/a'}=?64ƶH}QOoJ~N W?_֝oWZ}_zpk_a~_ Pyٔk5 c֚6_ Kp P;/q&%[Dݭ"pw"]A%!x#TRm&l/ >^WW"u_ W#uOzJDA"1I$/o_Io,Ta>_~ [}[u|%-/z_u_u-:x-18 ~h:[it$IIVVM~OtV_[OUZ~}[WOo]꾽i8_j*O 8DqC`B": "#M:ǽnZW^uJJ BP )Eu)4`! r)DFAP*P2*,CJ~XGXkZkV+TRAZk,0ͳ 03 03afaf&owm{l7 0ml6m 6 amam m 6߶m  mݶm"ÄS=8E@{a)m* ;pvÇm0ņ6xŷ!a 6pa0Í 6a oGp 8T ac amma 6vÆm> mbo^~Mm-Um aaal66ma  pm8l6l0a 0eԳ m;maÆap 0maa 8m lj[;m;möۭmmnv vSxE;l5ڭöpN]aoMT 6l0la0`ذ la` 0a`aCcm` 00` 1m 0#:mma۶l8ma6 amnc~ۻm۷{mSoM{mۻmv߶ 0l0ma l6l0 8mÇ l6l0Çma庵amapal6l6 aalaa  l6 aajp۴ӸmmpNM4{i8vöҪmmNl>ml?mۇ {Ӈh>7-i8m;l0öl0Æm"<a 0Æl6ۆam0.tal0vam  almal6l6l0 0nl0m[~۷mw۷m} Â)÷SN p ED"pp"6 anNa* *n 0m* 0لGVضb`ccņ-b l61m 0 nl[tl0m"w mm mݰ|8m6ûlnl6miwiviimvivf% ap l0 a 0l6 0 l0 6ml6laaa 0l6 0mܷx6m aavmmmaml8m 0a򹚾nonNwp۶vmm6a)wn mnOl4P"hO E=*!pv}l7m]#a"onm>n avvmm{mvݷiё\.l8al6m pm 6mvl6aamam 0 0ml6 amal8ml6l Æ a ama  ö6aӻmӻiw}wwӿ}d$mb!Nmpwmö^mpl8{m8pvmÆl6maöه*l6ppDyCm 0 #Ј8"<l8"=mÄGpa 0Çl8a D~"<6`#mE5>GFG Pc av 0al6ll0 66a m 6a a݆ uBaDw{lPݷmmmoݾmpݙ aÆm 0)p 6 0)pTm * 6aE8a@m* 0ۄS 0öS!inݶ 0 aa1m aö6Æ-mݶذmpņcva-a8vÆ08^Iۿl!=ۇmwmÆwۇmpm mpmݫMݶmݧ鶟iiӾmOm4m =L 0m2pl6aal0 0aa #6l0Æma a6l6amaal6aalmöl6avl0l;aml6ݰq۰a   l6 8mamöm 0wmݷmww}}womûm;m^pnNlm = 8{av 0"l7nNa݇mvma"Al4Qatnl0/icx"=7Ga6ðl6 6a <"<l61a#8"; 0anC maal#l0ۂ# 0#DwGa0 66 0 %ӭV1dž61v? m;anmxncÆccpۇݧm4w{ݧ}oimûmӆn{ݶ}wip>[mam mm ; pmp 0a mpm 8ma 6mmÇma*l6ml0a6 0ml8m6l6 aaa a ml6am 66l6 aaIii߶wmwiimj ۿO۶6NaAn" ~m m6m mmÆk"a6ۆmmyMˣ.ʰC#"<Â#Dz 0 "<pDvE8D|7 l0 6pa#ۄG  8Dx0maGD|0 0a0Â#Dv 8"+o onowۧ}wmw~nm68a6|"<"h`v(xE;al8aÆl0 m)aamۇa) 6m" 0N-t"A+jTA6C7)alG0 0cla.B 00 8Dx 6 ";nB# aG"=GanA 0Gana6 ` al0a 8x"<lܤЂ!mvÄSmm5ڬ="#(r a m 0 1 6 l"< Dw a 6am0 6 #a# 0 0ma`m6l0`l0a# !P 0ض amanl6aqma 6l0vvmamvma vvl0m mm 09_T [DuCv{m駽?۷{mNw}6)zBD!+f#Q ;ml7m)l0öl6np aݸE;ama" 7mamal0ûpvl<6 anNq $ #:R 6l`a`6 0 0m 38laalaapDx6 6la"<a 0 a0  0a 8mņl6W ,4NNnm>6Nwݍic~mi?M;mAl 7^l?mｴwmmm|6ݶ;aomÇmpmk0ms p p 7m 0 aÆl606pmmÇ aaûmmpampme@ ll6aa l8mam 6al6  mÆaaa ma al6l6 maÆ aA{Pwmݶwoviݻmvۭ۶wm~ݧnm{m{ۭi ]QQt<"SxE<"m =)pawpv"E;n" 6pvÇv7l6۰wm*pv 6pvpö"am$m-l8"<#a6C,6!l0n0 < 8A "<l0 0lma.1 0Ba ca p l8"< qm 0 0ۂ#0 8""xE;iOl5"Oh4E<"|8 ma"<##m#";a`ama 0l"< 0aa`` aa0a Gl6ÄG 0 lmaa aa0Æla6,0 0a;3AZ莈莈莈莈莈莈莈 7mcbaضa ma퍶Ç nÆnm۰ m6pmpmpmn xl6aöamHP>GЈ[kmnMw{o[o۽mNn;Nl_o-$ Mal8l6vÇ ammm6۶mÆl6 0mam 0al0öamÆl0øm ;^PպIU0allf lbl6ama0 0al6a 0 0 0l6 0ma l666 ml6al ll l a aal6"l۹i|=6iûNwi߶w~mÆۧpۻvw~ݧ~iߦ}iݘAW4_fpt۫6۸pmm߆m۶6OpmÆnÇmpvomÇl6=!W8#wXaŶÇl8@.l6ۄGmCmpaan û mDx0 a"<v 0mp a;ml8a6 8p Æm+.ࠏjM a66 `mcal0 l6a 0  amlmccmaal0aaaval;ma l6ac##D!U;m4Oۻݶvۻ;ӾNۻm;ݷnvۻݶݻOݷm:H.8 HiTT ""8m<" pE8mE<"QSۄSaNnal0 l0E<"0" 7"Nl6"m 0 Ça8";m,%H`rF۰l1ma0alf l6 `-m1- a1  6bpDx8xnCv0ŷI; 6 0 6b a 0 6ۆv 86c 6-l6ad3B=hmûm|6m m;aopmÆcp6acmÆwn۶ ampwm> qV 06i׺vvimݶݶ~kݦiiii FJ@+ma amp˛ sa 0 aa m6 .l6ama aa Æa 6 aaam a  ama" H@Al0ݶ"<nm `86 aݶ 0l62a `ˆl8vl6nmÇ l8vm aaml;a a p2 #:wnnݦiûmom>nm;vvnۻ{w>Nnۻoݷ|"!mE; Tdc@t"E")mTCml7mE="P)vNpv" @x{mm|;P l4n"T;pxE:":2*DppHFAc 6- lX`c`1l"<#";."< 2Al0a0aGa \A #al0p  m0 [0aa 6a0a 6l6mG 6Aa,1mDv$4džmmlllvÇ۰mvlañpl8paoom6llxncFE4*mݷovuOvݷݦݽw}vmvi~mmݷ|ܐ"fNal0 mpmÆmam 0 l68m 8m8l6m 6mvma6l0öam ;m 0 a 0l8l6m" Jml0m 0l6 `نb0l6 apl mlf l6 ama`l6 6l Æa am 0aal6l6a"̫m6vۿm;m;ݧw ӻ4mwi64Mnv6nOm;8V6mm|6Munal7m{Smmmm8pmÇ 6m{am oHC,fapDz 8Dz- 8"<pDv`GaÂ#0na 8"=m0 6"<c0 8"Ƕ{mmqcccN{m8ccö߶66?v+ݶk|Emmպ۶ݧl7۷opmnoۿm6ovl1 @ 8pma Xp˘al68mvl6a l8pm amml68pm 0aa m 0m 0a 0m 0l8p0 6l6 61*1Ppamal ml66  a 6 6l6 ml8ml6 al6maal8m6#v wwmw}iwvwi{mwݷwiwӾۻm:GVl7ml8|"߆۽a6am pova6l7mmn o)möl66l>E;l> LKm"=m 0DuMGl">ahG"<Dzrl`PDx6l8Dz Gm"=A 0 0GD|0mn6ÄG"=GmÂ#Dv 0G`Dz6"=mDx0#͆"<aH 66 Tdslmam!ccl6mcbl6mllmm am6lmql0퍍6m6cccl0lmaamm)f-?jv߶oo~omMDtv`%vl8mE8nPh( 0 0m˛ 8m 6a al6am 7n 0 l0ÆnN 0m 8ml66aamam) 0 0d 0 6mҶ Æa1m m ;a`8l6 6 mÆm0aûm l6 a l8pam 7l6 aaim 1 wvM6mmöӸpmmöo 68mw}mmwm|8mm+mNkPmkWM{^OzOaݶjmvkݶÄSn)Mnm͆l;macm 0aaa 0 0l6˙saas 0`l0 06a 0aaa{ 0aam 0 ` l` laa#a# a`mˠ #ql6lWml0mlmalm vvnnal6aca aaûal6 l6mö۶n6mm 0a6ml6B Yonmp׽ۻ۾oowNۻnۻvݶ͠m ;naam 7mEnmۻa0l0 ma=;l0ۆh"0pE8pnm;maö 0vۄS l6 6nP9aö":aD 0lpaa aa`m0 00` 9N a l8"<aml0 0ۂ#Ђ 6 00ea0 X6 al8Dz 86ÄGaa7Ga08a"=G1 Pla"< 0C1w>oLo ۇ6{cwVm7mMlllxviipmm$}mûm:[Snmmvmömۇݶm?m?nmp+ ۇ l0ÇmaۆwmÇ l6l8l8l6pa 0am m#a 0a;maaam0Æ a  0m҇mpxal0aaal666a al6 `l `l Æ a a&l 6 0aa al66l6l6a 0v a a`l0a,&wm~ivoӽNNNNNۻm;Nӻ{mnmnm;m;nӽ0bv"}amùD @al6om";mnnNۆ6aNa6m"SamN 0"a8E;n{N 0"a6ÄS" % a paa ZDu aDz 8"< a"h5E=m"ۿmvnvl8wmEw[mN޽گmml>"ׇm5Nv p~ 6l"<pa 66l0l"<laaa6 6 aam 0 `l3 6aG #l0a` 0 7GpDv0l0l` 0m a l6 6al0aaa`l0Dx0rP`Dx0aa ma 1 xmmaۍmcl7l0ml0ݶ aaaal0vð mmŰ`amam mal6l6l0m 7mcl6 6vx0mgmۻwn;mmӷzޫo۶wiwMM{vM߽l8pm al0Çam 0m 0m 6tPaaöaàE8mpn8pmm 0m 0m 7nNal6a  0mvm& 0aÇvl8aPE[ 0 0ll0m ml666 0 0maml0 6`p`6 ` l` `a 0 06l0al6a `al6l0Æl0 8l6 0 6 8ma66 a`l0 67aaaaal0 6xNM5n;mm;m4N6Ni mw|>owi~w~hwm8vl8}Mmmmݶݶ?mۇ moovl;Mm6=ۇmÇmmöa66ۇ 0ml8pm 0m 8vl"<l6l0m 8mÆaa;n8vl0 6mGm#l8ampl68aaÆmnm 0maaa,ml6apml8maama  0l6 m6 6al6l6m l6a6 am 1aa`l8m 0pl0 66aaaan ml;m DrJӻmmۻ{mm{w?Oӻ;[G[mmw۪vݻn۶ww}[mS4!ö"tnNN)m ;nNpÄS 0ۄS m*mS)ۄP =n 6mabl6pm"0"EC8E;pE8a ۽ECNۇvl7Oa* E;pEGpvrΤp1 lXpŃl0 0Bm a0 6c#m#Ј 0a pDy`li60Ga [m 0l0aa 8ۂ#0GaA ml6aa l0 0ņa 0a#!a- h 6!mpm6 ݶmǶmmmml;ma>6co l8m mݶcc lamwmvomoݶvݷ{^]vjimӻmMN6N۴mK9kmamaa m 0  a 6m˛"l6 l0am\m.l6m m 8l6a6l 0m0aml6l6aml6al6aaama l0ÆnI 6l8l6 Æmml;mp 0l6 268.!a l `8l6l6 ml;aaöa ampmmammaam 0mmYdiݶmmw nkpӺۻۻ;Nݷw wpۿ۾mݷpmvwmܓ۾mmwmml5ݶN)|"};nh8|"Շ)mWm8wmSpNl>4pm~Om"S7"Գ E@mall0a l1a 0a a0`l66 G2:!'J8";an 1"<#";#"; 60DwGpDv`aGa`ca0 6l66 6c` 8a66n 0l0a 0la6 1 #aa  0 G a6 0h[l66l7 G8aa8m mm;m0ma bmcmÇmo v6 7am݇ 6۶Æl; 0nÆmacmqmo ݷmaYƓӾ6NnMntmtۻMnۿۿ۾Nmoۑm8vm8maal8m m pma""4"!al6a۶6m 0maa 0 l0ömvml0Æmpm tm ;ml8mlr{al6a l6  l6 0 8lal6p\rnN\2 6n `9 aml6l6 ml66 0al aa a  8l aam Xl0 66 06maaipmwm4n]cwm8iӇ߶=Ӿimwvݧûpmm6a |6mmiÇ 6xpnoSoml6mam~l>pm}L8|6mmᶛyg0m 0aDx0  0vl"<pۆaÆDdpG"9̎pmpl8";.paepaaÄGmÆval"= 7m#; 0 "<pm 6mGö.G a 6am 0aɳDC 6 alql0lml6l6ml6l0 . —i aafl fl6l6alml0amaall6l6caaöaa 6amccm$ፍl6 aaaamsjۻ;Nnm%_v{ӿmݿ{mmmӿwnNݯ{oN * ;pv 0ö aE=)p l8E@{nN 0SB(wxM÷l0aۄS ݷ )mp" pxEDPhPpw":TB)ۄT8maa"NamE;pm 8E@aEBPxED"0a)nmxEmpE;m 33Qal6al6,6 mÆ0laö mP'q;DJ3ݶ 0l a l6l[`l1 6ۤ Jx; 1aűbaa ;mamŶű-mamc lEaaa}m ۸pmwm;Ӷ8ml8vo[u}ûm6;npm mmmmmpmûmݶ9m|6ooOiwݻUi~_M>z{^6MMCviiiv}m 0l6al6l0 ;aal6 0Dzl6 0 ap"""! 0mal6 l6 l6 0 0Æ a.eͶl2  6 a 0 m 8l6l0 6l6am 0al\0aal6l0Çl66mûmam ;m 7 am 6p\5m l6lÆal;mvmambal 26l8vl6l6l6mv۰ 0l0ݶl0 0möwmnmv} mnm۷wwi;N}vimvûnmmw{vmy7wm("o ov*"mamnNݠE: )"(E|"onN~m)nݷaڰۇpp["@xE;m8m m6"mooA)EBSAՇ ED6mÄ 66 DyG# l[`aa  6a,0l6"; 6,1l"=!8"@J BC 0a a0l"<#l0ض#˶f˶a"=Gam`p pG##C Xcaa l0a 60c` 0 "=Ga (pDw!0ņGaa 0 0maamፍ<8n6;ömm7mqcmxvc6nÇm6<=۸pmmmmmÇ acml=mmwmmwi_i۷vomkim߶ۿn6nMMcm߶ovpmal6 a aav  al6vvl6al0al6m 0maݶa 6nsmamam l6mÇvl8pma p aamaمaa l0m 66l0ama6 0a aam `l6  0m6 `0m m`a `86 `0al66l6ml8ll6l6 v ampaņm 0m amƚwݧݦOmwm4ｶӽ>m;ӾM4w}w ۻmm.n5ӻN6n6pmm)mamm)nvpmaÄSmۻmۇ)mpnÆl6)m~NkmommvMaÇmØ? aA6Dx0mam 0Î`mÄG 1aa"<pa# 8p";l0 0mDy#";a"<ÄG;l0 ma6Â#Dy# 8mÆqlac0ÇG 0[a7l0 0maaa l0DzmC#alll;nal0laöl6 mcmammc a6űql6lmaݱl0ݰl[ ػmm  0vl0aca ana m 6mۆll6l0a.pmۿm{{~m4﷾Nv{mmdkmn߻nmCpxE@am"6 4nN 0  *mE@nQaEDNhPp 6pxE@a@E<"0ÆaaSam8aۄS 0ۄSa"8l6a 0 0 ED"6anNTmE8nPhP"O 4@E8a 6 ) 7p"6aa66S0]l6aa 0b aöl8pŶ1l[`l8bذ 7m1mmaÇml lf mcppl6m Çm,1a1mm0ml10ņ0 a6mlaö6aÇmwmm6ۻmwm6m;m8mpm6ۻ ;nۇ ۸vwpmvmûmËm;b6Mm6nwkkvmݶmݶmUUki_imiûMO۷mi;M?<0a0 0m 0 0l6al6 am6l0 0a` 0l6 0` 0a 0maaas.eͶe0 p a .e͆l6 0 0m 0 aa #6la d0m 0p&l6a6 amaafImamö۶l6am l6 l6aapaaݰl6l6e0Æal vmaaÆaaݶal6݆6vaa ;maal0 ;m vmÎ aBDww}nm6oۻmoN߾ۻ۷Nm;mm}ۿݶ~{iw wagLJA8E; EEam 8vl0apl0EFnPAl0öm)"Nmap۶7)۰an*۷ maöa" m{SamE8apE8E>"6mvl8pO!pba0a.#G 6l6 00l8"=Aabn la 6pa,1 !ECPðDz006`G"< 3ta 6a` b"=Gal"<l0ðaa#Јa0 60 #0G a"< b!l La0aGa p aa|8wmOqcö۱mmñ660m|6ôx{cccmc~>7c67ûllaccölaQŤnNmmmmwݦmnpmkammpݷoݦvmmݦ Mmݧaj8w p l8l6݆amÆal6;mam 8pm 0m݆0l8am2 aa6amöam6a 6l0 8l6ampHp6a ؆l6m a pm`l6 Æma 6 l6 l6al6l6 maÆ0 0 6 6 `0flal66l 0 `l0mapl6 l6maal6 ama $;ml6l6l8l6l66mow{mvvݶw}w}iݷm{wiv{vww{mvvwi}wwwimwwwmI=om{mpmN l8E;l6pvovCN pmMwmpvovaøE;l7m;ml6 vam6m|6l6"6al6v 0"< 0 8Dx7G#Ј"=G6 0 0 pDyB#AۄGÍ mDwG#"Pl "=G"m~OkmV۪W[]kiUnVöۇmxwnmmݷý{vڭköӇݶڭ;4uۃ 86 ` al;aam 0 6a#mam l` ᰎG9a 0 0ae̹6 2]al"<amam0 6` 0mS 6 0 6m a6-aa0 6-a0al"<l6m 6 0 #Pda advvvaa anm 6mövpœi nl0aa1 8l6 66۶n6l6al6c 6mݶaۍl0l6a mpÆ aa 0nl;m<"莈Pտv;{ۻݾnm;ݷ_moO[omݶۻӻontｴۻW%C9C9C9C9C9C9C8OT7apaۆ 0ݶa)mmma)àmÇxb- Bl6 0pvۻmom"m"8vݸ":Sa|7{al8maö 6vûl60vanm 7m 6܊p#:#:.DDDDDDzU 0Ŷ `aala #Јl60 "< pDvaGaacGal0ɹ7!3q; 6a0 1a/l0Â#Dz 1n 1`b"; 0r an 0nB#Dv0G0l8"< cm a"8@a na"=A 0npDvaE@dtGdtGYB"#vӾø{cv?m6?퍍ձiUU[nav7c~66<;{m4nj7c0(KmÇvmûm;oM߻mo{۷mv۷W=4ak׫u^ݶoۇm7oowmmiovw}D3>l8p 0m  0m6aal0Çm 8m6؈p 0l al8esa 8ma 0 0n4 l4sm 8paa6amam:ma6aamam6aAz Æal;aaamm mam ml6ml6 . .maaaÆ `l6aamm`و `60eama l6alXl6 aal6l6 l6l6 v0xnww{mmi߶wwwmݻm۶wovviݷwiwiO;m4۴m;ۻu9[Ua)aÄS)l0mal6amN ma8wv)pNۆmom xm)aÄS(voa)l7pvņvm2nm6n0a)a"a8E;mxCi< anCl0 0nCa#aDzm"<#Ͱ"<pDx7!aab 8 BP#vGDwnCl0Æm 0Dx0 Gl 7G 0 8"=!o6'0!Dv#"<%1Dx0lm# 0#6"<aGaacA o6a 7!pDz pDwGp# 8Dx"al=aöc am 6almö6mۇqűl;aam0ۍ6ضml;a00ccccm6vmaۇmml26{mv66ۆa6!G`Bﻴomoom~n_m;^zݪ۷ӿM/ӮMwm}vm}mviݶUˆl0Æa 8ma6m 6mpmama aml0 6l0᰻ 6l6a pm l2l6aaaa aÆlmm 0ma!apmmna 0l0 6nl6 l6aa al6 l6 0va 0m6amas1Ç l6aÇ `03 6 `l6 apl `06al6 ml8vHval6mpmmal03l0al1mwM>mNm6Owmmӻmmw NöӸpmۻm;m6m8ۻnmpm{m. aûUl>ްwwmݷ"8pu[nUS]:OaSnwna)omwmimh5UaЂ< 0 0m80aa 0 l6a m al6 G a Gpaal0 6am` l0a 6 606 02:#s 60m Glm .aa 0lmalma 6 6 d0mama`G29m vd&l6m0mam 7maݶ݆n6۰ ݰ 0ml6a 6l0va{mm 6lal0a۸nl6a amanl6nn m 0m ݆mana ݦmmm~momim{omoo^Unn_[i߾omqC8pmmxam)m)al0 l0ö"۶mۄS 6"ama{mÆwE۶al: ۆw 7 papp؆mama"l0 0ۄSamDhÆ 0l0a`aaaaml ama 0aaml0al0aalaaal1a al6 361 ` 0 l0Ŷaf0 0`l0al 0c! al601`l0m aa )D0ᶛ;4m;wi?m;m4im|=[oM;NNwi668Nq!~m;~öN8mxm l8}Çûm ݦaVv~imûwmmiÇ ~m6aMA5ݷ#wm6ma 0Cl6Cm ;ۇ 7l6 ;mÆ 6l8pamaÆaÇ 6Ç .m6mvapmmÇ 6l0Æmpaam 0maݶÆmmalJrn"?vwl> aaa l6  aaal6 l66amamÆal6al8l0 0l6f l6apl6 0ppl6 al l6 0ۆml6 m6l66av 008am` ~iiiݻn۶wm۶wninݧjmww}wn۷wv}w}womwۯl0ammpxE;SvpvnmxE;nNv"N۶݆mv)v۷ m6aÄSÄS :T7l0*pxE;mE8"<ama(xE8{E;nhP" =Sl776 0axDzBl6a 0 7({apaCa 6mapDx1 0 l0 0 pDy*!G 6laaa0Dxa0 0a 0 aa#͆pŷ!cc 0nBnmA na"0mzNBl02ECGapE@qmmûa7aa}{mammol66cm80m ݽnvm6c l6l8mpvcc ;m6m a60 w.l666-4MӾM6^6߻MӾwm;{+mӿN;m;o$?o6Niw ma a  0a 8maal0  0 6  0l6al6l6 mamal8l6l62m maaa l6l0 6mma l0a݆ 6l6 mapl8m ma Æl6nmp mÆmvmpmaa`l;m `6 ampmml8m mamöal66mpmaf l6a 0aݧw ۻmmûm;ݶ ۻmöۻm۸vmݷwnpm4wnmݽmݶwݶn۸wm}mwwvwömAm  pa;j[pS"m(xE=;۶p{mn;nݻnNۯN۶i a66~Ovv>maGl7 0l7 0 l6pl6 7#l6a a a 00m a0 a` 00nc6bdtG 00ca]"; 0G";a"; a 6 6 a 0ala"<a 6la C`8l0l;cl6l0 6m 0m#";G ÄT 0 ű݇ 6ۻl6aöa q66mpm ݶnmcmçmÆl[al7amÇ l1xm۰ l6mm}amm[ 6Nӿo{m;ۿۿ۷mM{v}էJ߶ߴ۽oM۾|Qnvl0maÆw apmt ama 0mÆmp aG l6l8maÆ l0 6a al6mam 8l[l0malp wmݻnv0aa`l0ma l6aa X6 0mama 6 al6l0 6ɹ8.rp 6 6ap6 `ن `8ma6l6l  a 6l0Dx0ma  0`l6 0 0 6aaacNӻ۴NӿӿӾ۴wwpm;o{mV4Ӈm4m NvÆi[ikii}iwi}ammmÇmm>m8p6;m׆mnzݺ;mMt[mÇm8E;mnmmml?l8mx@amaaömÇ pap0maÆawmaûl7m"8m a l0al8mÇ 0maöap;vpm"<{m8m8qm 0ml8";wGv E8l"?al6 l6al06al6 ö a6mvaaal;` a\.f m va80`0al0ûal6caaö 6 amml0aapa6l0aslal0` l0vOݴӿvvwmm{vvݻݶӻvnnm?OOݷNoӿoݷOݽ?ۿmavm*a 0 l6ahQam)pmE<" mÂ)hP pN 0@m8xMtCPv";m) 0vÆv"T8aSaaۄTAa)@v 7 ÄS-)l8":l6mۄTB)hPl6maY ض 1mam8w laŶm0ضm1l0a006 0aM Çmm 1;N%8x7A 0ضA0 Gaa1a a`l0ņcņ!a  l2n a 6,6 bݶa\l0l0 aa4m}l8pmûmwm aÆmÇ aw퇶m8mݰml8pnm8p{mn}ۻۇ}nalaۆÆl8wvmimvimvivvuUmi}wvnimmݦUivi m 0 a6 Æ 8mal6l0 8ml0 6l0 0aa a 0l6؈;a 0  0 0al6l6al6aam 8l6 ` aal6l0 0m 0mam mamml;aaal;aal66mm m 7l6l8vl6mvmm 2. a ;6 6 `0M m l6ۆma8l0 3 0ݻl6nmû$;l66ma 0l6 aa ]vw}mwmӶ;mn_mmݦM?nnӾ^Owݷm}moa݆nNamn"ppva Avaa6mwkPmE=OwQaal66uE"mmÇ Tvmm=xE<"* ] 0DyGl0l6 a 6aa1a0C 6-`  6l6a 6 0aDr' BP!"SA8Dy 8Dx60 XbDyGA #.GDxaal";a nC  6ن l0- 6p #cG 6 GA 08Dx00 6 6l6a;laöxvl7amncm0}vmobN7 xn6ݱm6avc;m6mvcl7v=÷lamnmm6lvvoۿۇmmݶvmoݦݷiiݻu]wնv7mnmۻݶvn 6ml8m aal6aml;am pm 6ma l0ma ;npmpa l6alm#66lCmaamal0ݻmval0` 6 Æa6l0al66aplal6 l60l6l 08. XaamÆalf l `6 `l66al6 06 f6!6 Æl &6 a3aaaa 0a 0 ;ߪmw Nm}w}wӸomwv6>uӻ6۾mwiwvw}iwwpӾNmmvNkm ml8vimamm8ml:am;Sۦ[m6aE=ømwn"Æl6mm{mvl>a8m6`GpDva`p#Ͱa ۇB#mÄGpDyGaÆl ;m 0m 8pDzÄ3 0 G[pÎaa8";a66Â#";ap8Dvpa"<##Dvl`nG ;m 0 n";">"OxD}Gp~l6a 6.-aö666m 0l6al0 6 ml0 7mllplm 6 aam0`l66 ma 6cmal[ v666 0a [maml6-c 01 a,aݶwm?mmݿvmۿm?M?vۿOۏcomovvam l6 0al7TaECaE@am*p 6"6aö"PaaE@aۄS 8anPaaE@aECaN 6a mmmaa ml7 6 * 0"E>0۰n l7 0al6 aöa1lXl8cmmm,8w al6l1p [m8bblXl 0l6 l am;m6 `bam mņpmfl0 l0 0al0 awݻwÆpÆmÇ v ۸pۻ ÆnmÇmݷwm6nmpmÇ [ipmmmømwmw nwn۪4;۵׻mm?M?M^_4үwJ4noMVվi:zmipl6l6aDv\ l0 0l6aaaamam m 0a 0 ap ama aaaaaaa2:#m 칰l6 0a mal6l0.l6a0 6aa 0 6؆6l0mݰa6l6aa l6l6 a m l6am 0m avmmampmamam 0l;l0qpl6 av 0a pl07l6 0m1 1 l6a 0l0amanWw}ݺݶmݰ۶ݷ{ݷvvwvwwwwޝݷwv Tm0ݰl0  mm "Pml8mn"8pmaöv" 8E;pxE; TCS 4ml>n;jwnmmamapDvPɼ")oSh"naöamSGpEDP"<a 20DxpDv67GpDx; 0c ! 1 1m"; "=Ga,1mc 6"<a"<Â#"<aa#pDval8A a8DxpDx0l8DxpDvl6`20Dy# G#p"=GpDx6l8";a a]bcbc 0\#a2:`"<aE8DyG*pE@60ECx1<6۱66m6<6lxvcm8öۇ6ccÆذ6668lwmmcpq6w6.۱vvۻkmnOOnݶmiv۷{ m6V~mVM6nmmm;={aa۰l6a ݆ 8mal6a aa 0ۇl6 0amaa 8maaݶmaaa6l8e pm 6m 0  0-6l8pض ݆ݰݻvwm 0aaal6aapal8mal6 ma a amÆa  mmmal6l0 0`l8l6a06  Æl6 ala am 2 0 60al0 0 0 6a 0u[oiwv66m?ۿӿmӷۻ;o~n;ۻNmmm;O 6۰mmþNk l6l6l=pm~ =E;l0Çm= manaxm)aM(wmm݆ = Smmۇ öaaE= 0pp Gl"<a0Â#Dz0"=mGDx6nGpamxDx7aGA6p"<mDz 8"=Gp"<8"=GÄT08">N0Fp # Â#`G"=8"<B#ۄGDx1#6aÂ#Ͷam#"; pD|"6GS)p">ÄGNPpl6aݶ6Ű#ql0۶6mmlllvm݆6aa0qacccmla  6alllacm0llma66m maac `l160Ō1a-aۻݶ~}mmݷ{mimuwmSmdmoүomomm mmmݶn 0mama 0ma6m0l6 0al0 aamama @m aÆmaۄSmal6l0aama 6vwm;av 0l0 0a 0am`al6avl6n6l0ݶaal66l68ml8mm e\ܜ ,6a `6 `6 a aaammmm 06aa 0 0a 0 6l6 cutm6nmmmNm;m;mwm׸ni;m;ۻNm6ӻm6گmpw}ݶm 7wa ݶvmۯl5kmö^;WT6톷[wm{mvoۺ^mm{al0݆ l0pa 6 al"= l0 6m 0 6ۃ 8a#aalm 0 aamb!Dr#Gaan 0 e͆\ 2 6a 0 am0Æmp@6 7 amn vl7 p 0@m 6 l6va6mqvam 6ma ama۶m 6vaaC. amam6 a0Íamamadݰaal0d2a 6l0  6 0al7"a8nw^[nۻnn;;[ݶOonnn﷿{{onۻ9^w al6ppaam m 0l6 ۄS0Na6mm0l60pmTD8z(pۄSݻvۇ 8m 0ݶam N"; mn ml;,000 0al0l0G6mG 6aal6ۂ#n 16 b <Gaa` a6 8";"<abT NܛN%@N'rn`7Ga 0a 0ElfG0 "< l0ۂ#"< al00 Jql8 pD|" 0 0 pÂ*Gr#gGU8iloݶ 4zi7M;M60vUnU6Ӈ|;p6cvlvZ awl6m ڧm>mvwۇvpmm?Ӈvi_ m7WnWno6MdM7oݶMmiÖzwmwm݇a۰8pl6aml0Æmm 8pmamal68pa؈ 6mðm l6p˜6aam 0Æu6l68vÒp۶ w{vv@D"p 0 aa 0 0ma aaa amal6 0val0mal6 a 0l6 l6. nNama6lflal;m 6ml0 aa020b  0 0 0aaa 9'&SP!n^{ۻv[OӾnmSӿӻ{m;[ݶNۻm;[m=vۻmۻNxM!wv6m0݆ pۻ݇am{ QmamN 0mm0݇a}a(~8~mÄSwl7Noa 0" 7aNl?m6p݇۶on:A6$$G0a"=GaG )OE; 6A  8Dz qpnCmaal0 pDz#Ђ 0 0l6  0,!G"9(q(p CN;l0  AaDy20Dy#Dy#0a"<cn#aDvapDx6pJv A";`!ۄT8D~#0"< )Ä9G"?CmPCcmllmlm666ݶ0 mmcl0ᱶ ;mm m aa 8wi8L6m6 aml1l6mÆۍjcaŰaŰcl6,acap1nnݻݶn߽=Om6۾o>N߻Ontzӿ;ݾ?mml6ml6nm˛  l6l0 l0 6a 8l6a6l6al6a a6mmlDDDCaa al2mpl6ampaa0l6 npl7mmmnmۻ 0aaaa 0l0amaöl6ml6l6ma paaval;aapN .  aÆm`6 `l66l6a!l6 2\@0aa 6al0maa &ܓ}K w[ûNm}i8mmm۸m6N}ݿiݶmw;Nn ӻtniݶmzҶnp݆ 7l7vnÄSmövoݶwmjUmv>Omm߄Sj(wn|8E;m^Ipvj{~ÇݶÇaݯs@ " 8D|7 8a 7aaE=Gal0 06 0`aa 0 0mal6l` 0m 06a aa#6a 0Dr#aa 0mamDwGlml2a 0dtGla#˛  "<#;aa p0a#Cq8!v6 mv 0ml0ݶ݆nm 6m 6aaaavl6n m n m 7ml;m 6aaal6 0l6 0۶ mG;qal6eذl2]m`c 6a0c rnݽd;۶ݶvovmmnmmn߷v{iB۽~5~mvۿoli*kG6vۻmnnvmmݸE;aml0mam) vmmm 0nNp mݶ68l7ppapal6a ض6 mݶ۷v '*a0a 0 0aa 0 0a 0 60l3  8"; 0la 0 l 0l0 0a a66a`6 0 0 `a  0 a apbc 0 aaaa`1aap`6a]28!8mlaeن 97`a 0 0 a 00 0alJrnMɹ!ħu ;֫u[UViivmi|6ۿOw~wömwi Ӈ龜>4LJ OnM4m[pvl6nana݆ ڻmpmöommmݶöMv|;mnwM6=zm4wzUwmmnX*xl76ݻl7˜0m 8vpݶ;mam 0Çm 8m 8pmÇmpmaÆmamDx0 ˛ a6l68abl8p #l8l6 ;|6l6;؈oA+09l0aaaaaa 0 aafaa l6 0l6 l;maal6 l6 Æa 6 l66l6  maŰll6 0pmf66 6 f qpl1`8l6a 0aa 0c ` 6Mɹ'&ܛpE*zPnoӿmmӷv;m;NmݷNNnۻۻNNݽo;ۿmӷmݱtG@ml0v6 aa0ݰmT0 "=ۄTÄS 8E;n{NaÄS{a)pöl8E@xl8E<"Pm)ۄTB*!" vvvm"ݶ"PN"pmݰ|:Ј6GE8DyÄGnQppvpl0"<68Dy 6 6p a 6 oa 6aGll00 aa 0mqa68p 0 0p 1l[ IDy# m#a2`;#NC a#&a007G"Pl6 8"6 CCCCCN'JJWmli6m8m v amo 6 ma anl;aaݰaovca۶a6a{mۻvwc v c 6mqmp8mpUݻݻnnnNn6߻m6Nݵ۾n6Hfmv;]mv{ۻ l6ml7mvm mpm 8mpm 6  0ml0al0am 6mal 0 0l6mmmam a a ca8pmۆml6ݶ툈]s@aal0aaaaal0 al66 Çl6l8ml0Æm6ampmamam m l0ml6`60`0a\Yvafaav `06aa 0 0 rNMɹ7$9'&ܛGWo}߽{[NNwmimpmӾmnۻnvm;NﺊM>m;m;O5i-8i 06 ;wapn ampp"T8E=)m|8E;l>p68pvt)mxE<" N wPS"j;l>۴A.XbPS"ao GDx0nl">aaal8Dza0c l0a66na 6al0aa Æl0 ` 1a 6)";al0l 0 #` 0`dpd#C";`G";#"; l"< C0GenND}Gl"#C%F8Cd*`n0l;l;mlql0ݶm݇ a ݶ0l68al8nn 6am6 6pml1ݰpmÇmņl7 7 6 l6$;mmm12฻MPqZ1wv۶{wݶ_m{mݷwޝݧ{vmi[wݺT/֫z]ݪmwwmh"݄Spv Cm# 6a#vn8mÇ6a#m# ۇmapl#"= ammÄ2᝶s.l6' ;pavN"PqDDpɹ7&aml0l0 l0 0 l0`6 ll6 ll6a acm 6aa cacm mam f. hl6 mqm6 H*2`6  `0a  0a6MIpMɺ8. 7ݽ{wnNnOm۽m;v[m;.oownݻia nl7mmnl0ÄPmpۄTvnQSpvnNNxEC@v"7 0ppampmE<" 8P<'h8aE;a"0ECpaNnPpm(pm;l6a8B."Ћ3N'N88`  l6aa a# Bl8ama n6 0l1 0űaÆ-cl0 mbwLSN'*%ذl8p00I`B%8S ,6 l0bm 0pE@aN%9!ɸrCq)ɹ!Npwmvn7vǶӇ 7ma۶;mpm;mۭ۸pl>mjJma;mpݶ8wqSۻmnm۶ݻ;M4oM6׻MӷM>MӾzWO47jkSӻDDCml6 ݰݰݶvvmsaamaaaa l6la6l0 0a 0a 0mapaaDDDDaal0 6 .l6lDDDs.l6e̹l7m DDDDDDDCMɹ7&  l0a 0a  0a 6 0aampm l6maa öam 7lfa2afmam `ĂpMp\02na0A 6 0ÓrNMɹ7&ܐ䜛rnMIwmÿ~׷kûnnۻv{wm{mwv;mۯvvmݶuûI;;mwmwCӥPa axn l7al0oma)᠊mn*h"8E;m}tnN{mvm8E; T E? QC"m )E;nV"A;;}ݶ>w߈ B G"8N<"#P8ECP p# 0 #0a*GpDvc "̎DqȎDr##G"9G"9n58mn6qclnmضl8|1m;mmla6m|6omn8iSN8Smlawc viTN᪡nvnvݻv۶NM{Mnn۶u[wokvNw{{mvݷmDDDD6۶nm݆anv۸aaam6m ;aa l0 l6a 8m6a"""!l0Æl0 6m\m m6 n툈Iɹ7&$ܜ0 0a 0l6a 0l0` 0 0 0Ãaamaama`a 0l0ama`66l al6 \pMpama l6 `ăHp\ܛ. l 0A 0 6Mɹ7$9'&ܛrNMɹ7&$N^unpۻ4nmm>mM;NַpMo;_uzwm}mvkzպEm݆݆vmmmampo)mpl8p)mommaoWm6l6;mۭwV]|4O (qGl6mÆ p6NmS 8";am 8pDy Gm;m6lall8Dx0l0#ͷ 06 0 ap"9G8p8pl0(pDqG28G"9Ȏ #";#";N88CCCC4ܛړm am6m 1aۋaavc lm 1 aa 6 acal0vl0m m4q a6 8l6mi L(Palcmadܛ8. nNp\rnow~wn{۷{~wmO۽k۶og{wi6wwm8(Pj& l6a amamSaöp  ;m 6aal6a pl6amE8a  aml8vp ۄSam)p !wmÇ p&NrCq;L 0l6l6l6 6 al0 , 0 a- aÆaö6;mpl6aml1 Çm 0l10c 0a8b DNMɸ\rnM%@$6 `. $ܛq8$ܛq8$ܛq8Sm4>[w[w{wvwm߶ۇm6۸w ۇpnۻm6NmmmÆm;mN;qÆv۸aûpmۇ{]Wv݆ۻmݻvvmzimimm{iޛpm{Oo֝i*kjmi 4iCavl6 l6vl6a\pla 0a0 0maaaamam6 8a0ma # 0l0 6 G 0l6 0ˆA6m\؈98&ܛrnIɹ7 0 aml0m al6  aaݶ maam m paal6l8aÍa s 03\3 03a006 a]-p\rnMnM97&$ܛrn~{[v߻wiݷi6ۿӽὶmwpۻ۾ZzwiVڽ߻UP;NB(v ma  l6 6*8E;maECmama"amam"l0m*@v"NaNl66mP4Ei;C#= pD8zq  BC  BCǂ)#0 T`ÄT "<Â#*)#E@pDx8EC G"<aaa 0ana";aaGa 00 0m#apDv 6 8"; Xa. 0 1a!8"< pDv 6A˳tA&q;YA Nw:D"SCp쎂G";0q(q(qL9!JJJq8$88'q8$8qwwji݌vj?ǎn;FmlxpLw7cmlmm>cccӪwulajiwvik{nvmp nwmwamiwûnomomm۸}wow{_mnw{mwmݶB"""""!vnl6mmݶv0maa 6a8maÆl8am 0mam 6mÇma6a 8ma6ۈ29DDDDDDDDDDDG7&ܛrnIɹ7&8l0 0 l6l6al0aa `mÆ`al6  aal0al6al6l l6a6  aapaf`˙s03 3 03\af 3 f e̹2\˙s.e̹2\˙s.E̹2\˪Ӻ}u[>ݷww{m~ii}mmmwӿ?}׻6v݇m۶n aa{nðwmm"6l7m}o Nm"{mxl8E;l0ml>m{ UnTӻ4ûMûNöӻġġG"9ȎDqAdvm a #l0a aa0G"; 0Â#Ѷa"<a";nG 6l8amG 0"omM1}Ǻ{UnVݦ1NO^O[Mݾ~U vav mmÇmiiݶۆonwwZun[w{mwmönn""""""""$Qû 6aݻl6 pm 0 pmöl68m 0Æ 08am6a6l0 lDDDDDDDDDDDDDDDDDDDDDDDDD\2nMɹ7$ܛrnM97&ܛr 6aaa al0 00l6 l66l6 mÆal;maaa l6  6l6 6m 6 03 2af.e0303 f\ˑs.˙r.e̹2\s.e̹"\˙s.eȹ}ݶݷ7ߺݻ}viw{iww}mw}vcӻm{(xECC6wl6p00mݰNۆ6"a)am6 0ma6)aÄSxm)ۄSp"8vEMT";#ûO}ݮ #G"8#!@JJJJN8q)P">N 8"#"8D|6a)#l0 66aG aBm# Gae"=G 8Dx0 Gl8Dx06  a#G6(wG2:%q)ġG BqġJ!8@J!(p C'qG B%8@ G"9ȎDqȎDqȎDr##G"9"9ȎDr##;pw4M6cc۶ccmm6}660vcc l6am6l=a668pc mllap4XwiwjqÇ ;&<8iwõN8knuwv۷wnv۷vMm;monnm߶;nJ+ӺNw߷v= vmmmm l0m 6ml6l0ma l0 6mammal6aml68 rnMIɹ7&ܐ䜛rnHrɹ7aaaaa 6l6l6aaa 8m l6a ö Çml0öal6all8pmmf.faf fa2af`˙af.e̹2G"\˲\s.e̹"92\˙r.e̹2\wAwiݦ[w{mmmw ӻi ۾mönmm{AvmmmS]n w^a 7l7pnnỰv um m׶uaݷۿݠݰ׻mVӺSNii;M{OB"Dp##dr#;a# 6a0aaa.mۃ6` 0l0l 06a# 6 6l0amÃa6 7aa80 Dr#GG"9Ȏ29GG"9Ȏ"9ȎDqȎDpG#2#dp#ds# 7&7\{al;ݍmvv66 0 0mal0۶vnmamamal6aðl0n <6e1M4Ӹi4 \\8q8ioda7'7&. 5'7& u߽wnnv۶v۶ݶ۶m{ݷ{{}߽ov}~_u[mݶnmmݍB""05Xnwnvnv7wl8v 0ppl0ömmE;al0 ;wl8m ݶa wCqqrnMHrNM'q0$ܛq;Naɻ 0`aa0a0 0 0 0a 0l`0`c 0m0l60 0 6 aaa0 0ma a a` 0ala0 ܛrp'*&ܜ P%@Mɸx7&OrCJrnMMMɹnHq8w&ܛN8ɹ7&$w&ܐ$Av}ݶ[iҺWuWӺnSzwMmwv7OwÆUzVn4644[M5]nn߻۰۰ۻ m mmml8pv?Mpn;m;JݻWުޯwvwvmmᶚwp4DDDDAi E;vl7 am۰v 7pl0ûm ; 0mmÇ ۇ 0 pa;mpa\""""Dp""""""""""""""""""6ݦ?uNw[[wݧmM?4S4w4iû}ݷm~׻;U^w^wWVa am݆۰wm6mvÆm6n8vl8vmmӻޫwzպwnwm4awiwm;mpG9L .wnvDt#݄G۶)ÇCmm 8m 0m8mCmÇm8mdp#Ȏ""0B!8 B"""""q㈈ ܛrnN ܜI8. MIp\u''&l0 0aa  6a l0 686 Í öaa al6 al6 l6a N 2*08. 'p. 7p\ܛܜrnMԸ. 7'p\rnM7&N }w۷w{jwonmnnۻtݻvvݿv_ۻwmwÇA<(MM5ƝBCxma av۰ۻma amQl0àECpvPE8l0)p";m)ö"64MphPE!H"i\^\D8ЈA(q(qD@Éħ@JwN8q8ħHq)ɸ8pE@`l0al6aaa 6"6"`ۆvmv-0öamb aضa0ņa0.`%@'q*Lw Jq*Bg&A"T N8rNMħ&Pq97$Jq8ErCq97$9!%Iɹ!HrCq)#4ÇiiÇvpݷ7qۻq[wml>mananwovÇm0÷[UnwmpNݶ7vpݦ8wiޫz޺$mݻwnݶ66nMN6M?Nӿۻtݧv}|=47NDDDDDDDDDDDDDDE ma vv۶al6 a 0 mpl6 0 6mpl6al6 4 6`ˁMɹ7&$ܛrCrnMɹ7$9!ɹ7&ܐ䜛rnMɹ!97aa l6aaa 0aal6al6l6mv ;aa f al2. nN . p\7&&ܛrnMɹ7&䜛rnM97&ܷ&䜛rnMɹ'&ܛrnIɹ7&ܛro5OOn{^׷{ݭmwvwomûNm|;_mmwwmwmݷݷۄPP"„P>„P„P n l7anp 6ݶam*v4C)ۇ"8pݶ"A;;(M>-ŧ-Zp.Zh;AG B%% DG B G"8 C B G"8A(q(qG B% "a*""<pDv#aaGab` 6aGab˶ 0l060l8Dyn.dtGa#:#G@ B'q!Ds#BB!#!8!G2G2:A'JN8q8%'N8rC%%F8"9ȎdqȎDqȎDr##DqȎDquTU;k ;MSM;M;;c1ݎcölxvc m7am6ݍۍ7M8…N0m4piڪikdUXi5TӸi.Tvwnwnwwӻwnmomۻmnmvwݦ}l>mouv~{vmmöۻݶۻnnwpۺ vv۶݆am6m ;maa 0avm 0p n۽""""""""""""""""""""""""""""""!rnMɹ!97&ܛrnMɹ7$9ܛrnHrNMɹ7$9'&ܛpl6al0 0 0 6 6 6 6a `l8ml6 l6 l0Æ`al6l6 3 0af.e0s.e0s.fa292\˙s0e̹2\s.e̹2G"]2\˙s.e̹2\˙s.Dr.e̹3\˾Aݶwiwmz[ۺi6monwݧ׿:>un;m{m{m;[)Z^wnZWzval60݆ mmۻvkSal6maöAmU{WӾw;NM4wiõDD4G pB86ᰎdq0Dx7 SD}am"mpc#GapDyGaÄGaa̎lpn6 G"8"8G2:#!Dr##G"9Ȏdr#dr#dpm#5G 28l#Ȏ28&Ԝܛ2าoep\rodI97[Rp\uMmma0al6a l6 l0 66avaca 0  8aaaa jaBi*nMړnMړnMpLrop˂\ܛ8.,õ]{w{߽wwwn{wmݵnv۽OmmoUvmoݶMnmB# B4-4# M (M BhDyvmmnmv۶ "0m)mE;am)ppxE@am mA""4"40hDE\EDDDDhDEDDhDD^N%97'䜛NqIMħ(Nw'ܛL8rN'q;NHrCaa a 6 0aa 0l60pŶl16- ap۶ cma.f 3 ܛq*Mɹ7&Oܛq<w$977&ܐPw&SrCNMɹ7&$9'&7HrCrn%8rCrnMɸrNMɹ!%'|;MӇwmxwv>mwnvww;mm;wmN8mn}h8}h;NݶmAi[IVVV֮֮Mݶnv wW;[mݿݺWNWTvwTOm Ni 4ӾmwDDDDDDDDDDDDDDDDA; al6pml6ama 0mp amal6l8e݆ mD#5QnM97&ܛnMɹ7&ܓrn[rNMɹ7'8&ܛܓrodܛal6al0l6 0l6a `aöaml;l6aݶ 3 0l6l6a3 e7'p\ܜ˂&ܜܓrnMɹ7&䜛rp[rnMɹ8-Mɹ8. 7&ܜ7&ܜrnMWwwwoݷwwkw}wwwt~ߺݴ{mn{owvRZۻoo߻߻{;MB;UE C\(P C(v<*j¦aa m 6l6mp"aöamE:ۄSpݸE۸l0QC(v(xPM8pŦMSC B"wbq  B 8!@!  B"Pw@!@JN8 BDr#r G"9ȹp`0a6EC pE8Dy0Dy<0Dy 8A 0ðp b 1xDyA,B#D|"08@#BD!;N%B A'q; A&q;N9!%%'Jq8'N8q'Na$8q(q8S$88&N9!% $89!ġġHrCN8wp4N香1馝ޚi=4Ӹwƭ5cv1allxvv<= mllcm­jv&i馝ii tӵM4ӵM4Ӹzik{mmnwnޝ}mݷim_uۻmۻۻ6۽mnmDDDDDDDDDDDDDDDDDDn݆ݻ amnn ;aaam 8mÆmammmb""""""""""""""""""""""""""""""#$ܛrnN Iɹ7&ܓrn[rnIɹ7&ܓrnMɹ7$ܛrnM97 0a 0 0 6   0` 06 al8ml6  ab a 0˙af 3 0s03 "\˙s.eȹ2\˙r.e̹2`˙s.e̹"92\ˑs.e̹2\˙s.f 2\˪wvu^תݶwwv{vwޝmok׻߻6;[un^z(z =mml6l6݆ݰa vmp)ml6m;|;tSmiAþN;pݧݠ% G#G#Ȏ29ȎG"9G"8h#Dr#0B G"8G"8#  *!8">Na 0E8nE=ᰈaaB# 0mAGnG pE8Dz #ds#B!G"9G2:#r#dpG"9G#G 9G 9̎G"8᠎Dr#G"8᠎pT]2IڧdUMɽݓjkp lm 61ncacm;aa66acc m0  a6۰ӌ*pv\\8jN 5'w . 8jN o2฻฻ุpԜwn~www}kwӽwoivomۻo۶۽mn۶nDDDDDDDD6mammmmapm 0 6a 0mp l6mwvlEDDDFDDDFDFDDhDDDDDDDDDDDDDyrnMɹ!97&ܛrܐܐ䜛Nܐ䜛rCrnMɹ7$9!Iɻ a 6aa 6l0 0l0l0l86l6m 0l03 0   0aa\0BTܛ. 77&ܐ䜛rnMrnHq8䜛rnHrN'rnMɹ7$9197&ܓrnMɹ7$ܛrnHrNMɹ7]vnݶ;Mwvݦݦ;{w[u{wn;6om|=mm6h;p4wil>ݷ}mvVVSUNUV awnawvvwmi{ݶmUjUM>i|4Nmm?[M8}m 4ӿ(qDp#G4#aa a  a 0ll0 0a 0 6l0 0Aa݄Sݻ m,28!2p<28iG 8e7p\ܛ8. nM웓ܛݓ{Rp\rojM7&ܜ7&mm 6ma m l0ݶ ma)0l6c` 6l0aن˂CLL'œ&ܜ7&ܜ7&ܜ{'8&ܜ ړܜ{Rp[nMԜww~wnwwow~n~v[ﭻm޵mӿm~ۻnwnvnx(M(M(M5CZM45 MP8BPݰn ۰6l0ݰl66 mavmm öopah=QCMT*(xT""D\CdpH8!k&N9!8!0qI 'q;a'rn'p@É7'q8qħ'q$9'"P 8ED"`ÄTpE@a"a 0amG"; 0m#Dv0ۂ#Dz 02:#E` l0` 6P aa`%@Jrn'q< A"q;rnHrCCrnMħ$89'&JPJrnHrC%97$9!Mɹ!%8ħ&%97JNqɹ7h8wiiO4Mwj:QuWݏ6<6llQoqv^uivkiizwh}zޯw{wnavwl7m 7av m~om8}~Ww{mwm6nm۸vm6N"""""""""""""""""""""-a7mmvݰ 0`apaÆ7m"""""""""""""""""""""""""""""".7&ܛrnMɹ'&ܛrnHrnMɹ7&䜛rnMɹ'&ܛrnIɹ7'7$ܛ 0 6am 0 6 0a 0 0a0l66l66al0 a 0 0al0 003\3 0s.e̹3\˙s.e̹ȹ2\ˑs.e̹2\˙s.eȹ2]2\˙s.e̹2\˙s.E̹2\ˑs.m>ooooﻷݾuwow{mmiommﻷmv}ݶwmwmݶwvxEP?PPP\"}iP݆nnۆno 667mv"a7m8v>;m";(~Ai;dsAøvÆG48ww%"PPPPP 88888 B DġġDġġ!@JJJJJACCCC"9ȎEÄG"Dyp"<"6app 0 6mn ˢ=GnGa* pa#6"> 8"<(p CJ)!8q8qġġC%%%'N8q(q(q(q8%%%'N8q%'JJJN9!CCCC'JJJN8DuûwpN8iÇ ;48p8wwm8llmlvnmcc lla vm-66Ëbcl0aa8ׇp;iN5pNÆ8idLJiwipN4u^u~_ݶvnwnwniiwm[ۻӻnhDDDDDDDDDDDDDDDDDDDDDDE l6۶namml0aa 0al66 ݻmqrnMɹ!97&ܛrnMɹܛrCrnMHrNMɹ7$9!97&ܐ䜛rnM  0 0al0a a 0a`8vl6;l3  0 0 6af 3 0\˙s.Dr#s.e̹ȎE̹2G"\˙s.Dr.e̹2G"92칗2\˙s.Dr#s.e̹ȹ2\˙r.e;mwvwwmvwwv;ivw{wntӸm6nn~>mOAvpӇݶݶzժWE*w_Panݰݶ0aS]AvO]ni;NiûM8pӴi}ݦ r#8!G 9̎dr#ȎDq,DqA6AG"9) n)0al"xE8aala 6 vl6nal"a2:# G r#6G r#ds#9G "9Hdr#Yds#,ݓɽ2&p˂{\]ړ฻Rp\Y7&N amalvv6a6۶avmmam۰m6amiNɹ7U'7&N u'pM“pMԜ&. &T";Tn~Ӷow{~ommݻ{[mwm}߻vwm{nݍhDDEhj4Ѝv6vwpn݆nwl7aaml7wmݶ۷vn(q#B"!DD8""DFDFDDD8drC䜛rC䜛8䜛HrNMɹ7&q977É7&w$9!%8a  l`6 a 0a0 0Palmas.a 0 0al0 aaa0`˙s0 NMɹ'7&&SܛrCq)ɹ7&$8ܛrn'NܛrCq)ɹ7-Mħ&ܐIɹ7$9!NMɹ!IɾvpӇve;O}iivh=֭WJǺ;m4NN;oWmvvwimm4}i۫ۯݺۿujw{ݶ6m6 avomøpM>v6nۻmۻۻmMG mE8l7ݰ݄G۽6aDym ۻE= ۶ lDdp4\N 7&'ܛrp[rnMɹp[rnMԛrNMɹ7&ܓrp[rnIɹ7&&ܛrnIɻ 0 0a 6acaa 0a 6vmP8l0` 0a 0 0 l0 f 0RܓrnMnN 7'7$ܛrp[rnMɹ8. 7&ܛnMɹ7&ܛrp\rnMpMɹ7&ܜܛrn[{߻[ӻݵwu~mo߻߻߻~u;AûM(xM<"E E(wjC(p 0 ; a 6wma۶ml;ݻݰaai.Aݠ"Š.-q8zZGX8qDr#G"8G"9Ȏ@G"\ˑD@JA)É@Jq(qDħD!N<"QSG 0pE@l0maGa"8Dz0 3pE8D~a#* aapD|"P"=G0Bw'Jq(q8qġ%%9!%'JN9!%'Pc$8%%Hq(r1ġġJq8Hq(q8PPq9!CC4ӸpᦝÇiLxpÇw8pppbwln8mmǸqma0m6mlpz>i8vw8i8iÇ ;8pw4Æ;M;~_Wu_mwnwmvۻwu^vvm6NۻNww߷w!m ݶmݶma\mmnvl6"""""""""""""""""""""""""""""""n}wmm۸mww ۿmn6nmwwpx!wmݶaݻ ۻwna3rNMɹ7&$9'&ܛrNMɹnMɹ'&ܛrNMɹ7&ܓrnMɹ7$ܛrnM97&ܛ䜛rnM97&ܛrNMɽa a  0aaaaal6 2\ˑs.e̹"\˙s.e2\˙s0e̹2\s.e̹"\˙s.f 2\˙r.e̹2`\˙s.f 2\˙.e̹2`˙s.e̺8wwmwl>{N}׺k~i׻߻߻m׻^߻߻߻;SnN\"wwTSSVvvl7al>v6wݦAm;m}iiv}ݠ%% G"9ȎDqȎDr##9#!DpB9G"9ȎDr#Dr#ds#DpB8GG"8G#ȎDqȎDr#Dr#al8""?al8"">ÄGAᰈ"Dza"?Dr##G"9ȎG"9Ȏ28h##9Ȏ28h##DqȎDr#G#̎dp#r##Ydr#3Ç nÆL{7jpVa[UXeŗڪjIl6amlcmn ewpᦷp..Rp\\8jN Iqw lõ n7qwUoV{T[[{{vӻ{wnmw߷vݷ{wm۶ݾݶmmwmݶ"""""""""""""""""""qmnmmm mЈЈ3䜛rnMIɹ7&$ܛܐ$ܛrCrnMɹ7&䜛rnHrC&q;rnHrNMɹ7$9!97䜛ܛNܛ6 0aaa 6   a.Dr#s.eȎE̹2\\˙s.Dr#s.Dr#s.e̹ȎDr.e̹ȎDr.e̹ȎE̹2\s.e̹"9ȹ2G"\˙r#s.e̹ȹ2\˭mû}ݶ;mݰMAݧNݶ;m;v۷wmۇiiûwwiݶݦv|;v}ݶ]*U*ZҪujwjujwJWJWJWv ݯvkmiAiNipM;ipM;m|5Ӹm|;M4D6ᰎdp#4G "8mhdr#6O 6a{ aaa %"""%""'DDDDDDDDD㈈"8iDDDDDDDDDDCM7&N &ܜC. Mɽrp\rn. ܜrnMԜܛ8. nM{'pMp\{ll0m 0 m l6p\ܛ{'7&N rp\7&. 7&N nMɹ8. nMɹ7'7&N ڗpMɹ8. rp\7&N wuvv{{wݾvwvۻnwwm{wnۻv{wnn ABhjBhiBiPA(E(M4B(v;„zxM44iamn}mxPzDCqqN!""8Јz"";'A!0q8 I%8&N8M!Iq8qħ'q7&N8q) 8rCN  Ba BwL8q8Nq8q0ÄT 0a#Јl0af(Dv"0a$9!ܛrCJNܛJJ䜛Jqɹ7$89'Mɹ!ġ'CJNMɹ!ġħ&ܛq97$8q7&$9!ġ97$89'&ܛJJq)ɹ!#4iM;Ni>nM8}8vi[Ӈiwm4M8}iÇv[N44ӿM8}1M4;MW~_W~^~Wnommۻ46Nmwwvmm6niöۻaaam۶""""""""""""""""""""""""""""""""""""""". rnMɹ'&ܛrCrnMɹ7$97&ܛrNMɹ7&ܓrnMɹ7$ܛrnM97&ܛrNMɹ7&䜛rnMɹ'&ܛrnIɹ7&ܛpaa 6al0l0!97&ܜrnMɹ7&$ܛrnHrNMɹ7&䜛rnMɹ'&ܛܓrnMɹ8&ܛrnIɹ7&ܛrnMɹnM97&ܛrCrnMɹ7$ܛrnM97v}ݷNov׻ﻶvݶݻ}ݶݶvݷmC"(xETPPӸ~xECvE8~;A?CB(wvvl7ÇvpppӴ;dsAp惻8dsAøqiûNӇwi(qDġħDG"8"@JJJN88888"9Ȏ@JJDCCCCC"9(q(q(q(q8CCC#!@JA(q(q(q(q(q@JJJJJA(q(q(q(q8ppn 7)p N%%%'JJJN8q8PPPPqCCC'JJJN88q(q(q(q8PqġġġN8888q8PPPq%'DġN8888q8qġġġ%%%%! ; S Sw4ӻ 48pӸpNÆ;8pӻw5mm1m8pڦÇ ;p;pN4ӸpᦝÇ nwpNɏiÆpᦝÇ[nֿu߯߯߯nk{owmn;}vmݷnN mml6DDDDDDDDDDDDDDDDDDDDDDDDDDDDDDDDDDDDDDDDCNAɹ7&$ܛrnC7&ܐ䜛rnMIɹ7&ܐ䜛rnMHrNMɹ7$9'&ܛrCrnMIɹ7&ܐ䜛rnHrNMal0a  aܐ䜛rnMɹ'&ܛrNMɹ7&ܓrnMɹ7$9'&ܛrCrnMɹ!97&ܛrnMɹ!97&ܛrn[rCrnMɹ7$ܛrnHrNLrNMɹ!97QwmûlݧiwiwiûONݷwwm}[v}ݶݷv>mݧh>Om>ݧg!VVVZ^n^(}UVnWvvm|"iÆp;Nwiݧ~vwipӾvӾi}ݦûI$#6Ȏdr#9G28jȎG#G 8eȎ28eȎ28eȎDr#DpB8C G Æ""%'JDD㈈C(qG"8eG "8GᰎG"8h#h dq,29Ldpr8!ds#, I" ڲ7d. p\]{'pMɺ. 7&ɽ8RNMɺݩ8. ړÇvMI7 668l1\pMɼ5'7&&N ojN ړ&˂ɺ8&MԜܛu'1ɽ8. U'7& ok "GA nnn{nwmnw{m~ݷ~mm{mww{nݻnw߶m{wwCHC 0AOO>>>Oom>kvݶݷNݶݶv}ݱG@w=j*w>n(}߅[E ߅[^:T;ӇpApZ|;w8vvi;N;|;NR #8B1(q(qG"9ȎDq̎29ȎDr#dpr#dqȎDr#@AȎDr#r#G#ds#Dr#`DDq̎G"9ȎDqȎDr#dqȎDr###r#DpB8!ds#dr#dr#Ydr#ȎDr#Dr#dqȎDq%"qġ(qDr#ȎDqȎG!8'N88q(r1CC"qġġCzzP8B!5[Xwwp!wpnl0nړ'k pӻӻpӻUhU'MaûN oj..aڬ2TY7Rqwj฻U'vӻRqwk HC9C9C9ND]kwzvvޯwzw{}wmݶ۾۶۽oۻmommۻm۾mmquJg$9!97&ܛrnHrCrn'rܐܓrn'rnHrNMɹ7&$ܛrCrnHrCrNMɹ7$9!97&ܛrnMIɹ7&ܐ䜛rnHrCrnMɹ!8rnMɹ'&ܛrn'rcrnM'rnMɹ7&w&ܛrCrnM8ɹ7&ܓܛrnM%97&ܛJrnMɹ77&ܛq8ܛrnMġ97&ܛܛrnM8ɹ7&֓>Ail>O4av}ݧiv}ݦݶݷûkkkݶwvݶwmmkޯڽz[^ݻݶڽVwöӇmNm;Ӿmi>m?Nm6m;i>DG 8iDqHDp<LDp#G 9LDp#G 286GG "8m̎G 86wTj&ܜ)7'ܛ'nMԜ7&IpMɽ8&ܜY7'ܛ&&ܛrpMɹ8RnN nN nMɺuRp\rqdܜ 7U'7&ܓrn. 7U'ܛu'7&N {Rp\rnMɹ8. 7U'ܛ{'pMɺ8&ܜ8&I“nMԛ}.莈莂vu{[ݻ;;{m߻߻w߻mwVB""((PhaBi&M BiPj C"AڄzM &h^(EDZv4"-4T."""-A\Zqiqq.#N."EWI$g@Jw&w'N8%8q8n%8q8Hq;N8q8q'q0q 88ħ%%'q)!0qġN8q87q87N8rN%8!&9'&q%IɸqCNMħ$9!rnHq8qħ&SN8q8JrnHrCrc$9!8%IɸN9!8N8q8䜛q8%Iħ&$89'N89'Jq)PD9pݶûm8pm8pN;ӇNôӇûM8piÇvpݶ;ӸpӇviûm4ݦ;M8pN;iÇm;m8}pLӇvpݶ;|C5zWzW}ۯWNzUz[}m4p۴ݧpN;pM;miim rnHrpMɹ7&$ܛrnHrCrnMɹ!97&ܛrnMɹ!97&ܛrnMɹ'&ܛrCrnMɹ7$9!97&ܐ䜛rnMIɹ7&ܛrnMɹ7&ܛrnMɹ'&ܛrpMɹ7&ܛrnMɹ7$ܛrnMIɹ7&ܓrnMɹ7$ܛrnMIɹ7&䜛rnMɹ7$ܛܓrnMɹ7$ܛrnMIɹ7&ܐowvݧݧݧwwiwiw}kiݧݧݷwvwmwmwvwwvwvwv;ۻC CBP­߅[(TPU=BP>>PwP.--qh;Apw!!pE-h;h;}Lj B G"8 BqAȎDr#"Dr#`G"8AȎDr# G"9DAȎDr##  B@JJA"9ȎDq@AȎDq@G"8 BCC"8AȎDr#G"9G"9G"9G28G"9G"9G"9G29G"9G"9ȎDqȎdpr9G"9ȎDr#DpB9Ȏ29ȎDr#dr#\G"9Ȏ29ȎDr#dr#GG2?iڬ;wpM4w SNԜ'wjNN4ӻ5NSNiiviv ;w 4pӇv UM;RpjwiM;w SM;UN;ۭߺ{{w}wv}~nmvmiݷp۾m~nn}m=ۇB""""""""""""""""""""""""""""""""""""""""""""""""""""""""""""""""""""""""""""""""""ɹ7&ܓrnMɹ7$9'&ܛrCrnMɹ!Iɹ7&$ܛrnHrNMɹ7&$ܛrnIɎIɹ7&䜛rnMɹ!97&ܛrnMɹ7$9'&ܛrnHrNMɹ7&9'&ܛrpMɹ7&$ܛrnIɹ7&ܛ䜛rnIɹ7&ܜrnM7&ܛrpMɹ7&ܐ䜛rnM97&ܷ&䜛rnMɹ'&ܛrnIɹ7&ܛromwvݦMnOXwvwv;5aûO~ݾ^NݶݺuAvmwmwmVݪul7N׻;TVB(wwzzûM;8|;ivwpM;vᶃpmöӾݦ;aiݰ`,28iDpB8h#dr#9ȎDpG"8!4G#9L28fȎDr""% G"85Ȏ28eȎ28l##Ydr#9Ȏr#YG"8G 8G qH29AG#9Pdp#DqiI7&&Ip\rojN,{'7&I97U[&T)'&ɹ7 . 8&ꪤ{Rp\uRp\roÆ8jN 7RpM7' &7ke7'rojN nMS. nM. nNp\xjmOt[m;N;ۻݷ{wmwmm߶wmm^~~۷~wmm= (M!& „"iPE(B"B0BhDDFDhDDDEƜEƄDFDEDEDFDFDhDqqM'q8$Sp@ÒNM!"IɸħHrN%8ħIMHrCrnM&Jq;N'N9'&w!Iħ&aIɸ&䜛NMħHrN'q;HrNMLrN'rnMHq;rnMɹ!97&Sq8Srn%9!rnMɹ!$ܐ$ܛPw&ܛN9'&ܛq8䜛rC$9'&SN9'&ܛrCrnMɹ!q)'Nwv8wv8wvqûm}iûppݶm8}ݶvpݦ4m}h;m4wiݦ>4mmwvp4vh>Aûm8wRJtvTTm*i*VTvtVt[M;MᦛiM>wpM;6ӻm>7M8w 6i4O5""""""""""""""""""""""""""""""" f $p#rpMɹ7&ܛrnMɹ7'ܛr. 7&$ܛrp[nMɹ8. 7&ܛrNMɹ7'7&ܜܓrnN rnIɽܜrnMnIɹ7&'ܷ'8. 7&$ܛ$ܛrp\rnMnN 7&ܜܛ8-7&Mɹ8&ܛܓrnMnIɹ7&ܛrp[nMɹ8-7&ܜ7&ܛ.~{n~{nﷻݾvw߻{{ݾݾo{~wcMU<(E\(Eݪ CBP4(E"P iݪ~4E CBh<(EhD8qS;N.!и";p"=;vCdpH|DZN;A1;D!DA@A(q(q; B"'A 8q; B"PN  B 8"qA(q8wA(q(qAA(q8SN"#\ 8q; B"Pq  B 8q;rCCN8rCJNaħHq8PaħHq(q;$8rCCCܛ$88qɹ!%%%9!Hq(q8qHq(q(q0S$88ÉN'PPw%Hq(q(q)HrCq8'$8q84i=4&<5ӸzipӻipӻTNM;M;4Ӹzi4SM;M4m4TNNӸzijiݭ릝M;4Niڪikۻ{nmmmw}ww۸vw}mw}6nmg&䜛rnMɹ'&ܛrNMɹ7-ɹ7$ܛrnIɹ7&ܛrnMɹ7&䜛rnMHrNMɹ7'$ܛrCrnMɹ7&$ܛrNMɹ7&ܛrnMɹ7$ܷ&ܛrnMɹ7&䜛rnMɹ'&ܛrpMɹ7&ܓrnMɹ7'ܛrnM7&ܛrNMɹ7&ܓrnMɹ7$ܛrnN Mɹ7&rnMɹ7$ܛrnN 7&ukwvwv}wk}h;wvwv;wwvݷvvwmwmwmwmwmݷݶݿݶ߻4zw>pwPSUwڄPVnU Ӈݶ>;M>wûMvpӾ48wAÇipAؔ88#Dr#DpB9G B G"8G"9ȎDqȎDr#dr#G"8DġġġAȎDr#G#apGG"9Ȏ29ȎDr#dr"PPPP'Dġ㈉CCC8%%'DJJJN888q8qJJJJN8CCCq(q(q(q(q%%%'JN8888q%%"%%'N8888q(w5Rqp᭗j[ nU n-8e“Xi7XeœrojUMKpˋ&jN IœxpԜpԜ SLpɽÆ\]8ekw ..8..5'nջ׿znmoۻT[^{wm~wmmݷvݾwmݷmݶݻwmB"""""""""""""""""""""4""4"""0DFDDDDDDDhDDDDDDDDDDDhDDDDDDDDDDFDDDDDDDDDDDDDy䜛rnMHrNMɹ7&䜛rܛ䜛rnHrCrnMɹ!97&ܐ$ܛrnHrCܛrCܛrCrn'rnHrNMɸɹ'&ܛrC&rnMɹ7$7&$9!97&7&ܛrNMɹ7&$ܛrnM97&ܐ7&ܐ$9'&ܛ䜛rnHrNMɹ7$8ɹ7&ܐ&ܛrnIɹ7&ܐ䜛rnMIɹ7&m8wvӇwmh>Aûm8}ݧmwvӇwmp?mm?mOAûpwivv}ݶwwluuҪ%WzvvVttTRZ^զ}M4ὶmpw 4ӇM4i|>OO|4NDGA6G4G 8iȎDp#4xh#Dqhdq !8"%'DDDyC&d&nN 7&&97&N nMɺ{RnN 7p[nM7&N rpMp\rod. rnN 7&N nMnMɹ8. nMI8&Ԝܛ'7'8&nM7&. 7'p\rnMp\rnN &TԜ7& $ܛ&wwww{wow}w{wݶovn{nݻov{߻{{nm} A(Mw AB(vBi MP5 CU M T!i C5P"#T#T"!ƄFqB"""DC#t""Fq'JJq; BaJqA'JqD%8q)!wq8qħ&N8q) %I I'q0qq;A'Na'Nw@!I'q0q9nMHq(rNMɹ!ɸq;NMHq8w&ܐP7&%8q)ɹ!ġJrnHq(rN'rnHrCNMɹ!ġ97&P$8ɹ7$97;rnHq8P䜛rCC$SPN97Npi;;ӇiNiNvpNipM;MM>4iNM?NM>6ɏݦ>4ih}*һ};;ݺ۫nt}ҽwNw ۻmwpnm;mۻmmmmmnۻmwpɹ7&ܐ䜛rp[rnMɹ7&&ܛrnIɹ7&ܛrnMɹ7&䜛rnMɹ'&ܛrCrnMɹ7$ܛrnM97&ܛrNMɹ8-ɹ'&ܛrnIɹ7&ܷ$ܛrpMɹ7&ܛrNMɹ7&$ܛrnIɹ7&ܛrnMɹ'&ܛrpMɹ7&ܛrnMɹ7$ܛrnMIɹ7-ɹ!97&ܛrnMɹ7&䜛rnMɹ'&>ooO[ۻm{mۇwmvpo߻nۇwv}ݶxEP(z(xEMB(pT?8EÇPC<"PڄPmB(}}Pݦwh8wwh8whZv} iûAݦMp}Bp->Avwvwvwv;wmN;ONwiûOAwkh>ӇvޫwzjU[­ޫ߯wZ>[§pNipi 8wwwwvô8p4Ӹwipm4ûM>vޝpm?x Dp#G 9̎r#3G 9G 9G#Ȏ28iG 89#Ȏdr#4pr9G 9G 9ȎG p#G "8᠎Dr#dr#Dqdp#GړnMqdܛÆ\p\{epMp\]8. ړ&jN nMIpM웬;&d. ݓ{' 0nԜړ.{'pMɽ&Tܛ8. ojN Rp\jN ړ&N u'pMɺ8ojn{{[nu[v۷wnwmݾw~w{m۷}mww{oww~۶!PF!"0D\E- !ƃMxB"5 DCЈЈ""DDhDFDDDDFDDhDDh;NwHrCrn'q;NaCIħHq(rNMɸrCq)MM%9!ɸɹ7Pw&wL9!ħ&wqMɸrCq)Ò䜛Nqġ8ܐ帔ܛrnHq;rnMɸrNMɹ7$9'7&ܐq97&$9'7&&Sܛrn'JrnMɹ!ɸܛrCNܛrn'Nܛ$9'&ܛN9'&ܛrCܛrCwvpӇve;Ӿ4}mmih>O4}iݶ>6AimiivݦݦM}^WuWtwuw׻w{nmmöۻmm6m>mm6nmw 6۾mwDDDDDDDD p B8G`4 ܓrnN rpMɹ7'7$KܓrnMɹ7$ܛ7'ܛrnMɹ'&&ܓrnMɹ7$I7&䜛rnN nMԛrnIɺrpLrNMnM97-ɹ8. 7&ܜܛrp\ܛrnN 7&ܛrpMɹ7''&ܜrnMpMɹ7&ܜrnMɹ8. 7&. MԛrnN rpMɹ7&ܜrnMɸ"ꭾo߻oNw߻uݵw߻~~}v;PMA;(wP„PB(zA<&>P>5P:ޡ<"zjCC<*jCŠ.-vw\ZEA\Z\Cwhhqh= B#Jq(q8PP% 8q(q)ħ"q!Jq@JJJA(qD!L8q(q(q)ħ 88S@JJJJq)!@JJqD!$8S@JJJq)JA(q8S"9 B%%8 BqġJqġJN8rCJrCCC$89qġġ%F88q(rNHq8qġ91%'SN889!ġHq8qN9!N88rCC'PN8q(q(q(rCN'JJwpM;Li8pNôӇ;;pm;NöӸp4i8ppN8pN8pӸp4 ;p48iÆi8iw4ӇM;iZֽ]kuzֿukֽ]kֿtw{wwnۻmwpۻ{ww7N۾Ӿ3rnMɹ!97&ܛrn[rCrnMɹ7$9'&ܛ䜛rnHrNMɹ7&$9'&ܛrnMɹ!97&ܛrnMɹ!97&ܛrnMɹ!9nMɹ!97&ܛrnMɹ7&$ܛrnHrNMɹ7&䜛rnMɹ'&ܛrnM97&ܛrnMɹ!97&ܛrnMɹ7$&ܛrNMɹ7&ܓrnMɹ7$ܛrn>>>;O?>5OOOm>_m>O׻av}mû׻׻^{cN<*߄P­EP߭.~n*w[w=n"]þi>iOv}Z8|;M4wiŧøyC"9ȎDqȎDr##dpr#qG"9Ȏ29G B%%% G"9ȎDr#Dr#@G"8GG"9AȎDr#@AȎDr#@AȎDr#G"9ȎG"8G##Dr#dpB8!ds#ȎDqȎG"8G28qȎdqGᰎ29q̎G"9N8q%"qJN88q(q(q8PP%;' wjwkɏvӻww SlTaTVVqeÇ vIRp7vN.a\Z;& aIdqwjɽ2ɽ2{kwv޽ݻvw}wnwڭ~mnۇm}w on۽nmm~m߶wm4""""""""""""""""!DCЈ8&$ܛrn'rn'rnMɹ!97-ɹ7$ܛrCrnMɹ7&$9'&ܛrnMɹ'rnMġ97&ܐ$ܛrnIɹ7&ܛrnMɹ7$9!97&$9!ɹ7&NMɹ7&SrnMM97&ܛrcrnMɹ77&ܛJrnM8ܛrnIħ&ܛq;rnMɹ7Iɹ7&JJrnMɹ7$ܛrn'rnMɹ7$w&ܛ.AvwvAm^Nݶwmwpkwmm8wvû^MTv}ݶmmv}ݶ>{w[5{7[n׺t;w7[]nnӇpNӾ4ۿӾm?ۿw}wwpDDDDDDDDDA28ih Dp<G "8mDr#G 9LDp#x8!8"""" G 286Arp[nMɹ8. nMnMnMԛRp\rod&ܛ7'7&IpMɹ8-7&p\rnMɹ8. 7U'7&N u'pM“rp\rnN 7&rpܜrnMI7&IpMɽrp\rnܜܛnMɹ7&rnN 7'nN 7U'7&N n~}۷w{w~wnw{w{ww{o}۽ݶݶvvۿwnoݿwmoۿw(v5 (E &8 M BiMS…AB& PM4.""DD\DEqqiqqEDDCA%'q) $8'qDܷ 9!'q0qNw'$w'N8ħ"Pq8w'JNSL9!'q;N8rCNa$wq8$8%8rN\ˑG"92\G"\\G"\G"9ȹ"9ȎDr.e̹ȎDr.e̹ȎDr.e̹"92\ˑ\˙s.Dr#s.Dr##s.Dr#\˙r#\ˑG"92G[iÇiÇvwӇm4ûN8viûm;vpݶ8}8viAÇmM8pûMpN;Ӈûm8pnݶvw4ɼ;NiÇvpݡW{ۯwJ]]?[Jz]T6۾ᶝvޝp; NiӻpM>ޝ""""""""""""""""""""""""""""""""""""""""""""""""""""""""""""""""""""""""""""""""""2nMɹ!97&ܛrnMɹ!Mɹ7&$ܛrnHrNMɹ7&䜛rnMɹ7$ܛrnIɹ7&ܛrnMɹ'&ܜ$ܛrnM97&ܛrnMɹ7&ܛrnIɹ7&ܛrnMɹ7&ܓrnMM97&ܛrnMɹ!97&ܓrnMɹ7&䜛rnM7&ܛrNMɹ7-ɹ'&ܛrnM97&ܛrnMɹ'&[>>>{o>>nn{m(xE„P"~"~B(w~nB(wJB(zP<"wT"wB(}"P(E;MEÇq;A;Aŧ->qh;pNC2= B 888 ##`AȎDq@!Dr#dr Dġ"9ȎDq"9Ȏ29"P0B"@JJA@A(q(qG B@JJA"DqȎ@!@JJA"PPPqN88q8'JL8rCJJL8rCJJN8rcCCCHq(q8q&88q8PPc'N9!CHq(q8Pa$8C%% G"9ȎDqȎDs#DqȎdpww Svkw 4ӻiM;TN4Ӵn4NUn5[jwjvpSNU4N5M;Tݧwivݪ14ӵTN5v fnuNﵻ[uVnm{mpᶛmݶnnmmnnmwnݷЈMɹ7&$ܛrnHrNMɹ7&;rnMHrNMɹ7$9!97&ܐ$ܛrnHrNMɹ7$9'&ܛrCrnMɹ7$9'&ܛrNMɹ7&ܐ䜛rnHrCrnMɹpMɹ7&ܐ䜛rnM7&ܛrNMɹ7&ܓrnMɹ7$ܛrnN 7&ܛ䜛rnIɹ7&ܛrnMɹ7'7&ܷ&ܓrnMɹ'&ܛrnIɹ7&ܜmwv}ݶ[vwwiûNݶwmwvvwwnwh5u׻^{Nwjvڭݻ}ݶݷv?SuuUSnUt]nUӺtV;M;m;wöӾNôwpᶝᶝm;mwöӇmw 7""Dr#Y6G#YG B8h#892#pGG "9G 8G"8iȎG#G"8eȎ28f̎r#2G 290dqȎG4#ah. 7URpMɽrp\roe8. 7pxe“nrpMɺI7p{Rp\ropˋ&ԜY7&N {'7&IpMIpMɼ;'7& nܜ*Æ& . n{p\rqpLuN Rp\ro IpMpӻ{{m;m;nۻvwwwmwwwwmvv~ݷ{m߷v6# (M5T05U Mi0hE!DF&FM BCB""5B"#B"4""#B"5B"#B""""4"#T""4""4""4""4"""rn'q;Jq;N8q;ܛ B'Nw$wħ$9'ܛA97rCq;q;$9' BaI'q;rCrn'q;$9'&w'w$8ɹ7&88ɹ7$8q8䜛rCN9'&ܛ$9'&ܐIɹ7$8q8䜛rCN9'&$9!Iɹ!'rnM$ܛrC$ܷ$9!Mɹ7$9!rnHq8䜛rnHrCݶmxwv>ۇwmh8}h8wmwmp8pN;Ӈݦ;M8}h8wvݦwi4pNݶ;iݦ8wmۇUjjn]nWUI_UZU[jUnUjU>NᶚwpMiM4ᦚwpM;iôӾÆim4ᶝ ӿMa#H, 6mG98&ܛrp[rnMɹ7&䜛rܛrNM웓rpMɹ7&ܓrnMɹ8. 7&ܛrnMnM97&&䜛7&ܓrnN rnN rNMɹ7'8&当rnN 7&ܛrnMɹ8-97&. 7&. 7&ܜܛrnM7&ܜ7&-97&ܛrNMɹ7&ܐܛrp\rnMɹ8&ܛrnN nM.~{o[ݾw~m߻w4QC„P?E C "i&PSP<"iP C(vjC"kMtP;A"P4"D8pT!ø8wиC!Çw-qqh;A\C1; B  B 8#!@!'qA@DA@É%8 "9Ȏ@!D!A  B 8!0C)A@JN8!@É'qD!D Bw@A(q8w@!Dr#G"9"9ȎDr#eȎDr#!0qJJN9!N8q8Hq(q)N9!N'rC$8q8qHq(q(q8S$888q)N8q8qɎHq8qN9!N'N8rCN9!JA馝pLN馝ôӻM;4ӻ]4iM4vwM4wziviip4MU4ӽSM44MSM4tӻ]4ӆjzizvuӫN[u:v{}߶wvw}mmw ۻwwmmwmmwpmm䜛rnM97&ܛrNMɹnM97&ܛrNMɹ7&ܓrnMɹ7$9'&ܛrNMɹ7&ܓrnMɹ7$9'&ܛrCrnMɹ!97&ܛrNMɹ7&ܛnMɹ7&ܓrnMɹ8&ܛrnN 7&ܛnMɹ7&rnMɹ8&ܛrnIɹ7&ܛrnMɹ7&䜛rnM1ɹ7&ܜrnMɹ7$9'&ܛrpMɹ7&wvwv׻^mwvwvݷ>ݽݷvݿwmwmwmݶݶwomݶwmw8wp;z(zPo;ߪwz߭޺ݦ;dsNvp4iûvwiiiþwh>wiġġAȎDr#dr#GGG"9G"8!GCC"9ȎDq̎29ȎDq̎Dq(q(q(q(qG"8!G#Ȏ28!GG"9ȎDqȎDr#G r##Dr#9Ȏ28!G"8᠎Dr#G"9Ȏ28l##9Ȏ28h#dr#G"8G"9r#G"9Ȏ28h##..5jTɽÆMUXjkÆ\\8eeRqwjwpn2w7p˂RqwRqwaRp\\8jN ڭړÇ oุpJW~kvwv}~jzwkv{ݻۻoۻnnۻnݻmnۻon۽š)+3rCrnMɹ!97&ܛrn[rCrnMIɹ7&ܐ䜛rnMIɹ7&ܐ䜛rnHrNMɹ7&$9'&ܛrnMɹ!97&ܛ䜛rnHrN[rnMIɹ7&$$ܛrnMɹ!97&ܛrnMHrNMɹ7$9!97&ܐ$ܛrn'rnMɹ7$8ɹ7&ܐ&9'&ܐ䜛rnHrnIɹ7&$9'OivwwmݶwmAvӇwmݶݶwwiwwmݧݧûmih;-U*]juW[ujujunWZ]*ZZkWiM>M>im 6NᦚiÆi 4ӿӻ4i[m;Ӹi AhDpr8h#4G B8G 9LG28jHDpR#28)h`DDDDJN8A F7p[nMœrovN MɺrnN!ܛu&rnN {&ܜrovN nM7&ܜ䜛8&ܛ8. 7p[p\ܛ8. nMIpMɹ8. rpMɹ8. rpMɹ8. rp\ܛ8. nMɺrp&K&ܜY8. 8. nMUwnwnwwvwwwowvw{wnw߻wmwݷmwnwmۻ&=Bz AB(v(PjBPxP8BA&BBЇ xPPDDDDDCЈq."DDCz Јz"" Hq) %8ħ@ÉNS B%'q)'qD8  B%'JqA@JNq8qħ&N8w&N9'!0q%8aL8CܛA'\G"92\G"92G"9"92\G"\˙r#s.eȎDr.e̹"9ȹ2G"9ȹ2\G"\ˑG"\ˑ˙s.Dr#s.Dr#s.e̹Ȏ4ûM;M;M?NN馝ûM;iiN>NiiiiM?4;44M2oݦiiLۻӻӪNҿ*wӻnmw ۿMnnmnmwwpm6n"0dܛrnHrNMɹ7&䜛rnMɹ!ɹ7&ܛrnMɹ7&䜛rnM97&ܜܓrnMɹ7$ܛrnHrNMɹ7&$ܛrnIɹ7&ܛrnMɹ7&䜛rnMrNMɹ7'ܛrnMɹ'&ܛrnHrNMɹ7&䜛rnMɹ!97&ܛrnMɹ7&䜛rnMɹ'&ܛrNMɹ7&ܓrnMrpLrNMnMIɹ7&ܓ6mn׻Owkwvwvwmۯwmwmûonwmv}ݶwmwmvvޓ9C(xE(|;PPNNM?8P"<"PQC(wpC"iPCpp;M8wh29h>-h>ÆG4G4wi#BDr#G!Dr"PPS B DġħDr#G"8G"9ȎDqȎDr##G"9G"9ȎDqG B%%%%" B%% "PPPPPC B%%%'N88888"PPDqȎDr#ds#Dr#GG"8G"9ȎDr#Dr##G"9G"9ȎDr#dr#GG"9G"9ȎDr#Dr##dr#G"8G"9ȎDs#:ӻwpwpÇ ;ppÆ8pӸpw8wpwpN8i8ppM;k8pӸpN8iÆÆÇ ;pӻjp4ᦝ8j8qAvm>AvO7U[zVu֫w^wzWu֫wS4vOk4wiNNii۴ 88#YG 9̎dr#ᰎDq,G "8G#Dr#G r#AG94G28l#Ds#9G "8m̎r#G28jhDq̎G 9(F7Rp\{'7\rnMp\rop˂Ip\Y7Rp\rojN odavɹ7'Mɽ8. 8eك.8.-VpMԜ7p\7Xep\uRp\rnN nNp\rn. 7Rp\p[ݓ&Ts[[{tu~{mݻmmw{ow{mwmnۻݶmۻۻݶۼ>sCC"DD8„"5 CT-4408qЈ 0h8!hDFq""DCʲn'rCCCq;$9!ġ97$9!čM&$wrCNMɸrN'q;N8rN'rn&P䜛Nq;q;rCJq;N89'&w'JNNܛrn'Jq)ɹ7&NܛrCq)ɹ7&$9'&ܛN9'&ܛq)Mɹ!%8ɹ7$9!ħ&ܛܛrnHrn'rnMɹ7'rnMrCNMɹ7$9!ܛMݧi4ɏiûm4ݶ>4iOpvpݶwmmiwmvvvvvvݦwh5}*ݺn[nUJ۫nݻݪzUݶmnmwwݦwwmwmm}mmw qG0P#,*ɹ7&ܓrnܛrnMrnMɹ8-Iɹ7''&ܛrnIɹ7'7$ܛܛrnMɹ8-97RnM7&ܛrNMɹ8-ɹ!97'8&ܷ&ܛrnMɹ7'ܛrnN nMԛrnMɹ'&ܜpMɹ7&rnMɹ7$ܛ&ܛrp\rnMɹ7'&ܜ7&ܛGRΟM=wkw}ݷw}iv}ݶݻvk߻vv}ۿwmwvsEjC"5E(xMB(vPCB(p¦:"h>;[T"xE<*jC :wиŠ.MAËwqiиBtЌAq!Jq(q8CCN \8!@JL8"Pqġġ9!!ACCCN G B 8CADN G B%%%&N8"PSC"9CCC "PPq(q(q(q(rC$8%'q'JN9!N889!'%%Hq(q(r1ġġġġ'N9!N88rCC'JJPcCN9!ħ$8q24pӸp6ɏpᦝÇ 4Çi;M;vÇ i8pN4Ӹpᦝ8i8p8vwiÆw4ӸpN8p8ipᦚw48pӻ /ZuoZuk^pӻnwwwpzwwzwwnn;j1F Mɹ!97&ܛrn[rCrnMɹ!97&ܛ䜛rnHrNMɹ7&ܓrnMɹ!97&ܛrnMɹ'&ܛrnM97&ܐ䜛rnMɹ!9nMɹ!97&ܛrCrnMɹ'&ܛrnIɹ7&ܛrnMɹ7&䜛rnMɹ!97&ܛrnMɹ'&ܛrnIɹ7&ܛrnM97&# Wvwvwmkivvwvݧݯwmkw}wwmwmwwvv}ݷmm^휎({wU+N(w>TVw=nU(zݮ]øpMi;OqiӋOpwiNw4⃈X88#dr#G"8GG"9Ȏ28h#G"8G"9ȎG"9N8#G"8"9ȎDq̎29ȎDq̎29Ȏ29̎29ȎDqȎDr###G"8!Gr#dr##Dq%F8q(q(q8P"PPq㈜q(q8qġN88q8"%'N8(qN8'g-G'vRCݪwjN ˛ Taݬ4aݪw Iœ{U'vˋU'MT]NpMIڬ2TIœ{U' ݪmv{ݽޫww{nwۿwnmmomwnmmmۻm۽ommLiXDDDhD8ЈЈDeag&$ܛrCrn'rܐ$ܛrnHrNMɹ7&$9'&ܛrnMHrNMɹ7$9!97&&$ܛrN'rnMɹ!97&NܓNMɹ7$9!ħ-ɹ7&䜛rnMɹ!97&ܛN%97&ܛNMɹ7&ܓrnMɹ77&ܛq;rnMɹ'&ܛrn%97&ܛq;rnMɹ7Mɹ7&Np >Mv}ݶ;m>Aݧm>׻{׻}ݶݶwmwmwmvwmvv!ʓw׻Mu[wUnTm[{߻i iimönMm|6Nmm~w5cDDxr8Ga6x96G "8x!G 82Ldp#4#G"8i̎ B#,۸wm;NiÇvpûmpӇwmh8p6pLûi(}:uuZ׻^~w׽v]4ݧ|6>Nnw4w|4ӴN1DDDDDDDDDDDDDDDDDDDDDDDDDDDDDDDDDDDDDDDDDDDDDDDDDDDDDDDDDDDDDDDDDDDDb#,ynIɹ7&ܐ&ܛrnIɹ7&ܓrnMɹ7$9'&ܛrCrnMɹ7$ܛrnM97&ܛrnMɹ!97&ܛrnMɹ!97&ܛ䜛rnM7&ܛrpMɹ7&ܓrnMɹ7$ܛrnHrNMɹ7&ܓrnMɹ7$9'&ܛrnMɹ7&䜛rnMɹ7$ܛܛ̟[{m{oMnۻmmoOoۻoiN(""P C ~CӻC(zP=:U CӻP>„PE C Cwh=;A];Zh8w;-4Z}ݦqh=##U ##!D!Dq"Dr#@G"8DG"8#!DqȎ@AȎDq@!Dr# ##!DG!dq(q(q(qG BCCC$9!CN8rC''N888#G"9Ȏ29ȎDr#Dr#GG"9ȎEȎDr##G"9G"9GG!a#jvwi5M;jwvS[M4awiڦ馝ڦw U4U4ӸjݪvwiݪMaLxsy}Eݭ~}޷wnuw۶m=nmvm;nonmmۇvcb""""""""""""""""""""""""""""""""""""""""""""""""""""""""""""""""""CܛrnHrnMɹ7&$ܛrCrnMɹ7$9!97&ܐ䜛rnM97&ܛrNMɹ7&ܓrnMɹ7$9'&ܛrCrnMɹ7$9'&ܛܛrnMɹ'&ܛrNMɹ7&ܓrnMɹ7$ܛrnM97&ܛnMɹ7&rnMɹ8&ܛrnN 7&ܛrnMɹnvݰӻMnAiwkwvvwvwwmwv;}vvvݺvݶwmݶv,qEtU7T;UNnTu;u[uNVݶp6wöӾ;awppAp;ӡhb,Dp#)G 8jȎDqH28iȎdp#4G8G pG r#G4G 9G 9Pdq,Dq,DqYA2{Rp\u&. 7URpMɽ&&Ԝܛړp˂{'pMIp\u\ܛӲ8.,uRp\rop˂xjN nNIpMړÆ\7[RpMɼ;RpMɽRp'7Nۻmt{tv׻mwwm{vwwwmmm{0Ј„hEM <(B4-4м(PhDD\Z#PF!zqqA9NMrNM'q87rCq)ɸ$8ħ@ÒܛN'N9'NrCq;rCJrn $9'ɹ!'rn'q;ܛrcrnM'rnM'rnMrnM'rn%8q;rnHrCC$ܛ$ܛJrnM%Iɹ7&q97rG+vqûm8wvpݦݶ;AûûûӇvppӇݶ;mNmvpݶ8wmmh;MGZUZUZUU%~jUoUUUtjii|6NiM?O;O|5M;᦭b"""""" G#`YH&nN 7&ܛnM䜛{'8&ܛrNMɹ7&ܛrnMnM97&'ܛrp[rNMɹ7&{&ܜrܛrnN 7'nIɹ7&&ܛ&ܛrp\rnMnN 7&ܜܛ8-7&ܜ䜛rnN rNMɹ814K02ﷻ׻o{vw~m{4E(PڨPPB(v(E(E\(PP;MpSMT&zw;T.!øE"-qN"wPA@! 8q8w@!'Na!D  BCC"9@!'qA@JN8 8q; B# A'N8'rCJN88rCJA%8rCCL97Hq(q8q'qħMHq8PS%8rnHrCC%'N9!ġ㉇N9!#f*#lNwvv=4ӽ4ӸiwM4i=4ӿM4tӻiڮwvipN4wpM;iټ򋵺{Nպk:{ttm}ww ۻiwm{N1@&،qNܓrnMɹ7$ܛrnM97&ܛrNMɹ7&ܓrnMɹ!97&ܛrNMɹ7&䜛rnMɹ7$ܛrnIɹ7&ܛn[rnM97&ܛrNMɹ7&rnMɹ8&ܛrnN 7&ܛnMɹ7&$ܛrnN 7&ܛrnMɹ7&䜛r3Iӵ׻[}ݶwvwmvkwvݶݶmwmwmwm=X";NUEN;n?zE;Ӈwi;AwiA;A;mm8wvpwqJAȎDpB9G"9G"8G#dr"PPdqȎDr#dr#8GG"8G!Dr#"@D#r#Dq̎Dpr8!#ȎDr#3GDr#dpr9G28G##9Ȏ29ȎGG"9kvdVɼ8pɽ[Xjkp\Z[Xi5Nɺڭ{ Xpˋ&jN.Æ\5'pqv˅ I7pCRqd!#-$ӻT:[nmnۻ{^;Nw~~ݷ}ݽݷwomYM>A!SL rnMɹ7$ܛrnHrCrn'rnIɹ7&ܛܛrCrnMɹ!97&ܛrnMIɹ7&ܛrnMIrnMɹ!97&ܛܛrnMIɹ7&ܐ䜛rnHrCܛrnMɹ'&ܛ$ܛrCrnHrN'rnMɹ;r!}pvwwmûnݶwmh>AvwmmOwwih8wvݶqE:T[W[u[U[WnUnwM4i;M;iᦚw}\D1(q(qG4G 29a286L28 Dp#᠎dpDpfa7&N rpMɹ7p\rojM7&N rpMɽrp\{p\Y7'7&ɹ8&Ԝܛrp\ 7p\ܛ'7&N rp\ܛxepMɽ. 7'pMɹ7'pMɺ&,~Nﷻ;{߻߶~~{w!0h=BM4Bh8zhjM  &P8GD28gB"!DDhDCqq."#B(NB*MÉ%8!DMq8qħ&N88w@JN8rN'q0%8&N8ɸq)!0q'q;%8w@!$7$8rNMɸ9!'rnMHq(q8䜛NܛJNaɹ7$9!8ܛJNMHq(rN%97&$8rN.2&WM8}4ûM;vp4iiiݦipM?M=nOӿӿM8|lqEwnӫJt}{ӻwpnwvmݷwvwpmۻmmӴ1""""""""""""""""""""""""""""""""""""""""""""""""""""""""arnMɹ7&䜛rnMɹ'&ܛrnIɹ7&ܐ䜛rnM97&ܛrCrnMɹ7$ܛrnM97&ܛrNMɹ7&ܛrnMɹ'&ܛrnIɹ7&ܛrnMnM97&ܛrNMɹ7&ܓrnMɹ8&ܛrnIɹ7&ܛ=R]}}}wwmûoo׻mmm{i=B(wMB(p=SP?EPPPBPPPި>Šݠww h;w;#Dr"PPPPPq!G"9ȎDr#`A(q(q(qDr"PPPP #!Ds#"PCCCDr"PPPq!Ds#dr##G"9G"9ȎDr#Dr#GG"9Ȏ29ȎDr#dr#G"8G"9Ȏ29G"9Ȏ29ȎDr#iJ<:w8i8pNÇ ;pӻwk 4Æ8pӻXpӻÆww S 4TM;i;N;TӴ87Zֿ~~[[uo[~ݷvwmwwwp66ۿj"(DDDDDDDDDDDDDDDDDDDDDDDDDDDDDDDDDDDDDDDDDDDDDDDDDDDDEVE7&$ܛrnHrNMɹ7&$9'&ܛrnMHrNMɹ7&$ܛrCrnMHrNMɹ7$9'&ܛrcrnMɹ7$9'&ܛrCrnMɹ7$9'&ܛrnMɹ7$ܛrnHrCrnMɹ7$ܛrnM97&jwiwiwiû4m;m4ݧh>pm>ݷݰfTu^U"ߪuz]z>vpiwûO?M;M4iv8P G 8G"8G"8G4A4G B8iȎDp#4G2G4G 29PDq̎###,ՄqA7epMIpMԜIpMɽ8.,{'7& . 7Rp\7-Ԝ8. IpMԜܛu\ܛ8. ok .-VXۻ[n{{{ݶwmwvm(8C4EP8h8&&DFDhDDFD\8Pq"#-*$g9'&S&w&JrCN9'&w&Nw$8Jrn&N89'q8P$L8q8$ܛq8䜛rCNܛrn'rnMHq;rnM%%97&ܐqMɹ!Iɹ7&$8ܛrnHq;rnM'NZCnӇݦwmM8wipMۇݦvwݧ}ݦkݦݶݦ.u{n]n{~Wnnmᶛwpmm)h" DDDDDDDDDDDJDDDDDDDDDDDDDDD㈈M@e9ɹ7'ܛrnMɹ'&ܜܓrp[rpMɽrnM97&ܛrNMp[rnMɹ8-97&'ܛN nMɹ8. nMɹ8. nMɹ7'7&ܜ7&ܛrnMɹ'&ܛrpMɹ7G«~߻n{߻߻~w~yDD7H"ӇݨE"ݦ8wvPMB(xEvh8wEp4"и MPŪvvw38"S%%%8C B%%%8CCCN'A(q(q)N"CCN%8qCCN 8q(q)@JN9!%'Pc'Pc'q'JN9!N8q8Jq8PP$Pqġġġġ%%Hq)ɎT":H;M8pӻ۸pᶚp6;mi8vw4Æ8pӻ 4M;vwNÆpø(uz׫nۻn{www F""""""""""""""""""""""""""""""""""""""""""""""""!HI2nHrNMɹ7$9!97&ܐ䜛rnMIɹ7&ܐ䜛rnMIɹ7&ܐ䜛rnMIɹ7&$ܷ&ܛrnMɹ7&䜛rnM97&ܛrNMɹ7&ܐ䜛rnM9197&ܐ䜛rnMi;OӻOMnӻm>owmv8~nB=nB(}S_wwiw׻M5vkZAߴM8}ۿM4ii;m<;B1,28ir#6G "8G 8 pm#FZJ&ܜZ'pMɼ2&Tܛ7'7&N rprojM˂nMԜ7&M7&ܛrpMɹ7'pMɺrp\ro . nMIpqKHZ{~[nӾm߻w~}߻zYv@4j&Ѝ (E4M !M4-Bi"#B"-8p"Pq ,q8PNq8q8wHrC B%8 9!%8$8ħ&wqNw'Jv\˙s.Dr#s.Dr#s.eȎDr#s.eȎDr#s.Dr#\˙r#\ˑG"9Ia&m8pM;vpôӇûm8pm8pöۇiÇvpݶ8wis5MnomvyENE PC(wz(xEPڅݢ~"Tw-zq"wqwqi=Jq*%8T DB )ĨXB  Jq*'@%8 Ds.ex\˙s.a NS\ P\ Jq*.Jq;P\wJq* NT P%98NT N%Ap%@ħJJr8~Nn}wpmmn۸{w MXb""""""""""""""""""""""""""""""""""""""""%5RE&$9'&ܛrnHrNMɹ7$9'&ܛrCrnMɹ7$9'&ܛrCrnMɹ7$9'&ܛܛrnMIɹ7&&ܛrnIɹ7&ܛrnMɹ7&䜛rnM7&Zu+MnpAݶmwmwmۿwmwmݶv= UnӺUTU;UOh8wvwöӇݶ;aiv8E88C"8i̎p#G 8jȎG r#r#G28G"8j̎G s#2":7MԜM8. 7['7&N nM7U' Iɼ8jN nN nN!. n. 8epM.,8⍴{{mۻwm߶wnm߾E"#DF&A<(B"0i"4""""4".""#T""""#B""(FZ`G"N$9'&wqLSN$9'&wHrN'q)'N9!977$9'7&$ܛrnHq8䜛q)HrNMɹ!$ܛrCrnHq8$ܛai#N;pӇwiӇmh8wvp;MٸI_IV֪V֮zWi4w OiM4"(DDDDDDDDDDDJDDDDDD #-14}P98. 7&ܛnMɹ7&ܓrnMɹ8&nN 7&&ܛ7&䜛ɹ8&ܜ7&ܛܓrnMnIɹ7'pMɹ7'pM߻~ﷻ[mvv߻8@=T(Eڪ(xPEE CB&P!ڧŦCNwXhF1(q; B B%'qD!D Jq@G Bw@!'qA@JN88  q%'NSPq8q'NqħHq(q;N9!N'$88q8baKL4NiӻM; 4Ӹzi~ii릝iiڦN}wu~wuVmwvmmw n;DB"4|-ɹ7&ܜrnMɹ!97&ܛrnMɹ7$ܛrnMIɹ7&ܓrܛrnIɹ7&ܛrnMɹ'&ܛrnIɹ7&ܜrnMɹ7'iwwmûawkݧkwvmmm~򋋄PNj~p(w|;M8wOG4dsO>ӻ F G"9ȎDpr9Ȏ29G"9G"9ȎGG"9G288CCC BqJJJDDġCCCCC""PPqD،ґnpk j7[k ;&7p\{N 8p5'7 Iq /^׻^:owwݶݷ{wmݾjt""4""""""0DDDDDDDDDDDDDDDDDDDDDDN֨Q;rnMIMɹ7$9'&ܛrnMM97&ܛ䜛rnM9nMɹ!HrNMɹ7$ܛrnM97&ܛrNMɹ7&$ܛ|0nwmû}ݶNûmav}ݶM4TTեZ[zݦpM4OmFDAa4r8!3G 286L29r9DeZh2nMMɽrnMpMɽ{&䜛ݓrpMɽMɽ&N nMp\ܛ2&ܜ6ZJ[wmmD\(M 8xP Ei&DFDhhDDDDDDDD\!D!0q8ħ@ÉCq;N IÉN&A(q)%8q8q'qL8rN[rCN8ɹ7$8rCܛrC䜛rC䜛rC6!XiM;M8zvwݦ>M?O4M;M>4t}Jwnmm6nn۴DPB#FrnMɹ'&ܛrnIɹ7&ܛrnMɹ7&䜛rnMɹ'&ܛrrnMɹ7$ܛrnIɹ7&ܛrnMɹ'&vqKQB9}k}}}ݶݶwmwmwmh=QqpCP>C";;(}ڄPvwqÆG4ݠj"1 888"PCCC"PCCC B%%%%% 8"PPPCCG#G"9G"9Ȏ29ȎDr##G"8Gdu-ADrÇ ;pw4Çwpûk ;44ӻwpᦜLFֽn[V^ݷﻻGM F""""""""""""""""""""""""""""F$9'&ܛrCrnMɹ7$9'&ܛ䜛rnHrNMɹ7&$ܛrnHrNMɹ7&$ܛrnIɹ7&ܛrw=ӻmwv>Ӈwmh>ivvL}FUUUZ>vw ;M>iӿqaG"8l#Ȏdpm#4G r#dpr9Ȏ28eȎ28ij)#'Mqd7&N {\ܷXeqvˋRp\jN nM">sM8pm8pӸpӇvh8wmlõDB Deܓrnasx-ɹ'&ܸ&䜛spqrNMɹ78rpMɹ78r3nMDDDDDDDDDDDDDDDDDDDDDDGIfh !G8A4(p"A Gir} !Vz7]Zn:U/Du{ǯImy݇ȸ>tGDtG_յp`a/pKuNDBk{B VTm7l5 [p+$988aDDDA9C`DG""?  endstream endobj 23 0 obj 121138 endobj 24 0 obj << /Type /Page /Parent 3 0 R /MediaBox [0.0000 0.0000 612.0000 792.0000] /Contents 25 0 R /Resources << /XObject << /Im5 27 0 R >> /ProcSet [ /ImageB ] >> >> endobj 25 0 obj << /Length 26 0 R >> stream q 614.4000 0.0000 0.0000 792.0000 -1.2000 0.0000 cm /Im5 Do Q endstream endobj 26 0 obj 63 endobj 27 0 obj << /Length 28 0 R /Type /XObject /Subtype /Image /Name /Im5 /Width 2560 /Height 3300 /BitsPerComponent 1 /ColorSpace /DeviceGray /Filter /CCITTFaxDecode /DecodeParms << /K -1 /Columns 2560 /Rows 3300>> >> stream qJL2@ l@k`3aA|)hQvw }__R2,2dB KT,6 )1d 2j"\0 @8i 0UARm0\ m6BcOM$V pO)RdPpI$Otc@!0hoČ$ % d|V VIV.kaMB`52.@@AP<a1>^3c aLphaQpDnEE~p1ZA &=it 4 ߤV~I'>an& &M*N}Ut[U^=W?-8^o׋zIOO͍)_}PA0"{zWtOھ Zu^Eau֕}iK}._!|_͙NfZ#C֚6_ Kp H aKrmzꉻV륿n7j'ar%K_ IoR9%E&lI`Ӧ/_Uz!:m]_MooȀ]nH:uuzt,wL /#D}IuMo,Ta>_~q~ ~/Kp]Kw_O믶^$꾿KKKt[__Hx zK/QGH_!zD|ޗKKPΟ^[k~=~'O:zH/I{K'ѡ^fBBv_'^}GJVA?:: ^յ{]$M[_.M+%mi|Y}K^W+Ҵ֓kioJW]Va/`qQM|V]tծYVMu]mZIXINIk҄/ccm(t$޵N[ S%͂mPi 'RijjIuP$IM6!mZa5A  @ d SP:E@ 4A |F`bla;%*ɱ@CDD00f!!  !0T ,x0LMDDDDDDGqUWJIBI% EIU:jcFTIM]zֶK^K[[/K/H믾MڶVm& TA #)_^WTJ*UJ(JPJS@%4@lD PD3!j5* J ,:ֵZֵ-kZϠ +ʈJ_,0S-Yޯ?`_%QJG{:AL`C'ҳ{ b! !6LD4}˜"=30Pt,! 0! \}! !Z  a`AdუNz8$\8eǪR8}PNdN.ppq$hN?|9P}FWq! }Oa)AAAS*? ϨAA6$ 7ՂL|S7 :ml4 P,6$ A>)S@TB@ p|ԨA&x-\J8?zzXax`l*x(Uq+ðIod~3A@X#T w*Q}  L?c_,W!pwpT/T/ '.A:x@PL$h,;E*x vM/w /  0P r8'ðU`a#?* ᾲ^Tø8}ΝABEE?~~TAZ=_uk4BfL|`8a0Ua%@:U (* kSD; ?ѡEFa,&TC #pP6[c (.$&-n``[f`<(0u _~~׾?(~>?_P ;b†/PhPV!J6!abppw(P.xDDdg2p8!0A peB#\"PDN)<""""""""8#EFڙP@?%Kb,pNX2BSQ?cARm?Mct;QcTf]#!G_IVȣU K?8xPAZ^{\(X0§JO8@#  Q8  pâ-pamaws\0R ʈG aAu;Qa5:ݪ ;GE _q%`773}$?OȽC-I{­ cP.F  )!VV]# `CaaW- èAdѠJx/8w72h…]u< s(AΆcp~-KjQGIqQ_Aa_w /pm; ᶼ3 kUN  > ('Ç!mJw^VEFPt`zAHz41+@#B: ?a}_a/{_^paAdt854=0d NWp­pau *ø0RrɜPL|0Lm`a4U]8EB~  ڠp 0<[(ѡ„ hU*;PPx# m Ia-BY#?0u~a 1QGט8"?8 :y8V~~~0=o~߯~S +ň=qХb0P[ ưAU8 0bBb B+xD3@A0Bhdb !d3ń" ¡ 3@B!@̌0A!t""""#"""#.WSz55pj!~ ?M^<,\D_BWZdZ /M6I\46vÃOppX`B~Ai(6E^}A渒D# ~@LF2ydC S }f&)d' Q|510S1Y=t?$82˜ΟB` {B 1D80BPD: !8aABaBд pБ(waaAu\8lC'p' *A#E'\08'D''N/H$TН#  x tTwGqEBE# XK ^wae>c WFP{3PO ?Ct?< N|_L,ho 0khlPX6$ƒXmH7 6ªn + p o4 P;‚i8=m pA0XK_^=[ւ?ӏ?`$T*ᅆ>^Xp`80Az~< D X5TaB@'bw@ 0f 1Ii`[N _u?T? 0P0";Xp„-a4!4#U>GvpApPA>dp~%<;$TKBM BF&IJGe{}/ba/ >Vvxh8aa pX8`a0PX; ~?}Jʌt`xP ᧄt wpaި;״tpiUWN/^z崖]888`3 Rr 4PXk+&pjUՍ0mڠl#~l1A݅ 8aTx(TQC(@<8PE46af({ox?dGY`1:`aox?y߭.߯b 6!b)bhRU 6*0± AXppⓇ(/Q d X&C&LAa1dfN"B$CCHhXPqp!XhA0Lv !h?>8@#  Q8  pâ0<' pѠjtx'P:<0 ZA3P^Y_OqFU:ڏ9AO=/:??t&> 6 =AKۆ];7H*w >a~ *'UIT#< x(Aw@z73qOkO??>?-pama ÆU X`?AP کPP  FB U 0_L?/0__C`CaaW P$0`v `V 80x@S1P , (@J,„ A&;AV{_0*|T0,8q8lVU#>{tpE\*@H 8{J P1|(_3Ap0I`aW 4^ -pq0ѐ6*(@(A<(E@a04hxzl#Ea G'asO' ~ -?/~׼a'჆ F)V!Æ 1kРanؠ83B!ϙa*C'D2{A1Hm!e\?DDDDDDDDGR4iY5 j! ~K6 0(v*";Ͳ 2]*? F,37p$P@@pp`T_,O""Y Ԍ"!Ta)FFH4a}L"~ 2r:c0d+ʈ)σ"SSó,!6MV:0x)QV{)Oi^Ca ! m CPCCCxBazC[BML<b t-D&N(aa:* EA8 N( AE8qFppN2#D  Ɛ)8['NdN4qS^OY_T?a0:77CN5Oc!A+~{{ o $6, $,: %P*`Lc&flx& >jTyP(ASBQ:Qz'W x-BB`F cfj믯?[V0UªÏ/a~ nn85n [h? xP @OJ?A 3 F0a:C0f?O(__/ 0Xp#pĉF B.0P> ! Xa{?jTA)Q|;)*<Bm DB x7^AX02;a Fa F=TT5* LYF"c' N?faX_[0uLn`:x7 ‡_p6?BhT`aTBBwTll~UT`a &׆Tʉ DD0PB!e@&TDD3&82aE@&D2AhhC4""P &׈""""""""*""""">ֵBƃ]z?G_ַ_5AtK/)Dž֗t#/~/b@4%_Ղ![",%| ]wsO| _)3#3"2樤xA}Am޿.N֞kK􂂧_q!pvpzCxN\6U"\ɟ ^)"E̗dZ)@Y٪0[ He3L

QW 8op|:MBaRRR*?A0aB#___K>׾YyBVm `(UlKwpn p}}AA<5¨( U(dT^?an 5w0f?0f`^u?\?8'!I>{Qpa{ q ᅸ;{X0|(+.!:/ `zpn(&مpeh,[dd  A^ft?}??S]P0UgpaAS\/pax}V`|0_[ (\x&0Dga: TP?R \A5ᣢ:ͬ*?t__;a.?'^Cd(_u~a/u8l l8C;*`:iPpPmc@ 4[L*4r"T¨# M8xFPF8EFʆLO*`$a$Q\]a0F0GӘ9Ck0tqN`/y8O'ak†7]ߡCp7 u_ CaP^((b Cb(((!AXcР,a  BX 1VD2ˀ<b'Sx2! 3@B"Pe@T&MFP ʀLTD<2 """"""""8#d lkރRa.uaX h' ^. K}/_K/_KA|_ | S;?/EZ܃ Ny TIJrK~ aaL2?Ψ_P1 B*A#F d$ N8??!Ba|`* V׊ xPM+n,85[0o*0@OAa`5 mx8 8_ ٙKUd3  WmJʌ*-FK~858mBN~Q6AzX|G[:׿_b)bB1_ H ʀC<kg`Qjdb ou/I&_֗ǫi}K_/\_?<KAKc`_ķv @/*v}s h#^ z"!>pPSl0R_O [j-Av* L4)FTe$K|fE\DaW~@̢%D2 󡐤aqHVL^Qo,1Ay b!  b!y X3PL`,ӰSgB/a  b!u!.P( !XB*a2@8B-  \:А0B)B! Cn !PBpa !x':. dppN<4 '  Gp$hIdN2qD.N铀#D2qN$ ' Y_ SCJ}j6Ө+ޡ%> 58s AQxXln|As A~oTOt$b~f^N ~|SSn) <|>`,UtT#P}(@Ԩ:A֏Q GD@?ʈ?¤TN'v`&-/׏Z]ץ>K1 ULG*kp5`B .jPpa}/( * ;)QzXArkAm F;pA 00{:k uA|3X30~/AP(bDPĉ<`r Ї p ";!A݄##Ag> @$h&eA?,쨃tB2Hx( ϷX{GG__*l/# &g'ႅ `PU]A`PpazsKИ"3oRB,pP]AABIΔEF9S"1kW_|_a.0{ǯ  A k;lXi iþ k'@q4v@G4 C 0Q"mAhpF# pvrna4• pP[_/kӘ:ipao0t_0wNm0ׇ`C_W߯߯R bA T(+PPAXḄ(=>)Pppa?T. e@!:lN .`ɪ"" , D2hMɪ bʈf#"""""""""#jf!`2$Zbd/ ai|>?xZ\Du__K|%_KEC %| Πp_ՐF4y%͆~FN#7QSXg3"xSΜ2C ]A8ЃN !,!!W…8P8}cFp4T\0iҍRڏzV^܄i*_C>xڋ47-oASPS*z $<`A0=40F4uA _oϯ#~ `N /`h0X18?nP k> }A_q  <l/ !d`Q ~Ώ҅a<]0Ã!'Wtv8~8szzuua}Ӯaa,|Z=AԨha#Aa-P;MJ d4T*1}(9C\]o?_ I bC)v|DlA  1! "#4d_u~<}_2-E}3\#l3T   o,* cD((U dH2.dɑE̋ ʹJC$>.eM ydA: 2NP!01՛gFa7k0##@2C 7&1@aqB0 WDtac: }'??04\? :"a}믯hˮ׿"߮a/]CL&A (K5 h1 U p0b 03A Z*`Š 0T@8a d$¡ T AU 1L0*2 „HA. Y PAi>!gx'(R"}wW!= "0zޟ}kt׽??x4J880UK $8p`v  wX`. $R\(@q*!> pB8=  __>0U A naUn<,CPI:P: aRwXE!0PથA8'Aa!3 T8'_gk   (0_ xp݌U \-* ~az w'ԨÐn8~,?u _Gu_}??^_7:Vႅ^nj0tl/pB0on;amB0Qઁz# TCaAH4TC6/:a%s L+=g}u g[_A`ئUb S ECĝB -! X`$Kݡ "TEC;. 8@(LN"v8L30û<*2qʂp;4ʂpf6aTB 0~?׿]EB8GqxCQDDDDDDDDlED< 0`9h]PEG` _߬~1 'C<DGdnwYIɣ^Q BF> pIwѐ i?[j;ǫ`k[sD ^r!w6U"\ɟ ^)"Fe^uF>EYHȫ"_\2>!0D=!*d933 ! !t!H.2C a`D2`at_:*G"pT"87*(&Ntx ' "qTsB'"$xH-zA_%׿u\׿>_\C]/KO 9vfh=`{׌0apY-m_B!0AKȡ11ca`LA.%O_ K]UfjAa Wk?D{z9>_:sO'0u]a!.PV"жlDqv"A;{\`b #P ÆT˅Ru388dh8LAP *PeefP 'f0p'=QHf,%5d#NKQ25a _ׅ ^<,T _!"PL2!+qIK}D$w<ǝ-.2}H{ !jHaA~]!˰`WSB.ɜAMB(!0!dNf`aaŠBoJNppd"'P:*FF:EE'P*!d4NF8aInthc' #2p4-/Za/~P0Eƹ?0N1VhuP{Qp{QP{Y_n1VhuS` * pQ )Xa ǤbqlaˆT P\,8` ؅T ޗ Ӡy yA04AL:Tx&@a͠M#p:*<~hZ]_~7|z0 ^anU0T^0XpQg? -z\|;?@ wa;Qv @}a` ^/_ pN?3f /8/0||<0fN t V" (!*xp\T"#'Ѓ#¬D4 X`IA=„ )pNd ~ x'˂p"pN'C1˂p d}88pLJ˂p K|Gc#8?),wXB?__׬ 85Xp8v  AEl0O\% aô7[ F{û„7ʈ:T@wxE Ç~ |mWs:  Xp„ҰP00|a494 &aL!Ȥ!Zɜjà PTh a BAxH; Fh$:*=0@xH)Qux6ֻ>au0 xaGammϪ.>`QP:1a'ǰo0t|GY4 x> P`8lAbݱ\aU0MB) S ÆDqRExd!03*˅  f4r )Q  .(A a30<] !|E" C㈈|EqkqGD"2KTQ_ŠуqUg`Q\)kÃXE9%FpPX?‚ /WFO!##ǝ"P"*"C*ȸSRC0@2Y-A!BhA(CCa3PB̜  /85g@ (D!2ppF.' d$T瀃')8 NGᓇxaTqpp׳E]kKa/}f0]}+=F 3n}|zs Q6) ,\  [Xp)  pi&(B1k ~eEnhPL)Ap'@ ͠M"0ATL 0P ӂ a~U_F]}kW0PUl(_Al0jÏ% م0_>R_úPPA@A>)QEEݯטU?'0cםOq`aA؃ *JpU6e*F0B5"H+R  @'Ԝp\'B)QypNB~N P4?/_aÃ-Æ ߥӆ n { oþpw@/ r)Q߯zUӑu_߯u?Xh04[Ms ([PUȤ!Zɜ{ &&[r Bx<(AJsx v T8 m_gy+] >s L/l.g1 k^a/ 5s_߃ y_4 x>(' Q[pئ4(+Pv 7cb XBXRC؊?03&h'P p.  &hpdVAB L |fgL&0)Q /xB/?"CqkqG#DDDDDDDDDDDGA d2gf3;+8,?s,DȭGpUVa(\ x_*xdC̃}}u[?PX1X{q|'@QT_/mF]|?Ψ/5f /X\. 'J8Fqqx'Q Xi \h%Lz z *yQ/LhqWpx :ʈ;*?5_fjaG`0f .lEF 68l4/y )Q`.'0D4A*?GpqqG"""#/ _[iYu V x0@=tN'^}uz?W__]R^KȗK@h_st$;a&|2$'[M~Z A0U A?A endstream endobj 28 0 obj 20161 endobj 29 0 obj << /Type /Page /Parent 3 0 R /MediaBox [0.0000 0.0000 612.0000 792.0000] /Contents 30 0 R /Resources << /XObject << /Im6 32 0 R >> /ProcSet [ /ImageB ] >> >> endobj 30 0 obj << /Length 31 0 R >> stream q 614.4000 0.0000 0.0000 792.0000 -1.2000 0.0000 cm /Im6 Do Q endstream endobj 31 0 obj 63 endobj 32 0 obj << /Length 33 0 R /Type /XObject /Subtype /Image /Name /Im6 /Width 2560 /Height 3300 /BitsPerComponent 1 /ColorSpace /DeviceGray /Filter /CCITTFaxDecode /DecodeParms << /K -1 /Columns 2560 /Rows 3300>> >> stream qJL2@ l@k`3aA|)hQvw }__R2,2dB KT,6 )1d 2j"\0 @8i 0UARm0\ m6BcOM$V pO)RdPpI$Otc@!0hoČ$ % d|V̋[$y­].m~jd\3  0y0?܉D=$KTG d L E 'uEE~p1ZA &=it 4 ߥ][IKm'!I$0}4k`:AIU}nӅzI;65@直a/E ߵ}W@__:ӭ_*+ Pyٔk5K#C֚6_ Kp A8wKDݢnִN.K$/tޤrJM20%0_|/_6Y PuZ_î~ R& "Oƾ$~~ZX?`K| ao:ۯ/oߥ~}îu'[/ou__%[c q?4A-V_K2C}-:4eDuH_!zD|ޗ./B:z_oת_NK?DT_H-׺K-I4hW}{ןi-u:ruAVA?:: ^յ{]$M[_.M+%mi|Y}K^W+ҴI].a\008+m.~Jm,tJ뵴JI$ 0IM[KW Z^[z8ioH%L 6XAAL4Kui&iCI4bI- B &0#aa0AbJV(!&h4ؠ |F`bla;%*ɱ@CDD00f!!  !0T ,x0LMDDDDDDGGUJ$$XA PH(M桝 8ZaxPi\ޛMJN^bi۪}dJ莈莈莝pBDDE:OXeA)r)r)r)r)r)r)r))r)KDE1DF؈@?9B[[Z@!ov"#A/Tҿg)5ƾ ktBV<+pDt#A^Ҥ"""#tbF渧|AiZ v(ќS>S>k>zU-6":(A - Hu!re%e3)򟐰PFvFNEPPPPPPPPPPPPPPPPPPPPPPPPPPPPPPPPPPPPPPPPPPPPPPPPPPPPPPPPPPPPPPB"#W莊|E:#)ONytGE>F"ON|DtS>F"ODtS>S:Z3DtS>Sfk龛qo~qqj_~~iw"""""""""""""""""""#u[Db#F"1Db""D"1Db#F"1Db"D'1DtkDtkNᦜ4)4w 4ᦝNp;_ZZֵk{DDDDDDDDDDDDDDDDD^DGu:!Db"D"1FD"1Db"D"1E:"F"1DbtF"1) 4N44¦Xiڦ馩ӽoZNktNq0w8 "!D"PJިD"!F"dJ1D]]S< rjSɔ觍t4uO&< )砡S5(#J{[z~akB"#rn*|"+9@QAB NP0RP Rr00 )9B "(@|CbSƸx\kqO)5>SƸ5>SƸx'a0a` ` a0` ` a 0a a 0` 0 aS{{޷Nt}{~z~[밨U+UPDu p^B#M<&骅8i##PPÑԡ2dtdu(tGA<aGRdt(yJԡ"(w(y#CC:r:E* ҫqņ6b6661b,mŋŌX0,1 c M]%_zuz߯mi9O)\kx)5Ƹq)\k|qO)5 0 00`0 0`a ` 0 a 0` 1Nhn1KZֵno[ZֵַJk괩P0ODtz#4#=A莚莚AGM|CP莥#P::#C9J9C: 9C:GAP莥#u(pGRPGLJr:e#ttumX,bŌb,Xرca1bō ŋōbbōK]Uֵk[߷V#\SƸO)5ƼqO)5>SƸO5Ƹx,Æ 0 0 0a0a0a 0 00a0a`` 0R\DDDDDDDDDDDDDDDDDvG޷{uޑǑ(wӲGR8::.E.܎P躔=w(t];(yYJLtGNGYJԡu(v,b1 bX,XŃ `b XŃcaX1Ō1c a,Xƻm%vSErr"PPPG)r9NTG(r(r(r"S9NS\)ʂ,9C9r"9NSH)r9(r(r#9NDr)PPEr)ȎSAr(r(r+9NS9r"NS9Cr#9ND)ȎS9 r"NSG(r(r(r+9NDr*9C9C9C\)ȮS9ֵJkZZҥT DAa1"!" 1ለ6" <1 1<1a Db" 1ለ0A" a1a0O 0 0 `0 0 00` 0` 0` 0`e ;lwo{k[׷ZzuI-xw#:vÇ#w#۲v~{(~GP΁=a 1` 0 1` b0a0`ذa 1` a`a1 00Ń 0a066,0` a`a 1``9ҩtGDtZֵkZk_ֵZֵZr)Јn00a 0a 00` ` 0 a 0a 00 a=00a 0a 0 a 0a 0` 0`` a 0a 0``!![{~o{߯{+GZZZֵֵukTۭ}kTp 0` 00 0` 0` 0` 0 ` 0 0`0`0` 0` 0` a 0` 0` ` `-[kZkZkZׯ!p` r:` 0`) r0t 0` 0` 0` 9C r:` 50 ` ` `a a0a0a 0`P 0(VUUQF?}?>Zݽ۽[ݽ۷z޶nݻַ۷R0a 0 0` a0 0 0a 00a 0` ` ` 00` a0 0` a 0a 0a 00B kֵ{k{߭ZZֵ~Ô8aP쎥 < 0a 9J9C0(p 0 0ÑԡGAPaч 9h#C(p# 0 0ttGRr`ta 0ÑԡÔ:#P쎥Ua66;ۻa6c۱ݻclv66cvmccn6cn61u_ZkZZ֗k[kzN` 0a 0 0`0a0` 0a0` 0a 0 ` ` 0 ` ` ` 0a `0 0` 0``ċ ޵KֵZ޾uzkZֵe#`9J9C1cc1cŌb1cƅlcc !V"Zk[uouo[nX` 0 `  0a a0a` 0 0a0 =` 0` 0 `0 0 0 ` a 0 0huHl#tG[{ڪַr7 C(vGRdtGLu(tGNGLܡ9#C(vGLt#C;CխnP{RV>yruE֎>GroIƒ c0bŃ` 0c0a 0a1`0` 0 a ` a ` 0 Ń,0aa 0,b,0`ņ0a,07ZZRJZֵֵk֗ZjkZ}kJ0a 0` ` ` 004S ` ` ` a` 0mYC` 0` ` ` 00 0 0 a a 0 IEHo{UOZW 6KAP[#>۷\n[ ݺ(}#1` 0aa` a 0a 0a 1` 00`0aa:`0a 0 a 0aa a 0`` a` 0Ń ;nK:#B"Cֿk[k[߯k[k[k[I%B"C;aa 0a 9C 0 6 0 9C r0a 0`a #aa(pa ` 0 0Ô8a  ` ` aa#C0t ?(C{;qooc]+!ֵӯk{k[kZJӭkt}ku{xl 0a ` a 0`C a0` 0` 02 0` ` 0`  ` 0 0a 0a 0`0a 0`0 0úַZҭk_ִZ-kӭkZkZ&PPPt0a(yԡ ` `C ` lr0a#P0a 6GAr 0C(p`t 9C  0`PrGLÔ< 0` 0`dt#aDDqqF41ǭn6;lt;t17Zlv>Tnݻַ۷nvZݻݻ{vuv\a 0a` 0` aa 0a 0 ` 0 a 0aa 0`v00a` 0` a 0a 0 0 0a` a 0aa 1um-zֵo~o{UZk{k{[6P0#P:;#(yJԡl 8a092dt#CC  6ԡtGRdu(tGOdtldu(y2ԡJ6P:GR 8ar 9JԡtGA::#P: 6Pa(yJԡ2(| Nmرcalbmض61ű1 c-m61cmض1cm1c1/ڭ{ֵS{:kt{N 0a0`0` 0` 0 a 0 0` ` 0 `` ` 0a 0a 0` 0` ` 0a` `[ֵZֵZִk[޾kZֵZeP:e#C(vGR(yJԡtGMԡ2ԡJGLtԡJGLu(pÑr:8rDtP쎃(vGRdu(y2ԡ]<P쎙C8rdu(y"ԡJGAP쎥#CPr:eJGLu(p#tԡJGRdu(vGA8mԡtab1cb,bŌb1lbŌX,c1b1cllXرlX,lX,b1coc161c,lX,c6,lcb,c6,lX1c6Ō[k{o{k~ZkZ޿oz` ` a 0` 0` 0` a 0` 0` 0` 0 0` 0000a0a`` a 0 0``{?_Z}{P莥e#CC#r:<PP::=<P쎜CCP:GGREԡtGVGR2du(vGNGRԡգ##C:e#PP!<8  8DDDÈQB F1H QTRQAF8($ 1QA8*1M4cI) (1TS QRTZQbmmM_mo׺  1-  @   @ @ @@ @  @  @  @@ @  @A +OK__m7mXIrc9C(r)(r&Hr(rcLr#rr&9NHr(rNP(r$I91ɹNMPCP(r&9NPܡ9NM919Cr(rpP(r&9C919C9'(rVHr(rnS97(r'Lr(rc9C9!C&Hr(rcXP䜧,rɹNLr(rNP)P莁8": EC#PG@ E(p(pGA8DtH8":PE GA8@(p(p"(pDt#E(p":#"CGH":A(pDtP(p"A:A"GA:#A(x"Dt":AEP(p㈸8.#Blqqh\\q\CB88#иж##4."#-8 B8㋈.684./QC!E(E !!J1QR!F1B!b $(c1HPBC*1QB1!E(1B*1B b*餿uIi  A @  @  A @ A @A @   @ A AA @  @@  A@h AA   @ A@A @ AA @ A @ A AA @   *_i%_m/i4kmOiH8":AEPC:Dt(tG@(u8":G@PEPEC:PGA8DtC":EC#(p"(t"G@B#":A"GAC":GX"GP"Dt":"Dt Dt#DtC:PPC ""G@PEPE(pDtE>(p(pDt#DtCGPDtC#pDtEB#GH":PC#CGPDtCG@(pDtCցE8":PB##E8":#":#DtC#E":#":GEC##":A"t(cCP bQ !!C HAD(1BB b(cCAC!D$(c bc!!B !BP b BPCb1c(b 1B $! bc1BBcQc HAc!B AF1b 1Qc PB11Qmnn'_m'vmmuݷmt @  @ A @  @  @ @A  A A A A @ @ "o   @A @ @  @  A @ @ AA @ @A @  @om/Kk_kKMi_ik_i/o":#GZGXEDta#E(p#E"GA8DtC"< DtCGI.P PEDt":#E(px@":C :P#DtCGH":M"KA8Dt#":":PEB# DuGA#(E"GA8Dt=BGAA8DtCGPp E(p` DtD| Dt#h CGIB# PE%CvP(( @QHPb(PA%P ($ PA$($!((B%P@(( B(B(PB(A!B Q D( QA!!B PQB$!%b@EEED$  1B@H B Uio_OmmIm'moo׻A@     A AA @AE @   @A@@    @ AA A@  A AA @A@AA @  @ A @  @AA @   AAGA @_i%K4m%M%4%IUiIگi/U_K=PE?""GDuMDtCGDtD~m"ڄP׺aB#VvG6t(m6A":DuGDtA":M(DtC(uS(#@B @(@  @@ Q AA@ @ A$(A !B  @ A $1#  @@@@ $ 'Q A @ @Q$(A @A HP  @AmmmmmvmoovAP @  @A @ADt": AA @ ":": AA @qA @   @  # AG@ @AA8 @AA @AA AA @ADt AAqAA @ADt @  @ DRkm~_<v/kK\m/K?J@ERK ~PVZK4ZDu*iWI/Ei%_֒I$A @   @HB @  $A @A  @ A @   @  @@@= B @A @A A A  @A  @ A AA@A @   @A@ mmmmkmmmwAE DtAACG@  (p  A@8A P  Dt @ (p@AH  AAC  A  AGA ACGAA (p (pA": AA (pAC H" $A8A:    H E   ":    A$*IGI(XRi$⢩RjGH#PA8@AE HGA8":A":G@"DtCC":E"GA8Dt#@CA8DtCGKCE P(xAE `"#(zG@QPP":G@A8DtCDu(pDt E(xEDt":PDtB GA:EP"GA:A@"GACGA:A@$GHPEDtDt#"C "0B QBHb((HP ! *(R(BBbHADc(R$1(Q!F(TbB  E P ED$ T=ADb) Q F!$ DQ$ (*1BBJ!! 1HT%AD$(PTR*(PRHBCD$)mimmm7mmWI/mmX@AA @A A AA @ A @A@   @AAAA @A@  @     @ AA A  @ AA  @  A@ A @A@@A+m/jK_mi%Ko_K$%_j#PE8Du$GA#G)#":)(NPCG_PE@"S#}aEPJH":PpI[P8DuSG)#"S#":pA?D|" "#">(p(pDt#]S#pDtCPE8":AEGA8D|C)#PP@b1 (A C@ 1B @ BB @c @!E @AF1  @ B @(  1  @ARB AbQB @((A c(AA@D(c 1J1$(A($ EQb Q b F1QBBovݶoݶݶmomoomP A A   @A  $@  A A  @A@ A  @A@ AA@  @A @AA @  @AA @  @A @ A @  AA@@  }KM/%_m/5APEDtCEPVP"(pA# CG@B#DtCGH":":A":P"_RG_"(xE8DtCzAC}(AE( T:###":^#PA8Dt#@ $(P @  @A(P$@ @A!A @B @(@A  ! $ A!B@   A   (P @I!$  HP @H  ($(A B@A$(BB AI 'oommmmOwOmo_XAAH    AA@AH": AAAAA A  A   A      \ @  @AA AA @    A   A  AADt AAAHAA.$$ZI/֗ǥIWI}U$/I/$'KK_$zI$I%ZI~$uD}moKE?ݵmomm  @ A @@ @ A @ @ @ @ A @ @  @ @ A@ @-E@@ @ @' @@ @ @ @@ @A @ @  A @ A-[mmkۿmmmO"  #@q "#@ACG@   @@ ACGA8 A A #@#A " AA8Dt @AP @#"AGH":(pA8@ ":  "G@P (p @ ":G@  "  8 AAP"C.EAE @DtA8Dt XM|~-1ixV?ƒ^1?׌~|SXjK1~"G@PGK(pG@":AGA":"8DtCpGA#E%E"PH"G@  CGA8DtC(pGP8":A҄PP[jBA( Q BQ!!B QPHB HPQbB QJ*(B  @$(P ! !$(  ID$($(u*!!AQb!!(b$ % @QC(BB @P$ HPQCQ E  A( tJ_Im6OmO~LDx  @AA @   AA AAA@  @   @AA @A    @ 8A AAA @  @  @   AA @   AA @   AA@N%i/$iKI/ITiI/i}ti%I/_J/i%i/_m5MGEGSG^?v8DuB#B(xE;P":G)E}#T#G҄G_H">({M#">#N`E}#GPG#E??a(p"mP"L">O#mEl"PE,ZP(B @ Q(   @(  1 HAAD@#b AF!B @ @B @D ! AA$ADBB @b (P AF B  @A @QB  @8@HP@$!! @B @@  @ @(A|@`r(rmmommmowommmm*A @AE @A @AE @A@. " @A@ " @A@   AA-A ADt @ AA @  @   @AA @A@   AAC @EA @ +Umx.?k׏_G:_U__%J? P (uTCTGIZJ*TKRH"T_"E(K𩤂(Ah"K4E+H":ACGH":i%SX%%bB @HB @     @A AA@ AB AA  @AHA  @ Q  HA A! @  $@$  HB @@$    @HP @  @ AD @D(;j K_mmmooom[H!V"   E AAG@ AACA AG@ AP  A":AAA AA   @  1 (pAAAPAH A ADt   AH   " AA#AAAA AP AAu]'I$\i*Ixi/I(\UFP$ƒqI%$K%zKcI$AcTH/I*H/I$4II$ǤH(I$T$$EL8bJmOu_ovۯm  @@ @ @ @ @H A @ A @  @@ @ @ A @  '@@ @  @  @  @@ @ @ @ A @ A @  @CmmnkۿoookZPE(p@"  ":G@ AGACG@"EP"DtDtCGA8":#APCP AGAGA8DtC#E#APP"DtA8DtCPA8DtCGA8":P":#":E"APE Dt"C##E#AEPE(pDt#EE(p@GACCGA8":8": (p"8@(pAGACGA8Dt(pDtEP EP":P@(p(p(t Dt!wc8(q1 DtC:PC#D(tGH"GA8DtC"(pDt"(pP"Dt"GA8Du"(pDt"#":#":PCPP:#PCGA8DuDtC:PC#"::#"G@":##(tG@PEB#C:E<"P (b !E *(AC(P1C(1AE  QcB F1B1B  AF1B1B PB1B b c(b 1PB(c/C  1c  1(c(A! 1c$1QcQ(c(PQ1B cPB1B(BQB b AD(om۷kukm_Om?km5iA@ @ @A @  @ @ @ @ @ @@  AA @  @ A DA  A @ @@ @@ @A  A A@@ A   @ AA @M_imk__}mmo_MmnB##B#?PDt>8":PER#(tC8":P":Ea8":B##(uEA"Ix@"GI P(x@CGA:A(pDtC8":H":8":P莂G@(E# ":UGA#E(tCDu 8A8":#":G\ EG@":H"#":PG\ E8Dt#(|(pDu""„PEGUH$) D Q$  HPHA! *1PB $!(!!B$1 1Q BHB$$1 J1 TBQ!%!? F1B@B A EF(bADB (AD B PA D((b(B F1 !HA@ BAJ=omoikiMoMm7i~A AAAAAA @  @A@AA @   AA@A A AA @A+aA A  @       @ AA @  @ AA @   A  @_$IKK__i/մi/I$I%K:m/I/ikV":G^NAEiB#D|"B#oIPoCvEPPEa"D}PH"">E]E;A8Du(NN(p"NB#頊":E:#A:# DD}GA?x   @ ! 1$ p ! 'A! @A(A F(P  AD  A XQ @8ADBB @ 1HAAHP G @HA @HAD$(AA @(( BB @(mmmmmmmoooommoommA @   @A @  ":A@    AA @  @  @AA @ "o G @ E @A @  @  @   @   AA@  A @  @7VMi//__i|~M/kI/$i(#PDt":"H":iG_ւ#h  Z":AE( ":K A҄PGH":@ /֒*(@ @ @A  H B @A @A( AHB @ !! AA@ $ =Q  @A$  ! @@B@ B$  $!! AQ$   AA @A  AUimomommmmoo(p(p@#A AAH @AAA A @  @  ":AAA @#@ " AAAAA8 Z    $AA AAA   (p@  $AAAA A  AA @ @AXRJJ5T$$XI$%I/I$%㤒ITI U$ I$I$J TIKvm?i5m_9mOm/OB@@ @  @@ A @ @ @ @ @  @ @ @  @@ X@A A@ @  @  @@@     A @ @ @mmmwomn_im/kmAAEC  ":GA8 AP Dt": ##(pDt (p"8 #":P8 ":":#@C: (p(p" ADtA8":CPCCGA8Dt(pDtAEuDtA8":CG@EEP"GA8": (p"#@CEP Dt "@(p@ APAE(pDtEPCGHAAE(pDtCAPP" @#":#@&:8?c1Cc)$ DtCE#P莁8":PCGPDt(p"E#D|" #C:E:P"6CGP(pDt#":"S:P"(xEB#C#PEtS:PGP""DtP"S:PB(xESP莁8":P=B)(pDtCGXEE8":PE8":A b@1 Q HbQ AD$1P!D (QB1@( b Hb($ !AE ( !@D Q (c(PbP$(PBHcB P!!!P! @ E BQBB1@! (c(A  HA((Awmoڿvmom_nA   @A   @  @ @A@ @  @   @  @A @X @  @A @A@ A A@  @AA @AA   @ @  H "EEP(tEi$:G@(xEAGA:#ICGA8DuA"A8Du] 8":H"E$P"H ":A8DtCAֺDt@PCGIPP (pCG_ "JC@":# @ (B BB @D$HA A J1  @ 1 @A$(BB HPB A$C A(  '$  B$ A$(BB AQ  HPHA BBB @HP@ E  !C   HA E  toomIm   @  @ AA A A   @   A AAA   @AA A @ $@   AA AA @  @   @  @ " @AA@  uI/\~U_U%M,~%Ii*_$%I%i%Ici/I/))it"h":j}67PD6(޷&mG_">X"mB#շG^ݴvBA( @ Q  @@ @8A  @O@ @@OA @ @A D @@ @_AA G @@A@ADA @A A@  @! @ @ @ A(mmodsmm?mo6m۬ @AP  #": @  AE(p@AA @ADt @AAAEAA   @    Ai AA @   AAC  ": @GAAADt@(p@A 8A #@(p@AP AA8Dt X?cm|~_4}Ǎ_/׌x/5IZ*KTI/IZI~Ki%__IK4I~$   AHB @A @A@ A  @A @  @ @   @@ @ ' @   A  A @ @ A  A  @A  A @@ @6mmmmoomO_o":IPAAP  DtA":    AAA AGA@ @GA8AAAPAA@ (p GA ": . AA 8A PE"8A  A$":  AEEAAGA8AGAp #E" A #": E"" GA ]F) )$J0J)$$II&I$J)%L($MI$|RI&IE$$P)E$AF1QRORH(XI(H,bb RI%Q$ )umoimIm[m/ovm?@ @ @ @ @ @ @ A@  A @ A @A @  @  @ @ A A @ @  A @  @ @ @  @  @@ @ @ @@ @Uom_mmL_kMkkG@"(tCG@(pDtPEP@C#(p(p"#E8":(p"H"G@"(p"A:#E:#PEP(pDt DtA8DtCGH":PC#EAEA8":P8@EP"@(pDt #":A(pDt":P8A;Dt(p#":#(p8DtP(t(p(pACGAGA:#ECG@ "C#E8DtA8Dt"C#E(p(p"Dt"":#":"CG@PE"GA#E (tCGA:PC#APE(pDt1CTc1hPb1HP) c1cPBE c)E 18(b1I Qb8BEF1$1B*1!N(PPQTP) *4(ci b1bPQbE bƢ  ) (bHBC1 kK[_Om/om%imA  @    @ AA@A@   @  AA@  @AA @AN0@  @A @   A@    A@ @A @   @A@   DRKI/%_KK%_$uUiImi%_J(tG@P"(xAE8":@"(p(p:#EDtCGPCGA:#(tCGA>(tGHE8DtCGA<CGA8Dt"GA8DtC(pDtCGH(pDt#":GAGH"G@PEB#":(pDt#":8DtC:EC#DtCC#"GH W8DtC#PCGA8DuG@(pDtEP(pC:E8DtCGA8Dt"DtH"(xE(p:#PCGA8DtC8":P莑C(xE"Dt(p"":P莑C#E8DtC(pDt(tGH"A8DtC(p":#E8DtC(x"GWQB1B1 F(P(B!F1B1   CB F(P11Qc(cQb b1(P1B BcPBb  1b!!Zc1(AEF(P1B (P(PcB AF1(c(P((P$1B1B CšB 1PC(BcZ cWn~mگmگ_mO?oMi6A @ A @ @@ @  @  A@A @A @ @ @ @@ AA@ @@ @@ @  @   A @@ @  @A@ A @%tomomo_z8DtCP ECGA:":PP G\(pDt#%(pDuCG@$CCEP":8":P":#@@ (DuGA#E(p C8":# `(pDt#E-$GA#E(tE EGX"G@(pCB#@$PPEB# Dt":P(DtC#E"GH":G\ EPE  EDt":PDtEEP(tGA8":A Dt݈HP Q(B@(!A!  AF1BA F!(A@BbcB QHB(PADBBAcB1 BQA Qc1$ E!HPB ((A 1bP$ J!E  Q F!! @bHbQ !EE (J1UMmm7mWMom @A A   @  @AA @  AA @  @   @AA AA"q   AA    @A@A@   AA @A @AA A@ III%$%i%__III_ӭA8DuSS)(XE8D|"PXD|"PEG8DtC"CGA?uS":tCGA?v#":#S)E(p)(}">N(tCG^SE8DuS#PTP"":AEG)҄P׵S": ""GA?  @$ OQ$(A b@ 1  O 1B @D $(Pc ABB @((PB (A'Q !! @8AA!B>($!!B A(  P @$ $(A  @($(P HPQ($(AAU~ovm{mmmA @AA @ @AA A @A@   @A @AA @A @A AAA @  @A@AA @AA  @  G   AA  @  @ A:%5___/__I%km.O쎒PE?#<C#*.S;PE?+PPE?#N<OSx"uiKuIکvGpDtJ_4 GH":_DtC":EDu H":A҄(tC HB A @ @B@A$!  @ AA! @I@ $!!  HAAwm}^AA AA@ AAEAA AAA AAAGA":AAEAAAG@AA8   #@ &e[FZ#Ei%zZK㤒H/UIZJ4$K$iE$I\DE[ivmik_@ @ A @ A @ @ @ @ @_ @A @A @@ @@ @@{o_mmm@ ":G@ AA8Dt A8@": A8": (p EC  ": "8@ @ ":@P AA8DtC ": Dt#@""8 @" l)ŵ1&M%I~IM$KM$_KX @A @@@A  A @ @@  AA @@  A A@ APELC<C"vC: <(yP$]PES"<(za;PEP:݄P莂(y#CGAA<C<"`v(xEP:݂(x"(x"ES: A<"xޣjB*NGD6vdt,9CE7GTN@B,>6ڦդXDt4GD#[Ψ">h /8쎐GDn-SB-nw0AMd6Cgd.̙4gHZ{Z~n'7[C-4;U/d0wVv6[{i/w^HjYAm׻ӥ/w/ pJ**m8^?[Lb XMVjMD "M5Vj_}+Ѣ :$": 3#8N2`aB:} &'ohihz:~Uvժ{m~$O']h %mD/ۣ[D[Q}۾UK֓C='KONutpk3ZUI]}']{b_]PFFtk]kVVxzWOJץu8U /t݅T"65;(P0G?B,ݷ#˸Pml.êdx vm:WK| ^.w vzz]jr(r(pwMDEWڻKnhU֬T%zI}oI]&8TuOmXvk /=&׼;VR!JA  Nh 21Âl21R"98;#Â(rc"""""""" ZjDMΊ|PÅ $*6: hمA^rÇV(r(܍KJ6ҽtJdt 'n=%ڷRl_[=t PM׭j޽KKum+ukDSaUxPDP_Z o*O(z '$%m&PaP{H P!tB";A7OL8cdCsdJ%D P MZx2:: Ot ^ani-CP6Wݮ]yh)D4T"D,B$"Sکn$D##TShP@EvA ^ h#[Pa}T(F0Mh7`&$kkAjA$0PjÜp&ҧl)䒄]z8[FATp5-ĝشtq?uUGw`!1 o륽tKM% a+t"NnUp;[շVnnhm%pȋgs-*b{w{wmK|7itv׭ݭ[]-twhҷUTyn$;N?_6INiۦm0[I'$tmzOZ[nw+"Ur++uIWo2 Rݴj۩C9C9C9 n0C9C":M 麤""#CmDGUK{JKޕv.^Z]ޛ zn]ց֓tjvoI7WI%\-v[ vl%jmm.m+$bY Pݠ@؄qP6 n HA $DQFj ۤ#>GD|>G#|>G#|>G:#:#:#:#:#tGDtGDtGKKЈMG @4C8Wzjk;N,2o|qOnV뿿JV*j,ZЖ%= jORQI{oI:DtGNqQGMDtDtGTyӜDtGYGTΙOOmkqb1cE#!N3#tjK=4 j""=nae˞a":Ry8a/Jk]4u AaJ.OGV Mшq)]tmIc T`r9f 0o+}z[nڷ}j4B"+t+.4-򾺎ii\q_zݻkfs5^fZaE/;VwMh2 5[GDu\l0#Q #0\@!zӈb"-mU؈6"8)☺! ]tGu !\kqO}w18bp&N1xTڭ499B]k}emDtGNc##.0莳0C*]b/[q.ۈ#֔ @]m?vKJ{PHxMSS>5 G3':sVjΜʡ!ҭ{{AmT]fm=戎CP_Bڍ$_[w]*Jb)#2)3l|q9љ o{$WҪ~$h>ti"""7 ý.""#8K#{EPsSfS>?fܣL|yOCWZ *ڭ$m߭˫8 ڈz_yrDDF.4 $}o]oZ ytGE>S:#̾db#2N~.(A^nڌSO>pat w[B -}h66#6r]FфaEt""(Bh0!FѴmDmFmA#.RBW gDDDDDDDDDDDH52~L'21Dbx":>PGfF"1E쎉oR`xmԸdDp,##Gdxx26T୊"1Ǧ_Coo~MG07o'%Ĝr~I'%#pO9/&伓NNdܗ""9.G"fe3\σ3|.G̎3\ϑq2(r(r"P9r(r(r(r1)9C9C9C\ȮPPPQܡȮPPPQÜr"PPPDȃ9C9(r1(r8ȃ9CsDr(r(r#ɎPE(r(r(r#9C9C9r|9Cr8AsE98 PPDOoz^-Ypc:LwHDE: ؈DDeۥDFP DD:B"!DDeDDC""lDDeB"!;PDE:HDCB""qPDE:h DD47PDCb"I !xD|#?#~`莈莸DtGDtԡ#>GJ#|OE莁`GDtGDur莛F"1E:R:# ":#:SC#:#E:DxEnG (p莈AҴG8F\# W6,[,[1c` c`0ql^6cLZBb>j#}1ixv|q0DtGF":`GLѴ`#E`GPDt"0#: Dt#ȎDD"1F.Du(pDt{#": ` !x,S lTqEUu{NzߤOW^ӮG\7|^5(y]Q]rDuoYEKC}#(DbPDJ}Eњ E:` 0 jlX0`0 1` : 0cLE ' D!LO N؂b'N \ff]o{}{w ?D~X/ҍP.Oֵ{kiSַק]%t֗zY)KUk{^^U[ 0` 0 00` ` a ` ; `5v|3q#gϖȑ3;>Yl2,#3ϕ`ٮR5Ʀgͣ3ϖfiblƃ h`ի[k{o^}mow:#CCP쎥2PP莛E#C:=<P쎙C;XP莜C:;;#P:;>C::<"#莈 Jӑӑ(yQJGNGLY2ԡܡtGHܡJGHfVP:e$;#P:<1bXV11aŋaX,c011 bŌ1c=1b6>Ō1Xcŋb01c cņ1b1Ŷ1c 1uU#kZֽ=k[*}_K:ֵ^WOL` `aa 0` 0` 0` 0t 0 `0a{ ` uEfp:`0 0` 0`0a 0` 5 `Vi-o{߯[k{[m:oTGA(}~GL0GRP }w G[:?a:v7ԡ򇇇PP:>PG#PPby* ;a X0 0` -a Xaf 1a` G am0 balX1a 1`lF ` aL-jkZzտ֭Zת׭TkZi5_]Pg@a0OA 00` ` `00 0` 7A0`ó. 0 0aa 0a 0 ` ` 16b00aݏ{{{]~upCZ{GZ8:zR:ƺV>;&#ַNjP$'T~Y` 6. ` b 0` 0` 0Ń `Ń 0a 0`` 1`0`4 n0à 0 0` a0 0bìP' D`Ȥ97Db!ECEkZJkZֽwZZkM5ֵ}-%"*bT 0`ma 0 0 00 0`݃ 00k,p` 0`0i0 ` ` 0)E80 0\ .(c` S£[1z,oֵ-oOKֱ~ֽ}o{?֗+ނ_޷wovܡݺv^r~۶JU ¢O 0a 0i a 0a 0a 0a 0` b݆0 a 00Xa 0a 1` ba 0` a!M` `ABMq'^7[o[Uk[Vk[k 鑷ҴP`z0Ô8r0 0ar:8ru(p  0 0ÑԡaaaYNP܎0a 0aa0t ` # 0(rCa94Z(uL$vqlx۶1ޢ1n61߶۫BctV^]$o־t߭k[V*-p`0`tG `0a 0 ` 00  0` 0a:0m,& 00 `0 0`0` 2#6ϊ 0`o'z֛#OֵҭkUw[KZֵJU ZV CPdt 0aJ92ԡP``Ñ(p51[F= 7ҤMH(=dvZoukv׷oz_]{qNi]iiXb`0-$ 00a` 00a `M a 0m 0a v4; a0 0a` 0 0 s0a:.V~ֵ_ko~C;#k}-RI'DDH nPÑieP:e#C<(pdu(pG I=.F6mmcX0llX6Ŷ-c[caWBō{mŌcaűPG1VI{IS P޵NwZmu{Zz/}[ֵ]VA{oIW[t՘(` 0`p` a 0` a 010 7@ a 50` bO.L a a a 0 0` 0a ;L0` a۫ޕwzޒZ޵޷Zַ[~" Q,H+TLydu(vGR(yJtGL9C9JGR(vGRdtE#C:8 JC쎲:M]/;c`0ņ1c,a `a 0a/10`;,X XƄNca0Ń 0bņ0a,001`Ђb! bmp8b붵}Sֵk[}kZֽwZִU[&b  0a0ä0 6 ` 0a 0 ` `0 a` `F3zA0a00l0 0` 0` 3l0B k[k[ߧzkW{߭kһo?n8k(}WnݽaGWov~GP7yrDtG^W  bA  0 0a 0 X0a 0` aY8Ff6ha 0a 00 a X66" `wZloֵk_ֿZֵ֚^kZRֽ`` bR: 0 ` ` a 0a 0 ` 000a0ba 5 0` 0`` a 0a0a0 0 m8Kr៪OuSSU(ZjG_gzݺֵS]` X0a a` 0` 0` 0` ` X0  0b :1` 0` 0`0a 0a' P0`+JkJzKZZݾZֵ]v!8 HW`C ` 0a 0 `C `8`#r:` 0|0 00` 0`ҘyGG@ 0` 0` 0a  ;"?F":aD0|zǬzZ] oZއh]Ԋ9Gu}ֵ{z۷{զo{ow{ݮŻj` i 0a0a` a 0a 0 70`g a 0aA>`.(`` 00aa 0a 0`f ˊ 0aեִֵֽ}j[k[ֵo^P菇#J0aa:GHJ0 ԡ 0tmnP0u(vGUAa 4P쎥adu(p`a#S(y#C:8a 0GRP#C:Pz(p(pDtCGXEB#E8D}#C(zA8Du(p(pGH"A8Du(p EE8":OE9J(y"ga2ǑdtCP쎥#u dt#C(}ftф]9#C(xnPb1B C$ A!A!B AD$(c P 1 1B!E$ A! BQC $(A!B 1Bb @D$8ر,bŃk,Xōbb lbű`Xرa.kkz޷NV߭U @A @A @  @ A AA @ @   @  @AA@A@+8 0a 0d< 2 00a 0a0 0 0 Asˑ0 `___kIn}kwW{u{A":#DtP"`":AJ"GH":X"(p" PE "E^E(":#kP=>躔=}2({(|ԡCܡۦS(|O(|A$(PB AJ1B @ $  ( b@(B @I  ( @$$ A  A (P AN0ˊGDtG@GDtG@%GDtG@$ IA"*(rdtGDtRr(r 莁9N`莈C莈CGDtG@%"PPr(P(r P!(r(p莈$ PGDtG@GDtGA0dtGDtx)LAuGDtG@GDtG@$A.mmmDDDDDDDDDDDDDDDDDDDDDDDDDDDDDDDDDDDDDDDDDDDDDDDDDDDDtDDDDDDDDDDDDDDD^@A AA @   $@  @A@AA A     @ A  dcg86K뤗%K%KJDDD_omh":iC)#o)dxO<'V|_xO<'|O <''xOxOxO Y+ +xO <''PA @  A! @HA A$  b @@ @  @>  G @A @    @B    @   @A @  A @ A"x  @  @'wmwOmm/noom?   @AC    @ P  (p@AE  AACAAC @ (p@ AGA8@(p@Dt @APCG@ (p @AE @ #@ "  #@AE @ACCG@A8A8@@ (p @/^?m%~-K;\}-xMc~51׏845zII$I/Im%IKTi/$I/ZKRTVRKt     @ A AA @@ @ A @A @A @A @ A 8l @A@   @   A AA@  @AA @  @  @AA A immowkmWm/mm= ## .$AA# (p" 8A$A$":$Dt# E@C# A CA@ AA# (p(p@ (p .C ": ": H #"$DtCA]I$A E 8AGH": #8@ EA8Dt@A$#GA#PAtA": #O]$ AtH')EE$!E$acA I$H I( RM ($ iRJ) E%RAqI5J1QL(QQIQIGQRQI$)(tm[6M_;m @  @   @ @ @ A @ @A @ @ @ @ @ A @ - A @  @  @  E @ AA@  @  @   A @ @ ]kmmmm~_(tC(pDt(pDtCGH":#PC:""(tC:P"":#EE8":PEP8":P":#P(p8": "(t#E DtAPH@C ":AEC DtDtCGI(pDt(p(} Dt(p@ ":#"C#@ "(p#E ":A8":P#":"G@APEP莂(p:#":#":@"DtDtC(p(p@ AE(p"Dt": PA8":":PPE"Dt":P"X!BRcbQP(j) *(cP 1TPB*1c!!PHPQ$1I TcI 1Q) bcI c1!C TcB1cQQc1cRB1I!B1TcHRBhP (F*)  o__m_kimPA@A@ AA @A @   @  @A AAA @A AA  N0AA@A AAA @A    @   @A@  A  @   @A]II/KIm_]*_i/_$K_iIK(pDt#":(tGH"GP"P":#E8DtCGX"C:E8DtCGA>(p:#E(p"(pCGA:#ECGA8DtCC:E8":P":8Dt@C#CGA:P:#PC(p"(pDt(tG@PEP"(pDt":P莑C#E#Dt"Dt"GP"#":E8":P":#DtC:EC#P":#P莂G@CGPC#E"GA8DtCGA8Dt(tGHP"(pDt#EB#EC:PB(p""C:PGA<"G@"DtBB b cHPcb1b  1 F1B1B c(b(P (PPC(Tc !F(PA!C 1cj11$(AF1(cHP 1Hc(P!!CBHPTcC1b $(Bc   Hb!F1B1 Qb bnIm/_n_ݷ_ݷOmi@ @ A @ @@  A@A @A @ A@  @  A A ZA @ @ A @ @ A @  @  @  @ @  @ @  @Am/omG6mmmE$C(p8":G@ GX"G@EEE#EGAGIa<C#EEE8":P%G@aG@":U< 8":J@DtE 8":P"GA:AEPC#EPҴP莂:P(pDtCE"P""GP(pGIB#@Dt#EGI "P#":C"GAGA8DtC(p< Dt#C@CC#":(PAEF!!A! b B(( !Bb!A1 bI P @IF! @Q !HP(b Qc(PB!HBJ1 (PHP *!$(BB(QI (Q !A! @QTB( BHPB QQbBbbPQBB@(%mn?mmkڿmmmҰ@A@   AA @AA @  @AA AA@   @  @AA( AA @A@   @  @AA @ AA@   @A A AA @Ai/$%KK$K_NK%i/I/IK#"P"aDtC)A8DuDtN8">CG] (p(p"EPD} ":H">#8DtCG]E GA8DtCޒ##":B)DtCAUCu(~ڄSG(tCG[#RSG"#"?D} SG)"({XA! @  @Q "|A  ( @P$(P  (P A ! @ADPB @ 1#dc(PZ (B @Q ( @'!!B#QQ  !Q@ A  @$ HA (AAA'vmmmw{omm@   @  @A@   @  @A  A@   @A   A @AA AA @AA AA @AA @A@@  @  AA @.A%m/i_K/km/%KK_m E?GH":VPKA(JAa(uIP"$A(tC"P#P:E:"(pG_$CGA:G_@#Z_8DtEE( AHBB @ AA $!!B AH$!!  @A!  @ A @A $(B @I HB  @A ( @ !B AHP  @A A!B @ ADHA A @$(B@A&:ommmoimmm  AP AACCAA   @  AADt      A     |AAPC  #@  (pAC   @A AAA $DtCAH (p AH A AA @AAU)$P/RI$cU*I/I%ZI/J_J)$)tcI|tJ(UQ% $\zT T($~iWm?m}m__ݴ}` A A @  @ @ @  @A @  @ @ @ A @@ @ A%a @A@ A @  @A@ @ @ @ @ @B @ @ @  @ @ ?kk_ommmmT"(p@PDtDtC#(p@EP8": "@(p ## Dt ADtCG@G@AP"G@ #":CAP"#@ ":#(pDtAPPEC # (pC8 APP":DtA:EEP":@"(p# APPE#@ E":ACGA8 @CGAP""  C111C116c;kcO1KcJkc6cz\c㶐xŴcvQ㴇8)G@ EP"Dt":PC#":EA(}PA:(pC##P":P(pDt":#PP$GADtC"::P(pDtA8DtCGA:E"G@PE8":PE(t(pDt#":E$CHCGA8Dt#DtP"GA8Dt# RQBD(E!B!(BF!!Q)AQB  BbE !D (BTTc !F!EB c!BE !D$1HRHP!!RB1B!B(Tb F1(P(QI (B(1B((_immmKb AA @ @  @$   @A A A@ AA   @ @ @ @AA   A A@ @ AAA@A A       @ AA Lwi%_5mi/i%M/IDt(tCGPA(p(pDtC(xE8":AEB#(pDtPPP(pDtEGA>"GKPP8":PE##P莁8":ACGTCpDt#CGA<""Dt"":XDu(pE8":PC":P,"(tE:#E"P@"G@B#":"DtEB#DtDt(xERGA莁:#":#PCGA8DtCGXE)(t"E8":P"(p BBA (b(A!  Q((b HcP( 1( @F!(PCPBBbQ 1 !D$(c B$ !c HADA1 @!P!B 1(b$(bAE  HAD $(A!AHPAE 1(cb!D$1QB1(b*_~kKmj{^ AA @A @   @ A A@ @A@ AA @   A A @ A A AA @AA A AA  @   @A @  @ @@ @A AW_kIMM5/oKi/OikiikMӮ(p"PE% EPB#":":(p8Dt#XDtCDuDu"(p"PCGA:#Du(p"PXAH"ׄPC#%@CGH":p":E"Cz(xEP҄"A>8A8Du"#": (xEEx":GA8DtPI   QBA E   (P EEHP A!B$ (B(($(AD QQB( BBBAhQA! 1 A Q $(P @ ED$!AD$(P AHA B @ !  DBHBB ( (momm/i?}vomOmm!   AA@   A @   AA @AA @  @   AA@ A   AA AA @   @   AA   @  @AAAA@T%I/_i%I/I/$II[ITi$K$K4I[mES#EE;P":mB#"SG@pnC[mB(#Ci#D}Cm#PE?mG_鴡?v#"?X @A  ( @@ @ HP @E@ @(> @! A AB @  @D G AX A  @ADHA!@  @( (A  AA   A A  @( ( Wmmm?mmmOmm7on@ ": @ " @ ":": AAG  #C " @ ": @AC @  @AA @8 @ @PAA8 @AE  AA @A         (pAAGA+?MxֿKIm~_KkK_KU$KRKM%I/ҤI/֒_K%I/֒_դ%i/_դI4i%I~  @AA @A @ A AA @AA @  @A@A  @A @  AA @A@A  A  @AA A  A  A  @@    @_mmmm3miomw۬B A A":#AEA E DtAA #" $A8A  #(p  (p A # "   $AE    A ADt EA" DtAAGA8A  AAH$DtAGA#AEA(pA AAEAXH/Q\b$,V)$,RQI$RIxRI/׊I$ $JI$\cQI%RAxbH.1IE$bI$H,RQQH%)%AqIqI-_ommiOmMumk__A @@ @  @  @  @  @@ @@ @@ @A  AN0@ @ @  A@ A @  @ @@ @ @ A @ @ @ @ AoۿkomoOG@E 8@ Dt P8@" ""A8":P EP":"8@":#":@C#ECCCGA:#E8DtEP #@"G@##(pDtGA8DtCCGA8":PCPE8":P":":\C#E DtDtDtCGHG@""(t(p@ (p"":P"(p"Dt"DtCCGH(pDt(p(p"@(pDtAPE Dt"GA#P"G@(p@#":#(pDt E"(p8@" )F*(V8$1Q)!Cc(qCb c88(c1B EGŤ(qc 81cQQC1!zbHqTq) b1HB1Xƒ1P1$(qcRCF1bP*1b(TTcŴ1C111I״mi_m/ikKK?m4@ @  @A A  @A @AAAA@ A   @A  A@A@ @ A  A @  @  A@ A@ AA   A AA A4$K$I%K}$jKگ$IK_#EDtCGPDt(tGA%#":#E8":P"(p"(p:#P"GA8DuPC:E8":#CGA8Dt$PGH":#EP莑C#E(p""GH(pDt#":#":"DtEPEP(tGH"A8DtCGA8":"DtEE:#E(tCGA8DtC#P"GH":#":"Dt E(p"(pC#P"GAGA8DtCG@":"Dt#":#":E DtEP":"C#CGA8Dt"CGA8DtC(p(tGHP"(xE(p"GH"GA8DtCGA8":P@'C$(bc(PAC11HPcB(ZQPb Qb!HBc (PQPBB c 1(c(PBC1(bc(P$!!cHb(c(P 1) 1c(P!B1b Q c(b !EE CQcb c*(ۯM?mmk___mm @   @  @@ @  @    @   @@ @@ @ N0@A @ @  A  @ A@ @A@ @  @A  @   mm/ommmkm/_kCGIPPC:PEC#PEP"\(xAH"A>CGA8DtEE"CGA8DtC(| E(pDtCB#":#E ` Du"GIP#E":":H"@(p" Du""P*(p GP8@$P(pDtCGIP@":#"GP(p"JCCG@":A(pDt PE< DtCGH":< Du DtCGP#PAE҂(pDt@괅AD @QB@b (BB AF!$($!D(PB **(PB (% @bP @CB AF!$)A! *!E (VBHR  1A!BP*1B %!!B  F!$(P( 1 F(BBc$(P(!(B% J(PHP ((1QNiioonim_i\  @  @   @  @@  AA@ AA @  @ AA @  @  A @  @ A @  @A@ AA AAA AA A@ @ A  O_iTIK$iK&:m/I/_$IK$DtCGX"O:APPGA8DuފNEC׺DtNDtCXD|"P#PD|"":AE"">CB#)#@":戀":S}(E8":AEatCG_XE8D} ">N8DuNPGH":HD}#PE>GIb#H  (AOBb$   @HbHPQHPA(@A @ !! @ 1 (AbQQB"| P (@AF!!B#AF!!B @( AbP A @b@HAD( LwXkmmmomnvof  @t   @  @A@@  @   @  @A @  A AA7PA@ @A @AA @  @  @   @  @     @   @ vi/iM/_KI/5ki/9<"A?H"VP-$P*A:B(p A:XEPEa8H":Uk#HCDtE(p#PA:A҄ ~PaGA:P҄PꥐC~@ABB @ @ABHA A A$HB $(B  @A$  ! A! @ BB'H  @   @A!$  BB @ @ HB  @A$!! @I  !B@A@A$(BL M3# H0ioomom?ommon)QLlAA8 AADt AA8 AAA A  (p@AA@ $A @ A@AA@AAA AE  A   @ A A @ CEA  AA@ AA @A AAA8AG@ $Cy MxKǪIxi~^=$_KIB,u_IqKI%(]RXc㤐^I}UIB$Ǥh=m_m?ݵݴmݴݷMvP q& @ A @ A @A @ A @ @ A  A @ @O @  @@ X @A @  @@ @ @ @ @ @ @ @ A  A @ @ @&:"O5t{mmmm7k_m?momn"P ":PDtDtC#@8 AAPECAGA:":ACGA8 @ E (pC":":#@(pA8@#":CGAA8A8DtC(p"  ":#@GA": ": DtC ##":"G@AAPEDt (p Dt"ACGA8 E  ":#@ (p(p@ @AE(p@AGA8TT A  @ @@@ A @@ @   A @   A @AA @  7um_Km7mֿmomm?ii/iijCGA8A": E: E DtEAG H"(pG@" G@":# HGI " C]H"@": A C P$C":#" Dt#PA(p$##EPq#"A8":AE"GA":@"GH": ECCGIP(pDt": $CGA (pI 8A#(p 8"H":": #E(pH ":"C(vU41I QA!aE%*($!F)($HccAF)$1I' )((1QL$!F1J)$Q(A! 1QBQJ)D$,(F)(ŠQQHPRHb(()AE%QRQbHqIF) ATR z| m$յVdvv+mm_mPDT41 A @ A   @ A  @  @@ @A @  A@ @ A @b A @ @   A  @ @ @ @ @@ @ @ @A @@ @ @1H*ӐaG^mnmkKmmkfEj}L$(aE DtAP"A8DuG@(pDt#"GA8Dt#": E8AGA8DtCGA:#"Dt":#P(pDt E GTGA#P DtCGA:(p8":PCGA8Dt#""DtA8DtCP(pC#P"(sP":#PC#E8":#P8@P "A8DuG@(p"DtC#PEP@C#EE "P8":":EQ8Dt#(p8@(pDt#":Dt":P"CGA8Dt8@ PGH B"-TMlGQRB$!! 1 1TP 1QRB c*1BQBbEHBHTPE F1PQI E Qc !E!Qb Bb F1B1b!BbV1B($*1R!Qc(P$*1TP(B +ǶUHNS mK_mmkmiIDtztDX @  @A@ AAAA   @ AA @A  AA@AA @  @@   @  @  @ @ @  @ AA @A @   @    "[Tkm/IK__޿i/Ki/KiIA-JPC#EPA:#PC#":GA=GH"GH":GA8DuG@":PC#(zGH(pDt":#"G@P":8":EC#EB#":"Dt(pDtC(p"PE(pDt#":#CGA8":P"P%B#(tGH"EP"Dt"GJC":(pDt":#CGH(pDtCGA8Du(tG@(pPC(pDtCGA8Du(pDtC:E8Du(p8DtC#E>P(tGH"XE`(tG@P BBPi$ 1B (P1BPCC1P!(c1(C(b c B1PC1PCc(A! A! PPB!(P!B@1b !CB AE (A!B Q1(P 11HcAF1c@(  @QB bR]JmvkuvU۶dsnuwkկݶcJ@  A @ AA @  @  @   @ AA AA  A @+@ A  @ @  @A @AA @  @ @ @@@A@  DmRZHWM4oM*Mm|}_(p"A:":CGH":P(|":EB#(pDt":PC(xPEDu\BP"GA:#BPEPGAGPDtC"GIPDt>GAC#W AE Dt":K<"(pz @PpEA@CG_C#DtCGA:GXE"8DtC@PE""1֘I`2: 0A%J1B$! B$! A!B %D HAD(QBHA P A( A E (AD QHBAD  ' QJ)!HA A!A!B ! A(P A P AEP @QHPB(1B$ %B @ (B  @AGAG ")¡'miO_i?oom7mm2,2)u A  @   AA A $ A@  @  @AA A   AA @A@   ": @ AA A # A @   A  @   @A @  @ @  @֚_i%_4i/I(M/i(M/i/_ciTڬtaC)E8Du"B#PG"CV"鷄PjC[mDtCMGJCD}DtC6(xEa(xE~GPOGA6#DtC&O'HAˆ( @$  HA B @  $ O HA @B D @B @( HA @A HP!   @ @B  @ QHAQ$ ˆ C@'HA $ A  @]oooݷmmmmo(vЂ (p AP @  @ A8 @ (p@   A (p   @   @A@ @b AA @AC] AGA @AA8 @   AA @ADt @  AAG@ !p@&:j<mG/CMKoK>C%KJJDtJEJ_KRKIGKi/IKRKP%RI~ I/֒_I~B@  @ B @     @ @   @A! @A @A    @  @A @  @ A    @ A H$A @  @A    @1A^moomvnmmC@=ְ A8A8AA":":AA"AA   ACAAAAAAPP DtAH":" A8  A "AJAAA8 AA@A "   AA ":"A AAAAA " EAH  LeA8+AcI$X$KI tIxI%U(I$$ ƒI=$I/$ GKKI$XH/I$)$Ax)$RJ5OҾKm?m_K_WA  A  @ @ A @  @A @  A @@ @ @ @ A @ @ @  A @ @ @ A @A @  @  @ @ @A.m_ݵmۿmokt APE8":P": ":##(p(p"(pDt"8AGA8A=8":PC#":":#@8":(p(p"G@(p@  ":"GAGA8A8DtC#@"":":E:#":#":@":P"(pDtEPP莁PGACGA8DtC#@ ":":P EAAPE8 ECGA8DtCGA8":(pGA8DtCGA8":8 PAEPC#EDtCGAGA8":8 PEP"G@DtDtCGA:P(p@mcF1+*81HP1$1!c1␡1cRcx(qcqJ81Pbi!ƒ(qCbc8(1cb1cСchP1[B88ƚ1c:CCG}4mKKimIK_յMm/6/M @A  @A @    A@ A  @ A   @  @A"p  @AA @ @ A A  @A @       A AA@ IKJI_i.Ki/:mI48":H"EP莂CP":P:#EDtCGA8DtP莑C#E(pGPDtCGH(pDtEPE"Dt"A8DtCGA8DtCGHE8Dt#":"Dt"A8DtCGPC(pDtEP""8@ ":#":E8": Wp":E8":":#":P"Dt"H":#":P"EA8DtCG@ "CC#":#E(pC##":# E DtCGA8DtCG@"Dt EPE"Dt":#":#EE(p":#":E"DtA8":#CG@(tGUQCC Q$1QPBB c(c *11A!CE 1 1c) b1b  (P b(P1B RJ1B R(c(PA!c1C1TbE!hc1HbCF)(B1b (P(BE (c((C1)!qBb vmmm5moimmI A@   @  @  @A @A @   @ @  @ @ @  @  @  @  A A  @  @@ @    @A  A @KmK_kom/mm_i_kmo}ЄGA8DtE"C#AE "8@E"(tC":":E"GA8Dt< Dt#PP(p(pDtCGA::#E"DtCGHA(p(p(tC(| CGA:#G@Dt#P$GAG@":G@Dt#PP(tGP(p(pGA:#":"A:A"GA#P"HP莂8Dt#Dt":EPKG@AAEDtCGA#A#P"@8@":#"GAGA ":@ DtաB *1QHP 1TPQB(QQB(B bQ%) P@HBC! (R(P*!! (b1BBHb(!$) !EE  EHBB!TPA( B(*!%!! !*(PR!A!RRk_i?ikmm''m%m?m_ia AA@ A   AA @A A   @  A@A    @ A` AAAAAA @  AA@ @A @A@ @   A@@A @ _I_jImmIiiz%I/IKXD|"(|":G8":ECEP"uGAG_HE(IB#CG^N(tC$C#t#G":EH""GA8Du#@"#pGA?SE}a ":EC#p"">E(pD|" DtCNpDtCGA?G@P"SP莁8D|"GA>]"GAPBAAF1B(A @~(  QBB AQQB AQ(!E @A Q 1B Q.A !E%c @ 1QB @(  B1  @A Ac 1 (AQPB Ac !D$(c1BBHc)_wۿmoinmovmmA @A @A@ @  @A @  @ @A   A A@ @   A A@ A AAA AA @  @A AA@AA AA @A@A@ Am%ikKIk_KIMGA?P":Et(%BaGI}%Du@":K "(tCG\$"KƂPCGHPJ"DuPCE":E(A E/ ":E(pGKA8DtP8Dt  !! AE @ $! @A @A @ B @ AHB  @A!B$(A A! @ B @A(  QB@A$(B A$( $HB @ !B@A( @A$@A"c_oommkmmmwA @     @     A   @     AA    AADAA@ A   AA @  $ $A  (p @ADt A AA@AWi%_i%I/$/I%_I%RKI%TI%]%$^$֒K_?ݶmmnڂ#m~oGmmn @  @ B @ @A   @ A @A @ @@@ @ @xA(   A @  @ @@O @  @@ @@ @  @lI_mۿm/__mA8 @" ##": @ (p(p@AA8Dt @ ":ACG@AP ":# @AE ":AP @P (p"AAEADtC(pACG@(p ADtDtCPAP @ (p(pAA8DtPADt @ "8  # CA_[Hq~c^1K?׌~-c/S\ck1Iqx|c)x5x5ccm1nMSKK4&_iVTi%M$餿IM$I/%&*IU @A@ A  A  @A @ A@A  @ A @  @   A  X  A@A  A @ A @A  A     AA @A   1߶vommmomm?v_oA8AC#P"A8DtDt":(p8DtEA$AA8GA  PAAGA8A (tCA#P$CGA8A":$EEE"DtADt# E@#EL| "A8Dt@$P(tA8AA#:#P"HP" DtI (p 8APCCApGA$Dt@": AGAGA.(pDt":H Dt": @GA8A#E@$E )(((EEF) QI%pRa1IE&QI(QRJ)⢢$BIE& aF)E!L (Q A8,bRH&TR QH E(1L QQI QQQAUmI?VmmO[oݤOmmZ@A@   AA @$  AA @A @    @ A    @@ @A @ A @   A @ A  @ @@ @ A@ A  @ @o_i_KOmkkomoCEG@ E GA8@ (p"(tGH"Dt EEPG@ ":PE(t(p@":":":"GA#":#"G@(p8DtCGH":#E8":P@@C#":#P"DtA8DtCGIG@ GA:P8AGA ":8A8DtCGA:#8AGA ":#E"DtAA8@(p8DtCGA:AA(pDt #P(p8Dt@ "I(p8 E(tCP(pDtC##P"C#EDtCGA?EHBTTb    bBE!cQBTPE ) b 1 1c(bPE 1 1CF;# TTb$(((TTbB(c1TP!AE(*(PQXƒQb$(Tq) (1HBb____/6k__mi A @     @ @ AA  AA @  A AA @  @AA,A @  @A @  @ @  @   AA @   A @  A A@"cIMK'KK_Ki%M/IKXDtCGA8":E8":#DtC8Dt(pDt#":P"G@(pB#(tGH"":E:#E8DtCGA8DuGA8":PC#DtC(tCGH"H":#C:PC#":#":(pDtEPւ#(pDt":#DtC>C8DtC#EDtCGX"GA:#PCDtC)"G@ "P":P莁8":P"(pP(pDt"#":#S:PP":P莑C:PCGA8DtCGH":P莂(pDtE#C:EC#8DuG@(pDt":F1P1Bbc1PBBc(A!(c !B(cB1 1cB(B 1(C(PQP1B @c HP 1O$ D(1BC F1B1Q!!B AF(c(Pb1ACb1 Q(cB1 1C(A!AE 1@C(cBQvovmmumm߭mMvk @  @ A A@ AA @  @A A A@ @ @ @ A A@ @ @A @A   @  A @@ @  @    @ AA @A @m_oMmo_m_om/m"C#""C#PxA8@":I| DuDu":CGIPE"C/C":#P(tC":Dt8@PA<C 8":PEB# E(pa@GU Dt":#C 8@":P"#ACCGH":KB":P"G@":J DuC#":K TQQHBIEF(BB@B A(! (( AD A(D  R!BA(  )EED$! b!!$BQJ1BAbAA(BJ*(b@T)  J!$A!P @H b %bAmOoom_imo@  @   @A @AAAA A@ A @     @  @@ @A@AA @  @   @A @AC @A@   @A@ AA D}_$%M%M/I/___M%i/Ic$IK4#GA?aE:GA?"P"P)A8Du#B(C#P"":JPmG)ESB)A8DuE;ASGPDG)":E:_P":"SGP"}SAbHP>  @ D HPAHBB @@  @'D  A@ D  @(HPA @D(A'BB  HP AF B @   @b AA @ @AE$(AB A@ @ oomvmkmnmox @A @ " @ ": @ A @AA@  E  ] AA @A @ A# A EAA @AA#AA @A AA AAAA AP  #@  @AAP ^?㏦S_/II%_KJ?PA?":_ZDuIZH":BGIT"A?IG_A I M ¤#GIH":A":KI/ B  @@@A AHBB @A @   D  (@A AA @Ap@A$@AA @$    @ B A A A @A! @@    @ ]mmmmmmn   $AP   AAAAA@  " AA@ A ":A AG@CAA8 A  AH": EAA A P AACGAAA@ AA AACAAH AH "    ֒IqI j$RJI$I$U$IRkU*J=E$t/JJbI~$RZK)$KTAqK$I I$$[m?iim_m @ A  A A @  @  @ @ @ A @ A @  A8  @  @@@ @ @ @ @  @ A @ @ @A @@ @Uomom]wۿiۿmDtEE(p@EA8DtDtC#EP#@CGAGPC#EAGACGA8":8 ##P E "(pDt" (p(t Dt APP""":": @" WPAPE8": A8DtDtCGA8 E8 APAE8": "A8":P莂  P"G@ A8AGA8Dt(pC#APPE8": DtDtDtCGAPCAEP (pC#E(pDu\b1CcNjHxG25 #$INN4{hHrhPXZ$9Cr?A t@(O!n! i CP! H[T@6/B= 7噡M6M+=7{ӽH6o0HD2R̒2"ZtM++JO]O m]IUSҮ7(vҶ":i=Dujݾ4[]B םߧշT)֢4z}.0&Uש "Lv0V]\G]i?~ Қӷwto]eq&98ҪJG898#!GWcsq2ץ,^m=t"""DE!HDDF}DG{ mg  y9NGDD" A+jJ6֛Io[ -O(OIS^--a/D4 iAw(ot!iH[oitB$M9"]kIQ!MwY"V3sUt}'m*?F'oWuOV*w[MoumO]to7$\ ޓtbJ[O-i4}{NJ}'z}ˢCM 6tVսo#k 0¶4/u}<6tzJޯKITDD*BR @߈I:`BvL=Bup{O:vuۦ6)K{ķ XNյ,xiچ7\*NPAi4*iOΉ6ҥz{~C8PeP(xgf q2GB!9Ce(e(r(p(sPPگB#BKDDDDDDDDDDDDDDDDFDDDDDDDu]!$=ӶoÔAJ(tnPP9S(r(r(kT}DF_WOHz^T[$":ӵIiln1N ־Kn޷ZKmw[{tPM]ouzV %ka+m>KMOL7BaU1d[K18 $A>WnյMzwm\0Du+@a0邪l q ! 0r2k""-DhDDRdM4`lz i DG-)5;()hf "1#Z0u"GP J0`x0H#i98 !8a RP@D4 azIHnOuw ~uڵ{IZ:[Woo3ZKumiVj ޒ:uHdZ{(HN>& tKNjz;/۽'QIӺg"keP{#V AD2Pݹ:##e;#wI'DF.GA!{JUӿ>movu*UwwPm&'miV5)o ޚ"z I 4iBaM K4PA4 LA`0*hnL08&,pRCr+5TD0@BCrDDCF""1@JC ^hl m.@Jzｭ~ݽ>wZ꛷~k^miW];[[tI! a:lVP8 I b """? [-zuJRJ`#&@)!Db*lD"%S0 aN(S(N{xT65F PA a  AGAD":8SC 9X@1B"!nC&P}'I}UiRwޒa\pGIZN"r(pC!ӻ׮8DQ;Ǥo!O\i>_15zIm,MwODZon7VnD%붐e;'MT[qu҆}__]}^WuJ+jڴMu}U7dh$+#Rh##A֧QAnպt„-AQk$+Ewi7Ml z 'TP!H#PHI.莈CJz_']+i:TP[턣 :MW [i0AJV"@@A :Ub \HC!0B# V"5N۴zZVkz(U?MOIXl-N;󴥶ZcuzÅ~Xjk{I'q^ҥ}*;Bh"HO#0@۪HΤM`΃SPP:n* *P#`ktBL}K@Pa Po6nP(PAVEU@7i6 !qqlUh4i4=[uttvp@ ؠ*[VWD2> -n*x-ޭ'm݆_wۤn]*_lUW鷭- WjZ jWN֥B] [H"[PAzUu z~t"*]t 5pJIXDZZZ {ւUzҸJ҄}/W "3:"9*V޵D#3QuZ$+ iQ!v!6]vH#C8I*턒 '֩*M$wOˢuIh 7a%i% {!WV;e-AE[#ЉNDHAª)."mZ}zIi{kW]~i$zi ?OJusukzGiJV;!@- ";knww : ^a9NP(rcrC$Y'$A!9VHr^IuBWO^ܘ Y ֞\Fzi_zL}P@OjC-8 ﺮ&'IUoAIiU[䜧)r9NSIr)ɎSANIʂ(rNS9NLr)r&9NS9CSn(pJ":9Ѣ<":<#Dt{#aD~PȎҫ ЈЈ"#B"0DqDEwQ,DcPPBF1CUI*j~Ki>ڪjOKl-3]& *2莁#:p#U 82:4AGM(u}j#mxxFYtDt#Xcb.#PxFxCL(ruwzt?Z."""+~ޭ}izk̈8ض8☾CC)/A/}$.WNM'Itތ": ":>0Dt}Du(p##(pGaNX-:>PGAGGAGPDtyR":ah(ty0D|#:eA}б,E !&"*}BE BBbE cb1zVziz~<.yF.V\#s`Թe.Yooڭ~wս'ڿA@KZܡa(sCp[0C ل8Y8@CGIH#P]uWUP":Hڂ#@ㅛHaPfG":6CGI)}5abX"Hb:+#chX EС cb?WM^zj靎 t][Tq${wűHq1q^8!^ڊnߵguG2Y`GPGN}4~Ѣ]QԡGW" ;Fz$1LD&"d"p! ҪA18b(X!B!( @0@wק~vv B373ygV8LhhQG7MoOw׺о6T B;tuz0ڬꖒm_Kk[UҨ@,>V|#gϔd~3lg>x>Nfn|h$RkժJK.p:#E:#GDtCPNT7JNT)<1Q0 gyDDDDDDDDDDDEpOFCKڎ5T;njyKvۢ&P1@&PcSƼ1@J+~qR:#:#C:#;#:.莂(ytGDt]R:#:.w+u[":#""""""""""""""""""ˢ:#Lta:KMחD~Ƅk1՗(xH AmquG<$iB+w\SZ@l*[_GzA: 7m9*ΜΜL;Rs6>St}zUGKR]k&<CGc8hWnO#(pDuOZwE!{eV"lZxM:PE\RIGNAwT BDDFqDt\mjAktb||BpN))_f N 'o~nRm߿k[EQDu莈4DtH 4Dt;zEfj4G@tIPv/BDDAGijnDFI,]6֕}}bI JQf|>3#PmnϚm|x}6-5߯t $ڽnkL/ACh(in8DumdTc[`M)CG])#pH GDx2-b BA7b#Ј(A""Xw'zJB$ds|| 2wd2BU!>S>Sah atjv4ARȣ:o$( .60u!1#0%|FE9 a#Cuۺ7":#1A[SHr(r&9CɎP(r(rCɎP(r(rc91PP$9C9CɎPPc-B"#(<\cB""(r$9!rC9C9!PP(rc9C9(r(rc91QPF9!ȣP}nI24B#"8Ј¡ƄGDYnFqacɎP+ ՝>G E#N"-Pӈ"¡Ƥǎ",*)DG#vGDM'.Y#8N>ᚑ#|>G Gf0 30n`.yq#50g"OO̎ E.Y[#``yLY;T\u'zZ_}R ֭~.]53znoվwojkߧM"={oۥ{c9CsPcPPHr(r(r(r&9C9C9C9C9C9rPPPHr(r(r(r&9C9C9C9C.PPF9C9C9CCФ2c9C9C9C91C9C9C9C91PPPXPPPF98㐣9C9C9c9C9C9C9!PPPFcC B""28PTФGqDDD\DFSDDDZDDDqqDDGWDDDhDDDlDDEDFDD\DDDqznվDD[lv<"1: ̏NI4{#p' S7ʉhGBlCOHGBs#=8莚NbpG9T8T]G '":qLNDthDt'*tNDt'2::e>S:#^Ndt& 7МNDt'BBqt/An7z[o{F1wQb]qcǤ8vBtҷu]ӭ>kk3XA%3I3K%ݶ}k]:i.3Yh(HQ-4>Ylyo37|`MO>I=z!fj|\ |$ ϖ|@8YlmTfmN0FeO@@$P>#h#]"tG.3a."J(r|\lGDuFSVPSȏ)E#//莊|E:#XaDtGY=#a$E?J‡8Ks莈#`":#,i {X4ō kwKMbBcmP\Pb67CxXob5PoJM´1Uc1^!Vk]+սk׫NOKt=Nڭ:Vnkk8ж8?9DF@Yب;X㊎8B""# \uQ! 9miV^߶NW{E ]#:#Cf#ʡ+  GGJ+ #4GR":jSr-DtG@?ҟDb"C# H莈PG#:8:>#莁CGGe:<GDtqJ#4G":>S#CGG"#ȏe>hGaGDu(pF"du(p##ҝDtG#":#P: ":<莑CGG HA:`#3Ղ3D~P[ b1,E q!")؎"C莙C}(p:<#PP.">yԡ#Ȏ]2#q3KGGtȎ">yJ-Dt#莙CȎ$D"P<#P:G":@GL4PD|2#PDuGFGG8GEԡB1CBPb(Cb(Xb,D6F"aS5a-Eb(b(b'F,E B B^11!""1  F-BP#hZf-CXЈ D A1!1LE CC^5n{O/Kz}R9|7Fg*G^kRduS({l.Dt]l":o..# C:.K03OeES Ժv"""35kNGDu"DDDDDu/M؃Cu#>tݔ?=yJJ>GnC=yQt=C}uҧ\er:t]J<1FI=a `XlEg,a C0` b X1 0c7hGa1`mGlq \(Ń(DtGAK^4}*Uj?Z[Z국$ uNl2T ` lك1p 0` ` ` 0` a 5N 0 ` 0`q<=;' 0`0+mSu[ַ=ֵn^k.JR:ջ}6ϥwr:EDݻ}ӛEeY.M$ [xY+b a 0ғ`` a 0Ń 0a 0 ``-0I` 0a ZťA& |ZL0` ~oֵkZ֕kvG}!DqU_(pa8DuE0a0a:S` 0 9 0 a 0a 0'>p` 0a r: 9C 0O>I:  800aZQFq{vc~c{dwdq4F8~ַkֵtj&_]kTUZ$=[Z0` a0a 0`0a 0` 0` X<à 0`0|0` 0i?I:L8Æ0`AvҾֵҭkT־=m>֫]'(p 9P#|N P la 0aP6P0a0dZ9CIGDu*8r:0a#a`Dx͘Dx]ӫP4G9C apAbc㡈z{=kZXb<v;qcTRP:|F,c:/b1cb,Xŋ11n"(F"! qcXŎ1c4B"B"" # P1c[gAZk}^>Cuz  03h0a 0a` a 0 03a 0aaaSg?IҳeP01{ۿ[k{ޫ{Vj5|GʶGY9JGRRDtGDt|ttGVGRdttu(yQJGRdu(t]9JԡduD|G":#E;#CP::#?;##CP:uCGE%G莪u:M#tG[(p莁<##qJ¡!0c c6#,G,1cb c Xc1b1cD|# ^ovòrP":`AGGP@ԡܡtuI=ņ, b!Eaa,  ,X00lB" l0a ; c [!,D j B",awZֵ4ZֵkzkMkzP0ay@0` 0` 0a 00n˞\000 `HYe0aa 5'W{{?Oߤ۴E֎>u#Z?[4:=NT" ` ` l L@c `0a`c0a 0`䚃0` 0 6G1p|00 m.AkZҭkZ.jWzZ֯IIP1a 9C 0cR8` ` a 0a0a0a0cC 0` 0of a 0a\{ƥ{0a0IRr$mz_ZZ_֗d4?{f{}ݽ۷ovwuS4U{oUDPT` 0fA8a 0a 0 0` 00` x!fi* 08rdtrdu(pa0` 0 0S莁(y26G@RP#C(pi3=fۆr0a lv6v#N-cclmlwCT//lwһ{Z:޵׵o{ZVַaPpa `g>{ a 0a 0 0`  ` 0`'ϙ@a 00`G6ϛLfG0a`hVok{ץZUojv/zޯ(vGA8r RC;#a(vG@u(p#tGR(pl 6GL*P')P:<89CP쎃(p &p8T6G(pa#~>1ƂEōhcCqa,qc1؎=b8/z:֭۷NޗݽӥmkN 0` 6G:`  a 0` 0 0` &0 0aa`x200aP Ckzk{ﵭ{(r& E4 ! b-cqocbŌbz^kzu֫W 0 `.y80` 0` 0 ` ` 0a.yu` 0a 0`\Z0m? 0 0/ֵ[ZP:;GRP`atduP#u(p#P:>Puԡ"\yC#ܡtr(yvŌXlXر)"lXرa llXر0Ńb,Xbb0-RbōzZō Zok[VS28d|XGxpB: 0 0G N 0 0 0aa 0` 0x18v 0` a""#k޷ﷺֽӔ==9CC4G@th#qE֎>PPq]:8:G$h#C 9r(rc9CPQ(r(P8crcr1D(r1ɎPLr(rc9CF9CPLr(rc9CP(r&9C9!ɎPMP(r$9CPc9sHsHsHsHsHsF9$9CF9CPQ91ȃȣrc9r$9C9!91qՆ,`7C`1,10`10` h|Xa 0c3 8#G6 hCB8#4! 8###І8šq82x0и"*u]}ukZ/I[_T[KN?NۿDb"""$DDDDD';# AA @  @ AA  AAA   A @   @A8@@AP AA@mViWi/uU_餇GiˠtC#E:#EۄGD|"">E}0_H">#Du EG]a:SD}OAM$CHsLr(rc9CF9CPLsHr(qGŔ8#GDq9ȎGDtG":#tGdtGDq莈GDq̎dtGGDq̎#:#ȎDtG莈GDtG":##:#DtGDr#9GDq#YȎDtGDr#r#:##2:#99̎p@Q (PB A ! @Q@! A @AD$  QB@ !  DHAˆAD$ A .8"и8X hCCBq q#hCBCqCІ8#І8#B4!XB !a6..#CІqq?mmm   @@ @@ 8E @A @PC @PC@  @    @A @ h @PA@ AAP   @A@   @A@  8 @A@     >Z/;i]ZhK>_$i/\ci$CGKH":KZAEւA:_iG_Ҥ/I~TDu꒵I/A$}tM/$C$GKM%CDuB @ $! @  @QB@    A @ $! AHB @  @  @ @   @$HAAA @  @     @A$! A  @ B@A -m_mmmMmm|B #  A @ H $  (pCADtA8 G    (p(p@ EA"A  @  @A! AA    ":   $A8Dt    AAAG@ AA A  EEA  18% II$\UE$qI X.8⢒PT% XZI%ƕ$I$IE$I5_ZKKI $ $RJ^4ݴwKm}_m?k_mom/_m__o @ @ @@ @@ @@ @ @ @ @ @ @ @ A @ A @"q A @ @ @@ @@ @  @|  @6@ @ A @ @ A @ۿmmmommokmOۿmA8DtC(pDt (p(p"PAGA8DtCG@"GA8":AEP" DtA8DtCGA8":PC ":#":8 A""A8":P EEPCP ""(pDt(p@":":#@8":P8":P""(pC#EA8DtCG@(p@":E(pDtAPE8$EEP":"""8 E(pGA8DtDtC"DtACCGA8":#APPE(pDt# #":P8":PF1bc$1C-$1Q81cHP11HqQc!CTq$8Cc8/Q11b1cHxbCFm!184(cV(P181bX11_եm%mim/[_եMm__դ%6@ @A  @  @    A @A@  @ @ @   A@ @ @A@A  AA@A A @ A @ A AA    @  AA @Zi/_IUKm%گwK__Jw_K GA8DtCCGH(p"(p:#(p"(pDt#P莂GA ":8":P莂Dt(p"8Dt AEPEE8A#(p"CGH"GH":EP$GH(pDt#":P" 8":P"(p"C: "@"Dt DtCGAGHH":#P莑C: (AGA8":#EPEGA#DtCG@"Dt":":PEP$GH(p"(p DtC": "(p(pDt#DtCGA8Dt(pDt":AEP$GH>*1BR*(R(c!BE1QP1HP1P *(P‹Tb  c ) C c) Bx(PE QcBD$!QcP1HBcBbJ1B bHP*1HTBBc 1L$1bOmKKm?mm_mkm@ @ @ @ @A @A @A @ @  @ A  @ @ @AN0@@ @A  @ @A @@ @A  @@ @  @ @  @ AKۯmm_kmm$#C#E8A:#"8":A(tGA":#$:# P(p8A:E@8AGA:":P莂8Dt#E" 8A8":AEC:P"Dt#P莂GHE+"CCGA:(p<CG@":EGPGA8DtCA"G@(p"@C""(tCP(tGA#P Dt EEP"P(pDtPE(p Dt@GA<"G@PEDt$P( (1B1HBQPIJ(P% ($!F*)HB)!BQ(BB!QHR@ QBE C(WP(PD(!EBQBAD(1PBQbBR)EHP  Tc(BBB HPHcAEBKmKOmo_oKi @ AA A@ @  A  AAAA @AA @  @   A .   A     AA @  @A @  @ @  AA AA @@ iK_$u_4IIkKm/IWik"QS#Ep"">"EIG)"iB#(pGIP莂)"(~CG"">N(N@"#T)#PDtN":"PDuSEvG"S#E":<" DtC(xEJGA:Q"G@P"P,"B)(tC(D|"(pG@P"(pDt#":GA"> E9ء((A$1QB AQBB Q B@D 1 Bc @((  Ab$(A  F!c!!QAF1B @A!C @ 1 C(HAA(AB 1P (!!BF1b Q(moݶm~}o_ @AA AA @AA   @A@ AA @A @   A A AAM@  A  @   @  @AA @     @   AA @   _%i/%i[ki/_%I/m~#C((u#EE":#":@ "A:PP":EP@":ACBGHP:":": E8DtC(pG^8DtCGK҅IG^E "DuCGA8DuP"A8@":#": I  @%! $($  HRA B @ B @IQ Q !!(J(BBAA(!=$) B A((A HP  @ PB @ A@AHAAB@J(P AB$  $*(P AE mIoO[mmom?mmE    AA AAA @  AA @  @AA@AA   AAAAAA A (p @     @  @AA @  AA AA  ": @ ITJ-%QI/K%K_$=-$ZI,zKI/$ǥI/ZKJvݴ}o"?Gi~mݶ_u؂A @ A @  @  A  A @ @ @ @ @ @# A @ @ @B @8A@" @ @ @ @ @ AB A @@ @@ @ @ @@N=mnmm/mۿmm   @   @p@ #":Dt  #@ADtC AAEC  "P@ (p@ ": @ADtC " @ CAAEDtAPCGA # @ @ (p"EADtCG@AAE @ (p @ [ŵ?mx85ixKmRCm/k1Mx)x׌c1Kc4I/RKi$*K4m/Z_ҤOZI~IM$_I/餗Ki%i% @@ @   @A@$     @  @ @AA @  @A@| A @ A@A @ A@ A @A @@  A @A @ A  nmmm/oֿmimm@$GA"  A CA# A(tDtA8A#" GA8A": EEA" ":APA"HA(p$#$PAA=AAAAGA8AG@ GAA# I (p@": E8H": @Dt#"$# Pq@$Aq@C E$#A()$ABIE$X$&QIE&AEE($ ID )% bHRAI!ARI$PQL'A1J!8QIED%QJ1IcTPL IF)H(%L/wkm/mmWoi?o'OB A  @ @A @ A @  @   A  @@ @ @ @ @  @ @ @  @  @@ A   @  @  @  @   @omkmmmmm/#E8":PE$(pDt"(t#C#P DtCGA8DtC(pDtPPEP莂GA8":P"(p$P(tGH":":AE(p8Dt":#":I8":PC#P":PCG@ #P8@(pDtE$G@Ô>(p"(tG@ E DtCGH(pDtDtCGA:(tGHPPPEA"G@PEP"C#EEPE"GH(pAGA8DtCGH#E"G@(p"A8DtC"G@PEDt":P"CGH":A(p:#PEPcE 1I c(PR TPCE$(c cB)!QB$*!F1TPC1!!I c$!!B)QC  TP1BF1HPB(P*1Bc(Pc!B1ƐCTc 1PQQb$*(TPI!B/mmmmo_}m/m%KߤA@ @  @  @ AH A @  @A  @ @ @  @A @  @ A. @A @A@ AA    @A@   A@ @  A@ @A @n_m/KKO_I/_m/Ki/":(p8DtC(}P莑CE#DtCGA8@(xEPE(p"G@(E`P"G@PE"C#EDtCGA>:#PCGA<""C#E<"":"G@B#"@(tG@(EB#E(}"E(pC#EGA8Dt"G@":<CGA:#PCP":#P莁8":P":Dt(pDt":#":P"Dt(p"(xE:#PC#"EPC#EB#":#(pDtEB#(p8":(p"1C(A!QBF(A!QbB(1c!Bc1(AD( cCPP!cHA(  HAQB b$(AF1 Qc HA (PBc(cB((P11( c!B(ƅ  (Bb c@ 1Hc(cB cPB m_ݶmoݶm29_W_ݴm @ @@ A A @  @  @  @  A A@@A @A @  @  @ @A @A A @ @A   A @ @ A @ A M_oo___mm@ DtCpDtCGA#E"A:GA#EDtC#(p:E(p8H": DuH":CA:":#":^":AE,w"P(pDtCGA8Dt@C":PG\(pDu(p"(xAE(tC(pGA#":#EXDtJCGP(pDt##P@CGPGP8Dt@C#E(QQQBHAQ (D$!D$A*!!  EEQQ $ A(  BB !$J!!B@ECЄ ( (BRB  @ (BBHP(QQB  *HbA !($ R Q ( J1QBBA-7momo]mmmOo_ik}A@AA@A@ AH @ AA @A A   AA @AA @A A @   @A@   @  A@ AA @  @   A@  @:$Ki/v$%m%I/I_m/i/IK|"">8Du">NDtCpE:#j" "E;A8Du۠E:AE頊v":G)( E8Duh":EG)#DuSGDuh":xE8D|"Pj@p":h"פN)8DtCAAE{L">NEP"B 1  A!B Ac A! @(HPbHP@  @bHP @@ @ i @  "|bHAQ  PB A  @ B@($(P" (A@!B Ab$ omkmkmommmmmmkmo   @  @  G H @]A@A@   @A @A@   @,B A  @A @  @ AA @  @   AA @  @   @AARMWI_Mx_k_KiK?jI~#(""?A?GH":Bi)KA?AH"#J(t IG_":#Dua8DtH":_#(KA:@DtPEDuA  @J! @I  @$  @ HA @    @$  @A$ AA! A8  @HB @ B @HP @  @ A! @ A! AHB  HB @A _oomo{mmmomAA@"  @  AA#A  A8Dt  A@   AAG@AA (p@AAA P@8AAAAAC    ":@  @#  A  AA AA" AA (}RtIq%5T\i*IB*Iƪ^:T\jIBǤ^4$FI/JIB(_TH AqI/%I|i$AtI$=*Kim?_@ @@ @ @ @@ @ A @ @A@  @@ @@ @@h @ A @  A A @ @  @ A A@ @  @ @ @  Akۿmmwmko!PP DtC#AAP"8":E (tGA8":CEEP"G@ (p "@ DtEP(p@ @P @"A8A8Dt":P8 ":": @"G@##P"G@ Ab#E ADtCGH Dt""(pC# (p"G@" #":@ ":#C#APP# AGACG@"G@ (p(p"8":P #":GHEEP DtCrƗc jx+b c8qxCP8Hq|cP1ŵ\c1-81c1-cmc1!1[J1c i1q|  AA @@ @  @ A A@ @ @ @  @A@ A @ADA @ A@AA @ @ @ A @ @ @     @ A @.m/i_m/ӯm%붫ioi%Jk]#PAPH8IPEAE@$C#":PP8A#(pC:P"(p(pDt@$PE:#P(tC":P莂8(pDt#(pC#E(pC": E(p" " E8A8HPGA8DtC#EC# "C:E"A:#  #":P莑C(p"C CGA8DtC(tG@PGA8": (tGA#E(p"(pC(p" DtC#DtCGA#P莂tDxB((!()F)E1Q\TTPQHP*1J((b(TBQTPEF) PQqRJ(\c(*!1cE *!! 1HTB 1b AF1Q c 1hXQR(Tb1QBHP)F1Q QTPPnB.ݥ_o%m%kiK_4io_BN @ @  @ A @@ @ A @ A @A A   @@ @AA A Z A @ A @ @ A @@ @AA A @  @ A A @  @ A L4kmo__im?K_mOS]Dt# E8":DtCGA""A8Dt(pGA:(p< DtCGA8DtCDtCGA8Dt(p8":PAE ":(pDtH":#(p:#P"A8Dt(pDt":EP8":P(p""C#P8":@"A:E"(p(pGI@ DtCP":E"CGA:#C:P(z(pDt##":8":E@"DtC EC#P": (p(p"A:A(tGA/BQc1 QRb!QQQBb(b$(TP 1HbHP ) bHcB!!B%EHccC !F*1b$!EED( (!E !F**(PB) HPB% QB$1QQ(BAE() !E%)6Im5Mo__k:WMX A AA   @ @  @ @   A @ AAAAA @  A@‚  @ AA   @ AA@A@ @  @ @ AA    @  Ai4m/I}=%i/M/I_iKz=P"Dt#":#":E8DtC$P莂)EPIE8":PEGUGP"GA8DuP$GHGA>P":EPCGA8DuB)GA8Du"DtEa8DuTGH"E8Dt8DtCE(pDtCGXEB#N:XDtC":E8":A":GT#8":P"(xE#D|C#DuP"">##DtCGC#pP(tCGA<"Dt(p"PEPpP(PB(P   (PABb !!C$1(c(PAbP B1B$1 (B1P bQc(ACQB$1(B!!B 1b(AD c( 1b @HAQBB(HP(PCQWJmoonuۯݿi @  @   AA A       A @A @ @   @A Z A@ @A @  @  @  @A @AA @ @A @  A *_KI/5_idsO___]V"PP"CGA:#PDu(p"":#":8Dt#BGA:P"(uZZGA8Du 8DtCC DtCCGA:8":AE\,":EE (AEP"(AB#PTE#":#Zj  $ A@A H HP @HPB QB $A F(P AA(Ab (PA % $(BB A B@$B I PB @ @$Q A   "q6!oi[koimmmmm?omom?m" AA AAAGA   A   A@ AA AAAA AA  'AA@      A@   AA      AA AA @ P{^i*KI/_iK$-_*K_SK5I4p DEkA_ݶݴo8"?6":j}h":mOzESiAOm"?68"?a__յbCo]  @@@"|A @ @ A Hb G AB @@ @ @  @ @B @ @  QB A & A D @ @@p( A@ @( @  @A    A" $mommmoomwo_B@ AAG@ AAE@ @  @ " @ ": @ADt "ADtDt A   @ Dt @ #@    @A @AEE @AGAG@AE" @AA8@(p@APAAG@   @_?c?OIx5㏦׏q_mx~-||v~OH k$I%$I%RKRKi%4IwKRKiJV#R_JTI/i!V      @A@   @AA @A @  @A  A  @ A   @A@ A A  @  @  @    @AA AA @ _ZmmmmommvmoׂdtP": AH 8H A AAGAPAAI(pC#P$DtAP$AGA A A#APGA@ ,r$E" $A8@@ 8": # $(pC": E@ CCAA#ICDt EA "@ $AAA"   B#UA9C9NH,TRII$AbH'%(QIF)0bQQA$J4^+l.*=$1J)$\V*)7I$ 1IE( 1IE$Q(IE(RAF*H.)$MI$DDDDDFwmݧ_oKomkmmA  @ A   @H @ @ @A@  @A@ @ A @  @@ @  @  @ @ @ @ @@ @ @ @ @ @@ @! OۿmO8":P"CGA8DtC8":E8":#P"G@GAGA8DtCGI"G@(p(pDtCGH"G@E(tCGA#ECCGH":#8":P (p"(pDtP DtCGA8DtCGH"G@"(tDtC:PC#EEP":#":H"GA#E"(p"Dt"G@ #":#8":P (tCGIPC#APEC:P (tCGA:PC#APE"8":""(p EC#APE"Dt"":#":"G@(z@(}1(bc1P c8(P) c! c$!EF*1!BF1RC1TPB1CB1C1HP|PQb1P1RB b)! RcHPBF1IHcHP1C1B R1 c(cPC1_m/oiKomk}  @A@   @A  @A    AA    AAAA@ @  @  @A @A@ AA @ @A A   @  @A @B"qH~ү_%i//IIi_miW__I/?ցEP":G@":(pDt":DtCGH(pDt#DtC:PCGH":8":#P(pDt8DtC(pDt(pDt":8DtCGH"G@CGPCGA:#"GA8DtC(pDtCGH<"(pC#P莑C#E(xEB#B#":"Dt"P":P"8":PGA8DtCGA8Dt"G@CGA8Du"Dt#E(p"PC#P莁8":P":# C:P"(pC:(p"E:#P莁8":#C#E"Dt(p"(xEA@#EoqBA$(AF1P1 b b D( c!F  B1 1B cHb 1P1$(AF1 c(Tb c 1HA!Bb1Q1A!B 1c!!c  1 E CBcC11CB!EE BcB1B(1B b 9Cr1PAovKwin~mo_mom.=HA @A @  @ A    @@ @A @  @ @  @' A @ @@ @ A @  @    AA @A @A @ A @ɺ5>S"momkkۯkm42EPA8Du#NPEG)A?0A8DuS#P"?CGA?PPpE:A׼׶#">#":CG_P״NAEPD}GA8DuG_JNAEMGH":48Du#zݻh HP b ADA!B @ 1  B$  B D  @Q ! @D BB @cB @  @ (AAF! @ B G 1 (AAHP  @QHP HBB @AB @(HA ZTCmokoomm_mmmkmm@  @  @A@E@ @   A @A @   @A @A J AA @AA @  @A@ AA @  @AA @  @]AE @  {+K/M:_i/*_Km4VPECGH":TK@":ADtCGKAP"A:E%P]PG_i B# PO(t#  A:AҤC${M"AA @A!B@A HA !B@A @A!! $ A$   @ !B@ C@AB AA! A! @$ A ! @$! @$    @AA $! @_%G_momoo_moߢ$ AA A C @ AE AA @    A8 @(p@ AP  "@A"AA$A A! A  A A ACAA@Dt   AA   A  $DtAAA A @.=%HIBǭ,,bT~$IB⒤KI(\i$/J$KI% RI/KJRX^I U%I~_UoH]MmOm{oݴi?m/ 9C\ A @ A @6@ @ @ @ A @ @ A@  @ @ @A @@N0@  @_ @ @  @A @ @  @A@ A@ A @ &PPPmnwnwwowmmIRH (p(p" ##"DtA8Dt(p@ E8 E (p" Dt ": ""(p@G@AE(pDtC#EA8A8DtC#@" #":(p@A.C#@"ACGA8":#PEP":P""(pDtG@EEP8 @ (pDt" ## Dt AP#@": ":P#EA8AGA8Dt(p AGAGA8DtC(};uCci!1VEm魈 @l$(AEA @p@ AHA!A @$  @ @  ! ! @ @xHA! @ A  @ @ @ ! A Hb @A@$   @8@ @  @"qmmmo_mmmm?m AADt @ # A" @A@   @AC @AG@CAC @  A@A8A|A@ AA AA@AAPAA8 @AA @APDt  AA A @ ": @Kq{iqCx~?7ڵKK^?IKiqkzZI}-%%Vi/4I~]:I/IK_+AIJ AA @  @ A A  @@ @A$! @A A  @A    OAA AA @A  AA @  @ A @HB A  @ @ A  @ mmm_mmo[momO EAA 8AH": EA GA AEAPCH":"A#  PAtAH ": A # AAEP  ":  AH #AA@CAAH$DtC APP 8A(p DtH # " CAJKRK 1IE$ŠQI$J4QXMcI$AF)(qI$,bRIx=$$KRI K$AB)$ GRIaF)%QI&RIkOm*Km?Ϳ_ovmބ @ A @  @ @ @  @@  @ A @ @ @  A  A   @  @ @  @ A A @ A @ A @@ A  @  @ @'mmkmmom#ECG@EPP(pDt##(pDt (pDt"GA8": ":":#E8 E(pDt"G@"(p"(pC#ECDtCGA:"G@""(p"@(pCDtCGA8Dt(pDt##"0#":":E8":PPE Dt(pDt##E8 A(p(p(p"": (p"DtC#E8":PEP(p Dt(p(p"(t(pDt # ":@C#EC#":":E8":EAEPG@"":#11hP(c*1$11Hcc(j*11B c1CTc c1I P(b!CPCTc$(P*81HcP1RcB1C1P b8(ccI bCTcI 1bii/Kk_KK_Om@    A  A A  A  @ AA   @ @  @ @ A AA @ AA@ @  @A   @A@ AAAA@ AA @mIiRI/IKM/I/_I_餿I%_"G@(p8":#":EC:EDtCGA8DtDtC#P莁8A8DtCGP"C:PGA8DtCGA8DtC:E"GH":#":P(tGA#EPE#":PC#":# ":E(pDt#":GA8":"G@PEEC:PGA:G@":PCGA8DtCGA8":"GA#":#":P:#E8DtCGA8Dt"Dt҄PE(pDt(pDt":GPCC:E8":#C#(tGH@"(xE(tGH(pDt#":GA8DtC:E8DtCGA<""C#EEPEPEC#E(p"1*1B c 1 1b R(bc(cC1BF!!C1BF(PQc(PTb!HP(P!!CQb b!c(P1P1cC 1TPC c 1QQ1P(PC!F1B b1 1PPC1B1c b1mm6mmm?i/_m/v@ @ A  @ @ @  @  @A  A @A @  @ @  @@A   @ A @ @  @  @A  @ A@  AA A @}mmmmkMmmm|(pDt":EEC"Dt8A8A8Dt#BP(xEPE"GP8":AEE"(tEP"GA8A:":P"8DtCGA#@P":G@":PEpDt;GH":GZ(p(pDt#:#"A:AP"XE(pB(u(pDuC#GAa"(xEPE(xEDtE(pDt":G@ P"C# "@":E1RB$! $(BB J*) TBB   b( bb! @(!C(B QQ F(P J1 F(P Q=HADHPJ($!D *1 ADTBHb @%) P ! 1 F! A! $1 AF1HbHAF b! *1CIoiIoi}vim7iүAA @  @AA@A    A  A   AA@  @   @ AA@A@ @ @A AAA @  @@A AAA @  AA @IWI/_%I%m/IIIk_$Ii%_i_$GA"E>(p"DtNP׽A8DtCE)EzE8D}GA8Du)#":AuSP҄G)#AE"EG)AEpG_IDtCat#N":EE8Dt#"P""S:KSG(tCG_PC @D  @A!C(P B$(P B 1B @(!!BB   @A G B  @A!(i! AD(  BB @(HAA! @QA!B AQB(P QAD$!!B P  1B mmom_vݷomvmomm|AA@A@   @A @A @A@ @A @  A   @A   @AA @  @A@   @  @   AA @A @   AA8_ki/i/k_KM_kmmBP #PE($CPB(tCPEH":_":KE(a8DtEzTC|,"(tC(҄P$C(IPAGA:V#}aB#{$ A$!E @A!B$    AHP @$HAAB @ A! @A!B@ ( @D $(B @A $HP  @ BA $ A$HP@ !B@A@  @$HA mmmomOmmomm}$AAAGAG@   A  A@   A  @   AA@AA    AKDtAA @@ A AA AAP A  AA AAAA"    AA@ T $8KIx/PI~_%ZK괞RIJA}*KK^\t$I$,}$TwmKmm?mmkKuku @@A  A @  @ @@ @ @ @@ @ @ @ @ @-  @  @  @  A @  @ A @@ @  @ @ Akoۿo}Ymm?oioAA8DtE #EDt@(p": G@AP @(pACCG@CAGAGA8DtCP # @ "(p@ AGA8DtGA "APPAPEDt AEP Dt (p(p E A  ACGA8 @CAAP  ":GA8@ ":#@(sP/Hqx88iq^:KccI$81Mq~Cct׌c),cƚ\cmx)$81Mqciq81T<iqx51i/_鴿IK_M%K4_KI/餗Km%SKI[A @@ @A@@A  A @A    A@ @  A  @AN0@  @A @ @ @@  A @ @A @ @ @A  @  @A@O_mm/_kmm?O_mmWkH " C:P CGA8A#"A:#P Dt@"APAP" DtCH":AE"DtA PEAG @GA8Dt@" :EP#@#P8DtAA(pH":":":"GA#(tCC E(p" DtC#H":#E(p:PAE(p8":@"A8DtA": E":AE@8HH"GAC@ EH":"Dt": "CGA>,bb($.1J1Q QQPN1QJ1IŒRQH$!F1J(RA! 1QH&cHBbQQRIZI$)TTPD&(HBbc 1HRqTbBRHRA0! .  ()F)Uov_vյtvv/ݧm @ @ @  A   @  A @ @  @ A @  A  @  @  A A @@ @A A  @ @   AA @ @ A A mkmimOmOm/mom=DtE(tGA#EE(t#@(p8DtCGH":PC##":P@":#":P莂"(tCGHPC##":A8":P@"(tCGA8@":P "Dt#"Dt":#":"G@":E""(pDt EP"HP莂G@ ":#(tGA#E"(pGA8Dt":E "P(tGH":#B#E"GA8DtCGA=8@ E(tCGPC""(p(Dt":E(t#DtP莂GAGIPGAG@ F1IHBQ F1QB!F!F1bRPC( HP 1B!B(1(Bb!B( (c(TRbE bF) 1B(*1B!F!EE Cb(P!!QQB$1 1QR(b *(b(QHB 1QQzm5m_m/i__m/m5_@ @ @A@AA   @ A@ @A@  @   @AAA |A@ @   A @ A  @   @ @A@ @ @A A @ A_i/i//I<C"P"a<"a5t=ptAU~A?(waU{P8DtCGZGH"G@":8Du@(pDtE##P莁8":P"P(p:#E(|"::#E?#P莑C#E(|":":"G@P"Dt#GH(pDtCGP"8":PC""""""""""""""""""""""""""""""""""""""""#  (PPPb1(C(A! 1B1BQc@!AE (ACC B (PB 1(C !Qc {i~۷__nnB @A   @ @  AA @ A A @ A @     @ A,W_kMM_m_kưGA:":"(t8Dt#AEDuPGIPC(t#DuP "P(t##P Dtb @  @AD%!@  J!!B PQH$HAD J($(B ($BBBH%Am?mOi?OU_C#r8 G@GDG9C9C9C9C9C9C9(r(r(r(r(r(r(r(r(r8PPPPPPPPP9C9C9C9C9C9C9C9C9C9C9C9C9C9C9CPPPPPPPS9C9C9C9C9C9C9C9C9C9C9C9C9C9C9C9(r(r(r(r(r(r(r(r(r(r(r(sPPPPPPPPPPPPPPPPPPPPP9C9C9C9C9C9(r(r(r(r8PPPPPPPPPPPPPPPPPPPPPPPPPPPPPPPPPDDDDDDDDDDDDDDDDDDDDDDDDDDDDDDDDDDDDDDDDDDDDDDDDDDDDDDDDDDDDDDDDDDDDDDDDDDDDDDDDDDDDDDDDDDDDDDDDDDDDDDDDDDDDDDDDDDDDDDDDDDDDDDDDDDDDDDDDDDDDDDDDDDDDDDDDDDDDDDDDDDDDDDDS%`A<r(r(r({DDAny YEZ.莈莈Ԉ#F莌":%a)8Έ2:(GH44 BдD7@2:B xߦ'UMؕSZNۓcd~I髤AAXA=Ɔ#:#莂I>u ]5O]tziWm7DD:5C L)udF4C%,7GVo[ǵY< `BAq7 `!|2yKD,ۙ3 4a4 "@ abf@}}+aVB $xAAv-b2!{P#e],w0#(pDtP$9Cm"c;T!ܡF9CrtP"c>|a-/8@a 1BB NPB%[yc$.!zyc9Cr(p\H9Qq9(pOxmCw=5tmI;A&OM:ADDFDDDP!S!]$.aU$UI7TI[NipN}{=6ޛokz-ݵޕ]zGI!ZUuVUh։NP->7 iVvv[Uoi=kv>8bUk} żd|"u%GNTKoצk"=pF0zJ#x~۽ᄸa&l-F908}l"#jri4 =JF90uZIRV)X0AU`Gf۷Gx`m6Ӵķl ֗]i*ZgT,ta7IoiR]%z40mm":|R~UoBT>ۧq "NCePTCDuTCDt]*dJ*5-P7]TDDDDDDFݡm][O7ZoJ/Zo֓JNK^GE"[~ kvۧl0oڵi=nkb"*#: l2: JꕆGAvC:##E" $#چ]a %UCSlEDB݈lDL88"&mL8{NTXb)ݰDmS Iצ4^Ž $zK"B ' ! & BN ! ,35x_,`. 1*?pD|I;X}"$cpdJ?Mkvޚ RL4۫Rm'׼92Dp;|ҾkPݩB#:#:#CIb =z}80EӥWBZnݡwnZ u®ޕ 㰭yv؍jrIY{&AAPDbzvhi00Du#: g@`0Xb?}S؂xIZ?PRmqHDx莃K #5ݷiwt[{m%a%JDuae, y 5i&GDt Ћ I(" a endstream endobj 33 0 obj 162175 endobj 34 0 obj << /Type /Page /Parent 3 0 R /MediaBox [0.0000 0.0000 612.0000 792.0000] /Contents 35 0 R /Resources << /XObject << /Im7 37 0 R >> /ProcSet [ /ImageB ] >> >> endobj 35 0 obj << /Length 36 0 R >> stream q 614.4000 0.0000 0.0000 792.0000 -1.2000 0.0000 cm /Im7 Do Q endstream endobj 36 0 obj 63 endobj 37 0 obj << /Length 38 0 R /Type /XObject /Subtype /Image /Name /Im7 /Width 2560 /Height 3300 /BitsPerComponent 1 /ColorSpace /DeviceGray /Filter /CCITTFaxDecode /DecodeParms << /K -1 /Columns 2560 /Rows 3300>> >> stream qJL2@ l@k`3aA|)hQvw }__R2,2dB KT,6 )1d 2j"\0 @8i 0UARm0\ m6BcOM$V pO)RdPpI$Otc@!0hoČ$ % d|T+$pjK_&0p   A (AxCpADx΢RK%*#2VæIEaHhnwF+_> aA7ۧ-.A&aUw;%O}m$ML> 5T za꾷 Ii]^/a'}=?64ƶH}0"{zWtOھ5cuo/i{_zpk_a~_˗7A_fSZhCү =/ `!D;/q&%[Dݬ4N.K$/tޤrJM25m&oN Uu~_|/u:`%"`i| B$kN믪X?`K| aF? [}[u|%-/x?v}/ïi?[/ou__%[c q ~h:[it$[%zrt[/^]ho]}I]4eҊ/MzM^J:zmm-WAK` % *)KҴK6JI[KKI+ 4 i4uzPlmt$޵N[ S%͂mPi 'RijjIuPᄛI4bI- B &0#aa0AbJV(!&h4dHPA > #a1 60`adP `XA!""TMa3Paa0B !" ,x0Ad$DDDDDDqGUU*ҪPIaQA ?Xe pA az$IK~ꕯ_Mi'PDL莈u"t~Nntӵki=4jK A6Ղ! !D8hF#*[i^§NxKZ%J[/J DT !B V tXxKpG A$MDtGDt uuɱDDR!N" DAvJ3N28PAP uU@wo]iUuûNUT$7MtH.i郎4%K9nUDsJLduQ bVJzUUWj[o^=:%*r #[zl.TP֒ w~zKM$ނˎ%5ޫZ ֓Iu5KUImKo j*^Pq8DuM'IDDqvt'VzA&dtKl$D":b!UA "#iGCAJAZv:-4UaeH{!JJ"sND @?#(F@h,:%H9Q#dtC`&PBtGgb AlB GT* 4t A$ASІ;AZ@ #\ jIn KiR^j i/WI6VmiWAPKZKZ%m* oTJiI.zե'ZIU+t^IޒWaK_J\tU.7[K.:45mVC[W,}XD,iR%BA*h6vU7mw ڥ[Mtj׸Gwս_UVjuKVTåҽiURIUjL%}ĉ;ݽoMӤ5O^V~3HrNv5"_פվZJOKI6TTVZ]'JIBI'J U BTڶ %}M%I #DuF8T`-A(A+i^J'Uҷh%UdcuVu ]ZzI+KOZ-mU}WTһVnRW ZݮJikPjoނ DCRǑCE "taFh'D4D&aDCF HtL"!F<.Q$l!QȖD%#6("-6"f"0"-E-,Rv @E%,d[.l$K"4!fݭ=`C3$C>LtHq,|T D~J2G":jPl#COlaԡ叄GMB#*I\в8AZtC:P5GARYC(pB a HC(pSGMAAMW8ADYCGBC0U(p@ vPBaJ 2X(rP , "lB aNC_NB"""""""""""""""!DDDDDDDDDDDDDDDDDDhDDDDDDDDDDDDE!otCֵVۺ[KPꩽzސi'ޒv7Z%Hkݷ2W[^ CZ~Vë-tӪe+Et]Et]Et]Et]Et]EtN莈莈莈莋:..#莋:.#莋.<6GUDuyD]Et]Et]Et]Et]EtG@EtGDtGDtGDtGDtGDtGDtGDtGDt]t]Et]Et]XZ+;w֝62oU_9E+W"ȎE+`avܷ4晼73L437ui~[ih"c]itޞޮzGV!à{}-!P!Mg4 Mg"#b"GE :21 KI8dRO3G$9rC9 az{ޗ}PDŽLr#,pDw0pDvފÇ003 8pr8Nl0Fq{na,6nl29; aaaZTJk~aۖ=>XaL;[gwM~C#mBX091qȃ0 &< 14 lO6&0Ãaû9&Ɏal7w 0cUPmP 0 0 4xh4di3i晜a봗]?^a`a!pD|"Qa "#>GDtGDtJߤIֺzPvchc00q'=0GA $m1trDDDDDDDX}` 9m2 0 5_Oo[۲ 8kv6)1qLa1c6)ammr1ɻwwm0kwcmڭ+co_}zm;mnIP톷T}i-=ko_p` Lh8'4 Oh&3 10aa 0`a 0 0` ̧V0` \0` >KKچ 0w׮OXv)}]$=I.*r:axEpۘvô,u(yY:du۰^n nPr:#Ȇ`#C0ԡu(wdu)))CMͥO.#Cu(y݋ @O Babh@,XnaT>lXb8">O p`,Z>GDtGH IŋHXb8bz*zcamI*r:!qB.Ca [3&[NgsC09g00xnwwN 0` a0L>|0 r(r(r)ʲ` g(rSr39C9Ch,sPPSPPr)9NS9Cr(ycF{qGlCm mmSëoQVlGD8"."Ј"."-6ޕwץzz-{a 8l6- 0 6aA/Z4 0bh&3n&4 Lh@ 0 }wnvk(ra a~ZIyml7va7bzCqUΖVJ;#c9 w0P9cXXrLJ#PCXE@a#">[pDva"7a0ur(vGL##PozLܡJCc&Q< b)*)b!E1 ,Pȣ;06c; A<0ꅋ1ض,1cu_wTL1c}>}mݻmV(xaoOOfp&q< L[Mw"Lg8GA⻻Cݶl7 0`I& <0q"#GAoQa0 6] 00a 0ax6wm$KO:.m/ޮهiu*(tD}/%@~p`΂h8!D&q4 Oh0a >"E݆al1wppdPVit al0` 3{E8l6ppCn{YP|_kmkk}k6GL2durǢa,pDXÇ,v,p#udt?e6 C 0cl6am;#P쎥)GDtGDtGDtGDtGDtGDtGDtGDtGDt#:#:#:#:#:#:#:#:#:#:#:#@E莈莈莈莈莈莈莈莈莈莈莈莈莈莈#:#:#:#:#:#:#:#:#:#:#:#:#:#:#:#8dtGDtGDtGDtGDtGDtGDtGDtGDtGDtGDtGDtGDtGDtGDtGDtGDtGDtGDtGDtGDtGDtGDtGDtGDtGDtGDtGDtGDtGDtGDtGDtGDtGDtGDtGDtGDtGDtGDtGDtGDtGDtGDtGDtGDtG@ITtGUV1cbE1LD(h1lXcwn﻾b1DDDDDDDDDDDDDDDDDDDDDDDDDDDDDDDDDDDDDDDDDDDDDDDDDDDDDDDDDDDDDDDDDDDDDDDDDDDDDDDDDDDDDDDDDDDDDDDDDDDDDDDDDDDDDDDDDDDDDDDDDDDDDDDDDDDDDDDDDDDDDEX,[Vݭڋ1}}>Onml;mmzݤִ}C `S0)s@'q< La0aɻ baDvn 6a`paa 0)j an}{wumEdˑKץKa 0bg&3Lx@&q< 0 7Uh0aSxCȧqfOOOQFddS菩|Gy#GD|&GeP)bcBccb? 6a# 0 7ڮP{,;U{߸l\cK理״w}vcmӽN~ޫ_u~P` 4)K`S `R `RA o`dmmۻ `#b"-"""6 0` 0Ȏifigo4晦n >׾~~ޛl6 ݆y6 ۷x"U׽>?r:ME1;Dǧ,xEaGH 6 0vm؆l6 E]:I꜂"!Yښ"k5Z^b 8O BM\ bMx" c+WovTt0o 9)\x*s'SP 6G@mpDv0`PbaEDz0: 5viT#viŅ &tr0ooKm`ÑxبШ){Nc]|"8"""""""#ڱRKKWtuT>waC۶ۻ/6ov=M.߾v׷ 0a&< Oh8'4 Oh8 0m{pɎaۻv`e&iO9OOO)ȧx̌xz 5` DDDDDDDAk]]>OKl6ap 0ņaa*zktӺUN~GH:>Cv>9ܱGM8}>!in8쎙CGM:J #iP:lPc1I*&"M!D"bǻ 6l>7vxa17D\DDDEDBM0BCz!!`1:ק߿}i# aGma^_u}r: 0lLhh[oPq3&g8x0aomƝŻn 0P 0} 7CЅTh\oQ}Mnv-Hwm]7^ VװuW{]kJvOۭnmmHvM6~#}"}wZ*Z{z`q< Oh'3Mx@0a?l6 0 a 6(p0q$"""0E,DDDDDl00a֫_]>ݷ}?ZޒPDVOkOǑ(y2dusEo:Evϖ:pD}rtGLy]؆60e Ŕ;#P쎥R"PD$D"!Db.RDb%K1DB"GLe#P:e#:@E. VGER:.:#"]@:.dtG@)tP쎥#C1c1"hq #M"8GbŌXǡ` 0aDy#xaGDx0 c;t馚Dt4 ijaaaM4[,v1c|DDDDDDDDR_W0wۤү+Jҭ4a 0|mۻmma v.Јq"%qqG { 0/ݷnmCt1IҌW_nm-aaa AaaaZvOoP` 0* +9PEr(r(9PS9r(r(9PT99PT9ANV 0Gumn 0bO0xxO(pMj#P쎥tC::#P쎥P<;##:#@D(PGD|I2>GGd{:&!G(r(r(q ,A1dxGDtG@$GJ!#a G莁q  &G莈莈莈莈莈莈莈莈莈莈菑>G莈" C:#:#:#:#:#:#:#:#:#:#:#:#:#:#:#:#tGDtGDtGDtGDtGDtGDtGDtGDtGDtGDtGA":#:#tGDtGDtGDtGD|:#:#:#:#:#:#:#:#:#:#:#:#:#:#:#:#:#:'|O >'xK <'W|''|O a~O <'xO<'XONO,'XO aXO>'XO a<%xK <'xO,'XN_|O<%X䰟|O <%xK <'XO>'up@@ @ A @   @A @ AA AA  A @   A@  @    A   @   @@( H  A%@@ @ A A@   @u[~_o[Cڮaw[ܡj޿Z{{}mtPPCGA8@":P"G@PCGA8A8Dt":"8":P(pDtCE8Dt ":P"8DtcDtC#":A@"CC@# ":P" #EE": "(pDt@:PBGA8":PC Dt#@":P"GA8":PC@"G@(pDtP(pDuCGA8":P(pC#EC#(pDtPPC#ECG@P$C#@8":C#E(p(p"c ""8":#E(p(p8":"GA#E8":P(p"GA8@P"8":#E!PF11P!c1b(BJ11c?b!!QC) TBqHcD($1bTAF!DàQCF!E! E c1 ((\PQB%1P.(b1qAP.(c PQ\b$Cb1bRŨ 1C*(c*1c W}{[ndq7o޿{Vm} @ @@A  A @ @   AA @ @G @ @w @ @ @ A @@ A @ @ @ A A @@@ @U @ @ @@@ @ @ k[zMo}kk{}}uko{}k}k_]jDuK[ZҵOjTma=*_KA>[KzڥH"/T#TkGT":KT.":XIZNJ--S?@A @@A @ A$$m  @B @A A A A$  @@H  A  1HA @  A A A @BAA $ @@@ A  @ @HAMo}oo}o{[{޶{8AH":EAE"8":AA DtDtAGACDtC#PP(p8@ E DtC E8A8A@":$@# EEGA8 E" " (p(| DtA"GA8": H "" (pDt GAcA" "C":P (pAG@ (p@" "C P"":(p DtCA8@"" DtC#E"GAGA8@":EGACG@":P "CG@ E@RI)$(TRQI Hb*)8Q *)$J!E$RS#P## EB0$$G@aQ $GHpAEB E]DtG@":#]P##Dt"ADHxA## E$B#AEB1TT\Tb*!!HRqQPQJ1HbPcbQ{[޺p˴=o.8,G8z|{o^a\q'Ww&??{ZOoz @ @  @ @  @$X@ @  @  A@H!F(0B"Ma "qĸ`D *(C"! B"*0B"\(HBL\A  D @ @     @@ u[[oZ[}ox$K  O'x 8&O  $ O $Ey'0O<' k[}okk}oPEKPEK$EKGT":ZRT hkGKP":֖RCAְDta=G^C-R*GTCa.":HAH A   A  B A  A F9# A @B$HA B  A B  @  AA A" QHA@Q A @ A(A@@ AD B $  A!@HA@ @ A A! A@B {!__{AAGA PA DtC A(pGA8A E"A8@": "G@I  #@ 8Dt@ .  #":P AC":PH " DtA8A#APE$@":   @ A  (pA(pDt":A$CDtA8": A(pDt#8A  E@GA8": A(p (pA@":PA" DtC}RIE%J)$5Jj4RXƐI%I(IIE RPTQI$I(HRth$mSi$J*1I (JQJ1ZQQRI)RqISVR$b$RQN7o]k]o}=PIko{{{ww޻@   A A @@ @"c A @ @ @@  @ A  A   @  A  # @ A@ @ @  @N @ @ @A A A@  @ Z޺ַm[]o}o-i=ｻ{[{k{{^[{[xDt:AP">PEPE#A= CGTCA #M%A҄P(z"":A(p(|":H"(xE~C8AGZH":I>B# 8DuH":@#A< (zGTC(t#Du#A=%EAPE":XC":":a<  """(|":H" С$! BHAHP A! HAHP  A! DHA$!QB$!A (A B$  1$  AqI A!$(HB$$HAA!! A!I IAHAI HB"p (AHB$  $!HP@A!$ A!W{}{o{o_@":@AGA  APA A ": E lA@ (pA #A # AGAAE@  PAAEA 8 @ CPA": ":@@ 8A8 A  ACA @  AAAAE ":AAE@A AG@(pGA # ^( FQJ5U$UZI*tBIR%Ua!JTm K} -%t*E*Ki$JIGPoI%*ZZF)E%QKJս}m[}nz{7mkj[j=w @@  @ A @@ A @P@@  @  A   $ @ @@P@ A A@ @  @ @@@@ @ @@ @ @ @  @ @ @M޶^޶ִֵ{{[[[{_uP#DtCC##CDtC҄ I҄P#":HCGP(|":#C B(p"(t#A,"P(pE"@%GA<%PQa:PDtC(tE#">P#"A#%CGA: "PE":PA E#B# a< ##@$GA< "PEA(DtCGK(tPA: ": AD $)I!BHBJ!A!CCQBBwxB(H HP( D$HPHbP@B$A!QIA! EA!HB!($ B$HBQBa J PBQ (( A! HbJ!D$!$ BHbBQ!( !HB !I B$ B !I!H _{o{[}}okt&[{o k[}o} (pA   #A@ AE  A @ AA@@A @  A AA!  @A @A  A&   A@ @A @ A @  @  AA @ AA   (p@ @ AA:ik]*uZZҧ-~ֵֺֺ֖]PZPVkik-ik]kZ-kkK]j?ZZ{Z[{[{ޓo}o[{}}{ @ @ @ A @ @ @  A  @O @ @ A @ @ @ L  @H @ A G  @p8@ @ @ @ A @ A A A @ @"|  @ @ aAGA8Dt#P"DtC(pDt"A8DtCGH$#":P#P:@"P"(p8DtC":GA8Dt#E CGHP$EP"A8Du:@B(p"@":AE#PP"GIP":H"PE:@"PA8Du(p"GI 8Dt#CGA:GA<"(t":EP":P"(tGH":(p#CGH":P(p"GA:PE8DtE#(tE@B#":HCGTC(p8DtCG@":@"P E**(c!F!E BPD%1BQ 1BbBQЂ*1BbA!C B (bEQC!EQJ(AEZ*!( (BQBP1 $!(EQCP1Q( 1 EQQ) P HPP1B*(TPQJ(BBQ(PJ(BHBQC(cQBbA/}oz{[K{uo{{  @  AA @A A  A1@A A  @  @ A@ A@A T @A A a  @ @ @  A  A  A  @ @  A@@  A@A @+ZZZִik]ִֺ֖ik]kJޖu-ikZZֵֺZZִֺ֖[{{{-o}o}}[{{}{B @ @ @ @ A @  @ @b @' @ @ @  @ @@8@ @ @ @ @ @  @   @ @@@@ @ @ @' @ @@ @ @ A A'k{{[u{[}ﭻ۾{C (p A:PPDtDtCG@E8H":":E(p"G@":P$P@"8":(pDtC:$CGA (p(pDt#HC# AE8":PPDtCC#E"8":#$(p(pDtP"@ DtP(tA@"C A":PPP C# EGAGAPPCGA ""G@":(pA8@AE(p"GA:PPGAG@P 8":":P"CA@(t$E+QP⢆11J**!C1QQQB1(P*Tc*)F1T1cC c1F(( hUF8(TTPU!aF*1TRQQPC*1RTQQT**1U!cTTc 1C޺}o}o[[{ZkoK[ַ[}k}k~݂@ A @A @@ A A @ @  A  @@ A  A   A@A$A  A @ A A  @@@  A A @  A  @ @ A @     A @@7U-kmk}k_ֵֺ֕o]~ZVuu~ֵֵֺkku־P_kT({EJ[kjw:{ZDu{TﰈtZժ{GSַ#ok[#ku.HAO  !   O @"n!$ @ A A @ A$  @A> G HA@ @ @' A  A AO' @ Q.HA@ @  @B @ GA   @@k{v뽭}{{}m{_{}{{۾ (pDtCGA8AG@P(p(pG@""G@#"G@#(pA8@#  PP8":":E(p"G@":P(p@# A"DtPDtC":E(pA8":@Dt""G@#@(pC": E"CC#A"Dt$ P(p(pDtC#@"G@#EP""G@#E"C#AP C# DtC":A(p(pDt": CC (pCEE C":PPCG@(pA8":EG@EPP8 ":*1**QBQXƆ1Q ƅRBTV1(cC5Ɔ5j5Ʊ5*1# qF*1XЪHTc11P*1 V1F1C*Rhuc*+bTcC\cC/ֿ[ַ[}o[oַ_oXA A @ @ A  A @  @ @@  A@A   @@@ A  A @A D@ A @ A A   @A   @  AA @@@ @  A @o}ik[KZZ{ZZ֖[{ZBuok}okmk}kkJַ">CڦB#=*a*A="":G({GT#XD~DuDt#(zKPmRX"0EXD|"= +H":H"LX"Egp(xE:XD|"mZEk#=#A">">SGPCڤB#<"kjEDu`":H"SAj#PGVP ! @ A  ($ ( ( HA@E A G @$ DA A HA @A #GHAA!A BQBQ A! @ A$ ( DA!AE(  B (AD A $!BPQ #  ! Au}ս/k{￷o{}}ڷ8 ADtPCGAG@A8 ADtA8 AE   C (pDt DtA8 A@ (p(pAG@P G@ A8A8 A AG@"CEA"-GAG@A8 #@(p@ A8": AG@E" @  P  #@#@8 E@C.(p@ 8 (p(pAG@PC @ 8E C (pAG@]c1Q֣:~Qj1zcW>QPPCGHP"A:PPGA:PCG@PEC"C##tG@GA:P#">PC莂(zA:P">PC#(|P莑C#Dt#E(z(pDtCEA҂(pDtC#E(tG@":P"B1BA(Q$1BPQA P!D(cQBA!Q$(b !D Hb(BA1C!E P1cAE b (11 1(BqBP!! (B!D Hc(( (b(B (BP c  !E( 1C!DQB(1Hb(F(c P(b{{{}}{[{k[{۷ @@  @  A A  A @$@@  @   A A @   @ A @@ H @  @ A @@ A A @@  AA A A @ @   A @ @k_o[[~Z1ֶ֖mko֖kkTmjַ*[TiZ{T֖{Zֶij=SZ*}RڥKmRTa@ @A A @ A @A @ A @ A @@ @@A A A @  @@ @$ A @@  @ A @  A A @  A @ A A A@ A   @7{]o{{}o}{{[{[[C#EPCG@PCGA:#E8":(pCG@P(tC#EPG@P$C:P"GA<C#"C#E(tGAGA8":#P Dt#"@P莑C#"8":#P#E"8":"(tG@":EE8":(pC#E-PCGHP"GA8":P"Dt#E(pDt":":P"C#(p Dt#E":PECG@ ":P"Dt#E8Dt Dt#EDtPC(pC#":"8":A"GA8":PEDtE8":$  E(pDt"CGHE8DtC#""A#@ Acc1C1 1BF1 P1C((c!F1CAF1 P1C(P(b1C!J1P(b1B1\a!PQc P(b(c1C(Tc( P1Hc(cAF(c(c1Bc1 1c1Qc$) QBqC(c! 8((R{{}}o}{]|ý{}Zu޻A @@  A @ @@ @A @   A @ A @ @ @@  J@ @@@ @ @@ A @ @@ A @ @@  @  A A@  @ @ Aֶַֿ[{}oֿ[Z[[[{[o~{}k}kڪT}RڥOK[ZToJTk[T":ֵzK_K]RGKTk[ZTCJ(~iR-RRkj  @A@@ A  @ A AA  @ AA AA @  A$  @A@@A@  AA A A A!A A  A  A  A!AA  A  A  A  B  @@ A A }oW~{[a(pDt@":P DtCCPP(pDtC#EA(pDtDt@":EA8@(p(tEHC#E GA#GA8I"" DtCP(pCAA(p DtC#(tG@":PP(p@ E Dt@": Dt":"C#E":P(tGAGA#E(pDt":@P(p@ E(tGAGA#@ CGHP(p8DtP@"GAGA#GA#8A8@  E(pDt@CGA#AECCEa(Tc␄EF1QRI*)81 *!EEF1H(E S$*)8SBTcСbAE8*!E8!E8(**1bbQR )*)8RI i8)8(EEEF1AEcRR!Qm^uooֵ[zֻ޺ֻ޻]]}io[z[z[@ @ @ A@ @  A A @A  @ @  A @A @@A @@ A @@@ @A @@@ A @  A A@@A@   @ @ @  A @ @.o{omk}o{oWTjTDuKA=*]PDu#U-RҥG]RT":TOJWTKJR=."#T*Z#A-uKUZJ#ZTj#ZXDuA @$HA A!@ @B $ A A  A  A A! @A@@ A 7 A AA @ @A AA  @ A  A$!  @   A  A  A!@  $ A$ [{{}}GA##E DtC#EA(pCG@$@"CAGA#8@":P 8A8@": #": E(pDtAAPE"8H@"GA A@"GA  EEAP(pC": A@"GA E(pDtA# EPH" GA":  EE"CG@ E DtC #EA#A(p(pC E"G@":P$C# E(p8A# #A": "" 'QQN(S 1IE$N*4TccRQJ)E'RJ)(*q EE8SSN1'RH(RN)(b8J)($R E$EҊq )D,RQSI(ҊaEQI$޷oKzz}oKZo[Ku-kwwֺޞ@@ A A @ @A @ @ @  @  A    A A @ $ A A @ @  @@  A  A A @   A @ A @ @ A@ @  A @M[[{[[{{[[{{[[k[}oַֻ A>PE(|":PURDuKPPE"ꪐDt#pDuA,"UA=GA>R# uA=JB#(p":,":XDuKJXEKGXEAEGTCPDuAh"PGA=#A:TCKW A @A!AHA  A A  $ B HBBHA A! $ A$ BHA A$ B$  A @A AHB A!AA @B  H A A$ B$(ABA  B      $  A HAu{{{{}{{  Dt": ":  "8A": #$"A  E AC AA8AAGAACP GA A@" $AP(p A EGA# GAGAACADtA8  #AP(pA ":(p 8AP8A8  AAAP AGA ":A@ Dt":AARIRT$Tn1I'TtL$$iR*ZI%(ޒOJQI$JP%A%()%TRI(IE(IE-($J$RƒXJ)F) (I%ҊIu{{{[޻޻-o}o]뽫[ޯ{zֻ{{}o}o}z}]o}ok{{k @ @ @A A @ A @ @A @ @@  A  @ @ A&8 A @  @ @ @ @ @ @ A    @@@ A@ @ @ @A @ AvZ[[]ooz}k}[{_P(AA:A,":P (p$E@":AEaA:C#EGA:":HCGP(t#(E"Du@B#B#"P Dt:(t#":(uPE":XDtEA: CDtAE(xE(E"HPEE҄P DtB(tE#(u"PA8DtC(tXDuC B#":GJ#EDt8DtB&>BHB !$!B$!!(BQB!$ III HPPHBHA A! $ A!BHBQB ! @BHBB΄HB ! P(HB T$1A C $! ! I BBQ HP ! @B D$AB!!( !$!A I]ok{{z{[{{{{o޷ A@ @ AA A  A  A@@A @  @ A  @  AA A@a AAP@ $ # AAP@  A@":   AP@A @  @ A@A@ E ": @  i*ޒKZ֪KZ]kKT-u-RZZ .޿I$R%JR X4kKZZZ֖UHuVջ{{}{{zZ{[J{{[v  @@ A' @ @p @  @ @ @ A @ @ @ @ @ @A @& A@  A A @ @ @ @ @ @ @ @@ @ @ A @ @ @V޷޶o{޶oo[}k{{}k{ACGA<"@ CGJ"GH":":@CGXE@a8Dt":P":P#E8":@C"(p(t":GH EGJ":@ (x@#":"GJDtP DtC8":P"8":A(p"GA<C EA:#@(pDtC":@CCEBP Dt# #E 8DuP#8DtC:PEP(uGA:PAEGA<"(pA#":"EPA"@P(p"(t":(!! )HPBBBb D%*!A$*(TbbA! EQBBQ% BQBPBJ(Bb$1BQB!D(HPQb bBBbA!A(I J!($!1 !b(AEQI@%!!CQBB 1 1B!D%.{{{}o}[{}o}}`A @   @  A  AA @ @A A  @  @  A  @A!  @A @  A@  @AA A@ @A @  A@  @ A@ A@ @A @Zִֵֵֺ%ZZZZUִִ-ikZZZZZZֺ֖-ko}={VV߽o}}{ @ @ @ @ @ @@> @ @p @ @ @  @ @@ A7 @@A  @ @ @  @ @  @ A @ @ @@@ @ @ @ D @%W{{o[{v{}GA8@":#(pDtC#8Dt":PCGA#"GH E"@ 8Dt"":#PE"GA8DtA(p CGA# EPCGA# "CGA#":PC##E"(pDt"GA<CGA8@GA:P" GPDtCGAA(p"ACCGA8@(pC# E""8":PEGIAE"GA8DtP"(pC# ":"GA8A8A8":P$GA8DtE"H#CGH(p DtC:EP(p DtCEE"H(p DtC#P@"Dt(b( 1BF1QB!bE(%P*(b TPPJ(Tc*(cD$) TPPHTTPbb($!E T%1Q P TBQC*(P1PTTBBE ED( c*(cE bB1TBBD%*1(PE c*(c1QB:u{}oXA  @A  @   @  @ @  @ A @  A A  @ @ $ A @  @  @  A@ A @  @@@  A  @@   A AA A @  AikK[Z]kKZ[[Zֵֶֺ֖ZZֵֶֺu-kkZZZֺֺZZֻ{GUPO}[{VDuO}[{V=`@@@@ @ A AO@@ @ @ @ AO @@ @ @  A! A @ @ p  ' @@HA @ @ @ @ AO @  A @"n{}}o}[{{}o}(pDt":P8": #":EC:":A(p"G@#E8":GA8Dt": DtDtCGA8@#(pA8":8  EE8 PPDtHCC#A A8@#A"t#8 ":  GAG@Ò":G@#P莁8A8@#E (p##P(p(pDtDt ": CP莂8 "DtH(p(pDt":P CC#A DtCG@E"GA8":":P@  A"CG@ECGAG@E1F1hTPPƢETPhc 1QBTTcI Q1ШF4**1RiEEPQhcCQQiGB**5EEPEP**TcЪ1HbF*11 cҊ cj1Q1[[Z[~ַ^Z[}k}ooo}kՈ  @A@ @A  @A AA A @ A @  @A@ @A      @HA A @ A @  @A@   A A @  @@ A @  @@ A ik_/ֺֿ֗ZJִZVkKKZZֵiZִ/k[ZN7ka>SDujւ#l"հ)mjEjDt:`A="0պAՑkk0D~ZEaNL":mp=a=a{T#ջaՄPh":L"PR":)PGVE  p HA  A @  @$  HA A A! A HB@$   Q$ $ @@  @HA HAB(Ĺ AB\$!@  @A!.A>B ! A HA A  O BAD@ ! AE o{{{[ﾷk{խ":C(p(p C ":(pA8 APDt@(pG@ CE(pA8Dt":  #EEA (p@P8 ": ##E"":(pA8 EE &EEG@#APDtC":P APDtP8 8 ""G@#@8A8 A(pAG@E"G@#A@(p(pDt":(p(p@ (pDtCG@PDt@(p(p@#@8 "GAG@@C#A"CG@  #E"":;CcbcChuF*141:Tc4QƆ1Q\xƣqQBcQ j1F.18Ƈ1Qj1F8Q j1HqQb7:qF*1cCƇCWֺ[ZZZkoo޺o}omk]k  A @  @@A @  @  A@ A @ @ A@ @A0@ @A A@  @  A @A @ A @@@@ A @ @      A A @ ~ַ[-o?ޖִ-kk_u֖wA*A=GMPGVP*T({GTC":X"ꖂ({GT#Pp= #TҠERH":=+A,">C)(pE#"":EH"h":Eh"SPA= NB#GA;a*a<"`":#TPD|"A({GT#D|C":":EG({TN4CҤP A (@(?   QA   A !!@  QP  BPAHA A (A HA>B$( (A @HA(Q(A( !@BP  HAQB$ QB G  Q$ AE AE A B ַ߽ݭo}{} @CE ACP #APGApA8DtDtC":" DtEDtC ADtE@ #A@E "@P ADt   ": ":"":":""" @(p"" @ (p  #APA"C  DtDtA " @(pAPG@P "":"A8 ADtCCE%FTxc]F41GF4?GhzCQt18Tt8 bGZTuqGQƺt15}o}ZޖK}o}oַ}ok[{Vo~Z@A AA  @ @@A AA AA @  A  A @AA @ A  @ @@  @@  @@  @ A  @ A  @ A@ @ AA @"nmo}oo{[}kk[[[ֻ]޺K[mooZWEE(x"#":@h8Dt "@EEE Du8DuDtDtC)#P#CGHP"=#AEC"Du(p ":@"SGA:ZPE(p#E8DuDt#CGTPP)#(zGT##E@P(|PP>(xE8DuDt#EA"DtCC##"":Q(|P8":EP"GA:"(u(pz  QB1 @QHbA QBAD( (A! (A QB( (A!  A!AEA!QBP P A (A! (AEQB PAE !! QPCADQB 1PCADQ(QB P@b(1 (BB!DA! Q(BBP[{_oo[{{ A@A @  @P   A A8 A @(p@Dt@"DtAC@8 A@#@ .A  @A ALq @(p@": @@G@A@P  A":  A A"   A@ .@  ADt@8@%kޣZ׎ZƇ^?Qk[uk׏~u^?]F~x{Z׎+{uo+Zڥmk{ZT}-uքýikJ[ֺZ[[ҤkkZZִ A A    AA A  A A @ A A A@A@A  A  A @ @ @  AA  @ @A @@@A@    @@A  @A  @ A =oﭭֿ{_ֿZ_[{}oo}oբ:PGH":E(t#8DtP:#E(pDtC:(xE(tGHE(p#E"GA8@":(p"GA:#E(t ":E(tG@":"8":EP莁8DtC#E(p8DtP"(pDtCG@PC#AG@P莁8DtGA8":P@C (p"Dt#E(pC#(pC:TP"8Dt"":EP莁8DtC#:A"DtP"@(pC#":P"Dt#E(pDtEDtE"GPDt# C#(p:#E DtCG@P莁8DtA(pDtC#E Dt#PP"GA9(1QBc1C!1BBPC(Bb(qC1b BQC11cAE P1c!EQP(c , DnjB$Hc c( P11 (b 11 cD((c(1AF!E cAF!!P AF(cPC1QC1AE c 1(]{ֿ{wP@  A A @  @  @ @ @A  A  @   AA  @A A P A @ @ @ @ @ @ @ @@@  A @ @@  A A @ Z{_޷Z[Z}oz[[mR-uZT+Z֕-Z*[-K[T-uZZKoJZҥKZ֕-Tq@   @@@A  @@   @  A  @  A@   @ @A @ @A @A@A  A@ A @@ A  A @A @A@@ A _}o@PH"G@(pDtCGA#(pDt#PP(p8Dt ": P莂@ (pDtE" #E(pDt# C#P"AGA8H":$GA:#E(p(pGA8":PC#E(pDt#E;P(pC#":":@ C#EP":PPCCPC#E": (p8Dt":H(p(tP莁8Dt"(tCDt@":E(tGA#@":EEA8@":P(p DtC:":$(pDt":$C#A8@(pDtDtA@"C#P莁? 1Cc1QPQbE'(R ) TBI PQC!$1AE P1HRcb!F1N*1P! *1cBRQQ (( qQ C()F(cŅ1ҌP8 AEF1M CQAE! **(b(BHb;{{[[[[z{Z{k_k] A @ @A @ @@ @ @@@ @ A @  @@ @   @@@  A A @ @ @ @ @ @ A @ @  @ @ @   A A7Wk{{ok{[Z[{ak{}}*kT*Z*kTSXDuK[*j*J#":JARڥA?TPDu-*T*[T":Tuj/*]R*JiR[T @A@  A  @@ @HA A  @A A  A!B  A 7A A@H A @@  @A @@!A @A A $   A @ A A @!  @@}{Wz{{CC":" DtC@CGAC":P""$C#EA":P#E(pDt": E(p8A A"CGA#8":@"CGA#@"CG@ E":P 8Dt":AE"8A8A#(pCDtAE8":PCP 8":"8H":P##A"GA8A#$(pGA8":PA(p$C# EEA8@":E"A8":P"CGA# E(p8DtA8A# ECPCGA##P DtTRqbqQj.)E'cA 1bQSH(QqN1QH(1qN*!$⢆)D(ŤCqcPQbbccPQQQcPQI8)1N*1Q )(HPI81QQc uZz]k]}ֺZz޵o]kkzkoz{zZ}~Z޶  A @A @  @@  @ A @  @A A@@  A  A  Hq@  @A@ @   @ @@@@   @ @ @@@ @ @-{}ok[{Z[~j&{uoA-PE,%PRPR(uJ#"-*UZGA>ADuJ#:UZUJ#GTC,":j#KTuJ#MR*EACGT-RTPBS @A $ HA A  A  H A! A  A @H @BA @HA A!  A$$A @BHAH A! @HA A A!A AA  A$ A A!$ B$(A A @@HA    {[}{{{A8@@H A"GHCG@@" H" AGA# ": (p(p:P (p8@":PE"" (p8@":PA #EB"@ (p8@ G@ A(p DtC": #AAP "GA #EAP(t":@ (pGH #AP CGA E" GA8AG@ #@"A8AG@   # EAGARI*$(!E4qTRT(%Š )EERSQIE(8J)$ŒU(%8QQVSJ)IFN1I'8N)F)FJ)F)$RI8*QJko{o[{z{ֵ{}k]oowo[O[޻ֻ[{b @ @ @ A  @ @  @ @  A @ @  @@@ @D@ A@ A A @@ @   A A @ A @@ A @ @  @ @ @ @  @}o[{{{{{{}n{[}}{[}kַ$PE(xA҄PEAA=%":a=GP:GA:A#"#EAAh"GI$":": GT#":ZAP":a=GA EPEDtC(zGA:GTCEPEA#XZ"TC(pP."" a:GXAC":H"HP$":P'aHA $ I  !AA B$ BA!  A!HA A!@BAB$ B HA B$!THAHB$ C BHB AEA!@$ HB  HA A!$!A$(A!B $ BHB A ! HPBHA!$ HBT[}{[{o}o{ ":P AE  " G@  A E A8     @(pA  AP8Dt EAG@A@(pH"AEA DtC A APAPAA   Dt$  ":E ": (pAA @E @ AP A1b*T!ҌU'IE*I-1J(ITIF*1ZI*]FҥJVu*qUJ)ҊI($KJ=-FUKij1]E--RBhU*TbI]o}O{{=o}o{{{ھ{zvָ @ @ @  @ A  A @   @  @ @ @ @ @@ @  A  A @ @  A @ @ @@@ @ @A  @@ @ A @@}ﯵ~޺ַ޺{}ok_ok{]o}ֶַE$C(t":DuPEPP (|":PC(tDtA":DtGH EP҄P"CCDtGA<CP":Pa< Dt"PDtC#":E(pB(uGA8DtDt"E ""AGKH a< Dt(t8Du "P$GIB#"@GH EAE":@A8DtPEA8Du"A#GXEGKJDtDtCGPDt"P"GA:! %I!$!PI !$ D($(!!B D B (B A!CBBHBA!Q B HA(B!$!B (R!!b$(bI RIAA! !!$!! ! BBQB$A!B!(C!$!(HA%A$) A!C{{{}o}[_[}}oַ{}}oo A@  A A  @A @  A@ A @A @A @A A'    @ AA (pA@  A @ AE@A @A$A @ AA #A@   AA # Aִֵ֖u-o~-kK_uK]kF֖kZZҥik]j4-kuZT{{}oս[[ @ @ M A @ @ @A A @ @ A AO# @ @ @ P@ @@ @ @ A @ @ D A8@ @ @ @ A @ @ @ @ @ @8@ D{{o{{}}}ok{{{{C#EGA<C# EAE8Ax@":"Dt":P DtC8":@C#":PP(p"G@(pDt":@CEPC":#G@":#":PEP(tEPCGP"@ Dt#":PE(z(tC"Dt#XAE@":#E8":APE"@PE :#E":PPC#(p"CEPG@AE8A<"CGA#P#EGA< DtP@CE@":#(pDt8DtC@"(p"CG@P@#E-^1J(Bb( (bQBQCP1B1QAE BQB (BQPD((*!F(BPQQ J! BPD%!F!F!$(bb( D QTBP!F!F(b( () QF!F!( D%*1 1 EQBbHPD% *(c1Q 1Co}oz[[{z}o}ooA A  @@A A@  @ A  AA @A A  A  A@ A@B  A& @  @  A@@  A A @  @A A   @A A  A  Au-kik]kKZZִ֖u%ִu-oikKZִֺ֖uUV}޻{{z[{` p A @@@ @ @ @ @ @ A @>@ A A @1 A @$A  @ @@  @ @ @ @ @  D @ @ @@@A @ @ｽ}oｽo}}{{{{[{{}x":P@""GA8@":HC#(p8":":P"C(pDt#PP(p DtP(tAA"GA8@ (p DtC8A8":P@"CC":E8":PDtECC#E8": (pDtC#P (p8H AAPCC#AE(pA8":P(pDtDtE"":P"GA:PPCGA#E"G@":E C# EPCG@P莑CC#E8":P(pDtDt":P"GA:#PPCGA##E" :##E(p8H@P""G@"GAG@E8Dt1E (bQI bQQBqQJ*1*(BbE P1QP !F)F1QB**EF4!E cb Tc*(Tc bF1X(PQPc *1*(PEE b(P(TTTbQPQF0Koֿ[o[}k}ooַ[ַַ@@ "p! A A @A @@ A @ A@  A@  A  A@@@ P@  A  @@ A   A@  AA  @@  @A @@ @ @@-k]kַֺZV֖[ZZ_uukmk]kkuZ[}ַh"=-Pt#{}oZC[{}[=VC[GWa=;@ @ @B @  @ @ @B A A@ A$  @  @ @ A @ @ A$  @ @# @B A @ @ @  @@ @ @ # @ @   p>U{}o{}o}ｭ}}}}}}o#E"G@ AGHEPC#A Dt#E"A8@#E"8":"":":EC##E"G@(pAGA8A8":(pAGA (tGAG@EC":PE8": C E!"G@#E"G@ A "G@#"C#A C""Dt(p(pDt":P A8":GAG@EC":HCC#A AGAE8  E(pG@E(p(pDt":P CEpCPE C":PPDtE1F4*F1C4ƅTV1c F) hcQXƣ41cQBU bF1 kQhcҥQ b(Ɔ1QT1F414U ֢UƅF1T1TcCƅTcƅE U j1Q b[Zok{}k}o_}oo}o}oo[[ @ A @@ AA AA @ @@A A A  @@@ @  @ A  @@ A @  @ @    A @A A   @@ A @ A @@ A @@7ִ+KZ[[KZַ֖֖uoomk}ik[KZ[ZZZZWֿEDu[##XD|"aժ[aNGP#<"":ENB#=#AլP"":G-"":ժ{V(v">PaNGVCX"C)#PGVEڄG NGPET#Tp= ւ#"RڥSGVOH"ܹ(?! @ (  A (O„  @ @b  >AB@QBA@P(  L  A  A @b  B$ $ (  QBHAQB~BHAD HQB !$  DA@HAB@A DA! A {{}}ﭻ{{{{{{{o}} @8 "G@B @tC#AE  ":#@": C.(pDt": " AP8":#@(pDt @A8 A AG@DtP"    T": CAP$A8 A@tCDtA8DtDtEA8 A @(pDt": C (pDtDt@C#A E #E @8"GA8Dt  ":P @ 8 "G@8DtP (p@ 'bcZ}c~CF1hu1C}c~1bc1\Vcc1QP?[qc1Q֣11Pƣǭc1cCj}ook]k}kmk}RZooIZ[o-uo[}k}ooooA  @AA@ @ A   @A A @A  @A A @  @ @"c@  A @A A @ @  A  @ A@ @ @   @ @ A @ @  Z[ַ[z[_{}o}o}o}ok޷io{":@)#D|CD|"S#>pDu@"::PGT#AP`"Du@":G(zGPACEH"Du@":Dt#(t#D|C#pDtCEH"Du@":G8DtEA P(tPC"Du@":$CpT(z(pDtCEXE8":ER":GDu@ETPP"GH`":GPC#CGA:PGT"EE(t\P Q bQAA QHAQ (A P QQB AQPHB A!$1PA QLbQBAE (HB QB ! (A! ! (A !!A  HAF A( (AD AE BAAE B A1B"o{{[[{@GA8 #@(p@B(p" @#@"":A A @#@8" @#@(p  "Dt@": @(pA8 A A DtDtEA8 G":"A9 @(p@PAAA8Dt@P@@G@ A@Ap@#@(pAqP AGA A8 AE@  @## AE@P (pA A8 @(p@#A A8 AP ":ߡF7 lvQ~F1㡍Fֱ] j:kTmt:;Ot1ǡ~C57Ҋ~6;?Cht>:m] j=T[]RTOk[{TKk[}o[ZKo=o @ @ @M @ A @A @@  @ @ @A  AA  @@ B @@  @@A @@  A @ @ @ @ @@ A @ @ A A  A @A  @@%{z{]o}W޺u-ook{{Dt(uGJEPԱDtC8Dt(x"GP"8Dt##P8DuGA<"GTNA":#E(pDtPPPEA"GPDt#TP"@N(zPC":PECGTGH":@"(tC#E#":ECG@"8":E(t#(pDt(zP"X"8Dt֊":#E@"(tC:PGA<C(p"@":PCGT#":#E=#NCGI"8":p#">PC":ݡAD AE( QC1PC1 QC( A b(P!F1PCAE bcQA(1  !DQb 1B( !F1P A1C bQ (cA1@1  (AD( B BAD(1PA!!cAE(( (U=k{{}}o[[k{{{k}o[[޷}  @@B @@ A@A A @ AA A @   A@A  @Aq A A @   A @@  @ @@ A @@ A @@  A @   @   @Z_X޶\k+}ok}oֶkk]ժ{Zޕ%oK[TR+Zޕ%oKKY>KZTiRRTRKj*KZ5j֩O}SVp@ @ A @ @ @ @A A  @  @  A @A  @ A @ @A @ @ @  @ @A @@A @ @  A  @@A A @ @@oo[m}}(pDtDtC#(pDt"A:#EPCG@PCG@$(pDtC#ECGH (tC:P@"A<CGA#(t"GA8":A"GA8": PG@ ":E(t#EDtC#"GA:#E(pDtC:(pC#P"G@": C#"GA<CG@PC#(pC#E"I(p:#E(tC#EP莐DtE8":"8":P(pDtC#EPG@PCGA8":AP(tC#E(pDt#E(pDt#EE(tC#E(tG@":P"$C#E(p(pC(p Dt#(pDt C#(t#EE%b1 1QQC1P S !B PHB .1 1!(Bb(c1b(1C1P c c1 (Pbc1Bc1c\P1(((cP c((b!!\P1c1HB(1aD((b1Z{~{zo}[[{K}o @@ A AA   @   A@A @@@  @ @@ A@  A$@ @A A @@ A @ @  @@ A@@@ A @A A A @ @ '}oo}ook~_}}ok]PEGTIR-":-CR--SҥUuKj-*[ZTK[Z*R(}TiRִPEGZZPTl @HA A!D@ @ @B A @A@B @A A  @A@A@ A AH! A AA @A @   @A A  A! A!@   A@ @BA  A  A@A @D[&~[{|L=[{}8":P(p8A8A#":P!"GA8":P 8Dt Dt":HCC":(tP莑C#(p8Dt":AE"CCP"CGA$AA(p DtC#E@(p8": (p8Dt@ 8Dt":@$C:EE@"$P@"GAGA#EP"GA# CC":"@ E(pDtP DtC#A(pC"GA:#E(p< DtC:": E(pDtC#E"@  E(tG@":P(p DtC##"GH(pDt#E8A# "CGA 1N*1Bc1bN(bS()F(bSB1C) Tb!H()HRqQPQA PAEE'BTRqH(E1SBTRqBqN1 *1iF1AF1)HRqcR1Sb*!E81ZN)ZZo޵ֶֶַֺo}kn@   @ @ @ @$ @ @ @ A  A A @  @ @A @ A@ A@ @ @  A A @ @ A  @ @ @@ @ @ @  @ A+޿z}ooڵok}}[}k}ok[{}o֩kJ(zJP֩iR-UPEKJ-RDuK"ҥh":zRATC(}*TDuJT*Z#~uJ."-RA AA (A @@ @ @ A  A    A  A    @@ AHA A A @BA  @ A!  A  A A AAA @HA A  AA @  HAA A @?-`" GACA8@": P(pCDt":@"CG@(p8A8AG@$GA8@"C#H 8DtHE"8AGA  #":P$PAP8A8@":P DtCDtAGA# (pDtAC#E@GA8@GA8": A(p DtCA8@":P(pA# EA@"GA #  P $CP(p DtC#" 8A8@":P(pDtDt(tGAC#EP"CGA PQJ)(I(F*-&A$QJ))EbqJ8RJ)(%QRJ))SJ**1TSS)()RQIE,PQAE SR*))E⢜PTSS 7ކֿ}o{}޺޻[z޻޺޺]޶w  A"cA A @  @ @@@ A @ @A @  @@ @ @  @ @ A@ @ @@A @ H  @ @A A @ @ @  @{qZ[{[Zoo}oo}k{}o{[{GTR":H.CҪAEA *(~":ZC*jA:(z\":GJ*A=*CҪ.PEUPDtCDuK"=GU"GTCI a=.PEGKURH (zXJ#]RH"v(AA!HAA A @B @HP  BAHA $ A @B$  A B  AA @ HA AA !  A A!$ A$ BHA HA  A!A!$ B A A!@  @B @ A!@A A @B @ }o{{}o}o}x@":E C8 (p  A #H  AAG@ " Dt (p(pACGAG@  ": A :$AP(p  GA AAA (p8DtAEACGAC ": (p@":P (pDtAA#  E A   EE  #E  DtA #@  A #4b,cI$J)i$(E$ *4I(IE(a$J*1I$JƒIRҊq %8I(RI$i(ҥJQF+I'IRI ҌS{[ڵ{[kz{޻z{io}R޺ֺ޷ @ & @@  @ A  @ @ @@ @ @ @  A   A @( @@ @ A @@ @  @@@ A @ A A @  @ @ A@  @"oo]kk{Z{_{[Ul"o~C[[[{zXkkk[{޶DDDDDDDDDDDDDDDDDDDDDDDDDDDDDDDDDDDDDDDDDDDDDDDDDDDDDDDDDDDDDDDDDDDDDDDDDDD]Y,Fфxёa.Geh%($G`h0tq"*hZ;FDFDDGJ^JRUK--kAwZ.KUZ֒֯%TWZzu VTJTU[(/]VuZZ*ԲgTS AAJ A IxE/7׬-Ҥ/ PG (p! /{+[uI/J7pR,Lt Ev  0L=֤*j{Hi0nU".XB"). VҸ1շ^#N^޷~KV$װ=R[TZtZZz%MiT cbDC *B>uZZ+hw'ֵuZ ' -ڥizꖺKNJUzIIU*KT,0 PA-B  H3 0ds.e̹2Waaal 馕" 0 0 0 0e0Z,E@al6l6;mDtb4ӻ4amaÄSpꠏlmapXbkHva#wmmCamm 0 #YOml6l68alDUmiY}a8nmp 7#6#`amaaa6 ZWmÆmfQ%;mmȯÇmmaKP"8&ϦaBU&}Gg $t0bGMlqmlDVal0Æmm ; 0 68ql6 |h6~Ptm&TiL=ݷݶl$}mm۽COg6AVO+-M8ppA!:GNpnݶ(vnN"8w"w)vl0)"xE;ln@C0ቌ:6q"CDt:ؗB_ 3 `Â# 8"; `0 1cl 0a,0lpDx1a 0m ,1`0f)z9 9! 0nm8Xt=};M4>>m6۱7}޿webv#w;m6Mmiixwwvm+ Ì9 p '!H2?eDDÆAÇa m 0a 8m l8a8plin< GG7# 3p0a6l+Pe%pl6 0a 6l6ۆ  6 aal6l0":TM9thNFi=fr $ꕶt":imj}miwvm {:"'N78eXDt"8жlFI$n > nOSQTavݶ"O vaÇ@mÄS)~yՈ@1pb&% F "  l3<8al6`l6 laa-l m60a l6N6cccۄG G eb |n"!F!m#;I&mb݇l6mna~mۻlna llmm1֓%~U;T]Wwwviݶ}ݶimwmyi F+1sb.yb{::m#s.l8pl6l 6am`ma 0l8aa pe_#GI膃 8g@yaO 0l0 amvaa mm 0öal6 GP'&q7T{O$ݦxlްAyC7òl}vmmmmömM;iByG}GVV:8GM馡CӄPV]QgGLnhE;mmv x"ømm)E>amn!/ Sb%%F  X$t6"(,`0al0pDvab"< ` aB0 6a 0a"<Â#̓ 0c 0  1`nAa`夡+Q #␑4|>$x&/o77m4a6c=cm6ۻap=ՕǻmommmMnmMmef=b""!ml8= j m8pwpmmpa 0Çmal8al8pa r:ql25̑(26 :=Aχ!T6al0Ç0ن aa m6l0al8v mm 80#Wf@3 ƨ!#H6n r7SL4q;l3٭ݧw}ݦmwݶmwwwvm+ iGVy3ۄGGWTGB.GGm菆P꼎Dtӓc8E;pvmnl8E;m pm)m nnOmr/0D"lHt_8!h;bGDt"GL΅A,1E]:#8"<  0 6aaa"< 6@.pDvl0a#Јa  xDyaG p a! n ĺ J6y6CEGDtݰ&6 nccm 8mccm6a8{ mm[L/}Y~v}iiݻvmwowmmiWDi#(a HD" p⍦ml8l6 am l6 eaaml6maaa ml8wL#<@V2F$Aa d4!0ya&Ѷ ` Ç 0l6al0aÇ mml6 8ammml6˃\(H($&n mrH6nhDD4qۜk6C9Z|g2UM;Mn}mwmvmiwwv":>,IuDuGW]S8ooecڠۻEpݶa mmÆmob" Br:[fb"ffa#@H, 6$tņ bP 60Dzll0 0 00 ` 60 `DyGDyG 0ml6 9KHYX|>'5SGGɸHY=gGFDug7762=-;ra5Bmmmnlnmam6666l6v-=R â:+V:#;M.m6mmwmmmwvivߖHDH3aCnƃ8+b"y$|D3aDC+e7<n6Xl6 a a ۸avl6m aÇpml6q0xfC6,2DdCBGV3HH#9{l6b Æfl6l0Æ 68a0m`l6l0apl6 l6 ]Avy 9na6mU$>mipỶmw7M4۶mwwwܴ*wnGW7v0:wvVXv7tGM-Ɛ"8r'ݪl8E;mmaÇmm]6ml6ۄ"!ĺ DDlH CC̬(pB#b&hA[ہpa"=B#4aaft2ë́G"=!mlB#8";a 8Dzc#Ͷ l0ap"<aDz6m#Јa?}>Xf9+⸬>c7͢:hW2= t[cm666ٴGDb m a 0m866laa0l6llml6a0N"8[+NЪi݋P1p oNwW߻ﶝߦwi߶㖖+z{+aEuhDw0Æam aa m  a Æa l6 aal6ml6m 7mupL!a'X3@aa{=DK n2  ` ;a6 0Ç amm 8pnmal68av*kŕqA L=h4 4{99͆bn7f+9vm;AiÆmm6n;mMmmwwWuB۷N>mmkշSipE=m8E;ݶݶhe>όAYf59\r0dh8AS*,І|+epnGBnP00 0mml0`Dx0 amml3@2A G 0lll6m 0aaa 2lH;TDGbGL3Ɇymg0B]eYbGHp@H@mm7a 0 mml60Ævma݆ 0 0 ccm aa`h,߻:=]cvҴzL9&)6v~ݶm{wvmݶmv9r~+IS(K-a3a<7#mʶ$t%s=a8p۶vmmaamaaÇ6ݶm)l68pmmmr4G74FaXB Fa MXa,1#6ĎvmHÆ# 8p`6 aa 0 0aal6 6aal6 6aa0 8l a 0 8l0":-(=و)͟G&Bs7ٸ''9ra |=#]Uὦiwwiwwimii=7m;Mwmm=p|6ݶmmݻm ;)mm8mmmLK.q8s4Xb"" :2>1 l2Fn#ma"=0Â#maa#a Mm 0 8Dzam G 0ÇCmma"<0 + : g0g8#>s#hV3hHH\kl{ 2*ݑЕE; 0allmcaa 6lm `ٶl6am66 a l6vl66m 0 0 6cf[hOzB\xi 44po]mComvVmnﻻww_7Q A -[7+hDDD*y\Vrmv 0 0nmSDE 0A"pnN 0a ppa 0paECmÄS"NpE@8V%KA `DM&К!:b_95QHD!6610`l6Æ\ܛpm-lÆwl6l6appl6ac 0 aűm5g t.(U3q9Mq;%9  a08pl6mwumm8~amv>6mmw1ީ[߶ݥT}'|=$M4Mm6]ZݶMmpNMOm%5B"$t"9A隲13lH7PB!\DDP-al0a0a 0mmDr#tG 0 0 mma GG0mm 0 6aa 9f+#qB&!1fq%aDl=ay*vTXgr:msfyI6r7 0nqmaa.!Æml6l8a8wpam 0aa 6caaaaaa!@ 6XJAV$ç ! v!Ǡg莛mmm4Ӿw[ݶwmxfm8B"Ђ)pmMÇwummwvmmÇmmo,MDHBHD\UUf9ivP&|IA]>E ml8a0ÆÇvma 8pÇ 6l6m 0 0mal0Ç8aw l6a 6dD9 BOݰnl)l9 0 00j$tχAF6bGCwdtsnԎ am al66l66l6l `amن0al0aal66 l0a j ~h +wsu'}g՜EІ nw}mimim~v}3\8U+PD 2Dua:$t$tu>뉕 0nNppÄTpav 8ECmml0 0 6mS)ÄTAaaE<"N 0TV* B :#Xb D3ر.hq>$~b$|Ay\TEwc 0 aطl66 ac 0 [l6 lNavbm a1aŶn#ۆ60aaۧ e&+\V1 '#qs7mif.gĂ ͤt$|<a6mn8~Æmnv0 mm7ݶm0 mm~|_ۯmGB4 mPEXM4om4鿻WUMӻmMNۿ#ПDKݳشЈ` = +FEeg\]amaDy 0a`6aaa l  ma 6al6l l6aa 0l6l ma Myay wݛ l1f@g0E HDf떶a 0nmm0aÆml6۶ `/ 0Æ6ml60 6 6mmma 6aÖh* gSW`ebmyMrG&7&o:q#3ifiݶmmwmk}mm߾mvwm.rHTGTmT":HG[DtDuDt~4GAbGAnOT6a@vۄSl6Ca{)6SE<7wpxE;m7pm)l66&% A&1W"6@ "}D[#p@#! ؈+yX=Dz0al1`0l# 0a 6,DO`G0GDvl6a,1`Â#6 8"< a0 0 0a Ac a pBjG%]UW9B19$tyGspqaMݲxm4mQmݍmwv8p߶Ou莞nĺ2V\#莫wiݰ۶n۷wwNݶvmNM;mZHhlC>:!Ig Xv'1heWXPЋB,끆amð 0Ç 0 ml28i8l;ma pÇ{ ml6 0aö  p l8{>܎l7A@l60BG@ "GHbgBGB_9 |&a a l0aapنafl66 l pal6 6al8pa ma pl6b\HBi ea(P݉VnB# MnË.A9mwmݷmݧww{omiwwwovmwC}e~莞|6#VE:v#V XGXpEE"Nm"aNa) ۄSCwa nNl60>mpvmۆziZ8..g@B]CEp!Kk?EYXg1:8H"W%&6KwG6aa #G ll6l0rP#G8"mM4mm[opE+O±GTGNsɄGVGU":v":G[GA9?\":#}mSl8oÄSmjpۄS(wwm E;m"NÆöm|D1(A?A>oAALbG+<!DDDEr+ -B$|H 2*!eaNPBG+h Gm``aa l 6C 0 a 0,0l"<#ppDy#l# #aa a c aa 0DyG m 0E8m *$ts,AOb!%AEO #ĎN!S!6[96q]۰a>m67v6 wmlvcc lmmÇmnl6o݆4Wovocqָuߗ_jGVDuf<8Mn۶ۻﻻmvڪ4n~M6mno,em tl!.B%$t,+8q=ZqbYgl6ml6 6aaømmapvaap 0ammaa8pmmða{l\`ˑs L(aBl8bGp!#<EcK13 aal0Ç ml6al6 0 1`l6mlm aÇ alaAl0H:hUA* pT]+B9 ANm&nSi]gq&L1ainM4M;۴Nӿnm4{mM4okv'#R>l D0Xb Ubm "GA 4$t-nal6aapmmma 8al2 aamݻl6a 00ݶvmÖiBĺeZ3L#Hwr:aÑ# soA$| + r eya`6 Ç0öml6 Ç 06dܛapl maaal8mml6a6 0 0 0,Ѵ _HKEN\UŔ9Ç9Il0Ă.[7$ٴ>ՇNmvpۻûmm4ۻmM;۷}݂*+I}}{L-D~j&jmmm"mvzUUݶۺ8wouUp)ݶm%N%q.Kp@!/L!#xN@DE"GA5pr:ae{ to: 0amml0a 0 mal0Dx0a."8"9sm 6 Gpa0lm 8pa 0aa 6 mð+g;?l@,":Z{ ʲ!.:8c6#=!##(\|n$t7b#ټcw{mnÆa6v a 6 maSN7aacm6a 6 llmns 6 :V7Bʶp 5a=o]æmmwޚiv[wmoյmq#B]l!.AA"" *Y] l2g VE;nml6apÆl8n 0 029mml8pÇa۷ml0 8pn۶nrF.՟Fr:Lv%r:L~)81#6ha+&k^xÉ|8a aapa6  0a mf l6 l6a3pl6 `6l 00m `6 a 0 0u[T1.YVH3vSg!>͞Eӻ}mwwwݺimiw ݶwiwvݺMlPY}ۇv>vy^GU_GI )smm6ݶvmn8wmjÇpvݶׇÇmmڸB%Љt]8>! +V&v"&шE} ArHZ."Wql6C mapDz 8pa 0Dz8Dz#ݶl6asaÄGpm"<#"= {E<;.g=ď5@ Wu9 t6yAC`䧶+dta,a|#"}l6  l0l0al6aal;ccaaaaql66l6l06- 6a]6 1 }%x=0UPQ  Wz#ʽ:W۷vvmwmv{M5nmfE.K3ADaXg aЈ(6ոg;mmnanOTapmm)aE;a 0awm  0 nNeal0 0"a =V&Kyo L D7C76Ďln&zb#3A[nvmNm6mOPm[Nmik]mmޢGE&hYCDK E n8CPYXb[ |*eXbqq#fĎף l0am  GDyGaml6m GDx0 0ؔ8۶aDv#;#;#; 0 6666l6l0a#Dv0pvNl6 09?ٮ%yGN$ua&3{a718q?Չ}=b_ql6ma 0nqm  6a0qv.f 0al8mnpaalm]l6l0*ikuիTt'Dtn ]^q#oﻻݻvn۽n6w{nwնmߺQƅڶ%t\W:aMՑ8P(x"l_H8|pY Dt"n7l6xE;pv 0ÇݷmE<"aw 5B"apvmv 8pimm_r&&|H·<>mÆؘV" 1 +F?B%1ey!|h0 `a 7G !a 1a`0`60c 0 a0Æ` N!3paa al0a 0 0 66 2]a0a*C*M\.hW eq\Q38Ff$[:UL<4am]U_QNpmm}UWmӵÇjwU;}Tq.ϯv6 ݆omMppݶmiÇpmnmӶmpmzؗB%Ђ)Qh\Ka urDCm4"!Èta6)P݆m l6 p"<pÇwm 0ÇDD[ D}Gl20amaaÂ#{ v#i8Hv{7Oy }%xD†b VH0ʙ\V\V m[9%H>?aa a pv a6 0al6l8l2nMp\ 0ql600ma6 maal00 UJ*,@}3t!a+LեgYGM:}i;mSwwmUm߻mn"jm$t$tq&Cm0t#a!*4GAϧ Ďl= 5paaa(ppvQ 0{ml0"NmaàEEvppa 6 ðmE;)mSam#yИTGYGLH+ʷH؂(p1l[mg6%Ђ).A\~+¼?a 6  0abضlm aaaŰa J Xpa6 mc a C/a0l0arC,kX!Q.e\oe_H1l9Aiaڶm0wql7wwmۇݶicwl6n mÇp߽mvvÆO]U*x*_*DtQuDut7mnۻwwmvivݶm}mXMĎ]ݣ|"{ &/mBl3BG2mmm 0Æpl6 ml6a ml6ml2al6p؆ns.l0anDTR!/ۑr>o=7?bG^Wal7!LaŰ+DzXa |4%՟^Hq 6 0 0l0laðݰam6 0ql6m 0 pl6 aa0à l6ae̹8B/ЗXltG\tG\4NV_4Ponvnmmom﻾ݶMi.[{^6GPۄGʀ.܎q#> PE}Xa"wl0 6xE;mÆݶnOa)nOSmݰwhnNۻ CдU@QL+!/A |!. mmm;vwV۪:{9b]cB.RgCrgB)q#㈸wpmaa 0ûma 0Æapm Ç ;mÇ 0l6"""$`!/9ˣx"3g.9V|+q0t37 g;#nY\{@´=6 0a l6 Ç l6l6a Æmm a6a 3 4bma rnM?vĎHkwv{"+/ۑ#}u{*N##M8vUľ t]4jC$Qm 6nmapv  )mpvimvm"xESaÇqq{/ B*B,N%K@&o%ď?t_@? Ы*e`!6Q@ϦĺT1eDDAey5)8ap"=G*!vaaxDz0 0m a am&n6q8q\ 0m#̡#a6˘!a 8"=7B#L8rCN8pل_Q#?G1..o$ \)(-XkbGN÷vľn[v$;wqm66ml8{ mml:h8pvmn m6 4N~ޒH;uDuE:MPoDu^mnmm4۶m7i*uwi*A{:{t[Gq.,݈q#㍸Ammpݰ 8l8l6l6ma 0p mDE 0 0l6 dr.m툈fL?lLb^r}YBҹ[F͸$4OgYXbGG1#%WʒQ 6 0l6 0aw mal6aÆvmap\;ml1! `0@padܛrnMɹ7RY%Jb DJKUlgMѽy\&W"T!|;mmnmMokvWp#{weZPDt#m&.2SA Xnal7ml7UÇmml=mB(xE÷^(EmD;@\U "؂"" !/A ~K!#8؂*œ*elAW.A^ E.\H.8"qɎG G #)ۄS*! "# 0aa`a l6al60amBD Bcl0  G!8' BDalpDyGG"9Ȏdpr9;#O!.?g1#|a\VWm0ď6*o=g(`ٻJ0qvcc8~m666 ÇmmU md8cpÆ ƚj˄{zWm_uuuuuW}mmmnۻMuomޞ}vw]XKePe]KKl]؆V!T6DD#lvWH AamwwaaapÆl6m ]0Ç nl8l0 0Ã#]l6R͚H$taV}Nba^{KrF$|$t%՞^{+ g|=yYlp@rnHv 0 6 0 0 0 66m a l68v  a 0al1"3 03  arNMɹ7&ܛuBNMT>˜!#,AqZ\a]6N'a$DpwwVwwu[m[mM4:pvLM5{bʷuo]>%Ӷ?Ph B(pmana} mm݆ÿ mmauuT(wtݶiN9C0HD4ؑ]!.W#$|D B"$tTĎ|@H C DL88;#aaxE8l6 ˜"=B#0ÄGÂ#ͶaaaB#Јa#ͱm 0pDz 9C#G"9Ȏ0A˜%%'JN8q8eǗJ}:gA>XN{wM+> v0@@tmvmalmmanݍl7pûmM45P aÆ4SN|o}hlWom#zGNtGO~8 AGwwݷwwmtþN}m6uI+wwvwܺR]6-""Y!tЈ@ !mm m 0 8p 0mml6 0 66maaal8""""""AT%ՉtqT]2?r:9to=̅>C9$?$|3Cb]2bi rn'rnMHva a 0l0à aml68pml6 ;0e̹fafafr#\\˙s.eYwpzUve\~am'q+ʹGۻ"pviۻwwmmwwwvmmÆ{M]P~.8-]8eBj-Up !NB(wwm۶wSm۰S"mm]WUUNT;%ӄL&"!ĺe9W.AVSq/- rx!lA.+0hB(qDr#"al"7a0 0 6A `Dx0 mm 0l"<l"<ᱶl6l6nDs#B!8@G"8G"9ȎGG# n9DtGMD#{81Q.#0 ٸ H{8o#7Cp{pԜ0wwm lm  p|6cm aÆl6q i݅U'T*r!VGi n6Ewwwvmoii~ivn۶ۻN#ub+dt"4%Ј"bBqHOb".>6.6fpwwm 0 0Æ m l0Ç8l6mmÈ*g7.C+o>>0ВEb ^t gБ1ϡ#L$g&ܐ$9!80 l0 0 0 0 0نml6l0a 0mall6 l6a0e̹2afafs.Ds.Dr# ܛrnMɺާmC4>6CUsٵ4Mvvmiw mm4ݦi׻ Pn{ *Ӎmeuqj;*@]{݆; ݆ 8mmm?mmwp M4Ӌl"=aÇGm 0 0 8pmpDy#Dr#G"9AȎ dr#Dr#G"8g}aiO .Ln](璉bGVG1#K솓7{iM6|ADAB7&jNaal6a66aaa݆am 0aaᦚi ܛUU4Ԝfo:m)RCi$uݶm+O%׫`]vnwmm}ݶw}նmۻnM.]88ؑЎ%zt0@Y>!aTAB""""va0ml0aÆml7maÆpvmۄP@iUUiBa |mˣy6&} 3XW%՟C lTl`y+ H1#"">Ր};Nܛ$9!0a 0l6a 6mmaÆ0 0ݶm 6\˙s.e̹0'OSܛrnMɸq8q'rnMɹ7[{!}Ďq.ev#R.(@!ownmӶvimWݷ}4.]8ۗB$u" $t"$t"{ďc{HN B-4qml7vl0nmm 0Çm5OB""""DDTK@ Cv ϦWq0tqB^ }3ݰų28ĎAcɸrCN8q8SrnM0a0 0 0 0`6 6al0l0 6l aaA NܛrnMħ'xw&ܛrCrCrCCNܛrnGiٿKWMVTHNGUo{;eZaͬ%vi?U^馚mwiUU;Mݫ;<+z cm[i#evMڿ&]ð݆a ۸pm)MmÇ;NmWvNmqQ# +Ј".aed_ uWJ" FxивB".#Ea!G6Oa ">mGpqml8p8DzwG28ddB#ۗXBGCg?!NV~= c!yt7{D%W:=ng6pSv6YGJJqv,;A;mN8pÇvnmm8mwmm}UU~ûmM4Ӈ;}kI;nط[]QST#J$UU]Wwavݻ߷i{TӴpM444""GE\\lC?mDTH221Iű#@l6al6l6al6 l6aa 0l6(q d^BGI{%C=Ďt6"" $DDDDDDDD[ mvÆml6 6ab"""""""""""""""iѼA.g.mG<"_hVS;M7 } 1.KW&Mɹ7&ܛrnMɹ7&ܐܓrnl6aal6l0 l 6 6 6 0e̹fafa2\s.e̹2\˙s.e̹e0~oj7ۇU+wf死mshSsaIwwwwm}VݻWwmݶ;vnE%jHqlHA~zz3Aݦi<"P}4aa݆  (xE<"l6ܡ=ڄM4qZh;Y!0@DK%"$}ˣxV%%!T\ BaLt p@#yuE*eDKBqD!0ĺ N8q8q!@A(q(q(q(q(q(q)ġGaaaTA 6apDz6ccca Ap@'q;Nqġ%%%%%%%8q(r1'N88888889!o ?+=7%Վg_ʴ IyIkn:l7k[؟6M48pøpMwvmm mlojÇ8v4Ӵ8pOZ7klI[zaӧӟCyg Fwwwv6ӻnwuiC8M(kWlgB_I!#$ub]8%GJ=1,DDDDDDDDDD6mm aaamm6lDDDDDDDDDDDDDDD]g<%{r:ϣ GP:qÇS:LK(\Y^{+y Iɹ7&ܛrnMɹ7$9!HrNMɹ7&0a aal6mma 6als03 0˙s.e̹2G"92\˙s.e̹2\˙s.e̹&{v%֚m*(s\t\ՇM#8 B,*B*8eŕu!1%xA"Cb7":˦TʲUHD B" 2V "9ȎDr"PPPPPPP# B l6l">#0DyGDy#6al0)*"<#dtJ BP' B%'N8888'JJq8q$9!JN8q8PPPqY!mVbGCfO !#?fn(r!A4{ @Bn]&7q%8"(9g34M4ӻpᦚi\ qmÇl[mkiݬ8zjqiU 4+Om4CVQN]>&{#>K N{ww_۰mMW|;mnmmm,4/j"$t;.,l8lC:YH :qVGľظebICŶwlDDDDDDDDDDEmۆ ۶m툈mYg1/PYl¼Wa"M{dtymW:9a:5 H%ՉY^xe[ a7&ܛrnMɹ7&ܛrCrnMɻ 0 0a 0 0 6   0 0 0 s03 2\˙s.e̹ȎE̹2\˙s.e̹2\˙s0eu[Nkwp!Br Rtj:OzL59""">ӾwvwwMUmiwmv7N+#":>ODug[GAϧ:^>2":AБ;(xE?Uam݇"N ;tA?pݶ#ippQr_m0BmB ?[EDD0BbAA3hA8@ h .> t"$tKȎDr#!@DA(q(q(q(q(q(q(q(qG"9"9Ga"Qal6pm#Ђ D|"D~ !Dr#G"9Ȏ29ȎDr##r#G"9ȎDr#!/2?gbf!Kab!)[n{r:Mwd8w5T+nccma6cmqc 0aM4n8pᦚp{݅зpiNYW>G_}v껶{m۷mnۺ3(jV**eYGBm2MB@\Kĺ8;* ݆ml7mmm 툈rN#n]Ď8V%ո |og!j$|\{b]b]YľʰFБp2crnMɹ7&ܛrnHrC$ܛrnMɹ7al6a 6  01 6 aa.e̹2\˙s.e̹2G"9ȹ292\˙s.e̹2\G?{cWH Ni{5̆n9J1M˪u ûnM4?wuwOznM8m4h^w}p#ұ.D(EU\"WwvBPTaaa~mm?iiM4M4Ç_2` BǴӈBG?&p(#lM'e8BEXв(r9@Dr##G"9G"9qDr#0pv# 0E8a]Nal6a#">e!8qN8q8%%%%% %"""'DġġġġlX6O lHT^V[#>\VGJs>$|,tGBGDtᕗ #Wۆv`wwwpUVp\]0mc ۱ݶali8.&wp5\p\MmU+;m6o[DpFՍV]_u^ammݰwm۶mn>GAYYeafӆr!q ? uXedE!?!ƃ+#۶aݶnݶmlDDDDDDFDDDDDD\D6C:7LPVAg&y0an shtυyXW!O<3&H$9'&ܛrnMɹ!ɹ7&$9'&ܛrnMɹ7&ݘ 0 aa 0l0 0 0 0 0adr.e̹2\˙s.e̹2G"\˙s.e̹2\˙s.e̹"94uz`%vAӟUP.oed曇6m4TwwݸwwwmiwwmݶwvtVov{{":NtbD#UUUOUSv mmmÇm48vmppRPĎbB*\L ʲ epEX  1gH E L$8Cbqt G"9A4G"8G"9ȎG"8!6">N #8| )":#GȎdr#dr#G"9Ȏ.kbGHl#_:HCl| n䱎ٹľnB$Q3Dt{ 5GB8&Mɹ7&UT-{&0clcm6 606llŌ12n\ pMɹ7&ܛ;N . nMɽ v]p!l\:fy GGSyLπg'p\ܛrnMɹ7'p\7&ܛ݆nan aa\ . ܛrowjN . nMɹ7ojY#ڱղwmp9 +Fo\$!#a|?nwwwn۷wvmﻶۻmmvݶ4GBGOD 3=GVmGCpDM3b! e\H DBFDE!Ƅ]B݆wmb5T""""#UT"""""4$cؗF#Dt%#Kh,gŝC%\a[ HK䍕6&8w&ܛNܛqC$8NܛN%8Mɹ7&0 ` 0 0aal0 q'q)ɹ7&ܛrnMɹ7$8q8q%97&ܛrnMɹ!HrCv+gp򱺥'A6&9g3q4|ag(Js L84N?mziM8wwii*+qmn|5]ww~ r:#ݷw~ml7vvn;Mm4m6Mӻwwum.KL!hZV7>-4lD1 bXP5!""a4"tB"" B8h#Wa axE=(q(q8"""""" W?+۟+72V ͛ g aL7GMDA.C&q"qrnN 7&ܛrnRp[rp[nMɹ7&ܛrnMaaaa Rp\. nMɹ7&I7'nN . 7&ܛrnM³?l==Ioe!M7#ranWNGZG۪wmNw{߶ۈmøww菈l3*؋D|Ya@Ps2A.:0#4T" (PhZhZ M4&CaowvñiqhEDD]DGq# $t&tsѽL#qxbGPľg6pʻ6#>sf1 YTK1&1bqIɸSNwq)N8rCIɸSNS ]l6 0l6l0$8q)$8ġIɹ7&JrnMɹ!'$$9'&Jq)ɹ7&$8v|oOl<6l0x|B鎦9}6}&սϼ8wwvm ;pݷmimwm4NmM4øpM=ZރuZM4M߮$tY'M[NUWV]]wwmMø|=m;M;pM4Np~şʳ=gØ*sS71hFqqpeaKaml6DDDDDDDDDDDDDDDDDDD)f@ |D~=#ٺ;Бr7YLXl&2|8eqb_9p$~obGHN rNM˂nMɹ7&ܛrnMnN rpM˂nMɹ7&ܛrnMɻam6lnMɹ7&ܛrnN rp\rnMɹ7&ܛrnN '7'197&ܛ~ųxe]S g; *GM>!LC=gENI zVW^лU]~mmm}m{wp@i#lG[:hXaBĺGN"GV$tGm=UB E;M4:= "PCal8woB";ADDDE=;i>"+ʳV{ba  vK1/l0DIbABBBA&;H <1#GNPSNw @AD8LSA@  BwD!@JNTAaGaHrCJJN88'JrnMɹ!ɹ!HrC%'q8SNM'$9!ġㇷg-WᲦU R9 s993 *H!CB_wiiݧ|?Ӵm;^M4ӻ4M;馚i}_~*-.w*ee.uw~m߾}nwwmm߶mm \[ʜC>ⸯ>AALD|*eY4q>BGebK!www4{7VL|A  RrpÃpey1bGGW'g&ܛrnHrNMɹ7&ܛrnMɹ7&ܛrNMɹ7&ܛrnMɹ7&0aa7&ܛrnMnMp[nMɹ7&ܛrnMɹ7&ܜܓܛrnMɹ7 I[?ն|+ͱ7!swL'et.~[~wmwwwwvm}mn۶ڿwo^GC:XDuD}Pto#D~h9#±P4t%GP4GYu:PeZ#jÇwviE<"A>;M4"xE;E."-4EE=; ]q06$|X!q6pq |K"Ŝ DK(1`1@8ЗL+ i!#JJJJJJJq)ħN8q8 B "PPPCN%8qħ'N8"PCCC/l1&89$8q8PqġġCCPSCNHrC%%%%%'JJSN%8$9!㾛[? vʜ2 χٱNg0wrLH+BGesQ/=Ç8wmiÇ;i8p=Ӈ 4M;pÇᶚwwww8wmwoV_UZ# l8ZhNf8†ba3]i3Bwviiݶmwv-Dt!܎Dut}QVyDuDt쬗]G#GVhK%GOPӻpB(zE;N$(EUwq4p28iZiwwq\PDL&lW#EB#$!q^TEĺ`9E1Rh+PBҸV"_S$|A.`N888888 A@AȎ@ADCC Bq B B"Dr"Dr#G!)'&9Pq'Jq8qC$88q8q"9̹ȎDr#G"9Ȏ{98eL!n{#ďt&œľ",>V(pB]&Ҹڻii᪦iv馚i˷i5NMU4Nӻ]4M4NJ&Uwm'T<莏,;uwwwwwM۸wm!C=*ϡXQL{ 0gЉDH"#ď9B"GCЉKBW4F&nóED bgB""&͟ $|$t37&ܛ䜛rnMɹ7&ܛrnMɹ7$9'&$ܛrnMɹ7&ܛrܓrnMɹ7&ܛrnMɹ7&$ܛrnMɹ7&ܛrnMɹ7'ܛrnMɹ7&K43ټ<7 lBL1 n6Bsbs9ʂ{C4WviMVwwwwvk۷}mvᕖ|"?upGN7 DuuaNT|PDuyz;p릪C294p8www h29ÇûG4N"a3D#mNGL !6"""&&gDaS,/ġġġġġġ#G"9Ȏ@JJJJJJJJJAȎDr#!Ds#G"8G"9ȎDr#G"9ȎDr#dr#G"9ȎDr#G"9ȎDr#dpB9m aV6|!&VC*ea Wa^VD}0Dts9 I: 8p8pÇ8pÇ 4Ç4M;Ç|E^RQ {p:cQ:OWߪUu_nmvۻng!U|9J<: lDHDHNBGB"" ?q\D@B""""""""""""""""""""""""""""""""""""""""*Yh9{FrKy@rI 7{9g6h Dؙ0vܛrC$ܛrnMɹ7&ܛrC䜛rnMɹ7&ܛrnHrcrNMɹ7&ܛrnMɹ7&ܐ$9'&ܛrnMɹ7&ܛrnMM97&ܛrnMՔCaxa-m[7989I$ϕ iM5wwwwiwwwvimT=ۇ}]Z#9ui] Pꚡ#we~};…߮B(xE^M4ppv;M8ﻻBN%3S+ !ЗB]| Aˬ3b Q#eQ0B!#EY A(q(q(q(q(q(q(qG"9N8"9ȎDr#G"8G"8!2G"9ȎDr#G"9Ȏdr#ȎDr#ds##G"8eȎDqȎDr#G{AՉj+6 t%E#ۑm!#TGH ҉ @g# #!. >%AXmڬ5\wwwpT)8. TM5 ni˂฻&ܛڪjN mYzAm璥b1N:fjifݽwۻ۶v۶ݶwqw bÈq#6hsؗB"$t$DhDDDDDDDDDDDDDDDDDDDDDDDDDDDDDDDDDDDDFDDUۉn&ѻa؉B32ah3pwpg3͚f{lhMɹ!ɹ7$9'&ܛrnMɹ7&ܛrnMHrNMɹ7&ܛrnMɹ7&ܛܛrnMɹ7&ܛrnMɹ7&$ܛrnMɹ7&ܛrnMrN%97&ܛua6hA l&9':= $&* P+m5[MmuM~wwvm۠}GNmttmmY)m;]W;nU;mӻamipӶM4ӈvS@l3a\V\2teT L .ď|Hĺ9!#!#(DDG#G"8eHDr#Dr#pm#G"8G 8m̎Dq̎29yȎ29̎29Ȏ,!0 66$uH nGGy[lq~q. Krn5U'qdܛro8Rpɹ7&ܛ; TœrnMɹ7[ N rnMɹ7jU'p嚪[Mmئi"i#\H]Q;[womvwmݷvvwmwpʶ\WqqHRHA3bGĎդKGBP (PЈUno{g0EDE1 8b[nD!1D9w7$9!HrNMɹ77&ܛq;N$9!HrCNNNNwrC$$ܘ䜛rnMɹ7&'N9!97&9'&ܛrnMɹ7&ܐN$ܛrnK3,2ք2;a|=a$؛ q&ۜ3q3\WTA#miwwwmipûm|?wwvi ;mmCۦnBڷw#:P]骪UWvJUUmiw4vi >M4N"$}ۓ#w8gàV)E@b'"(+wm@ j" r#Ȏdr#82ȎDpB8ds#dr# 9GA#,DCNeyY 3\h8vq% j$tGA#ɳ$teU@K.[۲&ɽ7U˳ nMɹ7&œ. &ܛrowjN . nMɹ7&,2. rnMɹ7URp\p\8<=[ m; 1-à 0|1Tݷes7iB]ݺwwmۻwwmmni:qG *…a Ðp+镡H5>2^БIKDZDhDBGď6\Q# C 3Y llKGB" gK˝ɹ!'%8ܛq;rn%8ɹ!M$9!97&ܛܛܛ&97'Nw&ܛrnMɹ!ɹ!M$8ɹ7&ܛrnMɹ7&ܐNqMɹ7&YD+7sbٽ>t{rLs9„s]mm4Awwvip6MAݶiYVMXg+{2UqnSm]^nmiw8im?mqy"+ 8@$0سYafAl0q#GDumA Dxm8##GHDpB8!5嚷J D=R莛IӟMqG GG">@GG3q!mQ tl&&. rnMɺrnMɹ7'p\rnMɹ7&ԛ. &ܛrnMɹ7&N . rnMɹ7U&Np\8}C8fÇ"b&؊pRrFanw^UnﻷwwwݷwwD;i;(nlXl":qeu>8wAtivӿN4N?M4m4ONM4Niivo];e!xov׶mx߻w{n}namnmmömmpeY ==C ","z B.¸W9VxNvl>]0Bp# 1#8gl/p@KMɹ7&ܛrnMɹ7'7$ܛrnMɹ7&ܛrp[rnHrNMɹ7&ܛܛrnMɹ7'ܛrnMɹ7&ܛrnMɹ8. rNLrNMɹ7&ܛrp[rnN rpMϓGk5SĐhDn#ɔ9HCD#Oݻm}mwwmۯwwwvۻkwwwݶǴGH">#ڂ#=PLg‡*yGGDt<9 q]4CM4"h8pü'iEPCh?wwih8pD]E\]DZh;Aý86!#  DA#: R.B"*@q)A(q8PPPPqġħJq0S@JN8"CCJq)ħ'JN88888889'&Jq)HrC%%%%%HrCNLq)ħ$8q8PqġġġCaÇnsٸCm18`0YYLs8W9X|+*iw8pûM4NÇ8wmiwpÇiwpÇûM;pÆޮ݊U[iuGXC]RwwZ]?Nۻwv?NG@NgĎa 1 4r7 Mg!$M4Ӹ}iÇwwmiwwmiwwwmGh":޾+,":H2+]YY!w MIqwww UT*iݪaM5Xe¦8ii8Rqi:Ӷ6&q*>Wmpۻ۶m|?{b,ᕡXrCdO!7 B)$s8ľ,DDDDDDDDDDDDDDDDDDDDDDDDDDDDDDDDDDDDDDb0@33=E`!4Lgs: ܛrnMɹ7&ܐܐ䜛rnMɹ7&ܛrnMɹ7&$9'&ܛrnMrnMɹ7&ܛrNMɹ7&ܛrnMɹ7&ܛrCrnMɹ7&ܛrnHpsmrfAMFqܘshsg÷^6U_m4WﻻmU{m4~kDuO:n&ynڶ~wU^CNÇ8pmh8wp;mM;: 1##a gE@l14PODPb҈E8"8h#a9G#DpB8i̎Dr#Dr#Ȏdr#G"9Ȏ29AGG"9Ȏ29ȎDpB8l#:0g3 x #U‡*6 #ŕr99DufA |Aܶqe7u&8[.,rnM;UL&ܛu[Rp\]7&a8jqe7 ilvn[N6GQQ]]v};U_mm߻mݷvݽg+ Hh DOLFx"#F (B"""""""""5B""""""#B"""#}9C8ppQ0LyXc <rnMɸɹ77$97$9!'rn'rnMɹ7&w7$9!ɹ!HrNMɹnMɹ7&ܐܛq8qIɹ7&ܛrnMɹ7&ܐqHrCrnMɹ7_M&7747AÉQ\[%wwwvmN>ml8piiÇݶmݦ-%":VvDt9XuwUWT"uUv*i=4M4N5M4M4@B] 0`f.  C89 G6DpG r#G p#G"893DqG"8dr#GG:BGNgg ty`l10GGb]L":9+B]=gA &ɹ7Rpeنa6Mɹ7&wdIp˳a2\˙svUIp\pMɹ7U'p\VV8baBM5Pmj=؊v5N]߻mmmmPόjc 8mR 6# wwii?MӸiSn+-][/ӻګmnpm^]F!{ DF "$}AƄDDDDDDDDDDDDDDDDDDDDDDDDDDDDb5aP e#mbG@ I7&ܛrnMɹ7&ܛrnMɹ7&ܛrnMnN rrnMɹ7&ܛrnMɹ8-pLrNMɹ7&ܛrnN q94ٹ!h騉ni 7Pݶmwwwnwwv۶<ЇE]4jC"PàP"wxNT"xEqB."AÇzqqi47ІC#">CET(PT"iv;N""DDZDXDz!G B%'JJA"!A@!A@!G B%'N8#'Jq8q$88q8qġġ%8q$9!HrC!qY;pM4M4;Xp=4M4Ӵӻii7^uWwWpMۻxQ30&ܛrnMɹ'&ܛrnMɹ7&ܛrnMɹnHrNLrNMɹ7&ܛrnMɹ7&ܜrnMɹ!"Xwwvkwwwwwmn?hCj<"xE8|8vݦh8|8wwȎYL bS J*J*J`DB%8DJ*@J)ĨJ*'q;N%8SP%@T P%C00BUeU_~ۻwwww{ACF2\˙r#G"\˙s.e̹2\˙r#G"\˙s.e̹2\˙s.e̹ȹ2\- ^Nݦpm_ "wwӻݦ !%% G"9G"9 "9ȎDr#G28G"9̎DqAG"9Ȏ29G"9ȎcrωÆqiøikeqwwvM5_wn{m DDDDDDDDDDDDDDDDDDDDX)nMHrC䜛rnMɹ7&ܛrnMɎIɹ7&ܘ䜛rnMɹ7&ܛrNMɹ!,M;M4Ӈwwwwvûm\[WuUNmM4wpB A̎Dr#Dr#G"9ȎDp#88888qDs#G":gڪݓrnMaÆ\p\rovp]uUwmm΢1PDDDDDDDDDEcrnHrNLrNMɹ7&ܛrn'q;rcrnMɹ7&ܛrnMɹ7&EZh>wwwwm awwmm<-5VE_h;N61G"9G28G"8eȎdpr9̎Dp?~HCM4"1#8q)ħNS(q8qCCCrnMɻ8wviiÇoU]T8{iQ(q#%97&ܛrnMɹnMɹ7&&z,mm*XyC(p":`00GL":`#”8@0Du(pt""""""""""""""""""5 KH HKa-R-SuzUZگ]nީtoToJuzޱj$dG,T@# ip;8IJz-Ct֕:W]0I+Io6IJIWo%\=-mRM-/I:jM);kaa T p0Q-Ft]F]EtaGD\C%~DDDG<9 9C9C$KBq$+6L;Ia|%4+tm'פ]]go\k/ 'WhCPj(DHnot"PB N 6&k0]vmⶫ-oa9C>t""-ΒU{n&t]}&oj|$jI\.h$i v*и2` `b#@ endstream endobj 38 0 obj 114651 endobj 39 0 obj << /Type /Page /Parent 3 0 R /MediaBox [0.0000 0.0000 612.0000 792.0000] /Contents 40 0 R /Resources << /XObject << /Im8 42 0 R >> /ProcSet [ /ImageB ] >> >> endobj 40 0 obj << /Length 41 0 R >> stream q 614.4000 0.0000 0.0000 792.0000 -1.2000 0.0000 cm /Im8 Do Q endstream endobj 41 0 obj 63 endobj 42 0 obj << /Length 43 0 R /Type /XObject /Subtype /Image /Name /Im8 /Width 2560 /Height 3300 /BitsPerComponent 1 /ColorSpace /DeviceGray /Filter /CCITTFaxDecode /DecodeParms << /K -1 /Columns 2560 /Rows 3300>> >> stream qJL2@ l@k`3aA|)hQvw }__R2,2dB KT,6 )1d 2j"\0 @8i 0UARm0\ m6BcOM$V pO)RdPpI$Otc@!0hoČ$ % d|V VIV.kaMB`52.@@AP<0Ș/JIyx^?DDp0Jt 4\0 "x7$[\;n mL I;%տIDC A& T?^_z}RZpo׋zIOO͍)_}RP_)_ A?jcuo/i{]_zpk_a~T<p_`6e9rR?iJC`5< 0A "] ?nC_Q7q*t=4M&tN.K$/tޤrJM25r9$0_|/_65"u_ W#u84xDcI:_߮j 4 㭺^op붿IuK[dW }~~~?4A-V_$?ޒ/K#FTAG_DHWN}zO_TK??~ת_NK?DzH/I{K'ѡ^fBBv_'^}GJuZ߽'zVtC}4?mwKJIz[k__m(m.פJ/&ޕt p_ ⢚]+KIi]&Һm.ҶI-$Bj $l'ikcBV$޵N[ S%͂mPi 'RijjIuPۦM0m m Ѕ &e0L l#$@j҆)Պ(=I  S6Mc ؠA)VM *0BB"!AІ0 !aa@`0cAe"l""""""8#꪿ZUTJI, J($GY* DJ=AFA"cIT$nK -ׯ*\Tn?횋_zI.knM+JJ d(P`&LD4]u~z^]V(JS&+* fP^-R/Uׯׯׯׯ_j?ir.Eȹ"\r.Eȹ"\r.Eȹ"\r.Eȹ"\r.Eȹ"\r.Eȹ"\r.Eȹ"\r.Eȹ"\r.Eȹ"\r.Eȹ"\r.Eȹ"\r.ElllllllllllllllllllllllKjZgWwwwwwwwwwwwwwwwwwwwwwwwwwwwwwwwwwwwwwwwwwwwwww&<6 al6 al6 al6 al6 al6 al6 al6 al6 al6 al6 al6 a=`6 `6 `6 `6 `6 `6 `6 `6 `6 `6 `6 `6 `6 `6 `6 `6 `6 `6 `6 `6 `6 `6 `6 `716 al6 al6 al6 al6 al6 al6 al6 al6 al6 al6 al6 al86 `6 `6 `6 `6 `6 `6 `6 `6 `6 `6 `6 `6 `6 `6 `6 `6 `6 `6 `6 `6 `6 `6 `6 `7-30 al6 al6 al6 al6 al6 al6 al6 al6 al6 al6 al6 al6 6 `6 `6 `6 `6 `6 `6 `6 `6 `6 `6 `6 `6 `6 `6 `6 `6 `6 `6 `6 `6 `6 `6 `6 `6 =? al6 al6 al6 al6 al6 al6 al6 al6 al6 al6 al6 al6 llllllllllllllllllllllllnZgWwwwwwwwwwwwwwwwwwwwwwwwwwwwwwwwwwwwwwwwwwwwwwwwww1l6 al6 al6 al6 al6 al6 al6 al6 al6 al6 al6 al6 al6 `6 `6 `6 `6 `6 `6 `6 `6 `6 `6 `6 `6 `6 `6 `6 `6 `6 `6 `6 `6 `6 `6 `6 `6 `l6 al6 al6 al6 al6 al6 al6 al6 al6 al6 al6 al6 al6 `6 `6 `6 `6 `6 `6 `6 `6 `6 `6 `6 `6 `6 `6 `6 `6 `6 `6 `6 `6 `6 `6 `6 `6 `6 Ll6 al6 al6 al6 al6 al6 al6 al6 al6 al6 al6 al6 al6{lllllllllllllllllllllllll݆al6 al6 al6 al6 al6 al6 al6 al6 al6 al6 al6 al6 amlllllllllllllllllllllllllnZgWwwwwwwwwwwwwwwwwwwwwwwwwwwwwwwwwwwwwwwwwwwwwwwwwww6 al6 al6 al6 al6 al6 al6 al6 al6 al6 al6 al6 al6 allllllllllllllllllllllllllal6 al6 al6 al6 al6 al6 al6 al6 al6 al6 al6 al6 al6qlllwwwwwwl6 aۃ`6 `6 `7wwww6 amllZal6 nlla?l6 all al86 `6 {al6 6 `6 ݆al7`6 `aXl6 6 `6  a6 `6 ۻal6`6 caal6 alowww aۃ`6 `al7 `6 l6 Ælwwl6 6 `al=`6 {al6lم#l6 ;lwwal66 `al=`6 {al6l; a`6 "6 z`6 `amly`]_l6 6l#l6 lal6`6 [al1Ulnal6lle.al6llww}l6 6 `6 T ao`6 `64N amSlliXal6 `6 `62wwww )al6 M+ll݌f 3`0f 3`0f 3`0f 3`0f 3`0f 3`0f 3`0f 3`0f 3`0f 3`0f 3`0f 3ӳal6 al6 al6 al6 al6 al6 al6 al6 al6 al6 al6 al6 al6 i6 `6 `6 `6 `6 `6 `6 `6 `6 `6 `6 `6 `6 `6 `6 `6 `6 `6 `6 `6 `6 `6 `6 `6 `6 `6 Im]ԴOe0l6 al6 al6 al6 al6 al6 al6 al6 al6 al6 al6 al6 al6 a `6 `6 `6 `6 `6 `6 `6 `6 `6 `6 `6 `6 `6 `6 `6 `6 `6 `6 `6 `6 `6 `6 `6 `6 `6 `6 KH al6 al6 al6 al6 al6 al6 al6 al6 al6 al6 al6 al6 al66 `6 `6 `6 `6 `6 `6 `6 `6 `6 `6 `6 `6 `6 `6 `6 `6 `6 `6 `6 `6 `6 `6 `6 `6 `6 `6 nZB_ l6 al6 al6 al6 al6 al6 al6 al6 al6 al6 al6 al6 al6 al8E[llllllllllllllllllllllllllNkpl6 al6 al6 al6 al6 al6 al6 al6 al6 al6 al6 al6 al6 am`6 `6 `6 `6 `6 `6 `6 `6 `6 `6 `6 `6 `6 `6 `6 `6 `6 `6 `6 `6 `6 `6 `6 `6 `6 `6 `6 nIal16 `7 al#l6 ;lwwal7`6 `)al76 `6;l6lwwal7Ule0 wwwl6 `lal6lwwSamlwww aml6 alwwva6 a`6 `Pgpl6 Klwwva al6`6 `¿al6 ll?al6 Ã`6 `6 ; al6`6 `6 ʇwwwpl6 aIFUllowwwwww;al6 ö `6 `6 ۻgpl6 aڶ `6 `6 gpl6 alll!l6 {*6 `6 ceCl6 al} al1`6 `70l6 6 `6 7wwq6 Ã`6 {  lwwpl<`CLrT df8aEj <H c d/ppi>Nw'KOK:_u5< ^ !c L/Ρ{_oM_[Vn~ZTm_ K]P4C@a6e A;A M"? endstream endobj 43 0 obj 19654 endobj 44 0 obj << /Type /Page /Parent 3 0 R /MediaBox [0.0000 0.0000 612.0000 792.0000] /Contents 45 0 R /Resources << /XObject << /Im9 47 0 R >> /ProcSet [ /ImageB ] >> >> endobj 45 0 obj << /Length 46 0 R >> stream q 614.4000 0.0000 0.0000 792.0000 -1.2000 0.0000 cm /Im9 Do Q endstream endobj 46 0 obj 63 endobj 47 0 obj << /Length 48 0 R /Type /XObject /Subtype /Image /Name /Im9 /Width 2560 /Height 3300 /BitsPerComponent 1 /ColorSpace /DeviceGray /Filter /CCITTFaxDecode /DecodeParms << /K -1 /Columns 2560 /Rows 3300>> >> stream qJL2@ l@k`3aA|)hQvw }__R2,2dB KT,6 )1d 2j"\0 @8i 0UARm0\ m6BcOM$V pO)RdPpI$Otc@!0hoČ$ % d|T+$pjK_&0p   A (AxC0a1>^3c aLphaQpDoݢ?WuA| pޓnȴaMVA.%O}m$ML> 5T za꾷 Iiwxқ U֔0"{zWtOھǿ:Nzau֕}iK}RK˗7A_fSֲ?iJC`5< 0A "'0@ÿ܇^nUozhMڤ܉wxnԎ_ÉQIF/I`Ӧ/_Uz!:m]_:-_ԎaWWOzJDA"1I$/o_K_u__"߿K7p]Kw_O}2N?Kt a?1 mҷ _H%^G___ƌ#Ԏ$/H"BjwDKKzwv?/ҷ-R/w_D'_o$An?_oZOBͷtm$Ss݄=NInӓ[/^]ho]}}$-//WizkjVi6}%l0KmOZZ^MUkW]VI%MAM4mlvZ(J66W% %i&pސJA-ljM&i:;KVVM $Ӫh Am/M[i.MPa4F)a&a$T&1NQ@)BM0h5LPA > #a1 60`adP `XA!""TMa3Paa *C vm(jc1h2C!PgU +:g2a>C!,3 Lg 6B$CCH RpK#00>H B !ІaAPv4WA??j.B(A 0z/M6-clc-l,4l4 ]7* Xj 1^ |<&8>zz@ 8?RGTy>EpD&/x~5B꾼"5/DOz^0[[W킅1^\+S… ߕޡJ`#=P?PAB}`P@PF xA' 770 x~Kߘ3//C_q/IIxPCq ႄ(n -(bD0P`v80U!!GxPΦcࠜf>TAnz<`QQGd#Fa| C0hfti/{a=m$?XbPT9=)񂮼^B!(O" 'BxPPA0Cʎ{G #=P9 >4uPQ~^tr "3K_%~6N׺kZ >& 0Ӄ qƆ v 0h6NiCXvNfeׄ`I6AT`aGJ6*)4haQw@ "ªט:`:sGs(> ls(\Ә:0:0u`n`}{0~z^"XЦ->0V/bpaXv !L[606 РCbb)60q@1! ȆZ"!"  s@B Ɉ. DlN Bk6TX  K"#""""""""""""#jfH3 }}Kl'OA࿈_ȴ[Gٞd!C=k_DP82]o z^T\<$t_Eֿ{XÃ_-wQo)<0<#B#d@Ld!\Ea?)<0.F<y7a`50LD<: !(35gӆn?24PO%4LaLD9lRc' ݅?x? ! a. ȀBUB. ACCPD<ak !q vN. 6N2'yPNd$\PF<ᢠ0'N:* 8h' Q8a#A8p8 eEPN 6N:\8/ϫW}Z|`㬯P^qOp^gՇ/|~G[^1%CA| {^ Pl0 2|aR 6I` *Ca bPl0ޗ<`Ax(NyEDGT<'  ӆL<&M~h | _:K_?X80 aV7 P0b Æ`p‚-h0UP/ a ʋ u8v *EEk pPz 3?` _#xaVb^ _X?aAƸ. *. 3J„ˇ@NP EpeS$|*/ |oG  pB;! >5[8jp^*Æ!z}F)Q}:8m]R4u@s@!/W־kaY߯}_ȭ%>d5aV0ma *p‚`a0]0[X8v ưp­i(-l#&YP G&T0FH2*(Oa P# $ No7~C [ :|0uDuqk/_{xb,8plE!LRB؇J ! *)T.K쨈hD0PHl3@DA"K2bDC3B!T, ?o]{׿|G8x,kpzD=xX!^ADDqQdԙU5O88iT4 h6 ߯ fAd(ڌt#"/T+;$]c~<. )08ddH0SYdTʃ ̉d" 2 ȩB0d"#:Tp""3"f*T*! P"0EC$3PfF0G>T"a=sBzs :~Az_s ׵]]W__aX PPha dF84  %0g2?gPgГL/B  dk| zE xW(Rh x84• aBhÃA ",0a>O?OZT__W\¡Ϭo?F/0c b qIS> ʈwaJʈDިAڕwD>Ԩoס'!CD.Ȁ!`v$+!C d0\n0_ơ D. (_4q@q <q`@ N ǂcO?~XX>#Qn\,=8/ ` 0QazED'aʈ8oaʈ9 rx>* s s [m_?tvF^t?caB@Xp q_6A ”kaJ((#P@H0D6IApF*?Ԡs ou7}>~_[ 0¹,0c \a\GDvHG k"_bȣC?_P(!";!8ON2p* aˋ. xR2 p˰٠&\J;. DlN6\;<* o>#o=~]>xO \wDq""D~"""""""DlDDDDqpe(O L𪶾.`0ߧA?xDE2gE%-'AޫAFTdAfN6TD6D2MC*LaNLd )O,H?a%:a=<Qx Tm0G`Hh' "1"iPΐ@Ag(A<3gH `3 ϠG"]k\/ao\Ǯ0w0:(x\/fpE:]]}_׍u_ X 0 3cPdh(j>P`2? 0SA$ϓ(i80J20pdT0`FPЃ-x0 B(@R0FFT# 2 亂YP@:ʄ'0ED`D@_eA8GC0Çf' 'х Rqd'N 2paIƁd1gp2p dvN*, N|zzzq�}qxA=hDCEDDEDDGDDDDDDD V\_4p*k?~'@Al"?"aG~#񑑑Oj/_88n  ~ tQ,ۂF70u_u_G_t/ݰ…X`{{ (P]6  …U`.*8d3 NF6 xQF PXSW R<ARPF4_*0s ׵'_~/֬ ==a0 { XaG ( بq hadNqqDP*ý^$SpEDC DakĞa#@PO"fp1Ne.pNA'rT&aʂp' z ‚Ǯ]?=}>={qЈ!C_xA"D< "/DDDFDDDDDDDDTDDDG|a_&NpTs~!/<TdF0@D9A0f F"{s _Ϯd}I X29,J'0|B Lw*!@k ;mT)„i•61jl4h)KZ0 ~Ϫ밷]t_ ?D@@aÈ*"؊#GQ`ЃbP!(* PNˈvT*  &NQfA1q309PN$x8eaPN';<ˀX2p%h__zzvDDqB^c8"4!j""""""*"""""!DD}&BI t`UZkhEEy%k-pq?Z__ di":_^_c@Ez_ɂ/" _#:ׂ }Co]I#;#D TS^8`xAx |>@Ro)vXA$Ao_[0Q ;*0i<22%EBWAl2s\d(2ȃ)F2\p$<p PQ0ńG"? F" 0Pf F@p@A#? #FF0Þa1N]o/V01] gO0}? ~N_ײu\L1AA`lW *g3 0x"$ phA hI4 BV0UI X1+I 4D ^<+a0‚bR(|MJbR CE@A @0L ʇ‚aT7TP n<" >u^>./޿Z_/I|ÆUXqIh$`U EF~ ^ `0@AJ; l(_ _!t ` 0VCႯ AA8dp`@N'QeEd(R^TA8' ;P_#B8>B,X/GB>"?#GX  BBQULxBྰJ cX`p`T`ޟra<A}AO`\//!C?u둵UbtFwΟFW888֭V UB8?h+pZ`cBq];u‚|0m@l4u a-}_a]~al}WXgR%0 q\q"8xB!(7Qd^]k k0R]wQZ\nZz/%_K/YgfB"-ƌȵH(ȿ_ ,~ (./>Š!J Bz ?%\0,5 J>@!|#e2 yITu82c #"&2!C)<.Ff(a p@ pd. f)!(fx.` BRv0@{ "3 0P@D36N.\4N' "pÚF p?T'pݓÕ*A2pݓPNp8`ᓌСNE"pzDH;H^_^׾_i*#pX8]?W}_+fA>GCfjPOڍ/qT0P4!kdH1t`)6S T!1((1M01ka _*a4zx@APLA4A<&4M|4PAM@___8uE ׯX4 T. n*\`a~8Bpa.ŠpՂwj AU A( ~((OԨ P> *.T_/?0a`_x??U8ww] A~" ׸5";aÈm vwd(@Q'?ʌ2pN!pq wN PAށ?B?X8aUBS `a  /aPK jp\*^B;u 7p Px(T…*/PA#?Ϋs~aɐ੭&q8pkq ;aKm_#4xúTA( mDۇpࠁp>J=P8zڏ{c kO>}fj }^5QY.c`hZXB |`6!ű |ab T. X AB.}4Nda@ FaJ (DaR* ‚@B .z"8xB!EqqDED=DDDDDDDDDDG]-h,4_J_-L  A #2x8*e2;Ç%8}QyQaOA;u/k[ׯ33_y]`f ࠄ|DX`papP *  rL !paVCKp 8'nqxPU@OA8''"pN0PAapN BA8')_YA??~wx'Ã^? pa,84J 0997AΉ 8z@wp A҇ PAUVauYant߯&kPÆ. 0LN0U:0V CAIm[  ʈmhސPU@*5@ܨ/`$EFQEFAÇa0FxP1gg?_amk0 6asu߆{\: 9>~0Gaa՘;GlT[wlEC!qA~?qP'qhh8zðEC T8p0d\'e=cd:J;*  gLt3 *0DaR*eA1A2=\'!>/E/!8#㇄"DqDG laAz }`}d ,Te#* 8x"3EG -޻>Q0`1f/ƅb*6/B22p8PNDqC"""?宲8 ELFv芳egd^ v h'AFE4UUYX_6#p`(*쨽 r)" yaׯuϬo~?k?? *k  p``7_paW x* v TCʈ;h?u)&xPQp a_aa0 كb\/bV B@/l/ Xpk . Æ wAM@D?NA:'=P8z 8 Tx p2p?8 '.TqX?">"?U#~?Ap^a0PA[a\-  a{8o07ʈ;?"3xAoTA ~k_Xs ׹_=zo__ Æ `a[L.ɠwݶNk& -&  „:AaP猨~4Tpl=p;J)Q4(@ l??s[=0o <3=}~a/JQNa5\[ `0un`N?rqKGF":,G,qS/@ 5`v؊ؠ(V"P.1 b" vh&D2pp4#* gSF9;4C'9 hlL' fPUAe&x 24CB(21DD? Ɵ|Cp>#ЈxA<GDGOEDb0|GNŠ4F ;Gw80uF.P~ m&_XPDQ~ aAxDbpwF @Dx~?______ 0_0`5Ɋb Pq{BC CT2` `l;+/S8y8'J'*PN ?* 8ˇ' TA8'AL0_uGDD|DD 3Ev [} Q@,ܘ ax|=`׮0U/C`ppT;Bߕ~D< P_|/ :۝;/t:~}W/8[??Uw`K‚n qPwl@843M OOyQR fP6?*&݂0,6\ }TA(Q}3fa|3x_ >[{a\S ~Qե~ 5'y;(4L5,\bs_ / .`N`$WW TqSC @Cb*6"k zV[uUPf0be9pP* 츃'2A8A8N3@PPR dL 8Z]DC5#"/!oDq GD8;I6 ."#""""""""8p H˴TIC]#ǭ/ߥŠ%&Z ֗ #_̯;Q=VW!" <pr)9(Q _X0[ׇ=J|_% /+ϣYȆɌFP2^#e2]r$I!u!/ ЙE=:S! ðI] 0 `qͳfA0 aTJNB4*N!*L" x ЩvNEA8ED჆N2DB8xcp8rH0s /~_z{U(=}Z<`FU9 Nq\<0J86A2\w&ˆTXiA hZX6 %І)Pbl hL A0 z 2|5A# > pEB`&@4 /]CW>qK0 0U[ U ۶0h*\.xPj wj AU"_ `''0_`?_qp`vGXpaVB,3P.!ð]b#;K'˂p< j\@JpN/PA. 3E> pTCB'-/ w>GD#?. N,8rb v X80cU M  xKA=>~?@  v AUJ Ώ:?qgl /pNa4 [0 aAwu!&݂a, 8ma H xP@ܨÇ ;:HFhwi,%>1fjڏ :sO_>ab (*@8q n(-A.BlE1@`еPb+5zN.gU83&hróF*/((T2x ' T,DwqqDEhDGC|""""8A{0)ǩiNm"\@0oc24HO …pvaT N?Xp5<*e% \2&ΌY !hdCgD)0D=A DdNf`l`D „BCvͲ$Ca" pdc( ǓA.0;aѠ"pF :*P\B.2qED;pqEF"PN.__0,eSϫm+s 0u`_ag?1-% vx(0 ZLx!U? ZO $àh8y>T0O4ʌ& XjD?h<4_޿u~SU¨ aà U8`R0*.t8wpC򢊋ݯ~}~?_=9__?C x? pd/P aF x?"25V$E?pP?'+8'~88 ?8": >GYG?`넡;wam;`/waU'ÇS:*0DþCTeD8xP_b^α/j=k_U0XpmsaaPX4 +p0L. ak&a [6I3F xPNTZJ(*6ʌJ(@?[>a-uca0s xg`ǹGDuON```' '|s /y8YDu(E SlEA bCV"؊8 D# eXdT˄jP2p`‚t8Ae&\Ap8GCgQ ' P4-PN<"!C^"8z"8GDDDDDDDDDGr ᯈ#=cH-ɢ0C%dQ77'p *?%%,8~kW FFFK~~%2 ^:pq tᛏL5SzMS)S 0tL"G2C "CqB00Ba 0BB. !!!hC8 %P<pâ6N.p!zAN' 'NH d Q8  d'p8Rp>Ó8ld œ>8+p{P~C0l89z򽃏+.QOmEQz>9?==?c a%6U >  N`a1xvl$ƛL xAzp @R& /w}h_m}_W_x]k׏ޱ/X`p‚-w^ ajXB` AA"5^TATA84Aqdb c `X`p‚`q*[XBxoTxO&| "1duPo/aY*?_B']a *X8aAah0.*aY3`aaA _q xA;a 0 nA2N;PF# " AvT0P^TAە}h`:":y8uOp<##0w:Ә9C`^^=[s |~_cb8aaJ ! )  A*)8Ш68lEq a&0""(A 2!ge@DQfPlZ%%&fDb! sge_DDDDDDDDDDGDD̨h2ljW~aA=~u%F[PN. "wv3Ta# vMjӇBmBO*!xdaFD2, 7 0iaLXm60'P6.|?oO t`0iᄞ &wWpha4TAAEF h& ~A0E0k0ׯN *`Uh0P`/lpq ` `B 0@Q Qp @  `N 0B8p؆(bB;P(dAơx80p`|80NN.8;ԨѠT eP; _%5Qo*݂]aHgqd^׸׆omJ9„}JzH9?W2}P6 <9?___uNE "}84Ç[A+Y* :L & a` /߂1w~ô, NPzjTAÄT'r MT&@C@a*.H _<`a:{:Prp by8G1}xØ^_(*`X!(V!C CAKFXp.b!fD3@DA\f- 2!& E"j1ʀEDDDDDDDDDDĜe/ޚZLn<x_^w(_/:D%eEVNtGF  aS4,/ 98HaT:.HN/:P{Y_(xNaPߘ_Cj?&4pi7Na}EB:ߪoP^80N /ꠠp0fqq <aA2X$Te ºpaMTtutw _u]?``i v* a5c l#G`<_^=P6) /2 "T0C?H!-bk0J@8aEk!O֟Iz?$=__K XK\?( Pi_ﯾPkOzuڷ*iX4@at !pC endstream endobj 48 0 obj 24171 endobj 49 0 obj << /Type /Page /Parent 3 0 R /MediaBox [0.0000 0.0000 612.0000 792.0000] /Contents 50 0 R /Resources << /XObject << /Im10 52 0 R >> /ProcSet [ /ImageB ] >> >> endobj 50 0 obj << /Length 51 0 R >> stream q 614.4000 0.0000 0.0000 792.0000 -1.2000 0.0000 cm /Im10 Do Q endstream endobj 51 0 obj 64 endobj 52 0 obj << /Length 53 0 R /Type /XObject /Subtype /Image /Name /Im10 /Width 2560 /Height 3300 /BitsPerComponent 1 /ColorSpace /DeviceGray /Filter /CCITTFaxDecode /DecodeParms << /K -1 /Columns 2560 /Rows 3300>> >> stream qJL2@ l@k`3aA|)hQvw }__R2,2dB KT,6 )1d 2j"\0 @8i 0UARm0\ m6BcOM$V pO)RdPpI$Otc@!0hoČ$ % d|VHDo?U ~P8MLaP a < AALO%$/"X¢8nS%`\:a.T\<J-.w[ъ?~M6KIUm$O[i? "M!頓[IVOת_pT/}wxқ Uu %Ȣޕ$ Zu^W\iWq_f._!|_͙Nf[Ɂ?MZUA8A aq ?p!ׯn[&v܉wxnԎ_ÉQIFM7Aj:-_ԎaWWOzJDA"1I$/o_mo,Ta>_~ K[z_}îu',v^$꾿KKo7_㥶JK2CH%^G___ƌ#ԎM5 R$/H;_wv?/ҷKIޞi~[I [u~[_4+zHWHVN>=KϴI^ܝ9:z O}&h~Wk״,Q^]I֕iZ[ZM*=_Iu[ ᄾAE5[iuVVifծi]vi[i$V!5i6iij+KIzPVoZ - 64icnm$PM:mIM6!mZa5A  @ d SP:E@ 4A S6Mc ؠA)VM *0BB"!AІ0 !a0 @P0BL 2ǃ6BADDDDDDGuU_ҭ*I% $H% #)]! -Dz t mj^5j餕n$uöU6ۿH=Sz֪V}դCiL0DqE8 `:޿W_ҷ/]RJ RJ%(JPJ )@DB!iDi* JJjS"RX0EBgj"+UJWV+r1!t`70) PAB?4l`j+ 0[KJ]iWVMh/k]SOwWh%M [uۮ]%UbV$AߺQ>vZ7GwT ~}.֗zJiwyP莈ݥQioZ{o4Ui:^ +}mi:Xa'J[I1A SP0 aDDD$Yߥߥuҭ]ޒnꭓo{Tr a3'IJ Kt"<MB >CS_NhK*5뤝*}jjAJћ6G7E2@ة"N3 N ~xA}L&k~c=V-+O5ny! ! G(r4ȃ;D(rcauIE!Zi%}!,Bm=amDZHCvvۡn^Ms0UMSvۯWtwIꓷ0뾩_~ڵ:UPqduۯVnG(um$K%Z{} ?mK$J:z4Sˣޫ(va} +owH7-'_T^u+'V5w.TiW]ݵ1Tcu%MtPK~ui#:IGA;l$3Ӷdt-=XV"Wb%U SRBt K)n!; iZޡa6ajPiUܮ]aDMM D++6J+UU+tU}tKҵuK鮻EB.C#获[duLDCڃYg2?,Zf6#莋:.07f3a":.#莋:0":0yc1#atGEDt]фaфmf3f3:.#莌f3c1f#莋:.##c1f3c1f3#f3aFѴo0#莋1FѴm:.#莋:h62FѴm#yo1f3#莌##h6h6hc1Dt]tGEDtaDtc1f3c1fDt]tGEDtc1f3c/f3:.07f3a":.#莋:0":0yc1f#莋:.##c1f7wqƜiӍ4}iƚjq4MW4U_UM4=$Ӹizwiƚii8W85U_8Uwiƚk4MW~Www]{]uꪱUW[]~UU_NꪝWw};W_ӫ]_wwUU{UUWwwU꪿Wwu_ @ AA@ A @ A@A @ A$ @  A  @ Ft A  A @ A  AA@` A@  A   @ A @AL@ %A AL@ @ @ A A@ AA @   0A@ A@AA @  A AAA@` A@ A @ A A  @ A A A@].UUW_UW_WW]UU_]UU_WU_Ww_U]U @* @tDtDt T(pDtC E* DtCC @t@@#@PPP@V(p(pP T.#@D} AE*GA8@PEL8Dt*P@(xHCGA EDtC E* DtCC EAAP#P TEEE* @* @CGAE E 8":(pDt @* E"DtA@8A8A@P T": ճEEE:@ :PC@@ T(p(pP":@ TCC# T@P TCCC@P@tDtDt 8":@"# T@P":P@*G@PE*CGA8@PDtC P@C AGA A@*P"# T@""@@C@P """@P T(p(pP T":": Dt* 8":@R@nqۻm\cim۽qwqQۻmJ6nm6wq FiM۵i݊TTUӍvn)m]ݶwj6n\mn67mmmcm۸mn!+wnvnqӻwuUﻪwwW~~WﻪwW~ꪷ]UUue:xDtUtWuUwuwUuOWo`  A @@ A0@@ ^ `A  A@ 0A @  A AA @ A0@@ A0@@ A0A a @    A@0   F0A   .A A A  @@ A` AA0 @  A @ `A    @ H @ @ A @    A @@  A   A0 AEwwUww~U﫿]Uw]]~UwJﻻUw}nUw]WUUwW^U߄TZ@####P"@":(pDt*P""# XA8@PA@CGAEH"GA8AE@"#":":(p T#8 DtCC E*GH*pP":#P"#A8":(p"# T(paPDtCGAGAE P 8":(pGA8@)"#E*G@ T: 8Dt*PE@C#  ":": T(p TGAE(pPD}#Dt*P@CGA:M8D}# V(pRHDt*P TC E*GA8@PDtCGAGAE )GA8A8@PGA8@*G@ T(p T#P"" TE*GA8@ @(pP":##P"#A8DtC,"# T(pP":*@CGAE E@PDtC E:@"AC #  P"" T E*G@":(p T" T@CG":KZiۍqn6b8N0mSmZa m[qobn6mڷi۰qmi7ۊۍnmN17qm6miۍۍmmۇwqN1qVۍmTmۍیmcn6cn6pm[M8÷n*n1vN1ÍU_wWU׻wu]{U]uﺺwu]~uUҪ^]UU~uUꪽWW]U{TA@ A A    A A@ A  AA @    @ a A AA@@ A@ A A A   A@A@ AA A @A E@ A* A0AL A@ A@ A @ A@ A@  @  A  A A A  AA   A @ A A  @  A@ AA A@@ AAAOUWwUUw_UWw]]UW^>UwUw NU\(U^ UWw]NDtN(pP" T#P"@ 8":AE*GA8@B@"#E 8Dt*P@CGAE paDtC T(p T@CGAE EPDtC @8@#":(pP" 8Dt*P"# T(pP":@"@":(x@CGAEDtC 8":@"#E* E:@":(p T#":@"*GA8@P@8DtC E*GA#P"@"># XA < T# ZP"# T(pP":@"@":(p T#P"GA8@PDtC E(GA8@PDt#P"@CGDtC @">#B@"#E 8Dt*PP"@ 8":@ T-m؄ammnۍm6n6n6iCn6mmmMmv!'qۍۍq 8ۍiqn8ۍöm8ۍqn6ۍէj҈I8mmۍۍmmsHۍn$Q!'qۈIcqozwwU꪿wu_wU^꺭WwU^uUNu]nwU_uU_~꺯WWꫯ]@@  @ @@  A  @ @A  Aa A  @ A0  A @@ A A A @@ @  @ A A@ AA0  A   ˦ A0 @ AA  A@ @ @@  A  A0  @ A@ WWwuwUW}Uw]U߾UUW}]C GA8Dt@ T#P" 8":A@a8@P":@"AP"@":(p"GA(pP":@"+A8Dt* 8Dt*P@CGA8@":C *GA8Ax@S@":*PC#8DtC E*GA8@P@" 8Dt-GAE ,"#PDtGA8Dt, T#aE 8DtC G E: Q @"#PCGAE ^*GH@C E:PE*@":@"# T(pP":GAE (p X@N*GA8@P":GAGHPDtC @":#a(pPGH@"A8Dt, T#h":(p XE* X@Zm5BN6m0Am8P Cq08aN08ipӆ0¶0 Iñl8iil8P06Vqn6l4 $8pa Cm%6$ۆ26ӆIÇ 8nqӇl+p 8isDӇ Í÷ l4 $08ahuUUzW׫WwUUwWUu^WﻪW{wUwwUށ`  {` A E   A A  A@ @ A@ @ A @ @aA@@0@@ @@ A0A0A= A  A    A @. A A E E A0 A A A U A @$   @ A    @  A A @.{}wo]~]۷]ݿWzwwWw}Uꭿ Z@@UA:A Z@-(u@-SS-'tGH,":KPi(z"J҄P#T(t-RS@B(uA: @$":"@:@#C- jDtA":@">BGI PaҤ-RP(u. ҄P":@(t#Pa(tE":: X@"@(p E<" PD~ D} i HCGI(x@* E":UP 0AaL$J$ AC C C@+i &VL ( (AjI`P+ ` ¶PIIpµ % % @ JIJ@ ; 2A&AZT@ a M5 A AX a LA\lA&a aXAVH L iP@PPL aZa&i}W׻wuwwU߻wU}׻Uw~}wWO߫]B A@ A A@ @ A A A@    A EAA AA H @ A  H@A A@ A @  A @ A @ ABA a AP HA.   @   AA@ @ $ L A @$A A AAA A @ ZUUJ]RҫUII**^XU]BZUiu]*IUuI*JRUҴWwuK$_aRI*^U}kJ$%KI+ W  ۄ O7 +up^+ , X@ ] [ -n+@+O, WxE= Wwn] V @黸@Nx@\ [@] V@+ ;wva Ww| Zx@]{z @L @ @a A A@ @^a 0$@ i@ $;aJ@ a C 0Ai% 2 4i@ @$  @ <0L 2 0@P @aA$i 4P`$  @ 0 A 0Lg\i I A&  0 A 0 4 z]UW]W_UUUuUu뺫W__WUU]WU_WUW몪WUZꪽU"  U@ @*2(":":@"EX  E ` Tp*p Eg@  A N `vG`P"@@*U T TG`   G p2Dv0GC aa8Dv]h AA=a "@.:VUAA8Av"; @*{*ʰA` @#; ";#dt@{VA@(p]2:*@8A8"@ wv8mÇn7wqۻm7pݷn?ûmmqm=n;coVݾ;p퇽5n1om~>ݶmxݱm":KUUR$ꩪUwUUU]4J UZUWu.һ KuUҺ Ҫ JUUB(tUTi/WU,":WUU: TҫUUUUI, WWI  A@@  AL A A@ A0 A A@ @ A& @A$@  A@ A IB @AA&@L  L   Aa@  AA   Ai@@& @&@ A M0@ Aa0`  0 ̖A @   @  AL A A@ I A&Iwww~wuWuUU_wWww W TC @P#* DtCC$""CGAGAAC@8H*(tCC*":": B TGAGA@PA P ]9CH@8@  @$  (p E@GA@ DtC # H*CC#t A@"""" H A""AAAA P@ EHA8A#PDt@##h":*@PE@"GACCCCC@@P"@ @ tG&$": TAA8 A (p 8@"GA GA8A8A@P (pP  $GOUiwm5+xl+i;K;;aGTj8U $&6WaBM4𻥊Q wOam&ޓ㺷([Iiw\qQakPGmBQ8OwPwWU}Bww} X@@@x@Dt:wu[p]ն WwwVwW]wwwwN XDtzm{ށ` 0A A @A&0A A A@  A&0 @ A A@a@ @I@ A @A& @ @0  A0A` @La@ @I A@A&0" @  A0AP`$@` A @`@  A @ 09-@` 0 A@ @@  @0 A@OﺺwU_WwU못UwWw֮wWu{ꪫU_뺺w]*zU]UUUUꪯUU @PDtCDtC EEEED (pP TGAGDz8Dt*PE* AAA@A@CGA8@PDtQ@(p(pP": E@*@EE"*#": @"(p@*GA8AeD ">#PE ###*@P T(pA*(PDt": @Dt*q(p@":": @"@":* (pP"]2""@PE*G@P"*P@* p(p* @".@ @DzGAȎSG #EEPPDtC E*G@###Ђ@":(p@* A8@PEA^\mn7w o cn iNmmnw qwnڻnwmcmmqmqnӍicwvݻw mmmP7j7qnVmq;UVwuUTꪷwU[nUUnUBwWPjUUj^up]%UU.]UR^ꪪH_WuuUzUV꒯A` A A@ A A   A A  @  H   @   @      @  A @ A  AAA  A  A@_ A A AI a$%  @@  A  @@  AAlj86v8 AAA A  0 A  A@@AUUw_U]UU]~uuߪU׫@@r3#B8x2sU]UUw]#@#P"@8@ p T# T8Dt*P<$(p T @ DtC Dt#P"(p TE*GA8@EE:@P":P@C E 8Dt* 8":A8 A"#t*PDt" T@C# T@ A8@PDt@P"@ 8DtC E*" @"#E ]@ T(pDt* @"C 0TEEEAt@C@CG@PDt#P"#E":":8DtC qA(pDtC "@":(t Ai𝷮p# TE@" @C E".GAGDt*P T(pDtCDtC "A8Dt#wma]cn!'mXn6یm$m\mۈn6qVavm6n+n6mD$6m۵qnݍmoN1 FU!'qۍn6q4/]❈A[m6\mvڍیmWq_}UvꪷwuUӫVwuUwUUꪷwuUnwUU}nwRwwW^X` `  @ @@@  @ A`  @   0A a A @  @ A A @ @ AA0@   A A A  A @  @c A AA ]0@A @@@ @  @ @   A (n @@  @ A A@   @@@$uUw_]_~uW~UWwUwwWWUwZUW}Uww 'aQuW___ T X@CGAE(pP":@P":PDtC "ADt," T#  T(pPD}tC "#E 8D}@":(pDtC EE:@#@"@":E@":(pDtC E*GA"#":":(p XA@C#P"GA8@ 8":@P":@"@":(p T*PEE*GA8@P@"#E*G@":(pDtC @C# T P":#P"#:ePDtC Am(p T#P"GZCGA E*G@":(p T#":(pDtE*GA8@PPDtC "@":(pGA֐Mӄ ":(p"G":@"PADtCGAE  8":(p"#P"GA8@PDtCGAE :#Uq۸ۍ=Ӎmlm7ۍ N6qin7n6qqn6qqn6nӍmqۍۍEۍ6mҍۍFqۍۍmcn6cmKl!nmqVn6mCn6m`WﻪwUwUUwwUUuUUUnwU_UWvWU{ꪰ[ A  @ A @ A A @ AA @ A A A@     @ A A  A AA @@@ AA@ A A @  AA$  Aa AA@  A A  @ A AA V{c~=0 @ A@@ A A A0@@ 'UU]UU]~Ww_UWwUUwWWwT]%UwU&"@":(pDtC E*GA8@PDtCGAE < T#":(p"# X@, T(p ":(p T@":(p"# T@"#tC "@":(p TE*GA8@PDtN8Dt*#Z@":@"G":@"# T8Dt*PDt#P"@":@"# T)E*G@ T8@t*P@CGA8@i E 8@t":@"#Dt-.@":ց X@PDt#P"GAE 8DtC GA8@PDtC E (pP":P@$ }n* 8Dt*P", T(pP":@CGAE < T#P"(pP":hP@PDt#P"Dtam6n6n6m$cn6miVmqnmm6Íی8ۍmۇqۍۍqqn1mmиq6mn6N6qq6n6mq(QS8DuqM8ۍm$n6l8۸یmwU_wwU^wuUDUowUWuUu^_wUUuU[]:o"#UuwU_  @@ A@a @ @@ A0a@   @ A FpA0@@ A@  A`  @ @@ A   @ A@ 0# A Aa @@ A@a A    A@  A`( @@ A@  @ @@ A A I.U]UWwU])uuwݶHI}=E~޷UWwUwP" # Z@"*GA8@ TO#h":C-#a8@C E, ZP#P"@":P XE- DtC A8@ a#RI(p" X@a8@GHP @":(p X@ TPDtC GA8@aD~ HCE 8Dt, X@ Z@"#E"?@":(tGH$A: a#h":@ Z GA@":"A8@ TO"Dt, T@t8@C , X@ T#h":Dt##Vo8ADt,"(tC T(pa#aDt-GAES(ph"# T(p TO"m4¶ 6Ӎ 0m4·l+qaFmiv%il *6M7qqnm4 n6NVn6n*7v݋NV˦m5i}vӍ 7m8چV¶in6¶c#:M8a&Ola[ݸM6V·Pa[ۍ 6˧[UW^UUUWwwWuwuU_u_U__uU^ ,uE#uUwU_@@   A   @  @ A A @ A A  A @ A   @@ A  A AA @@A  @ A@  A1@@H  EA@P A A A A @ @A  a+t&"")8@D}z#[A"(p+E8@n*GA)E< V0, WP## V S@"? ": ""n+, W@Dt#a T &Bd*B:[ V E>, N& \":##"?PD~, T)SmS"pM404ۆ 0A C 4ۍ 8m4M8P0@a C°PðÆJ8aaÇ 8a4(a' 8pa 4l8ÆM0NAÆa]axvIqM4QaM0A4P( `L2,pL&#2(p8":#:`2pӇi 4 +a[ Ì8a[q $ÆUwUwWUWUU*~WuU]|kUuU_DDDDE""""":W{@ A E  0A  @v A`ag A AvG`{J@` A A  @  A @ A. A A AEX A ˰A  @  A# A A  t GA`P]#` @{* A e @0A`* Av A`  @ A@ ` ` @k]nmm[oնwWU߿umûwu{Uۻ~ݶovVݾ;wwo"J:@A(@, X@aC@j҄GJ, Z H \", WK j-B Z@U EMBPB(uPj"IB#UMP]B "UJC $2 X@t Z ^I(z@+U , X@B#UP*J(uXE Z P@$""UUUPh Z"@AL IAX & A&@i`M0A i 0Jl A` A&A 0M0  A(aI L @@ + !A L &a C A % @+ IA|0iaA@B ++L&@$M4°  AL A'm0A &$AaXW % @  I &]0wۻW]}_wWwV]?wwWwi]JWw}uWu^ww A  (p@ DtA  HA   A$AA A0A AA  A A  A@  @   (p @ ADtAA A   H@@@ A@ @AGAA  t HPA A    A@ @AA A# $ AA A":  A@   A@\u$JiU}RҤ-ZWҪRҾ*I%u]i$I^iWJ4V$ BIR]jUҴT,.Uu UUU-$7wwW| W ]۽Bx@ , Ww| V)x@(+@5+@7 a x@wuw -ommB~ V V+-^+wB+x@m@+P^+l7oy0 @Lia A $ i0 A&0a@ $ 00a$ a@LM0 AI0 A 4$  L A @aBLa(aA10] @ A . AI  $4 $@A& AI@  A  0 A@M E U~U]V]\ꮪW]U{Uu_UWUﺺ^jUUR]UWuUT}W*ʲzG@*](pA'*ʰ@@P N ] 8@aeX T"" E *"Nʲ@* E @#x  UDt  E GAE Gz^`#; T<GAU @C]" #"" Dt T Aj ] *P@P N P"A.P@ T@eX"V@8A.] T E T" P T@P"쎂PDz8@8AeXB[n5mncÇommv{xw~նoոݶնmmn1ƪ;i\wmw}m=pmݶmpm4mUM:EDt-SZ .:Z-B(tUPj+EYN.-RU]UU$]]UT"KNC +UUU%B&0A   A@I @  AL  aA@ a @@ 0A a AA` A 0 A A@ @@ A@I` A@$ @ @@(a AM AL E @  AAA@@  A@ I  I &  A@@  A   @!Wu߻_UU_wwU)Ww}z]]{u T""""CP@##q G$CGAGAGAGAE$@# Dt@E*!GAGA #P"@$"P@8H*t* E H*P# @@P" T A E@P$#@P E" EAH @P":@P":ECC@8DtGAA(p DtC A8DtDt@P$GL A":@8@":PPP $ E@"C":": (p(p(p F @P"@": @P#*GH":PP(pPA@##### T @qA@U^;{M5l(M7q/MPBBmBWUێW n… ǰvn8۠iB ۅqiuݥq­TPwMF]iջn8L":WwwUW+U\ Wwmn+@ݧwUu{mVvSݷNwuwVUu;P߶UURZ @0     A A A A A&@@ @  A A$0p@ A@A 4    @ @A @ @ @ ` A @ 0  E0@ @A @ AL@ @ A   A @ @ AA 0@@@aA  0 A A ` AOUu꪿U]UU]UUu^W׫uuWu_]׫WUUDt@*GA8@A8DtDtDzp@P"(p(p)]E* AEE@CGAE# T8H T(pP":##P  P"P T(p(p(pP":#@CGA##Ђ@":":EE#@CGAGAG`"=@P"  TE TC AGAGAEP TDtDtCQ@*!GA E:P@ p(pP":-GAtNA@C*ʊH":(pDtDtCCCD}GDtCQ@P" P" A"@) @E:#PDt@ 8Dt*PPD}GA8A8Dt*@*@"#AG":A@ZU۸۵mۻjmv6qqݴӌcqjۍݵn1nn7N7qmiݻ1۷N0m7ۇmj8ݻM;m8=ڽwqqnTqo61mUU?uUUOU?,zwuUO]%NꫯwuUTVUUjuR=UWRJ@ A AA` AA @@  @@A @  @ @  A A@@@  @  A A A AA    @@  @   #  AA(AA AL @ @  A @   @@@A@0A A @@  A A @   Uwu~UU_UU]U{ޮwwTUU^/f3^/x^/b/x^/x^1Ex^/{U]ꪪ׽E(pP":@CGAE*G@#P"GH":@8A*GA8Dt*PCGA":";#P"@PDt*P&(pP":@"CGAG@P"(rHPp)E*GA8@*G@":(t*P@C# T(pP":ADtN(p T@P@CP"@8@PDtCN(pP":@P".*P@C#P T  E :#P"GAG T A@CGAE*GDtP"GH PAp T##P T# T(pP@8@PDtC E:PC@*P@C#@PS(p8@*]P P@ T* @ DtC @ DtC Dt DtGA8@PDtC @(p8@ N*G@":@"# T(pP E(pP":P@*] 8Dt*P@GA8HPDtC E* E@*P@C#P"GAE ۍmBn7mBN6qqۍۍ ;Qnmn!'qۈImBN6qmv!'qqӌmVn6TUv6mqqwqۍبmBJTTTSM8n8mmwqqm6n6n1mmaFmm6m֫UU>wuwwUT~}]UUnU{wwWWwwu^UUwwU[Wwu@@a A@@  A A@  @@ H  A A 0a @@ A0  @  A@ A  A @@ @0  A    E  @ 0AL@ @A @ A@@A   @a A  @A@   0A   @La A @ A A ` @ AA@ A  A A  E׿zUU}U]߻U]]UUu+UW~uwU]UUA8A8@P@"@":(pP">*P@CGDtC E* E*GA8@(p T#aE 8DtC E*GA8AZ@"#E 8Dt""GA9C E*GA8Dt@PDt#P"@"># TPDtC E*GA8Dt@ T#P" 8DtCC E*GA8@PDtCGAE 8Dt, X@CGAE(p(pP":@"(pP":#PE:#P"GHPDt[@":(p T#E*GHt@@":(p" T# T(paPDtC E: 8Dt*P@CGAE@ TE+A8Dt*##P"(p@":@"# XDt@PA@CGA X@ T(pP":@"B# E:P@CGA 8DtC E*@Z@"@(t#P"(pPDtCC EE*GA8@PDt#P"@*P@C#a8@Pݸۍqmwqۍn6mCn6qI{N6qqn6m4miۍۍqqݸۍӍl%qۊFmn6ոی8imam6m7mۍӍmin*6!&N0n6N6môqn6m7qۊIci۽WꪫW%UWꪫuUU~wUQU{u]{uUﻺwUUUuWﻫWWUց@ A A  A @  A  A @@ A@ A A @A@ A A @@ A@  A A  A @@ A  @ @  A@ AAJ@@` @@@ A A A@  A    @@A A   @A @ @@@  A A A  A@ A A A   @  A"UU]UuꮯUUWU]_Uw~UwUz]~]]w_UU~]] X@PDtCGI(p TCGA 8DtCP E*GA8@P@C":(p T#P"GA8@P@# T)"@">" T ZP"#tN(pP":P"@":(p T# DtC E, T(pP":P@CGA":(p T#":@"# T(pP":P@CGAE 8Dt*PEDtC E*GA8@P@">*PE*GA8@":A@8Dt*#*GAm# ]E (p T# DtC  T(p E @CGAE 8DtC pP":@"#":P@CGAE 8DtC GAG T)E*GACGAE Dt*PEDtC # X@2P@PE 8Dt*PP"GA8@P@P":#(pP" T#P"@":E*DtC E*GA8Dt, ZG@, T# ZP MDt_imqqqqn6n1qqqQM8ۍ;qۍۍn6ӍmmqqۍۍmmQm[m8qQmڍqmqm4ۍۍqqӍcn0n6ո ۍöӍی;v۴m[mmݸqqN!&mqkUWWU{W^uu_U*U~Vu_wU_V_u]A@@ A@  A @ A A  @ A@ A A@ A @` A @ @@ @   A   A  @ A   @ @@ ` A J@ A] @@ @ 0A  @@ A0@  @a A @ A  0  A A  @@ A0A @ @@@ A   GA  AUuwUwwPDzUwwuwuW{uwwuWw]wWwwUuU]ݻA:GA8Dt.8Dt- E @ E=#P", Z#h":AP XE- DtEX@C HCGH":AEESDtC XDtDt@a#P""## T">E-(t" ZDt҄PE, X@ TO" -GA":(p TDt-GH$">@(pGAE(tE.# X@a(pi#BGA":"Dt-GA ADtE, XDt*#h":A@ @ E:GA8@aA"@(p T"@(pDtE(pa@B#P"Dt"P JC A8DtDt*AaPDt"C H DtC , XDt*(p XE@a(pP":GcvnQQa\0P¶ݴnA\mInGn7m4NVjQpl+ V» VM8l m4 Q FT;g j(t_qQvN;M8ۆnVM6iö VQiwwPPWm5a&vm4&A[ q 8iqAEFiN6M44wUwUwﻫ}W__ﺮWUw]WwWNꫧ_U_{_uu[w_}UuuU_  @A  @A@@A  A A A A @A @   A@ AA  @A@ AA@ A@ A  AA  AA@ AA@ A`   @ .   @ A@A  A A@ A   AA    @ A  AA@ A    @AA AA @A A@  EGUWUWUu]}+U몮]*U}WUWUꪪ%W_WUTUJU]~uwUҤUwUx@AO m(pݠ X@aG": X@aP X@%A"&@G^C7 WPan+E;EAE:A@an+pZn+paGA"Sn, ZC S"?  ShOg"#atU @"S{ X@[p[ O@G@ v#"?P AN W@"?@">#*G"> E: Sw p[ P":#&E< W@wP@o">) MD~N+mL aXl6a% 4L%00M4Q 4ӊ 0$.Lp 0aXi0A0NL V L%paPᄛL Æ H0᠔00A. 0Aa C$¶JaÆ$ 45 4pM2 ClaXm C%M0A8`M8p5`@ 4LiqaaL% a C FM  KTUUUVWWU_WW]{]UzU]W׻WwUZUUWuU_WuUWu_wwUށ @ @#  A@0 A AU/   @ @ UgA ˰A<A@{  ` @ @" Av A #`   A Av"; @ A!^ @G@3 A E @. v A A.A@ AeXAv `#A00 A0@v A@ Ux0A ˰A @ "@ `2@  A GA A @ {@ A @.˯mݷvnwm~շvn{mݶuvnwvWwwumvnݷoo}wv{wWnڷU[o %@UUUP, X@#J, ZH$-RHCDt-*PHB ZRS UUuTT XEB UU-PH ZI(@P"Z(@j@aׄ Ph%iuU, ]URTZ P#@ XDt":Pj-B(uI a Z UT ZjUPa @-; U- IUB@a8I(E#E@-Bu.M4@$ L@ `M0A &$ A &APAXVA04@+ i@$ 4@ A$ `M0  AM0 AL A0   I@ Aita P A@M0A@ A  &i&a`aLAi 0M0A@@a A@M4@V@0I I@$ 4 Aa L AA&A&@M=׾wwwww~wwu~]UwVSU]Uw]_wuwwVA $ P@A AA$@$ AAA  C A@  @G": @" #  H  TA @#E@  HA"  A A@ A A(p @A @AA]0A    A A   AAP    A ACA H@ T@ ": A@$$@PA8A AGA@A@ @ * HA (p@ DtA8A HA (p A]?TkJIRJ&U%IBUi-pVUU**UJ]**%VIkUpo֪tXV*.i$JTtU*^M&UI,RkTJ\RJ8RҴV]BTku һ m m+P]P]mۻx@ꛦwpZ ww}wwWm W wM}v+ @wwuu {xEi]wwWVӻn+ ڄ ! A  M4  A4i A@ a@`M@ A@ @ @y/0A 0A ! 4  A&  B A A@`@ A&I @ A@ `@A/00A@ @ A  AA     @    & $  A4@ @A@AI @ @ H  @i a@$ A A A&0 4ꫯWiݧxMBiiGH":>B ipBihZi(p@iii+H":~ ih= ZA <(OM5Dt-4M ;8M4;NBiiA#B<&iA(wEF&4M4GT#P(P4Mm Zڅ… 4дH P":~+UPz]* 8 P"VU !@PDtDt@eEEX*@Dt@|aÇݶ(pP"(pa#*GA:@" (p W҇iÍ6Ímݸ."_vUo` @` A@ F70 ` AA@}UHCGA":P DtC A:@", X@a(tC@i#i(pG]aXIaZM 4&J*J(ݔuU^]]W AA  A A A_pA AA @ AJWTjUU;@zG""?v#T D}#| M[P°PL8a6a(ip$l08qa 2]ު}Z Ax0A.G`0`1E@`"; @x  A {uwvݽh%UBWGJՄG[@I@@` AaA@ L@$Kww}k " AAGAGA H@cpA@ p @*" H O$iKUKRj.+on]wwwva @ 0@0% A@L @@ t#SUU]q*@ @tDv";#E TGDuP@A8A8DvGAGCGAGA@mpmqޡ꭪u->*`  A& A@@ a @ A .z}V$""""CGAAGA H*q@莨 DtE"A#E#P#*(pP":AA .v]7xqq[vۻwu @ @ aA AA0A   A_^]]uw@ED P":P@C A@ 8"莨"#E 8DtDt*q">@C# T(pRN1mn76vXیmߪU^uU_ @ A A @  A  @"o_ NCGH T(pP":P@CGAE 8Dt*P莬"#E8Dt*P@CGAEDtC E*GAlmqۍۍۍݷquUW @   @ @V @@ A0 EU*]ߤ@", X@(p T#aE 莰 T)E 8Dt*P X@C# T(pU6M8n6m8N>l7qi6m-׻w{WxA @@@ AT @@@ A A URU]߭G X@@":E )E:P6E> TCGA@t@xE, TDum8iQ4( ;q8pӆᦣwU^]UW   @{` ,0  GA A _[WWw":@, XDt":#C:R:E:- E(@a(t8@*M0M0L 6QIal wUWwWWG@@ @  AA  HA @tt+Z$TzAHb \ V, X@: mSBh"?p[n.v4$P 4M<A& @ 5 J`Ma Jч(wU{UWU^l 2p @@`* a@`*e _AnO=jݷa=Z7GIVUT ZZtB:P\* ZL @A L # L A@$@ &TW]]cP HGAC$ @ P[  DtC AC EA(p":{{(U\cIP(߅JҎ ڄ #< [wwWށ!A   @I A@` @ @ _ꪪj*DtC* EEEE 8Dt*PP " TCG"4-xm[MCbmûqۍ֪]UU+WuT;~A@ A A 0A @@ @@ XIuWwWU6APDt# T pP":A8@ T": T E*@"CGAE*GDtjXPmvݡvqm WnwnꪽVA A  @ @ `@  A A A%wAJwZU]Er JPP"@(pDtC*PP":@"#t#PEP"(p(pP":@" T(pP":P@"EuxR:#:#win6cn6#iۍm6!6DDVuU_U{#  @  A @a   @ A A (1Uuu^Uߖ98  "@aE(pP":@"#E(pP":@":@ TE,  T(pP":P@C:Djmqn6vqcn+K׻nwUXxa @@@ A  A A @ A A":]U] X@CGA8A8@":)@"# T(pP":# TPDtC E, X@PD| T#Q.Ӎnۍ؆n6N6UnwwU_@ A A A@ A A A  A AKUZU]݄GX@@x@P"> X@S|":E(ph MD~*GA:DtQ)"?XpN0L 4ӌ8a! 6 85m Uꬳ5hNWU   @]@P(P@` A@x @$Pww*P I'H@GA Dt(uH@"GKV C PA&HRõ ( 0L  %^}Im]׺A  A@  +      AꪒT$uUTꫪn j, X@$[n+w 0 @ 4I  Axa A@Le]UWzUWꪪU@ `#A#8A@] p  @=ݾmpA~ݷvު,"WPj-BGI.]kꪭ*I &$ 4@7a@ A$ A wW_wU @*@$ @#.'o EAAA8@@ @P T G ,qJPV.WUN8h":m] Wwp$w];NҪ @ A A @ H$J` @ /@ At]ջ"U_}k EAP@PAB":#P T#@CGAG`"=@P#*(p(pP": -ڶc}j[y]+mpmqUwǫ~  AAAA 8aA A A0 @uwwUw[P#GA8@(pP" T#@#":"::M(t T8Dt*#@":(p T A}m6ۍnIUۍۍmkUUwuu  A A  0C  @  @"ut"] X@PAA@CGAGAE@ 莁8@(pa@CGAEPP 8DtC E*Hiiݸۍ7n6m4mWU @ @   A `0AA@ @Au MDtC E*GA8Dt#PE:P@CGAEf (p T#P"@":(p T# T(p~6mmۇqjGAFۍۍۍik~mU@ AA  0 A  A  Uw{"# X@a#i(t#  TD~:@CE 8Dt, X@aP@ 6m4ӶWi:M4ӻiֿwuWwU[   @ AX`@ @@@AEGuzUWuU@ W@G Pa@v#uHShO")"BmG\pӆJ6 i C0NÆ Æ 0AM{wU] A  A3  I @ A A @v]/[omꭻ} D|%PB P]*GT]`-T Z C@@JAM0&0 A A&I$]UwwW^  AGAAA@ + AA@    HuҴ$URI$ak@+j+@mB +I A  0@@ E!&i  uuUuW.CA@xA Dtt"*{V2*yÇmn8omIwUUPi]U}  A AI @@ & @@ A.]DtD]46UuXA@P$":":P# AGAGAGArq( v ATGA8A@P T P#PEuG wV… iAl#AFۍa]Duvݠ6;Ajô6uWw WuUp 0A   @@+SBKaA @i  @Z_$%JWu_@""GA8@* EE:@-鴒ӵA+E@ TPTP G@P"@":"?ۻM7mmVߧI;l;mWNWTUTꪶXA A@ @@cTRޚmiA@A@  AWWW꫻MR@tP@*P T@#  T(pK>G^{"菑:#:#DtC @PDu"$C "@ TjQq6ۍۍtSEQB cn6nDv[M d?[    @ @l'_~tA@@ a A@UTon6ꮯ]a T X@C#P"GA(pP":@"# Tm:)x@C#a8@ @ EADtCGAE 8Du8یnmm/ӭ=C _cv8q)Gݻ+$WuUA@  @ @koKOx  @ A@].ZJڪWw_ht*P@CGA8@P":@"# T(p=Iw@":GH (pP":@"@":(p6n6ۍۍ]M;u^J#J6¸qqn7!_]$@w>Uz    A@ F4uKJMu]T@0 A@  @KUW%oJڷt U]] AE*GI(p DtC , X@aӥz J)iZM_u @ XE-PE, X@ Z@":հami +JW[ %h'PQa[ i 6˥ﺺݱ1J!bu"8GUuxa @   @ F0aAa C ! A @ A A  Hu׮TDDGFUU]^+p])n, W GIS(p V+D}#7Api` + 4 400$ CacwkwuKonUW ` av @3߮ A Gdv  @Vݷv[Vj, X@T Z@-B#GUT VHCaGT I`AZaA"̮/A @@ 0 A +LcwiADtA@AEA" H A I--RI&xTI-ZUQ¤%P}4 Ww@]޻}A A$a@LI0j]*  @ @ "#WU_Z_뺪 A8@PE@P" P@"莯**^A@#T * w8[}oN-Ummwݭo+T]U#A  A   "!":D: @@A@@ OUA ) iU# tC E*G@ T8DtD} E@":#&=ds.dr#[MGA8@(p T##*P@C#P#*GAmcn7bn60XqQJ6qqwwu^U~ A A A @a .Lrc&9!ta  @ @  @U]8'ǽĵuWw}PDt@"#t#P" 8":(p莐UC T8Dt*P@CE 8D}# T(pRn6n0n6ӍۻG$=\v&9!ۍی8ۍ_꪿ww9TqwwU_ A@   A v   @@ "UV4WwU(paDtC Dt, TCGAE 8Dt*P:I̓:#CHrCdAɎB(pP":# (p T#P"(paA@X@vh">#mG aXiea0C{Z 2 5]W뫪 OU]UV` 3 Ay&97Ԑ'B A {V A/ @/pmM^~]v}wm":PI-]T Zj, WT11 tU(uUUC Aa IByp AL  A& A@OwU 91¹n{wwAA   H *l.+T PA@$* @ ":]/Iwpڷ0n+j688mPZ]B]ZB!IUB AA& A@2OPAA@ A@KwR]wA8pP@P#E* E@"&88":A8 @* AGAE(p mwvUZ]xݰqv"C]]U^ @    $AAA A A @_U]Zaҫ]@Dt*P@C# T@ A#@NZU @8":(pDtC #*GA@"@P TGH":cn6iƽ(F6p6ӍU^wiiZG[wuU A@ @ڦ A  @@WwU4EHrcתU@CGAGDt*PE*GA8@":(pDu"#":KvDGNv:#A@# T(pP X@PE@CGA:]mۍۈJlR] A1ۍ۴m{wUU]'dh2$AIQUzG@ @ A@  $jUH@ A  @ A&_UL B !c8-]Dt*P@C#P"GA8@PDtCGA #":,*4$X(w$91IPDtE*GA8@P@"#E :#qqۍӍVtރnn6n6ۊ꪿wh&"-4*%:wUU@ A A A Ƃ퐣: !0  @ AAA^Uwuӥ#&;f3=R CUuw":68Dt*SE<"- (paD~,":TXiB☻(t&"?, X@P":#a M:8ۇ 8l+6ӆhDhRᦚia' w]Hr$9!$9!ܘ$?d&;UUU@ @ A  @/w]GI  Av0A  A/WW]1GhE-ݻi(p X@(E":GA8@a@_>F8DuPaP#P"P$Dt.+ E]m4 M8aS|Ԙ&>$;ȃ*0 7v 0p+ ("UvB#B81;wUwB A A@ A A A18I@ @ A A@]WJU*JE9!pHrcC&;ꪯUte\kD|ֈa V#"]dp&P M@]@ Vm3#9d.<#i`PaXi ´/Ф $ M0A C@. @uU#:#z[UWWZ68F+Vo@*e@]"IYrCHT E' A.`# :Mi?tnw맄PWq;wݷmZߦڪx@BiU$_UU҄GJp+zz Aa @A&  A@  0A`  M޶v뫮J)*ӻomP @(pC*@:# A(p H @  @ @ Wi[K wi q껍~m<(\Rj8%wzma:wu WW Ww[Io}(pAa $@a ] I A0L A @ eӶ[lW]n2{D(]]zX Uwt"CQ * AP \LIH{,}a8Dz(p"@##ES#@ u vPnovm)81q8wxݱuUT;.K nwUURW_T5p hA@ @A` n2trn2&8L  A@a AEr*P&ڪnWW_*":E^ۄGTuwU B(pà$"#@ TC @":(pDtG]Ҋ(qE1  T(p T"$": DtC* ݪnn`[{i8 n1pegpL +ۍkwqoqMڷUuUz @ @@@@ A % A @` @."!{on۽}U]ꩿ2VK#:R(Uu7A8A8@S T(p T@CEE 莐WA< -@ T8Dt*P@#P#@C# P"GA8@ D| ҽ{ۍqqȣ ;k`> 8Gӷۍnӌm8 w[{wUUVCLGWuUU'ۧa A     Aox#Mm2. pݗN\7 0   @  AKM : 0 UT/aдEUP]W(j]`B#bP#*GA8@PDt#PE*] 8Dt*P>\4ECJCq *G@(p T@CGAEP"DtAxH0 B!A! xn6n1mm#xGۢpXɏDDzc8[+DԘ_mmÌ8ڤ, (WDDDVݑ0m; wuU_ @@ A0A%ۈ"",!! A A @@" uJ@mFt]EtaFIC ?d+4NUwV#(paDtC @":(p""GA:#<6#U&97&:aɹ!2Dzc&;x*(tC @":(p T#aE E*[qQmۍN6tB"GDtGDtGDtGDtGDtGDtGDtGDtGDtGDtGDtGDtGDtGDtGDtGDtGDtGDtGVHuABDtGDtGDtGDtGDtGDtGDtGDtGDtGDtGDtGDtGDtGDtG@>(rבvpn0al+h#B5uUUDDDDDDDDDD|:xФ8rcw"""""""""""""""""""""#uub""""""""-uUU&@   A`*&q3Ngs84yd.&/FDDDDPa0A  @ A@/ۻn67}E#ުy#z@":@8Dt#Du.aM9ccB(vA21艒> CI3q22; EF91 䇬 vN"E 2c9C(r88Hrr,rc9C9(sPqɆE!:@= E:AGH Z@!% 8a(aF$PP  I!EFĸ@SP0v 8N&a!GHp` 00a 0x8B @,! a&000_ouzUq.˧.A@Gm}ҪWtwuW^ @  A @ LqA.)g`vmٸm 0kP 8QCA 0a݃ a U|0` AA@@AEUUUI*ЪUzw?m4[nSꪫUUW*Gݷ| Vh"?JEsôű ."". {wWiSwmx@G@I AIMC ibXcc M Mh0:o6g3 6~L 0aUꮸ`0A4 5 @iUUzvnB]'09C MGܧ*e9N;VuUUZꪪ `  =EYV @R0bT (q;3c 0m8`Ѡf\rn3XaDDl0 0#G""Edv@aA a `* A a~!a#EENv%ža ]'no"""! Un=SNUtX}~Hrmn7Zc2C 2(Cy1JTD9C9#98U0`'4 Mx1 {{zzg 1(r(r(r(r(uq b;  0tC<ЃXBBFp ;޽tIcDu bւm0"ZZuI/ZV 0q;(q,wG1ܱÂ#GG@ v_qŧ@ow0Aݲ&9!!rc ;` 0`Wx0>(1LcN1m=UInꐆ":~^WU~o]GVޱj !5n(bB+i]Nڷa'=Mh@0ay5g 1"8x3a0a 7JU}0`ڜ5i*^~~ 9nG&@e u^֝G29(}aġoEPz(sc(v 0b66]6" 6xnaXaa#:#:" GCG(y#a""1SqlE1N0S#ĎHͣې x2 G‚ AeɎvmۼ5ow^UT܏ڽ}kfd'fNjQ98̜9 vYuYN% 0l&q3Mh@`/{{{;@ qhDC 5` @3<34 ֵ}zF:DzնNM:ݺk dt'ѝrDŽX&=8rdu({4Pvᘛfy(prdtDSƼxֈ9 )2)u(pmeP쎥,Cz߱#q1Lc[#nߴ8zFJk41bƴ]7J!Z^"0qlDuߨn^nV\7 < Og'< 0`MG3 0`lDDD4""4"#0H0a :U}0aޒ޾}iݑɲ9.n_n=juZu$#{#C:eчhEg<"Ǣ8(s'>P쎥$".BPeE8i)DtjDtS3)6GE:#2#Fdb);8j1tԡR:#G@])tGA;#:  莂dtGH2:tG@7("dqb"%",ccoDq#⠂bЗCbv444NH01maêv~7Z*o8jozkKc 80I4׷Nӳ1"""0B"0F XL0`1a_H5aQ9 9CDPBE}R v אrcq8_Yt/P>+)R(p+)S:JSu(p3saHE|swԡÔ>F"1"DD"1TPF"1hu(t#P:e#C(p+ V)Qe9!r2 B9!ʄDudtBGAŰ.-e@_S$lX6Im_~6.i(TL*i t,Xc6,[@)0w!e8SePX!P"?P,H  R  H"R U߻۷[~V e$A: T0EA< SV 6SiqmPʁl&N E80a 2H9qG `Dt"""H0,0` 0ba26PZI2X ^$C $(vR@A EH $(zAPs6.)no{ZA;`&PHCA@$C'(vGRb2A""Dt"-",tGR@tdIꅔ;:.*#ȌDB)D F"1udb"R:E#:#AD\DEGbņa XbX|Gꚦ"B""!8"""$3c^ZDu`a 0`0a@%aڦ >"" n ` ` 0`6~}D\E0LzC׿[/:ui6iJcSo9G8P0q9C9C9C9NPPPq9(r(r(r(r(r(r(r)8Ør(r(r(r(r89C9C9C9C9C9C9C9C9Csq9(r(r(r(r(r(r(sPPPPPPPPP!rHe;=<9o(wva 0Ńaa`'gi֭ga !h$"""""""""""""""""""""""""""""(bGZ`ņ X0ņ0lX0 XaZk֫Tz]BUڄ C>U^ 0 ` ` 8 By@GA0P, E` 0a 0``u^3j599ܧ* vdqCnw#j>~GZoI:]4a@AҢ: $B#A$N[ 0`0a 0` 1m#BN1HD`ūV(V`PŃ0 0`1 `~!@">s7Dto8^C( g} uVzWc h a00 { tZA+ 0a@ 0aa 0`0aӿ~qH\hq_i$ (vqDq=BM,{C~߿a  a a z" "vLl 0zH ` t 0` ` 0+@&GDtGDtGDtGD|:#tG菑>G C莈莈&GDtGDt#|"<莈"!8tGD|(p|& Bb<#:#:P>G#tGDtGD}P#:#:#>GD|>G:#:#:#:#:#:#tGDtGDtGDtGD|:#tGDtGD|>G#|莈莈莈菑>G>G#>GD|>G#>GDtGDtGDtGDtGDtGDtGDtGDtGDtGDtGDtGD|>GD|(vG"#|!`>G(y#莈#莈莁;#tGy##:#:#|莁;#|&GtGDtG@82>G#|>G#|"""""""""""""""""""""""""""""""""""""ͤ8!8sAx<s9g3 L g3s9g4s8">DDDH-Ո'|_xO rCLr+xO '<'|_xO 1ȘO/<'xO <'|_"O/<'w NNM;UNowuw #A"P(p(p(tCob"CCCPE 8@$A8AC"C@ EEEAPPEA(pH$EEA@ ACCC":CAPPP AAPPPAAPA(pHP"(pAGA@(p(pA ":"C PE 8H   #": E0m!P@8 ECCð|(5B{ cQQA0kiFCB%H%ڤ!Q 1J5 EEFPI TRR bB(4HTiF1Bc qAPtۂ/`n鶟_i!Ǧi'鴗mi^ aW@ @@N;  @AA@ A@  @ @A@ @G@@  D @ @   @@ @ @   @A @ @ @Ai^@ A Aai?oC9Lr(zmlHXmmmm'6mmTPEC#EAAGA8Dup"> BAP":GH  "(pDt Dt (fQ@8":C ":#E8":GADtDtCGA8":C#E8 EEEP"G@P (p(p"G@ Dt(p"$CGA8":PCG@"CDtCGH": Dt(pAAGA8DtCG@GA8": AGA8DtCGA8Dt Dt 8AGA8A8DtCG@(p"G@p":8":PAA8Dtcc$1I18$1I ccE!c11c 1b!aF)!8RHu1cZC8Ic11B1cRB(pDtC#EC#EPEP":#P莑C"":8DtC:EC#E<"(pP"(tG@ E(p"(pP"CP"PE"Dt"CwFE:#E"GA<"(|uQQb 1 PvF(A!B!(1B1A!B1AF1B1A!!F1B c(PB AF1B BB cb c(cIc1B$1c(cB(cQPBAF1B c Qc1Q(PAF1 AQ(baŒb $(bgM/ai۶nNCmv_OuۿOmv_ݻ_GTn @  "qV:@ @  @ A  @   @ @  @ A   @A  @ @ @ A@ @  @ @@  @@ @ A@n @  ARmݰm_MImim/k ݶz#E>P  vD})P  "C#E GP8":P"Dt":# "A:>"GPDtDtE(tCG\ E(pDtDtC"G@":H"P@ E8":#PGA?P(| Dt>8":EPP"A8Du"G@(pDt#P@C#EP "A:@@ nݪC# DtDtP!(1$(bHB !A6CBQTc$  bP ADTBJ1 HAD(!! QAcBQc!AQQb TB ($! QP! Q @*(PHBBc!F) @Q (* bJ)A ۷vm/m?KuimmoonDAAA@vw  AAA @   @ AA @ @  AAA@ BAA@   @@AA @   A AAA   @  ݆    I裸_x0 7KI/K_GI44$$i%aai$kE;A(pvA"(pGWSG#SG#;J(tCG_#(pAD|"$CGA?#p"H":SG)(pPpE8":AEapE:PE|"?##(p"tGL$CG_PE8D}##(p" @ x(A$!F! @|B @XAc @D(!E @ QB  BcB @p 1A!B @ c @QbPB @AE B (PBQB ! @ A(8ۄAF1$(P'm 0mnmm_v޿mav_@   @  @AA  @  ,AA  @   @AA @AA @   AApAA @AA @ AA @   @  -AA E=GVm餿K_%KM/K_ݶ_)#PDt;mP(xECPU(pG_E8DuAIG_ P, EA8Du8DtC":X@":@"Ia":A.GA?(t# a(t#A!! @ia @ Q$(A! AA!B @AB@ AHB@AI $  H B @A @A!!B @ QBP @ H  @   @A$(BaAJ(B @mwommoommmm    @wE     AAAA    AAAA     DAAA     @AA@@   @  # A  (p @  ۶۠  ": ^Kaa=i$I/$TI%JKRI$I/TKI$-$aƒI/UMWmo҄G_mmo#mmDtA8DunCG@ @ @Gl7 AA@@ @ @'  @  @ @@ @ I@ A  @@@ @ @ @!B @ @@ @ @ @ @A!Bm @$ o}ml8Dx?mmnOm۷DxQM   @{##": AAPE  AAAC( @ " @ADtA8 @AAP @AAAGA8 A @    CAAPE @AAA @PADtA8 @      @Pmtnxݵ|zIkM/Ǐm/ƚ_?[^<iwvI$ 4__&Kդ*KII%VIi$&Ii$aI%A@  @6l0 @ AA A A @   @AA @A  @  @AA @ @AA @ A @A   A@  @A  Jl6bAA A/wm?immmmm7mm?#AH APEAPaxAEPEA DtCAGAA$(p": (pGAAEAGA]AAPAq APPEAA(pH": P E DtACA$EA     8AA8DtAAA(pH  A 7l0 A(p ({I b/8ECa1J)$XQIE$ iE%qIX%I%QI 1RK QX)%M$1I$$RI$ix$TJ)$^aaM(X)(-~&Kmm_m&mjMM7۵i@  @[m @ A A @@  @@ @   @ @ @ A@  A  @ A  @   @ A@ @ A @ A@"c@ @'m aGomۜmr mmm an@ (p"A8Dt"G@a ":PC#@ (p(p"(pC#E8":8   ":E8 E AEAE "G@""""Dt"G@ AGACGA: Dt! "Dt#E8": ###P"G@P8  #PC#E EAAEPC#E8":AP""Dt EPPE"G@(pDt APPPEcv!EE "G@(pT4*1cqJ1cRBc1qB86F18":#":#PE8":P"GA8Du(xE(p"DtNCB#":8":#":P莁8":PB#@":E8":PC(ph(tGH(pDtP":GZGA8Dt"G@PCGA<Cah(E##Dt"OqAB 1BAF(P Al(S(pGA?頊tGH#PISG#Du# ":ka$P"">E}">N8DtCG_uS8DtCG_M(E;@":#ҰpP{SG)EP 6nP"0(P G pqAA   Q A(C  A(  @ A @ a!B @ADbHP"|HBB(A>  @ PB @@$ p  @ p{m @ @zm0lnmmmm_]mmmml6=  @AWobt F@M 4C @ A @Dt@B  8A   @  @ A@E AA @AA @   @1۱ @AA_ݰSOQ&4M%ƚK?5nI.P#B;am[A:PH":GA8DuZ(t#XE(pDtCG_Dt#":@T ":AE(Dva@"JB @Am A$ $ B @ "c(A  B@A(A AA$(P AABB @ D @  !!B@[o   Tmom?mo~oIbAPAAAC a 1AA!  @    & A  A@ @ AE  AAAP AAA @ AAA8A8 @    @``xE @ AABI$ߤKKI/Ʃi$I(_H%ZI~=tU%I$$U*KA$(mT6mEm/ݶݶim_m6a#Mw`B @@@vCG # @ @ @6A  @ @  @@ @ A A @ @ @  A @  @ @" @  aQH nocnoommml1m!u|  ": E A ACG@GA8A  #": @ (xE": AAPE":@  #"AA8A": AAPP @P@ACGA8 @AGACGA8Dt"E{!PP(p J?1iGl7KcnjcmG1x15m|q)cXcǭ _ҷiM ltK$IRI%I/4I/&Ii$a4wS @ AA8wn A @   @ @ A @A  @ A@  @  A @ A @A AA @A  @ { A A[e!mm۶-իmvokmm7m _C[GH":  EA$E">"8Dx4":$XEAAA(tAA@ Dt@ E!P ":@ H": APPGA  ":G A#A" C":AAAA#  A"A   CAG@A ~^#J) WJ)bI$aB **QMF)%I(QQRAcHRI4$I$ BTRI I )TTRZb$ABE_mo4m?moۥi݆a۷w  A  ACaی  @ @A  @AD @  @ @ A@ @ @ @ A @ @A @  @ @@'@   h'  ?moMmoa}PE8":PCP(p(tCGA>؂P"" (pDt#E ""(tGA8":8 A(p(paPA8":P @ ":#":(p@(p@APE(pC#E8":PPE(pDt(tGA#E"(p"(p:#E8":CCGA8DtCE(pDt"C":E"G@" EڈDt(pDt#EA,z]W1c8)Hcv1B(1bJ8(cc(xi$(P1Hc1c1q(Pc(cФ(c1bЬb1:n 8cOm" 0 m_Im%kKmI"<a봒KAA A'@ @A@A @ a A@ @   @    @  @ @   AA  AAm@  AIWm_KM$IiKwI%":G@P(pDt EDtCGA8Du`ÄT #PC#PCGA8DtC:E"GH$ "8@$P莑C: "PE(pDt(tGAEPEC:E"C":#":#E8A#EE(p"P""C: E(p"(p"GA:#P莂C#PEP "Dt P ":# EE# Dua* 8":PE:#@ ":?J!F1P BB(bq1HbԎc(P$E!B HP1qPB( **(PQQ (c1)F) !F1Q)F(PCB($1C*1B%(c1B{F1PBA!BҪnݶv%<mݶG?vv_MO۶nݿjd~ސD @  @ n@ G==0@  @ @  B @A  @A  @   @A @ @  A A@ @Amp@  bAȥ_a mm_km/n";  _H(p8":P(p8DtCGA8Dt#!"(pGJ^P8@PE(tCPDtA#":EPE"G@A(p"H":E"C: ## QC:" 8@P"(p"GA#E Dt#PP Dt(x@ "DtC8":#AE "@ Dt"G@":PC#P8DtCPNPܘJEE (b6aB$!SQ(BBRKJ8(RQHP!(QQBB(HPHTb$(cCQ!!HTc!((P!cBc10vc)F(Pc"%'ZOItiZ_i5Ommmia mi b l @A@ 'nA$ AA @@AA @AA  A  @    AA  AA@ @  A AAA @l,G]_[m$$m4i/i__Kvi$6@":"G@,":#":#̈́S Dt#DurMN莊GDi՜DtEQi(p8D}8":P"P":DtC#tGA#(p""G@P":#P"Dt"> DtCGP"#">(pDt>P":P莁8":P"(|P(tGAEDuEPpDtEGA8DuECGC#El"A8DtCGC#E(xEP   B cݸAD$ =B !dtQ $!!dth莌2:P c C 1P!E  F11B  C1 (PC((c  HP(( c@!Ab cQ A1P(A 1bl1AF1(A!C*_00!Eh_{mm?[ݽnۻww{i AA @mۼ  AO>/h&@A @ @A H @AA A  @ @  @@ A  AA @AA  @Am A @a ?ذ]mk6OM_aa E(pGJۺ8Du DADA=dA}BP(p"GH":A": DtC(pGA?@ EG@ "P" AE*PBGP8Dt#<"GA8DtCP< (p"8@ GPGAA8DtC_C#EPGA>L=#A F!(  @mۊ Ql#[dH@"G TPHBB (BBA*1QA!B  $(P Q Q E P A BC(P %(PB @%$!!@("cmbJ11 @ `"<!I7&m4miwim76a @AA A}c o׻pA   @  p@AA@ @   A@   @AA @   @ H    AAKp@   ^ݻoZI4KKK___ݻI/ֽ(E;iB(p6a(tawOOVw">NAl">8DtCxD}G#SG(xEE;a:#SCG_#"P"">NDujD}GIl6 7">NDt#|A AB @Aa!D @_Az~%A$!! @ @B  (A!B @A 1B @ (B(A ( A($  @ HA A( ݊ A!  @]m]`{]mmomnm AAA8 &ap 8 @+*AA @ A  @AA @AA @   @A  @ A   8 @ AA G A&;A  (-t/0aN_үIM~8m)5"<0aI%W#վ"A:4#DtCց:AEUGA8Du(# DuDtP(p TE(}A:^    @Cmۊ @]W׭AJ!!  @A( @$AB @ $(PB @ HBB @A $ AA$!! @ $A! @ !! džm HA"pmmE8pl1ےi/:mSmmmmm'j    @"m  @Pi[WVAAA A  (p @ @  @AAGA8@ AAP AAAGA HAA @ A " AA7mAAA @I$ݸ_X0A} v&װi$IT*X=%x괒^1꒤P*I$$ZIBR}n$SE_m߰1ʶMvkm{O{iamm'AA @- a @B_o @ @ @ @ @  @ @6A @ @ @ @  @ @ @ @ @ @ @ $ 0a A @ioPmmoomGDt @ (p"(p@(p@6EEAa{T%  ## @"@ ##A @P  "8 @Dt AA8DtCGA8 @":  (t Dt(p@AP#EAA8DtCG@G@ AGACGA8Dt @": AAM =  "Pz6c 6a|r$e' Ra>8iq1M|c1mx1txb^1Q-:I!G RixIHjKi/$I$_&_VKIJҾ$ A @m@VA @ A@@ $A@@ A @AAA A  @ A@AAA @AA1݆lBA @ D#N">m%mIi0݇ۡ # $P{q6#AP8DtP PA" $DtCGADtC]"C (pCA EPEAA(p(p (pDtAA ":": @$AEP(pC P$CGAAAA "Rl0 ": P" DtTA 1I$+vQI()QQI($AQRQRh IE!I BcRI$x)F)$(QQJ( 1RHR PI$A IEF)(ol6_tKmMݶ_Vjmz 4\B A @A b@$A  A@ @   @ @ @   @   @  A @  @ @  @  @ oWCG_omKmҠD~@CGA8Dt#P"G@""aoAE8":P##":#":E8":P"CCCGA8Dt#PC#E":":":#":"C#E8@":":# C#E8DtPPEP(tGA8":EEGAGAGA:DtC#E(pDt":": P"(pC#E8A#PE(tC@8@ ":#":H8nm##":#":"G@({Tb 1y*aQcHR1P1b1TP1!C(P1 bc1B c(c*1QHTbRC1BB1)E!E B P!"; aEE!HPc1?_$K&mWi/A@  n! AAAA A @ $  @  @@AA  AA  @  @@AA A @A@ @a AA "cJaE8U_I/I%i/m$_m5pxE;$"C#":#":#":#"0caEPE"PDt#":#":"(tGA8":(pDt#":GPDtCGA:#P莁8@PEB#"C: E:#":#P(tGH@C(p"(x"CGA:#E"G@PEP""C:P(tCCGP"(p8A#":#E(pDt":P"(p"ca CEPEPEP莂GK*1B 1c vbc(PC1P*1a!B((PHPBTc(RbPc(PA!B1 *1!!C1Q1Q HA!Qc)(СB bc*1(c!41C1Pumokmm/o_immm}m4 A @("al @B @ @@ A @  @ @  @ @  @ @A  @A @ @A @  @ @l0a  @ mWnm_kmnGA#P<C#E8@nG@(p#(p"8":(tCPC#ECC##":E 8":P莂GA#PE(p"(pDt"GA:#":P8":(pGA8DtC":(tGA#E GP"(pDt ":A DtE8@":#P[m8DtCGH":A(pDuG@TPQ@1Ql8Dx8E@Qb B HBRc) R(bbc**(BB!F1 1!!CQbHcQQ(BBBBbRHBBBJ1c(P $`p">PB$!D$!F1 1}om_m5MOW_in @AV۶ A  AAA @  @ @   A @  A @  @@AA A       @6  A1_۷}$IKI%I/M$$IImGlC#,":GT#(pDtNaɻa P莂)P"">CGH(pDt#pGA8DtCG)"A?#B(xE:#EDtCGXEh":#pE8":PEB#":Ң:EP"\":#"P""GH":":ES#E(#TP莑C#EGa 4CG\":GIPEP5b(( >(A!@ 11HBB(Qc 1 QC @ 1c  A1P$(b(b1  @A1P @ B b@B AnAD 1_633p<33p8g @ Dt#P":GU ":":#G^":P C":\ ":#P#P":P Dt#8":(u†ݻA8DuPG@(vDuq(P @J(BG  H%(P @ !A! ! J!E B%$  BQHP( (!B(AD(H   @QR @ AI (P  BBHAAA!  QB @ l">aС(IF1vnvmmmKooݶ7mA   mB  A A   AAGA AAA@ AAA AA@   @ AAA A AAA @    @   @    @ @ ALzm$v_JKI/_$KT_I$ZI%no4A":vN(pa wSGIS(tCiva CXD}(x"PmB#mEPoG)#:E:8DtCtC(DuP{m# 0l1NOHA! A v@ 1 @( HA @ @ @AHA (HAD @p @ @  @C QPA ABB    !! @p 1$ B A  !B @p@  ZGۿ;vovmvmmmmml6m! @AP  A" @8  C AAAE @   @ AA  @  @ AA @    @AA8@E@AC @ AA @ @ " @Gl6T  @AU~۾I%_4i/?__Ro۱Oi/Aҷm _TDt$":A뤂(tҤPDt#h$(EA$tM$_ ۺO @AA+aAH  @  $! @   @  B@    @AHB @  $  @ $  A HB @ $A @A @ AA @ a@   O momoml6mp    %vlAAAA8 AAAP  AAA AH #@AAA AA #@  (p A@  AP AH ":A    $ AAP AAA A1 @ @ "c_KI$(T_i%I%$.+UI%*I%(%QI%4PJI/TKQI${vtK`aoKm?mIݶOۿmkoGa ki$ @A N. A@ @ @ @ A @ @   @@ @ A @A @ @@ @ @ @ G @ @ A A @@ @ @ @ @ @ڭa A @Zݷmmmmmmoa}|B#":G@AGADul6l1CAE$ Dt": "(pCPCPDtA8DtCECP8 AEPP#@" "(p@  (p"G@  E A": #":G@" AA8DtCG@(p@AP DtG@ ""(p @CAA8DtCG@#m @AA1x4CnxI11ŴTqC1Hx11_Cǎ1I1ZX8P>1K1)+v##(pDt"Dt":":#":" 8":":#":Dt E DtEEPE(tG@ E8  "(tC#E:#""DtC@C""(pGH":A"GHPAEPC:(pDtACCGA8Dt#(pDt E8DtDtCGA8Dt#P Dt": "(p8@(tGA## "Dt"G@":":PPEP"DtC#E8":PP"(tCGA8":P"C D|2C#(pDt"GAGA8DtCGA.*1c*) P=) (cBE b!B1QCƚB1cTФ(BTP!BQQQPHP1Q$1Qc*1 c1QQQHR1 QBc!B11b!F1QcE"ncmc1bB6_im__m$KK$| @    ao A@  @ @   @      A AA  @      @@ AA    AAA  AA@AAm   @i%acKiWi%_KI%4KI%I/ _l":DtCGH(p8@CGA8Du"G@CGA8DtCE(tGH#E8":AEPEPC:EC(pPEP莑C$DtCGA<"8":"DtGPP":":"Dt":P(pP"GH@CGH":#":CGA:#P(pDtEPEAE(pDtPC":#C#E"DtP"A8DtCGA8Dt#":E8":@CGA8DtCGA<CCGH(pDt"(p"PP(tGA#Eaݼ`P莑C"GH":#PEF! C1  CC1 Bb P1 C(PB$ !EF(PQB !( b$(P!((P!!B bc*1HP Bc(b!!C1cB!F(PCC1B Q 1PQv&8QPQb1Hy#mmvnm?mmGa8 @A A"qZA @ @A @   A     @  @ @  @   @  A @  A A @ @  @ A @ AAV? AA Uxl0ݿmWmmm_Omv6ao_ E< Dt":E(tC#E(tCP":P" 8@ P(pDt$P(pGH"::(pDuCGH":A(|(pDu Dt#P 8@" 8Dt#PG@"A:AEP"GH(tCP"GH"GA#EPB(xEPC8":PGH":Dt""Dt#aA8":P"GH":A":E"8":a":` EDtE t!EF1 EEHBBbamF(BBB !QHB Q(R!! AE(!EHBBb(!% QB)( $!E( J1(b1P Q !F1 1QBHBAc( %$!! F(TBQT1J*! _i>ݿoim_m&m?"?    0nA@ A@ @   AAA @   A@  A @    @  A   @ AAA     @AA @ A &aAA @$" 0EUIWI%_I$i$I/__IK餸"< SG8":A"ށ"?莕GC#pDt#CGC#pDtCGA?CG)E8":#PGPE8D|CGP(p"(xEGAE#(pE8":H"GPE8":AOPp"H":NGA8DtCXDtNPGA?zSG:V҄G)"H":@(1 A+m A(QC$(A Ab @Q 1c(P !(!! @A! (c(A! @QcB @ cB @Bc @(QB @AcB @ cB @ 1A}t cB @޿m0a=mmmvmmovۿm0aa@m@  @N-k  @   @@ @ A  A @A@ @AA @@ @    @@  @    A   @@  @  _   A#{M6-_?k_IOi_ IB#PnNLpA8DtC(8DtE_P8DtCGA=}a@CGA8DtC(APGH":VPE/@ DtEW8Dt#GAGA ":8":AEPA"(z*GA8IP(pDt#Gn":EAq !B$ &[m!B@ P$  @    B  A$!!  @ $(PB @  @ BHA HR  AB @ I P @ (PA! @A$(p%)HA!Mmmmwmwmmm_n@    VxA @    A A@AAA @AAA8@    @    AAA@AAA @    AEA AAAA A  bAAA @I%6I%JI$_I$II$I%TIWIIG$$l0@I$_mC_6OD}n#POaB#"kPaDuwauomGJ D@HA! @m @ @ @  A @A !@  @B @'   H( @ @ HA  @ HA"| @@@D  @ D @ @ @1۱ @B( DݾPg}kmmmmmm_S o @ACAp@' A @   E @  @  (p A8@AA @  # @@   @AAAq @  A @   @AAA @    AA,nAA8A%[{m||{_m|41M//v%jG ^_IRI6ti$%H":ҤKi$i%Ӥ%RC[I%%դM$?I(u^!AA @a @   @    @ HA @AA@    @  @ @A  @ A @@  @AA @   @ A  @ 6p@ @mܐommomowm@AAH  &v (p   $ A AA A  H" A    @    AA"A  AC A  H @AAAP  AAC A$ A A   iAAA A{Јq8Dpɢ"""""""""""""(Qp$#o (rP9NPPPPPPPPPPPPPPPPPPPPS9C9C9C9C9C9C9C9C9C9C9C9C9C9C9C9C9C9C9C9C9C9NS9C9C9C9C9C9C9C9C9C9C9Cr(r(r(r(r(r(r)(r(r(r(r(r(r(r(r(r(r(r(r(r(r(r(r(r(r(r(r(r(r(r(r)(r(r(r(r(r(r(r(r(r(r(r(r8PP9NS9C9C9C9C9C9C9C9C9CPPPPPPPPPPSPPPPPPPPPPPPPPPPPPPPPPPPPPPPPPPPP9C9NPPPPPP9NPPPPPS9NPPPPPPPPPSPPPPPPSPPPPPPPPPPPPPPPPP9C9C9C9C9C9C9C9C9C9C9C9C9C9C9C9C9C9C9C9C9Cr(r(r(r(r(r(r(r(rG\DDDDDDDDDDDDFXnP\Pp\ܷ(s91ЈY. r-PY. G"6rnxE=mwPa [malqm7mnll7*Cnnn{{vvl6m yݶnp۰۷nxB1aaaaal6amal6a 0l0aaݻW7^۷֮ݻWo(rr ݸnm۶av ۰wn7w 0a` P 0al0pv l6 0 0 6``a 0oXWީzCI^=U*zDDDDDDDDz]Yg%eVuWJ%U„: K8B A,"("S00ARKA*UJִVi}jI~U½K]KuOU_w뾒T]=BT^o~֯uKzW{wWڪwjwzGT|FZ0u*h7N&KIҖґPH =n t{Km[t{w<鋿a{ \6nCz wO{nzkzߦOds:IX" zƗv/iaTMLD!hD* (3\t#@rH b,#`i-!4 |jKTMH:Jw_ҪtUaA''i4pATڽ$ZKath&H=L:KRV%nDf jN9C9C8DuW(K""kBA&*CV[IO ̠: *""?l %#@f@D0(pIvzmmiV}w7ZџzN u؅kA=&? jC莈莈莐ODDE@[z~A{WҽJtz'u4l:V{Wwa]SM҂th* #N(2C8 DDD endstream endobj 53 0 obj 97127 endobj 54 0 obj << /Type /Page /Parent 3 0 R /MediaBox [0.0000 0.0000 612.0000 792.0000] /Contents 55 0 R /Resources << /XObject << /Im11 57 0 R >> /ProcSet [ /ImageB ] >> >> endobj 55 0 obj << /Length 56 0 R >> stream q 614.4000 0.0000 0.0000 792.0000 -1.2000 0.0000 cm /Im11 Do Q endstream endobj 56 0 obj 64 endobj 57 0 obj << /Length 58 0 R /Type /XObject /Subtype /Image /Name /Im11 /Width 2560 /Height 3300 /BitsPerComponent 1 /ColorSpace /DeviceGray /Filter /CCITTFaxDecode /DecodeParms << /K -1 /Columns 2560 /Rows 3300>> >> stream qJL2@ l@k`3aA|)hQvw }__R2,2dB KT,6 )1d 2j"\0 @8i 0UARm0\ m6BcOM$V pO)RdPpI$Otc@!0hoČ$ % d|VIVIV.kaMB`52.@@AP<a1>^3c aLphaQpDnnp V}AoIOdZ]0M&«h w[][IKm'!I$0}4k`:AIIU}nӅ_Nz~liMl*꺆QOoJ~N W׼{xANߪ=n5ү_?oyr(< ~ls5LZhCү =/ `w_ېkTMJ]-Mv_D?D`KB7MG/aĨM#Ql/ >^WWooȀ]nH:uu},wL /#D}IuK_7mmȷo }u_u^$꾿KKoKm.d$?Kѕozk?H^!_5;w=~KKPΟ^[~_^~;/tޒ RA} ^o/zm$++i'jk%ruKt}]_NuZ߽'zVtC}4?mtKJIz[k__m(m.פJ-'&ޕt p_ ⢚]+KIi+]&Һm.ҶI-$Bj $l'ikcBVI C ZIj4Kk, ڠINպմACI4ꡠI4bI- B &0#aa0AbJV(!&h4`aOl Bu4 'bXY600 aaBL0 TB!B @a2Lj D DDDDDDqGUJ$$XA PH(Y¢%8EGP!Yd| ?8!_"(3`s5Ћ)PVWcY" ڠZhJ" djPkѐ_ߖ?̄.76~Z+F~!k$뇿~ZW25_GY׿Z+Ash? a|hOa?a?wwwvaa`0f 3`3r9G#"ݮYeb" aevn?)~l>aaapN 8'pN 8'pN 8'pN 8'pN 8'pN 8'pN 8'p0 0 bGϣ>؈M4M4_ 3`0f 9G#r9_wwǯmab""""""""""""""""""""""""""$,.˲~?G}0laaN 8'pN 8'pN 8'pN 8'pN 8'pN 8'pN 8'pN 8 0 0 0lϣ>a?q#M4wvM49٨0Bh4 iM4M4L3` aamDa G}fٶmfٶmf3`0f 3`0f 3`0f 3`0f 3`0f iDZh4iwww"" am""""$G}fٶmfٶmf3`ͯP.NiwwC25Cb"""""""""!":977vʰ(|0%&N62rE$udž~Yo@o*-@25W|2^?r::,5oȒ6~~Z=_o[ H v7TݝFXa[W2 Aߖ'C $|0*߆,aSL/w]Ya+Ih ,oa+OB#R߿̍W}Z~Wgd!]lyg"EaA"j.$AٵqlxA80a*;hC $;7X0~o(a:p8S+f*vY W Q߇a ?=-G}G}G}G}G}G}G}G}G}G}G}G}G}G}G}G}G}_""""""""""""""""""""""""""""""""""#"6ͳl6ͳl6ͳl0Ďͳl6ͳl6ͳl6ͳl6ͳl6ͳl6ͳl6ͳl7G}G}G}G}G}G}G}G}G}G}G}G}G}G}G}G}G}Gl6ͳl6ͳl6Awiiiiiiiiiiiiiiiii{ -[0DDDDDDDDDDDDDDDZiiiiiiiiiiiiiiiiihDDDDDG DDDDDDDDDDDDDDDDDDDDDDDDDDDDDDDDDDG|6/o>>>>>>>>>>>>>>>>>giiiiiiiiiiiiiiiii|D~iiiiiiiiiiiiiiiiik#DDDDDDDDDDDDDDDDDDDDDDDDDDDDDDDDDDG x# a}G}G}G}G}G}G}G}G}G}G}G}G}G}G}G}G}G#|&C6]+M4M4M4M4M4M4M4M4M4M4M4M4M4M4M4M4M4OBM4M4M4M4M4M4M4M4M4M4M4M4M4M4M4M4M4\b<1b""""""""""""""""""""""""""""""""""?#*+>>>>>>>>>>>>>>>>>dOiiiiiiiiiiiiiiiiii#oiiiiiiiiiiiiiiiii""""""""""""""""""""""""""""""""""#In 2*>>>>>>>>>>>>>>>>>>iiiiiiiiiiiiiiiii4n馚iiiiiiiiiiiiiiiiiv؈J(>>>>>>>>>>>>>>>>>iiiiiiiiiiiiiiiiiiiiiiiiiiiiiiiiiii"""""""""""""""""""""""""""""""""""<%3,>>>>>>>>>>>>>>>>>iiiiiiiiiiiiiiii馚~ ̵TM4M4M4EA4M4M4M4M4M4M4M4M4M4M4M4[M4DDDDDDDqDGbHb}G}G}G}g}G}G}G}G}G}G}G}G}G}G}G}P>iiiziiiiiiiiiiiiiiiiiiiiiiiiiiiiPi27""<Y Q}G}G}G}G}G}G}G}G}G}G}G}G}G}G}GG}q!#iiiZi\drM4iN-0#4M M8drL2#h29&Ai#U}4M4M4M44Pkiykvkkw{TCkkkiYۈ"1 bxA #.!aH1CAC}G}G}GGԛv˨F%eGCG:x#"NC>hi =4fm3qrvse9vlh4L`ӑOIg#fD4}_m5׵m5[ӵ4[[u[(r4,8ebGC#qBB0 1GB!8 ؈0A0؎#p{'pN 8'0E<Nϧ##i"]Ga)}`bGGgGqZJ v}0ϫ>(y9}`yG?84TT44ӴMS=;NӴЋON-4hJ rǝ!jh! AN;Ma]6mZݦT@m#i":ib"""""1ƇF XGmG㈏*"2 'pN 8'/ my}CQ>`ϠE<@"GA<ϯ61GE.>oO=44Nӽ;M884;U4M?B# &ڗzxM45RSMK+LA(pkiؘs]i=Dt-88c## qqDqGˀB >>>EUH AZG#8Ժ-L$"*>"ӞG}~½iiiZivviꞆzizziwZiBeZtM4M4M4PDtT[M4nһ_i[[ҵMmӰDtMmAM~űFĎĎl|m A8a! b#">>#6/ av~7q#j:#. t}f MÇAϕ#srqG- DC74M4M4M4Ӣ8biqvƜIqf-:#z- =4ݴM4M4M4[Llm5GM>յűlm4vDDDDDDqN)DhC/"c! -Pq: pD}G}G}Gg>>>>>>>>>>80>>>>iiiiiiijiiiiiiii~WM4M4M4M4M4M4M4LM4M4M4M4 ^iiiikՆDDDDDDDDDDDDDDDDDDDDDDDDDDDDDDDDDDGaz+++++++++++++++++54M4M4M4M4M4M4M4M4M4M4M4M4M4M4M4M4M4(iiiiiiiiiiiiiiiiik""""""""""""""""""""""""""""""""""#:++++++++++++++++++اviiiiiiiiiiiiiiiiī+iiiiiiiiiiiiiiiiik"""""""""""""""""""""""""""""""""""? 2>>>>>>>>>>>>>>>>>,Siiiiiiiiiiiiiiiiiiiiiiiiiiiiiiiiiiik,>>>>>>>>>>>>>>>>>iiiiiiiiiiiiiiiiii25TM4M4M4M4M4M4M4M4M4M4M4M4M4M4M4M4M4b}G}G}G}G}G}G}G}G}G}G}G}G}G}G}G}G}G}tM4M4M4M4M4M4M4M4M4M4M4M4M4M4M4M4M4;M4M4M4M4M4M4M4M4M4M4M4M4M4M4M4M4M4Mq嬔>>>>>>>>>>>>>>>>>iiiiiiiiiiiiiiiiii.YM4M4M4M4M4M4M4M4M4M4M4M4M4M4M4M4M4M{lDDDDDDDDDDDDDDDDDDDDDDDDDDDDDDDDDDDyh2gx"3#4}G}G}G}G}G}G}G}G}G}G}G}G}G}G}G}G}G}{WM4M4M4M4M4M4M4M4M4M4M4M4M4M4M4M4M4M?A iiiiiiiiiiiiiiiiiklDDDDDDDDDDDDDDDDDDDDDDDDDDDDDDDDDDG#( ȕG}G}G}G}G}G}G}G}G}G}G}G}G}G}G}G}G}_wM4M4M4M4M4M4M4M4M4M4M4M4M4M4M4M4M4iiiiiiiiiiiiiiiii0lDDDDDDDDDDDDDDDDDDDDDDDDDDDDDDDDDDG ȕG}G}G}G}G}G}G}G}G}G}G}G}G}G}G}G}G}_a馚iiiiiiiiiiiiiiiii۶iiiiiiiiiiiiiiiii"""""""""""""""""""""""""""""""""""#a>>>>>>>>>>>>>>>>>{iiiiiiiiiiiiiiiiiFiiiiiiiiiiiiiiiii=""""""""""""""""""""""""""""""""""=l0>>>>>>>>>>>>>>>>>iiiiiiiiiiiiiiiiiniiiiiiiiiiiiiiiiik- =fE>>>>>>>>>>GG}G}G}G}G}G}GGe}_nݦiiiiiiiiiZiiiiiihi|D7tM4M4M4 iiii9LM4M4M4M4M4M4L4^q؈#"# >>>><<>>>>8>>>>>>>>iiii馚iiizi馚iiiiiiiiiiiiiiiiiiiikia؅B""""""""#"=mG}G}G}@8DtGS>>>>>}\iiiiZ a4AȎ4 0M A4L iGM0L @'a 4- 0M4djiiikj5?GN2G\5]5GDu>ӴMlMrd6؈/ q1qY(" $J5b!c G 6d6:>>Sja`i"ma<0GNyg}`yyyL#8A<ͣw馩išŪv^[iZڧ44BRTWZB $;TC#SMXV8#vmXVCiPŶml8#Tx6888,c㏎.,c8h "إa 0 3a%JO#<% OEכYjayũ} Yũt)<Nϣ﻾vޟjiꚧiwuߴMSM5M4BRM A^;^9^WCݦT5RG[MmSMwGTC"""""".ؗN-% qqDqņ44;c#ДAG#&>>>>a8gDu]*@:ͬ"*P:s>a`yyyAquTHCˬ> M4M4M4?OM=8NЋЋM5ON-[ӵOOCOAzi;5EriiijuAkb8":":mikޝPkaGlm5mb' !G"?b!a1!8Eq"ĺ2G}G}G}@s ]gmHqY<8:hHS[;#4M4M4M4L:tCNӍ> Aq$=0yӴM4M4M4MmmtӴ[MmtT0DuM5bۈ!2N\N!C'qCD22!d܌4 C(rB? 12:>>>>6pG#<<(yD:>'Gpl3qf^>8P6?&"r9G#r9G#r9G#rsr9G#r9G#iiii 5i68A L6pM6M0h$a6nrM8Ir9G#r9_iiiiiii|4M4M4M4M5GM5M4M4M4M40mDDDDDDDGDDDDDDDDDDDDDDGxa}G}G}G}G}G}G}G<>>>#K>>>>Ẃ#4M4M4M4M4M4M4MM4M4M4M4TM4M4M4M4OtM4M4M4M4M4M4M4M4M4M4M4NM4M4M4M4Mpq؈"""""""""#8p6G}G}G}G}G}G}G}L}G}G}G}G"GGG}G}G}G}G{'g٣M4M4M4M4M4M4M4M4M4M4M4ӋM=4M4M4M4M4,BM4M4M4M4M4M4M4A馚iiii馁iiii=ۈ݇`0ĎG}G}G}G}G}G}G}G}G}G}G}G}G}G}G}G}G}GwgٛM4M4M4M4M4M4M4M4M4M4M4M4M4M4M4M4M4Oiiiiiiiiiiiiiiiiii-G '>>>>>>>>>>>>>>>>>>d4M4M4M4M4M4M4M4M4M4M4M4M4M4M4M4M4M?I[TM4M4M4M4M4M4M4M4M4M4M4M4M4M4M4M4M4DF۱WA'kh>>>>>>>>>>>>>>>>> Iiiiiiiiiiiiiiiiiiiiiiiiiiiiiiiiiiik[lDDDDDDDDDDDDDDDDDDDDDDDDDDDDDDDDDDG 1;SG}G}G}G}G}G}G}G}G}G}G}G}G}G}G}G}G}G׈iiiiiiiiiiiiiiiiii]SM4M4M4M4M4M4M4M4M4M4M4M4M4M4M4M4M4\2 lDDDDDDDDDDDDDDDDDDDDDDDDDDDDDDDDDDGGaH>>>>>>>>>>>>>>>>>riiiiiiiiiiiiiiiii|5M4M4M4M4M4M4M4M4M4M4M4M4M4M4M4M4M4M|DDDDDDDDDDDDDDDDDDDDDDDDDDDDDDDDDDDx3F[M{(g̍W+F Lœ*[?Boa?FCV 6ߖŷaWoasP!vovdj|> >CnoGPad!!FZќ|Kضn ?-dp2]+ 3hrT25Cmln7|[~aKaw\K#XckcLKg+2-g4 XɱDr#DboƢ/p ??RM?c,Saa]<m$M6璔ህ"?,Ap.@ D~DŽ/a7G?v[A=m;D": ? 26.Й:nm{ n-dp2 0S4y25Cv?6-Ѧ|DGiuǖG#ǖU Ah'"o# 0ܲ ~Cm$s25WbAp! qp bG\C"?̍Sw[m0 n[lxaǖ#w S E#Uarʤ_GA@ab#ۻ)=؃mw 0GNpoaa_?򤚻?D~ĎmA1J/]9+/l3w 0Ďg?woi m0 0dj7Ŷ 06|KH 0K|K7{ 1l~UADq}G?7{cmu 0nAmn<aa<>]w cGaa!F^:ǰ؏xX 0Ψs3|Cn<2|Pa`ͳ FC߈mpaaar9~"!n 0 0g4djZ m_aSZK7\"ma.Sww9))*m6aam{www<ݠCmn?-jL0 0 0ДBrdj؈m5 0 0kc/4,ㆃ#U 25^IW8fFa #VCCèD\q „#!~!{;{ C*Fr*(_']~]xl|r>CT_?v?PDu> s81,1/=(zvP;* G[-/ FHW{'pd.| !sS6!/tw~CDC#*#!Q_dckC"#`CL`/'a2a &uZ}iFOo ץxޗ/ iPCQGu'OJ im:/oT4W%`4@a !Nxb X2 h]t:\um׽oKﭺw]V_;$A2A2UA2T߄O7∟7!2:2!2rC# e ~9N@Yp@< ӽwOA!OM9!OM9!OM5M?~}}DxvGDytGDyDx7{OM}=7I4_UW_lB}ToV8o`齃?`o Φ7 .AX<%! ~߾7 ͐}ϖ|ݴKm/ݴ-i>6 0I8u]EnQLۯm5m5m4!ǵ ,40kpAӵa"BA ! `!!DDDDDe#;#c- Ƞ̋ WP_?k (24d y(24gz)̈2:Y&eC0 a3f2r a\ 93 d3Aa=~=0L zOBqiN-0OOqqq}q`Dy h2$DwDyDxD(2(#r%<ȷ4&,pOOOOȳMa=<&MI?=Ot?_,P_'`;z:no#p~~ |7E7mu~,uo/{? _{_i{iki6iv8㏎kݺn~Q{^|馹!׵ 0kj^_{A /!""""B"XaaaaN!#GDnb`#&T_"J_̌22̨s)yǝL `0 ~<0@'0 AizzaTM?COM<'STS^_j>VI k>)0K`(l%?^OSiid(h0iӆN_ ! aD00N p""""""#mNDr3DqٜG328G3DG;#82:428G3DG3dqљv>fdq Fh2?^~Q!0j׌AEd]E! ,D0C ??PDv011+׏0_"?lN3y׎?2PE8eyeW2Yp5NC*+ӇuA9 2ʬ?׾׾]{.DM{Һ#T uGuuk}]{#9h3FsޫpWhۭ=}{n%__MnM}Aj ѳ> |G DK#_8#DLݝ:aX+Fga: p11N8ӽ5?w]uӮu}קӺ>H/oƮ.D|_օ}vcukvmwDtAk]7]9e&ί{v#">w&m֎޾j2 3xj5 pAiA׈8#, )(d#ASQ y Xe@d\ 5W?0D|G>ye)/ ":v |&o;~8e& >y̋Eȹ1":`e/>|}4D78'[__OV %B2 L2.":#GX"0(":[/_e:R/ ;Nߐ;#fB2#%d s ٬*>YDo9 ž< Na(s3 `@ MAzahM4 Aӏ< Dyn;<SdA0Akk/_RDumm/[Vm/m/q>8㍃8{^E}5Cd(?d(=`:bLյ{[V 4_D00\CD0C ! aDDG蛔)0QmZk!̋Ƚ0d1??GO㏎?Y6#pOG\%`؝&o;M4G_d 3$d yd2D4-m.54=Ȼk nȻjDC*Q_uzn^kWG^Uɘ"r.a 3w.G]o^X޻^ u[]|w]}z{_:ީY@?RG~?xDuiAz덮?׵zK^^ׯuX"?u]km{]뿬z_;םmrfs7 } [kڎ5Zުk_m^ZkHwuHg_H{^Ӻ]?G_k~j" \zzZzu]X޻[zu߽vwJZPD~=vwJ;]>v g|ɛzQwH{QۡQLw_kꈣoU\.z޵":o*2?kQQlQH~>=^׵pD~׋X]u]ru#qqcGkDu`wדK;Q,^?@f!fE޿Ȼ̋ GPDe&qq#TkO|~>y6'|f \hiW)!F@:s"~5;0">8e'":LJ"?׃t"wI`qQ_QP?[4  8DaEtAEd]E8@xA?PDqq8O^Bd~Iwda3)̃f# ?)@͐ d2A30 0@ -~>T=4ai]hM4 *?G\_?N>VYB0G|0Z#̋tGDxd[dw?M?Y;7I` u_ׯl7oE.D\`U_o`C8=֖̄`޺^AȻّ̋s}u6A΄kk/]/qkjMMgeVگ6 "?׷uQ_M~K ?C >Ci|0ڰh5aaa!A DDF-%/0Y7΂#T|qڍ!c3"̋2 w"`߽\-*zACjn3{r}D㎓Ak":t̋PA}ú#5?wҡo~=Dt[|yAy3mGtmH|~[/Ӷ?n":d]xAPK("?:QDm*=KDt^LigszQqw#t~KߺҫtB2./m/Wo+#oD~>Xcbw":&gL#㈈oDūd#qwfEDuG>8G>?_6"w&n?[2ywysP#k|qx"?G\SΆSO'ywda#)̄f# x0@ 0 0A\ d0@'0GBwI? z =0AOMTM4 OMӏp"<;ƈ$GQ4GE#ƈnE6t=7"z'I+ث B!Q)룠?hqM!̋Ƚ?|/`_苟D\`GOO_%_~$#|qmoK9 `>V+[_lkڶ__Q`(80KSTW_i?i >Ci#ᦽp[[V 4_p!. C0"A<b$sq""8q-%;X%)5zi |A؏Ȼ̋ȹDuG8Du'HHF8kk-qv2td#]A׈Gm!yy<8?OM_":3!~_2.<?M{n8"?uo_":߂#ǿ;y3yݥDt8?m/m/d2.EgD>8?_}m/"?;ɥb"xk#:=Nq"ow?c"?G`؝ɛи2td#2.G׸">8PGڀC0s0s0s0C@C@L  3PC0s0s0s0s0C@L`````1ɎcF>a#1D~H{#8cIdcH|Â#ccL||㑏8Du$=pD >WBGGGƇqqqq#CÆ@CÆ-Qp&.P(AB K V9M(A?Ac e; ˙@|>8OAM=<Mh-tG A?Oa==c VuB?_ˋx;.pnSv^{\a-]|vqPP`0 (#6KVCZbd(0ˆP/P!"/TN`ᐧ  i6 Nz}'W:WN?Ap|BL/}( VΡʠڭKZ.JҦj)k Ph*"02  !pR%# endstream endobj 58 0 obj 26166 endobj 59 0 obj << /Type /Page /Parent 3 0 R /MediaBox [0.0000 0.0000 612.0000 792.0000] /Contents 60 0 R /Resources << /XObject << /Im12 62 0 R >> /ProcSet [ /ImageB ] >> >> endobj 60 0 obj << /Length 61 0 R >> stream q 614.4000 0.0000 0.0000 792.0000 -1.2000 0.0000 cm /Im12 Do Q endstream endobj 61 0 obj 64 endobj 62 0 obj << /Length 63 0 R /Type /XObject /Subtype /Image /Name /Im12 /Width 2560 /Height 3300 /BitsPerComponent 1 /ColorSpace /DeviceGray /Filter /CCITTFaxDecode /DecodeParms << /K -1 /Columns 2560 /Rows 3300>> >> stream Xh"'F2Awe-U p@(AR08@ ʰr$aQpapF 'iI¤I6'0NMƊMǃr_Ah h Wnzozo^]_+~ /cүH. aK%cI/ ?ۦJoݴ4 Jm~~_[i}/-ZJz^%uT+uD5IפC_KI$Iz'vI.-M!&HzHv҆Z4Il$% $iZIJH BPOb [J@a0D|EDb"#?%I(AG4jaB*pSYfسc ?/_^^^K/CMeh,Gwv)e>ey,̧P4 8HK.ϊG A#a \.P26rAs8r \4 !h)p\3 #i0^d DaiC 0 .\2< 0>˲W  dv '\,$p,;IwN NppM$6ix8?;@o𓧻O?IMm¨uH6'IAA6{MRM$LӸT&u_ֻOm?moq)?`Ĩq)ҷ=>m`Ĩx:߃%kju([+JҺ+Jۯ~C]֖um/J{?)'~_=WKn__~oo>f ߒ?zp~u+⻦HKޘ_oK`ͧmsWbf{uaF#u_lJunB ﷿Q_{kx@hqCHK_ӨKm}k*IFy?y_ߞR7i}I}[iz'Ko'ߤ:uy:M__ߓ^Ɨ~Ni}ZuVl_~m'm-m$=mUҶM֯^i:M邏5 xk ui~ W^km/I}Z}[KI[)l&GV]{[1JՂ)ea0E@ WV]lUH'4P"T6M4 $t j&$Ia$ؤL*v 4M;aI $im8i0ai&JbPFᦛ +ILNtղ7 6%چ! `7P15A !!RB0A5 0B0BAAa  a0L'G*#HDs0U Ad&iwiPA6aDDDDDDDDDDDDDDDDDDDDDDDDDDDDDDDDGDDDDDDe"""#_0 "?;-fdgro1 ܸ!@mdm 4̍A*D1M. aH7.G(5IP(XEa9vJO Dja`0#6 x .\0@ 2;aGPa&aH>Awm$$pm8mp4am &h}='M'IoIoI&2D")&}/u]&=}oI{oooU]u㫯oo\n(wyŎ>ݺߪ뮺׽^~|]u_ЯB ozdt g%, G<9!'E 9*<"A0fGFQ!"`"BcBG%9Bq dG$<&@Dx1Z(va뷰Pokz{3e#@`੄{ #X`kFST3|#@a=lG{GS0a L#X`Qa4a{ 0AL#@aM0a{ ?~p>]M&l:*:ME] U I&oM:ME]'H6}ttIiޒl:H6mtH6ׯ%:հbT<տn%:}m[xunoun%:ol8%^>?ǿCХZ_]+zz+J]wI] =uZW] nIῈU?7QkkQknk𖶶o6?|?x+⿊Æᡡ{tXl7m/޿70F?FaWa#sjUzi>}7/%/%%mG}yo}ܪ=]o__ ߆/ }I}wO_XQ?hth),rB|y_y>Cuu~NN]w!o^]_~zm/_Zm/m&}I_~7}{izt_ii^]4xk / akkP׆kK_V+K_Ko_m-+I=C*a2:ueX^A-+z eLS`=;O_Ip 4 0vPTҴ Amn$ iJh$Mm0LM6%l4&m27 ;dn4iIl4dnM4i0ҦiiI8b@ a& a URBP@UAAm0B@0@* ʂ 5a  2Gt 4 PDr 8"9Kà6UG AdA aN/"""""""""""'DDFR"""""""""""""""""""#Z_]tvPᄂQMAj%p^%p2?GG#PN*MOpH? ImBôӇpۇ 088;^Mt${幢ĭ%}T}oߤ?{nou]:ܡ8qZ߮!{}Ɵ>[XK8WU]]uuuХuiZZWW]>_rVG1 䩒|BEkn[[VonI~⾆+t==CCCKF0#-0aO0kjﷻCC ?Tkymkia/7IޱK%O]~N]~h~hOu!m/Km'm'Im/mvzMioikk׆kK~_KoV-[az{albz)b.l&V{]=tӵ$L0IiIiTL(m#pi8i0il4dn iI4Mm0Mm1(viImCIp aAl a& a0 A a a BL* L("9SL 0 L2\L* ' a. %d:0 &aL4 0L0)Rޙٮw,̏]W;̖t¦0S pphym!$,]}W^u]yl"'N3D&x'BGQaz9#qٞ#œ3PG3""K%BXA{%q#dx&CB(0L9PA0aAa *a= FAah#aȱ#X=`͔Lxp7C0c*a00fF5{"٬0cH6w tUoH6p&oiIIw OWt{uI&â Ti7鴞m뽷v1*뺷zħ[t1*?i}W{?O W֗]^W-}[=z-u~]_WtV] WVu_?a(}0YAT#a0/moaA_Ku m6 ~,7/KzKKm//m$4W_~N/^Ɨ~NN4_:0/^%Om_6mUm-mEkJ4k|5 o_اv+޾WV]lUH'4PE8=C+ ˭[ զIM& 6I4iZL4dnuLæi(v4i7 #pjLM6%iZL4dnv8iCA  a L2Gt 4 pm 0Aj0‚#L 6d&im"""""""#DDDDDDDDDDDDDGH}_}}ivᄩIP )^Ar!y^wdY*i{ *iL,/_ hipvh4&K;ŏ,Fȁa )9 g6P BqM BsaJ6 ?|06 #`/ .<20<8` tx 20<2f3qg\ɯ]~i:Nn[nۻ]nᴽuOaޓ[{{8?]~ӫ> `̎ȣ12:"GF`##<Њ3O PNI'3L| pfy' H2$\Sfx pA#d',Ъc=#`{GS0c#@za0c ƒ4*`;  G40dRfah4a=B5#znqx(6tUta'IM諤NItU UނE]&`>M$M;InJu`~=1*Jtm}=>vu~NO:'^]{CO_OUz+K-+ޗz?+ucc>ccWKn~K_K]-u_=pXp_CtV]/aK O9?l?#@=m1/^aQAGQ|aal=__ۯCnhsS7hsSS槧7oo a߯_B[k _H7~6om/m/פ~goo~̒O84NDh,r>KzدtƗ~N6z`m/}}_cQҎUҷ;{x㢐|o}ya}׵j W^k}oc+zOEb b/u!]{v*A9k[oW߷t[gEmE?4M8i0N\4i7PNM4iiMM4$iRil4jtղ7 6%]zZ޺]A0 /OG&Am0G aa0 aANaaa-a06 0a8a6MV~v߯IDDDDDDDDDDDFR""""""*"#DDDDDe"""#m- o_]wm-p o]VtzM C(a RMRM&TaaIiJZ_"L0b Ub ! !C7 1 ACa`0KJ;3+JᄡiLT&A DDh"yE!)3!~i 2 TPORg..Ih:mG֌'_Ko,Y !R@B@4 N2I[W^| 2d7^%U׻nM H mBYJg&9^x'y9L27"><HyqMBYHg&9\x-x7a ͔>E4 0a 9II%&x&lVߤI L#X`{*i0c 0T ah4)k 0c *aL#@l&0TȷLSTF=l3|#`l O߇TNmp:N tUjE]'H6UXuI諤U&êME]î&iW¨uH6Rm&oMR E_cw)mm=Nħ_m1*ħ[kz`ݷħJ1*v׽W]{iu׶{J맺= t?6:wMcV_._[_o_kk]W# #?0a-/?mo~ n ~  K%oo __/_KI/OO{=1_~ץIu^j̟_[z+_խ '^___???z߲밿]o_/uav+ت]euad[.OCm{ 6Fᦜ4M4 $i&Riġ *#pNV#pi4}6IM;dn 6IEA0#AAG d0w A%ނ AͦAAjaa6  2Gm0iA0xa kI?n""""""""""""""#"""+DGDe"""""#Km/o^~[v[ vI^iII4MMƤ҄A a a80 `A|RP_ %m=& 6@A[*3޹%9S'dɟM0 (T PBh$ʅ4IȺUz꺯U]WU岯32:*ȠQ9D"r& 32:2r$pg1#l K3B'"O0'2:3#LB?  ) ǡ$ 2r(2:0a{"٬0{3+7 za{"0a F4k t= G=#`2*a*`8GSG¤67‡E]'p>M&i ۸tUE]&E]&¨uI&âME_ l:**6տP}%n%:VۧopbT8wun۶׿?/K+)^]]W_]kpu?c{_C?a#Fa#%~j6 [t/|ö _l% ~7kK [i%~}_a|t)/K_Nф:uuq?ZmvUm.ݴ4׵ᮼ5C__ad_˯ҰV܂uCYu˫.خb˭NLöFᦚpaM8iCIm'v &Fᦛl4dn mZI &MiIMi#p ɦm0apDr0 4h6 2HPAl(*0iTaPaG 0AA%AL("9DDFR""""""""""2DDDDDDDDDDDDFJP]b AGTgi2 (XPB2A`Bا fQd'.M5f3Uʌ쌅gg"d/% za*a0 {TG5MC`T¦T…GL#fIME]'I TIqx_ i?Ĩ{m J>x@5;Pi]ii]WAҴo$'nFiDD(ӏ_CC x0fjo]]_ 32: 03Ђ!0$s5d3"`9D%Af P@0!r^B<C$@&\<0eP_w}_„{F  3|#`hPT0f0a{ 0a4 Pa&=iXPT=`XE'_~NuE'Ip&o l:*& mtWI4Mo *A{A:*3roIcm-ImkmJ Jq)}oaj a j[뮟߭+++xa1LWT v+zb QkQU7IMCiZM1(w+t?C10 NA0"9 ? ͯ"""""#/۠ _K _%6Kq:_/4Z_묝~NzK]{ki{i{i~׿o+Oui4k5kW^X[.b ՗^i1^}O]׽}T „4NLô$il4i&I7 4NL4jM&Ial4M4I7 `A & 4 d0 a Ta@ 0 d8Ds0d0Pd9V(&aL(8"""""#)K;Q%i{060QE3UɼFD7&vUM22 u2A Ց :5gAA ȃ)  44B4 k (FPBvvm6MTA l*N88T7!IKNn &OעA&V. IxOSnzI$VPg^oWozKKdH"xBq* 6C2|B' L= MEoK[a" |Њ s2m0T=iLp0<(F5 *}IiakFU uI$l:*U Ti7H6} G,LV&#ĨjJumĨ`Ĩx:viml?6AJ]zO]{}&6/u~xoQ0N߿~Vka#{#&O _K _%?_$_Nz__ꖿ֗D_zW={"Y?i]{kFޮI鴛_ >4{S{ӫu=v˥b-[jZֽM .L4i6FM6iVi6l4M7aJIM 8am1(vi0M0"9K  08DsG0L4 a 2H@ BP AAЙ  aAk㈈rAFGN28q29S6 A A 0 Tkju%v>q8ҦbWYDo ¢c?׽kk2~צw݇i{ikzMJOKa^ZAu7CckW ^\}ɲRE!ɺW *7YxSKy'"(F EBq$g8zfaGSiL4 „hOL#aASEL#`{MPT40T = Fg5ME]&MaW 5Z*PMP諤MTz tiáAzMoU/][[l{n%CVST7ո*^msk9ͭF??_K7K7a'^N4Y:'t]?m-մKm.=vܲg!hʌO;1k^4|5[dܞ0ax *iVlWLW)}^Yu[a~C6MM6M4aIaL7MlM;IiL44@ 0a uG 0AP % ͨ G0P M'[T"(eNqQDqzz?]W]Uz:/ΤPEO3ABq  )J yA,!*%2%9Oѡ "pzA 3h #@aL#X‚싡{ #X`8*a a{TG4 a:a L#a0T<0 { 0f#`4{ 0a[A6m uI‡E]&di7'm' 6oH7*6CM6|(tUޒl:*TaWUl:݄aNJuNmz JĨq)zmݷ{ħ[En:WOt++JJR:Xv5~]}__?8htaFm?Nڇ6j5Ycl?E!xK mi~oK O,]wwI''O4]Nt:uu׶յRKi6[imI +^׵a4_k oP_^ئ)l&G_%LQ V]X^*˧˯b++دz+bL4bP4Ӷ &Fᦚpa7VM0i&M6$چIM4aI4iP0h2\ &aHaB0T)AaaPDr : AaAL2^AAADDDDDe"""""""8"""""""""" ""5M1aQ>D{c  ۯanom%/% 8g!mp!e6 )`3 H a//m/wm,nYA EɁH0,ɧ.d͔u~z_/zcK'LW4_:kwtvmAwi~oﶓױ*[ڿ_u*t?߯k]]~_CU׾K׆iZI'ޟl&L/]YuV» Ca⺲P*˫EؤاqWOi&JbP%l4&m27 :FV4ؔ;jL4 iI4ӴNIq\>>NPaaA Ad&iwiPA6aAʂ 5apapa8"9 k?+"8"""""#)qDDDe"?'UTߙ'__Kk$KǷ $ᄼlP0` /~)t_E:'5sZI/]~Z_I/i~i-Y &naM4MRM% @dIA "xa0Ab"""""""""UV[&dB#edGAx7LQa{pa L#X`Cim'wIzMPNݯ?pFa#j a _Xo7/aߥK5'_~Sh]Yu[.Æ#p &laaAɨ b aPa0f6JI諅N:*3 MT*NR 6i;OToWIWI`=)8?:m*)A}{_tХzJ믭+ߡ+Jkkد_n45WCߚ=6F+}#ωa?p - %_/ Z]wo7}KZ[N|N'GD~q?Emi~__ o N__M2ZfE9vWSga?] -1[a2:zl&GO_eױ]Z(~V]vدPu&*i 0~ 27 4M8i27 6FM;MnlJ +I4bP톒iMi27Pa6[ 4M44Pp`aA M  6NP)#a0%A!Aʂ Aa MkgM"""""""""#)QDDDDDDDDDDDDDDDDDDDDudM t?h*/_WLU^J+ |2|x̎0axE|JxBaHcd%C3J G4 O%BcBDx&6IÜ iT*a0a PT40TL#a0T5&S0f0cj*a oh #Xx0L *6CM6|(tUޒl:*TaWIi諤uIz7ޓi>m&âl*PM">%:{o][սSS[m[%C֕zt+ҺҺ+߯뮃?ֿk[kQk CWSAfdxS|EQ3iffdtgAO2 32:"B k<h$C!"`1"|`>ASE6AL#@aM00T„{PT=j5 F‚xG{  4=`= G‚]pWI&ޒl:H6mpBC0tUl(uI~l:$UUm'Ul:P;*oNVPSտ%:[n%:ޟNQ__tUz~߯롪Ҵ+lV(W]}X~_ &A?W~zaͯVjn@a\%%KKK~V4W_O~KSy:(ڿ_褟IKm/ xiZ5k_fO__%L/_zzb ՗^lWM;Mnm0M4$ӆilM6Fᦜ4aMiLJMM474̮;fW-L&aMA%A#A0mAL A&#AK00aAPAaa ޘP (DDTDDDqH?  (Uz@_"d>M%r]Uᄢa Uح6(z  oqM<)`Ȃ(0L9Pa2:4#<Fb!0ep sND2̎DmA G=b(F{ #)a4  G5 Fk 0aA74<#a{G{ 0c*aL#XSL#`:a0c$M;Im'ë :ME]'I諤 Ti7鴝'I諤êME]'M*t~O)ׯJutm`Ĩx:Ju=m/J~JW^iuZWZ^_znZk[j+tCWXp@=m2?#sk0;kx@/ _/n AUy"YfLTӨKm}7/%/% =PBL(PazKK__ ߆K (PpRnƗ~N!?hth),s|yZ_Nuh|umﶖi^i~_",r5h_5]{4xk /[QQWb(~LP+.EbPL/]YuVKaz/#ث.鰘"Ztղ7 6%چ 6Fdnm27 4ؔ;dniҴi4푸p҆I &IM6%M6iICij꾷vNMaA ڂ SPAM0 PM0 $pA0L m0G 0#d7ia‚00 0__XDDDDDDDDDDDDDDGH8 Ǟ )Jq Ĩx6 #Yт6G̎ PYDN3A0dKF1̎B.BD" yLr6+Wa4੄{3WM0a4a#X~6AL#Ç00aa0ah#`4{ #XaAS<#``L#`8*a z^~R|:**7t4zIꓻU&âNm&ïi6:AWI?_]/mN{ħ_ JO:)m){Ju$wҺz֖tCᄂMV?nV?cWn__V:X)6(E+!kt+0`?FWaߛ[{ͯ60a1 / _ ~_%xo K7῿/ᾗ'^oY:Ȅm?(w_%ii{6O_i5a ok s.-1_V ӱ]^X_z;..M4M4i4lv#pi4lJġ *i6i4ӆl4{ 4M4ô0Aʂ Aam00MAA L( U 0i8"9$aA8"9TDDDDDDDDDDDTDDDGaC" Us|#a aB<'ITt4 %QQĖ!)KQ_U6 ,4GB' L= N 3(#0a=0T„h #X`a Ӧ0T=2zooL:A6xTaWUl:AĨq):vmn믭+J~j-~zwW=R<̊e>d a#6L(TL(G…*N@4?/,!!$B:ץK'^u_U__kK5U_at]o_eױ[i7I#piM6iL422rT<2GdxS|VEO2s#L=^A 4$ȶOq #VJg!@ D|(D%AC%0a0L* K:0 L6SL#X`3`k GSGS0f3t83|0dPf 5Aa{"8PcF= G=i4{""""""""""""!VWI&áߤMTiâw|(tUfViIIw a& M%9.j߷߃n++m/J+m~?ߵ^t?[?*騭FWaߛ_#uO7a1/@_t- _[u_Ko%__ߥ]I.פ_Ky)-.1_ߓ]y:K6W%cm$U}W ҵ}V5-*} LV=V]v]Z(}_ 6{ TsE *1O[uU4dn dni7 MI &l6FM;dnS#pdnlJ $a 4ڄAL* aPah2\Aʂt i l( K xtaQQDDDDDDDDt򙜕ibX@3%y3+t¦/ hpym9TEi^hX "BG%Ie6g 6Gr2:P\x7˒9 { * FAah#aȱ#X=`Lxp7Â45 F \* jm&f¤6RoI諤l_[z}NSn]KJ~~_n?׵wMEnbf [__ӨKm}7/նah4t~NE^{i"k_ui~ W^k /^]YuV» C`]Yu({eբRv ՆMFT:jmCI#pa7 6FᦛpP"9L4& l( ‚#PAj aAAmlBr d rDDDDDFR""""""""" ""0x"a y e̛ U_oAjAvAm m4l$}'Kۧ$7A/^2ء:J?An}?#]%z_rK o/xtýzoE;<՝bخdHm PS 0o?   kmmK} vhvmY3Ci?T}/[maioBIa$l0l6II6e_B 2$   A_=en &9T$rH$s4u' N%C$~hG8g1 3̎ Y#< PDٞ#œ3NG慚NEQ[G{ #@aL#XSL#X`3`k GS00cF{ 0ALG 5Aa{"8PcF= GNh& E]'M6 &&ޒl:Rpm'I M_E]&jm&f¤6m uImmJs%:bT5oV%:uo][Nt֗UtХzJJzҽ+ҺzRv>_[5kv?n_[+uXh~Hn!uFØ??{UFPai/ _@k_/^- u m,7w~kk_V_Kihz_d8(w_=1ߓ+u+'TKm&K6IKcm$U}Wҥ|5~[jVjXiZS1O^L-1[a2:zl&GONv]{v*A9NO*#pL4MCMl6Mi7i6%ӆJM1(vJMmU27FġM0M4‚#a%  aPaML&  PA8"9B#dA‚ P:0 'vNMaAh2^av(_זˊlPFyfy(#XˊlN'#lB"'Gȃ̎#l̎Af 2(,#3i!"`"|1Z = G‚ L#mA G=b(F{ #@aL#aB=#Ç00aa0ah#`7F‚iWIaC諤MRM$LӸT&M6'IpaWIm'H6aWI mJu={߃n JO:)m)m*Һ+K-++]iiZ]wI]ZWjmk鯡騭ÇC_{?1_ͮjYCͧ'`+ =u [[_6P~m%ׯzKKo_ޘ'^N'OLiwfq9?O:E;N{im{i"ڿMﶓﱶi_5]{4xk~ ~k}C_kح˯bH'4P"S_]Z(WLWL*4MMmU27FġM0M &FJi4ؔ;iCTl4iiw0 AAL' &ڂ 4. 0pDr#PPDrG00aA 2UC 0a"""""""""#)DDDDDDDDDFdOeW,56 &#iip˙= 0p@LR}UX+J&K(!`=]u^ڮu~fAH䰄Ü "3p̎?`Af "A) H($A s9ɎUDɎWgh$23PFL#X`k*i{ #Xa8*aM0a aȶk #40T40Tk 0T=8pc G+ecoIxTaWI諤VWIIêME[E]&âfNm tUMtUxTaWIpWIvt{Juޭݶ~mJKҿR+ޞҺ"ܩe+2;)<ߵv?_]ߨc?PB/?__1XW (\(_ͮ`AWF?p~  [R,/;_K ,7K߆I,7ׄPE^i:bͧ'_uZ&IKm/ZWm/T+ a׆_uk҆~E&GY9BU0 p!.`ȃ2:4"'"Ff ᓐD'y?3#œ3iLULSe UC++z^b밶]o_բI!xGE6@:a0ah #`k*ik { 0a*u&m4Mi7 4ؔ;M4dn4IIa7M0M6M6laI48i&v7E]&tA6l:*8tUUoI&&ޒl:AAd0ia‚00iG& 0 0 2S PDr K0aAA d0#PPDr AĨoݷOm)?JuHG~{tҺnT~_CWn0FͯaߚҴk _@ka(a  /[ئ(7nK.0@>)}:Kzm-I oҵ5[՗ZUeױ]1LS׶#-LW_iᤛ &4mCIi&i#pm&#pMn~A0 A l( 0iAa6A0L* j""""""""""""""""*":eI$M+%(gee\BT ES 0 a PN/BVpvpq6SCiШڴAEW__}zɰdQaz9#ʂ2#2(G3 "BH<&Jd(2D91x'$y96Y f D&9I d{ * 0a0a ӄ{ 0aȶk #SL#xG4>0c aASL* #`5 3+4a0f2|c |<$# Ti7ޚNl:R E] ޓ7phm۾i8T(tUUªAtU uH7諝L(T…L(Z JĨ~ħ=PunVom[_Pոoո%CVlXPPP?] ޫJJ]t0@[[no|NΈ"WCCW}#F5A?@a@W%o a/KXo3k"|s'#lg3eC,?3PFc(" ̊PY3NAJgqHЎ pϑb)Ƞ3p_K8K6OO^uu a5 PaaM=0akPT*`籃7G{ #@aL#XSL#X`C`k GSGSN^^MOWzIitA(tUUl:*O諤Nh& E]'M6BߤMTiâ}55[__[_o_N{mĨj8=mmJt.mޮث ]..z^zئ*C+(v޽'.ztJJJ.++Ҵi4 (i0NaI4i'lÆiI6dnmCI8i&iL4a7 4iNL4i]kcc+[_( #M0m0PDr t am‚#AAKa pDr A"9KAt0x` At+4?? WC_C""""""#DDDDDDDDDDDDGA5_a10mx#FW _ _@k/ o%_ ߥ]/ͧ]_''GT"hz_dcm/Km-I'|5[[XiZ ҵa Aޭ?+'du})^t1O^L]1_a~O_DSM:dnidn4M4ICM6M -mCIi&i#pm&#pMnm0M40vA Aa` L  aPDr d0aAAL* aPah2^ADDDDDDDDDDDDDDDADDDDDDDDDDDDDTDDD}~&RPT{ Mv-ʞdڃ#YA(T¦a 8P_p<vkE$DJ:_@خd#;/,dK%$_*2\>Sml 24G !0Hy0dA>`5 F`0N$<9 d">$s%d \'Q) `0g NF'L(PBiM4ÇL#X= G7L#X‚싡0T54= Pf0T‚싡0 k 0n aPzaL#`0T5F@{ 4B  wNa'l:*8P諤Zl:*8tUU E\.l:tUf6aozH7]tAhtUoâ8888;KMۧ%:p{m[nm[n%9mħ=VbT;o{m[%:VwZq%D-+K+=i]ui]UkonVu[o]W___[_CWu_U0=_ͯaan _ >a#љ"9AD&x&A0fy#dfYAfFge慔PD8f8g>hD $ F['ǂ&_ mKzT*aB=#a0f0a{3V{ 0a4邦0=nGaL(Fh #` aÂ#@ao{ 6AxoKm$_¨t4&tIH6tUêAtE_E] ޓaCRtiâmwp諅A6xTaWi fKbؤ'['^_ħ=Vn%:V[o][۶lջm)_R\o{i{JJ~Ҿ뮽+꿯|5~ ~kc-v:Pl&N+(v Qх{ UT{__a}hp} VlJ4lM6%M;dni(viM4l4M4푸t4i4MailM6IÚ ?(}ڂ0aAAʚaAam0aAAd0d0Am0A 2S  2^AaAAK0a0 au"""""""""#)H"""""""""#a/%NuzvKK ^?|N:K8{u]$?[_ﶯҴ̤~k5_ {k /_k C Ew_Յb/V]={eV bE al޿~˯LVpjLa#pam0M6LôM6Ii#pbPIi4MFauIN 0L G0 0 a T/ ! 2D(& %6A00 aA%BAPAa0L* K7pADqHW}ixa*lT ɲ2-Lr\+2|0L)Px\. -v㒤9\NҖf]WO_b4ʗU¦M l̎!0l<D 1"9#B42:Bx'\'x'JvB >`DGT sNG`aAS0=PaP`{ #@a0cG5a{ 0 L#`GSa3@zaL#a{:a#郴 t'áCAi66l:*ACA談E[E]&âWI諤鴝oU :*c9H?%:VսASn۶׶VտVZ_zҽJJkJ+ocڏ_e__?C_p__?ÛP^WaT_=Cd$LAdQE9hAi _ ~l8ۯfaPT=357K /h?|]/E]&l(uIv o/J_~Kta9:._N bAVv}KZEWՎ[^P5_ /Xky'~~Z(V]})+.zد Moޭ>A;0هi(v8i0MiIiiCIi0i4tl4M4i4m&#pNچiM#p4o _06PPDr #AH4PDr#aAʃ$.A 2^BAaAh AaG& ta"at/DDDDDDDDDDDDDDDDDe"""""""2K7__uүgJS+.e~JIhL4ii $i0lSAL A&$& 0B"""""""1ɿt̔d/;ɦJk(P …  888;@bTve\eLFvy1ZL(T…L(T ,(\(\(_48;@u"H|d؃#B3'Ȝ3PY6Fd Đx0* 6YD& ă%PF8dDDGDhЌNdthD#B'a 0T 0aaÄh { 0aa=0faGSL(F5{"٬0c0aaL#40T=tTiâ TNzMêAz*6mp&oIi:NaWI TME_M&Umm}OJtmmmzmĨ{Һҽ+k++zwJL3if|0Fy8yH"fy24D' ѡ9f O0g !8̑#d3@;^0S (P|M -C*%\(\(PBpv㝩,|,U___U`B`Sk2:3#Lx"?$ !"` 4#.):>a pSxH26)5#dl6#FNY2("xr6F0H2rB\2:4"r("ջoo}[oPPS%:VSaB=* #a0ca= 3}0a k 0AEp0{ 0a{po0fHiG{ #@aL#X_uW^%}{iPzU]Ww[t= uZ]8T*Im'H6aWIzIp:MH6Rm'wA7諤諤Nh& E]'KNĨjNJu{߃oݷOCCt_t.+K-++++9?f0>dWk[[uQ[}Eoua[Շ?!j+tC\%Ø?ka\f P?F0sn7V}_چa _[u _~D'כO:Ktu!?NB[ko%_[]i{k_V_7w5kڵ5k~ |"}:]:b'YtA: <]}]1_eU˯bاb*Pbze?i>iumﶓj[kinM4ӴMiI6t#pl4i6UVi4M6LM6M6Iimo5PuҵKk|50 a"9AtpiTaA0kxDsG00 M 0MA a PA6#dtWeױ[Wb(~L"S]Z({]}˯bbl&GQ㈈8iJa &;aM&M6M[#pbPi&4iMl6i &alJaAa"9 2UC 0a8a6MAxaG&Ata 0Axa‚"#DDDDDDDDDDDDDDDDDDk#r^3Q^ױZiP`Al.J"")P #,qW+뒬i'63%,O… *aS aBx *i (\.…IX8888;@8??ʴvjq4FE\m(B_WWU؂'9e!#PdtfdtFf#hdt00eBq!\B\b*EGFdNdtU` $0di2$gPY8F`>hY9 S<&r\Bq* *s2<)>Fy"<)>FAI%dg!pH# A܋dH<Cd yx&rJ TBC 0T5#@`{ #=0a{TGS0f0a4{ 0d[5a0aa*aȷL#0SL(Fn T3L*aB5a40T40 { 0c3LTG #XaFS0f { #aPaPa0{"{Pc&ât:NR E]' Ul:鴝&tNoE]&â7C2*VW ރzMCII& $uIoH6Rwp I諤MRAaT*I‡E]&a¤7nx[NbT5nۧյoNuհ{m[l~oS)޻ħ_ J~m~m~OK}R=u֕_^U_]I] =wI]Aҿ/J=~KJ4cc_cVv?bnJ+nV-z]֣]Zݏc}=tk f'6kFÚ?FWaߛ_Ua0a0aC}R!`@A{ _ _@k0 _ [t/67 ޿ /[l%/l6=m$݆m/_Kio./o_ߚ.siO_uuN),|N޿Ku~4WW3Ny?^zc8(OߓOZ+_iokE 6մb]m~k o__4jkJߵ뭭a}1[]lWWO^LQ.^/#+/'A{El&G]UE@aiاb-*5uբb ˭ޞA+LP*4bPiCJI +Ii(vaIm'lÆPdni(vi7 44Ӵdnii4dn dni7 MTpdn &Fᦛ#piiġ +Ja $NᤛmZaAA)# 0a A$taAL("9aAAm0 AaAAPA:0iAa6A0L* KXaaPdA h0aA2J"9#dA06aADDDDDDDDqHDDe"""""""""""""""""""#㈈DDDzW--/K뮺JҴ$WYPPQQ_ Sb+M6*`  a`DDDDDɱKɖvQijLyIMs<ʼO)PS 0S vX(Px *aaB……ƒ(T' 8;@MwƑ$^CX4#3"ȣ0dF  s>b8D2 ̎D'/0df "r$B$f "r(D% LrHHH&9[ ȶOGEEœ"A9.FaB!.`23pS|#<гB!3 Gc0T=tAPf<#X`{"0c <*aǦ#h #a PT40T)k #EXah4?0S9k #@a0a:ah4a=B5#a*a6zNzA諤15A}}&êLMi$I諤*Rfti aWêMLޛIjowp I M$M a&ݶJt[Omvm)){߃oһ}+Jz}ҽҽ+ҺzRص]_+v?+]v7cߵ_b⿡C+Xn?]n!~d _#cL6aa>PaaeF6^M@  a@kx@a ۯl%\7ߨK 77N-WҵKJzVi}o,7Xnפ ݆zKKNy:_uSY::'IWwGw_gRYLi~SKta=N:דLmioE;KUW}:VҎU}m_KZ}Zߥ__4{_Jk Z akSbN_ uuV ݊zˤbˮer l/[_C±LWO]^oa]Lha0E@)b44FI46i4i'J#pMCNMPa馛L4M#p푸pҪdniIi6 $iS#pdnlJ $0p a%n:0 6 A40ia‚0 a ʚAh2^AA‚#;m0&#PA6A‚#dAL' &ڂ 4/ 08DDDDDe""""""""2DDDDDG--/KK뤺+JJҴ(a(a(a 00X)) 0@y󵬖d;I3RȾvj󵌂g! 󲜓Ȏ*aB0x )$[[!61 P  It(V} h+m48;@; CiШqQOot?vlCW*}W؃#B39ѡ#GYPDGFNYPD$ȟ0!0%BGdGFQD&x&L_$s,T<t<y9vm&Vi3X #9#d|#<<("fy24D&$LAfGFdPEO22rS<2GpS|3NEQ30aaL#5a0a00fF5kL#= T3|#`{ ?{ 2*a 05 aPxG]oL0AL(GÇ0aG5(*i{ 0f{ #=0a`0f0T„k5h#`h #`Il:*:ANi:A諤 Ti7ޚNl:R E] ߤu TzIh]&âa 6m}4i8PhtUWI&MNmtl:II& E[E_~ħ_Nj1*%Cջm[S[Nm/%CJo_N{mĨj8=mmJt.mJ޺Ҵ뮃?>+Jۯ>]]W=i}V֕Z]WWCWCO]W[nZVoZZ[Q[Eo4?qXhk⸮ء_COC+!sk0m0-mUm?#ׂ0aW a/? ] 7,7/ ~_K-,7oq_߿_nK.M'^q=hi_u$/i}דKޗ^m>N~y?::Eu-'^h_{k{Oi_inMm_}\xkWSwU_yk|5 +_1_֕l&GO^ueX^tYu{ױZ{+vOUz/Z(LWOMS;.balb+bIӆ $ &FI%i& +ILMp҆ $&l4Mi $[dnii&֞I2&t4a8i4iIim&[ 4چM0M6%M6FM6Fᦛ#pݤaiApDr G bL("9 2\AJ΂aA6@("9KÄG: K0xA I &N:d@0vA Aa` L  aPDr d0aAAL* aPah2^ADDDDDDDDDDDqDDDDDDDDDDqDDDDDDDDDDDDDDDDADDDDDDDDDDDDDTDDD]I/I"l%%H%M1LPC &DDɱNRec"Y̛ .wyGk9Oi g y*L(T<#a &VZaBL*aBPN'I…Mj(P\(Pkmh#GE-EGѭ'f;'ek4". W]}Wk_}U_Udf y4p*?fa.EGD`A9т6G4(#/N'_דC/K<'FLwD4:zcK'M:b4BKum/ݴm-մ}#Et'~:m-K ~xk5k^4 ookZj o[k #캰~X^?bbˮ.t~lV{6# [˭޺ *oa~zn EFa0E>+EˮtSM4M4Mi(vi $MFIiil8i27 6im&ilM6%״NMCITJI(vS#pNa 6I &m&iiU27 6%M68iCI#pmB &a 06A6AM0aa MAaAaAaaA0`0aaA  a#aAʝ%X"9PA&G0pt pDr $Ӡ0aA ۠kvA‚#A!Aʂ DDDDDDDDDDDDDDDDDDDDDDDDDDDDDDDDDDD|DDDDDDDDDDDG/WKץ/Ma DG#5&d_:'#2n-geTeq>wyVN0{ 4… #aM4… 8\.~(P:OPRx;@.@488?ƃBNdغ++EDJG?u_U__`BD'2:52(#L(Ja::#Lxr4GdtfdtFf#Ndt{0Q2s#2'2:Ey PFyD'2:4#C#O2rr'G2:=ePEPYNFPDB@SQO>b93OABF['9ೞ +h$ L$<Ў yFazaB=nG-0c Fƒ4 MAAt#`{ #@`{ #=0a{TGS0a{3PG{ 0d[5a0aaL#a0{ #X50TM = *`0d] 4G  =aASE06AaG{ 諅ItUfNTA6Mޚj*MTh&êA'6TaWIm' Ul:鴝&tNa&ph&m'Ia ] uP諤̞Tm U pWIRtiII l[տ%Cp\}-Smx[NbT5nVվ%:V%:P}SVS[Nooյl  [{m[z}V+kzz]{{֕ Wt/?t=t5__iW]i^_QGo[Qmok[[[[8~Ӧ!p Wzn=l=SU j_0چ2@apF#>@?naka [a ?/[knP N7Pa/%o_Kӯ7ӨKKI,6mzJa7 Ia KzzKدbͧ$'O4_ޞ']hͧta?y:0'[m>NK^hE;/ޘ'#/'~ME;K}}ݴZKm-մI1'}Ҏ}Xi /vkK߭ om[iC[_]]moo[ WLSu[]z[1[]lWWO_՗OOV]{%1]'a}X]±LSa2:Vz]nut `[_릚vv8iCJiMoT 4ZMI҆4jV $ӆPaaM6FIilM6%PҴLJ7dnl4i& $M4NuL4iZV (i&w $ؔ;ji &I mA PDrG0  & ; 0 2EAJG ("9B#d0#aAʃ$\Aam0PDrvAl(&APDrG6AaA4„G6A@ 0paa0n$#"9J0nA6a; )HDDDGDDDDDDDDe"""" """""8"""""""#)HWzZ_]uKIv_i}a |0bb4ؤbl   0`"""""?ɸUs^o~1UC+#a1U|\چ0a6f?@ .a@ %%o {ᰗK K,7_Ki7K8z_Ou{y:..E(uON_:K]?uK_m/m-m&K_a5n55_kk ՗^Yu_鰘"V]o_e׽6#.Յl&G^1V]~X^?bb˧˯b/YtpaL4pbP푸m0aiL4aġi4i27 Cii#p4M4M6 $i#pNIaPDr0 iaG&PA K00 *0 AAL Aa0aA00iG& 0 0 2S L  Qn&TYfvj}v&ٝ?fCyO+;5pJ*aS &T! 0L(TB paaBpPi&ihpviHR'Yt'u|NΉbUW꿪/]u_؂)3p 4"6F'$ <2:?e^af#Od4J20& )Y*L2s#B(F "rG<HK@4SxЏ32:)0g0H,?3H#_KI/m-+K^K C tlS)8A )} """?ɾ ҳED`s.nU P{ (PB{ 0Y[*x #i (P7 ϱjN]pvڍh4$ɚ;Z[CQ_u%P5~ɱGG A.F['ĸ&i2"OC#2*ȜЊ A<A Ll<Cx'%dnE|KORhF( K;G!"` |2”BBYy j00ah (3N6Aah#xGSE}0aaF#a ӂ싇S L(*` A Ga<_o2"*`2x#Xa L(T' 6l/iIl:*3Ol:MߤOWIijBE_iIl:*3E]t Phm'á_?jmq)׫kOڷJsؕ%:Vn>VSmoSĨ}:WO>_t]]i_t4K+A}t5]cW?ߵՊڋ_]ߵn[ztVC~!7?m?f5_ͧ#u F{ __u?u nm@ __ _P,7wKҿ^,7ɵ/DƗ~N{I_wY:zcK'^Nuif~IUETcm-W߬5k5kk /k__= {__S)»_ ˯M銰6#][Wb+uꚥeױ[azJiMFIvM=pa#pM%M4$M6S#pM;arG 4Mi $ &i^PAAN00aaAd8"9IZi   amA#A ݦL0 ۠:i:0 AK00L6PDr #QDDDDDDDDe"" """""""#)DDDDDDDFR"#=_W^]%I~H% % %bMA'0`0`8a< _*ٮwv-SK2fGQ+'gDt">?G8]WU_b>G"xѡdNA{"?$ BH%d'x& Hy0g ,"4##DGFdQ3PD3Up>b96FfGD3p D8ei0L&9BD$LA Ǟ *EgxL丄T<BTpS|3'"aL#ga0c0740c3LFpa0T54ÇPxGL {"k 0a{GSL#a'T40T„{ 8pc*i{ #X‚GSo=GpT=L#X`3`k GS a*6RoH6Rm'I&M^m'I&MR E]&âE[E]…]&ނE]&ja&taVWI~wm'IhI‡E[E]&âMuIhޓaom&èT&Juħ[O:mOm J@ڷ)mħ=տT5no{oS%9Һ++ҺJҽ+[uB]V}_p֗i]~i_t?%t>G[VVokp?C}دWC{ _WC_Cb5jYyͧ?#&25_apF=0F۠~ _ _@k _KOB_P  /[ᰗ; %n7K.6'^N'D|xE4_~Nׂ)/'I7膞]ޗ^q>N~y?:?_KyKm-m-_cm'Km&I'imk^׆+ a o55 m[ 5_[lR}1[YuLP*.LPˮbFbzz{ Va2:bN˯b˯-*} LWaiI $m4NbPM0alM6%M6FNMNPaiI4Nl4 &M8i0bP4MaKaI4i#pm&#pMniIp@  a A0 PM TA K6Al( 0j'A8Ds i iaG xaa)07ia0Aa B  AaA  aG*06TAi  0aDDDDDADDDDDDDDDDDDDDDDG8_-ti$MB\0J*)C &Dɱ|ȌfpFeo;^dfA0x #aBL(PL,.8PpBpvppvhMY٪4Ea J|,BuUu몮]Uu]D$LAdpl$A+!8E~I9 ĎK/dn$rc\ďPn$C "& B(0N= $>af#PD9vhdtgy9F`B8)>F L#ao7SFp { =0fpT=a'L#aǦhG= ӄh #XxF  SF40c0P{ <#Xl&= WIh&I7M&t~a&}7E]& \* l*Pm&M諤N H6}&ޒl:oNoNPհbT< %:V{ozV%:?OI^)^WBu֕A+Kz+Mj>_b_u~׵Z[1_Cz~+?C6a0f ?ͧF060@ _x@kK%޿ xK%o o_KKk߆.:K/4_~N%{ׂ):^%E;)~iim[i?O[i?mKxk}^߫ mui4iZ s?eױV˫. YuV˫EخئduV]{ueX^]oV)'S; 4dn #paM&#plMi0M6iCi; 4ai0ii7Ҵa6M%i&m0M4' 0aUL 0M0 ("9Jbaa0UAa#G: aaB#"9dA0aA5G L& a6TADDDDDDDDDDDDDDDDDTDDqQ4^KoXiAaˆf,)|k *ʌ'&L*aID…L(T…N aap………4;@48;@|V%vW___꾿]}xe6g "0g GAA#  ) 9$ БaD&H0dtfF'2:3"xDPE8y`ȁN'G2rFy̎BG =Aa a0fNh #`h#`7= FaA74<# a{G{ 0c*a0T=0a a5 PaaM=0akPT*`3{ #=0a`0f0T„k5h#`0a MRM$uAA6l:*I6|*A諤ސl*PMޓ7&t&â:MTA6l:**tUޒl:At&âm' mt*6 aWIâzMCIIRt)նڷݷ`Ĩx:JunmzJs[n%CVuջnoS)?:JzJW^)]=u_]]W=i}V֕Z]WWCWCv:ߺߵu~]Xר]kcc+[_v-T;?t⿊Æ~t+4?? WC_CbP=fm0l9?`?'8'?sk 9?6_ _@a/ ]0vK ~,67l%/ _a/kKK /w7w~k~KNhz_u$K8'^q=h/huWWѭ>)}:KzלNcm/W_Z}m/IK}Kvm_m/j jwҵ /XiZ|5[[XiZ اbz˦)݊.՗[aySa}Cbzl&G_Wuv]{={a2:"W_Vl4M6PaI4aI4 +ILN (i4pa4M0M4M:dnidn4M4ICM6M -mCIi&i#pm&#pMniIp 2Z\00 2TG* K7 : K6A0P"9L4&L("9A0 /M0 0A a0 &$(("9AA$@PA00 :#AaA0A am00 &&iAa8"94ˆ8"""2q$$% < aDG뒬ySv/њ|eLI!y%Q>(P(T… 0L#aB… … . Ppppvhv\#xey!%  ]U#0g 36^p0p|0eY9*ȟ0dPD#Lᐃ.)D$LA ȓ"(42r$D G<A!c 3 4"%Y O" |`fG8g1ASL#`&Çk {YFS0{ #MZapa7G{ #@aM00ah L#X5(Gah P7 3O6ANmtaW޴E]' I$ME]'A6m'pM*tA6l:**U&M6t' zMáU‡E_h6am{*O~t?mݶ1*ONJs~SW]} +$KJJ+OiizWtOWWCo^N_ݏv>[Z֣Һ5Cxh~z!aL(aPkØ 5y=v[[ oK _ /_Kzݯ+K _K/._uB~tzzcG4W_^h'^/Edq/WIm-__m/﮾~ kVￆ5iz?ۯث zˮ޺b+eՅdtL+b.M4i&o &Fᦝi $Zdni(v (i0~4Mi҆M0M4&Fdni(vġm&L4iiii7i>aa '@&aAha  ʂtaPAdA am0T ‚ L0Ta0A &00L* j"""*""""""""""""*""""""""#UTrG`REYeD**(% 6DDdfQ3\g`iLq\ y3M2KEY(PBD…L(T¦0a B  6-ihv_E,|NΊRG꿪]_U;꿪_Ueo>A249ا GFdi3C#B(G !<HxD'Q4" 23xS|r3ABDGFeABqBEb aL0d f#١#dfdtR`a <`Af " P sPD<гB( L<BJH2|`cy8y#L GL 0aaC40c*a0T={ 0ci5=h4a={ 0d[70a3NA40ToL0AL(GÇ0aG5(*i{ 0ft=aB={ #@`„h PT|4a*pWIaWI½$NaWI TI諤A&MToI7tUfE]'I&M^IêGâa*At&âm' mt*6I&MM*CtUUzIm bT=n%:{nV_IwվVS[n%CV_N{`JuJ۪׿t׽t;]i}-+ҺtJJAK괮~/JJ;حՏ֣uUKZ[C~+:j+t C??C#v0sUPaU_6uKA5_a065_?/v/}A?vO 7o_N-7_ڄ o%wΎ ߆ }nB/w.:IלOߓZ|yY'_um.y:+1>NO4_]z_y:u'^/EdI?Mmi~^[iz*[i6}cm/Km'I6Za55_᥶ xk׆u_[kXi /إnbb.l&GVaX+[ ̺b߲ꞽh1_=6#+O)lV1V]{e+m-M&4iIpalJi&6FIvM8i4M0ӤnI=i4ӦFᦛ &FINL4;M4i4piiM0Miii#pݤ00M8Ds 8"90ApDr G* 6Hi4L' aAApDr a&:x{@0vA Aa` L  aL( a5A PAL a00  8"""""""""""""""""""""#)qK/$&^J(%MDŽ0L&DGergf2 ̔O)Yޙ2["YڳM2fL*aS 0Bx 4< H\.  *O<hpv̖)>dB%kQ ]___&>b0e#dhY@p"Pl<LhE ĐHybNu&'Ix"ߓKDIg/ф:OS)_]h|*[io[i$[i{j{k+_ﶖ[i6i?M(S okP֯׆5ui~  a[^]ak]uv]n'lRaؤ+}[]˭[ Wh)uaئ* ׽adVt=_V] I (iCIӆl46I4NMm0M:i4iM6FJa#pӶFI4i6F(v4i7 i7 8i4M0bP4i&lôi27iiI8i0M;aAL0G("9Atph a 4aA"9 a%A%L d&imaaPL( ‚#L 0iAa6A8"9L0TL( Ad06Md4. # È""""""""""8DDDDDDDDDDDDDDDDDDDDDDDDFR""8D.ҴKa(a.J1IP0`0`""?ɹvS#32RLv̀*aB<G¦4¦4 T§  6 px8;@;@4;@'Z_T48&q___M2:4#<>b2'2:4"ɂ'#L"& .bW]m֖=u:ZW] WUi{O]{o[FůQ[V + }48~+bWWׇsk#aͧk0{0a/?a-#a?-?aK o_ K n7 ]oimM'^q=Y"_)Ox"NDa=dt}:*)ߓ+'_yN]vm'm/IVmwm-}ET_5Xk~ (kkJ_ +֯VS___4|+ L+)±LS՗[LVueua{EE[ *'Se׶p duSקI &IIpiCIl4i4iiZLiV 6I4ӆIҴi &F4M4dniIm6%ᤚiI4M6i(vm&i7 4dni7 4ؔ;i $Dr 8"9K!4‚#a0%a 0 aAG(Dsi "9L5G xa!AH΂a"94 aa06 2SiPADr axaa 06Aa6 aA A ""8"""""""""""""" """""""" qI. C 00 "#MY25ȞA2[iS2QԳ\2Hdd[ *aB0Y 3!T„x *iB…phRphpv4khjMCUQѭӊxEZ̆!; [O]uk(~ǭ}uU@'z9#<APE&bb>Y0e ĒHLrIIh$<"#نH"rJd-D$LAO9љf "x'd\'x'&x&l APaB4?a50c*a5 GXFSEay=3H#X`{ 8pT54SL(*~0{ 0c G(LF=#a*a0c FA2xG SG{ 0f L0AL0TU m&E]&t7&&êLޛII6oIm:*?VWP諭A6l:C0JAImA諤6TA7t &t:*I6|*AP~}w%:V}-տSoumm{nuոVouջnuoPS{oջoP~R+I+[/tzi]JJ^b_]K*+uc+v5~]}+tbC]/qXh~?CCHa0#j?Ҙk?=j5_j_ka}/n ?na޿_xK _\7RK o_Xm//KJzW_aK h'Ku:޴]i}_WtKE;,(yuN'ߓimե'}#DڶjMium׆5._O (iZ akXiv^ ]UX_X]-[]vL֖=vzPl&GHU1O[a2:A EF/LSt1V]=v]{u]1_e}[קaLM7M6FIi#piIlNچt0Midni(viii $ؔ;M4IpiIġ#pi4 l4jMi4l4NM6l4OB#L4&6PDriaiA7 aaG aKia!AA1 ! &aa KaA ۠+L("9h2^AaA5AtaPaG 0AA%qQDDDDDDDDDqDDDDDDDDDDA+KKRlK;H%iZ^+Oئ)46 ` """?ؾ2*̴NDc;#5^vFLWfpd2;FvUʲ " Us$,S U2L*aB*aSG*i (G<4 <...Ip|(PRt/`Ihvhw5ckX,T8戃Ge *8&I_U_UɰedO3PAJ'$s4D``Q`',B#r-' 0d`9g| |"A!yc'#dl@O%H24G 'G hYK3PA0eC,#0@0̜"34PHa _z9#C.) C`= G„{T*a PcFk 4= L#a2x5 Pk  G-FST3|#@a 5Aap6mtl:tU}tUU‡E_E]&¤:*MVTz*VWIm' |*  *6Rl*NCA:M6mtU &áI(tUfAA6{MRM$ޜNۧڶ۶ջooump_Voxp%CNAmm[VT8jj1*/+Һ/au_]i_iWUJ+5iiZ_i_]iuC]tKׄG[[uoZEkuz+[5tzwWWtV#jUaM5_>F65Y=u`#jF?@=mHş _O_?_/@ _/mo [_% _ Ku mKKKKפw֗N+?E4_:uOEu^/K%Liw_Z*_kimi?k褟_cm- xk߷_]3pZk5~w[k4ui~ m밿V_l&G^\w=b utLثE캲˯b+z}"Sa2:V]{a2:z U.*WbJ4MI7 4ؔ;Miiivl>4i4M6FmCI6im27 6 4Mi&JbP%iM6LJM6FI4dn 4ӶFᦛ +ILNtՅiaaAm0 P@ ! &aaA6 a00ih0‚#NPA0B,4N2[.  'G(Ds0U  $@PA`i B0i ia#G: aa8aDDDDDDDDDDDDDDDDe"" """""""""""""""""""8DDDqKZK0KP' 8l5)yOi2-Zu;&v*aS 4¦L(P …e… @;888;MqĘGgC|G*#Vvaxꫯurܾh=Uuꫯɲ34,<x2>0B8)%^u_]qZWCUB]h?-+ߡRJK>~:k[o+~zQ[H!t8 ?ҙ_͉̞WO0a6[?6 _/u?_ ~넿 oK aEfu~N1Z_y=u":5'N:]q?Wm/i6i_jEWKm/Km_S8 4׆ jk59 +_u᩻k5iZb/LW[WLTvuO]uz}]{I=~sE SˮCث.?bدث.鰙1O__':m27 4Zi4ӴjM4ai7 $ӆ $Mi7 6iiI6MIV4ؔ;jL4 iMMibPIpM4a4 4aG0a8aatML* K8"9KPT m 000 N0 K=m 0Aj0z0 0 *0 A%A#A0m"""""2q8"""2K/kI+I.A(a %M(Sb 0A DDɹ4fW1\EYwL+)n^d5,¦4=PM4¦> 7 .;M.8;@4;@IFD;+Fr, #EZUu]WZꪺuU]}WUMS| ǡ$ БafD'H0dthFy'2:4"|x2:30d" PPOJ TLrHa.- xD'A!dONг<`"0"K%BXA{%q!HxNx7d*g4I91ʂVK9D% İI M9L)Y/D&gg$lAa ӄ{ 0a i4<# a{G{ 0c*aaB=^Pf#@aLG70T=0fe0aÃ4akT*a Pc G)=0fpT=0aT*aB=(*aȤ0=F5 PT=8|#X`T=Ml:*TaWI U I&nM:ME]'H6Rt*LӢMtUi}'Ii7.i8UނC6&ph& E[E\*P8P諤ͪm'wIzMtU‡E]'wo tջol_o[Nջlo][%:%:Pޜ%:Vտ%:N][%CNV%C%:{m[%uu]+zwz.u?)]=u]ߡ+ߵu~]Xcص׵}WKnv=z+cv=5?WV4?+>+kֿ+C+_ͯF0{ 6 0a0Fa}ua?`a=F,aF [ n _@@ [ _ _umBXl7oo_KK %~%_/KI,6  _6_7i%~_/%RY4:D}Dh'Kt"_CO/fb i/_q?U_Z}m/}Um_}POkM m/F5 ]~_|5{K_^߯k]K׆ҵ__Wu}ޮث $0tO_I'ث ]1O]X"Vb-V]~"Sa2:ޟl&G_! /V]vYuh=u 0Z(~V]v˦); h6M $dnl4&m27 ;dn4iIpᤝi#pM (i04dn pdn %$iRlJv8i0dnL6FL4M;I4ᤚi#p8iCI#pmlM4NLMl4NAt m0a8DsiMPDr#aA2\A6 a 40dUG&AM0 & Bj a-a6L PDrj5MAa%A#A0m!Aʂ 0 Aɨ L* ADDDe"""""""" #)DDDDe""""""""""8DDDDDDDDDDDDDDDDFR=_W}_z^__]%]ᄂP\0 $ ,T  0`,'yv"ؾvw3ضvO;fd$PS T…L(PB=XPp\(\(PRo hv]y6!~9Hּ". Tw4?Q꾫u}WzJ NF0E92:4#L<3("̳l!8$2x&CȂ6)=d39ў`S|r("3L$>`0aLrbfG8g1fGG EGFNYHD(",(2:HXHy&@1a1ʂ9,!<̑f0{ 4 aA0c*iASE0aÃ4L#X`kGL 0aaC40{ 4 = GSiDŽk GS00cF{ 0fa0=Fg5 Fk L#%45 = Pa aVW M$NtUUWI:t{ tUl:*:MTN&MUH6t6a' Ti:Mâ諤N煉&I諤7'âzMP7munlݴ{mտVջo}H{ounl [Sp%CVzunT?Sn%:oSttJۯtKJ۪׿tUzJ+K_ZWCWt?mEokoZV[kuƭnoǦ+=WCbH~ x7CI# = Ga40T5(GA{ #=aLL#aAS0a7SEO a ߅I:Apm&tmސl:6t&êOMT*NR 6aC7L6a׫~/>JumS1*ӫvmmj5޿Jҽ+KJw+K_ZW׿I]VnZv_j~ t=|T"X!Kq[];>v](KG뮾e%}u}~믪B'2: 4 O$rXBaHeNЍ0eTf`" N9*܋dp9/%dzhD&fdtK df yBq)>0e sN@1q1r<&r\Bq* *sB8)>F"!x<& dnE|KO ^shDFb>UGkG4 *zl&0{"A{ { 06Aah#aȱ#X=#5 GSL#`3@zaASEӦ0f0cj0f0T„k5h#`4apGPL#XmA G=b(F{ #@aL#}&t&A7H6}7t(tUfO]tzA諅A6$M;Il*NaT:M&U‡E]&atVWI&áߤM] ސl:$UUm&ޒm&i*Nh& T_V {m[%Cս[[z}PSno}{lVoNxJuz[m=>q)/-+ҺA~_O_ti_z괯ҿߪJJzjK-++5ۯ~c~bWKcm~u][+u騭 WCC+tj+tmsCͧ~pI15\#~jCͯWcbVl?mo_ v[_%u mᰗo% o_/PwkKv%mKm/_~v]I}[iݽ,{u<}w_w4t~N'^h+~h/ץ[NKzcK'LWSuom-_?P]cm$U}KmQ_񶗿ױ*Mi[ aJj^׵k_k_5]{4xko6T b޿J?czEFb» C`_VzE@A+eױ_e+EF v*A9LÆm0i $ӆ7IIII4jULæi(vpdn $MIi 4M4M4i4lvaMi#pM[#pbPi&iG&aPa&. Tam#Ad%,5G'vNMaANM0 %A amAaL Aa  m0a6TAAd00i l( K (GH""""""#)QH_W_z^UyhKpY+K % pQP]MMث  a&LO%9ئe̮ٔVdvyL(T #aS _ Bp[M8?v![Qk_q_?*Я⾇+ wMEn}00a0ua0P#a0>{c3?۠ a no ^/_ ~ڄ^l7PooK. I~//m/|ؤ/4_Eu/i/+'EӔ4^q?_:^Ɨ~N?hu_Km__ETmImUm/4akJ׆ o9_4ﯵ4k|5 N_; uuXV+ բVeLSuVhXVdt"adtV}'˯bث a]Nha0q]Yu({eբRtᤚi#p+I6Li4ؔ;dnL6I $ӆLa8i27 CdnimCK#pM6FHLL4aL4&m27 :FV4ؔ;jL4 ipDr A  $t A * 7PDr K8"9B#L4dPPDri‚vAt ‚#ɨ AL("90mKà0 #M0n00j&‚ ("9PA 0""#)qDDDDDDDDDDe"" """""""""8DDDDDDDDDD/k$_ a M4ءM0Aa Al5VguЋ4yɦd>;FW;<̖"BaPT…M0 0B>/p|.(\,]pvhpvh~fD&>$;:'Yw4>d_UWUu}~M a +Sž"Baೞ FNYCk #SL#X~K3} PT ӄ{ 4 { (*`3aȯL#X`ah4F= a= 3N0T5kPc GL#0cF= FFgS ? a0 { 0f0a k 0AEp;TIâH7PaW&ނ6:*M: tUj*& E]&âH6tp8UH6Li:MH6t:**7t4zIm&ïm5I6i3NRtħ_Ĩq){oH%Cոunomun{oV [{m[unۧxJtJu{߃CVp_^u]W__~J.+++JKJc_k}]5_Zݏc+[_-nX{!?+ WC_CCCtV]00a0_?Cu_?FØ??{UY0Pak{u _t-@~.mo xoK /%KzmPK;m-/z/7w_~vWv%mK5/My:׽1ץѴId|"+'^oY:N:I?i*ijioiG^Hiu~5_4~~|5kPCU׾?밽azzˤV-˭)݊.a2:z1O^L-1[ӱ]^oa]Nha0E@#pa8i&lM4i0aIl=4[NIiڴMi&M6i&4l4i&#pbP8iZL4i#pL4MCMl6Mi7i6Tl4jtղ7 6%ڵiG 0i 2A:G0 AӄL0L& B L  iA0xa0d0p0d0iaAa"9 iG K6AA 0L MAJaAL' &ڂ """""""""#DDDDDDDDDDDDDDDDDDqDDDG+/KK+K+Ka(a*b&lT 0`@DDD`,[ 2 )3^RfQk|*iM0S P…Bhh"@"hs?ꫯUuɰeABaIg= gxBq$9KO$rC8Fc,Hh$?0df >a1 L9Lhq 2)"r(G ȟ0d={ #@`= PL{ #zaj0L#@aÅi0T5L(G-TGS3|#`{TG=a*aL#X`k&A7TaW l(tUIzM&‡Tnt&â諅ItU T7H6t*M& Tl:*?u[ոNۧջm[%C%:[}VSn]?C]}?^Z]?CO֗_AҺރiZ]=t)XiGQGů[Q[k1__ͧm~0F5PF=?X@@ۯ _ ᰗ/m/7_'^/4_:bߚ/W~NM?xEN_m-_Um'_mU}K鴛I^K5_k|4Z_~ N_حb޿bE@ͅl&GLWVuv -[t1M6)bL&L4i&m&l66FbPiiᥲ7 4ؔ;M44iZM&6l4NVM1(wI6Fᦛp j 2^AA0: &! aAaj'PDrvAl( 0aaDs iA0paG(Ds aA4 N """""2DDDDDG뤿,0JKV(X0@ADAnM2Kg#LM$Rgh!L왑,"fHi80PfaS;Z$|feJ!SL#aS Pa#`0``g 8\.([M4@$ M׃88?{Cӎ>UL="hTH5UJ__ouꕺ߮]}}ٟ#b3iAF`͊pϑ`!8$3&g9f "晃42:0F3 N$10Њ ;%G0g G8g("6D0O!0$s1S!K0e@'2:0F4 N? ̏ pϑb%9fi!.` h4a= F= a= 3N0T5\(F= GSS0a4ak #=`{ 4=A{"50TAB= Gfa Gk L#\#Xl&= p੄kGSi $MTiâaW¤M0Tiâl:*tUw}&a֘M6TAWI"l*TaWH7*6:*;xP諤IWIl:*7m]Sջo][avڷm+PNVտ%CVS[տoNۧ%:׶Wt]W__=u_^]Z] WUuAJ+Һ0uuQ[_[7߭?ukmk[[~!tV⿿W[?t??(}M]fWFpO~{m?6_aaͯĿ_ mn?X@_붿K7K,77K o_am$ Z]<_4W_~N/NiK,|N'___}N8+Kz~Nucm-Km_I}PKPm/m/ڵZ +_kk +_{^5ֿ__߯___n;={_ezE-*5ݨml&G[ [˭޻.E-_"M+Pl&uU4iU5M'I4aI40M4al4M4ӆ#pdn |0a8i4ġm&l44ӶFL4aI4i&M6M8i27 6FM;MnlM6%MmB0kpp7 K7 : K6A9V(& %d0A  xo*@bL("9   %&aL(Ds A0pa)Aa0#PA6T0l&  ڂ0aAAAaDDDDDDDDDDDDDDDDDDDDDDDDDqDDDDDDDDFR"8DEDDDDDDD{i+/K6I.*rPiC pQQm&p2@0L(ni\"OC;)̅mTfOܒ;;0B<T 4…L(^ 'T  ;@;M@2BNDr#%DkXu__꾼xˊlN(#l"|x`"1ʂVKd& x3)%\'KY)䇙NEQD'ԅH<dx'Y$ |Ђ!&BDb>F`dO2r!8shEGFh4a=B5#a0T= G 0ƒ7=@aAa#aÄ{G-0c3LFL# 5Aa{"8PcF= GpGSM0a0{0fL#`{ (*aL#XgS0a{G5I6i3NRtIl:tU ;]& WR 3zm'IoIxTaWIjm&fImAzA uME]&‡TH7*6Rl(tUl:*>l:ޓi6ݿwV{m[Pn%:Suo[|[wVuո}[ոoNV%:nVSI_)]u WCu=i^uﶗ%ZWO] WCUt)__֗B_kuko}[_Vnku[!~t+? Q[?t?}W~bfj#uaFͧ|f0OWfa9[[_ _A a[_@? _Pl% Kޡ,7%K%~פ 6Iav%m~/K .1_ߓ}@K6K8x"h'zcK'LW4W^N/ԟדׂ(uOumﶖimumﶓj[__iZ o~׵[_kCU׾J׆kk xk xk^ةT WYuբC[oa}CKazl&N*.{ TcE Sb*˧.+bLQث dn5lMC4M6L8i27 6#pᤛINl4 +dn4;iL4i&4M[#pbPi& l4M4lM8i&IM6i4dni(vaI8i5wiPA6aAɦAAdNaa0xn a!AAɶPDraAjaN00j&‚ d0 jd00ia&pDr I  &a A0 L("9DDFR""""""""""""""""""""2H]]^]uiaSA(dfFSTȶv#"ߢ2|ȯ%fBO4 eHPB8_ TQ…  hIvk'M |cKo]t431]}_Ua#GFKLr#r-XE~H伕HyBYJg&9^x'y9N7"><HyqMBYJg&9\x-x7 Y ͢+e$LA.)Jumv~mӫm)~ J)m~OJum{߃nAҺҿm/Jm.z)]tZ ֕I_B֕I_Bku[kQuaQǺ+H~+M_wM~+u`n!p5CC8#;>{dCPpFWK(}0Y7>{`? X~/?mo~ۯ}m7oP NK߄w%_ӨKm}Knפ __/_^v%mxoC_O>.1_ߓK'6?zc/''_']:b'YtS:zcK'LWSuOmm/:6EWK}}J:6EUIm-cm$U}W a ~j__kV4PuҵKj W^k +^*(LWe[Wb(~LP*ˮ_u~Tk{밿ՅدbRJ˯bH&4P"S]Z({]}˯bH'4P"S_Xi4#p &aJtղ7 6%a4ӆi4 $ӪM4ؔ;aUdniJdnm&OpHaULæi(vL4jLi4i6 4ڪdn5lMCaIJ B L&A:#L' &ڂ A 'G("9%L -nm0 m0 0 ULAa l( K ("9506UAa l( K """""""""2DDDqDDDDDe"""""""""""""""""2}$KKKީ.o;JҴMIC C XLS2@I DDDjyIk;"-ɷg-2%eo%-.eozUm'IiâE[E]&Rom&ïVS[bT8[%Coun}w߶%:NUn%:ݴl߶bT=}սwNoNV ][%:Nt?]~)_tU {iG] V}WA+]iiZ]wI]ZW| ]i^]=ut?%t=nkku~_}Xnm~_z+H}׊ﾆ pkt+C+!pF?5PFU(} 0{W6Ha s6#~mn [t/a?a/ _ /PoxKL%k/% o_K7ޗ_k㴿7῿/k/o__ulR_~y?/ty:I:2P'}"W'I~jO}=tE4W_~N/޲uEWV}6m-~Km'cm/m-Ikkkڵ} jxjn߭_kPk +_\_'{. uv˭خ[_);.CbE8dtWeױVެҫ.balb+N $NMi&Jdn7 $NI#piIi7 4iUiMFᦚvml4jLÆi(vl4i#pNIaIi4ii(vi7 i7 4'. &l  $p T a8"9aaPM'Am0 %d0M6Aaa0z0 ("95G(Ds 6a0%T0 L  1 0Apa‚06TAi  6"#)GH"""""#^_KU_i֤l $MaJ+ qQV)4ح1OA0a0"""#M"ڦdK#<+Ҳ ̻;*.R-̀PB 0j 0Bx *pB .XPPRpvhck&k&Ddy"$Ic뮾]u__]_믯0eC#C#C.">%If !.`!"`"T$s: #l>aF`g8gR ȠpS| 9$ Б`qN'G2r>FVF8yPD28ei0L&9FK2r*p"& eHl3PF"(42|s32:4"s#0T=pG64a={ 0dX473 40T=aÅAA{ sPF鰚F= a= 3|#`kS FS 0=#`0c aL0f0aG{ #XH8pTM= F= aP`0a{H6tIzI&â7UtMtUm'w U um'zIiâaW¤MtUޒl:At&âm' mt*6mtU uUl:H6mp 'Ivڷ뿽mq*Ĩ`ĨjJuOv޻x:mzJs[n%CVnNVPSm/J+=JzJztJJ괯zҺzCǿkuQkխEooZ[Q[5CWt8Я!BC}CCmCC^j#F10}?u_?jU jaP{kx@@@ _A?a?u m oKmB_77J}I}_~__RK/w o{4uدKDd膟^hz_uu~io^[iz*kO~ڿmi_i~_[_Xk~ xkKXk~k_k [ 5k5k|5|p»_ ˯-LU&+Ezb ֕XV)݊.a}Cbzl&G_W"IuWU^LE+bM;jL:FIvM6i7 #pNMCIvI6LJI $ӦM $dni27 4i27M&paġiIÆM6M6iIC 4MIpjPd0l0N00aaAAL* 40!G8Ds A‚!SL d0p0d0iA0dPPDr 0!HaaAuG'000 0 ڂ:0 K0G0 0DDDDDDDDDDqDDDTDDDDDDDDDDDDDDDDDDDDDDDDADDDDDDDDDDDDDq+K$P_Sx 6ADDɸOgq# S&fd)ErU\ʼ$6 feL(Pc   4… *aB``  (OH(T (PPZN 88:i$>$+ "wR;_AO'/N_[t]W}a?eNdthD.)_C]Q[?t?nCuC_} Vpt?xOa9f  0FalOa/0s6@ۯ ] [ [ۯmD,7N-[/%/},7k_V_ka/K}%OPzcK'LWt_YEKb'Ig_bNE4W_~N/iױ*_~__O(ki~_*i6_CU׾5mua~_kU[4~6/LSa2:» C`_Zb.բtFtVޕl&GO_awC eX^z*˯ޭ>A;eױ]1LS׶#-LW_ a$8i4ġS#pdnlJi7 #pIl4A|M>LÆLJM6FI4M4ӶFipaM6i &Fi $M4i4ii(vi7 i7 < A  A‚wiPA6aAL*!L bdPTȤ.P頃0pbL("9 2\Ad00 A a T/ ! 2D(& %6A0:0 ("9h2\A Aa""""""""2DGDDDDDDDDDDDDDDDDDFVں/]-.2KnҴQ[pPV+b0L' a@@DDDyj(,?sL̊g;; 4J3`٦BZE#3 y$fJa}0 ) 0L*i*a BL(e=n(^ PN;@郸olixCh|oȲ*םX,B$#K;Bt_Ar ׯWW]u;z__]uדoqM<)۬ ] ~P%/mB_o޿mo^ }%XoW+'_}Ou{]:uWiz^duIgq?V'^NSե׿ױ^*iqimimmak xk5k{u߯_Z ..O]՗[a]دNe^ že=r l/Zբ˯ftlWN6#馚vvi p҆ $&l4Ntm&NL4dnlNڦFᦛL7a7MʴiIi7 ilva҆IiҦ;0l0 &aM0PDr t n00aaA2S MAN aT)L("91M M  : 0 0 2Z DFR"8"""""""2HDDDDDDDDDDe""*""""""""5WWuzZ^U]v%iZDK %PQPPQV)4ئ+b A0@0 /)yTKYgvgsMfyGgh (PJl 4+L(T¦T… (Y4 X88888=lipvhM["hG;__^M3PY6Y9f pND("f"@ˊlN0e Ndu 3<f#FD1.HT<A) !晃*8g1#GD3p D<23D&CGG D#`ȍ2:4"r("Rf ᓐD'y> a=0a{F4<#`{"0T 5AaL#=*a3= Gƒ0G{"0T= a5 PaaM=0akPT*`籄kPc GL#A0cF= FFS >mtzMwm'WI E]&iëMRM$ޓaWI}tWIzAap:LޛM\:*I6BwIl:**ipVWI:N' pWI"m'IiâE[E]&Rom~m{ħM뿽)nJuzJtmt{Ӄ1*ڷݷOm)?++޿Jm/J߭+JRztJKWO]iu_]kuoZ[[}Eok[?=Q[=~5?Vڇ=`/W>{f?2}Uf'?sU_a?0mx#?^/6 _t-@7-P޿j7 a_Kw/J^ }ҿ/wI,7wS:.uVN4uد''^N'_Nduz_y:uIeZ|"+'^m&SKUKm/Ejcm/KE }IZ5 }5kS5k_ k+4~b?b V ½+[ ̺حbLW_zP mC ={a2:t}馛 $ii $dn4 $Ӷdn4Il4ӆiIM6pҶMM:dnidn4M4ICM6M -Ci0҆ilÆM0M6%M6FM6F00Mi aA L2\AA &AmA 0 0/ 0'A8"96Aa`0vA Aa` ( AAAAPA8"9B#dA06aA0A am00 &'HDDDDDDDDDDDe"""""""""""""""""""""8DDDDDDDDDDDDjKK$$K % $ pV)(Sb Al`YnIk2,sS)<2+|%hB T…L(PL*i .  . `88;@?!k2C@DD]W__lAyNF` 4#)>Fy" 1ٞ#3PG慚"(GA b=,42:=d(2:3 !.` ?a48*a0T={ #a0faGS GSo{ 0aD :aeh4a=B5#aDŽk GSa= 3NG 5Aa{"8PcF= G40T L(G{ #5(GA{ #‚슠Ӧ:MӸtUt>m N:*MH6w tUoI*7$M OMToI6}tiII'IiêMH6mpB6Rpm' ttUotħ_j8={zmݷħ_m~O)ҷ)m~OJuݶ1*Jt8?~m}KJw/+m/Jm/J{zcߺߵuߵc-nרW]cVc_]H+!n5CC ~[K5_~F#u_Px#~m~6@=m0ÛPa?Bx@ ^/.mo=u ~^__ -B[k _^%moK/m/7aK:WWNE;'_^{]:b'FoY:N:ד]q>N<'_m/}m_6IWm-Kcm$U_}Wm_ݴߧ-|5mok +_kk_5]{5jVjXiZV[kVzzl&G_uS}[^]Yu˭+R ?l&aiޝ+{ TcE *1O[=u1]6#Bl*4vFᦛm' & &LJl4iIM& 6I4 la27FġPMnl4iS#pdnlJ $iii&4iJa $NiզL'MAA A A 0A  a MAA§vNMaAm00 2UC 0a8a6MAxa aa#aAɅ#"9J`0n """"""""""""""""""""""""""""2"""""#DDtJK꿯&Vĕ*J*KᄻIX@00 """?ɲ3fF2Rgt)2[5|O#2lge(St@@M0B*aS #aaBl"0(\(\.*NmM;@pʴ'sBhskF@iG)~oU__꾾2'2:4"( i30Br k<eBcY q Y1rVJgNa ċ2A3L0g 3 ĐHyO AѡA ^`9Bq* #2<)C:WiW]o~_>m~5uv?[Zkuukv=aW?]?}C5+!Hx}}]{m?0$̓j6FWaߚT_31>-m _a/ _ ?~/mo%7 __ ~7,77KKwi_Ifw}_uOYN/']Y:'_NOPEu-'_u+u^tO)/ޘ'O__[_mi~Oi6_񶗾ھ_>]?_kV {]a5 ok +__C_]oP]moX^dtu[.zENlU*5lWW"Sa2:)zduE@aizb-OW]Z(V)L4 &;ap NMl4i&i $aÆ#pa7Ia &M4$M4M6LJpiIġi6I4dn L4aiCIi6dni(vêaJҴiCJ BiG aAK9V("9aP %ANAa:#PA:i B I@A00G0aAaAa0apDr d0aAAL* aPaH P6T*G8"95`i &Al(*w 2Gp*#DDDDDDDqDDDDDDDDDDDDDDDDDDDTDDDDDDqqbKM=4ӄA ""#Z2W[ϙ#;Swg|geUBO)(… 0BPB<0/ .(_ *NApppvhxIBwE#cM_&"(2:) 0fGFQf "& BDb9f 623xSx#<гB42:2r(2:4"r 0eT慚ٟ/" ?OA.FaB!"`23xS|#<гB!3k # a{G{ 0c*k`7G{ =0amA G=b(F{ #5a0a0dZc ah4{pਜ਼50a{Gfah4a=B5#a*aäLܛItNl:tUtH7諤uWI諤5I6i3NRtIm'I tU‡E]&a¤6T~]&MNoUm&ޒm&i*Nh& T~ħ_mm[mӷ߃*ݶm~O~=>q)tҺҺ+ҽҴm/tzm/Jv6?+unc~?[Zح[+u_ !V] Q_+ Q[?t?}sU0jCͯ?a9@??P`,f3@@m@_ moa @a/ a :~oPu mK k_V_,7i^7v/m/Iguo_N{]:b'Eq>Cbt:zcKZd{=1ߓ+u)y:+OO_{i"(J:VҎUm_K ~\ϵ᭯MPu[߯4կV59,C LWA}^=YuW {Wb(~LP++ L[a0E@/haX+˯bH'4P"SIlÆ4M8i0OaMm0aI#pMCtղ7 6%چ4 &;aiI6%ڪdniIi6 $iS#pdnlJ $0iG("9A% AAAaI 0 A a8a6MPDr!4‚#a0%L "9PA&#PA6A‚#dAL' &ڂ 4/ 0DDDDDDDDDDDDDDDDDDADDe"""""""""""#)H_WWWiiu]uViaPPPV(X) 0@DDɰiy3G|vKyI#2\+Ҳ ̻;*.R-̀6 faS;20GAa2PT+L(T… 06 l] ^6sp8_.(T/Ii'i$Ihihӎ4NaӶ>:$ ښ,mzX}%zuv7J>?uU14LЊ0eA &Od2|b>JvWN pϖ`Bf>b9BaHf )N&9CA"y`qN'G2r>FVF8yPD28ei0L&9FK2r*p"& eHl3PF"(42|s32:4"s#„h #`{ ;TTPT=AS G {L(G-$a邦#@ao{ 0{ #g੆h#X`p0TFM0a {3NGSL#`=d$8*&aL#@aM00T„{G= A6l:*âItU‡T(tUޒ I7&iWoL: ¤ i>wm'IhI‡E[E]&âME[E]&ti>}t& E[E\*CIm'uջm[~ J Jmħ[vmmv*Jsջmuoo_N{mĨj8=v)ݶ1*JsaO]uA=} Wu_tC]={+/ҺҺ+/{߆~u[ZoV{aZ[Q[6+7ut+⿿bC;8#`?}0F0;5_5_j8oa6ۯ?aaɵ/ڛOK_{K7;߿__o I n{}:z~~/4WGuuڿ]om*kii~ڿ_ioVk_n /__ k/[ +__اz[ uu]mjW ߰^X[.bR/Z(LWOMS;.ޛ h^lS_A&m0M6I iZImp ZiL4M;M4 $il4i&L4ÆiI27 4i27M&paġiIÆM6M6iIC 4MIpjYV(& %d0baB#"9A 0U X Ad0 mA 1 aT aPLS07ia0Aa B A 0 OAaaaAa ( AtaA aa#aA"""""""#""#"""""2DDD~JKm+I/ $ a@DDG6yv\GtNvWd)"y;Tg1a?u(}0Y\f$K?=_k=__ۯ~a?X@_~޿u mKo/\%:K_K/m//᱾ Z]aL:O_h޿+=1ߓ+u~m?:E_iKb}u1~N4_ דi{*k({i"[k_i{t[[ikk߯ /{ZPu׆_]_[5V]u'ث ]uu?1^oa]Lha0qV]v銰E@A2دPuZbTkzw.+دbحTiiaI;M4MFᦛ 7M4ӴaIMFV4ؔ;i#pNIpiivM6M8i27 6FM;Mnl6IM4a0aimCIm&iw0  2HPDr a0iA&apa0n ݦmAPAA Aa#aPh aAL MAaPL L* + 2^AAӸd 0AaAʂ  &a""#)HDDDDDDDDDe""*""""""""""""""""#W]]]^~]u]vٜiZVAdQ\0000Ub)0  ` &V&3"5^d[~L љb'L(G¦0 00 pB|.@;@@usZ2>wZɚW_؃#<Њ3kqM` 4#.):F`3#PD#<`"0ЉȠ3NY0g !<̑c 0T ah4" aE`2L#aPaEX`ah5#@zaL#a0{ #X50TMZaL#aAS00c G)=#a*a ajL(FN tUjE]'H6UTE_ UI7H6vp&Ul:NRmM6Rl:5Z*6Rl(tUp8UH6LڦtA6l:*8tUUoI&v~mӫmħX:mĨq)Ҷ Jݶ`oĨ~ J){ħ[t J=mmJt~Km.C]zZ_ҭ+J={Z]WWC[[k[}ƭG[}Eok____CWP>0a~?C5_FØ??[m@mo~ _a a/ _ :ӯ/P:K߄/u7P%zׯm/Km$~w~}M?zcbؤ?E~N^h~L'_ߜOG%<]}:_u*ע_io׶{im?蠟vm_}_kk o o xkV_LQW[ՅKal޽=bWWVb ՅIV~LAazbl&G_[.IM:MCUIM44vl4&F#piM>4i4PҴLJ7dnl>4MMCi0҆ilÆM0M6%M6FM6Fᧂ#L2^A PA  aPa8DsiL* K6 a6APDrG6AaA4„G6ANaAA06NP*#L PDr d0aAAL* DDDDDDDDDFR"#"2DDDGqDDFR"""""""""""#Wz_-}Xa/ %bMM1Ma AA@ endstream endobj 63 0 obj 107223 endobj 64 0 obj << /Type /Page /Parent 3 0 R /MediaBox [0.0000 0.0000 612.0000 792.0000] /Contents 65 0 R /Resources << /XObject << /Im13 67 0 R >> /ProcSet [ /ImageB ] >> >> endobj 65 0 obj << /Length 66 0 R >> stream q 614.4000 0.0000 0.0000 792.0000 -1.2000 0.0000 cm /Im13 Do Q endstream endobj 66 0 obj 64 endobj 67 0 obj << /Length 68 0 R /Type /XObject /Subtype /Image /Name /Im13 /Width 2560 /Height 3300 /BitsPerComponent 1 /ColorSpace /DeviceGray /Filter /CCITTFaxDecode /DecodeParms << /K -1 /Columns 2560 /Rows 3300>> >> stream Xh"'F2Awe-U p@(AR08@ ʰr$aQpapF 'iI¤I6'0NMƊMǃr_Ah h Wnzozo^]_+~ /cүH. aK%cI/ ?ۦJoݴ4 Jm~~_[i}/-ZJz^%uT+uD5IפC_KI$Iz'vI.-M!&HzHv҆Z4Il$% $iZIJH BPOb [J@a0D|EDb"#?%I(AG7p5[Z:X/KүItK\{uå/Rfװb !ɱ.d')Ȟv;>[d+ai Y…L(G¦4̉6M4<0p8\/]  ' ӻA0vkBD,qt$ђQ5"< ]uL+GudxS|G8g1B\e6g 6FyfBAf#S#=!"`1NE8fOfGFdNdtKg2$PY203BcdLrYJN<pExs7"0dBBD&D 9#qM8)>\#Xl&= G40Tt=h40 { #„kG40T=DAÂb*a*iA#=a# =aASEگւ5#aPaB4 {F = GA{ #@`8a=Ah4< L#a oh #X{AF4>oI6R $uUm&ޒm&oT&M7_E]&ê aVW tIp8UH6LYNaT* 'Ia' 6o oARm 諤AA6{MRM$NwNov[z}VSNoxunl%98?~mz@T>Ĩ`Ĩ{ħ^ J>~ J++JKJJJi=W_~ tAҺJm*I_ku[uQ[Q[ƭn=]_Ս_~u~ߵCCCtV]C5?k}!hn+j+t{kY0PakU5A6[yU(}_@=mHŘ@_ _[u=u0?[ ^/-B[k7o7l%__ӨKm_նw}  _ᴿ7ݯ_i}I}XwW'OLiwf:E;'ф^WgND)Nuu$.Kcm$U_}WKwRﶗ[k6Mi1?OױC_j W^k +^^V[1^]5K Z᭮ /oNv]{v*A1?حzbl&G_WO] %M*LWYueױOWV]lUSdn *i6iT:jm4I6dnl4i6i&viIi1(v4&PM44a.bPI6pdnpҴi5ITI6iJa#pӪdn5  0U 0wiPA6a% ڂ:0 K0G0 0‚ %@Dr A0AM P TaB#a0Tppa;JaAaJ΂aA7vNQQH"""""#DDDDqDDqDDDDDGJ/l)%i}a/&iaa AADDDDؾdFvQy̖+dfW;B*aBx 0S"ApM+………IpˤA`A &/;5CL"Pe-(UZX__UuUWu]uQ0eKAF` 5 D'y?3#œ3gyBq$$LABF['!0n%C3D'B$ gxNr7"?%2! !,aY*rVK@ɎVLAqMyk7G{ #@aL#XSL#X`C`k GS 3L3}0a7 h#`= F=`3d0T4nAG=b(F{ #)a4  G=L#m@O*6 aWIâzMP76a(tU~M5IaWA7i>oH6z**MRAp:MuwA7TIU E\(tU{v=ħ@)=}߫|JuޭħV{~~O)ׯJujmz@]ZWWO]iu_]I]__ZW_BOZW_] W_?)^׶}q0XQ[oQ[z}n+t5]tO?{k'ͨ0? vk?[[v% o_NuKׯ k׶a_'GD"u-'_:ޘ'_/tu11_ߓRoڿi_?t*[XiZ ]Kkڮ^5Zo3{eױ]1LS׶#-LW_"V]{eV]lW^u`o_]n Ca⺲P*˫EخӰMi4 $bP4dn dni7 M4aaL:L4M6Mi0i&I4MTJmCI#pa7 6l4M4M6KOAaA0A am00 &&iAa0: 4aT"  4aPDr 2^AAӸd]aA ڂ SPAPDr0 0 A `E8;DDDDDDDDDDDDDTDDDDDDDDDDDDDDDDDDFR""""""""""""""""""])g%i% v(l `?6'yޙ؞kʼ+2dؗ%y_z- :aBL*aBLH%PT„xT<(GPpPpˤA\-8]' ';@;Aupx;hI0'\I5/Qk]UW_L^]UWQlAўhYqM0O!0$s3܋d`BDGG )ȟ01BjHh$<"r(9D&/dZ-IdfdieBa1PI! LMx6<ˊlBPE ᔄf"O0g !.`YVFaa#X=h4? *f L# „hL#X`{ # 50akF 5 #X`kF= G7gh4?5#aPaB4 {F=p*aL#Xx3N6Ac 0dW0T<0T3NG5#d' MRMUH6pâhA7a&ph&m'IaI諤& E]'M5It PM:M4tUl:jp64aVWH7tUUoWH6O JħX:mmmJu1*ħ_tvK [%:նոտn[i^_үR?ӥiAJ-+?WZWC׶_C]i_]iukkQkkEo/W-M~롺j+7MWC+⾿=]-t?++eF>PF̬=0|?>K0FkP6mo[ _ _@k?@-@u o_ ~%K: z/%7z/ߥ__^[i_ޗ[iiQ?~Nޘ:$'a;/N'oLw^ߓENdut~ii[i?ڿiqJ m}SKKߎ_K Zk_5_5Vk?K5V_k"V.دՅbduan/eՅdt=V]v]Z(}*Yu׷uVՅNWazݰvA;az/U^L4bPFᦝI6l4NUII4چ6bP푸v#pa7 4ؔ;iiI l6uL4M%ڴi &FIlM4iU1(v#p6Fᦚl4dni 4i1(vI<l( wi #d: K8"9;AAm0 0m0A‚im0aAAT02[X0b P Ta6Aam0a aAa6m0 2S AAAIAJaDDDDDqDDDDqDDDFR"""""""""2/004Mba`&23;+fU*Y%3ySjّʮwyK3)>[(PL(G¦T<4¦0SPRpT/p hvkhvڈtX"QqQĖ!)K;")K}]}W_u]d2(2|("A0eT3#.)<^fdtKPH2 ȟ3F#Ђ!4!x<&H$< 2:3"в31#L2>)=A p 1Ђ!0<9!$LAOas#Σ.)?$vEGX參W]Ln㮿U__y`΂3OdxNF8yH"g<23D&d%9F\Sfx pϑA#dghDFbY3,fS|>v(G<T¦*dP.)E0¤> ]  ;@;Aƒ&-ED,v!9TEicN]}W\_L_u_~ PE8SOf ᐄf""u& B'0L9PQٞ#œ3NG慚.dt gJL^yH1'#.)92?]M&}tm5AW &MH6RpWI+ոm[VPuo]տ%:m|/뮭ħTڷJjߡ?ZW]KJ~zJ/K{]]_W-}[=z>kkQQ[C5CC5F'f$ #@@ _[u?a@n/%N_aKzKKoׯKm/:Z]/zcK'LW4_::'?`w]_KI:6EWKm[WE, {__S_Pujy4k+zz/V]}v]{ueX_{ TsE *uehUV]{V)z lM6aiI6FIvM6iZL4dnuLæi(v4i7 #pjIJ4M4aL4bP4ӽA %AdL("9PAͪ0 P"9L4& l( ‚#PAj Aaa00 h4 ‚ ADDDq~+KPTbA0@DD J#%y''gDt">&S_҉fU!;N?W}]u_꾫U__]W "|s'#l̎f  pg0L&9BD$LA Ǟ )EgxL丄T<BTdxSx3'"JPL!,"/%C<'CgF8yH"g<23D S!C!"`2|x̎0a3;"?%C;!8$:L0 k 0#= za00Tco0f0cbt3L*aB5a40T„{Fg5 GL aT0aG5(*i{ 0f.{ o00T=aLAS GSi= |:*I6 ۺNaVWH6ME_ItVWI&áߤMP:Ml:*6aVW MtUU CaW MPi:ME_ w tUm)uo{m [mN{ħ@`Ĩ~mĨj8=ޭ1*Jum޻x:m+/ҺҿߪJJ}Jۯ>u\ ZW__֕zt+ַ?kV?n]^_u??+!1_q_Cb _CHPF9ͯ-#櫂0aWa0"ߘͯc9UA?@_a/_%o_Kl%L%m%n7K.6_㴿7/|:u'^oY:MNuWW u_m_[in__k_9 k_k oPբLدE>د `_a~X[Tj_)I鰙_eeױW[]~WuztNl4 &M8i0bP4MaKaI4i#pm&#pMniIl6LM6iIi &LJil6IMI6iM:i4iM>07ia0!AA0 $000"9=AATam00 &&iAa8"94 L 0M6Aaa0 0!HaaAt)AaaPDr : AaAL2^ADDDDDDDDDDDDDDDADDDDDDDDDDDEDDDDDDDDDDGDDDDDDDDDDA/H( GM1 #M쌵U;4O&ys;TgL*aKI,0)J T¦4PˤApO;A vk?: a}˭[ IL4M6FI mlJi&LÆIi6m1(v#pM;a#pMMFlÆA0L4/ m00 h1 P TaA4aAa aAw A) 2Gt 4 QDDDDDDDDDDDDDDDFR"""#DDuK믯,$K\0 %bb  ɦvLeyYfI&v&ߟydTrl 0S 0S PSX0pppPt-h!׃;*KTUJNHk2*L?__[_꾿뮿}Juי "|s'#lg3eC,?3PFc("̊3PY/3PAJgqH̏ pϑb%3# FGFg2s#2(F$9Fb]{CХ_֕_U}+JAK괮+)^]VoVkkuZ[[kկ[Яu4?_]|V BC#?m?#ׂ0aͯa0sk0"ߙYWd9? v@n/ o%~  __鄿7w_~vᴽ7~.KvכO'_ONt"u-'^q:]$:O4W]]_&'Y:uNф:i_inMm ݴwm[WEI?Mi~iuk_7 oҵ5Fk (iZ55[[^ ޭ?+'du}]'eױ]1LS׶#-LW_V+z+=m*5a}V/[Lدث.27 4i27M&paġiIÆM6L4MCMl6Mi7i48i4pa#pilJva4imiM&paġiIa 4ڴjM&07ia0Aa B A 0 OAaG K6AA 0L MA AaG xm0Axl( At iaI &Aa` L  %0 0 AaQQ""""""""""""8W%_`I+K(a/& ADGM2ZES8v;2Q2#8T¦0a i0t . hvih~9*BJ4;NLBw ;CRZ_G_U~YhYD& 9*H2|`cy8y#LZ8)>FyÜOh$rH<\BqM0dFȣ0!0$rG.)J֢%Bt$;Yߥ#Ew___E_u_)~ɱ`fhdtR' N%C%I0dtfYD'A! Sy 2#DO6G A 32: Y|fFQD&T<A/!"`1@'$&Jd*7">%\'KY)2HJYPPT4a0aFgS <#={ #@`3aR@{ 45=0a0aaB= G*dDs0aA3yaL#`= 3`MA{ #dAF40dX a 3y{  8P諠tIl:**7t4tmޓi>R E[E]&fw & E]' C2D:MP&&âoWITH7$M;Il*ߤtIoS)ҷmJt1*ݷjڷQ8zTjmo뺷[~ҽ++Һ}+KkkO]{_BKJ?O֕T+K-+] kGoQ[w7W-~W}[mC+4=1_?=MEnWj#U~Úy0{aͯy@=m?1EW@{ma_ _kx@ _6 /   zB[kK/Kwפt]:_~N/*EwlWu+88'_I:6EWK4o_kXip׵XiZky]xiw }_5]{ᮿWh[T lS`M޿ Eb.Ez> SثS՗^v]Ua]Nha0E@ eՂ*M4MlJ &FᦚlalNM&L6;M6I#p6LôapNL4Ni&l0JbPI6pdniaIiuLæi(vդ6 N0 ڂaAaAL* 0aaA %Abd4. #  &L( „G0j 2HAauPAn00j&‚ (DsiTAaDDDDDDDe""""""8""""#)DDDDjZKK.]ᄸa.+RlRzlRp`  a0AMe>RL;Ff@Y^D|[?3 ̅T TL*aS T… G§ ppPt/ivivhppv#"NqĭD*_u뮲lAf' #8d! 4"4dtg晡>`|x6䇚"#8di2|#ك8dlPYdtB(" Ƞ( N$,T<t<y9dg3d!3(#LB'%2& 'G̍3 YOOPL(#Xxp੦0SL#aPcG„h #`PcG.L45 PSL#X`kG„h #`k #@a*a0d]M3aL#aFSL*GSOL#a4= 3=O7T*a0a h#`owP諻E[E] T&pTiâpt4&fl:E[E]&â:**6t' A6l:*6mA꓅L)l:*6aVW MtUU CaW MPi:ME_ wm[m z}][~%9OJum?mO:ݷ뮭ħTڷm_m JｶJӃmm{ħ[m뽷꾿n뮿ҿJjKzzzRJۯ>u\ ZW__֕zt+z?__+~֢_mWW_cحt8⾼?W} 4??C! 0_??a̬2KTY u  /%_K0;/q_it}:*+td//54W^)+K$_'_uN:0'_~NO[ڿi"iڿڶ1K}m-KKkW M +_᩹aViCJ׿_ a k a{EE[ *'Se׶T NA8WCNa2:)ӰS#Յ)[lSa2:b˧˯b++د7 6Fᦚi#pM6Ki(v $MIiMCi4Mi#pM=iġ4M6i&6aii27 4[dnii&I4i1(viii&M6$چIM4Ӵ aa06 2SiPADr apaa 06Aa6 aA A Ad6L 40 $iap 00bd &aaaAtaPaG 0AADDDDDDDDDDDADDDDDDDDA"""""""" """"""""""""#)DDDDDDDDDDDDq/$K$$/PA(a/B& ` "?25k2b9PEf$3#L(" RI Jgh%ChG\SfB4"(G0g #0y8e sPDʲ3 aP`{ 0AB5#a0T= ӄh #XxG-0c*a0T40T L(GL#kG „h 0a{"0T= Ff#mA#XaȯL#X`2x#X`0f0akGT*ToARtIl:*®M3zm'Il:*:Am tUU¨t4(tUft PM:M4tUl:jp64aVWH7tUUoWH6 J+zOڶ J~ħKv`Ĩq)նO1*:Jum8?q)mmj:= wZZVAJ޺zCtJJK~+.ۯ~W-حҊuKQZ[o] q_V4??bxj+⿡ͧaa6v0FkP6 _/n;z_0m/mo [u k/ ~,67 K Kam/imz_km_K%RY:i]q?W~Ny:[֗[uoﶓ~ڿ_e}_ETEW o_׆Oy u ~]5_u>LP)X_zb/ =lS_ IE8E>,pb 밲 abdtӆ *MC;dniҴi4푸p҆I &II4ӴNI {mZIÆ#pi6Fᦚl4;Mv#pM6I7 4il4;a'G(Ds0k  2Tt 4 PDr 8"9K K0G0 &aA1‚ (Ds M0 06A0 K[m06Aa) $%0#"""2DDDe"""""8DDDDDDDDDe"""""""""""#}_WW^}}uiviZ_ᄸa(a*iIILT    """#LY27LʮwK2{+As*aB=0T P .&p8_ \vh9N5M9Nq%JZˡ)k__U}}W__e2BD"rc2^JyI9$ (KY/< O$%s< g6!p&>b9Bax&rBK2r*0!0%BGPEGDљf ̊3EPDQ39By%dx& e„{"0f{GÇL#@aGSi=^0ak3PGSL(3E` L(F5 L#NG= FdX5a0T=#`k #@a*a0dZCaL#`0c I*LӢê A6l:*7:OIh3}oL: ‡E]&btH6p&oIi:NaWI TA6m uI‡E]&bi6tA/un[}VV%:ޟVun%CN{=1*mzq)8={mĨj8?iҺz/+Һ?]{CХ_֕p֗[QkEkQQ[[+=5] F'm?ka#Il9??/ۯ@ _u@a __ K / BXl7oom/K/KKI,6 w_Ouhu)_wY:KD%RY:`w]]_ڿii?׶_^PV oa /_᭮ /JVk a~A;uբS=&4Pl&GV]=1_]|g>{alA2ا.* /]1_aX)l&G_ ]=X_bzl&G]iiÆ &FM0M4ӶFl6M&iNM8i&LavM6iZL4dnv8iCIӆ $L4bP4Ӷ &FᦛI4i1(vL&AA2D( h2^AM 0PT%aANa6!8 a &iA06 0$pA0L m0G 0#d6Ad6L D0 0!HqHDDDDDDDDe ""#)H]]_Wiiz^]u_]}iZIZ]iaP\00bbb0@ A DDD*|g2Lo%yO22(tM4¦#aSO¤~M4;@Q;B"d 9Q:,ʴ'i뮫UUɲPEGD!ѡ g2) Ƞ!8$2dIxNx7d*g4HHd ^z9*Hٞ#œ3NG慚24D S!C!"`2|x̎0axE|JxBaIt;4P#XaȰk #=#`{PT=F04L#@aM00T„{PT=FL#aP`8F5 k 0AEp0T*`\< L#aP`{ #= 3Aa *im&nM:ME]' tIxTaWA6l:**T:I‡E]&`i諤 Ti7$M;Il:**6} 諤U6tUWzIR E_~m:mmħ@mm`Ĩx:߃mm Jox=m}ҺҺzC]tK-+ҺХ{uwI]]ck}oVkQk[_[ÆhWtV]?C!F=Û^si#F#uOͲ/PsUf [t-t@ ^/a zo7/ N- K n IնnIgu E<}b4I{]:b'_ ui~M^{i"i~ium~ a +__]~_CU׾ k | /]1_#LSeS_1.*Wb(~LP++z*bb˯݊.N;dn4iI4Ӹi4 6I $NM8i&v4ai0ii27FġIIa 4ڴjM& 4ӦM $0iG("9Aam0T axapa8"9 ia#G: aa8a6MAaAt)AaaPDr : AaAL2^AFR"""""""2DDDe"""8DDDDDDDDDDq/믯.-,00 % a+&&&0`0`  ϙc+W Y7Wڼd;VgeKre¦#a [0)JH*aS G<,.&pH074 t(X;@;A$;@&ȭNQ];J%:̋}I5ԇ說u_U_]L7U}W]}GpGAx"Y* /<$$H$rH<? !8& cc 2G&9^x,G% BS!k!"`2|x̎0aU,̍3 4 L&9F `9BaHhqM`c.)Rm&MH6RpWI] ߢ~R}&ph&aT:NaW؄U oIm'A7aVWI* :MPP諤aiI&îoI7NSuոVobT=տ%CN_( O{~mjħ^~Kwzi]JJ`KJ?O֕t?__t:WtG[vQzbb_5{]_uEkuǯQp__v6?+t֢_mW?=]Q[?t8_⾐+8h|W} ?k>0>{`@<m?#sk0"ߘcۯaI6  n ^ aa/ۯ kB[kR ~/_ ~,67K i}I}[iz-K sߓ'W_Kޘ:#iEuO*ץm-^%NL'לOuy'I6:_^{i"k^_uߢi>^i~ڶ*I?_kkKj[XizXk~k4k֯׆݊.N˯bث a]Nha0E@=C+IA7S mYM˭[ LWV)z ˧ RaتiM& 6IMV 6S#pdnlJ &li4چILi;dnġ +ILN (i4pa#pilJva4imiPAA%AaH΂aA7vNMaA ڂ SPA@ Am0Aia0%@A0L m0G 0#d6Ad6L aAi08Ds DDDDDDDDqG"""2"?WWuiz^__]~iZ]V pP\0 % %6)MMb0@0A 0A喬k; Rd3L>viLve^dQS 0 0BL#aSN  .;@8;@x;Mr1 Y^9(x:NΔN2 t?꿮뮫]_]W"|o1"| @H$rG<p(,4,BBIxN Lг Q1ʡ/%do$rEM#L<("fy24D"rS!C!"`2|x̎0axE~JgxBaHt;:FP*aȶ{ #XSF=0Ao<(G-baM0f0aB=n3'=#aÂ0ak 0c*i{ #X‚GSafa L#a0TD0 { 0fGSNa'ME]&oMAh&l+M*7ItU:xTE_I Ti6aWIl:**ipVWIE]&¨uI&âME_ l:*Soz}[N_p}wun[un[}ۧn%CVoPS{oջm~Хt_t u_ZW_CNii]W=i}Vt++J]S_^ҏu?_C_C?{4?C?]dcaF5_b6m@n@_%Km_7k/JKv_)x"bױ_)/]_uN'ߓi?j[i~^ڶi~iumPרk5}4mo]xk|5~_ )YtLSeױ_ +]=Z(~1V a2:b˧˯b++دzM6Fᦝġ m4t 4M;M6iM4iiiIi#pMCM8i0bP4MaMmZI &MiIMiAm0 &I8a AL&A %AAamA$B0a40aAAA$@PA00 : à0„G0 ("9A 0 &. """#)HDDDDDDDDDDDDDDDDDDDGzm+J C C a+1I `8dKnT1#y|cy,ɿd;4̊ Rt…L*aB R`! ShL*aB<4¦ …  t#|#@x\.&)[@;A&vv"DT/և ב%C$D'p$Q9NW_ut_Z(KrUu_]WBYJg&9^x'x!5!.` 30aH$rG<pA!0fy#dfY("3 "BG$yN23xSx5dL242Ђ!0$x,BHHx'x-x6I! sNDlNA{">$4 0a`͔5 GPfi#1zaG†h#a Ӧ GÇE`=00fF5 k 0A5#aPaB4 {F a00aTFS G*NG=~?{ #@` { t6t:**E]&3NRmMzIWfE]& \* jm&m'IޓU & E[E\*t0諤ci76o xTE_)m:m)+~} JﯔpbT0ubT=[VP%9m}>ݷzҿ+JO_t>~?_O]WAҴҺJ5^_n7Ů[Vku+> =]Q[=b]++Hai1fԉOd_#a†fۯ ^/o?@ ~__Rl%K_KKפ _~_/'ױ_"Nb]/zcK'^ީ=:4Yx"~Cߓbj[i?{kumviuڿ_i6kmᯯ55k_P{ᮼ4^׆ aXi}C__]v˯bA;uLSLC^=]YuV»a0qW[`}X[˦) uSSeW'{.4pM4aMӴaM'M1(vM4i27Mm0Ҵi4M& %i(vդL8i27M I4M;aM&M0ӦNMiaG 0 AL&Aa&‚C :0 "9L4&  ` A 0&"94„G0dA ͦA ۠0 Ba& aQDDDGDDDGDDDe"""""""#)J,0000bM4ئ* 0Aa`&Y2Wɑ\O&e(T<0 / .¤B׃ʢ+KӡQ%k2PQZW]꾺U_A#d',̈C#K<rVJ Hyh&YNdthEaBaHuI(" 0g8g0azA t s1"# AAOdi 0da K2{"8PcG6S.Äh 0a0T5#Xza0T L= 3NG40T40TpaRz_zC_ǯQQ[_[kkp1_\Wx{!⿡] WW__?Va?6hea?}a06%n _~/ /߄ _ o~v]_b'F_ޗѴ__:ߓKS!?'I^h/'TU}mKWK~m/mJ[Xiz}k ak ~P׵i\sE SˮCث.?bL.O]՗[]^1O^Wu}bSan }dueױ[dnlJ &li4lJ7PaMiI6i $ӦM $dniPҴLô$i27 dni(vM6aA ڂ SPAN G xpA0pa0xtaApaaA0xa&0 ‚#"9 L(DsG0 4a Aa8""""""""""""""""#8_Iᄂ_(SM4AADG73Lu\/;fyIis]g;OL PS 0L(P 8\(PP\.(\(PppvhppvT"X! [^9N4&cUUU_꿪&ef0AD'9,!8NHYHg$$  Hx"?$(,4,BBYJg&9^x'x!!8 ; e6g 6Grȃ"|'3L|Y Ƞ3y' O$,G<t<yi3eC,?3PF6+#03X= =0f0T5 FSEa = G403}0aB=n36S*a aAf0ch4a=B5#a L#aF40aaASE=0T=ak 4 a{ 4=aASL#`1*MRf}'I&MêMD6tIa&MWUo 4uI諤VW 6$M;Im&¨UmފMA6l:C0AM$tUU®i6m}4i8PhtUݷħ_D_m{Jumvħ_m?N~OħJ߯mq)8={mmt{ҽ+Ҵ+JKJz/ZWUZ_UuQ鮩[Qkku}EEnk}55CCW} 4???\0i_ iCͯ0a0#~bf5_ ۯ _}m _ _@_%Km ~u m_/%K~_~wWi~^//q_/دׄPEi~Vux"NuNzcK'LW/KS'I6:]_im誚Oڶ_umﶗj+m_kXiv[^J  ok|5u~_҆Z^_ l&eX"] › ՗O[1[V]{ ˫. u`M{ TsE SW[Յb±LSLDz+vbzl&G_Wudniiؔ;iL6I7 4vl6IIL4i44l4pM4abPtղ7 6%dni&Im&#pilJva4imiM&paġiIô 0aPa2^L 6Am $00 M &l  aA uA‚wiPA6a4„G8Ds0Q0Am0Axl( At iaI &Aa` L  "2DDDDDDDDDDDDDe""""#"""""""""2DDDDDDDDF---/뮿+JҴPPP_ %ئ)bMN 0@a ADDDɺC;fed<ʣ*!|v<0 0 ai8\.*MI_8:x4Q;և fzfU!;N>tR믪߮Qt~n0)|3p!.`ȗ"|Ü CqM<)$s%ĬɎPh%C Y x7BkG4 ښEXa0faEXaaL#‚슃=0f#`k #=aLGȷL cTP70<#`\GSL* #X`L#PAL(GÇ00a0T3P*a2zޓh&Ii8P*67t&âL'IxTaWI&taWUo 4NaT* 'IMUI:*3MCH6T6mtl:>}~m:mĨӫvmv߯JpbT0ubT=[VP%:ս~%9Ju{ħ^J߯+tt+K? ~?_O]WACZWt;QlQo|^صzmuַ5mtV+}t=|V8h45+1__⿡|=ͮ`#FFaͯa90W2c0FpF06AAl?L?ۯa A a a K _ mB_%/Km$i%wH7wK6_itKu}buhE;//Kד=}mEkEkݴA.Mtiuڿ__kXi~U|5|5y]xiw +_]o׾׶T b l/_uT[ LW)z+ L˯bA;ua0E@E>-eՅ@ VՅ/ULWbPM0lÆiM6p҆I $NL4i&4 &;al4i44i a&%ڴi &FIaI4Ӵit4a8iZLMiL6 $(   SL&aA&aAaL("9A0 0nAd0!4‚#a0%AL&A `AA0 a#L(Ds I4/ aL ia0!AAaL 0 * #dDDDDe""""""2DDDDDDqDDDDq""""""""5uuuZZZ_}u_iZVKLS&lRp` 0 """#Yd-3\-_$3d0B0.(\.;@0&v:_]W_UדpyAf8g 0g8g0asA @Ƞ #B39ѡ#GD K2 yBq$AKN$CfD'JD(2:0{ (a=a*a*`a<# a{G{ 0c*a0T5L#aASiEzai0aA4f=RmMzIA諽$tUâzLܛItNl:6tWIWm&i&I \* fON_p}w][ջoo[N~VSVPuV)]:W%ittu]Z_ZWץCV]רحՋ_M_c> C CCWC_WX~m3UuOͯF#aװa06aF#a@0u ^ a_K  K%߻K m-/KI,7E^4P4~}k WkK1[M6)݊.C LWa}YuW Lث %Si;atialN (i4pa4lJMMզ6LJҴi4푸p҄a&‚h4. 0 &/ aiG("9A%ɦA &aAA aAH΂aA6aA""""""""""""#)H""#)KK믯. C pV)M AY* ̻;fW&[&w^As)L(T¦#aB(T< ,(\.'  .8;@8;@x?u$JNHk2W___]3.)*MIP_:Q;+_APk*Г5Nӡ?_UV꿪}WY6 0g 03Ѝ KJs4 DD' %䬗 HxD'0x7A#92& < xE~JgxBaIma@{ 4 S a0a7C=<#`> = F= 3N੄{ #XSF=0Ao<(G,SmAa *tiâCT&tâzzMuA6l:*4Rm' TA6a^oWI*LE_ w tUv`Ĩq)?*)ݷħ[Jumvm뽷vޞ{ W_Хi}t)]:W%}i_]W_]Eo~ůkuoC+!HچF0m3WuK Y ۯa/ ݆+'t_^Nux"b}vKm_EWm&մ6Wcm/ +_  +_׆55 }S_ՅClW]1[ C)YtLSeױ_ دz0M4$ӆPdn i8i&ii6i&i#piC $iivl4NM6l4O%A#APDriMAA! a: K0 A $0 M &bAL  a """""""""""""""2H;hFJPTئ*`mQ3L)yTnd_*YX'P 0 ZN.(\..C8;@:h)'i׎k^J- k)=M_]U]+ɴœG0g " LгLP^x79 2G<9!ѡfPAx"?%9ND% Ĩx&rcǂxM PYNY_&@{ 4t=E``0a F=0T5#={ #@`8a=l0T=4ƒ1}0aB=b3 tUUt¤:*Nm:INޓh&I7a&âE[E\/諤&oħJݶmvħK?Jumxo u_ZW_CNi{zWOI_u{֕ok}^=}xhzH}׊??a&Ú}j#K__o_z^~_eZدD_y:Kʴ:E<}:޽/'ױ_D/km}4^K__^|w맫Eئ*a2:ئ*˭خ/e՗^|gl4M6ivl8i0dnm44bPM&L4݆#pNIl6ivl8 2^AAL&AA2HPA &Al(("9L0Tp L 8"9AN 0a6!DDDDDDe"""""""""""""""""""""""#)mWz^]WD,0T0ب0L `#0$sa!.͆ 3: m(`l.2q 9g ɧ,˙0̙<#` At@ap۽oӻ6m;uH mI2~vc$w߷[&|*aS (T¦WI . {:Mhpppvǔ?޿ʴ>LU*P?']7: k}}_]W_uV_]W_/_` g2r#3L|4 N%CO <9$N23xSxB4AB\Bq-HH2)ȣ0!8$rT "r>F4,о=o0a슃XaP`{ #X= = aASF k 0A= G,tg{ #aP`8F5 k 0AEp?jC|Um(tUf6CM7tIhM5I6zME]&otH6p&oiIIw =1*Ju>)ն=;m}} J=>W߷~)ZZWt5_ZV%zW_um/JK7__o[E!?Nn_CC]Q[=wMEn΋c#u~W#u/fK:-':--,+ֶ޷@n/ۯKK_m/Km%ӨKm__IKKi%}k_W߶i}I}[i뮖Aob(w"Liwױ__4I{]:b'JJii*JJJ0 0l4M6I7IK~:6KUmUA0@ B!Xȓ a `A_׆^ ok5DDDDDDDDDDDa_C uMP+)oa]دLe"V]{ueX_{ TsE *SMti#p$bPIiLJ27MӶii0MV 6S#pdnlJ0i06aB#A 00 aa‚wi 6 $1Ad&iwiPA6aDDDDe"#DDDDDGH}^uivKᄬRlRlT  d/jY6 ", {3e28FS'ë :%:߿CХ{G?Ha7ܛQ?hum-4xj{ehUVIMm0^TmA &"""""#iK ̅3ٖSF,岶…L#aSM0YB8_nx;M4>|NΊ!H]u]:42A? `!8 %2$LAO9ѡ "NȸOPNN= Laೞ ļ$<Ј'.E #?G5(*i{ 0fa'{ * 0a{GSdT40Tpa G4#X=0T= FE[E_M N:**6}'H7*6CM6|(tUޒl:*TaW T&l:*®Mun%CVV%:{o][PSoPz}VPuy%8g1#3#3p D<23D&"& 2(0L9PAPdtfF'2:3"k G#d0 2r4Qp֗i]~i]JJ= wZZWA a5 PaaM=0akPT*`籃7G =#= G{ 2"sNGS[oomkQktUޒl:H6tUU CaWE]& \* fNtUtawM_}CC?W޿mĨj8= J~ħ_ħ]Ju5_aPskf0#w_Cu\ ZW_ZW]+zJa _/Zc_v6?+u7kK_WhWXp7iuaÚ_=ÚEWWuN'ߓ%h Al?_iumǾ_P BXl7o}5׆_kk ui a߯OM.z*bb˯݊.ޟl&a}˭']_''W_KؤȄ:uI4i1(viiI6ii&4M6iM& 6Ii&JbPFᦛ +ILOi_i?׶_00!HaaAuG L:0 (Ds0‚#aAL  a 2UBl( ia#G: a_ykkK} qDDDDDDDDDDqDDG_zP v]{ueX^A!+zE+i#pM#pi &LJil8il4iMFlÆ4M8i0M6FM607ia0Aa B  AaA 2Gt 4 PDr 8"9KPAAaDDDDDDDDDDDDDDDDDqWi-p0B# pQM0Q-23+gj,zaB(^.([@ɹfW v7k#2dvO%U!㬉*aT 08_ 뮶hu]b% ;뮺* ">FNYGAx"Y* /<$s3K>`B(0L= 2:3#LFb' A*dK čh4a=B5#a DLJ3t8*a*a0T= Fd[5a0T=#`73=#a f?5I6i3NRtIow6aWIl:*®M3zm'Il:*:A諤ޓM~O)ׯJutm`Ĩx:JujܛEO3OffdthFGF%Љ 23x)3EOFb5` 4"A0dKdt',Ј3  PDafD&HPdu%ZWCХZ_]+zz+J\#@aM00T„{G=#XaTAFat= GS0c G(f=(F{ #d3}0a{ * 0aȶk #kkQknkA6l:**T:Im'Ii6ZjoI6tzA(tUf6Im 諤AA6zLޛI5CC⿿+8h^unl%:bT6S[Nտտz}տVPuVCͯH0{ 5]?a͡{?}JzRKJҺ?kx@/ _/n ^VZZnu[QkǧPo_K_K K}Q]CWXv%mo//K mCa#ߔ>6?F#a1ߓ+tjO/%u$K6֟'^q=^D'u _n ^ a^Hio~im7^P a ~,6 W^k /^kK}Xk m.פ7i%{Wb(~L"WV]vYuha}X_zb/ =v]})۰EF|N$zcKu^N4]IgD:h),zFV4ؔ;jL4 i4bP푸iJa#pӶFJM&4i&M6FI v_:Ri?O~00j&‚ ("9PA 0aAaAH΂aA6aAAaG xta Ah: 44V~H"""2uaX uدzدb@^`O]^=]YuVKazW0M4$ӆPdnLôII6MiCI4ӶFI6%a 4ai0ii#pᤗA  pDr ("94 4„G7v@ d00 %@Dr A A6aJaAaH΂aA6aA}x"""""#DDDDDDDDq_Wᄸa/lRlW B#a.JlRlT   ""oH6z**Ya0a?0aocc_8'[Nm׶ouoVuunp%CVz}[ոl6/l< _/u] u_O_ZW]{]?__t/_K / [Gk}Gƭn[z_=_aC4??u~N]/tq>NKuu:uuu̯0m{aͧ=06Wm'Im/a@aaV xiZ Mֿ557Z5᭯57oP P7'b))7uV./Wv˦)7b޶)ئa ki%wH7wonI#I4L4M6I7 LÆ iII6Fi&L4M4i& $im&Q>N{ޘ),s|yDb|O4_uEd 2UC A % a4‚#400 % ppaA 2^aKà0aAA_i"_wm&wvDDDDDDDDDDDDDDDDDDDDDDDDDDDDDDw_׵U|5} o{_O[]{  b޿鰙}]=t6#.Iӆ $i&RiiMdn4iI4Ӹi4 6I4;NV (i4ġ l4M4KG 0#d0xaa AAa6 PDr 8"9 ۂ#a&/ pDraAa"9 %Xa $""""""""""#)H"""""""! ]_ᄡ' -ziJ$e>WU4¦0~pPhMiLe y !ɒrJBL(GO  hk]}W2XU믪!!i2r'#0F` p`!0$3"БRF "]M&tO\Vջo][VPuo]տ%:ۧb,>`ab(#<|3  (P_;MK ` pϑ`!0$:<qM<)>D|hYl̎Ƞ )(U\3|#`{F=#=0i6A40T40TL#X{AF40dX a0=#aTAN7H6t&t 7NTWA6l:*I6|*A諤ToI64'I'IH6k:mk;~kv޻x:m~OOq)"& 3)3C#03<)=fEdRf D$LA )R0)2|s'#BLPL$ BG$y&D(2:zҴzJm/J+K롃7*a aP`{ 0AB5#a0T3}0akG"*aB40f*aȠa00fF5{"٬0coZlVvEoo_~[a&¤T:z NaVWIE] NooL: ‡E]&ei諤 Ti7鴟8{t!hk%:PSoPz}o~Vտ%9ڷڶ J0a0iCu_?F6P6֕Х~-+K+.Az뮃?- [__oEnZk_Xl7u_%:~{t5Cu]_VᴰoKz//m/~5Y=um8#jF?=לNm9YN?]}:.1_ߓ|N A{t-jumﶖi? _ K a﵆5VPk|5[_ߥ_i%^Ia[.[T l&G[]{}[_{ TsE *uh1Mzy?Ww4IR_/b'a7 $ӆ#p &M&6LJ&M6i&4l4i&#pӪdn5lMC8i4ġl4[i{ǾO(K{k+_4 d0#L("9A2AL* &N A  a MݦmAPAG&L( AK xk߯k]k} /_]~_""""""""""""""""""""""""""2uV}]oOL/U^L{alAueX^A-^M6i8iZIҤؔ;iCFᦚm0Ml4MpM6M4푸iJa#pӶFI/Aaa#"9dPA‚iaaAa@PAa0L* A 2Gt 4 KDDDGH"""2 %+ H|0 %MM0A DGҌ\` pϑ`!0$:=&~g9f{GS0{"#X= =0f*aȡȶk ##`{ 4*iA F= a= 3|#`kP{ :'I諤C1NzM‡E]&j7H6Rm&ât tiâaW¤M0Tiâ]}-+յ|VտUvmbT?p{mun{oV`:ݷ&`̎1BD/3PA0eC,"r(42|s42:? tKJ㮅+nWO]wI]]0aaLGSL#`=a*iA#‚ /Go_^Eo:ME]'H6}tM*tiâCC7hU?VlPHJu{mj:ݶ1*JsmaͯaVm?="ߘSa׽t=i]V֗O]WA}Rn/ Eo7oW%_ ?? ߆m/m&K 㴿KÛ^~jO8*ׂ)bͧ$_]}:E;an ʹm/VKm&L~i$[i~ڿm7o7 ~׾_y_ N_J_JKzKM)X"Se V/[S׻]o_a{_اj'לOuu"lPi4ᤚiڱ(v i#pᥦI6iIm0M:i4iM6F M6i&vm/Km_S!PDr 8"9 PAAAm‚#A I &N0 K7 : K6A9V(& %kwkҵ_5"""""2HDDDDDDDDGqLWeױ_V]{a2:bLjI &I4i4il4;iii&4M;G 0#d7000 0h2^A"9NA06]u"""""""""""""8FҴ-/ C C a/LS `i\0Sb GmtLI2̻$+| PGAe(L*aSM4 F/ D. h$ipvidv)2܌Oʴ8I"h4# aS (T>\(PphpppvR[U8:%/^ENdt`hAHUa?yNEGFdPYe6g 6FyfNdt@'"Њ3g(!0sAsИOL#Ç5 = k0cF k 0AExp0c*ik (GS‚PfX`a#AWI Zai6NToI67*Ni:ME[E]&¤Pho l:*R몯}ħJT?uoun%:ջlP$ g2r$3 0a U q+%y#VIa +&9NJt(2:H sNYNYLrKY/< ]}{t8ai{i}W{Wt?Uu5(GA{ #‚슜#1s=8*aGSG`5 = Ӧ<(G,S`g{ 8pT45nmv?nص׭~' Ti8P諤]7ItU ۸uA6iâi;OToWI*LE_I Ti7_ + wMEn++NĨj߃jݷ)vĨħ_{ݷ)?osiCͯ0F#åz޿JAJҿt@6 a/@/[ǦV7K,7N-K% _CzKK_#?ak?j}_Y"LiwN_u_O?~/iumﶖ Xo7/_kկZj[7 aߥi~޿?]=wjAkazb ةƊT ; ޿ztq?R__ uudbKuNOuhtI4M8i27 6Fi'&I>LÆLJ27FġPi7aiiMi +?/iz*iK0AAɨ L* P1:!4‚#a0a8a6MPDrvAa  ANaPL2^A忿[[_]xiC[_k (j"""""""#""""""2DDDDDDDDDm; ˮ?bZ(~V]vدL]th6ؔ;NV (i&v4ӴaI#piI8i27Pa6[ 4M;M64i27 6pDrG0Pam 0"9I  A/ aAɨ b aPa=AL&0"9Ham%"#DDe""""""""""""""" ""2sq6uu}]Gj便m뤸e`~ҴD|00JJ 0` "#dO"yn%cy2N4¦aB<08\,ih[*#":9N;do?T¦}֓apUZD!4X:("|b&3NFbFNYBaHg&9\x'z&9S= LlHyqM&f,4,B3}0aL0a G  5Aa{"8Pc3u0a`#=(GSh4 F{ hAO t}}t Ca:iiIIw Rl:*8tUU¤8TaWi t MVl:Rf꾽Jumv~mӫmħX:mUJKJz~Km.7PEO0D.%do$rC!FВJPDGFN_UU STF=l3N0T#5 G=8|Oc#@za*a*`8GSk~F=#a}UpR TIxTaW[Il:N; tiâaW¤M?m'IĨq)Ҷ JݷOokv޻x:m%CޞMB"o0g 39RAfGFi3C#<`2:3"ВՒA& #l "XBy "& $AZBO]wI]]Z\)CM0{"5=#= GL#aa3N0T= 3}0a{pa L#X`C`=f=Ů}Eooa':*3Mɴ'I諤C046o l:*â諤N煉&Um&oM+t8CpC_q)ն=~m:mvmm?հ5Aj0 =0CUW^WO]}i^>_ZW۠ _/  alQ[ zE!_/ IXo+???I/6o7>0a6vÛO0?a? 0^%פӥ:0'~hz_{YEA۠l6?ۦEkKcm/m/vBXl7oC߄%uO|~iZC__I,6 AKm$uad[.Mo ]Z(e}Z({S׻]o_a{P Ұ1M%Igu E<}:5'_K8M;dn 6I4Pdnl>Li4atialNA0IIpiC>i~Mi~H~a8DsiL* K6  MAh 4/ 0 &/ aXb`&PDr &}~ ak[#DDDDDDDDDDDADDDDDDDDDDDDDDDDG Y)zخ?K. e^H%zMiilöFJM&4M;M0al4MmCIp҆ 6Fiղ7^/ ammApDr AG PL2^AK:0 ("95 B#L* '0mt"""#)HDDDDDDDDDDDDDDDADe""#Uuu}_ᄂT-4ء.a Ҵ$! C C S  `m]FEr; LgfyQ PS > ./hppvږ@yږd!3!+̳)̌!'^J954M0 i}}x2r___ e6g 6GrȜ"|x<D BcL%ID'I0Rgp'#<24D'A!^0e!"$AWՠh#XaG,C0a{FS*aeg0f=0aM0<#`0Tg5(*aEXaUiIIw Na&âoI7ސoM&‡E[E\*6mti8P諤LޛI꾭뺷ħ[jJq*`Ĩ~{~߫n̍3Ndt39GFdPAzAG$<'Cg<Bc%C1x/N= $ٞ#œ3NG慚Ndt gJLƭI_)]u W:WtJ괮+K0T=(*aȡ07= F= aP`0{"k 0aA4h40 { #!„kG=v#@wnصcW~cIl:*8P諤RtA7H6tiâCC5I諤 Ti7$M;Im'ë MEnW}t?C |VVuun][%CN{=~O)ׯ@=m5A0a/0a?k0tt뮞]KJ~ _[u0->~]v?__~^ӨKm}6 ^,7hWtV]k_V_m櫰f(:Ɨ~Nф~N*'_)[q=?۠@ _[u?Um/KEk o__ _5]{_^_xk5 ߆m //m/;Wb(~L"WVbˮ?ثTkIددE@duKazq uE<}w_O_Kޘ:(O*FV4ؔ;jLMaÆ#pa7Ia &M4$M4M6LJlöFKi~ݴ_W{kumﶖL' &ڂ M0 0 $uG&t * A00G0aAaAa0am0iG-o_ / oa""#)DDDDDDDDe""#M41V]o^=u ueX_{ TsE *uehRI $NL4i&L4M;I4ᤚi#pMMFT:jmCI#pKDr 8"9 ۂ#a&/ A  pDr A 2Tt 4 pm 0Ai}xDDDDDDDqH""""""2K % R-M AKG % pV)6)6* A`DDGڼ^V;v2;vs#iL(P7…I;@,*dde^d/ޫГ ;N&QL(G<?Q i8]}uf_]u7)H.DQ%̪BB*x&rc2H<A1ʙMH! sN@1ǂh$) x6PJ Њ3Ü."?%99 !"`̎B3 Tu_UU=#`{GS0h #`:aiSE`A0f&kL#= T3|#` k 0A= G-{GaU]u@I:ME]'H6RpWA6~MtUfl:Czi:AkH6vzI&â4*:A&߫q)׃k{%CN{Ĩ~ħ< Puno]o[엞 ā CA"#LT `>[*3H|S ʆLf@N*aJXg 0M8PP<(]' pvvprK|gf2WvF~>'gJ&Bv *aS (T¦B vhUry0qʒ+K]WPDGFNY23pS|#<гB'2:Ѧ`aYg3PFycZH2*3 1"s#B3D!sps9WF=#ah40 { #„kG=SOL#a4= 3ya'{ * 0a{GS`T40TO믮i:M5I6i3}¤6m}4i8PhtU 諤U6tUWzIR E_믮N~OJӃmm1*Jum޻x:m< IH.H$<"& 1#l0a0eKFaBqH: ".خb˭x"NE;uu$.1_ߓLÆLJ27FġP$NL4;M4i4pa 4ڴjM& 4ӦM $*ڶO^{i"k@&PDr &L' &ڂ M00!IA 0 AtaPaG 0AA%J okkKj[Xiz""""""#)DDDDDDDDDG ˭bئdueV )˭ةƊ՗]V]Z(~&NMM44ġ 4a;M6iJa#pӪdn5lMCMm0Z_ ؆ta  ! 2D(& 0$pA0L L' &ڂ TmA '_AH""""""2 t/b@ҴI!00 $LRlP T̂\̒d2(T¦0p\,vcV"?__U`-!H,  " dKY),'G NY"'"БRL ">FNY3#K<rVJdKFF50ALk #a{ 8pcMA0 0ak 0aA4h40 { #!„kG=v#@`੄{NaWm&i Uނ6aWH6p&oiIIw OWt{uI J+zڶ J=>ħ^)+= wZZWA+ҽ+pO2rկjmkQkk 0c^W_C_u+⻦Hp:ME]'aa6{ņ?F6?cb_A> _/moZXK%{%:kKKm+ __%mo+z_lVu__ߓ^Ɨ~NH4_:0}UM'~>K:6EWKak]_Pu%VdtN' zPޟl&a}˭ة՗]V]Z(~Rġ27 4löi27I *MCl4&m27 :FV4ؔ;jL4 iKa0A4l0$G B#AJMM0 $pA0L L' &ڂ TmA /"""""2DDDDDGHWW_l&GIlJA ;O%DDFJ+ᄬVlT&A0Q-JLfUsL2;>wLBj32B<4T…0E0aIappthidv?J̑RNaVq2X0B 0O pB  ~hpppppvʠۭqu#mVWSe_(4eNdthD"("|Ɵ&33 G!x<&0fxS{?2#dFO2|(Hx'&L pqٞ 4#LuUUu0a{G5#`k ;[ a13`i0 L#A0c =08F5 3Rih(F{ ?몯i6Nl:*6vWIH6z***6:*3$MRf*}ME_ޚj6WNm%CոnAo[xM ?2A y'"$YhY0HyBq$ cx&L("4dt\aBaKN$(B\g`!Z]ua롪ҺF00a{PT=U„{"0f5#`3aiL#`4{ #Ç0faii#0~_[c' Ti8P諤a7ItU&A7â諤N煉&Uo 4+ }W++t]Ӄ1*ڷ:mq)ҷm*):ms#F0K^]?] u{ ?}i_{ @@@VZݏ:-c/ʴ/[k,7/_px~+K/{ikka?UO F If;/zKK),O_hޞuanu~/m/IKPEUm8} %~|5}_~i_o7i%iaߥi~֕l&GO_a~6 eE /\ge[tq?R__ߓSu:*G_uWeZ#pl4Mi a$$Mii7M;dn4M4dnizؔ;i;?_imi~^@&PDr &d0ia*@G0L*d000i06aA&0 L4 taAA]k["""""""""2H<"""6dutea0qVX"[uWV՗]E@+ZX;NV (i&v4Ӵa(v l4al4jLÆ4i7 M6NMNP*#L A0at‚ * K taPDrjG*6TOAa aZDDqDDDDDDDDDDDDDDDDADDe""=iIuu}_izZlSIp&$! % $1BB  `mbs^vLed0S*aS 0𿅛и\*LSipvMv\RfAg! rG*CPS 0   I8;@őJtK4DQ_HqM<)fdt Jsi3L "x6"r6+u_U}h#XaG,C0a7S*a aB=#„{ 6AkG 0 ==0T„h #XxGG4 $M;Io6t:**Rt*A諴NmW 6oE\:*PMޓ~h&뺷)mm=Nv:ɺ"IVJaHh$A$ ā Hx"?%Q PYNY LrO BBq$u o1"|=+Ҿޫ߮KJ믧+kG4 = FSL#X`{"0ciL#aP { GȱL)k 0cM03LF*aM;_kozNzM T&â7} uIi6&t¤U:tUphIl:**!5}5+_VSNSսn%:}߶ջoSlSno>{ba(}#Oҽ+Ҵ+J}m@ak? _ukku[P N_?_5=CI}[i~ ^7\0i?1#ͧ.1_ߓKi'6?zc8(yDh ~/ױ*_u_ ~___ }Z?k /__}_i_~__+R ?l&N*ˮ_u~eUدb.(yK+SE<O']:'^~q?wLæi(v 6Fᦜ4M4 $i&Riġ *4NL6M4MFiimZOڶ_L' &ڂ A 'G("9%L -n aa8"9Pa ! !aA0!j^KPרk5k""#)a0E@.*/_LLQbث.e՗]캰E@du_ؔ;iL6I7 4vl6IIL4i44l4pM4abP4i&ivaPa2^L 6Am $0 M &bAL 8"9AN0P@0pakDDDDDDDFR"""""""""2vCV]^JW\-iJJ1P`T̂gi2YvSzPB0…  ԛeY+̆dfW%Ց?&KRӡ*h!4PL(PaB]}uU8:&v4 dik믪GYqN'D'A S&9_0): ᓖpg" r(0L9PAٞ#3PG慚dt gJL^yHA1rVJgau_#XaAa 5싇=8G&SL#X{0ciG h40 { #„kG=v#@`੄{ #Ç K6$tUIin>mt&E]& \* jm&fIm'ë :N>mm{`Ĩx:߃Juo!"`FaBqH)\Sfx pA#d',ЈّD% 9+%BVBJqHHHy"'" P^x79!Kc:]uW +߭+?i}W{?O WG= ӄh #X{AF40dX a0fep7Â0aa*`8G+Â0cjkVu }W-}[=z?E]& \* jm&f¤6Rm&âH6IRm' t+t+j+tCհbT<uo%:NnunoSl#a?Qfum/J~Jz/ _/m0a/mo[G_/޿ {_ӨKm}7騭? WKKm+ a//m/a0F#u_.1a.KbE;8z/o'E%Liw'D4ۯa@ۯcSIߏm-m'IWm-_Ku m% mun5_5]{4xk~^7_a[ _E; )C ueױOWV]lUH&4P"WV]vYuhբ]h4t~N_ߚ++"t6%鑸idnIpMM6FmCIm0Ҵi4M[#pbPi0dnL6F4i?׶^Hio誾OaA;L :iaI A:06A ("9PAaH΂aA7vNMaA ڂ SPAPDrj'_᭮ / oa_kDDDDDFR""""""""""#DDDDDDDDDDDDv]{ueX_{ TsE *uehUVV  C)YtZm0Ҵi4M[#pbPi0dnL6F#pMCi&i#piC $KAaH΂aA7vNMaA ڂ SPAM0 PApaa6ڂ0aAPdDDDDDFR"""""""""""""""2vWWᄺZ[u `{JPTئ*`-םJ򵝙f%\>(T…M0 (PP' ijM"fB^I3g}R~D9ڵ"G*,C T (T_ (\/ipppv}uW!"t>LS_]Ub 0rI |`ai3PFG$<ןND#0!0%BGH"s#Qѡ Љ8SQD'9,!0<9#e-UuB5{ {L#aASL**i{ 0f0c FST3|#@a=lG{GS0aC= F{ { #@`T=M5UI=&zi6:**WIhtUI‡E]&âl*PMޓ7t&âAꓤޓh&WI+U]}_Pn%Clo{oޜm[%C[VS[N_չ7PYBy#2B H*d$LAH"#ѡ ?2# !8$=fAAf'D$LAfyf "aAt>i]zVAJ޺JkG4 ښEXa0faEXaaL#‚슃=0f#`k #=aLGȷL}u~]kutmޓi3zm' E]&fNtUpWID6o l:*i6Nl:*MRf|W}t?C WXpuV[տ|[T?ջoջoạ2U0{ 6ͮ`KJҿJ߯JҴJ/Al?uGkk}G %ot=|V8h45KKa}i~ms00m{aͧ2'_P/DIfӒ'xE4_Wm@@KvKm&lK%%7,7^Xk [_{ aKm$i%wH7w[`i1_[]1M WV]lU^bz *Yt1V] (yؤi'LRY uy,|N'^~8i& 4M4Ӵi4i4m1(vi7 4iZL4dnv8iCIӆ $am0iiIIvEi6OL bL02E A"9   0ia*G: aiG("9A% 2^ 00T0o|54__K_k__DDDDDGDDDe"""""""""""""#)a0E@.*˫ ^H%t_!b.Ұ1M+^bPM0lÆiM6p҆I $NL4i&4 &;al4i44~aAja6 A0:0 &aAAaG ApDr %1  . 0a6 ^""""2HDDDDDDDDDDDDDFR"#WWWWa(a*ZZZZiLUu\  `iZB"8a(a(a(a+1LT ` "#h̆s^vKsaB<UC`T… ¤\(PZA%Q;oDד5L/8_XA\Sf{4,Ѝy FS"a<<A*̎ ȟ4"s#0dѨPY!.`13O0N$A916-5h4#X= FSEa'=lG6TG=00ah (G= aL#X= Ӧ0T5a*`3Xaȸ{ #MIl:tUfA&oMUIph&¤O諅Il:*:AE]&êMI6}&fm'߃}1* Jmtm}>mn1"(#Lا iii]]J]>֕]{SF=0A6o֯jƯk[ZkTA6a^m't]CX}סX~pt+ħ[>ӂ0PeF0?#a6=P0FT#JҾ+K a0 -z_NK aچ7 mB_/\7> t^/Jm$kwo6ޗ%Vit>i~dbͧ޿'EѢ(yta?}:/+'F}V'V~>Kuߦmv}UM-k_a~[?}wW}"Wa~A0S e]1]WWLS]'Յdteױ]l&GOa~,p,ww76%Mim0N &MCIai4mCKM4ӆ#pMCL4i6F(wLM6#pivm[Kcm'a;PAm0 L6aAʪ \0A0‚#@A #06L('iaM0 ("9xk (k5""""""2H""#DD{1[M5uzzm4tzZ_p a0PM.J*_iaJ1ZiP`aA-#2+^eOL(T¦*|.. 8;@MbNgu!!h,J]}WYl k]uu(X W 2\Bq$P23D$LD$LAQaz9*Hc.).خb˭Ibbzتa&C &M4avI4MRPMuP NL4;M4i4pa 4ڴjM& 4ӦM $ӪM4L4M6M6IA @AU 0q ` 7 @Aa )V(0 " AaA%AaB#A anAt n0LAxaaaa """"""""""""""""""""""""""""""8pmafA#i0M\< O B\Yb=0L= LDb`ʂ'0N= &ٞ#3TFM0a =#f3}0aA0c*`L0AL0T G= 4a00o=#Xa=0aF0T5h40dTa00f#@a 5AaA(tUUl:*NoUl*TIl:*P諽$tUâToM&&ïU oIm'A7aVWI* :MPP諤]AA6{MRM$T5no{ooPS{oջmx%:O{~mjڶ JJJ= WW_t׶p~ii]zzҺ.I^jouo_^صب?Mwu~ߵuptC?bCWWM_5CW0jao6jk`=#F?F6Cbmo@ [k{kx@7kᰖ%K Ku m aׯia/^m///t_uN>'_|:?Y:~ߓENS[U֗_Kޘ_Km.ݴm/m/m/K_m/WE:6_k }a|5׆ /J[__PׯOM.z*bb˯݊.&+IoOl&uVՅ+ e6# a}˭تiIim&L4aVmCIatiauI4L6I %ġVm08i4m&lai74ӶI7 4iZL4dnuLæ A ( AAAA2^A"9aA0 &aaA0pa A B *0 haA"9UG&PDr AAA im0amJa0 #M0n00"""""""""""8"""""""""""""""#)DDDDDG %MNa ADd;5ў`{;yg23&_ (T„x *aS 4•: ¦*a (\*N BG Ivipk`/2DQ+H*M'nNΔH;W_kzɷ?212:A 3PY9 ?8e9a>bFNY##K<rVJdKC_LNEQgABq!T<%C<'9H"Afy24D"S!F0e0c*a =0c*a G5avA *aL= G=O{ 0c FPM{𠩄{"8PcG6S.Äh 0aF= FL#!{ #X`{ 4=aASL#`2Cd3NGWIl:Ai:ME]'6i8]&¨UIaWiâia' t:*3NRtIow7 iêN:*3$I諤tUU CaW Mۧ%:[VۧNp}%C%C{oյn[ո{m[z}NS]un%:ս[o{m [տii]uit)_z)]]uuХ -+ߡRK+/ҺV:ߵ׵յuӭǯQkQQ[[o\WW_]}}{z_C}WuUa?}5_ba8a@??FUĿ?@P9~/o/%7K ڥ_jKw_fi'Iw__u^K+tANO4W]]__:^^uiﶖiڶ___kkk׵o^k /^O_ (iZ5[[hL"WՂ*4L/#]X].zz)z A9)uehUV[i6b "Vد ]=v]{dni(vpaaġ#pMCdniô&Fil4i&L4ai#pxi'iilMCMm0I=27 i&ġil6LM6M8i0bP4MaMmZ0aAAʃ$"ia‚0i‚ "9#L :+%aJaKaA aA a0L&aPA6aAʂ 5aRLSL h2^ &aH 0  A@PA00 : à0ˆ㈈DDDDDDDDDDDDDDDDe""""""""""""""#uZ]}W^Yy6),WC C tئ*0a DDG FI IgjȾwْ+vc;U?aYLp 0SL*ii BL(T¤Rp|/IAB…hhy6!gz֣&bL!LPCugb;N]u]]u뮿gڮ_]| H+f^ PEY aM#O3 PD@S|e6g<23|ɒhDGFdify ǡ$ 3œ3PˊlNFaPI2n$rc2T<SpzA0a0eK`aY0g 3 Ud+ `!"`"Ü o0anefaM0fa aG Z S jL#X=aL(T3N0TM4 k G SG{ 0f a= 3N0TT{ #`0c aL0cA*`=00fF5tI tUUt AWIj_I諤6pâToI &t:*I6|*AWUm&âm' mti:Om:*M Ti7oN%:Vo}[mն%:}x1*q*V Jox=}{mt{jm1*~+JKJ?\ [i}z_ARҺ+/ҺzJ[nTkou?ku~CwMMt8:j+uCH++P(}6?>{ߚͯAW{ _>0/鵿kx@_@_NӯB[oXl7ӯiZ[^w_Xl7ki%Nzczcߓ E_[N'ߓdg%KBKv㎾7m.ݴm&__k_ ~k|4_֮k_ oP a 3կ_[]~_*]{]{{"V]1^LP++޽=*׫t}_]o^]{Lد; ^eױOWV]lU4iiMiM6al4M;M6 bPi4v 6II4m&UI6iM:i4iM=4aM&paġiI (i& *i +ILOAa a.  a K[ w0PaA A #%ݦJaMB#A anAt m  0 " AaAӴ‚# % ނ 2Gt 4 DDDDDDDDDDDDDe"""""""""88"""""""""""""""""""""""""""" "#_t(;-$0A.&>p` 0&yyؖIb\;QfM$(PaBM4•ϝ i;KΆt8P… PB888;M488;M4mmpi&DdUx-&lr6 k[[#m]UEU_U'ޫ&L'4<Ј0)#di2L`F`l !0$0nE|x!.`!.`ȁ1#.)=A\0gz">FNY#K<, a엞 Ą0g 0Ѝ #l "XBy!\3i0T =0TAL#X‚0a8pT4 *mAAtt=`k h(*aȰ{PT 5Aa{"8PcG6Q14  G{ 4 S a0a{pa L#X`CFSME[E\*6l:*ME]' tiâ:*&âTWUm'6T:*3rpWiIIw OWt{uIAhP'I&w}47ME_i}1*mNm`mv~}K?>f U601Oa[t _[u?~/ A/__NPo ᰖ K i_kפ OW6 _{Fi/:II"zc'WoLFizcK'LWO/|NU'_m$m'Wm}m'Ekcm$U}mKm_ݴK+ jxkk +_i} o_5]{4xk=CJ~k߮z_)[lSdue]}^6#^{ TsE SˮCث.?bm&)h]Yu[.; iII4}iġi $m0auIMm1(v#pM;i27FġPa6lMޞaiI &8i27Pa6I.4ӆi08Ds d0 Ӵ0aA Aj 5A0xa:0 &Aw AG' Apm 0Aj0 @S aa#aAɦ!Aʂ 0+0""""""""#DDDDDDe"""""""""""""#}_z_K]%dUi%iix^H% %i1B&0a0 ""?_5^Zo,eo2bޙ\4S TΆFAS )ڞt3 BB …;@Vpppi*RmqyD]I޶w[ qm.)>hY4H/?2s#lB N4_fGG EGFPYE(" ,'2:HˊlPFfNkL(F Gk L#FM{ ?#X„{TG=#a0T{ #Ç0faj = GMZjU W‡E]'wo tRm&ïi8T*Im'H6E]&w}47MVMTz:@=)t Jݷ{Ĩħ_7)*J/ރ׺V]}i^>_mZWBuG_ƭnoǦukW[?45WC'M}C_F#~jsi?aK>jU߶?X@_!aa@[ - %tׯ Z]o7~￵1/ح-'_tm>}KuJ:u:@_fOO{im_߭_߮zWբ˯>#dt]{բuealb]ح*&m&iIi7 ilvMbP8iZL4l4MmCIp҆ 6FMjMچ a6apDrj& amaPaPA8"9B#dA‚ taPDrjG*6TE8;aa BDDTDDDDGZuK봉TY~K %X>  Q%y^v*Y3^Jd/&YɖWK̿*ٙ.)EpL*aL(T¦t22M0k!<t#|(\.IpP  pv8Pvkhpj@V q$wRTNPIkCID&J?},#[_[K믮_ǦP]}u]>hf203Bc\c2S23' L9($b99F*?#Ђ!I0ȟ1("ra 0f5a*ik 0cL#XmAASEN{ *a i4=h#Xa3}0aL#Ç5 ӂ26AOGSL* 00c*a Gb9pGSM0akIl*A76WIhNRm(tUf.zME] U I&ޒoWIWI‡E]&`zIZ aVW tIl:*6:AVWI%C_^%:Vտl_߶oNK][%CN{߃ħ_=[Nii]zzҺ.I_ZW׿I]Uzt롪ҴGkQ~Ekukuuk[[⿯k騭W[?_0Fm~#F#uR&_aaͯsT#F?v-@u@ ^/@k?a0~/K %%: [o ~xm,7k_%c/[݆/,t>h'_hޘb^Ɨ~NioY:E;'ф~"~m}vK@_mm/Cfڿ_ioi??K_kKk5_ +_k oz{a0E@E>/LW_[.)"awAkueX_{ U^բ˯O_LWV/Yu[L i(vդL8i27M&I#piġlêM4톒lM6V 6S#piiIi7 ilvMiii&4#pMi $i0zm$i&iġ ` )PAa0AɦAaam0&aAL'pAam0 $pA0L L' *0 A  Aa6TADXh2^A"9NAG&Am0aG dv(1a 0PQDDDDDDDDDDDDDDDFR"""#DEDDDDDq}/K"[%a.J+&i   qlo+\ve^W ɦviyO<_)y Px (T=Pa3(PBB8PMBG0Bm׃@VM")KD*؅;5CRoo9H޶]}u}W}z꾫uU_M#lB2:P^x7HG$H<3 !N'^NK?_K?O:E;NOtU}mKV@WK}m-KKm/m/Km/}}K}[Xiz +^׵k5[^z5Xk[j__ C`]Yu({eբUb ta}I鰙_eeױW[]YuV~.]1_a~iuh]1^LP)=;uU.4ؔ;jL4 i6aii27 4M4ICM6MI6ii&4M6 4MOdni &i6I4dnoM4 +IbP%iSIMFᦜ4aöMPDrj5MAa4 %ᰠamdAaA12D000L:0 (Ds0‚#aAAAL aL Aa  m0a6TAub0 PA‚ P:0 &A0#L2HYHDDDDDDDDDDDDDDqqQDDDDDDDDDDDDj]-/K+KH"K C a(1I ` q&e&Ȍd@_M2SΆF0B{ 0NŲ ?G B(Txa4l h*IvTAyJ]; I4&.޶Gz__UZz ^&gpS|3 ǡ$ E}HˊlPFfND$LA Ǟ *BgxL丄T<2GpS|3A " 䬔H( PPT40Tpa_G6A0a=6@= ӂ`̒aiL(F#Xl&= 0a`fpf0c(tUޒl:*TaWKUa&޽tVWI&èTzIMOInm뽷v\6%:%CmNSun]W_X}JRAҿߪJJn7wV?n_?-@kz_WC_C~uPW>apF=?[/ _ 0_wuK ~޿ᰗz^__~v[o6:u:?_KhфKKm/K6KPMoO5ᮯ5_zz5]o^mlVYuWYuE@aiҴˮ˫EE@-4ӦM $HM鴪MچMNL4Ml6Mi7i4ޛi&4ijLÄ 0 &/ ݊`;aA@*00Aʂ Aam00 bAT0 """"""""""""*""""""""""""*""""""""""#UZ2DNJL(IyUɦv̋3\ALf]nQɰ(\! ShT¦00 T™d3:Xe > BGALvv '\I5ԇ!8$CTZARm&Z5#mo E=2믯믪G___Uf203Bcc2S23' L9$$aBaJ!"r>F4,Ј#L<, Y9+%ǃy LN_cTP70cGSL#X`k*ah4 G(3dF40T40TL#X{AF40dX aGSG faT3|#@a 5Aa{"8PcG7Q14  Ga'IޓNoE]&âxTi8uIWIZ 6m tUޒl:*TaWI&ޒm&i*Nh& TH7*6l*PMToI64'I&pME]'jpbT0u^ouSom[un{oVuo][NV[%CwVS_|~ Ii]zzҺ.KJJҺ?%ZWCХ֗W-v*?]_~z_~^C_]5}5CCC5CC⾿K{#F_?u_?F6G}a(}0Y0;}[n [_@ _[u? /_NK_%: N-/XnK.ׯK^פ OIoIo'K u_-*KߓKޘ:ד]/zcK'LW膟4_:O[k_~i^Hi6i?׶^Hiok ._ JPuҵ᭯5_5]{4xk=zjLP*bO W˭l&G] ±O^Wu}H'4PE8)b.zb/v*A9P*˫EحI; l0Ji&LÆIi6m1(v#pM;a#patialNtղ7 6%im0Mm0Ҵi4M[#pbPi0dnL6FoO[#pMC@ A4( „G0j A006T 0 L L6ApaaA0xa& l( K xtaADsiMݦmAPAG*6TAN1N DDDDDDDDDDDDDDDe"""""""""""""#)DDDDDFR"""""""""""""#]}tiv^JK Sbء0@0Q&3fB)SvYy g|O2Mt@@B4…L(S, *aB`` .…… \(\-'Ah lpv&QݡRoc[o__~a?eNdthD6G̜%̎!,n? F['İy+%3АB4%&dtfENE(,' O%3$~hG8g1 f GFdPYPG8g1B\23xSx#9fL#Xa0c00cl* h#XaG,C0a0cF= FFS ? aaB=* #a0ca= 3NG 5Aa{"8PcM6黇CI'èPToI64'I&tA6l:*8tUUoI&&ޒl:Rpm'I M_E]&jm&f¤7aOJszSpbT6[z}unۧx%:bT5oV%:uoZ\ Ci{=K-++/ރ׺V]WC֕I_ccW~]m~Zݏۯ~7 xHbt?[?~ }5CC<#uOȬsi6#~ju F6ؔ6-[_-@~.a _[umD,7u m/%KzB[kK o/m/w_~vk_V_zK6CO1ߓ+tD'E;'^oY:'E;N:iOQױ*_i6_OO_{i"կXiZ ~[jVj]mX^duh6#+R ?l&balb+l&G_WO]1Mخ˯bH'4P"VA0IIpiCi27 4bPL4ӴM[#pbPpiIġi6I4dni1(v4&PiCTl4jtղ7 6%ʱ@ M0L( bPA & p l( vPDr d0aAAL* aPa`aAa"9 2Z 0a8a6MQDDFR""" """"""""""""*""""#DDDzZK/I"J/ $ᄩCB &A@ endstream endobj 68 0 obj 109146 endobj 69 0 obj << /Type /Page /Parent 3 0 R /MediaBox [0.0000 0.0000 612.0000 792.0000] /Contents 70 0 R /Resources << /XObject << /Im14 72 0 R >> /ProcSet [ /ImageB ] >> >> endobj 70 0 obj << /Length 71 0 R >> stream q 614.4000 0.0000 0.0000 792.0000 -1.2000 0.0000 cm /Im14 Do Q endstream endobj 71 0 obj 64 endobj 72 0 obj << /Length 73 0 R /Type /XObject /Subtype /Image /Name /Im14 /Width 2560 /Height 3300 /BitsPerComponent 1 /ColorSpace /DeviceGray /Filter /CCITTFaxDecode /DecodeParms << /K -1 /Columns 2560 /Rows 3300>> >> stream Xh"'F2Awe-U p@(AR08@ ʰr$aQpapF 'iI¤I6'0NMƊMǃr_Ah h Wnzozo^]_+~ /cүH. aK%cI/ ?ۦJoݴ4 Jm~~_[i}/-ZJz^%uT+uD5IפC_KI$Iz'vI.-M!&HzHv҆Z4Il$% $iZIJH BPOb [J@a0D|EDb"#?%I(AGl6\ ]*3Q KҢ6r:pRyf&u,U@i?MՐF0?,Y3.dVeDBY,v|ghܞC3 0`΄PS #aJ$c v$0aQh (PP4  ' x"PaaB­h*ItlRoo" {cZNӮBL?;CGzGz?|_}I]n__^M"'GtP2<b>YxS PD1ٞ#3PG慚EOՙ32:?ei2ȠY#LwYȜ32:͊p<г2H$< o1"|0H2aON4Y`a>`hGfdO!.` 0a?IkL#`{M3}0a k 0AExp0{ 0aAB=#Ç00aa0ah#`{"0a{ <#X`3aL@{ 4{­a40TT 5 pFSiA E]&êMz*6ToI67*Nh& TARt' 6t&toI6Rfm ۺOI 7OTaVWUmzIE\*u wl:*7][Noxx ݿwVuո{nzuo]Souo|տ[`ħ] J)vzRJ++K-++}z֖tW_{5}iXaWCA_wncc5;b-~kQEt=CtV]C"?C=u 7+t1o>mskeyCͯdV{W5_?=#5_a0[mo>ankoz/~z% o D޿ _}k_V_o~m+ oϽ.//u1NtN:ד8'}"WbלOgi~NނKz/um_Km(IWm&}~Km'cm-SIߏiiak] u_5]{4xk=w߭_kPXkk[kAxkK_;kb+m+Kb+J+{ TcE *1O[բt{a0qMخA8SբalP){]{kC?/eZ(at* $M麪M6jNM6M[#pbPi&oMp҆#pi4lJġ *i;i#pᤛ &I7 iI4aP 6KMnzii27 6m27 6F᧰Mh2\aؠ'p00!UAL' &ڂ 4. 0PbNPDrj PAl( aAKXaa"t#daPa0a 0X1A6TA ͦAL4MAADDDDDDDTDDDDFR"""""""""""8DDDDTDDDDDDDDDDDDTDTDDGq+K])e4H0:… Pdt20BS: *aI&t2!…G BB XPpQh .*<0Al  m mppv­<D&Y ^v: &D?&9H wGxGzwiuq__}u[[_]m. PDg4 A\8)("\̊PYO3NAJqHЎ pϑb!#r- qM<)˭bH'4PE8)bҴPl&N)=;uU.J-m27 4ᤛ &oM 'aPiIġi6I4dniiM8i5T:jm4I6zn4 +IbP%iSIMFᦜ4aM鴡Aa4 aB5A@*0‚#a%  aPaML&  `ئN0LN00j&‚ d0)ؠ 0 PA‚ P:0 &A0#L2HGPv(1M0"""""""""""""""""""""*""""""""""2DDDDDDDDDDDDDDTGTD6k%'L ` n P?ÿ _/? ]akx@/%K _%N-ޗ_ _i~޿/oפzޗFy̎#ٜ'f鳩D%9ASL#Xl&= Ga G5{MG{ 0T5 a0c#@za0aL#@a PfPT5 F4{ (*a>0f*aȥa40Ta{G{ h0{3NGVWI47u6ޒ *6CaVWI'wA7i:M&m.aCME]'Ul(tUw}&WI]&ޒl:i:Om:*CMxx%:ޟVT7վ%:o^xSop{oVxն?JR+J+괯}~J}]_J-n_~][z+81_nW}Hb?=2|y5AFa0_|#a/a0X#aC,~.@@ _?X@_! a[v6/6Xl%_z ~ [o_E!~KKR/7_iivZXl7koNy:N맫u_:0Oi4Iw_iKbfӑ '3ON~[im[_iߎo5 ~_kya4 __~Q Zb+bl&GV]=iS՗^abOEba}uI_L+?] 6m.׽ozzk}YuU4dnIMiC (i; &ii7 4j\4i7LM6Idni7 4ؔ;aI4#pi7i4޶FJIJ4M4aӆ 4ڄAL*!A  0PT$I 0 AAMA aAɦL M0'T0a Aa0#PA6T0l&  0v+iG("9AK[A 0b \8"9PAaDDEDDDDDDDTDDDDDDDDDDDDDDDDDDTDDDDDDDDDDDDDFR""""""""""""""""""#WRTY6%-ÒHI+HbQA(a(,Wa0@0"#gey;\e\|YyɦJ3"ySBL)$PS Pet4T…L)&C3B  ,(P\(PQN  F88;@ ^8;@VM ;:!K2H…Ia(hcIGxGzGz_uq_]|_vj5ɰe3B'`#dQ!.`4>Y`qN4GB>F##i3Oy9i3d!3(#F4,Њr'"|Pk 0T={ 0f0av#x*a*aB=8G{ 4*iA*i{ #X‚GSo=GT3L*aB5a40T„{PTgS7k #@a6A:`=h40 { #!„kG40T=iPM諤tUâzA諤âa*At&ޒl:**WIA(tUUl:*O諤AVWI&áߤM_8P6tA6i;MP_E_WIzIp:MH6Ro!W۶ո~%:Vm/%Cn%CV%9=~?m뺷ħ[zҾWu=V}WA+/ҺҴWWCWCץt?ӥi{i}}i^_ti]=t)_} u_k~GkuEnBCb _~+Ht55 Q[?t?}w_saFWm~e??65\iCeF6}[/  / _ @}m ڄ 鄿7-/_B[k7s_~vK^^~h/']No'_ޗ^q>Nm/u'_ONz_d'ץS=1ߓ+u)y:iom__mjO_umﶓj__=Z_ۆ?[_ a 5 z҆ Z ak]bZo]^~a}Cb 1_=6#+O)/-*} LW*}bdueuVةT b+m+I;I4M6i&M6M;kM4鑸iIpimiM&paġiIÆM6M4i4lvM7ᤚiM6FuIMmU27FġM0Mޛ0iaaA7 Aa  0A0dPPDr $iap 00bd &aaaPDrz0 & aPaML&  `ؠatA6AaA;  ݦmAPA GPv(1 """" """""""""""""""#8DDDDDDD+-"ܦJJQPA(;0al[)gdd2%3ȞVe'S)3,<̒g}gC:iL(T¦^t22 PL(S:aB…G~   IB  m6hv­;@88Pm$ j#F(Dchp6cv4Q5,i ch/Wu]z?]lU__[GlAт6YPdt ga.!8OffdtFdtr'"GEfAD& JK2r%<#eD&gg$hG8g1~ PD&`ABy) Ǚ#ʂ3  PD&`9Bq* *s2<)0f*aȵB5h#`= ajL(Fa= aiL(F#Xl&= Pc0a3LF{G5`CtM'êM7'I.A諤i>RoIE]&‡E]'wo tRm&ï~ME[E]&RoH7*6mtl:MM$u 7 &t MAJJu?vJJu=mJu_mm)?{mJs%:zVoCW^׿CW֕WC}i]WWC_֕t?%t?zWOi{ZQ[Ǧk[~G[kx~+ VW[?W]|VC x{~a?01?FK`?0mx#`?0j#FjiӰ~/-a@@k? _@k l?߄,6߄7K o_K -o7,77K ߥ/[/KK.zaߥj'''_fw^jOO~NioY:~N/~N/޲uuyE;Ig]K+m/KPm/__iMO￿]oJ[jr~ }5_w xk .}P.-*mVاC밶^բ˯>uW˦+.uW+ئ* OV.dn4Ml6zT8i&m0M8i27Pa6[ 4M44M46FIMMl6MiMm&lalM6FIp҆I %Ipaɨ b aPaR A0L4/ 1 Tm00 &aG&m0&aMAخ  aPaML2S  aPaML&  ȀsPNPDr a0PPDr ‚#H,DDDDDDDDDDDDDDDDDDDDDADDDDDDDDe""*"""""""""""""""""""""""""""""""""#_]VJ9P0TTXaDG6FvFic3|"O!ḨR#-rO"2LʞdQ\ #382+9dgM0M0#1I #i P;4Άt$„x #L*a~ R<x d(T………G<*LSphIA]pv mSIߔGn%K*M:8XWoG#m/Jm_U꿯~ɱDџfPE%3hY+ M:{ "PXD%9 Ǟ *MOq Ĩx6 f#s 1#3١f PDˊlN'#lB"(GtF  RHdt\c'#L 3Xˊld(Gk #B40T5(GL >­FM{ 0a`:aiS0faiL(F#Xl&= T*a Pc3}0a k 0AEp0{ 0aMAAk #Ç3B4#`5,& kGRtIPMN T&I6tWI>mtl:MM$u T&tiIIw a&bMP_E]&w l*ME_ޚj7|unۧVHua)tħ_mJs%:%CNAuo][N~\{ooZ_[uxati}i_t?%t4-+JKJJom/KKJ]+޿~k_[u_VNQaZxoC}+!uH~_X:k`=+0?5]ua%>{`? [Fm_lK ^./kx@[[[l%t _KkӨKm}~Xo_K K/7ߥ]_k_V_okXomzgTo']ћi:?_K_ߓtƗ~NhLd4^Nޞum_}m m/m/=cm$U}Wmv:m/4~֯jnxk k׵k5k|5 w__k S׶#[ *]APu-1Zv ՗^՗_[T z}"U^oa]Nha0E@)bҴ բlWua0E@pdn4M6i&i[MCa $>#pݤFᦛl4i4ӆ 4dn dni7 NM&ġL4jtղ7 6%im&U&M6FIiIl4ީ6%ڄ A0L4/ PA0MaAʱA0b L* vAl(*0  aPaML&   %T&‚ *0 'vNMaAh2^aPbN aAɨ B,4 : ӸMQDFQqQDDDDDDDDFR"""""""""""""""""""6*WI%Iu " $6 "K%m$Q\0U:lW !a0L(""#>v34zgj޹As\FFfTȶv_"\; ɵy΄aS vL6aS 4¦aN 04pq'B_†]!BaVM;@?8;M@¤؎=o>#T"?,(Gz__u>u<"r'"pS|323GSQT#dfY#8g1#3#p D2i\Sfx pA#d',̂!,n$s:<g<ɎTɎWx'Qlgg$<Џ3EO6)>D8fF(,23D%9#dlWi0a{\(F= 6AO*a?{ 0aL#Ça5 PaaM=0akVAah#aȱ#X= L#X`{*i0c 0T ah4a0#X`{ #X`kAPf0a *Ni8\* aWm&ïa&a&‡E]'wA7a*At&âm' ToI64'I:tUphIpâT:*:AH6Rm&âtI諤5A}tn|unS%:VS~%:VۉPպpv[z}VۧVUvmbT?~V߿=utt)_] W׿u=WUZ_%ZW{~׶Z]{iG] V}WAKK-v?uַ?kߵ_Zo+n?}ЯuMEnWÇﾆ V#a=61O#r#u_c0a(}_ ??> [k?}m@ak_ ޿j7ӨKm}_a_u K ]oKն~o^q___'K#)~y:~F'}uޘ:6sizc>MN?ji[i_ױ*_u[i$[izz35xjrakmo }Z׆5_azz['V{_zP ׽v*A9)Yu_`nJ݅b/#.C캦' &FI4ii7i=4i6aZi &Fᴚt4a8i4iIi27FġL4pM4ӆ4auIl4i&#pM;I6lJ&M6Laɵؠ aA& %MAAaa 2^a8L MA ݦA$B#aA12DwiPA6aPA0#AAG d0w A%d0M6Aaa0ia‚w AdPUQH""""""""#__TNI+K,Rv0A哳D|hYGAx"Y*rVKJFhdudPdthDdQ2y8dD'BH<>0eI9F`*3p"Ln<N4_FfdtBf ᓑ B))PT*`籃4{ #aP`kh4a=B5#a DLJ3|8*a„{F=#a0T5 4ƒ4a4L) L#a0{ 0cM0a5a#X~6AO(GF5#a'5ME_ItH6p&oiIIw OWt{uI*Oi:MâaW‡E[E\.xTaW *6 aWIâzMP76a*NmtIm ޓ{moul_[z}NSPV{munounۧx%:m[Uuum/J~JxAt.++ޫ?_n?mv?~c+[_?騭?+ }WC+!?WC5_a2O?F6?a/FØ?FaaF=?F@ _[u? a/ _@k/o__ % K _ նa Xn/Kw_~v/:uu$.1_ߓR',|"}ץuNE4W_~N/޲u~N{kumﶖi[ji4k|5 w~k}k/ ak5xk|5v]{ueX_{ TsE *uehUV[i6֕l&GO_aNuzeױ]1LS׶#-LW_~__V`O]m&[ 4ai0ii27FġPa6lMޞ4 &;alM4M4a7 $MmCIi&i#pm&#pMni4M6F(v $000"9=Ad&iwiPA6aAʂ 5aKLPN@&PDr &d0ia ANaPL2^ALtaPDr d0aAAL* aPa`  a02S DDDDADGH8_-ti$MIB\0J*)C &DɸJLȳ2,.{25̑M3#\.dk<ȧ)rl#a *aBL*i)a&S@S d>t3'0E0aI  .„l0ABBIAhvhpa&ӄ~UZ!;&XRoljk&__~H~?TUSo1"^$O u"|s4#l̎6)>F8dF8yH"g<23D'd$LAGFPDQ2¤$<4,Њ"Ü3<&r\Bq* #bi䨉PXD$LAc.)k 0co6Aah#aȱ#X=0a?H(G]& tIhWzIitzIh]&l:**ipVWI?i:MH6t' zMáM6 &]&â*6ToI64'IiêM =1*ħV}ħ=տKPۉPպp{mounۧҺp}SmJs>t=>q)?CU}__U}+JAK괮~tKҽ+zz0KJKJJokVkQ[GGk~ߵ_}7⿿BCb _C_Ct?xH~oF# ?ÛO#櫂0oa'>{a }[p@?@xo/}&OkmB__ /%"o :}/7sn/>{KzKKti:tHO)w_:E</z_~4t~NEu'i}I?Mii6i?M+umﶓj_?_ jxk kV׆_ _t5k|5 wmv˭?բ+vbzl&G_Wuv]{={a2:ޛ lSeױ_[T v ՗^oa]Nha0E@)bҴ NMl4i&i馝27 4i27M-7 4ӴiNL4;M4i4pi4ii(wlLJm4M6M6FM6F A&lM6%iS#pdnlJ $MNYV("9aP %A@0vA Am0 aAa B A 0 OAaG K6 aA&A0h aPaMNU naA 0a8a6MAxaUAA8"9DDqDDDDDDDDDDDDDDDDDDDDDDDDDDDDDDA1H-iIJ;K*ᄩ% B e`"#MO)$gO&y+"fTєd+̊#wWD2*ʼt…;Qr0L#aBG„x I3L@I)M>(P\.aBIp8Fa lppVhvImIlve>*M9*BEV4EGQ[ql,rZww?}+_Unݵߪ_#0g !8Е9#Lk̎r%3 4"% O" |`fG8g1spȠB").f#spȐY3 MINL13aa0dU">FNYBYJg&9^x'y9L(45 = PaFM{ ?0c <#an#@`‚ ੧k GSM0akG=O(#`F5#a'.#v3NG 5Aa{"8Pc3e0a`#=(GSE[E]&~oI6¤6I&MM*CtUUzImtIm ߤVWI& 0&avaE]&jm&f¤7TNmp:N tUN_N{`Jum~ħVOv>o]տ߉Nmunt?%t?zWO}%t5_ut5_uV~߆{i}W}׽W]~[ ~Mccc]|Vኯ+t*{z7MEnWÇ5\#~j 5y=`ojo[(}0Y¼ a k o7o[_a_Kl%%/4?%//K[ }_f{פ '^oY:uy4_[Nߓu~W:zcK'LWͧi[i6_i?~iG^Hi zkXi /3_[j{=]bD5k|5￵+b)ث.-1_"S֞a[ Sz{bNK]Sح+R ?l&N*ˮ_u}4dn dni7 M4ޓ#pؔ;Mim0M4M4M4&i7 Ci'I4MlJI8a$IZ$mU27FġL4pM4ӆ4ap0iAa6A0L* :bpDri‚ L0Ta0A &00L* 06L( pAK06L( Õbnh0yV(&A X=AL' &ڂ A 'G("9%DDDDDDDTDDDDDDDDDDDDDDDDDEDDDDDDADDDDDDDqqRDpqHfuTI^Y $!\M}$,TPIi-[ZX [-#+ DDDpV3;QȾAs_$FEyr3\Gtȿ 0SM0$PB<4=8PPaBIM@4@K4YXX$:CF! %?u]~꾗U]u` fhDH3PY&23D%9#dg KN= L&( #ك8dL`慚Ȉ#Qٞ B<2<9a3k |?2!8Bc3В{ PN?3id N$sH2F 05 aPxG5 F ip5 aAfpa<8pT p੦0(F{G.Ɛh40cA֘F=L#aL=8*a =aB=^Pf#@aLa44 Sa= =0T5 G.äME[E\*6aWIj*(tUU7H6tâ:*VWH6'II*WI hOi6} ۸tU} N&iW &l:*:**T:zI MTLMm/%Cnol[m{oնwV{n[o}[nV[{mbT8[}[ozV}WAKKۭ-+ҿK.JҺt_kkk[[nE[kB+k+ZzkkCC_t+aXa fQCPF5_0da#ؗ/ _ mo_/ ^/ۯ : :ӯ%K_q___8zׯK /KK%L_^I7ߓ'LS=1Ya<utjO_h޿']^VNmu+jC~:IU}ETZ^k֯5=Oկa5___ {_إnuV ^h])[.NҷT )9Tki1LWVNVzv*ViI4bP6idn 4M4laI4F4M4dniIm6%M6%iU&#p &M4i27 4ؔ;a҆viLM6nii&JadnlM;jI &M0 PN:0 a00 L* K7ij amAAd wpA 2Z\ AA` A $ mA &iaA: A"9dHaL 6 """#82qH""""""#)jjK6KII+HKIa 0W %L[bbC`a0Q&2ES4KؾL|ʙg sqv|5“e)0P؁I(!0x )| j 0PA¡ F*]' 0ABx:6@4:I;MMSA ha8*qolG$SѭYXAIxoo]$~Z_Cҷ~_o\u$Od3B("|y'!,n= 4%!L14#DC#b)̎4"(r3 Da Ey8aI!)2A#d#(g3NEGFNYPE*ȗqM<){J Xn.פA'i:t_VN]?//K8uoLiw{+ﶖH誚_Fݴ:6EWJ^W +_S/Gկҵ_Kk뺟u0}~k}_5]{o6>b."UI&4tNA8WCM)޻ h]iVtat>˫=+ La]Nha0qTOa_ $MIiMCa 7Ki4Mi#pM=pM4al4dn4i27 +M4l4 &LaR+M4i27M1(vI4T:jmB t A'OG L& aa:0 00mbiv AM 0pppDr axa)$(*K(tAAd12D(* d:h  A‚ m0a8a6MQQqFR"" ^)DDDDDDDDqDDDDDDDDFR"""4CKm_$--_m^~tkI.-$FV^ݥHM H% $ᄡ A$ SZXتR9#, e7DDDDDDyj :2,̆|,d;՝ȧ;Kӄ;3 6S9T¦K)>P #`vyt†_8P pth7#! ŲdE5om3D>4Wo*ׯ/۶;r\uȈ"XF D&<"|S>`Af#y2v6'_JCEG۪꾫_U]s.Du_U ("0 G8g2:P^yH0`1B^JyKL= L! sNDAfD'JˊlN d8#E" 3Pdt`" Ra@3 4"$O JaHC# )(A0eL9F`o L#aa=`͔Lxp7C<#@aLEpT5 *`:aT3N0aA G0a= G= Ӧ0T=8pakPa3u0M0a4a#XxGpGSo0cF= Fh/諤MzI&pz aWpxTaWUm U I&ޒoKM&a& *6RwpM6I&MME[E]&zOM6m tU}zm*ħ^)v߫~} JĨ{Ju{ħ_Ĩ~ħ=׶xq)mtoҿ~Һ?%zt++Ҵ+Һ~JJJ.ۯ?^M~_nnoQQnQ[k!WwMEnot?}kz?8h~[fVF#Cͩ5*UoWO? 0/ n [@{%o _KoiXo/פxo k%u~N E/]/zcK'_N'W_)'^/E_K'tK(y_ﱶOױioimiڿ oa +__P׭akS׿_xk xk /XiZ˯ث WV]vYuhا[.N˯bث a]bM˯b?ئdu[YuWo]^t1O^LM6i8i0ҦMm0#pii7 6Fa{ 4ai0ii27JM&I6L4i8i27 6#pᤛLJm4M6M6FM6F $i&M6L4MC:00i B P‚#PAj aAmm0&/ ނ 2Gt 4 p B AK ' Aa L bL0PA0 j &06TAi# %AaA0A H"""""""""" """"""""""""""""""""""""""""5KKi% a+) &YOq<2;dy+ϝȮ$Vglt™)gC!P0 v:gC *aB*iBG/\(PQ    K*88;@ H|#!„kG=0fpT=k #X40Ta{"0a{ 0a{G{ #=#a0c ƒ4*`; T3L*aB5a40TSL#Xl&=a=0f0c F5(*aȤS0f4ƒ5ak&i*Ni>]M&Iޒl:*M鴃n>R :M:M6ItU E[E]&~oI6âoZi6ޓh&I‡E]LSwâo‡E[E\.i=[z}NSստbT5o[mN{ħ_~J8=ڷm~mOҽ+.Һ~׾^{?U_]I]WP{zWOi}t __iǯQkVu[kQku^QQ?^W_C_8hp~+!n C5_ (#a6ÛP{a?{k(ji0~@_aa a _@k /PK _ ᰖK ~޿o_iޞJ}l7a݆{ik_~vva:(O/wޗ[)yNa>N'0'EӥW$z_d-묝'ׂ)(w/(wUm/cIߏݴݴU?m-Km&m'mRO^k /^O_}[[i5xk[ a[_K](~LP+.EbPI+a2:{ C ?+ b/u+֓LULSa2:O+PduiJC.˦)mi(v4i7 #pi7F(wLM6#pLÆoi0҆44#pᤝi#pMlalM6FIi7Pi6aġޚi#pؔ;M4La &iibPPA6aAʂ 5ajbL('iaM0 Ds AG("9aA&AL aAt0iAa6A0L* :b  A  aaPL( A`& 2HA0AA0PYHDDDEq8DDDDDDDDDjVKK뮺Ҵ#9"VJJ+ C X+MX0@0 & DDDDɰFfEYkl&EѼAr2dk G`2FJ3LfL*aSM0$L#aBPL)06TO/l(_ x B!pvitih,mvڎ9+B#"4&K;XxI%/o]-uxˊld噑b)\Sfx pA#d',Ђ!,n%C3<g<ɎTɎWx&ȶOh$<Џ J20)ўhE'bHxB\ا "$y6Gp8F`HG0GB ID7"Af#y8ei2|#8dPPYdtg晡>`AB5#` k 0AEp0faL#SL(G{Pah40cA#a#i40Tv@3aÇM0 a 0kGa{"}oE`i0T‡ aL#X=.#@aNT'IToI64'I:tUphIpâT:*:A i8TE\/I֐m&phtUU Inm&`]3zl:$UUl:*]âaWIpTiâoNuoSl[{n[oV_Vm{oնwVoxonuջoI_?^_u֗^^u}Uii^t5_W=uku[Qkuo_Q[{H~+M_wM}+u+Zz⾼?_W>{a.a(}|ʡ?0e#a?k/?mo@_Gm/ _ӯӨKm}_a_u7/C}^פ _K_}WL}:ޘ:8sizc?(O_h޻Iy:b| ޓجBEu}I_m/}:m-U}'m-J+եj W^kkj Og_|5xj{R=$___4L"Wv*A9/[a0EF6)4U.EF/hh+{a0E@bNiZ +ha}uؔ;i:FV4ؔ;i#pNIp҆l4N4bP톕VI;M4MFᦛ 7adnlM4M6Fᦚl4bP4a$IlM4iM6%ᤚiI46aL' &ڂ A 'G("9%L -.6 #M0AM0 'T"ij amAAdaAMa: l0 aAڂ07ia‚#L& K8DDDDDDDDDDDDDDDDDDGH2qQyH8}"P_^_]VI$[I#9&$JK $JJ)a G$ XŊb!($(`V0(hR9`""""?_#3!t 2-FEv/T… <0;3 6S4S +9peҐPDoi ptdm6S*FBӋtWouo\R_o&239fdi.)b9y'#l̎biݠh(F{ 6Aah#xGSE}0faL# 5 GS = #0 0aAk #a7= { <#aȢPM{3y<#`k 4= TGÇ; j6Zjm&L&âT6toOTE_ UI7H6H6i&f( I TAkm'a{~OJtjm)~ J)ޭħX:mĨq)Ҷ Jݷ.)ħ_mħ=Po}m/J~?Хu}t?]qCOCut?UCA ?~_յtV~}nuknoCt]tVC~~+z}Ga0q^ح]}].{K 캺ޮ,[ e]I'4خ޻ uVծbPM&i 4i7 4i27 6Maii$iZLöFazl4Mdnl4dniI;I4i27P ?PAn00aaAA0#"900 U 2^L&AB#AHͦm0&. d7 &iAPDrA0xm0 2\"9AHG)V('MDDDDDDDDFR"""""#""2Dq2qDDDDDq֕/Kk[K;JII"%⒆a&ᄂQZV)=&:h(0AH 0`(h ҈nJ^I&M,%,32O+ PB)ٌ `"aBPS%AD .(P B.ao hppVhwh JםP7+D]cNXGq}W\]~L}}_UG^M##O3iy<`!.`ȫ"r(2:3"0e6y(#Lx!.`Ȩ2:4"'"K ᓐD'y?3#œ3gL3if|HF8yH"g<23D'RG&9I>l#K<a HyI3]a0di0T =0f0ah #Xa6A0a0f0a{G40T545 = PaFM{ ?0 k 0#= za00Tgk #p L#X`Ca?i&ޒl:**WIWUmM6Ua&tImA諤VWI&áߤM_:*I6BwIl:**ipVWI:M}'êM6諤vmbT?p{o_v%:߶V{mN{ħ_ħ@q*Nm?)Ӄz@_mtJҺ+J+JJ.+++/Һ~/? J_c+[_Zbc7Bx47M}C+tt+4??D1W_5Y0si5\#~m0aWm~a???1DŽ [mo a_,7 /[ڄ l%߄;KK޿/wᴰ&'_%O?דtkO)w_~N/޲uz_y:uf_Pum$m/m&m(Km/Kvm_m/?vI֯׆/_^ oҵ5k_7} oإnuIeױLUحخ) +/Z(LWOM.Nealb ޞ^Z[dnii&֚iM &MaPiIġi6I4dni&t4a8i4iIim&[#pᤚi7L4iCM4a-=mC 4aA"9 ataAPDr 'p00 0‚#a%  aPaML&  ȀsP ݦA$B#aA12D000"9;L("9a6A 0 &w0ˆ"""""""""""""""""""""""""""""""""""""""""" """"""""""""""#TtI$ ET #MҲȮkaObݙnvWy ֳ;/… T•LgBL(G¦)ٌ 0B . F8\(PQBl$@88Pmɺ;&Q bv ee_;/_#lko VV̫ɱGF2|$>bL B( H2#dNEc.)b99.A&NDGA M0fy#dfY{pPaPaL0d^{0{"7F= G 5Aa{"8Pc#SL#Xa0aG{ #@aL#XSL#X`3`k GSGSL* 00c3{ #Xa a0f0T=8G-ӤT*P諤uoI‡E]&`.MH6Rm&ޒm&i*N*NmtIm /Nh& E]'M6 &&ޒl:H6mp 'I&&m' E]&pm&iWq)mkm}8=q)뺷m~v=ħ=SջmbT8ݷmħJ߫v++K-+zҺJ.++>^_ZWC_{[[V>Q[Eo~ů[}?} Q[?t?-U~+H?C?aO eF6Ÿ_aapF=Ú _ au n}@K { _ __|7K/%Kz ᰗK i_v%m/7w~k__Xoj''X"ד4t~N֗ihz_d<'FNͧ'_^VPIm(I_m/}m-IKU~kV5k|5ޞ᭮ ak5xk4_kkEzA-{LD)zح+R ?l&l&N)S)zduE@ai+ eX^z*˯ޭ>A;;Ja 4ӵM6I(vi 4imU27FġI7II4dnm0MUi4 $bP4dn dni7 M4ޚaiI &6m27L6I 4a;M<G8Ds A060MamAa%L' &ڂ AA8"9AL&aJaPDr d0aAAL* aPa\ K0G0 0 a T/ ! 2D(& "8""#)HDDDDDDDDDDDDDDDDDDDDDDDDEDDDDDqH]]^_]uiZEK % % % SMb6*a 0@0 (l7fBOlFELgcy,W%b2+KUfd_*،FL6 fe8 TL(G¦(PPYCG.< 0P6 _¤pB(Vt 6;@4?88;aB@iżrRGQ5"Tpqĕu%^l##_qxOq_?_]{ M="& ٞ#3PG慚D% Ĩx&rcǂxM1ʙ1ВMِ|(D$LAdQas#PY9)>b>Y99ѡf r` #< ȣ0g 0g #'!8$:܋dBDB\Db^fah4a=B5#`͔5 GPc0Mh(*a6Aa@=00fF5{ Gak #=<#PTp„kF= `8*aB40f#` o Ӧ0aN *6ToI67*NxuI諤VW R E](tUtm5IE]& \* U 7A&I&U 6IMtUUâMR E]/諤M>m~O}`ݶ߃t~ JJuڷ@=:ݶݶ`m?mCҽ+Ҿޫ߮J+?ץ} WW]zW]]=u]W׶֕C ~Mccc~u~v?-~_PH~+M_wMwC}1Xh_boo(}0Y\CP}a1?5Y{d}/(}0ه7 n[mo_@momDӨKm}_a_u_/m//kHi>{tƗ~NץO{=14Iy:y:K6'_uN%׽1{i"_ti?׶i{imWuiV=5k|5￵k4^ xk_ +_i_k+{ TcE *Yu_`nuS՗[azثح1^K(~LPث e]}^X_$/aULæi(v 6Fᦜ4M4 $i&Riġ *IMV 6iM6ipi4i&֚ji#pbPIi4MFauIMm27 4PMnaN00j&‚ *6ApDr00 n06dd:0 "9L4&a/aA0iG 0 £X9u AM 4/  ڂ0 aPL2^A  L " """""8"""""""""""""""""""""""0M/WJMZ^ЃI}imFKXIb%a"EDDb?ɹFe3a2 &d7,@+FVs$0{Άt0B<4=)KΆF2 ) ιT…BG*Nl(P7B (PpP­;M.l ppppppSkVZARm&G$ЍIoU*$)G#m/##E_QHq\^U___Ik믮m.)o!*7談Tn3NA& ètUUm' E]&tA6l:*=wVS_Pտoջlo[D+~vڷ[mNmݷOK-+ߡRt+K~Ҿ뮽+j/++[=zv?-:_Q[?t8CCP?KCf -F5_0 6'0Ka6`mo@V[au m߯a7/m/{ץ{ij޿m/#5 .1_ߓ!?huY`y:O_hގ''_^y:< humﶖii6{~_*Wi?i6j[XizzzXk o>55Ja]Nha0E@=C+m& ֓~hLQa~ˮެKbClW6#+)zdudn5lMCMm0I=&#p &M4i27 4ؔ;a҆viLM6o $i0zm-4iidniMTᤛ $M6;M4i4ii(wwiPA6aAʂ 5aULPAL("90 "A $mA &iaA:#L2HD; aaA$(& %0s# %Aa0ataPDr d0aADDDe"""""""""""""""""""""""2Q]^iz]u}iZXa(a(a+lT `@DDdd dصѕ2O5rfdO%KbfK<>Ba S t3 (G¦0' 0 pBG(P8]' k¦A$88Upppke4z5A^WI5/"KIva ޒIk}z$___]zRKmm}]u،`>af#xS|!<@G<9 %2Tdwo!*6Rl(tUl:*>l:ޓi6ߢm5I6i3NRtmmݷ8={Ĩ~+mm{jmħV`ڷ{[ȦL <̊3-r%… Rf eL)^t2 0`΄PBB6 x ABBPpQh :N 8U`[ 68?2Na8Tʵ4kXRolk޶&|_߮}o[`Ȝ3eT#d0 3D'A!xSF&DQ33i0L= La?ePdtfE\Sfx pϑ9#dghGeȠ4,B\D$H2!"r>F4,Њr("xG\dt`#H#<hD f(F5 G=8p00abF鰚F= a= 3|#`kL#Xa0ch4a=B5#a*a=8p4k 7AF40dX aGS#=8pc *a0ca= ME_M&wpR ]&}7A6l:*I6|*A諤M&tIjm&f¤6m uI؄WUoUm&ޒm&i*Nh& TARt' 6t&toI6k J Jħ^*m뽷v?T?uo][N׶oݿwVuո{nzuo]S?:Wz]uta?I_BO__i^_ti]=t)_t.խ۫ZߺߵkkuEn}Gk_VO[u⿺?W\7tV]C"CtV]C"?C?`0}?u?ox#aͧF6j?̯̓(}0Y̓ay0f?B@ۯa [_O~K^D' au m N-o/w>/m/޷ k_V_o~/ѭ?~OIx"ߓKzK8S.1_ߓ]y: 4__N:ד`ʂ"\Sfx pA#d',Ј<'Gȟ0E 9# & g0duD 0 p!"`AF` Y8d Ĩx6 /0pT 0akL#aÃ040a{G5#`k h#XaG,C0aA00a{"0fGSo0aL#a0zl&{ #=0a`0f0T„k5h#`âoZi6ziâZi6Nl:*6ToI64'IR TIxTaWUm&‡TH7޽tImA諤VWI&áߤM_:*m~%CT5oXzun[z}PSlտջoxo{v=ħ=Su:WOJKJ= tҿw{tҺn_k]ߵߵWKum~cۯc+[_Vt1]7_45WMEn|W~~ WC_C?{m?#F6 ÛO?{k@_@[_@ _ ? vK% }: z ~7K ~޿viXn.פ-Kk/ou'4t~N)/%O:*x"_Kݴ:6EWKm&K65mu[ uu? oҵ5&*=Z(}FJCҰ1M.ةT ޮ,C e]{a˭ҫ.balP+/Zbm$lxi48i0dn _"O#pl4MuLæi(vդ +Iv6l4Mm27 4ᤛ &oM 'aPiIġi6I4dnii aP10a$LB07!4‚#a0%L'vNMaA"9da6 a L  &! A l( 0iAa6A0L* &M ""*"""""#"""""""""2GHW_m]VMd/$䉽RXa/lRi_a8e78 0`L( ،Ff}󱬂e(A3v_ Ŷ3+8T¦E) 0ud!&(PBL 0  (PB xT;Iol*m @ĝboG+ kfFHr…Q~PoA##_׭u\^_o_u㮺dtfdtHqM"& ?dtfD$" 3=ah4PT#X4 `L#X‚0TAB4>0T80aF=83ׂTFS1pFSi3N*a#{T*a PcGk * #XaaEd0T5 H65A}pW}PME[E\]&âUIA6uêAhޚA:**U&î۾aWIE\:wItUU 7Uނ6UI'I76~m>w8= J)q)ҷm*m J)v+~vڷ J+z Jq)~K뤸OUZ_]z꿄=i_] ^T-+?WC5kko/G_Ůů[Æ/_]K_C]Æ+~aC0#?`?oj#`? _ / __ ___0~-l7ӯ/ /_k ~al7k_^?Fk Xl6WsiޘJ_//K4_د'^u~NK'Kbuix6/KEW }}}KK~_ -4S ikg u_^k]z.)i1_v Vb?~zP.ЫE_/eZ(at*˯ޭ>A;zoOT X^ 6P҆Rl4M4ՉC 4i#pMCNdnl4dnlOM6I#pIl4\Rii27 6m27 6F᧰MiIviI6Mm$iRlJ &FLÆ4m&I6Fᦜ&*#ta0VB4at0 PA08Dsit 5in0 a" :h ͦAL4MAABd00 ˃"9dPAG&P PDria 2\L 8"""#8""8DDDDDGDDDFR""""4W_KK_פi}H%% %T:b&H 0 """#M+gvgbep_Lȳ;fV <އ we`P(PB 0x'T (PB x:iV88888888;@|}o:DVdHuT^d]vTz$8꾾q]}W]W^꾾N$&A#dpb^֣ۯV^W} k!CCW1]CC_j'1FPau?&#a#2`fЉ_i/[/%ӯKmp_K%/_}ݯ__V./%uNw^N_WWԟ4_~u:E^ך/Ku~N_WW~u_m-Ҏm/Km-m/m}m/KI {^C[XizJ /^4kPk55[_~"VIC:V['euUzv+.EbPSױV캰EF*±_a}lWNYuUzv++޽l&GWO][׽v &FI#ph0&zim&I6iM6 &T4i7 #pdnm0M6m&#pMaLi4lJiJaLÆ *i4i4iM6;i&MiOA@ C\Aa aaa0xa:00i B ‚#PAj aA 04a 2ZM0Am0 PAAa*Aa*aaaA0xaL((Ds A0xa)DDDDDDDADDDDDDDDDDDDDDDDDDDDDDDDDDDDDDDDDDDDDDDDDDDDG_K/w8mQY#)|5` ɞDeg`y;3r=T¦: *aS vc: G¦gC#&\(TxhBpQBN  ;@Vhpj[-Єv9XEiI;XZ*MwkH,rIG#mo//u]}We }^PWߦ?]}W[J%䬗 İВK2r$ȣ0!0%BG.)Fг2r2{0ƒ4a a8G{ (*aL#aP`8F5{"٬0c0aaL= F{ { #@`T=S0c*`=h40 { #„kG40T=i2^*`0ci3}0T=8G-:AwpM7:MME] U I&oM:ME]'H6ta'I&MC1t۸tUtM$M a&bTH6Ci?~uH64諤nJq)j1*mjJuO=tħ]=>q)?Jum?mq)ҷݷm~Jt뮃?׽t=t)i^ZZWC֕I_B߿] V}t5]zW[Eku?]?+⿊Æ?CCtV]C"?0a5F?Faͯak?0F6'?0bL? ۠l6?/}C// ~,67u m_K7^Iaoפz {|~_Kؤiu}~N"/)/.1_ߓNO;ױ_^N[_׶_imQױ*Mi[__xk _{ a _5]{4xk=wU뮭?E; [h1__zb/ ={LP*˦)N(T +{ TcE *1O[M;.ENVI4 pMi&8i4i7 4iZL4dnv8iCIӆ $am0ii#plJ 4ڪdn5lMCaI7II6Im1(wMiIviI6| L bL0/ ("9L Ad&imApDr 0xl(   PL MAA 0a8a6MAxaKAA8"9 2^AA 0 $Bl 2SaDDFR"""""""""""""2DDDDz뤿+I+K C C LS,T  `"#M:3\̅ ;7`#2VE\M0aL(G:3 0L/l.'2 (AI\V…Lh#AdN(UN9ZU;;ѭWqxO|I^ɱGFyf A# s2@ˊld噑b5f#O2r!FaMdH"#AȸOɎW f '#C#Fb)ئf N_8dxSk,Њ#248gȃ"s# <'"#GFdH"AOFb# !<ٔ`r'AdA#dlVaB=^Pf#@aLa4h4#X= *aL#a{ EXa APa<# =0?*a 05 aPxGSL#Xl&5{G=#`=0cTF=#5gȈ#`{"0cji=h40aaRp3N_A6aW:MPaWIizLޛIi=$U&MI TzIh]&M$ޓIl:$M6Rm'Im&oMêLܛI~m(tUl:*:AݶħQ)jޭĨ{ħ[m[mħZĨ+~mNm--++ߺ^+ҽ㮅+nWUu%~m..?-S_cX3}nVVnZlZok[t]Vup=ء_C C+wMpF2#a5A=ͨ ?0ه~=a0a?CF{u[[ __@kB?aX@@a n [߯%mC _7a/Xl6 au%__Ia7;KvxowiaK JI,7_mD/鏿'^VN),}ta=O4^N$__ޒiuߓi,s جw[q?uOL_U_:m/ETEk鴷]m&m-I+ݴ6EjZ}~45Xk~\5֯׆^^_V'ث ]uL"W_N%YuWLWUlWI[_+ V+v*an/]XY[ e׽odth]ai#pM&ġI4Ӷi'lÆ &Ҵi6I6iIji7 4iCIFIv#p &FIN & $aTi7 4ؔ;a6A6 !a 40;PAa m04 ("940xam0 av:AL*i#d#aL("94„G6PDr#L&aiG* a06Al( "2DDDWDDDDDDDDDqQDDDDe""#)+KKHJҴ̗qI.ҴQPPQ_pPV+b4b0L `aA  """""#,#33.vc#2-3,̮w$̅s^Uy?\p i*aS 0)yȆ0B0./P\*N  BbM?l kNDIu r&JuL 6P##m/뮪_]Uuuꫯ믮ɱO2rc.)=BD6A<2|"a ǡ$ #r-  PDF0g 03<)>E\Sfx pϑA#dgfAx69 VL'"32:"Gԋ 0df #< 3PEhdtI ̎2aFўhE)3&EGPamAA{ 8pf aAfpah43}0aM00T=AakAF40dW an0T=#d3NG50c= ?Dsh4 =0a0T40cEXaaLp#`L#a{&âU Pho l:*5A}E]&‡E[E\*ToI6$M Rl:*:AWI R} CiW oE]&âaWA6i:LޛIpH6pWIi?vտ{munoo%CNwo]տ߉No%:[D:ݷNݶm/m/KJtI_?^i_;ﶕ}=i]ut^oo[uku[uQkubHkj+t1_+?XpF_?CYf?fb?>m0?a?p}m@a @t-Ä_____oP7K zK^^6?i~޾ׯ/m7Ia_uuLE;ޘ:6'I~Izc4_Nbͧ6ؤ__oױ*_ukڶ~~u_^֡Pu}5MK4 ~˯zP.-[קeuWSa2:» Ca⬺/uU.=b1]H%6#?Kaz7 4ؔ;Ml4M4M6#piM>6iMM;I6TuLæi(v 6Fᦜ4i&M6pM 7M6MM6FᦛMCJ &%M6FI6Ii#pia‚w AdPT ANaPL2^AN 0aaa-a‚wiPA6aPA0#dAL A&$"\ Bwp0h 0 ! aA M‚# &Cj A0xa0m"""""""""""""" """"""8DDDDDDDDDDDDDDDDDDDDDDDDDDFR"""""""""#)KkI+J҄a 00Sbb 0@DDɱNEyeW?^v3;fW4馘PL*aS 8\. ihvڈS!N賵hqUuꫯU]y6F`>hdt|4"c.)=Afxe6d@SQ< YH<H$A.!0$1 '0L9PˊlN;2:4#<NPT a#` L#X=h4UO E G 5fLL#a oh #X{AF40c*a0dVtUU¤8TaWi t MVl:Rf*UªM*A*6l*PMToI6tUpWI=?:m:Juv J+`Ĩ~} J~mz~Km.C]I^]{[n[noQk~Ç!CCPa0>{ڑ7sk[moA{kx@ :ӯ/PPoaׯzK//oNa?uLt~ץIu4I{]:;&'^q?W}:Umm/S\_ڵkkKk|5RLQ=W[ՅKal޽;.zb/v++A9M4 $i&Riġ *i&vl;I6V#p푸l4i&M6iZL4dnuLæiI4Ӿaa8"9A&/ al( ipAK ؆ua#G6M d0z0 P"9L4& AaG AmDDDDDDDDDDDDDFRDe"""" "#FKK륯K_ $ᄬRiB   ""#)e>[v|漅d%yoy؞dWdIC]0{ft4 #ixTH`! ShB)uΆ 23$N諤iPM6m tUphޓaom&ïT=>ħ^)?Ju=ڶ Jjmz@_V{mN{ħ_ҽ+AJ? ޺ү? JJ.++=zcc}u~]A{[>_[cC8~CW kÇk4?_]|VH?aa09aaC`#櫂0aWaۯa/Aaa[v@~._ // ~,7) 6-ݴ OXl7nKol7ka/K[ د4_:t}y:8'_h),Iϧ%:#<]}:KzOEWK}v~:m&K6|5 w׆]~_Tڵgk +__޻ ?l&՗]V]Z(~m_]Z(a; [h1__zb/ -׽ozzv]{={a2:"W_~_[dnlJ &li4M8iCIi $MlÆI#pMMFlÆI$z &4l4M4M6KOaPiIġi6I4dni' +mAPAG*6TA&1A8"9Aɨ 4!aڂ#a aAH΂aA6aAɒ08"9A 2Z &a0AM`AaG K6AA 0L MA`ؠDDDe"""""""""""""" """""""""""""*"""#W_]%]6$ pA(<  ,R3 3ڞWb^d7\O"8G¦wDFDaS 0jd(P."Ap@BBPBtm v4;@[ 6QʴJФ&EBӡʚѭ9 {yYDON _GzU]&TqZ]u]WdthFy'2:4"|SExNYdNE#l0a0dA PDAѡAf G{ 0c*d0T5#`3aiSEO[=GSEkL#= T3|#`A{ #X{0fHH#X„{TG=#a0 { 0f0a k 0AExp0{ 0aA8Fk { #=0at&âAꓤޓh&WI'êA諤7TaW 6}$޿' Ti:Mޒl:*6ToI67*Nh& TI; E]&E]&tA6l:*?[Nn%:|V_SnV%Cn%9Jv1*ZmӃ1*ӫzv뺷ħ[}mtҺ-+Һk}론]t+u z^Z]wI]ZW%ZWO] W{=}{t֗[nQ[[kMzZ[cVcߵ_v>=}t=CK45CCtV]C"Cskf?F?a`?Ø?UcCͯW`?l?F10?޶A ЃKa _[u?7ݮB_%/7_%o%n7w_xoI/k_V_n7wmD:'^/)i tuR_F_"^^F䟿8'(w_=1ߓ+u)y:Ω4__NihﶖM(IHE m/H]?ﱶiG^Hi6i6k׆Vҵ oI]ok}C_j W^k +^OW /V+z"U*1V] A՗[ K˭ alB LSa2:zv+ح+R ?l&N)zح.=.ueױ]1LS׶#4M8i0M6I(v iIi0av8iCIv 6Ii44푸l?VbP8iZL4l4iS#pdnlJ $M麆#pM6i7 M6L4MC A/ TA AOG*0xaL b%#%"9L A­ #"9JL( U 0wiPA6a%N!Aɨ AAª0 ("9h2^A""""""""""2\DDDe""""8""""""""#DDDDDDDDDDDDDDDDDDDFjKmI7iia>J6ؤMenAa DDDG,vis#DvJw<ɽ /QcH*aN33,GhF ^uf3Άt0qR`i¨@q#`… N ᅶ :m'Ah(U =$HY9 XAO8IP…I# D*Si=:_jwwGz57JIWqxOۭm%Z۷[IWרP:޲mHg3uN#L< M(2:4"|s0!0$2$rSNAxg3l1RAD& Đx&[.x'KN%C%NhG8g1PG8g12:)" X2c䬗 9 ĐI5>` ȶO$g<DeM=Vcn0T=j5aL* 0T ==3ZW੧`= G.ȦFgS ? a0ah#`{Fg =8pTGa`4G  =I>R E]&a4 t5¤UI&9â?â6VWI&áߤM_iޒl:7 ;umMtU} AR ۿ[տP[N{ݶ J~ma+vڷm)xuo]S[%CN_~}VհbT0bT5oU5>M ?kҺz?ӥz_iW][[kMz^okkuQ[uk~kbB+t!}⾾?F?a`?wa?{Uj0F?FK_31?l?n;޶_ /a _?%o^/= /[l%^77K>}_W^KwzFi/c5?{_Nb~ױ_:Kz+uK/4Y:_K;i6褟KO_ھ^ڶttL/V ou9h;  +Z~҆~kk=TH6޾A*atz޾銰v˭;ҴPS ޾A7W-*} LW=;alQ?+jV ՗[=]]=u\Riai0av8iCIv 6Ii44푸l?m(& a/ 6Ii#pm&#pMni *i8i27 J҆#pMm427 4ؔ;a0aiZL4:h "V Ta @("9KG: K8Ds &Ai[A8)C U A/ 06TAi  3P9v(4-apDriA8Ds#PA6A)Պia‚p$pa"9qq""8"#""#)QDDDDDDDDDDDDqDvڿZM/I6$muv$v\KIa/ $}7 %A lRi!mZit+u0t aqMgi3LȄwVvP̳&v;yfdhdS2-~0g[T mp H*aSL(P;ΆC0L)2  |0 _ *N ' #@pvհtvHv[ 7ӡ"HYt8!UTJ&ޓ_ѭwTqxOֶ%t_?8lAf9ѡf#y 9# <A*dfg3d (2:H!)2#2(G3 "BH<x-J;?2"fGFyfle6gёт6GpDNdu#00eR "b>_èF=#`A7= TG5A`kT5 F L#`{"kL#= T3N0T == G)3„kG 58*g ah #a{ o6Aah#aȯ#X=0a?Jzi:AkH6pi7MtUU&âI>R E]&d4 t5¤UI(tUfN'I:6m& M$M a&bT?VSx:m_O+vڷ*q)bT<[P {m[z}[ov[z}VSt4뮃Kk}론]t+i^_^IW{i}WtХkno 5o%c~w]+CtWp Q[?t?}waaA?(}0a0jK(@=m0;  wtmo?~mo<%o^/%o ~u ~ ~KB[k7_iKi}Aפ ݆FkפzޗѴ_׶k^hK{'I{Di?~NO)}%IntƗ~Nh~V?D׿6iG_j[RiG^Hi6[}~m/{Xkկ oCU׾J׆atz޾銰vˮCNa2:m/.MX]..b.[a0E@/haX+Uح+R ?l&=lVVvFJL4iM;IFla+M4iġaMI $ӶFJL4iM;IFiI6%ڪdniIi6j4aULæi(vL4i7!A2^"9L2\A#a44L*0:vAl( ȓ4Ta @("9KÄG: K8Ds &A AG 0apDrj 4PDr @ꡒtaN00j&‚ d0 `PbQDDqDDpq""8DDDDDDDDDDDDDDDDDDDDe"""""""#K2;m__I'm]%i}iH%M |004tmM6)AR0"P 0`dGtf@y!ٮvŮ2+d-,ɧ&dFBL*aN B<0F΄PBo  Щ8\(Txa…  88;@8Umɰ$SC['d,p7?E[___o_]&D!>F`1 3'"s#H2#ee|S||23D'x&rH$<A  "rH<#b>G"||!"`qM8)>ExhYNE2:0Fb76GPYg8a0d3/SOh4*aG7F=AaGSi= G5#@aL0AL0T5aL#ga0fah4a=B5#a*a{G GÇL#X=zl&t=I#VWvt6i?i7m&âaW¤M& E]&âH6tt77諤MRM$Lp:MH6Ro!Iwp ۸tUtI޽tݷ)Ĩj޻mmݷ:ݷ)o{߃oJu+mO{_i] W=wI]V֕]W__i] WB{i}WtХipuv[uknkuEn[+1]CC__=C Q[?t?}wÇku_5Y{?m6u_?msWb'>{a [l?, [ __/ _[u _Km_N-oz_}zKKo^L'If:N]}:y:4t~NE;'_y9"O_׶_i~_i>ڿmim{i"ڿﶓaG5C_[k  {^Puҵ~k o e}lU˯b.ӱ__eSa2:bدz lVIuVةƊT b+m+KEE`MJ*6iiȮ)4i6 &i8i0ҦM6M $iCi&4l4i&#pM4Mi&M6M[#pbPi&oMp҆#pM#pMC;ML*  0:wp00iG*0 &@ U 0 : K0aA%A%L aaa0paaN00j&‚ d0*ؠ Ad PA‚!UADDGDDDDDDDDDDDDDDDDDDDDDDDDDDDDDDADDDDe"""""""""""""""""*"#^_I%פVdPQ]"wH&DG72FSeY;XȦS;W 2O"2S%ɰc0(*aBL(T… Pjt0B<wyz``  ..(\(PQ >m8;@ S]8IL/cRldK"(U7꾿/ ؞hU_I꾾+fU[U_UcOA9d`ˊlN'#lBqM>F4,AB&9PJLBa*L<Њ#<`!"`,(#3&9T$rH$s4S ᓐD'z4#3i6)3"30JaA sNYH Đx'%da^$H$oG{ #X 5Aa{"8PcAGÇ50a03Ç kOGL#@ao0a{ 0AUcF= FFgS ? a0#@a aaL#zao4aG #Xa_ai:M5I6i3NRtiH6WH7tm' ti7諤MzI aWIâzMCII6m&®zi tUUwp zv[z}o{m[P_~T5o]ҿunۧxJui/1*m~mħ_Ip+KK-+JҽҾ+J.++J۪tp{^pߵ~c?ۯm~^?[ZC]Q[?t7Mw߇+1]C_~+H+t=${`(}0YyCh?0,aapF=3ͭF2O0$m [}mi~ _@k a Q=K ӨKm}_K //%Kz?%_}K նv_V/oww_KS}%OPzcK'LW%OhuN'_ihz_dM'_뫯֟/4Y:_O^HiGOiDKm-IIVմ({__ W^jk oPk5k +__ޡ\4]m~5jAzV)oa]Nha0E@ޭ?l&G^eVElW_LU^X]'b) +b)ueױZOV]X"_haX+_ a$8i4ġS#pdnlJTIi(vl4pdnl6FI6i 4dn4iS[*4ii(vi7 i7 4&oM-դdn mCI I4ӆ#pMm4V(1   l( w &‚0  L bL00 AL bd4. PAa  m0a6TAj0i PAa$A A h0u""""""""2QDDDDDDDDDDDDDDF]/믴PV&AGR<ם#ܚgi2Fv Fkʼ̆gc+*\e+ #aB #iL(G¦0S R dJN(PRo IpzB0@;@l bA&v \ j8XE9H _iuu_WU^[K@'$rcY) ɎUGxM4"6F4"s#Q~`  Ǟ x6 <BTdGFQD&x'l.[0BDbbF`3œ0H2'"G6A0eTFaBaJ;e6g 6GrȍAf#: DO2!"`gNdt\hA<A!#L_2ro0B {PT=Sg=0S=6@=0T֘p\Ӧ0aA74=h#XaG,C0ah #`{*a L#aAS0a4੄{"k GS0ah/mi 諅LoM ۸tU}7E]& W7WIaW m&zIp:MH6Ro!$tUE]&‡E]'wo t6aE]&)j?`ڷq**`9By) Ǚ#2<))]M&:MI6}&fm ۺO H6Iw6&U">UH6pâoUm'IiâE[E]&Rom&ï oI6BE]&d' Ti:M[z}NS}~[[][[z0bT5n%:ջm[ounۧx%:][xV֜Pտޟ%ZWCХ}W_S_Хi{=u=t?]ui^]=ut?%t?%t=zJn?_;o}Eok__ƭn騭?ኯt+ x4?_]|VC~ (}0Y0F?Fi6L9?^5_fkx@0@_/Po6  _ նa I[7A/o]:b'D4N}X"לOfSE_}Nihz_d:b|"~:6EWK}UM'~6Um'ȟi6_ھ_wv~ W^k /^O]}[[_ֶ5JkiZ5W[[+R ?l&՗]V]Z(~m_V=S ž?MEbJz˯bbl&G_[.aibLb ֩tղ7 6%چ 6Fdnm&4ġ27 4löi27IL4M4푸iġ4i I6l4Ml4jM4I4ؔ;M4i4lvM7iSIw(v4&PiCL' &ڂ TmA "bpDri‚vAt t m & A"9Kd0 à0‚#a%  aPaML&  @ؠdA vNP)#a0""2DDDDDDDDqH"#]^Wo~U]iZGi, ZMa(a(a.*I1[6 `@ -""""?ؾM3 <̙̊#3)vd'nkg…L)VC3&G¦0:aNr(G……G?Ip|(Txa l$Mx;@8U`&,"cI;$QĝgbHvE&_[_;꾺]WW]k꾺"& !(BD e6g 6Gr"r(Gtj ( M3;!<r IHy@ˊla0da8d x7d;EH25"{b#1>j{ #uR!g}m?/[_O@_ Po% /u mKz%_N-k_V_o//^~K Տ=1ߓ+u)y:ץ_K'OLiwf[Y:uE;iޘm(I_m&m/մKJ:6EUIm/Km-:6կV5ޞ҆_j W^k +^O_ xk_C]_alح+R ?l&=lVV׽YuLWV)l&G[]}t}޽l+{ TcE Sb+m+K ZLVlWM˧ Յ»a#pl4jtղ7 6%im&' $aM4m&#piCi4Ml6MiM=mU27FġM0MޛMo &i6M%l4 &F27AL*0wiPA6a% B  2GA0: L a0ta aPaML2^AAL' &ڂ 4. 0v(1 aP10 0Aa‚L("94wi""""#)JK.I+HK $0UA1\$aDDb3o5fyFeq+_L/+L/;dk (TgC!T¦gC"Px ,(PBB\/0A `[ 6;ML ~v dMy" {dBD!Uk;BF/wލm// ]~__}q]~fG8g1BDD dnE~KY/A#dfdtfA0ekqM<))aL#X{ * #`pa2xL#}&ޒl:*7$wti6ߢm5I6i3NRtA6l:B 諤MtUf¤6m uIiޒl:tUfTa l:*l:*?aU u¤AWIv:m~OJuvj߃n){m[%CVS[DO{q)j{JzJJҽ+ҺzRKJJJzCץ֗֕z~Ҿ_~nnzۯV^_V^nwMw|W騭E[1_CW0#C`/>{d0Y?o_u?@_ ^/kx@}a __PKmpkvn^/K3^޲u1~h|4t~NE;'_uw/دhf_u+:'_m/}ݴm(I_m&6EWIm&6E K_u|5CU׾J׆kPuҵ4jrkk }+-[Z(~L h1V]{v*A9)1O[`}v*sE Sb)zv+A:z޿^L*z˯b7 Mla0dnlJ6FIiT:jm4I6znl4Mt#pNm4I6aM&iݤI6l4M5m-iġ 4ڴi&MiMmBm00 aSdPA6iPPDr *0 'vNMaAh2^aPbH@a AmAPA AU Aa&/ u BvAl(*0 (Ds A0xa)AaDDDDDDDDDFR8"""""":WWWU_KaI+JҴT0001Iv0@a&YȾS?|fTd[;K̖󲜓|U:gl-N0BT¦aBL(Sy!a e Ӆ… p  (TxzAp~88;MM*I;\4X]n…IK c}_K_ml 2'2:?#yNg I\Sfx pϑA#dgfAx7ɎW 3d*d+rG<F['Ǚ4#.)) 4,2:4"r("|Ff ᓐD'z3#œ3gȂ(#3ify(%$g2$9df!.`ȃhdt`8pT5#a0a&{ #X 5Aa{"8Pc3e0a`#=(GSh4 F{ h#ÇG{ #@aL#XSL#X`3`k GSG40T‚T#X„{TG=#a0Tf0aL#ÇE]'I(uI= mpM5I6i3}¤7TNmp:N tUjE]'H6TWImA諤VWI&áߤM_iޒl:tUfp8UH6Nl:*諤P諤xT=lޝwV~%:oջmն{o][%9JsV֜Pտޝ[ZZWC_UV%ZW{~׶Z]{ioZ]WWCWCO]WC_t.[5m~խckj+t?tt WC_C_C_CjFͧF60a(}L?0U0Ø?0~pO? n[moa? v_uao__ӨKm}_a_u _KaK^7 kow_~vW_ߓ /N4t~N/'8~ޘ錁'yީhz_d:b|"}iioױ*_u[kjim1ߧm'[k{_5]{}}YaXiZ  +Zk|5k? S._`M{ TcE S밿]o_>=) +bD}]=t6#[.E7 4ؔ;jI8i&馚iiCFV4ؔ;i#pNIp҆l4N4bP톕W &FᴚpiIġi6I4dni4JM4ӽCi0҆LJM=m&pdn 6aA&m0A: 'A‚wiPA6aPA0#AAG d0w A%MA Apa‚06TAi  2; P0An‚ %@Dr &d00 ADDDDDDDDDDDDDDDDDDDDDDDDDDDDDDDDDDTDDDDDDe#""""#WoK_]%])d&RVzXa T0z]m4  - (&;̛ʮVs!#Y&D !)% aNIJ#aB^uΆ#aBL #`E0QH\*N.(TxaRpp8:N6m]pv…[pvnMN!&&!KQ"hpRoQřbz|#mw;;#&__\\_]E?׷[\u]t?\b"& bipS|3y("|UL44<Ј0a0e@Њ PH2"334#3iY8dxSd#38# ĂA1NHȟ0fOH"!Њ30co; k GS#`{ 4*iA 3}0ah #Xa0a=k  G-Pa*੦6ZaL#ga G5{ #Xa0<#X`k 00ani= MIWI_m&ï~l:ME[E\*6:*MI& M7L)6a:**6a&&} M6tMPl:R E_؅`ħ_ħ[m}mmJumĨ{ħ[ħQ)Ĩq)}?J뎺__ZWOui__tu:WB] Vu7kn_7k[_{no8?H{Bx4=_nnC?C_V+AX{U/D0'ns aWFO5yia0FJ [7a/l? _u -/~/xK $޿L%K o_Kz%_/_]s,7z_iivv}K#5,u~fדKNDq>NuZ[N޺ד'_)%N_u/K?m/mimimkuڣ᯽fkZ^K_ xk_G˯bp m-=b '^1V)خu'Zbm/-i1[^6#Tjan z޿[I;#pM6l07 M7Mm-7 4ӴkM4iLÆL4aI7 ilvM7Mo &i6M%l4 &FI7 4I6l4M5nL("9PAaJA0b  2d0M6Aaa0pAAi2S & amaPa;am0A@ 0aAPdaB#MAL G0xt d0u Bj"""""#B""""""""#8DEDDDDDTDDDDDDDDDqDDDDDk^UKKId"U$d)%0TW>Ŋӄ6AaA&K)Yߙ3.Fgz2IkdfdkAYVIL(TT”I0j aS"AM+ P(_IB6^ P A(\([@5 `@;Aƒ&$E$q' DםO__o_W__zfo7__*ɷ">FNYdPEf 3<QD'ÐIH䇝F\Sf{ Ɇ&>hG8g1Ƞ23D%(4 "Af!0$s1"G&9EɎWL9qMk" 3#B("r(Adf`ABy) Ǚ#B8)>Fh40 { #!„kG40T=0{"L{ 3pF40ch4 L#Xvo a0ch4 ӧ੄k #X5(3|#`k #=L#m@Ot=aGS0T3P*aB5a40T5I6i3NRtA6l:ޚMLWl:6m&vMoI6Rm'i 諥tIpTaWI'WH6TpWtImA諤VWI&èTzIo]տun%:%CVxoo`ħ_?m}:m=ounۧx%:I_B^NaWCzJ/++~mj?a_ߵ7~!{~+oV78CWn(}0YcWj##o5PF=si6#~j}m/ Xoz@k@; _@kB[kK%KzK u/%KzI}[i~wޖK z7w~k}.1_ߓ]y:'__:a;ޘނKz֖q;^m9?=1|OSKu~{i"ڿ?ڶH:K}~:m&K6Puҵ᮰҆kAxkk篾kV_{ TsE *1O[ ?`_aX)ou -1]~˯I LPduuzvӲخ) ˦+/ZbS#pdnlJ $چIl6Mm4ġRl4dn0Mdn#pT 4ʸ$ʴi7 C%aI4FJIJ4M4ai &alJlalM6FIa8a6MAxa B Aa0: L a0ta U TiAm06 AAaA0t n PDr0 0 A `E8;AaA0A am00 &&iAqHDDDDDDDDDDDDEDEDDDDDDDDDDDDDDDDDDDDDDDDDADDDDDDDDDDDDDTF}R RIvRI"l-%H S 0I0Q,L;>eL e>[d2W|L\S!aP(T…L)]!G¦PS;!§„l"0…… ' B„ @*߃88;AS[jMP&5EP6D'pB4++www7 z_}}o]\u2("|#Tm' MRMUH6pâzMi6t(tUf6 ][ջo*뺷m~O}ħ]Jtm Joտݿ%CVS[AmӃjޞ ?Ҵ+ҽҽ+Ҿ{iWA Vi]i}Q[_[7mv?nn?J+c=ݏ~kucCpC]Q[?t8j+t?hpMw騯ߡZY<'0Pai#uOm?>F=aj ^z _[u?}m@a?1=K ӨKm}7ӨKm}_xo:7/I}[izKKKk׆^W8K+'_^q>C.1_ߓ ]:b'^S|O1/8M:b__umﶖumﶗimt6Y5}~k{_5]{_5]{^׆j~}5اv+޾azb ةT ;.» C`V]v?حzbw`[_z޿m&)[E@l&G_!#L4NM6l4Mi&I8i27M1(wT:jmCKaULæi(v 6Fᦜ4M6FM6iii&44bPFᦝI6l4NIOM-M6%M;%A%L  A  A‚wiPA6aA 0a8a6MTm0 v`PAAaaxapa8"92B&‚ 'vA0"9Kd0#6(0N 0n""""""""""""""""#)qH"""""""""""#jKJK $a+,RiP`0 ""?ɱNEɞD&kvk,"KyI2+d;+馘T¦PH $c (P 3\gB )ڮt3 \/ #`E0B 0 *<0жhvIA nqEtaiMU"K#h6^kk޶oM'E?׷[_]'u_믪c#0g 42:>dtgF`΃.)= B>23hduy8dD'9!pS PL142<)`1PE"BH<WD'7">$sH2 ̎2s#K<a PPT a#` L#X=h4#𠩦{ #XM7[5h#`4a{ =֘G5{ < GSLG a0T = (GS鴁g 5 F7G`͔5 =zaÇE[E\*NH6vWI IVW O諤 /6aH6l:*֚MޞxuH6mE]&®aWIR \*Am5I6RE]&w}47{munoumlޞ%CajڷmĨ{JħJݶm J)1*`ݷ)?m{}K..{0+뮾tҾ+4&~ҿcno[[׿kkkk }C !u[wMEuC]C(}[ F?cb#F+#F7ؗ[mok ~/[a@ӯ:?kz%K: _o^kkFkzK /#5'0?zc':z=-'_uuY:KNK%/SF__u}}m${^OW_io___kV뵠5[_Xk]_ o[kg`o]1MJ* -1]*4i1VKb./^zm+Tk{ #.C밶]1[i*TM8iCI6ITi(vJ8i&i %4jA& i7 MIiipMaiMI6Fᦛ#pӴi&Mi S#pbP톚mCIp҆ 6FMtMAAG d0w A%pDr 'A‚!UA &  2A paba4!a/  m0 a"9Kàd0:bK[6A!Aʂ +@ADDDDDDDDDDDDDDDDDEDDDDTDTDDDEDDDDDDDDGDDDDDDDDDDDDDDDDDDDDDDtWUf)I$B%NI0\yX2&v ,)yޙn7R2i…YBL(P aB<4B<(PPp4xaRtiTړbK&Q;nsZ!;!SI:QQz#x]}Rt}Qt]}GU}_Z꾿:޾N$9+%x-x #r-\E|Jr3ABDdfFaBy!D~3*0FЂ!8r& 2'GAaȶO&9^sfG\Sfx2AfdQ3C#DGG  )ȟ0ȟ0C x3 )(Fp3( 0['䍔g=8p00an`f 5AaL#=O =੦aÄ{ { Ga싇h40c ah4A{ s|#`{^0T=aPaG5#XaPaD3``aPT=t6 h#} NBAMRM$ޓaWI}t{U mt&~M6RfoiH6Im&*TaWI&êMU&MNaU&ïAVW tj o  [No]oտPl }[N[z}bT5n%:ջoJu1*ħ^ħZ[mj߫~zK++JJm/]^O+ރ:V~v?WV[][zVKu߭V^;]}[Z][]zku߭*騭nF̐=6mۯ_^??/[k K%_:77/%K.פm/Ҿׯ v%ޒ ]ߥ_iv"ץ1ߓ'^uZ_i{ԟ'OLi_yz_Kz_u_[cm-_m/UM.:}ҎK~m'RLt]uk5^LS ak|5k_3t5_5~vVutuawlW'2޻E4=l&GVX"V]{^A8U[u˭&ҰՅbduan/e_%La &FV $lêdn4Il4a#p& $A|M6% 4MiL:PMCv $iM8i'i=27 6i27 ;dn4iM6Iiih2Jɨ(DsG0xt ݦL0 ۠0L6΃$06PAAV & *w Dr ݦL'a&/ k  P4L(&P a/ amӸdDDqDDDDDDDe""""8"""""""""#)DDDDDDDDGDDDDDDDDe""#~W^_i}a/JlR{iP0` 00`""""?ɱ&VfBgf2^w<带wg%LFdK3S 0fgAPNә.aBT•LdC (X\*N#`E08PB ' AB hvAM&v­888?;NQ$.BL=G&kѭx$ARmKy2_޶}It_QIu?__[Iu؂2s#B(F "rG<'"#3#„BD M:|Ў pϑb( |@ˊlN0e shdtSaN;.Eid$NDB623GF3  PE9g4 JHd$FyD'9!䁗 3 sNPa{GS o{ <#aa'{­a40TΐGSh4a={ 0dX4{F=Aa{ * * #a0dPc ah4{GfaPT=3{L#aL#aj6A0a Ӧ:Má tUi:NoUmzI5I6zME]&o諤7m&TaT*I‡E]&jIm&'H7*6aCOzA4A6Rm&IjUl:*M%Cn%9Jvޭm%:ոwվPսw:VPPտտݿo%:[DJ)N{}޺׾iXaWCC%zW_t=~KJ޿+~JRҴJJ}ح_cb_nZ[u0nnoxpC !Hzw 7[騯 Wkk=#ufVPa`~a6kۯaa0[~%oaʄ޿P PN/ Koao/K_WH7 _/i6'WFoKzoLiwױ_N:Һ8(Oߓ4<'I~kOuy:KL'_}m/H :6KUJE+iG__oi6i~O^_i[}~[]= xkCU3]uk }Xk . okk]뺲z뮞.h*Zb»_ ˯=;t4A4LP+{ =v]{a˭EF+b-LSa2:دث#p &IL4i&l4 &IMa $:lvMuLæi4톚pdn4iSH0VJII6%ڪdniIl4ii $i0zm& (i4m27 uIiML b%#%L2SG("9JaAaJA0b  0AKwi 6 M0AL$pa"9 ۂ#MN0a8"9JaAa4 aB!AT ba 0aPa0   """8DDDDDDDGDDDe""""""""""""""""""""""""""""#֕__IWIZ_itJG&0 (""1Zu!L3ep2 2ȦR!.2FB… @Av D|.'2 chp6B(޶OUW]}q=2HG:W]}}mzR? gC#03BL'40f0dZa40Tf0a=0a6 h#aL#X`kp੄kGStUUtM$tUU®i6tH6BOT¤UwtI E_zI l:R E] 諤P諤MC1zM$u/WIzi7$ME]&âE]'ImovmbT?n%:%:[P%9J{@X80bT5n%:ջm[op{oVx%:%Con}Sk{i[u]ҿ/ߡ4ҽ믺A=t?]ui_^%t?֕Хp~IZW_֗t?ůVknVul7V^~__xb WH{`?a4aÚ} ?=W>FU _k./a/_/ K77K o_:ᴿiio o Z]wIϧK$_/K|Ou׷u_:ح-'_:uN<O'^ߓi$[i?in( m-鴛K}kW__o__[[}V5_5᮰kC+vLEˮu}բO]1]=Izi%tu{eױ_h{iv]{ZLU[LW_l&GVM=44imiLM6%ai8i0dn 6Ii27 ;I4 $MaN V $iM6IMNLMl4Ndno[ 4Mi4êidni(v4bPMAApDriaI &M0 P@  ڂ#L* K8Dsj 2SG ‚#d0 ӄ `La&. %0 0apDrj& amaPa 0 0ANAm0 PMAA """""""""""""#"""""""8DEDDDDDDDDDDDDDDDDDwzW*I%DKᄢilWp0a0L(lc;W\guM33SDfW fFhaS T<R fe SgBL(PW 0\.B6 x AB…G<(PZ`״ml$@=q$wRTL!L?Ӭp795z[_]}IO߯__oDfFQD&䁓`9BaH!<23FaMDAAf ا f "BH<9*XcOAAa0ekqM<)>D|hYPD2:.F0 ȐD|#B4D&L p|x3p MH1/A00o=#Xa=0aF0T5h40d]OaGS GSi= F[5a0fah4a=B5#a*a{Ga0= 3Rh0aG40ch #`kIl*A76WIhNRm(tUfNzMH6w tUoai:MM$M;ImA*N6wtTAIMH6R}S J{m$^JyHy8ˊlPFyfND%9fGAx7#r-\E~H伕Hy 2_БOYH"A#(,̍3#N$ ' I0edc3АB623("!Њ3NduÇL(G5#) h4a=B5#uh50T=hL#a L(TAF40dX a G.XMjk =0a F{ 0ciF4k 4{ A06AaTGQ74L#t4I|:UiIIw Ua&޽tI*$M;Il(tUf.m&ânWIl:Ai?{MRA*Nm5I7U u¤OS%Co]տ޿oxx  wVp{m[n%C}Sյn[z}bT5n%:ջo+Kߡ>_tiZ_iVХpu{=K-+Aҿ-+߮ҿm*ҽ=t?]{?ߵߵXk_v?_խ׭ xHikz_5CCt?~5ͧa(}0Y>mskaߔ>{m F0O(}{@?{aۯkx@n_?mou mӯ_P_7/uN/ 7նi^_7նkxoݯIow_".1_ߓu맯tF'ޘ:޿4INfoLwD4:zcK'OQױ*HWuioQױ*_K}J:կzzkk]_kCU׾_]~k]j~fh6#+R ?l&N)[I+b˯bH'4P"W O銰Z(`=6#.ueױV]nLP+{ O][M#pM%M;Jtղ7 6%Wi64jL4ӴM[#pbPN}6LM8i44bPaICi7 M6uL4mU27 4&IapNz0a0AG7vNMaALSAaa Ta8DswiPA6a ӄ4 MAA A APAL*0§pVA6a; 2^%b"""""#DDDDDDDDEDDDDGHEADDDDDDDDDDDDDDDDDDDDDDDDqKK_svCKQ\00PKiLV) &A  """? %9 ȦTec;wy^3%2I d٩&e#aiskF_0a0~/mo  ߰a?nu mӨKm}_a_ua,7o /_%oնiפ _a Iv_]:b'I/:zcK'LWͧ''Fubޘ__]d(wcm$U}J:6EWK}}}ݴPOoiuO wկկ׾}__z{ TsE *+i6v]{v*A9/[a0}oazl&ױMzb!l&GV]{eױVެK.l&GIM[#pbPzziS#pdnlJMi $M8iCI6ITi(vJ8i27LJ $iCi' &l4NTl4a 4dniI6L4ޛIJM&I4M%L' &ڂ X) 0a8a6MTm0 aa8"9A&. al( kpaAɅPDr a0/AT0mMAataM0aG d`PbH@@ aa‚j""#)DDDDDDDDDDDDDDDDDDDDDj/KK$+K $B1P` "?+"|fy.u.M2cp;v2%LdS;;~0BPIh$΃ 0uxG¦0L)ؖt22  / #`E0pNIpQBipptlv '^AN!&YZj$tRvRDX*MVW;~z׷[̄(~__*8y66GPY<4 IND$LA0ӧ f#т6Gx?2rdL漷yS2mFer̃dK eUL(PB 3" v AB (TB *NQh (PB 8U`;,_SY3ZZHq){*q)뿽ڷ1*7߃oOmO{v=ħ@AҿJAm/JKJJoK-+K++k}cukuߵWn_kۯc+[_Ct1]8j+tMEn?-د롯pt?+#uCͯ0հF`#ׂ0k@ mo n _? K K%N-___KiozKפz/ }_b'X"דtדB4uدI.1_ߓ]y:(wNtE4W_~N/ڿO^[iz*[^Hi6Oڿi׾J׆5xk~k xk_5]{4xk=߭|5W ak5 ?l&=lUOO_֓at+Ez캰Wb+u]X"G^K{ TsE Sb+m+Ja2:zPl&L˯bbl&G_[.m4I6l4i&o & $چ#p+Il6F27MӶiMv tղ7 6%im&27 4ؔ; &Fᦛm1(w 'aPiIġi6I4aAh2^aPd '@ i B G8Ds M0a8a 0 j 2IȡݦmAPA D ;  B A 0P@*0‚#a%  aPaMO)qH"""""#)Q׫K/K믯H[%iDXa(ᄢVlRlW a Aˆʼfdc"2Vd*FvO&|)ڌ 0S I3 (P (TxxPP(T(X8Pml  c ARm#m/__ɵ#`fG8g1C#^bW*|;)y٦D&L#aSL(TC!PB (X0p.*<0 (PB׃8;@VM$I fZ;N;B;¤[_꾺꺯W]WU0dF`!,n$rc"BS<sd!g(#LBq1Jd)$LAOѡ "ps92C9Bm$LA\Sfx pϑA#dghDaFb<_âٟ#lr F|B'"s#B',D',dt\(#LfENL#@aLF=aG5(*i{ 0fa'{ * 0a{GSaT40TL#X= Gi=h40 { #„kG40T=i4 { 8|#X= Gak #=aL#X=8pc *a0ca5âm tUi>aVWH6ME_I MPi:ME_ w tUtaWH7*6ToI67*Nh& TM5IM&êM6i:M6t'wIªME]'IMkvmĨj8={ħ[m뽷v:mm~OJu߫Ĩ{ħ[O?mO맮Һz+޿+)^]]W_Z]u{i}WtХХzWiZ^JKJ5kح]}ߵ_w_]_na8ht騭EtCa+~롯{_}6ͯu+@=m0?_3WA0i a_/v _ amP:K ~zn^{^ﴰ_okSK6]_ϧ:.'_~N]:b'X"דד'If;8uwK}wKm/cm/ҎU}m_Km-Im/}Jmok uk Z ak]^a xk[[|5W=}]ˤد ]tuUt}_]o^LQz˯bH&4P"S[iZ[Z(~Lث L/#?+ Sl&GZUM4al4 &i &LJil8i0MmZI &MiIMi(vI4i0iS#pdnlJ $M麪a4ؔ;ILÆLJ7 4ؔ;#pi4lJġ400d0iG*p00bd &aaaPDr à0„G0 ("9A 0 &. PANAI ݦmAPA Fv(1 2D( AA0iG aA40aAAɨ("9B#aA  B8""""""""""""""""""#)DDDDE~K2Jᄸ'  aDDɱ|v fvg2Zge9']K&R̋L*aS 0B)L *aJt21,. ¤B… \(Tx`аvhh(Uv­nc%aj9"CBز)TAVC}}ɰefGG GF PFٞ#œ3PG4"ȣ1"?23Y1"ND&"FL'4<Ђ!"`2:4"'"Ff ᓐD'z4#3iȂ>)>F"& 2("4 A_0ei#X„{TG=#`=h40 { #!„kG40T=0aaASFvALAL#aFSL*3}0a{G40T545 = PaFM{ ?ah#`7F‚xGG~GS' Ti:M*6ToI64'IiêMA꓅6oޒ E_H6Rm&âtUm'IiâE[E]&~oI6 $uUm&‡TH7t7bT5ouo][Nո%:}[n%:ݴl߶V{mN{ħ_޻ħ]ħ_>%:ޗA+JKJJKR_ZWWO]iu_]I]wI]ZWt)_Q[nQUkVkku[uxhj+tulP WC_CCC~a9~`,f0O0#~mcͧapF=l5Y"~aۯ _@k o%K7K ~޿_ ~ k_V_ksߥ]_ozߜOG=1ߓ+u)y:E<{^Nm/uNE<N/ץ[Nu%_'Wvcm$U}Wm&Im&K6cm/K~__5]{4xkXi{_ N_[4~ zk }׆duteױ[Wb(~LP)zد޶duSeO^J݅bخ) +zv+ث oV]m[bP8iZL4 4ڪdn5lMCaI $ؔ;M6a4OMm-7 4ӴkaPiIġi6I4dni0ҦaLM8i&IiiIaAa"9AL' &ڂ 4/ 0aaPA0 2\A %i08Ds AaA0A am00 &&iAe89pv(2UC 0aA0!ؠ&0 (""""""#)QDADDDDDDDDDDDDDTDDDDDDDDDDDDDDDG&%MĤ0PK ESbLxA6DDɱ|iHO2|;R3s#b'\FFfFYI(G¦!Ђx (T…; 3(FaB\(Txa *<<-$tlpv­pv…[h~M]8~EU,p7SDד4>*MdGzGxGz_o____Wnzɟ\ ^z(&t#LŘgB'$G< P\x7(#PˊlN(#lB"r(Gt 2A BD/AH! PE9ѡAf `9Bq* *s2<)>Fyd3"s#YGF3L$F`M7>`AA{­a40TÇa= 3N੄{ G 5Aa{"8PcF= Gm f=0ah#`{ G=#a*a aiL(F#Xl&= T*a PcGk #Ç *&<L#X`?l0M]7}ALӸuIE]&jm&f¤6m uI؅I TUm'IiâE[E]&~oI6¨uH6'I&wpR ^aVWIm%:P][[~ݿwVuոVT==[NuջnoS)1*JtO1*1*kħ_m+ ?Ja+JKJJot$] W֕Z]WWCWCAkҽ~JoV_VO[9Vkku_Ů뮚a[??5CC~b?~+Hk=$2#u_̯_VwO(`#櫂0aͯ{FĿkkx@@_a ax@&[ӨKm}/%Kz ޗk_k_V_o/o6:z=-'__'_.1_ߓNu'_>C_K_ߓ iij*{i"ڿ_ڿi_[{tv4^ Z ak]U5Jk{Z뭯]^Z+OJCb(~YuVةT b+m+J˧&+TN˯bbl&G_[T Jz}E8/Vut"}Ma %7i>LaI4NL4jtղ7 6%im&0iCI9a[ 4چM0M6%M6FM6Fᦛ#pݤMM&ġPdn4iZL4ai7 4kAa**  7!5Apaa6ڂ0 0wiPA6a%!PdA0` OAaG K6AA 0L MAA˃PaaAaAɨ(DsG0xu aAaDDDDTDTDDDDDFR"""""""2qDDDDDDDGDDDDDDiV-/%IB䒴$y/QA(a(a Wia  """?ɺVD#̉晦vI$U2+Ss3"Bd3"aBL m<L(G… 025ΆC(PP  A0AI… \.*<0 MA 4?l$)TAJ?v4Yb+IG;5XRoo޶Gz__q{u]Wu=2]m/UG~U[6 #GG Fy(,Љ# f#Qf "b:fI9O6FfGAx6 ?o!N|:ޓi8PWIow7*(tUf:IpaWI‡E]&e}tiIIw a&bPV%:oSտN?)Ӄz@^=Ao%:VSm[m{nVov[z}VS~JKJJ~wJ`o~:WZ__{i}WtХ[ukucר_׭Տߵ_xt5C|W+u?CtV]C"~mY0a{a#K(}0Y_a a?;~mo<7_ ,7%GC~u m o/7zXo _߆m/פzMͧ}Eu_ͧ'SoO/w_wQ8u4t~NE;'_ߦIKIV~K'ҎUm_K߭_kP~O /^߬5__5]{4xk=zPl&L/_zm./_(V]v ޞeehUV[[a2:A-uh]1^L@+{ TsE *1O[#pi4lJġ *i6Fᦛ#pNIaLÆi8i0dn %M4aa4i7 #pi6I $ؔ;M4a8iZM&iMFV4ؔ;iIu#PPDrG00aA 2UC aA aB:AM0 ڂ#L* &L ` 5N Aj0d00MamDrj PAl( AtaN00j&‚ d0*ؠ("""""""""""""""""""""""""""""""""""""""""""2DDDDe"""""#)KK/ % C SbbA`leL[#3#,|kd!|(G Sd2L(P+ȇ x\(Txa… Puh*I ^GhBw*MLv!c*MGzw__QK_]}u؃#l0eYNEAVKXBqI`D$LA.))>A0eAF1GY9B =8pk #@aLExpT5 ӄ{ 0fah4a=B5#a*a{F50ALF=Aa7F‚xG'tފMH6IRo l:*M$M;ImA*Ni;ME_IH6~MP{oVV%:[ov[z}VSp}~T5o]oNV8}m/J.+J߯}Z5nb_V:x+n![Bb{a?o(}0Y_0y?0ه_ }m0@% ~ڄ^_%o.Kפz I_Woz6w_Wu.1_ߓ]y:/:K]?umWUcm$U}W?cm/K}KVk/_5]{4xk=wkPkkOZ({zLhz+{ TsE Sb+m+K¶#a; atث oV]mxi27 dnL4M4푸i7 $iS#pdnlJ $MNLbPl6F7L4i4ӆl4i6#PA6Axaa6ڂ6T oAa l( K " B ɦ aAL&@ U *0 &A0#L2HFv(1 DDDDDDDDDDFR"""""""""""""""""""""""""#Wz]tIZXa 0* 0Q@ endstream endobj 73 0 obj 126143 endobj 74 0 obj << /Type /Page /Parent 3 0 R /MediaBox [0.0000 0.0000 612.0000 792.0000] /Contents 75 0 R /Resources << /XObject << /Im15 77 0 R >> /ProcSet [ /ImageB ] >> >> endobj 75 0 obj << /Length 76 0 R >> stream q 614.4000 0.0000 0.0000 792.0000 -1.2000 0.0000 cm /Im15 Do Q endstream endobj 76 0 obj 64 endobj 77 0 obj << /Length 78 0 R /Type /XObject /Subtype /Image /Name /Im15 /Width 2560 /Height 3300 /BitsPerComponent 1 /ColorSpace /DeviceGray /Filter /CCITTFaxDecode /DecodeParms << /K -1 /Columns 2560 /Rows 3300>> >> stream Xh"'F2Awe-U p@(AR08@ ʰr$aQpapF 'iI¤I6'0NMƊMǃr_Ah h Wnzozo^]_+~ /cүH. aK%cI/ ?ۦJoݴ4 Jm~~_[i}/-ZJz^%uT+uD5IפC_KI$Iz'vI.-M!&HzHv҆Z4Il$% $iZIJH BPOb [J@a0D|EDb"#?%I(AGnejJޒouh]6Bo_IJ&/׮vPDMԲ|;I3"ܞFgy;WS;y#&BaB6M0B<a P]8PPˤA0*NIBvwh @;@Vdt gq,!8$2Y&9S$rc\0)TBhFOD' A* +H`ȶOq $VKrC"'d:/u"'4t~Nuw'^h+d&|Nd~_Mi6ױ*[[~[imi6Oj[_o__[[[ᮼ4Xk߬5_5]{k5 xik֯[[ (kzP-[Z(ti6T ث.LWoa]Nha0qV]=i1[L[P+bbeױLRtLPS6IlÆ 6Fav#pӴiCIi0M4M6K;jM4i44&dn5lMCl4l4M4bPM4m& M4aM-L4pdni7 d0L& aPL2^A#PAa"9%N `  0&"94„G08"9B#aa8a6MT"a 2^AA 0AaaPh &aAai#dA‚#PA6A‚#DDDDDDDDDqDDDDDTDDDGDGHDDDDqIiZI  % $駊i1B a`qMdgj WS)<<#2̉epNa T™-C!T<0ay ΄*aBΆFA~BGIBPPQm5mlh*Ipv­<TN;MN¤kXT_wkk]}T__~uu__q"d\'">= alS!C!.`Ȩ"|БRjqM<)>D|hYfGAx0䬔a엞 ĕȃ#ٜ '#ˊlN(#lEQD'," >)=fY#LY0g pΥAah(G =O4{ #aP`8F5 k 0AEp0cl]3t8*a=L#m@L#d3NG 5Aa{"8PcF= Gm a`:ai#X=k GSSL#Xl&5{GWz m5IE]& \* jm&f¤6RoIU E\(tU M$M;ImA &â*6m*NzM$u,:**6zNo뾠{`Ĩx:߃Juo==>q)t@)v~+ҽҺ?%ZWCХ׶}ui^_ti]=t)_i}i]m֖t]W__}[GkuEnkukVtuk騭?k騭EC݊CnY^P}a(}0YCF60 {U/F#ۯamomo8@vC ]@mvu__ P/[ނ^}wk_k_V__ݯI}[i_../ Nuu$.1_ߓ)u4t~NEuKMKz[^y=Im(mUm/~:m(I_m&m'}6!V_kkKj[XizzzZ_j W^k +^O_ mj }v]n>nuS՗[a}+R ?l&՗]V]Z(~m]{eױ[Wb(~LP)zح+ ˯bE8aj=XiTUL4aL4&m27 :FV4ؔ;jL4 i4MRil4aULæi(vL4i7鑸iġ 4am&7i4޴Mn4KA7 ' dAd&iwiPA6aAʂ 5aKLT % aataN00j&‚ d05AM0 PTaAL&‚ L* :XAA¦A8"9HHDDDDDDDGHDDDDDDDDDDDDDDDDEDDDDDTDDGt뮫+H\1_0`a0"#YD\'̃r%$yfj̖2ܣ5晦DVAy6`!@D…L(T… 0S 0Bt#|(0ppB……… A´8;@8;@IwDAWV?Y},#C}_?꾿^i3X f#١#dfdtK`aY0g 3 )A sND!љA 30g !8Б#LŘd5 <0eNY?202r4`1go0e|e6g3 ċNx,S<T La1Њ 5 PE9?Aa#aÄ{GSOL#a4= 3L0f0a{G40T545 = PaFM{ =0aA{ za0k 45 *aO`SA*`3a *a0T=`G5(*`=0TMlWzI ۺNaVWH6ME_ItImA諤VWI&áߤM]4 >MCaVWI談E]&ïAWH6T} MT:A諤I‡E_WI_( ޿mĨj8=mmJs%:P%CVooxJVoVxջozp{o}w_Cu\ ZW_ZWWO]iu_]I] ]+K+U׶}AҺ}V֕]kcc+[_wkcn__8h~ CwMW{=/1_?sk9?5_E0F#\_(}?yqͧ?a/@w aڄ o7K ~޿ _ӯ7w_~voK/zoלO'_ONIE<]}:KzN'"?'Y{:'Stocm/Km-Im.y_yk|5ᯬ5k_oZa}߷5{ Va2:bˮخ) +bb  {~"Vzb ]{a{. %t4a8i4iIim&[ 4چM0M6%M6FM6Fᦛ#pݤդI4ᤚm1(vi7 4dniIiJ4l4i44i&4M%M6i4| ` )A0dPPDr 0!HaaAuG'0‚#a%  aPaML&  Aa  0PA06Aa  0 Іat!apDr pDr4L& &L  AQQDDDDDDDDDDDDDDDDDDGK􉰬Q_4 8qs)3T̛ɸٌkה̋a䳓jC0L*aL 2@  $ m AS Ft22L(XPp\(Txh ]   oh*MӻAA …Iˡ* 6bw,I')>&JGxGzGzO޶]}T_o_yU]OZo]}W[[]QWmz#B!.`"|БRkqM<)]M&iâC65Izm'IU E\(tUMz ޓoI6K ނoE]&1*뺷zħ[v`Ĩq)[ݴնiħ_I_?)_O]WA}ҽҶOJnҾ/u~ߵcר_W]{74'n_wMEnކb kH|4?52O?F6?a/9{ _e$6?{kx@a@o ]_ӨKm}7ӯxK u?%_k_V_vza_;[ h4t~NIES|O1o':'?k]$~N:EE^{i"k_j~?uy'vO__3m-V_Pu +_]֯?}_z &= mj }4z)˭ةT ˮCث.?bm&)˭޷b.u[ޝIuSҷT -1^_`^6#i0Mm0Ҵi4M[#pbPi0dnL6FoOM0M4$ӆPa0M[aÆ4MRii lPaiIm6%MniiIIrm@sPd:0 P"9L4& l( ‚#PAj bd08Ds0 T-ᄚt0G 0kp0A@ A4 ȇAaJm0 0m00 a8"9 DDDDDFR"""""""""""""888_ii$WK a U6)1` "#̨d;/,dv(k_-_\^ʯ_oȰU_Z?ֺ_דdf#xe6g̉x pdf"& 1#l 0y(,Љ̎1,гNY_SQf 9j)!8 k<uaȶO'!,o%349ԑ,"& 3' "|S>bb7`DBDb>F`s#l0a0f B& c.)?FͧAͯ6<5_ ?0c~/ۯ@ _[u _/at/C? ~_Ku m_u77/~W/m/޷_iwm$ׯ ֗o~a;דi4__N:ד8_)ߓ}:8N;t]=~EPi?imQױ*Mii{k_\t[gio׶a^~CU׾J׆k /\]_[i=[iC[/' l&GV]{_hWu˫.» C`LSmi}oLUE@dtXV+ެ+O.b]'eױV]ne{WVivbSLM6Fᦝġ 4MNLi4i6 4ڪdn5lMCaI7II6M27 m27 aM6M6i $ڶFġM6uL4im&PbF4&FvAm0 &AAL MA PAa;pm 0A!  0a $aA 'G &a 02AAAh 0&+iaG(Dsi &DDDFR"""""""""""""""""#)""#WWWZZ_]tiZIxa(a(a b(S 0AMk-fFBgel_+$ɂ Y\fwOi!2.0B$:Pi(PL)UΆF8P (P'  ' PpuppppSuipph*Ar&KP…\z YB?,rIFwu]>]W__IZ뭥2ABF['Jz0d9lx77">&9S>b7N#3G#2` 4"s#dPdtk2:AqM"|'"|! )(FF4,Љr'"xAHD(#SQ Af`Ȃ" 2#2$0F̍3 1rLZy ̊ 3]Ii3W !5<ɎQr ASkL0AL(GÇ0aG5(*i{ 0f`=h40 { #!„kG40T=i4a{ {  4=aASGa0= 3V{3PTak {3NGCwm'IhI‡E[E]&âM$M;ImA H7zAVWI(tUm'wIl$6}'l*Ni7WI*O諤o_N{mĨj8==>q)Ĩ{Jum8=*OﾾPo\~ OztJJKJJotJt/Һi\~ qַ?knuv?ݏ?? bMo_7MEn?-߾~k+C{?#?'>{e̓ia?ÛCF?6X _/a;{/P ___ 77/wפzK n /|:tƗ~Nuu)Y?q>R'_uumﶓj_i?i7i]{i{yWo3Ύ?[ 5k|5 wXk[kau]^k }A__ޝa}Cbzl&G_Wuv]{v*A9JҰEFl&G_^?K)C=.銺+ӴO ev]{M4M-4ӦFᦛ &FINL4;M4i4piS#pdnlJ $Ma҆IM4iCMpdn4[#pM64mZ\4i4a-OM6FӆM600 h0m aL2HPPDr 0!HaaAuG'0wiPA6a%N!PdA0xaaL( AL("95 B#a0 AoG h0A0iA8"9=ADDDDDDDDDDDDDDDDDDDDDDDDFR""""""""""""""""""""88""""""#_I*VP0J,Ri0Aa%5S̩eP #3y2 ɱ6wL>v 0aS *aN9PBp:O… B hh>$j*%i?j;:&$ם_[_ʫ_Uuh،2:9f "3(")(G3pB3 Sdt gqX* #?2 #BF8yH"Afy`A " VaȶO!,o%C3Ԓ:Y0FO#O2r!AaH$2:=ePEPY&DPF"<)* #=L#XaPa07{ 0T<0cl* #X`kPT=8p{ 4=aASL#`7 ؃Aa6S*aGL#aCL#X`{"0cjGAk #@a0aAk 3 a¤>MTI‡E_WI uA&|: 6t(tUwtz*6m}4i8PhtUiH7T tIZMTI&â4i>oM&ph&m'IazI?Ĩ{Ӄ}ħVjħ@ĨmӃ{mĨj8=~)~)D_m{J1*ħ\J:V֕uC/+/ҺRJOh~JJN{6>W{]][_>k}ؐ!=vokQkkV+tC~+] q_{ ?y0a?aͯ(}WmC`?\ͧpFͧa0a _ aa[a0~/u _@j/~%oӯ/_% A/~ on~W.//NjO):R/֟E:uE:.Kt~`w]dOyK/M__^inB_ETK~m' okamor~4ރI5߯J-Lح밽YuI_l&G_hW_=6#+O˭+خ&.X_ )YtuuaX)X[ uV4lôbP4aIM4a#pM;Kdni(viIm&I4i1(viiᥰi0i4M6=lMFᦛ#pNbPJMCJdnM1(v;IiÄG 6PL( AA %AdL("9PAaAapDrj4aAa B  AaA$ 0 AaG 1[L &Am0 &HhB ("9B#L a0aB#L b4ˆ""""""""""""#88DDDDGDDED_K$/;I%JK⩦"&0 &+̻#2mK3̣? d_!ygbY^S漪Q,L)&C3 0S PP RK̈p\(Txh…I…R ' Pv 4[)6!gi$VTI%9N*:֢HX" h"[[;믪_UI"$=UkkkQVQMU[Ia0eKFaBqH: ">FNYGAx0䬕 Y9+%ǃy V`9B\#d|0Ff#x)4F'," e gBa# $rc B'2:?#PY)(F#2H<A #r-АH2 „B\Ek2:"g")7G pkh4a=B5#a L0fpT=FM4zaL#fpGPF5akPco5 F=0c0a{PT=dd0T=#`0d]Ma 0fa't=0{0f #3LWIaW m&zIp:MuwA7Tâo^Oa&=Rm' R}&âm&m'Im' Rm' T&(tUfNi *E]&l(uIH7հbT<uo%:NPNNSoJm}xz}[Nտom[oNV8zJO_ti^B_ut)^Хi}]:W{)Z_]__[G_ǿ[}ǯn[u{⻦Hp?[zk Vp ~⮚>0>{eaa?dh5Af?}m ]x@l?۠m@a N-7u__k_V_},7koz4I{]:b'D[m?Y:u,%O~N'N"bޘ_ ^{i"k_[i{i?j_K}_Pu߬5 ~ (k okk ?)˭ةT ˮCث.?bm/-Yu֓[Sa2:zl&G_VC1V`]{L*˫.MX]due׽v]{a˭EF4iMFT:jmCI#pa7 6zzM44dn4m&iġ 1(v4lM6dn4;jIiNM0i76%iI6i4ӆl4i6 2Gt 4 pm 0Aj0)ئ( aUAG baa 0 A NT 4M0‚ ("9 0P@ G ª A &‚0L:0 &A0#L2HFv(1 $l""8DDDDDDDDDDDDDEDDDDDDDDDDDDDDDDDDDDDDDDDDDDDFR"""""""""""""""=^^UM%ixa(a*lVB &0Q%ŽdfYEgjaSL(P|(T-vyd EUZZ뮫ulAi23 "rT$y.dt ax-9l.H%ĬrCȃ2:%dK/do$o E8SQ Apa{FST3|#@a=P6Aah#aȯ#X=`͔˰nL#za" aG5i:ME] U I'áVzIRtIow7zAVWIڶ J)pbT6[z}NST=n%:ޟu~i}W{?O W:WCUiv[ǮG[Wj+tC x#a0aCͯ01`?ͧ a ? _[u?,6B[kaKI}[iq:_/)LiwS']dumﶖi{io__5]{4xjsa}˭V]}ةƊ՗]V]Z(~'o_Sa2:N8i27 4iZL4dnpaT:jmCI#pa7 6i4 $M6;0 2Gt 4 ʂ 'n00j&‚ ("9PA 0! %Aa0"""""#DDDDDDDDDDDDDDDGK %M6*a D@y;I˲-Ҳܫ;YɦvyrlL(T¦W:™2E D 9T¦P.. <0 A\_ ;@Vhv=8lvAv9REiI"v9+Bv!#mo믪W8|ze$uo__gR'"'G3 b0H2"0!0%BG\Sfx pϑ9#dghDaD% 9+%2XBJqH՘3NG8yH- `! A1Lr`ˊlf 3]Iiɂ! 3 4"$ O JaJ\#BEG_F= FL#&{ #aP`kh4a=B5#a L0fpT=FMi{#a35aǦ6AT‚{a0=0faB4 aiL(Fc#@za: iêN:*3N諤AA6{MRM$LӸT&|:êMVWI4mI'WH6TpW6I&MME[E]&zNoE]&}:q)8=1*뺷zħ[~J=p}SmJs==t)}uum/J~JJ}m*`Kҽ+zzӨW-}[=znv6>h=j?[_c>c_wMEn[X8~*~+a'F#uO̬?`/=FpFaF#櫂00?n_ۯa@_a/ @_Po[~a_iv_k_V_~;wwߥ῿K |O4W][:^Ɨ~N!?huNMgSS/ץ:Om_^?I:6EWK?m/m$KIzO (iZ4k|5 wZ4ￆ5k߬4ﭱLSLNv]{ueX_{ TsE *uehUV[i6إnˤ/]{ii'a[ lSeױ_[T hW^L4bP4ӴaL4&m27 :FV4ؔ;jL4 ii7IKl=p҆iҪM4M4a-Pġm&L4i4dn dnpdnI8iB Apl( Aa:z0 "9L4& l( ‚#PAj 1Aa AnIN PDr0 0 A `AA;L&L0a Aah """"#)PqDDDDDFR"""""""""""""*""""""""""""""""""""""""""""""""#WWuK]RKi"ly$ Ea(Jba0L(`C;AF{;^dFSc;J̕#O%2 .0 aS 4„aI0 P*NBTlpp~48;Mm8;@J'gX+,GI<$lq'^%agj};]u_o_뮾J]}Wדdf#p)3G3(,"$$cBG$ A x&Cy'"E ǡ#qM8)>D|hYfGAx0䬕 Y9+%ǃy-$y6Gp8F`G0GrID7adtH$<,3G!2`SSN4A0eL#ga G5{ #Xa2L#a0fX`kPT=K i4=h#XaG,C0a{3e28FSFSL(*aÂGL <#aȥ[„{F{ * #a{ #X5(*a3Rh#a*`:aÇTl:TIi6Rm&}&âLl*PMToI64'I&pi7E[E\(tUâm*Nti3 6R tIp&MAMSSz}[%:ۧյl_[z}NSm{oնwV [zzpxuo]SB] VB{Z__A+ҽ+꾿nJo-+ZZ_BwI]ZW[kkkEkuǯQnQU_~1_CC騭? Wb?__^m|{ R%0f Ͱ3'G6ͧOUcb_l0u@ _[u?u? o Ku m%_ ޽}aޗi%mo/qi~fo7k_y:N,t(y::ث%LiwEIy:b| ޓO"/z'_:i6^{i"k_(+z=Ecm.I_6m/ xk_PuW)O{Qzk[k /{Zױ[Sa2:a}bdu՗[a}+R ?l&՗]V]Z(~X^CCzVa⭊NA9AkLP* a2:)맧b.m&LJi27LM6 iġil4&m27 :FV4ؔ;jL4 i4ilM4i-ġ[]iH-8i1(vդJIbPCinJMmB 0Aa‚+L("94AaAʚaAamH΂aA7vNMaA ڂ SPAM0mAAL 0 l( pi '@t# 02TG  0 PN%T0 """"""""""""""""2DDDDDDe"""""""""""""""""""""8DDTA(G…L(PG v AB)t22GӅ aBBBPPQ:Ohk lppk5E"*#IXTU޶޶]umɱO2rr4"| 2(" y+%q$ ā2 ̎3!8NF1H"s# ̍3hdtgA`@1e6g 6Grȓ"(GtB>` ("L `噖hG8g1~DJu^ħZ[mjKJRAҽ}+tm/JKJJ__+?}׵u~z[uWt? }+5CCb{Zx_Wm?1FaWa#u_aO`?06 _t-ukx@ P/P _u m?%Km/  ߆m/zKKwv_/_]_w]d/']%NjO6+zcK'LW4W^N]$~NmWUm-vEUm_K}'m/m/V ou {]~zvjXiZzzkkW xk_ka2:b/1LSsEئdu`i1]Z(`vKbA-+A=» Ca☧JҰL)[ S-1^^_!##pMCpiIv4bPJMCIi $Mv8iCIӆii $M[#pbPi&oM#pMCiIm6%MniiM6IiaAM0 A m &IXPDrj'M0A0d6aAAaG Aa07d7vNMaAh2^aPbL 6AdaAMAV0x` aa06""""""""2DDDDDDe"""""""""""""""""*""""""""2KKK뮒Ҵ$"U%iaPQPV)bب0@ (7 ɖv_)$\d M3!\񐬊e&L|dILv`'#<$DOyhEBy%da  '(F= a= 3N0T5{3e0PmA G=b(F{ #)a4  GÇL(G5(*a 0a ==0T„{p=L#m@LG5 SL#Xl&=00<(G5{ #X=0c :aàH6w tUoI*$M;Im'ë :ޛt4I‡E]' A6l:*MWPOtU E\(tUtIE[E]&޴m&¨U¤OIl*IMVwun wVS_xSӃ~~v=?Vڶ`m)mĨ{1*1*> J?{+I_?)\ Ci}{O]zWO]z_{*JzJJҺ^֕V뫿kuǯQVp]uuխ?Wj+tC pwM[ uxu_?a(}0Y j_(}6a#0__@ n?0 _?ӨKm}77NK[/KI}[iwo^/KKEuM?Ɨ~N4_:V])t]>=1/Kz'I)_8յKUm/m'I}J_5]{4xk ok5au_5Xkk5O^Wu}H'4P"WV]vYuhh6#zT b%P+zث u&*]{Lzl&te՗^ZatialNL4ӴM[#pbPi0dnL6F4m1(viI4iii4M6F $4iU&iM6 4dnIFViġ mZL4 mCA  a NTa8DswiPA6aAʂ 5a Bj a‚ A& %h  &ڂ ("9 2Z &aAa aP10aB#"9a‚( 02TG PAaDDDDDDDDDDGH"""""""""""""""8""""#~__d/06)=4ӄ0A08b>KQWE]Mg̖gf3'Lg$;R-\g4„L6P2 0)D͔ T 0(P*aa|*A/ ˤAUIP_ (_  itvAwh ?8;@4@*q 0K["kQ;BMJև*IkXI^ѭ&xOKI_u2B>)?hJNԆDA#B',uD$LANf#PDD&93 2(0L9Pb 3 4"$O JgqH#BEGYpD&h%&L`> ĐHxD'JsPFy8d9C#L$FbkPaAB5#}[a{"0a7/0a{3y0T5(*aȩaA74<#X„{F*ik { 0=8pk #Çmi{ ‚Pf0ciGSL(F5h#XaPaNH6'IaI:MM&m'l:*8P諤]®M8Tm tUUoI&ފMntU Phm' WIhA6{MTaN=>]տ}|-_mħ[tڶNJs{mN^Pտյ_%CVS_[uxa_q0I}i_B{Z__A+Һ~JzxAJJ꾟[kEQQQmGEuk[Vhp__?]x=̣ hmHF5y?a=ͧ0tv/ l?AhP%//mB_~mH݈oKKߥMz?J<{zKtuOW_Kuy4_:EgwY//>i=m$P]I m/m&P_Km&K_m}__|5{փSk }5k omui xk /Xi߮[Xi|5du+{a0E@h!ؤ}1LW^{ua; .*b)د-LW_Ebh]{՗_`Mbb.(v %ؔ;kI_IMii4lM6%M;ai0ii(vI 4M4i44i7Pdn 4i0M4Ml6M&Im27 :dnI; &)l( yV(& AU8a4OG ii 0aPDrAl( Aa8DsiM a a0iAa6A8"950iG bPTa#L tL(* 4aAa 4 L(Ds DWe" """#DqDmjZ/II%I7i$VHIa A(a/MB)4ᔖ Iani6FSg2̓s23;wR;Fv'O;FFgvT•! 0BM0@p ΘP:0(P63…G  (_H|0 ˙3w…ɧ.dqP[[hpppvI6;@4ӆj9YEiI2:'BNJD)'6k$EWmmꔡUQ_]Me6g 6Gr2:%dJAY.<L'G hYdxe6g1Oas#B$2:*ȟ0e,Ќ D#D&x&Md! !<BJ&pS|3Yf N= L&< 5Aa{"8PcG6S.Äh 0aP`{ 0AB5#aDŽ{ h#`{ * 0aG=#5 FkG =aAO]-#X`kFSL(Fa*a00a{Pf#`*vzIp:MuwA7T¨uH6'IH6Ta U IH66t'Im' H6zI諤7TzM$uIl*IR E^|:*[z}NSbT8[նx[%CVۧ [|[״ۧ[_N%CVVo%ZWCХKJI+?{t/꾟-+u{_z[uuQkkkv_騭?{t8~⿼8b?_\WnxCͯ[ͨ mo?05_kx@moaaia~Po ӯaoHzKKm/7__Ɨ~N4_:'EOLy:DGNߓ8֘/}Ѵ~:6EWKK}鴷}KK}-/_5]{4xk=k|5k /[kZU|5}ң+R ?l&՗]V]Z(~mW[޷b.*]X_l&GM޾K[ tvE8.t?Læi(v4i7 #pi7I6TmCI6UM&Ja#pM44bPC&PM $ %J[#pMCFi&i#pݤؔ;ja $iM=4IB M;L' &ڂ TmA "b %T&‚ ("9% %@A0L L2TG("940aA0 %@Dr L2^AdA40aA4 paa0MA %0Dr L2^AACAS@0DDDDDDDDDDDqDDDDDDDDDDqDqDDDDGDjmKK[iam(Ri M 0 ԘA[DDDDDa|f[;'됣25;#)W=yٮvKyyOFi}0BaNC`PT¦PM0BPxP 7Rp8\/ BIBipvhv\>LI}DeMrV?RZ]qUu__]d\Sf{',̍3ˊlN0e s gq* y9LrLr$s=܋dx&Cˊlb>G"||!.`b>D O4#L("Aў 9# !"`,NY9D% ǡ*q Ĩx6$ #ej,́cD%9BF['䍂 kGSh4a={ 0dX46S*a aB=#„{ 6AkG 0a3GS3NGP*a3}0a Go{ 0fa0=0faB4 aiL(FAakFc3O:anAG5ARt5I6zME]&o&âE[E\*NH6vWI z*6RoH6RoWI:M*Rt&ªA. tUtI¤ޓh&tUUoIi7$wttM5I=>)m}ħ_m?:m:)o{)? J>}8>):VտoվZZWC%zW_?^_u֗^]i] WB} Vt/JҺ/J~_Zݏm}ح]t=Q[=~~ t?kz⻦MwUF5y0a(}_ͮj%6MUa5Y?~Qۯ _l?? _@{__%o6u_%_^_%}i~ ^oׯ}_zcƗ~N{O{=1']דuE'_ߓ8'W:h~N/zc{u1ccm-Wߎm-KwKKm&K}k5լ׵k|5|55k]׾L"Wv+bA1_ea޿ Stb+zؤ+ئ*˯l&teuSa2:حb+ `_a}ޭ?l&GV˯bTm'T:i6NiMi $M8iCI6ITi(vJM4Mi&M6Mi4;ja $iM=m1(vI 4M4i4S &Fġ#pӆ $M6iêaw  a8a 0iaG 0 A0pa0aAK[Aaa 2\a=A 0 pDraA"9Jd0z0 &L0a Aa$B a* taT#`8"""" """""""""""""""""""""""""#WtZXa B87?2On(fF3%'A҅M0+ a 42 a"dP)@Ò6L pQI…} ˤA"liv­8=-;M$Av"92EiIQ6c"v%N;;mK}.v믪*+LXI߄*8Gb !0Hy0eE0!8$rTc.)DQ3PDGA0egpL%&x&d%90ӧ"Y8d Ķ`E^$O ÑlVLr$<̎ yd(ȣ0fG]ye6y' 0d#B2("(,"|'"|$#ÇF=a~M{ 0AL#@aM0a{3}0aASL(3y0fGS%T= `:að`0f0f2*i6 h#a#X=h4? *&GS>kL(F5 G=* #XaFk * #X`e'wA6m&twoI6PMMMCI*A tUUtahޓzA tIh5Ip:M$߅Ta l:*>hA7a&ph&m'Ia޻ħKv{mmv+v} Vn%:ooPոV~`oĨ~ J)ҽJiҽҿ꾴0Jjm*ҽ=t?]{?JJNc*?cc(?~-o[GjCot?]롺j+<7t5|W? k,jD޿a5yCaA?pFa _޿mo?/7׶o__B__%  ݆}K/ׯ v%ޭz/ߥ_Q?4Y:.x":0__7_ޘt:zcKͧޘ:5'`w_յm-}KKK}:K~m'JP}jҵ5jokvVm7OMK҆柫Eb+Ezv+bbدzz˯bp alP*޿뭰E8/=v]o_i6_av+ 1MX^ˤdnM5 (i&4vTm0M4چ 4M4M6#piM4aiMa $:i6L6IM4a0҆lJT4Ӵi&MiI;I4i4PҴLJ7dnl?G&A‚#L'AA aPDr0 'M0&. a 0X1AL* * p%A;H"9PA&G0xt pDr#;AAm0 0m0A‚im0"""""""""""""8"":__/吶I)/Gia00B#FIbY3^FfZfڼ>W2T|L^W|쳦0L)N32Bgb*aBLFt2 B6 x ABy  G/hvIApv 8;QēX,ː&[awRߝ'D!k?w뮿c Uzn(]\uUUdf#ٙf'2:32:3"d ĐHy@ˊla0da>` pϑ`!0$:=4aAљP23xS|#<гB42:ΆG^`Ђ!#r-BD*g!pe6ga0s'"u@ˊlϑ6Y9d 0dGA{ $ Ñl6RL(Fa{G{ #@aB5 =mAAt40T40TL#X}a0akAF40dX a??L#a0f { #„kG 5PaD*a״ { 8|#X40T=  = ؃AaèTm'I zM5A}tiâaW¤M?m'I&ޒm&i*Ni:O諤N{MRA*Nm5I7U u¤O5IA諤]I %:յޝջo][aN~OmĨjJuv?oտVoC]?VO]wI]]Z^_ti^{{~U便{iz~^iWk[Qukc~=cݏ~kuc߭+c߭Wt\7tV]Ck=t7ME]_a#a6>Y<'0~Paiڇ0>F=>0>l6@ ^z _[u8?mokx@[/ aKm:h0ouN/ z_k~zKK߆xo/ kzfӛOu-/zcߓKzK8S.1_ߓst:ޘ4:zcKͧޘ4W^q?zcﶿuڿmO^HioOQO??a ok5}~k{_5]{紞kkߙzk׾Vk/]=1]E@dueױO^Wu}Ch/J6#+R ?l&k}~tYu[a0E@/=v]o_i6V#)CP*˭ީ4 (i0i6FbP6iI4aI40a#puLæi(v4ӆi4a0҆lJT4Ӵi&MiI;Iꩆ#pbPI &l6Fa0҄MM M 'AapaaA0xa'*@!4‚#a0a8a6MPDrh @A $A6a; 2^%8`اpl( d0#* *w DDDDDDDDDDDDDDDDDDqKK v)80AM|"2i̗̕rWs%^L4ɡ<2Kd… 0B4L(P R aB<|(PpB… …G 8^888;@M;@VZ2&Z!DX" h"?iu_QIOW__דoqM D!fNdtfFeP^fAJ%C5x/N= $!AdthFy'2:4"|FgPDQfAf# 4BH<Cd yx&r@d+BCˊldf"& B'duD"D'I0BhN/֗_KؤIuw_iUE"~=1_:KM?uuN"zN}>:Iݵm'KmEiݴwWPJ:K{_[a3ui~}kV? {_ky'LSa0E@b alP+N՗[ayz e ut[a0E@/uU.b)&֩4ӆLJ &NM1(v#pm'7 4iZL4dnv8iCIӆ $M6i'i0Ml4NiZV (i&w $ؔ;ji &IMFᦜ4aM鴘l4l4M4bPM8i]a010PAG AA‚  7ia#G: aiG("9A% A2^L* A#G8Ds &al( wi 2S L  !Pd d00 &ApDr8""#)DDDFR#"""2K.KK(KᄾJ)IIB   (bS3(eY+̿#2l234LFvL^$\/$PM02Xft0 PL(PM08_ \(\*N . 8;@88;@4&-D8M&o2UC㨝X/%hN޶_]}T__Wu_^ PF3(" "PMPEAfD'JˊlN(#l.dt gJP\x7 5 ᓑN3#B;/3PFВH 3'0p)'GȉD$LAf" #<"NaUgND gqH!9.!8Е&GPfa# T=0ciL#X‚Q00f#@a 5Aa{"8PcG6S.Äh 0a੦6A=#`0Tpa0c*a GL#ao0T=8p3XzxG5(Gah PFgS <#M&m'l:*8P諤1®M5I6i3NRtIow7E[E]&ޒoI E[E]&âH6tIUl:Pސl:AE]&êNI=&p7 :A6mtl:M?Sp{m[VPuo]տ%:no{oVS}[NVoxޜu{mN{Jҽ/O_ti^B_uZW_ZVZWBХut; VzWO_][GVo[noQQ~]Q[?t8Я5Ct?}kz?y6La#CͯH0F#?U[5V#capFu@ _[u?j/a@{Po[K/%bm/פ O_ڥxoNS>]/zcK'LW4_:KzK''__Py:w^NB'KN"/E_K'^M褟mUm/Km/Imm__Pu ~׆ {^[kXi /.)/#]YuV» C`]Yu({eբVM ]o^6#b+&+zؤެ+CS[L+b."W_ 4M6 iġil4&m27 :FV4ؔ;jL4 ii7dnpail4i&LJIiIi&Im' &Fdn4iCMii6I4ᥠ0AaAʚaAamH΂aA7vNMaA ڂ SPAD`;AL*i#dXaaaA0xaL( 00 Aa $aAG&t &L0a Aa"""""#)m.&I%ᄢV)6+0A  "#MfY{;U̍r ̵2)UO5ergʌdW?N0BPx (G¦)<(PS 0P|(]' … PBB`8;^ 8;@sk|NΔJCBce;;믋_+Lz\ u[טd#Y`ai3PFyH$ˬ4M4Ӵi4i4m1(v6ai#pM#pi &LJil8i0Mm" 6IMMl6Mi7i4zM4NL44Mm1(wm&6%M;#ppba aaaaA‚i KaA vA Aa` L  / X0AKà006TAi  29v( aSL $ B ("9L0TL(' AmA0am"""""""""""#)QqHz_UIih\V C SbXAa咙LHϙdfIrm;'cy| 4<4¦(T TL(H$qʑwB_¤xp3f_88;MMM&NӡP'cIך#"vEqt:TI^꾺뮿_]}Uu]+y}uU]Md`!ÜLHL䕐0eR`̎1.)=BDdlK< +$rH<t<H%&<A.!L<2|"O$y33Tf $<ДDA0 2r4>l2*E G=#`2*a*`a2x0T‚ L#a0T=#` o> L#Xa*iAk #@`ͺ{ BPf0cj0P{ 0Tƒ6S a=.ȸ{ 0T*aCM0a &t:*I6|*A諤tUm'I諤ëMP_E]êMH6mph&諤VW OIPMtU*Nti3otVWI諅wA%CN{oVoN{jm~ħM?mħ^m Jڷ`:ݷm)=>뺶ߵoxoVSJJҽҺm/?WZ_^]CzWt5_W]onEoV7~_p+]C~j60sk 0?`<;~a@ _7/o _%/7?/o^7mf{J u'_W:"'ޘNK_EOhד*=buuKv6E }m/:Wm-JEcU4 oPV k|5viZK_kkҵ5=O}"?G%}t}_]o^ױ_^tO^_h]bU^et6#.z`V' ӵ9_E7i&4M6iM& 6IM6M4톚mCIӆ $a#pa6i&v#pa &iibPJIL4M4ammw 4ni#pM6Fᦚ{ $aG 0AA%JbaL 0 ("9A% L d08Dsi0aaaAPd#L& K0]MNM6ʱA4 ];aaa &AAd>"""""""""" ""#)DDDDDDDDDDDDDDDDDDqH8b)x'2zWpFł0F#<#Gx#aa[_aۯ۬ _ }/al6u p/_}7Z7W =imiZ_o ډh'u"h~N'6/zcKu:'_m-_`I->i^q=PECI}_cm/m-~:K]EWQjkǿ׿᩺V4[75kP᥷K~k Njk_]oKbb)v+خNa2:WNwV۰ ߐD-ՅbؤlW]XE]ETNPam4NM6 -iġS#pi4ڦv;M4FLÆiI4iiw&a7 6I7 4al4 (aC ' JAC 0 PDrvAl('v@ Na  AaP & %M᠃"9SL d6Aa/ $G)V('MDDDDDDDDDDDDDDDDDDDDDGDDqe" *"""""""8]_m_/i~I-uIt%Vݤ ҄\000J+J"&:h(A AP&Av5o;k%^l)eq2O$!.X(PS (eL6s*aBg\ia (\(P ] ,PB48;mApv…[j&'^UB,g`yXQgbh|(T]޷]}uu^R~_]u]~quUG_6#B!9# d#AfgBy HxD$L9BjB\VE 9*<"(2: ̎0dGFONEGDmpS6I)Y1'#.)92c?A諅=}tM6BߤM_<n%C}SյnհbT<տn%:vVlħ_J~JOu] [u^U'ZWUtZmokQknůov[EĚk____=_aC{+ W a5WnF1?Faͯa=pFa?{U _ [ @o _@k_7/%oa/oXl7ӯK ~޿ /^IaoK w8K zK.zz%Y:'Y~uu$K8O8Mg΋~-'_y?K}_Z}m/I~:^m__ ~_kAk]˪O銰Z(T 鰙Yu˫.zb/ =azJݗI^oN;."W_~_Toii &lJ4l4i1(vM6Fi +ILN (i4pai7LM[aÆ4MRii lRMMl6Mi7i4zNPS@L 0ba5a‚ #H2H aUAd&imApDr a M0 4aAAaa00 h0A 0 Aam00 0QDDDe"""""""""""""" """""""""" """""""""""":uId KHg%ᄂA(#A  "#M3;'yud"S2'̲YfS;v_ ẏʙʼL#aSM0SPBx (T<(P:gCL# 8_…pBI…pB  |-vk 6h8iGX|T|Qy&|I҉…Qww[_'___6ٞ3"Sx3Ђ F&Jd*T<sgNAzAɎRC Nlfy`Ȋ>E##i3iy"'Agc"N`ȠN$LG<F`p<"a5dB!"`3>Fг2rO3!#dgh4 a FS 0f<00<(F5 *a0ÄkPT=DC`{ 4*iA*a0f=0ak3L1{ 0TT8*aƒ6Gf`{ 8pdX<#a0f8pi MP7$l*\* ¤N:*&t(tUf6aVW MtUtM諤O PhUêMwR UU 6:*')>Ĩ`Ĩx:v߃kNmzn_m J>q)ն߃~+~vڷ@=?m--++K_֖i}}t5_뮽+]uu~cuW_?u]_-c5C>|W_B++o__-PFUF0a ? ?jͧF# P~[k@ /_ۯPK%o_0K/~zKKK_8//Km/~~NKoWZ_/E]דK%:E"u]^y:0_i1׶(*I?_ﶖi?調k w]~_5ݯ jxk|5׵}]W׆l&N)/V]San]o_WhǽlRaث 銰E@b Ղ*5[C ]SeV b?l&GZؔ;jm0݆lô$il4i&4M6dniMFᦚvm27 4ؔ;iiġ l4M4i&4l7a 4a;M4aPM5M4Mi(ww aL0%0aB#"9aT pDr AmA0am %i08Ds L 6aPh 0PT"aK06Pj auAtaa!A1 %6PDr*˃L mAPQQq8""""""""""""#_W_]/UjK$J|0K⡄iB{aAa """# fv?|gsȶvO;1̉&w^-Ų|eY*3ONPaS iM4 2g̐#aS ^t2B(\*<=' hhvhhu[X,DhGIЎ"KЅIQ!|*M#n(.]u_\`]WMe.Eu[[G&23D$LA#d^g KL9 LPx&CD"b*#d|<"a0d* Y.<A*\'Ǚ1ʙIbfGFNDGFm&P$9VKz9.!0$:܋dBDBDeQ!0$0HKRH2%hYfpS|3vA=83+M0L(*a0a0{pƒ6G0TLpAB=(GS00a{G40TM0S 0a7= APf`=0TAB= G fai#X=k GS5A}tn:**t¤P諤 T BNx]'w 6^R E]' M7m tUUâp&o l:*5A}E]&ªAH6tH6'I&ޒl:om[V{n[VSN}bT=SA[unnouVopbT5n%:ջoV[m z}x_]W֗]t?Хut߮tJ꿯Cui]m֖t^ook[uu}/Q[E[[[⿿⾿u41Xh`{Zx_>#F?j0aVF/QA{U./ _ Շl?-@_!u /_Ampo a_޿k__j7ݿik8o޻}֗_EZw_~q>Nͧ4IuL'WI7ߓ-'_:}KcKm-Wm[O__䃵k/ﵵ.߮׮W_J_5_ސiZ[Zk_z]{բuC]o^z/(}_꺴P+l&G_LUW)?*u~_eױWO][i=v]{ LWMl4M4M6#piM=4bP톓 $mldniLôNl4ObP8i48i4RI24I4M4i6l4N6iMIl4i&oLS $i %ؔ;i6FIta$(* 'M0&/ &a‚ d6A0amA4 ꠈ"9ANA0xa(   !%BAPAa0L* K7pAAaB#d: K2; xtaAL&‚ L* 5\DDDDDDDDDDDDDDDDDDqQDDDDDADDDDDDDDDDDDDDDDDDDDGZKK&IB\V⢞ aˆ6/Ƴܷ;#=Fd[2 ́rl;%ȶwYSL(P PB0(\(\(PpX;M888;@EaxF̍Qj U_}W꾿W_U22$F`Ȑdt42:"0dBYH丄<&T<!LrIg%I3PEȜ 1"4D(, lBq )PE&b>F8exS| $̎9D'%Ca 0x7̊ٞ 2>22?0K2kPa{"0a{Pc*a L#alGS`* #`{GS a00a0aaAS0={L#`{ 4=AakG{ #Xa =0T=0f0a<#a0a L#X=h40f0ap64諤I¤6t6xtUUl:*UIꓤMVWI* MuIN:*;OIaVWH6i:Nm&} i7MTm&ti t MPP*7nVۧSPN[ޜ[PNVޟտ[^%:%:vۧV{o׿֗Хi]}Jw괭/R//+JRҿJJKm._ݏb׵V+~-u}n+mv:ڍ{_u_ W1_?+C x{1] WCakk#ya?yͧa#a0as0a+>ؗma _ _/@?~/ [mo/_ K_ 7,7/_K :ӯK77_i} Xo/K ݯ_Kb|tt'Y{KD/_m?uNu~y,~4^N%:EtOL6_ﱶﶻi~__iG_u[k;Xkk o4[]a k}k . 5_ڵ5#'w/#.*u]'t}=}b X]dua2:PQ&+bzv)tazEF]1Vb*oa0}o^X;Mvl44lJil4MaIIi7 4M%ii4lJlJ7L6Pi6M6Tpa8i0i4La4MFIMCUI 4ڰm00 'G&Al(*0iAaAtAG xa&aa‚ aM0 0A &a‚j T!0 0 2Z G L("9PdAL* &AA0iG w A%ataQ"""""""""""""""""""""""""""""""""""""""""""""""""5KKi% a+) a<ɖ^IFW2; O;?L(G FuΆL (T…R|(PQ(Ppm@B8<Q)i!Ro% NΈ_UqWUD% Ǚ#s#|)Mx'KN%C%NfG8g1y("\ ``>aK`aY0g Fy.BDNFPdthPfaB5{F a6*ik { 0a**`=0#X`{ #`0c aL{ 0aG{P77mtl:MM$uâ諤M$tUU®i6m}4i8PhtUE]&êM6i:M}mN{ħ_{_m JｶJӃmmJuҾ++JҶi]W=i}Vt)^_kuk WCWnCCb _= VF5WapF= "ߙAͯj 0Ŀ a _@k@ [K%a/ a^K/K[}yN/_K$_'_uN'^NC|KK6I'Im/m-K w45׆5˯Vb-1_uS_)I鰙_ev]{[azb4dnpdnm0M4i4lvM74aM-7 4ӴiNL4;M4i4{ 4Mdn4AaaTAA 0L MAM  0MAA#L0 A@PA00 :z0 a4‚#aDDDDDDEDDDDDDDDTDDDDDDDDDDqWRHIib qYW-A̼ NE\eK*fv&f@yWE6 $ mH*aB< *a aL*iG ,2F NI…I'I' ([AA\Uh&&mDqPHk]qZ03BcY"%34HC4#.)5g 3'")Ԉ2("Ai3 vٞ B<2232:"3'")(FpB3 d31f#2:%PK3<|3, B'2:a 0f5싇S*apa kPa{"0aGaG{ #X#dAPT5#mAB=(*`:a" aGf { 0a {0TS c Ӧ GÇEza=&¨TzNi3M6t7A*M:tUU 6mtU WI I‡E_WI tIha MROI6CM$E\:wItUU 6t{{ħ_Ӄ}ڷӥ{~mӫm?}ħVj߷JtD^mħJ߫vݶ? ]i]^IuU}u_Z]{i{}t5]t54?u] ^zbMc~Kw4TbK-t?++_?C5Xj+PCj 0>a0aWCa>x#FT!_@m/moakà~.Շul%_^KN_Pڄ oAimz_km__7]o7,t+'_/;+KK'__oLtǜO:zc3OI~f+фo"FiuO~׿?n*k .XkZOV_ڵ5}׵kxk SثS' +nL v*˯zl&G[i6׿.޿޻.z޷/ZEN]SM%ڴi &FIlM4iU1(v#p6Fᦚl4dni 4i1(w=0N4bP톕RpM4il4M4i&êa *i+#pMo &IM6LôM6I (@ A5 a#L& 0 L a( L& AAJa00 0 (-b%0al( ipata@ aat$K[ia / ! 2D(& %6PDr"""2DDDDDz+/+Hi%ixa(a(a*lSP&0Q&,yd2Sy<2O%%,Fd'#aSL*aS 2<0 vO:gCL(TC!' pPP… .*<0hShppVh*I$ JY8QJABCBؓp7FwwkW_U\^./믋W_Uu_ɴž,'G2r4 L<Ha sND!fD'JPˊlN(#lB2:P\x7.HH$rH<3NAIA# Ȍ0a0eK ᓐD'y?3#œ3i΃.)=BDBDe6g 6GrȄ"(Gu&AL(F5 L#NG= ӄh #X{AF40dW a0f&<8FSF40aaASE=0T L#`0f0T„k5h#` o L#mA G=b(F{ #@aL#I0h&o ttUm U I&ޒm&oT&|:êM iêN:*3I:*ME[E]&Rom&ïMP_E_WIzIp:MH6Ro!PSm} J=>ħ^)JuNmz={mJt{߃oҺ?%ZWCХOO] __~_ZWUt{i}WtХEQkkQQ[k_+!}W/CWC_C5 Q[?t?}wa(}0Y0_10mx#FC#u_OV@ _u@ _[u? v/~/%%N:__k_V_K}_Vv%m{/_ND1ߓ+tuO/%S_~N/޲u14t~NEu( ^{i"k^ڶWm_umﶓj_~_[]~_CU׾K׆ (iZ 5j W^k +^O^{alAا.*Wb(~LP+.EbPS#;Tj]{ K~˯ح+R ?l&N)zح*lÆi6il4iMFT:jmCI#pa7 6L4bP4Ӷ &FᦚiiM6M6FM6Fᦛ#pݤM6iMFV4ؔ;iIuL bAM0&aAd&iwiPA6aAʂ 5a4 ‚ AAAgdPAAAA 0L MAاpAAa;pm 0Ab"""""#)DDDDDFR""""""""""""""#)QuzWiz]}u}Vd\00T0Mb* A (lLdjdO2ZgbVA3!o5fAK9|ȯ 0M3BXΆ(PG… g\pt/Ptxh… pB  x;MV궶*fDНC[b&o)kȚ;Y,Z: GxGz5'#(]u__GZlf  p0a y ("d`!В9("3H K2r!m+4"D'9!PAaȶO !"`"r7"?$0n%nE|Lr3"|o1#3GF3  i6F)=gAABYÒS%^x7Hx'x,aLr<9%Y Đx1rXE\HxN4"dlBYKO$rC<0yb>F|6#23*3<40T L(G{ #5`CaP2x* 0ah(FL#SXa L0fpT=0aT*aB=(*aȵ;{ 0aAM0<#a|8pcl0f0c ^GSF#GSG{G S AhP'I&}&ª_R I‡E]&d鴟&ph& E[E\*CI‡E]&a uIUl/uI&pWKWIi76Rm'IU E\(tUv`Ĩq)?ĨiJ J+zӃjzħ[mħ=VVSKPNޜoxSնt+Һ__Ak~ХmtJҴ ZWBt?׶}uo_GZoO׵]_Z? t5zsj#aktKua?ea?aF_0`6ͬ_ an@  _@o K %鄿߄ ,6Xoޒ3_i% I8/ _}a_4W_Oi-IfuI}דK_Px"_K8OOLvK }Q?kMIIIm/ߎ45z}{Z~^55[먿 /I__J]l}}m>~?b 2#K< q Ą4hdt`fA<A!#LY,32:?d(2:4"r "& 5Ԑs4 PE>aFbВIY)!"` 0?dNYNG0GB 3#œ3iK!?2r1B=8}0cl0f?#X`L#Ç5 L##Xl&= aB=* #a0c*`=~ L#aPaL#`{ o=0S 0ci#X=k GSÇL#X= 'wIzMtU‡E]'wo t6a*NR 6WIl:R E_iE]&áNm*NzM$u-:*:M_JJu`=)t Jݷ{o^ [NunտP%9:@)mwAJK={iu֕'ZWA:Ҵۭ-++-+v=5[cVc[[[ V-~ }=5b[??0#5_a9ʹW18#~jl? _ _u ?@_! A/ [ Kzo7}I7_iiv_.ډ/*_m?V6u'_uW_:t}:޲uߓi~(mC7v}>ii5޳޻k_o3igKk ҵZk_zC밶a?] 6m-}]=t6#دoNӲث˭Ҵ.ҴPb ҷT -1^]a0E@ &FJL4i7i4#pi7i4޶%ӆJM1(vI4ii[M6&Iai1L4aPdniġ %ؔ;i6FI7 4ؔ;i<!Aʂ baA M  2PA8"9B#dA‚ taA1`aP/a  dA1  2SiPAiAgPv+j A"""""""""""#W]-iZERKK,RP0Vi|&A ""?ɱnWʑiy g|.d'\K)|OyC:Pa)ڌgB PS vKAB *aB…GaRo *<0… #@aB .,*`l$;@[ 68?"H6;t>&g`*M-gfkzGzwT_?/IW_u꿭dt`aBYKN$HD(, D9 9.!8Е9#<:# ?2A Ƞ03 PA0ejqM8)>D|hYdPE4AyH#l B(/0 p!.`ȗ' N%C%NhG8g1B=8}0cl0f?#X`kFpT=FgS ? aikPc G{ #X= 3}0a7AF40dX aGS0T5L#aÂa=6@:aM0a4a#X~6ANuI&l:*:MuIhޓaom&ïBI¤U Ni:A*7諤MRM$LӸT&M7l:*>Ap諤6z*6mtl:MM$uĨħ_}Om)xbT5oV߶o]տun%:n%CVۧޞ%CxJuߡ+//~++z^Z]u}i^_ti]=t)_ipipuu_]I]k_ƭnokoukkuBt?[?vn![__}C_{Wn?0FU0aͧm2#uO̯Vͧ5\#~j/ _? ]Okx@k@~.߄  -_oB[k넿޿ /[KzH%K./m/޷KK.6KuJh/ץ[N8S:zcK'LW4W^NE;z'_:KzBm/ߧm'KҎUm_K}m/m/K߮z_  oկV5ޞ_߫ 5Z(~V]vT/# V]alP+/Zb&dutL˯b+{ TsE *1O[a}i=Z(T l&GZUeױ_[T  &FJL4i7lJ7 4ӆ 4dn dni7 M7Ci0҆LJM6iM6M[#pbPi&oM#pMCi0dni(vpvii7 i7 4'#P@("9PA )إvAl(&AG*06TAi  3P;‚ %@Dr &d00 0wiPA6a%!40aA$B0aA TaAa  m0a6TAQDDDDDDDDDDDFR""""""""""""""""""""""""">zIuimdH$WSa(_a0L&DDɲ2eLםTʬ̔fBYL$e%}0;Q '22T„{ 0j3C4…L(G¦^ pT…    : 8;@@ʴ8TSJj@%mt"BBt$j'gXwk޷\__U]W_믪꾺}mz[G޺9т6YBqM f/GAJ/r> O%OABD" yLrO JgqH42: 3(#3NXD'%I <.B\baBqH"\Sfx pϔ(*a>0f0dZa40Ta{3LT{ 3PPT=u73N G5t3P*aB50T= a G5{ #z`‚ Ӧ2L#a0f0T5(*aȥaA4h40 {:*;xP諤"oI6KIIiM諅L:*7'âzMP7IêME[E] MAzzMxuIIN:*3(AA6{MRM$տ%:/ /տ}{lVoNxNVޟVո{oSp{m[VPuo]{_t_t+wҺz+KҾ+J?i}W~]ukvnZ__na~{Wthp__5Cߚ`=U/2O6_F 6La#Cͩس۬ ]?ۯ/mo [ /_/[,7__/7_݈oK^q?V,y:E_D~N/'uE/u"N*4I{]:mC?m.m/}}m-E :6~ }?}5zxkK_ z omuXkkKkE-_"}+KN`W[io[e%l+t}+b ՗OOZVCuWLWVa} ueX_{ U4ӆ#pdn 4Ӵ&ײ7L6-aL6M4ӶiiIi7 i7 4zNIiҦ;aa &#pM6im5 &#pMCNiZL4dnuLæ08"95iA06m00 n TPXd0 AL 0  aPaML@sPNAAa*‚ BA0:0 AaA &ad&iwi""""""2"""""#WWW-uJ+K Ea(a.b' `q،(2252_;W2ye]Fe|)F4,дCd2 #dfdt392)3̎ N%9$ 1"9љהhDNdthDBy/>6AOj)aF 5Aa{"8PcF= G=O4{ #aP`kh4a=B5#jB5# =(*aȠa<#a0a{ hL* 0ah #azA=0cGM$uZA tIhMRM$LӸT&M6oUm U I&ޒm&i*Nh&i*NӺN:*3+MTm&tIފUMN$ޓi6M&UJuޭħV~~OJu1*뺷j߃Ĩojħ[ﾽ J+k}{oWC}}t5_I_Bum/Jҿ{߯+ҿ+Jz= t^WV_[~kQ[Qv?[?w*騭騭u]C8{b#~mCͧ/``@=m?0F^aØhja^aØh/ۯK@l?l?-__N-_ӨKm}za av[]I}[i_k_V_,7waޘ:ד]/zcK'LW+u%:tm>Nuta9y:tm>Nu_ױ*Mi?Oױ*DKm$U}%Km&_}m-I5׵jXiZ׾OZ^{XiC[9 xkXkK+JҲzWb(~LP)zا˯bث a]Nha0E@A9)mZUh ]ث X"WoLSI[azb.7i4ޛ $i&i7tղ7 6%im0Mm0Ҵi4M[#pbPjm& 'dn4M;dnm&#pL6NMMCJZl6ipiI  3;A0xaa ݦmAPA AtaA8DsiMݦmAPAPA6a`S B0mAL0aA0 Apa @L0aA0 AqQ"""""#)HDDDDDDDDG+-/K꾺&’ViZFJRVᄡ&1[ A  bs"33 LS$V[VvKUfEC3F0M0 T„ <= p  K mmV hpvIpy6H i6v:TA(92CYt;[KWUuKڣ[KuM2:%dK/dn$#TNdt Ĩx,bJ>Yhdt{0PdtgAFAF` :f ᓐD'z4#3i2|xdNDGFfGE^fduٜ1D$LAO! D-#d|?2*8g0OlS|ȆFy{3e28FS0ci 9{ 00c G* a{G40T545 = PaFM{ 00T=0a{G=L#m@LG5 G)L8GL#AaA{ =6A G=p*t&pMMTi*NR C6&MNmtl:MM$u Ip?AWH6TpWUm&ïI60%pWIl**I8uH64aWzħ[Ĩi~Vp%CVV][%9ħJ={Ju=ĨjJumO+j~JJ=z_~ҺzKJJh= t^*J}+߯C]] ~ױ_[[}Eok_[Q zV^+C}~+!Ç5Ct+tc|]/{a9?5]6Ë?a? a?an/6Øw nu@o7P% o_l7 o[PoK }_݆xo^/m/ ]%kQ?hu:ߺ'ibiE<N/ץ[NE<Nm>q>=1/1^m?UutO(ݴWm/K}m-IKP?}SK~k~|5ᯯk (k}j ԧZkڬ5V]vYuhi'azE@z _"^) +ޘ+˯b/eձI'4? anduH' 4i7 #pi7paioMI6%ӆJI7M4I4ؔ;M4i4lvaP҆pNMRil4iiFI4ӺdnI4v%am&TmA #P;;L("9PaB#!KaAa"9 iG K6AA 0L MA#AH4PDr#NA0 0 AAa4:pi("9 vP. PA$008"""""8DDDDDDDDDDDDDEDqe" ""#)DEDDe""?m_W__z_mtz_iR[vVw\ |0V0JKiZmB'P0`AC@60QY"܌zet;k)T2R;KgMι ¦ ΄'3x # 0BC*I,(PS *<0P4G4 `t%fB… 8U`oh&wlppppvB {yĩ7gf$^VW;;[_m}}/ݿ/믯_/ŵս}]}} pϑb("e6g 6GrȉA#:%O2##N%CbktF(!#dfEhY/j'2:#0dBq) "ND(," #3#^`)PA2 3"s#B3G$9ah#`7AF40dX aGS0T5#Xa =A'p= Pck #5 Gf5 3"0T5L8pcL#a0T= ){ #X=aL.G5m&ïm5I6i3NRtA6l:BI諤66RIwH6B7_i:ME]&z*6}l:*?E]&m'AM&tIMPi6սwNov[z}VSPտ[N_^ooz{m[T=SxzwI]ZW%ZWO] WZ_tn-+/+J믄+KJJn_[+ucZ_0yص>ب{?7MEn?-د+C{?___hkkt56(@=m00F~+=j0Fm e~jmo8@l?8@@ __\%a/k_V_ni}__w'_:zcK'LW4W^N,Om:_);'W|XEmQױ*MiitE}m&m-_V _5]{4xk=kk|54[[ONv]{v*A9)1O[duazE@'= *_azX"W_l/#.C)l&G^e֓L"WLW1MoL4iS#pdnlJ $MlJ7L6-ai7 i(v֚iÆ#pMI4aM6%i8i&M1(vl4piCiI%ڀؠU 0wiPA6a%bA 0b%0 &d0 0 `4‚#L 0 AL :Al(*0j AaL( 0 PDr LL((DDDDDDDADDDDDqDqDDDDDDDDDDDDDDDDDDjIRmKm$A-Bh$ $DDɹfdFey+ɖE2v[<>e+: 8G¦0a2PL(TB…B ^;@Vvډ! jNʴ8T\,r[[_/ku~?__df#g3PG8g(" (" $ S!hB\9r6YBqMM /dlf B3A0ev#?22H?PFyfy0TaA00ab 0T@=O4{ (*a>0f0dPa40TS0a Ӧ0kGa= G‚6mtoAC6l:R E_iE]&‡E]'wo tM_âuUl(tUtl/a&‡E_omm~ JħX:mj{ڷħ_OJu{t{ħ[zCui_^%t?t=i_ZZW֕Х}zE~_+ ?CK]_=6_'?FK65_@a/P - Kzk~z_W%_]Kb'_ߓ/'^N~_6!___k~ ҵ߯_z5k5~! -eiZO]^բ˯]+KPl&uW)XE[tM4iRilôi&Mi0Mm&pdnlav#pݤzlJ 4M4ؔ;i4M6i4Aa*06aB#d: K2pv(0AtaA08"95iA06m00 mAA 0al( ¦A0Aaa ڈDGH_W^]D^K % EXخ AˆsLdT!gqO<ȹd2;XΆt gC"T™i PL*axP4B\/ Ip­­;@@;@ {dbQARmUr!&vXQ;坌CU[_#m//믯_YCu߯믬xˊlN(#lEO"!|<&Ad+# sPFyfy ȟ0eBy)ΆGE>`Af "BH<A$2r4G?<$ȣ1 K2r ȣ0!0%BGF\Sfx pϑ9#dghDD%J 5Aa{"8PcF= Gm f2*`0T50c= ?Dsi*a FS0f?0T*`a0c*a GL#`:aT3|#@a 5Aa{"8PcG6Q14iIIw a&boH6CaWI' ?E]&êMME]' VWIR E]&}t6:*i77諤AA6{MRM$LӸT&|:߃oޭħVmFBBPpp|*NUml hIkARmEvMbvQʄK#m/Z_tu GF2Af B(,G8g1B\NEt2:"aBDNdtfENE(,3NAJgqH8dxSeKp3'#<24D'A!>g2\3AFaBaH"DGDaѡ Љ )(E9fd ĐKL? #=8pc *a0ca= 3NG50c= ?Dsa4 L#a0{ 0cM0a5a#Xx*ik ֘G‚T0T*`3a0a00fF5{"٬0c0aaL{ 0c3LF੄{";NRl:*:Mޒl:*6aCOzo^M6m tUphޓa*MVWI4 mptUUl:*MCaWH6p&oIi:NaWI ] uIoIxP諤uPV%:%:[DĨoݷOm)?~J=1*߽8=ڶ J~ħZSmk}z֖t ]i^]=ut?_B]Һ+J?]{CB]?_oQ[{kQknGE~롯{~++u⿿+8h]C{ =u0a(m?#ׂ0Fcj6F?FaͯaUO@ak _@v{t-U|6k/ /%%oo__7wvXl7~m/瓔''_~}:__Nx"_KKz'_)_/bͧ:לOu]:E<Um/}}K}ݴWm/Km/I_Zm/}mZ}߬5 ? oҵ k4_k|54i}uh]1^LP)=;uU.J+)zdu akIددE@du.* l/]1_׽m)X"Se jt48iZM&m1(vJMm27 4ᤛ &oM 'aPiIġi6I4M6F4M4Ӵi4i4m1(vi7 4iZL4dnv8iCIӆ $am0iiɵؠ 0 PA‚ :0 &A0#L2GD0v(1TaPDr d0aAAL* AL*!L &AaAtL( AL 0"9L4&L("9A0 . aPAAA|DDDDDGQDDDDDDDDDGHD}Wɺ7JQ_ % %OMbaA DDDb2>dW󱬂d)I̗̒Qι aS G 2(Txx_ }&sMA…[hkIuBv 9,B'd&ww}qq_M}u#6m/Q_k)!Zm/W943 ^+O+A* duՅثE.LP+A5 e]1W_l&*z7 M4޸i4pM4 -iġii27 6m27 6F᧦ġIM7M4 &MplJ $6TASb#aA&am00 PA08Dsit 5inaAAA06iG*Ds '#40aAa""""""""28""""""""""*"2#"""#u]^ii]tum)6$Ԥ+Hm a(a(a( cLVh+ ` 0L DDDDD%k;2fWLeyٌ}rY+s| *i PSM2dP)E T / ˤA{@488;M4A,vBD.-PCPJh!'A'&IUUǦQu_U}E%י "||B3A0dA PDfa#hdthFy<.T<BH<x'KOIH"#1"r(,͊pAfg4 O%3O x&s $H&9I Ix'd& ÜLKMa *EɎTN`0g !0$l 0T5#`73 7T*a0a ੆h#`7= *ik ֘GSF5.h8pT5#`kGSM0L#S a{F= F= 3u0a7= DscTP4cGhL#`0fFtU T&ïaT:NaW‡E]&âH6ph֚MTI.t&êNzMPhP諤̝3rm'A6l:*&l:*uI*A5&¨TzNi: tMPMm[NNo%:{o][xnxxlյoun_{oNV|*'pbT0u^ouuХt=t++Jt+ҺJjޞҺm-+?OZWU[okuTVG[wOW-v*?CH[bzzWubCWa6ͯu0d61>msk{#j 0@_t-@oa 7k޿,7KE!Xo kMXnKuߓuKz'^Nuߓ'_1IgEo}''_>,4_4_m/m.ݴ?m-m-`>ڶ]]mi u^׾~iZ4}'K_l&u˫.خb˭lUl&G_V`V]1_ Hazbbˮuz~ޟKm*ˮ/LW_[.*iMCa#pl4jMi4l4NM6l4M4dnIdniM6%MCm&ii#p $ia6l4OM6Km$bPI6pdn4M6M6Fj00pl( :0iTaPaG 0AA%AA baa4aAtA 0 TAaa00Am‚#h2^A  %A1bA 0&"94‚#h 0 QDDDDDDDDDDDDTDDDDEDDDDDDDDDDDFR2DDDDDDDDDD}R-/ꫯjHȜi~**JKS L `8n3;5̴fJLkyYɦv̍rYwSL(G<(PL#i+C:TBT *NIG /ih ړda8E/QDI_U__Z뤶dt ă$A!a ^a#d Qx'd'.x,q$rT$yGa( Bdx& `PO YdO pY8e PDȂ3 wYg<23#0!f >aBaJ#DH"s#dthFy'2:4"|Ŀ1,?2BDx&l`3a0aaPaÃ2x*`CaP`k #@`k~F0T=a{ 4 aM0a7F{ 0T5h40dRga00fF5{"٬0c0aaN0h #`kPT=U5 ' Il:*8Uw‡E_H6CM I&&M6tzIh]&âC:**7諤I 8uIWI AA6zLޛItNl:?A6m uI‡E]&`*Am[n{oVPS__um-PN߶պuoNյom[%C[VSNSjޭ߮.A~J+J V֗^Ciu]+zwzzRk~W]5_;_^N~5{__v6?+uZ~⾆!u*+⿊Æq_a?'i35_aW#F#aװF#/ _[n ۠l6? __ o/%O/_%/%//k_ ߆/ډ~h~-/ty:u}~uh),r>N{O4W]]_}m}_vm/}BmEkݴwm[WE ~ /45_oui~}zziCJ׿X"OMa2:P.밬U[av+ئ*ˤ/Jazޛ L ].* l/]1_i6b ta & &LJ7 4ؔ;M4l4$ 6IL=iI#ptMibP톒lJ:Ni&4ai0ii#p &NL4m'F $ؔ;M4Ii#H2H A ڂAH@Ds6A aAvAaaapitaaAa@PAl( i0l2S Ad&imApDr 1M0Axl( At!0""""88""""""""""""2DDDe""""""""""""""2Ҿ,IZ]i|%C pPT)6)A (6́eW;&K3.|#43^<糵C% ,M3 #aSL*aS dIi (Px *i' pPB .;M8Uvi$ ZYt8I&lNΔIdBDD?[[몯u_37몯u]moeJ>& x 1Ђ!0<9*K2r%ȣ0!0$rG\Sfx pϑ9#dghDAD&J? e6g5 0 2a q# : <Ј32A? `!5%-H25f>bN"Z_RO{kumﶖiui$[i6[j5_5]{4xk=5zZkWXk_ᮼ5C__9 +_[_]/b-_%L)˭ةT ˮCث.?bm-nuLWOM..خb˭z el#pᤚm27 i 4ai0ii27FġPa6lMޞM4aU &H$ʴ#pM;I6M4ICM6MI6ii&4M6iM& 6Im0Na#pia0L* AAa#G: aa8a6MPDrj5MAaS %AI &Aa` L  %AaB#A anAt n0 KÄG0xm0&aDDDDDDe"""8DDDDDDDDDDDDDDDDDDDDDDqDDDDDDDDDDDDGHz^__]vK %bbLSb0Aa DDDɱ|3<#2de_?gjY^S帶ewAs*aB#fU6aιS T™C:V(PS…¤H076ˤ. 0 ?Azv 888;\|Mv I2/Vuԇ"MUz[[VR_\zecu=WW_U&hFGFiyH"c.)=B\ |3AD'/3]0HBl"%H"'"x<`"$s=BDD 9*Js%Cޝx{m}o_( ú}[}uոVo[%CwVS_o}KPۉPպpzZW=:VB] W]:WiB_ZW]KJ~JҶi]W=iF#BSd`}EEn[Gkt55=?} k{+j+tC 4?j6>ͮm1?퇫?00??F6@?03 0.j?[v/ۯ}m7ӯy>C_K_ӨKm}7a/nz}.K//m/{;K:.4_{'^N4Y:IE)wwIND1ߓ+tP4_:'Y:INin[imiom[WE$i?׶^HioI?M /^ {_o=IT_JVk5_5]{4xk= a_ a *t~Lح)EF;In 1O[a2:A*eՅ.zb/v*A9P*˫EحI?)V/[LmCIӆLJ&M4MM6aM6JAlRii1I7 i&ġil6LM6iJa#pӪdn5lMCMm0I=i 4imiM&paġvaA4a0ba0taa000 I80ARSA06Ad6L 00 #M0n00j&‚ ("9PA 0S 0 4aA"90 " DDDDDDDDDDDDDDDDDDDDDDDDDDe""""""8DDDDDDDDDDDDDDDDDDDqK p]MN Aq/;.{2"ّv2Ocy+ɱfv+' *a gd 0} 0 I0‚ <<.׃@@Mf@HNӡ"́Y4: &lqu[[uuu_뮫߬G0G0g 0B"i3d!3(#0{ 5]ÛP?ؗ@=/ۯ_o_K a/7aKI,6 OW6o&'Y:uNф:uuu:^%NSכOu+'t~~D'4Y:Oi_]mii_{k+_[ڶ_k oP []~_|5wޞk|5^P+vbzl&G_WtuUt}_]o^]{]'eױOWV]lU^bm&)w맫Eئ*#pM;I6M4ICM6MI6ii&4M6iM& 6Il4i4i4{ 4ai0ii#p &NL4m'i&viIi27 44pa4jI &Aa` L  %0 0 AaA07 : K6aAaaaaOAa#G: aiG("9A%!1LPh2\A"9NAG&A0auG  4QDDDDDDDDDDDDqqDDFR""""""""""#DDDDDD/KZKK.K&B   ""#M ³y+̯)VW#yVE3IgdSʯ *aS S gCL쭚 =0M=8Pp\(TxhA#4 pppvh*AJ;:)wr i6($Z d"ES;Cѭ_uQ]}W'_UKcԛG0G0g 0B)0g0C,g3PFyNBDNE ǡ#e6g 6Fyfk2:P^yHG/AF`b I PO B慘0@"I P2cBS<91ʙM9,!0$s3("i0T =0TFM0a =00f#@a 5Aa{"8PcG6Q14  GDsGSi=^0ak3LGSL(3(E`4k # a{G{ 0c G*s=0fGSSG,B= &ޒl:**WIA(tUUl:*i®M5I6i3NRtIow7I& E_fTIi6mp&iWm&nM:ME]' tIxTaWi3e tUmmt{m~O)ׯJu?ջoտNս[V{oo_VNVջn_U}+JAK괮+?i}W{?O WS_Хi}i]W]{]?_B]կEkuǯQ{Eok}oB{⻦Hp?+?A5_PaicOal9?0 [_a~-aa׷_L%Po7 a q_նa Fjm/I,6 Am/Kd4I{]:b'DEb93PD"("|Ɵ&33 A_$O %dLr<9!IkӰāA fABaa侖JH3p3 1 y' K2%$Oas#ȐˊlN(#l噑)2:P\x7*ɱGSM0akGS*vAjPL8pc G*Xka*iAk {0aT*aB=(*aȢF0a{ * 0aA G=b(F{ #oL#H6Ci:A諤tU]& tIhC2D߶4iâRo CiâCC0E]& \* jm&f¤6RoJum:mVSm{m[kv`ĨĨ~?K][%CN{=1*뺷zħ[+K0t5_aUAZW]KJ~uߵo V߮]v?W-}[=z }W+?WK߿+{_wMEn?|a0mbϿ?F6?e/m _nioAu@ _[u?Ok7-Si___ӨKm}77i%_~פ O^u{_Ink__+/t"%Liw$m'm/Pmi?׶^Hiouk4^J~kkKj[Xizzz_Sa2:z u[.EP¶AZO_X[.-鴶)eױOWV]lUH'4PE8=C+m&ҦI4M%i&#pNA0II7 $M6FI4ӶFI=6JA4I4ӴNIO[L4M;I4ᤚi 4ai0ii27FġPa6lMޞ aa‚ m0 Xbpi@ amAA&aL ȓ AJApap ` a!1Xh2^A"9NA06 0%@A0L L' &ڂ TmA ",1QDDDDDDDDFR"""""""8"""#)DDDDDFR""""""""""#_W~}i}^Kᄸa*lRiIP   """?ڣ#2\_+f ɞV,̿)dcx *i (T¦ȗ: IPBBG;M8U8%-CTZARm&#W> ~u]moY6SŘdNF 9# !8 |f r!N+B܋d`1,<)("\3 "rT$ye6g 6FyfDBYÒS%^x75GE9#yf dNXD'6R&AL(F5 *`3aL#xG=G h4*aa4 L#a oh #X{AF40dX a0fep7C?(Gk  0a싇5{ޘt4i7H6}&M談E] ސm&nI4huI7E]& \* jm&f¤6Ro tIaWIiH7%CN{:mmjޭo)* J=>ħ^)?Ju}OJ뮾Aҭ+JJO_ti^BCCVEoCaQko`ۦu騭??(}|׿>0>{ba#F0/իmk@ _[u?@ߧ_޿ N-l%K_iZ_}նa _/_)bu맯uu$.1_ߓ'KbI} {imOױ*[i?__T׆_Pu]/b-["SH!i%[V]{ueX_{ TsE *uehUV[i6Յ › Ղ*5MpM6Mii4Ml4<?MچMV 6S#pdnlJ &li4M8i27 4vl6PA!L4 a4aa/aC6 0 0UAa#G: aa8a6MPDrj5MAaS#L 6Am $l"""""""""""2QQDDDDDFR""""""""""""""""2VK-.Hf)vᄡW1P`L (nKsPȌeW;T&[goL)2Xgb2 Ɍc%\-S"AM4T 0S 0S da ¦.aoT/ I…‚ Av ;M?KiOuL-GVyڒ%JiD5MF!'DB_5mUUuRO?ǦQO_uWWIl}U}6t2:" PG\Sfs0d&g%Q sNYhY D$LAfy9f "c2^JyI#0eBYHg&9\x'{!B\=#=h4 PTT{ 5 Pk *`0f0ak*ik G4abL#aP { L#xPd[ = `=E`00a F=Ds*a L#X`{*id0atE] MPtU‡E_ߢzMP&o l:*VWIE] NmtzIuIi6&t¤:*R E[E_WI*LӢê tU|:tUphtjmz@[PSuVmm[N_p}wun[un[}8_m)mMo+z괯JҾ+J꾴z+zҽ="BS_un;]u?Kح(?^?_CwWn⿡}=}z>=_=L]fI1O@?6%mo? _/ ]__? _ E!:) K oA%H%Koׯ/K ~_i~#4~N}9?=1I?:%-O)']:'^_b),?*_~q?N￿L_i~{i6iz*i]zTկ=N~K a z__ᯯJZ]{i-eױ]*uU^LՂ)^˭bث.e׽eױ_ C)鴖a2:밿V]{M8iCI4iU&il0&M6dn4MFaiL4aġi7 iiiiiMiM6NM &LMIYlJdniI4MM6pDr#AdAL ` AAa 1 aT aaTa$am0T 4A7 *0 M:AK00 0"9Ha BbA A 'TaQDDDDDDDDDDDDDDDDDDD}+-."nS%iZPT00v) "?_#3"C2#!3?De^Ic3Id Y|gf2Y~S“!GAi0 a*aS (T¦g!P^O\*I7 …  tkiv]pvhpkq']8I:T":^@v19TEiI?J?GzIUuEۭUuu6ٞ!"`Ba>kqM>" ȣ0g 0g2r*Ȩ2:?yF`B8)>FAcc"s<&rXBy* #< QHJ.H$<" 1#l0a0dAFaBaJ:"ħ^)m/Ji=__I];_]} WNIZ_] um/J~JXoEoVkuG_oQktWC[?!+j+tC>6#a=5\Wf$kmoz[?۠l? ]  n_kOk޿7_Po_{k_}I,7vKKפ OW?޷4'^uIe:Eu[ND~N/+']"^:^Ɨ~N?huKm_Qmii6*i?׶^Hiok]kJ~V]kXiC^ mui~ W^k /^OG_amCh/{ [V+ ee1LVSa2:EN]{ueX_{ TcE *uehUV[i6zi8a 'T4MIpM4푸pM4ai7 OM4M4i4iii;al4iM6iZL4dnuLæi(v4i7 #pi76RP17v@ K0G0 &aL("9a0d0  708"9PAA 0L L&0 a0PTaa!A6aAa#G: aa8a6MPDrj5MAaSDDDFR"""""""*#"""""#)ںKK{HjIJ$0SpP\0J1IC0`Aܠ0A DDDG2d/"$|a̙dS+9ݢ.wVMkRpОS P$¦pɌ4aS ȆfdC PgQG0pPappA Appv­hpthj88A-;@¤ߎ>Z69eB%h,;޶w-_R_׷Zm몤2<)>FyF'Af3lf#١SLгB f%$gNdt`hA<A!2<)`3#l "XBy%!,n%C3<g<IM#Q3 sPEYfD&He6g 6FyfUBadJAY/<$dO20P{ 0cL#)k {l0T=4ƒ43aB@{ 4t=00fF5 k 0AEp0cncÄh 0aL#X6 H6tM'êM7TNmpi>R E[E_WIaW m&zIp:MuwA7Tl:*?][T?S[հbT<uo%:Nۧ^>_t?^_Z_C]W֕A+ҽ+]+cMc-_~^^+ wMEna?0F?OPai0@~ ^/,7 K_ӨKm}7Koޒ3^KzKKK54W^kOO~NI}/'N]/zcK'LWO/m/ЯII:6EWKҵYk5_5]{4xk=߰~=V՗]IS밿VL.zb/v*A9P*˫EحJa2:7IL4NLÆ4i7 oKdniI4MiCaiMV 6S#pdnlJ &li4M鑸iġݦa0h2\Aɨ b aPaRA Aa & 2^AAd&iwiPA6aAʂ 5aBLSL 6DDDDDDDDDDDDDDDDDDDDDDDDDDDGHW}ixa*lT ubٌ)Yg-#yyI3%vIl,q¤eB%Ib &֯[w_^R}}Jyg߮G["몮-,(2:3"Al0a0)*2:AqMk-8D$LAGF~iA3#œ3iH$CdH|AVKG$<"$<Ђ!E|2&3 sND``>aeNdthDdO0K2rBD%gq$9#O dt`f "#H2% 1"s#249FaJrOH(G{ hL#a =0fL*`=h40 { #!„kG40T= Ӧ0aAM0<#za0akGSi#2zaG†h#aaÄhL#Xa L#aP`{ #= F=2x#X`́48T&z*6ªMMDm5I6i3NRtA6l:E]&m&âtI&taWUo 4&MWIwtz*6*6CM6ti6oI*׶հbT?Soo]տun%:߶o}KPT?ջoջoN_p}w^PS{m}տP}=iZ_]JkJKJJҴ\ V]}i_} WNIZ^O_֕ztt[kQ[ZQ}Qu  ?CtV]C46(W!pCa5_a<f 6aF'{`LfӰFc9ؗa _[u/ۯa?}7%m ,7 {7}k_V_s,7io/;KN:דNm/uYE'^x"NE;4/K8 u֗~NO_Qױ*Mii6Oiz*ڶO[in^ڶ^kK_5]{4xj{k jxk oᯯ55rXi5׆_5}a銲)X"WV˫T ˯bH'4PE8)b˯bnuZV)=}^|wb+v)"}Z({.خbuWLU8i4i4bPJdn iM6M[#pbPi&֚iMiI &FI%i& 4M;M6m4t|4i7L4jMi4m4I6Fj#aPh 0PT$ͦPaAAL' &ڂ 4/ 0AAa&L 0G0aaA0PA &l  0ApaA< A‚#A"9aA0 A)  """"""8DDDDDDDDDDDDDG8"""""""Wi% % )   AlLvk;>v5Ye\k; |&2,eW T¦ :Г (PS4„x ,(\. FBI֓о' hv­hկh'gDMc&ĭ/*v j>dBuJW#m/W_]u߯Үlf  p0aK2r$̎'"r(fG8g1L N%9'"!8cNFH H2;.FaNH"s# 4"C"00dPFyzA^BЄ("Ndu YOfy(#L0r!u]W+K(JK1Ia0@ADDsL2;+3;KYgaeș,:aS 0T T¦0 > a 8P=vik Zн ؚ*,BTB, _U_޾_I}W_]y6ٞ#œ3PG4"DQ "& 1 df"dt gqYKϑ>b96FfGDBq)g2;YBy#rG<HKR䋐p A"dB$A#x&C!.`Ȩ("r(2:.Fb[i6Mi~ ak_]o4_k5k5_a]Nha0E@)bح밽YuIޭ?*L&eYu{al)KazL+*h]=vA-T:jm4I6M6i $M6I7L4Ӵdnidn4ai(v iM6I7 L4FIiġ 4M4dn4IIa#p푸pһpm 0A&aAa0xaa) Ta8DsiaL2HPPDr * B aAja 2^L*Ds L6aAɦA  0000L6M‚#DDFR""""""""""""""""8DDDDDDDDEqHDDjj/뮺KsI.Ҵ\0W % %bbئ* A0`6XȦvc;T&dfyyٌ2iO;/̋gi3 T… PSL(TL(T< … …(]'88;@4MlBZWB,B%)yHJ'd!T}uuWWׯU_U_^ ĐJsg2|r6FNduٜW "& 4Aq d*04N$t>a"& ˑA 0ax7BH<1ʙM0eB`1"ABq* 1rBA _s#r2s#B(F "rG<PJd)X3LFS aÄ{ #0a 0fa*f T 0ak * * 0ci=0aA{ G40T40T)k *aÄ{PT=j4{ #@zaL#XaiL(G4T3|#@a5aL* 0T=OtA7p'wI諤iP*6aMiMPIH6諤UIE]&M Ro l:*8P諤#h&Ul: &áTi®M7TaWH7׶zmSo߉PbT0bT<z}[oPVunվ{oS_%9:1*%Cջm[WO]z_{*JzJJ:W֕]:W_C]_t]Azh?]p]uu]_+~_Z_}ح_Ck+n+k_C?_ⸯ?q]m?_ ?}m??a5ͯF~jF0as[@_ _ a/ ^/{%~~%𗄿7/ ~wo^/KK~_oiz_yOOL:K޺_wDBK]~hu_z^/'^y?4Iz_F_umm-Wm/mmvm5au_5XkaV (kk a4k4uikkP)ؔ>Cخ˯b/e uuSa2:EF tYuSS]v˭?;.bE@˭zb/atz޽i4M6F $4iU&iM6 4dnIFViġ 4MvL4iIIMl4i&#pᤚi 4i4#papa +ILMp҆ $&l4Mz A!MPDr4!dAL  AAA ba4„G8Ds APAm00 0A 4Atm0&/ ڂ#L 0 AL i0& #M0m0PDr t aqDDDDDDDDDDDDDDTDGDDDDDDG""""""8_MKKW_OM4ؤӄ 0sL̋s;QhDeDqN 6BD.D'2:)̎ ȟ4%?3PY96Y9Oe6g92>23"3'" 'Aa0gZ 5Aa{"8PcF= G=8pk #Ç`= ASL(3PF5ahL#`#@a529 L#aȶk #=* #a <4={ #@a0a6Aa6AT‚ Ӧ0andS0faÄ{&ޒm&i*Nh& TIM諤OE] ߅]&} tTi7$tIi:NRmThm۾i:MTiI:*j:*Mul:*?uo][N^Pտյ%:տ%Cp}m[_SJVl%:ۧ_ti]=t)^O_?WZ_]=i]WCt+z_Uץt{ WW ү+Knj?-ӮG0v65~~b_nkn!pX{+&bCXp?8bk+⾿@=m0{?Uawe|{ $SUC`3Fۯ@@^n_0~ÿ _ ~B[ko aa_K_%K{^ߥI,6i}_nƗ~NuOh'_K޿'LRYDPE꿺ht~NutKױ*MioOﶾ_i"i6i/[Qi~߿jXiZa~k oa_߻u_UK55j oZ{ TsE *1O[բ_azҴP.˯l&GV]=1^Vl&G]j^H%ut1[_lShՅحد.V ՗_hjM[#pbPi&4i7Pdn 4i0M4Ml6M&Im27 6%v9iղ7PҴi64aM27 64ڪi4ӴaTi 4dnl6Fᦛl4dn400j&‚ d0‚#PA6PDr!5Aa: 'A‚000iMt0taM‚#0A0 2Saj&PDriaA0A % ataM0aA ("9DDDe"""""""""""""""""""""""""""""""2DDDDDDDDDDDDDDDDDDDDDDDDDDDDDj"ͮJQP]ؤ08lL NE(̏ȯ;+fy-|S4̙r*ix (G 0B*aS 2Z-8P8PppPe^8?;@;ɰTr5Qʴ>?߯꾿_}_ǯ꾿AJsi Q#3#<`E;|vgs?)̩g`(\*M (\/  88;@냃8888;@4;@ȅhQ"9N'FY؄8G__U}uꪾ0elS| #2(G2rFb* 0yf#`ȁABq!C> /ProcSet [ /ImageB ] >> >> endobj 80 0 obj << /Length 81 0 R >> stream q 614.4000 0.0000 0.0000 792.0000 -1.2000 0.0000 cm /Im16 Do Q endstream endobj 81 0 obj 64 endobj 82 0 obj << /Length 83 0 R /Type /XObject /Subtype /Image /Name /Im16 /Width 2560 /Height 3300 /BitsPerComponent 1 /ColorSpace /DeviceGray /Filter /CCITTFaxDecode /DecodeParms << /K -1 /Columns 2560 /Rows 3300>> >> stream Xh"'F2Awe-U p@(AR08@ ʰr$aQpapF 'iI¤I6'0NMƊMǃr_Ah h Wnzozo^]_+~ /cүH. aK%cI/ ?ۦJoݴ4 Jm~~_[i}/-ZJz^%uT+uD5IפC_KI$Iz'vI.-M!&HzHv҆Z4Il$% $iZIJH BPOb [J@a0D|EDb"#?%I(AG720 *.[ toZz妨*߷Kc!ƿ/K[.W 6҂ր*! (w,Ҳ)3^v/*gstE.v v-fA|gC:G…" wPG…eSG &…<4C.&…g1 [[\ ݴmpv"+H*M\PkI7ۢ5-ʵvXkz_?EzW__Ukz]mmIn}]VM2:%dK/dn$5"O2G8g0ehdthDi0B*M _&33#`di2r4G"P^f0S1 AD'Dx&C3#2#DO;*C# љ 䀉U NND$a$gf L0fpT=k 0ah#X`{ #40TtG?„{G.L#`k { #X5 FFS#^0T= > = FS0cGS„{p0cj0a3+50ano5:OWt{uI&âoI6tIMtUI'ARtMTm'I諤zaI&êA&êME]'I ItIi:M6oIi6t )ׯJu:'սSn_PS%:VS[Vo_N?O Wi]֕NWut?iZ\= ւJkҺ/zҴҽ++cר_بv?!}-M+k?c;ZЯ=}⾾Sj??4=t?(0=Aͨ|UaF? ͯ0siaV`#櫂0?@ۯ _@Bk a? _@_K7_K__K 7%/錄׆J/K{/7KM4_:'WNuK8K~u"{|NOKN/i[誚^_[ikj_a] k (k^޾ 5kkk߭kXi (k.EbPI=+). MԂpb eL/#u[՗_"Vduׯբ6#.b)±LWa; L4 i4jmCIMm&ġi=iJM6dn %lJ8i&鴛 &ii=iġ4i0M=8i27M1(va &i#pi6#pM< ڂ SPAE ;;L 0vAaG aAA&‚ Bb 06TL(&Al( ! 0 2GA a0aAA2CD0#a02D0aA:i08DDDDDDDDDDDTDDDDDADDDDDqZ]/KIRI$IE D%aBaJ!"hY% f,̏ p\Sf{' D3 g<3;!#r-XE~JB49BD = 0T=GSGa {Pc3}0a{ * 0aA G=^(F{ #(nL#AF4<#`{"MkL(F=Aak G ii3N G.L* 05h4a={ 0d[7ӅTa l:*?a& *N~M Ti7$M OWt{uI&ޒoI諤vp&U $um'i *7WIij :*MRM$ޓaWI}x1*`ݷJu=> J=>ħ^)m}`j޻ħ_?mm{ħ< PSjm=t?]{t)]}便}i]tK-+ߡRm/JJKJJh=_%zW_[QkQ_kuC{⻦Hp?Q[=M{?騭f`@=m2f5_Y=(}15]PaWa{kx@ nmov6mo7_ӨKm}7N-__P7פ OV%}ik]nׯפm/uלONN~%Liw'_]:uWLץ'zc'_VNޘדbOi~Oױ*[^[iz*_iǼuii}ױ^m5u[]~_CU׾K׆_5ᯯKj__5ᯯ˭حzޭ> *YuS՗[a}+R ?l&՗]V]Z(~m[Wb+u{ӱ_ak.˯bw_]oa]دNe&IapaII6LaI6%aL4&m27 :FV4ؔ;jL4 iS#pM;aRiiҦMo *iM6M4$M6S#pM;a%L2\Aʂ  2S 2D(*#MTaADsiMݦmAPAG*6TAba8a 0w0 %T0 & :0 AAa0vNA00n """""#)DG]^z_]Wid.00T0 %M6)ؤبA0@00`"""? `Y+Ȧvc;d) ;򳑝4… Px #i@G… _  I|2N(\-k 88;@&Г2H|bQMVUu묛D'IAlH2\NYO3PDPdt\x!"`"БRDa>b9azA2S!j$s<":I+c L0HH&9@d+Hs)8d ˊlN#0 `>`aNdtF0yN0D(,qM" 6+ 3P*a3TA5 FG5aÂ0faT3N0a0a *a'5 d[5a'=lG{TG4#zL& 5h#dGL aT0c*{ amAAt=83a&M5A}tNmtI:ߢi®M7TaWH7tUޒfNoIi:NRmT馩&ޒ 6aVW Mâ$tUvA~mħ^߃t{Jum*q)bT<[տտoVu}տvmbT?V~V]i}Z]VBu޺__+ҸuWmtJKKZW-{_v+uW~حccW?ߵ_حM}a+=|WVÇ~Q[6(WЯ>0$0F#a=`w>{"ߚ(}  V [ [ vP_Xo𗄿 KBXoBXl7ӨKzL%ނ_NzKoմXl7}Iv㴿jk֗-/'Iguu$/K8b'$CzzcKzti zKޘi~^^ƊMqI?[_Kkk_᭮ /[}~__a4jsxkW[utv~˯Lb/VV]{ueX^tYu{a~^+bҭ-=lRaخ ~˯zP. 6i7 4ؔ;M4dn4L4iMF8iCIv 6II6Fᦛ#pI;dn4i4mjzF $[dnii&4i&n4bP6idn06Aw AL 6AAL("95aAa#G: aa.&/ %0aAm0)L("9A4 &T %0 4aA"9 A 'M0 PN:0 """"""""""""""""""#"""""+)H""""*""""#UuifQ$vve%a(a.*+1I| 0Aa """"#MI23ʦvw3y\?|hr%Q"yT:xP (T¦aBSfft BxP… .BPA#PR{J;@@냄Ipp,M&Ak3H$Rɢu>___UR_UuT]~M2:?ePD)2B!.`"ALrAAe!f "& 2#2(YQ 1ٞ#œ3řy8dD'BH<PBDD^x&rSy !<ט3NG8gS#B!*%l.S`"& #0c F„{M0apG=i3{F=#a0T{ #Xza0T‚]A G𠩦k *`=  Fa43P*tG?m T c02sXmA Gafa'8UIaRnoInM諤'I&taWUm&taL(tUf&zI(tUU7H6E]&p諤ޞ6b:**6ޓh&iIl:*3Oo1*jߺJ:mD`ڶ`ݷ{mJJtuo]oտJҺҽҴJ}롄}+Jw꿺+ҺJ__mv?b]n_~n?~p~CH+[hzj+ta6j6?F?a9.aPajD_a?_#}5y?>{f_?~l?mo/O@V- __uo%oXozu m -7B[kKߥ I}X[jK/KډSENKK8S_G}~=1ߓדoSׂ)KzcK'^Ni6i/[i>_袁ױ]kuma4kkXik[_P_9 }5zzkXi~ xkb*zئ*C+-_IX^dt]{atz@+Wb-[קeױV]Z(]-˦+鴭/-tlSeՅ»_ ˯zҴi64aM27 6Ml4IpiCIM6 (i0NI27M4M6#piM=m0lÆm&l6m'4dnIi:FIvM6Ia aa PA0‚#AL* M0L( xaAaG x` An00a00 L* K70¦ aaa0A!1AAa A0 SL'vNA00n %08""""""""""""""""#)qHoW__]%_7J턡QPT(v*aP DDb3B5"[dK&IJy&Ry*I\L* $*G§ 0bDf01M@…fCB-/ABªj^ 'P,&kPppv5vAApThBT!Q:ѭ9VZ$ɚpkKW]֎?Uo_G8M {국UׯqUI~hF( H5(2: ND"Pl<ɎTsPJd.$LAdPEGD("' O hEpNFGDˊlO`@x0g x3BH%d'HB"DH"#03c.)0ch4 =>SL= F{ { #@`8*aȡ=lG{ 0a k 0A= G-{ *4ME]&iU'tz*6Rmޓa|* i3rm'IªM tmtzMwm'iW oE]%:**Aꓤޓh&WI鴝 uIzI&â4*9/VWjmħ^JsuտVu[mo^ۃKTոu{m[[VSo]oս-3m/W_]AҺ}+}AUWB]?]I^un>Mj?c+v65~~cKGkku[K?\W8~k7M]%}t=VHz?櫰#aO5_Oj(}f#aC^j{ۯ@ _ [ moЃI?ۭ [kx@Ѓ 𗄿7o7ӯB[km/~~m$o }i~}Xo^:+?/KE']K8֟EAwZ]u_Umu__~Z꿯]u_T}u_^M3NG8yH"1#Ob7AaH Q3 (ڷJsؕ%:P[NxݷĨ{ħ_zSm|Ju }C0a<ͧkaa6aVm?0a+0yͧFk@ۯ _a@ۭan o_߆_ KVu a޿ _~m+KΏm/I,6KKu'^NSK8'buѴ_ו S~NO4_Sm9 =:+']"=%?m-U4~IKm&MH~Milmi?׶׆ o~ak~_^K[J~k a z[]~_lV{LQ `}' 캰]=wV]o_YuU޶aP)AH%te[.+[1[MJ)˭4dnIMiC &FI64M4$M6#p &IL4i&4&a=6I(v iIFJL4i6 4M;M6m4tpviJa#pӄAL*!A  0PT# G A amA#A 1 A΂aPA6T0xl(   PL ȕ&aAA aUAL&Aa&‚!UAd&iDqDDDqDDDDDFR"2H""":W%uuz_ZZ_]uדbY+K+J+ܗ(a(a(a(I b; 0H `aDDDDDQ,d2HLO#2l $;u#mm/;뮾/]}WKUU_l'G̍3 Q* 伕4 sNDD&HˊlN(#l噑.dt %+!%do$"fy;e6g 6Grȓ2:P^yH#B' /6)%]M&i6}ނE_Ih&LܛIâoħ[)ҷ?m~O)ׯJu`=>ħ^)m~)ׯm~Х{uC_֗֕A+ҽ+KJ~+m/zW_cu~ߵcר_ߵcר_֣]8h騭?MEn++?T|̯#CͯH0G>{a#0a?<'/ ^/~/@ _A/%:__ ޿%N7_k_V_K^7=Z_ki%|~ND1ߓ+ttO/Nޘ:#'_hz֗-K8[^{i"k_H^Hio׆_^5ޞԧ_CU׾K׆4}lWLWuawEdueױOWV]lUH'4PE8=C+m&Ҷ)9Wb(~L"WV]vYuhi1VE˦+U[]|C ^Mi4l6FIiġ 4ai0ii27FġPa6lMޞNtղ7 6%چ 6Fdnm&#pM6Fᦛl6dnL:ilÆiI<"9aA0 AHa‚0 #M0n00j&‚ ("9PA 0pv)pi&a l( ‚#PAj bL 0A L  a'Am‚#AAKDDDDDFR""""""""""#DADDDFR"""""""""""""""""""""""2ҿ/K&$"n/%i~Ia 0T04ئءb*a e  DDDG̕3M,%s/3^dS H>v)ȅo gx B6<#iL(P(PaSGӅA#č\(T *X]&oA-uhIv]6!bv jo DG|B%HM4Г Kj*=uKqU_UkuImH2$ȐEGD!љf ?2) !8$0K0eiৈ1"(F)0!0%BGGGr(gb#0Fg0O%CɎSI\$&YBy# >23D$L&dt{0ND" Pr y JYೞ ߯{__cح_c}?cW?]CXp KC1_==zkC0a6vØ?Vd0aayOyw@! =?a_߯azK7o7_ΏJK8O6(OPE^:uy:K%}S:0ד 묝_ޘtPEhجm$V}K5vm}A[i׶kin[ioi>[i6i?_M+V|5[4z5kS /׆׆kXipkXk /uT[ LWYuM[lRvޮث '{ LUWO_]1[՗V֓LP*˦)E@du{]WLS +M6p҆I $NL4i&i=~iIMiJa#pӆvlMPaii6a҆LJiLJINVM&m&iIIl=Am0G 0#L "9ja 1 @  a aAJ΂aA8"90i PA0‚#dL  UA0! 00TL('w A0A0 &aa"9L "2""""" "#DDDDDDDDDDDDDDDDDDDDqDDDDDe"#v~_I-vi$i7^JI $ %ئ))M'$  ؐ`DDDDd)2Ŭk;:g畼Ww<%wLS+ɖM2G L+(E0B (T… ++} (TYB (PPBg…  TlpppppppvhicrhɚrfY_U[}uoUBD'N`#ˊlN0e SND ĐH~a9ѡk"B\NYPdtfEaBqI{ԍȶOq *M0e sBa>b2(.r4Afٟ#lr!"`0eA>b72  sND!ўhE'-~#2:a PT=H5h40 {*aȶoa=0f0cG{ #X= 3NG5aL* *mA Ga0a{GSFL#X =>`= F5 *`:a0ȯL#X*LӢMLڦjm&L諤7 &}4Im'H6E]&oM'H6 pâToI7tUfMîMaWIj ?aWA6a'A*6ItUoݷݷj߷ڷ*ݷ{JJsVVoT?VSz{nV%:NVջou%zW_]>iu֕ CAJzaJ/m*KJJn][c_v+uW~݊w߭:cVtVCk+ }1]!t5_]]_?~+F0PaU_0~m?00aF5y#6akF0# [kx@ a/ n? _k _x@-PӨKm K 7N-%o :K߯i%nw_/K __ik]IoLiwױ_(yE;K6u/zcK'^N/E;/ޮW_?ABL/; PDc8,rbL!4E-#UX__Uu_UUWUF!ꗮkUׯ(ʿ*cHT<n? B9f#PAJqLrАS!fB\D'2:52ANJg3PY96Y4"s#bz[mkv JħJm~vm+=O_>=ZW+ҾJJKJRjҿzW^uQkQQ[k[oZoo+? CC?C_T= #Wa=m<`P5A2SkװFk_~/aa@ۯ[a@_ xKK %ӯz z]῿K o7جh/K8Eu),rBEuׄPEN''F_uNb&")T"XI6QʄKˢP}W]]U/KWUk_U_UIm/U]V ČL2& 4 N$VBy#"T23xSxB4AB\c.)>hY& f,Ѝ3 qM" "& <BG%'AH@1dD,,Ђ! ut4뮃ҿ]>]zWOWOt)_WC֕ХOZWZW^]?]ǥV]__-׵׵+=tCXp?8~+b?WCa0a0#aO6OT0ms 0_ 0a5A0ji۠~sn_?/ۯ{uo ~o7/%|%_Ka7_}߶ὴ/.߶}|Q?{Ѵ_Nt%NAO4^_x"hфhx"_'^~B'دKC4_ ױ_ߓSu%w鴿mEkߦmv_I_Km/m/EWU_U}mwk_۵߬5 xk -xk}CKk_k__K__5k.@l.O]՗[1Vmة+bb?bV*VX^˦+N˯bA;u /V+.ea0qVX"_ML4i&7PaMiM27 ;a 4ڶFJVM&Ҧl4iF4iI4m'MӴaI;M6FᦛLi4چ 4M;M6m0iI6zm, %m0PDr t pM0 / PDr#"9h&XAAJl0MA TiaAaa4AAL&AA&0i0i0 ("9PAamA 00T/ 1 BDDDGDDDDDe"""#"""""""" ""2.R"""""""#W}-]]^]uZIZVa- 000M6)4LS  H `6Fd##2/ $2Ʋc27%fvGa2ޙٮJ)LȶPB 0{ (T¦0(^ ]&…pPpppuhvhvډ0愝d cSac!VqUuuUׯץU6#?0O%3 a7">=0a0eAAGG DO NDphDGE9 K2r"3 G\Sf| x'nEw0df ̎r(" y+%q$ ĉ Jgq,!<2T<PJrr' K<BG%I.dtgF`%vQ&J,dzap (TOL(Gh*NBXT?4ҴRnJB+ Q#>d!x0bKA&z뮾U"@uauZ_Y6 0ePFyzABG<9!hE"& <'G̍3PDLPH2& #نH"4Lp $1$LAe2r'9ȫU Ĩx'Bc39 aˊlϑb%' D4 t<xBTF['İPF= F= 3e0a7= FS<#`7T*a0a0a{ o0dX5a0 aa L#a*aȸ{ (*aASiL#ƒ76Aa0f0a4੄{"0T S 3AF4: aWA6aWêMR E]&âA諤U6tUMAWI6U&MIAI tUtA7aWIiW }&âި*iI:*MtUfl:PWjm&v|Ju:mNJu{ħ[m1*jvmڷ=m~ĨjJtmm{ħ=PS{oo]N_֗C֕ztt+z_U:J+Һ׶WC֕~zm/J+~__-W_cv65~~ᵿ}Z[ku⿿pCa?C_o_?/騭#FW9_al=ͯ |7?Cj0^(}0Y"/? [ _kx@K a_~::wm$oKҿki_I}XEu_z_W_:'FE<]K8O"hNh/ج6ޫuNج1ߓj[in^ڶMi6i~t_*{iak҆k u m a___K ~[Vk5XkC[S]v˭/=v]{u]1^1O]^H$0ut1[_zO_eױLW_Nv]U]=nuWp˭+Vi&M& 6FalM6%Նl4jMi4m4I6ilÆ4&MM4i'g $aM&#pNM4M6I $n *M4iiiêdn5 K0aAA d0ia‚%AaB#A 4AtaM‚#0A0 2S``%Ah Aa0 AaA'U#daL   amA#A ݦDDDDDDDDDDDDDDG"""""""""""""2DDDDDDDDe"#}^~_ivᄸa(K&iI   `DDDG752\I2 f)3,j3,y33 Y&v'\=gdY… 0 0i G…L*aH0S (\*N.(]'  B`8;@@x8;@WBDSHE5:htbC_uyCu*ɰdPFfNdtk#B'D$LA0FfAJYAMHy )x3p!"` 30a A/#r-T<&y`!8Lrx!"=4#LD%OAdQ3C#„B\i`!4< PE|IgR("r(G? b0K2#0!0%BG=0a{F5 3}0a0c3L*iL#ajS*i7#)6G = 0f0T=(3pMaL# :`{ #!L#=O4{ tZaG†h#aGS0{"3NG= FMwm'A6aWUl:*i6ޓa':*6 tUUt¤Um&íaWIZME]&o談TI)ât¤:*uIi6&uh& T(tUfWIaW m&mmĨ{[m{)ҷm{ݷm)҃~߃jmħ[`ݷ{ݷħ[>ӮSjmJJҺJҽ+Ҵ+zW^uu] Wu_֕Хt_tBZW]ب-V_>^:u~jzt~+0mVj0W>Wa_b5WY#ۯuu/o N__7Cw_v߶_߆׿m/m/7wWw]E< D:uC'^OLy:'^m?y:+'LWuد",wwbuu$Mki調ik_ǶHMilmmjm'55__ xk5\5kk__k (k5JV᭮ /Sha~˯bIl&N*b ׽eױ_ 캺z݊T .bA1_R ׯدN]lSn6#ئ)l&G_';.zb/iF4dniMӆLJi4M4iCaiMӴaL4MSM6I $nIl4MMiIl4i44iILJL4bP4ӴaL4&m27 8a M0 0 A‚ * 00Aa0a 0a6!B#da00#N&AmAAa0xaG L:0 M:0 M Ah4/ 0l'OAa#G: a"""""""""""""""""""""""2rDDDe"""""""#)H"""5~~}W]u/iez+JҴIxa.*JJJJ(%ؤ)bSl `&ADDDG>LgdReu<Ȧvgzgky^v #aBP݅ 0BL(P(T(PaK…  -pp@&Hԇr!K>D/U__WתU__^M x'a ǡ$ ePdtfEQ24"`>`a P^hEg\3p FLЎ 쁗ٞ#œ3PG3,("#2(,,Ђ!8 Y ǡ$ $rT<0k#dfdthDBy y) <̉NEAF` p`o5a8Fpa0cF{ 2'{ 0aAM0<#`=0ak 4= B5h4h40 { #!„kG5a0c3LFpa0a0=#a = G ah #a*a*tMR E_M&tI E_H6Rm&âtUoTItUUl:M4$M;IoM&tItm tUMtUm'IH6Rl*6m&MME_vJ:mJui}1*m量)q*)~~OJ=>ݶq*Ju1*m뽷JJ믮+nW֕$++Km/J+KKJ뮟+ҴN]W]ko_kGEQ[_45} ?a*髦H{C]t=!a=6aF_nhmfb`?0PF6R%FÛOUO?c0mo0dY _@/ _- _[u a @_K %/^B[kK7Kq_xDvZնca/7WKq>}^Nm/uNSޘޘ:,|Nuy_8y:/SuOi$[i~]6iz_G^HiO[i6_i?_ڿmk|5] jxjn akk|5 xk /i u_ ak alE]o_azb קlRaؤ+Ibl/LWeaw» Ca⴬/LSa2:l&`LU[ױVEl&GV]=lUaX)zb6 dn#piM8i27M1(vI4i&#pM;I6i&M4iIi7tղ7 6%چ#plJil4MFᦜ4dn4bPI6$M0M:i40 &T `&PDr &d0pAK $iap '0AaCia` : wwiPA6aaA0PL(   PL2^AaA ("9 $00„G0L a%ADDDDDDDDDDDDDADDDDGq""""""?}-%ZV a(a.) 8dg`~&V,a32;%r `a sNDAf ND2#3#3T<1ʙ%2$LABaHg$y )xdt0"r(" L^x6rG<91 H<O`s#B39ў .0D'9,!0$s3`L#m@LG5 = GL aT0f0ahL#X`{"0L{ 0c A'{ 0T5T=0c F=0a ӄ{"8*ao{ 0c5AOL(G,S0aaA A0f07= 諤iP*6aa&ޒl:**WIE]&M諤tUfl(tU‡E_I諤wxTaWI6i8UIi6m tU&i: tU} uW 7WIl:*8\+]'I&MR E_mmmzq)`Ĩ~j=m>:mħ[Ĩ~v߫~q)ն>vAW^UC] V}WA+Jҿ+ރ:WO]C]{{u%zWO^uZQVƭGV[u_}o_b++ ~?t=_0a'|OU~Ͳ6?F?sk6ak/@na/a@ _nNK0/7_K~ _ _㴿/J v/}'Iy:I:uNtNEN/~|yW(yimi6i~M^ڶj*imVkg5k /Xk5 a44_|54~eױV=b 'eױLW_Nv]SeױV]o_ab+1O_ ?]o_ b˭."ULSe4iU&iM6Mm-7 4ӴkaM&#pNM4M6I $nI6iMi7 4iiZLii&i#pdn 6I $i&iiIӆl46(v iM8A % ataM0d0M6Aaa0z0 AL 6&a00#N2S a LaAG(Dsi d00mAL* K8"9 2^AMaG 0#NnaAja"""""""""""""""8DDDDDDDEDDDDDDDDDDqEqjKKKҴJ2(a(JJ*ZlS &A  """?ɱrKY.)2;+\De T… 0LfF0S (TpPBB  … 888;@@5reZ%ih,r~[-}]U/K____UIm-}^g`!*< E~IND$LAfy9f "C" Hk& 0FЂ! aAA a0UAa TA !0 * vl a/aAa-.A pDrj ΂a DDDDDDEDDDe E"""""#""""""""8]_^u]_+K0T00+bN  ` """?ؾR $Kʮd&2ܗ=]K;,̂d"0S…M0JADt¦/ |(\.' A/ hip|wh ;@lB)4J:: 1'Xk*Iu\e9CǦPP^ÜL3œ0H2!EGDA("' O hEpNFGDfdtDfb>EPEC١f N$ ("Pdtt[lEPDg<lSI9F`fZla 2AOfO9d ĐHxD%9AOM3}0a{"٬0c00ah (GT0{ #„{T*a *&#`kio0d[5t߄h #@aL#X‚vDjL#`(340T=000T=0i0f0aâ諤LޛIph&¤E[E] ޓh&I¤T: î tUo *67q}MH6RpWIw:C[ IMPRmTm'UovJm1*jߺ J+`ĨjJuv{WNJuNm{JtmQ8tmĨ{1*1*JuO{JރtWu]?^]_}i_BC]WpA= WO[kƮkEEnz[o]_uuu;_? CCWaׯ⿺d{ͧͧa#dF00|ica@ [ /ۮv@BXl7/PE!C%/%K KI,6iv_wt%NjO"hW^/t]>q?_uץ:b'K|f+zDd/(yNuZ鴛]mm-m$VtKյUxmmIK WXk .Z{]m_zO (iZo3I /a a o޿J*A-뫦)تbEخ˭/`YuT[ ҟOKlS#eaIW[v ՗^XiM8i; 4ڶFJVM&Ҧl4iF4 +Il4i&#paaV8i"ʴm4I6%M;Mai %idniIFVm4#pm1(vM6 `*0ma aa PA0‚#NPa8Ds A0xa'AP PDrV Apl( Aa:pAd00 h1 tia B &PaAL* &ADDEDDe"""##DDDDDDDDFR""""""""""""8""""""#]RKNJҴrI%a/ᄡA/Ri1Xi@A0@0 """"?!Fv&d>Asٝ̊WcAyر *i4 W #aBBPA#G aBi mmpuܕ9^vhEDD&CHtMt?UWUuUt`ȠPEg0K<q $ 6F#pSx42:"DG3#LBa\Ba싄O^$O sA˒A!8$rTdH"#̍3NdtfE<" p`!8 H伕1NEO0D/%do$rCʃ#l 0p{ 0{ 0fao{ 0a`:aÄ{*a G5{G0TPT aFL#aP`8F5{"٬0c0aaN#5a*`3Xaȸ{ #aÄ{h#@aLEpT=a8F& E]ME_7H6tO諻&ޒm&$6|.xW } tIh tU \* fNtUta!Im'zI64i}ALӸuI'wA7][Sջo~NոounVPuV{oոO{v߫oOtޅ+J/Ou]u]uO]BVG[ƽnk[lVůZk[Eo}G+;1^+⿿+*Я⾇5_?OY~a#Y#F#a櫰` _{ _/ _/n/@a_ o\%m K a mB_/_7_K_i{i%w I[7]~hu^:'Iy_/4I{q9'^q=y:]a;8zCOjﶓi_~uڿV (kk5k_ /O]}[[_bbˮu}due([UbPEea; eWz.* l/]1_i6Յl&GOa~,pE)A9Sa2:CدI4i4i7 $dni(vM6FI6F &F7 4iNM4ai6l4MMFlÆ4M8i0M#pؔ;Fᦛ v &FI7ii7 6;#pM8h2\A  %L 6AG ' &A8"90aANaPM&a0xaa a 2Gt 4 PDr 8"9K Bba0A4l0$B#NA ma‚#PA8"""""""""""""""#DDDDDDDDDDDDDDDFR""""""2ҿJ;O%i~JJ*JlSP0`a&y3̫́2 fOvLec&d3IpL#aS 0L(PL*aapN(\. ' kVhph~%mfJBCXjH;ZYD"ևqt?uU_~*ɲ3'"Af#PA0dBA 0ax7BH<Jd)%AdH"s# a2rRr'"9f "XBqI{Ԅ' MH2! 0dGFyg`!x&rTdO2Ȍ|>Fy 30a TBH<9*HB'#LSG-L#X‚싩L#a*a*`͔5 ӄ{ 0a:aEXaaPaPa*a*`͔5 ӄ{ 0faba0aaASEO taB=^Fa`{ 0T= F=E`\0ȯL#XxF5 :Lޛ8P諤3h& E]ME_7H6ti3zm'IªM tm tUMtUxTaWUoUm'I諤C08TE_I¤:*7tUpzMT ¤U*LӢz %:[Vouջm}%:[տVuUջm}%:[oVun[n%:%:_|[VoBХZWO]t]}uAҺ}+뮝+ҽҺ.+Һt]M~v65~(M~׵_?רC]?a?C_W⾾_ikO0ykF0sk??0a __ ۠l6׷_ۯ{u _PBXl7K_7_ xK߯ KK ߆m/m/{iz^}߶ὴ/:bbh4Y:Km9?yE:S_:5'לOWB}/u'^~D'دKDZF>Mڶi"i6i+ji~*[i{j^V (kk~ +_5 ~ xk҆߯ /H%a2:A+eױLSױLWu[.z*A-뫦)تbbˮu}_alخ]r  lV{|gA;]MdnlJvM6am4l4MiMm[#p +IiZam4l4MiMl6i &NIIi7 6FᦛiIm4vl8i'i4dni 0il( AtaApa :6T ataM‚#0A0A 4Atm0&/ PAaA0 0l&l l MA  aaa MaPDr a&iaDDDDDDDDDDDDDFR"""8DFR"""2H>R"""""5uu}]]]]^]}u]}iZ]iZVᄡS&1LSA  ` """"?ɲ2geygFM22;;\f¦۳C)੅%f*aB pQ  ([@4Kj8UpvJ"I i7N Kkk^Imk~&g PD!2:4#<PD&b>'gDgi$Ik5$MTSM%Im}%kuRTU__KkzK?3Sx̜32:#0g0C,g3PFyc '" 3 "BG%I.EPdtS`̎1/038" /<9)<ЁcJ':Af"\``>a sNYhYLrKY/< ?`9T40T„{ 8pc*i{ #X‚GSi Ӧ0aA4=#= G{ :#T*a?7C=<#`> = K= GL aT0f0aB=n3=#aÂ0aSL#Xl&tUޒl:At&âm' mt*6l*PMޓ7&t&â*Tp諤ޞ6b TzIh]&t¤:*Nm:ItUUmzJs[n%CVհbT<տn%:Dħ["pVSKPo|[V%:_tNն߿+/ҺҺ?]{CJA+ێ_ZW_CNUuծ[[lVk9__ح(WhWXp[ء_C{~+ujk+a65s?W[aQ#A?@@_mB_7K a鄿_Kz_^Iaozzvi~#5]']_ϧ'W_KؤΉuoKN'I6:'^~K4Y:_޿{k+O]I?_ڶס_[ 5_}^=^5]xiCW޿EI鰙_eIuS՗[ay鴛Jb.?.`_Mi'lRaؤ+]=Z(~1]6aji#pM#pi &LJil8il4iMFlÆ4M8i0M$M4dn4i4ai=7Zl4imi[ 4M;M64i27 6m'M4AAL I Aa` L  aA8DsiMPDr#aA2\bB#A 6@ aL'AaLPbA I &OAa aPDr  A(AA¨"""2DDDDDDDDDDDDDDDDGqH_z_}-Iu^[a/ C EE6)4Ŋ A0L(6Zy2[$̄%Q<ȯ#YFT22;#;(ɌyI~(G¦(G42{ *aS RV2i5.*aBL*pRpP6H4ap\(mƒ20pBx8?8A-\vzhlppvX/fI7ABht$vy4Xbh>?R_UFP5___-Aɰdia8gPr6GD$LAf" ȣ0g 0̉̎rKJs' DD'NEAVKH$<" rT<g<LrD%g:H2sLпC.){m:mmO&Vn%:[Vo|[t??uZWCO]WA}ҽ}+JwR_֕|AmI^t)__V[4;__C+Em5C}ÚտW #uO01aOuuimۯuK Ku m_݆z.m/+}^K7֗NNta:_דow_W"^Nb1ߓ'^/'^Om/Wm-KUm'KU_cm-_E'^k^V[^]iZ5J_ }].E+b-VKbE@ҴM˧>be]{»_ ˯ة_l&GV]{ ˯I7IlMm& $NM8i5 &FlÆm&l6m'Iv4bPIhM&iNMiMbP4uLæi4톚iiM6Fᦛl4i44iJAAtaA aa#aAɦ5a 0 1 B K0 A $` t &aAa<0 a &AmAAa0pa Aa aA8"9DDDTDDDDDDGHADDFR""""""""2֮뮺ɸ.Ҵ+JpPPPP]6)b*0` `""#; v!yReILs\geUe>Jȣ-US 0 0ClΆ*aB (Pa;fgB A(P  <0  (PBPA#n pvp[Lppppppu l$nJRtv &R%ב &|-/-[}%*|'RuWIl__]%6Fb>DPFN(,',BjBHxLa PYhYLrKY/<f \гB( N<pا \("s#3#2(," 1#l0a0d엞 Е&h@1O%3g\Sf|ٞ#œ3哑`"& IL#aP { GȱL){ 4{ ta0{0T5#={ #@`8a= G{G5L0att=  Fa43P*tG?m-h#mA GafaDŽkRmMzIE]&3}â諤&iWtnM?l:*:NzM½$Rm'Im'UêAtE_WI:*7MXBj $M6tWI&)+v}/'|]Pz~ۉNVoT?SN߫m뿽߯RtJҿ+޿Jҽ+Z_] _WC^_t]׿Vu֭[k>nkzt=!_^uᡯE5Q[=x<]fH6u0m?_#u0u_ }[__ K k^a%NӨKm /~_i~#4aK^פm/z_(y~Nױ_دȄ_y:TOSߓͧ6Sد'__^Nu1=1ߓ'^~q>Im-m/EUKUwm[JЯm-_cm.>}I_Kcm-_XiC^k҆ xk /k}]W=Vk__SnYuW&{..eOVLWM LV1V]nuuazl&GV]~h ˯bP[LWiZIoa]دNevM44M6NMl4M6ivl8i0dnm4OJ4bPM&L4dn4l4M#p4i i8i&ii6zniU27MӶiKdn 4A7 *0 Ma@0pataA0auG !Ah0ia‚#a5A7 B#L("9A0PTaa!A6aAaMAA! a: Bb 2F. &AmADDDDDDe )\DDDDDDDFR""""""""""""""""""""2FZtKK뮺뷴"n%Vxa(a(JIiLSp`a0@QPu,d3LeW2#;1\o;vFvFIS"Y2Ge(L(T…L*aB 0B#i 0(\(\.(P6(\*MBm;@냃@&!4DBuT!hauh]Y4ZU}}u_]}}u꾺W}uׄBYHt&9^x'x!BDi`!2r8)=AdFf>b" ͔5 GPfNo<(G-jk 0AASET*a0a5a aASF k 0A= G-4a73N G2 k 0A= G,t=0dPfaiSE`A0fPAah#xGSE}0a@:a&âE[E\/諤&iWUm(tUf6CM7uP諤NToI7tUfE_H7諤߇TiIl:*3E_M&‡E]&b}t諤4t5}&ޒoI諤>AWI}`mvmڷĨq)ħV`뿽ޭ~jmĨ{jmڷJsؕ%9m뿽ڷޫ)ZZWt5_ZV%zW_C%zW_ZWWCAz+Һ+?uuߵՏ~U[W_k騭5C5C?0_ͧ\m?(}0YWmF5yWCVm@akx@aۯn}%oKPῧP___KKKפm/ %}ii%}i6'^w%)ߓ'_w1ߓ'^Liwױ_دud.y:+UcumumO*{imik~ o5 xkk5a5XkC^k v]v˯bA;uM[l&eLlW'2Q..lW&2C.Nuv+bA9^uU#pNIl6ivl4dn&v;I6;iiiuLæi4톚l6L4i4ӆtm&NM&vM6M4$M6S#pM;a $iւ A 'TaA0ata am„G0 &aPaAA  &AmAH0 ݦL0 ۠0ba ۠000l0 &aN00aaAKà0ˆDDDDDFR"8DDDDDDDDDDDDFR""""2H"""""""2.뮾ҴJҴ. C pPPP\0bb)M A 0@0QMYfFenkAe_23"YgL*aLr BSfC B G\(Txht(P6H4(Pt;@Vpppu l$8888;_&hqZ+h*Mo &̌#/ɚQkKkQ_KWu_Io_2(0L= 1ٞ#3PG噑dt %, ?23> Ĩx0F2r<)G<K@"H$cJh$<2:3"("|U,Ѝ3PA0yPD"71#<AB= FAah#aȯ#X=`Lxp7C?3|8*a= 3`SL#Xl&aghEXa0T5#Xa0{ 0ch4a={ 0dX4{ (*aȤa38#`{ 0{l*PMToI67*Ni>]M&E]&p諤ޞ6b:**6uIzLܛIl:*:M6m tUvzI&â7Ul(tUfMTl:tUM[%CwVS_xm+{tt뿽J=JuJu?%ZWCХZW>t;u_C_֗t֗%zW_ХzWBNEkuǯQkZ}Eo!]??b+ Wj+t+zF#u_L?`?+0'j=5_a0FsiPaW2|/mo _.^ a mo@B[kްK aB[kնatm$_XnzKKu$.1_ߓ'__^Nu[֗Y:ؤ>+.y:+uדNױ*[__ih>ڿ^[iz*i~im_5]{4xk=__xk wޞXk akC^55Jޮث a]Lha0q]Yu({eբVMUVKbE@Ҵa; & A!a2:1LS׶#+[ &+&VlWLUMFT:jmCI#pa7 6zzM6lM6FI6M6Iti7 lNa#p4bP푸piIġS#pM;a4M4푸iIm5 #M0n00j&‚ ("9PA 0pv)h00¦ aaa0A!1AAa ATL("940aA4‚#a% ݦL0 ۠0ba ia000 qDFR"""""""""""""""#)HzWWWWzZZZ_]W]uYĤ+JҴ0T00006+b)0L `(dgeDv&Yw<<Ȟv3;CGjyy3kYȧ 0BL(PY[ L*aBL(XT (\(PYY … \pppvhpA^M@LJ8S4D_W޿Ua"'" P^x79!HN ȧqM<)>Y9 !"`!%dL(< L$"a9ѡKF`qM<)oM&tmޓi:NoE]&E]& \* jm&f¤6RoUo 4uI諤VW 6o}~%:}[տmo}%:ޟVT=_ޟ{oJoul_[z}NSVNmޟ֕}Uu]?^i^ V:V]>i]tK-+ߡR+~Ҵ_ccإ_n?5C>a t8~k~?V'!_k ?0?m?25Yi#a}a(}0YA  a@o n_@a%K %%:KKm$a῿K i}I}[iޞm//'WNK8O~N'N묝_S)UzY%Liw'_:+KKmm-m-}mvmKmUm/U kk a oXk|54kya}_Pu5eױOa}ꞹ޶)P鰘"W^6#.aP)E@`hW^˯bث a]Nha0E@=C+m&O+V]v˦)Xi27 4a $푸pM4i&LMi1(v4M%l4m0i|4i7E$* 4ai0ii27FġPa6lMޞMӴadniI4MiCA0aUKm 2^4L0‚ ("9 0PT a0 5A‚x"950iG&HAa*G: aa8a6MPDrj5MAaS aa aTm0 aa:aADDDDDEDe""""""""""""""""""""" """"""""8DDDDDDDDDDDDDDFR"""""""""":Wu~iu]-uiZXa % %ءMb `  `"#M/L]&W(uQ_Q_U6A <2|"N$ & Q:<0N$ x0g Fb5a E~34G#BD$LAQaz9*I.)`S| 3>pU0a0PT =`3apax*i4akL#aÃ2OGSGÇc SL*a#7G pkh4a=B5#a L0fpT=k 0cL#aP { #XMt諤VW OI4nVW ޚA}|:**êMwR :*M Ti7$M;Im'ë :aWIêMII6bT?ooT5om[ [m[N%CV_[nհbT<uo%:NۧN_p}wPuUV}W]t?=}t5֕A+ҽ++A_km}5__n?? q]/W}|W}KC5CC⾾Hku#F#u_̠?cFͦjiK _/ n@K/_ӨKm}7K__i}I}[iޞ__CK/K+h4t~N'__x"NE;zi?/4_Oױ*[j[i?_kk뤺_"_Iu0kkKj[Xizzz҆C[~uV]LSa2:EF.բtZ(z`X]'E+E_z.բtZ(zeV )˭ة՗]V]Z(~mV 1LVSa2:Ҭ4M6L4M4aġ #pIl5\Ria8i0dn\RiMpa6Ȯ)4al4iM6iZL4dnuLæi(v4i7 #pi7FᦛiILJI& 2HA0AA0PT! B ,AaA.@ :h 2^L bde0:00!A6aAa#G: aa8a6MPDrj5MAaئ)A  4A7 &1 """""""""""""8""""""#DDDGHWꫪ^-}u]E*K.KRlWwp` &DDDɿd&V\Y}3\yILRae)B #aN PẌi ,.t *M<0  H ,'ppppu l$88;@Mɱ + }|,/hI7/YPZA$IJeB%_Im%_ = H45kL#`=E`̠0a4ah { :#„{3}0a G40c0ak3PF{ { #@`L#aȶk #AH6eVWa&ޒl:**WIE]&p諤ޞ6b:**6~MRf}'I&MìC'Ul:*T:A6i:Ni>m'I&MM鴟oUn%:ݴl߶xmĨ{:mq)'8`{`Ĩq)Ҷ>A?qB_U}+JҿnAҾ-+Һ~~C]:WZ_ZZWtZW[ko___wc]-]W}ء_CCCw?8p]CVF ?1#`?UVa'UO?6k?|  a [K_K o_6 a;Kz_K޿ ݆wIat^Nm/uNuNx"h<YtwW(yq?I'Km.KU}mwմݴ}mIF׆57 }5zzXk5kXivO ^P׆Q h]&[_);.ClWV.ea0qVYt]}YuWoLSLSa2:鰘"ULSe՗^H%Xl4 &LaH)4aKlM4$i i8i&ii6znM6F4aIibPM0i&OM4iiIiiCI%l4;iL6ilÆ$0A!AP`06. 0MAA#L0 0i B AtA!AL*!AL&A0 5A  0  $ ("9A0PT$Aj 0iG(""""""""8DDDDDDDDDDDDqz%__}$.J*K&\ @0Q߈dSL)2W\;vk3\&vkFv/L_T¦*aB 2h*iL*ai6 .ApZ888;M4@B"Zc%k2KD] Ў%)cZWUo&A (KY.<O$ LrO B f0DNG8g3DNGGGr'9dfa#C"42:32:? !)mݷ=m}Nmħ_vݥ)uoջobT8[_{m[^۶Ҷն_Хi}}׽W__t]׺WtVO]t]}u=+~Һz+AW^UV[kkuQծ[QpC_~⮚!C Wp_8p8z_?0a#u(}0YWsWO6# 0 8Pu [kx@aׄ anÿ/B_N-7K%l7/6_7Nm/ ___]I}_~_/Kom/Ko kEuP/'KzcK'^NOS)ߚ+N'5'دKN6+(yOOLm_EW_EKm/EUKm&m'Wm/EU}m-m&ooߎ +_׆~ xk׆ҵiC__?kJXiXk~ڵzNhLz밿_ { V|c.+bT l&GLSױLWu[.Ohu&{ oLS_"v]1LWġu[Iv4bPI#pNIl4Ӵa#p4ӶF27MӶiIim0M6M6laI4dnidn4#pӴaP҆il6M4MmCI;M6UI K0 A $ML 8"9ANa6  i &AmA&A &h2\A  %N aB#lC6A8Ds0 PDr AA00 A0 0DDDDDDDDDDDDe""""""2"""""#)DDDDDF/믯+JҴ.PPPP\0b)bb 0@`DDDG#;Fw4w}_o*{im調+f?iﶖ_'Eim_մI[}j{_ P׆k5 +_5~k} zV)=};.l+A8Wueح]}e eױVz SE@MYuTC S]v˭/LSa2:z.IpiCIҦMv4aM6M4$M6S#pM;a &l4NM6i4iMCm&iiMdn4am4l4MiIpiCIM6&PDr &d0pk „G8"9;  0 &aa"9L a8a 0x"9PAK6ataM0/ TAaa00AtaM‚#h2^A  %1  / 0""""#""""8DqH"""2HDDDDDDDDDDDDDDDDDDFޒں/KKKk+K+Jޔ0 $000LRlSlSC+`a A[0@DDDDDcL+!dd,/&Y^L"i&Us\eT³<ʮvk¦x *xPS 0L*aBx *aS gNBBp\(T. hiAhvviV? qt>S]땓(t^M,'2:4"o0!0$s0g%BTd|(D$LAH"# a2rS<2,Љ̎y ĂL2A#E ĐI{">$Cs#B4ў0ef0JWx&rGi2y x349i`!*&9^s9S ᓑN#Xza0T L* #a,#f3}0a{"٬0c00ah (GT0{ #5#a0ak3LGT=0a G5#= GL#XPd[ c =0aL#XS0T= F=E`̜0ȣ aa5I4 t5¤UI M鴝' 6l*MtUU 6mI'I(uIH7zA&MWItN:*3 ItU*LE]&NRoIaWA6xTE_I¤UoM~%Cn%9Jv1*j{ Jڷ>oOq*Ju?m=ݷ:m xh+?WV >/pFa6m6?m?1[~m3UuNÚa?aU̓?0Al??m~u=x@x@v {a__7/ ީ~/a77~ z_}~_Z_F_"^u),sREuׂ)O~N'N묝)']"T:ib֟b/Ky:uױ_WKI~IIm&Im/Im-ݴF:*[i{j^調__aկ5_a4kkXik[5pPרk}}_׆ (k.O]՗[1Vm^.Kazb*zئ*C+`]{LQ&)Rئ)݊l&G]1_ _N]u&{ _l&G[[S ˮa-Y (i0NaI4&4aV8iCJiTMm44چmCI4bPJMGm4tpi4ᤚiiiᤝ#pdni(vIIIiÆvlM4dna/&. 0a%Aa6 PDrG0  00Mi aAɅPDr a02D d 4A7 & A06a6 A6!L L 6A   4A0auG  L aTDDDqDDG""""""""""""""""""""""""""#)HA۔`----/K뮺ҴJҴ+HKC pPPPPQTA1ILS1\ `  `&DDDDDɱ|;$r ̇&goyyf"_LFUr3;ȾAs܅J P20 aBL)L(TL*pA <0 .2  h hpvhT"X|NΉjikhDIo|']u_WWIl]W`4 O$rXBq$f )8DNG2:"0g0H,?3PFc',4,BVLrKY/< a $0FOyNDhVG0G0g 0B&0e.)=B\6A&y`> İВʼn$ePdt'(F{ { #@`3aǂAa#aÄ{GSOL#a4= 3y`:a„{"0f{GÇL#@aâ9k 0cF  ?*a 05 aPxG5 F ip̒4ƒ4a4L#Xza07 &|:*I6 ۺNaVWH6ME_It¤:*Nm:IME]'I W i?6aVW MtUvA mpMR E]&m' oOħ=տT5no{oVտNz_hta9^/uߓ'_),|NE<U}mwm-m_UVD[Z}Wm/ }] 5 +__^P^K^׾j|4~P]{ ˦`VYt]akI.V˦)=}^ur [u T b%P+z SE@MYuTC Sivl6%a mI#pM&8i&Laġ $aPM4apNMiIiiCI4ӶM&i6am0M4M4M;aV8i4I4i4aA0at‚ * K Bb m0A 4 aAK:0 ("9a0d0#M6A8Ds0 PDr AA00 aPAAaa0 AAaL("9%h0 ""2QH"""""#)DDDDDDDDDDe""#)+/K꾾HZK,0T0 % C XMMb00`  `"""?ɱՑeuSPd;5Ȗm̀,3I󲬒uek?TxTd (T¦$PY[aBM0L*aS X^(A ¥ d|(P pv ;@4;M;@;@|PAWaiB?VV8_ލo u__~U,u_^M,fyfGEfAD& IF>bNaf#١e>g0O$rH< q ĐHz2 D(,Љ˲03 PAx7BH<zf9Ae9f ,0)=g !.`Gȟ0)>E̎0dGG}~`NtӃjmnO~mx:m?CWt5BC_W=ui}u}uiu֗i}֕Хt_t׿_Ǧ^k[ouu?{oVֿHkC_a#Wm>0'laivvaX@ _?ۯ{uo7/Kz\%/߄7_ ~7Hm,7__wWom/K?q?:Inz""uK8S'^)S'^q?W_WҺЧEWm/m'=D[i6(EWU_4׿]okUֶ|5k߯ o55|5___WV՗]E@ze LMM='l&L*ˮu֕l&GO^L .ئ)݊l&G]1_ _N]u&{ M4%#p &laI $MᤚlJl66FbPOkI4ؔ;iCiMlaI4ӆ4 &;alJI(vi 4MNbPM&4M;M;M64dnpA."95 B#L* #@u a@ atML* & &. PA‚xaAaA a 'G bL("9 2^AnaA ۠00 M G 0#L M:#Ma'DDDDDDDDDDEDDDDDe""""88"""""""""""""""""""2HDDDFRnvZZZ_UI%]~[ZMiZVl$0000=lPLS1PaRR@ 0Q&Lvc5k"fgw3)3\fDfC? Tk,:P T‘P ( P8\.XPvPp 8?;Mq$A\-GևAB__T_b '"r(Y'#eeGAx7aBDGSi`Lг`L$34H)8DNG2:#Di3d$g$`!0{\(F= F…A>G6S3Pϭ6@= Ga0T4<(G-`3„{"0a*a*aB=8G{ 4=aASL#`7IPM pVw}47C7E]&êM6Rl:*&o 48TE]&:*I6 ۺNaVWH6ME_Ik`Ĩk' %:%:_|[Vo_N{mĨj8=z=ZWB] W]:W_u=WUZ_UuQ[_QVo?t=C? _v?'_2|f0PF9ͯv_x@po7/K޿7/ 7~7ܛQ?"D%y:uE<{O^z_y:um_ҺЯKm-m/EWUK}}J _5 xk҆߯g_ k/_O^u]Z(~V]v˦+Sҫ.حدbN]u'{ _zP xi&m0M6M;Ia8iCI#pm6kIim&m&M&Ii7 =4ӦFᦛ &FINL4;M4i4pDr axa0 #G&PDriAf  aaa M:#M6A6a0 &" A@PA00 :#DDDDDGQHDDDDDDDDDDDDDDDDDDDA+KK\L+I/ % $LP 0Q+gu?f2Yʲ;WfTy\L|)6[¦(T¦*aS *aB(^ .    /hvhpvVvt@v1ʄK>%adPU2h]W]MH1,?2@L+"/%C<&st.F8yH"Afy2A " PDfD&HˊlNe <%d .HH&9UhAH䰄Ü9* %Iљf ygӺN:*3UWI:*7ޝuոVoKPۉPպp{mVPuo]һmuouun_[PNKzx {m[%CBZV}WA+/ҺI]UzWOOpt)_V=i_ WQQ[ZonZ_KkGEk+lP騭C_+!Cw0d2U_2?F6Bkx#a#FQaSiạؖ?n/ ^/K@@_a?a/%:P_7K w_;K^BŴ}_/ҿ_ _|O4W]]_&'Y:u:^Ɨ~Nb''^C~h/<묝x"_O^m?W:um_i$[i6^{i]Zm-__Km/i?<4k֯׆mo4k xk /i}׆p_[_ᯯ5LSLJta}V/[Lد;.zb/v+zC.`V]1LU[ױV/֓VئduV .ClU4ilJva4imiM&paġiIi +ILNtʴi7 6v8i1(v iM6lNL4m27 4ZbPN8i&vM6lM6FI6ad6L 0 $iap 00bdL   2Gt 4 p06tmPAAd0 40i#dAa&C &1 #L 0 *j 1&Q""""""""" "#DDDDDDDDDDDDDDDDDDDEDDDFR"""""""5^^_K]WZ]Y ,0ᄢRbP` a&YOs ,;5#yۙ2Q">wg Ygs<aL 0G„x 0 v;43 G<PB …G I6'¤PA#PLSB -pkm:lUZARm&5 Dz fi{fEi5٪w-ET_}_޺W[[R[__ד`#<гB ̎!0DT%d 䬗 Ĕ"|o1#L Rr'" y+%q$ IYH!1g<G !<"&9T%99D%Da3G0aA!0%BG\Sfx phF( K<("#2(,"B\#!„kG=0fpT=0a0T=pF*`8G,C0cj aF=* (*a|{ :#3PG{F9aLGS*`̜T3|#@a 5AaL# :za0akGSi&i*Ni>]M&:MD6tIALӸuIH7=mtI¨PMXB 7 ' 6Rl:*AA6{MRM$ޓaWI*i6Nl:*Mտ%:NSսunoSoVSmbT0xSNJu`Ĩx:ڷq*ݷ{~J+KR]^^t)]}tK+ҴJ^ص5Ҋz~cW_ߧ?_~]t8_5C_V+j+t45`?aaiFͯ[5Y?F5y06%nnO{kx@a/_K 7Ku mK/Jm/,7[^b'GTN~a;SbZ'[>N".u%Liwױ_q>}*[i>O[i6_׶^[iz*OuV o{__=v^Kk_ui~ xk|5T ˮCث.?bm/ 61O_ ?b ՗O[/LWiZV]=tlSea2:د˭ح]~l&GO_eױ[dnlJ &li4M8i27 4vj $M;dnm1(va $M6FJM6FᦚiM (i4M0ؔ;M4MaҴi4M&i 48i4ġ $aVڂ TmA " bpDria aAaxaa6ڂ0aAPd/ aAa&a0A!1AT$A0 S &C : #M0n00aaAaA0PA )HDDDDDDDDDGDDDDDDDDe"""""""""#WWWzZZ_]_iZVXa(a(a/LSlT `0 ""#dvIyyr2w<s_!ydhgCL(P0 B@g\2 =P 0`4xxPpˤAt.A &Rppa@;A $h`NJcu: :tTА%5$_F便5'UWI1RU_I2UHuUE%UHuu}y6FaD 'x&̎32:H䇔`5~`2:=ex0"rPk<OĨ{?WC^n֕A?WC^] JJҽҽ/tV_v?M鯫k_[+W/?MEn?CCV5a5_0`10FjW>{05_a9?OlK a _u n^ a?%,7%?K%:7Xo _K/H=ޗo__K68"ONiK~KVNޘדb֗Y:ؤta=:0E;uBIK~K+U4Km/EUKKEkm-m- z_ }k__]~k}]Յ[Jealb ޟKiuu]X"W+i' »_ ˯z*(vLeԂ[ a0E@l&GV֓ai27I#pMl6;M4MI4MiZI4&Fm&mIvvitm&Ml4i47MCICm1(va & 0 1 XPDr mAAʂ  &a0AM!AAaAa'm0 0Aapa0:wi 6 2^A46 iG ‚# 00aAPd """""""""""""""""""""""8"""""""#)DDDDDDDFR""""""#)H}]]_^}uiviᄡ1P0 (64|k"Jd/;/[%ٌ짅 *aB 0B…  (PP`2;5Y^Eva/u_U뮾]uy6 3hY9HD0g #BND(""3 "BG%I1d  sg6F0H2 dQas#hAH䰄H$>0T5{ #5 aÄhO*aȸ{ 0aA40f`:`{ 8pd[ L#a oh #XxF{ { #@`3aI諤ޞi:ME[E]ފl:*3M6R \* ªM*uH64*6l*PMޓޓh&Imޭj)Ҷ J1*mħJ߫vmOJҺ?AҺ?]>ůQonZEG1_?W_u?C_5\5A0%6i a ۯ _n ᰗ_/_Kҿ/K:Nbu/uu$xE4^}m-mU4__m-]_xk4 /u_kXip ]X_=oWV]lU-_eV )˭a0E@.* vMpMi27 4dnI $Ӷai0iiLa 4a;M6iJa#pbPM0bPAL bL0 ڂ A%aa8DsiNaPABd00 #M0l(   Pa0DDqDDDDDe""""8__i}ᄾKI'  74̷̄eK#3VvU޿VۉPպp{moPN8~~Jm/J~JAҺz/m/R+JAK괮~}+Jw꿺+ߵcר_}{_]~Zc}ߧ[tV]b+tt+4??EVt?(}0YA  ?O_0j?f?sU_koտ{1kx@[@ _ % : ~K޿նa/_Ko~LiwE'YES'Z_ߓ']_''__^Nu[Y:^Hioi?imi_iiuk|5 wXk . okk5k_9 }5zzXk» C`]Yu({eբVMe֓lUE@dueav+]nu_zP v]{eբدbJ֓dn5lMCMm0I=0iCIil6;Mi#pi6FӦtNl4 &M8i0bP4MaKaL6Fᦛ#pᤛI IM4j l( ‚#PAj b 0AM00PN:0A0  Na0 &" A@PA00 :#AaSPAm0A00N  0i@ ˆDDDDDDDDDDDDDDDDDDDDDDDDDDDEDDDDDDDDDDDDDDDDDDDDDDDDDDDDDEDj/"ͮI"nbK %X`L(&3LLgiy7[L,f+̴ʮJyUBB PB P (Z (\(PB……88888;@)fQ%h||_UW/lA2r 3'%42:=ePE PFyfNN^hG\Sf{?2!0f6XD& A$ : 9" a Y1ʙ* L/dMH~aBDb73NY(,"БR@ȣ18ePY4"|NY13PE2r4>hdt{0g `?*aaPaG{ 0a鰚{ h(*aȺL8|F40T FaaL#= ੄{ #XM7*ik06S 0aL4==0a#@aSL#a*aB=4=E[E]&&êM$U&Mߢa&ޒo LaWwh& E[E\* 'I諤êGâi>עa'zM6oPMސl:E[E]&M諤tU I:**6oE]&â'OmNbT?_~%:%C[ooVP[NPSm_N[N^l^lW)_JҺ{?u] h?JJjҽ+z롪Һz+uucV֣n~5V֣حXoGE[GQkk?|WCX~+t+k+4?7++a0#׾Ca0?sU0j0jaͧ#O0?@L?[n/? /8o/Z%KB_/ ~7o_/  Kߥ}___c ww_ߥ7&O_:Kt,']=%R_yEu;z'_~N"/DyD)`:  sNGBk4 KL= L("s#B(/A0g 0di2|`9Ѩ `ˊlf  PE9f M PMBD#dfdtu9Ag\D! 3za)a邦#@aj?*a 05 aPxG5 F ip24ƒ7o{ =0a{G5G{ 4==0a#SL#5 G0a 0fa*f a`Ç0T=0cL#`U0azi7ޘu m&I uIUm&âU Pho l:*i6O諤NaVWIz*6p8tUUt7tU E\(tUtItUE]'MNt~Mn%C%:_VSKPۧom[Vz~{oNҶնoNoz{m[T=pC] V}WAKKҴtJ+U׶}}i_Z__ZV_:WZ___mv?>-uK+B+k45Ck+⾿ ?aaFF_?6̣F#P/>0a͡l@ _?@ /00 K _K   _%KKwߥ6_Ώu/_P$_/zcͧ'E"/K'KuOL:K8E<NKm$m/ݴm/Im'K 5֯׆k~kk5oZXk]*5vKث eL޶)[lUdue׽Z(}_a; eX^du}[]{a{./#.C)l&G^e֓a҆I7I#pm1(wI6iI4bP6idn 4M4laI4i27M1(vi &M6M6FᦚpM44NMRil4iilJMpM6bP4i0փ$B A!L4 @%i08Ds L 6N $BL t a M0L( @ Aaa0ia#AAɦAA % ataM0aA ("9Aa0 $ B (""""""""""""""""""""""""""""""""""""""""""""""""""""""""#\%La߳r/9dd;;)s[3S e43 PB(Tp4xaB…  /h [ 888;@I+ &OɚVR뮿_U_:߮E("\ag( AN%CLg0g4#LD$LD 9*<2"3p0v\B42:4#<{2A2r4G3#`7GAL#XxTFf0T4uSO*aȶo00fF5Ak L45kL#a0c*at=zaL#aASi8U Ro 76z*âtUfE] U I*ߢmtzI&ta.M*6Rl(tUݷ{1*a0aͯ@mo _ _@@/@-@K_^Ku%넿 z/7Km+^Km-/]i;ޘK/:/4_OuWBҿ'_<-K-Wum'KmWm}SKKߎ_K5kSOko3ᮼ4a_k_߽=Z+_ئdueaa^±_&uV +a0E@E>,pb 밲 abdti6a &#pM6;Mi#pM4M6F#pi&#pM4-4a &FiMiZI4M%ڴi &FIlM4iU1(v#p6Fᦚl4dni 4i1(w=0N *i0 &N !am0aa d0i0#Aa:0 aAaG(Ds L @ A5 a#L& 0 L a( L& AAJa00 0 (-b%0"""""""""""""""""""#bDDDFR"""""""""2/J_ % %MM6)0A`Z4ﳰLeVA3s#2\L%7, aB<*aB0M0+3C:T4xaRppt' pG /$pvhp[[jM:A*M>%mx(K$IN}$kk-U(O_t]ZC-&2T<5 ᓑNa2|xD呄H"'"x<0d ("fy24D&B Ra#9D&gg$BD"|Ü FEGDЌNdtfEɂ$AFb{alA 2ا.* l/]1_i6b "V#pl6M6WMo &$MiCF $ؔ;M4INL4;M4i4palÆi6il4iMFlÆ4M8i0ML4bP4Ӷ &FᦞaUAA!+am0Pa00 &L h2^ &aI@Aa B A 0 A`i B0i ۠0 #M0m‚# A)h4/ 0n$6A|DDDDDDDDTGHDDGHDDD}j-/ܗiZ]ixJK1ILT A 0A 0Ql_2gq3v[,޼g#S"yvc;r ¦i (PBL#aSLa(P `g (PB In $xh4@x;MVܛ*B&ʪȅ4KUvtB,Țk|Y~i7몎:U_Uԍ_uU]u]tU:R"& 'GЌ YOOLOL9LhBF['ǟ2AAfgBq HxD$L9BB\d`!e ("fy24D"BS!A0e@ 1"s#24D!3OOPOL= L2r y8e PD2= G=#`0*a*`aA_p੄kGS0f0ak3}0a0NG SG{ 0f{ 4=aASL#`02xG SG{ 0f1L0AL0T0aG{ #XaT:NaW‡E]&âH6pMP_Ip諤6R} AWIWIRm'InaVWH6ME_H7*6CM6|(tUޒl:*TaWUl:**7諤I{ħ[m뽷v>߃Jtħ_j?m{ħ[mt{zĨq)zmݷ{mj:ҺB%uu_ii]u֕zt]W=i}Vt++JJ괯Xk_[ooKpMt>+4?C}C?d9kC'[/PskWakTYߚ?_ o kxo aޞO'__Lu'/'_|Nuta>N:'_^m-KKm/K}m-KK}m-KKm/ u^[mo]xk|5 zzuUt}_]o^e1VQdue[.*bbˤ ]=v]{u]1_e}[קe׽6#I4jMi4l4NM6l4OMTiIFᦛm' & &LJMl6ii&4M6WVM4ICM6MI6ii&4M6iM& 6Im&m0M{ւ  0At0p0d0p;a0ba5a‚ #H2H aUA"9aA0 h0 " AaAdA"9aA0 &aaA0xa aaaaAa (-b"8"""""""""""""""#ӄADɲ3ZƳ&wޙ(̕2fdd;FvO?4 aB(T¦dR33x *iL)43 BB#4/‚ Aivhv%vb&#)Xa,Y8&G) &5%ku]u_U]g?𞫮_OUU]u֩lIly6#?33i0N= LLr L8eD'A!I9 PD(|( x6 %C4 sNDfD&HPD8fOffGFhdtKPdt x,kG‘fGG GFyVYhYLrKY/< f (PT40Tpa#S3M03a = L#a0aPao5a FS0f0a{ * 0a*iA#=a0f0?#fF00a{PT=k5E`\0a F=Ds*aÅME_ l:*Rp諤VW OUm' CMU&&ètUl:*?i®M& E[E\*P:M66kzN' pWIBo 4:Apm&âp{o][VlޟVo%CN%C%:ۧհbT<VPSP[ [{m[[V%:_tNҷm+޺+KJ+KJO=u]Jz_~tJccW_V^^]v?bcZ_խح(_??_}__=_hpa[xCW6Hͯ+sj#ak?'?   ___ o%% ᰖ/ %K%o/݆}oK7Fk/:?_uu$4W_OtN/Inؤb",?-ץcm/m'm-m/_Wm-} ߧc*i]zk~4]~҆v݊.. ՗OV]{^uedueױOWV]lUا+ ՗LUM[a2:zeOVLWM_ai4l4i&pM6L4M4aġ 4چlNdn i4bP톚m0Ҵi4aiI &8i0ڴaiJa $Nvl8i0dnm4OJI4 AaAL2^Aa$ L tL(* 4aPDrG0A #L*06Al(*0 "9L4& aa#aAɦ0b2^ 'G(Ds &aL M:#dPA &)C%L(""8"""""#""""#DDe""""""""""?WWZ__a(a*iiLT  `"""?ɹFdO2 2hGa3!L晞v "):aJft0pa v3 VP$*aL#! <0i&…PK g*‚(A Thv )H 6k)F(H 㑴JdMx洂 ;;ѭGz5/몤/ UH^_]WtU}'׮?cɷ">FNY##K<, a엞 Ć`9 #yf dNZAf (KY/< O%d* Y,eGAx6"Zdtg晡>`ʃ#l "\Bq"D$LAff "A1ʙ/%dn$Eh4a=B5#a DLJ3t8*aSL#Xl&=0T45 G.<#@aLEpT=`Ca>G7S3LϬ#aȢ„h #`{pa L#X`3x3}0aB=n3=#aÂ0a$M;Im'ë :mtzI=Rl:*3M6 aWpi>m'wIzM?I8\* aWI|:ޓo諤&iWtnM?߃Juom*D_m{Ӫݷħ[JJu>uouջo%C%:{un[}8}vKJ~th~Jz/~}-+}ҿ+޿Jߵcר_ߵ5Ҋv?ݏM+cbQ[?t8b+k?^Pak) ?m??0`/̣?ac[[_v ~__a@%K~Po7//m/{vi~~H7~i~H^: '_o]d/(whدE;SG_J+#G_{.d%^Hioi?i]hVHڿiz*i]hU^5ޞ5[[ OjS߮֎___׆5Wb(~LP+.EbPIX_ )@zNhLzC밶ֶ' )P.-**v]{ ˮ?b27FġPa6lMޞM6F4dni7 4%զIv4bPJLÆ4i7 i&]4M6i&4 (i0dn aIiÆ &FMa8a6MPDrj5MAaSam0M0 aAL(,4/ ! &PAL(* #P@("9PA  B3W &i AMAA &l "A1b""2QHDDDDDDDDDDDDqH8""#)+/I/Di7i$VJ*JIa A(a+LSlP 0QmQuLy\ 5j3#K;$#yVF1̌2i<(PBL#aS S!3# x :N(PBl. <='I;@kDmgbHgf;.k"sZ;:mTTG?]W]W}Vz_uWjL)'G3p2'#LDfABBq* gg&9A F`"#H2*3 !!84x&rTy9F` 0i ("| q+%y# ĕ9섪g`!LrT<\Ÿ"o0g 39B ؈#`Gt= TFf0T4=#XaDŽ{ 0dQ=G 5 4a0T5{ #5{ 0d]L#aASEGSi=^0ak3LGSL(3E`k #g aļ0T4 G-F=lGa:**tU&&âOE]'IH6tE]&ªMMDME]&IoH6tMLm tU&ouIH6aVW Rf}&}&­zZAH6z**C0LޛI[m}Jt JJumjm JJummJvڷmkv߫oO{m:mĨkj߫q)ն=롪Jh?WC^]t++ҽ+z/+Һut5__n[꭯Ů[ků[u[k⾇1X~C_CwkWa櫸# a?#Fچm05W/F=0l?@@nK n/a,7 /Pi%K/ i_Xo޿I,7'K8),uu}y:./+~fd+R'^_u%Om/m/KEj**iu E$~k }~ᮿk oXkJu53vk˯b eՂ*ՅzeױWV˫T ]X]uRbD➿(~6#TiI^P*&޽KazI4M 4Ndn i &FI6IlÆ 4ڴailÆmCIiM;II4NLJi4iM;M68i0ڴiM4M4푸v8iA. $aAm0 A0xaL("9PAaB#L*000i B a%` A am &IXAaM:vPDr„G=%0/ amm"""""8DDDDGHDDDe""""""""#)DDDDDDFR"2---/뮺ZK+JK/ % C C C a(a*lRlS1BB   `0`&Y,^L gjL;3&v;+)t… 0S .v3C)N#!TPRppBG  A0vMUIGʴ?*M Ȓ"HפAj u뮿(z꾓]u_uImzXɰdQaz9#ιNA0aI<$ )'G3pYf E>b sND2:3#LNPaA74<* #X`g=u= *i{ #X= FS0fa=0Tk 0ak00ah #~a0T=(*aȣcFN0Tt=a{3e0a4aiG-0c*a0dSbăaW m&~oM&a:**6MTo {Nmt6tTA6ki:NaWI‡E]&`im tUi;OTn!i3zm'Il:*8P諤l Jq*[mNom) JOڷv'ջoPNm߃j޺+롪ҴJJރ:V]{]?^]u{ ?{u׿_Ek[oukk}G]oǦl+tCWt1U?_8h0pF2a]?0{0aEl6Ø?0?aK#a櫰@_j _ t ?t-u% m}7K-C~ P K%_ޗ_j/K~wo o7}I,6 [%uN"}ץ:oF_(uѢKNsO8(OPE^_Ni/KNi:b[imǿ{j]i~M^H7+EkݴF64u5C]k4'kXi}uj}oWV]lU-_`i1[LWal݊/]ՅbAb.鴷خ?K. `]j^H%t_!# +ILNdn 4l4l4M4bP톒i7 6dn :i7i4dnm27 ai27 ӆ4M8i&w &aI4Ial4jLÆ4i7 i& 4ڶFJM&4M;H΂aA8DsiAt"a 2\AA 2^A0  Nam0a6AM0"9B#L a4aG("9Aam0T aLV/ 01 Tm00 0iG("9AamDDDDDDDDDDDDDDDDEDDDDDDDDDqH8DDDDDDDe#u^IuY>K/pA(a(a*iB1P6A 0Q,y،fw^"ƲY#)#\Bgo^e…L(TL*aS ٫422M0L)t2……. pPih[VhpkuM ߬s!PI6%igi$VTIwuW_T]}T_뮪 ]}W몮8u6 UL'4<Њ4Afٞ!"` A<`> ÜK2r$ȟ0!0%BG.)Oױ*[_ k_[]~_CU׾_ a +__᭮ / oa]a}V/[a}ouVeEuzv]{ueX_{ TsE *$LSe6=u 2ا.*Wb(~L"WV]vYuhiYm-7 4ӴiiġRl4a6iiMi4iMFT:jmHM0amI4ӴNIMV 6S#pdnlJ &li4M 0MAA#L0aAta"aaT oAa*G: aa8a6MLG PL2\A!1Xh2^A"9NA06 0%@A0L L' &ڂ TmA "b"""""8""""""2DDDFR""#DDDDDDDDDDGKKKKᄸa*b0 0`""#fEFM&vjg`A漉e3vc%>WŤr7 aB 0 (PL).t3<0i&¤8PB …G 8U"+H*MĢCTZARm&#;;/]}W֫zdt gJL^yIG'#œ<(" pPD(-M3%䬗 HxD'B# xL!/DгB(,1 3œ0H2%ȣ0!0%BG\Sfx pϑ9#dghDAD% 9+%2XA{%y ^hdtS>b7`DBq#e cl]3t8*aSL#Xl&=0T45 G-<#@aLEpT=`Cd0TSL#Xd<#X=mZaL#zl&{ #aP`kh4a=B5#a L0fpT=0a0T=pF4a|:êMVWI4I&â7zA6l:*4Rm' ètUUoH76huI7E]& \* jm&f¤6Ro tIaWIiH7%:NNSսunoSoVSmվzv%:%CVPuo]տ%:NSսoCХWPCCV_Хi}}t5_iZ^Ut)\ ]i]tK-+ߡRh~J=zn]S_(zu~ߵcר_-uM+ukkz_!a af?m?6ͧ\GF#uOL?`?aa@_@nۯk [_a ~7-/%:Ku ma/_]_i__}նa _mD[Y:KbE;4W_W"uww1NtND1ߓ+tCO/~VCդi?ui?׶^Hio^5ޞ5[^^k{_^[]~_CU׾K׆[_V]vYuhiakIa~A0Sa0S C)Yt]l&L+b˯bث a]Nha0E@=C+m&a~A8Sa2:EFa6lMޞM6F4dni7 4%զIv4bPI6IlMlJġRiPviJa#pӪdn5lMCMm0I=' &Fᦛ#pNbPKG*6TA1Aa A Aa‚Ama‚ 2\AAdPA‚w0 bPAaH΂aA7vNMaA ڂ SPAE8; Aa‚)DDDDFR""""""""""""""""*""8DDDDDDDDDDDDDDDDFR""#uzZ_u]yhi[+K % % C v)b `A 0Q-3y+2Sfy.DdK;|fyI;\Lek*f0S *dX0Sh2&0S 0S da ¦ <0PPpˤA  ,(\*N.H .I88;NppM`ɰR'H$o;J?- Y^9(x洂I$_Ҟ+Z[-[ UWKWK>WU7W'W:޿꿨l( AN%CL"#\гPFy8e ǡ#0)"?6F"\Bq$KyKD G$s=< PE|J Lг q$ :H2rD%d*d F>` LrO B ((TFf0T4u0cGSL#X`8F5&p L#X`3a?ֈ祃03@aL0ah #aC40f0aB=n37S*i7#0=8*a#X`k3e0a`t= 76z* /I'A7aVWI* &I‡E_!&l:*&MWUo 4uH6mE]&3Nw&n!aWIaWIâUn JJump{mħ_NmQ8z^q)+v}/'~%:oAҺ =i]WOuoJҾ+J꾴z+zҽ[_ov6*?_=5k?QkVkoa_~0CC?+Cj=m~aFͧaͦj$?' F?@l6 ۯ/K%_ m_%o_Iao7Fi/7K~zY~KKE;D,w{NOuht:_i}^ڶ_uWium|4 /[kgXiC^k҆ualE@JW˭_(V]v ޟZI]1V)bb+^^|w맫Eئ+[ ˮ_]YuVdn iV#p &MMl4dnii8i0dn %M4aP Fᦚm4t 4M;M6iM4iiiIii=+#pMClM8i&iiaUAA! iG("9  aPL4&L& aPa0aa1bB AiAAh0nTaA0at0 aAa aPDr  A+L 6L 8"9AN 0DDDDDDDFR""""""""""""""""""#]_i}W_q+JPPT) `"? $̙䙕3!vk/?ضIrFvc%? 0;`!@5Bx 0B0BL*aLr.' A BB …G?A>888;@[[kQ'I&DPt9,br i7;kZ=u___U*+ܛYѡf 42|'G3BG$< s1"]M&Ĩ{1*1*JuOħJݶ޾P( Okݷ:m)+~} J=>ħ^)+AR/[+ҽ+JҾ+K롯I_?)_kVomS_^_n?^~+}{⻦Hp?fpF5y"nWf$koo@ۯn{kx@^_KH%kKu mKK//m/{/8묝%"h_{zO_N}ץ:uWCNE;uu$.1_ߓ_[i6im調j[i?{kumﶖi_ / }4P]W4k|5 w=i1Vbt6#zo[-V]{(V]o_av+bA3uLSLC^=]YuV» C`]Yu({eբVMiI4dni&I7 iI4M6KaMlaMm0alMM;M6m4tl4M#p4i +ILNtղ7 6%چ 6Fdnm&a"ba4„G8Ds0 aPa0a 0b b  aUA ڂ0 PL2^A L0a6!a&‚C :0 "9L4& l( ‚#PAj b㈈"""""#)-/K~ҴI/ C pA*iLRlP  &9\HɌK%n ̕r y؞&2KG¦S42 fF0M0 eI8\( K $x`I\(PA#Z;@@Ax;MKa&Q(vIHNy֓h%GֲĂIu[Kꫮ_O^]%Ku_KKkz-Ki/&(#LBa19F`a0di0L&9J L("L3 "BG$yPD(2:! 0dGFdQJ20!"`A #N%CbR(G•fGG EGFy,',B($<Ђ!ja?\?a@@l?ka/% %}K oKS'_Ou%RYb|y[tiz^~q?OW(y'_KյwIvm/}~PU}mwm/iZ_4_k=>3Ok xk .}_b)bz)˭[ LWMzlRiuUduazE@K}]=ua~A;tLP*˦)EFKتii᤭0M4&IiI6iJa#pӶFJM&4i&OOZ{^M6lJ7L6-鴘i&ġpҴiCI4ӶFᦝ Cm4ai=6 $aP0 :# aa 0 AtaA8DsiMPDr#aA2^b8Mi 0aAaAʃ (12^ 'G(Ds &aL M:aAj%!1AA """""""8""#)DDDDDDDDDGDDDe""#)izm// 6a(a*iMiLT  6NA DDDGTEyJ)>[jy\ek ^dpB=*aS d aB2aB PCC"aaBPA#\.*<4xaB(A .( \ M8Upp 888;@Mɱ 5M ;MD UVI6_}%[[H#R]}T_R_U&ϽW_Uֿ߮EYFT]U%A{%g%I" |"Pm!"`"БRuqM<)>D|hYGAx"Y* /<O2I2TY0 !0l%'ˊlPFfND$LAfy9f "9! ĐJO$sFb8D'" čS0fiN L#a i4=h#XaG,C0a{3u#@`੄{*aƒG`5 =DskL#`{M3}0aB=n35#`3ajNG00TS*aȸ{ #XgtUoOI؅諤AA6{MRM$LӸT&|:êM6t-w}47Ct7諤&iWtmސl:?aRt&â4i>o*)'߶VPuo]տ%:nJT?SD{ħ[Ĩo:mq)'8`)Juڷ>ҿo+?i}W{?O Wii~>^[iVХpui^ Z__k?nZ_zc_ۯ:w-uMCCw騭?1|?{:kz_1_C_01j+Pai5a?a>(}|f?UO0F?m? _/momoۯ@B[k_ K6%//m/{_o7}￵_i_uuu$.1_ߓK4%zcy:{:ENgjyo[j[i~^{kumﶗk׆wޟ o_k} o a z__[]~_CU׾+MP)鴺[ M)[L˯b[1[V]{ ˫. u`M޿ا.*Wb(~LP*M6NMġL6aMKdnm1(v4&PiC6Im1(vI4i4iM44M6NMMi $M6 %MiM6iZL4dnuLæi(vւ &l PAApaLPb40aAa"9 x 2^AA 2^AAaAɦAAAh0nTaA0auA Aa & 2^AAd&iwiPA6aDDDe""""""""8"""""""""""""""""""""#)DDDDDFR"""5t}^z]t]Xa$a.J bb$`0Ql[yW\/;Vw^de^v*G`o&,NY#:T… 4•s*a 0 apBQ PX8ALpppv $A\|3B$;:đZARm&I$%Hw[[[/ _U]T_]~?ꫪT_U]W[[W^M2:0F0 !,l%'ˊlO`r$`Sp $A$VKɎW pΙ#eBa1ʬx&0H$I2:P^yHU>`$3#0`1B\JyH䇄Bq!A Pl%'0J`D4"$rG=8}0cl0f:#MZaB40c FSo5g=8G&SG70a0f0dW0f0c0f&<8FS0T5(Gh #`4ȯ G5{ #a0T5 =0T={ #@`„h #X}'wIzM?iW oE]&wi3zm ۺOTI' tP64zM>]M&N'A6l:*7:OIi諤uI&l:*7 : *)pouստ{o{o[Nޟ%:nVV%:ޟVսSouAJJKߺJ߯ҿ+KߡRKJ+++ҽ+z?ݏM_;}M^بM֢WCI_^W_CZ??Wka(\?A?P0_0m;_m|A0mo@_X@ _ ߄.%j z_/7K o7}/ҿko7_ii}ozzKwz_i}ɵG_z]`w^m>K1Z_)wKEuP~N'ISKօG_դǶHڿ*iM&}[UK׆ҵ]xkj55բuealP+S++a2:{ C ?+EO/`R `M.EbPI/#)A1Sa2:EF{[T lSeױVIp҆ 6Fm$תM4M6F(wLM6#pLÆnPdnl8i&lM4Mզ6LJI#pa7 6zzdni(v4ailM%l4i6FdniM0MFᧂ#P@("9PA  B4Ww0 a0A4l0$B#N 0N0ia0l aPa0Aj0$ئ)A 'G d00mAa02@L0  aPa40 a aA88DDDEDDDDDDDDDDDe"""""""""""""""""""2Wuu~]W]zVrViBPQPPPQb)b0(&Y,wʮWUY%xɦFgg&gضI2vd*]0fft0M4… *aS 0<4xap (\.' m;@48888;@;Mɲi7\5vr!P_WImo_U^M"БK #249љf%9NEYNE8fPE0 32xQ3B Ƞ 3 PYhYo$rH$s #u |NYBy#33H!"  <!.` 00fF5{"٬0c0aaN0 L#Xa*iAk #@`\P0c <0ȯL#X~F=#a0T{ taG†h#aFAL#X= =0f*aȺEXa0f0a \* fNtUta!諤P諤!6m tUUªMM諅 8ZI&p3NMi6Nl:*MRf|: i>l:7 (tUfNIi8P*7VPuV{oոmڷv`Ĩ~ J[:mN}|Ju>ħTj߫mﮃ?׽t;]tziu֕Хt_tХzWO֕Euqkk[G+8h}_zHp_qXhk}z+?FaWaF0݇2=69CU^).@U^M2:4#<>b_\ 3#ٜWfZl"& Lг Y gy# 1%9fyf "$VMH1,g2ELa* 92!g(#LBjKS0ek2|x̎0aÜ0e0aaN0c=0a ?ֈ=E`̬L#` Ӧ<(G-aF40T5(*aȤg5 GSOL#a4= 3V{ o00T=aLAa *`:aä6t u6*j:* oWI*LӢ tUUt¤:*I-A6l:C5Ti6tA(tUUl:*AWIRm'ICaW¤n%:D=D:mJtm:m:q)8={mĨj8=ޭ1*Jum޻x:mҺzJ-ҿ+IOO] __i]W=i}Vt++JJ?+u]9TVm[_[ +_}_CHvl?PaW#We9kXl6kuqu@ ) ozzK zm/Kw_&O8,r?=1ON'^O,]wwI'_O'__Nu_wiz*^ڶWm/m.ݴK|5wޞկ=5RO (iZ5[[^ 鴛J׽oz}-eױ_ +Z1O[a2:A4`X_bzl&G_WtuUt}_]o^^aiIm8iCI4iU&il0IMӴa $Mm& A$iI(vi #pMNL4;M4i4l4aVmCIatia{ 40 . 1 baAAaa00 h1 0a6 a.  &l  4 ‚ AAAaa` L  %AaB#A anAt oAaqHDDDDDDDDe""""""""""""""#8WWW]}*ViiBPPPXJ,S&0` "?!JHayȌ/4s\y+̍3ޙL/"ٯ;Q#C:a *iM0ddT…L#aBL,HIB_   I… m.@4AUvppv$Q_0ATѭGzBI-hM2:4#l#NK Ǟ *KᑄNG<%J &9S?r'"\Sfx pϑ9#dghKFaBqH ȐEGDAљf ̊3OND D嚅8g3B!qM>f,Ў pϖA`B9d0a F=Ds `8*a ӰGÇ =aASiG„h #` k 0AEp:# i4<#a{G{ 0c*aB=* #Xa a{"0c Pak h#XfGS=Aa a:Nm:ITêOH& ]&pW N m tUjm&f¤7aW m&66t u TA7M4N&m&M$ނoE\(UIMޓV%:_tN?Ju߃Ӄzm뺷pl_o[Noz}AN^%C߽CN{uO_}+K+ҽOu]}i~]W}J+J?Տ_cߵ޺_ccb][Zk]TZK?V騭^=B**騮wHt;I-#a#uO̓?FaWaaX##a̞U݇0cbVa-/ [ aۯ mo 7_K __%oo_K a/Po  ~k_V_ ߆~}ZZ]I}WډtN(w%){]:b'Oh),sR|y^y?m-(wߥ1:_4_>hwմ IW:6EWJ5{k+_ߢi>_imn[u _zV[~kPukK}߯Ko__C^_|4?bI~ˮEئdu*5azz+R ?l&צueX^A-+z+ad6#-WNlW]1Vba4i8i&pa0dnLJl6LÆi $Ӫdn5lMCI?ai0ii#p &NL4NV#pNm1(wI7 uLMjMN҆LM$a Bb'G 'A&L( AHaA& %L' &ڂ 1h2Gt 4 PDr 8"9K a  aA8ML'v@ L4aG8"9a """"""""""*"#DDDDDGH"""2DDDGZK Ivivᄸa.KIIIA A`DDDG e󰼧YfGD;QFw{!2*E&v]ȮdaLyɴ`PB{ )3C!H*a 0 $`C3p#aBPBPA#At  aBL 2a| RpBppppu l$@.:;M4m?|셕% &ƃYǠf'lXQKQQ'I㮿ۮzu_K].muK֣A "& :> Ĩx5JPdt`f "##1 cJ$93" .)t;~O_C] _Jh?/ =]=u~z+һO_w>v5cp_׆]-wյ/+=~⾐Znb?CtWC;?}/kս0W_waX#um?a=f#/-9aۯ}- _/w Xo_7K z{d_ӨK%/޷~m/ im{=c'_N4OدwmY:jE<N[_:/4[Km/m/5K]ETҴmm-KKI |5׆}_5gk\5auw_k5kzv]{eբدP+鴭+Cد "Va2:+ad^֭k*1_({`]oOawS]Յb馛IM#pMpMMmpdnI8i&iii=Cᤝl6&Fᴝ7M C$M&i6l4$iRlJ:FiM'i27 AaAA5a 0 1 Bx"950iG Aa0A 'G AL'Aom0Aia; 2% A A!MT! %&‚ &N0A ' "9 """"""""""""""8DDDDDDDDDDAH"""8""8""#W]_&I-vvIvi 7 $ pM[bSbA&pʐ( 2f """"? endstream endobj 83 0 obj 128781 endobj 84 0 obj << /Type /Page /Parent 3 0 R /MediaBox [0.0000 0.0000 612.0000 792.0000] /Contents 85 0 R /Resources << /XObject << /Im17 87 0 R >> /ProcSet [ /ImageB ] >> >> endobj 85 0 obj << /Length 86 0 R >> stream q 614.4000 0.0000 0.0000 792.0000 -1.2000 0.0000 cm /Im17 Do Q endstream endobj 86 0 obj 64 endobj 87 0 obj << /Length 88 0 R /Type /XObject /Subtype /Image /Name /Im17 /Width 2560 /Height 3300 /BitsPerComponent 1 /ColorSpace /DeviceGray /Filter /CCITTFaxDecode /DecodeParms << /K -1 /Columns 2560 /Rows 3300>> >> stream Xh"'F2Awe-U p@(AR08@ ʰr$aQpapF 'iI¤I6'0NMƊMǃr_Ah h Wnzozo^]_+~ /cүH. aK%cI/ ?ۦJoݴ4 Jm~~_[i}/-ZJz^%uT+uD5IפC_KI$Iz'vI.-M!&HzHv҆Z4Il$% $iZIJH BPOb [J@a0D|EDb"#?%I(AG0!2Sr  BN(Tࠠ… X)i6;?/___K_KCꪫM4Y`A Yy|d+ʳ'fM2ܣ;(gug 0P*0L,(P\*N/  .;@@Ak$;RDMgi$p9Nw뮸 _?W_]uM"A#*+J&aK8__/ou~B>22 dt0L&BqIbfGD` D!`B8)`3NZȐDGF'/ ',BhHyBq$ m L PE>0aIx76A{ #aÇi= #40T=0a=zaFÇ0a4{ 5 Pc*a0dPk 0T=ȶk #4?5 FB=b3TkGg4 = Gfa 3LG(5 =} MR i>â諅IMtUm&M諅IImM7諤ޓzatN:*3Tz*6p諤I3zm'A6~6t 7Wtmސl:t }&fޓi?Vտ[VۉP}ޞ%C߶%CN{߃jv>}>Jt=ħ_OJ믯ޟ+z+K++J+~+ҿJkҾ+Ҵ~cحbZߨ_u>v*?_t5⿺ b'^.N/(w_m/mm&6Iݴm/m/R~ik_i?Zk}i ~_Z a _5~iC_]k [SV]t(}[קaIWSMIb-YuWat+A4A-bl/#L]6T E@*˧دP*A3alb 6UM0҆L4dn 6IiIFᦜ4dnITpiF7M0M $ӆI $NM6FᦚilÆM&4bP44lJi $i&M6M6V#pm1(w K[%@Dr"9Jm* K60 4 M0Aa0paA4 ("9A a 'G 0#L AL C0 m0 NaAa6!0 5A%0 0atLCiA‚DDDDDyH"""2v K&$+K $0PPV))1P`+$ 0Ql2;f[e^i\Fdc%ynF;̃&0+33P P *}' <4x~...(Ph hpvjMv!I)4YYt>$U'g_Imo]}uֺ뤶&9BqIa L '"3 "rT$y.D(2:" 0dGFdQ̎r("3L' L?h:^%NP'^m=֗,]ww_'I6:]_D_Zm/ݵm(mEiݴwm[WE(i6Oi_i5_}V Z4_k (iZiث e]^=]YuVKazI-^ou]{ueX^A!+z+=m OV]{+vbzl&G_WtX_6l4Ml4iMFlÆ4M8i0ML4M;Il4ᤛUIMm0Ҵi4푸p҆I &I7 i&ġil6L4iFᦚvm4iIim& Fᦜ4 a 2S 2Gt 4 PDr 8"9K BbA ͦA0w AAd&imApDr 4 ‚ AAN 0MAA#L0 A@PA00 : 40"""2DDDDDDDDGHDDDDDDDGKKҴ %P]6)4ئ)8Aa 0A[vrhF:I__ݾ_]N_0!9i2!"`,fyBϑY <A#KfGDSQ8)ME]'7aħJO{m>J=8?Jui}1*JoJu??k}~mm뿽t)Kà5ӥ{tI+Ҵ~\ _ХT)Z_ӥi{ӥp׺W^%zW_it)_7WKj?cbWc}:~{_ccߵm/Æ+ ~ ֆkC?Q[=__CaO=) ?+Im;`/װPaU_0jioAl0u?Mۯ6l%oK_0K N-%6K _im_w ߆m+^KWu)siu/ԟ]uP'$_묝1^N(w)S4Y:>Nا4uد'^Km[K}_PECIm$m/m$Uvm'm'm/K$:6KUikuk (k} ap_^5^ oP5C^ {ima1]ua}YuSZ[a; L޶)[lRzLTu]uMCئ)ui=Yu1_ح]}du\0IP MMCJLM6%iI $Za &#pM6;NZl4imi\4dn 7M%LJI4ii0a4M8i&wT:i6Ni4bP6D<0b UG0 h0G&Al(*0 A.C !SL Aa0pDrpAK $iap '!aM0'AL(&A‚#L 4@ !A0 0mݦL0 ۠6Al( ADDGDDDDDDDDDADDDDGqHDDDDDe""""""#]_iKIu]ii|%)LT a DDDyhރɲeB2Wgj L-32 2? * Dh0x (P Ph2FFpN(\(\(X8:AM;^8;@KoMgu!G&kĚ/FB_WXVuH_W`ȣ0yN̎ pϑb_bb!E]+?_t?5C W?}2zͬ5WW0Pa5YYC^jF6#a/blKڰ _0l?@ۯkx@~ __Aᰖ%K oN-%o_ᰗچia/^m/zK/ߥK !>N֗:4YgT~Kzcy:d.y:+'DbKb/{O'_Lmﶗ[k_~IKm/m[J:6KU%m/EUm/Kk jy|5׆ /J[_ Z }[k҆/v+M*ˮ/LW_[.)vv&+bblW'2.uAخ/W&{.zPbث $M4#pM4M=4a-bPI6pdn4M6M6FiCTi $FIm5T:i6Ni4چi7 4Ni4ivl8i0dnm5Md0   a   &PAa0AɦAaam0&aAL'pAam0000 L' aAAm0 0a amAaAɦAAL&0"9Haz0 ("""""""""""""""#)HDDDDDDDe /֮---/뮔,viZIba(a(a(a Mb(l  `d%K;&y,ɲ3ضM;Fv;F@)yI>0BL) aS PBL(ZN(PPG (\(_mmlvD>M%aUBu/뭭W]WW]VMe6gSiB8)>Y0Y"AQfD&HYdthF42:4"ΤPENEg0{ 6P ۠l6? ۠l6?a%oK_K o ߆i{i%ww]_'Y:u:^%NtO8DdfiKh),s|y]:04_C_Mii?׶__ﶗ^i~ﶖi?k5k kkkK}KXk {[[kkK}|5_5Lد?)I鰙_ev]{ueX^A-+zm&b/1V)}X"OM˯]YuS՗[ayl&N++dui4ӆ &%M4M6iMM8i0bP4Ma4iMFlÆ4M8i0Ma4ӆLM6%NL6L4;a#pl4iMFlÆ4M8i0MCiI%a` ( AAA40:0 00bdL   2Gt 4 PDr 8"9K BbAiA100aAAʃ$"6UAa#G: aiG("9A%ᰠ A  DDDe""""""""""""""""""""""""""8DDDDDDDDDDDDD~/KKJᄸa(&B   "#M2[+ڡ*yڌ̔d=Ɍ;I>0x Ά0L(T<4pN4xa |/ki;J;@x;MHGm&Gq&kDֳ!Nӡ뭣[]}u~뮫[_]u^MFb(#FGFi0@g<">%C}t& E[E\*P:M6m&«MRM6Xl:tUMpWIAC2tMA6l:C0JAA(tUUl:*NoUl*TIl:*P諽$tUâi:MNoxunl%:bT6Sո{m}[{m[UսwNouոVo{m [[opbT8wun۶ZWCO]WA}ҽ>_t-]t)]t{O]WCХZWUZ_Uut++JҊuZ]]_v?(mj*+u]_?hpq_tWC-ߥ_{?t??4?CVÛP~FU[Y<5_6Wu`?a kx@aW@?@@6: K} _߻Fk ]WIiwo K4W_ODLi~Nu'NIix"hb:{u,t[kG_o(յPm-KK׆5ޞ׆ .׆C_4{^ᮼ5C__]{O_LWV[]&]b޺A-1ON&-b tLدE>.خb˭ai7 6iL4M;I44#p*FmҦI6MiCI4ӵi4ildnM0MCNl4M4ICM6M &IMI6iM:i4iM4dn4PAAaapapa8"9aaB#L AA!1J0xaa J0o JaL M0Apl( At#A12D000"9JaAaB#A anAt am0 """"""#""""""""""""2HDDDDDDDDDDDDDq뮿JҴ C C tb)8A0@q؞SlʌK2m<וẙ!OČ*޹Ȯ;̉j:aB<0xfft0 aSTL(T</ ‚ <0PI. h%vhipx$5Cm&ɅIIZQ]t}}u[[؃#<гB%(D$LAQaz9#Ȃ$9dtfF'2:3"Ŀa 2<慘0K2%ȐDGDaѡ g2;e6gB#L{4 ɒ ]&D'x&rcL<A)͑3,?2"OFb* fhDN\#„kG=O7G f=#= G{ :#GSh4 =0f0a{"٬0c0aaASE4 a FS 0f<00<(F5 ӄ{ 0c F5(*aȢf0T=ak 4 ak 0cRtH7*6l*PMޓ7t&â tUjU WUm&oM:ME]' tZj6a*MI W m&â ' têM$tUU®i6tm߫q)'[l{oV{om_NV%C%C[_p{m[ոvmbT?i]ZW]+zwJ+~KKJJ~+nW[lVGkVu[Ek=t= k8ht]W_ a22?FaWa̯0m{##aFa@a[amo _?/aNK NKz%7K%^Iaozzak_k__iimD:h),s|y[^h1IfӝS'zcK%לOh+tii?O~u_i"_譁IAWI|54_k=Z__k w]~_5ݯ jxk"SeױOWV]lU^bm'+*A-+A6"a0E@YuO]*u_]#J݅b/#4bPIMV 67Pi4I6zzauIIM6p҆I $NbPdnivI7ҴMFapM4MlJwI6iI4bPG 0%0 0$pA0L m0G 0#d0&) na0AAm0G 0#L p 0A 2S "9#L&iA0xaG Ah& &aۂ 2^a&L 0G0a40aADDDDDDGHDDDDDDDe"""""""*"#""""""""""""2DDDDzzJҴr_i%a(a(a( tئ)M 0@0 8|ֲ,gdgj3̣&Lՙ&vfwd#yޝ2h P Rdd0*i0SL$2)Hu3m'K!uk׶i";imIk /޾ /5__= oKxj{R=_ xk /m+Zb޿)X"[bviv]{_a}ouVeEuzMb/an]o_ձI'4 *Yt1V] 4h!il4Mᤛ $M6;aMi#pM6Fᦚpi6aIiM6%M;eZMl4M4M6#piM=4iCdnlô$il4i&4%a 4Ӱ 0^Ad0 Bb. A0paa4a AaLWAaa0vAl( A w AdPT ANaPL2\AAA &iip aPL2\A vaPa&adJDDDDDDDDDDDDDDDDDDDDDDDDDDDDDDDDDDDDDDDDDDDDDDADDDDDGDDDDDDqH8DWھKҤK%IZIBA/nH% $M6ءb 2DDGA3#2Uϝsɞv_+Fd ̍rs^Rgj3)2ge9 I:aB<4…)A*aB<(T¦aM<(^' B\*N(\/?PpvvkiA-VEPoHq'B$DH bW}uU׮W}uZדdfAf L9Y+%2'AJl<c $H&9C`"? Ĩx6 zAS3B'2A/0dD9C.)=B\"#M W Q 慘2̍3Ndt L/A LrZq,!8$:\Bq# 4#<Ak 3Pk 0f22*`0dX5aPzai 3L*a3N0T40T*~G406A:f#Xa 0akFS=0ȷL#= Goh(3`M`a G=* (*ai= *ai5#aP`:pa mI PhLܛI®A P6Rm tUM諤tUUl:*6m&«MP_E_IIªMNaWIU¤:*:ME]' z ièuI*7H6pzMNaWWJuħZq)ն߫Ĩvڷ`߼Juݶq*)m Jm`ݷ~q)Juħ_vJuO1*m??CCUt++Jtz]^~[]zuu_޷֣~v=_ccu_cW_5_W_Wa+xk⾿_upt5]a0a3oA0mh`#5]P{#U@A _@mo ?_a __/K /uXo K_  _Km$ߥva7~ixn7_ko/ؤiyNu$zc'ΩS(w^CO8O_:u_V~K_:~IUvcWK{____\Kka55_k uua{.*C `o_A!ެQP+U[ױ_abb ue.bdua} b˭.z+]o_[T `WV]~dnl4dnlOaMi#p푸pҴM ii6FMilM4ziLôalÆVM1(v4bP4ӴӆI $il7Mi +I4Mi6JġV 4 &j& ރ%Xa m0aaB vaAm0T a6Aa B h00 4„G7pA PA‚ia‚0 aG 0#Nnd0 ("9B#L aPL2^AL* -PA|DDDDDDADDDDe""#"""""""8DDDDDDDEDDDGDG/KJ2J+iZi  0 a,i/yU2EDv;x  2nD"aPM6T4„I44 ]>.䯅H/kjIivih v;i6MM*,C,BۣJYPb뭤_uu_ꖫmz_xˊl1CK$Ƞ3p3 1̎"0D("xB42Af9?:"Yr6Fy9gc 4 O$rXBaHe]gBaIt&9Gd#d Đx'KL=p.<A!2:"=$2"hAH䰄Ü͂ 5i{ 6GSL* 00c*a*`0T=00annL#a_Ds 3N8Pc0a5ah 0T5FL#a = aoh#aAS0==&kG4 *vl: MURtI E]& Ph6aU&îRm'b0Wp:NzM¤MPA6xTaWI&aVWH7zIWI|:RM,&A7H6{)Zݶ1*JtmħVjJuo0{ouunbT0bT<ջoVռ]%:}wV_V_t-tt+޺ҺjR])^ZZWt]A?^]W_%}iCu~]?^OQ[[[O}oEkouzuQj+C} W8a]t=W_t?]C#檭_9a5omsF0a?ca?ͮ`mo??a?:@aa_B_7KkK%o o޿_I}w7 _῵1:]q>N]y:K:.ׄPE^K6K'_ד*xE4_ufڿ_in6[imu_{i";imkO\45 ^}׆_uir{_~S׆_av+Kbzzث tv]Z(~ui6_鰘"ULSeث e*vCQެ݊Z(V]ulRr 6`V]1LU[IO[L4M;I44i&L4M4i&#p&a7 6=6ilMC%a 6I;JM6MiK6 $M :i4bP푸pa]m0i $ӻab%A#APDr a. %L(Ds 0! &M‚ * %L(DsG0L4 aT0xaaB a PMAAʂ0maAja"""""""8"""""""""""""""""#""""""88#)]6I+kI"ܶII/A(ᄂTM4C00IC`"""?La23%YٮM3*#yI3!C$Es 3; y'DE-Ni )4"AI4 0L+(QL*i (P𴓅 pP_@&&_kmvj$,mRʵģ"vI]mRoW_K]_d2("|2|3lf 4"rВ("ND8yPFzZda("#?<Ђ!0NhGBl ZH L<H" PɎUD- x'ӑp慚9Ր<` 4"Af"0)ݶ+K믯}ҺJۯ>tAzJzzҿ/ߪcuv?}nVZnk[_QkGaV4?ﾆ x? W f0FdPXD'NB\E #<"AGFdi2s#2(Kt*(lK (<CdH+ɎP2H$;!0n$"[ "(G2r6FKA L䇔O e\ՠh#XfGSm/T 0ak ? 0=`C`:aT3|#@a=lG{GS0aDs Pa੅L# 0ah #aa*`=E0dW#@a੄{ #X`k{ #a0c#5I7ubVWI4I i>oWIaW m&66t uARoKwC2zTh&m'IMR i3 âi3NmêMtU} A(tUwtJtV~J;ioO} J~ħH?A%:հbT8[_ջoNwVVSJutӃtJ[+ۤ/+?׽t;C]:W_Bi}u?ku[EkWKj?cb-Z׵kQ]~[!=\CC}}FU[afͧa0ju~TF31- ]{t- n/P-K a^l7/__I}$fKKq^IaozzKK Km//czcKuuoS'W_KؤiIuoߥWX"N'04W__++EN_~_NOO~uj[ڿ)Ok= kk5_}ua oVSڔ_ mooav+IX_ն)YteױOWV]lU^bm'.V oLSLSuv' 'v*C.?b/#鰙~LNC27 6n4dnIFᦚkm1(vaM6iZL4dnv8iCIӆ $IdnL6Fᦚiݤ &4al4i'ߦlôiiLM6%aICMCFJaaLRAL*!L B-4 A 2Gt 4 PDr 8"9K Bb MAL Ds0 PDr K:0Ma4N0iAMA &Al( AH2D0aA5G(""#)""""""""8DDDe"""""""""""""""":^]uIyeI%VݤᄡᄂP]6)M(X  (h0Q)%y>gf5#l:*?վxNޜm=8>}JJuJtv=:ħJtJttҺߡ+Ko~ҿ_ZZWt]}tu_O+~ߡ+'=5i?[k 5_WKj?ccN{-ج?kUt?V++kÇ}{#a?aoF+?d00a25YWͨl?~#pl?o _? ۠l?0 [u aa@op~_o7/%%_l7oނ_7߻a7} _kXoJ/aj&Ouߓ''wBKu[q?(uY:'^/E:_ht]9_Im/EkKSIIKմzzzGur_ o5k /a oO[a0q]VEˮt6#;I?+a0EC euWV՗]銲NA-b.݅NL"U*1V]o_Wa{b`v՗]X_l&GXi0MCnFI4dn4i7 ii[ulbPCiM=mCIp҆ 6FalÆm27 ;dnġL6aI4M6MM6 &4M6% &n4bPG {aAA!1AM0 ڂ#L* &L ` Bham0PL( %AaAɨ b aPaPA;m0 &Aia0 5A0xa0 AAAM0pa 0aA5G*:ia‚"""""""""*""#-]_Z_T]}iI%iZY\ JH% % %GA 'I A""?/2Ts-^w4v _Lgev ̋QɰHΆa S a"#a eR0aB pnla:Rt ASiitm 'u!Hx)VM9*J*%:ލoK/m uq/K]{m___"("3L4G3#B42:E~Hl$c4G#BdtB("!NЉ̎ayA49f#xSAy',#3#L<M9 Đx1rc2^B, FHx&rc2G= y+%2c$Jh$<"'9r6Gp1eAh}h #` PcG6 h#a 0c邦0=bG„h #`h(F=H##`{ 0dQh(*a8G7PMGS0aAl { 0cPaaL#X40T=8pT*a=]}_UXD$LAf#OI01BaK Y/>b%WCz+KI+JҺJV^]5XZn_+K?W-M}?CbKn___~C?U#?0oK{#̣aP`?>a#`5Yͧ    xK7K_K[k/ P/K xKKK i{KK AiZ^o:uhK3Oߥ]IKE;Euh'tdt'Iz_^NE;8דSK_ c_kH׿ij[i65434~ak4xj{R=_k ak5 aح?/eZ(at/Yt ! /UP.={a0E;EbQ˭+bNi캺bLb/at)z?+b)z 4MOM4&FMF4FᦚpalnTdn&v4M#pii(v6l4aI4j[]4M6FôMi &FᦛuM27 6FI6apdnim&L4i&  &a08Dsit 5in aG*pL #@u0i06aAaSL h2^A Pd:0xa A x"9AL Ds0 aG&Al('pim0A0 K8"95aaa d08"""""""""""""""""2e" """#Wm_KIvKi7i%XJIa Ŋm e 8&i W nDgRet(TL(PB42M4 PB‚ A@48888;@;Mɱ %5"*r mqo5u_% PFFA #d{0dD&OR`Su"4^֗VQk_TVV!^=!__5H   ~H%o}W~_zH%4I~N]":+{Eb Ղ*5eױ_ C)鴖a2:خ; 4MMIi4MFӦvi27M%l4iiiIii=+#pMCچ 0 0aapaaaAL4 nA: I a‚ Aa aPDr  A+L 6L5G*j""""""""""""""""8DDDDDDDDDDDDGj}/RU%Iba$lR 0`NȮv/\;O-ʳy̮7Ȓ; xTȱ2 PS- BL#i(X\#@apPy .~(X;A&¨;@V.@v®&P"#Z̈CAVIוU;G8_ULA꾼Dѡ9f  fPK9ND!8e "3PYr6F Đx2H24G?2 ȣ0g 0g ${94G#B9#d 2 yO9ѡ "2c$rG=bKN= M!БPNH"#',Ѝ3#N$" k #=0aa 6L#Xa G.SL#`{ 0c#@`3`7*a F= `=6邦0=nGÇmM:a L#a0TS =08F5 ӄ{ 0Q0a0S0a`3a:M6m tUw6-/E]&ނE]&dhޓz aWIMïa&‡E]AhE[E]_E\:wItU MPi:ME_IªM &o l:*ti6}4wNa' ItvmmݷOJu{ħ[kvv}+~j1*Jum JݶJtħ_j?J.+JRz꺯롯J= WW_JJ~v>뵧n_+_5~_V:aXEV?8h?Wt?~a9ս/{#_8"/Pska#G@X@~!@n _/a a kB_7 Kw֗_____n iSx"~w%/u'_w_ױ_u:'F(y4Iu$'_3O]_IcY'm/]KKEWm-Km&K} ak__ k .iZ]xk|5a4_]~k߰1LS׶#-a_Յاl&hU*5uV~=h C캲ث.bث e]1VE`_Va2:7M4I4ؔ;'#p4ӶFᦚm0L4MCFa 4MMIi4ByVM4i27M#pl4jMi4l8iZM4i6l4OM#pNM27 4ؔ;i8i0i0bP A l(' B4 a8L AaT& l(&T/  &a aamA+@BdPMAHTaPaG 0"9B#aa 4 d0paA 6a2A@PQHDDDDDGDDDDDDDDDDDDDDDDDDF-/[JP^LRi ` "?ɰUr dO;*WɖR\v)gay(PS ˙ S (Px (TZ3D=|(PBB  t.(Pt(\$M;MKa[׃Wq%h*^9NĂIo4%Qg`"hTrcI;몥:UUu_U_׽VKizII3O9Bq&8eA6G4"!8& <2H%'A>`"!LrH2' MH܋d`0eYfdxS|D,p0a2c n%/x79!I!# (&̊3AAS 0a4h#@a*F4a7#)13X= =0f0TDs5  L#`5 h50T5k GS*a= aL=0aCL#a =0cPT=EOa#Ti7zIApOUo 7Wtmސl:?~MRE]&tjUl:*7MTa&ME_ Tl:$IH6i>ML6}ﾺĨ~{ݷħH?D{Jtħ[mmoD[J=v޾+i}}i_zZWtt;}ZW_tB]VХzWCB}]ZUuk~k{ot{kz+CWtWC?z+t?0uO5Y?Ͳa(}|F0fU̟5^`=W ~ ^ m}_ ~%:/ o__}w__^/K /)":+uyu^:-']ד'_'^N%ONbk\mO^ﶖMu_ium_im(+i5V[_ᯯ^Kz|/5k^  ~_V˭خEئdu`YuW&{. SE@*m.u^Yu˭ Zbددb+ئdu`X^[_M4dn :i7i#p$bPIm& Cm4ai=6i7 4iM6FMdnlvaIil4ᤛIm1(va8iCINi& &iA7 $BG0a02FAalC:aAj%!1AMa pDrz0 *0iNaa&  %L0 0 'G AAa02J @ A/ """"""8A͍"""""""""""*""""""""""""""""""2j+/뮒,$\ᄂQP]6(v*0`@DDG9vK"2Ld+3LT̊2a#a "DjΆDՑG T… (PBL.n7B6 0#@aB #@at … (PBtML$Uh}oNvªYC8ʤEW'_E"Z+ z_^/ _]U}U}n~߮뮪ayA:uABaH`%99D% ǡ# "Pn$H< Lr!"`3>Fгv NA0eiB8)>FEYf `!0d噑N3GR(GB0g  *9S D%͊p{it_p੄h 0T5a=0faB4<(*`3`h #`04co GÇEaL#`= 6AL#`{*i{ 0fVi6AL#`{*i{ 0fFSFL#aiMv;Z^txTaWI&A7P&o }&ê aWME\:wItUl:*tM$uH6RoIhtUE]&zIl:ޓaVWI&l:*i66o޻un~%:_{o%:][SoջooNx[No%:VSۉPN_7t]WtO^]i]?] ut?%t5ХzWUui_I] t)^i]}?:VХtuv)z]֢(c-_-nKuzP-ސEXhz+C[?}C[?}CWC_5oI[{jaNaWaWW̮ߛ_WͯF0?io?TCۯ y!;j_I a-%o}#5a7^]ޗkiI}ץO%:Eu)>دKuoY:y:'_-']ד'_%Y:E<{Яgkkimm_[i~_Oi6j9=K5ҵk׵ _5i ok /kije+b.O_SeV]~h ՗^}+zح.خlV~}LU&){Yu8aPn]OMi 6I8i4M0MFᦚiMIm4Æ 4a;M6Fᦛ &ilvaIil=m&7i6IIIii &;M6a@X#b:b>6 T m0A0 PAM0a0: KC0 T $Bl Ad  m00 2^a   &  %L0 0 4 L( Ajuq8W]RUi$;&rP0PJ**,V? aDDbfw<|rU#y̴ٌYS a3 $aS  (T.;@0ppthvMXdIt ڴabIA몤/ UkNKUK]u]j PDѡ fPD(,#2H<91ʂVK&AD% B>Y 0df !"`1fpS|33NYf `!5daAٞ!"` JONJYA$gD'> L#a0T 0aaÄh { 0cL#)k {GS*ao0Ta*aL#xGSL#`0Pa o090TML{  4=aB5 =tIl:**PMNoH6Rw}47CaWI諤Ul:6a uI&âaW*MU 6wWl:$UUm' zM׶V_VS8}+vjm~)ҷom>?m=[mNJJ꾞~}*JJkJJ+KJj/+V?ݏM~mnKu_8h?{o⿿~+tnkcͯa$_?=5y _#|Ua __ ]  K ޿_%nK_v}}tuO]}.%G_z[N'^N?'_"_[ji]hSioui?K k .׿]o_^׆5 Og]k++zduhU*5h]Yu[T T޾՗^}+zح.MM=.C캰_"WL `UaPi4MIġ#paNLÆ4i7 i& $dniaI7i6IIIiIl6Fᦛl6M4bP6F]A apa‚j5A1 Tm00ՠxa 2HAaa6TA/ 0aaaaNh0wpAHM0 &aAaaL( L* .""""""""""""""""""""""""""""""""""88龿m%&2S6aRDG;,&2.d+v;Zֲe Hɞvёlv?&xT… G¦i ++taS BpB Ͽvvipppvh?҉YDCd^EcX_꾾PU_Uo^몯lDPDfylSJ0g0H,3(#.خb˭E@دA -1_O[__`}YuVi1V]n1^_ئ*ˮL4bP4Ӵi4ӆ &%M4M64i&M6$چIM4aI4M6IIilv $MMaIm&4a4i4M4ؔ;M6a0h2\ &aN0 $000"9Kà0„G0 ("9A 0 &/ atAa0l&  / 0aaaaPDr00!;aAd0A &aDDDDDFR""""""""""""8DEDDDDDDDDDDDDDDDDG׫UK/ꖺH$i$a\0RQV+حa0L$Q&^vQY^SS&Y騭?oC[?}CCtC}0ua0O=ujaPaicߛ_U_We<1_f$ _/ma{kx@@k ~ڄ^oz_K_ӨKm}7?K:/K-7aKzKK]v.KbE;8zN_Kޘ:(O/w^_޲uy:uN=1~Ni?Ǿ[׶^Hioi[imii߾w[ui~ W^k /^OIU 5j{=555=S ž? *ua}˭ةT ˮCث.?bm%>z V]{b++캽6)4b޶+T bPl6FL4 $M&ġPdniҴi4M[#pbPi0dnL6FoOHBalM6L4i4&I6i4i4z{_T 4i&L4M4iⅈL&0MdDs0U M0 $pA0L L' &ڂ TmA #P;+/ aAI 0 &  %L0 0 mN0paA 2^a 0"""""#)\DDDDDDDq"""""""""""""#WW__][KiH6J+ᄢ X4ح0 LѱM\ Ў靾FfC^Ey^{&2i"ٝpG¦(TL*aB ! M… \(PYIiinx? %5"8kɢ$}G?_U_]}W pfy'"#<Њ3i PNe6gr1\Sfx pϖhF' H0L< L+Bc*g$ #r- By$2<)MLi8TE\/IMPT&ëMRM$ޓaWI}|:tUphIpâT:*VWI*M7MT uI&âaWE]&êMTi6wUl:ސl:۸tUI}j:mm=>)m}ħ_m?:mݶħ^ħ[mm{ħ[Ĩ{w{ħ[Ju~m/J~}KJҿJJJRAҿm$+JRҽ[c[McccnV+u_cc[V+t鮺騭?p_C_[>CC5CC=C#u{aUF5y0a(}~pO?5VU_WVjyCm W'P@@V __u  /v6[k,7/_P/ӯ/7:l7m$_%}i~ ^[￾׫ow%+_~N4uد/'<~ޘSKud3Ou:u묝oLx"N'^N'_N6(EWm8}Km/EW}:Km/Km-鴛KKm-~~4 xk}5׾׆5׆]_׆ M oJ^a~ˮ SlW'2/[Sa2:-LWaizحS˯b+Iv)O+bNCbläN $4M6l4ީ6%Ntm&M#pNIp҆l4N4M4bP6FMnpaIil8i0MچL:M?M4Mi&4MiCJa am‚#MXAM0 'N6aL' aAAtm0 aa8"9A&/ aaaL( L* L* #d0 AAAAʂ  TAaMaA@ NAL0G(DDFR"""""""""""""#)DDDDDADDDDjIt/[J;2(Ia X+b  (6/yv)cW_ut_4?CwW_] xx⾆~_t??= (}rͯabF06'kFͧa?OW>a?ߚmomo/ ߰/^_%/_o O6׫^/K/KKKz_kߥ;a7zczcN/+i}~h:bST_)uN<|4^:Ita9א(wWߎm/E$ik_i?i>^I?[ioi}mZ5_[_|59_4[~׿Xk }xk[[a0EFb%L+^X[.z/{ LE@dteױ^LR}Z({إnbzCdu`]Yt6#Tjġ *M6M6FI4NilÆi6l4MlM6Iii&l66FbPL6FbP톓 4N8i5Im&#pMI6 $i&4M#pbPM&l6il6VdAL&Aa AAa6@ aPL2\AKia/ Aa8Ds Aa6m00PPDrTL( !AAOG&Am0 4 PDr K8"9AHaA&aApaA‚)DDDDDDDDDDDDDDDDqH"""""""""""""#_W_]/]ᄸa ؤءM80A ADDdfFYU̲|S;+א\ȣ+Ogjܓ T„x (SB (P(\.' AB (Phe4>92)CYyRȚ;_]VlfD&H\NdtD`̎ȣ1f Џ pgPEAf FH$s<&sg$A,!+&9S>$\Hye6gSg pϑb2ABDNDGFhduBhLr`,QfGFed!?2r12:A K3BЕBq* gxM(ش#aP`kEXaaL#= F40dZa> L#Xa*iAk #@`000amA4= F=Aa0faG{ #f=0akFcGÇL#X= G4a{ #Xt5 M3L*i{ U I&oM:ME]'H6tUm(tUfTA6l:**U&M8ZI&l:*;MRM6PMzI릐oWA6i:M諤wttzi6t&êOH6*7tU޴=mt߫q)շj)׮mo;)޻ħQ*kڷ?Ĩ{OJum[mW^]=u]I++++޸Aҿ-+߮+_v6?+un_Zmj=?ߵJ+n]c?c_bՎ~cV4?_C5{?}at>+ևa6F#8'0ч#f'Ua9#(Ua#W{t- _~ _kx@l=? ^/BXl7o m_7B_𗄿z/m$n7i%7]+K/oK o^7z_/bͧ5'לOu]IKS'I{_4WW%O/<묝ߓ?uuz_y:<^i~P~:6_ݴwm/}kK}_4ߥ_4j /{^^~zb/ =a_E+ՅbKb/#.lSӱ^՗^X^ޭ?l&GVIPl&`=6#.ua~P+ +ILN (i4pai7M;dni7 6liii27 4iiġS#pi6iSII 4dn4IIi(v4JM27 4ؔ;i8i0i0bP톚la7 4݆i48DsiMPDr#aA2^AL' A L d08Dsi"9 A ݦ  AA B Ai Ma"M'G  6a2A@PTa aAAADDDDDDDDDDFR""""""""8WW륥]}}ie⩱LR|  Q&e/;FUs!VO&dTgK+fEyBL*aSL#aL, v$TDb#4ǢVSDǨPp_I|2  &H$4A  M0K pppviJ$H$I{$N҃C$N,#DInIpu___꾿TUAPp}WUǽUoUoooI;$邏NIsB8)>Y dH, HDiedg@&\x&BG$A1ʂ,>$VBqC<&rG<Pbs4PE#l0dL̎pN$~ 2A$^$<' |("s#BA sٜ ӟ2:3 4#c.)Mk[k[ǡ!+ _?}=t7MEnj0,0#_OF5_0=6^j#}_X@ @-k[ڰp/_~ /K K :oP}i~߆K7aK ^zK _E~f/z/S8yu_N;Ef_Y:?~Nލcm/mv6ji{i6_i{׿i>uﶔuC__߯ /V4 s?_vk kR^կ:jy/v)خ±[vA? U_u_V).b.bVhW^QEFOJ&LQ>`[Z:mSILi;dnv#p&FI4ai6iCIi :i4dniINLi4 & +K & iIpkbP톕RiMC0p #L Aa60l4 aa0PL h2TG* A 0Tp06Aam 2^ A‚#HABxan BiG vdA&‚ 'vUG'"""#)"""*""""""""""""""""""""""#888?WWuI$/iZYI-$H^JKA J(%Mb`l aDDDG7 v5O\&eLS!y;dFU2_ 022ft0FH FGS *aS …G (H$*i  h*:I݃;\rH i7^wEV޶]}T_^L_UVP$]d28)d;wvfD2(2>wyO<=pa *aIhq8P{ 0L*aBL#t (\(mƒ20t¤\(PO\wv]hppvA_+]M4%huΨ|,Tj?_לv?___޿}__ y+%ǃy# ĔL,Џ4"A#_3D%9vh_`ˊlN0e Bf#PE9f (JÜӒHVJd*dHy@SQNE8)oE]&ޒoH6UIpWUom,*O4$M6tW66R E_M tUl:ۺNi>l:H6wT I諤A E]'I6t(tUfoOv뾭mo]oSհunVNޟVSջo]}nV}Sۧյo V_%}{iu_ZW%zW_Х__ХVCO]wI]zW]:Wt;Z__kun[[-~ucҊߺ>V;_C_n55CWChktb|>9VMVa 0ֱDF/U_W]WU꾺WUUy6 NYVdt gq$ ,">%C491ʙ$ _s#ʌ$ٟ#Lř "|s'#ldg3d!;G3 L=pNx-&9S<zA PG<CD'x'BcHy0d ON%C4fEBy!L`>r L#X=GSE.{ 0AL#a0a aA74<* #mAOL0AL(GÇ0aG5(*a5 G =aApaaL#X‚04L#5 F0f 3L*a0cj‚PfӦ:ME]'Il:*3(M$tUm'A6aW \* ªAtUޒl:At&âm' RoI+MTi8\*A諤êN: *A諤6t:*Wl:*:MA(tUUMۧ%:Vo}~հbT<Pնx纷JӃħ[1*:mSħ[vOmx=mOx=?{JJOm$zt+^^Х)]?^Z]uzWZZV_vկG[nVo~n[}oZoo+}jt+4?C~}C+da5AkF5_A#YO5_ au/@ _? mB_/ma/_oJK %n{ iK4uVNKO,u$uz_y:'Z_ߓ86E<}כNSPIm[KKݴKm&Im/5k|44ծkmok5~^_ v V]o_ =+).ث =niޭ?+'duWal݊zzduSe'a}{՗_"WLz.*4bPL4i&LM6Iai0iiL4OM4鑸iIpi4ӆ &%MNiCI6l4NL4bP4i $ӆ4bP4i0M6IġLJi&i mZaAA/ 'iaPDr AH΂aA8Ds han a!AA0 " aaPM %@Dr L2^A2\ &ad0#0aAAI&aAa‚ &J00PAaDDDDDDFR"""""""#""""""""""""""""""#8Ki~KM4 AADBםe>[v,.B3;[2;I˲-0S 0M0L*aS N hvkhy7 ch|ևEDBӡ*H$}uuW뮫_]u]uU8ei0L&9CD 2:4#B8F$A$*x&rcBG<*99PEYfD'9x&G$<23D%r(G2r3D&rG<.Jd*H2%ȟ0!0%BG\Sfx pϑ9#dghDAD&JKE j _z9#$A4= 3yaP0cFap3Nf=#= G{ 0k =0a{Lk (*a6A:aL(GSo5 *a'{ #aP`kh4a=B5#a DLJ3t8*a*a oh #XxG-8tUUl:*Nh&U…TM6mw 7t&â&l:*i6oOIWI/l:ME_I*A諤tH6p&oiIIw OWt{uIa U I&oMm{l{muo[Nn%C[Pom[N{mvڷ1*뺷zħ[q)Ҷ JҺOWU׽t4\ ]p֕Cu_֕A+ҽ+kQEk[[k[Qk[Qk+8h wM?WtV]+?U#،<8'0m{c?_kF2?F6?a?0Al? _  n/n_%K ӯK N-K am. _IaoK/^KzKKi{i%E/q9>N{4IN(w1~NKh4t~NiE4I{q?mvEkݴwI~:KmUm'V /__~kKXkk[~k_Pu᭯kK_`}'aXb.h\[ LWV+SM~˯z+"al޽ا.*Wb(~LP+.EbPzޮث %SM6M -m&v4dnm&lM7Pi4I6pi4lM4bP6iM6M6l4Ml4iMFT:jmCI#pa7 6i&Ja#pӶFJaaaPDrvA0"94&AaNm‚# AM0 A *i0 &N % aPL2\AJaAaJ΂aA7vNMaA ڂ SPAA$pA0L m0qDDDDDDDFR"""""""""""""""""""""""""""""8DDDDDDDDDDDq}_z^K__^iviB\0 % E6)6)6*`0A DDG#5&Eʌ+Hd3*y;\ȮCGgS 0S T…L(T²\*M ' g`@8;@Ǡ׉KQ!KI/oO`bi@'\dtfYag>bey,'d?qy e+;O¦T¦L(P PST 8_ … 0Bp/ivIppvkhfqĝ$>MB'gJ'Ut>e_]}zکuׯ{&8F$H&9B*x&rc3 9* A*L23 FqMгB"C.)bЖF@> ӄ{"0c0aaASE400aƒ6h4#X=h40 {*aȶo  PT=F~\#aM=0akPT*`籄{ o0h#`7= F4=0a{ 00ab 0VWw3rm'Il:*8P諤*i6RoL.z:M$M6tWâ:*3 upMtUU CaWtaCaW¤M$ޚMtUªM\* }:~mk1*Ĩ`>ڷ`ڷܧｶJӃmm=vJ1*ħX:J߯ ^ZZW%zW___[+/ҺҾ++JCE^kuo+V^ uk騭`ֿh?nCC<ska_ >{f}o!W0f0Y# [ momo}@BXl7op/޾u mum mi%wJ/{^^m' _WߏK8לO$Kzc]:uWW'_uN<'_ߓuC_+O-k[{imi_i~_i{i6_4_ݯC^S 4h\C LW VK. *oa]دNeuh b eױ_]o_ح&) uVM4 ;dn4iI4Ӷi27I ؔ;jtm&M4M4쫒=M4iNL4;M4i4pa 4M4aI4Mt4i4&FMF iG("9AamaB#L bL&wp 0a8a 0 !amTA,&Aa` L  / &aaA0paa Aam0a"""2"""+DDDDDFR"""""""""""""""""""""""""""#]_Z_i}umuigi$/ % %7 % %ئ)=)N 0A AqnFv\WnUlf]fy-VFel2Ր\e .…M0 (T…L(GP…(PBBR}&…8;Mx8888;@Ko'BNk_W}df#i2!y#8g1#3# 3p D2y8eg0L&9CDA$33.BH䕒 ɎP2c2T<91ʙ$ fdOb2`ˊlf D(,Yb9 'qM" ՘1#<ABq!+H{ %3<'9H"g*aL#a*a*aB=8G{ 4=aASL#`70{ #X`T=F){ #aȶk #=#`{GS5 h#=h4 FS0cGh 0a6A:`{ 0T= F= =aPaPf#@aM=0akXuI諤4WzIitA(tUUl:*Nh& :*3TI66t ul:I>A諤tUt&tam'i 談Tl:tUMސm' 6l/IhISս纷JӃmmjo~ħ_ħ[mm=>Js%Cޝx{m}oP\n%CV?_]]W=i}V VW^Co]{iW{i{i}t)^Хuӥ}{ttMZb֢]muبݍ_C}V4??_Ckkz~C}#GPF9ͯ`?F0a6v#??m?(}W\`a0?a _uAl?Շa?_ K%a/ރ:K7ӯ~W_iw?vIao/Cz_nzwu瓥/"),r>N{KRzcO/Sד'_,wD4PEhuWWSKݴm/E m$V}KߎKvKm/m[K~Im/֏_yk|5Vk|4Xk{_ xk_5oKiC_*EI鰙_`}'aX e_LT[ LWz/#`]1_6#.b+bbQ+)I鰙tvצt4a8i4iIim&[#pa6iiV8iCIӆ $dni4MRi7 4ؔ;bPi4piCiIIL6PҴi4iNL4;Nm0 *han a!AA0 " AaAh2TL* A0 mApDr ia:#AdAL 6 0010PN:00aaA %X"9B#aa AA$@PA8DqqHDDDDDDDDDEDDDDDDDDDDDDDDDDDDDDDDDGKKI+J-ȒI)Ӄ0@0""#M)y,.wS"ؾ!3w Eqc5\^v[rKy>g<\S P*aL(Px $PB (T… Pp|(]'… aB (PpBBipvppv&h>f|TI4?$dQy^?YߢdQK%_}uDi<$NY Ďy :#Ndt\ 4y '"| g |!8x'I9* Ys80ev_0g 3 )YИt6YyH"#ك(,Ќ#O$A 3œ0H2$NduV0a0dS>`"& ! 40T==0f0{ #XSG4੄{" 0T=p*xS8#`8*i{ #X`k6AcL)~S*i{ 0faA=>za0c*a =0ca4 L#a0c 0c 3NG5 73IA=&‡E]πLâLM\.xPhME]' $l:**6}' *M&âuIi}7E] Ni?A}&pWUm&ï諤_un%Cޞ%:lջm[%:{mۧն%9mv{mĨ{OJuĨoڷ?Nm}+ҴҺҿҿ/m$Һz.tKJw.{J_i}}i_Z[k[ko}o[[[%]WC|W58}=/1_W?bF~jm1>j(ka9? _kØw %K /7K_7iio݆/KKuu֗ bN%ϧu~ND=tq>N):Kki?U4Km/m/K}?ݴ4555kku^_[[=iX"l&G[բ] z_U_UdunL+>ˮCduZ(T 鰙iU^Sa2:˯b/e՗_al4ӆL4dnii &FM44MiIm0M4dni(v *%M6l4M6M -64M#pbPM27 4ؔ;i8i0i0bPNM6PjIii 4dnl6i7 40!dL 0PAPDrj'A06aa0paaL&0 AAL 6L2Z]a0AӄAKuaAuG'  $B AA 0T" 1 2TG ‚#Aa0a0ataM0 DDDDDDDDDDDDDDFR"""#)DDDDDDDDDDDDDDDDDDDDEDDDDDDDDDDDDDDDDDjKKJm"orXa(a&QV)lx0@S@"?)wLs;tEv,7L;)ʲ>0Щ iL#aB(Pbo . /pvHkjĊ&1 -BJT|C)Xo/[T_꾫&9f# #3g<AB{%ȟ0d|e6dAf#H2:>dtA9f " O x&rXBqIe#2!8E|x!"=ЗS&9J N`0eH"s#?2 )(Fp2'AeAf 8dpSd*3pȐYB\bl31?#5y#AaVjmoaa_k@a/ۭ _ ~ku  kMK/_޿%/G K7}%n/Jv}_]_'_)4]w__~N'^/ޯK84^VN'K֗u:u6KI}WKm&6?vZKm/Km/{Z5k .Z|4_^k|5_ Vح)l/#v+z)"au}lSeTޭ?+/& a2:l&a; Zb+b4vTm&M0FᦛiҪi6P҆L4M4M4dn 6IIi&zdnidn4M6Fᦝ $M6IlM6%ؔ;i4M4i4dnm0MM4ᦘAt*aC SL 6L2Z4a"9A4/ AA aPL2^A&A NaL2D(("9 aAPDr A 2^AA0aA0 aaa Aam0PAAaa0""""""""""""""""""8DDDDDDDDDDDDDDDDTDDDDDDDDDtt_6M%i}$I7 %MWa$R8@0""?ެȖKOɲ쌚fTFv&Fv3;#%S2%NPBT 0M0 |(P|/ |*N;M45N#!MVw4*'~E,NӡUU]u_뮾Uu]uMd 4"r "AdGFQD&x&q x"Y/<cgh% G$A.!0<9$`0g 32:;&23D%9#d Q!idO=AM#Q3 sNDA("T<A!9љFa.FaB!"`  "rG<6 L#a a=6Aȶk #5aL* 0T=* #ancÂ*a`f=0f*aȣ { 4„{APf0a cTFQ74੄{"l0TiGAL(3'5 F{F=0a=0 { 0fGSPm*Ni>LޛIoM'H6 pâTA7WphE] ނm MC00WIhIj*&ªM\(tUfâ諤NBCl:*:Nm UIaCaW¤%:Vޞ%C}[ո*~ JJuvڷmk{m~jJuj+v}ħ=uluowunz.{}론]{tzzҺm/Һ?_5}i^/zz:W_֕%uum}ů[VGoj[ou^+ Wx{?Cq_?!u`=m?0j?{0̣̓kj a ?_=?֡,67oo_ KΏKm+ _ߥ_=1Igm=ubEx"_/L_ߓKد_uO+N'__}}Zm&m_P_m/}߯m_鴟m/K|5W_~a4__kJ_ k׾[iZ m u>LP)iT[ Յ뺲z*ˮCOެb-_ ^e׽Z(}M/eeױ]]eՅdut=v]{_eI6Tm1(w 'FIp҆ $&l4NVM0dni &L4M4i4NUIM#plJi27 6iiI4aPҴM6#pMCi4Jil4i4ӦM $#AJML( b6 M0PDr t pDrG0 PAana$ dT0l4aAa#N $BaB#L A`0xataPDrG0AA A"9dAL  aDDDDDDqDDDDDDDDDDFR"""""""""""#DDDDDDGDDDDDDDDDGҿ///JJ. %(a.KRipaa AaMj+ɂ+O\dS*3TLvSP#aB *gvx *vvzM (PnIjv؄A!Kk}D?_^Vh*K<r.e A1Hy Ǟ 3œ0K2r%0 Fy(,Љ" 4"|0g AGFNEH"\„BD/N4l#XaaiSF鰚iF  = F{ #X4k (*i{0cG =2xG‚AaëӠDtIt諤O諤MPaWIm'A7PhM& TH7*6:*I6?ii_>mO{1*1*>m=ߡ-+ҴAҿ+-+KJui_]W_]/uGkTVouֿ] }CC_=C#a?0ч??y}j?k@@a a/7mkaY:K߄Pq?:!'W_:Hm/m'?K鴽}KvIG5W_ /= oP]tV`_Sa2:ҫ.WLWT l&GLWaO+)z+bMeZdn4;i4M%4ivi(vm&4M8iiPi $iiM&PDraAA  B0 &Paa‚ &h&&apDrh00‚#h2Ga)Aa0p0"""""""""""8"""""""""""""8*Ia$XD-4ӰaADDG^vigah3As&v\eo"\\ pPB -ݠx;@;@4;@IOMe"Z(GbXKE?ze Pu_W>_M203Bc`"!$99y B  Ȝ!0E~H g`!6rG<Ny0gsעi6BME]'IޓaCtUtz*6tI@[%C_%CսunlSڷ{~`8:O{1*1*>mmm'Һ?ZVWOI___֗u֕]iiZ]?W֗O_^_OW-uzޢ[]?b>=b]++Hku_82cj 0a3W iHa5_#a0F0<0/ۯa?@/)6%kz a/%/iw___ޗKKm+ R{uhEu_'_PEد_):K߂)ߚ-/t/E~d[j([^Mt^i>io=$k .׵kXk_Pi oK5a0qW[`}X[˦) uSSeW'{.޿˯Pl&G[alP)iU^X[+ Sl&GLWaL/_a~A8WTaM6%ڴi &FIaI4Ӵil4iitiiiM4M6FI4bP6iCi; 4dni4lJġI7 4NLM6%m&#pNچ ` A 0&"94„G0dA ͦA ۠0 Ba& aT a8"9PAPPDr AaTL( bPAa4„G8Ds 6a0A6A00#L 6L L4a ‚#DDDDGDDDGHDDDDDDDDDDDDDDDDEDDDqDDDDDDDDDDDDDDDDDe""?uiZDfK/PQ_ %M4ئ+M6*a`0 """"?ɱ&LBy43-甙漫̃א\o;̜&v px *aB<(PL*aS 4„xIRpBpT vvhv ,Y:uX#]뮿ɱdGFQD&x'Q Đx2H2"3lS|3 ǡ$ '@3(" aAFOdD` (#F\Sg2|гF9f  e6gH2|`!.`ט3PDO3L0dD>` :#O2$FaNPD|#< fi2r8):XF=#`A7= { 0faGS GSi= FL#a00ah #a L#aFS0fah4 =0{ 4=h4PTt= a*aASE *a FSEa'=aÅ Fa6A'7TaW _E]&MME_ l:*7&m' 6m&l*Pm&M諤tUE]&jU WA6l:**6TW E]&âi6pWITtUpaWIi ;Wl:*&ޒ P[Nxݷq)mm뽷vJu JĨ`Ĩq)ҷmm~`mm`ڷ0ao6k{@mE!u  xoנ}uNߓI ?~h[woi?imᮼ5C__?yOڵҵ_uUt}_]o^K}{Yu˦) Mث $iդPi4i4l4i&l0I $aU &i7 $Ndnm1(vaM6taPaG 0AA%A1@ a-/G*0iAxap A ""#""""""?i ?ɵF[V)2̳[\g$QgP PLXC*aS '    0phvhS:)M8~믯nu3A]aNf#PD!("ADOf慘0A0 10N= MA#9PEYfD&AMHy/PZ+hz Ђ!d(*Lȣ?3PEMSG=* #XaF  SF4E`\G{ 00f#`h #X`{ #z`‚0c F3{FaM0akPcOTI* ICAA7ItUI C\*A諠IA=&‡E]&pWIZ*7IM6:**6Io1*1*JtĨ~ħ=Pun_un%Cޜ;ޜ)ZWt=AupuZV괭/}յ]]]-}ح__}֖}Gk~t1_q_{⫃wZ_5C#0#1aͧ#0~/u@a @z~?o__//_{%o_oaKK.K iZ{~/ Sѩ?y:KE~_/Z_"ץE;M^ڶ^Ov߯J /=zk /a oئ+ 1VzW ˫ ueU&)J(v)atuvl&G_IMi27 iZIdnI p҆ $&l4MFᦜ4a &#pM6;M4U#piIiiK 0m0A  $t AL&A4!A2\"9L2^AaA2DT&aL( AL-|  Aa0pDrj""#88DDDDDqK+K馘I  6'3ʖw<#ѝ^w<舑^eLs … g L(SP3aLdL*aSN(T…K 0Y' ~`4`8]vk%5>4[j$aS;"Gqtz޿(z_K_}uY6 0dQ!8HH&9E :du`" J 0dGFy&Y'"|  '#<D$Lž" P]6CE ǡ#23xS|#<гB ̎!0DT%^x7$rH<t<s&9^y fzaL0T=lGh #~!DŽ{ 0dX40T=(*aȩk 0T=GL#^*`=*a i4=h#XaG,C0a{3u#@`੄{ #@aM00T„{PT=m}taI7ti7>aWI*tUpWIM諤tUâzOtUfE]aWIl:*®M5I6i3NRtIow6m tUU¨t4(tUfڷ{ħJjmm=mmJu{ڶ J=>ħ^)v`Ĩq)ն]NW_uu~W_t=i^]tK-+ߡRzCGG[QkQ[?aCz!5_a>j9?F5v6QF#uO`?a_a_?_ u [_aCo_%o_Po7Ia  Wפ ډuIg'^SuW|yYe:'^_:^Ɨ~N?hu)y?WKEkm[KKUݴ@MKm/EW:6EWKWʞk (k4 }O4k|5 NPҵ_)^"W 1_|c.b`W|s.w˯b˭ةT ˮCث.?bbNxi& $m'lÆM&4i4톚|4M8i&vi7 4MᤛIl4a 4OM4ai0ii27FġPa6lMIpM4 2^A A  6 ApDr A0iaaA8"9 0AKà0;Xh  2Gt 4 pm 0Aj0pd08Ds0amHDDqHDDqDDDDDFR""""""""" "#Dj-/KKKkZJnҴ$K % $00\0KLSlSMب0@VA`DDDDDsL̉5O;̕3"2% E`T… (^,n… ([@;@Ȣʒ.]uW]UoqM<) J J+~`ڶm?ڷjĨħ_m/J=޺߯Jnzt~wnZ{[ӭv*?v?ݏM5CC?XH}?Vx~+Cͯ0aF0Ya>j#a5T[_/?VA?B[k/l7Өo𗄶ރK o_zKKa^}_jK Xo7}ޘ:KEuiؤiEK5'XI_m/m}6Vvմm+_5]{k] w}~iC_Wb(~LP*]oV޷˯]XWb޻.^+/V՗]OT:jm27Ҵa6OM4ӆ4MT4i6#pII67M4lÆ#p &laa8a6MM0 2GL A@AG 0kx"9PAL*iuG 0xtL("9&iG&PDriAH㈈DDDDDDDDDDDDKk%i%a M=0Al `"#M3)3VRgi23)2%$yes\dS+Y;̇nLaB4 P *aS 0BL/  \(\(PpPPBmM888;@C_CUi}i] W;_mGTVoZokuQ[nj+t++ +t_>{`3?PaF Wm=0a6_ۯ@u nv?۠~/u m_/L%넷 ~k_V_~w_w8/o7i%_Ɨ~N_t/KEu$_'_uN޲ub/tw'_cm$U}m[WE$i6Oi_m)'K_5]{k4{^k jxk k^Vk o{ TsE *X[±_aX)l&G_%Lzئ)[lSa2:b˯fO__%L/_zzb ՗^lWM[#pbPFVl4i7 i&ġil6L4iFᦚvm4iIim& 4Ӵ& $NM8i&v4dniI6L4i&iġ 4MOpm 0aB#"9dA6Ad6L taAm0 aAa B  AaAL L* K0G0 &aL 6A0#L2G@ aa‚00 ADDFR""""8""""""""#)DDDDDDDDDDFR""""#DDDDDDDDDDDDDDDDA֯/Km/HvXa/ᄢa M6)6+M0A`0L  """"?Pʼ[;1; ̆̓ʌԳ򫝠Ɏ0M 6 L*aL(PB#ai8_ A0apMB  ;M;Am`@=D*CN$D4"r(G޺UǦQ=_?뢬^M#00dK>boH7*7V%:{o][S J Jzݶ1*ħ=n +NxJuĨ{tӫzv~{ҺB%uu?Һ?wҺz֖tuuxzbW+յk__o[C?جk_~+H|?~!??b5_jUa0pF?#櫂0aͭ=u cb_㷏ۦ _? ] l%K% /[׆7K7K/K7ߥ] Wi~O'__gӥuKbK?_KeB8uw_%uKv6.m.W@m/ߦIKm-5׆_kko3k .׵k_߬5 k o]^]lWLWu_ezaLP*boV]1O_X_OV"W_}Z(WLWT l&GONv]{a˧˯b4aVmCIatiaziXA(IC$aIvl4m0M4&FᦚiWViIi7 i7 4' &FJi4ؔ;iCTl4ii $i0i&M6taPaG 0AA%A1@L( „G0j aB K0G6A0miATam00 &&iApDrj PAl( aAJaAL A&$ L:0 ("""""""""""""""8""""8DDDDDDDDDDDDDTDDDGK"nk%ᄢi00 q&Yn6fA-ȶd,e/;*ʩ'<̅aBL*aB{ 0SOPpP7 ppv]pvQ2 C.DU2H?__]}WV꾪_UUo#L{4#l̎<("|pp"Ln&9F L&Ix'd\'x'd'x&rT2("#Ѝ3hdthE0F(,"& '2:.F4 N? #L sN@1a1ʂ99.!8Е9#b>Y0e ą LL`9IȘˊlN(#lrȈ"r(G#B!.`"БRHqM<)>D|hYGAx0䬔a엞 Ĩtx&rCASjEzai0aA4f=#= G{ 0ah #@aL#X‚슐=0T=ak 4 a k 0AExp0{ 0a{ iG pkh4a=B5#a L0fpT=FS8P64zM®M3zm'Il:*:Ah&M8P諤5H6aWIUm&ޒm&oT&M6oUm U I&ޒm&i*Ni>]M&OոհbT<տn%:VSp{m[տm/%Co]տun%:[oul_[z}NSnץCV]+z~Ҷ{i}WtХui]tK-+ߡR_v6?+t֢_mW[+uW-}[=z?t5 B騭騭? Wͧ6l9??a!|f0O0??F6@۬ _ [ ~/ _ۯ ^/ /aa/B[kPo_KKK szKK^7"_KؤiD:O4W]]_&'OLiw`w^Nuu$.1_ߓ_m$UIV}KյQMIҎU}m_ImUm/4_k (iZ5_5]{4xkk mui~ W^k /^e Lث %tO]b LQ Raح+R ?l&N)zا˯bث a]Nha0E@=C); iڴiCV 67Pi4I6F $ؔ;M4Ii#pM;I6M[#pbPi& $i +ILNtղ7 6%چ 6FdnmlM6%0: &  2Gt 4 PDr 8"9Ki KaA ۠ &Aa&L 0G0a;pm 0A2^Ad&iwiPA6aAʂ 5a0 PQ"""2""""2DDDDDDe""""""""""""#W}_iz^__]-VivXa.JKᄂV)6)MM0A 0A A&YjBfCyL=ٮMgb'y[;̀ G¦K SL(T… P ~n7BPPpppvpvhpv'gJ% 2 t5$|s]Tq뮫U_`0g0H,?3PF!.`ȧ2|x̎0aÜĤJuݷOm)xPտޝ[xo]տun%:ޕp֗i]}ZWARҺ+ztҺz^Z]wI]ZW%ZWO] W[ookk~[[uQ[pU CWn45CCtV]CWj+5AͯuF#a櫰a9?5_{`ͯeF6/Al? a/ _ ?mo%o,7K ~޿omPw_{i%ww_~v Wv%m|:'_|:KKؤiuid4E4W_~N/޲uߜOF;N:דi_]miii~i6_OO_{i"ڿ_k oPk|5Jk׿[[ _5]{4xjr_=6#+z*bb˯݊.O+a2:޾ l/]1_azbl&G_[T }]=t6#b.» C`LS'i4ӆ &%M4M6 $iդPi4i4l4i&lbP6l4Mi#p &NL4dn4ii(vi7 i7 4&ġpҴiCI%iSIMFV4ؔ;iI A@PA00 : AaaPDr : AaAL2\AAaA&. aiG("9A%‚#a%  aPaML&  PA8"9B#dA‚ P:0 'vNMaAh2^aP\.(^vlpvh\qku*XbG_{~_2r'2:"0eK`̎y',4,B'%ND3AjC"(2:"ɂ(Afyf "cB\JyH*F['sPFyfy(#XˊlN'#lB"'Gȃ̎#l̎Af 2(,#3i!"`"|1}0a{GSG{ 0c G-PȷL*`{=`Gh #{ 0aB=n3'=#aÂ0a i{ 0aLG 5Aa{"8PcF= G„{GaPaL#X=a GSo0aO諤Nl:*6tUpWID*LӢWI談E]&Ii: H6t¤:*Nm:It6:*M$M;ImAaRt' 6t&toI6}tIݷm=ݷmm覆jݷ/mnm뺷ħ[mNJu{`*0ef0B䇚D'A+!<'0x&rD\B* Ĩx&G$ 3i25 zc_n]>_[W]C=C_?_~W[?{~+H|5dW1F5_xGvO?=̬9?5X@ۯ/ _u a/ _ K__/7_Kzz _߶}}__ka/K[}دׂ)拺y:u"NE:;Ow_:ح-'_O_萟S_KU}mwKm-m&}O[ji~|54\_xk^44gUk_ᯫ oҵ5dtW'{. *X"Se֞u[[S}b밭I...E-_& LWV]{={a2:"W_ilJM6NMġL6aO#piI6i6MM6Fᦚiidni$~ CI6L6IMNLMl4Ndn4mCIi&i#pm&#pMn}A 2\AL&A0 5AAHa000 h A!aAL&M` dAL MAaPL L* !UA4. PAa  m0a6TAHDEDEDDDDDDDDDDDDDDTDWK뤺brIaPQQQA+,W& ؾvksL'ge&MbfvʼK#3Ⱦw0{…T<*aBx #aS P(PRpN.*NB x8;@&!bvu֢CX㑈qU__WBaIt$yD'2:" 0dGFO&^A0eK ѡGȟ0g "& LгP\x79) "2:0Fb.23  sNFٞ#3PG噑DQ/lS{0H2:3"!R E[E_WI*LӢê I諤6]&MAWIzIRtA6l:T&ނA&} ߢ|[V{oոVVSnoջooSnS[ov[z}VSv%CVz}[]W^i]u{5}i_~ :WC:W_֕I_Bmt/+ߵccb[_?c+J>cߵ_kv?WXp+481_\VH~ ᡯ=Û^a? ?J?_ (}0YbØgaͧ? ^ aa ۯ  nP   ,7B[k K 7oKK նwỜwץRY:/uY:0'^~F'S_ޖjO,].1_ߓNq>No'Zm/vUVմm(IWm&I'IK__kk҆/ m_5]{4xk j v]o_ayӰuW}1]{]{ ˮ?b/# բb˯bH&4PE8)bn)YteױVl4Mi#p &NL4OdniMm& $4MiM6NM &LMFᦛlÆ#pMm4I6iT:jm4I6Kv (i4ġ 4L2^A PDr 8"9K)ݦL&/  2SpDr ("9 %AAamA$B0a;L 6L("95`i L:0 'vNMaAh2^aIa"9 $ ADDDFR""""""" """"""""""""""#)""""""5}_Wz^ItVV C ,PI r3gj3dA3<^W ZČ3*Y .L)PBL(Px 0#aS ^(PpRbI8\.8888;@;@1x:ʄK((R%*꾫믯]W}udthFy'2:3 B9f 0e"'9a0ef0J4 O$rXBq$ Y#9^$|IBq1ʬYx0/A($sd+0PH2 '2:0F4 N? I#<0aaASEFSL#xFS0fa„{"0fkG4 = F5 F#G4 3 = #`k (*aDŽ{ '{ (*a>0f0dZa40T:ME]' tފME\:*7tUE]&3Nޓh&aME]&&Mt*u T R} ސoUl(tUw}&WI&ޒl:{om{oo~Vun%:_%C%:ոSս[op{oVxW^O_ZWi}i_zZWtt4_WO+~+cc_t?ktՎ?__?C_C+H}6'ms0O=f #?F?_ @?a/7o _ ~ /%넷_߶}_/Km-.6|yYi:+u`b>G"x!,n$CN= L"EGE9ѡ ЉK ᓑNaGȜOhE`"БtqM<)>D|hYGAx0䬔a엞 āA$9$ 䇟NAIA*Lȣ?3SL#X`h #~GS#`{ F5(3N0T5{"٬0c0aaOM0a*aEX`kG50a{ * FAah#aȱ#X=`͔˰nL#aF= FL#LFaM>mt Ul:ސl:Rm' H6tfNtUtaMiuI6RtIE]& \* jm&f¤6Rm&MH6RpWIE &‡E[E_mJuħ[)Ӄݷ~ħ]߿nJuO=v1*뺷zħ[q)8=mJҺ+}/}Һt+KJJO_ti^B==t)}OUGnok[^nZ_zTVmGk⿊ÆnCW] tC5CCmsWa^F#aװaiie@=m?2@?a@ ^ aa.n/mou %/% o_/%:_%/KI,6 ki%~^7w_ޗKO'_u),s|y_[Y:t%w4I{]:b'GD^hE;خ4Z_m/Km-v?m-Z} _cm$U}mKV@W_҆ {^_k^[_PuJVk /{)O+bNˮ¶#˭/ =Kav`MSzb/v*A9P*˫Eث 1O[a2:AEFM6FᦛMiI $i7 CiM6FlÆ4M8i0M4Mo &jm1(vi +ILNtղ7 6%چ 6Fdnm27 i&ġil6M&4M4AA0 @AA %AaA&/ aiG("9A%  A‚ &AaH΂aA7vNMaA ڂ SPAM0Axl( At%&&ag@wDDDDDDDDDEDDe""""""""8DDDDDDDDDDDDDDDe"""""" ^uzZ_Iu_]tZEqI+K$(a(a.JH%+bb  ""##"YKϙgf2I)gbsL2;-<̖s>0S R*P P…ft/ ;@;M8;@|rX4CA +K}}}u___]yH#L0edPdthDdQ2LQ2( ȃGȜl"BH<Hx,y$ CGY 9$ Бz 0egg0H2$̎Ƞȣ0e8d x7d f" 0g 03Љ̎B'#B(2:Ih$l 0{"L#Xa0c*aL#`{ (G{ 0akpi= F  SF40c *a = G‚ L#a0{ 0cM0a5a#X~6AL#@aM00T„{G=#X`̢0a{3(= Gi6:*3i:MâaWH6taRt6¤MPR |:N l:*7huIWUm'IiâE[E]&Rom&ê aVW *Ni:MMOMT=n%Cޝ[VlNunbT0bT8[%:p|[oS][%:NVPSջo| __iu]~] V]A= O_C_iVХ}}i^]=ut?%t4t++J]ߵ߭?_~WWKmj?_}m~]v?bcC+4= W5=~+H?C00`F0k0si6#~j0F 01/^-@ ? v=/l?7/%: /[o Xo]}_}/o7a~uYEK'ׄP}ץIyKKޘ'^N'Db|OSKu~4W_O P8}EݴKm'_Km/m-IK__kk xk~_u~^_  ak5xkJ~k5_&+J6#_LV6#Eb޾]oV¶#˭/[^t1O^L]1_a~O_LWV˭YtVM&w &FI%i&#pMiNM&li $dni&Im&lbP6l4Mi&IiMi4 $bP4dn dni7 MIpjLa#pamAA0l A‚ m0 $ 0 "9A %L(DsG0 4a a d0iw0 AA4/ PAa  m0a6TA aa#aAɦ 2^ADDe"""""""""""""""""""8""""""""""""""""""""""""""""""*"""8_$0v)4A""?唞L ?[gq2Z "a<́W;)ɞTdK0B0BPBiM4…L, … … ' (^ PZ`.;M4=|qu*q%Ddico']}i?e_u eUM"AfGFg2s#B'^`0"& 2:4#<PYhYJsNF4Ad! _1#Ob>Fy("A$&BDf#xf0e!#dgKAf f #d0f9D&x&ȶO$LD$LAdO"' Ctd[5a0T=#`֘F=L#`=#`{PT=FB{"0fhL#X`<#X`k*a?{ 0a0a L0at={ (*`8pB5#@aM0T03|#` o L#a GfCT66t uUm'H7諤6t(tUf 4&Ul:*WI&âTl:tUM[* ۺLӢoIWp: aVWtU I*A諴UtI' o[NPվռ[SSҾۉNVm[V_unooxoW^Х_=}{uu֗B] W]:V]u__O]WU}?unkokQ-+}XaC{x=W=C 3+0m{aͯaͮm0O00a۠l6?a@ۯ%KXo%K_ ӯKaK  ^_ߥޗ}ix_o%NSלOuq?W_u{h/'Z_דNu~h_{:K]?uZm/ vE UmKm-մUK_: ~_[_4 xk_5nU|4_k_\%tOZI˯BA;t}b b+bbzEN_zE]o_euU.#p &NL4Tdn4Ipi4ᤚiiiM6Fᦚi#pMCMM6m&UiIviI6M4dnlJI4M4i6l4N6iMFᦜ4a‚# A AB0#aA&aL&A aBAMA  aaa &)00!A6aa/a00PA6h2^A!Aa 4 d0w AAL A&#HDDDDDDDDDDDDDDDDDDDe""""""""""""""""""""""""""""#WWWW]uiZXa(a(a(a+1LT ` "#Ɍj3lRefyIL `Y,̿)`3NY"g`!VKH$HxDr-J晡f "A! ĐJO$s M3^`"БtqM<)>D|hYGAx0䬔a엞 āA$9$ 䇟NAIA*Lȣ?3ȷL*`{*a„{"0f.{GÇL#@a*a ؃AaB=n35#`3ajL#TG pkh4a=B5#a L0fpT=0h #`kPT=j4ahPTTE_A7aWMâxTE_I Ti6aWIxTE_IoIzAWKWIaW m&zIp:MuwA7TIh& T(tUfH6oIVW:mm{ݷ/t~ݷħ_h>[%CwVS_]un%:ս[_{m_O_ZWZW_CNi~UץzWOCXO+?i}W{?O WХ]?WQ[QouQkkQQ[1__tC~wMEnb0>+Pai6a#@@}m __@K7Ku B[k ߶/նaWw_b",%ױ_ߓSu'h4t~NE`w]]hڶtki?׶^Hio_ sկ__׆5kkXiv?[]~_CU׾K׆ (iZ4'{.Vױ_ C)LMP)?$bث a]Nha0E@=C*±LSLDQ+tӴalM4i=ivl8i0dnm44bPTI44lJi $ᥦviJa#pӪdn5lMCMm0LiI(vi I7 4M> aA6AapxaA0auG  4M0 PT l&A0 5A  aa#G: aa8a6MPDrj5MAa4 %ᰠamd L AA#)DDDDDDDDDDDDDqDDDDDDA-/뮖JҴJK $ᄡV(X)6)0@`&YrlM2ges+y|/$&;T di(G¦*aB0a|(AP8\(\(\.,iphpvb$uJ;S_^Iz!,n$A!L= L)ȐEGF#B4ѡf,"\dtfF'2:? s#<Њ3NYND',Dfb>G#<|PEwˊlPFyfy("dtfEPD(,' N%C%NfG8g1y,32:?d(2:4"#L sPPfa0a<#a{G{ 0c*t0dX5a0T=(*aȡ#k*a0T=~*aL#@ah4*a 3}0a{G40T545 = PaFM{ 0aB=* #a0ca= 3NGuI. tUoIi:NaWI ]&fNtUpWIRftl:*:MTl:tUMMVMT E]&tA6l:*8tUUoIi76a*NIªA&toI6}t)Ӄݷ~ħUm=:m?ħ[ħ[k{ħ[}mmJs%:p%CVzuo]S_u] _]{֗)^Хuӥ{iVХ}}i^]=ut?%t>~Ҵ_حv6??׵_?_c+[_v?խ_WXpB+ⸯ+znpt?[?Ha#sUsUa#a6i2ͮj¡ͧapF=?{m?W| _/nm@n ^/ _/%oBXl7oC~_/%Kz7o7/m$n7Fi-aKz7w~k~7^IgͧT),r|yE:}/Ku'OL'_>+'^oY:'iE;Ni~W_wUKVҎݴWm/Kߧm'cm/}ׯ|5[׆ (j׆ oҵ5k}C_k밭z %tOZad^bMr  Յحدbد+)zduE@ai LSa2:zv+ث 6F(v 6I4푸p҆I &I;dn4iI4Ӹi'i4lJ7 6i6MMM4i4ii(vi7 i7 4&4;NV (i4ġ *i6ii‚ L2^A PDr 8"9KWiL("9A0 0nA6 aaAaa 0 0 AaAA0:0 ("9h2\A Aam00 'G&NP)#a0%0 """""""2DFR"""""""""""""""""""""""""""""""""""8uuzzZZ_Iu_i%iZVixa 000Wbb80@  ""?ɱ%\'ĐKY/93"\ȣ1"0#BD$L9B'"0Њ3PY0g !8̑#)]֣]Zݏcߵ֣+]C_?߆4?+WCMwx=t7ME~?ͮ`?O1?`/10װ?Pa?(}0a0ja _ _ [tmo?~ /7%:oC: K7a~^7i^7vߓ拺O$E;4Y:'_uO'uZd/ޘ' itƗ"O'Fimi{in_mm/E _}m-m-׆{K (k5^k o /u_iC_[]u߯4LP*˦)EF銰MCئ*˯b++A*Q?+X_l&GV]nutO[a0E@/haX+˯bJi $ᥦiIFᦚm1(v6aII8i4l4M6i &NIlM6 +JLM6F#pMCS &VJII6%ڪdniIi6 $iՅTA G&04 h0 0 %7G AK00‚#aA&ah AHMA a A $&H%@Dr AG 0apDrj 4PDr à0ˆDDDDGHW_Ka+iP` (`eFJ1ɦwULc%n(PS *a 0S (\(PN..88;^8;@:ֲ*k^9eZ%hu__Ui_UuP|#0e0eBDg`!&9T%Ĭ I\8F"d$LAPDЈaM#O3 PYNYАBH%d'9LrE .">$^JyHyPEAS0T5GȷL=#aÂ0a ڛ{ 0a0a`T= `=E`Qai3P*aƖh40 { #!„kG40T=M6tWI*LӢê wtA:M tUUt¤:*NzM T$jm&f¤6m uI?mvħK{j?ħJݶmvO~OJuҿtҺJ꾴-+Һ~AI_BoukuEnxC~4@ۦH~G0s+(Vm?8Nf3T}/_o{N-~_wwפ:uWD_y:uY:ױ_ߓSu'.1_ߓ]y:i^j_im{i"ڿu NZ ~׾__5kS_5]{4xj{_l&GV]{ ˮ?b>˫.+޿دN]6T E@*˧R» Ca☧Nm&4bP톚m&L4Mpdn m& $iM4iiiؔ;iL6IIA*FV4ؔ;iI & Aa aPDr A MAUAAd@0pataA0at‚ * K#pm 0A DDDDDDDDDDDDDDDDDDDe"""""""""""#)-.K,0JJJ A(&¹i;(3$ y^g%r %>[r*aB<0S a*aS 0_ Ippy …m8:;Ad"j*%:ʢ)UV!*,JR/_믮:}WU__U꿮8_U؃#L?L `fGA !.`2Af"8SOf ᓑ` 23  sNA$LгBH%d'9Lr0eAFaBqH: "r>F4,Љs#K<rVJdK@ Cy' N$&dQ aAB=0f0aA{ 3pGSM0a0a{Gf0a7 h#xPd[ c3LFS?=00f#@a 5Aa{"8PcG6S.Äh 0ak #@a*a0dZ3a54Oz 6*6Rl:ètUUl:*&m'H7*7$¤:*NzM T/WIaW m&zIp:MuwA7TIh& T(tUfH6oIVWm JJuq)նk{vOz_m~O)ׯJuSjޭ=+n߭+]] Wӥ{~UץzWOC}i]tK-+ߡR/c;]W~+߭V+u~ߵcר^֢_j;_pX+=Mwt=+j+tC?v7yPa/(}5Y_F#uO̐?aamonC ^/ xo a_o_Ku m%Kwaׯ _k_V_K6$q>q?:}_'Ezc+uyD:^Ɨ~N?ht,N+m$m.Km[KwKU}mwҏmUm/m[WE_mZ ~P_k|54^^5iCJ׿aOz)[eױWLW_b.wN]6T E@*˧?ا.*Wb(~LP+.EbPS#;Ti/L4Mdn4iդiM4dni4i&M6uL4NMġL6aN^iJa#pӪdn5lMCMm0LiI(vi I7 4M?G* aa8"9SL("9PAaB#a %AL 0aA2S $0aPa2\0 "9L4& l( ‚#PAj h4/ 0n$a DDDDDDDDDDDDDFR""""""""""#DDDDDDDDDDDDDDFR""""""ui_]tV^K Sbb0A 0Q,`ܮFd5tF'__K~:W~:KKvm_m-vߎ}4 o4{ծ oZV_4vVaެb+ K}{Yu˦) Mح˯bbl&G_[T zbw`[_4M6L8i4M64M4a, NIJL4dn I4bPJ4MMmCIi&i#pm&#pMnm0M4$ӆPa0҆lJT4ӆaBAHTaPDriaa@ A4 8"9AK[ʂ aPh2^A"90aAPdNaa00‚#a%  aPaML&  A  pDr ("9Sd#MN0a8"""""""""""""""""""""""*"""8_r/t8 endstream endobj 88 0 obj 124973 endobj 89 0 obj << /Type /Page /Parent 3 0 R /MediaBox [0.0000 0.0000 612.0000 792.0000] /Contents 90 0 R /Resources << /XObject << /Im18 92 0 R >> /ProcSet [ /ImageB ] >> >> endobj 90 0 obj << /Length 91 0 R >> stream q 614.4000 0.0000 0.0000 792.0000 -1.2000 0.0000 cm /Im18 Do Q endstream endobj 91 0 obj 64 endobj 92 0 obj << /Length 93 0 R /Type /XObject /Subtype /Image /Name /Im18 /Width 2560 /Height 3300 /BitsPerComponent 1 /ColorSpace /DeviceGray /Filter /CCITTFaxDecode /DecodeParms << /K -1 /Columns 2560 /Rows 3300>> >> stream Xh"'F2Awe-U p@(AR08@ ʰr$aQpapF 'iI¤I6'0NMƊMǃr_Ah h Wnzozo^]_+~ /cүH. aK%cI/ ?ۦJoݴ4 Jm~~_[i}/-ZJz^%uT+uD5IפC_KI$Iz'vI.-M!&HzHv҆Z4Il$% $iZIJH BPOb [J@a0D|EDb"#?%I(AG0#„^&aS Ufe*9i ׋qZ.Z_OK=/ޗ}|>K} Pi}a$,0!ERq !dW̆̄%gc?-3+¦(PB*aB<*aBPB I……88888;@8;@lfUbv:R6BVWS/ֿuUuz꿮U_UWH"!̜NdtRLD'3 !<# ćB\0dt`aBYKO$`Hy&DGG  2#Ls1"| AH$rG<p(,',BBIxN& Lг Y1ʡ.%do$rEL = 0T=#a3L*a0dPf6Aaa Ӧ0cL#)k { #X`kFSGAk #@a0a FSEa = G403}0aB=b36S*i7#0=8*aFS8UH6pâ֓aWI‡E]&btm5I6RtWIM'êM6aWIl:NRmM6CME]&oMAh&l+M*7IuH6mE]&3Nw&m&âPոVݴp{m[նST?SnSޟSoz}[N_p}wun[un[}ۧz~Jۭ+/ҽ}ҿ/R?ӥiCCVBӥ}W֕5}i_~ :WǦjV}Cb?_tW^px~+?_5=Ca#WPaL?0asaa?]dcaFukx@? @n@?_u  ~_% o7s/ _i}./JKv|$ߓ+zcK8i/_ޗOyKbE;SuߓuWu:+="NOI>^Kio_[i?դMilmiz*^j_|5^կ߮4 oxk (k5 }^Pe1J݂*{a2:A2{ S˯bP.-LUduav+ 1MMئ)݊دL]{]{ ˮ?b i0M $ӆKl6MCNl4paPdn4Ml6lJ7 6i27 ;dni7 4%l4iiiiMiM6NM &LMlJ2^% 40 PA062Z]AAaG&PDriA  P4L(&Am0 &H`a AL&0Ad0:0 M:#d 4M0 P\DDDDDDDDDDFR""""""""""""""""""""8DDDDDDDDDFR"""""""""=_WWWzZZ__]uVᄸa(a(a*lRlSB   `""?ɹAC&]FwL3ٕy4ʗGM0Bx *ai:OPRpRlFKrL$;_it…L*aB Y7!(JB?9HpPB888;@_R"x:^Fv __꪿lA9OFb!>E`>g2rȶO+$t<A" Wgh$yHyqM3#\„BDESfU]}u *&jL{  4‚QATTG=(*aȵ#X=h4?0a=0{0f^u__]zMTl:âOE[E\(tUfiH6l*Ti8P諤18T&joti6:A"T<91<&s sNYNYx7A#94G#BD%9dQaz9*Hٞ#3bT?N[Nn%:սVհbT0bT5ooo[oNVfaL#SL(34{ E0ah #aC40co GÇE`:aT3N0aA GA롪J=~KJ޿+~6t:**E]&3}|: i?R :*M Ti7$M[mnno%:oV%:}ޟSoջoVPuo]+k롺j+C~CUZW_Bӥ}VC_}i]tK#_?F?l_?K_~~/[tmo?~!+j+t ~uu ~%o6`/?F6CbĿKm.ׯ Aפ oۯ ^/__u1]OK_Ou%_ kKu mP:}F/QoKzKkvk|5k:+Su߄P+h4uVz;.zzz[a0q[_ث oV]'MilmOױv#paI4i&ivêaJҴiCI4Ӹi&ġULM8i0Mm27 4ᤛ &__k (k5U᭮ /"9:d0AK00At%d2TG ApDr ݦL'G L:0 &A0#L2HMYu_˫.e1LVSa2:EN]{ueX_{ TGH8DDDDDDDDDDDDDDDE#pNIl6ivl4i%i &FiMV 6S#p鮯m0 aa:0 ؆ta  ! 2HPMAAaH΂aA7vN]/DDDDDDDDFR2DDDDDDz/ %KbM.`A % %DEb AGnd2#2F;*96SLL(T¦R7pP\.pvhhq+KB̮W…RP_Q9("`3 "BG%I.23xSx#9fRBYÒT%d 䬗 A$A# 䇙PD B'p{ #aP`8F5 k 0AEp0cl]3|8*aF40T5(*aȠ ~*6l*PMToI64'I&pi6mA꓅LoIVW_} J=>ħ^)JuNmkm>I_?)_B^dZG噑dt gJL\x79eQ?QkkQQ[v#„kG=v#@`੄{ 0apo=]Q[?t87*Ni>]M&O_@=m0?VS_vۧ}m _^/ҽ+/B[k kնaҽ/C'W_Kޘ:"'IyVhVal{kumﶖi{jڿ(Iu?A^5iCJ׿=%$bث a]Nha0E@=C*±LSL@ _ViJa#pӪdn5lMCMm0LiI(viI7 4M=S'I|0MaA8DsiMݦmAPAG*6TAL h2\ &ah&&ad`;k_DDGHDDDDDu&4PE8=C); 륥4ؔ;jL4 i7 4ؔ;뮓mAPAG*6TA0aA{JJR""""""""" "">JH$bK 0KI,0J (6ɦB!2뚲;38T¦0S 0 BRt;@ċ,q"QQ*_Ԯ|LeO+gfYd+3LL} PS 0\(PP\,xˊlPFy sNGAٟ#3NG慚EO̎NDPE?W5j W^k +^5kkaf]M&m a' tR l(tUUvpoul_[z}NSuոVm5Yt8-k5i]tK-+ߡR/nZ_zTVmGkz꿯wMEnb7a(}0Y0﮾{kx@/ۯ _ Sy BDE 9*<23pS|#<2# !,aY*rVKC PMPEAVKH$<")/%/s(0a3}0a{ * 0aA G=^(F{ #)a4  G5 Fh #`4ȱ G5{_k_V_Kâ諤AA6{MRM$Lp:MuwA7TI諤& E_fêMA4I{]:b'GD^hEufK%:Voul_[z}NSۧ][[z}[~Oױ*[j_JO_ti^Bit)Z_]_PuJVk /z[[G'ueX_{ TcE *uehUVVbduVb {⻦Hp1__C_Zi +ILNtղ7 6%چ 6Fdnm27 i&ġil6M&4M4%`@=m2?m?&0 "9L4& l( ‚#PAj h4. 0n$a  [__DDDqDDDDDDA_ӨKm}7/%mo/u:^Ɨ~N!?htS뮗^{i"k_ﶯi?+I/kkKj[XiziZ5PA/z˯bث a]Lha0q]Yu({eբUdt='4Pl&GV6)aiMV 6S#pdnlJ &li4dni(v $M;dnm1(va0`AK00 #M0n00j&‚ ("9PA 0aAAma‚)"""""#)WWi}uixa(a*lS0`a|eK*e^Iv#;'db# Pa*iL,.&|.:;@IJ4EQݡ?_UoqM`1"|`!"`WB;MkkuZQ[*,BEV'b|/WM}C?~+H V!>msWU0װ{aͯU]}[k? ]0l? ]ꫯK ~޿ ޿U]}]_}K.6[ɴfAH䰄 H$cQL2& r$AЌNdtgAGFNAsA ȠQf "& LгlV:u:?_Kyfa0f06=`GLG=lG{GS0{"0ah 0T5a0a L#xPd[ ׶__i_jii:M6oI6i3zm'Il:*8P諤͢tA7H6}4Im'H6E]&3Nkk_5xkJxktmm=ݷN}b+..-1_Յ) LVZWt֕W^WO?_ZW_M6i4aI4i#pm&#pMniIpM4ai7 OGkk}GAAL   aG*06TAi  0aA& %MA+V4?CVDDDDDDDDDDDDDDDDEDDDDDDDDDEDG0|#a#aװ{m?(m@@ a a K UK Xl7~waKf%~N"--K8t%NP'^q?Q>CIgw:+TSk+O+_ vm}ݴm/EW xk /j}o_ L"ULSeՅHaz˯b^b1LU[X^dt]{ ˨m0i;dn4M6ilÆ4M8i&w &aI48i4ġ $aIið 5M0iG AAm0G 0#L "9ja  A‚ taA0auHDDDDDDDe"""""""""""""#)뮺JҴ)7Y~SyW*8a(a(a(a)6 *aS 0]b*nBp 0^hpv "#|Brĥ,B#=#/K]UWAdQaz9#Σ.)`S| "\Sg23G3D$LAOaz9*I.))}:KzלNm-m&K6mm xkk +__ a4_uWLS `_a~XVdu[YuU_fb=9Tm&iM6L4MCMl6Mi7i46%i6aL4M4M4L* 00cNaAA0:0 ("9h2^A Aam00 'G&L( a5A PA, a00 *Ni?Q%CNkT+}]v?c_hp/%[riG&PDriAlDl T…L*d(0""""""" \..Khv[bDV%)c_㯪HK륒Hc_Uת ?E #<23pS|#<гB%̎!,aY) /<$H$G<? !8S>g3*&SgKG h40 { #„kG=v#@`੄{ #XaGS0{"i0؅諤AA6{MRM$Lp:MuwA7TIh& T(tUfH6oIVW{1*뺷zħ[q)8=mJO_ti^B==t)}OUEkuǯQEEnv[wMEnboa(}0Y0 n_ӨKm}7/_//m/iwEg<`Y_;;2%h4t~NEf+L(T… ?Oױ*[j_PPB_PuJVk /hS՗[a}+R ?l&՗]V]Z(~XV)z [Ti/ICh|s^DD)cnMV 6S#pdnlJ &li4dnM0MCNl4Mil_&0 "9L4& l( ‚#PAj h4. 0n$a pADDGHDDDDDDG_W "4/ ,̂!0x&@dxS|NYadtfEO0K2r%̎2#K< q ĉ0eDfy42:0FˮAL(*a>0f*aȵB5h#`kPc G{ #X= 3NG=8}0cl0f0fa G+I$P諤MC0M$uI¤U Ni:A*6uI&t t C oN [ջoPN߶LP}{_tХzJ믭+ߡ+JA _c_n_խcDWHz?px~+?0#6{m?$?[$ a?/ [  Ko7~oƗO_d<'ttOO~NPm-~ݴm-K~ {k[߬ $KM2IDX".IC eai LSa2:z.C밶^բ¦*aS G…L(T²7 4M8i27 6FM;MnlJ +I4bP톒iMi27Pa6[ 4M48\(\.Ipp0 apDrj& amaPa 'G(Ds 0PA MAA 0apDrj 8;@8;@DDTDDDq$x ,Xk̽_Q뮺]U"U%_^J+ I0eg>0a0eRghE gaH si :g3N3D&0e#dfYRf ᓐD'y=A֘GSPT{ #X„{F)3NPT|4a*aAS8F{ #5 ajL(F`AiWIaC諤N&A7CA7諅VWm&èP諠tIl:**7u xoxp{o~%9mm)=mJtm*Һ+Kҽ+z~ҽ+n_b_M}C5=nC+⿔>msW0P`?Fͯa ] _[l%_[i}uuS޲u/ф:VdTJgd?{im[i6_ﶖL*i#aBkk_׆_5k' VeױMb)ث.-1_Wh[.;@4?M6i4aLJm4M6iiilvM4MlJ &FᦚlalO*#G"7p00 AAa0a L5A0 &  aaPL( ‚#L 0iAa6A?"""""""""""""""""""*"""""""""""""#}}\Ђ!8x&A&dxS|EO3OffdtgAO2 C_CUi}i] W1kuQ[n!|Wk=0a6W@k -7/_oK KbyؤK]?u_"lY[DLeg;Z̬晟(ڿ_褟IKm/Bx 4<4¦?4~5P?|.-_ ͅ+bJ_e6#.دӃMx;Mlav#pݤaiI $NlM8i&I $M6;aIiDJ*88aPL L* K0G0 &aL 6A0#L2G@ aa‚00 AH"""#)Z/뮺RlAѡdNAI›Gȣ0g "\>FaPE42:3̎!0<9 dBJdlf gp2\ `噑2:?晡F`"W%IB=#xG4 =f0aF=G0 40T=(G7SE<<8pT p੦0(F{ #B40Tᄢa 'I&M6 tUUm&oApm tUp>:*3VzMVW wphz N m tUح6(Jtm+~ Jm?ڶ=ji:ݶ  ]>55꾿nDGc-j+cz?kk9O#F(@ۯ?oo KO7 w_o &Oخ4W^m>q?uMOhim6}'m-m_׆kkҵ_ZjriZ+bT l&G^LZ(}}Yukҷ_O^ddFZDexȖvW`26F(,2:3LЊ0L(3u00d[= aL(p੦0T5#B40TׇE\. 'I6z**6pVWI諤8\* aW-!佶ħ=VNm][C~__֗קkkEoAWWׇU0n_%J֟]m$V/WS___4|˯l&` duSקM4iġ]i4Mi4bPIL4OA l( v AM 0vAl(("9a0d0hd"yYFASCY """")L*aB{ 0SO\(T…8:%C];5C@Гa +I/GJH%(u}U`kĴ<#eD&HD̏ pb( D99.!8Е9#Lu"'9D&/d $l0c3|0d]!a40T{ L#Jik { 0a*a*a no8P諤MC2zM$uUoêOE[E]&~oI6PMOWIտ%:%:oS)ݷ?=wҺz[cm~?HWn%u23 yU̫^eyߚ+U0alDS #a iL/?X@_/ _ A…Ip%넷7_.x8?;M4?KK7ߥ]I.gpEGV㐤VioY:z_dלOI~I?i_ڿ꾫5 ҵܡZ(alA*Zb+"W_lSeeբuu}U4ӆ#pdn 4Ӵ'MNL4Ml6Mi7i6i&4iM4푸2("Af3 hf>b=9BqMH<'J@ˊlN(#l噑Ndt g%, apDrj& amaPaAaL Aa  m0a6TA pDr5A06aSL#`:a0aƸ#Xz`FpT=H5 G pkh4a=B5#a DLJ3t8*a8DGaVWIE] NooL:A6xP諤ͪl:*®M5I6i3NRtIow6]+臨߶պuo%CNVVPuo]տ%:/uZWZ]]KJ~uIWO~j-u~ߵcר_i$qy+J/騭?J(% % ?af(@v*< A{kx@  H%__ /KKפ ''__u}~hؤ^Ɨ~NBk蠟_cm$U}mJ> _ / oaS [ޛ ]/b-_! /]YuV» Ca⺲P*˫Eؤi 4i1(vI4 $il4Nl4&m27 :FV4ؔ;jL4 iAAAAIAJa 1 aT0mAd&iwiPA6aAʂ 5a.ST2O;fe<"""""""""""""#)DDDDDFR""""""""" T¦T. Kv:geDV$0 $lRlP` /]}V"$ˊlN'#lB"'GȄ#00eBFaBaH5 ">FNYGAx"Y* /<PA G=b(F{ #@aL#a'{ #aP`kh4a=B5#a DLJ3t8*aNToI64'IiêMtH6p&oiIIw OWt{uI~OJu1*뺷zħ[K-++JO_ti^B[GH~{⻦Hp?(}0YOO#Cͯrl_;.vkx@ nBN-_ӨKm}7BI}[i_k_V_4Ɨ~Nh]4I{]:b'Fԛ%1ױ*Mi?Oױ*[ ak[_kkKj[Xiz]{ TsE *1O[uS՗[a}+R ?l&N+.EbPNf,@M[#pbPi& $i +ILNtղ7 6%چ 6Fdnmu00j&‚ d0 à0 #M0n00j&‚ ("9PA 0 PD`ABD \0g 0?2'¢)DDDDDFR""""""""" faM0a7Fh #` Pc G,0}_WME[E]&ti: aVW *N:*3I/KӮmħ@mmpkJ괯zC.KunK ClRlP0`lDowm/uد_ڿ_覀k5iZ]{e׽6#)ǥaIL4aġL4M;I4ᤚig  $@PApapa8"9 hl\׈"""#) ~/ tخ`q*"|*aI諤Z]+ɹ&So!3k&Y0T¦/. ivK'cH!P*ХWUa2:꺮M6%K03<)=g # !,DT%^x7Ix'x.qLr<A!%daBaKN$ӟLrBqM0aABSakPT=H5`͔Lxp7C0{ 4 S aASE G`5 =0T‚aiSElPm*N:*3jIow6m tUU¨u Lڦw}47ME\(tUw}&WI J+zӃjzħ[mħ@m`== wZ__BUz~}ҿ]-?רW]c_c__] W00?a a _  nkoBXo7/_%K K/ _K!NEuId4/8+蠟W_Wk]K׆ҵ__u>LB^=C)zAazP.-*'a?] I6Ti7L4 i $NM8i&v8i27Pa6[#pM4ӆ#pdn 4Ӽ"9dPA06aAʂ 5a aa#L PDrjG*6TN &aG&m0&an;+<ضv gDDDDe""""""""""8DDDDDDDDDDDDDDDDFR!S *aB\(PP^`?_]%Ce ]a.H% %6)6(X A 2"̊3PY/3NAJaJ̏ pϑb%3̎A pϑb("0e6g 6Gr0cF= FFgS ? aaB=* #a0ca= 3}0a k 0AEp:M6m tUphޓaom&êN' tI $uUm&ޒm&i*NV{mN{ħT J޻ħ]=>+/ރ׺V]WC֕I_}Eok_j~_t?[=~ }5CC0FWaߛ_=0fYCͯ6X&3Lv/fEy٩< [ ]akx@B(PL(K _7_%  (T¥/o7zKK8;@F'E;'^oY:'W'OLiw|s$EA*Iv}6m(I_m/ ak5xk߭Zկ)zduE@ai LSa2:zv+ح+R ?l&N+ÆM0M6%M6FM6Fᦛ#pݤؔ;NV (i4ġ *i6iT:jm_U]4/ PAa  m0a6TA‚ %@Dr &dAAa;pm 0#jWI>{`IaOUp;.L'momo~B*aS ӨKm}a   ׯzKKopvh4W^N'^N'OLiwfy9 ?O:E;chvm-cm$U}W鴽}6ҵɯ CU׾J׆~5=lR{_uVةT b+E`Mد0M4MMmU27FġM0M &FJi4ؔ;iCT K 'w0 AAL' &ڂ 4/ 0pDr#PPDrG00aA 2Z #v!(NOw_:ح-'_O_OPEum/BݴW꾿5XiZ}~˯b/YtuWZ(alA-1^YuWLSMFᦜ4aa 4M44M46FIIi4ii(w&ʄ `( K2rA<S 4Ln<N4AHA Đx5 0d#r-\E~H伕HydPDPAa4 aB à0 Aɨ L* AiA`*0‚#a% 0f=0{"i3N G5t3P*aB5a40Tg8#`i6Aah#aȱ#X=0a1oA7:*3 諤߇TM6BߤM] ސl:$UUm&ޒm&i*Nh& TWmjm)ħZq)ն߷߃nҿߪJJzjK-++]WՏ_[ַwnD.H9*t?[?UQ[?t?}J*+6k0?>{ehJ@~. [kx@`L/_Ku m# ~kնwubz_d4t~NEu[k}Um_K xi5_V5V]1_V˯b˯-LW_vawH'4P"SVm&il4i4ӆ 4dn dni7 MI6Ilêdn5lMCaP AL 0 C#AL* aPaH@a L' &ڂ 4. 0uy'DDDFR""""""""""""*""""""""#)…Ҿ-/KhM-¤/QPK+b0_6O3NAJaJЎ pϑbFgS ? aM6 &&ޒl:%9jҺn_t?[?#櫂0aVMLWO#? vT¦%}' ߥ]hz_d먝v!9TEii_\믪alP+/Zb͔4Ml6Mi7i?h*H Aam00 7PFaB!"`"|БRjqM<)%mbQ"KA 㯮/=:ءxAkxu 2(0N= $2:4#<>b5 Ƞ3( N$&dQJr6GD$LAf.^G= ӄh #XxG-0c*a0T50{ 0c G.0 ~@S1i{ >/E]& \* fNtUta&MH6RpWIe &‡E[E_:*6{1*mzq)8=mJu{ħ]W^==t)}OU=i]O[lVEEnv/nCV4?++lѕ;<̖s"oa0m{F0j0B ^ aa/ۯ _ pBu ~,67KhKI,6 w_ޗsCAKuu$K6'^q=֗)+N{k+_jڿ(G᭮ /JVk /I?ا.* l/]1_aX)l&G_%lQ+IuWۭ4iMFlÆ4M8i0Mm4I6%M;ai6Fᦚi7 6i*42:=d$ND #B'"(AeF`9Bq* *s2<)D|hY!4AaH΂aA6aAAaG pm0Axl( At%&&ad0}AAa#X„{TG=(*aȠa{G40T545 = PaFM{ 0ah#`7AF40dX aDDFR""""""""""""2N' pWIZm'IiâE[E]&~oI6R $uUm&ޒm&i*NzbT5oouջnoS)ҷ)m~O={Z]WWCWC]WC֕I_뮗Vkku[u+I*?+ WC_CCCtV] a?0j#F}m'>{f6)?@@_ _[u 0_ a_KN- Ia/K[^~y?OA(yKu~.1_ߓ?/i6_iumﶖmo~k +_^֡5k|5#@l/LS `_a~;uVةT (v4&PM4푸piIġi6I4dn *i6iT:jmXPA8"9B#dA06aA0A am00 &&iAaAAa l( 2UL 5䴊3; y = F= 3N੄{ #XSF=0Ao<(G-c`TiâCT(tUf.âzzMuA6l:*4Rm' TA6a^oWI*LӢVPSտxunoSn%:}߶ջoUz~A+JRtJҿu_(^H00ͧLfRn oKKK>h8)/KN]_w^)'_دj~imOڶ__kJu a z__'alP[*lSsEئdue1LVU^|wI4ӴNI7 4dn4i4aL4M4푸iġ m4t 4M;M6 K0G0 &aL*j 1&A ah2^BM 0PT ah0nTaA0au&32'9b"#DDDDDDDDDDDDe"""""""""""2F= G*aǫM7tU}--.nt믧+/+J^ C C }1_]6)bA 0_ _ tW +^O[duimlM6%pa0 PEvLetJʦA3!S)88G…L(PL(T(\(P\(\/pvhzJ'i׎k^J- : k)/W_U_[%›Gȣ0g "& <LL^x7A 2G<9!ѡdNA{"?%9ND% x&rcǂxL PYhY6+-p*aM0fa„{"0f0{GÇL#@a*aa=0fa=l0T=4ƒ1}0aB=n3 tUUt¤:*Nm:INޓh&I7a&âE[E\/諤&iWJtm:mJtmħ_m?{ݷ꾴z+J+ҏ>McCb4=>~Vd)2%\dS;01I0u00L(Pu?| _nN /7xKihppm/_n_Ki"hTH5U򶿺{Hd/*(yuz_ObkmuᯯJ|545^|w맫Eئ*a2:ئ*˭خ/e՗^|wI4aIiÆ &FLM6%m4NMi7 4ᤚiaIiÓe,x3p g2r#d@ EC9f 0e@'2:0F4 N? ̏ pϑb%9fi!"`a/  &l "A A A 0uA Aa0 M:0Ta슠TGQ77= G fa Gk L#\#Xl&= p੄kGSo1HDDa&âm(tUfH î tU MN:*3Rm&ëtUtMҾ%:m[V [NunVտ%:nxK)]W]_뮿+KJzҵ}n]Zz߭?_MJu_nᄢF }#67 V _ _u `@m%_Kzi%ooK'_O_d'_:?O_iﶗixk~k _|5E -e]^բ˯&(T *I *M4푸v $iM6IMNLMl4Ndn#pMCaP 0 Am02^%d:0 A  Aa6TAA 0 FUs/d;v%ydg"""""""""""""#)QL(PS ZApPBp/hpppvB&k*Yިqi9/ % EzM}u]~ Au` 0eF0',Ђ!<<&s qٞ#œ3Ś`" "jBDND ǡ#e6g 6Gr 0 L# SF{ { 0T G5h#Xa0T=`Ӧ = L#a i4=h#XaG,C0aUm(tUf6CM7uP諤NToI7tUfoWIaW m&zIp:MV%:ޟxlޝwվվ[%CwV}uARJj/m/JJO_ti_nZ_+u!+j+tF0k_ͧF5y_#Cͯ6%,ʣ2|&Y_ _ۯ ^/aB<P -PN-_ӨKm}Ip}/I/^KzKK@8;@R_Ey:S.y:+]/zcK'LW9BQFu_m-m'cm-Wm'I_m/k_P׆[]~_CU׾__+ an)"ULWSa2:»_ ˯EF)˭ةT 꾺i7M;dnLJi4M4iCFIvM6 &iJa#pӪdn5lMCa am„G0 &aPaAA  &AmAHb0 P"9L4& l( “t.)l:ޓi6^uo][Nս[NxoSn%:ui}WtХ}}t5_ZWBi}t)^]]kuEn[k[~Kᄮ!~+?}}C&&yCͯ`#U0 sH(A`[[_@? _xu m%o ߵ/m/KXnLiw`w^N/ԟדדiuUm_K}KKm+_5]{4xk׆׆|5a]Nha0qLSYt_e՗^lW Ղ*5[azbLæi(vL4iI6IlM6Fᦜ4aaIi7 4ؔ;aMdn4pm 0A %a AL A&$*0 AL 6K@&M0QH^\IZ[KJ)V K4"K%BXA{%q&(G6Q14  G>]M&ħ^)+?v3XBd;_)󵝇 *aS .(P\7hv'RncMdMkwmKYu({eբRuu_2*e 6Fdnmuu_>TmA &0eK"Xl7~./zX"Q4XZ ]/bͧ!לOuSE=1NKmEkݴwm[WE׶_}u?᭮ /JVk /kk_A'ueX^A-+z+=m՗OLWaح믯AiL4&m27 ;dn4iIliI(vi I7 4M?M6i4ӓpGE24AfdPY pϑb'"b99PD0Aٞ#Ob#"o0aA4f=#= G{ 2<Âni*a*iA#=aF  5i{ 2*E]& \* fNtUtawMTiâC6 5I7u _m߫q))m.mħ= xVSZW]+zJi=WK_v6?+u]v?b֢W~kuWXp騮a6vWF(}0jIdKk3LY [ { ^/[ PSGBXl7oxl%/u Bt/Xl7~ m.פ;@%RY|y_:E;'фyK4'_uCi?׶_[kG_᭮ /5k|5 ~eױOWV]lU^bP˯b)±V{ ^aL4&m27 ;dn4iIi7 6iL4M;I44#p*FiOAd&imApDr 6  A  pDr ("94 4„G7v@ d97dtfEPD(,( O%3$~fG8g1.)A#i "#وSH"!(D$LA\Sfx p""#)DDDDDGG{ #@aL#XSL#X`C`k GSh4*a F=8pTAG=O7AF4=_:MH6t:**7u ~oI6ZjUl:P諤NtA6iE]&jm&v=ħ@)mnmJumtҺJRJҽ+/nWmj>n ~+tkzt=5CMM;m?#ׂ0aW>msUFaYCͩ@aaa/ _ l?kx@DF% o_ӯK P7w~k}_}K/7S_KoL'_'W_:zcK']IKm/m[IҎXiZ s_^ (kk Z)zdu =د/Vb.»M0M6%M6FM6Fᦛ#pݤi6M6FIi6a 4ڪdn5#a%  aPaML&  0 0am0A h0%0 0a8aVv+J2;^[5e^J8M0 P /IBBpv#v1@,rI ~_װ]^%3NY ("3#<гB (D%9Qaz9*Ir$AdthFy'2:3"SF`c.)NY(" Pdu*a=aASEG0a{ iG pkEXaaL#= GSh4 =0faEXaI諠 C2tN'Ii®M3zm'Il:*:Al:*5Z*PM*67~ڷO1*m+vmm+~+?׽t5׶}=}i_nknZk[Gk=_aɺVFgj<ٮTIdO{a0m{P'{T…L(G¦?A/nmo […¤p a ~,67NK hh7i%aXn8%kJ'UU拺8),ԟ'W_:^%NuO8?EK8^(}m'V}K_Z믬5iv|54_k4j}ub޺A5az *=v]{ueX^A-+z޿دةi (i&v8i&ġL4aL4&m27 ;dn4iIl4N4i4iղ7Rn?fEYFbC_1_?K1 Xs90FRlSn~۠`  `7_"67swi~7_iXu8'I7Gw_/4u'/ڿi$?i?i￿_VXiZ׾k|5r ?l&N)zد)[zl&GV]=YuU..E-_#ejm4I6Kv (i4ġ 4dniI6L6IMNLMl4NaAh2^aIa"9 $AL A&$ xtaA08"95iA06̵2\v/;/DDDDDDDDGi0 *ajp8Pp-h'eGJ>R%M{K pKؤإu0KDѡ g2r*̎!0$0g1.Hyhdt{0H2:3"!.xKzkKz65?aiӦ7i>iAmQ7I/yOEDD#iGI?_4DDry7V%RDid`ˊl1PE8fOffGFy&E'"3O3PDid4G 3 Ƞ3pTAF a0aT*aB=(*aȩa0a aL#a *&pT=aASiÇ a*iMUiI&ê aVW pWI E]& Ph6aU&îRm' w H6mz JJtm J{m[Vոm[NbT=SS][KuuuХAҺRz꺋]]_]v?~^W}}Q]+?C\W n;SʌFBx#ߔ>5_? ~UP & @(PLG¦/[?ۯ?n .N:77­~V%¤o_[XD#$zcKub'W_^N'_N4W_;_:Em'Km/}:4V +_[_5a[{k_\e []اfzzث tv]Z(~u(~L߯h(i27Ҫdnm& $NM8i&vI4aiI6i4 i $M4m0M4("30g !"`YND("r(G3 !8S>g3 R9#و"& 3ȣ0g 0g2G(m4„G7v@ K0G0 &ad0 xaa. 0aB#a5aG AAڂ A aM0a7Fk #@a*a0d]M3a54LŦ0T40T L(GL#n"8"""2DDDDDDDDDDDGaVWIE] Nh&M8P諤2mޓaCuUl:H6mp ' t{߶պ]un%:ս[_{mNoxunl%9ڷ~J괯/Ji=_oTVmGkEo/⿾WOK5_a#  iI __@a  K_m'uz^hE;خ4Z_Sد_j_EK_4k"{ҵ_WU^L+=m*4v ?حzAT޴MMibP푸m4I6%M;ai6Fᦚi#paII4ӴNIrLRl4AaAaPAd h4/ 0n$a N6  A  pDr AI̔d&|DDDDDDDDDDDDDFR""""""""""""#DE4 (Z(PKi륮$,]H% *إ]`*DN #d0f9D'x'YlK0H2! 0fO3d3PT03N0T 47F5 zaNmwp諅A6xTaWi *6oE]&âam:v~}mĨ{ħZm/+AҺ_t??Ckjgev YVIs*L@L(PB*a:PB…_ߥppppv_{:NԲėE|mmKXk}u_Pث e]}^1_ab릚lM4dn 6IT 4iI4NM'06 !aT n:00 A00baRm0ȟ1' /4"r(2:Ih$\4G#B` '"O?0H2$̎0d8d x7d6"*`0dQ\#a0fV{ 0a7L#aÄ{"=0a 3}0a{G40T545 = Pa uP諤76i>l:*7談Tn3NA&‡E_WI&MNmtl:Iq)ն=v+~vڷmݷOm)?ҿ߮JҽҺzKJ>_Wa WC_alOa/0s6n- a7K I/,7ix%N''_^y:hz_5}m/_ݴWm/~5k|5_ ˭YtU_Z(|w˯bbl&G_[.6Ii7 LÆ iM4i27M4i&iM6L4MCMl6Mi. am a4‚#K0 C aaaA0:0 ("9h2^A AaqQFd *K2HDDDDDDDDDDDDDDDDDDNLd #a i WW4xxP:Niii48=u&;!z$ 9\bmo % % 5uSuU׈M8e PD2ʲ3 S8YOfNAy * $|BaJ$ȐDGEAѡf ЉD%Ak4= L#a2x5 Pk  G)sX`{ * 0aȶk #=#`{GSihߢm'H77 MC2tU \* fNtUtaWI}=ӫ*Jsol_o[Noz^U}u=O_u}Һ+O~j-u~]}WW K0#F#a櫰cbRlFvi|&UsyO;d_@ ^ aa 0L*i*a K%/%  I¤f/I/K ppvhk_IWz__$)/DIfӑ u띃X+B&#K;BuZ_׶_ތk4ui~}_]uVMo*˯zl&GO_at] _zb/ =iuW_]uW4M6iICI8i&Lav4ai0ii#p &NL4i_]uV)00 *0 AJa 1 aT0mAd&imApDr a\̏ pϑbA& L` #9dF``6GO9BqIi܋dBDB\d(ȟ0eA(!H"""2q6AL{L#aASiÇ a*ip੅Fpah43NG = 0T=O7zIIWp: aVWtU I*A諴Ut î tU MNn%C][۶lջm [NunV}t%t=p}]=u]W׶֕z~һKnZ+ku~\0K!+IC{k020`@_ _]}Y:S4IuLm/WmK_J_5_"ZLWha2:bCb-[u]{tu{eױT&a &M4dnlJI4M4i6l4N6iMIl4i& $i&  2D AM 4/  ڂ0 aPL2^A  %L2\AJaAaLS!8"""""""*i Uɲɰ+_A- D$LA Ȝ3p3 1 y'" ao0cGSL* 00d[phߢm'A6l:**T:N:*3O߶պuջmbT8翃jZ+.Eo6FL)2)L(P… ;@m(Zu"W/5iZ]*˯zl&GLS_ ϮiM6LJI4ӴNIlF0dGFf 4 4#3g!<9H"_1#L2>)oNn%C%:m[z}/׿I]\ ] WUt_omW[?t=ᄿa0c5_Y_ nvA7K o_ Z]ح-'_uNu~Pm/Km/cm'߯_Zhv]=i1[ӱM:i &F6ii7 MJM&iJbP M  : 0 0 2UC ehfyIfQ,RqHT PBA|.(PZ^@]qrdmTSJQ_]UX0L/U_"Y%fGG EGFy&YhYLrKY/< G<PIY1rVKAD& FH2rD cB^JqH䍂5(GA{ #‚슜#1s=8*aGSG`5 = L#xPdX cp੄h #t*NR C1t&iWtnMMi>RoIE]&3}}'H6PMޜPտտջooSVPN߶ջooSz޿JAJҿtZݏҏ]c_+J?_+a?c#a~acenid;jQ*Y?@na-?c:dl (T¦U*aSOoB_o Kft(PpFoK7~o [MWѴI~~D'4Y:1?q?:'^~D'S(Z;0_E~PUVWմ߭}4 N___׆5:#D/'{.zPbh]Yu[T N˯bA3uբS_ؔ;NV (i&v4ӴaI#piI8i27Pa6[ 4M;M64i27 6pDrG0Lam 0"9I  A. aAɨ b aPa=AL&0"9Ha2"3p"& eH"'"x<0d ĕЉWOL(POn… ;@_t>d&SbuU_m'KU_ҵ]xkk _[@اƊM˧+˯L]'ailM%l4M4ab2:3"("|S ᓐD'z3#œ3gr>)RoIE]&fOոlV[տ|[ջoPN߶Vt5__ut]u֕k}ozk+???#Faͯa9FS#aɱ|v-3LA۠l6?ۦÅM0S #K%7 KBXn……II,6 AKm$)-K8O8(O)ѭ?m?:'LRYD;>v %@}vEݴ_KZ}o_ MU Y)zخ?K. e^H%u]6Ii7 (i4pM4M4MiM6i &FJL4kaV8iu\a &aL&aAAaG ApDr %d00‚#P@("9PA z0 &aAM,32:?eH2:3 !.`Ȩ2:3"'"Df ᓐD'z3#œ3i!8BG%\'x0CN$j T^x0/A$\ De"""""""#)#X„{TG=(*aȵt=aGS0T3L*aB5a40Tg40 { 0a4aA{pਜ਼50a*NR C1~M6m tUphޓaom&îmA7 ;umMzp%CVVounۧxJukz~ħ_뮒z^֕Z]WWCWCO]WCt++I+KZݏnZڊۯ^Wc000JJ WC_C_+LS,W 9?5_uX#v#\0@a/ _ ?~"#7_/%Kzm|%K }_Wtq?W:5E;'^oY:Ni}ך'W@m-I6m- oҵ5XiZ5 mc.balP+/ZbTizv+VbJ +I4M;aPiIġi6I4dn L4aiCIi6pDrG0PamAaA0A am00 &&iAt$2UC aPdA h0Yږd!3$,̳)""#)DDDDDSM4 ^_ ivJ*!!kDZK0VMU0L UfGFdi2s#`ȗ2:3"ВA$ : 9yH* $s|BaJ$ "r>F4,Њs#K<, %{GS0{"{G4 *a*iA#‚0T= FAah#aȱ#X=`͔LxptN:*3T&MR E]AhPi8P諤Rl:*®M5I6i3NRtIo~m:mmħ=VVPuo]տ׿_uUz~O_ti^QQ[EkuǯQC4?⿿+j+t櫰f(:&9Vw<4̨̄3aa _/moSL(PT† o__ / 'ICwH7wm$KzKK-S')y%h4t~N拑GݴJMQ:6EWK_K~V4k|5_+A4Yu{՗[a}+R ?l&՗]]i4pM4M4MiI4ӴNI7 4iZL4dnuLæi(v4i7  A06A K0d08Ds0am0 #M0n00j&‚ ("9PAb0dBF['A +33PLr$<Ў ydt\G x̎>"& C.)RoWIaW m&zIRtIow7aC5iRl:*3zm' NհbT<uo%:NPտNSսo W֕A+ҽ+++K__~^5?wMEn{+a_̣#Cͯ&1?5F?m?k;-jyQ2[(O ^/t/ul̤ B Tʑx *iPoP/PСBIi}I}[i/JTppppvIi%Liw']d)/V/ĭWQ"Km/I:6EUKE+դ# N_[]~_CU׾K׆_a^:VIuS՗[a}+R ?l&N+.EbPbM_ )X"]'~lMm0Ҵi4M[#pbPi0dnL6F4M4푸i4Ӷ;aPAOAa*G: aa8a6MPDrj5MAa&aL 6Am $l`( H2!S 3( N$O Fb(#Lk"r(42|s42:? DDDDqDDDDFR""#*i{ G5#XaGS0{"i0$8*f-0a0aT*aB=(*aȫUl:**7諤Im a' tR l(tUUwMTiâCC2ZZ_o~VuոVm%:SջmbT8翃jZJ괯/Ji=_VoTVmGkEo % % %?\WW)LSb0LU0@t"#%K3_]iz__o/:'_^,N+<+_jڿ(m-Mk (iZ4H4ze׽6# 1O[a2:A+`1]$E+bFkm&m0MliI(vi I7 4L  4MIpM4Mՠ@  $@PM0Axl( At%&&aapAtaA aa#L |yI;LRfFJxDDDDDDDDDDDDGaB#aB*aj I……-pvpv륮%ax:Q;uIiᄂ\0(SbW`/몯!x3 sNYhYA q$ :H2rD%D*d $s3 a# q99 sPPT=0a Gt=E`0L#` L#xPdX cp੄h #aL#Xk 0cM0YL#ph&l+M*7ItU:xTw&m&â&âE[E\/諤%:}߶ջoSnoջooSnNmХt_t u_ZW_CNi}׽Wi^G_ok}=}~m3WuI'0#Ĥc5gtʞL'H2v__?@aL*aB<*k%K Rp~Kv~;@x"bױ_,%M'fCJ'z#uMilmiz*^j_J __׆5]W_b+v*˯bA;u_uW&{.zPb/#. ueױU]W]6i:im& 4i&l4i44pa4iiġ 6Fᦜ4M4l4ja&Aa a@0xataA0"A A A 'TaRlBq)g2("O3т6YBax&rF&dxSx3D'VB$ xL9lBaJg%9(#C#K23G3DDDDDDDDe a4L#AG‚ao6AL{ = *i7 h#`= F=`:aL#aASWWނoE\(tUfQWIWI‡E]&btzI Ph5IaWA7i?a&‡E]-/m}=mJuz[mħ[k{mnm+J+~+봭/?[ַ_??PT??+kpCbK?=_UP\| `?X@_#/\%:_KK^7'^h+~m?V;t]?:uE }E ~6m/m} xi5_k5i|5k_U* ^բ˯F"[[Yu^{՗^lWm&il4i4ӆ#pdn 4Ӵ&a $M6S &m&I4im&p A, 0 A  Aa6TAAVd00p$AAa0‚#AAL Ȟ)3\&v_"ٌ]DDDe"""""""""#)QL(PS ZB vhz9N5&v9REmm+HIJJ+_]}V1_ `^rD&q$9#O K3<|3,BD.D ǡ#23pS|#<гB" !0DT%^x7́pȱL0{ (a=`:`{ 8pd[ L#a i4=h#XaG+Å0a{3u#@`੄{ >&oTA6a^m'UêAtE_WIaW m&zIRtIow7unS]n%:V[oul_[z}NSХt_t_ZW]KJ~ר-W-}[=z=C_WtV]&*"iLv+;?m3WuO>0>{ba0B4¦ۯn{kx@  pkKu m88;@4?_i}I}[iuq!Ea_5Y=0Fͯa_LRlP[ _ _@A 0@0^%o_K: K __z/ߥ__}o7i%/BL'a;/ޘ'^N8K!(yKum-մm-ߧME6ҵ /߯J4~bWWVb ՅIV~LAazbl&G_[.M4M6F4&FlôM6i4bP8iZL4i#pL4MCMl6MiWp0h Aͦh0PM0ͦAӻAAL #"9J`0m4/ PAa  m0{FJ8""""8"""2p.ᄺilW00`7#L*aI諤Z]+ByO-̉aB#aS a/.' 8;@;M%Uc%#_l&G]_dni(wAl(.fG8g1|S|D%A\Sfx pϑA#dghD!Fb+pFa0a'+ _mo~ _ # N7/%Kuo/ _aKK |Q?~Nޘ:$'a;/N'oLw]J:_V}Vm o o5}mtu[}خ+6# ua{./#)CP*˭ްMCv $iM8iU&m&#pjV#piCFLM4bPI &l6Fa0&‚ 'vA0"9Kd0#AL4a P4L(&P A 4/ A:j %"gÌ:ڲ[sq!DDDDDDDDDDDGDDDDDDDDDDDDDD*aS #aB_?8k#K]}Wk0]}WD$LA2'0N= % ˊlN(#l噑2:%dK/do$6Hh$<9f (KY/< N$l L#a i4=h#XaG,C0a{3e28FSFS0{ 0f#SF4atH6p&oiIIw OWt{uINm tU&ouIH7հbT<uo%:NnunoSo֕A+ҽ+RW-}[=z+C5CCPak+0ɸwVSwgfFvS;Wyy/mo (G¦(G¦__ӨKm}7/ ' _k_V_K4;M%LiwiESb?D j8i?׶^Hio誾O᭮ / oa_keױOWV]lUH'4PE8=C*a2:b(~6#TkM6iZL4dnuLæi(v4i7 #piiġL4M4푸iġ }W 2Tt 4 pm 0Aj0ia‚ K0 A $lM"'2$PD 4,Ў yHFaB!"`"b*̎rBq )PEXSQf 9e&0dd刈""""""2#aPaPa0{"=(F{ h#X~a'{ #XaAS<#`̐=2*`0c Gk (FaT*I‡E]&ei¤6T~tI' A4 PhN:*:MI J J==>m)߫q*[mNm믮zm/ҿwJj/Jҭխ?_ح_V:߭_005{?t?5+} 0#  a  _# oP_ H7 ᴿ_GtƗ/ɄuP/]?;ﶔuOuj}5]ak o]]=uLP+{ =v]{a˫TkI޿ئduVl&GVVJII6%ڪdniIl4ii $i0l4l4M4bP4ӆ#pbPW2)&d+d;Fw+H%@Dr AG 0apDr à0i8"9$uAa 0PA08"94 4… 0HPB~;MD Xdr}W__֚lV0`M!fd K@$H&9U!"`"AL0dGFydthD 9$ 0̊ 5F`!"` 4 0ab"aj3jk # a{PT{ #a{G{ 0c G*cFOL#Xa0c*`=E`l ޓh&Ii8P*67t&âL'IxTaWI&taWUo 4}[ouoVuunۉPVV]?׿_uiu֕QlQo~+aC4?a0|#a#aװ{m?(fC3I&yW@ [ [ u4<0%a8\.I,7Iao m/5~N"--K8t%NP'^q?Q>CIgw:+ chwKm&Vm$V}Ki>^55_kXi}[ku Sb /_uT[ LW)z+ L˯bA;u]}rl+ Cm4dn7I 4ڶFJM&4M;M0apdn4bP톒iMӴa_]vaPam000mApDr AG PL2^AaA0PA &l  N`"0O!0$s5 '"3т6YBax&rA&pS|3\DDDDDFR"""""""2S*i{ 0AASETGS1*a4t=0c3|0dZa40TWWWWTAWIbl*TaWH7*6:*;xP諤^oI6P">ZZZ^%:m[V [NunVտ%:K]uХu]w]viZZ[k,7 % % % %C!lS1^m#ߚ[ 0@ _ _u D/\%}oKބuIuiKbKE$?im5_]J[˭޻.E-_ ͅ+OJI *M4푸v $iM6IMNLMl4NdnP 0 PAm02\%d:0 A  Aa6TAd*3.vO%yg"""""""""""""#)QL(T¦0}^p\-/Khveԇ"i/ % Ez)6+`0L/]}V""Y31"'"| D 0egg0H2#0!8$rT\Sfx pϑA#d',̊s#K<rVJdKC P*aG†h#ah50T=0faT3N0aA G=b(F{ #)a4  G40TӇTA6a^m'iWIaC諤AA6{MRM$LӸT&|:êMH6m|Ju;mnm1*뺷zħ[mRtJҭ+JҺ?%ZWCХtzEkuǯQEoHkkz!i~PWF#u_̠?`kd;jyQd*_ [_c!0 02 ___ӨKm}7„p… 4 _}%moNxMx"NE;ޘ'^N'W_Kޘ:(O/fT|"J|IBm[Kcm'm-_cm$U}mIG|4P_^5_5]{4xk +_'uu}}bئdtlW]{ueX_{ TsE SˮCث.?b޺m4t}RiI 4ai0ii27FġPa6lMi&|_p a0PNaAA0:0 P"9L4& l( ‚#PAj 4/ ט2"3p" H"r("x<`"(%9y8~A0dig0K2r5 !DDDDDDe"""""""""""">0aGt=aF= FL#CPFaM?h4*a 3NG 5AaKWIhߢm'Ih& T(tUfOH6oIVWt6:*M$M_A{ڷO뮭ħTڷkm{mnmZ'֕i_]iOO] __oZWB{i}ViwEEnv|% p⿾SHb~mF1U1fԈ0]/v}x _B[kzפ}ux"hbi:u:zcK'_m/VI/{im{is?[Pҵ{Xi׆ Zޛ Յb 2/A'[^oa]iiIL4aġ#pilJvalM4.4MMmU27`pAaAaPAdL h2^ &aIB A@ 0 0ataN00"""""""""""""2qKڮ$A+0`Z 1̎ L(G{ #ӅP'Iħ@>^㫮ɲSjYR̩P aPt¦*aB<4{…¤?vh݆㏉*ZZCq>N'u1]'[I446 3 4"ȣ1"32:" NDH"rȌ0a0eSq)߃Nm[m%CZWO] WAҴEnn[zÇ⾆0F0nl?A %K m/aKK +u)y:'5'(wN,֟ڿ6[W^k +^5kk{'4P"S_]}b ]{v.=7 6%im' (i&#p&;M4il4M4i&8i0NaAh2^aG 6PL( AA %AdL("9PA͢)DDDDDDDDDDDDq KzJ_ؤ`A&2:.F0 !0l%'ڋA0=FgӤN煉&_ߡ+]c_X?=F ^vS\/?Fv<䐂~/c)`6 *aS$0 a߄t(PpFRm,7VhhtZKu v4d_X U#]o/:Eˮ"R}}_}Y &FJL4k_iG&PDriA/A8e PD22$9Fb0a0ex6!aM0a7Fk #@a*a0dT0 ~h50T=0faiS0f6KUl:**7諤Im a' t l(tUUE]&êM~R}q)8=m{ħ[}ħ_J괯/ҭ+JҿKZX.鯡L' =aaC䷈DDDDDDADDDDDDDDDS P *u /Khpppv9V;ItB;I/0K_WCUZ0dg3C#l2 N3E9gC#نH"AљD>`!.`ȗ2:0F0 !,l%'&BD (FS Gk  G-Pa*a# =a0a Ӧ0cL#)k { G‚al:*C7L)6a' Ti:Mâ諤N煉&Ul(tUw`=)8?:m*)/ރ׺V]}i^>_ZW׿kuƭnoǦ~+W[=~ }8?CɸIv#;'d`?aaͯÛOa#>S 4¦ _ _u ??B\(Kp~ht7_iiv aߥe>#O_d<'ttOO~NKߧm'K5k} o[jr~V[.D LVLb uWV՗]E@+>M4NLMl4NdniJa &;al4jLÆ4i7 M6M8i27M3NAJaJЎ pϑb)C# C#g9f4#3gaA M  6NP*#a0%A!Aʂ Aa 45 = PaFM{ 00c GS5h#`DDTDDDqtUUoIi76a*Ni8\* aWm&ê~oS)?v%JJ}um~ص[դJ~+H V!QXK#櫂0aͯa0ߛ[? vv  -K -G_~vᴰ/ץ[NtZE;޲um/_4"W_Vا-1ZtMl6Mi7i48i&m0M4' Aam00 'G&PDr axaiAmFy"''3L{32:3 'Db)̎rЅG< H23G35 ӂ\#Xl&= F= aP`0{"k 0aL#a03P*`0co0T=4MC1zM$uA6l:**T:I‡E]&a諤P uMMT mJtm J=)߫q)նJu=Ji=_iZ_ZWBkEok[+t_a0a5_sLS n{; ʌ/&y ̑۬ ] _ l%`PB2AS  -7/_t(PpFBoK -V`V4W_O~KSy:k|J|H@E$O[i +___ xk/(:[.A LV=u 0a˭l&GV]{_lav#pݤaiI $NlM8i&I $M6;aIiU"L* AiAapapa8"9 ia&pDr Ha 0PTaAA07BO3PA0eH,"("'G? !8BS>g3ˊlPFyfy("0Њ3PZ(4^DDDFR""""""""""""""""?L#`0fa0ah #@aL#X‚{ #@xF‚ i{ 0aLG=#a*aǭ֯~ME[E]&ti:MA6l:C5th& miWIaC諤Nh& E]'KtK{ڷO뮭ħTڷkm{mnmݷOtҺ+/KJRti.KEEnv}Eo7Q\0KNppoح6(xW#dͮjÛO0`/ۯ _?DG ӯow_ޗ_}_uz^hEufKW?ד!>)};m/VDﶿ{imi6itFk (iZ4Hkk_XiZO+*˯zl&GVbdujb IVeױ]1LS׶#Zii 4i1(v6aii4#pM4 M6i4aPiIġQV(0MaAaTa$4 ‚ AAm0aa'w0 AA4/ PLFD'^2%!Y̨"""""""""""""2qaB 0 Wo (PT-/]ppppvT",r(QA-W}uP U_]xBA<S 3Pl= SN3F#l2A B',#3g!"`"b5dT0e3N G5t3L*aB5a40T=8pc *a0ca= 3}0ak (*aDŽ{ 't=I>mtl:MM$uIpaWIm'H6aWI R} ސoUom)xPV%:%:[տt?%t;+-+K+J߯JV?nV?cWn__V:޷_~+H|?~!?8#?{kay0fF?ؔKb3gO& y-"a }? _*aS T=(K7_ oP\.IR ~kxo_;@.'^oY:Ȅm?(w_%u&h|qRP_񶗿i{m_G {Xk[j_^W՗_[T E`Mخ˯b/YtuUiIi7 i7 4' &FJi4ؔ;iCTl4ii $i0i&M6 Aa  m0a6TAG&aa‚ &dAAa4 a: à0“df ᓐD'z4#3g|"<гB( L<BIH2|`cp2<)>FyDDDDDDDDDDEDDDDq*ik { 0a*aB=#Xa#xG4 L(FLSO a\:**7t4zI'I*M6ooW âM_mJs%:~%9mm)JKm~صnQ_]|Vኯ+tapF=0F0?@_a%~ -~k~KK_Kyw:E</-'_K6mm_^Ki4[T ¶#ئ*˯biM6FM6Fᦛ#pݤӆ#pؔ;Mim0M4M4M4'rO+9؞B<|k!| aPaML&  pDri‚ L0Ta0A &00L* i0 4…M8pRo M@5ʴ9ڵhT>d :&吮Hk⢵}Ua0!<0fGFfd 43#œ3i!"`/]}V%Le6g 6FyfBA#BPH2!0!0$rG\Sfx pϑA#d',̈C#L<, a엞 Ĩs`VAah#aȱ#X=0a0a=00fF5 k 0AEp0cncÄh 0aiIIw a& M Ti7$M;Im'ë :o]տun%:[oul_[z}NSI_Bum/J~J~z_~^}Q[?t?}=]Q[?t8>{b''fn96/_ޟNm_]*^]?CUt_]^Z_C]Wi%QQ~Qůkᄸa }C[?+ C5Xء5y=T#U~Ú0` /@_@  Kz _K]a7}^'^/Ed4_ߓ Kuy>N"/SKMkiMO_K  a[#ئ*˯b]T alP+/LU*6#zؔ;Mim0M4M4M4&i#pؔ;jLM4i44Mm1(vl4M6FPA0 j &0AAaaiAa00M&aAɦAA 0L &A & 2\AL"WQ =xP\#X`k&âۧiv,Y2o)fyLdf00PI\/B_iT!QqM^a2:M6%2(G#A9f hdt %2T#d{0g ?3lf dxS4,ЈџfPD#3OBasfD di ᓓL 6#{ 8p0{ 0c `T=t=Ok4‚8*i{ 4 a0P{ 0Tƒ7S aE`i1LӪApm tUp>:*3VzMVW wphz N m tUâLMDMո[bT5ջoյoVHVlN{[mkO]{_}Uii^]C~[okVWa?P?a_=~/a/ /_7i_XخSث/o'DEu~NUWRﶖH_^]ak}ҵA:hLSe ((JLP)>b.E8]IvL4NIIi $#pM4Mi %ؔ;ki $M4iġ]i;a""9%pDrAam0mAAL 0 l( x"9a0d00 APAAAL"ܣ;+<ضv g""""""#)L(P ZpBBiz_8;@I|9B]VᄂA(a-RlP -"%u*̎Ƞȣ0e8d Ĩx6 "\{celdO4l? vۯ0/%KzB[k.K }_o7_նvi,O)w_~N/޲uߜOG;N:8ڿi[?i>iumﶗk +_^mo5Pu1LS׶#-*} LVLb ӱ]^oa]Nha0q_,c3#pL4MCMl6Mi7i6%ӆJM1(vJMmU27Fġ_PDr d0aAAL* aPa 'G(Ds 0PAAAa l( “df 0F`#LDhEO4VDDGHS 8*ik 0c0P{ ?^pVWI諤8\* aWI/K`m?vh2n%%_V6ᄿ⾼?د#a /@m%y?}J_?/#b4lM4FᦛpM4ayg<?a6 aA A -ɦB!s*'DDDADDDDDDDDB0 pPvX:Ƞ3*\Sg24G?0H2:">FNYPEѬ#3#نH#LhExS|3#@aL#mZaL#aASo6Aah#aȱ#X=0a0aÄ{TGS0akG40T& TiWIaC諤MRM$LӸT&M6'IpaWIm'H6aֺn{ħ[}=>q)Ĩ{tӫziJҭ+Jҽ+ҺzR}z֖tVQ[l~Ư~H~?] }eOa\U2Lf2K =u,f'4}m ?/ N:6k;M_kv%mxl7῿]3q]y:zcy:=1ߓ+u+'Y4q?ﺿ'\#m_J:KJ:6EWIm/}~Km'cm./=) +^_5]{4xk~ ~k}C_IVeױ[Wb(~LP)zد?+ *6#bT0M4MMmU27FġM0M &FJi4ؔ;iCT|V! "БRA ̎#B4ѡf"0ȣ0g 00eQ%AAL  ݦmAPA A8"9Aɨ("9B#aA -aT= ӄh #XxG-0c*a0T40T L(GL#؈8DDDDDDDDDGKaWH6p&oIi:NaWI TiâCC4֞VPuV{oոunl%9ڶ֗n?]{CO]WA}R_S_ccbJ+ci_  C F#a櫰J? ^ aa?۠`?%oQ ߆7it^%NjO6<+{k+_)4U']~_|5xiZI5zb/ =lS_ ΟiҴi4푸p҆I &II4ӴNIlaa#G: aiG("9A%ᆃ%A#A0mSV3 S&yf~"""8DDDDDDDDDGL(G¦0B\*N /KvAeR%1ch|/iᄗ___&/0` %"!0dL>gC#Ђ! ("39r6YBax&r@S2<)>Fy0 p!"`2:4"r("iF‚xG2xG‚ao6AOM3}0a{G40T5諤M>oH7*6:*;xP諤̒oI6t޽tImA諤Sս[op{oVx%CVZW}ZW׿I] ]i^]=uuo_Q[+H~_C.aߛ_A\RezvYR?X@__*aB=0 ~/\%p6 7oo_7wvht~ioY:z'DB|"+S dBESK}+Km-I_^~ }_k|5_[.eeױ_hWzUeױ]1LS׶#MFᦜ4aa 4M44M46FIIi4ii(w_Z0 &A0#L2HAtaA08"95iA06m00 TaPDr d0aAIfyf "91ʙ/%dn$A %Ĭ ĐHxD'VJgxMNYܤDEDEDDDDDDF<(G-a{ 8pT40{ 0f#SF5a{ 4ƒ1xPdX 7ItU ۸uA6h& E_fTIi6mp&o[V%:_uջoտNս[U~ :WO]Bu_׍BÒb+0TTW{k_ab6a0~"0i~KWb{ENSWUVm_EU}EU}44^_;a~A;uբS=&4Pl&GV]=1_]|g;#pNM &LMailM%l4M4a 0"9Ha K0 A $ 0 L&0,'DFR""""""""#)H80j---/hY Ҵ$ C C S  `_dZ' N%C%NhG8g1ASL#X`3`k GSE[E]&~oI6vN_]I]k_U0, !3!De?@~.馚iL//%Kz _~vih'^oY:v Dm/K5xk_"W_i}4dn dni7 OAA 0L MA&dRAGFg2s#`2:3"ВɒA$ : yI!# $xBqH#\Sfx pϑ9#dghB"""""""#G,0c*a0dQ{ #@`8GSGSL* 00dQST3N0aA G=b(F{67&t&âLӤ *A諠H6mpBC04tU \* jm&f¤7[տ|[VPSտհbT<uo_W^WOO]WA}뮃?i}WdJv6??ߨW]u~ߵXp !F=Û^si#F#uOlX [t-t@ ^/BXl7oCPP-a_%m-K8O8(O)4W_O_Kޘ:+Oi6({kumﶗ_kҵ__5]{$0t_ 1LU[ױO__ ޮث a]Nha0E@#p푸p҆I $NL4i&L4M;I4ᤚi#pMMFT:jmZa6 PDr 8"9 ۂ#a&/ A  pDr A 2Gt 4 pm 02"""#)DDDDDFR"""5u}_Wz]u]ᄸa+&&A 0`""?AڞJ#OOL*aB …ԛ"vRZXU]}W,("+ i2:P^yH("XD ǡ# "r>F4,ЉQD% 9+%BVBJqHa?2 DLJ3t8*ao0aA4h40 { #!„kG=v#@`੄{L#aASE7TL" 0"*OWt{uIE]& \* jm&f¤6RoM&‡E]&cumi4M6Mħ^) J=>ħ^)*ڷz޷z~+?i}W{?O W:WA D1@AlzQk` `?wMEn{ `_#Cͧ +_n[.E"n{kx@o[o /%դi6Miچפ C8#O/%Liw4Y:i?׶^HiorUU N_[]~_CU׾K׆_DD}Yu({eբRv]{ueX_{ TsE *uehUVZLWZ 6Fdnml4iMFT:jmCI#pa7 6ix"9PA 0 2Tt 4 pm 0Aj0!L 8"""""#)K]z]iB\00SbA D endstream endobj 93 0 obj 92621 endobj xref 0 94 0000000000 65535 f 0000000016 00000 n 0000000068 00000 n 0000000250 00000 n 0000000435 00000 n 0000000611 00000 n 0000000730 00000 n 0000000748 00000 n 0000079174 00000 n 0000079195 00000 n 0000079373 00000 n 0000079494 00000 n 0000079513 00000 n 0000091681 00000 n 0000091703 00000 n 0000091882 00000 n 0000092003 00000 n 0000092022 00000 n 0000234497 00000 n 0000234520 00000 n 0000234699 00000 n 0000234820 00000 n 0000234839 00000 n 0000356222 00000 n 0000356245 00000 n 0000356424 00000 n 0000356545 00000 n 0000356564 00000 n 0000376970 00000 n 0000376992 00000 n 0000377171 00000 n 0000377292 00000 n 0000377311 00000 n 0000539731 00000 n 0000539754 00000 n 0000539933 00000 n 0000540054 00000 n 0000540073 00000 n 0000654969 00000 n 0000654992 00000 n 0000655171 00000 n 0000655292 00000 n 0000655311 00000 n 0000675210 00000 n 0000675232 00000 n 0000675411 00000 n 0000675532 00000 n 0000675551 00000 n 0000699967 00000 n 0000699989 00000 n 0000700169 00000 n 0000700291 00000 n 0000700310 00000 n 0000797683 00000 n 0000797705 00000 n 0000797885 00000 n 0000798007 00000 n 0000798026 00000 n 0000824438 00000 n 0000824460 00000 n 0000824640 00000 n 0000824762 00000 n 0000824781 00000 n 0000932250 00000 n 0000932273 00000 n 0000932453 00000 n 0000932575 00000 n 0000932594 00000 n 0001041986 00000 n 0001042009 00000 n 0001042189 00000 n 0001042311 00000 n 0001042330 00000 n 0001168719 00000 n 0001168742 00000 n 0001168922 00000 n 0001169044 00000 n 0001169063 00000 n 0001294894 00000 n 0001294917 00000 n 0001295097 00000 n 0001295219 00000 n 0001295238 00000 n 0001424265 00000 n 0001424288 00000 n 0001424468 00000 n 0001424590 00000 n 0001424609 00000 n 0001549828 00000 n 0001549851 00000 n 0001550031 00000 n 0001550153 00000 n 0001550172 00000 n 0001643039 00000 n trailer << /Size 94 /Root 1 0 R /Info 2 0 R /ID[<67458B6BC6237B3269983C6473483366><67458B6BC6237B3269983C6473483366>] >> startxref 1643061 %%EOF 4 0 obj << /Type /Page /Parent 3 0 R /MediaBox [ 0 0 612 792 ] /Resources << /XObject << /Im1 7 0 R >> /ProcSet [ /ImageB ] /Font << /F1 << /Type /Font /Subtype /Type1 /BaseFont /Courier /Encoding /WinAnsiEncoding >> >> >> /Contents [ 94 0 R 5 0 R 95 0 R ] >> endobj 9 0 obj << /Type /Page /Parent 3 0 R /MediaBox [ 0 0 612 792 ] /Resources << /XObject << /Im2 12 0 R >> /ProcSet [ /ImageB ] /Font << /F1 << /Type /Font /Subtype /Type1 /BaseFont /Courier /Encoding /WinAnsiEncoding >> >> >> /Contents [ 96 0 R 10 0 R 97 0 R ] >> endobj 14 0 obj << /Type /Page /Parent 3 0 R /MediaBox [ 0 0 612 792 ] /Resources << /XObject << /Im3 17 0 R >> /ProcSet [ /ImageB ] /Font << /F1 << /Type /Font /Subtype /Type1 /BaseFont /Courier /Encoding /WinAnsiEncoding >> >> >> /Contents [ 98 0 R 15 0 R 99 0 R ] >> endobj 19 0 obj << /Type /Page /Parent 3 0 R /MediaBox [ 0 0 612 792 ] /Resources << /XObject << /Im4 22 0 R >> /ProcSet [ /ImageB ] /Font << /F1 << /Type /Font /Subtype /Type1 /BaseFont /Courier /Encoding /WinAnsiEncoding >> >> >> /Contents [ 100 0 R 20 0 R 101 0 R ] >> endobj 24 0 obj << /Type /Page /Parent 3 0 R /MediaBox [ 0 0 612 792 ] /Resources << /XObject << /Im5 27 0 R >> /ProcSet [ /ImageB ] /Font << /F1 << /Type /Font /Subtype /Type1 /BaseFont /Courier /Encoding /WinAnsiEncoding >> >> >> /Contents [ 102 0 R 25 0 R 103 0 R ] >> endobj 29 0 obj << /Type /Page /Parent 3 0 R /MediaBox [ 0 0 612 792 ] /Resources << /XObject << /Im6 32 0 R >> /ProcSet [ /ImageB ] /Font << /F1 << /Type /Font /Subtype /Type1 /BaseFont /Courier /Encoding /WinAnsiEncoding >> >> >> /Contents [ 104 0 R 30 0 R 105 0 R ] >> endobj 34 0 obj << /Type /Page /Parent 3 0 R /MediaBox [ 0 0 612 792 ] /Resources << /XObject << /Im7 37 0 R >> /ProcSet [ /ImageB ] /Font << /F1 << /Type /Font /Subtype /Type1 /BaseFont /Courier /Encoding /WinAnsiEncoding >> >> >> /Contents [ 106 0 R 35 0 R 107 0 R ] >> endobj 39 0 obj << /Type /Page /Parent 3 0 R /MediaBox [ 0 0 612 792 ] /Resources << /XObject << /Im8 42 0 R >> /ProcSet [ /ImageB ] /Font << /F1 << /Type /Font /Subtype /Type1 /BaseFont /Courier /Encoding /WinAnsiEncoding >> >> >> /Contents [ 108 0 R 40 0 R 109 0 R ] >> endobj 44 0 obj << /Type /Page /Parent 3 0 R /MediaBox [ 0 0 612 792 ] /Resources << /XObject << /Im9 47 0 R >> /ProcSet [ /ImageB ] /Font << /F1 << /Type /Font /Subtype /Type1 /BaseFont /Courier /Encoding /WinAnsiEncoding >> >> >> /Contents [ 110 0 R 45 0 R 111 0 R ] >> endobj 49 0 obj << /Type /Page /Parent 3 0 R /MediaBox [ 0 0 612 792 ] /Resources << /XObject << /Im10 52 0 R >> /ProcSet [ /ImageB ] /Font << /F1 << /Type /Font /Subtype /Type1 /BaseFont /Courier /Encoding /WinAnsiEncoding >> >> >> /Contents [ 112 0 R 50 0 R 113 0 R ] >> endobj 54 0 obj << /Type /Page /Parent 3 0 R /MediaBox [ 0 0 612 792 ] /Resources << /XObject << /Im11 57 0 R >> /ProcSet [ /ImageB ] /Font << /F1 << /Type /Font /Subtype /Type1 /BaseFont /Courier /Encoding /WinAnsiEncoding >> >> >> /Contents [ 114 0 R 55 0 R 115 0 R ] >> endobj 59 0 obj << /Type /Page /Parent 3 0 R /MediaBox [ 0 0 612 792 ] /Resources << /XObject << /Im12 62 0 R >> /ProcSet [ /ImageB ] /Font << /F1 << /Type /Font /Subtype /Type1 /BaseFont /Courier /Encoding /WinAnsiEncoding >> >> >> /Contents [ 116 0 R 60 0 R 117 0 R ] >> endobj 64 0 obj << /Type /Page /Parent 3 0 R /MediaBox [ 0 0 612 792 ] /Resources << /XObject << /Im13 67 0 R >> /ProcSet [ /ImageB ] /Font << /F1 << /Type /Font /Subtype /Type1 /BaseFont /Courier /Encoding /WinAnsiEncoding >> >> >> /Contents [ 118 0 R 65 0 R 119 0 R ] >> endobj 69 0 obj << /Type /Page /Parent 3 0 R /MediaBox [ 0 0 612 792 ] /Resources << /XObject << /Im14 72 0 R >> /ProcSet [ /ImageB ] /Font << /F1 << /Type /Font /Subtype /Type1 /BaseFont /Courier /Encoding /WinAnsiEncoding >> >> >> /Contents [ 120 0 R 70 0 R 121 0 R ] >> endobj 74 0 obj << /Type /Page /Parent 3 0 R /MediaBox [ 0 0 612 792 ] /Resources << /XObject << /Im15 77 0 R >> /ProcSet [ /ImageB ] /Font << /F1 << /Type /Font /Subtype /Type1 /BaseFont /Courier /Encoding /WinAnsiEncoding >> >> >> /Contents [ 122 0 R 75 0 R 123 0 R ] >> endobj 79 0 obj << /Type /Page /Parent 3 0 R /MediaBox [ 0 0 612 792 ] /Resources << /XObject << /Im16 82 0 R >> /ProcSet [ /ImageB ] /Font << /F1 << /Type /Font /Subtype /Type1 /BaseFont /Courier /Encoding /WinAnsiEncoding >> >> >> /Contents [ 124 0 R 80 0 R 125 0 R ] >> endobj 84 0 obj << /Type /Page /Parent 3 0 R /MediaBox [ 0 0 612 792 ] /Resources << /XObject << /Im17 87 0 R >> /ProcSet [ /ImageB ] /Font << /F1 << /Type /Font /Subtype /Type1 /BaseFont /Courier /Encoding /WinAnsiEncoding >> >> >> /Contents [ 126 0 R 85 0 R 127 0 R ] >> endobj 89 0 obj << /Type /Page /Parent 3 0 R /MediaBox [ 0 0 612 792 ] /Resources << /XObject << /Im18 92 0 R >> /ProcSet [ /ImageB ] /Font << /F1 << /Type /Font /Subtype /Type1 /BaseFont /Courier /Encoding /WinAnsiEncoding >> >> >> /Contents [ 128 0 R 90 0 R 129 0 R ] >> endobj 94 0 obj << /Length 1 >> stream q endstream endobj 95 0 obj << /Length 32730 >> stream Q q 0.24 0 0 0.24 0 0 cm BT /F1 1 Tf 3 Tr 54.285714 0 0 54.285714 0 3099 Tm 29.178947 0 Td 69.669366 Tz (US010215692B2 ) Tj 101.904762 0 0 101.904762 0 2944.053492 Tm 3.199065 0 Td 35.981308 Tz (\( ) Tj 0.176636 0 Td 22.897196 Tz (12 ) Tj 0.304206 0 Td 35.981308 Tz (\) ) Tj 0.314019 0 Td 57.515576 Tz (United ) Tj 2.463084 0 Td 49.610592 Tz (States ) Tj 2.129439 0 Td 56.697819 Tz (Patent ) Tj 70 0 0 70 0 2888 Tm 5.985714 0 Td 49.206349 Tz (Tao ) Tj 1.257143 0 Td 44.047619 Tz (et ) Tj 0.771429 0 Td 44.047619 Tz (al ) Tj 0.514286 0 Td 33.333333 Tz (. ) Tj 79.693878 0 0 79.693878 0 2945.807636 Tm 16.964917 0 Td 35.55271 Tz (\( ) Tj 0.150576 0 Td 33.461374 Tz (10 ) Tj 0.476825 0 Td 35.55271 Tz (\) ) Tj 0.464277 0 Td 47.75217 Tz (Patent ) Tj 1.869654 0 Td 64.831413 Tz (No ) Tj 0.765429 0 Td 35.55271 Tz (. ) Tj 0.138028 0 Td 35.55271 Tz (: ) Tj 1.217157 0 Td 74.242424 Tz (US ) Tj 1.254802 0 Td 43.918054 Tz (10 ) Tj 0.639949 0 Td 35.55271 Tz (, ) Tj 0.200768 0 Td 55.071845 Tz (215 ) Tj 1.104225 0 Td 35.55271 Tz (, ) Tj 0.06274 0 Td 66.225637 Tz (692 ) Tj 1.45557 0 Td 63.785745 Tz (B2 ) Tj 84.285714 0 0 84.285714 0 2883 Tm 15.969492 0 Td 33.615819 Tz (\( ) Tj 0.213559 0 Td 33.615819 Tz (45 ) Tj 0.415254 0 Td 33.615819 Tz (\) ) Tj 0.450847 0 Td 44.985876 Tz (Date ) Tj 1.245763 0 Td 54.378531 Tz (of ) Tj 0.771186 0 Td 47.12806 Tz (Patent ) Tj 1.661017 0 Td 33.615819 Tz (: ) Tj 2.088136 0 Td 44.161959 Tz (Feb ) Tj 0.854237 0 Td 33.615819 Tz (. ) Tj 0.355932 0 Td 33.615819 Tz (26 ) Tj 0.545763 0 Td 33.615819 Tz (, ) Tj 0.367797 0 Td 43.997175 Tz (2019 ) Tj 52.857143 0 0 52.857143 0 2771 Tm 6.167568 0 Td 34.684685 Tz (\( ) Tj 0.17027 0 Td 52.027027 Tz (54 ) Tj 0.737838 0 Td 34.684685 Tz (\) ) Tj 0.908108 0 Td 75.675676 Tz (OPTICAL ) Tj 3.424324 0 Td 80.23023 Tz (WAVEGUIDE ) Tj 4.597297 0 Td 78.828829 Tz (STRUCTURE ) Tj 4.635135 0 Td 77.777778 Tz (AND ) Tj 50 0 0 50 0 2731 Tm 8.46 0 Td 78.571429 Tz (OPTICAL ) Tj 3.54 0 Td 87.777778 Tz (GAS ) Tj 1.9 0 Td 79.444444 Tz (SENSOR ) Tj 3.02 0 Td 33.333333 Tz (, ) Tj 0.38 0 Td 82.222222 Tz (AND ) Tj 1.74 0 Td 93.333333 Tz (METHODS ) Tj 4.18 0 Td 85 Tz (OF ) Tj 52.857143 0 0 52.857143 0 2691 Tm 8.021622 0 Td 72.809173 Tz (FABRICATION ) Tj 5.259459 0 Td 79.279279 Tz (THEREOF ) Tj 58.571429 0 0 58.571429 0 2765 Tm 22.178049 0 Td 34.146341 Tz (\( ) Tj 0.170732 0 Td 52.642276 Tz (58 ) Tj 0.682927 0 Td 34.146341 Tz (\) ) Tj 0.853659 0 Td 43.821138 Tz (Field ) Tj 1.536585 0 Td 55.487805 Tz (of ) Tj 0.836585 0 Td 41.666667 Tz (Classification ) Tj 3.892683 0 Td 47.425474 Tz (Search ) Tj 52.857143 0 0 52.857143 0 2723 Tm 26.42973 0 Td 63.063063 Tz (None ) Tj 61.428571 0 0 61.428571 0 2680.567442 Tm 22.725581 0 Td 49.741602 Tz (See ) Tj 1.155814 0 Td 39.711064 Tz (application ) Tj 2.897674 0 Td 30.523256 Tz (file ) Tj 0.944186 0 Td 38.888889 Tz (for ) Tj 0.911628 0 Td 47.141473 Tz (complete ) Tj 2.474419 0 Td 41.149871 Tz (search ) Tj 1.725581 0 Td 38.372093 Tz (history ) Tj 1.709302 0 Td 32.55814 Tz (. ) Tj 60 0 0 60 0 2614.439834 Tm 5.483333 0 Td 33.333333 Tz (\( ) Tj 0.2 0 Td 43.055556 Tz (71 ) Tj 0.566667 0 Td 33.333333 Tz (\) ) Tj 0.866667 0 Td 45.061728 Tz (Applicant ) Tj 2.433333 0 Td 33.333333 Tz (: ) Tj 0.366667 0 Td 56.018519 Tz (Agency ) Tj 2.3 0 Td 38.888889 Tz (for ) Tj 1.016667 0 Td 44.047619 Tz (Science ) Tj 1.916667 0 Td 33.333333 Tz (, ) Tj 0.466667 0 Td 47.222222 Tz (Technology ) Tj 3.15 0 Td 50 Tz (and ) Tj 52.619048 0 0 52.619048 0 2574.375 Tm 11.38371 0 Td 55.033937 Tz (Research ) Tj 2.774661 0 Td 31.674208 Tz (, ) Tj 0.399095 0 Td 53.494218 Tz (Singapore ) Tj 3.211765 0 Td 31.674208 Tz (\( ) Tj 0.133032 0 Td 61.764706 Tz (SG ) Tj 0.969231 0 Td 31.674208 Tz (\) ) Tj 58.571429 0 0 58.571429 0 2555 Tm 22.212195 0 Td 34.146341 Tz (\( ) Tj 0.239024 0 Td 31.300813 Tz (56 ) Tj 0.614634 0 Td 34.146341 Tz (\) ) Tj 57.142857 0 0 57.142857 0 2559 Tm 28.1225 0 Td 50.458333 Tz (References ) Tj 3.325 0 Td 47.25 Tz (Cited ) Tj 52.857143 0 0 52.857143 0 2491 Tm 28.756757 0 Td 34.684685 Tz (U ) Tj 0.416216 0 Td 34.684685 Tz (. ) Tj 0.264865 0 Td 34.684685 Tz (S ) Tj 0.359459 0 Td 34.684685 Tz (. ) Tj 0.454054 0 Td 70.42042 Tz (PATENT ) Tj 2.743243 0 Td 80.580581 Tz (DOCUMENTS ) Tj 61.428571 0 0 61.428571 0 2495.07967 Tm 5.323256 0 Td 32.55814 Tz (\( ) Tj 0.195349 0 Td 43.410853 Tz (72 ) Tj 0.586047 0 Td 32.55814 Tz (\) ) Tj 0.846512 0 Td 40.697674 Tz (Inventors ) Tj 2.230233 0 Td 32.55814 Tz (: ) Tj 0.618605 0 Td 44.315245 Tz (Jifang ) Tj 1.888372 0 Td 44.315245 Tz (Tao ) Tj 0.846512 0 Td 32.55814 Tz (, ) Tj 0.406977 0 Td 44.61671 Tz (Singapore ) Tj 2.686047 0 Td 32.55814 Tz (\( ) Tj 0.195349 0 Td 42.054264 Tz (SG ) Tj 0.716279 0 Td 32.55814 Tz (\) ) Tj 0.195349 0 Td 32.55814 Tz (; ) Tj 0.423256 0 Td 56.976744 Tz (Hong ) Tj 1.627907 0 Td 49.741602 Tz (Cai ) Tj 0.895349 0 Td 32.55814 Tz (, ) Tj 45.714286 0 0 45.714286 0 2462.202783 Tm 13.059375 0 Td 59.953704 Tz (Singapore ) Tj 3.71875 0 Td 32.8125 Tz (\( ) Tj 0.13125 0 Td 63.802083 Tz (SG ) Tj 1.1375 0 Td 32.8125 Tz (\) ) Tj 0.284375 0 Td 32.8125 Tz (; ) Tj 0.4375 0 Td 65.625 Tz (Alex ) Tj 2.034375 0 Td 70.182292 Tz (Yuandong ) Tj 3.5 0 Td 105.729167 Tz (Gu ) Tj 1.225 0 Td 32.8125 Tz (, ) Tj 52.380952 0 0 52.380952 0 2421.366953 Tm 11.473636 0 Td 51.969697 Tz (Singapore ) Tj 3.130909 0 Td 31.818182 Tz (\( ) Tj 0.229091 0 Td 52.5 Tz (SG ) Tj 0.935455 0 Td 31.818182 Tz (\) ) Tj 0.21 0 Td 31.818182 Tz (; ) Tj 0.439091 0 Td 66.818182 Tz (Hyun ) Tj 1.928182 0 Td 64.69697 Tz (Kee ) Tj 1.47 0 Td 64.272727 Tz (Chang ) Tj 2.004545 0 Td 31.818182 Tz (, ) Tj 52.857143 0 0 52.857143 0 2380.681373 Tm 11.37027 0 Td 51.851852 Tz (Singapore ) Tj 3.102703 0 Td 34.684685 Tz (\( ) Tj 0.227027 0 Td 53.603604 Tz (SG ) Tj 0.927027 0 Td 34.684685 Tz (\) ) Tj 52.857143 0 0 52.857143 0 2417 Tm 26.108108 0 Td 34.684685 Tz (5 ) Tj 0.283784 0 Td 34.684685 Tz (, ) Tj 0.189189 0 Td 44.144144 Tz (444 ) Tj 0.851351 0 Td 34.684685 Tz (, ) Tj 0.17027 0 Td 50.45045 Tz (249 ) Tj 1.381081 0 Td 34.684685 Tz (A ) Tj 47.142857 0 0 47.142857 0 2383 Tm 29.230303 0 Td 31.818182 Tz (6 ) Tj 0.360606 0 Td 31.818182 Tz (, ) Tj 0.190909 0 Td 55.387205 Tz (969 ) Tj 0.99697 0 Td 31.818182 Tz (, ) Tj 0.233333 0 Td 55.387205 Tz (857 ) Tj 1.442424 0 Td 63.636364 Tz (B2 ) Tj 52.857143 0 0 52.857143 0 2421.074534 Tm 30.932432 0 Td 34.684685 Tz (8 ) Tj 0.208108 0 Td 34.684685 Tz (/ ) Tj 0.264865 0 Td 44.932432 Tz (1995 ) Tj 1.589189 0 Td 64.63964 Tz (Wong ) Tj 47.142857 0 0 47.142857 0 2383 Tm 34.3 0 Td 53.030303 Tz (11 ) Tj 0.615152 0 Td 31.818182 Tz (/ ) Tj 0.254545 0 Td 55.681818 Tz (2005 ) Tj 1.866667 0 Td 66.287879 Tz (Owen ) Tj 53.333333 0 0 53.333333 0 2334.1875 Tm 31.14375 0 Td 34.375 Tz (\( ) Tj 0.1125 0 Td 53.472222 Tz (Continued ) Tj 3 0 Td 34.375 Tz (\) ) Tj 58.571429 0 0 58.571429 0 2302.371795 Tm 5.6 0 Td 34.146341 Tz (\( ) Tj 0.187805 0 Td 42.682927 Tz (73 ) Tj 0.614634 0 Td 34.146341 Tz (\) ) Tj 0.853659 0 Td 46.595528 Tz (Assignee ) Tj 2.321951 0 Td 34.146341 Tz (: ) Tj 0.597561 0 Td 55.96206 Tz (Agency ) Tj 2.356098 0 Td 38.888889 Tz (for ) Tj 1.02439 0 Td 45.528455 Tz (Science ) Tj 1.912195 0 Td 34.146341 Tz (, ) Tj 0.529268 0 Td 48.373984 Tz (Technology ) Tj 3.226829 0 Td 49.322493 Tz (and ) Tj 55.714286 0 0 55.714286 0 2258.371901 Tm 10.715385 0 Td 53.098291 Tz (Research ) Tj 2.692308 0 Td 32.905983 Tz (, ) Tj 0.358974 0 Td 50.854701 Tz (Singapore ) Tj 2.997436 0 Td 32.905983 Tz (\( ) Tj 0.179487 0 Td 52.350427 Tz (SG ) Tj 0.879487 0 Td 32.905983 Tz (\) ) Tj 62.857143 0 0 62.857143 0 2256 Tm 23.370455 0 Td 60.227273 Tz (FOREIGN ) Tj 2.831818 0 Td 59.659091 Tz (PATENT ) Tj 2.322727 0 Td 68.350168 Tz (DOCUMENTS ) Tj 51.428571 0 0 51.428571 0 2182.788732 Tm 6.416667 0 Td 32.407407 Tz (\( ) Tj 0.35 0 Td 32.407407 Tz (* ) Tj 0.486111 0 Td 32.407407 Tz (\) ) Tj 0.933333 0 Td 55.092593 Tz (Notice ) Tj 2.022222 0 Td 32.407407 Tz (: ) Tj 45.714286 0 0 45.714286 0 2186 Tm 28.30625 0 Td 85.677083 Tz (GB ) Tj 52.063492 0 0 52.063492 0 2186.682746 Tm 11.543598 0 Td 51.219512 Tz (Subject ) Tj 2.343293 0 Td 32.012195 Tz (to ) Tj 0.729878 0 Td 54.420732 Tz (any ) Tj 1.152439 0 Td 50.259146 Tz (disclaimer ) Tj 3.015549 0 Td 32.012195 Tz (, ) Tj 0.345732 0 Td 49.085366 Tz (the ) Tj 1.017988 0 Td 44.016768 Tz (term ) Tj 1.575 0 Td 52.820122 Tz (of ) Tj 0.729878 0 Td 44.016768 Tz (this ) Tj 58.571429 0 0 58.571429 0 2143.788538 Tm 10.17561 0 Td 46.95122 Tz (patent ) Tj 1.895122 0 Td 31.300813 Tz (is ) Tj 0.768293 0 Td 45.172764 Tz (extended ) Tj 2.492683 0 Td 42.682927 Tz (or ) Tj 0.836585 0 Td 40.54878 Tz (adjusted ) Tj 2.373171 0 Td 47.804878 Tz (under ) Tj 1.758537 0 Td 42.682927 Tz (35 ) Tj 61.428571 0 0 61.428571 0 2102.242647 Tm 9.751163 0 Td 32.55814 Tz (U ) Tj 0.423256 0 Td 32.55814 Tz (. ) Tj 0.211628 0 Td 32.55814 Tz (S ) Tj 0.276744 0 Td 32.55814 Tz (. ) Tj 0.211628 0 Td 32.55814 Tz (C ) Tj 0.35814 0 Td 32.55814 Tz (. ) Tj 0.504651 0 Td 37.984496 Tz (154 ) Tj 0.813953 0 Td 32.55814 Tz (\( ) Tj 0.146512 0 Td 32.55814 Tz (b ) Tj 0.34186 0 Td 32.55814 Tz (\) ) Tj 0.406977 0 Td 43.410853 Tz (by ) Tj 0.862791 0 Td 32.55814 Tz (0 ) Tj 0.472093 0 Td 44.767442 Tz (days ) Tj 1.05814 0 Td 32.55814 Tz (. ) Tj 50 0 0 50 0 2156 Tm 26 0 Td 45 Tz (JP ) Tj 47.142857 0 0 47.142857 0 2189 Tm 32.815152 0 Td 57.070707 Tz (2427748 ) Tj 2.884848 0 Td 31.818182 Tz (A ) Tj 2.163636 0 Td 31.818182 Tz (1 ) Tj 0.212121 0 Td 31.818182 Tz (/ ) Tj 0.233333 0 Td 57.449495 Tz (2007 ) Tj 46.666667 0 0 46.666667 0 2151.210762 Tm 32.764286 0 Td 58.035714 Tz (08015540 ) Tj 3.257143 0 Td 32.142857 Tz (A ) Tj 1.092857 0 Td 32.142857 Tz (* ) Tj 1.114286 0 Td 32.142857 Tz (1 ) Tj 0.257143 0 Td 32.142857 Tz (/ ) Tj 0.235714 0 Td 50.892857 Tz (1996 ) Tj 58.571429 0 0 58.571429 0 2102 Tm 28.307317 0 Td 34.146341 Tz (\( ) Tj 0.239024 0 Td 47.741644 Tz (Continued ) Tj 2.646341 0 Td 34.146341 Tz (\) ) Tj 58.75 0 0 58.75 0 2027.138889 Tm 5.6 0 Td 34.042553 Tz (\( ) Tj 0.170213 0 Td 52.48227 Tz (21 ) Tj 0.595745 0 Td 34.042553 Tz (\) ) Tj 0.919149 0 Td 51.77305 Tz (Appl ) Tj 1.242553 0 Td 34.042553 Tz (. ) Tj 0.340426 0 Td 65.248227 Tz (No ) Tj 0.765957 0 Td 34.042553 Tz (. ) Tj 0.153191 0 Td 34.042553 Tz (: ) Tj 58.571429 0 0 58.571429 0 2026.371069 Tm 11.541463 0 Td 42.682927 Tz (15 ) Tj 0.580488 0 Td 34.146341 Tz (/ ) Tj 0.136585 0 Td 55.01355 Tz (519 ) Tj 0.973171 0 Td 34.146341 Tz (, ) Tj 0.273171 0 Td 44.579946 Tz (011 ) Tj 52.857143 0 0 52.857143 0 2012 Tm 29.191892 0 Td 76.306306 Tz (OTHER ) Tj 2.667568 0 Td 69.106607 Tz (PUBLICATIONS ) Tj 51.428571 0 0 51.428571 0 1942.014688 Tm 25.258333 0 Td 43.126781 Tz (International ) Tj 3.519444 0 Td 45.37037 Tz (Preliminary ) Tj 3.266667 0 Td 50.231481 Tz (Report ) Tj 2.022222 0 Td 42.12963 Tz (on ) Tj 0.894444 0 Td 40.633903 Tz (Patentability ) Tj 3.538889 0 Td 38.888889 Tz (for ) Tj 0.913889 0 Td 42.877493 Tz (International ) Tj 57.142857 0 0 57.142857 0 1897.406091 Tm 22.715 0 Td 39.772727 Tz (Application ) Tj 2.9925 0 Td 64.166667 Tz (No ) Tj 0.77 0 Td 35 Tz (. ) Tj 0.3675 0 Td 61.25 Tz (PCT ) Tj 1.1025 0 Td 35 Tz (/ ) Tj 0.1925 0 Td 51.527778 Tz (SG2015 ) Tj 1.8375 0 Td 35 Tz (/ ) Tj 0.1575 0 Td 48.611111 Tz (050394 ) Tj 2.065 0 Td 40.833333 Tz (dated ) Tj 1.505 0 Td 55.416667 Tz (Aug ) Tj 0.9625 0 Td 35 Tz (. ) Tj 0.4725 0 Td 43.75 Tz (31 ) Tj 0.5775 0 Td 35 Tz (, ) Tj 0.5075 0 Td 39.375 Tz (2016 ) Tj 1.0325 0 Td 35 Tz (, ) Tj 0.4725 0 Td 43.75 Tz (pp ) Tj 0.5775 0 Td 35 Tz (. ) Tj 47.857143 0 0 47.857143 0 1855.932203 Tm 27.226866 0 Td 38.308458 Tz (1 ) Tj 0.271642 0 Td 38.308458 Tz (- ) Tj 0.271642 0 Td 45.273632 Tz (10 ) Tj 0.626866 0 Td 38.308458 Tz (. ) Tj 68.571429 0 0 68.571429 0 1948 Tm 4.739583 0 Td 34.027778 Tz (\( ) Tj 0.189583 0 Td 43.75 Tz (22 ) Tj 0.510417 0 Td 34.027778 Tz (\) ) Tj 0.729167 0 Td 59.953704 Tz (PCT ) Tj 1.210417 0 Td 35.486111 Tz (Filed ) Tj 1.064583 0 Td 34.027778 Tz (: ) Tj 1.429167 0 Td 44.560185 Tz (Oct ) Tj 0.816667 0 Td 34.027778 Tz (. ) Tj 0.364583 0 Td 31.597222 Tz (16 ) Tj 0.48125 0 Td 34.027778 Tz (, ) Tj 0.335417 0 Td 44.357639 Tz (2015 ) Tj 64.285714 0 0 64.285714 0 1872 Tm 5.071111 0 Td 33.703704 Tz (\( ) Tj 0.217778 0 Td 32.407407 Tz (86 ) Tj 0.544444 0 Td 33.703704 Tz (\) ) Tj 0.824444 0 Td 61.358025 Tz (PCT ) Tj 1.135556 0 Td 64.814815 Tz (No ) Tj 0.777778 0 Td 33.703704 Tz (. ) Tj 0.14 0 Td 33.703704 Tz (: ) Tj 1.866667 0 Td 61.358025 Tz (PCT ) Tj 1.073333 0 Td 33.703704 Tz (/ ) Tj 0.186667 0 Td 50.555556 Tz (SG2015 ) Tj 1.913333 0 Td 33.703704 Tz (/ ) Tj 0.186667 0 Td 44.506173 Tz (050394 ) Tj 52.857143 0 0 52.857143 0 1812 Tm 8.135135 0 Td 34.684685 Tz ($ ) Tj 0.510811 0 Td 55.705706 Tz (371 ) Tj 1.305405 0 Td 34.684685 Tz (\( ) Tj 0.208108 0 Td 34.684685 Tz (c ) Tj 0.340541 0 Td 34.684685 Tz (\) ) Tj 0.208108 0 Td 34.684685 Tz (\( ) Tj 0.359459 0 Td 34.684685 Tz (1 ) Tj 0.208108 0 Td 34.684685 Tz (\) ) Tj 0.208108 0 Td 34.684685 Tz (, ) Tj 65.714286 0 0 65.714286 0 1769.918239 Tm 6.497826 0 Td 32.971014 Tz (\( ) Tj 0.213043 0 Td 32.971014 Tz (2 ) Tj 0.258696 0 Td 32.971014 Tz (\) ) Tj 0.365217 0 Td 42.481884 Tz (Date ) Tj 1.05 0 Td 32.971014 Tz (: ) Tj 1.886957 0 Td 51.570048 Tz (Apr ) Tj 0.913043 0 Td 35.507246 Tz (. ) Tj 0.35 0 Td 45.652174 Tz (13 ) Tj 0.532609 0 Td 35.507246 Tz (, ) Tj 0.35 0 Td 46.92029 Tz (2017 ) Tj 59.404762 0 0 59.404762 0 1695.765714 Tm 5.504609 0 Td 33.667335 Tz (\( ) Tj 0.168337 0 Td 51.903808 Tz (87 ) Tj 0.656513 0 Td 33.667335 Tz (\) ) Tj 0.841683 0 Td 65.464262 Tz (PCT ) Tj 1.32986 0 Td 48.630595 Tz (Pub ) Tj 0.993186 0 Td 33.667335 Tz (. ) Tj 0.353507 0 Td 63.126253 Tz (No ) Tj 0.757515 0 Td 33.667335 Tz (. ) Tj 0.134669 0 Td 33.667335 Tz (: ) Tj 0.538677 0 Td 65.931864 Tz (WO2016 ) Tj 2.424048 0 Td 33.667335 Tz (/ ) Tj 0.202004 0 Td 50.501002 Tz (060619 ) Tj 58.571429 0 0 58.571429 0 1636.432836 Tm 7.239024 0 Td 67.344173 Tz (PCT ) Tj 1.45122 0 Td 48.373984 Tz (Pub ) Tj 0.921951 0 Td 34.146341 Tz (. ) Tj 0.32439 0 Td 49.796748 Tz (Date ) Tj 1.280488 0 Td 34.146341 Tz (: ) Tj 0.290244 0 Td 60.704607 Tz (Apr ) Tj 1.041463 0 Td 34.146341 Tz (. ) Tj 0.37561 0 Td 52.642276 Tz (21 ) Tj 0.597561 0 Td 34.146341 Tz (, ) Tj 0.478049 0 Td 43.394309 Tz (2016 ) Tj 58.571429 0 0 58.571429 0 1741.146429 Tm 22.195122 0 Td 50 Tz (Primary ) Tj 2.321951 0 Td 50.152439 Tz (Examiner ) Tj 2.782927 0 Td 34.146341 Tz ( ) Tj 0.512195 0 Td 48.729675 Tz (Michelle ) Tj 2.629268 0 Td 34.146341 Tz (R ) Tj 0.546341 0 Td 48.018293 Tz (Connelly ) Tj 64.285714 0 0 64.285714 0 1693.144759 Tm 20.253333 0 Td 33.703704 Tz (\( ) Tj 0.202222 0 Td 42.777778 Tz (74 ) Tj 0.575556 0 Td 33.703704 Tz (\) ) Tj 0.466667 0 Td 39.212963 Tz (Attorney ) Tj 1.913333 0 Td 33.703704 Tz (, ) Tj 0.373333 0 Td 46.148148 Tz (Agent ) Tj 1.306667 0 Td 33.703704 Tz (, ) Tj 0.404444 0 Td 42.777778 Tz (or ) Tj 0.762222 0 Td 38.888889 Tz (Firm ) Tj 1.353333 0 Td 33.703704 Tz ( ) Tj 0.56 0 Td 43.75 Tz (Winstead ) Tj 2.162222 0 Td 33.703704 Tz (, ) Tj 0.357778 0 Td 33.703704 Tz (P ) Tj 0.202222 0 Td 33.703704 Tz (. ) Tj 0.217778 0 Td 33.703704 Tz (C ) Tj 0.342222 0 Td 33.703704 Tz (. ) Tj 50 0 0 50 0 1579 Tm 26.04 0 Td 33.333333 Tz (\( ) Tj 0.14 0 Td 63.333333 Tz (57 ) Tj 0.76 0 Td 33.333333 Tz (\) ) Tj 52.857143 0 0 52.857143 0 1581 Tm 31.140541 0 Td 80.405405 Tz (ABSTRACT ) Tj 55.714286 0 0 55.714286 0 1555 Tm 5.887179 0 Td 32.905983 Tz (\( ) Tj 0.089744 0 Td 55.34188 Tz (65 ) Tj 0.753846 0 Td 32.905983 Tz (\) ) Tj 60 0 0 60 0 1557 Tm 10.666667 0 Td 47.777778 Tz (Prior ) Tj 1.616667 0 Td 44.444444 Tz (Publication ) Tj 3.25 0 Td 49.305556 Tz (Data ) Tj 61.428571 0 0 61.428571 0 1496.261856 Tm 6.869767 0 Td 65.116279 Tz (US ) Tj 1.05814 0 Td 47.48062 Tz (2017 ) Tj 1.204651 0 Td 32.55814 Tz (/ ) Tj 0.195349 0 Td 47.286822 Tz (0227456 ) Tj 2.246512 0 Td 63.75969 Tz (A1 ) Tj 1.806977 0 Td 61.498708 Tz (Aug ) Tj 1.074419 0 Td 32.55814 Tz (. ) Tj 0.488372 0 Td 32.55814 Tz (10 ) Tj 0.488372 0 Td 32.55814 Tz (, ) Tj 0.406977 0 Td 47.48062 Tz (2017 ) Tj 55.714286 0 0 55.714286 0 1419 Tm 5.833333 0 Td 32.905983 Tz (\( ) Tj 0.251282 0 Td 44.871795 Tz (30 ) Tj 0.646154 0 Td 32.905983 Tz (\) ) Tj 61.428571 0 0 61.428571 0 1426.661157 Tm 8.969767 0 Td 44.573643 Tz (Foreign ) Tj 2.132558 0 Td 44.890768 Tz (Application ) Tj 3.369767 0 Td 39.001938 Tz (Priority ) Tj 2.165116 0 Td 48.837209 Tz (Data ) Tj 61.428571 0 0 61.428571 0 1343 Tm 10.174419 0 Td 32.55814 Tz (\( ) Tj 0.195349 0 Td 43.410853 Tz (SG ) Tj 0.797674 0 Td 32.55814 Tz (\) ) Tj 0.488372 0 Td 32.55814 Tz (. ) Tj 0.130233 0 Td 32.55814 Tz (. ) Tj 0.17907 0 Td 32.55814 Tz (. ) Tj 0.17907 0 Td 32.55814 Tz (. ) Tj 0.146512 0 Td 32.55814 Tz (. ) Tj 0.130233 0 Td 32.55814 Tz (. ) Tj 0.146512 0 Td 32.55814 Tz (. ) Tj 0.130233 0 Td 32.55814 Tz (. ) Tj 0.17907 0 Td 32.55814 Tz (. ) Tj 0.17907 0 Td 32.55814 Tz (. ) Tj 0.130233 0 Td 32.55814 Tz (. ) Tj 0.146512 0 Td 32.55814 Tz (. ) Tj 0.146512 0 Td 32.55814 Tz (. ) Tj 0.130233 0 Td 32.55814 Tz (. ) Tj 55.714286 0 0 55.714286 0 1345 Tm 17.948718 0 Td 53.596866 Tz (102014066815 ) Tj 61.428571 0 0 61.428571 0 1343 Tm 5.893023 0 Td 50.645995 Tz (Oct ) Tj 0.927907 0 Td 32.55814 Tz (. ) Tj 0.423256 0 Td 32.55814 Tz (16 ) Tj 0.553488 0 Td 32.55814 Tz (, ) Tj 0.423256 0 Td 44.089147 Tz (2014 ) Tj 70 0 0 70 0 1264.299492 Tm 4.657143 0 Td 38.095238 Tz (\( ) Tj 0.185714 0 Td 44.047619 Tz (51 ) Tj 0.5 0 Td 38.095238 Tz (\) ) Tj 0.757143 0 Td 39.68254 Tz (Int ) Tj 0.614286 0 Td 38.095238 Tz (. ) Tj 0.357143 0 Td 54.761905 Tz (Ci ) Tj 0.528571 0 Td 38.095238 Tz (. ) Tj 50 0 0 50 0 1231 Tm 8.42 0 Td 72.5 Tz (GO2B ) Tj 2.16 0 Td 33.333333 Tz (6 ) Tj 0.28 0 Td 33.333333 Tz (/ ) Tj 0.22 0 Td 63.333333 Tz (00 ) Tj 52.857143 0 0 52.857143 0 1191 Tm 8.002703 0 Td 63.851351 Tz (GO2B ) Tj 1.986486 0 Td 34.684685 Tz (6 ) Tj 0.340541 0 Td 34.684685 Tz (/ ) Tj 0.264865 0 Td 44.144144 Tz (10 ) Tj 51.428571 0 0 51.428571 0 1507.35 Tm 25.394444 0 Td 49.259259 Tz (There ) Tj 1.769444 0 Td 32.407407 Tz (is ) Tj 0.641667 0 Td 52.256944 Tz (provided ) Tj 2.8 0 Td 53.472222 Tz (an ) Tj 0.913889 0 Td 48.611111 Tz (optical ) Tj 2.1 0 Td 58.333333 Tz (waveguide ) Tj 3.480556 0 Td 45.37037 Tz (structure ) Tj 2.45 0 Td 32.407407 Tz (, ) Tj 0.427778 0 Td 50.05144 Tz (including ) Tj 45.714286 0 0 45.714286 0 1465.352113 Tm 28.415625 0 Td 32.8125 Tz (a ) Tj 0.765625 0 Td 51.041667 Tz (substrate ) Tj 2.8875 0 Td 32.8125 Tz (, ) Tj 0.6125 0 Td 41.927083 Tz (an ) Tj 1.1375 0 Td 52.5 Tz (insulating ) Tj 3.565625 0 Td 51.770833 Tz (layer ) Tj 1.990625 0 Td 56.966146 Tz (disposed ) Tj 3.171875 0 Td 63.802083 Tz (on ) Tj 1.26875 0 Td 49.826389 Tz (the ) Tj 1.378125 0 Td 51.446759 Tz (substrate ) Tj 52.063492 0 0 52.063492 0 1423.614654 Tm 24.835061 0 Td 60.365854 Tz (whereby ) Tj 2.881098 0 Td 49.085366 Tz (the ) Tj 1.267683 0 Td 46.737805 Tz (insulating ) Tj 3.169207 0 Td 46.097561 Tz (layer ) Tj 1.805488 0 Td 49.618902 Tz (includes ) Tj 2.746646 0 Td 43.216463 Tz (an ) Tj 0.960366 0 Td 38.414634 Tz (air ) Tj 1.114024 0 Td 40.815549 Tz (slot ) Tj 1.382927 0 Td 54.954268 Tz (formed ) Tj 58.571429 0 0 58.571429 0 1375.78542 Tm 22.143902 0 Td 39.430894 Tz (therein ) Tj 1.826829 0 Td 34.146341 Tz (, ) Tj 0.426829 0 Td 34.146341 Tz (a ) Tj 0.665854 0 Td 30.731707 Tz (first ) Tj 1.109756 0 Td 46.239837 Tz (material ) Tj 2.526829 0 Td 40.97561 Tz (layer ) Tj 1.485366 0 Td 48.373984 Tz (suspended ) Tj 3.004878 0 Td 44.817073 Tz (over ) Tj 1.365854 0 Td 44.579946 Tz (the ) Tj 1.092683 0 Td 32.249322 Tz (air ) Tj 1.007317 0 Td 37.703252 Tz (slot ) Tj 46.825397 0 0 46.825397 0 1338.150062 Tm 27.655932 0 Td 65.084746 Tz (whereby ) Tj 3.011186 0 Td 54.576271 Tz (the ) Tj 1.217288 0 Td 39.152542 Tz (first ) Tj 1.217288 0 Td 57.838983 Tz (material ) Tj 2.947119 0 Td 50.542373 Tz (layer ) Tj 1.857966 0 Td 48.859784 Tz (constitutes ) Tj 3.481017 0 Td 32.033898 Tz (a ) Tj 0.491186 0 Td 64.463277 Tz (waveguide ) Tj 3.715932 0 Td 53.389831 Tz (core ) Tj 55.714286 0 0 55.714286 0 1293.749354 Tm 23.279487 0 Td 52.350427 Tz (of ) Tj 0.879487 0 Td 44.871795 Tz (the ) Tj 1.076923 0 Td 44.017094 Tz (optical ) Tj 2.046154 0 Td 54.178538 Tz (waveguide ) Tj 3.248718 0 Td 40.883191 Tz (structure ) Tj 2.297436 0 Td 32.905983 Tz (, ) Tj 0.466667 0 Td 49.85755 Tz (and ) Tj 1.220513 0 Td 32.905983 Tz (a ) Tj 0.646154 0 Td 49.85755 Tz (second ) Tj 1.95641 0 Td 49.732906 Tz (material ) Tj 52.698413 0 0 52.698413 0 1256.52816 Tm 24.649699 0 Td 46.174699 Tz (layer ) Tj 1.593976 0 Td 51.788404 Tz (disposed ) Tj 2.73253 0 Td 51.393072 Tz (over ) Tj 1.48012 0 Td 44.277108 Tz (the ) Tj 1.005723 0 Td 56.927711 Tz (waveguide ) Tj 3.358735 0 Td 50.60241 Tz (core ) Tj 1.328313 0 Td 57.379518 Tz (whereby ) Tj 2.713554 0 Td 48.493976 Tz (the ) Tj 1.043675 0 Td 70.368976 Tz (wave ) Tj 58.571429 0 0 58.571429 0 1210.499264 Tm 22.195122 0 Td 45.528455 Tz (guide ) Tj 1.792683 0 Td 39.126016 Tz (core ) Tj 1.331707 0 Td 31.300813 Tz (is ) Tj 0.768293 0 Td 46.476965 Tz (suspended ) Tj 2.868293 0 Td 49.796748 Tz (over ) Tj 1.468293 0 Td 43.631436 Tz (the ) Tj 1.092683 0 Td 32.249322 Tz (air ) Tj 1.007317 0 Td 37.703252 Tz (slot ) Tj 1.126829 0 Td 52.642276 Tz (by ) Tj 1.058537 0 Td 38.888889 Tz (the ) Tj 1.109756 0 Td 44.579946 Tz (second ) Tj 61.428571 0 0 61.428571 0 1169.191946 Tm 21.097674 0 Td 42.054264 Tz (material ) Tj 2.295349 0 Td 37.44186 Tz (layer ) Tj 1.155814 0 Td 32.55814 Tz (. ) Tj 0.406977 0 Td 41.782946 Tz (There ) Tj 1.57907 0 Td 21.705426 Tz (is ) Tj 0.52093 0 Td 37.306202 Tz (also ) Tj 1.188372 0 Td 44.089147 Tz (provided ) Tj 2.393023 0 Td 32.55814 Tz (an ) Tj 0.748837 0 Td 40.697674 Tz (optical ) Tj 1.92093 0 Td 38.888889 Tz (gas ) Tj 0.976744 0 Td 40.697674 Tz (sensor ) Tj 53.061224 0 0 53.061224 0 1131.74607 Tm 24.5 0 Td 48.565089 Tz (incorporating ) Tj 3.995385 0 Td 48.162393 Tz (the ) Tj 1.111923 0 Td 46.217949 Tz (optical ) Tj 2.110769 0 Td 56.538462 Tz (waveguide ) Tj 3.335769 0 Td 44.672365 Tz (structure ) Tj 2.713846 0 Td 53.397436 Tz (and ) Tj 1.093077 0 Td 61.025641 Tz (methods ) Tj 53.214286 0 0 53.214286 0 1086.943709 Tm 24.448322 0 Td 51.677852 Tz (of ) Tj 0.845638 0 Td 43.563148 Tz (fabrication ) Tj 3.251007 0 Td 47.427293 Tz (thereof ) Tj 1.954362 0 Td 31.319911 Tz (. ) Tj 50 0 0 50 0 1231 Tm 15.5 0 Td 33.333333 Tz (\( ) Tj 0.24 0 Td 55.833333 Tz (2006 ) Tj 1.44 0 Td 33.333333 Tz (. ) Tj 0.22 0 Td 63.333333 Tz (01 ) Tj 0.76 0 Td 33.333333 Tz (\) ) Tj 52.857143 0 0 52.857143 0 1187 Tm 14.681081 0 Td 34.684685 Tz (\( ) Tj 0.227027 0 Td 50.45045 Tz (2006 ) Tj 1.343243 0 Td 34.684685 Tz (. ) Tj 0.245946 0 Td 53.603604 Tz (01 ) Tj 0.662162 0 Td 34.684685 Tz (\) ) Tj 58.571429 0 0 58.571429 0 1138 Tm 11.712195 0 Td 34.146341 Tz (\( ) Tj 0.153659 0 Td 48.057814 Tz (Continued ) Tj 2.731707 0 Td 34.146341 Tz (\) ) Tj 74.285714 0 0 74.285714 0 1092 Tm 4.401923 0 Td 33.653846 Tz (\( ) Tj 0.121154 0 Td 42.628205 Tz (52 ) Tj 0.511538 0 Td 33.653846 Tz (\) ) Tj 0.767308 0 Td 33.653846 Tz (U ) Tj 0.282692 0 Td 33.653846 Tz (. ) Tj 0.134615 0 Td 33.653846 Tz (S ) Tj 0.282692 0 Td 33.653846 Tz (. ) Tj 0.323077 0 Td 43.75 Tz (CI ) Tj 0.444231 0 Td 33.653846 Tz (. ) Tj 52.857143 0 0 52.857143 0 1059 Tm 8.059459 0 Td 65.165165 Tz (CPC ) Tj 1.608108 0 Td 34.684685 Tz (. ) Tj 0.208108 0 Td 34.684685 Tz (. ) Tj 0.132432 0 Td 34.684685 Tz (. ) Tj 0.189189 0 Td 34.684685 Tz (. ) Tj 0.17027 0 Td 34.684685 Tz (. ) Tj 0.17027 0 Td 34.684685 Tz (. ) Tj 0.17027 0 Td 34.684685 Tz (. ) Tj 0.189189 0 Td 34.684685 Tz (. ) Tj 0.227027 0 Td 34.684685 Tz (. ) Tj 55.714286 0 0 55.714286 0 1057 Tm 11.612821 0 Td 59.081197 Tz (GOIN ) Tj 1.812821 0 Td 62.820513 Tz (21 ) Tj 0.7 0 Td 32.905983 Tz (/ ) Tj 0.179487 0 Td 55.34188 Tz (3504 ) Tj 1.633333 0 Td 32.905983 Tz (\( ) Tj 0.161538 0 Td 53.098291 Tz (2013 ) Tj 1.310256 0 Td 32.905983 Tz (. ) Tj 0.14359 0 Td 62.820513 Tz (01 ) Tj 0.7 0 Td 32.905983 Tz (\) ) Tj 0.287179 0 Td 32.905983 Tz (; ) Tj 0.412821 0 Td 59.82906 Tz (G02B ) Tj 1.830769 0 Td 32.905983 Tz (6 ) Tj 0.269231 0 Td 32.905983 Tz (/ ) Tj 0.269231 0 Td 41.880342 Tz (00 ) Tj 55.714286 0 0 55.714286 0 1015 Tm 12.869231 0 Td 32.905983 Tz (\( ) Tj 0.251282 0 Td 51.602564 Tz (2013 ) Tj 1.274359 0 Td 32.905983 Tz (. ) Tj 0.179487 0 Td 52.350427 Tz (01 ) Tj 0.664103 0 Td 32.905983 Tz (\) ) Tj 0.287179 0 Td 32.905983 Tz (; ) Tj 0.323077 0 Td 63.568376 Tz (G02B ) Tj 1.920513 0 Td 32.905983 Tz (6 ) Tj 0.269231 0 Td 32.905983 Tz (/ ) Tj 0.269231 0 Td 41.880342 Tz (10 ) Tj 0.861538 0 Td 32.905983 Tz (\( ) Tj 0.251282 0 Td 51.602564 Tz (2013 ) Tj 1.274359 0 Td 32.905983 Tz (. ) Tj 0.14359 0 Td 62.820513 Tz (01 ) Tj 0.7 0 Td 32.905983 Tz (\) ) Tj 0.287179 0 Td 32.905983 Tz (; ) Tj 55.714286 0 0 55.714286 0 966 Tm 12.294872 0 Td 32.905983 Tz (\( ) Tj 0.197436 0 Td 49.192783 Tz (Continued ) Tj 2.8 0 Td 32.905983 Tz (\) ) Tj 61.428571 0 0 61.428571 0 970.058252 Tm 24.67907 0 Td 43.410853 Tz (20 ) Tj 0.813953 0 Td 52.45478 Tz (Claims ) Tj 1.806977 0 Td 32.55814 Tz (, ) Tj 0.406977 0 Td 32.55814 Tz (9 ) Tj 0.423256 0 Td 54.263566 Tz (Drawing ) Tj 2.474419 0 Td 45.219638 Tz (Sheets ) Tj 24.285714 0 0 24.285714 0 872 Tm 72.841176 0 Td 52.614379 Tz (800 ) Tj 20 0 0 20 0 786 Tm 50.05 0 Td 66.666667 Tz (100 ) Tj 27.142857 0 0 27.142857 0 747 Tm 27.852632 0 Td 47.076023 Tz (126 ) Tj 24.285714 0 0 24.285714 0 752 Tm 58.552941 0 Td 61.764706 Tz (804 ) Tj 31.428571 0 0 31.428571 0 749 Tm 51.895455 0 Td 44.191919 Tz (806 ) Tj 30 0 0 30 0 720 Tm 50.433333 0 Td 72.222222 Tz (Gas ) Tj 1.4 0 Td 46.91358 Tz (diffusion ) Tj 2.766667 0 Td 60.185185 Tz (window ) Tj 28.571429 0 0 28.571429 0 709.058824 Tm 24.5 0 Td 46.666667 Tz (112 ) Tj 1.33 0 Td 52.5 Tz (122 ) Tj 27.619048 0 0 27.619048 0 714.702703 Tm 28.458621 0 Td 46.264368 Tz (110 ) Tj 1.303448 0 Td 54.310345 Tz (109 ) Tj 1.339655 0 Td 48.275862 Tz (120 ) Tj 21.428571 0 0 21.428571 0 673 Tm 27.813333 0 Td 64.814815 Tz (128 ) Tj 22.857143 0 0 22.857143 0 672 Tm 45.85 0 Td 60.763889 Tz (128 ) Tj 27.142857 0 0 27.142857 0 661 Tm 25.089474 0 Td 47.076023 Tz (106 ) Tj 37.142857 0 0 37.142857 0 666.117647 Tm 46.415385 0 Td 44.871795 Tz (Cap ) Tj 0.996154 0 Td 49.358974 Tz (wafer ) Tj 9.285714 0 0 9.285714 0 692.296209 Tm 139.461538 0 Td 197.435897 Tz (wwwwwwwwwwwwwwwwwwwwwwwwwww ) Tj 33.923077 0 Td 203.962704 Tz (wwwwwwwwwww ) Tj 8.571429 0 0 8.571429 0 684 Tm 151.433333 0 Td 19.444444 Tz (" ) Tj 1.866667 0 Td 19.444444 Tz (w ) Tj 1.05 0 Td 19.444444 Tz (w ) Tj 1.05 0 Td 19.444444 Tz (w ) Tj 8.571429 0 0 8.571429 0 684 Tm 159.483333 0 Td 19.444444 Tz (w ) Tj 0.933333 0 Td 19.444444 Tz (w ) Tj 1.05 0 Td 19.444444 Tz (w ) Tj 8.571429 0 0 8.571429 0 684 Tm 164.5 0 Td 19.444444 Tz (w ) Tj 1.05 0 Td 19.444444 Tz (w ) Tj 0.933333 0 Td 19.444444 Tz (w ) Tj 1.05 0 Td 19.444444 Tz (w ) Tj 1.05 0 Td 19.444444 Tz ( ) Tj 0.816667 0 Td 19.444444 Tz (* ) Tj 1.05 0 Td 19.444444 Tz (* ) Tj 1.05 0 Td 19.444444 Tz (* ) Tj 8.571429 0 0 8.571429 0 684 Tm 177.916667 0 Td 19.444444 Tz (* ) Tj 1.05 0 Td 19.444444 Tz (* ) Tj 1.05 0 Td 19.444444 Tz (* ) Tj 1.633333 0 Td 19.444444 Tz (* ) Tj 2.1 0 Td 19.444444 Tz (* ) Tj 2.45 0 Td 19.444444 Tz (* ) Tj 8.571429 0 0 8.571429 0 684 Tm 189.816667 0 Td 19.444444 Tz (* ) Tj 1.983333 0 Td 19.444444 Tz (* ) Tj 1.05 0 Td 19.444444 Tz (* ) Tj 0.933333 0 Td 19.444444 Tz (* ) Tj 1.05 0 Td 19.444444 Tz (* ) Tj 0.933333 0 Td 38.888889 Tz (xx ) Tj 0.7 0 Td 19.444444 Tz (w ) Tj 1.166667 0 Td 19.444444 Tz (w ) Tj 0.466667 0 Td 58.333333 Tz (x ) Tj 12.857143 0 0 12.857143 0 674 Tm 101.577778 0 Td 25.925926 Tz (w ) Tj 0.7 0 Td 25.925926 Tz (w ) Tj 0.622222 0 Td 25.925926 Tz (w ) Tj 0.7 0 Td 25.925926 Tz (w ) Tj 1.322222 0 Td 25.925926 Tz (w ) Tj 0.7 0 Td 25.925926 Tz (w ) Tj 0.466667 0 Td 130.392157 Tz (wwwwwwwwwwwwwwwww ) Tj 12.857143 0 0 12.857143 0 674.242291 Tm 127.866667 0 Td 147.777778 Tz (wwwww ) Tj 6.222222 0 Td 125.308642 Tz (can ) Tj 2.722222 0 Td 203.08642 Tz (yaxwwwwww ) Tj 12.857143 0 0 12.857143 0 664 Tm 100.722222 0 Td 145.833333 Tz (wwwwwwwwwwwwwwwwwwwwwwwwwwwwwwwwwwww ) Tj 12.857143 0 0 12.857143 0 657 Tm 100.722222 0 Td 151.234568 Tz (www ) Tj 2.8 0 Td 25.925926 Tz (w ) Tj 0.7 0 Td 25.925926 Tz (w ) Tj 0.622222 0 Td 25.925926 Tz (w ) Tj 0.7 0 Td 25.925926 Tz (w ) Tj 1.322222 0 Td 25.925926 Tz (w ) Tj 0.7 0 Td 25.925926 Tz (w ) Tj 0.7 0 Td 25.925926 Tz (w ) Tj 0.622222 0 Td 25.925926 Tz (w ) Tj 1.244444 0 Td 151.925926 Tz (wwwwwwwwwwwwwwwwwwwwwwwww ) Tj 23.022222 0 Td 51.851852 Tz (. ) Tj 0.388889 0 Td 38.888889 Tz (. ) Tj 11.428571 0 0 11.428571 0 657 Tm 156.7125 0 Td 29.166667 Tz (. ) Tj 0.175 0 Td 43.75 Tz (. ) Tj 0.2625 0 Td 29.166667 Tz (. ) Tj 0.175 0 Td 29.166667 Tz (. ) Tj 0.7 0 Td 43.75 Tz (. ) Tj 0.7875 0 Td 29.166667 Tz (. ) Tj 0.0875 0 Td 29.166667 Tz (. ) Tj 0.175 0 Td 29.166667 Tz (. ) Tj 0.35 0 Td 29.166667 Tz (. ) Tj 0.35 0 Td 29.166667 Tz (w ) Tj 1.4 0 Td 29.166667 Tz (w ) Tj 0.7875 0 Td 29.166667 Tz (w ) Tj 0.7875 0 Td 29.166667 Tz (w ) Tj 0.7 0 Td 29.166667 Tz (w ) Tj 0.875 0 Td 29.166667 Tz (w ) Tj 1.4 0 Td 29.166667 Tz (w ) Tj 12.857143 0 0 12.857143 0 648 Tm 100.722222 0 Td 151.234568 Tz (www ) Tj 2.8 0 Td 25.925926 Tz (w ) Tj 0.7 0 Td 25.925926 Tz (w ) Tj 0.622222 0 Td 25.925926 Tz (w ) Tj 0.7 0 Td 25.925926 Tz (w ) Tj 1.322222 0 Td 25.925926 Tz (w ) Tj 0.7 0 Td 25.925926 Tz (w ) Tj 0.7 0 Td 25.925926 Tz (w ) Tj 0.466667 0 Td 103.703704 Tz (wo ) Tj 1.244444 0 Td 25.925926 Tz (: ) Tj 0.155556 0 Td 118.518519 Tz (wwwwwwwwwwwwww ) Tj 12.857143 0 0 12.857143 0 648 Tm 122.966667 0 Td 38.888889 Tz (w ) Tj 1.166667 0 Td 145.473251 Tz (wwwwwwwwwwwwwwwwww ) Tj 15.788889 0 Td 25.925926 Tz (w ) Tj 0.7 0 Td 25.925926 Tz (w ) Tj 0.7 0 Td 25.925926 Tz (w ) Tj 0.7 0 Td 25.925926 Tz (w ) Tj 1.244444 0 Td 25.925926 Tz (w ) Tj 0.7 0 Td 25.925926 Tz (w ) Tj 0.7 0 Td 25.925926 Tz (w ) Tj 0.622222 0 Td 25.925926 Tz (w ) Tj 0.7 0 Td 25.925926 Tz (w ) Tj 1.322222 0 Td 25.925926 Tz (w ) Tj 0.7 0 Td 25.925926 Tz (: ) Tj 14.285714 0 0 14.285714 0 639 Tm 130.62 0 Td 143.888889 Tz (www ) Tj 10 0 0 10 0 632 Tm 188.6 0 Td 33.333333 Tz (w ) Tj 0.8 0 Td 33.333333 Tz (w ) Tj 11.428571 0 0 11.428571 0 622 Tm 164.15 0 Td 29.166667 Tz (x ) Tj 0.875 0 Td 29.166667 Tz (x ) Tj 0.7875 0 Td 29.166667 Tz (x ) Tj 11.428571 0 0 11.428571 0 614 Tm 164.0625 0 Td 116.666667 Tz (www ) Tj 2.45 0 Td 29.166667 Tz (. ) Tj 17.142857 0 0 17.142857 0 625 Tm 35.933333 0 Td 89.660494 Tz (KYLLISTER ) Tj 15.714286 0 0 15.714286 0 613 Tm 67.390909 0 Td 42.424242 Tz (149 ) Tj 22.857143 0 0 22.857143 0 596 Tm 47.81875 0 Td 29.166667 Tz (- ) Tj 0.48125 0 Td 58.333333 Tz (130 ) Tj 21.428571 0 0 21.428571 0 594 Tm 89.646667 0 Td 31.111111 Tz (_ ) Tj 0.513333 0 Td 70 Tz (802 ) Tj 34.285714 0 0 34.285714 0 564 Tm 24.179167 0 Td 42.12963 Tz (Air ) Tj 32.142857 0 0 32.142857 0 566.758621 Tm 27.471111 0 Td 36.296296 Tz (' ) Tj 0.248889 0 Td 38.024691 Tz (124 ) Tj 27.142857 0 0 27.142857 0 572 Tm 60.715789 0 Td 55.263158 Tz (604 ) Tj 11.428571 0 0 11.428571 0 562 Tm 163.3625 0 Td 109.375 Tz (kw ) Tj 27.142857 0 0 27.142857 0 549 Tm 40.673684 0 Td 51.169591 Tz (104 ) Tj 27.142857 0 0 27.142857 0 544 Tm 51.357895 0 Td 55.263158 Tz (602 ) Tj 18.571429 0 0 18.571429 0 538 Tm 90.353846 0 Td 71.794872 Tz (100 ) Tj 12.857143 0 0 12.857143 0 536 Tm 145.833333 0 Td 108.024691 Tz (www ) Tj 12.857143 0 0 12.857143 0 527 Tm 145.833333 0 Td 108.024691 Tz (www ) Tj 12.857143 0 0 12.857143 0 518 Tm 145.833333 0 Td 108.024691 Tz (www ) Tj 11.428571 0 0 11.428571 0 510 Tm 163.3625 0 Td 109.375 Tz (kw ) Tj 12.857143 0 0 12.857143 0 501 Tm 145.211111 0 Td 151.234568 Tz (www ) Tj 12.857143 0 0 12.857143 0 492 Tm 145.211111 0 Td 151.234568 Tz (www ) Tj 15.714286 0 0 15.714286 0 482 Tm 119.318182 0 Td 155.555556 Tz (www ) Tj 25.714286 0 0 25.714286 0 488 Tm 48.338889 0 Td 56.17284 Tz (808 ) Tj 25.714286 0 0 25.714286 0 489 Tm 75.444444 0 Td 60.493827 Tz (808 ) Tj 24.285714 0 0 24.285714 0 470 Tm 55.011765 0 Td 446.078431 Tz (MV ) Tj 51.428571 0 0 51.428571 0 417 Tm 25.705556 0 Td 38.888889 Tz (e ) Tj 64.285714 0 0 64.285714 0 405 Tm 21.202222 0 Td 18.830409 Tz (liritildikliaikilli ) Tj 59.285714 0 0 59.285714 0 384.165049 Tm 23.496386 0 Td 25.301205 Tz (Silicon ) Tj 1.012048 0 Td 28.11245 Tz (chip ) Tj 22.857143 0 0 22.857143 0 404 Tm 83.825 0 Td 74.739583 Tz (L612 ) Tj 64.285714 0 0 64.285714 0 365 Tm 23.644444 0 Td 22.18107 Tz (BRRRRRRRR ) Tj 55.714286 0 0 55.714286 0 383 Tm 31.607692 0 Td 25.726496 Tz (ERRER ) Tj 64.285714 0 0 64.285714 0 336.301887 Tm 25.744444 0 Td 23.333333 Tz (R ) Tj 0.513333 0 Td 35.353535 Tz (RRRRESERBER ) Tj 50 0 0 50 0 380 Tm 37.18 0 Td 20 Tz (A ) Tj 20 0 0 20 0 351 Tm 68.7 0 Td 97.916667 Tz (WHINNINN ) Tj 20 0 0 20 0 351 Tm 75.7 0 Td 84.313725 Tz (ihihihhhWHINIHINN ) Tj 20 0 0 20 0 351 Tm 86.05 0 Td 59.52381 Tz (ilihinh ) Tj 3.05 0 Td 91.666667 Tz (HWWII ) Tj 3.2 0 Td 33.333333 Tz (, ) Tj 27.142857 0 0 27.142857 0 260 Tm 48.3 0 Td 59.356725 Tz (TSV ) Tj 22.857143 0 0 22.857143 0 261 Tm 79.23125 0 Td 70.486111 Tz (TSV ) Tj 27.142857 0 0 27.142857 0 233 Tm 66.610526 0 Td 55.263158 Tz (814 ) Tj 30 0 0 30 0 232 Tm 43.633333 0 Td 53.703704 Tz (812 ) Tj ET Q endstream endobj 96 0 obj << /Length 1 >> stream q endstream endobj 97 0 obj << /Length 10751 >> stream Q q 0.24 0 0 0.24 0 0 cm BT /F1 1 Tf 3 Tr 78.571429 0 0 78.571429 0 3027 Tm 13.694545 0 Td 63.636364 Tz (US ) Tj 1.030909 0 Td 43.484848 Tz (10 ) Tj 0.572727 0 Td 33.939394 Tz (, ) Tj 0.165455 0 Td 50.20202 Tz (215 ) Tj 0.954545 0 Td 33.939394 Tz (, ) Tj 0.076364 0 Td 55.151515 Tz (692 ) Tj 1.26 0 Td 63.636364 Tz (B2 ) Tj 55.714286 0 0 55.714286 0 2987.939759 Tm 21.7 0 Td 53.846154 Tz (Page ) Tj 1.597436 0 Td 32.905983 Tz (2 ) Tj 53.877551 0 0 53.877551 0 2866.005747 Tm 6.050758 0 Td 37.121212 Tz (\( ) Tj 0.148485 0 Td 63.415404 Tz (51 ) Tj 0.742424 0 Td 37.121212 Tz (\) ) Tj 1.039394 0 Td 44.339226 Tz (Int ) Tj 0.816667 0 Td 37.121212 Tz (. ) Tj 0.408333 0 Td 64.962121 Tz (Ci ) Tj 0.686742 0 Td 37.121212 Tz (. ) Tj 50.31746 0 0 50.31746 0 2826.196429 Tm 8.386751 0 Td 69.55836 Tz (GOIN ) Tj 2.146372 0 Td 61.277603 Tz (21 ) Tj 0.735331 0 Td 29.810726 Tz (/ ) Tj 0.218612 0 Td 58.793375 Tz (3504 ) Tj 3.895268 0 Td 36.435331 Tz (\( ) Tj 0.278233 0 Td 56.309148 Tz (2014 ) Tj 1.411041 0 Td 36.435331 Tz (. ) Tj 0.25836 0 Td 56.309148 Tz (01 ) Tj 0.695584 0 Td 36.435331 Tz (\) ) Tj 47.142857 0 0 47.142857 0 2785 Tm 8.909091 0 Td 74.242424 Tz (GO2B ) Tj 2.248485 0 Td 31.818182 Tz (6 ) Tj 0.360606 0 Td 31.818182 Tz (/ ) Tj 0.275758 0 Td 54.79798 Tz (12 ) Tj 56.571429 0 0 56.571429 0 2781.956522 Tm 13.699495 0 Td 35.353535 Tz (\( ) Tj 0.247475 0 Td 48.611111 Tz (2006 ) Tj 1.272727 0 Td 35.353535 Tz (. ) Tj 0.159091 0 Td 53.030303 Tz (01 ) Tj 0.671717 0 Td 35.353535 Tz (\) ) Tj 62.857143 0 0 62.857143 0 2732 Tm 5.218182 0 Td 34.469697 Tz (\( ) Tj 0.111364 0 Td 53.030303 Tz (52 ) Tj 0.668182 0 Td 34.469697 Tz (\) ) Tj 0.827273 0 Td 34.469697 Tz (U ) Tj 0.35 0 Td 34.469697 Tz (. ) Tj 0.222727 0 Td 34.469697 Tz (S ) Tj 0.270455 0 Td 34.469697 Tz (. ) Tj 0.381818 0 Td 54.356061 Tz (CI ) Tj 0.525 0 Td 34.469697 Tz (. ) Tj 55.274725 0 0 55.274725 0 2693.61213 Tm 7.652684 0 Td 63.32008 Tz (CPC ) Tj 1.592048 0 Td 33.167661 Tz (. ) Tj 0.162823 0 Td 33.167661 Tz (. ) Tj 0.162823 0 Td 33.167661 Tz (. ) Tj 0.180915 0 Td 33.167661 Tz (. ) Tj 0.162823 0 Td 33.167661 Tz (. ) Tj 0.162823 0 Td 33.167661 Tz (. ) Tj 0.162823 0 Td 33.167661 Tz (. ) Tj 0.180915 0 Td 33.167661 Tz (. ) Tj 0.162823 0 Td 33.167661 Tz (. ) Tj 0.162823 0 Td 33.167661 Tz (. ) Tj 0.199006 0 Td 33.167661 Tz (. ) Tj 0.144732 0 Td 33.167661 Tz (. ) Tj 0.162823 0 Td 33.167661 Tz (. ) Tj 0.235189 0 Td 33.167661 Tz (. ) Tj 0.651292 0 Td 64.8277 Tz (GO2B ) Tj 1.953877 0 Td 45.982439 Tz (2006 ) Tj 1.284493 0 Td 36.182903 Tz (/ ) Tj 0.271372 0 Td 54.274354 Tz (12097 ) Tj 1.881511 0 Td 36.182903 Tz (\( ) Tj 0.199006 0 Td 54.274354 Tz (2013 ) Tj 1.320676 0 Td 36.182903 Tz (. ) Tj 0.108549 0 Td 67.842942 Tz (01 ) Tj 0.74175 0 Td 36.182903 Tz (\) ) Tj 0.217097 0 Td 36.182903 Tz (; ) Tj 0.452286 0 Td 58.797217 Tz (G02B ) Tj 61.428571 0 0 61.428571 0 2649 Tm 9.555814 0 Td 44.767442 Tz (2006 ) Tj 1.204651 0 Td 32.55814 Tz (/ ) Tj 0.195349 0 Td 47.209302 Tz (12138 ) Tj 1.693023 0 Td 32.55814 Tz (\( ) Tj 0.195349 0 Td 47.48062 Tz (2013 ) Tj 1.204651 0 Td 32.55814 Tz (. ) Tj 0.195349 0 Td 42.054264 Tz (01 ) Tj 0.569767 0 Td 32.55814 Tz (\) ) Tj 0.211628 0 Td 32.55814 Tz (; ) Tj 0.34186 0 Td 57.655039 Tz (G02B ) Tj 1.676744 0 Td 43.410853 Tz (2006 ) Tj 1.204651 0 Td 32.55814 Tz (/ ) Tj 0.195349 0 Td 43.953488 Tz (12176 ) Tj 55.714286 0 0 55.714286 0 2609 Tm 19.366667 0 Td 32.905983 Tz (\( ) Tj 0.14359 0 Td 56.837607 Tz (2013 ) Tj 1.382051 0 Td 32.905983 Tz (. ) Tj 0.179487 0 Td 52.350427 Tz (01 ) Tj 0.592308 0 Td 32.905983 Tz (\) ) Tj 54.285714 0 0 54.285714 0 2531 Tm 6.042105 0 Td 33.77193 Tz (\( ) Tj 0.184211 0 Td 44.517544 Tz (56 ) Tj 0.663158 0 Td 33.77193 Tz (\) ) Tj 59.285714 0 0 59.285714 0 2529.910506 Tm 10.710843 0 Td 50.321285 Tz (References ) Tj 3.272289 0 Td 43.855422 Tz (Cited ) Tj 58.571429 0 0 58.571429 0 2461 Tm 9.304878 0 Td 34.146341 Tz (U ) Tj 0.426829 0 Td 34.146341 Tz (. ) Tj 0.204878 0 Td 34.146341 Tz (S ) Tj 0.358537 0 Td 34.146341 Tz (. ) Tj 0.358537 0 Td 64.9729 Tz (PATENT ) Tj 2.492683 0 Td 71.770551 Tz (DOCUMENTS ) Tj 50 0 0 50 0 2393.328421 Tm 8.14 0 Td 33.333333 Tz (7 ) Tj 0.22 0 Td 33.333333 Tz (, ) Tj 0.22 0 Td 50 Tz (848 ) Tj 0.96 0 Td 33.333333 Tz (, ) Tj 0.16 0 Td 55.555556 Tz (599 ) Tj 1.38 0 Td 65 Tz (B2 ) Tj 1.8 0 Td 43.333333 Tz (12 ) Tj 0.58 0 Td 33.333333 Tz (/ ) Tj 0.2 0 Td 50.833333 Tz (2010 ) Tj 1.86 0 Td 52.666667 Tz (Cunningham ) Tj 3.7 0 Td 33.333333 Tz (et ) Tj 0.6 0 Td 43.333333 Tz (al ) Tj 0.5 0 Td 33.333333 Tz (. ) Tj 52.040816 0 0 52.040816 0 2355.368353 Tm 6.629412 0 Td 52.843137 Tz (2005 ) Tj 1.229804 0 Td 35.228758 Tz (/ ) Tj 0.153725 0 Td 53.071895 Tz (0169566 ) Tj 2.594118 0 Td 75.261438 Tz (A1 ) Tj 0.864706 0 Td 35.228758 Tz (* ) Tj 1.210588 0 Td 35.228758 Tz (8 ) Tj 0.211373 0 Td 35.228758 Tz (/ ) Tj 0.307451 0 Td 48.039216 Tz (2005 ) Tj 1.748627 0 Td 46.615832 Tz (Takahashi ) Tj 2.747843 0 Td 35.228758 Tz (. ) Tj 0.172941 0 Td 35.228758 Tz (. ) Tj 0.153725 0 Td 35.228758 Tz (. ) Tj 0.172941 0 Td 35.228758 Tz (. ) Tj 0.172941 0 Td 35.228758 Tz (. ) Tj 0.153725 0 Td 35.228758 Tz (. ) Tj 0.13451 0 Td 35.228758 Tz (. ) Tj 0.172941 0 Td 35.228758 Tz (. ) Tj 0.192157 0 Td 35.228758 Tz (. ) Tj 0.13451 0 Td 35.228758 Tz (. ) Tj 0.13451 0 Td 35.228758 Tz (. ) Tj 0.192157 0 Td 35.228758 Tz (. ) Tj 0.172941 0 Td 35.228758 Tz (. ) Tj 0.13451 0 Td 35.228758 Tz (. ) Tj 0.192157 0 Td 35.228758 Tz (. ) Tj 0.422745 0 Td 57.647059 Tz (GO2F ) Tj 1.748627 0 Td 28.823529 Tz (1 ) Tj 0.192157 0 Td 28.823529 Tz (/ ) Tj 0.172941 0 Td 55.511983 Tz (011 ) Tj 45.714286 0 0 45.714286 0 2321 Tm 25.1125 0 Td 54.6875 Tz (385 ) Tj 1.09375 0 Td 32.8125 Tz (/ ) Tj 0.284375 0 Td 32.8125 Tz (1 ) Tj 51.428571 0 0 51.428571 0 2282 Tm 6.708333 0 Td 52.662037 Tz (2009 ) Tj 1.302778 0 Td 32.407407 Tz (/ ) Tj 0.155556 0 Td 50.925926 Tz (0274418 ) Tj 2.644444 0 Td 63.194444 Tz (Al ) Tj 0.836111 0 Td 32.407407 Tz (* ) Tj 0.875 0 Td 43.75 Tz (11 ) Tj 0.525 0 Td 32.407407 Tz (/ ) Tj 0.252778 0 Td 51.851852 Tz (2009 ) Tj 1.672222 0 Td 49.691358 Tz (Holzwarth ) Tj 3.111111 0 Td 32.407407 Tz (. ) Tj 0.213889 0 Td 32.407407 Tz (. ) Tj 0.136111 0 Td 32.407407 Tz (. ) Tj 0.136111 0 Td 32.407407 Tz (. ) Tj 0.175 0 Td 32.407407 Tz (. ) Tj 0.175 0 Td 32.407407 Tz (. ) Tj 0.155556 0 Td 32.407407 Tz (. ) Tj 0.136111 0 Td 32.407407 Tz (. ) Tj 0.35 0 Td 32.407407 Tz (. ) Tj 0.136111 0 Td 32.407407 Tz (. ) Tj 0.213889 0 Td 32.407407 Tz (. ) Tj 0.136111 0 Td 32.407407 Tz (. ) Tj 0.563889 0 Td 60.763889 Tz (B82Y ) Tj 1.711111 0 Td 43.75 Tz (20 ) Tj 0.602778 0 Td 32.407407 Tz (/ ) Tj 0.155556 0 Td 53.472222 Tz (00 ) Tj 45.714286 0 0 45.714286 0 2249 Tm 24.740625 0 Td 54.6875 Tz (385 ) Tj 1.09375 0 Td 32.8125 Tz (/ ) Tj 0.2625 0 Td 43.75 Tz (30 ) Tj 47.142857 0 0 47.142857 0 2214 Tm 7.318182 0 Td 59.217172 Tz (2011 ) Tj 1.4 0 Td 31.818182 Tz (/ ) Tj 0.190909 0 Td 55.050505 Tz (0188112 ) Tj 2.842424 0 Td 74.242424 Tz (A1 ) Tj 2.290909 0 Td 31.818182 Tz (8 ) Tj 0.275758 0 Td 31.818182 Tz (/ ) Tj 0.169697 0 Td 58.333333 Tz (2011 ) Tj 1.930303 0 Td 45.566779 Tz (Stievater ) Tj 2.8 0 Td 33.585859 Tz (et ) Tj 0.678788 0 Td 42.424242 Tz (al ) Tj 0.509091 0 Td 31.818182 Tz (. ) Tj 40 0 0 40 0 2181 Tm 8.575 0 Td 66.666667 Tz (2012 ) Tj 1.7 0 Td 33.333333 Tz (/ ) Tj 0.2 0 Td 67.857143 Tz (0223232 ) Tj 3.375 0 Td 83.333333 Tz (AL ) Tj 2.65 0 Td 33.333333 Tz (9 ) Tj 0.275 0 Td 33.333333 Tz (/ ) Tj 0.3 0 Td 65.625 Tz (2012 ) Tj 2.175 0 Td 65.277778 Tz (Kubota ) Tj 40 0 0 40 0 2147 Tm 8.575 0 Td 66.666667 Tz (2014 ) Tj 1.7 0 Td 33.333333 Tz (/ ) Tj 0.175 0 Td 68.452381 Tz (0161387 ) Tj 3.4 0 Td 83.333333 Tz (AL ) Tj 2.575 0 Td 33.333333 Tz (6 ) Tj 0.35 0 Td 33.333333 Tz (/ ) Tj 0.3 0 Td 62.5 Tz (2014 ) Tj 2.275 0 Td 54.166667 Tz (Ide ) Tj 1.4 0 Td 43.75 Tz (et ) Tj 0.85 0 Td 41.666667 Tz (al ) Tj 0.575 0 Td 33.333333 Tz (. ) Tj 45.714286 0 0 45.714286 0 2112 Tm 7.6125 0 Td 54.6875 Tz (2014 ) Tj 1.35625 0 Td 32.8125 Tz (/ ) Tj 0.240625 0 Td 58.333333 Tz (0264030 ) Tj 3.040625 0 Td 32.8125 Tz (A ) Tj 2.165625 0 Td 32.8125 Tz (9 ) Tj 0.284375 0 Td 32.8125 Tz (/ ) Tj 0.240625 0 Td 54.6875 Tz (2014 ) Tj 2.034375 0 Td 49.826389 Tz (Lin ) Tj 1.203125 0 Td 43.75 Tz (et ) Tj 0.765625 0 Td 41.927083 Tz (al ) Tj 0.525 0 Td 32.8125 Tz (. ) Tj 47.142857 0 0 47.142857 0 2075 Tm 7.360606 0 Td 51.262626 Tz (2015 ) Tj 1.357576 0 Td 31.818182 Tz (/ ) Tj 0.127273 0 Td 57.070707 Tz (0253510 ) Tj 2.927273 0 Td 74.242424 Tz (A1 ) Tj 0.933333 0 Td 31.818182 Tz (* ) Tj 1.272727 0 Td 31.818182 Tz (9 ) Tj 0.275758 0 Td 31.818182 Tz (/ ) Tj 0.254545 0 Td 53.914141 Tz (2015 ) Tj 1.887879 0 Td 49.494949 Tz (Celo ) Tj 47.142857 0 0 47.142857 0 2076 Tm 22.018182 0 Td 67.171717 Tz (GO2B ) Tj 1.930303 0 Td 31.818182 Tz (6 ) Tj 0.360606 0 Td 31.818182 Tz (/ ) Tj 0.233333 0 Td 55.681818 Tz (3582 ) Tj 44.285714 0 0 44.285714 0 2041 Tm 25.516129 0 Td 55.197133 Tz (385 ) Tj 1.106452 0 Td 33.870968 Tz (/ ) Tj 0.316129 0 Td 45.16129 Tz (14 ) Tj 25.714286 0 0 25.714286 0 2080.133333 Tm 33.327778 0 Td 32.407407 Tz (. ) Tj 0.388889 0 Td 32.407407 Tz (. ) Tj 0.272222 0 Td 32.407407 Tz (. ) Tj 0.35 0 Td 32.407407 Tz (. ) Tj 0.35 0 Td 32.407407 Tz (. ) Tj 0.272222 0 Td 32.407407 Tz (. ) Tj 0.311111 0 Td 32.407407 Tz (. ) Tj 0.35 0 Td 32.407407 Tz (. ) Tj 0.35 0 Td 32.407407 Tz (. ) Tj 0.272222 0 Td 32.407407 Tz (. ) Tj 0.35 0 Td 32.407407 Tz (. ) Tj 0.35 0 Td 32.407407 Tz (. ) Tj 0.272222 0 Td 32.407407 Tz (. ) Tj 0.35 0 Td 32.407407 Tz (. ) Tj 0.272222 0 Td 32.407407 Tz (. ) Tj 54.285714 0 0 54.285714 0 1959.136106 Tm 9.118421 0 Td 70.175439 Tz (FOREIGN ) Tj 3.278947 0 Td 70.102339 Tz (PATENT ) Tj 2.652632 0 Td 79.1423 Tz (DOCUMENTS ) Tj 42.857143 0 0 42.857143 0 1855 Tm 7.63 0 Td 42.777778 Tz (JP ) Tj 45.714286 0 0 45.714286 0 1889 Tm 11.703125 0 Td 66.840278 Tz (H08 ) Tj 1.290625 0 Td 32.8125 Tz (- ) Tj 0.328125 0 Td 53.229167 Tz (15540 ) Tj 2.1875 0 Td 32.8125 Tz (A ) Tj 42.857143 0 0 42.857143 0 1855 Tm 11.9 0 Td 56.388889 Tz (2006 ) Tj 1.586667 0 Td 35 Tz (- ) Tj 0.14 0 Td 63.518519 Tz (030733 ) Tj 2.87 0 Td 35 Tz (A ) Tj 47.142857 0 0 47.142857 0 1820 Tm 11.115152 0 Td 56.919192 Tz (2013119981 ) Tj 3.839394 0 Td 74.242424 Tz (AL ) Tj 42.857143 0 0 42.857143 0 1889 Tm 18.923333 0 Td 35 Tz (1 ) Tj 0.21 0 Td 35 Tz (/ ) Tj 0.303333 0 Td 54.444444 Tz (1996 ) Tj 45.714286 0 0 45.714286 0 1855 Tm 17.675 0 Td 32.8125 Tz (2 ) Tj 0.284375 0 Td 32.8125 Tz (/ ) Tj 0.240625 0 Td 51.953125 Tz (2006 ) Tj 47.142857 0 0 47.142857 0 1820 Tm 17.160606 0 Td 31.818182 Tz (8 ) Tj 0.275758 0 Td 31.818182 Tz (/ ) Tj 0.233333 0 Td 53.914141 Tz (2013 ) Tj 57.142857 0 0 57.142857 0 1818 Tm 5.565 0 Td 87.5 Tz (WO ) Tj 52.857143 0 0 52.857143 0 1756.25 Tm 6.167568 0 Td 34.684685 Tz (* ) Tj 0.605405 0 Td 40.990991 Tz (cited ) Tj 1.494595 0 Td 63.063063 Tz (by ) Tj 1.002703 0 Td 55.18018 Tz (examiner ) Tj ET Q endstream endobj 98 0 obj << /Length 1 >> stream q endstream endobj 99 0 obj << /Length 32640 >> stream Q q 0.24 0 0 0.24 0 0 cm BT /F1 1 Tf 3 Tr 70 0 0 70 0 3033 Tm 7.514286 0 Td 81.428571 Tz (atent ) Tj 67.142857 0 0 67.142857 0 3024 Tm 12.510638 0 Td 54.609929 Tz (Feb ) Tj 1.117021 0 Td 34.751773 Tz (. ) Tj 0.476596 0 Td 42.198582 Tz (26 ) Tj 0.640426 0 Td 34.751773 Tz (, ) Tj 0.446809 0 Td 58.953901 Tz (2019 ) Tj 70 0 0 70 0 3022 Tm 17.871429 0 Td 54.761905 Tz (Sheet ) Tj 2 0 Td 33.333333 Tz (1 ) Tj 0.514286 0 Td 52.380952 Tz (of ) Tj 0.885714 0 Td 33.333333 Tz (9 ) Tj 92.857143 0 0 92.857143 0 3023 Tm 18.953846 0 Td 63.717949 Tz (US ) Tj 1.033846 0 Td 43.076923 Tz (10 ) Tj 0.506154 0 Td 34.102564 Tz (, ) Tj 0.226154 0 Td 44.871795 Tz (215 ) Tj 0.893846 0 Td 34.102564 Tz (, ) Tj 0.161538 0 Td 49.65812 Tz (692 ) Tj 1.163077 0 Td 64.615385 Tz (B2 ) Tj 61.428571 0 0 61.428571 0 2616 Tm 17.027907 0 Td 56.072351 Tz (126 ) Tj 50 0 0 50 0 2546 Tm 22.32 0 Td 15 Tz (pank ) Tj 108.095238 0 0 108.095238 0 2521.162791 Tm 8.307489 0 Td 33.406755 Tz (112 ) Tj 0.906608 0 Td 38.546256 Tz (122 ) Tj 1.156388 0 Td 38.546256 Tz (110 ) Tj 0.906608 0 Td 38.546256 Tz (109 ) Tj 0.971366 0 Td 33.406755 Tz (120 ) Tj 0.906608 0 Td 38.546256 Tz (122 ) Tj 58.571429 0 0 58.571429 0 2514 Tm 26.480488 0 Td 17.073171 Tz (1 ) Tj 57.142857 0 0 57.142857 0 2516 Tm 27.5625 0 Td 11.666667 Tz (1 ) Tj 62.857143 0 0 62.857143 0 2412 Tm 9.879545 0 Td 55.681818 Tz (128 ) Tj 64.285714 0 0 64.285714 0 2413 Tm 28.28 0 Td 63.08642 Tz (128 ) Tj 5.714286 0 0 5.714286 0 2421 Tm 213.325 0 Td 408.333333 Tz (. ) Tj 0 0 Td 408.333333 Tz (: ) Tj 2.857143 0 0 2.857143 0 2405 Tm 424.2 0 Td 758.333333 Tz (K ) Tj 4.285714 0 0 4.285714 0 2405 Tm 298.433333 0 Td 505.555556 Tz (O ) Tj 72.857143 0 0 72.857143 0 2378 Tm 16.25098 0 Td 7.434641 Tz (TOTO ) Tj 5.714286 0 0 5.714286 0 2392 Tm 213.325 0 Td 408.333333 Tz (. ) Tj 2.857143 0 0 2.857143 0 2381 Tm 423.85 0 Td 758.333333 Tz (E ) Tj 4.285714 0 0 4.285714 0 2349 Tm 282.333333 0 Td 505.555556 Tz (. ) Tj 4.285714 0 0 4.285714 0 2325.666667 Tm 276.266667 0 Td 505.555556 Tz (. ) Tj 0 0 Td 505.555556 Tz (. ) Tj 0 0 Td 505.555556 Tz (. ) Tj 16.507937 0 0 16.507937 0 2314.21978 Tm 80.325 0 Td 55.528846 Tz (Kaka ) Tj 0.060577 0 Td 201.923077 Tz (. ) Tj 0 0 Td 201.923077 Tz (. ) Tj 0 0 Td 201.923077 Tz (. ) Tj 0 0 Td 201.923077 Tz (. ) Tj 0 0 Td 201.923077 Tz (. ) Tj -0.060577 0 Td 201.923077 Tz (. ) Tj 0 0 Td 201.923077 Tz (. ) Tj 0 0 Td 201.923077 Tz (. ) Tj 4.285714 0 0 4.285714 0 2296 Tm 304.966667 0 Td 466.666667 Tz (. ) Tj -0.233333 0 Td 466.666667 Tz (. ) Tj 0 0 Td 466.666667 Tz (. ) Tj 0 0 Td 466.666667 Tz (. ) Tj 0 0 Td 466.666667 Tz (. ) Tj 0 0 Td 466.666667 Tz (. ) Tj -0.233333 0 Td 466.666667 Tz (. ) Tj 0 0 Td 466.666667 Tz (" ) Tj 15.714286 0 0 15.714286 0 2307 Tm 42.954545 0 Td 357.575758 Tz (MYANMAR ) Tj 4.285714 0 0 4.285714 0 2313 Tm 282.333333 0 Td 505.555556 Tz (. ) Tj 0 0 Td 505.555556 Tz (. ) Tj -0.233333 0 Td 505.555556 Tz (. ) Tj 0 0 Td 505.555556 Tz (. ) Tj -0.233333 0 Td 505.555556 Tz (. ) Tj 4.285714 0 0 4.285714 0 2314 Tm 298.666667 0 Td 505.555556 Tz (. ) Tj 134.285714 0 0 134.285714 0 2258 Tm 9.07766 0 Td 2.171986 Tz (RRRRRRRR ) Tj 100 0 0 100 0 2276 Tm 12.31 0 Td 4.166667 Tz (rrrrrr ) Tj 164.285714 0 0 164.285714 0 2243 Tm 7.63913 0 Td 1.803543 Tz (Rrrrrrrrr ) Tj 4.285714 0 0 4.285714 0 2283.5 Tm 276.266667 0 Td 505.555556 Tz (. ) Tj 0 0 Td 505.555556 Tz (. ) Tj 0 0 Td 505.555556 Tz (. ) Tj 0 0 Td 505.555556 Tz (. ) Tj 100 0 0 100 0 2275 Tm 13.5 0 Td 5.555556 Tz (rrrrrr ) Tj 154.285714 0 0 154.285714 0 2243 Tm 8.542593 0 Td 1.440329 Tz (FERRRRRRR ) Tj 4.285714 0 0 4.285714 0 2283.5 Tm 298.666667 0 Td 505.555556 Tz (. ) Tj 0.233333 0 Td 505.555556 Tz (. ) Tj 0 0 Td 505.555556 Tz (. ) Tj 0 0 Td 505.555556 Tz (. ) Tj 24.285714 0 0 24.285714 0 2272 Tm 28.535294 0 Td 116.666667 Tz (SER ) Tj 4.285714 0 0 4.285714 0 2271 Tm 281.866667 0 Td 505.555556 Tz (. ) Tj 0 0 Td 505.555556 Tz (. ) Tj 4.285714 0 0 4.285714 0 2248 Tm 298.9 0 Td 505.555556 Tz (: ) Tj 62.857143 0 0 62.857143 0 2212 Tm 7.811364 0 Td 60.984848 Tz (130 ) Tj 180 0 0 180 0 2161 Tm 2.755556 0 Td 24.382716 Tz (130 ) Tj 150 0 0 150 0 2133 Tm 6.08 0 Td 4.074074 Tz (HER ) Tj 271.428571 0 0 271.428571 0 2069 Tm 2.343158 0 Td 8.245614 Tz (Humiditetstest ) Tj 181.428571 0 0 181.428571 0 2111 Tm 6.856693 0 Td 24.190726 Tz (Air ) Tj 61.428571 0 0 61.428571 0 2114 Tm 7.716279 0 Td 56.072351 Tz (104 ) Tj 184.285714 0 0 184.285714 0 2099 Tm 7.553488 0 Td 28.940568 Tz (124 ) Tj 20 0 0 20 0 2060 Tm 47.5 0 Td 164.007092 Tz (??????????????????????????????????????????????? ) Tj 10 0 0 10 0 2056 Tm 126.8 0 Td 33.333333 Tz (. ) Tj 0.1 0 Td 33.333333 Tz (. ) Tj 10 0 0 10 0 2056 Tm 128.6 0 Td 33.333333 Tz (. ) Tj 10 0 0 10 0 2055 Tm 130.1 0 Td 33.333333 Tz (. ) Tj 10 0 0 10 0 2051 Tm 158.6 0 Td 33.333333 Tz (. ) Tj 11.428571 0 0 11.428571 0 2044.069444 Tm 136.9375 0 Td 29.166667 Tz (4 ) Tj 1.4875 0 Td 29.166667 Tz (. ) Tj 1.75 0 Td 408.333333 Tz (HUSET ) Tj 10 0 0 10 0 2048 Tm 183.7 0 Td 33.333333 Tz (. ) Tj 10 0 0 10 0 2044 Tm 181.8 0 Td 33.333333 Tz (, ) Tj 10 0 0 10 0 2047 Tm 185.4 0 Td 33.333333 Tz (. ) Tj 10 0 0 10 0 2035.5 Tm 76 0 Td 133.333333 Tz (* ) Tj 0.4 0 Td 133.333333 Tz (* ) Tj 12.857143 0 0 12.857143 0 2029 Tm 101.188889 0 Td 125.816993 Tz (TUTTERISTETUTAUTU ) Tj 10 0 0 10 0 2031 Tm 161.4 0 Td 33.333333 Tz (4 ) Tj 10 0 0 10 0 2031 Tm 175.8 0 Td 33.333333 Tz (. ) Tj 10 0 0 10 0 1992 Tm 118 0 Td 133.333333 Tz (* ) Tj 10 0 0 10 0 1991 Tm 105.2 0 Td 133.333333 Tz (* ) Tj 10 0 0 10 0 1991 Tm 106.8 0 Td 133.333333 Tz (* ) Tj 10 0 0 10 0 1991 Tm 113.2 0 Td 133.333333 Tz (* ) Tj 10 0 0 10 0 1991 Tm 122.8 0 Td 133.333333 Tz (* ) Tj 10 0 0 10 0 1977.5 Tm 122.7 0 Td 133.333333 Tz (* ) Tj 0.5 0 Td 133.333333 Tz (* ) Tj 150 0 0 150 0 1986 Tm 4.433333 0 Td 39.259259 Tz (MAS ) Tj 10 0 0 10 0 1990 Tm 68.4 0 Td 133.333333 Tz (* ) Tj 17.142857 0 0 17.142857 0 1963 Tm 105.525 0 Td 223.611111 Tz (TES ) Tj 10 0 0 10 0 1963 Tm 107.1 0 Td 133.333333 Tz (* ) Tj 10 0 0 10 0 1963 Tm 108.7 0 Td 133.333333 Tz (* ) Tj 1.428571 0 0 1.428571 0 1964 Tm 1136.1 0 Td 700 Tz (+ ) Tj 10 0 0 10 0 1962 Tm 65.7 0 Td 133.333333 Tz (* ) Tj 10 0 0 10 0 1950 Tm 64.5 0 Td 133.333333 Tz (* ) Tj 10 0 0 10 0 1958 Tm 68.1 0 Td 133.333333 Tz (* ) Tj 0.3 0 Td 133.333333 Tz (* ) Tj 0.4 0 Td 133.333333 Tz (* ) Tj 1.428571 0 0 1.428571 0 1948 Tm 1136.1 0 Td 700 Tz (+ ) Tj 10 0 0 10 0 1942 Tm 68.4 0 Td 133.333333 Tz (* ) Tj 10 0 0 10 0 1933 Tm 112 0 Td 133.333333 Tz (* ) Tj 0.3 0 Td 133.333333 Tz (* ) Tj 10 0 0 10 0 1930 Tm 65.7 0 Td 133.333333 Tz (* ) Tj 10 0 0 10 0 1934 Tm 126.9 0 Td 133.333333 Tz (* ) Tj 10 0 0 10 0 1926 Tm 116.4 0 Td 133.333333 Tz (* ) Tj 1.428571 0 0 1.428571 0 1931 Tm 1136.1 0 Td 700 Tz (+ ) Tj 10 0 0 10 0 1923 Tm 111.1 0 Td 133.333333 Tz (* ) Tj 10 0 0 10 0 1918 Tm 64.5 0 Td 133.333333 Tz (* ) Tj 1.428571 0 0 1.428571 0 1916 Tm 1136.1 0 Td 700 Tz (+ ) Tj 10 0 0 10 0 1914 Tm 65.7 0 Td 133.333333 Tz (* ) Tj 10 0 0 10 0 1902 Tm 64.5 0 Td 133.333333 Tz (* ) Tj 26.593407 0 0 26.593407 0 1969.423913 Tm 68.964463 0 Td 21.935262 Tz (24 ) Tj 0 0 Td 43.870523 Tz (. ) Tj 0 0 Td 43.870523 Tz (2 ) Tj 0 0 Td 43.870523 Tz (. ) Tj 0 0 Td 43.870523 Tz (2 ) Tj 0 0 Td 43.870523 Tz (. ) Tj 0 0 Td 21.935262 Tz (22 ) Tj 0 0 Td 43.870523 Tz (. ) Tj 0 0 Td 21.935262 Tz (22 ) Tj 0 0 Td 43.870523 Tz (. ) Tj 0 0 Td 21.935262 Tz (22 ) Tj 0 0 Td 43.870523 Tz (. ) Tj 0 0 Td 2.387511 Tz (242424242424242424141 ) Tj 10 0 0 10 0 1908 Tm 124.1 0 Td 133.333333 Tz (* ) Tj 0.3 0 Td 133.333333 Tz (* ) Tj 1.428571 0 0 1.428571 0 1900 Tm 1136.1 0 Td 700 Tz (+ ) Tj 10 0 0 10 0 1898 Tm 123.2 0 Td 133.333333 Tz (* ) Tj 294.285714 0 0 294.285714 0 1883 Tm 3.323301 0 Td 23.446602 Tz (ATALA ) Tj 1.428571 0 0 1.428571 0 1883 Tm 1136.1 0 Td 700 Tz (+ ) Tj 10 0 0 10 0 1878 Tm 126 0 Td 133.333333 Tz (* ) Tj 1.428571 0 0 1.428571 0 1868 Tm 1136.1 0 Td 700 Tz (+ ) Tj 1.428571 0 0 1.428571 0 1852 Tm 1136.1 0 Td 700 Tz (+ ) Tj 10 0 0 10 0 1846 Tm 122.9 0 Td 133.333333 Tz (* ) Tj 1.428571 0 0 1.428571 0 1835 Tm 1136.1 0 Td 700 Tz (+ ) Tj 1.428571 0 0 1.428571 0 1820 Tm 1136.1 0 Td 700 Tz (+ ) Tj 10 0 0 10 0 1807 Tm 104.4 0 Td 133.333333 Tz (* ) Tj 10 0 0 10 0 1807 Tm 105.9 0 Td 133.333333 Tz (* ) Tj 10 0 0 10 0 1800.5 Tm 84 0 Td 133.333333 Tz (* ) Tj 0.4 0 Td 133.333333 Tz (* ) Tj 0.4 0 Td 133.333333 Tz (* ) Tj 0.4 0 Td 133.333333 Tz (* ) Tj 10 0 0 10 0 1800.5 Tm 85.6 0 Td 133.333333 Tz (* ) Tj 0.4 0 Td 133.333333 Tz (* ) Tj 0.4 0 Td 133.333333 Tz (* ) Tj 0.4 0 Td 133.333333 Tz (* ) Tj 10 0 0 10 0 1800.5 Tm 87.2 0 Td 133.333333 Tz (* ) Tj 0.4 0 Td 133.333333 Tz (* ) Tj 0.4 0 Td 133.333333 Tz (* ) Tj 0.4 0 Td 133.333333 Tz (* ) Tj 10 0 0 10 0 1810 Tm 112.9 0 Td 133.333333 Tz (* ) Tj 10 0 0 10 0 1800.5 Tm 93.6 0 Td 133.333333 Tz (* ) Tj 0.4 0 Td 133.333333 Tz (* ) Tj 0.4 0 Td 133.333333 Tz (* ) Tj 0.4 0 Td 133.333333 Tz (* ) Tj 10 0 0 10 0 1806 Tm 118.9 0 Td 133.333333 Tz (* ) Tj 1.428571 0 0 1.428571 0 1804 Tm 1136.1 0 Td 700 Tz (+ ) Tj 10 0 0 10 0 1791 Tm 90 0 Td 133.333333 Tz (* ) Tj 10 0 0 10 0 1783 Tm 90.7 0 Td 133.333333 Tz (* ) Tj 10 0 0 10 0 1791 Tm 91.6 0 Td 133.333333 Tz (* ) Tj 10 0 0 10 0 1791 Tm 104.4 0 Td 133.333333 Tz (* ) Tj 10 0 0 10 0 1783 Tm 89.1 0 Td 133.333333 Tz (* ) Tj 10 0 0 10 0 1790 Tm 112.5 0 Td 133.333333 Tz (* ) Tj 90 0 0 90 0 2026 Tm 13.344444 0 Td 58.333333 Tz (AA ) Tj 31.428571 0 0 31.428571 0 1875 Tm 33.409091 0 Td 121.969697 Tz (A ) Tj 424.285714 0 0 424.285714 0 1792 Tm 2.241414 0 Td 29.166667 Tz (AAAA ) Tj 10 0 0 10 0 1783 Tm 103.5 0 Td 133.333333 Tz (* ) Tj 1.428571 0 0 1.428571 0 1787 Tm 1136.1 0 Td 700 Tz (+ ) Tj 10 0 0 10 0 1771 Tm 96 0 Td 133.333333 Tz (* ) Tj 10 0 0 10 0 1780 Tm 111.3 0 Td 133.333333 Tz (* ) Tj 0.3 0 Td 133.333333 Tz (* ) Tj 10 0 0 10 0 1774 Tm 109.3 0 Td 133.333333 Tz (* ) Tj 1.428571 0 0 1.428571 0 1772 Tm 1136.1 0 Td 700 Tz (+ ) Tj 10 0 0 10 0 1764 Tm 80.8 0 Td 133.333333 Tz (* ) Tj 0.4 0 Td 133.333333 Tz (* ) Tj 10 0 0 10 0 1764 Tm 82.4 0 Td 133.333333 Tz (* ) Tj 0.4 0 Td 133.333333 Tz (* ) Tj 10 0 0 10 0 1750 Tm 82.8 0 Td 133.333333 Tz (* ) Tj 10 0 0 10 0 1764 Tm 84 0 Td 133.333333 Tz (* ) Tj 0.4 0 Td 133.333333 Tz (* ) Tj 10 0 0 10 0 1764 Tm 90.4 0 Td 133.333333 Tz (* ) Tj 0.4 0 Td 133.333333 Tz (* ) Tj 10 0 0 10 0 1770 Tm 115.3 0 Td 133.333333 Tz (* ) Tj 10 0 0 10 0 1763 Tm 100.1 0 Td 133.333333 Tz (* ) Tj 10 0 0 10 0 1755 Tm 100.8 0 Td 133.333333 Tz (* ) Tj 10 0 0 10 0 1755 Tm 86.4 0 Td 133.333333 Tz (* ) Tj 10 0 0 10 0 1758 Tm 64.4 0 Td 133.333333 Tz (* ) Tj 10 0 0 10 0 1755 Tm 88 0 Td 133.333333 Tz (* ) Tj 10 0 0 10 0 1750 Tm 89.2 0 Td 133.333333 Tz (* ) Tj 10 0 0 10 0 1764.5 Tm 108.1 0 Td 133.333333 Tz (* ) Tj 0.4 0 Td 133.333333 Tz (* ) Tj 10 0 0 10 0 1754 Tm 108.8 0 Td 133.333333 Tz (* ) Tj 10 0 0 10 0 1758 Tm 114.1 0 Td 133.333333 Tz (* ) Tj 10 0 0 10 0 1753 Tm 93.6 0 Td 133.333333 Tz (* ) Tj 0.4 0 Td 133.333333 Tz (* ) Tj 0.4 0 Td 133.333333 Tz (* ) Tj 0.4 0 Td 133.333333 Tz (* ) Tj 1.428571 0 0 1.428571 0 1756 Tm 1136.1 0 Td 700 Tz (+ ) Tj 10 0 0 10 0 1750 Tm 79.6 0 Td 133.333333 Tz (* ) Tj 10 0 0 10 0 1750 Tm 81.2 0 Td 133.333333 Tz (* ) Tj 10 0 0 10 0 1742 Tm 64.4 0 Td 133.333333 Tz (* ) Tj 10 0 0 10 0 1750 Tm 113.2 0 Td 133.333333 Tz (* ) Tj 10 0 0 10 0 1746 Tm 108.1 0 Td 133.333333 Tz (* ) Tj 10 0 0 10 0 1735 Tm 81.2 0 Td 133.333333 Tz (* ) Tj 10 0 0 10 0 1738 Tm 65.7 0 Td 133.333333 Tz (* ) Tj 10 0 0 10 0 1738 Tm 105.7 0 Td 133.333333 Tz (* ) Tj 10 0 0 10 0 1737 Tm 84 0 Td 133.333333 Tz (* ) Tj 0.3 0 Td 133.333333 Tz (* ) Tj 0.5 0 Td 133.333333 Tz (* ) Tj 0.4 0 Td 133.333333 Tz (* ) Tj 10 0 0 10 0 1737 Tm 85.6 0 Td 133.333333 Tz (* ) Tj 0.3 0 Td 133.333333 Tz (* ) Tj 0.5 0 Td 133.333333 Tz (* ) Tj 0.4 0 Td 133.333333 Tz (* ) Tj 10 0 0 10 0 1735 Tm 87.6 0 Td 133.333333 Tz (* ) Tj 10 0 0 10 0 1718.6 Tm 85.2 0 Td 133.333333 Tz (* ) Tj 0.5 0 Td 133.333333 Tz (* ) Tj 0.3 0 Td 133.333333 Tz (* ) Tj 0.4 0 Td 133.333333 Tz (* ) Tj 0.5 0 Td 133.333333 Tz (* ) Tj 1.428571 0 0 1.428571 0 1739 Tm 1136.1 0 Td 700 Tz (+ ) Tj 10 0 0 10 0 1734 Tm 106.9 0 Td 133.333333 Tz (* ) Tj 10 0 0 10 0 2053 Tm 97.2 0 Td 133.333333 Tz (* ) Tj 10 0 0 10 0 2056.5 Tm 108.5 0 Td 133.333333 Tz (* ) Tj 0.3 0 Td 133.333333 Tz (* ) Tj 10 0 0 10 0 2038 Tm 94.1 0 Td 133.333333 Tz (* ) Tj 10 0 0 10 0 2024.5 Tm 95.6 0 Td 133.333333 Tz (* ) Tj 0.5 0 Td 133.333333 Tz (* ) Tj 10 0 0 10 0 2015 Tm 94.9 0 Td 133.333333 Tz (* ) Tj 10 0 0 10 0 2014 Tm 104.4 0 Td 133.333333 Tz (* ) Tj 10 0 0 10 0 2004.5 Tm 93.7 0 Td 133.333333 Tz (* ) Tj 0.3 0 Td 133.333333 Tz (* ) Tj 10 0 0 10 0 2006 Tm 103.6 0 Td 133.333333 Tz (* ) Tj 10 0 0 10 0 1992.5 Tm 102 0 Td 133.333333 Tz (* ) Tj 0.5 0 Td 133.333333 Tz (* ) Tj 10 0 0 10 0 1978 Tm 91.2 0 Td 133.333333 Tz (* ) Tj 10 0 0 10 0 1974 Tm 94 0 Td 133.333333 Tz (* ) Tj 10 0 0 10 0 1978 Tm 100.8 0 Td 133.333333 Tz (* ) Tj 10 0 0 10 0 1971 Tm 100.1 0 Td 133.333333 Tz (* ) Tj 10 0 0 10 0 1962 Tm 75.3 0 Td 133.333333 Tz (* ) Tj 10 0 0 10 0 1962 Tm 78.5 0 Td 133.333333 Tz (* ) Tj 10 0 0 10 0 1966 Tm 90 0 Td 133.333333 Tz (* ) Tj 10 0 0 10 0 1958 Tm 90.8 0 Td 133.333333 Tz (* ) Tj 10 0 0 10 0 1950 Tm 77.3 0 Td 133.333333 Tz (* ) Tj 10 0 0 10 0 1948.5 Tm 88.1 0 Td 133.333333 Tz (* ) Tj 0.3 0 Td 133.333333 Tz (* ) Tj 10 0 0 10 0 1947 Tm 97.7 0 Td 133.333333 Tz (* ) Tj 10 0 0 10 0 1940 Tm 72.9 0 Td 133.333333 Tz (* ) Tj 0.3 0 Td 133.333333 Tz (* ) Tj 10 0 0 10 0 1942 Tm 76.5 0 Td 133.333333 Tz (* ) Tj 10 0 0 10 0 1935 Tm 86.9 0 Td 133.333333 Tz (* ) Tj 10 0 0 10 0 1934 Tm 77.3 0 Td 133.333333 Tz (* ) Tj 10 0 0 10 0 1930 Tm 75.3 0 Td 133.333333 Tz (* ) Tj 10 0 0 10 0 1926 Tm 81.2 0 Td 133.333333 Tz (* ) Tj 10 0 0 10 0 1924 Tm 76 0 Td 133.333333 Tz (* ) Tj 0.5 0 Td 133.333333 Tz (* ) Tj 10 0 0 10 0 1924 Tm 85.6 0 Td 133.333333 Tz (* ) Tj 0.4 0 Td 133.333333 Tz (* ) Tj 10 0 0 10 0 1914 Tm 75.3 0 Td 133.333333 Tz (* ) Tj 10 0 0 10 0 1914 Tm 78.5 0 Td 133.333333 Tz (* ) Tj 10 0 0 10 0 1926.2 Tm 94.8 0 Td 133.333333 Tz (* ) Tj 0.4 0 Td 133.333333 Tz (* ) Tj 0.4 0 Td 133.333333 Tz (* ) Tj 0.4 0 Td 133.333333 Tz (* ) Tj 0.5 0 Td 133.333333 Tz (* ) Tj 10 0 0 10 0 1910 Tm 76.4 0 Td 133.333333 Tz (* ) Tj 10 0 0 10 0 1914 Tm 83.3 0 Td 133.333333 Tz (* ) Tj 10 0 0 10 0 1908 Tm 71.3 0 Td 133.333333 Tz (* ) Tj 0.3 0 Td 133.333333 Tz (* ) Tj 10 0 0 10 0 1910 Tm 81.2 0 Td 133.333333 Tz (* ) Tj 10 0 0 10 0 1899 Tm 67.2 0 Td 133.333333 Tz (* ) Tj 10 0 0 10 0 1910 Tm 72.5 0 Td 133.333333 Tz (* ) Tj 0.3 0 Td 133.333333 Tz (* ) Tj 0.4 0 Td 133.333333 Tz (* ) Tj 0.5 0 Td 133.333333 Tz (* ) Tj 0.4 0 Td 133.333333 Tz (* ) Tj 10 0 0 10 0 1902 Tm 77.3 0 Td 133.333333 Tz (* ) Tj 10 0 0 10 0 1899 Tm 83.3 0 Td 133.333333 Tz (* ) Tj 10 0 0 10 0 1894 Tm 71.6 0 Td 133.333333 Tz (* ) Tj 10 0 0 10 0 1894 Tm 81.2 0 Td 133.333333 Tz (* ) Tj 10 0 0 10 0 1898.333333 Tm 92.4 0 Td 133.333333 Tz (* ) Tj 0.4 0 Td 133.333333 Tz (* ) Tj 0.5 0 Td 133.333333 Tz (* ) Tj 10 0 0 10 0 1889 Tm 66 0 Td 133.333333 Tz (* ) Tj 0.3 0 Td 133.333333 Tz (* ) Tj 10 0 0 10 0 1905.142857 Tm 68 0 Td 133.333333 Tz (* ) Tj 0.5 0 Td 133.333333 Tz (* ) Tj 0.8 0 Td 133.333333 Tz (* ) Tj 0.4 0 Td 133.333333 Tz (* ) Tj 0.3 0 Td 133.333333 Tz (* ) Tj 0.5 0 Td 133.333333 Tz (* ) Tj 0.3 0 Td 133.333333 Tz (* ) Tj 10 0 0 10 0 1894 Tm 72.5 0 Td 133.333333 Tz (* ) Tj 0.3 0 Td 133.333333 Tz (* ) Tj 0.4 0 Td 133.333333 Tz (* ) Tj 0.5 0 Td 133.333333 Tz (* ) Tj 0.4 0 Td 133.333333 Tz (* ) Tj 10 0 0 10 0 1892 Tm 76 0 Td 133.333333 Tz (* ) Tj 0.5 0 Td 133.333333 Tz (* ) Tj 10 0 0 10 0 1887 Tm 82.1 0 Td 133.333333 Tz (* ) Tj 10 0 0 10 0 1882 Tm 70.5 0 Td 133.333333 Tz (* ) Tj 10 0 0 10 0 1878 Tm 71.6 0 Td 133.333333 Tz (* ) Tj 10 0 0 10 0 1880 Tm 74.9 0 Td 133.333333 Tz (* ) Tj 0.4 0 Td 133.333333 Tz (* ) Tj 10 0 0 10 0 1882 Tm 76.5 0 Td 133.333333 Tz (* ) Tj 0.3 0 Td 133.333333 Tz (* ) Tj 0.5 0 Td 133.333333 Tz (* ) Tj 10 0 0 10 0 1882 Tm 78.5 0 Td 133.333333 Tz (* ) Tj 10 0 0 10 0 1882 Tm 86.5 0 Td 133.333333 Tz (* ) Tj 10 0 0 10 0 1876.5 Tm 80.9 0 Td 133.333333 Tz (* ) Tj 0.3 0 Td 133.333333 Tz (* ) Tj 10 0 0 10 0 1880 Tm 82.8 0 Td 133.333333 Tz (* ) Tj 0.5 0 Td 133.333333 Tz (* ) Tj 10 0 0 10 0 1871 Tm 66.1 0 Td 133.333333 Tz (* ) Tj 10 0 0 10 0 1866 Tm 70.5 0 Td 133.333333 Tz (* ) Tj 10 0 0 10 0 1870 Tm 77.3 0 Td 133.333333 Tz (* ) Tj 10 0 0 10 0 1870 Tm 85.3 0 Td 133.333333 Tz (* ) Tj 10 0 0 10 0 1866 Tm 78.5 0 Td 133.333333 Tz (* ) Tj 294.285714 0 0 294.285714 0 1869 Tm 2.949515 0 Td 16.747573 Tz (AAAAAAA ) Tj 10 0 0 10 0 1859 Tm 64.9 0 Td 133.333333 Tz (* ) Tj 10 0 0 10 0 1862 Tm 68.1 0 Td 133.333333 Tz (* ) Tj 0.3 0 Td 133.333333 Tz (* ) Tj 0.4 0 Td 133.333333 Tz (* ) Tj 10 0 0 10 0 1864 Tm 74.9 0 Td 133.333333 Tz (* ) Tj 0.4 0 Td 133.333333 Tz (* ) Tj 10 0 0 10 0 1862 Tm 72.5 0 Td 133.333333 Tz (* ) Tj 0.3 0 Td 133.333333 Tz (* ) Tj 0.4 0 Td 133.333333 Tz (* ) Tj 0.5 0 Td 133.333333 Tz (* ) Tj 0.4 0 Td 133.333333 Tz (* ) Tj 10 0 0 10 0 1860.5 Tm 76 0 Td 133.333333 Tz (* ) Tj 0.5 0 Td 133.333333 Tz (* ) Tj 10 0 0 10 0 1847 Tm 65.2 0 Td 133.333333 Tz (* ) Tj 10 0 0 10 0 1846 Tm 66.9 0 Td 133.333333 Tz (* ) Tj 10 0 0 10 0 1854 Tm 82.1 0 Td 133.333333 Tz (* ) Tj 10 0 0 10 0 1852 Tm 73.7 0 Td 133.333333 Tz (* ) Tj 0.4 0 Td 133.333333 Tz (* ) Tj 10 0 0 10 0 1846 Tm 71.6 0 Td 133.333333 Tz (* ) Tj 10 0 0 10 0 1850 Tm 78.4 0 Td 133.333333 Tz (* ) Tj 10 0 0 10 0 1850 Tm 80.1 0 Td 133.333333 Tz (* ) Tj 10 0 0 10 0 1844 Tm 68.1 0 Td 133.333333 Tz (* ) Tj 0.3 0 Td 133.333333 Tz (* ) Tj 10 0 0 10 0 1846 Tm 82.9 0 Td 133.333333 Tz (* ) Tj 10 0 0 10 0 1846 Tm 86 0 Td 133.333333 Tz (* ) Tj 10 0 0 10 0 1844 Tm 80.9 0 Td 133.333333 Tz (* ) Tj 0.3 0 Td 133.333333 Tz (* ) Tj 10 0 0 10 0 1838 Tm 72.5 0 Td 133.333333 Tz (* ) Tj 10 0 0 10 0 1848.25 Tm 76 0 Td 133.333333 Tz (* ) Tj 0.5 0 Td 133.333333 Tz (* ) Tj 0.3 0 Td 133.333333 Tz (* ) Tj 0.5 0 Td 133.333333 Tz (* ) Tj 10 0 0 10 0 1834 Tm 65.7 0 Td 133.333333 Tz (* ) Tj 10 0 0 10 0 1838 Tm 78.9 0 Td 133.333333 Tz (* ) Tj 10 0 0 10 0 1836 Tm 76.8 0 Td 133.333333 Tz (* ) Tj 0.4 0 Td 133.333333 Tz (* ) Tj 10 0 0 10 0 1844.25 Tm 86.8 0 Td 133.333333 Tz (* ) Tj 0.5 0 Td 133.333333 Tz (* ) Tj 0.3 0 Td 133.333333 Tz (* ) Tj 0.4 0 Td 133.333333 Tz (* ) Tj 10 0 0 10 0 1830 Tm 71.6 0 Td 133.333333 Tz (* ) Tj 10 0 0 10 0 1834 Tm 81.7 0 Td 133.333333 Tz (* ) Tj 10 0 0 10 0 1834 Tm 68.4 0 Td 133.333333 Tz (* ) Tj 0.5 0 Td 133.333333 Tz (* ) Tj 0.4 0 Td 133.333333 Tz (* ) Tj 10 0 0 10 0 1832.5 Tm 74.9 0 Td 133.333333 Tz (* ) Tj 0.4 0 Td 133.333333 Tz (* ) Tj 10 0 0 10 0 1822 Tm 64.5 0 Td 133.333333 Tz (* ) Tj 10 0 0 10 0 1828 Tm 77.7 0 Td 133.333333 Tz (* ) Tj 0.3 0 Td 133.333333 Tz (* ) Tj 10 0 0 10 0 1818 Tm 65.7 0 Td 133.333333 Tz (* ) Tj 10 0 0 10 0 1830 Tm 72.5 0 Td 133.333333 Tz (* ) Tj 0.3 0 Td 133.333333 Tz (* ) Tj 0.4 0 Td 133.333333 Tz (* ) Tj 0.5 0 Td 133.333333 Tz (* ) Tj 0.4 0 Td 133.333333 Tz (* ) Tj 10 0 0 10 0 1818 Tm 70.5 0 Td 133.333333 Tz (* ) Tj 10 0 0 10 0 1820.5 Tm 75.3 0 Td 133.333333 Tz (* ) Tj 0.3 0 Td 133.333333 Tz (* ) Tj 10 0 0 10 0 1822 Tm 80.5 0 Td 133.333333 Tz (* ) Tj 10 0 0 10 0 1818 Tm 78.4 0 Td 133.333333 Tz (* ) Tj 10 0 0 10 0 1819 Tm 84.9 0 Td 133.333333 Tz (* ) Tj 10 0 0 10 0 1814 Tm 71.6 0 Td 133.333333 Tz (* ) Tj 10 0 0 10 0 1818 Tm 83.3 0 Td 133.333333 Tz (* ) Tj 10 0 0 10 0 1818 Tm 68.4 0 Td 133.333333 Tz (* ) Tj 0.9 0 Td 133.333333 Tz (* ) Tj 10 0 0 10 0 1814 Tm 76.4 0 Td 133.333333 Tz (* ) Tj 10 0 0 10 0 1806 Tm 64.5 0 Td 133.333333 Tz (* ) Tj 10 0 0 10 0 1812 Tm 79.3 0 Td 133.333333 Tz (* ) Tj 0.3 0 Td 133.333333 Tz (* ) Tj 10 0 0 10 0 1814.2 Tm 72.5 0 Td 133.333333 Tz (* ) Tj 0.3 0 Td 133.333333 Tz (* ) Tj 0.4 0 Td 133.333333 Tz (* ) Tj 0.5 0 Td 133.333333 Tz (* ) Tj 0.4 0 Td 133.333333 Tz (* ) Tj 10 0 0 10 0 1807 Tm 83.7 0 Td 133.333333 Tz (* ) Tj 10 0 0 10 0 1802 Tm 65.7 0 Td 133.333333 Tz (* ) Tj 10 0 0 10 0 1798 Tm 71.6 0 Td 133.333333 Tz (* ) Tj 10 0 0 10 0 1800 Tm 68.1 0 Td 133.333333 Tz (* ) Tj 0.3 0 Td 133.333333 Tz (* ) Tj 0.4 0 Td 133.333333 Tz (* ) Tj 0.5 0 Td 133.333333 Tz (* ) Tj 10 0 0 10 0 1790 Tm 64.5 0 Td 133.333333 Tz (* ) Tj 10 0 0 10 0 1800.25 Tm 72.8 0 Td 133.333333 Tz (* ) Tj 0.4 0 Td 133.333333 Tz (* ) Tj 0.4 0 Td 133.333333 Tz (* ) Tj 0.5 0 Td 133.333333 Tz (* ) Tj 10 0 0 10 0 1802 Tm 81.2 0 Td 133.333333 Tz (* ) Tj 0.5 0 Td 133.333333 Tz (* ) Tj 0.4 0 Td 133.333333 Tz (* ) Tj 10 0 0 10 0 1799.666667 Tm 76.1 0 Td 133.333333 Tz (* ) Tj 0.4 0 Td 133.333333 Tz (* ) Tj 0.8 0 Td 133.333333 Tz (* ) Tj 10 0 0 10 0 1786 Tm 65.7 0 Td 133.333333 Tz (* ) Tj 10 0 0 10 0 1798.4 Tm 74.1 0 Td 133.333333 Tz (* ) Tj 0.4 0 Td 133.333333 Tz (* ) Tj 0.3 0 Td 133.333333 Tz (* ) Tj 0.5 0 Td 133.333333 Tz (* ) Tj 0.4 0 Td 133.333333 Tz (* ) Tj 10 0 0 10 0 1786 Tm 70.5 0 Td 133.333333 Tz (* ) Tj 10 0 0 10 0 1782 Tm 68.4 0 Td 133.333333 Tz (* ) Tj 10 0 0 10 0 1782 Tm 73.2 0 Td 133.333333 Tz (* ) Tj 10 0 0 10 0 1774 Tm 64.4 0 Td 133.333333 Tz (* ) Tj 10 0 0 10 0 1770 Tm 65.7 0 Td 133.333333 Tz (* ) Tj 10 0 0 10 0 1780 Tm 75.7 0 Td 133.333333 Tz (* ) Tj 0.4 0 Td 133.333333 Tz (* ) Tj 0.3 0 Td 133.333333 Tz (* ) Tj 0.5 0 Td 133.333333 Tz (* ) Tj 10 0 0 10 0 1770 Tm 73.7 0 Td 133.333333 Tz (* ) Tj 10 0 0 10 0 1770 Tm 71.6 0 Td 133.333333 Tz (* ) Tj 0.4 0 Td 133.333333 Tz (* ) Tj 0.4 0 Td 133.333333 Tz (* ) Tj 10 0 0 10 0 1768 Tm 68.1 0 Td 133.333333 Tz (* ) Tj 0.3 0 Td 133.333333 Tz (* ) Tj 0.4 0 Td 133.333333 Tz (* ) Tj 0.5 0 Td 133.333333 Tz (* ) Tj 10 0 0 10 0 1770 Tm 78.5 0 Td 133.333333 Tz (* ) Tj 10 0 0 10 0 1766 Tm 74.9 0 Td 133.333333 Tz (* ) Tj 10 0 0 10 0 1754 Tm 65.7 0 Td 133.333333 Tz (* ) Tj 10 0 0 10 0 1758 Tm 72.5 0 Td 133.333333 Tz (* ) Tj 10 0 0 10 0 1758 Tm 77.3 0 Td 133.333333 Tz (* ) Tj 10 0 0 10 0 1754.5 Tm 68.4 0 Td 133.333333 Tz (* ) Tj 0.9 0 Td 133.333333 Tz (* ) Tj 10 0 0 10 0 1754 Tm 73.7 0 Td 133.333333 Tz (* ) Tj 10 0 0 10 0 1750 Tm 71.6 0 Td 133.333333 Tz (* ) Tj 10 0 0 10 0 1752 Tm 69.7 0 Td 133.333333 Tz (* ) Tj 0.3 0 Td 133.333333 Tz (* ) Tj 0.4 0 Td 133.333333 Tz (* ) Tj 0.5 0 Td 133.333333 Tz (* ) Tj 10 0 0 10 0 1748 Tm 76.1 0 Td 133.333333 Tz (* ) Tj 0.3 0 Td 133.333333 Tz (* ) Tj 10 0 0 10 0 1734 Tm 70 0 Td 133.333333 Tz (* ) Tj 10 0 0 10 0 1734 Tm 74.9 0 Td 133.333333 Tz (* ) Tj 27.142857 0 0 27.142857 0 1731 Tm 26.894737 0 Td 116.666667 Tz (A ) Tj 10 0 0 10 0 1736 Tm 71.2 0 Td 133.333333 Tz (* ) Tj 0.4 0 Td 133.333333 Tz (* ) Tj 0.4 0 Td 133.333333 Tz (* ) Tj 0.5 0 Td 133.333333 Tz (* ) Tj 10 0 0 10 0 1716 Tm 74 0 Td 133.333333 Tz (* ) Tj 1.2 0 Td 133.333333 Tz (* ) Tj 10 0 0 10 0 1713.142857 Tm 71.2 0 Td 133.333333 Tz (* ) Tj 0.5 0 Td 133.333333 Tz (* ) Tj 0.7 0 Td 133.333333 Tz (* ) Tj 0.5 0 Td 133.333333 Tz (* ) Tj 0.3 0 Td 133.333333 Tz (* ) Tj 0.5 0 Td 133.333333 Tz (* ) Tj 0.3 0 Td 133.333333 Tz (* ) Tj 10 0 0 10 0 1698 Tm 72.8 0 Td 133.333333 Tz (* ) Tj 10 0 0 10 0 1691 Tm 72.1 0 Td 133.333333 Tz (* ) Tj 10 0 0 10 0 1734 Tm 111.7 0 Td 133.333333 Tz (* ) Tj 10 0 0 10 0 1726 Tm 64.4 0 Td 133.333333 Tz (* ) Tj 10 0 0 10 0 1723 Tm 91.2 0 Td 133.333333 Tz (* ) Tj 10 0 0 10 0 1724.5 Tm 96 0 Td 133.333333 Tz (* ) Tj 0.4 0 Td 133.333333 Tz (* ) Tj 10 0 0 10 0 1723 Tm 65.7 0 Td 133.333333 Tz (* ) Tj 10 0 0 10 0 1735 Tm 78 0 Td 133.333333 Tz (* ) Tj 10 0 0 10 0 1735 Tm 79.6 0 Td 133.333333 Tz (* ) Tj 10 0 0 10 0 1718.6 Tm 75.6 0 Td 133.333333 Tz (* ) Tj 0.5 0 Td 133.333333 Tz (* ) Tj 0.3 0 Td 133.333333 Tz (* ) Tj 0.4 0 Td 133.333333 Tz (* ) Tj 0.5 0 Td 133.333333 Tz (* ) Tj 10 0 0 10 0 1718.6 Tm 77.2 0 Td 133.333333 Tz (* ) Tj 0.5 0 Td 133.333333 Tz (* ) Tj 0.3 0 Td 133.333333 Tz (* ) Tj 0.4 0 Td 133.333333 Tz (* ) Tj 0.5 0 Td 133.333333 Tz (* ) Tj 10 0 0 10 0 1718.6 Tm 78.8 0 Td 133.333333 Tz (* ) Tj 0.5 0 Td 133.333333 Tz (* ) Tj 0.3 0 Td 133.333333 Tz (* ) Tj 0.4 0 Td 133.333333 Tz (* ) Tj 0.5 0 Td 133.333333 Tz (* ) Tj 10 0 0 10 0 1703 Tm 76.5 0 Td 133.333333 Tz (* ) Tj 10 0 0 10 0 1703 Tm 78.1 0 Td 133.333333 Tz (* ) Tj 10 0 0 10 0 1691 Tm 76.9 0 Td 133.333333 Tz (* ) Tj 1.428571 0 0 1.428571 0 1724 Tm 1136.1 0 Td 700 Tz (+ ) Tj 10 0 0 10 0 1722 Tm 67.3 0 Td 133.333333 Tz (* ) Tj 10 0 0 10 0 1710 Tm 94.8 0 Td 133.333333 Tz (* ) Tj 10 0 0 10 0 1707 Tm 96 0 Td 133.333333 Tz (* ) Tj 10 0 0 10 0 1710 Tm 66.1 0 Td 133.333333 Tz (* ) Tj 2.857143 0 0 2.857143 0 1710 Tm 642.25 0 Td 408.333333 Tz (+ ) Tj 10 0 0 10 0 1716.666667 Tm 109.3 0 Td 133.333333 Tz (* ) Tj 0.7 0 Td 133.333333 Tz (* ) Tj 0.5 0 Td 133.333333 Tz (* ) Tj 10 0 0 10 0 1703 Tm 74.9 0 Td 133.333333 Tz (* ) Tj 10 0 0 10 0 1704.333333 Tm 88.8 0 Td 133.333333 Tz (* ) Tj 0.4 0 Td 133.333333 Tz (* ) Tj 0.8 0 Td 133.333333 Tz (* ) Tj 1.428571 0 0 1.428571 0 1708 Tm 1136.1 0 Td 700 Tz (+ ) Tj 10 0 0 10 0 1703 Tm 84.5 0 Td 133.333333 Tz (* ) Tj 10 0 0 10 0 1702.8 Tm 80.4 0 Td 133.333333 Tz (* ) Tj 0.3 0 Td 133.333333 Tz (* ) Tj 0.5 0 Td 133.333333 Tz (* ) Tj 0.4 0 Td 133.333333 Tz (* ) Tj 0.4 0 Td 133.333333 Tz (* ) Tj 10 0 0 10 0 1702.8 Tm 82 0 Td 133.333333 Tz (* ) Tj 0.3 0 Td 133.333333 Tz (* ) Tj 0.5 0 Td 133.333333 Tz (* ) Tj 0.4 0 Td 133.333333 Tz (* ) Tj 0.4 0 Td 133.333333 Tz (* ) Tj 10 0 0 10 0 1691 Tm 83.3 0 Td 133.333333 Tz (* ) Tj 10 0 0 10 0 1686 Tm 81.1 0 Td 133.333333 Tz (* ) Tj 10 0 0 10 0 1679 Tm 82.1 0 Td 133.333333 Tz (* ) Tj 10 0 0 10 0 1698 Tm 93.6 0 Td 133.333333 Tz (* ) Tj 10 0 0 10 0 1704 Tm 68.4 0 Td 133.333333 Tz (* ) Tj 0.5 0 Td 133.333333 Tz (* ) Tj 10 0 0 10 0 1718 Tm 103.6 0 Td 133.333333 Tz (* ) Tj 10 0 0 10 0 1704.25 Tm 103.3 0 Td 133.333333 Tz (* ) Tj 0.4 0 Td 133.333333 Tz (* ) Tj 0.3 0 Td 133.333333 Tz (* ) Tj 0.4 0 Td 133.333333 Tz (* ) Tj 10 0 0 10 0 1703 Tm 108.5 0 Td 133.333333 Tz (* ) Tj 10 0 0 10 0 1691 Tm 73.7 0 Td 133.333333 Tz (* ) Tj 10 0 0 10 0 1691 Tm 75.3 0 Td 133.333333 Tz (* ) Tj 2.857143 0 0 2.857143 0 1694 Tm 642.25 0 Td 408.333333 Tz (+ ) Tj 10 0 0 10 0 1686 Tm 79.5 0 Td 133.333333 Tz (* ) Tj 10 0 0 10 0 1686 Tm 93.9 0 Td 133.333333 Tz (* ) Tj 10 0 0 10 0 1710 Tm 64.4 0 Td 133.333333 Tz (* ) Tj 10 0 0 10 0 1698 Tm 64.8 0 Td 133.333333 Tz (* ) Tj 10 0 0 10 0 1691 Tm 65.7 0 Td 133.333333 Tz (* ) Tj 10 0 0 10 0 1684 Tm 66.4 0 Td 133.333333 Tz (* ) Tj 0.4 0 Td 133.333333 Tz (* ) Tj 10 0 0 10 0 1690 Tm 100.8 0 Td 133.333333 Tz (* ) Tj 1.428571 0 0 1.428571 0 1691 Tm 1136.1 0 Td 700 Tz (+ ) Tj 10 0 0 10 0 1686 Tm 102.1 0 Td 133.333333 Tz (* ) Tj 10 0 0 10 0 1679 Tm 72.5 0 Td 133.333333 Tz (* ) Tj 10 0 0 10 0 1679 Tm 74.1 0 Td 133.333333 Tz (* ) Tj 10 0 0 10 0 1668.5 Tm 72.9 0 Td 133.333333 Tz (* ) Tj 0.3 0 Td 133.333333 Tz (* ) Tj 10 0 0 10 0 1668.5 Tm 74.5 0 Td 133.333333 Tz (* ) Tj 0.3 0 Td 133.333333 Tz (* ) Tj 10 0 0 10 0 1679 Tm 75.7 0 Td 133.333333 Tz (* ) Tj 10 0 0 10 0 1679 Tm 91.7 0 Td 133.333333 Tz (* ) Tj 10 0 0 10 0 1678 Tm 64.4 0 Td 133.333333 Tz (* ) Tj 10 0 0 10 0 1679 Tm 69.3 0 Td 133.333333 Tz (* ) Tj 10 0 0 10 0 1679 Tm 70.9 0 Td 133.333333 Tz (* ) Tj 10 0 0 10 0 1679 Tm 106.1 0 Td 133.333333 Tz (* ) Tj 1.428571 0 0 1.428571 0 1676 Tm 1136.1 0 Td 700 Tz (+ ) Tj 10 0 0 10 0 1668.5 Tm 71.3 0 Td 133.333333 Tz (* ) Tj 0.3 0 Td 133.333333 Tz (* ) Tj 10 0 0 10 0 1668.5 Tm 80.9 0 Td 133.333333 Tz (* ) Tj 0.3 0 Td 133.333333 Tz (* ) Tj 10 0 0 10 0 1667 Tm 68.1 0 Td 133.333333 Tz (* ) Tj 10 0 0 10 0 1658.5 Tm 76.4 0 Td 133.333333 Tz (* ) Tj 0.2 0 Td 133.333333 Tz (* ) Tj 0.2 0 Td 133.333333 Tz (* ) Tj 0.4 0 Td 133.333333 Tz (* ) Tj 10 0 0 10 0 1658.5 Tm 78 0 Td 133.333333 Tz (* ) Tj 0.2 0 Td 133.333333 Tz (* ) Tj 0.2 0 Td 133.333333 Tz (* ) Tj 0.4 0 Td 133.333333 Tz (* ) Tj 10 0 0 10 0 1669 Tm 85.2 0 Td 133.333333 Tz (* ) Tj 1.2 0 Td 133.333333 Tz (* ) Tj 10 0 0 10 0 1667 Tm 90.5 0 Td 133.333333 Tz (* ) Tj 10 0 0 10 0 1658.5 Tm 90.8 0 Td 133.333333 Tz (* ) Tj 0.2 0 Td 133.333333 Tz (* ) Tj 0.2 0 Td 133.333333 Tz (* ) Tj 0.4 0 Td 133.333333 Tz (* ) Tj 10 0 0 10 0 1667 Tm 104.9 0 Td 133.333333 Tz (* ) Tj 10 0 0 10 0 1918 Tm 118.9 0 Td 133.333333 Tz (* ) Tj 10 0 0 10 0 1894 Tm 116.5 0 Td 133.333333 Tz (* ) Tj 10 0 0 10 0 1878 Tm 114.9 0 Td 133.333333 Tz (* ) Tj 455.714286 0 0 455.714286 0 1660 Tm 2.078056 0 Td 38.888889 Tz (ALA ) Tj 12.857143 0 0 12.857143 0 1662 Tm 101.733333 0 Td 25.925926 Tz (. ) Tj 10 0 0 10 0 1655 Tm 84.4 0 Td 133.333333 Tz (* ) Tj 12.857143 0 0 12.857143 0 1662 Tm 107.955556 0 Td 25.925926 Tz (. ) Tj 12.857143 0 0 12.857143 0 1662 Tm 119.155556 0 Td 25.925926 Tz (. ) Tj 12.857143 0 0 12.857143 0 1662 Tm 130.355556 0 Td 25.925926 Tz (. ) Tj 12.857143 0 0 12.857143 0 1662 Tm 139.066667 0 Td 25.925926 Tz (. ) Tj 2.488889 0 Td 25.925926 Tz (. ) Tj 12.857143 0 0 12.857143 0 1654 Tm 102.588889 0 Td 226.224612 Tz (TTTTTTTTTTTTTTTTTTTTTTTTTTTTTTT ) Tj 12.857143 0 0 12.857143 0 1643 Tm 126.622222 0 Td 25.925926 Tz (+ ) Tj 12.857143 0 0 12.857143 0 1650 Tm 146.611111 0 Td 77.777778 Tz (1 ) Tj 18.571429 0 0 18.571429 0 1640 Tm 35.430769 0 Td 149.57265 Tz (AUT ) Tj 10 0 0 10 0 1643 Tm 79.2 0 Td 33.333333 Tz (. ) Tj 1.5 0 Td 33.333333 Tz (. ) Tj 10 0 0 10 0 1643.6 Tm 83.9 0 Td 33.333333 Tz (. ) Tj 2.9 0 Td 50 Tz (I ) Tj 15.714286 0 0 15.714286 0 1645 Tm 59.627273 0 Td 758.333333 Tz (TA ) Tj 17.142857 0 0 17.142857 0 1633 Tm 38.208333 0 Td 140.972222 Tz (ETTERETETTETTE ) Tj 17.142857 0 0 17.142857 0 1633 Tm 52.266667 0 Td 119.907407 Tz (ATT ) Tj 10 0 0 10 0 1656.5 Tm 97.2 0 Td 133.333333 Tz (* ) Tj 0.5 0 Td 133.333333 Tz (* ) Tj 10 0 0 10 0 1640 Tm 97.2 0 Td 133.333333 Tz (* ) Tj 0.4 0 Td 133.333333 Tz (* ) Tj 55.714286 0 0 55.714286 0 1265 Tm 29.453846 0 Td 70.797721 Tz (200 ) Tj 185.714286 0 0 185.714286 0 895.615385 Tm 4.926923 0 Td 6.232194 Tz (Accettaturettetett ) Tj 0.613846 0 Td 4.326923 Tz (titttttttttttttttttttttttttt ) Tj 11.428571 0 0 11.428571 0 804 Tm 91.6125 0 Td 102.083333 Tz (. ) Tj 10 0 0 10 0 763 Tm 96.5 0 Td 33.333333 Tz (* ) Tj 10 0 0 10 0 764 Tm 103 0 Td 33.333333 Tz (. ) Tj 10 0 0 10 0 764 Tm 104.5 0 Td 33.333333 Tz (. ) Tj 10 0 0 10 0 764 Tm 106.1 0 Td 33.333333 Tz (. ) Tj 10 0 0 10 0 764 Tm 107.6 0 Td 33.333333 Tz (. ) Tj 10 0 0 10 0 764 Tm 110.9 0 Td 33.333333 Tz (. ) Tj 10 0 0 10 0 764 Tm 112.5 0 Td 33.333333 Tz (. ) Tj 10 0 0 10 0 763 Tm 114 0 Td 33.333333 Tz (. ) Tj 10 0 0 10 0 763 Tm 115.6 0 Td 33.333333 Tz (. ) Tj 10 0 0 10 0 763 Tm 117.2 0 Td 33.333333 Tz (. ) Tj 10 0 0 10 0 763 Tm 122.1 0 Td 33.333333 Tz (. ) Tj 12.857143 0 0 12.857143 0 746 Tm 70.7 0 Td 25.925926 Tz (T ) Tj 0.622222 0 Td 25.925926 Tz (. ) Tj 17.142857 0 0 17.142857 0 746 Tm 52.15 0 Td 614.444444 Tz (TTTTT ) Tj 12.857143 0 0 12.857143 0 730 Tm 69.377778 0 Td 25.925926 Tz (T ) Tj 0.622222 0 Td 25.925926 Tz (. ) Tj 12.857143 0 0 12.857143 0 730 Tm 71.322222 0 Td 25.925926 Tz (. ) Tj 12.857143 0 0 12.857143 0 730 Tm 76.222222 0 Td 25.925926 Tz (. ) Tj 12.857143 0 0 12.857143 0 713 Tm 74.822222 0 Td 103.703704 Tz (IT ) Tj 1.477778 0 Td 25.925926 Tz (. ) Tj 12.857143 0 0 12.857143 0 714 Tm 76.766667 0 Td 350 Tz (TTTTT ) Tj 15.714286 0 0 15.714286 0 697 Tm 64.909091 0 Td 80.30303 Tz (TITITIT ) Tj 12.857143 0 0 12.857143 0 682 Tm 98.7 0 Td 25.925926 Tz (. ) Tj 12.857143 0 0 12.857143 0 660.5 Tm 74.666667 0 Td 116.666667 Tz (* ) Tj 0.233333 0 Td 116.666667 Tz (* ) Tj 10 0 0 10 0 652 Tm 104.6 0 Td 33.333333 Tz (, ) Tj 10 0 0 10 0 652 Tm 106.2 0 Td 33.333333 Tz (, ) Tj 10 0 0 10 0 652 Tm 107.8 0 Td 33.333333 Tz (, ) Tj 10 0 0 10 0 652 Tm 109.4 0 Td 33.333333 Tz (, ) Tj 10 0 0 10 0 652 Tm 111 0 Td 33.333333 Tz (, ) Tj 15.714286 0 0 15.714286 0 640 Tm 61.6 0 Td 123.737374 Tz (UGT ) Tj 12.857143 0 0 12.857143 0 635 Tm 67.977778 0 Td 77.777778 Tz (A ) Tj 138.571429 0 0 138.571429 0 636 Tm 6.971134 0 Td 39.690722 Tz (WOW ) Tj 10 0 0 10 0 620 Tm 102.9 0 Td 33.333333 Tz (. ) Tj 10 0 0 10 0 620 Tm 104.4 0 Td 33.333333 Tz (. ) Tj 0.1 0 Td 33.333333 Tz (. ) Tj 10 0 0 10 0 620 Tm 106.1 0 Td 33.333333 Tz (. ) Tj 10 0 0 10 0 620 Tm 107.7 0 Td 33.333333 Tz (. ) Tj 10 0 0 10 0 620 Tm 109.3 0 Td 33.333333 Tz (. ) Tj 10 0 0 10 0 620 Tm 110.9 0 Td 33.333333 Tz (. ) Tj 10 0 0 10 0 619 Tm 114 0 Td 33.333333 Tz (. ) Tj 10 0 0 10 0 619 Tm 115.7 0 Td 33.333333 Tz (. ) Tj 10 0 0 10 0 619 Tm 120.5 0 Td 33.333333 Tz (. ) Tj 2.857143 0 0 2.857143 0 563 Tm 349.3 0 Td 525 Tz (* ) Tj 12.857143 0 0 12.857143 0 538 Tm 100.022222 0 Td 25.925926 Tz (. ) Tj 0.233333 0 Td 25.925926 Tz (* ) Tj 12.857143 0 0 12.857143 0 538 Tm 82.444444 0 Td 25.925926 Tz (. ) Tj 2.488889 0 Td 25.925926 Tz (. ) Tj 1.244444 0 Td 25.925926 Tz (. ) Tj 1.322222 0 Td 25.925926 Tz (. ) Tj 2.411111 0 Td 25.925926 Tz (. ) Tj 1.244444 0 Td 25.925926 Tz (. ) Tj 1.322222 0 Td 25.925926 Tz (. ) Tj 1.166667 0 Td 25.925926 Tz (. ) Tj 2.488889 0 Td 25.925926 Tz (. ) Tj 1.244444 0 Td 25.925926 Tz (. ) Tj 1.322222 0 Td 25.925926 Tz (. ) Tj 10 0 0 10 0 530 Tm 102.2 0 Td 474.074074 Tz (TTTTTTTTT ) Tj 25.6 0 Td 33.333333 Tz (+ ) Tj 10 0 0 10 0 522.957447 Tm 107.7 0 Td 33.333333 Tz (* ) Tj 1 0 Td 250 Tz (444 ) Tj 10 0 0 10 0 524 Tm 124.2 0 Td 33.333333 Tz (' ) Tj 2.8 0 Td 33.333333 Tz (, ) Tj 107.142857 0 0 107.142857 0 336 Tm 11.312 0 Td 38.888889 Tz (FIG ) Tj 0.952 0 Td 34.222222 Tz (. ) Tj 0.28 0 Td 34.222222 Tz (2 ) Tj ET Q endstream endobj 100 0 obj << /Length 1 >> stream q endstream endobj 101 0 obj << /Length 1580 >> stream Q q 0.24 0 0 0.24 0 0 cm BT /F1 1 Tf 3 Tr 84.857143 0 0 84.857143 0 3027.857143 Tm 3.912458 0 Td 35.353535 Tz (U ) Tj 0.565657 0 Td 35.353535 Tz (. ) Tj 0.341751 0 Td 35.353535 Tz (S ) Tj 0.353535 0 Td 35.353535 Tz (. ) Tj 0.624579 0 Td 65.796857 Tz (Patent ) Tj 85.428571 0 0 85.428571 0 3023.68559 Tm 9.856187 0 Td 44.221479 Tz (Feb ) Tj 0.877926 0 Td 35.117057 Tz (. ) Tj 0.339465 0 Td 34.141583 Tz (26 ) Tj 0.550167 0 Td 35.117057 Tz (, ) Tj 0.327759 0 Td 43.896321 Tz (2019 ) Tj 85.357143 0 0 85.357143 0 3019.694581 Tm 14.632636 0 Td 48.033473 Tz (Sheet ) Tj 1.628452 0 Td 35.146444 Tz (2 ) Tj 0.468619 0 Td 42.956764 Tz (of ) Tj 0.644351 0 Td 35.146444 Tz (9 ) Tj 92.857143 0 0 92.857143 0 3023 Tm 18.932308 0 Td 63.717949 Tz (US ) Tj 1.130769 0 Td 32.307692 Tz (10 ) Tj 0.473846 0 Td 34.102564 Tz (, ) Tj 0.161538 0 Td 50.25641 Tz (215 ) Tj 0.893846 0 Td 34.102564 Tz (, ) Tj 0.161538 0 Td 55.042735 Tz (692 ) Tj 1.26 0 Td 53.846154 Tz (B2 ) Tj 54.285714 0 0 54.285714 0 2246 Tm 29.547368 0 Td 55.263158 Tz (100 ) Tj 51.428571 0 0 51.428571 0 1977 Tm 13.805556 0 Td 59.41358 Tz (112 ) Tj 60 0 0 60 0 1909 Tm 32.35 0 Td 54.62963 Tz (108 ) Tj 55.714286 0 0 55.714286 0 1865 Tm 35.646154 0 Td 55.840456 Tz (106 ) Tj 84.285714 0 0 84.285714 0 1727 Tm 23.254237 0 Td 38.888889 Tz (110 ) Tj 54.285714 0 0 54.285714 0 1619 Tm 9.007895 0 Td 58.333333 Tz (104 ) Tj 78.571429 0 0 78.571429 0 1343 Tm 6.452727 0 Td 44.545455 Tz (102 ) Tj 68.571429 0 0 68.571429 0 840 Tm 18.083333 0 Td 55.092593 Tz (FIG ) Tj 1.327083 0 Td 34.027778 Tz (. ) Tj 0.422917 0 Td 34.027778 Tz (3 ) Tj ET Q endstream endobj 102 0 obj << /Length 1 >> stream q endstream endobj 103 0 obj << /Length 5286 >> stream Q q 0.24 0 0 0.24 0 0 cm BT /F1 1 Tf 3 Tr 84.857143 0 0 84.857143 0 3027.857143 Tm 3.912458 0 Td 35.353535 Tz (U ) Tj 0.565657 0 Td 35.353535 Tz (. ) Tj 0.341751 0 Td 35.353535 Tz (S ) Tj 0.353535 0 Td 35.353535 Tz (. ) Tj 0.624579 0 Td 65.796857 Tz (Patent ) Tj 85.428571 0 0 85.428571 0 3023.68559 Tm 9.879599 0 Td 44.221479 Tz (Feb ) Tj 0.854515 0 Td 35.117057 Tz (. ) Tj 0.339465 0 Td 34.141583 Tz (26 ) Tj 0.550167 0 Td 35.117057 Tz (, ) Tj 0.327759 0 Td 43.896321 Tz (2019 ) Tj 85.357143 0 0 85.357143 0 3019.694581 Tm 14.632636 0 Td 48.033473 Tz (Sheet ) Tj 1.628452 0 Td 35.146444 Tz (3 ) Tj 0.468619 0 Td 42.956764 Tz (of ) Tj 0.644351 0 Td 35.146444 Tz (9 ) Tj 92.857143 0 0 92.857143 0 3023 Tm 18.932308 0 Td 63.717949 Tz (US ) Tj 1.130769 0 Td 32.307692 Tz (10 ) Tj 0.473846 0 Td 34.102564 Tz (, ) Tj 0.161538 0 Td 50.25641 Tz (215 ) Tj 0.893846 0 Td 34.102564 Tz (, ) Tj 0.161538 0 Td 55.042735 Tz (692 ) Tj 1.26 0 Td 53.846154 Tz (B2 ) Tj 52.857143 0 0 52.857143 0 2537 Tm 30.478378 0 Td 69.369369 Tz (400 ) Tj 64.285714 0 0 64.285714 0 2182 Tm 28.202222 0 Td 61.358025 Tz (402 ) Tj 67.142857 0 0 67.142857 0 2234.744186 Tm 10.17234 0 Td 54.334121 Tz (providing ) Tj 3.291489 0 Td 34.751773 Tz (a ) Tj 0.580851 0 Td 50.197006 Tz (structure ) Tj 3.082979 0 Td 59.078014 Tz (comprising ) Tj 3.902128 0 Td 34.751773 Tz (a ) Tj 70 0 0 70 0 2174.211937 Tm 9.8 0 Td 52.910053 Tz (substrate ) Tj 2.971429 0 Td 33.333333 Tz (, ) Tj 0.385714 0 Td 52.380952 Tz (an ) Tj 0.971429 0 Td 48.809524 Tz (insulating ) Tj 3.214286 0 Td 52.380952 Tz (layer ) Tj 1.757143 0 Td 58.035714 Tz (disposed ) Tj 2.985714 0 Td 63.095238 Tz (on ) Tj 68.571429 0 0 68.571429 0 2109.441923 Tm 10.047917 0 Td 49.421296 Tz (the ) Tj 1.239583 0 Td 52.121914 Tz (substrate ) Tj 2.945833 0 Td 34.027778 Tz (, ) Tj 0.35 0 Td 65.625 Tz (and ) Tj 1.472917 0 Td 34.027778 Tz (a ) Tj 0.670833 0 Td 39.375 Tz (first ) Tj 1.108333 0 Td 59.852431 Tz (material ) Tj 2.989583 0 Td 52.5 Tz (layer ) Tj 80 0 0 80 0 2055.993631 Tm 8.525 0 Td 51.5625 Tz (disposed ) Tj 2.7625 0 Td 43.75 Tz (on ) Tj 0.9 0 Td 43.75 Tz (the ) Tj 0.9375 0 Td 44.166667 Tz (insulating ) Tj 2.8 0 Td 47.083333 Tz (layer ) Tj 52.857143 0 0 52.857143 0 1810 Tm 34.262162 0 Td 71.471471 Tz (404 ) Tj 81.428571 0 0 81.428571 0 1834.428169 Tm 8.424561 0 Td 45.321637 Tz (etching ) Tj 2.149123 0 Td 44.346979 Tz (the ) Tj 1.068421 0 Td 35.204678 Tz (first ) Tj 0.970175 0 Td 49.378655 Tz (material ) Tj 2.529825 0 Td 43.80117 Tz (layer ) Tj 1.547368 0 Td 22.51462 Tz (to ) Tj 0.601754 0 Td 44.346979 Tz (fom ) Tj 1.461404 0 Td 34.795322 Tz (a ) Tj 84.285714 0 0 84.285714 0 1776.160194 Tm 8.091525 0 Td 52.510986 Tz (waveguide ) Tj 3.061017 0 Td 44.985876 Tz (core ) Tj 1.328814 0 Td 43.502825 Tz (of ) Tj 0.676271 0 Td 39.548023 Tz (the ) Tj 0.937288 0 Td 42.372881 Tz (optical ) Tj 1.827119 0 Td 52.730697 Tz (waveguide ) Tj 70 0 0 70 0 1712 Tm 9.785714 0 Td 48.677249 Tz (structure ) Tj 55.714286 0 0 55.714286 0 1485 Tm 32.487179 0 Td 65.811966 Tz (406 ) Tj 70 0 0 70 0 1455.776471 Tm 9.785714 0 Td 55.291005 Tz (disposing ) Tj 3.257143 0 Td 33.333333 Tz (a ) Tj 0.585714 0 Td 61.507937 Tz (second ) Tj 2.342857 0 Td 58.333333 Tz (material ) Tj 2.9 0 Td 53.333333 Tz (layer ) Tj 1.657143 0 Td 60.714286 Tz (over ) Tj 1.728571 0 Td 49.206349 Tz (the ) Tj 70 0 0 70 0 1397.363636 Tm 9.671429 0 Td 64.285714 Tz (waveguide ) Tj 3.728571 0 Td 51.785714 Tz (core ) Tj 61.428571 0 0 61.428571 0 1084 Tm 29.513953 0 Td 59.689922 Tz (408 ) Tj 70 0 0 70 0 1142.462516 Tm 9.785714 0 Td 59.821429 Tz (removing ) Tj 3.157143 0 Td 33.333333 Tz (a ) Tj 0.585714 0 Td 48.979592 Tz (portion ) Tj 2.385714 0 Td 52.380952 Tz (of ) Tj 0.857143 0 Td 50 Tz (the ) Tj 1.085714 0 Td 50.238095 Tz (insulating ) Tj 3.228571 0 Td 52.380952 Tz (layer ) Tj 74.285714 0 0 74.285714 0 1076.707521 Tm 9.221154 0 Td 58.782051 Tz (under ) Tj 1.965385 0 Td 44.871795 Tz (the ) Tj 0.982692 0 Td 60.327635 Tz (waveguide ) Tj 3.513462 0 Td 48.237179 Tz (core ) Tj 1.507692 0 Td 32.532051 Tz (to ) Tj 0.807692 0 Td 39.262821 Tz (form ) Tj 1.440385 0 Td 53.846154 Tz (an ) Tj 0.915385 0 Td 38.888889 Tz (air ) Tj 75.714286 0 0 75.714286 0 1016.448799 Tm 9.086792 0 Td 45.676101 Tz (slot ) Tj 1.241509 0 Td 43.081761 Tz (therein ) Tj 2.15283 0 Td 55.031447 Tz (and ) Tj 1.320755 0 Td 33.018868 Tz (to ) Tj 0.660377 0 Td 49.685535 Tz (release ) Tj 2.456604 0 Td 44.025157 Tz (the ) Tj 0.871698 0 Td 60.656883 Tz (waveguide ) Tj 78.571429 0 0 78.571429 0 954.824713 Tm 8.705455 0 Td 47.727273 Tz (core ) Tj 1.4 0 Td 51.969697 Tz (such ) Tj 1.616364 0 Td 42.954545 Tz (that ) Tj 1.158182 0 Td 50.20202 Tz (the ) Tj 1.018182 0 Td 57.037037 Tz (waveguide ) Tj 3.270909 0 Td 49.318182 Tz (core ) Tj 1.489091 0 Td 22.272727 Tz (is ) Tj 70 0 0 70 0 897.667513 Tm 9.8 0 Td 62.169312 Tz (suspended ) Tj 3.7 0 Td 55.357143 Tz (over ) Tj 1.6 0 Td 49.206349 Tz (the ) Tj 1.228571 0 Td 38.888889 Tz (air ) Tj 0.885714 0 Td 50.595238 Tz (slot ) Tj 1.3 0 Td 64.285714 Tz (by ) Tj 1.1 0 Td 44.444444 Tz (the ) Tj 1.1 0 Td 61.111111 Tz (second ) Tj 71.428571 0 0 71.428571 0 837.554817 Tm 9.478 0 Td 56.583333 Tz (material ) Tj 2.828 0 Td 49.933333 Tz (layer ) Tj 74.285714 0 0 74.285714 0 600 Tm 15.575 0 Td 55.34188 Tz (FIG ) Tj 1.346154 0 Td 33.653846 Tz (. ) Tj 0.484615 0 Td 33.653846 Tz (4 ) Tj ET Q endstream endobj 104 0 obj << /Length 1 >> stream q endstream endobj 105 0 obj << /Length 34709 >> stream Q q 0.24 0 0 0.24 0 0 cm BT /F1 1 Tf 3 Tr 84.857143 0 0 84.857143 0 3027.857143 Tm 3.912458 0 Td 35.353535 Tz (U ) Tj 0.565657 0 Td 35.353535 Tz (. ) Tj 0.341751 0 Td 35.353535 Tz (S ) Tj 0.353535 0 Td 35.353535 Tz (. ) Tj 0.624579 0 Td 65.796857 Tz (Patent ) Tj 85.428571 0 0 85.428571 0 3023.68559 Tm 9.879599 0 Td 44.221479 Tz (Feb ) Tj 0.854515 0 Td 35.117057 Tz (. ) Tj 0.339465 0 Td 34.141583 Tz (26 ) Tj 0.550167 0 Td 35.117057 Tz (, ) Tj 0.327759 0 Td 43.896321 Tz (2019 ) Tj 85.357143 0 0 85.357143 0 3019.694581 Tm 14.632636 0 Td 48.033473 Tz (Sheet ) Tj 1.569874 0 Td 35.146444 Tz (4 ) Tj 0.527197 0 Td 42.956764 Tz (of ) Tj 0.644351 0 Td 35.146444 Tz (9 ) Tj 105.918367 0 0 105.918367 0 3018.730159 Tm 16.597688 0 Td 53.500321 Tz (US ) Tj 0.953565 0 Td 33.044316 Tz (10 ) Tj 0.472062 0 Td 34.617855 Tz (, ) Tj 0.094412 0 Td 44.059088 Tz (215 ) Tj 0.868593 0 Td 34.617855 Tz (, ) Tj 0.122736 0 Td 44.059088 Tz (692 ) Tj 1.095183 0 Td 44.059088 Tz (B2 ) Tj 4.285714 0 0 4.285714 0 2553 Tm 383.366667 0 Td 388.888889 Tz (. ) Tj 0 0 Td 388.888889 Tz (. ) Tj 2.857143 0 0 2.857143 0 2537.5 Tm 582.05 0 Td 525 Tz (. ) Tj 0.35 0 Td 525 Tz (. ) Tj 4.285714 0 0 4.285714 0 2530 Tm 255.733333 0 Td 350 Tz (. ) Tj 4.285714 0 0 4.285714 0 2528 Tm 383.366667 0 Td 388.888889 Tz (. ) Tj 4.285714 0 0 4.285714 0 2520 Tm 255.5 0 Td 350 Tz (. ) Tj 61.428571 0 0 61.428571 0 2490 Tm 6.64186 0 Td 55.167959 Tz (108 ) Tj 4.285714 0 0 4.285714 0 2509 Tm 255.266667 0 Td 350 Tz (. ) Tj 145.714286 0 0 145.714286 0 2413 Tm 10.390196 0 Td 13.217139 Tz (wwwwwwwww ) Tj 15.714286 0 0 15.714286 0 2495 Tm 50.590909 0 Td 106.060606 Tz (. ) Tj 11.428571 0 0 11.428571 0 2500 Tm 77.2625 0 Td 116.666667 Tz (. ) Tj 15.714286 0 0 15.714286 0 2495 Tm 67.518182 0 Td 84.848485 Tz (. ) Tj 14.285714 0 0 14.285714 0 2494 Tm 71.05 0 Td 105 Tz (+ ) Tj 15.714286 0 0 15.714286 0 2490 Tm 52.690909 0 Td 106.060606 Tz (. ) Tj 90 0 0 90 0 2403.229008 Tm 14.844444 0 Td 17.340067 Tz (wwwwwwwwwww ) Tj 1.166667 0 Td 12.962963 Tz (till ) Tj 68.571429 0 0 68.571429 0 2468 Tm 28.204167 0 Td 94.184028 Tz (V104 ) Tj 14.285714 0 0 14.285714 0 2474 Tm 116.06 0 Td 93.333333 Tz (. ) Tj 30 0 0 30 0 2450 Tm 34.4 0 Td 38.888889 Tz (www ) Tj 50 0 0 50 0 2433 Tm 8.18 0 Td 61.111111 Tz (104 ) Tj 14.285714 0 0 14.285714 0 2439 Tm 70.91 0 Td 116.666667 Tz (M ) Tj 30 0 0 30 0 2418.097561 Tm 43.8 0 Td 57.407407 Tz (www ) Tj 1.233333 0 Td 55.555556 Tz (. ) Tj 14.285714 0 0 14.285714 0 2433 Tm 74.2 0 Td 116.666667 Tz (. ) Tj 14.285714 0 0 14.285714 0 2419 Tm 133.7 0 Td 128.333333 Tz (w ) Tj 190 0 0 190 0 2348 Tm 2.968421 0 Td 2.046784 Tz (IT1112222 ) Tj 15.714286 0 0 15.714286 0 2411 Tm 56 0 Td 106.060606 Tz (. ) Tj 28.571429 0 0 28.571429 0 2404 Tm 32.2 0 Td 40.833333 Tz (www ) Tj 14.285714 0 0 14.285714 0 2413 Tm 70.21 0 Td 105 Tz (. ) Tj 12.857143 0 0 12.857143 0 2409 Tm 123.044444 0 Td 116.666667 Tz (w ) Tj 14.285714 0 0 14.285714 0 2398 Tm 110.88 0 Td 116.666667 Tz (3 ) Tj 14.285714 0 0 14.285714 0 2401.333333 Tm 117.6 0 Td 46.666667 Tz (* ) Tj -0.63 0 Td 46.666667 Tz (* ) Tj -0.77 0 Td 46.666667 Tz (* ) Tj 10 0 0 10 0 2386 Tm 189.9 0 Td 116.666667 Tz (S ) Tj 31.428571 0 0 31.428571 0 2375 Tm 15.527273 0 Td 461.363636 Tz (Art ) Tj 21.428571 0 0 21.428571 0 2378 Tm 34.626667 0 Td 277.407407 Tz (TICKETEERSTE ) Tj 284.285714 0 0 284.285714 0 2193 Tm 3.204523 0 Td 5.667225 Tz (liitti131333333333333 ) Tj 31.428571 0 0 31.428571 0 2365 Tm 36.336364 0 Td 58.333333 Tz (33 ) Tj 22.857143 0 0 22.857143 0 2372 Tm 57.26875 0 Td 32.8125 Tz (XX ) Tj 12.857143 0 0 12.857143 0 2367 Tm 40.911111 0 Td 424.074074 Tz (Terrari ) Tj 18.571429 0 0 18.571429 0 2360 Tm 34.730769 0 Td 378.044872 Tz (TTTTTTTT ) Tj 25.714286 0 0 25.714286 0 2357 Tm 54.25 0 Td 55.092593 Tz (it ) Tj 10 0 0 10 0 2358 Tm 47.7 0 Td 283.333333 Tz (T ) Tj 137.142857 0 0 137.142857 0 2311 Tm 7.175 0 Td 5.31684 Tz (12212222 ) Tj 77.142857 0 0 77.142857 0 2336 Tm 14.557407 0 Td 4.320988 Tz (LILIT ) Tj 41.428571 0 0 41.428571 0 2352 Tm 37.027586 0 Td 50.287356 Tz (WA ) Tj 45.714286 0 0 45.714286 0 2342 Tm 38.696875 0 Td 10.026042 Tz (1922 ) Tj 41.428571 0 0 41.428571 0 2333 Tm 45.403448 0 Td 22.126437 Tz (wwwwww ) Tj 14.285714 0 0 14.285714 0 2328 Tm 113.82 0 Td 135 Tz (ATTENTE ) Tj 21.428571 0 0 21.428571 0 2320 Tm 25.62 0 Td 42.777778 Tz (22 ) Tj 61.428571 0 0 61.428571 0 2310 Tm 23.344186 0 Td 18.992248 Tz (LIVE ) Tj 161.428571 0 0 161.428571 0 2285 Tm 10.314159 0 Td 0.953029 Tz (2112212222222 ) Tj 14.285714 0 0 14.285714 0 2316 Tm 75.74 0 Td 64.166667 Tz (irri ) Tj 21.428571 0 0 21.428571 0 2324 Tm 92.166667 0 Td 120.555556 Tz (Se ) Tj 54.285714 0 0 54.285714 0 2309 Tm 21.276316 0 Td 22.719298 Tz (33321 ) Tj 201.428571 0 0 201.428571 0 2233 Tm 3.003546 0 Td 2.364066 Tz (2224111 ) Tj 60 0 0 60 0 2301 Tm 20.066667 0 Td 17.592593 Tz (777 ) Tj 128.571429 0 0 128.571429 0 2294 Tm 13.377778 0 Td 2.916667 Tz (TILL ) Tj 95.714286 0 0 95.714286 0 2277 Tm 10.771642 0 Td 8.208955 Tz (3227223 ) Tj 102.857143 0 0 102.857143 0 2309 Tm 13.047222 0 Td 2.700617 Tz (222222 ) Tj 88.571429 0 0 88.571429 0 2258 Tm 15.298387 0 Td 5.017921 Tz (IRL ) Tj 94.285714 0 0 94.285714 0 2255 Tm 15.442424 0 Td 199.747475 Tz (ET ) Tj 52.857143 0 0 52.857143 0 2303 Tm 38.575676 0 Td 55.705706 Tz (102 ) Tj 174.285714 0 0 174.285714 0 2270 Tm 7.814754 0 Td 4.223588 Tz (222222222222 ) Tj 14.285714 0 0 14.285714 0 2305 Tm 78.61 0 Td 93.333333 Tz (w ) Tj 30 0 0 30 0 2341 Tm 38.966667 0 Td 16.666667 Tz (222 ) Tj 347.142857 0 0 347.142857 0 2179 Tm 3.341564 0 Td 1.097394 Tz (L2L2112 ) Tj 25.714286 0 0 25.714286 0 2210.842105 Tm 45.538889 0 Td 58.333333 Tz (2 ) Tj 0.038889 0 Td 12.962963 Tz (22222 ) Tj 61.428571 0 0 61.428571 0 2259 Tm 6.706977 0 Td 49.741602 Tz (102 ) Tj 90 0 0 90 0 2338 Tm 14.977778 0 Td 9.259259 Tz (1272 ) Tj 274.285714 0 0 274.285714 0 2205 Tm 4.958333 0 Td 1.605903 Tz (22222222222222 ) Tj 64.285714 0 0 64.285714 0 2261 Tm 21.217778 0 Td 9.851852 Tz (22222 ) Tj 124.285714 0 0 124.285714 0 2256 Tm 10.564368 0 Td 21.00894 Tz (hhh ) Tj 170 0 0 170 0 2236 Tm 4.388235 0 Td 6.862745 Tz (137312322333 ) Tj 304.285714 0 0 304.285714 0 2182 Tm 2.116432 0 Td 2.762469 Tz (21213323333333333333333 ) Tj 90 0 0 90 0 2235 Tm 19.444444 0 Td 90.277778 Tz (TEST ) Tj 288.571429 0 0 288.571429 0 2180 Tm 3.479208 0 Td 1.191213 Tz (2222222222222227 ) Tj 132.857143 0 0 132.857143 0 2280 Tm 4.034409 0 Td 48.506571 Tz (WWW ) Tj 75.714286 0 0 75.714286 0 2280 Tm 9.496226 0 Td 118.867925 Tz (NA ) Tj 15.714286 0 0 15.714286 0 2280 Tm 50.654545 0 Td 53.030303 Tz (ir ) Tj 45.714286 0 0 45.714286 0 2272 Tm 11.6375 0 Td 247.1875 Tz (Errer ) Tj 15.714286 0 0 15.714286 0 2277 Tm 71.209091 0 Td 111.363636 Tz (re ) Tj 65.714286 0 0 65.714286 0 2260 Tm 20.878261 0 Td 43.115942 Tz (WW ) Tj 75.714286 0 0 75.714286 0 2310 Tm 18.95283 0 Td 6.603774 Tz (221222211 ) Tj 191.428571 0 0 191.428571 0 2212 Tm 7.491045 0 Td 3.109453 Tz (21222223222211 ) Tj 152.857143 0 0 152.857143 0 2242 Tm 11.801869 0 Td 4.906542 Tz (LLLLLLLL ) Tj 250 0 0 250 0 2193 Tm 6.276 0 Td 3.333333 Tz (1122122712231 ) Tj 30 0 0 30 0 2247 Tm 45.433333 0 Td 329.62963 Tz (FEE ) Tj 387.142857 0 0 387.142857 0 2158 Tm 4.45572 0 Td 31.211562 Tz (WA ) Tj 104.285714 0 0 104.285714 0 2226 Tm 13.376712 0 Td 29.299848 Tz (WWW ) Tj 10 0 0 10 0 2255 Tm 147 0 Td 854.166667 Tz (Trii ) Tj 34.285714 0 0 34.285714 0 2259 Tm 43.720833 0 Td 70.486111 Tz (WA ) Tj 30 0 0 30 0 2243 Tm 18.9 0 Td 160 Tz (firar ) Tj 15.714286 0 0 15.714286 0 2235 Tm 42.636364 0 Td 116.666667 Tz (fr ) Tj 10 0 0 10 0 2248 Tm 85.4 0 Td 33.333333 Tz (R ) Tj 58.571429 0 0 58.571429 0 2235 Tm 24.346341 0 Td 36.04336 Tz (WWW ) Tj 10 0 0 10 0 2249 Tm 89 0 Td 33.333333 Tz (. ) Tj 162.857143 0 0 162.857143 0 2250 Tm 8.694737 0 Td 6.708902 Tz (wwwwwwwwwwwwwwwwww ) Tj 227.142857 0 0 227.142857 0 2176 Tm 7.312579 0 Td 35.220126 Tz (WW ) Tj 175.714286 0 0 175.714286 0 2198 Tm 11.114634 0 Td 7.904246 Tz (NEW ) Tj 14.285714 0 0 14.285714 0 2236 Tm 83.44 0 Td 75.833333 Tz (fr ) Tj 280 0 0 280 0 2174 Tm 5.957143 0 Td 6.415344 Tz (wwwwwwwwwwwwwwwwww ) Tj 174.285714 0 0 174.285714 0 2262 Tm 10.195902 0 Td 10.432191 Tz (wwwwwwwwwww ) Tj 22.857143 0 0 22.857143 0 2234 Tm 35.7 0 Td 179.861111 Tz (For ) Tj 10 0 0 10 0 2231 Tm 137.6 0 Td 33.333333 Tz (F ) Tj 114.285714 0 0 114.285714 0 2195 Tm 16.58125 0 Td 2.1875 Tz (LLLLLL ) Tj 14.285714 0 0 14.285714 0 2221 Tm 125.51 0 Td 108.888889 Tz (PER ) Tj 14.285714 0 0 14.285714 0 2218 Tm 49.77 0 Td 77.777778 Tz (FEN ) Tj 102.857143 0 0 102.857143 0 2184 Tm 14.729167 0 Td 9.027778 Tz (1233272 ) Tj 12.857143 0 0 12.857143 0 2212 Tm 65.177778 0 Td 64.814815 Tz (w ) Tj 11.428571 0 0 11.428571 0 2215 Tm 173.775 0 Td 102.083333 Tz (T ) Tj 15.714286 0 0 15.714286 0 2201 Tm 37.354545 0 Td 58.333333 Tz (22 ) Tj 17.142857 0 0 17.142857 0 2205 Tm 107.625 0 Td 141.944444 Tz (rrrrr ) Tj 10 0 0 10 0 2201 Tm 134.5 0 Td 150 Tz (2 ) Tj 50 0 0 50 0 2195 Tm 17.56 0 Td 199.166667 Tz (RATE ) Tj 55.714286 0 0 55.714286 0 2186 Tm 15.579487 0 Td 240.064103 Tz (ifra ) Tj 68.571429 0 0 68.571429 0 2186 Tm 22.852083 0 Td 42.534722 Tz (13 ) Tj 32.857143 0 0 32.857143 0 2180 Tm 28.365217 0 Td 289.130435 Tz (HEEFT ) Tj 72.857143 0 0 72.857143 0 2177 Tm 22.029412 0 Td 6.862745 Tz (11122 ) Tj 295.714286 0 0 295.714286 0 2192 Tm 5.055556 0 Td 13.150832 Tz (wwwwwwwww ) Tj 47.142857 0 0 47.142857 0 2181 Tm 25.178788 0 Td 24.747475 Tz (wwwww ) Tj 207.142857 0 0 207.142857 0 2182 Tm 6.517241 0 Td 13.517241 Tz (MUNAMAMMAN ) Tj 77.142857 0 0 77.142857 0 2171 Tm 6.3 0 Td 353.240741 Tz (ri ) Tj 12.857143 0 0 12.857143 0 2170 Tm 104.611111 0 Td 58.333333 Tz (22 ) Tj 10 0 0 10 0 2165 Tm 131.2 0 Td 150 Tz (. ) Tj 151.428571 0 0 151.428571 0 2169 Tm 11.2 0 Td 25.534591 Tz (ANANA ) Tj 174.285714 0 0 174.285714 0 2146 Tm 9.656557 0 Td 78.415301 Tz (WA ) Tj 61.428571 0 0 61.428571 0 2116 Tm 12.730233 0 Td 72.351421 Tz (SOI ) Tj 1.318605 0 Td 57.51938 Tz (wafer ) Tj 67.142857 0 0 67.142857 0 2110.718929 Tm 20.225532 0 Td 60.953507 Tz (Waveguide ) Tj 3.485106 0 Td 47.163121 Tz (etching ) Tj 2.174468 0 Td 55.437352 Tz (and ) Tj 1.176596 0 Td 42.198582 Tz (polish ) Tj 70 0 0 70 0 2020 Tm 11.171429 0 Td 49.206349 Tz (FIG ) Tj 1.185714 0 Td 33.333333 Tz (. ) Tj 0.342857 0 Td 65.47619 Tz (5A ) Tj 67.142857 0 0 67.142857 0 2022 Tm 23.651064 0 Td 48.817967 Tz (FIG ) Tj 1.251064 0 Td 34.751773 Tz (. ) Tj 0.282979 0 Td 63.297872 Tz (5B ) Tj 72.857143 0 0 72.857143 0 1897 Tm 12.860784 0 Td 42.701525 Tz (105 ) Tj 75 0 0 75 0 1885.683333 Tm 18.36 0 Td 45.925926 Tz (130 ) Tj 1.173333 0 Td 42.962963 Tz (105 ) Tj 54.285714 0 0 54.285714 0 1860 Tm 10.978947 0 Td 60.380117 Tz (504 ) Tj 54.285714 0 0 54.285714 0 1860 Tm 13.023684 0 Td 55.263158 Tz (108 ) Tj 62.857143 0 0 62.857143 0 1852 Tm 30.863636 0 Td 60.984848 Tz (OIL ) Tj 58.571429 0 0 58.571429 0 1814 Tm 34.829268 0 Td 50.271003 Tz (130 ) Tj 15.714286 0 0 15.714286 0 1789 Tm 34.363636 0 Td 31.818182 Tz (* ) Tj 15.714286 0 0 15.714286 0 1788 Tm 36.590909 0 Td 31.818182 Tz (* ) Tj 12.857143 0 0 12.857143 0 1790 Tm 65.877778 0 Td 25.925926 Tz (. ) Tj -0.155556 0 Td 25.925926 Tz (. ) Tj -0.233333 0 Td 25.925926 Tz (. ) Tj 12.857143 0 0 12.857143 0 1790 Tm 66.577778 0 Td 25.925926 Tz (. ) Tj 12.857143 0 0 12.857143 0 1789 Tm 68.911111 0 Td 25.925926 Tz (. ) Tj -0.155556 0 Td 38.888889 Tz (. ) Tj -0.233333 0 Td 25.925926 Tz (. ) Tj -0.155556 0 Td 25.925926 Tz (. ) Tj -0.233333 0 Td 25.925926 Tz (. ) Tj 12.857143 0 0 12.857143 0 1788 Tm 70.544444 0 Td 25.925926 Tz (. ) Tj 14.285714 0 0 14.285714 0 1788 Tm 91.42 0 Td 334.444444 Tz (WWW ) Tj 15.714286 0 0 15.714286 0 1778 Tm 58.290909 0 Td 106.060606 Tz (. ) Tj 30 0 0 30 0 1766 Tm 42.6 0 Td 452.777778 Tz (13 ) Tj 15.714286 0 0 15.714286 0 1780 Tm 84.827273 0 Td 31.818182 Tz (* ) Tj 0.7 0 Td 31.818182 Tz (* ) Tj 2.354545 0 Td 31.818182 Tz (/ ) Tj 12.857143 0 0 12.857143 0 1781 Tm 119.855556 0 Td 64.814815 Tz (* ) Tj 0.466667 0 Td 64.814815 Tz (* ) Tj 17.142857 0 0 17.142857 0 1771 Tm 102.316667 0 Td 29.166667 Tz (* ) Tj -1.75 0 Td 87.5 Tz (TII ) Tj 17.142857 0 0 17.142857 0 1771 Tm 104.183333 0 Td 29.166667 Tz (* ) Tj 32.857143 0 0 32.857143 0 1753 Tm 24.743478 0 Td 40.57971 Tz (www ) Tj 72.857143 0 0 72.857143 0 1717 Tm 7.343137 0 Td 41.938998 Tz (www ) Tj 51.428571 0 0 51.428571 0 1716 Tm 10.461111 0 Td 41.049383 Tz (AAN ) Tj 34.285714 0 0 34.285714 0 1758.87234 Tm 17.208333 0 Td 48.611111 Tz (w ) Tj -1.079167 0 Td 25.694444 Tz (wwwwwww ) Tj 44.285714 0 0 44.285714 0 1738 Tm 19.396774 0 Td 60.215054 Tz (ww ) Tj 55.714286 0 0 55.714286 0 1732 Tm 27.497436 0 Td 40.883191 Tz (www ) Tj 24.285714 0 0 24.285714 0 1753 Tm 77.082353 0 Td 345.424837 Tz (MAL ) Tj 34.285714 0 0 34.285714 0 1740 Tm 22.4875 0 Td 102.083333 Tz (W ) Tj 14.285714 0 0 14.285714 0 1744.4 Tm 65.31 0 Td 105 Tz (. ) Tj 0.28 0 Td 105 Tz (. ) Tj 0.42 0 Td 105 Tz (. ) Tj 0.21 0 Td 105 Tz (. ) Tj 0.07 0 Td 105 Tz (. ) Tj 15.714286 0 0 15.714286 0 1752 Tm 83.681818 0 Td 127.272727 Tz (w ) Tj 97.142857 0 0 97.142857 0 1698 Tm 13.701471 0 Td 10.762032 Tz (wwwwwwwwwww ) Tj 32.857143 0 0 32.857143 0 1701 Tm 41.23913 0 Td 58.333333 Tz (ww ) Tj 27.142857 0 0 27.142857 0 1727 Tm 35.7 0 Td 40.935673 Tz (www ) Tj 67.142857 0 0 67.142857 0 1707 Tm 6.121277 0 Td 47.990544 Tz (104 ) Tj 121.428571 0 0 121.428571 0 1713 Tm 6.365882 0 Td 19.215686 Tz (wwwwww ) Tj 38.571429 0 0 38.571429 0 1729 Tm 29.114815 0 Td 28.08642 Tz (wwww ) Tj 21.428571 0 0 21.428571 0 1728 Tm 87.873333 0 Td 77.777778 Tz (CA ) Tj 78.571429 0 0 78.571429 0 1699 Tm 9.901818 0 Td 10.413223 Tz (wwwwwwwwwww ) Tj 18.571429 0 0 18.571429 0 1713 Tm 33.653846 0 Td 58.333333 Tz (ww ) Tj 68.571429 0 0 68.571429 0 1708 Tm 28.525 0 Td 34.027778 Tz (W ) Tj 0.845833 0 Td 34.027778 Tz (- ) Tj 0.364583 0 Td 43.75 Tz (104 ) Tj 35.714286 0 0 35.714286 0 1699 Tm 28.868 0 Td 40.444444 Tz (www ) Tj 60.714286 0 0 60.714286 0 1700.277108 Tm 31.524706 0 Td 66.797386 Tz (www ) Tj 1.12 0 Td 27.45098 Tz (. ) Tj 32.857143 0 0 32.857143 0 1684 Tm 30.221739 0 Td 58.333333 Tz (Al ) Tj 37.142857 0 0 37.142857 0 1695 Tm 35.457692 0 Td 38.888889 Tz (www ) Tj 12.857143 0 0 12.857143 0 1700 Tm 143.188889 0 Td 90.740741 Tz (. ) Tj 14.285714 0 0 14.285714 0 1691.333333 Tm 100.31 0 Td 81.666667 Tz (* ) Tj 0.49 0 Td 81.666667 Tz (* ) Tj 0.56 0 Td 81.666667 Tz (* ) Tj 12.857143 0 0 12.857143 0 1688.5 Tm 144.744444 0 Td 90.740741 Tz (. ) Tj -0.311111 0 Td 90.740741 Tz (. ) Tj 22.857143 0 0 22.857143 0 1680 Tm 72.1875 0 Td 58.333333 Tz (WW ) Tj 20 0 0 20 0 1681 Tm 46.9 0 Td 116.666667 Tz (w ) Tj 122.857143 0 0 122.857143 0 1603 Tm 6.389535 0 Td 11.715997 Tz (33333333333 ) Tj 12.857143 0 0 12.857143 0 1681 Tm 123.588889 0 Td 129.62963 Tz (W ) Tj 40 0 0 40 0 1670 Tm 18.35 0 Td 120.572917 Tz (XXXIIIIIIIIIIIII ) Tj 38.571429 0 0 38.571429 0 1664 Tm 31.033333 0 Td 38.888889 Tz (21 ) Tj 132.857143 0 0 132.857143 0 1580 Tm 13.352688 0 Td 40.979689 Tz (333 ) Tj 15.714286 0 0 15.714286 0 1654 Tm 50.845455 0 Td 185.606061 Tz (ff ) Tj 18.571429 0 0 18.571429 0 1644 Tm 29.292308 0 Td 389.487179 Tz (TATTI ) Tj 18.571429 0 0 18.571429 0 1645 Tm 36.669231 0 Td 239.316239 Tz (STEFAN ) Tj 40 0 0 40 0 1634 Tm 26.4 0 Td 195.833333 Tz (TER ) Tj 17.142857 0 0 17.142857 0 1659 Tm 95.55 0 Td 1866.666667 Tz (RA ) Tj 22.857143 0 0 22.857143 0 1645 Tm 73.7625 0 Td 472.5 Tz (TREET ) Tj 21.428571 0 0 21.428571 0 1644 Tm 43.446667 0 Td 174.222222 Tz (fffff ) Tj 30 0 0 30 0 1633 Tm 34.866667 0 Td 72.222222 Tz (It ) Tj 7.142857 0 0 7.142857 0 1646 Tm 189.56 0 Td 210 Tz (L ) Tj 64.285714 0 0 64.285714 0 1638 Tm 24.188889 0 Td 28.518519 Tz (test ) Tj 14.285714 0 0 14.285714 0 1629 Tm 40.67 0 Td 116.666667 Tz (W ) Tj 34.285714 0 0 34.285714 0 1627 Tm 54.366667 0 Td 53.472222 Tz (ww ) Tj 51.428571 0 0 51.428571 0 1602 Tm 17.713889 0 Td 81.666667 Tz (Prift ) Tj 12.857143 0 0 12.857143 0 1628 Tm 135.255556 0 Td 103.703704 Tz (1 ) Tj 30 0 0 30 0 1623 Tm 58.266667 0 Td 22.222222 Tz (MALAM ) Tj 231.428571 0 0 231.428571 0 1572 Tm 5.932716 0 Td 9.722222 Tz (WILL ) Tj 47.142857 0 0 47.142857 0 1598 Tm 13.278788 0 Td 194.444444 Tz (TRE ) Tj 15.714286 0 0 15.714286 0 1618 Tm 108.754545 0 Td 159.090909 Tz (O ) Tj 24.285714 0 0 24.285714 0 1604 Tm 24.623529 0 Td 102.941176 Tz (fritt ) Tj 37.142857 0 0 37.142857 0 1596 Tm 21.484615 0 Td 119.65812 Tz (TIT ) Tj 151.428571 0 0 151.428571 0 1521 Tm 6.128302 0 Td 8.41195 Tz (33333333333333 ) Tj 17.142857 0 0 17.142857 0 1608 Tm 33.716667 0 Td 175 Tz (B ) Tj 12.857143 0 0 12.857143 0 1614 Tm 109.511111 0 Td 732.407407 Tz (YANG ) Tj 44.285714 0 0 44.285714 0 1607 Tm 16.754839 0 Td 90.322581 Tz (rrrrr ) Tj 50 0 0 50 0 1596 Tm 29.24 0 Td 8.333333 Tz (122122 ) Tj 251.428571 0 0 251.428571 0 1508 Tm 2.306818 0 Td 1.988636 Tz (22211212222222222212 ) Tj 211.428571 0 0 211.428571 0 1510 Tm 2.625 0 Td 2.561937 Tz (22211122 ) Tj 34.285714 0 0 34.285714 0 1587 Tm 32.170833 0 Td 31.597222 Tz (RE ) Tj 7.142857 0 0 7.142857 0 1599 Tm 189.56 0 Td 210 Tz (i ) Tj 31.428571 0 0 31.428571 0 1585 Tm 56.381818 0 Td 42.424242 Tz (313 ) Tj 25.714286 0 0 25.714286 0 1594 Tm 21.077778 0 Td 61.574074 Tz (ww ) Tj 125.714286 0 0 125.714286 0 1591 Tm 7.254545 0 Td 2.651515 Tz (222222222 ) Tj 148.571429 0 0 148.571429 0 1504 Tm 6.145192 0 Td 1.822917 Tz (12112212 ) Tj 10 0 0 10 0 1495 Tm 92.8 0 Td 166.666667 Tz (2 ) Tj 230 0 0 230 0 1547 Tm 4.673913 0 Td 31.884058 Tz (Www ) Tj 111.428571 0 0 111.428571 0 1572 Tm 14.367949 0 Td 6.980057 Tz (EUR ) Tj 95.714286 0 0 95.714286 0 1565 Tm 10.959701 0 Td 6.239635 Tz (132232331332 ) Tj 151.428571 0 0 151.428571 0 1533 Tm 4.001887 0 Td 7.016509 Tz (21222223 ) Tj 120 0 0 120 0 1507 Tm 8.241667 0 Td 14.930556 Tz (33333333 ) Tj 227.142857 0 0 227.142857 0 1526 Tm 5.969811 0 Td 5.870021 Tz (LLLL ) Tj 218.571429 0 0 218.571429 0 1514 Tm 5.288889 0 Td 2.764161 Tz (22222222 ) Tj 57.142857 0 0 57.142857 0 1581 Tm 30.38 0 Td 131.25 Tz (Terrir ) Tj 261.428571 0 0 261.428571 0 1487 Tm 3.610929 0 Td 0.920866 Tz (LLLLLLLLL ) Tj 12.857143 0 0 12.857143 0 1577 Tm 45.577778 0 Td 181.481481 Tz (r ) Tj 22.857143 0 0 22.857143 0 1568 Tm 35.39375 0 Td 98.4375 Tz (re ) Tj 15.714286 0 0 15.714286 0 1572 Tm 65.672727 0 Td 190.909091 Tz (TE ) Tj 112.857143 0 0 112.857143 0 1539 Tm 7.168354 0 Td 8.74716 Tz (wwwwwwwwwwwww ) Tj 52.857143 0 0 52.857143 0 1544 Tm 7.756757 0 Td 59.90991 Tz (102 ) Tj 15.714286 0 0 15.714286 0 1570 Tm 98.827273 0 Td 74.242424 Tz (re ) Tj 90 0 0 90 0 1575 Tm 19.955556 0 Td 16.666667 Tz (wwwwwwwww ) Tj 67.142857 0 0 67.142857 0 1563 Tm 7.848936 0 Td 125.216706 Tz (TRATTENTE ) Tj 182.857143 0 0 182.857143 0 1465 Tm 7.153125 0 Td 1.332131 Tz (2222222222222 ) Tj 331.428571 0 0 331.428571 0 1461 Tm 3.949569 0 Td 1.280042 Tz (12112212222 ) Tj 270 0 0 270 0 1500 Tm 3.877778 0 Td 55.246914 Tz (39 ) Tj 15.714286 0 0 15.714286 0 1557 Tm 96.727273 0 Td 132.575758 Tz (re ) Tj 211.428571 0 0 211.428571 0 1466 Tm 3.902027 0 Td 2.133015 Tz (22222222222222222 ) Tj 54.285714 0 0 54.285714 0 1551 Tm 25.826316 0 Td 39.912281 Tz (HT ) Tj 164.285714 0 0 164.285714 0 1554 Tm 6.111304 0 Td 12.782609 Tz (wwwwwwwwww ) Tj 35.714286 0 0 35.714286 0 1537 Tm 20.916 0 Td 26.833333 Tz (ARAN ) Tj 14.285714 0 0 14.285714 0 1613 Tm 83.02 0 Td 42.777778 Tz (222 ) Tj 71.428571 0 0 71.428571 0 1529.097561 Tm 16.716 0 Td 10.888889 Tz (222 ) Tj 0.07 0 Td 10.5 Tz (222222 ) Tj 72.142857 0 0 72.142857 0 1485.142857 Tm 16.564356 0 Td 23.10231 Tz (2 ) Tj 0.027723 0 Td 5.250525 Tz (22222222222 ) Tj 44.285714 0 0 44.285714 0 1531 Tm 36.512903 0 Td 19.444444 Tz (333333 ) Tj 38.571429 0 0 38.571429 0 1545 Tm 40.703704 0 Td 30.246914 Tz (22 ) Tj 12.857143 0 0 12.857143 0 1554 Tm 137.433333 0 Td 116.666667 Tz (w ) Tj 122.142857 0 0 122.142857 0 1501 Tm 10.888889 0 Td 1.250812 Tz (LLLLLLLLLLLL ) Tj 0.008187 0 Td 1.66775 Tz (112112217 ) Tj 70 0 0 70 0 1534 Tm 24.728571 0 Td 5.714286 Tz (22222 ) Tj 84.285714 0 0 84.285714 0 1535 Tm 22.767797 0 Td 23.728814 Tz (M ) Tj 168.571429 0 0 168.571429 0 1514 Tm 8.352542 0 Td 11.370056 Tz (WANAWWWWWW ) Tj 84.285714 0 0 84.285714 0 1535 Tm 24.061017 0 Td 44.161959 Tz (102 ) Tj 190 0 0 190 0 1479 Tm 7.657895 0 Td 1.461988 Tz (221211122 ) Tj 110 0 0 110 0 1481 Tm 5.272727 0 Td 45.454545 Tz (WW ) Tj 95.714286 0 0 95.714286 0 1492 Tm 11.952239 0 Td 35.406302 Tz (www ) Tj 17.142857 0 0 17.142857 0 1529 Tm 77.175 0 Td 420.486111 Tz (CATE ) Tj 215.714286 0 0 215.714286 0 1464 Tm 6.939735 0 Td 2.704194 Tz (222222222222 ) Tj 261.428571 0 0 261.428571 0 1473 Tm 6.900546 0 Td 3.300118 Tz (22211221222223123 ) Tj 208.571429 0 0 208.571429 0 1494 Tm 8.711644 0 Td 5.593607 Tz (132127127227 ) Tj 18.571429 0 0 18.571429 0 1527 Tm 92.723077 0 Td 150.320513 Tz (TATE ) Tj 77.142857 0 0 77.142857 0 1501 Tm 14.311111 0 Td 11.072531 Tz (13323333 ) Tj 151.428571 0 0 151.428571 0 1528 Tm 9.469811 0 Td 9.22835 Tz (wwwwwwwwwwwww ) Tj 278.571429 0 0 278.571429 0 1448 Tm 3.701026 0 Td 9.223647 Tz (MAMMMWWMWWWW ) Tj 42.857143 0 0 42.857143 0 1467 Tm 24.616667 0 Td 40.185185 Tz (www ) Tj 304.285714 0 0 304.285714 0 1425 Tm 4.830986 0 Td 6.846635 Tz (hhhh ) Tj 41.428571 0 0 41.428571 0 1514 Tm 41.010345 0 Td 16.091954 Tz (121 ) Tj 220 0 0 220 0 1471 Tm 8.736364 0 Td 1.178451 Tz (121121222 ) Tj 20 0 0 20 0 1516 Tm 95.1 0 Td 183.333333 Tz (TEF ) Tj 31.428571 0 0 31.428571 0 1511 Tm 24.595455 0 Td 233.333333 Tz (RA ) Tj 145.714286 0 0 145.714286 0 1486 Tm 12.929412 0 Td 5.555556 Tz (23223323232323 ) Tj 84.285714 0 0 84.285714 0 1482 Tm 16.052542 0 Td 1.977401 Tz (LLLLLLLLL ) Tj 215.714286 0 0 215.714286 0 1506 Tm 2.841722 0 Td 8.30574 Tz (Awwwwwwwwwwwwwww ) Tj 14.285714 0 0 14.285714 0 1507 Tm 63.56 0 Td 128.333333 Tz (T ) Tj 121.428571 0 0 121.428571 0 1480 Tm 14.082353 0 Td 10 Tz (2233234 ) Tj 42.857143 0 0 42.857143 0 1491 Tm 34.626667 0 Td 140 Tz (Tief ) Tj 148.571429 0 0 148.571429 0 1508 Tm 10.257692 0 Td 146.955128 Tz (Or ) Tj 141.428571 0 0 141.428571 0 1450 Tm 10.132323 0 Td 4.006734 Tz (ZIELL ) Tj 141.428571 0 0 141.428571 0 1527 Tm 13.356566 0 Td 17.845118 Tz (Mawwwww ) Tj 178.571429 0 0 178.571429 0 1509 Tm 10.3712 0 Td 9.4 Tz (wwwwwwwwwwwwww ) Tj 238.571429 0 0 238.571429 0 1496 Tm 2.22994 0 Td 5.555556 Tz (wwwwwwwwwwwwwwwwwwwww ) Tj 18.571429 0 0 18.571429 0 1495 Tm 39.361538 0 Td 149.57265 Tz (ror ) Tj 12.857143 0 0 12.857143 0 1490 Tm 59.344444 0 Td 116.666667 Tz (w ) Tj 50 0 0 50 0 1490 Tm 17 0 Td 166.666667 Tz (Pour ) Tj 15.714286 0 0 15.714286 0 1490 Tm 67.136364 0 Td 116.666667 Tz (3 ) Tj 54.285714 0 0 54.285714 0 1485 Tm 9.744737 0 Td 48.099415 Tz (anh ) Tj 28.571429 0 0 28.571429 0 1466 Tm 20.895 0 Td 256.666667 Tz (Efferrrrrr ) Tj 50 0 0 50 0 1450 Tm 21.96 0 Td 29.166667 Tz (3333 ) Tj 61.428571 0 0 61.428571 0 1475 Tm 21.586047 0 Td 59.689922 Tz (ww ) Tj 32.857143 0 0 32.857143 0 1464 Tm 50.156522 0 Td 13.949275 Tz (2124 ) Tj 220 0 0 220 0 1468 Tm 7.763636 0 Td 25.649351 Tz (WANNARR ) Tj 37.142857 0 0 37.142857 0 1453 Tm 31.096154 0 Td 31.410256 Tz (333 ) Tj 210 0 0 210 0 1463 Tm 7.085714 0 Td 16.666667 Tz (WANAWAWA ) Tj 15.714286 0 0 15.714286 0 1459 Tm 114.672727 0 Td 95.454545 Tz (W ) Tj 62.857143 0 0 62.857143 0 1484 Tm 31.165909 0 Td 20.328283 Tz (within ) Tj 124.285714 0 0 124.285714 0 1468 Tm 15.512644 0 Td 60.344828 Tz (MS ) Tj 38.571429 0 0 38.571429 0 1448 Tm 24.396296 0 Td 218.209877 Tz (WU ) Tj 74.285714 0 0 74.285714 0 1440 Tm 7.457692 0 Td 34.775641 Tz (what ) Tj 64.285714 0 0 64.285714 0 1385.230326 Tm 21.575556 0 Td 44.074074 Tz (Dielectric ) Tj 2.815556 0 Td 53.148148 Tz (material ) Tj 2.582222 0 Td 48.481481 Tz (deposition ) Tj 72.857143 0 0 72.857143 0 1371.566667 Tm 9.635294 0 Td 47.124183 Tz (Oxide ) Tj 1.633333 0 Td 43.921569 Tz (layer ) Tj 1.537255 0 Td 42.810458 Tz (etching ) Tj 67.142857 0 0 67.142857 0 1300 Tm 11.989362 0 Td 48.817967 Tz (FIG ) Tj 1.251064 0 Td 34.751773 Tz (. ) Tj 0.357447 0 Td 63.297872 Tz (5C ) Tj 60 0 0 60 0 1305 Tm 26.366667 0 Td 62.037037 Tz (FIG ) Tj 1.45 0 Td 33.333333 Tz (. ) Tj 0.283333 0 Td 86.111111 Tz (5D ) Tj 65.714286 0 0 65.714286 0 1243 Tm 30.419565 0 Td 38.888889 Tz (100 ) Tj 51.428571 0 0 51.428571 0 1186 Tm 14.213889 0 Td 55.092593 Tz (105 ) Tj 64.285714 0 0 64.285714 0 1182 Tm 21.513333 0 Td 44.074074 Tz (130 ) Tj 64.285714 0 0 64.285714 0 1182 Tm 23.473333 0 Td 44.074074 Tz (106 ) Tj 70 0 0 70 0 1149.042017 Tm 13.814286 0 Td 47.619048 Tz (108 ) Tj 1.042857 0 Td 46.825397 Tz (112 ) Tj 57.142857 0 0 57.142857 0 1145 Tm 31.535 0 Td 57.361111 Tz (108 ) Tj 57.142857 0 0 57.142857 0 1120 Tm 20.8425 0 Td 50.555556 Tz (110 ) Tj 68.571429 0 0 68.571429 0 1116 Tm 28.729167 0 Td 43.75 Tz (110 ) Tj 74.285714 0 0 74.285714 0 1064 Tm 27.313462 0 Td 46.367521 Tz (130 ) Tj 27.142857 0 0 27.142857 0 1068 Tm 24.242105 0 Td 165.789474 Tz (M ) Tj 24.285714 0 0 24.285714 0 1062 Tm 24.211765 0 Td 137.254902 Tz (WER ) Tj 12.857143 0 0 12.857143 0 1066 Tm 88.2 0 Td 38.888889 Tz (. ) Tj 12.857143 0 0 12.857143 0 1061 Tm 102.744444 0 Td 25.925926 Tz (* ) Tj 12.857143 0 0 12.857143 0 1062 Tm 105 0 Td 25.925926 Tz (* ) Tj 12.857143 0 0 12.857143 0 1063 Tm 108.188889 0 Td 25.925926 Tz (* ) Tj 17.142857 0 0 17.142857 0 1053 Tm 44.041667 0 Td 82.638889 Tz (11 ) Tj 15.714286 0 0 15.714286 0 1050.333333 Tm 50.4 0 Td 63.636364 Tz (* ) Tj 0.7 0 Td 63.636364 Tz (* ) Tj 0.381818 0 Td 63.636364 Tz (* ) Tj 104.285714 0 0 104.285714 0 993 Tm 9.330137 0 Td 40.487062 Tz (WWW ) Tj 65 0 0 65 0 953 Tm 15.246154 0 Td 67.521368 Tz (www ) Tj 1.046154 0 Td 30.769231 Tz (. ) Tj 12.857143 0 0 12.857143 0 1052 Tm 103.6 0 Td 38.888889 Tz (i ) Tj 12.857143 0 0 12.857143 0 1043 Tm 43.4 0 Td 25.925926 Tz (* ) Tj 12.857143 0 0 12.857143 0 1043 Tm 44.877778 0 Td 25.925926 Tz (* ) Tj 12.857143 0 0 12.857143 0 1043 Tm 45.888889 0 Td 25.925926 Tz (* ) Tj 11.428571 0 0 11.428571 0 1042 Tm 92.4 0 Td 185.9375 Tz (EXIT ) Tj 135.714286 0 0 135.714286 0 948 Tm 5.261053 0 Td 8.974359 Tz (wwwwwwwwwwwww ) Tj 12.857143 0 0 12.857143 0 1017 Tm 52.733333 0 Td 64.814815 Tz (. ) Tj 42.857143 0 0 42.857143 0 968.79661 Tm 17.15 0 Td 59.62963 Tz (www ) Tj -0.396667 0 Td 50.555556 Tz (. ) Tj 28.571429 0 0 28.571429 0 1011 Tm 46.97 0 Td 204.166667 Tz (11W ) Tj 58.571429 0 0 58.571429 0 980 Tm 27.812195 0 Td 51.219512 Tz (Air ) Tj 12.857143 0 0 12.857143 0 989 Tm 146.144444 0 Td 38.888889 Tz (D ) Tj 12.857143 0 0 12.857143 0 976 Tm 92.866667 0 Td 129.62963 Tz (1 ) Tj 17.142857 0 0 17.142857 0 965 Tm 38.208333 0 Td 116.666667 Tz (w ) Tj 8.571429 0 0 8.571429 0 971 Tm 125.65 0 Td 116.666667 Tz (2 ) Tj 135.714286 0 0 135.714286 0 913 Tm 4.096842 0 Td 6.754386 Tz (AR ) Tj 31.428571 0 0 31.428571 0 957 Tm 59.245455 0 Td 71.590909 Tz (OY ) Tj 31.428571 0 0 31.428571 0 957 Tm 60.581818 0 Td 180.30303 Tz (122 ) Tj 11.428571 0 0 11.428571 0 950 Tm 90.825 0 Td 145.833333 Tz (. ) Tj 12.857143 0 0 12.857143 0 952 Tm 110.6 0 Td 155.555556 Tz (. ) Tj 14.285714 0 0 14.285714 0 943 Tm 56.14 0 Td 64.166667 Tz (11 ) Tj 12.857143 0 0 12.857143 0 945 Tm 73.266667 0 Td 116.666667 Tz (W ) Tj 12.857143 0 0 12.857143 0 937 Tm 111.377778 0 Td 155.555556 Tz (t ) Tj 24.285714 0 0 24.285714 0 921 Tm 30.429412 0 Td 109.803922 Tz (w ) Tj 102.857143 0 0 102.857143 0 866 Tm 9.790278 0 Td 14.78588 Tz (33333333 ) Tj 18.571429 0 0 18.571429 0 917 Tm 44.530769 0 Td 116.666667 Tz (1 ) Tj 72.857143 0 0 72.857143 0 880 Tm 14.054902 0 Td 86.928105 Tz (fitt ) Tj 68.571429 0 0 68.571429 0 920.197183 Tm 12.99375 0 Td 31.597222 Tz (3 ) Tj -0.495833 0 Td 11.342593 Tz (333333 ) Tj -1.61875 0 Td 27.276235 Tz (wwwwwwwww ) Tj 14.285714 0 0 14.285714 0 914 Tm 63.49 0 Td 116.666667 Tz (w ) Tj 12.857143 0 0 12.857143 0 905 Tm 123.433333 0 Td 268.981481 Tz (FREE ) Tj 58.571429 0 0 58.571429 0 901 Tm 32.404878 0 Td 14.796748 Tz (33371 ) Tj 21.428571 0 0 21.428571 0 899 Tm 37.94 0 Td 373.333333 Tz (TE ) Tj 108.571429 0 0 108.571429 0 863 Tm 12.084211 0 Td 2.302632 Tz (2222222222 ) Tj 102.857143 0 0 102.857143 0 829 Tm 15.088889 0 Td 81.666667 Tz (Writt ) Tj 104.285714 0 0 104.285714 0 824 Tm 10.145205 0 Td 74.048706 Tz (itt ) Tj 117.142857 0 0 117.142857 0 858 Tm 16.817073 0 Td 3.556911 Tz (22222222 ) Tj 128.571429 0 0 128.571429 0 845 Tm 9.1 0 Td 2.851852 Tz (12112 ) Tj 17.142857 0 0 17.142857 0 885 Tm 85.516667 0 Td 102.083333 Tz (TANT ) Tj 14.285714 0 0 14.285714 0 879 Tm 83.86 0 Td 70 Tz (22 ) Tj 10 0 0 10 0 881 Tm 145.1 0 Td 100 Tz (w ) Tj 18.571429 0 0 18.571429 0 849.5 Tm 47.276923 0 Td 116.666667 Tz (3 ) Tj 1.776923 0 Td 116.666667 Tz (3 ) Tj 24.285714 0 0 24.285714 0 858 Tm 69.052941 0 Td 177.058824 Tz (rrrrr ) Tj 187.142857 0 0 187.142857 0 790 Tm 3.532061 0 Td 5.343511 Tz (LLLLLLLL ) Tj 61.428571 0 0 61.428571 0 834 Tm 9.197674 0 Td 30.749354 Tz (ith ) Tj 12.857143 0 0 12.857143 0 852 Tm 62.222222 0 Td 25.925926 Tz (* ) Tj 12.857143 0 0 12.857143 0 852 Tm 72.022222 0 Td 25.925926 Tz (* ) Tj 12.857143 0 0 12.857143 0 852 Tm 76.377778 0 Td 25.925926 Tz (* ) Tj 0.388889 0 Td 25.925926 Tz (* ) Tj 12.857143 0 0 12.857143 0 852 Tm 86.255556 0 Td 25.925926 Tz (* ) Tj 74.285714 0 0 74.285714 0 856 Tm 20.003846 0 Td 62.07265 Tz (AAN ) Tj 12.857143 0 0 12.857143 0 852 Tm 92.088889 0 Td 25.925926 Tz (* ) Tj 325.714286 0 0 325.714286 0 752 Tm 1.697807 0 Td 24.049708 Tz (WWW ) Tj 12.857143 0 0 12.857143 0 852 Tm 92.944444 0 Td 25.925926 Tz (* ) Tj 27.142857 0 0 27.142857 0 839 Tm 69.594737 0 Td 180.116959 Tz (REF ) Tj 10 0 0 10 0 844 Tm 101.7 0 Td 33.333333 Tz (* ) Tj 0.6 0 Td 33.333333 Tz (* ) Tj 87.142857 0 0 87.142857 0 794 Tm 16.432787 0 Td 46.220401 Tz (PETITS ) Tj 10 0 0 10 0 844 Tm 108.4 0 Td 33.333333 Tz (* ) Tj 127.142857 0 0 127.142857 0 809 Tm 7.251685 0 Td 6.673476 Tz (13232323324 ) Tj 10 0 0 10 0 844 Tm 115.3 0 Td 33.333333 Tz (* ) Tj 148.571429 0 0 148.571429 0 782 Tm 3.897115 0 Td 5.048077 Tz (2224 ) Tj 154.285714 0 0 154.285714 0 839 Tm 9.884259 0 Td 203.08642 Tz (Art ) Tj 15.714286 0 0 15.714286 0 837 Tm 98.890909 0 Td 77.777778 Tz (ris ) Tj 25.714286 0 0 25.714286 0 825 Tm 21.35 0 Td 320.833333 Tz (ri ) Tj 45.714286 0 0 45.714286 0 830 Tm 43.071875 0 Td 113.020833 Tz (2102 ) Tj 64.285714 0 0 64.285714 0 834 Tm 11.091111 0 Td 58.333333 Tz (ww ) Tj 70 0 0 70 0 789 Tm 15.828571 0 Td 39.68254 Tz (393 ) Tj 18.571429 0 0 18.571429 0 827 Tm 61.653846 0 Td 107.692308 Tz (W ) Tj 107.142857 0 0 107.142857 0 810 Tm 19.077333 0 Td 28 Tz (102 ) Tj 22.857143 0 0 22.857143 0 820 Tm 73.85 0 Td 131.25 Tz (ET ) Tj 195.714286 0 0 195.714286 0 805 Tm 9.539416 0 Td 9.831896 Tz (33333333333 ) Tj 134.285714 0 0 134.285714 0 817 Tm 5.979787 0 Td 5.641522 Tz (wwwwwwwwwwwwwwwwwwwwww ) Tj 28.571429 0 0 28.571429 0 795.706897 Tm 33.88 0 Td 145.833333 Tz (er ) Tj -6.825 0 Td 176.944444 Tz (frittf ) Tj 151.428571 0 0 151.428571 0 784 Tm 12.150943 0 Td 2.384696 Tz (212222 ) Tj 74.285714 0 0 74.285714 0 794 Tm 15.898077 0 Td 7.291667 Tz (1122 ) Tj 121.428571 0 0 121.428571 0 818 Tm 11.216471 0 Td 98.54902 Tz (Terre ) Tj 137.142857 0 0 137.142857 0 767 Tm 5.432292 0 Td 32.8125 Tz (Wh ) Tj 62.857143 0 0 62.857143 0 780 Tm 6.856818 0 Td 49.494949 Tz (102 ) Tj 37.142857 0 0 37.142857 0 797 Tm 50.776923 0 Td 282.692308 Tz (fr ) Tj 275.714286 0 0 275.714286 0 741 Tm 6.680829 0 Td 1.632124 Tz (22222222222222222222 ) Tj 222.857143 0 0 222.857143 0 716 Tm 3.158974 0 Td 1.794872 Tz (2222222222 ) Tj 287.142857 0 0 287.142857 0 738 Tm 4.649254 0 Td 2.87692 Tz (11232132232332132232333 ) Tj 54.285714 0 0 54.285714 0 809 Tm 28.386842 0 Td 171.162281 Tz (Prir ) Tj 305.714286 0 0 305.714286 0 725 Tm 5.56729 0 Td 3.184948 Tz (3221121122222223132 ) Tj 291.428571 0 0 291.428571 0 728 Tm 6.265686 0 Td 1.62037 Tz (222222222222222222222222 ) Tj 564.285714 0 0 564.285714 0 710 Tm 0.863038 0 Td 38.839662 Tz (hy ) Tj 12.857143 0 0 12.857143 0 799 Tm 117.988889 0 Td 86.419753 Tz (off ) Tj 2.857143 0 0 2.857143 0 798 Tm 457.8 0 Td 525 Tz (2 ) Tj 141.428571 0 0 141.428571 0 795 Tm 10.224242 0 Td 73.771044 Tz (WATER ) Tj 418.571429 0 0 418.571429 0 638 Tm 1.230375 0 Td 24.819871 Tz (WWW ) Tj 231.428571 0 0 231.428571 0 728 Tm 7.74321 0 Td 2.304527 Tz (11122 ) Tj 48.571429 0 0 48.571429 0 757 Tm 30.388235 0 Td 180.718954 Tz (TFF ) Tj 32.857143 0 0 32.857143 0 767 Tm 48.786957 0 Td 86.231884 Tz (RITT ) Tj 65.714286 0 0 65.714286 0 723 Tm 25.245652 0 Td 101.449275 Tz (TARIF ) Tj 15.714286 0 0 15.714286 0 744 Tm 113.209091 0 Td 127.272727 Tz (F ) Tj 15.714286 0 0 15.714286 0 791 Tm 95.136364 0 Td 228.030303 Tz (TE ) Tj 164.285714 0 0 164.285714 0 714 Tm 4.26087 0 Td 9.130435 Tz (ALL ) Tj 487.142857 0 0 487.142857 0 666 Tm 1.012023 0 Td 56.451613 Tz (WA ) Tj 101.428571 0 0 101.428571 0 718 Tm 9.543662 0 Td 23.333333 Tz (33333 ) Tj 22.857143 0 0 22.857143 0 769 Tm 67.41875 0 Td 220.99359 Tz (fiffiffiffiff ) Tj 155.714286 0 0 155.714286 0 726 Tm 7.051376 0 Td 3.835372 Tz (221222223223 ) Tj 184.285714 0 0 184.285714 0 708 Tm 5.296124 0 Td 12.561011 Tz (wwwwwwwww ) Tj 21.428571 0 0 21.428571 0 762 Tm 67.526667 0 Td 42.777778 Tz (hi ) Tj 80 0 0 80 0 740 Tm 14.625 0 Td 4.166667 Tz (LLLLL ) Tj 132.857143 0 0 132.857143 0 714 Tm 8.226882 0 Td 4.547491 Tz (22222222 ) Tj 24.285714 0 0 24.285714 0 747 Tm 62.464706 0 Td 237.908497 Tz (TER ) Tj 21.428571 0 0 21.428571 0 747 Tm 39.573333 0 Td 447.777778 Tz (Frrrrrr ) Tj 22.857143 0 0 22.857143 0 743 Tm 56.13125 0 Td 138.541667 Tz (R ) Tj 92.857143 0 0 92.857143 0 709 Tm 6.127692 0 Td 49.358974 Tz (ww ) Tj 30 0 0 30 0 738 Tm 46.333333 0 Td 186.111111 Tz (frir ) Tj 15.714286 0 0 15.714286 0 743 Tm 86.545455 0 Td 159.090909 Tz (ER ) Tj 15.714286 0 0 15.714286 0 737 Tm 83.872727 0 Td 84.848485 Tz (Reff ) Tj 32.857143 0 0 32.857143 0 747 Tm 56.395652 0 Td 88.768116 Tz (WE ) Tj 24.285714 0 0 24.285714 0 732 Tm 25.076471 0 Td 123.529412 Tz (W ) Tj 15.714286 0 0 15.714286 0 733 Tm 122.563636 0 Td 132.575758 Tz (ET ) Tj 52.857143 0 0 52.857143 0 710 Tm 20.337838 0 Td 42.567568 Tz (WW ) Tj 327.142857 0 0 327.142857 0 725 Tm 5.132314 0 Td 7.611953 Tz (wwwwwwwwwwwwwwwww ) Tj 21.428571 0 0 21.428571 0 716 Tm 78.26 0 Td 129.111111 Tz (fritt ) Tj 27.142857 0 0 27.142857 0 719 Tm 44.357895 0 Td 38.888889 Tz (www ) Tj 12.857143 0 0 12.857143 0 718 Tm 116.277778 0 Td 71.296296 Tz (FE ) Tj 18.571429 0 0 18.571429 0 714 Tm 50.884615 0 Td 67.307692 Tz (re ) Tj 14.285714 0 0 14.285714 0 718 Tm 121.38 0 Td 1022.777778 Tz (tri ) Tj 14.285714 0 0 14.285714 0 728 Tm 51.73 0 Td 195.416667 Tz (TETA ) Tj 58.571429 0 0 58.571429 0 704 Tm 8.77561 0 Td 276.585366 Tz (Erfar ) Tj 12.857143 0 0 12.857143 0 708 Tm 87.811111 0 Td 64.814815 Tz (w ) Tj 58.571429 0 0 58.571429 0 651 Tm 26.753659 0 Td 63.00813 Tz (Release ) Tj 74.285714 0 0 74.285714 0 644.372051 Tm 8.009615 0 Td 37.467949 Tz (Dielectric ) Tj 2.396154 0 Td 46.274038 Tz (material ) Tj 2.301923 0 Td 41.282051 Tz (layer ) Tj 1.453846 0 Td 40.705128 Tz (etching ) Tj 62.857143 0 0 62.857143 0 567.382114 Tm 12.806818 0 Td 54.79798 Tz (FIG ) Tj 1.320455 0 Td 34.469697 Tz (. ) Tj 0.413636 0 Td 63.636364 Tz (5E ) Tj 64.285714 0 0 64.285714 0 576 Tm 24.733333 0 Td 49.259259 Tz (FIG ) Tj 1.337778 0 Td 33.703704 Tz (. ) Tj 0.373333 0 Td 53.148148 Tz (5F ) Tj ET Q endstream endobj 106 0 obj << /Length 1 >> stream q endstream endobj 107 0 obj << /Length 17102 >> stream Q q 0.24 0 0 0.24 0 0 cm BT /F1 1 Tf 3 Tr 84.857143 0 0 84.857143 0 3027.857143 Tm 3.912458 0 Td 35.353535 Tz (U ) Tj 0.565657 0 Td 35.353535 Tz (. ) Tj 0.341751 0 Td 35.353535 Tz (S ) Tj 0.353535 0 Td 35.353535 Tz (. ) Tj 0.624579 0 Td 65.796857 Tz (Patent ) Tj 85.428571 0 0 85.428571 0 3023.68559 Tm 9.856187 0 Td 44.221479 Tz (Feb ) Tj 0.877926 0 Td 35.117057 Tz (. ) Tj 0.339465 0 Td 34.141583 Tz (26 ) Tj 0.550167 0 Td 35.117057 Tz (, ) Tj 0.327759 0 Td 43.896321 Tz (2019 ) Tj 85.357143 0 0 85.357143 0 3019.694581 Tm 14.632636 0 Td 48.033473 Tz (Sheet ) Tj 1.569874 0 Td 35.146444 Tz (5 ) Tj 0.527197 0 Td 42.956764 Tz (of ) Tj 0.644351 0 Td 35.146444 Tz (9 ) Tj 92.857143 0 0 92.857143 0 3023 Tm 18.910769 0 Td 64.615385 Tz (US ) Tj 1.141538 0 Td 32.307692 Tz (10 ) Tj 0.473846 0 Td 34.102564 Tz (, ) Tj 0.161538 0 Td 49.65812 Tz (215 ) Tj 0.958462 0 Td 34.102564 Tz (, ) Tj 0.086154 0 Td 55.641026 Tz (692 ) Tj 1.26 0 Td 53.846154 Tz (B2 ) Tj 40 0 0 40 0 2479 Tm 41.925 0 Td 83.333333 Tz (600 ) Tj 54.285714 0 0 54.285714 0 2386 Tm 23.210526 0 Td 66.520468 Tz (607 ) Tj 55.714286 0 0 55.714286 0 2320 Tm 25.038462 0 Td 66.809117 Tz (604 ) Tj 62.857143 0 0 62.857143 0 2272 Tm 9.943182 0 Td 60.984848 Tz (602 ) Tj 62.857143 0 0 62.857143 0 2272 Tm 12.011364 0 Td 55.681818 Tz (614 ) Tj 62.857143 0 0 62.857143 0 2272 Tm 14.843182 0 Td 55.681818 Tz (608 ) Tj 50 0 0 50 0 2277 Tm 38.46 0 Td 65.555556 Tz (909 ) Tj 12.857143 0 0 12.857143 0 2162 Tm 95.2 0 Td 12.962963 Tz (O ) Tj 12.857143 0 0 12.857143 0 2162 Tm 96.288889 0 Td 12.962963 Tz (m ) Tj 12.857143 0 0 12.857143 0 2162.222222 Tm 97.377778 0 Td 45.37037 Tz (ww ) Tj 1.088889 0 Td 25.925926 Tz (# ) Tj 12.857143 0 0 12.857143 0 2163 Tm 99.555556 0 Td 25.925926 Tz (# ) Tj 12.857143 0 0 12.857143 0 2163 Tm 101.888889 0 Td 25.925926 Tz (h ) Tj 12.857143 0 0 12.857143 0 2162 Tm 125.455556 0 Td 25.925926 Tz (* ) Tj 0.311111 0 Td 25.925926 Tz (+ ) Tj 12.857143 0 0 12.857143 0 2162 Tm 126.466667 0 Td 25.925926 Tz (* ) Tj 30 0 0 30 0 2083.930233 Tm 59.9 0 Td 91.666667 Tz (ww ) Tj -0.866667 0 Td 55.555556 Tz (. ) Tj 13.571429 0 0 13.571429 0 2118.146341 Tm 142.652632 0 Td 24.561404 Tz (. ) Tj -0.736842 0 Td 24.561404 Tz (. ) Tj -0.221053 0 Td 24.561404 Tz (. ) Tj -5.6 0 Td 233.333333 Tz (HIRI ) Tj 12.857143 0 0 12.857143 0 2087 Tm 144.355556 0 Td 25.925926 Tz (1 ) Tj 10.952381 0 0 10.952381 0 2075.016393 Tm 168.091304 0 Td 456.521739 Tz (LE1E ) Tj 9.586957 0 Td 15.217391 Tz (. ) Tj 0.273913 0 Td 15.217391 Tz (. ) Tj 44.285714 0 0 44.285714 0 2051 Tm 23.122581 0 Td 90.322581 Tz (21 ) Tj 15.714286 0 0 15.714286 0 2048 Tm 119.190909 0 Td 116.666667 Tz (W ) Tj 12.857143 0 0 12.857143 0 2044 Tm 158.511111 0 Td 77.777778 Tz (22 ) Tj 15.714286 0 0 15.714286 0 2037 Tm 108.436364 0 Td 58.333333 Tz (22 ) Tj 15.714286 0 0 15.714286 0 2032 Tm 125.3 0 Td 132.575758 Tz (21 ) Tj 14.285714 0 0 14.285714 0 2018 Tm 45.92 0 Td 138.333333 Tz (TOTTEET ) Tj 18.571429 0 0 18.571429 0 2023 Tm 36.4 0 Td 107.692308 Tz (w ) Tj 37.142857 0 0 37.142857 0 2008 Tm 25.307692 0 Td 11.965812 Tz (ALL ) Tj 14.285714 0 0 14.285714 0 2018 Tm 101.99 0 Td 163.333333 Tz (F ) Tj 14.285714 0 0 14.285714 0 2018 Tm 110.95 0 Td 364 Tz (rrrrr ) Tj 12.857143 0 0 12.857143 0 2010 Tm 108.188889 0 Td 123.148148 Tz (EL ) Tj 18.571429 0 0 18.571429 0 2011 Tm 101.284615 0 Td 116.666667 Tz (w ) Tj 11.428571 0 0 11.428571 0 2012 Tm 140.7875 0 Td 116.666667 Tz (w ) Tj 38.571429 0 0 38.571429 0 2002 Tm 13.196296 0 Td 31.32716 Tz (wwww ) Tj 12.857143 0 0 12.857143 0 2006 Tm 59.966667 0 Td 116.666667 Tz (Ay ) Tj 14.285714 0 0 14.285714 0 2007 Tm 60.13 0 Td 27.222222 Tz (par ) Tj 30 0 0 30 0 1988 Tm 35.233333 0 Td 81.944444 Tz (YETI ) Tj 41.428571 0 0 41.428571 0 2004 Tm 13.42069 0 Td 17.097701 Tz (wwwwwwww ) Tj 48.571429 0 0 48.571429 0 2001 Tm 11.776471 0 Td 26.078431 Tz (wwwww ) Tj 10 0 0 10 0 1992 Tm 178.2 0 Td 33.333333 Tz (C ) Tj 17.142857 0 0 17.142857 0 1987 Tm 27.941667 0 Td 184.722222 Tz (INTI ) Tj 20 0 0 20 0 1977 Tm 24.45 0 Td 229.166667 Tz (HT ) Tj 15.714286 0 0 15.714286 0 1972 Tm 30.1 0 Td 106.060606 Tz (A ) Tj 18.571429 0 0 18.571429 0 1964 Tm 49.753846 0 Td 116.666667 Tz (W ) Tj 22.857143 0 0 22.857143 0 1966 Tm 49.7875 0 Td 182.291667 Tz (SAS ) Tj 82.857143 0 0 82.857143 0 1970 Tm 14.301724 0 Td 38.721264 Tz (ALAM ) Tj 15.714286 0 0 15.714286 0 1962 Tm 104.236364 0 Td 116.666667 Tz (A ) Tj 74.285714 0 0 74.285714 0 1962 Tm 17.419231 0 Td 50.106838 Tz (www ) Tj 51.428571 0 0 51.428571 0 1993 Tm 24.869444 0 Td 37.808642 Tz (www ) Tj 181.428571 0 0 181.428571 0 1926 Tm 6.608661 0 Td 37.35783 Tz (WWW ) Tj 17.142857 0 0 17.142857 0 1956 Tm 60.141667 0 Td 53.472222 Tz (an ) Tj 32.857143 0 0 32.857143 0 1949 Tm 16.069565 0 Td 49.033816 Tz (NAS ) Tj 17.142857 0 0 17.142857 0 1947 Tm 57.925 0 Td 43.75 Tz (st ) Tj 15.714286 0 0 15.714286 0 1961 Tm 32.454545 0 Td 84.848485 Tz (w ) Tj -0.954545 0 Td 74.242424 Tz (ww ) Tj 65.714286 0 0 65.714286 0 1936 Tm 7.41087 0 Td 19.565217 Tz (wwwwwww ) Tj 15.714286 0 0 15.714286 0 1916 Tm 29.718182 0 Td 95.454545 Tz (A ) Tj 54.285714 0 0 54.285714 0 1918 Tm 16.173684 0 Td 56.28655 Tz (www ) Tj 37.142857 0 0 37.142857 0 1913 Tm 30.934615 0 Td 62.820513 Tz (WA ) Tj 17.142857 0 0 17.142857 0 1907 Tm 48.3 0 Td 42.12963 Tz (www ) Tj 67.142857 0 0 67.142857 0 1916.150943 Tm 15.251064 0 Td 24.822695 Tz (w ) Tj 0.178723 0 Td 14.893617 Tz (wwwwwwwwwwwwwwww ) Tj 281.428571 0 0 281.428571 0 1843 Tm 2.693401 0 Td 11.07445 Tz (wwwwwwwwww ) Tj 120 0 0 120 0 1908 Tm 11.183333 0 Td 23.333333 Tz (MALAM ) Tj 131.428571 0 0 131.428571 0 1894 Tm 8.384783 0 Td 8.423913 Tz (wwwwwwwwwwwwww ) Tj 234.285714 0 0 234.285714 0 1859 Tm 5.728049 0 Td 6.44196 Tz (wwwwwwwwwwwwwwwwww ) Tj 348.571429 0 0 348.571429 0 1784 Tm 1.37418 0 Td 8.937579 Tz (WWWWWWWWWWWWW ) Tj 210 0 0 210 0 1883 Tm 4.152381 0 Td 36.111111 Tz (ANNA ) Tj 207.142857 0 0 207.142857 0 1834 Tm 5.908966 0 Td 22.689655 Tz (Wwwww ) Tj 11.428571 0 0 11.428571 0 1879 Tm 92.4 0 Td 102.083333 Tz (w ) Tj 295.714286 0 0 295.714286 0 1837 Tm 5.748792 0 Td 11.441224 Tz (WWWWWWWWWW ) Tj 218.571429 0 0 218.571429 0 1838 Tm 6.423529 0 Td 16.230937 Tz (wwwwwww ) Tj 167.142857 0 0 167.142857 0 1852 Tm 10.069231 0 Td 12.519785 Tz (WWwwwwwww ) Tj 170 0 0 170 0 1868 Tm 5.294118 0 Td 26.666667 Tz (AWAMI ) Tj 72.857143 0 0 72.857143 0 1864 Tm 26.87451 0 Td 12.454611 Tz (wwwwwwwww ) Tj 25.714286 0 0 25.714286 0 1862 Tm 37.683333 0 Td 58.333333 Tz (ww ) Tj 102.857143 0 0 102.857143 0 1844 Tm 18.997222 0 Td 34.027778 Tz (Www ) Tj 122.857143 0 0 122.857143 0 1862 Tm 14.455814 0 Td 13.812544 Tz (wwwwwwwwwww ) Tj 98.571429 0 0 98.571429 0 1847 Tm 20.188406 0 Td 18.599034 Tz (wwwwww ) Tj 61.428571 0 0 61.428571 0 1834 Tm 12.94186 0 Td 38.888889 Tz (ANA ) Tj 51.428571 0 0 51.428571 0 1856 Tm 32.258333 0 Td 42.12963 Tz (WWW ) Tj 82.857143 0 0 82.857143 0 1924 Tm 9.184483 0 Td 15.804598 Tz (Warning ) Tj 272.857143 0 0 272.857143 0 1788 Tm 2.308901 0 Td 15.881326 Tz (wwwwwww ) Tj 40.952381 0 0 40.952381 0 1757.214286 Tm 13.967442 0 Td 40.697674 Tz (. ) Tj 0.268605 0 Td 40.697674 Tz (. ) Tj 0.048837 0 Td 65.116279 Tz (wwww ) Tj 171.428571 0 0 171.428571 0 1869 Tm 6.5975 0 Td 127.361111 Tz (pri ) Tj 171.428571 0 0 171.428571 0 1843 Tm 2.846667 0 Td 13.503086 Tz (wwwwwwwww ) Tj 10 0 0 10 0 1832 Tm 73.3 0 Td 133.333333 Tz (M ) Tj 14.285714 0 0 14.285714 0 1835 Tm 68.74 0 Td 52.5 Tz (EN ) Tj 15.714286 0 0 15.714286 0 1831 Tm 129.245455 0 Td 63.636364 Tz (Th ) Tj 11.428571 0 0 11.428571 0 1831 Tm 100.8 0 Td 102.083333 Tz (A ) Tj 31.428571 0 0 31.428571 0 1830 Tm 28.859091 0 Td 42.424242 Tz (para ) Tj 40.714286 0 0 40.714286 0 1805.894737 Tm 27.091228 0 Td 36.842105 Tz (w ) Tj 0.17193 0 Td 19.649123 Tz (wwwwwwwwww ) Tj 14.285714 0 0 14.285714 0 2007 Tm 131.95 0 Td 116.666667 Tz (w ) Tj 15.714286 0 0 15.714286 0 1984 Tm 118.618182 0 Td 116.666667 Tz (w ) Tj 102.857143 0 0 102.857143 0 1824 Tm 16.576389 0 Td 9.587191 Tz (Wwwwwwwwwwww ) Tj 407.142857 0 0 407.142857 0 1738 Tm 4.013333 0 Td 1.673023 Tz (wwwwwwwwwwwwwwwwwwwwwwwwwwwwwwwwwwwwwwwwwwwwwwwwwwwwwwwwwwwwwwwwwwwww ) Tj 184.285714 0 0 184.285714 0 1744 Tm 8.351163 0 Td 6.83947 Tz (Wwwwwwwwwwwwwwww ) Tj 267.142857 0 0 267.142857 0 1785 Tm 5.854545 0 Td 10.152325 Tz (WWWWWWWWWWW ) Tj 197.142857 0 0 197.142857 0 1765 Tm 8.171739 0 Td 9.145806 Tz (wwwwwwwwwww ) Tj 61.428571 0 0 61.428571 0 1801 Tm 30.946512 0 Td 27.810078 Tz (Wwww ) Tj 212.857143 0 0 212.857143 0 1809 Tm 3.993289 0 Td 16.051454 Tz (MAANDAMANA ) Tj 11.428571 0 0 11.428571 0 1811 Tm 98.35 0 Td 102.083333 Tz (. ) Tj 98.571429 0 0 98.571429 0 1810 Tm 12.731884 0 Td 39.452496 Tz (www ) Tj 291.428571 0 0 291.428571 0 1800 Tm 1.636765 0 Td 7.064591 Tz (wAAAAAAAAAAAAAANW ) Tj 130 0 0 130 0 1762 Tm 10.584615 0 Td 18.803419 Tz (MAWALA ) Tj 195.714286 0 0 195.714286 0 1746 Tm 7.015328 0 Td 14.583333 Tz (MAAAAAAA ) Tj 310 0 0 310 0 1795 Tm 1.929032 0 Td 3.270609 Tz (wwwwwwwwwwwwwwwwwwwwwwwwwwwwwwwwwwww ) Tj 32.857143 0 0 32.857143 0 1795 Tm 22.582609 0 Td 47.342995 Tz (WWW ) Tj 15.714286 0 0 15.714286 0 1967 Tm 124.981818 0 Td 116.666667 Tz (w ) Tj 140 0 0 140 0 1937 Tm 13.671429 0 Td 23.809524 Tz (MANAN ) Tj 22.857143 0 0 22.857143 0 1826 Tm 78.75 0 Td 116.666667 Tz (A ) Tj 200 0 0 200 0 1793 Tm 8.905 0 Td 6.083333 Tz (wwwwwwwwwwwwwwwwwwww ) Tj 32.857143 0 0 32.857143 0 1788 Tm 59.256522 0 Td 38.888889 Tz (Www ) Tj 40 0 0 40 0 1798 Tm 49.275 0 Td 38.888889 Tz (ALA ) Tj 344.285714 0 0 344.285714 0 1786 Tm 2.701245 0 Td 14.426003 Tz (MWWWWWWWWW ) Tj 17.142857 0 0 17.142857 0 1786 Tm 108.091667 0 Td 204.166667 Tz (Terra ) Tj 21.428571 0 0 21.428571 0 1774 Tm 60.946667 0 Td 256.666667 Tz (NE ) Tj 131.428571 0 0 131.428571 0 1741 Tm 9.305435 0 Td 12.962963 Tz (wwwwwwwww ) Tj 172.857143 0 0 172.857143 0 1717 Tm 6.803306 0 Td 46.280992 Tz (WA ) Tj 14.285714 0 0 14.285714 0 1776 Tm 102.76 0 Td 157.5 Tz (Fr ) Tj 77.142857 0 0 77.142857 0 1781 Tm 22.335185 0 Td 20.164609 Tz (ANTARA ) Tj 232.857143 0 0 232.857143 0 1737 Tm 8.013497 0 Td 4.947986 Tz (Wwwwwwwwwwwwwwwwwwwwwww ) Tj 168.571429 0 0 168.571429 0 1747 Tm 11.484746 0 Td 12.962963 Tz (wwwwwwwww ) Tj 227.142857 0 0 227.142857 0 1793 Tm 3.473585 0 Td 79.000699 Tz (per ) Tj 307.142857 0 0 307.142857 0 1697 Tm 6.039535 0 Td 31.111111 Tz (WWW ) Tj 50 0 0 50 0 1739 Tm 20.86 0 Td 16.190476 Tz (wwwwwww ) Tj 368.571429 0 0 368.571429 0 1750 Tm 1.92907 0 Td 6.878145 Tz (wwwwwwwwwwwwwwwwwww ) Tj 148.571429 0 0 148.571429 0 1724 Tm 11.785577 0 Td 27.764423 Tz (MANA ) Tj 121.428571 0 0 121.428571 0 1941 Tm 6.744706 0 Td 12.764706 Tz (wwwwwwwwww ) Tj 17.142857 0 0 17.142857 0 1844 Tm 41.416667 0 Td 106.944444 Tz (w ) Tj 110 0 0 110 0 1808.732919 Tm 6.081818 0 Td 20.454545 Tz (wwwwwwwwww ) Tj -0.427273 0 Td 13.131313 Tz (www ) Tj 261.428571 0 0 261.428571 0 1754 Tm 2.417486 0 Td 9.660922 Tz (WWWwwwwwwwwww ) Tj 88.571429 0 0 88.571429 0 1748 Tm 6.808065 0 Td 15.994624 Tz (wwwwwwww ) Tj 21.428571 0 0 21.428571 0 1756 Tm 59.453333 0 Td 286.222222 Tz (TANTE ) Tj 24.285714 0 0 24.285714 0 1747 Tm 60.858824 0 Td 1719.117647 Tz (AR ) Tj 20 0 0 20 0 1741 Tm 75.05 0 Td 96.666667 Tz (EXE71 ) Tj 3.25 0 Td 33.333333 Tz (/ ) Tj 20 0 0 20 0 1741 Tm 81.75 0 Td 149.305556 Tz (EEZEELEEFFIT ) Tj 20 0 0 20 0 1741 Tm 96.3 0 Td 160.416667 Tz (7777 ) Tj 12.857143 0 0 12.857143 0 1741 Tm 37.877778 0 Td 77.777778 Tz (w ) Tj 21.428571 0 0 21.428571 0 1965 Tm 33.46 0 Td 38.888889 Tz (www ) Tj 14.285714 0 0 14.285714 0 1955 Tm 49.35 0 Td 116.666667 Tz (w ) Tj 174.285714 0 0 174.285714 0 1889 Tm 3.545902 0 Td 9.047919 Tz (wwwwwwwwwwwww ) Tj 112.857143 0 0 112.857143 0 1849 Tm 5.227848 0 Td 8.270042 Tz (wwwwwwwwwwwwwww ) Tj 165.714286 0 0 165.714286 0 1828 Tm 3.536207 0 Td 5.378561 Tz (wwwwwwwwwwwwwwwwwwwwwww ) Tj 58.571429 0 0 58.571429 0 1811 Tm 9.185366 0 Td 58.333333 Tz (ww ) Tj 322.857143 0 0 322.857143 0 1778 Tm 1.508407 0 Td 2.713178 Tz (wwwwwwwwwwwwwwwwwwwwwwwwwwwwwwwwwwwwwwwwwww ) Tj 98.571429 0 0 98.571429 0 1738 Tm 4.808696 0 Td 30.012077 Tz (AAAA ) Tj 58.571429 0 0 58.571429 0 1738 Tm 8.365854 0 Td 19.918699 Tz (MAMAMA ) Tj 128.571429 0 0 128.571429 0 1734 Tm 3.881111 0 Td 18.148148 Tz (WAAAAAA ) Tj 12.857143 0 0 12.857143 0 1739 Tm 65.1 0 Td 77.777778 Tz (w ) Tj 20 0 0 20 0 2048 Tm 87.05 0 Td 116.666667 Tz (w ) Tj 12.857143 0 0 12.857143 0 2027 Tm 135.488889 0 Td 103.703704 Tz (w ) Tj 42.142857 0 0 42.142857 0 1912.412698 Tm 39.484746 0 Td 39.548023 Tz (w ) Tj -1.376271 0 Td 19.054956 Tz (wwwwwwwwwww ) Tj 260 0 0 260 0 1847 Tm 5.992308 0 Td 21.260684 Tz (WWWWWW ) Tj 270 0 0 270 0 1761 Tm 5.485185 0 Td 7.600309 Tz (WWWWWWWWWWWWWWWW ) Tj 295.714286 0 0 295.714286 0 1751 Tm 4.85942 0 Td 10.811009 Tz (wwwwwwwwwww ) Tj 14.285714 0 0 14.285714 0 1831 Tm 72.66 0 Td 128.333333 Tz (w ) Tj 125.714286 0 0 125.714286 0 1738 Tm 7.620455 0 Td 9.178322 Tz (MAMAMATAMATAN ) Tj 78.571429 0 0 78.571429 0 1761 Tm 19.116364 0 Td 40.30303 Tz (MAA ) Tj 348.571429 0 0 348.571429 0 1736 Tm 4.288934 0 Td 6.140351 Tz (WWWWWWWWWWWWWWWWWWW ) Tj 15.714286 0 0 15.714286 0 1743 Tm 121.927273 0 Td 116.666667 Tz (W ) Tj 115.714286 0 0 115.714286 0 1730 Tm 10.862963 0 Td 51.371742 Tz (www ) Tj 22.857143 0 0 22.857143 0 1851 Tm 62.825 0 Td 116.666667 Tz (W ) Tj 137.142857 0 0 137.142857 0 1854 Tm 10.682292 0 Td 30.078125 Tz (WAMA ) Tj 268.571429 0 0 268.571429 0 1756 Tm 5.034043 0 Td 3.007365 Tz (wwwwwwwwwwwwwwwwwwwwwwwwwwwwwwwwwwwwwww ) Tj 58.571429 0 0 58.571429 0 1728 Tm 22.297561 0 Td 61.178862 Tz (ww ) Tj 331.428571 0 0 331.428571 0 1781 Tm 4.350862 0 Td 2.558096 Tz (wwwwwwwwwwwwwwwwwwwwwwwwwwwwwwwwwwwwwwwwwwwwww ) Tj 201.428571 0 0 201.428571 0 1734 Tm 6.831206 0 Td 20.133964 Tz (wwwwww ) Tj 11.428571 0 0 11.428571 0 1732 Tm 121.7125 0 Td 116.666667 Tz (w ) Tj 21.428571 0 0 21.428571 0 1718 Tm 70 0 Td 108.888889 Tz (W ) Tj 14.285714 0 0 14.285714 0 1983 Tm 141.82 0 Td 116.666667 Tz (w ) Tj 14.285714 0 0 14.285714 0 1938 Tm 141.12 0 Td 116.666667 Tz (w ) Tj 65.714286 0 0 65.714286 0 1914.105263 Tm 29.552174 0 Td 27.898551 Tz (w ) Tj 0.395652 0 Td 53.26087 Tz (wwww ) Tj 128.571429 0 0 128.571429 0 1835 Tm 14.451111 0 Td 40.617284 Tz (www ) Tj 225.714286 0 0 225.714286 0 1815 Tm 8.209494 0 Td 3.858718 Tz (wwwwwwwwwwwwwwwwwwwwwwwwwwwwwww ) Tj 264.285714 0 0 264.285714 0 1782 Tm 6.958378 0 Td 24.216216 Tz (WWWWW ) Tj 142.857143 0 0 142.857143 0 1757 Tm 12.873 0 Td 20.416667 Tz (WWWWWW ) Tj 184.285714 0 0 184.285714 0 1737 Tm 9.631783 0 Td 9.530908 Tz (wwwwwwwwwwwww ) Tj 267.142857 0 0 267.142857 0 1738 Tm 6.790374 0 Td 3.449722 Tz (wwwwwwwwwwwwwwwwwwwwwwwwwwwwwwwwww ) Tj 42.857143 0 0 42.857143 0 1967 Tm 29.866667 0 Td 64.166667 Tz (NH ) Tj 35.714286 0 0 35.714286 0 1962 Tm 38.724 0 Td 32.666667 Tz (ANAW ) Tj 43.571429 0 0 43.571429 0 1947.377049 Tm 30.134426 0 Td 34.42623 Tz (w ) Tj 0.252459 0 Td 22.100789 Tz (wwwwwwwww ) Tj 14.285714 0 0 14.285714 0 1925 Tm 93.73 0 Td 105 Tz (W ) Tj 72.857143 0 0 72.857143 0 1861 Tm 16.196078 0 Td 10.030166 Tz (wwwwwwwwwwwww ) Tj 61.904762 0 0 61.904762 0 1897.276596 Tm 20.176154 0 Td 70.897436 Tz (WWW ) Tj 1.550769 0 Td 18.846154 Tz (. ) Tj 0.177692 0 Td 74.038462 Tz (We ) Tj 262.857143 0 0 262.857143 0 1847 Tm 4.481522 0 Td 12.277668 Tz (WWWWWWWWWWW ) Tj 38.571429 0 0 38.571429 0 1834 Tm 31.111111 0 Td 24.197531 Tz (WANAN ) Tj 182.857143 0 0 182.857143 0 1820 Tm 6.414844 0 Td 9.395032 Tz (wwwwwwwwwwwww ) Tj 8.571429 0 0 8.571429 0 1809 Tm 136.616667 0 Td 116.666667 Tz (. ) Tj 172.857143 0 0 172.857143 0 1793 Tm 6.757025 0 Td 4.666667 Tz (wwwwwwwwwwwwwwwwwwwwwwwww ) Tj 50 0 0 50 0 1765 Tm 23.36 0 Td 32.5 Tz (nwar ) Tj 98.571429 0 0 98.571429 0 1739 Tm 10.053623 0 Td 16.274155 Tz (WAAAAAAA ) Tj 218.571429 0 0 218.571429 0 1740 Tm 4.648366 0 Td 16.108388 Tz (WAWAMAMA ) Tj 61.428571 0 0 61.428571 0 1741 Tm 18.134884 0 Td 14.16882 Tz (wwwwwwwww ) Tj 212.857143 0 0 212.857143 0 1734 Tm 4.712081 0 Td 7.340604 Tz (WWWWWWWWWWWWWWWW ) Tj 185.714286 0 0 185.714286 0 1735 Tm 6.014615 0 Td 21.538462 Tz (WANAWWW ) Tj 151.428571 0 0 151.428571 0 1730 Tm 6.927358 0 Td 13.207547 Tz (wwwwwwwwww ) Tj 15.714286 0 0 15.714286 0 1734 Tm 71.972727 0 Td 106.060606 Tz (A ) Tj 291.428571 0 0 291.428571 0 1830 Tm 5.75098 0 Td 10.606061 Tz (WWWWWWWWWMA ) Tj 67.142857 0 0 67.142857 0 1784 Tm 23.948936 0 Td 14.893617 Tz (wwwwwwww ) Tj 44.285714 0 0 44.285714 0 1738 Tm 35.270968 0 Td 19.444444 Tz (wwwwww ) Tj 317.142857 0 0 317.142857 0 1720 Tm 4.814865 0 Td 12.087087 Tz (WWWWWWWWWW ) Tj 87.142857 0 0 87.142857 0 1883 Tm 16.24918 0 Td 11.47541 Tz (wwwwwwwwwww ) Tj 14.285714 0 0 14.285714 0 1859 Tm 97.3 0 Td 105 Tz (W ) Tj 287.142857 0 0 287.142857 0 1785 Tm 4.516915 0 Td 10.012438 Tz (wwwwwwwwwwww ) Tj 131.428571 0 0 131.428571 0 1737 Tm 9.56413 0 Td 11.413043 Tz (WWWWWWWWWWW ) Tj 17.142857 0 0 17.142857 0 1718 Tm 71.633333 0 Td 126.388889 Tz (w ) Tj 328.571429 0 0 328.571429 0 1694 Tm 3.627826 0 Td 39.565217 Tz (WWW ) Tj 74.285714 0 0 74.285714 0 1609 Tm 6.878846 0 Td 53.098291 Tz (612 ) Tj 42.857143 0 0 42.857143 0 1597 Tm 44.426667 0 Td 71.296296 Tz (100 ) Tj 45.714286 0 0 45.714286 0 890 Tm 17.434375 0 Td 76.5625 Tz (620 ) Tj 81.428571 0 0 81.428571 0 621 Tm 14.7 0 Td 43.664717 Tz (FIG ) Tj 1.080702 0 Td 34.795322 Tz (. ) Tj 0.208772 0 Td 64.473684 Tz (6A ) Tj ET Q endstream endobj 108 0 obj << /Length 1 >> stream q endstream endobj 109 0 obj << /Length 1147 >> stream Q q 0.24 0 0 0.24 0 0 cm BT /F1 1 Tf 3 Tr 84.857143 0 0 84.857143 0 3027.857143 Tm 3.912458 0 Td 35.353535 Tz (U ) Tj 0.565657 0 Td 35.353535 Tz (. ) Tj 0.341751 0 Td 35.353535 Tz (S ) Tj 0.353535 0 Td 35.353535 Tz (. ) Tj 0.624579 0 Td 65.796857 Tz (Patent ) Tj 85.428571 0 0 85.428571 0 3023.68559 Tm 9.879599 0 Td 44.221479 Tz (Feb ) Tj 0.854515 0 Td 35.117057 Tz (. ) Tj 0.339465 0 Td 34.141583 Tz (26 ) Tj 0.550167 0 Td 35.117057 Tz (, ) Tj 0.327759 0 Td 43.896321 Tz (2019 ) Tj 85.357143 0 0 85.357143 0 3019.694581 Tm 14.632636 0 Td 48.033473 Tz (Sheet ) Tj 1.569874 0 Td 35.146444 Tz (6 ) Tj 0.527197 0 Td 42.956764 Tz (of ) Tj 0.644351 0 Td 35.146444 Tz (9 ) Tj 92.857143 0 0 92.857143 0 3023 Tm 18.932308 0 Td 63.717949 Tz (US ) Tj 1.130769 0 Td 32.307692 Tz (10 ) Tj 0.473846 0 Td 34.102564 Tz (, ) Tj 0.161538 0 Td 50.25641 Tz (215 ) Tj 0.893846 0 Td 34.102564 Tz (, ) Tj 0.161538 0 Td 55.042735 Tz (692 ) Tj 1.26 0 Td 53.846154 Tz (B2 ) Tj 51.428571 0 0 51.428571 0 2174 Tm 30.663889 0 Td 76.697531 Tz (630 ) Tj 90 0 0 90 0 1003 Tm 13.4 0 Td 43.82716 Tz (FIG ) Tj 1.088889 0 Td 33.333333 Tz (. ) Tj 0.3 0 Td 53.703704 Tz (6B ) Tj ET Q endstream endobj 110 0 obj << /Length 1 >> stream q endstream endobj 111 0 obj << /Length 5939 >> stream Q q 0.24 0 0 0.24 0 0 cm BT /F1 1 Tf 3 Tr 70 0 0 70 0 3033 Tm 7.514286 0 Td 81.428571 Tz (atent ) Tj 67.142857 0 0 67.142857 0 3024 Tm 12.510638 0 Td 54.609929 Tz (Feb ) Tj 1.117021 0 Td 34.751773 Tz (. ) Tj 0.476596 0 Td 42.198582 Tz (26 ) Tj 0.640426 0 Td 34.751773 Tz (, ) Tj 0.446809 0 Td 58.953901 Tz (2019 ) Tj 70 0 0 70 0 3022 Tm 17.871429 0 Td 54.761905 Tz (Sheet ) Tj 1.928571 0 Td 33.333333 Tz (7 ) Tj 0.585714 0 Td 52.380952 Tz (of ) Tj 0.885714 0 Td 33.333333 Tz (9 ) Tj 92.857143 0 0 92.857143 0 3023 Tm 18.910769 0 Td 64.615385 Tz (US ) Tj 1.141538 0 Td 32.307692 Tz (10 ) Tj 0.473846 0 Td 34.102564 Tz (, ) Tj 0.161538 0 Td 49.65812 Tz (215 ) Tj 0.958462 0 Td 34.102564 Tz (, ) Tj 0.086154 0 Td 55.641026 Tz (692 ) Tj 1.26 0 Td 53.846154 Tz (B2 ) Tj 58.571429 0 0 58.571429 0 2535 Tm 28.887805 0 Td 61.653117 Tz (700 ) Tj 61.428571 0 0 61.428571 0 2334 Tm 28.765116 0 Td 32.55814 Tz (- ) Tj 0.325581 0 Td 66.020672 Tz (702 ) Tj 84.285714 0 0 84.285714 0 2320.006729 Tm 8.162712 0 Td 47.237916 Tz (Disposing ) Tj 2.8 0 Td 33.615819 Tz (a ) Tj 0.522034 0 Td 37.570621 Tz (light ) Tj 1.210169 0 Td 47.457627 Tz (source ) Tj 1.957627 0 Td 43.502825 Tz (on ) Tj 0.854237 0 Td 33.615819 Tz (a ) Tj 0.486441 0 Td 42.62398 Tz (substrate ) Tj 2.455932 0 Td 33.615819 Tz (, ) Tj 84.285714 0 0 84.285714 0 2261.62234 Tm 8.174576 0 Td 44.161959 Tz (the ) Tj 0.99661 0 Td 39.943503 Tz (light ) Tj 1.281356 0 Td 48.116761 Tz (source ) Tj 1.969492 0 Td 43.502825 Tz (configured ) Tj 2.894915 0 Td 32.627119 Tz (to ) Tj 0.676271 0 Td 44.985876 Tz (emit ) Tj 1.305085 0 Td 37.175141 Tz (light ) Tj 71.428571 0 0 71.428571 0 2029.953757 Tm 9.646 0 Td 60 Tz (Forming ) Tj 2.8 0 Td 35 Tz (a ) Tj 0.588 0 Td 55.222222 Tz (gas ) Tj 1.358 0 Td 53.666667 Tz (sensing ) Tj 2.562 0 Td 51 Tz (section ) Tj 2.352 0 Td 64.166667 Tz (on ) Tj 1.092 0 Td 44.333333 Tz (the ) Tj 67.142857 0 0 67.142857 0 1967.676248 Tm 10.261702 0 Td 54.058314 Tz (substrate ) Tj 3.12766 0 Td 34.751773 Tz (, ) Tj 0.461702 0 Td 43.853428 Tz (the ) Tj 1.161702 0 Td 61.229314 Tz (gas ) Tj 1.310638 0 Td 59.929078 Tz (sensing ) Tj 2.8 0 Td 54.964539 Tz (section ) Tj 74.285714 0 0 74.285714 0 1908.909404 Tm 9.328846 0 Td 52.724359 Tz (comprising ) Tj 3.298077 0 Td 65.064103 Tz (an ) Tj 1.009615 0 Td 48.717949 Tz (optical ) Tj 2.046154 0 Td 59.82906 Tz (waveguide ) Tj 3.486538 0 Td 46.616809 Tz (structure ) Tj 70 0 0 70 0 1848.814815 Tm 9.814286 0 Td 57.142857 Tz (according ) Tj 3.371429 0 Td 33.333333 Tz (to ) Tj 0.785714 0 Td 63.203463 Tz (embodiments ) Tj 4.471429 0 Td 54.761905 Tz (of ) Tj 0.857143 0 Td 42.857143 Tz (the ) Tj 1.114286 0 Td 59.183673 Tz (present ) Tj 77.142857 0 0 77.142857 0 1789.669481 Tm 8.983333 0 Td 45.37037 Tz (invention ) Tj 2.683333 0 Td 57.716049 Tz (whereby ) Tj 2.67037 0 Td 44.650206 Tz (the ) Tj 1.062963 0 Td 47.222222 Tz (optical ) Tj 1.983333 0 Td 57.133059 Tz (waveguide ) Tj 68.571429 0 0 68.571429 0 1728.872283 Tm 10.0625 0 Td 50.231481 Tz (structure ) Tj 3.10625 0 Td 21.875 Tz (is ) Tj 0.670833 0 Td 57.118056 Tz (arranged ) Tj 3.15 0 Td 32.8125 Tz (to ) Tj 0.729167 0 Td 55.208333 Tz (receive ) Tj 2.625 0 Td 49.421296 Tz (the ) Tj 1.225 0 Td 47.152778 Tz (light ) Tj 70 0 0 70 0 1669.397436 Tm 9.885714 0 Td 44.047619 Tz (from ) Tj 1.7 0 Td 43.650794 Tz (the ) Tj 1.128571 0 Td 44.761905 Tz (light ) Tj 1.428571 0 Td 57.539683 Tz (source ) Tj 2.4 0 Td 61.111111 Tz (and ) Tj 1.385714 0 Td 53.571429 Tz (transmit ) Tj 2.728571 0 Td 49.206349 Tz (the ) Tj 1.228571 0 Td 44.285714 Tz (light ) Tj 67.142857 0 0 67.142857 0 1612.915297 Tm 10.246809 0 Td 57.092199 Tz (received ) Tj 3.038298 0 Td 55.673759 Tz (through ) Tj 2.725532 0 Td 49.64539 Tz (the ) Tj 1.191489 0 Td 53.900709 Tz (optical ) Tj 2.323404 0 Td 65.642238 Tz (waveguide ) Tj 62.857143 0 0 62.857143 0 1548 Tm 10.929545 0 Td 54.503367 Tz (structure ) Tj 54.285714 0 0 54.285714 0 1762 Tm 32.936842 0 Td 72.660819 Tz (704 ) Tj 74.285714 0 0 74.285714 0 1228 Tm 23.557692 0 Td 33.653846 Tz (- ) Tj 0.498077 0 Td 50.106838 Tz (706 ) Tj 74.285714 0 0 74.285714 0 1292.173333 Tm 9.207692 0 Td 54.843305 Tz (Disposing ) Tj 3.257692 0 Td 33.653846 Tz (a ) Tj 0.525 0 Td 41.730769 Tz (light ) Tj 1.346154 0 Td 52.163462 Tz (detector ) Tj 2.598077 0 Td 63.942308 Tz (on ) Tj 1.090385 0 Td 44.123932 Tz (the ) Tj 1.036538 0 Td 48.611111 Tz (substrate ) Tj 78.571429 0 0 78.571429 0 1229.701149 Tm 8.743636 0 Td 58.484848 Tz (whereby ) Tj 2.596364 0 Td 50.20202 Tz (the ) Tj 1.081818 0 Td 39.030303 Tz (light ) Tj 1.323636 0 Td 48.522727 Tz (detector ) Tj 2.532727 0 Td 22.272727 Tz (is ) Tj 0.636364 0 Td 50.909091 Tz (arranged ) Tj 2.685455 0 Td 32.878788 Tz (to ) Tj 74.285714 0 0 74.285714 0 1169.497804 Tm 9.261538 0 Td 50.961538 Tz (receive ) Tj 2.396154 0 Td 44.123932 Tz (the ) Tj 1.157692 0 Td 41.730769 Tz (light ) Tj 1.373077 0 Td 48.951049 Tz (transmitted ) Tj 3.594231 0 Td 40.384615 Tz (from ) Tj 1.521154 0 Td 44.871795 Tz (the ) Tj 74.285714 0 0 74.285714 0 1112.28343 Tm 9.261538 0 Td 48.717949 Tz (optical ) Tj 2.019231 0 Td 60.078348 Tz (waveguide ) Tj 3.540385 0 Td 45.868946 Tz (structure ) Tj 2.773077 0 Td 60.576923 Tz (and ) Tj 1.305769 0 Td 33.653846 Tz (is ) Tj 71.428571 0 0 71.428571 0 1052.805471 Tm 9.646 0 Td 52.733333 Tz (configured ) Tj 3.486 0 Td 32.666667 Tz (to ) Tj 0.784 0 Td 54.833333 Tz (detect ) Tj 2.1 0 Td 35 Tz (a ) Tj 0.63 0 Td 55.222222 Tz (gas ) Tj 1.246 0 Td 32.666667 Tz (in ) Tj 0.77 0 Td 49.777778 Tz (the ) Tj 1.106 0 Td 66.111111 Tz (gas ) Tj 70 0 0 70 0 994.027778 Tm 9.885714 0 Td 56.122449 Tz (Sensing ) Tj 2.657143 0 Td 50.680272 Tz (section ) Tj 2.342857 0 Td 61.904762 Tz (based ) Tj 2.2 0 Td 54.761905 Tz (on ) Tj 1.042857 0 Td 49.206349 Tz (the ) Tj 1.214286 0 Td 45.714286 Tz (light ) Tj 74.285714 0 0 74.285714 0 928 Tm 9.261538 0 Td 51.883013 Tz (received ) Tj 84.285714 0 0 84.285714 0 543 Tm 13.442373 0 Td 44.821092 Tz (FIG ) Tj 1.174576 0 Td 33.615819 Tz (. ) Tj 0.415254 0 Td 33.615819 Tz (7 ) Tj ET Q endstream endobj 112 0 obj << /Length 1 >> stream q endstream endobj 113 0 obj << /Length 10047 >> stream Q q 0.24 0 0 0.24 0 0 cm BT /F1 1 Tf 3 Tr 84.857143 0 0 84.857143 0 3027.857143 Tm 3.912458 0 Td 35.353535 Tz (U ) Tj 0.565657 0 Td 35.353535 Tz (. ) Tj 0.341751 0 Td 35.353535 Tz (S ) Tj 0.353535 0 Td 35.353535 Tz (. ) Tj 0.624579 0 Td 65.796857 Tz (Patent ) Tj 85.428571 0 0 85.428571 0 3023.68559 Tm 9.879599 0 Td 44.221479 Tz (Feb ) Tj 0.854515 0 Td 35.117057 Tz (. ) Tj 0.339465 0 Td 34.141583 Tz (26 ) Tj 0.550167 0 Td 35.117057 Tz (, ) Tj 0.327759 0 Td 43.896321 Tz (2019 ) Tj 85.357143 0 0 85.357143 0 3019.682051 Tm 14.632636 0 Td 44.909344 Tz (Sheet ) Tj 1.569874 0 Td 35.146444 Tz (8 ) Tj 0.527197 0 Td 42.956764 Tz (of ) Tj 0.644351 0 Td 35.146444 Tz (9 ) Tj 92.857143 0 0 92.857143 0 3023 Tm 18.932308 0 Td 63.717949 Tz (US ) Tj 1.130769 0 Td 32.307692 Tz (10 ) Tj 0.473846 0 Td 34.102564 Tz (, ) Tj 0.161538 0 Td 50.25641 Tz (215 ) Tj 0.893846 0 Td 34.102564 Tz (, ) Tj 0.161538 0 Td 55.042735 Tz (692 ) Tj 1.26 0 Td 53.846154 Tz (B2 ) Tj 45.714286 0 0 45.714286 0 2433 Tm 35.6125 0 Td 65.625 Tz (008 ) Tj 54.285714 0 0 54.285714 0 2164 Tm 15.878947 0 Td 55.263158 Tz (804 ) Tj 62.857143 0 0 62.857143 0 2162 Tm 21.063636 0 Td 47.727273 Tz (806 ) Tj 70 0 0 70 0 2090 Tm 15.257143 0 Td 59.52381 Tz (Gas ) Tj 1.342857 0 Td 43.915344 Tz (diffusion ) Tj 2.6 0 Td 57.539683 Tz (window ) Tj 71.428571 0 0 71.428571 0 1974.516484 Tm 21.504 0 Td 49.777778 Tz (Cap ) Tj 1.134 0 Td 55.066667 Tz (wafer ) Tj 31.428571 0 0 31.428571 0 1955 Tm 18.518182 0 Td 45.075758 Tz (Sa ) Tj 54.285714 0 0 54.285714 0 1806 Tm 36.455263 0 Td 33.77193 Tz (. ) Tj 0.405263 0 Td 54.239766 Tz (802 ) Tj 55.714286 0 0 55.714286 0 1765 Tm 24.374359 0 Td 65.811966 Tz (604 ) Tj 61.428571 0 0 61.428571 0 1699 Tm 16.62093 0 Td 57.881137 Tz (809 ) Tj 62.857143 0 0 62.857143 0 1696 Tm 27.284091 0 Td 55.681818 Tz (909 ) Tj 45.714286 0 0 45.714286 0 1685 Tm 31.36875 0 Td 60.763889 Tz (100 ) Tj 52.857143 0 0 52.857143 0 1575 Tm 8.778378 0 Td 59.90991 Tz (808 ) Tj 67.142857 0 0 67.142857 0 1566 Tm 29.742553 0 Td 64.539007 Tz (808 ) Tj 7.142857 0 0 7.142857 0 1567 Tm 233.1 0 Td 285.833333 Tz (MMMMMMMM ) Tj 14.285714 0 0 14.285714 0 1558 Tm 110.53 0 Td 105 Tz (17 ) Tj 15.714286 0 0 15.714286 0 1555 Tm 106.018182 0 Td 121.969697 Tz (TI ) Tj 12.857143 0 0 12.857143 0 1545 Tm 129.422222 0 Td 142.592593 Tz (TITIEI ) Tj 182.857143 0 0 182.857143 0 1387 Tm 5.725781 0 Td 13.763021 Tz (S333333333 ) Tj 28.571429 0 0 28.571429 0 1501 Tm 54.495 0 Td 218.75 Tz (11 ) Tj 38.571429 0 0 38.571429 0 1485 Tm 15.607407 0 Td 10.802469 Tz (ALTE ) Tj 14.285714 0 0 14.285714 0 1476 Tm 60.48 0 Td 365.555556 Tz (For ) Tj 47.142857 0 0 47.142857 0 1459 Tm 14.190909 0 Td 6.363636 Tz (LILIT ) Tj 20 0 0 20 0 1476 Tm 62.6 0 Td 44.444444 Tz (www ) Tj 31.428571 0 0 31.428571 0 1457 Tm 23.068182 0 Td 208.585859 Tz (FFF ) Tj 47.142857 0 0 47.142857 0 1475 Tm 25.687879 0 Td 44.781145 Tz (www ) Tj 24.285714 0 0 24.285714 0 1481 Tm 59.047059 0 Td 487.254902 Tz (TANT ) Tj 27.142857 0 0 27.142857 0 1471 Tm 48.484211 0 Td 324.671053 Tz (ATTIVITI ) Tj 10 0 0 10 0 1471 Tm 75.6 0 Td 153.333333 Tz (TREET ) Tj 15.714286 0 0 15.714286 0 1466 Tm 64.781818 0 Td 60.984848 Tz (ffff ) Tj 47.142857 0 0 47.142857 0 1459 Tm 25.093939 0 Td 16.666667 Tz (wwwwwww ) Tj 10 0 0 10 0 1464 Tm 130.8 0 Td 33.333333 Tz (f ) Tj 11.428571 0 0 11.428571 0 1453 Tm 65.45 0 Td 167.708333 Tz (ff ) Tj 21.428571 0 0 21.428571 0 1448 Tm 42.746667 0 Td 246.296296 Tz (Territ ) Tj 20 0 0 20 0 1452 Tm 50.6 0 Td 208.333333 Tz (fffff ) Tj 10 0 0 10 0 1450 Tm 82.6 0 Td 100 Tz (E ) Tj 12.857143 0 0 12.857143 0 1451 Tm 98 0 Td 132.222222 Tz (terrr ) Tj 17.142857 0 0 17.142857 0 1440 Tm 33.95 0 Td 111.805556 Tz (TE ) Tj 38.571429 0 0 38.571429 0 1425 Tm 31.085185 0 Td 177.160494 Tz (FITTIFF ) Tj 14.285714 0 0 14.285714 0 1446 Tm 92.75 0 Td 668.888889 Tz (TFT ) Tj 22.857143 0 0 22.857143 0 1448 Tm 60.1125 0 Td 38.28125 Tz (Bure ) Tj 15.714286 0 0 15.714286 0 1428 Tm 61.345455 0 Td 100.757576 Tz (fr ) Tj 12.857143 0 0 12.857143 0 1438 Tm 148.788889 0 Td 25.925926 Tz (* ) Tj 0.233333 0 Td 38.888889 Tz (* ) Tj 22.857143 0 0 22.857143 0 1428 Tm 70.39375 0 Td 187.152778 Tz (ferrar ) Tj 30 0 0 30 0 1411 Tm 43.2 0 Td 109.722222 Tz (tiff ) Tj 52.857143 0 0 52.857143 0 1414 Tm 21.775676 0 Td 40.202703 Tz (With ) Tj 28.571429 0 0 28.571429 0 1400 Tm 36.54 0 Td 121.041667 Tz (Fift ) Tj 22.857143 0 0 22.857143 0 1416 Tm 69.08125 0 Td 696.354167 Tz (ir ) Tj 15.714286 0 0 15.714286 0 1414 Tm 89.6 0 Td 84.848485 Tz (re ) Tj 12.857143 0 0 12.857143 0 1413 Tm 131.522222 0 Td 61.574074 Tz (Eiff ) Tj 28.571429 0 0 28.571429 0 1396 Tm 55.475 0 Td 199.791667 Tz (FEAT ) Tj 22.857143 0 0 22.857143 0 1404 Tm 70.91875 0 Td 127.604167 Tz (TEET ) Tj 84.285714 0 0 84.285714 0 1415 Tm 22.127119 0 Td 8.757062 Tz (wwwwwwwwwwwwww ) Tj 58.571429 0 0 58.571429 0 1375 Tm 26.429268 0 Td 106.99187 Tz (TUTTI ) Tj 118.571429 0 0 118.571429 0 1406 Tm 8.813253 0 Td 9.638554 Tz (wwwwwwwwwwwwww ) Tj 12.857143 0 0 12.857143 0 1401.5 Tm 114.1 0 Td 51.851852 Tz (* ) Tj 0.388889 0 Td 51.851852 Tz (* ) Tj 12.857143 0 0 12.857143 0 1404 Tm 143.811111 0 Td 66.975309 Tz (rrrrrr ) Tj 52.857143 0 0 52.857143 0 1398 Tm 11.881081 0 Td 49.399399 Tz (www ) Tj 52.857143 0 0 52.857143 0 1394 Tm 19.581081 0 Td 89.864865 Tz (WA ) Tj 18.571429 0 0 18.571429 0 1395 Tm 79.584615 0 Td 68.803419 Tz (MEN ) Tj 10 0 0 10 0 1391 Tm 108 0 Td 286.111111 Tz (reftir ) Tj 204.285714 0 0 204.285714 0 1320 Tm 2.976224 0 Td 3.426573 Tz (LLLLLLLLLL ) Tj 12.857143 0 0 12.857143 0 1389 Tm 107.1 0 Td 207.407407 Tz (FI ) Tj 14.285714 0 0 14.285714 0 1387 Tm 91.14 0 Td 99.166667 Tz (TE ) Tj 58.571429 0 0 58.571429 0 1381 Tm 34.009756 0 Td 60.704607 Tz (612 ) Tj 11.428571 0 0 11.428571 0 1392 Tm 161.175 0 Td 116.666667 Tz (w ) Tj 97.142857 0 0 97.142857 0 1359 Tm 12.311765 0 Td 8.446456 Tz (wwwwwwwwwwwww ) Tj 12.857143 0 0 12.857143 0 1379 Tm 98.855556 0 Td 129.62963 Tz (r ) Tj 14.285714 0 0 14.285714 0 1382 Tm 95.97 0 Td 215.833333 Tz (rr ) Tj 45.714286 0 0 45.714286 0 1378 Tm 13.95625 0 Td 74.739583 Tz (WA ) Tj 70 0 0 70 0 1357.762376 Tm 13.371429 0 Td 45.238095 Tz (diyo ) Tj -1.314286 0 Td 55.555556 Tz (uob ) Tj -0.214286 0 Td 33.333333 Tz (! ) Tj -0.214286 0 Td 33.333333 Tz (l ) Tj -0.142857 0 Td 33.333333 Tz (! ) Tj -0.2 0 Td 33.333333 Tz (S ) Tj 187.142857 0 0 187.142857 0 1377 Tm 7.480916 0 Td 7.896522 Tz (wwwwwwwwwwwwwww ) Tj 22.857143 0 0 22.857143 0 1376 Tm 63.21875 0 Td 131.25 Tz (ACT ) Tj 78.571429 0 0 78.571429 0 1341 Tm 22.030909 0 Td 3.888889 Tz (221222 ) Tj 311.428571 0 0 311.428571 0 1277 Tm 5.577523 0 Td 0.749235 Tz (121122222222222 ) Tj 48.571429 0 0 48.571429 0 1272 Tm 35.679412 0 Td 10.294118 Tz (222 ) Tj 14.285714 0 0 14.285714 0 1372 Tm 115.85 0 Td 128.333333 Tz (R ) Tj 105.714286 0 0 105.714286 0 1367 Tm 12.212162 0 Td 65.690691 Tz (Www ) Tj 40 0 0 40 0 1359 Tm 29.175 0 Td 114.583333 Tz (rrrrrrrr ) Tj 121.428571 0 0 121.428571 0 1334 Tm 9.338824 0 Td 37.51634 Tz (WWW ) Tj 14.285714 0 0 14.285714 0 1363 Tm 87.71 0 Td 259 Tz (Eftir ) Tj 38.571429 0 0 38.571429 0 1353 Tm 14.933333 0 Td 100.462963 Tz (ETTE ) Tj 21.428571 0 0 21.428571 0 1353 Tm 71.353333 0 Td 147.777778 Tz (ET ) Tj 32.857143 0 0 32.857143 0 1349 Tm 22.491304 0 Td 47.342995 Tz (mar ) Tj 57.142857 0 0 57.142857 0 1319 Tm 32.7425 0 Td 23.333333 Tz (311315 ) Tj 12.857143 0 0 12.857143 0 1342 Tm 46.588889 0 Td 116.666667 Tz (L ) Tj 14.285714 0 0 14.285714 0 1345 Tm 72.1 0 Td 116.666667 Tz (f ) Tj 10 0 0 10 0 1336 Tm 68.1 0 Td 33.333333 Tz (. ) Tj 35.714286 0 0 35.714286 0 1337 Tm 34.244 0 Td 114.333333 Tz (CONT ) Tj 10 0 0 10 0 1330 Tm 58.3 0 Td 33.333333 Tz (7 ) Tj 41.428571 0 0 41.428571 0 1311 Tm 17.041379 0 Td 78.045977 Tz (FETTO ) Tj 27.142857 0 0 27.142857 0 1322 Tm 41.889474 0 Td 98.245614 Tz (irst ) Tj 118.571429 0 0 118.571429 0 1285 Tm 5.481928 0 Td 13.353414 Tz (2013 ) Tj 62.857143 0 0 62.857143 0 1286 Tm 11.215909 0 Td 119.848485 Tz (FEEST ) Tj 190 0 0 190 0 1268 Tm 5.552632 0 Td 25.438596 Tz (WWW ) Tj 15.714286 0 0 15.714286 0 1317 Tm 50.272727 0 Td 49.494949 Tz (TET ) Tj 84.285714 0 0 84.285714 0 1320 Tm 19.49322 0 Td 56.026365 Tz (www ) Tj 10 0 0 10 0 1350 Tm 141.6 0 Td 33.333333 Tz (E ) Tj 12.857143 0 0 12.857143 0 1350 Tm 125.688889 0 Td 408.333333 Tz (rrrr ) Tj 14.285714 0 0 14.285714 0 1327 Tm 69.37 0 Td 128.333333 Tz (TER ) Tj 15.714286 0 0 15.714286 0 1327 Tm 84 0 Td 173.232323 Tz (rrrrrrrrr ) Tj 28.571429 0 0 28.571429 0 1329 Tm 52.29 0 Td 332.5 Tz (TIT ) Tj 15 0 0 15 0 1316 Tm 104.2 0 Td 33.333333 Tz (* ) Tj 0.333333 0 Td 88.888889 Tz (Arrrrr ) Tj 28.571429 0 0 28.571429 0 1311 Tm 38.99 0 Td 401.041667 Tz (free ) Tj 24.285714 0 0 24.285714 0 1284 Tm 38.170588 0 Td 288.235294 Tz (For ) Tj 18.571429 0 0 18.571429 0 1279 Tm 51.261538 0 Td 178.070175 Tz (Arrrrrrrrrrrrrrrrrr ) Tj 41.428571 0 0 41.428571 0 1283 Tm 29.472414 0 Td 290.804598 Tz (Frrrrrr ) Tj 27.142857 0 0 27.142857 0 1283 Tm 48.815789 0 Td 323.684211 Tz (Frikiri ) Tj 14.285714 0 0 14.285714 0 1283 Tm 111.3 0 Td 140 Tz (r ) Tj 41.428571 0 0 41.428571 0 1286.034853 Tm 22.593103 0 Td 498.850575 Tz (Str ) Tj 11.803448 0 Td 214.942529 Tz (eerrrrr ) Tj 14.285714 0 0 14.285714 0 1273 Tm 68.67 0 Td 194.25 Tz (FTTTTTTTTTTTTTTTTTTr ) Tj 15.714286 0 0 15.714286 0 1312 Tm 117.663636 0 Td 111.363636 Tz (FEAT ) Tj 49.285714 0 0 49.285714 0 1318.211268 Tm 22.805797 0 Td 27.05314 Tz (w ) Tj 0.162319 0 Td 19.367589 Tz (wwwwwwwwwww ) Tj 62.857143 0 0 62.857143 0 1304 Tm 17.484091 0 Td 202.840909 Tz (ferrariffe ) Tj 18.571429 0 0 18.571429 0 1281 Tm 40.653846 0 Td 226.602564 Tz (rafi ) Tj 14.285714 0 0 14.285714 0 1279 Tm 62.44 0 Td 35 Tz (* ) Tj 14.285714 0 0 14.285714 0 1275 Tm 120.4 0 Td 105 Tz (fr ) Tj 62.857143 0 0 62.857143 0 1064 Tm 9.752273 0 Td 54.79798 Tz (TSV ) Tj 58.571429 0 0 58.571429 0 1066 Tm 29.485366 0 Td 61.653117 Tz (TSV ) Tj 54.285714 0 0 54.285714 0 1008 Tm 31.665789 0 Td 60.380117 Tz (814 ) Tj 68.571429 0 0 68.571429 0 1002 Tm 8.822917 0 Td 51.851852 Tz (812 ) Tj 61.428571 0 0 61.428571 0 706.045977 Tm 19.42093 0 Td 55.167959 Tz (FIG ) Tj 1.302326 0 Td 35.271318 Tz (. ) Tj 0.553488 0 Td 35.271318 Tz (8 ) Tj ET Q endstream endobj 114 0 obj << /Length 1 >> stream q endstream endobj 115 0 obj << /Length 9663 >> stream Q q 0.24 0 0 0.24 0 0 cm BT /F1 1 Tf 3 Tr 84.857143 0 0 84.857143 0 3027.857143 Tm 3.912458 0 Td 35.353535 Tz (U ) Tj 0.565657 0 Td 35.353535 Tz (. ) Tj 0.341751 0 Td 35.353535 Tz (S ) Tj 0.353535 0 Td 35.353535 Tz (. ) Tj 0.624579 0 Td 65.796857 Tz (Patent ) Tj 85.428571 0 0 85.428571 0 3023.68559 Tm 9.856187 0 Td 44.221479 Tz (Feb ) Tj 0.877926 0 Td 35.117057 Tz (. ) Tj 0.339465 0 Td 34.141583 Tz (26 ) Tj 0.550167 0 Td 35.117057 Tz (, ) Tj 0.327759 0 Td 43.896321 Tz (2019 ) Tj 85.357143 0 0 85.357143 0 3019.694581 Tm 14.632636 0 Td 48.033473 Tz (Sheet ) Tj 1.628452 0 Td 35.146444 Tz (9 ) Tj 0.468619 0 Td 42.956764 Tz (of ) Tj 0.644351 0 Td 35.146444 Tz (9 ) Tj 92.857143 0 0 92.857143 0 3023 Tm 18.932308 0 Td 63.717949 Tz (US ) Tj 1.130769 0 Td 32.307692 Tz (10 ) Tj 0.473846 0 Td 34.102564 Tz (, ) Tj 0.161538 0 Td 50.25641 Tz (215 ) Tj 0.893846 0 Td 34.102564 Tz (, ) Tj 0.161538 0 Td 55.042735 Tz (692 ) Tj 1.26 0 Td 53.846154 Tz (B2 ) Tj 27.142857 0 0 27.142857 0 2633 Tm 33.194737 0 Td 68.311404 Tz (000b9gogooowwwww ) Tj 14.285714 0 0 14.285714 0 2635 Tm 120.33 0 Td 103.541667 Tz (IIIIIIII ) Tj 21.785714 0 0 21.785714 0 2626.486957 Tm 56.642623 0 Td 59.672131 Tz (00000 ) Tj -0.137705 0 Td 30.601093 Tz (. ) Tj -1.009836 0 Td 58.652095 Tz (000 ) Tj -0.091803 0 Td 30.601093 Tz (. ) Tj -0.963934 0 Td 56.102004 Tz (000 ) Tj -0.137705 0 Td 30.601093 Tz (. ) Tj -0.642623 0 Td 38.251366 Tz (000 ) Tj -0.137705 0 Td 30.601093 Tz (. ) Tj 21.428571 0 0 21.428571 0 2625 Tm 60.946667 0 Td 31.111111 Tz (0 ) Tj 27.142857 0 0 27.142857 0 2619 Tm 52.721053 0 Td 46.331738 Tz (0000000000000000000000 ) Tj 25.714286 0 0 25.714286 0 2616 Tm 66.655556 0 Td 44.290123 Tz (Yoooo0000000 ) Tj 84.285714 0 0 84.285714 0 2428.40874 Tm 14.937288 0 Td 41.525424 Tz (Free ) Tj 1.186441 0 Td 47.457627 Tz (space ) Tj 1.613559 0 Td 45.727401 Tz (approach ) Tj 232 0 0 232 0 2376.655617 Tm 2.646552 0 Td 7.575758 Tz (ransmission ) Tj -0.056034 0 Td 8.939974 Tz (intensity ) Tj -0.017241 0 Td 37.356322 Tz (of ) Tj -0.017241 0 Td 25.143678 Tz (the ) Tj -0.030172 0 Td 15.229885 Tz (light ) Tj 61.428571 0 0 61.428571 0 2339 Tm 20.625581 0 Td 16.27907 Tz (?? ) Tj 61.428571 0 0 61.428571 0 2339 Tm 20.544186 0 Td 145.426357 Tz (????? ) Tj 4.460465 0 Td 140.180879 Tz (??? ) Tj 7.142857 0 0 7.142857 0 1991.222222 Tm 107.8 0 Td 443.333333 Tz (. ) Tj 0 0 Td 443.333333 Tz (. ) Tj 0 0 Td 443.333333 Tz (. ) Tj 0 0 Td 443.333333 Tz (. ) Tj 0 0 Td 443.333333 Tz (. ) Tj 0 0 Td 443.333333 Tz (. ) Tj 0 0 Td 443.333333 Tz (. ) Tj 0 0 Td 443.333333 Tz (. ) Tj 0 0 Td 443.333333 Tz (. ) Tj 45.714286 0 0 45.714286 0 1837 Tm 32.965625 0 Td 138.541667 Tz (15 ) Tj 121.428571 0 0 121.428571 0 1804 Tm 14.708235 0 Td 34.313725 Tz (2 ) Tj 121.428571 0 0 121.428571 0 1804 Tm 8.26 0 Td 34.313725 Tz (0 ) Tj 0.214118 0 Td 34.313725 Tz (. ) Tj 0.214118 0 Td 34.313725 Tz (5 ) Tj 1.910588 0 Td 34.313725 Tz (1 ) Tj 1.910588 0 Td 34.313725 Tz (1 ) Tj 0.14 0 Td 34.313725 Tz (. ) Tj 0.214118 0 Td 34.313725 Tz (5 ) Tj 112.857143 0 0 112.857143 0 1700.300813 Tm 8.586076 0 Td 49.718706 Tz (Gas ) Tj 1.001266 0 Td 33.966245 Tz (cell ) Tj 0.788608 0 Td 33.966245 Tz (' ) Tj 0.141772 0 Td 33.966245 Tz (s ) Tj 0.363291 0 Td 40.11955 Tz (length ) Tj 1.665823 0 Td 33.966245 Tz (\( ) Tj 0.221519 0 Td 32.489451 Tz (cm ) Tj 0.620253 0 Td 33.966245 Tz (\) ) Tj 101.428571 0 0 101.428571 0 1592 Tm 11.614085 0 Td 43.818466 Tz (FIG ) Tj 1.025352 0 Td 34.507042 Tz (. ) Tj 0.325352 0 Td 44.366197 Tz (9A ) Tj 65.714286 0 0 65.714286 0 1357 Tm 10.621739 0 Td 56.304348 Tz (Noise ) Tj 68.571429 0 0 68.571429 0 1304 Tm 10.004167 0 Td 41.319444 Tz (from ) Tj 1.44375 0 Td 42.534722 Tz (IR ) Tj 74.285714 0 0 74.285714 0 1246 Tm 9.328846 0 Td 49.732906 Tz (source ) Tj 64.285714 0 0 64.285714 0 1357 Tm 14.248889 0 Td 58.592593 Tz (Noise ) Tj 68.571429 0 0 68.571429 0 1308.963504 Tm 13.008333 0 Td 41.927083 Tz (from ) Tj 1.4875 0 Td 55.092593 Tz (gas ) Tj 74.285714 0 0 74.285714 0 1246 Tm 11.994231 0 Td 33.653846 Tz (, ) Tj 0.753846 0 Td 37.019231 Tz (cell ) Tj 0.794231 0 Td 33.653846 Tz (. ) Tj 0.134615 0 Td 33.653846 Tz (. ) Tj 0.35 0 Td 33.653846 Tz (. ) Tj 60 0 0 60 0 1358.420513 Tm 19.266667 0 Td 62.777778 Tz (Noise ) Tj 3.883333 0 Td 75.925926 Tz (Gas ) Tj 68.571429 0 0 68.571429 0 1311.374101 Tm 17.077083 0 Td 44.357639 Tz (from ) Tj 2.245833 0 Td 49.826389 Tz (absorption ) Tj 77.142857 0 0 77.142857 0 1247 Tm 14.687037 0 Td 44.830247 Tz (detector ) Tj 61.428571 0 0 61.428571 0 1207 Tm 25.183721 0 Td 55.426357 Tz (Signals ) Tj 4.285714 0 0 4.285714 0 1257 Tm 348.366667 0 Td 466.666667 Tz (! ) Tj 4.285714 0 0 4.285714 0 1245 Tm 154.933333 0 Td 466.666667 Tz (- ) Tj 4.285714 0 0 4.285714 0 1243 Tm 190.166667 0 Td 505.555556 Tz (- ) Tj 4.285714 0 0 4.285714 0 1239 Tm 348.366667 0 Td 466.666667 Tz (- ) Tj 4.285714 0 0 4.285714 0 1228 Tm 154.933333 0 Td 466.666667 Tz (- ) Tj 4.285714 0 0 4.285714 0 1219 Tm 190.166667 0 Td 505.555556 Tz (- ) Tj 4.285714 0 0 4.285714 0 1216 Tm 348.366667 0 Td 466.666667 Tz (- ) Tj 4.285714 0 0 4.285714 0 1196 Tm 190.166667 0 Td 505.555556 Tz (- ) Tj 4.285714 0 0 4.285714 0 1152 Tm 348.366667 0 Td 466.666667 Tz (- ) Tj 4.285714 0 0 4.285714 0 1142 Tm 154.933333 0 Td 466.666667 Tz (- ) Tj 4.285714 0 0 4.285714 0 1131 Tm 190.166667 0 Td 505.555556 Tz (- ) Tj 4.285714 0 0 4.285714 0 1129 Tm 348.366667 0 Td 466.666667 Tz (- ) Tj 4.285714 0 0 4.285714 0 1111 Tm 348.366667 0 Td 466.666667 Tz (- ) Tj 4.285714 0 0 4.285714 0 1108 Tm 190.166667 0 Td 505.555556 Tz (- ) Tj 4.285714 0 0 4.285714 0 1076 Tm 154.933333 0 Td 466.666667 Tz (- ) Tj 4.285714 0 0 4.285714 0 1067 Tm 190.166667 0 Td 505.555556 Tz (- ) Tj 4.285714 0 0 4.285714 0 1064 Tm 348.366667 0 Td 466.666667 Tz (- ) Tj 4.285714 0 0 4.285714 0 1053 Tm 154.933333 0 Td 466.666667 Tz (- ) Tj 71.428571 0 0 71.428571 0 1027.931116 Tm 21.742 0 Td 44.333333 Tz (Traditional ) Tj 3.15 0 Td 49 Tz (gas ) Tj 1.148 0 Td 52.111111 Tz (sensor ) Tj 2.1 0 Td 35 Tz (1 ) Tj 4.285714 0 0 4.285714 0 1044 Tm 190.166667 0 Td 505.555556 Tz (- ) Tj 4.285714 0 0 4.285714 0 1044.5 Tm 348.366667 0 Td 466.666667 Tz (- ) Tj 0 0 Td 466.666667 Tz (- ) Tj 4.285714 0 0 4.285714 0 1020 Tm 348.366667 0 Td 466.666667 Tz (- ) Tj 0 0 Td 466.666667 Tz (- ) Tj 185 0 0 185 0 949.5 Tm 2.789189 0 Td 7.807808 Tz (System ) Tj 0 0 Td 7.807808 Tz (output ) Tj 4.285714 0 0 4.285714 0 957 Tm 348.366667 0 Td 466.666667 Tz (- ) Tj 0 0 Td 466.666667 Tz (- ) Tj 4.285714 0 0 4.285714 0 955 Tm 190.166667 0 Td 505.555556 Tz (- ) Tj 4.285714 0 0 4.285714 0 948 Tm 154.933333 0 Td 466.666667 Tz (- ) Tj 4.285714 0 0 4.285714 0 918 Tm 154.933333 0 Td 466.666667 Tz (- ) Tj 4.285714 0 0 4.285714 0 915 Tm 190.166667 0 Td 505.555556 Tz (- ) Tj 4.285714 0 0 4.285714 0 901 Tm 154.933333 0 Td 466.666667 Tz (- ) Tj 4.285714 0 0 4.285714 0 890 Tm 190.166667 0 Td 505.555556 Tz (- ) Tj 4.285714 0 0 4.285714 0 889 Tm 348.366667 0 Td 466.666667 Tz (- ) Tj 4.285714 0 0 4.285714 0 878 Tm 154.933333 0 Td 466.666667 Tz (- ) Tj 4.285714 0 0 4.285714 0 868 Tm 190.166667 0 Td 505.555556 Tz (- ) Tj 61.428571 0 0 61.428571 0 842.391101 Tm 25.265116 0 Td 52.290345 Tz (Traditional ) Tj 3.646512 0 Td 59.689922 Tz (gas ) Tj 1.318605 0 Td 61.950904 Tz (sensor ) Tj 2.44186 0 Td 32.55814 Tz (2 ) Tj 4.285714 0 0 4.285714 0 856.5 Tm 154.933333 0 Td 466.666667 Tz (- ) Tj 0 0 Td 466.666667 Tz (- ) Tj 4.285714 0 0 4.285714 0 845 Tm 190.166667 0 Td 505.555556 Tz (- ) Tj 4.285714 0 0 4.285714 0 837 Tm 154.933333 0 Td 466.666667 Tz (- ) Tj 4.285714 0 0 4.285714 0 814 Tm 154.933333 0 Td 466.666667 Tz (- ) Tj 4.285714 0 0 4.285714 0 803 Tm 190.166667 0 Td 505.555556 Tz (- ) Tj 4.285714 0 0 4.285714 0 790 Tm 154.933333 0 Td 466.666667 Tz (- ) Tj 4.285714 0 0 4.285714 0 780 Tm 190.166667 0 Td 505.555556 Tz (- ) Tj 4.285714 0 0 4.285714 0 771 Tm 154.933333 0 Td 466.666667 Tz (- ) Tj 4.285714 0 0 4.285714 0 764 Tm 190.166667 0 Td 505.555556 Tz (- ) Tj 4.285714 0 0 4.285714 0 748 Tm 154.933333 0 Td 466.666667 Tz (- ) Tj 4.285714 0 0 4.285714 0 738 Tm 190.166667 0 Td 505.555556 Tz (- ) Tj 4.285714 0 0 4.285714 0 726 Tm 154.933333 0 Td 466.666667 Tz (- ) Tj 4.285714 0 0 4.285714 0 715 Tm 190.166667 0 Td 505.555556 Tz (- ) Tj 4.285714 0 0 4.285714 0 712 Tm 348.366667 0 Td 466.666667 Tz (- ) Tj 67.142857 0 0 67.142857 0 684.437659 Tm 23.055319 0 Td 48.652482 Tz (Integrated ) Tj 3.246809 0 Td 52.955083 Tz (gas ) Tj 1.161702 0 Td 55.023641 Tz (sensor ) Tj 211.904762 0 0 211.904762 0 650.665854 Tm 7.333483 0 Td 16.674157 Tz (Integrated ) Tj 1.000449 0 Td 17.565543 Tz (gas ) Tj 0.344494 0 Td 20.606742 Tz (senso ) Tj 4.285714 0 0 4.285714 0 678 Tm 154.933333 0 Td 466.666667 Tz (- ) Tj 4.285714 0 0 4.285714 0 675 Tm 190.166667 0 Td 505.555556 Tz (- ) Tj 4.285714 0 0 4.285714 0 657 Tm 154.933333 0 Td 466.666667 Tz (- ) Tj 4.285714 0 0 4.285714 0 651 Tm 190.166667 0 Td 505.555556 Tz (- ) Tj 4.285714 0 0 4.285714 0 638 Tm 154.933333 0 Td 466.666667 Tz (- ) Tj 4.285714 0 0 4.285714 0 628 Tm 190.166667 0 Td 505.555556 Tz (- ) Tj 4.285714 0 0 4.285714 0 628.5 Tm 348.366667 0 Td 466.666667 Tz (- ) Tj 0 0 Td 466.666667 Tz (- ) Tj 4.285714 0 0 4.285714 0 607 Tm 348.366667 0 Td 466.666667 Tz (- ) Tj 4.285714 0 0 4.285714 0 604 Tm 190.166667 0 Td 505.555556 Tz (- ) Tj 4.285714 0 0 4.285714 0 588 Tm 190.166667 0 Td 505.555556 Tz (- ) Tj 4.285714 0 0 4.285714 0 583 Tm 348.366667 0 Td 466.666667 Tz (- ) Tj 4.285714 0 0 4.285714 0 563 Tm 190.166667 0 Td 505.555556 Tz (- ) Tj 4.285714 0 0 4.285714 0 560 Tm 348.366667 0 Td 466.666667 Tz (- ) Tj 64.285714 0 0 64.285714 0 489 Tm 26.895556 0 Td 52.962963 Tz (Signals ) Tj 90 0 0 90 0 399 Tm 12.333333 0 Td 43.82716 Tz (FIG ) Tj 1.088889 0 Td 33.333333 Tz (. ) Tj 0.3 0 Td 53.703704 Tz (9B ) Tj ET Q endstream endobj 116 0 obj << /Length 1 >> stream q endstream endobj 117 0 obj << /Length 45092 >> stream Q q 0.24 0 0 0.24 0 0 cm BT /F1 1 Tf 3 Tr 70 0 0 70 0 3024 Tm 15.271429 0 Td 75 Tz (US ) Tj 1.271429 0 Td 41.666667 Tz (10 ) Tj 0.571429 0 Td 33.333333 Tz (, ) Tj 0.214286 0 Td 55.555556 Tz (215 ) Tj 1.114286 0 Td 33.333333 Tz (, ) Tj 0.071429 0 Td 61.111111 Tz (692 ) Tj 1.4 0 Td 63.095238 Tz (B2 ) Tj 52.857143 0 0 52.857143 0 2917 Tm 7.624324 0 Td 74.774775 Tz (OPTICAL ) Tj 3.367568 0 Td 80.23023 Tz (WAVEGUIDE ) Tj 4.616216 0 Td 78.478478 Tz (STRUCTURE ) Tj 4.540541 0 Td 81.981982 Tz (AND ) Tj 58.571429 0 0 58.571429 0 2915.785124 Tm 22.843902 0 Td 34.146341 Tz (A ) Tj 0.580488 0 Td 49.796748 Tz (need ) Tj 1.45122 0 Td 41.102078 Tz (therefore ) Tj 2.578049 0 Td 38.888889 Tz (exists ) Tj 1.621951 0 Td 34.146341 Tz (to ) Tj 0.64878 0 Td 49.186992 Tz (provide ) Tj 2.321951 0 Td 31.300813 Tz (an ) Tj 0.7 0 Td 42.276423 Tz (optical ) Tj 2.014634 0 Td 50.903342 Tz (waveguide ) Tj 55.56391 0 0 55.56391 0 2871.748192 Tm 6.78498 0 Td 71.989175 Tz (OPTICAL ) Tj 3.167524 0 Td 83.98737 Tz (GAS ) Tj 1.745737 0 Td 71.48925 Tz (SENSOR ) Tj 2.663599 0 Td 32.995038 Tz (, ) Tj 0.413938 0 Td 71.989175 Tz (AND ) Tj 1.565765 0 Td 83.558863 Tz (METHODS ) Tj 3.689445 0 Td 80.987821 Tz (OF ) Tj 3.329499 0 Td 43.326818 Tz (structure ) Tj 2.519621 0 Td 50.992332 Tz (and ) Tj 1.151827 0 Td 44.993234 Tz (an ) Tj 0.755886 0 Td 46.278755 Tz (optical ) Tj 2.051691 0 Td 50.992332 Tz (gas ) Tj 1.115832 0 Td 45.993084 Tz (sensor ) Tj 1.799729 0 Td 44.993234 Tz (that ) Tj 1.187821 0 Td 46.493009 Tz (seek ) Tj 1.403789 0 Td 32.995038 Tz (to ) Tj 0.683897 0 Td 54.741768 Tz (overcome ) Tj 2.609608 0 Td 35.994587 Tz (, ) Tj 0.341949 0 Td 44.993234 Tz (or ) Tj 52.857143 0 0 52.857143 0 2829 Tm 10.32973 0 Td 72.809173 Tz (FABRICATION ) Tj 5.240541 0 Td 79.72973 Tz (THEREOF ) Tj 51.948052 0 0 51.948052 0 2827.721519 Tm 24.948 0 Td 52.9375 Tz (at ) Tj 1.02025 0 Td 44.275 Tz (least ) Tj 1.71325 0 Td 48.445833 Tz (ameliorate ) Tj 3.003 0 Td 32.083333 Tz (, ) Tj 0.5775 0 Td 58.819444 Tz (one ) Tj 1.44375 0 Td 52.9375 Tz (or ) Tj 0.9625 0 Td 60.15625 Tz (more ) Tj 1.9635 0 Td 52.9375 Tz (of ) Tj 1.001 0 Td 44.916667 Tz (the ) Tj 1.2705 0 Td 47.322917 Tz (deficiencies ) Tj 3.8115 0 Td 52.9375 Tz (of ) Tj 61.428571 0 0 61.428571 0 2785.659731 Tm 21.130233 0 Td 44.99354 Tz (conventional ) Tj 3.434884 0 Td 40.697674 Tz (optical ) Tj 1.823256 0 Td 49.741602 Tz (waveguide ) Tj 2.962791 0 Td 37.984496 Tz (structures ) Tj 2.555814 0 Td 49.741602 Tz (and ) Tj 1.090698 0 Td 40.697674 Tz (optical ) Tj 2.002326 0 Td 43.410853 Tz (gas ) Tj 52.857143 0 0 52.857143 0 2743 Tm 9.156757 0 Td 68.738739 Tz (CROSS ) Tj 2.232432 0 Td 34.684685 Tz (- ) Tj 0.189189 0 Td 72.872873 Tz (REFERENCE ) Tj 4.389189 0 Td 53.603604 Tz (TO ) Tj 1.002703 0 Td 72.072072 Tz (RELATED ) Tj 52.539683 0 0 52.539683 0 2748.164021 Tm 23.886707 0 Td 31.722054 Tz (5 ) Tj 0.875529 0 Td 47.583082 Tz (sensors ) Tj 2.074622 0 Td 31.722054 Tz (, ) Tj 0.59003 0 Td 47.583082 Tz (such ) Tj 1.693958 0 Td 52.34139 Tz (as ) Tj 1.046828 0 Td 42.946781 Tz (significantly ) Tj 3.920846 0 Td 54.27996 Tz (improving ) Tj 3.368882 0 Td 48.640483 Tz (the ) Tj 1.256193 0 Td 57.099698 Tz (waveguide ) Tj 57.142857 0 0 57.142857 0 2698 Tm 11.4275 0 Td 62.310606 Tz (APPLICATION ) Tj 52.285714 0 0 52.285714 0 2707.256442 Tm 24.844262 0 Td 49.14238 Tz (transmission ) Tj 3.748634 0 Td 59.502125 Tz (window ) Tj 2.505464 0 Td 31.876138 Tz (\( ) Tj 0.210383 0 Td 50.204918 Tz (transparency ) Tj 3.710383 0 Td 31.876138 Tz (\) ) Tj 0.420765 0 Td 43.564056 Tz (for ) Tj 0.956284 0 Td 41.43898 Tz (light ) Tj 1.415301 0 Td 50.132472 Tz (propagation ) Tj 3.404372 0 Td 31.876138 Tz (. ) Tj 0.420765 0 Td 31.876138 Tz (It ) Tj 55.714286 0 0 55.714286 0 2663.206623 Tm 23.369231 0 Td 31.410256 Tz (is ) Tj 0.717949 0 Td 46.153846 Tz (against ) Tj 2.207692 0 Td 36.645299 Tz (this ) Tj 1.184615 0 Td 52.948718 Tz (background ) Tj 3.517949 0 Td 42.628205 Tz (that ) Tj 1.328205 0 Td 43.874644 Tz (the ) Tj 1.148718 0 Td 47.863248 Tz (present ) Tj 2.297436 0 Td 43.874644 Tz (invention ) Tj 2.728205 0 Td 54.843305 Tz (has ) Tj 51.318681 0 0 51.318681 0 2616.602941 Tm 7.229336 0 Td 43.031763 Tz (This ) Tj 1.44197 0 Td 47.238985 Tz (application ) Tj 3.546467 0 Td 53.045444 Tz (claims ) Tj 2.123983 0 Td 48.715203 Tz (the ) Tj 1.091221 0 Td 48.251249 Tz (benefit ) Tj 2.279872 0 Td 58.458244 Tz (of ) Tj 0.89636 0 Td 43.031763 Tz (priority ) Tj 2.455246 0 Td 51.962884 Tz (of ) Tj 0.954818 0 Td 49.364739 Tz (Singa ) Tj 1.597859 0 Td 32.476802 Tz (- ) Tj 1.636831 0 Td 56.022484 Tz (been ) Tj 1.636831 0 Td 55.210564 Tz (developed ) Tj 3.078801 0 Td 32.476802 Tz (. ) Tj 61.428571 0 0 61.428571 0 2565.800781 Tm 5.24186 0 Td 44.767442 Tz (pore ) Tj 1.432558 0 Td 41.602067 Tz (Patent ) Tj 1.725581 0 Td 42.670895 Tz (Application ) Tj 3.044186 0 Td 65.116279 Tz (No ) Tj 0.781395 0 Td 32.55814 Tz (. ) Tj 0.488372 0 Td 48.611111 Tz (10201406681S ) Tj 3.565116 0 Td 32.55814 Tz (, ) Tj 0.423256 0 Td 32.015504 Tz (filed ) Tj 1.4 0 Td 32.55814 Tz (16 ) Tj 0.765116 0 Td 49.741602 Tz (Oct ) Tj 0.911628 0 Td 32.55814 Tz (. ) Tj 58.571429 0 0 58.571429 0 2542 Tm 28.239024 0 Td 75.203252 Tz (SUMMARY ) Tj 58.571429 0 0 58.571429 0 2523.829268 Tm 5.6 0 Td 48.373984 Tz (2014 ) Tj 1.212195 0 Td 34.146341 Tz (, ) Tj 0.443902 0 Td 44.579946 Tz (the ) Tj 1.07561 0 Td 44.308943 Tz (content ) Tj 2.065854 0 Td 55.487805 Tz (of ) Tj 0.836585 0 Td 48.943089 Tz (which ) Tj 1.758537 0 Td 50.081301 Tz (being ) Tj 1.673171 0 Td 49.796748 Tz (hereby ) Tj 2.082927 0 Td 44.105691 Tz (incorporated ) Tj 3.44878 0 Td 55.487805 Tz (by ) Tj 56.785714 0 0 56.785714 0 2479.142023 Tm 5.72327 0 Td 44.677382 Tz (reference ) Tj 2.69434 0 Td 30.81761 Tz (in ) Tj 0.792453 0 Td 26.415094 Tz (its ) Tj 0.739623 0 Td 40.356394 Tz (entirety ) Tj 2.306918 0 Td 38.155136 Tz (for ) Tj 0.950943 0 Td 37.176799 Tz (all ) Tj 0.862893 0 Td 48.060797 Tz (purposes ) Tj 2.377358 0 Td 32.285115 Tz (. ) Tj 55.714286 0 0 55.714286 0 2458.877497 Tm 24.015385 0 Td 51.519468 Tz (According ) Tj 3.033333 0 Td 32.905983 Tz (to ) Tj 0.682051 0 Td 32.905983 Tz (a ) Tj 0.502564 0 Td 34.102564 Tz (first ) Tj 1.238462 0 Td 47.364672 Tz (aspect ) Tj 1.776923 0 Td 53.846154 Tz (of ) Tj 0.84359 0 Td 43.874644 Tz (the ) Tj 0.915385 0 Td 48.717949 Tz (present ) Tj 2.24359 0 Td 43.54226 Tz (invention ) Tj 2.494872 0 Td 32.905983 Tz (, ) Tj 0.358974 0 Td 44.871795 Tz (there ) Tj 62.857143 0 0 62.857143 0 2396 Tm 9.8 0 Td 58.333333 Tz (TECHNICAL ) Tj 3.5 0 Td 52.5 Tz (FIELD ) Tj 58.571429 0 0 58.571429 0 2417.605505 Tm 22.160976 0 Td 34.146341 Tz (is ) Tj 0.580488 0 Td 48.018293 Tz (provided ) Tj 2.560976 0 Td 42.682927 Tz (an ) Tj 0.836585 0 Td 42.276423 Tz (optical ) Tj 1.912195 0 Td 50.587173 Tz (waveguide ) Tj 3.021951 0 Td 39.521229 Tz (structure ) Tj 2.219512 0 Td 34.146341 Tz (, ) Tj 0.443902 0 Td 45.813008 Tz (comprising ) Tj 2.782927 0 Td 34.146341 Tz (: ) Tj 55.714286 0 0 55.714286 0 2371 Tm 23.961538 0 Td 32.905983 Tz (a ) Tj 0.538462 0 Td 42.877493 Tz (substrate ) Tj 2.387179 0 Td 32.905983 Tz (; ) Tj 58.571429 0 0 58.571429 0 2333.111257 Tm 21.358537 0 Td 31.300813 Tz (15 ) Tj 1.434146 0 Td 44.105691 Tz (an ) Tj 0.887805 0 Td 41.544715 Tz (insulating ) Tj 2.646341 0 Td 40.97561 Tz (layer ) Tj 1.4 0 Td 46.595528 Tz (disposed ) Tj 2.492683 0 Td 42.682927 Tz (on ) Tj 0.802439 0 Td 44.579946 Tz (the ) Tj 1.02439 0 Td 39.837398 Tz (substrate ) Tj 2.253659 0 Td 34.146341 Tz (, ) Tj 0.37561 0 Td 39.837398 Tz (the ) Tj 0.973171 0 Td 42.682927 Tz (insulat ) Tj 58.571429 0 0 58.571429 0 2311.624093 Tm 6.24878 0 Td 49.322493 Tz (The ) Tj 1.229268 0 Td 47.560976 Tz (present ) Tj 2.339024 0 Td 42.682927 Tz (invention ) Tj 2.697561 0 Td 41.418248 Tz (generally ) Tj 2.782927 0 Td 37.804878 Tz (relates ) Tj 2.031707 0 Td 34.146341 Tz (to ) Tj 0.819512 0 Td 44.105691 Tz (an ) Tj 0.956098 0 Td 43.089431 Tz (optical ) Tj 61.428571 0 0 61.428571 0 2291.096248 Tm 22.416279 0 Td 39.793282 Tz (ing ) Tj 0.976744 0 Td 37.984496 Tz (layer ) Tj 1.351163 0 Td 44.767442 Tz (comprising ) Tj 2.946512 0 Td 42.054264 Tz (an ) Tj 0.87907 0 Td 32.55814 Tz (air ) Tj 0.732558 0 Td 38.662791 Tz (slot ) Tj 1.139535 0 Td 46.576227 Tz (formed ) Tj 1.986047 0 Td 36.821705 Tz (therein ) Tj 1.644186 0 Td 32.55814 Tz (; ) Tj 50 0 0 50 0 2269.715152 Tm 6.38 0 Td 61.481481 Tz (waveguide ) Tj 3.54 0 Td 47.407407 Tz (structure ) Tj 2.88 0 Td 55.555556 Tz (and ) Tj 1.22 0 Td 53.333333 Tz (an ) Tj 0.92 0 Td 50 Tz (optical ) Tj 2.24 0 Td 54.444444 Tz (gas ) Tj 1.22 0 Td 51.666667 Tz (sensor ) Tj 1.84 0 Td 33.333333 Tz (, ) Tj 0.36 0 Td 61.111111 Tz (and ) Tj 1.16 0 Td 65.238095 Tz (methods ) Tj 55.714286 0 0 55.714286 0 2250.447188 Tm 23.961538 0 Td 32.905983 Tz (a ) Tj 0.592308 0 Td 34.700855 Tz (first ) Tj 1.130769 0 Td 47.115385 Tz (material ) Tj 2.494872 0 Td 44.273504 Tz (layer ) Tj 1.489744 0 Td 49.525166 Tz (suspended ) Tj 2.979487 0 Td 48.611111 Tz (over ) Tj 1.364103 0 Td 49.85755 Tz (the ) Tj 1.130769 0 Td 32.905983 Tz (air ) Tj 0.933333 0 Td 37.393162 Tz (slot ) Tj 0.897436 0 Td 32.905983 Tz (, ) Tj 0.376923 0 Td 49.85755 Tz (the ) Tj 1.130769 0 Td 31.111111 Tz (first ) Tj 55.714286 0 0 55.714286 0 2221 Tm 5.797436 0 Td 52.350427 Tz (of ) Tj 0.879487 0 Td 41.608392 Tz (fabrication ) Tj 3.087179 0 Td 47.863248 Tz (thereof ) Tj 1.866667 0 Td 32.905983 Tz (. ) Tj 52.5 0 0 52.5 0 2211.79386 Tm 26.038095 0 Td 51.587302 Tz (material ) Tj 2.819048 0 Td 44.444444 Tz (layer ) Tj 1.828571 0 Td 45.767196 Tz (constituting ) Tj 3.714286 0 Td 31.746032 Tz (a ) Tj 0.590476 0 Td 57.142857 Tz (waveguide ) Tj 3.504762 0 Td 47.619048 Tz (core ) Tj 1.561905 0 Td 52.380952 Tz (of ) Tj 0.933333 0 Td 48.677249 Tz (the ) Tj 55.714286 0 0 55.714286 0 2168.681223 Tm 24.607692 0 Td 45.299145 Tz (optical ) Tj 2.082051 0 Td 53.846154 Tz (waveguide ) Tj 3.176923 0 Td 42.877493 Tz (structure ) Tj 2.351282 0 Td 32.905983 Tz (; ) Tj 0.412821 0 Td 49.85755 Tz (and ) Tj 68.571429 0 0 68.571429 0 2136 Tm 9.391667 0 Td 62.465278 Tz (BACKGROUND ) Tj 58.571429 0 0 58.571429 0 2125.025455 Tm 21.32439 0 Td 31.300813 Tz (20 ) Tj 1.519512 0 Td 34.146341 Tz (a ) Tj 0.409756 0 Td 48.373984 Tz (second ) Tj 1.792683 0 Td 46.239837 Tz (material ) Tj 2.356098 0 Td 42.113821 Tz (layer ) Tj 1.331707 0 Td 46.595528 Tz (disposed ) Tj 2.390244 0 Td 49.085366 Tz (over ) Tj 1.331707 0 Td 43.631436 Tz (the ) Tj 0.870732 0 Td 51.851852 Tz (waveguide ) Tj 2.936585 0 Td 44.817073 Tz (core ) Tj 1.07561 0 Td 34.146341 Tz (, ) Tj 52.380952 0 0 52.380952 0 2087.269615 Tm 26.173636 0 Td 52.727273 Tz (wherein ) Tj 2.577273 0 Td 48.787879 Tz (the ) Tj 1.05 0 Td 57.626263 Tz (waveguide ) Tj 3.474545 0 Td 46.931818 Tz (core ) Tj 1.393636 0 Td 31.818182 Tz (is ) Tj 0.725455 0 Td 53.030303 Tz (suspended ) Tj 3.207273 0 Td 51.704545 Tz (over ) Tj 1.489091 0 Td 48.787879 Tz (the ) Tj 1.145455 0 Td 38.181818 Tz (air ) Tj 58.571429 0 0 58.571429 0 2052.48855 Tm 6.197561 0 Td 44.263776 Tz (Detection ) Tj 2.697561 0 Td 49.322493 Tz (and ) Tj 1.007317 0 Td 54.323725 Tz (measurement ) Tj 3.721951 0 Td 55.487805 Tz (of ) Tj 0.870732 0 Td 44.579946 Tz (gas ) Tj 1.058537 0 Td 43.699187 Tz (concentrations ) Tj 3.87561 0 Td 47.235772 Tz (using ) Tj 55.714286 0 0 55.714286 0 2040.964602 Tm 24.64359 0 Td 42.628205 Tz (slot ) Tj 1.148718 0 Td 55.34188 Tz (by ) Tj 0.987179 0 Td 43.874644 Tz (the ) Tj 1.005128 0 Td 50.356125 Tz (second ) Tj 2.028205 0 Td 47.863248 Tz (material ) Tj 2.494872 0 Td 44.273504 Tz (layer ) Tj 1.310256 0 Td 32.905983 Tz (. ) Tj 53.253968 0 0 53.253968 0 2007.494702 Tm 6.102832 0 Td 46.497765 Tz (optical ) Tj 2.253353 0 Td 46.944858 Tz (absorption ) Tj 3.211028 0 Td 51.639344 Tz (of ) Tj 0.976453 0 Td 47.988077 Tz (gas ) Tj 1.032787 0 Td 54.247392 Tz (molecules ) Tj 3.342474 0 Td 21.907601 Tz (is ) Tj 0.713562 0 Td 50.769995 Tz (important ) Tj 3.042027 0 Td 42.771982 Tz (for ) Tj 1.032787 0 Td 46.162444 Tz (both ) Tj 3.436364 0 Td 31.296572 Tz (In ) Tj 0.751118 0 Td 48.733234 Tz (various ) Tj 2.328465 0 Td 56.33383 Tz (embodiments ) Tj 3.736811 0 Td 31.296572 Tz (, ) Tj 0.469449 0 Td 43.815201 Tz (the ) Tj 1.070343 0 Td 52.682563 Tz (second ) Tj 2.046796 0 Td 50.85693 Tz (material ) Tj 2.610134 0 Td 48.822653 Tz (layer ) Tj 1.690015 0 Td 76.154993 Tz (com ) Tj 52.556391 0 0 52.556391 0 1967.536648 Tm 6.183834 0 Td 51.227028 Tz (understanding ) Tj 4.281116 0 Td 48.62502 Tz (and ) Tj 1.046495 0 Td 54.544588 Tz (monitoring ) Tj 3.481974 0 Td 31.711969 Tz (a ) Tj 0.513734 0 Td 42.584645 Tz (variety ) Tj 2.112017 0 Td 52.32475 Tz (of ) Tj 0.761087 0 Td 61.309808 Tz (phenomena ) Tj 3.634192 0 Td 40.432761 Tz (from ) Tj 2.663805 0 Td 48.096487 Tz (prises ) Tj 1.883691 0 Td 42.811159 Tz (at ) Tj 0.704006 0 Td 43.762518 Tz (least ) Tj 1.446066 0 Td 53.910348 Tz (one ) Tj 1.21774 0 Td 49.380067 Tz (through ) Tj 2.188126 0 Td 31.711969 Tz (- ) Tj 0.228326 0 Td 46.775155 Tz (hole ) Tj 1.427039 0 Td 31.711969 Tz (in ) Tj 0.74206 0 Td 38.054363 Tz (fluid ) Tj 1.48412 0 Td 55.130039 Tz (communication ) Tj 4.509442 0 Td 45.189557 Tz (with ) Tj 59.642857 0 0 59.642857 0 1922.888525 Tm 5.465868 0 Td 40.239521 Tz (industrial ) Tj 2.8 0 Td 43.779108 Tz (processes ) Tj 2.850299 0 Td 30.738523 Tz (to ) Tj 0.955689 0 Td 46.742878 Tz (environment ) Tj 3.571257 0 Td 45.908184 Tz (changes ) Tj 1.911377 0 Td 33.532934 Tz (. ) Tj 0.653892 0 Td 44.710579 Tz (Although ) Tj 2.732934 0 Td 30.738523 Tz (25 ) Tj 0.821557 0 Td 43.779108 Tz (the ) Tj 1.005988 0 Td 32.601464 Tz (air ) Tj 0.922156 0 Td 37.025948 Tz (slot ) Tj 0.80479 0 Td 33.532934 Tz (. ) Tj 64.285714 0 0 64.285714 0 1873.731557 Tm 5.071111 0 Td 44.074074 Tz (semiconductor ) Tj 3.764444 0 Td 44.074074 Tz (and ) Tj 1.275556 0 Td 40.098765 Tz (electrochemical ) Tj 4.06 0 Td 38.888889 Tz (gas ) Tj 1.026667 0 Td 41.481481 Tz (sensors ) Tj 2.1 0 Td 38.888889 Tz (can ) Tj 1.197778 0 Td 42.777778 Tz (be ) Tj 2.333333 0 Td 32.407407 Tz (in ) Tj 0.746667 0 Td 40.37037 Tz (various ) Tj 2.053333 0 Td 47.138047 Tz (embodiments ) Tj 3.064444 0 Td 33.703704 Tz (, ) Tj 0.528889 0 Td 38.888889 Tz (the ) Tj 1.026667 0 Td 43.641975 Tz (second ) Tj 1.773333 0 Td 43.101852 Tz (material ) Tj 2.286667 0 Td 38.37037 Tz (layer ) Tj 1.462222 0 Td 32.407407 Tz (is ) Tj 61.428571 0 0 61.428571 0 1834.07438 Tm 5.290698 0 Td 40.697674 Tz (highly ) Tj 1.774419 0 Td 39.491817 Tz (sensitive ) Tj 2.327907 0 Td 31.20155 Tz (at ) Tj 0.537209 0 Td 38.888889 Tz (the ) Tj 1.009302 0 Td 39.793282 Tz (low ) Tj 1.009302 0 Td 49.741602 Tz (ppm ) Tj 1.269767 0 Td 39.069767 Tz (level ) Tj 1.188372 0 Td 32.55814 Tz (, ) Tj 0.293023 0 Td 43.410853 Tz (they ) Tj 1.237209 0 Td 38.436693 Tz (suffer ) Tj 1.660465 0 Td 37.984496 Tz (from ) Tj 1.269767 0 Td 33.643411 Tz (drift ) Tj 2.311628 0 Td 42.732558 Tz (disposed ) Tj 2.45814 0 Td 44.767442 Tz (over ) Tj 1.367442 0 Td 37.984496 Tz (the ) Tj 1.009302 0 Td 48.535745 Tz (waveguide ) Tj 3.027907 0 Td 40.01938 Tz (core ) Tj 1.334884 0 Td 39.341085 Tz (such ) Tj 1.4 0 Td 40.697674 Tz (that ) Tj 1.286047 0 Td 38.888889 Tz (the ) Tj 1.009302 0 Td 45.219638 Tz (second ) Tj 50 0 0 50 0 1795.344186 Tm 6.46 0 Td 54.444444 Tz (and ) Tj 1.5 0 Td 50.666667 Tz (cross ) Tj 1.56 0 Td 33.333333 Tz (- ) Tj 0.18 0 Td 55.714286 Tz (respond ) Tj 2.76 0 Td 33.333333 Tz (to ) Tj 0.96 0 Td 46.666667 Tz (other ) Tj 1.86 0 Td 54 Tz (gases ) Tj 1.98 0 Td 55.555556 Tz (and ) Tj 1.38 0 Td 58.333333 Tz (changing ) Tj 3.06 0 Td 55.416667 Tz (humidity ) Tj 4.2 0 Td 52.5 Tz (material ) Tj 2.8 0 Td 46 Tz (layer ) Tj 1.7 0 Td 53.888889 Tz (covers ) Tj 2.28 0 Td 33.333333 Tz (a ) Tj 0.48 0 Td 48.888889 Tz (top ) Tj 1.26 0 Td 49.047619 Tz (surface ) Tj 2.34 0 Td 55.555556 Tz (and ) Tj 1.4 0 Td 60 Tz (two ) Tj 1.34 0 Td 56.25 Tz (opposing ) Tj 2.96 0 Td 59.166667 Tz (side ) Tj 52.857143 0 0 52.857143 0 1750.698641 Tm 6.110811 0 Td 45.195195 Tz (levels ) Tj 1.702703 0 Td 34.684685 Tz (, ) Tj 0.397297 0 Td 51.711712 Tz (along ) Tj 1.740541 0 Td 47.297297 Tz (with ) Tj 1.589189 0 Td 45.405405 Tz (large ) Tj 1.57027 0 Td 42.567568 Tz (size ) Tj 1.305405 0 Td 55.705706 Tz (and ) Tj 1.267568 0 Td 49.662162 Tz (high ) Tj 1.551351 0 Td 44.144144 Tz (cost ) Tj 1.078378 0 Td 34.684685 Tz (. ) Tj 0.397297 0 Td 44.144144 Tz (In ) Tj 0.832432 0 Td 47.297297 Tz (contrast ) Tj 2.27027 0 Td 34.684685 Tz (, ) Tj 0.454054 0 Td 45.195195 Tz (gas ) Tj 2.251351 0 Td 51.238739 Tz (wall ) Tj 1.57027 0 Td 47.297297 Tz (surfaces ) Tj 2.459459 0 Td 55.18018 Tz (of ) Tj 0.832432 0 Td 49.399399 Tz (the ) Tj 1.078378 0 Td 56.756757 Tz (waveguide ) Tj 3.367568 0 Td 48.085586 Tz (core ) Tj 1.210811 0 Td 34.684685 Tz (. ) Tj 45.714286 0 0 45.714286 0 1712.059094 Tm 7.0875 0 Td 56.25 Tz (sensors ) Tj 2.690625 0 Td 59.791667 Tz (based ) Tj 2.275 0 Td 52.864583 Tz (on ) Tj 1.115625 0 Td 53.645833 Tz (optical ) Tj 2.515625 0 Td 55.052083 Tz (absorption ) Tj 3.740625 0 Td 53.229167 Tz (offer ) Tj 1.553125 0 Td 32.8125 Tz (, ) Tj 0.546875 0 Td 49.826389 Tz (for ) Tj 1.246875 0 Td 64.583333 Tz (example ) Tj 2.75625 0 Td 32.8125 Tz (, ) Tj 0.634375 0 Td 32.8125 Tz (1 ) Tj 0.35 0 Td 32.8125 Tz (\) ) Tj 0.74375 0 Td 41.927083 Tz (30 ) Tj 1.96875 0 Td 43.75 Tz (In ) Tj 0.9625 0 Td 55.208333 Tz (various ) Tj 2.646875 0 Td 64.962121 Tz (embodiments ) Tj 4.396875 0 Td 32.8125 Tz (, ) Tj 0.459375 0 Td 54.6875 Tz (the ) Tj 1.334375 0 Td 61.371528 Tz (second ) Tj 2.3625 0 Td 59.700521 Tz (material ) Tj 3.128125 0 Td 51.041667 Tz (layer ) Tj 1.925 0 Td 86.284722 Tz (com ) Tj 45.714286 0 0 45.714286 0 1671.568813 Tm 6.934375 0 Td 69.791667 Tz (minimal ) Tj 3.28125 0 Td 44.479167 Tz (drift ) Tj 1.684375 0 Td 52.864583 Tz (as ) Tj 0.91875 0 Td 65.321181 Tz (measurements ) Tj 5.184375 0 Td 49.826389 Tz (are ) Tj 1.334375 0 Td 48.307292 Tz (self ) Tj 1.203125 0 Td 32.8125 Tz (- ) Tj 0.175 0 Td 56.145833 Tz (referenced ) Tj 3.85 0 Td 59.548611 Tz (and ) Tj 1.575 0 Td 32.8125 Tz (2 ) Tj 0.35 0 Td 32.8125 Tz (\) ) Tj 1.925 0 Td 53.472222 Tz (prises ) Tj 2.121875 0 Td 59.548611 Tz (two ) Tj 1.378125 0 Td 56.966146 Tz (sidewall ) Tj 2.8875 0 Td 56.966146 Tz (portions ) Tj 3.01875 0 Td 57.523148 Tz (extending ) Tj 3.36875 0 Td 61.458333 Tz (towards ) Tj 2.7125 0 Td 54.6875 Tz (the ) Tj 1.246875 0 Td 52.256944 Tz (substrate ) Tj 58.571429 0 0 58.571429 0 1626.119318 Tm 5.497561 0 Td 46.95122 Tz (high ) Tj 1.365854 0 Td 44.579946 Tz (gas ) Tj 1.02439 0 Td 37.509239 Tz (specificity ) Tj 2.646341 0 Td 45.528455 Tz (with ) Tj 1.297561 0 Td 41.260163 Tz (zero ) Tj 1.263415 0 Td 42.113821 Tz (cross ) Tj 1.34878 0 Td 34.146341 Tz (- ) Tj 0.204878 0 Td 45.844625 Tz (responses ) Tj 2.612195 0 Td 31.300813 Tz (to ) Tj 0.563415 0 Td 46.666667 Tz (other ) Tj 1.570732 0 Td 42.113821 Tz (gases ) Tj 1.34878 0 Td 34.146341 Tz (, ) Tj 1.45122 0 Td 44.579946 Tz (and ) Tj 1.058537 0 Td 44.579946 Tz (are ) Tj 0.973171 0 Td 47.425474 Tz (spaced ) Tj 1.997561 0 Td 40.97561 Tz (apart ) Tj 1.468293 0 Td 33.197832 Tz (for ) Tj 0.887805 0 Td 47.96748 Tz (forming ) Tj 2.185366 0 Td 55.01355 Tz (two ) Tj 1.160976 0 Td 47.662602 Tz (opposing ) Tj 2.560976 0 Td 42.050587 Tz (sidewalls ) Tj 2.441463 0 Td 55.487805 Tz (of ) Tj 51.978022 0 0 51.978022 0 1583.633612 Tm 6.252643 0 Td 52.906977 Tz (as ) Tj 0.788795 0 Td 49.166079 Tz (the ) Tj 1.135095 0 Td 48.364459 Tz (transduction ) Tj 3.732347 0 Td 60.923185 Tz (method ) Tj 2.366385 0 Td 65.412262 Tz (makes ) Tj 2.212474 0 Td 32.064834 Tz (a ) Tj 0.500211 0 Td 45.425182 Tz (direct ) Tj 1.789218 0 Td 60.04869 Tz (measurement ) Tj 4.174841 0 Td 52.906977 Tz (of ) Tj 2.039323 0 Td 49.166079 Tz (the ) Tj 1.173573 0 Td 37.408973 Tz (air ) Tj 0.961945 0 Td 45.692389 Tz (slot ) Tj 1.05814 0 Td 32.064834 Tz (. ) Tj 55.714286 0 0 55.714286 0 1542.712559 Tm 5.833333 0 Td 32.905983 Tz (a ) Tj 0.538462 0 Td 51.228632 Tz (molecule ) Tj 2.530769 0 Td 32.905983 Tz (' ) Tj 0.287179 0 Td 32.905983 Tz (s ) Tj 0.538462 0 Td 47.489316 Tz (physical ) Tj 2.512821 0 Td 45.17094 Tz (properties ) Tj 3.033333 0 Td 32.905983 Tz (\( ) Tj 0.215385 0 Td 32.905983 Tz (i ) Tj 0.14359 0 Td 32.905983 Tz (. ) Tj 0.197436 0 Td 32.905983 Tz (e ) Tj 0.287179 0 Td 32.905983 Tz (. ) Tj 0.14359 0 Td 32.905983 Tz (, ) Tj 0.502564 0 Td 32.905983 Tz (its ) Tj 0.951282 0 Td 44.871795 Tz (absorption ) Tj 3.141026 0 Td 44.871795 Tz (at ) Tj 0.789744 0 Td 32.905983 Tz (a ) Tj 2.405128 0 Td 31.410256 Tz (In ) Tj 0.628205 0 Td 48.717949 Tz (various ) Tj 2.189744 0 Td 54.390054 Tz (embodiments ) Tj 3.589744 0 Td 32.905983 Tz (, ) Tj 0.376923 0 Td 43.874644 Tz (the ) Tj 0.915385 0 Td 54.843305 Tz (waveguide ) Tj 3.176923 0 Td 45.619658 Tz (core ) Tj 1.364103 0 Td 32.905983 Tz (is ) Tj 0.628205 0 Td 48.860399 Tz (shaped ) Tj 2.046154 0 Td 22.435897 Tz (in ) Tj 50 0 0 50 0 1504.596597 Tm 6.46 0 Td 45.833333 Tz (specific ) Tj 2.6 0 Td 55.333333 Tz (wavelength ) Tj 3.54 0 Td 33.333333 Tz (, ) Tj 0.54 0 Td 43.333333 Tz (or ) Tj 1 0 Td 33.333333 Tz (so ) Tj 0.62 0 Td 33.333333 Tz (- ) Tj 0.16 0 Td 48.888889 Tz (called ) Tj 2.26 0 Td 46.666667 Tz (fingerprint ) Tj 3.36 0 Td 55.333333 Tz (wavelength ) Tj 3.54 0 Td 33.333333 Tz (\) ) Tj 0.2 0 Td 33.333333 Tz (. ) Tj 0.72 0 Td 33.333333 Tz (35 ) Tj 0.98 0 Td 50 Tz (the ) Tj 1.26 0 Td 43.333333 Tz (form ) Tj 1.62 0 Td 53.333333 Tz (of ) Tj 0.88 0 Td 33.333333 Tz (a ) Tj 0.54 0 Td 40 Tz (strip ) Tj 1.36 0 Td 33.333333 Tz (. ) Tj 51.428571 0 0 51.428571 0 1459.470388 Tm 6.377778 0 Td 50.05144 Tz (Therefore ) Tj 2.780556 0 Td 32.407407 Tz (, ) Tj 0.369444 0 Td 46.8107 Tz (selective ) Tj 2.8 0 Td 46.8107 Tz (detection ) Tj 2.897222 0 Td 49.691358 Tz (and ) Tj 1.069444 0 Td 53.472222 Tz (multiplexing ) Tj 4.005556 0 Td 49.691358 Tz (are ) Tj 1.166667 0 Td 64.00463 Tz (some ) Tj 1.711111 0 Td 53.472222 Tz (of ) Tj 2.858333 0 Td 32.407407 Tz (In ) Tj 1.030556 0 Td 49.537037 Tz (various ) Tj 2.508333 0 Td 57.449495 Tz (embodiments ) Tj 3.869444 0 Td 32.407407 Tz (, ) Tj 0.641667 0 Td 44.290123 Tz (the ) Tj 1.341667 0 Td 34.351852 Tz (first ) Tj 1.322222 0 Td 52.256944 Tz (material ) Tj 2.936111 0 Td 46.666667 Tz (layer ) Tj 1.886111 0 Td 34.027778 Tz (is ) Tj 0.913889 0 Td 32.407407 Tz (a ) Tj 61.428571 0 0 61.428571 0 1416.602347 Tm 5.25814 0 Td 45.219638 Tz (the ) Tj 0.960465 0 Td 37.713178 Tz (attractive ) Tj 2.539535 0 Td 39.341085 Tz (features ) Tj 2.051163 0 Td 38.75969 Tz (offered ) Tj 1.888372 0 Td 54.263566 Tz (by ) Tj 0.927907 0 Td 38.888889 Tz (the ) Tj 0.927907 0 Td 37.984496 Tz (optical ) Tj 1.823256 0 Td 45.852713 Tz (approached ) Tj 2.816279 0 Td 32.55814 Tz (. ) Tj 45.714286 0 0 45.714286 0 1379.078366 Tm 7.896875 0 Td 70.3125 Tz (However ) Tj 3.01875 0 Td 32.8125 Tz (, ) Tj 0.240625 0 Td 72.005208 Tz (most ) Tj 1.946875 0 Td 59.852431 Tz (conventional ) Tj 4.375 0 Td 56.770833 Tz (optical ) Tj 2.58125 0 Td 54.6875 Tz (gas ) Tj 1.246875 0 Td 53.645833 Tz (sensors ) Tj 2.58125 0 Td 49.826389 Tz (are ) Tj 1.18125 0 Td 60.763889 Tz (com ) Tj 1.44375 0 Td 32.8125 Tz (- ) Tj 2.7125 0 Td 43.75 Tz (In ) Tj 1.028125 0 Td 55.729167 Tz (various ) Tj 2.734375 0 Td 65.293561 Tz (embodiments ) Tj 4.375 0 Td 32.8125 Tz (, ) Tj 0.56875 0 Td 54.6875 Tz (the ) Tj 1.290625 0 Td 60.763889 Tz (second ) Tj 2.45 0 Td 59.700521 Tz (material ) Tj 3.171875 0 Td 55.416667 Tz (layer ) Tj 2.034375 0 Td 32.8125 Tz (is ) Tj 0.853125 0 Td 32.8125 Tz (a ) Tj 55.803571 0 0 55.803571 0 1337.462345 Tm 5.75232 0 Td 56.149333 Tz (monly ) Tj 2.02496 0 Td 49.578667 Tz (bulky ) Tj 1.86368 0 Td 32.853333 Tz (in ) Tj 0.84224 0 Td 38.08 Tz (size ) Tj 1.21856 0 Td 48.782222 Tz (and ) Tj 1.2544 0 Td 40.817778 Tz (costly ) Tj 1.57696 0 Td 32.853333 Tz (, ) Tj 0.37632 0 Td 49.578667 Tz (while ) Tj 1.792 0 Td 46.592 Tz (those ) Tj 1.7024 0 Td 55.893333 Tz (compact ) Tj 2.5088 0 Td 55.751111 Tz (and ) Tj 2.38336 0 Td 39.722667 Tz (dielectric ) Tj 2.70592 0 Td 38.826667 Tz (thin ) Tj 1.36192 0 Td 29.12 Tz (film ) Tj 1.21856 0 Td 44.202667 Tz (layer ) Tj 1.32608 0 Td 32.853333 Tz (. ) Tj 51.507937 0 0 51.507937 0 1294.967191 Tm 6.387365 0 Td 50.88948 Tz (inexpensive ) Tj 3.746995 0 Td 48.07396 Tz (sensors ) Tj 2.290909 0 Td 52.580894 Tz (tend ) Tj 1.553159 0 Td 32.357473 Tz (to ) Tj 0.834823 0 Td 44.491525 Tz (lack ) Tj 1.436672 0 Td 53.713405 Tz (wavelength ) Tj 3.649923 0 Td 43.829668 Tz (selectivity ) Tj 3.261633 0 Td 53.389831 Tz (or ) Tj 1.087211 0 Td 32.357473 Tz (40 ) Tj 1.747304 0 Td 32.357473 Tz (In ) Tj 0.931895 0 Td 50.385208 Tz (various ) Tj 2.543297 0 Td 57.066816 Tz (embodiments ) Tj 3.863482 0 Td 32.357473 Tz (, ) Tj 0.56302 0 Td 49.614792 Tz (the ) Tj 1.203698 0 Td 43.682589 Tz (dielectric ) Tj 3.125732 0 Td 39.637904 Tz (thin ) Tj 1.475501 0 Td 33.975347 Tz (film ) Tj 1.533744 0 Td 47.241911 Tz (layer ) Tj 51.428571 0 0 51.428571 0 1252.733559 Tm 6.338889 0 Td 43.209877 Tz (are ) Tj 1.108333 0 Td 44.560185 Tz (less ) Tj 1.4 0 Td 46.450617 Tz (sensitive ) Tj 2.547222 0 Td 32.407407 Tz (. ) Tj 0.427778 0 Td 55.092593 Tz (For ) Tj 1.283333 0 Td 55.555556 Tz (example ) Tj 2.411111 0 Td 32.407407 Tz (, ) Tj 0.486111 0 Td 32.407407 Tz (a ) Tj 0.602778 0 Td 52.391975 Tz (conventional ) Tj 3.966667 0 Td 48.611111 Tz (optical ) Tj 2.255556 0 Td 55.092593 Tz (gas ) Tj 2.430556 0 Td 49.421296 Tz (includes ) Tj 2.858333 0 Td 32.407407 Tz (a ) Tj 0.602778 0 Td 50.231481 Tz (material ) Tj 2.819444 0 Td 47.395833 Tz (selected ) Tj 2.741667 0 Td 45.37037 Tz (from ) Tj 1.827778 0 Td 32.407407 Tz (a ) Tj 0.680556 0 Td 50.555556 Tz (group ) Tj 1.983333 0 Td 48.611111 Tz (consisting ) Tj 3.363889 0 Td 53.472222 Tz (of ) Tj 51.428571 0 0 51.428571 0 1212.265928 Tm 6.319444 0 Td 49.691358 Tz (sensor ) Tj 2.138889 0 Td 57.037037 Tz (based ) Tj 2.119444 0 Td 53.472222 Tz (on ) Tj 1.147222 0 Td 43.209877 Tz (either ) Tj 2.061111 0 Td 44.560185 Tz (free ) Tj 1.438889 0 Td 52.5 Tz (space ) Tj 2.002778 0 Td 46.450617 Tz (optics ) Tj 2.1 0 Td 53.472222 Tz (or ) Tj 1.030556 0 Td 42.12963 Tz (fiber ) Tj 1.691667 0 Td 46.450617 Tz (optics ) Tj 3.266667 0 Td 53.472222 Tz (aluminum ) Tj 3.111111 0 Td 53.796296 Tz (oxide ) Tj 1.594444 0 Td 32.407407 Tz (, ) Tj 0.447222 0 Td 43.518519 Tz (silicon ) Tj 2.158333 0 Td 45.37037 Tz (nitride ) Tj 1.944444 0 Td 32.407407 Tz (, ) Tj 0.427778 0 Td 56.17284 Tz (germanium ) Tj 3.286111 0 Td 32.407407 Tz (, ) Tj 0.427778 0 Td 55.092593 Tz (and ) Tj 1.4 0 Td 42.12963 Tz (silicon ) Tj 1.866667 0 Td 32.407407 Tz (. ) Tj 51.564626 0 0 51.564626 0 1171.860832 Tm 6.263984 0 Td 45.25066 Tz (typically ) Tj 2.908971 0 Td 54.94723 Tz (has ) Tj 1.29934 0 Td 32.3219 Tz (a ) Tj 0.698153 0 Td 42.664908 Tz (relatively ) Tj 3.005937 0 Td 47.189974 Tz (large ) Tj 1.784169 0 Td 42.01847 Tz (size ) Tj 1.435092 0 Td 53.331135 Tz (of ) Tj 0.950264 0 Td 54.408531 Tz (around ) Tj 2.34657 0 Td 53.331135 Tz (20 ) Tj 0.872691 0 Td 85.653034 Tz (mm ) Tj 1.609631 0 Td 32.3219 Tz (in ) Tj 2.792612 0 Td 55.306362 Tz (According ) Tj 3.355013 0 Td 32.3219 Tz (to ) Tj 0.833905 0 Td 32.3219 Tz (a ) Tj 0.698153 0 Td 51.71504 Tz (second ) Tj 2.191425 0 Td 52.253738 Tz (aspect ) Tj 2.152639 0 Td 53.331135 Tz (of ) Tj 0.892084 0 Td 49.560246 Tz (the ) Tj 1.202375 0 Td 50.329815 Tz (present ) Tj 2.424142 0 Td 48.48285 Tz (invention ) Tj 2.734433 0 Td 32.3219 Tz (, ) Tj 55.714286 0 0 55.714286 0 1125.583055 Tm 5.815385 0 Td 48.985043 Tz (diameter ) Tj 2.620513 0 Td 49.85755 Tz (and ) Tj 1.25641 0 Td 44.871795 Tz (18 ) Tj 0.771795 0 Td 73.290598 Tz (mm ) Tj 1.364103 0 Td 32.905983 Tz (in ) Tj 0.717949 0 Td 48.361823 Tz (height ) Tj 1.723077 0 Td 32.905983 Tz (, ) Tj 0.323077 0 Td 52.649573 Tz (which ) Tj 1.866667 0 Td 60.42735 Tz (makes ) Tj 2.1 0 Td 22.435897 Tz (it ) Tj 0.592308 0 Td 36.894587 Tz (difficult ) Tj 2.261538 0 Td 38.888889 Tz (to ) Tj 1.902564 0 Td 44.273504 Tz (there ) Tj 1.597436 0 Td 32.905983 Tz (is ) Tj 0.664103 0 Td 47.115385 Tz (provided ) Tj 2.620513 0 Td 32.905983 Tz (a ) Tj 0.358974 0 Td 58.831909 Tz (method ) Tj 2.387179 0 Td 53.846154 Tz (of ) Tj 0.825641 0 Td 42.968143 Tz (fabricating ) Tj 3.123077 0 Td 44.871795 Tz (an ) Tj 0.825641 0 Td 44.017094 Tz (optical ) Tj 2.064103 0 Td 67.307692 Tz (wave ) Tj 45.714286 0 0 45.714286 0 1088.331614 Tm 7.065625 0 Td 50 Tz (realize ) Tj 2.5375 0 Td 47.395833 Tz (chip ) Tj 1.35625 0 Td 32.8125 Tz (- ) Tj 0.2625 0 Td 53.229167 Tz (level ) Tj 1.8375 0 Td 51.704545 Tz (integration ) Tj 3.740625 0 Td 52.864583 Tz (solution ) Tj 2.690625 0 Td 32.8125 Tz (. ) Tj 0.415625 0 Td 61.316288 Tz (Furthermore ) Tj 4.06875 0 Td 32.8125 Tz (, ) Tj 0.503125 0 Td 30.989583 Tz (in ) Tj 0.875 0 Td 54.6875 Tz (con ) Tj 1.1375 0 Td 32.8125 Tz (- ) Tj 0.74375 0 Td 52.864583 Tz (45 ) Tj 1.246875 0 Td 56.875 Tz (guide ) Tj 2.05625 0 Td 51.446759 Tz (structure ) Tj 2.821875 0 Td 32.8125 Tz (, ) Tj 0.48125 0 Td 55.902778 Tz (the ) Tj 1.071875 0 Td 71.09375 Tz (method ) Tj 2.953125 0 Td 60.520833 Tz (comprising ) Tj 3.675 0 Td 32.8125 Tz (: ) Tj 55.714286 0 0 55.714286 0 1043.817386 Tm 5.815385 0 Td 48.195632 Tz (ventional ) Tj 2.674359 0 Td 44.017094 Tz (optical ) Tj 2.046154 0 Td 49.85755 Tz (gas ) Tj 1.041026 0 Td 45.299145 Tz (sensors ) Tj 1.992308 0 Td 32.905983 Tz (, ) Tj 0.323077 0 Td 43.240093 Tz (significant ) Tj 3.015385 0 Td 41.880342 Tz (costs ) Tj 1.471795 0 Td 44.871795 Tz (are ) Tj 0.969231 0 Td 43.076923 Tz (attributed ) Tj 4.594872 0 Td 48.195632 Tz (providing ) Tj 2.782051 0 Td 32.905983 Tz (a ) Tj 0.502564 0 Td 40.883191 Tz (structure ) Tj 2.476923 0 Td 49.059829 Tz (comprising ) Tj 3.176923 0 Td 32.905983 Tz (a ) Tj 0.394872 0 Td 42.877493 Tz (substrate ) Tj 2.405128 0 Td 32.905983 Tz (, ) Tj 0.323077 0 Td 44.871795 Tz (an ) Tj 0.807692 0 Td 42.478632 Tz (insulating ) Tj 56.386555 0 0 56.386555 0 1003.691776 Tm 5.78152 0 Td 33.991555 Tz (to ) Tj 0.762593 0 Td 49.82613 Tz (complex ) Tj 2.411923 0 Td 49.361649 Tz (assembling ) Tj 3.22772 0 Td 41.381023 Tz (solution ) Tj 2.358718 0 Td 48.277861 Tz (and ) Tj 1.152757 0 Td 47.94944 Tz (expensive ) Tj 2.784352 0 Td 53.204173 Tz (components ) Tj 5.887928 0 Td 43.154496 Tz (layer ) Tj 1.667064 0 Td 45.814704 Tz (disposed ) Tj 2.624739 0 Td 39.90313 Tz (on ) Tj 0.957675 0 Td 46.307336 Tz (the ) Tj 1.135022 0 Td 41.709444 Tz (substrate ) Tj 2.323249 0 Td 32.513661 Tz (, ) Tj 0.496572 0 Td 47.292598 Tz (and ) Tj 1.2769 0 Td 32.513661 Tz (a ) Tj 0.691654 0 Td 31.922504 Tz (first ) Tj 1.152757 0 Td 48.031545 Tz (material ) Tj 50 0 0 50 0 960.977413 Tm 6.44 0 Td 63.333333 Tz (of ) Tj 0.98 0 Td 45.333333 Tz (light ) Tj 1.58 0 Td 51.666667 Tz (source ) Tj 1.92 0 Td 33.333333 Tz (, ) Tj 0.42 0 Td 48.888889 Tz (detectors ) Tj 2.96 0 Td 61.111111 Tz (and ) Tj 1.38 0 Td 38.571429 Tz (filters ) Tj 1.68 0 Td 33.333333 Tz (. ) Tj 55.714286 0 0 55.714286 0 963.656126 Tm 24.64359 0 Td 43.675214 Tz (layer ) Tj 1.561538 0 Td 47.863248 Tz (disposed ) Tj 2.602564 0 Td 44.871795 Tz (on ) Tj 0.879487 0 Td 43.874644 Tz (the ) Tj 1.058974 0 Td 43.376068 Tz (insulating ) Tj 2.853846 0 Td 44.871795 Tz (layer ) Tj 1.382051 0 Td 32.905983 Tz (; ) Tj 51.428571 0 0 51.428571 0 922.64 Tm 6.922222 0 Td 66.975309 Tz (Gas ) Tj 1.477778 0 Td 48.611111 Tz (detection ) Tj 2.858333 0 Td 64.814815 Tz (by ) Tj 1.069444 0 Td 53.148148 Tz (using ) Tj 1.827778 0 Td 51.49177 Tz (photonics ) Tj 3.013889 0 Td 59.773663 Tz (waveguide ) Tj 3.558333 0 Td 32.407407 Tz (is ) Tj 0.758333 0 Td 32.407407 Tz (a ) Tj 0.505556 0 Td 53.472222 Tz (prom ) Tj 1.594444 0 Td 32.407407 Tz (- ) Tj 2.411111 0 Td 50.925926 Tz (etching ) Tj 2.352778 0 Td 49.691358 Tz (the ) Tj 1.205556 0 Td 33.703704 Tz (first ) Tj 1.166667 0 Td 53.06713 Tz (material ) Tj 2.741667 0 Td 46.666667 Tz (layer ) Tj 1.672222 0 Td 34.027778 Tz (to ) Tj 0.855556 0 Td 39.699074 Tz (form ) Tj 1.594444 0 Td 32.407407 Tz (a ) Tj 0.447222 0 Td 58.333333 Tz (waveguide ) Tj 3.461111 0 Td 51.041667 Tz (core ) Tj 49.243697 0 0 49.243697 0 880.820411 Tm 6.579522 0 Td 49.414107 Tz (ising ) Tj 1.807338 0 Td 54.152446 Tz (approach ) Tj 3.046075 0 Td 60.921502 Tz (due ) Tj 1.319966 0 Td 40.614334 Tz (to ) Tj 0.93413 0 Td 34.973455 Tz (its ) Tj 0.995051 0 Td 56.613921 Tz (conspicuous ) Tj 4.020819 0 Td 55.506257 Tz (advantages ) Tj 3.37099 0 Td 30.460751 Tz (, ) Tj 0.487372 0 Td 50.767918 Tz (such ) Tj 1.563652 0 Td 60.921502 Tz (as ) Tj 1.177816 0 Td 38.922071 Tz (50 ) Tj 2.619625 0 Td 50.767918 Tz (of ) Tj 0.832594 0 Td 55.280622 Tz (the ) Tj 1.238737 0 Td 49.317406 Tz (optical ) Tj 2.213481 0 Td 60.921502 Tz (waveguide ) Tj 3.675597 0 Td 46.631273 Tz (structure ) Tj 2.599317 0 Td 37.229807 Tz (; ) Tj 57.058824 0 0 57.058824 0 835.738156 Tm 5.660825 0 Td 39.725086 Tz (ultra ) Tj 1.261856 0 Td 32.130584 Tz (- ) Tj 0.175258 0 Td 48.487973 Tz (small ) Tj 1.752577 0 Td 42.191676 Tz (footprint ) Tj 2.173196 0 Td 32.130584 Tz (, ) Tj 0.508247 0 Td 37.607388 Tz (flexible ) Tj 2.103093 0 Td 41.690097 Tz (integration ) Tj 2.961856 0 Td 46.005155 Tz (with ) Tj 1.507216 0 Td 47.222222 Tz (conventional ) Tj 5.240206 0 Td 47.384498 Tz (disposing ) Tj 2.926804 0 Td 35.051546 Tz (a ) Tj 0.560825 0 Td 49.16953 Tz (second ) Tj 2.068041 0 Td 46.735395 Tz (material ) Tj 2.576289 0 Td 41.477663 Tz (layer ) Tj 1.57732 0 Td 50.386598 Tz (over ) Tj 1.507216 0 Td 45.761741 Tz (the ) Tj 1.016495 0 Td 54.524628 Tz (waveguide ) Tj 45.714286 0 0 45.714286 0 797.976839 Tm 7.153125 0 Td 51.770833 Tz (electronic ) Tj 3.675 0 Td 51.770833 Tz (integrated ) Tj 3.71875 0 Td 46.940104 Tz (circuits ) Tj 2.3625 0 Td 32.8125 Tz (, ) Tj 0.65625 0 Td 65.625 Tz (and ) Tj 1.575 0 Td 57.421875 Tz (high ) Tj 1.946875 0 Td 55.497685 Tz (operation ) Tj 3.63125 0 Td 54.6875 Tz (speed ) Tj 1.859375 0 Td 32.8125 Tz (. ) Tj 55.714286 0 0 55.714286 0 789 Tm 24.661538 0 Td 47.115385 Tz (core ) Tj 1.130769 0 Td 32.905983 Tz (; ) Tj 0.358974 0 Td 49.85755 Tz (and ) Tj 51.558442 0 0 51.558442 0 754.255474 Tm 6.225945 0 Td 64.651553 Tz (However ) Tj 2.715365 0 Td 32.325777 Tz (, ) Tj 0.64005 0 Td 53.606913 Tz (conventional ) Tj 4.228212 0 Td 47.565071 Tz (Silicon ) Tj 2.114106 0 Td 32.325777 Tz (- ) Tj 0.232746 0 Td 53.337531 Tz (on ) Tj 0.737028 0 Td 32.325777 Tz (- ) Tj 0.271537 0 Td 47.411139 Tz (Insulator ) Tj 3.083879 0 Td 32.325777 Tz (\( ) Tj 0.135768 0 Td 71.116709 Tz (SOI ) Tj 1.183123 0 Td 32.325777 Tz (\) ) Tj 0.290932 0 Td 32.325777 Tz (- ) Tj 0.116373 0 Td 54.307305 Tz (based ) Tj 3.976071 0 Td 56.974181 Tz (removing ) Tj 3.161461 0 Td 32.325777 Tz (a ) Tj 0.620655 0 Td 49.412259 Tz (portion ) Tj 2.521411 0 Td 63.035264 Tz (of ) Tj 1.047355 0 Td 49.566191 Tz (the ) Tj 1.318892 0 Td 46.549118 Tz (insulating ) Tj 3.219647 0 Td 45.902603 Tz (layer ) Tj 1.842569 0 Td 55.600336 Tz (under ) Tj 2.075315 0 Td 49.566191 Tz (the ) Tj 58.571429 0 0 58.571429 0 709.525316 Tm 5.446341 0 Td 52.357724 Tz (waveguides ) Tj 3.517073 0 Td 38.888889 Tz (are ) Tj 1.092683 0 Td 50.271003 Tz (not ) Tj 1.229268 0 Td 40.54878 Tz (suitable ) Tj 2.47561 0 Td 33.197832 Tz (for ) Tj 1.092683 0 Td 44.308943 Tz (various ) Tj 2.236585 0 Td 44.579946 Tz (gas ) Tj 1.263415 0 Td 42.682927 Tz (detections ) Tj 5.002439 0 Td 53.116531 Tz (waveguide ) Tj 3.073171 0 Td 39.126016 Tz (core ) Tj 1.160976 0 Td 34.146341 Tz (to ) Tj 0.64878 0 Td 40.54878 Tz (form ) Tj 1.4 0 Td 32.723577 Tz (an ) Tj 0.665854 0 Td 33.197832 Tz (air ) Tj 0.768293 0 Td 41.971545 Tz (slot ) Tj 1.092683 0 Td 39.02439 Tz (therein ) Tj 1.929268 0 Td 43.631436 Tz (and ) Tj 1.007317 0 Td 31.300813 Tz (to ) Tj 0.597561 0 Td 42.276423 Tz (release ) Tj 45.714286 0 0 45.714286 0 673.118812 Tm 7 0 Td 63.541667 Tz (because ) Tj 2.975 0 Td 40.104167 Tz (its ) Tj 0.91875 0 Td 65.625 Tz (waveguide ) Tj 3.828125 0 Td 56.510417 Tz (transmission ) Tj 4.375 0 Td 67.447917 Tz (window ) Tj 2.996875 0 Td 32.8125 Tz (\( ) Tj 0.196875 0 Td 57.118056 Tz (transparency ) Tj 4.2 0 Td 32.8125 Tz (\) ) Tj 0.74375 0 Td 52.864583 Tz (55 ) Tj 2.84375 0 Td 49.826389 Tz (the ) Tj 1.26875 0 Td 66.030093 Tz (waveguide ) Tj 4.046875 0 Td 50.130208 Tz (core ) Tj 1.640625 0 Td 54.6875 Tz (such ) Tj 1.859375 0 Td 55.598958 Tz (that ) Tj 1.61875 0 Td 54.6875 Tz (the ) Tj 1.26875 0 Td 65.625 Tz (waveguide ) Tj 4.025 0 Td 50.130208 Tz (core ) Tj 1.684375 0 Td 43.75 Tz (is ) Tj 61.428571 0 0 61.428571 0 627.45288 Tm 5.339535 0 Td 38.888889 Tz (for ) Tj 0.830233 0 Td 39.612403 Tz (light ) Tj 1.269767 0 Td 43.410853 Tz (propagation ) Tj 3.14186 0 Td 32.55814 Tz (is ) Tj 0.634884 0 Td 36.627907 Tz (relatively ) Tj 2.490698 0 Td 41.602067 Tz (narrow ) Tj 1.693023 0 Td 32.55814 Tz (. ) Tj 0.309302 0 Td 49.741602 Tz (For ) Tj 1.106977 0 Td 45.736434 Tz (example ) Tj 2.018605 0 Td 32.55814 Tz (, ) Tj 0.390698 0 Td 38.888889 Tz (the ) Tj 3.174419 0 Td 45.219638 Tz (suspended ) Tj 2.637209 0 Td 43.410853 Tz (over ) Tj 1.237209 0 Td 38.888889 Tz (the ) Tj 0.87907 0 Td 33.462532 Tz (air ) Tj 0.683721 0 Td 38.662791 Tz (slot ) Tj 1.04186 0 Td 43.410853 Tz (by ) Tj 0.732558 0 Td 38.888889 Tz (the ) Tj 0.87907 0 Td 46.576227 Tz (second ) Tj 1.725581 0 Td 44.767442 Tz (material ) Tj 2.213953 0 Td 39.069767 Tz (layer ) Tj 1.188372 0 Td 32.55814 Tz (. ) Tj 61.428571 0 0 61.428571 0 584.505083 Tm 5.274419 0 Td 42.635659 Tz (longest ) Tj 1.872093 0 Td 46.395349 Tz (wavelength ) Tj 3.027907 0 Td 41.375969 Tz (that ) Tj 1.106977 0 Td 37.984496 Tz (can ) Tj 0.944186 0 Td 54.263566 Tz (be ) Tj 0.830233 0 Td 42.807924 Tz (supported ) Tj 2.45814 0 Td 54.263566 Tz (by ) Tj 0.813953 0 Td 32.55814 Tz (a ) Tj 0.504651 0 Td 43.636951 Tz (conventional ) Tj 4.965116 0 Td 32.55814 Tz (In ) Tj 0.748837 0 Td 42.248062 Tz (various ) Tj 2.034884 0 Td 49.577167 Tz (embodiments ) Tj 3.304651 0 Td 32.55814 Tz (, ) Tj 0.35814 0 Td 44.315245 Tz (the ) Tj 0.927907 0 Td 52.002584 Tz (method ) Tj 2.213953 0 Td 39.922481 Tz (further ) Tj 1.969767 0 Td 45.219638 Tz (comprises ) Tj 50 0 0 50 0 546.224434 Tm 6.5 0 Td 71.111111 Tz (SOI ) Tj 1.2 0 Td 33.333333 Tz (- ) Tj 0.22 0 Td 53.333333 Tz (based ) Tj 2.04 0 Td 60.37037 Tz (waveguide ) Tj 3.48 0 Td 77.777778 Tz (may ) Tj 1.68 0 Td 63.333333 Tz (be ) Tj 1.06 0 Td 58.666667 Tz (about ) Tj 2.08 0 Td 33.333333 Tz (3 ) Tj 0.28 0 Td 33.333333 Tz (. ) Tj 0.28 0 Td 33.333333 Tz (7 ) Tj 0.66 0 Td 53.333333 Tz (um ) Tj 1.3 0 Td 33.333333 Tz (\( ) Tj 0.24 0 Td 54 Tz (based ) Tj 2.02 0 Td 53.333333 Tz (on ) Tj 1.1 0 Td 33.333333 Tz (a ) Tj 1.9 0 Td 54.761905 Tz (forming ) Tj 2.7 0 Td 43.333333 Tz (at ) Tj 0.84 0 Td 44.666667 Tz (least ) Tj 1.72 0 Td 61.111111 Tz (one ) Tj 1.36 0 Td 54.761905 Tz (through ) Tj 2.4 0 Td 33.333333 Tz (- ) Tj 0.14 0 Td 55.833333 Tz (hole ) Tj 1.76 0 Td 33.333333 Tz (in ) Tj 0.92 0 Td 50 Tz (the ) Tj 1.22 0 Td 55 Tz (second ) Tj 2.28 0 Td 54.166667 Tz (material ) Tj 51.688312 0 0 51.688312 0 506.786509 Tm 6.229648 0 Td 59.473292 Tz (waveguide ) Tj 3.463065 0 Td 51.884422 Tz (propagation ) Tj 3.811307 0 Td 44.336265 Tz (loss ) Tj 1.451005 0 Td 41.917923 Tz (less ) Tj 1.334925 0 Td 46.754606 Tz (than ) Tj 1.663819 0 Td 32.244556 Tz (2 ) Tj 0.580402 0 Td 58.040201 Tz (dBcm ) Tj 2.282915 0 Td 32.244556 Tz (\) ) Tj 0.270854 0 Td 32.244556 Tz (, ) Tj 0.444975 0 Td 54.815745 Tz (but ) Tj 1.238191 0 Td 49.441653 Tz (the ) Tj 2.360302 0 Td 47.077052 Tz (layer ) Tj 1.741206 0 Td 32.244556 Tz (to ) Tj 0.696482 0 Td 62.876884 Tz (be ) Tj 1.044724 0 Td 32.244556 Tz (in ) Tj 0.83191 0 Td 38.693467 Tz (fluid ) Tj 1.586432 0 Td 56.055921 Tz (communication ) Tj 4.643216 0 Td 49.979062 Tz (with ) Tj 1.547739 0 Td 49.441653 Tz (the ) Tj 1.141457 0 Td 48.827471 Tz (portion ) Tj 2.398995 0 Td 53.203518 Tz (of ) Tj 0.870603 0 Td 49.441653 Tz (the ) Tj 45.714286 0 0 45.714286 0 467.360465 Tm 7.175 0 Td 51.373106 Tz (fingerprint ) Tj 3.609375 0 Td 54.6875 Tz (absorption ) Tj 3.696875 0 Td 61.979167 Tz (wavelengths ) Tj 4.309375 0 Td 63.802083 Tz (of ) Tj 0.984375 0 Td 32.8125 Tz (a ) Tj 0.634375 0 Td 50.3125 Tz (large ) Tj 1.8375 0 Td 50 Tz (variety ) Tj 2.5375 0 Td 52.864583 Tz (of ) Tj 0.896875 0 Td 60.763889 Tz (gas ) Tj 1.575 0 Td 41.927083 Tz (60 ) Tj 1.203125 0 Td 52.5 Tz (insulating ) Tj 3.5 0 Td 51.770833 Tz (layer ) Tj 1.88125 0 Td 32.8125 Tz (to ) Tj 0.83125 0 Td 63.802083 Tz (be ) Tj 1.115625 0 Td 64.583333 Tz (removed ) Tj 2.8875 0 Td 32.8125 Tz (. ) Tj 45.714286 0 0 45.714286 0 424.338009 Tm 6.95625 0 Td 63.599537 Tz (molecules ) Tj 3.653125 0 Td 63.802083 Tz (have ) Tj 1.88125 0 Td 57.118056 Tz (longer ) Tj 2.3625 0 Td 61.979167 Tz (wavelengths ) Tj 4.1125 0 Td 32.8125 Tz (. ) Tj 0.56875 0 Td 55.092593 Tz (Therefore ) Tj 3.128125 0 Td 32.8125 Tz (, ) Tj 0.503125 0 Td 30.989583 Tz (it ) Tj 0.765625 0 Td 32.8125 Tz (is ) Tj 0.7875 0 Td 57.604167 Tz (gener ) Tj 1.79375 0 Td 32.8125 Tz (- ) Tj 2.7125 0 Td 43.75 Tz (In ) Tj 1.159375 0 Td 55.729167 Tz (various ) Tj 2.909375 0 Td 63.304924 Tz (embodiments ) Tj 4.353125 0 Td 32.8125 Tz (, ) Tj 0.65625 0 Td 56.712963 Tz (disposing ) Tj 3.54375 0 Td 32.8125 Tz (a ) Tj 0.7875 0 Td 61.371528 Tz (second ) Tj 2.603125 0 Td 59.700521 Tz (material ) Tj 61.428571 0 0 61.428571 0 377.554362 Tm 5.355814 0 Td 33.236434 Tz (ally ) Tj 1.155814 0 Td 43.682171 Tz (understood ) Tj 3.044186 0 Td 31.20155 Tz (in ) Tj 0.765116 0 Td 38.888889 Tz (the ) Tj 1.123256 0 Td 43.636951 Tz (conventional ) Tj 3.402326 0 Td 32.55814 Tz (art ) Tj 0.927907 0 Td 41.375969 Tz (that ) Tj 1.253488 0 Td 48.023256 Tz (waveguides ) Tj 4.167442 0 Td 37.984496 Tz (layer ) Tj 1.465116 0 Td 44.767442 Tz (over ) Tj 1.448837 0 Td 38.888889 Tz (the ) Tj 1.025581 0 Td 50.344531 Tz (waveguide ) Tj 3.011628 0 Td 44.767442 Tz (core ) Tj 1.4 0 Td 45.822567 Tz (comprises ) Tj 2.8 0 Td 41.903531 Tz (disposing ) Tj 2.702326 0 Td 39.793282 Tz (the ) Tj 51.623377 0 0 51.623377 0 338.599476 Tm 6.179371 0 Td 57.467505 Tz (based ) Tj 1.99522 0 Td 53.27044 Tz (on ) Tj 0.871698 0 Td 71.027254 Tz (SOI ) Tj 1.433459 0 Td 43.98847 Tz (platform ) Tj 2.673208 0 Td 43.584906 Tz (is ) Tj 0.639245 0 Td 54.884696 Tz (not ) Tj 1.239748 0 Td 45.602725 Tz (suitable ) Tj 2.460126 0 Td 32.285115 Tz (to ) Tj 0.697358 0 Td 62.955975 Tz (be ) Tj 0.968553 0 Td 55.178197 Tz (implemented ) Tj 3.99044 0 Td 32.285115 Tz (in ) Tj 2.072704 0 Td 51.656184 Tz (second ) Tj 2.033962 0 Td 52.866876 Tz (material ) Tj 2.71195 0 Td 47.136268 Tz (layer ) Tj 1.588428 0 Td 43.584906 Tz (to ) Tj 0.832956 0 Td 52.947589 Tz (cover ) Tj 1.762767 0 Td 32.285115 Tz (a ) Tj 0.484277 0 Td 49.503843 Tz (top ) Tj 1.181635 0 Td 47.044025 Tz (surface ) Tj 2.208302 0 Td 54.884696 Tz (and ) Tj 1.297862 0 Td 60.265549 Tz (two ) Tj 1.278491 0 Td 63.924528 Tz (oppos ) Tj 51.642857 0 0 51.642857 0 298.487259 Tm 6.33195 0 Td 32.272937 Tz (a ) Tj 0.755187 0 Td 49.48517 Tz (gas ) Tj 1.219917 0 Td 52.712464 Tz (sensor ) Tj 1.858921 0 Td 32.272937 Tz (. ) Tj 0.503458 0 Td 75.841402 Tz (On ) Tj 1.413555 0 Td 44.106347 Tz (the ) Tj 1.181189 0 Td 50.345781 Tz (other ) Tj 1.878285 0 Td 56.477639 Tz (hand ) Tj 1.432918 0 Td 32.272937 Tz (, ) Tj 0.522822 0 Td 56.800369 Tz (waveguides ) Tj 3.834025 0 Td 50.345781 Tz (based ) Tj 2.013831 0 Td 53.250346 Tz (on ) Tj 2.207469 0 Td 49.48517 Tz (ing ) Tj 1.161826 0 Td 50.829876 Tz (sidewall ) Tj 2.652835 0 Td 48.812817 Tz (surfaces ) Tj 2.614108 0 Td 53.250346 Tz (of ) Tj 0.890733 0 Td 44.106347 Tz (the ) Tj 1.084371 0 Td 58.091286 Tz (waveguide ) Tj 3.427386 0 Td 47.602582 Tz (core ) Tj 1.200553 0 Td 32.272937 Tz (. ) Tj 55.714286 0 0 55.714286 0 252.802083 Tm 5.851282 0 Td 41.025641 Tz (Silicon ) Tj 1.938462 0 Td 32.905983 Tz (- ) Tj 0.179487 0 Td 44.871795 Tz (on ) Tj 0.664103 0 Td 32.905983 Tz (- ) Tj 0.215385 0 Td 49.358974 Tz (Sapphire ) Tj 2.710256 0 Td 32.905983 Tz (\( ) Tj 0.233333 0 Td 66.809117 Tz (SOS ) Tj 1.238462 0 Td 32.905983 Tz (\) ) Tj 0.520513 0 Td 46.581197 Tz (involve ) Tj 2.297436 0 Td 47.115385 Tz (high ) Tj 1.615385 0 Td 41.064491 Tz (fabrication ) Tj 3.176923 0 Td 42.478632 Tz (costs ) Tj 1.687179 0 Td 44.871795 Tz (65 ) Tj 1.723077 0 Td 31.410256 Tz (In ) Tj 0.789744 0 Td 46.153846 Tz (various ) Tj 2.351282 0 Td 52.486402 Tz (embodiments ) Tj 3.482051 0 Td 32.905983 Tz (, ) Tj 0.502564 0 Td 43.874644 Tz (the ) Tj 0.987179 0 Td 55.840456 Tz (method ) Tj 2.405128 0 Td 44.017094 Tz (further ) Tj 2.171795 0 Td 50.189934 Tz (comprises ) Tj 51.428571 0 0 51.428571 0 214.248204 Tm 6.241667 0 Td 55.092593 Tz (while ) Tj 1.944444 0 Td 55.092593 Tz (not ) Tj 1.225 0 Td 43.874644 Tz (significantly ) Tj 3.869444 0 Td 53.652263 Tz (improving ) Tj 3.227778 0 Td 49.691358 Tz (the ) Tj 1.127778 0 Td 58.333333 Tz (waveguide ) Tj 3.422222 0 Td 50.231481 Tz (transmis ) Tj 2.508333 0 Td 32.407407 Tz (- ) Tj 1.711111 0 Td 48.148148 Tz (etching ) Tj 2.430556 0 Td 49.691358 Tz (the ) Tj 1.244444 0 Td 46.666667 Tz (insulating ) Tj 3.111111 0 Td 50.555556 Tz (layer ) Tj 1.866667 0 Td 32.407407 Tz (to ) Tj 0.913889 0 Td 43.75 Tz (form ) Tj 1.633333 0 Td 61.574074 Tz (two ) Tj 1.4 0 Td 52.256944 Tz (trenches ) Tj 2.838889 0 Td 44.444444 Tz (therein ) Tj 48.571429 0 0 48.571429 0 172.119306 Tm 6.732353 0 Td 48.039216 Tz (sion ) Tj 1.420588 0 Td 62.908497 Tz (window ) Tj 2.861765 0 Td 46.895425 Tz (for ) Tj 1.173529 0 Td 47.352941 Tz (light ) Tj 1.564706 0 Td 54.901961 Tz (propagation ) Tj 3.747059 0 Td 30.882353 Tz (. ) Tj 61.428571 0 0 61.428571 0 168.494505 Tm 21.097674 0 Td 46.666667 Tz (which ) Tj 1.676744 0 Td 38.888889 Tz (are ) Tj 0.846512 0 Td 45.219638 Tz (spaced ) Tj 1.823256 0 Td 41.782946 Tz (apart ) Tj 1.204651 0 Td 32.55814 Tz (, ) Tj 0.260465 0 Td 44.186047 Tz (wherein ) Tj 2.165116 0 Td 42.50646 Tz (disposing ) Tj 2.474419 0 Td 32.55814 Tz (a ) Tj 0.406977 0 Td 46.124031 Tz (second ) Tj 1.725581 0 Td 44.767442 Tz (material ) Tj ET Q endstream endobj 118 0 obj << /Length 1 >> stream q endstream endobj 119 0 obj << /Length 46599 >> stream Q q 0.24 0 0 0.24 0 0 cm BT /F1 1 Tf 3 Tr 70 0 0 70 0 3024 Tm 15.214286 0 Td 85.714286 Tz (US ) Tj 1.4 0 Td 30.952381 Tz (10 ) Tj 0.542857 0 Td 33.333333 Tz (, ) Tj 0.142857 0 Td 55.555556 Tz (215 ) Tj 1.114286 0 Td 33.333333 Tz (, ) Tj 0.142857 0 Td 61.111111 Tz (692 ) Tj 1.4 0 Td 63.095238 Tz (B2 ) Tj 61.428571 0 0 61.428571 0 2916.501681 Tm 5.306977 0 Td 38.527132 Tz (layer ) Tj 1.448837 0 Td 44.089147 Tz (over ) Tj 1.204651 0 Td 44.315245 Tz (the ) Tj 0.960465 0 Td 50.344531 Tz (waveguide ) Tj 2.865116 0 Td 43.410853 Tz (core ) Tj 1.302326 0 Td 39.534884 Tz (further ) Tj 1.872093 0 Td 45.521102 Tz (comprises ) Tj 2.637209 0 Td 42.50646 Tz (disposing ) Tj 4.134884 0 Td 37.984496 Tz (FIG ) Tj 1.025581 0 Td 32.55814 Tz (. ) Tj 0.423256 0 Td 32.55814 Tz (3 ) Tj 0.537209 0 Td 39.922481 Tz (depicts ) Tj 1.986047 0 Td 32.55814 Tz (a ) Tj 0.439535 0 Td 42.17759 Tz (perspective ) Tj 3.125581 0 Td 37.984496 Tz (view ) Tj 1.383721 0 Td 42.054264 Tz (of ) Tj 0.716279 0 Td 38.888889 Tz (the ) Tj 1.025581 0 Td 40.697674 Tz (optical ) Tj 1.839535 0 Td 61.046512 Tz (wave ) Tj 51.578947 0 0 51.578947 0 2873.057143 Tm 6.262245 0 Td 48.469388 Tz (the ) Tj 1.182653 0 Td 54.393424 Tz (second ) Tj 2.016327 0 Td 54.931973 Tz (material ) Tj 2.733673 0 Td 45.884354 Tz (layer ) Tj 1.686735 0 Td 39.583333 Tz (into ) Tj 1.318367 0 Td 49.546485 Tz (the ) Tj 1.105102 0 Td 60.31746 Tz (two ) Tj 1.337755 0 Td 48.469388 Tz (trenches ) Tj 2.559184 0 Td 43.622449 Tz (to ) Tj 0.872449 0 Td 43.622449 Tz (form ) Tj 1.512245 0 Td 60.31746 Tz (two ) Tj 2.617347 0 Td 51.70068 Tz (guide ) Tj 1.841837 0 Td 45.597128 Tz (structure ) Tj 2.791837 0 Td 62.040816 Tz (shown ) Tj 2.113265 0 Td 33.928571 Tz (in ) Tj 0.872449 0 Td 43.0839 Tz (FIG ) Tj 1.085714 0 Td 32.312925 Tz (. ) Tj 0.562245 0 Td 32.312925 Tz (1 ) Tj 0.271429 0 Td 32.312925 Tz (; ) Tj 57.346939 0 0 57.346939 0 2828.601104 Tm 5.649822 0 Td 44.684164 Tz (sidewall ) Tj 2.336655 0 Td 45.774021 Tz (portions ) Tj 2.284342 0 Td 49.988138 Tz (which ) Tj 1.830961 0 Td 42.625544 Tz (are ) Tj 0.959075 0 Td 47.953737 Tz (spaced ) Tj 1.970463 0 Td 43.013049 Tz (apart ) Tj 1.499644 0 Td 48.438118 Tz (and ) Tj 1.15089 0 Td 40.978648 Tz (constitute ) Tj 2.685409 0 Td 53.28193 Tz (two ) Tj 2.946975 0 Td 40.688019 Tz (FIG ) Tj 1.046263 0 Td 34.875445 Tz (. ) Tj 0.435943 0 Td 34.875445 Tz (4 ) Tj 0.592883 0 Td 43.179122 Tz (depicts ) Tj 2.197153 0 Td 34.875445 Tz (a ) Tj 0.558007 0 Td 44.00949 Tz (general ) Tj 2.179715 0 Td 39.961447 Tz (flow ) Tj 1.464769 0 Td 43.179122 Tz (diagram ) Tj 2.319217 0 Td 55.219454 Tz (of ) Tj 0.837011 0 Td 34.875445 Tz (a ) Tj 0.435943 0 Td 55.703836 Tz (method ) Tj 2.37153 0 Td 56.672598 Tz (of ) Tj 61.428571 0 0 61.428571 0 2785.910657 Tm 5.290698 0 Td 46.463178 Tz (opposing ) Tj 2.474419 0 Td 40.999139 Tz (sidewalls ) Tj 2.393023 0 Td 54.263566 Tz (of ) Tj 0.781395 0 Td 39.793282 Tz (the ) Tj 0.960465 0 Td 33.462532 Tz (air ) Tj 0.748837 0 Td 37.306202 Tz (slot ) Tj 1.155814 0 Td 46.124031 Tz (formed ) Tj 1.969767 0 Td 23.062016 Tz (in ) Tj 0.667442 0 Td 36.627907 Tz (said ) Tj 1.106977 0 Td 49.176357 Tz (removing ) Tj 3.67907 0 Td 38.477801 Tz (fabricating ) Tj 2.8 0 Td 39.793282 Tz (the ) Tj 0.944186 0 Td 37.984496 Tz (optical ) Tj 1.74186 0 Td 50.344531 Tz (waveguide ) Tj 2.897674 0 Td 38.28596 Tz (structure ) Tj 2.246512 0 Td 45.822567 Tz (according ) Tj 2.653488 0 Td 32.55814 Tz (to ) Tj 0.667442 0 Td 43.410853 Tz (an ) Tj 45.714286 0 0 45.714286 0 2751.41769 Tm 7.109375 0 Td 32.8125 Tz (a ) Tj 0.65625 0 Td 52.083333 Tz (portion ) Tj 2.66875 0 Td 52.864583 Tz (of ) Tj 0.853125 0 Td 54.6875 Tz (the ) Tj 1.35625 0 Td 52.5 Tz (insulating ) Tj 3.5 0 Td 51.770833 Tz (layer ) Tj 1.596875 0 Td 32.8125 Tz (. ) Tj 52.653061 0 0 52.653061 0 2744.518027 Tm 23.778295 0 Td 31.653747 Tz (5 ) Tj 0.93062 0 Td 59.192506 Tz (embodiment ) Tj 3.741473 0 Td 52.228682 Tz (of ) Tj 0.854651 0 Td 44.315245 Tz (the ) Tj 1.063566 0 Td 50.645995 Tz (present ) Tj 2.393023 0 Td 46.777204 Tz (invention ) Tj 2.639922 0 Td 31.653747 Tz (; ) Tj 51.632653 0 0 51.632653 0 2707.417055 Tm 7.049802 0 Td 32.279315 Tz (In ) Tj 0.794071 0 Td 49.802372 Tz (various ) Tj 2.324111 0 Td 58.689663 Tz (embodiments ) Tj 3.85415 0 Td 32.279315 Tz (, ) Tj 0.406719 0 Td 45.191041 Tz (the ) Tj 1.026482 0 Td 58.102767 Tz (waveguide ) Tj 3.428063 0 Td 47.611989 Tz (core ) Tj 1.413834 0 Td 32.279315 Tz (is ) Tj 0.600395 0 Td 53.26087 Tz (shaped ) Tj 2.24664 0 Td 33.893281 Tz (in ) Tj 2.711462 0 Td 66.979578 Tz (FIGS ) Tj 1.626877 0 Td 32.279315 Tz (. ) Tj 0.271146 0 Td 62.944664 Tz (5A ) Tj 1.04585 0 Td 32.279315 Tz (to ) Tj 0.619763 0 Td 62.944664 Tz (5F ) Tj 1.007115 0 Td 48.418972 Tz (depict ) Tj 1.917391 0 Td 43.577075 Tz (an ) Tj 0.832806 0 Td 52.722881 Tz (exemplary ) Tj 3.079447 0 Td 61.868687 Tz (method ) Tj 2.401581 0 Td 53.26087 Tz (of ) Tj 0.813439 0 Td 46.071386 Tz (fabricating ) Tj 58.571429 0 0 58.571429 0 2661.43578 Tm 5.531707 0 Td 44.579946 Tz (the ) Tj 1.07561 0 Td 36.280488 Tz (form ) Tj 1.331707 0 Td 52.642276 Tz (of ) Tj 0.819512 0 Td 34.146341 Tz (a ) Tj 0.512195 0 Td 33.577236 Tz (strip ) Tj 1.092683 0 Td 34.146341 Tz (. ) Tj 55.714286 0 0 55.714286 0 2663.347368 Tm 23.297436 0 Td 43.874644 Tz (the ) Tj 1.076923 0 Td 44.017094 Tz (optical ) Tj 1.992308 0 Td 53.846154 Tz (waveguide ) Tj 3.123077 0 Td 43.209877 Tz (structure ) Tj 2.638462 0 Td 55.641026 Tz (shown ) Tj 1.974359 0 Td 20.940171 Tz (in ) Tj 0.7 0 Td 43.874644 Tz (FIG ) Tj 1.005128 0 Td 32.905983 Tz (. ) Tj 0.502564 0 Td 32.905983 Tz (1 ) Tj 0.466667 0 Td 49.192783 Tz (according ) Tj 55.714286 0 0 55.714286 0 2618.769963 Tm 6.551282 0 Td 32.905983 Tz (In ) Tj 0.951282 0 Td 46.153846 Tz (various ) Tj 2.297436 0 Td 54.390054 Tz (embodiments ) Tj 3.589744 0 Td 32.905983 Tz (, ) Tj 0.628205 0 Td 43.874644 Tz (the ) Tj 1.148718 0 Td 34.102564 Tz (first ) Tj 1.25641 0 Td 49.732906 Tz (material ) Tj 2.728205 0 Td 44.871795 Tz (layer ) Tj 1.776923 0 Td 20.940171 Tz (is ) Tj 0.735897 0 Td 32.905983 Tz (a ) Tj 1.687179 0 Td 32.905983 Tz (to ) Tj 0.735897 0 Td 44.871795 Tz (an ) Tj 0.84359 0 Td 51.709402 Tz (example ) Tj 2.512821 0 Td 55.641026 Tz (embodiment ) Tj 3.535897 0 Td 55.34188 Tz (of ) Tj 0.861538 0 Td 43.874644 Tz (the ) Tj 1.005128 0 Td 45.299145 Tz (present ) Tj 2.207692 0 Td 44.207028 Tz (invention ) Tj 2.494872 0 Td 32.905983 Tz (; ) Tj 45.714286 0 0 45.714286 0 2580.972067 Tm 7.0875 0 Td 48.958333 Tz (silicon ) Tj 2.471875 0 Td 55.416667 Tz (layer ) Tj 1.61875 0 Td 32.8125 Tz (. ) Tj 58.571429 0 0 58.571429 0 2579.85229 Tm 22.860976 0 Td 38.888889 Tz (FIG ) Tj 1.007317 0 Td 34.146341 Tz (. ) Tj 0.358537 0 Td 55.487805 Tz (6A ) Tj 1.092683 0 Td 39.02439 Tz (depicts ) Tj 2.04878 0 Td 34.146341 Tz (a ) Tj 0.580488 0 Td 44.579946 Tz (schematic ) Tj 2.765854 0 Td 47.560976 Tz (drawing ) Tj 2.270732 0 Td 52.642276 Tz (of ) Tj 0.802439 0 Td 42.682927 Tz (an ) Tj 0.904878 0 Td 42.682927 Tz (optical ) Tj 2.031707 0 Td 44.579946 Tz (gas ) Tj 55.714286 0 0 55.714286 0 2538.422977 Tm 6.587179 0 Td 31.410256 Tz (In ) Tj 0.789744 0 Td 46.581197 Tz (various ) Tj 2.279487 0 Td 52.758353 Tz (embodiments ) Tj 3.482051 0 Td 32.905983 Tz (, ) Tj 0.520513 0 Td 43.874644 Tz (the ) Tj 1.076923 0 Td 50.356125 Tz (second ) Tj 1.992308 0 Td 49.732906 Tz (material ) Tj 2.602564 0 Td 43.076923 Tz (layer ) Tj 1.687179 0 Td 22.435897 Tz (is ) Tj 0.664103 0 Td 32.905983 Tz (a ) Tj 0.717949 0 Td 32.905983 Tz (10 ) Tj 0.951282 0 Td 45.868946 Tz (sensor ) Tj 1.866667 0 Td 49.85755 Tz (according ) Tj 2.853846 0 Td 32.905983 Tz (to ) Tj 0.735897 0 Td 41.880342 Tz (an ) Tj 0.84359 0 Td 54.273504 Tz (example ) Tj 2.512821 0 Td 55.641026 Tz (embodiment ) Tj 3.553846 0 Td 52.350427 Tz (of ) Tj 0.753846 0 Td 43.874644 Tz (the ) Tj 0.969231 0 Td 49.145299 Tz (present ) Tj 45.714286 0 0 45.714286 0 2499.721683 Tm 7.153125 0 Td 48.854167 Tz (dielectric ) Tj 3.2375 0 Td 47.395833 Tz (thin ) Tj 1.640625 0 Td 34.635417 Tz (film ) Tj 1.509375 0 Td 55.416667 Tz (layer ) Tj 1.640625 0 Td 32.8125 Tz (. ) Tj 55.714286 0 0 55.714286 0 2496.724968 Tm 23.315385 0 Td 45.868946 Tz (invention ) Tj 2.494872 0 Td 32.905983 Tz (, ) Tj 0.592308 0 Td 46.022354 Tz (incorporating ) Tj 3.984615 0 Td 43.874644 Tz (the ) Tj 1.220513 0 Td 44.444444 Tz (optical ) Tj 2.189744 0 Td 53.846154 Tz (waveguide ) Tj 3.266667 0 Td 43.209877 Tz (structure ) Tj 58.571429 0 0 58.571429 0 2451.788764 Tm 6.231707 0 Td 31.300813 Tz (In ) Tj 0.768293 0 Td 44.715447 Tz (various ) Tj 2.287805 0 Td 50.702143 Tz (embodiments ) Tj 3.363415 0 Td 34.146341 Tz (, ) Tj 0.512195 0 Td 43.631436 Tz (the ) Tj 1.041463 0 Td 38.98374 Tz (dielectric ) Tj 2.731707 0 Td 34.857724 Tz (thin ) Tj 1.417073 0 Td 27.03252 Tz (film ) Tj 1.246341 0 Td 44.390244 Tz (layer ) Tj 2.560976 0 Td 57.479675 Tz (shown ) Tj 1.895122 0 Td 34.146341 Tz (in ) Tj 0.75122 0 Td 38.888889 Tz (FIG ) Tj 1.007317 0 Td 34.146341 Tz (. ) Tj 0.409756 0 Td 34.146341 Tz (1 ) Tj 0.290244 0 Td 34.146341 Tz (; ) Tj 45.714286 0 0 45.714286 0 2417.354815 Tm 7.109375 0 Td 56.054688 Tz (includes ) Tj 3.15 0 Td 32.8125 Tz (a ) Tj 0.7 0 Td 56.510417 Tz (material ) Tj 3.171875 0 Td 52.864583 Tz (selected ) Tj 3.128125 0 Td 48.307292 Tz (from ) Tj 2.034375 0 Td 32.8125 Tz (a ) Tj 0.809375 0 Td 56.145833 Tz (group ) Tj 2.31875 0 Td 52.864583 Tz (consisting ) Tj 3.63125 0 Td 65.625 Tz (of ) Tj 3.15 0 Td 55.902778 Tz (FIG ) Tj 1.35625 0 Td 32.8125 Tz (. ) Tj 0.678125 0 Td 65.625 Tz (6B ) Tj 1.465625 0 Td 53.125 Tz (depicts ) Tj 2.953125 0 Td 55.729167 Tz (another ) Tj 2.93125 0 Td 55.598958 Tz (type ) Tj 1.903125 0 Td 63.802083 Tz (of ) Tj 1.1375 0 Td 66.840278 Tz (waveguide ) Tj 4.1125 0 Td 50.520833 Tz (pattern ) Tj 61.428571 0 0 61.428571 0 2370.08801 Tm 5.290698 0 Td 47.819767 Tz (aluminum ) Tj 2.637209 0 Td 46.124031 Tz (oxide ) Tj 1.367442 0 Td 32.55814 Tz (, ) Tj 0.423256 0 Td 35.271318 Tz (silicon ) Tj 1.806977 0 Td 37.984496 Tz (nitride ) Tj 1.562791 0 Td 32.55814 Tz (, ) Tj 0.390698 0 Td 45.822567 Tz (germanium ) Tj 2.751163 0 Td 32.55814 Tz (, ) Tj 0.34186 0 Td 49.741602 Tz (and ) Tj 1.139535 0 Td 34.883721 Tz (silicon ) Tj 1.595349 0 Td 32.55814 Tz (. ) Tj 1.872093 0 Td 44.013781 Tz (according ) Tj 2.539535 0 Td 32.55814 Tz (to ) Tj 0.683721 0 Td 43.410853 Tz (an ) Tj 0.765116 0 Td 48.449612 Tz (example ) Tj 2.246512 0 Td 51.821705 Tz (embodiment ) Tj 3.190698 0 Td 54.263566 Tz (of ) Tj 0.781395 0 Td 38.888889 Tz (the ) Tj 0.862791 0 Td 44.573643 Tz (present ) Tj 2.002326 0 Td 49.922481 Tz (inven ) Tj 58.571429 0 0 58.571429 0 2328.875445 Tm 6.214634 0 Td 48.373984 Tz (According ) Tj 2.902439 0 Td 21.341463 Tz (to ) Tj 0.597561 0 Td 34.146341 Tz (a ) Tj 0.409756 0 Td 36.99187 Tz (third ) Tj 1.382927 0 Td 45.528455 Tz (aspect ) Tj 1.72439 0 Td 52.642276 Tz (of ) Tj 0.7 0 Td 43.631436 Tz (the ) Tj 0.939024 0 Td 46.341463 Tz (present ) Tj 2.082927 0 Td 41.102078 Tz (invention ) Tj 2.339024 0 Td 34.146341 Tz (, ) Tj 0.307317 0 Td 41.544715 Tz (there ) Tj 1.72439 0 Td 34.146341 Tz (15 ) Tj 0.853659 0 Td 38.414634 Tz (tion ) Tj 0.973171 0 Td 34.146341 Tz (; ) Tj 51.428571 0 0 51.428571 0 2291.946667 Tm 6.358333 0 Td 34.027778 Tz (is ) Tj 0.641667 0 Td 52.256944 Tz (provided ) Tj 2.916667 0 Td 42.12963 Tz (an ) Tj 0.875 0 Td 47.685185 Tz (optical ) Tj 2.236111 0 Td 49.691358 Tz (gas ) Tj 1.205556 0 Td 52.391975 Tz (sensor ) Tj 2.080556 0 Td 54.444444 Tz (comprising ) Tj 3.266667 0 Td 32.407407 Tz (: ) Tj 58.571429 0 0 58.571429 0 2289.402477 Tm 22.77561 0 Td 44.579946 Tz (FIG ) Tj 1.041463 0 Td 34.146341 Tz (. ) Tj 0.495122 0 Td 34.146341 Tz (7 ) Tj 0.614634 0 Td 41.463415 Tz (depicts ) Tj 2.031707 0 Td 34.146341 Tz (a ) Tj 0.614634 0 Td 44.308943 Tz (general ) Tj 2.15122 0 Td 37.703252 Tz (flow ) Tj 1.34878 0 Td 42.682927 Tz (diagram ) Tj 2.390244 0 Td 42.682927 Tz (of ) Tj 0.785366 0 Td 34.146341 Tz (a ) Tj 0.460976 0 Td 54.539295 Tz (method ) Tj 2.219512 0 Td 52.642276 Tz (of ) Tj 55.714286 0 0 55.714286 0 2247.701031 Tm 6.515385 0 Td 32.905983 Tz (a ) Tj 0.592308 0 Td 39.487179 Tz (light ) Tj 1.453846 0 Td 44.871795 Tz (source ) Tj 1.920513 0 Td 45.769231 Tz (configured ) Tj 3.123077 0 Td 31.410256 Tz (to ) Tj 0.717949 0 Td 50.106838 Tz (emit ) Tj 1.453846 0 Td 39.487179 Tz (light ) Tj 1.166667 0 Td 32.905983 Tz (; ) Tj 55.714286 0 0 55.714286 0 2247.735332 Tm 23.387179 0 Td 41.880342 Tz (fabricating ) Tj 3.087179 0 Td 43.874644 Tz (the ) Tj 1.076923 0 Td 44.444444 Tz (optical ) Tj 2.1 0 Td 45.868946 Tz (gas ) Tj 1.058974 0 Td 47.863248 Tz (sensor ) Tj 1.95641 0 Td 49.85755 Tz (according ) Tj 2.907692 0 Td 32.905983 Tz (to ) Tj 0.735897 0 Td 43.376068 Tz (an ) Tj 0.915385 0 Td 60.826211 Tz (embodi ) Tj 52.653061 0 0 52.653061 0 2208.396522 Tm 6.894186 0 Td 31.653747 Tz (a ) Tj 0.664729 0 Td 48.535745 Tz (gas ) Tj 1.139535 0 Td 51.098191 Tz (sensing ) Tj 2.487984 0 Td 45.219638 Tz (section ) Tj 2.317054 0 Td 52.54522 Tz (comprising ) Tj 3.494574 0 Td 42.732558 Tz (an ) Tj 0.93062 0 Td 47.028424 Tz (optical ) Tj 2.203101 0 Td 56.976744 Tz (waveguide ) Tj 4.387209 0 Td 68.055556 Tz (ment ) Tj 1.823256 0 Td 52.228682 Tz (of ) Tj 0.797674 0 Td 48.535745 Tz (the ) Tj 1.120543 0 Td 50.645995 Tz (present ) Tj 2.298062 0 Td 47.48062 Tz (invention ) Tj 2.658915 0 Td 31.653747 Tz (; ) Tj 58.571429 0 0 58.571429 0 2162.81153 Tm 6.812195 0 Td 39.837398 Tz (structure ) Tj 2.578049 0 Td 44.896116 Tz (according ) Tj 2.765854 0 Td 31.300813 Tz (to ) Tj 0.768293 0 Td 44.579946 Tz (the ) Tj 1.143902 0 Td 30.731707 Tz (first ) Tj 1.195122 0 Td 46.00271 Tz (aspect ) Tj 1.860976 0 Td 55.487805 Tz (of ) Tj 0.819512 0 Td 44.579946 Tz (the ) Tj 1.109756 0 Td 43.902439 Tz (present ) Tj 3.739024 0 Td 44.579946 Tz (FIG ) Tj 1.041463 0 Td 34.146341 Tz (. ) Tj 0.563415 0 Td 34.146341 Tz (8 ) Tj 0.563415 0 Td 41.869919 Tz (depicts ) Tj 2.236585 0 Td 34.146341 Tz (a ) Tj 0.631707 0 Td 44.263776 Tz (schematic ) Tj 2.817073 0 Td 50 Tz (drawing ) Tj 2.441463 0 Td 55.487805 Tz (of ) Tj 0.956098 0 Td 34.146341 Tz (a ) Tj 0.546341 0 Td 48.943089 Tz (wafer ) Tj 1.485366 0 Td 34.146341 Tz (- ) Tj 0.239024 0 Td 41.544715 Tz (level ) Tj 58.571429 0 0 58.571429 0 2122.859712 Tm 6.812195 0 Td 42.999097 Tz (invention ) Tj 2.390244 0 Td 34.146341 Tz (, ) Tj 0.717073 0 Td 44.579946 Tz (the ) Tj 1.297561 0 Td 42.276423 Tz (optical ) Tj 2.15122 0 Td 53.116531 Tz (waveguide ) Tj 3.414634 0 Td 39.837398 Tz (structure ) Tj 2.646341 0 Td 47.235772 Tz (being ) Tj 1.895122 0 Td 31.300813 Tz (20 ) Tj 0.870732 0 Td 49.085366 Tz (packaged ) Tj 2.885366 0 Td 40.650407 Tz (optical ) Tj 2.168293 0 Td 37.940379 Tz (gas ) Tj 1.178049 0 Td 45.528455 Tz (sensor ) Tj 1.997561 0 Td 47.109304 Tz (according ) Tj 2.987805 0 Td 34.146341 Tz (to ) Tj 1.007317 0 Td 31.300813 Tz (an ) Tj 0.939024 0 Td 50 Tz (example ) Tj 55.714286 0 0 55.714286 0 2079.512397 Tm 7.179487 0 Td 47.489316 Tz (arranged ) Tj 2.548718 0 Td 32.905983 Tz (to ) Tj 0.771795 0 Td 45.299145 Tz (receive ) Tj 2.1 0 Td 43.874644 Tz (the ) Tj 1.041026 0 Td 43.076923 Tz (light ) Tj 1.471795 0 Td 41.880342 Tz (from ) Tj 1.471795 0 Td 43.874644 Tz (the ) Tj 1.094872 0 Td 41.282051 Tz (light ) Tj 1.435897 0 Td 44.373219 Tz (source ) Tj 1.848718 0 Td 55.840456 Tz (and ) Tj 2.369231 0 Td 57.136752 Tz (embodiment ) Tj 3.535897 0 Td 55.34188 Tz (of ) Tj 0.861538 0 Td 43.874644 Tz (the ) Tj 1.005128 0 Td 47.863248 Tz (present ) Tj 2.225641 0 Td 43.209877 Tz (invention ) Tj 2.476923 0 Td 32.905983 Tz (; ) Tj 55.714286 0 0 55.714286 0 2038.927167 Tm 7.179487 0 Td 45.99359 Tz (transmit ) Tj 2.441026 0 Td 48.860399 Tz (the ) Tj 1.112821 0 Td 43.076923 Tz (light ) Tj 1.54359 0 Td 45.245726 Tz (received ) Tj 2.530769 0 Td 46.153846 Tz (through ) Tj 2.387179 0 Td 44.871795 Tz (the ) Tj 1.076923 0 Td 43.589744 Tz (optical ) Tj 2.046154 0 Td 55.34188 Tz (wave ) Tj 1.471795 0 Td 32.905983 Tz (- ) Tj 2.189744 0 Td 44.871795 Tz (FIG ) Tj 1.094872 0 Td 32.905983 Tz (. ) Tj 0.484615 0 Td 64.316239 Tz (9A ) Tj 1.238462 0 Td 43.589744 Tz (depicts ) Tj 2.261538 0 Td 32.905983 Tz (a ) Tj 0.574359 0 Td 47.115385 Tz (plot ) Tj 1.507692 0 Td 51.851852 Tz (comparing ) Tj 3.194872 0 Td 43.874644 Tz (the ) Tj 1.220513 0 Td 40.550807 Tz (effective ) Tj 2.710256 0 Td 42.478632 Tz (light ) Tj 55.714286 0 0 55.714286 0 1995.347826 Tm 7.215385 0 Td 48.461538 Tz (guide ) Tj 1.705128 0 Td 42.877493 Tz (structure ) Tj 2.297436 0 Td 32.905983 Tz (; ) Tj 0.394872 0 Td 54.843305 Tz (and ) Tj 55.714286 0 0 55.714286 0 1996.687732 Tm 23.333333 0 Td 44.871795 Tz (absorption ) Tj 3.033333 0 Td 37.891738 Tz (for ) Tj 0.915385 0 Td 48.860399 Tz (the ) Tj 1.005128 0 Td 49.608262 Tz (conventional ) Tj 3.679487 0 Td 41.132479 Tz (free ) Tj 1.166667 0 Td 50.854701 Tz (space ) Tj 1.633333 0 Td 51.228632 Tz (approach ) Tj 2.692308 0 Td 49.85755 Tz (and ) Tj 1.166667 0 Td 43.874644 Tz (the ) Tj 55.714286 0 0 55.714286 0 1956.310908 Tm 6.515385 0 Td 32.905983 Tz (a ) Tj 0.592308 0 Td 38.290598 Tz (light ) Tj 1.4 0 Td 44.871795 Tz (detector ) Tj 2.387179 0 Td 47.115385 Tz (arranged ) Tj 2.638462 0 Td 31.410256 Tz (to ) Tj 0.664103 0 Td 45.726496 Tz (receive ) Tj 2.279487 0 Td 39.88604 Tz (the ) Tj 1.058974 0 Td 41.880342 Tz (light ) Tj 1.382051 0 Td 44.599845 Tz (transmitted ) Tj 4.379487 0 Td 54.178538 Tz (waveguide ) Tj 3.141026 0 Td 48.985043 Tz (approach ) Tj 2.728205 0 Td 47.863248 Tz (according ) Tj 2.835897 0 Td 32.905983 Tz (to ) Tj 0.735897 0 Td 44.871795 Tz (an ) Tj 0.84359 0 Td 54.273504 Tz (example ) Tj 2.512821 0 Td 57.136752 Tz (embodiment ) Tj 45.714286 0 0 45.714286 0 1917.317774 Tm 8.815625 0 Td 49.21875 Tz (from ) Tj 1.75 0 Td 49.826389 Tz (the ) Tj 1.225 0 Td 54.166667 Tz (optical ) Tj 2.384375 0 Td 65.219907 Tz (waveguide ) Tj 3.80625 0 Td 51.446759 Tz (structure ) Tj 3.040625 0 Td 60.763889 Tz (and ) Tj 1.4 0 Td 56.145833 Tz (configured ) Tj 3.675 0 Td 43.75 Tz (to ) Tj 1.18125 0 Td 43.75 Tz (25 ) Tj 1.18125 0 Td 52.864583 Tz (of ) Tj 0.940625 0 Td 54.6875 Tz (the ) Tj 1.225 0 Td 56.770833 Tz (present ) Tj 2.690625 0 Td 54.282407 Tz (invention ) Tj 3.084375 0 Td 32.8125 Tz (; ) Tj 0.459375 0 Td 59.548611 Tz (and ) Tj 51.623377 0 0 51.623377 0 1876.272663 Tm 7.767799 0 Td 47.889588 Tz (detect ) Tj 1.859623 0 Td 32.285115 Tz (a ) Tj 0.503648 0 Td 49.503843 Tz (gas ) Tj 1.201006 0 Td 20.985325 Tz (in ) Tj 0.697358 0 Td 43.04682 Tz (the ) Tj 0.968553 0 Td 54.884696 Tz (gas ) Tj 1.142893 0 Td 49.350105 Tz (sensing ) Tj 2.266415 0 Td 46.582809 Tz (section ) Tj 2.150189 0 Td 52.947589 Tz (based ) Tj 1.898365 0 Td 53.27044 Tz (on ) Tj 0.871698 0 Td 49.503843 Tz (the ) Tj 1.046038 0 Td 45.844864 Tz (light ) Tj 3.486792 0 Td 49.503843 Tz (FIG ) Tj 1.201006 0 Td 32.285115 Tz (. ) Tj 0.426164 0 Td 53.27044 Tz (9B ) Tj 1.123522 0 Td 47.505241 Tz (depicts ) Tj 2.285786 0 Td 32.285115 Tz (a ) Tj 0.503648 0 Td 49.234801 Tz (plot ) Tj 1.510943 0 Td 55.24342 Tz (comparing ) Tj 3.234969 0 Td 52.1174 Tz (various ) Tj 2.36327 0 Td 53.27044 Tz (parameters ) Tj 3.389937 0 Td 62.955975 Tz (of ) Tj 50 0 0 50 0 1831 Tm 8 0 Td 50.833333 Tz (received ) Tj 2.54 0 Td 33.333333 Tz (. ) Tj 55.714286 0 0 55.714286 0 1830.62753 Tm 23.351282 0 Td 48.361823 Tz (conventional ) Tj 3.858974 0 Td 44.871795 Tz (gas ) Tj 1.184615 0 Td 47.863248 Tz (sensors ) Tj 2.387179 0 Td 49.85755 Tz (and ) Tj 1.292308 0 Td 48.860399 Tz (the ) Tj 1.274359 0 Td 43.076923 Tz (integrated ) Tj 3.033333 0 Td 43.589744 Tz (optical ) Tj 2.24359 0 Td 44.871795 Tz (gas ) Tj 48.571429 0 0 48.571429 0 1792.566337 Tm 7.514706 0 Td 36.029412 Tz (In ) Tj 0.905882 0 Td 53.431373 Tz (various ) Tj 2.614706 0 Td 62.076649 Tz (embodiments ) Tj 4.117647 0 Td 34.313725 Tz (, ) Tj 0.597059 0 Td 46.895425 Tz (the ) Tj 1.194118 0 Td 50.980392 Tz (optical ) Tj 2.552941 0 Td 52.614379 Tz (gas ) Tj 1.358824 0 Td 52.614379 Tz (sensor ) Tj 2.305882 0 Td 47.54902 Tz (further ) Tj 3.644118 0 Td 53.186275 Tz (sensor ) Tj 2.1 0 Td 56.808279 Tz (according ) Tj 3.294118 0 Td 41.176471 Tz (to ) Tj 0.844118 0 Td 49.754902 Tz (an ) Tj 0.988235 0 Td 60.784314 Tz (example ) Tj 2.902941 0 Td 63.823529 Tz (embodiment ) Tj 3.973529 0 Td 60.04902 Tz (of ) Tj 0.926471 0 Td 51.470588 Tz (the ) Tj 1.111765 0 Td 54.411765 Tz (present ) Tj 52.077922 0 0 52.077922 0 1751.199079 Tm 6.25985 0 Td 53.338875 Tz (comprises ) Tj 3.283541 0 Td 32.003325 Tz (a ) Tj 0.614464 0 Td 47.090607 Tz (tunable ) Tj 2.534663 0 Td 33.603491 Tz (filter ) Tj 1.593766 0 Td 48.645054 Tz (configured ) Tj 3.398753 0 Td 33.603491 Tz (to ) Tj 0.883292 0 Td 49.376559 Tz (receive ) Tj 2.381047 0 Td 49.071765 Tz (the ) Tj 1.228928 0 Td 45.444722 Tz (light ) Tj 2.765087 0 Td 48.004988 Tz (invention ) Tj 2.707481 0 Td 32.003325 Tz (. ) Tj 55.714286 0 0 55.714286 0 1706.300699 Tm 5.887179 0 Td 41.132479 Tz (from ) Tj 1.597436 0 Td 43.874644 Tz (the ) Tj 1.202564 0 Td 41.880342 Tz (light ) Tj 1.669231 0 Td 44.373219 Tz (source ) Tj 2.064103 0 Td 49.85755 Tz (and ) Tj 1.328205 0 Td 41.608392 Tz (selectively ) Tj 3.284615 0 Td 43.376068 Tz (transmit ) Tj 2.494872 0 Td 43.874644 Tz (the ) Tj 1.184615 0 Td 43.076923 Tz (light ) Tj 1.687179 0 Td 32.905983 Tz (30 ) Tj 51.428571 0 0 51.428571 0 1669.261239 Tm 6.3 0 Td 55.632716 Tz (having ) Tj 2.138889 0 Td 32.407407 Tz (a ) Tj 0.447222 0 Td 52.599715 Tz (predetermined ) Tj 4.355556 0 Td 54.12037 Tz (wavelength ) Tj 3.538889 0 Td 32.407407 Tz (to ) Tj 0.7 0 Td 49.691358 Tz (the ) Tj 0.991667 0 Td 48.148148 Tz (optical ) Tj 2.119444 0 Td 58.333333 Tz (waveguide ) Tj 52.857143 0 0 52.857143 0 1668 Tm 28.87027 0 Td 68.975225 Tz (DETAILED ) Tj 3.708108 0 Td 67.936118 Tz (DESCRIPTION ) Tj 52.857143 0 0 52.857143 0 1621 Tm 6.148649 0 Td 44.844845 Tz (structure ) Tj 2.459459 0 Td 34.684685 Tz (. ) Tj 52.268908 0 0 52.268908 0 1584.432826 Tm 6.983119 0 Td 31.886388 Tz (In ) Tj 0.93746 0 Td 49.196141 Tz (various ) Tj 2.410611 0 Td 56.235993 Tz (embodiments ) Tj 3.807235 0 Td 31.886388 Tz (, ) Tj 0.478296 0 Td 48.892462 Tz (the ) Tj 1.205305 0 Td 47.829582 Tz (optical ) Tj 2.29582 0 Td 48.892462 Tz (gas ) Tj 1.243569 0 Td 48.892462 Tz (sensor ) Tj 2.142765 0 Td 44.640943 Tz (further ) Tj 4.055949 0 Td 59.424632 Tz (Embodiments ) Tj 4.132476 0 Td 62.178457 Tz (of ) Tj 0.841801 0 Td 48.892462 Tz (the ) Tj 1.052251 0 Td 51.018221 Tz (present ) Tj 2.314952 0 Td 47.829582 Tz (invention ) Tj 2.812379 0 Td 53.75134 Tz (provide ) Tj 2.448875 0 Td 52.61254 Tz (an ) Tj 0.899196 0 Td 47.374062 Tz (optical ) Tj 58.896104 0 0 58.896104 0 1540.496374 Tm 5.518192 0 Td 47.164033 Tz (comprises ) Tj 2.733627 0 Td 33.958104 Tz (a ) Tj 0.509372 0 Td 38.674507 Tz (cap ) Tj 0.950827 0 Td 49.23925 Tz (wafer ) Tj 1.697905 0 Td 38.674507 Tz (for ) Tj 0.89989 0 Td 43.076483 Tz (enclosing ) Tj 2.495921 0 Td 33.958104 Tz (a ) Tj 0.492393 0 Td 42.44763 Tz (side ) Tj 1.154576 0 Td 43.862551 Tz (of ) Tj 0.662183 0 Td 44.334191 Tz (the ) Tj 0.933848 0 Td 42.44763 Tz (optical ) Tj 1.884675 0 Td 49.993875 Tz (gas ) Tj 2.105402 0 Td 50.622729 Tz (waveguide ) Tj 3.005292 0 Td 39.303361 Tz (structure ) Tj 2.411025 0 Td 49.993875 Tz (and ) Tj 1.222492 0 Td 31.128262 Tz (an ) Tj 0.798015 0 Td 39.617788 Tz (optical ) Tj 1.952591 0 Td 43.39091 Tz (gas ) Tj 1.06968 0 Td 45.277472 Tz (sensor ) Tj 1.816759 0 Td 40.325248 Tz (that ) Tj 1.137596 0 Td 41.740169 Tz (seek ) Tj 1.358324 0 Td 33.958104 Tz (to ) Tj 51.942857 0 0 51.942857 0 1499.29244 Tm 6.276128 0 Td 49.199364 Tz (sensor ) Tj 1.982948 0 Td 52.942794 Tz (on ) Tj 0.924092 0 Td 54.547121 Tz (which ) Tj 1.963696 0 Td 49.199364 Tz (the ) Tj 1.174367 0 Td 49.199364 Tz (gas ) Tj 1.09736 0 Td 51.338467 Tz (sensing ) Tj 2.367987 0 Td 45.837917 Tz (section ) Tj 2.233223 0 Td 32.086542 Tz (is ) Tj 0.635314 0 Td 50.135222 Tz (disposed ) Tj 2.753025 0 Td 33.690869 Tz (to ) Tj 0.750825 0 Td 43.316832 Tz (form ) Tj 1.886689 0 Td 32.086542 Tz (35 ) Tj 1.0011 0 Td 60.162266 Tz (overcome ) Tj 2.810781 0 Td 32.086542 Tz (, ) Tj 0.442794 0 Td 52.942794 Tz (or ) Tj 0.827833 0 Td 52.942794 Tz (at ) Tj 0.885589 0 Td 40.429043 Tz (least ) Tj 1.559406 0 Td 48.450678 Tz (ameliorate ) Tj 3.0033 0 Td 32.086542 Tz (, ) Tj 0.442794 0 Td 59.894878 Tz (one ) Tj 1.347635 0 Td 43.316832 Tz (or ) Tj 0.693069 0 Td 64.975248 Tz (more ) Tj 1.905941 0 Td 52.942794 Tz (of ) Tj 0.885589 0 Td 43.851607 Tz (the ) Tj 1.135864 0 Td 52.942794 Tz (defi ) Tj 56.428571 0 0 56.428571 0 1457.263158 Tm 5.777215 0 Td 32.489451 Tz (a ) Tj 0.620253 0 Td 52.742616 Tz (chamber ) Tj 2.516456 0 Td 39.662447 Tz (therein ) Tj 1.75443 0 Td 32.489451 Tz (, ) Tj 0.425316 0 Td 43.319269 Tz (the ) Tj 1.063291 0 Td 44.303797 Tz (cap ) Tj 1.116456 0 Td 50.801688 Tz (wafer ) Tj 1.896203 0 Td 47.552743 Tz (comprising ) Tj 3.118987 0 Td 54.149086 Tz (one ) Tj 1.187342 0 Td 51.687764 Tz (or ) Tj 0.779747 0 Td 59.07173 Tz (more ) Tj 2.782278 0 Td 43.565401 Tz (ciencies ) Tj 2.374684 0 Td 53.164557 Tz (of ) Tj 0.868354 0 Td 47.257384 Tz (conventional ) Tj 3.632911 0 Td 43.881857 Tz (optical ) Tj 2.020253 0 Td 53.82091 Tz (waveguide ) Tj 3.278481 0 Td 41.64557 Tz (structures ) Tj 2.711392 0 Td 55.133615 Tz (and ) Tj 55.714286 0 0 55.714286 0 1412.642857 Tm 5.797436 0 Td 45.868946 Tz (apertures ) Tj 2.817949 0 Td 19.444444 Tz (in ) Tj 0.771795 0 Td 32.307692 Tz (fluid ) Tj 1.328205 0 Td 52.695595 Tz (communication ) Tj 4.415385 0 Td 43.376068 Tz (with ) Tj 1.417949 0 Td 43.874644 Tz (the ) Tj 1.130769 0 Td 53.418803 Tz (chamber ) Tj 2.153846 0 Td 32.905983 Tz (. ) Tj 55.714286 0 0 55.714286 0 1417.454212 Tm 23.279487 0 Td 45.299145 Tz (optical ) Tj 2.135897 0 Td 45.868946 Tz (gas ) Tj 1.058974 0 Td 47.008547 Tz (sensors ) Tj 1.974359 0 Td 32.905983 Tz (. ) Tj 52.285714 0 0 52.285714 0 1376.769014 Tm 6.942623 0 Td 55.251973 Tz (According ) Tj 3.346995 0 Td 31.876138 Tz (to ) Tj 0.898907 0 Td 31.876138 Tz (a ) Tj 0.688525 0 Td 44.095325 Tz (fourth ) Tj 2.046448 0 Td 48.345477 Tz (aspect ) Tj 2.103825 0 Td 52.595628 Tz (of ) Tj 0.937158 0 Td 43.564056 Tz (the ) Tj 1.128415 0 Td 51.001821 Tz (present ) Tj 2.448087 0 Td 47.814208 Tz (invention ) Tj 2.696721 0 Td 31.876138 Tz (, ) Tj 2.295082 0 Td 73.315118 Tz (As ) Tj 1.090164 0 Td 49.939284 Tz (described ) Tj 3.002732 0 Td 33.469945 Tz (in ) Tj 0.84153 0 Td 48.876746 Tz (the ) Tj 1.10929 0 Td 55.783242 Tz (background ) Tj 3.423497 0 Td 31.876138 Tz (, ) Tj 0.420765 0 Td 46.539162 Tz (there ) Tj 1.702186 0 Td 43.564056 Tz (are ) Tj 1.147541 0 Td 49.180328 Tz (various ) Tj 2.371585 0 Td 54.189435 Tz (limi ) Tj 52.605042 0 0 52.605042 0 1336.834221 Tm 6.159105 0 Td 46.256656 Tz (there ) Tj 1.767891 0 Td 33.266773 Tz (is ) Tj 0.779393 0 Td 51.484292 Tz (provided ) Tj 2.927476 0 Td 31.682641 Tz (a ) Tj 0.45623 0 Td 60.197018 Tz (method ) Tj 2.642332 0 Td 52.276358 Tz (of ) Tj 0.91246 0 Td 45.507794 Tz (fabricating ) Tj 3.421725 0 Td 42.771565 Tz (an ) Tj 1.026518 0 Td 47.071353 Tz (optical ) Tj 2.243131 0 Td 47.523962 Tz (gas ) Tj 2.357188 0 Td 44.808307 Tz (tations ) Tj 2.243131 0 Td 45.93983 Tz (associated ) Tj 3.117572 0 Td 49.90016 Tz (with ) Tj 1.672843 0 Td 50.956248 Tz (conventional ) Tj 3.896965 0 Td 56.711928 Tz (waveguides ) Tj 3.64984 0 Td 52.276358 Tz (used ) Tj 1.691853 0 Td 44.355698 Tz (for ) Tj 55.714286 0 0 55.714286 0 1288.022624 Tm 5.815385 0 Td 46.866097 Tz (sensor ) Tj 1.687179 0 Td 32.905983 Tz (, ) Tj 0.484615 0 Td 43.874644 Tz (the ) Tj 0.861538 0 Td 57.336182 Tz (method ) Tj 2.351282 0 Td 49.957265 Tz (comprising ) Tj 3.033333 0 Td 32.905983 Tz (: ) Tj 52.261905 0 0 52.261905 0 1295.487028 Tm 23.841458 0 Td 43.052392 Tz (40 ) Tj 1.033257 0 Td 48.747153 Tz (sensing ) Tj 2.143052 0 Td 31.890661 Tz (/ ) Tj 0.133941 0 Td 47.835991 Tz (detecting ) Tj 2.851025 0 Td 49.962035 Tz (gas ) Tj 0.937585 0 Td 31.890661 Tz (. ) Tj 0.382688 0 Td 54.214123 Tz (For ) Tj 1.090661 0 Td 56.492027 Tz (example ) Tj 2.468337 0 Td 31.890661 Tz (, ) Tj 0.344419 0 Td 31.890661 Tz (in ) Tj 0.727107 0 Td 51.290812 Tz (conventional ) Tj 3.826879 0 Td 51.936219 Tz (Silicon ) Tj 58.571429 0 0 58.571429 0 1248.375407 Tm 6.180488 0 Td 45.528455 Tz (disposing ) Tj 2.680488 0 Td 34.146341 Tz (a ) Tj 0.597561 0 Td 39.837398 Tz (light ) Tj 1.34878 0 Td 45.528455 Tz (source ) Tj 1.860976 0 Td 52.642276 Tz (on ) Tj 0.956098 0 Td 34.146341 Tz (a ) Tj 0.478049 0 Td 41.418248 Tz (substrate ) Tj 2.253659 0 Td 34.146341 Tz (, ) Tj 0.443902 0 Td 37.940379 Tz (the ) Tj 1.058537 0 Td 39.837398 Tz (light ) Tj 1.382927 0 Td 44.579946 Tz (source ) Tj 2.868293 0 Td 54.065041 Tz (on ) Tj 0.682927 0 Td 34.146341 Tz (- ) Tj 0.32439 0 Td 41.102078 Tz (Insulator ) Tj 2.407317 0 Td 34.146341 Tz (\( ) Tj 0.170732 0 Td 66.395664 Tz (SOI ) Tj 1.092683 0 Td 34.146341 Tz (\) ) Tj 0.204878 0 Td 34.146341 Tz (- ) Tj 0.204878 0 Td 44.95935 Tz (based ) Tj 1.604878 0 Td 50.650407 Tz (waveguides ) Tj 3.021951 0 Td 34.146341 Tz (, ) Tj 0.426829 0 Td 34.146341 Tz (a ) Tj 0.392683 0 Td 52.357724 Tz (major ) Tj 1.809756 0 Td 39.268293 Tz (limitation ) Tj 2.646341 0 Td 31.300813 Tz (is ) Tj 58.571429 0 0 58.571429 0 1207.252336 Tm 6.863415 0 Td 43.536585 Tz (configured ) Tj 2.902439 0 Td 31.300813 Tz (to ) Tj 0.734146 0 Td 45.528455 Tz (emit ) Tj 1.382927 0 Td 39.837398 Tz (light ) Tj 1.160976 0 Td 34.146341 Tz (; ) Tj 58.571429 0 0 58.571429 0 1207.868132 Tm 22.178049 0 Td 38.699187 Tz (their ) Tj 1.587805 0 Td 44.579946 Tz (narrow ) Tj 2.168293 0 Td 51.535682 Tz (waveguide ) Tj 3.158537 0 Td 44.105691 Tz (transmission ) Tj 3.653659 0 Td 50.745257 Tz (window ) Tj 2.526829 0 Td 38.888889 Tz (for ) Tj 1.143902 0 Td 39.268293 Tz (light ) Tj 52.012987 0 0 52.012987 0 1168.58662 Tm 7.05593 0 Td 52.184769 Tz (forming ) Tj 2.557054 0 Td 32.043279 Tz (a ) Tj 0.576779 0 Td 54.473575 Tz (gas ) Tj 1.268914 0 Td 49.895963 Tz (sensing ) Tj 2.422472 0 Td 45.776113 Tz (section ) Tj 2.364794 0 Td 43.258427 Tz (on ) Tj 0.980524 0 Td 44.860591 Tz (the ) Tj 1.153558 0 Td 44.860591 Tz (substrate ) Tj 2.518602 0 Td 32.043279 Tz (, ) Tj 0.480649 0 Td 49.133028 Tz (the ) Tj 1.230462 0 Td 49.133028 Tz (gas ) Tj 2.326342 0 Td 51.560549 Tz (propagation ) Tj 3.499126 0 Td 32.043279 Tz (. ) Tj 0.615231 0 Td 64.086558 Tz (As ) Tj 1.268914 0 Td 32.043279 Tz (a ) Tj 0.749813 0 Td 43.792482 Tz (result ) Tj 1.518851 0 Td 32.043279 Tz (, ) Tj 0.672909 0 Td 51.269247 Tz (such ) Tj 1.807241 0 Td 51.536274 Tz (conventional ) Tj 4.191261 0 Td 65.154668 Tz (SOI ) Tj 1.09588 0 Td 32.043279 Tz (- ) Tj 0.230712 0 Td 52.550978 Tz (based ) Tj 59.126984 0 0 59.126984 0 1125.472165 Tm 6.815839 0 Td 43.892617 Tz (sensing ) Tj 1.978792 0 Td 40.671141 Tz (section ) Tj 2.046443 0 Td 45.66443 Tz (comprising ) Tj 2.993557 0 Td 31.006711 Tz (an ) Tj 0.761074 0 Td 39.463087 Tz (optical ) Tj 1.674362 0 Td 52.930649 Tz (waveguide ) Tj 3.027383 0 Td 37.208054 Tz (struc ) Tj 1.16698 0 Td 33.825503 Tz (- ) Tj 1.454497 0 Td 49.328859 Tz (waveguides ) Tj 3.314899 0 Td 38.52349 Tz (are ) Tj 1.116242 0 Td 44.161074 Tz (not ) Tj 1.031678 0 Td 40.520134 Tz (suitable ) Tj 2.33396 0 Td 31.006711 Tz (to ) Tj 0.710336 0 Td 52.147651 Tz (be ) Tj 0.947114 0 Td 49.200732 Tz (implemented ) Tj 3.602416 0 Td 31.006711 Tz (in ) Tj 0.744161 0 Td 33.825503 Tz (a ) Tj 0.608859 0 Td 49.798658 Tz (gas ) Tj 59.285714 0 0 59.285714 0 1083.944369 Tm 6.763855 0 Td 36.546185 Tz (ture ) Tj 1.146988 0 Td 45.917001 Tz (according ) Tj 2.73253 0 Td 30.923695 Tz (to ) Tj 0.691566 0 Td 44.042838 Tz (the ) Tj 1.079518 0 Td 30.361446 Tz (first ) Tj 1.096386 0 Td 44.97992 Tz (aspect ) Tj 1.804819 0 Td 42.168675 Tz (of ) Tj 0.725301 0 Td 38.420348 Tz (the ) Tj 0.893976 0 Td 46.987952 Tz (present ) Tj 2.175904 0 Td 39.35743 Tz (inven ) Tj 1.33253 0 Td 33.73494 Tz (- ) Tj 0.539759 0 Td 43.574297 Tz (45 ) Tj 0.995181 0 Td 42.168675 Tz (sensor ) Tj 1.838554 0 Td 42.730924 Tz (since ) Tj 1.636145 0 Td 43.105756 Tz (the ) Tj 1.096386 0 Td 41.401972 Tz (fingerprint ) Tj 2.93494 0 Td 43.293173 Tz (absorption ) Tj 3.00241 0 Td 47.280029 Tz (wavelengths ) Tj 3.508434 0 Td 42.168675 Tz (of ) Tj 0.843373 0 Td 33.73494 Tz (a ) Tj 52.180451 0 0 52.180451 0 1045.911157 Tm 7.646542 0 Td 41.522574 Tz (tion ) Tj 1.111527 0 Td 31.940442 Tz (, ) Tj 0.421614 0 Td 48.975344 Tz (the ) Tj 1.054035 0 Td 47.454371 Tz (optical ) Tj 2.069741 0 Td 57.492795 Tz (waveguide ) Tj 3.411239 0 Td 45.071512 Tz (structure ) Tj 2.663833 0 Td 50.465898 Tz (being ) Tj 1.820605 0 Td 49.507685 Tz (arranged ) Tj 2.702161 0 Td 31.940442 Tz (to ) Tj 1.993084 0 Td 44.716619 Tz (large ) Tj 1.763112 0 Td 42.891451 Tz (variety ) Tj 2.261383 0 Td 52.701729 Tz (of ) Tj 0.90072 0 Td 54.298751 Tz (gas ) Tj 1.149856 0 Td 55.363433 Tz (molecules ) Tj 3.372911 0 Td 42.587256 Tz (are ) Tj 1.188184 0 Td 50.572366 Tz (longer ) Tj 2.050576 0 Td 47.112152 Tz (than ) Tj 1.609798 0 Td 43.651937 Tz (the ) Tj 1.111527 0 Td 71.067483 Tz (wave ) Tj 57.067669 0 0 57.067669 0 999.64479 Tm 6.974177 0 Td 44.224857 Tz (receive ) Tj 2.085244 0 Td 42.834138 Tz (the ) Tj 1.016337 0 Td 42.055336 Tz (light ) Tj 1.436891 0 Td 40.887132 Tz (from ) Tj 1.454414 0 Td 42.834138 Tz (the ) Tj 0.946245 0 Td 41.471234 Tz (light ) Tj 1.419368 0 Td 46.2414 Tz (source ) Tj 1.822398 0 Td 48.675157 Tz (and ) Tj 1.209091 0 Td 42.347387 Tz (transmit ) Tj 2.313043 0 Td 42.834138 Tz (the ) Tj 2.12029 0 Td 44.642073 Tz (lengths ) Tj 2.067721 0 Td 50.232762 Tz (which ) Tj 1.769829 0 Td 45.754648 Tz (can ) Tj 1.121476 0 Td 54.029425 Tz (be ) Tj 0.823584 0 Td 47.052652 Tz (supported ) Tj 2.768643 0 Td 54.029425 Tz (by ) Tj 0.928722 0 Td 44.537769 Tz (such ) Tj 1.436891 0 Td 46.728151 Tz (conventional ) Tj 3.522134 0 Td 66.198214 Tz (SOI ) Tj 52.5 0 0 52.5 0 961.317949 Tm 7.6 0 Td 45.079365 Tz (light ) Tj 1.504762 0 Td 49.603175 Tz (received ) Tj 2.609524 0 Td 49.433107 Tz (through ) Tj 2.4 0 Td 48.677249 Tz (the ) Tj 1.066667 0 Td 47.165533 Tz (optical ) Tj 2.133333 0 Td 57.142857 Tz (waveguide ) Tj 3.295238 0 Td 45.149912 Tz (structure ) Tj 2.495238 0 Td 31.746032 Tz (; ) Tj 1.561905 0 Td 53.968254 Tz (based ) Tj 1.961905 0 Td 55.873016 Tz (waveguides ) Tj 3.409524 0 Td 31.746032 Tz (. ) Tj 0.495238 0 Td 58.585859 Tz (Embodiments ) Tj 4.152381 0 Td 61.904762 Tz (of ) Tj 0.971429 0 Td 48.677249 Tz (the ) Tj 1.12381 0 Td 50.793651 Tz (present ) Tj 2.361905 0 Td 47.266314 Tz (invention ) Tj 51.428571 0 0 51.428571 0 914 Tm 7.797222 0 Td 55.092593 Tz (and ) Tj 51.428571 0 0 51.428571 0 924.397892 Tm 25.258333 0 Td 52.083333 Tz (advantageously ) Tj 4.958333 0 Td 54.62963 Tz (provide ) Tj 2.761111 0 Td 43.75 Tz (an ) Tj 1.088889 0 Td 48.148148 Tz (optical ) Tj 2.508333 0 Td 57.613169 Tz (waveguide ) Tj 3.655556 0 Td 45.010288 Tz (structure ) Tj 55.928571 0 0 55.928571 0 877.772566 Tm 6.526181 0 Td 47.017643 Tz (disposing ) Tj 2.896552 0 Td 32.779906 Tz (a ) Tj 0.697318 0 Td 43.507876 Tz (light ) Tj 1.644955 0 Td 44.699872 Tz (detector ) Tj 2.503193 0 Td 44.699872 Tz (on ) Tj 0.983397 0 Td 50.659855 Tz (the ) Tj 1.251596 0 Td 42.713211 Tz (substrate ) Tj 2.413793 0 Td 32.779906 Tz (, ) Tj 0.554278 0 Td 43.706542 Tz (the ) Tj 1.180077 0 Td 43.507876 Tz (light ) Tj 1.680715 0 Td 31.289911 Tz (50 ) Tj 0.858238 0 Td 48.275862 Tz (based ) Tj 1.877395 0 Td 52.149851 Tz (on ) Tj 1.054917 0 Td 44.699872 Tz (an ) Tj 1.037037 0 Td 65.559813 Tz (SOI ) Tj 1.394636 0 Td 43.209877 Tz (platform ) Tj 2.646232 0 Td 51.156521 Tz (having ) Tj 2.288633 0 Td 32.779906 Tz (a ) Tj 0.697318 0 Td 39.88604 Tz (significantly ) Tj 3.52235 0 Td 51.255854 Tz (wider ) Tj 52.761905 0 0 52.761905 0 835.431023 Tm 7.600181 0 Td 46.987816 Tz (detector ) Tj 2.482852 0 Td 50.541516 Tz (arranged ) Tj 2.65343 0 Td 41.064982 Tz (to ) Tj 0.814982 0 Td 46.931408 Tz (receive ) Tj 2.274368 0 Td 43.170878 Tz (the ) Tj 1.099278 0 Td 44.223827 Tz (light ) Tj 1.497292 0 Td 47.095504 Tz (transmitted ) Tj 3.506318 0 Td 40.275271 Tz (from ) Tj 2.672383 0 Td 56.859206 Tz (waveguide ) Tj 3.563177 0 Td 48.962094 Tz (transmission ) Tj 4.07491 0 Td 58.438628 Tz (window ) Tj 2.274368 0 Td 31.588448 Tz (. ) Tj 0.777076 0 Td 46.59296 Tz (This ) Tj 1.66787 0 Td 48.786602 Tz (technical ) Tj 3.108303 0 Td 45.803249 Tz (effect ) Tj 58.571429 0 0 58.571429 0 793.311081 Tm 6.829268 0 Td 41.734417 Tz (the ) Tj 1.229268 0 Td 39.837398 Tz (optical ) Tj 2.065854 0 Td 51.535682 Tz (waveguide ) Tj 3.226829 0 Td 40.785908 Tz (structure ) Tj 2.663415 0 Td 47.425474 Tz (and ) Tj 1.297561 0 Td 43.536585 Tz (configured ) Tj 3.090244 0 Td 31.300813 Tz (to ) Tj 1.809756 0 Td 46.138211 Tz (advantageously ) Tj 3.995122 0 Td 58.617886 Tz (makes ) Tj 1.895122 0 Td 46.476965 Tz (the ) Tj 1.007317 0 Td 42.682927 Tz (optical ) Tj 1.843902 0 Td 51.851852 Tz (waveguide ) Tj 3.021951 0 Td 40.153568 Tz (structure ) Tj 2.42439 0 Td 45.528455 Tz (suit ) Tj 51.73913 0 0 51.73913 0 753.968493 Tm 7.75042 0 Td 47.782446 Tz (detect ) Tj 1.855462 0 Td 32.212885 Tz (a ) Tj 0.502521 0 Td 49.393091 Tz (gas ) Tj 1.198319 0 Td 20.938375 Tz (in ) Tj 0.657143 0 Td 44.024276 Tz (the ) Tj 1.005042 0 Td 54.761905 Tz (gas ) Tj 1.140336 0 Td 49.69988 Tz (sensing ) Tj 2.261345 0 Td 46.478591 Tz (section ) Tj 2.222689 0 Td 50.252101 Tz (based ) Tj 1.816807 0 Td 53.151261 Tz (on ) Tj 0.869748 0 Td 49.393091 Tz (the ) Tj 1.043697 0 Td 45.742297 Tz (light ) Tj 2.841176 0 Td 45.903361 Tz (able ) Tj 1.333613 0 Td 33.823529 Tz (to ) Tj 0.618487 0 Td 64.42577 Tz (be ) Tj 0.927731 0 Td 55.054749 Tz (implemented ) Tj 3.962185 0 Td 32.212885 Tz (in ) Tj 0.734454 0 Td 43.487395 Tz (an ) Tj 0.811765 0 Td 48.319328 Tz (optical ) Tj 2.184034 0 Td 49.393091 Tz (gas ) Tj 1.02437 0 Td 52.614379 Tz (sensor ) Tj 2.12605 0 Td 38.655462 Tz (for ) Tj 0.927731 0 Td 48.319328 Tz (detecting ) Tj 47.142857 0 0 47.142857 0 707 Tm 8.4 0 Td 56.123737 Tz (received ) Tj 2.8 0 Td 31.818182 Tz (. ) Tj 55.714286 0 0 55.714286 0 711.719497 Tm 23.315385 0 Td 32.905983 Tz (a ) Tj 0.412821 0 Td 53.846154 Tz (wide ) Tj 1.453846 0 Td 47.264957 Tz (range ) Tj 1.633333 0 Td 55.34188 Tz (of ) Tj 0.807692 0 Td 45.868946 Tz (gas ) Tj 1.023077 0 Td 43.076923 Tz (types ) Tj 1.382051 0 Td 32.905983 Tz (/ ) Tj 0.197436 0 Td 45.299145 Tz (species ) Tj 1.902564 0 Td 32.905983 Tz (. ) Tj 0.394872 0 Td 44.123932 Tz (This ) Tj 1.274359 0 Td 49.85755 Tz (and ) Tj 1.112821 0 Td 44.871795 Tz (other ) Tj 1.54359 0 Td 49.65812 Tz (advantages ) Tj 45.714286 0 0 45.714286 0 673.421302 Tm 27.234375 0 Td 52.864583 Tz (55 ) Tj 1.18125 0 Td 53.958333 Tz (associated ) Tj 3.478125 0 Td 53.776042 Tz (with ) Tj 1.75 0 Td 54.6875 Tz (the ) Tj 1.09375 0 Td 54.6875 Tz (optical ) Tj 2.40625 0 Td 65.625 Tz (waveguide ) Tj 3.828125 0 Td 51.446759 Tz (structure ) Tj 3.0625 0 Td 59.143519 Tz (according ) Tj 3.36875 0 Td 43.75 Tz (to ) Tj 52.857143 0 0 52.857143 0 631 Tm 7.87027 0 Td 64.954955 Tz (BRIEF ) Tj 2.213514 0 Td 67.649468 Tz (DESCRIPTION ) Tj 4.824324 0 Td 75.675676 Tz (OF ) Tj 1.248649 0 Td 71.471471 Tz (THE ) Tj 1.475676 0 Td 78.828829 Tz (DRAWINGS ) Tj 52.5 0 0 52.5 0 628.130982 Tm 24.780952 0 Td 57.720058 Tz (embodiments ) Tj 4.152381 0 Td 52.380952 Tz (of ) Tj 0.87619 0 Td 48.677249 Tz (the ) Tj 1.180952 0 Td 50.793651 Tz (present ) Tj 2.438095 0 Td 47.619048 Tz (invention ) Tj 2.914286 0 Td 49.206349 Tz (will ) Tj 1.409524 0 Td 67.195767 Tz (become ) Tj 2.552381 0 Td 62.698413 Tz (more ) Tj 51.428571 0 0 51.428571 0 590.709677 Tm 25.238889 0 Td 52.256944 Tz (apparent ) Tj 2.741667 0 Td 46.990741 Tz (from ) Tj 1.613889 0 Td 50.771605 Tz (the ) Tj 1.166667 0 Td 48.021886 Tz (description ) Tj 3.422222 0 Td 48.070988 Tz (herein ) Tj 1.886111 0 Td 32.407407 Tz (. ) Tj 55.714286 0 0 55.714286 0 546.479197 Tm 6.515385 0 Td 55.749806 Tz (Embodiments ) Tj 4.05641 0 Td 55.34188 Tz (of ) Tj 0.987179 0 Td 43.874644 Tz (the ) Tj 1.220513 0 Td 46.153846 Tz (present ) Tj 2.369231 0 Td 43.874644 Tz (invention ) Tj 2.835897 0 Td 41.880342 Tz (will ) Tj 1.435897 0 Td 52.350427 Tz (be ) Tj 0.951282 0 Td 42.378917 Tz (better ) Tj 3.64359 0 Td 38.888889 Tz (FIG ) Tj 1.041026 0 Td 32.905983 Tz (. ) Tj 0.484615 0 Td 32.905983 Tz (1 ) Tj 0.502564 0 Td 44.444444 Tz (depicts ) Tj 2.153846 0 Td 32.905983 Tz (a ) Tj 0.574359 0 Td 47.530864 Tz (schematic ) Tj 2.907692 0 Td 50 Tz (drawing ) Tj 2.369231 0 Td 52.350427 Tz (of ) Tj 0.861538 0 Td 41.880342 Tz (an ) Tj 0.825641 0 Td 44.017094 Tz (optical ) Tj 2.046154 0 Td 67.307692 Tz (wave ) Tj 51.428571 0 0 51.428571 0 505.145578 Tm 6.3 0 Td 52.824074 Tz (understood ) Tj 3.519444 0 Td 50.771605 Tz (and ) Tj 1.302778 0 Td 44.907407 Tz (readily ) Tj 2.177778 0 Td 54.282407 Tz (apparent ) Tj 2.8 0 Td 32.407407 Tz (to ) Tj 0.777778 0 Td 55.092593 Tz (one ) Tj 1.322222 0 Td 53.472222 Tz (of ) Tj 0.777778 0 Td 49.421296 Tz (ordinary ) Tj 2.741667 0 Td 42.777778 Tz (skill ) Tj 1.516667 0 Td 32.407407 Tz (in ) Tj 2.041667 0 Td 51.851852 Tz (guide ) Tj 2.022222 0 Td 45.37037 Tz (structure ) Tj 2.975 0 Td 49.691358 Tz (100 ) Tj 1.302778 0 Td 52.211934 Tz (according ) Tj 3.286111 0 Td 32.407407 Tz (to ) Tj 0.952778 0 Td 42.12963 Tz (an ) Tj 1.05 0 Td 61.25 Tz (embodiment ) Tj 3.927778 0 Td 63.194444 Tz (of ) Tj 1.069444 0 Td 49.691358 Tz (the ) Tj 45.714286 0 0 45.714286 0 464.751755 Tm 7.13125 0 Td 54.6875 Tz (the ) Tj 1.290625 0 Td 48.611111 Tz (art ) Tj 1.290625 0 Td 49.21875 Tz (from ) Tj 1.903125 0 Td 49.826389 Tz (the ) Tj 1.290625 0 Td 57.523148 Tz (following ) Tj 3.390625 0 Td 53.645833 Tz (written ) Tj 2.7125 0 Td 54.024621 Tz (description ) Tj 3.653125 0 Td 32.8125 Tz (, ) Tj 0.459375 0 Td 72.916667 Tz (by ) Tj 1.246875 0 Td 71.701389 Tz (way ) Tj 1.640625 0 Td 63.802083 Tz (of ) Tj 1.159375 0 Td 52.864583 Tz (60 ) Tj 1.26875 0 Td 57.291667 Tz (present ) Tj 2.559375 0 Td 55.497685 Tz (invention ) Tj 3.084375 0 Td 32.8125 Tz (. ) Tj 0.48125 0 Td 34.635417 Tz (In ) Tj 0.853125 0 Td 55.902778 Tz (the ) Tj 1.225 0 Td 68.90625 Tz (embodiment ) Tj 4.090625 0 Td 32.8125 Tz (, ) Tj 0.328125 0 Td 63.802083 Tz (as ) Tj 0.9625 0 Td 70.729167 Tz (shown ) Tj 2.14375 0 Td 32.8125 Tz (, ) Tj 0.48125 0 Td 54.6875 Tz (the ) Tj 1.225 0 Td 53.125 Tz (optical ) Tj 51.571429 0 0 51.571429 0 424.338721 Tm 6.32133 0 Td 57.710065 Tz (example ) Tj 2.772853 0 Td 51.708218 Tz (only ) Tj 1.279778 0 Td 32.317636 Tz (, ) Tj 0.562327 0 Td 54.939982 Tz (and ) Tj 1.415512 0 Td 32.317636 Tz (in ) Tj 0.950139 0 Td 49.651641 Tz (conjunction ) Tj 3.684211 0 Td 50.092336 Tz (with ) Tj 1.725762 0 Td 49.553709 Tz (the ) Tj 1.299169 0 Td 52.920129 Tz (drawings ) Tj 2.598338 0 Td 32.317636 Tz (, ) Tj 0.562327 0 Td 32.317636 Tz (in ) Tj 1.99723 0 Td 58.171745 Tz (waveguide ) Tj 3.567867 0 Td 45.96286 Tz (structure ) Tj 3.063712 0 Td 49.553709 Tz (100 ) Tj 1.396122 0 Td 53.862727 Tz (comprises ) Tj 3.373961 0 Td 32.317636 Tz (a ) Tj 0.67867 0 Td 47.3992 Tz (substrate ) Tj 3.083102 0 Td 53.862727 Tz (102 ) Tj 0.98892 0 Td 32.317636 Tz (, ) Tj 0.601108 0 Td 43.628809 Tz (an ) Tj 47.142857 0 0 47.142857 0 379 Tm 6.787879 0 Td 63.636364 Tz (which ) Tj 2.1 0 Td 31.818182 Tz (: ) Tj 51.428571 0 0 51.428571 0 382.822335 Tm 25.277778 0 Td 47.638889 Tz (insulating ) Tj 3.072222 0 Td 46.666667 Tz (layer ) Tj 1.711111 0 Td 56.17284 Tz (104 ) Tj 1.244444 0 Td 50.636574 Tz (disposed ) Tj 2.722222 0 Td 53.472222 Tz (on ) Tj 0.972222 0 Td 49.691358 Tz (the ) Tj 1.088889 0 Td 47.170782 Tz (substrate ) Tj 2.838889 0 Td 55.092593 Tz (102 ) Tj 1.205556 0 Td 60.648148 Tz (whereby ) Tj 55.714286 0 0 55.714286 0 339.882188 Tm 6.533333 0 Td 43.874644 Tz (FIG ) Tj 1.005128 0 Td 32.905983 Tz (. ) Tj 0.484615 0 Td 32.905983 Tz (1 ) Tj 0.538462 0 Td 43.589744 Tz (depicts ) Tj 2.135897 0 Td 32.905983 Tz (a ) Tj 0.538462 0 Td 47.863248 Tz (schematic ) Tj 2.94359 0 Td 51.282051 Tz (drawing ) Tj 2.441026 0 Td 44.871795 Tz (of ) Tj 0.771795 0 Td 44.871795 Tz (an ) Tj 0.825641 0 Td 44.871795 Tz (optical ) Tj 2.046154 0 Td 60.576923 Tz (wave ) Tj 1.489744 0 Td 32.905983 Tz (- ) Tj 1.561538 0 Td 43.874644 Tz (the ) Tj 1.130769 0 Td 42.179487 Tz (insulating ) Tj 2.853846 0 Td 43.675214 Tz (layer ) Tj 1.651282 0 Td 49.85755 Tz (104 ) Tj 1.25641 0 Td 50.189934 Tz (comprises ) Tj 2.94359 0 Td 41.880342 Tz (an ) Tj 0.897436 0 Td 33.903134 Tz (air ) Tj 0.915385 0 Td 42.628205 Tz (slot ) Tj 1.328205 0 Td 43.874644 Tz (106 ) Tj 1.184615 0 Td 51.851852 Tz (formed ) Tj 55.782313 0 0 55.782313 0 296.905527 Tm 5.897927 0 Td 47.207317 Tz (guide ) Tj 1.613415 0 Td 43.48916 Tz (structure ) Tj 2.563537 0 Td 50.128726 Tz (according ) Tj 2.922073 0 Td 32.865854 Tz (to ) Tj 0.735 0 Td 44.817073 Tz (an ) Tj 0.950122 0 Td 54.676829 Tz (embodiment ) Tj 3.549512 0 Td 41.829268 Tz (of ) Tj 0.717073 0 Td 44.817073 Tz (the ) Tj 0.985976 0 Td 48.231707 Tz (present ) Tj 3.352317 0 Td 40.121951 Tz (therein ) Tj 1.882317 0 Td 32.865854 Tz (, ) Tj 0.34061 0 Td 32.865854 Tz (a ) Tj 0.501951 0 Td 34.658537 Tz (first ) Tj 1.039756 0 Td 49.672256 Tz (material ) Tj 2.509756 0 Td 44.817073 Tz (layer ) Tj 1.577561 0 Td 44.817073 Tz (108 ) Tj 1.165244 0 Td 49.132791 Tz (suspended ) Tj 2.868293 0 Td 47.804878 Tz (over ) Tj 1.380366 0 Td 45.813008 Tz (the ) Tj 1.021829 0 Td 32.865854 Tz (air ) Tj 0.860488 0 Td 41.829268 Tz (slot ) Tj 48.571429 0 0 48.571429 0 254 Tm 6.732353 0 Td 51.089325 Tz (invention ) Tj 2.861765 0 Td 34.313725 Tz (; ) Tj 50.714286 0 0 50.714286 0 255.506207 Tm 24.549296 0 Td 42.723005 Tz (65 ) Tj 1.183099 0 Td 49.295775 Tz (106 ) Tj 1.340845 0 Td 61.971831 Tz (whereby ) Tj 3.095775 0 Td 49.295775 Tz (the ) Tj 1.380282 0 Td 36.807512 Tz (first ) Tj 1.459155 0 Td 53.814554 Tz (material ) Tj 2.957746 0 Td 48.638498 Tz (layer ) Tj 1.952113 0 Td 54.773083 Tz (108 ) Tj 1.538028 0 Td 46.606914 Tz (constitutes ) Tj 3.608451 0 Td 32.86385 Tz (a ) Tj 51.642857 0 0 51.642857 0 215.321622 Tm 7.067773 0 Td 43.030582 Tz (FIG ) Tj 1.161826 0 Td 32.272937 Tz (. ) Tj 0.542185 0 Td 32.272937 Tz (2 ) Tj 0.658368 0 Td 47.487321 Tz (depicts ) Tj 2.42047 0 Td 32.272937 Tz (a ) Tj 0.600277 0 Td 51.636699 Tz (schematic ) Tj 3.175657 0 Td 55.325035 Tz (drawing ) Tj 2.73029 0 Td 53.250346 Tz (of ) Tj 0.948824 0 Td 32.272937 Tz (a ) Tj 0.677732 0 Td 51.90564 Tz (conventional ) Tj 5.150761 0 Td 58.091286 Tz (waveguide ) Tj 3.427386 0 Td 47.602582 Tz (core ) Tj 1.355463 0 Td 53.250346 Tz (of ) Tj 0.813278 0 Td 49.48517 Tz (the ) Tj 1.084371 0 Td 48.409405 Tz (optical ) Tj 2.091286 0 Td 59.884227 Tz (waveguide ) Tj 3.44675 0 Td 45.899288 Tz (structure ) Tj 2.769018 0 Td 49.48517 Tz (100 ) Tj 1.006916 0 Td 32.272937 Tz (, ) Tj 0.387275 0 Td 54.863993 Tz (and ) Tj 60.204082 0 0 60.204082 0 171.235174 Tm 5.348475 0 Td 65.517891 Tz (SOI ) Tj 1.079661 0 Td 33.220339 Tz (- ) Tj 0.149492 0 Td 45.40113 Tz (based ) Tj 1.677627 0 Td 41.525424 Tz (buried ) Tj 1.793898 0 Td 32.666667 Tz (strip ) Tj 1.278983 0 Td 50.138104 Tz (waveguide ) Tj 2.724068 0 Td 33.220339 Tz (; ) Tj 55.714286 0 0 55.714286 0 170.832461 Tm 23.351282 0 Td 32.905983 Tz (a ) Tj 0.538462 0 Td 49.85755 Tz (second ) Tj 2.1 0 Td 47.489316 Tz (material ) Tj 2.441026 0 Td 44.871795 Tz (layer ) Tj 1.758974 0 Td 44.871795 Tz (110 ) Tj 1.184615 0 Td 47.863248 Tz (disposed ) Tj 2.548718 0 Td 53.098291 Tz (over ) Tj 1.54359 0 Td 43.874644 Tz (the ) Tj 1.023077 0 Td 54.178538 Tz (waveguide ) Tj ET Q endstream endobj 120 0 obj << /Length 1 >> stream q endstream endobj 121 0 obj << /Length 59611 >> stream Q q 0.24 0 0 0.24 0 0 cm BT /F1 1 Tf 3 Tr 67.142857 0 0 67.142857 0 3024 Tm 15.891489 0 Td 84.397163 Tz (US ) Tj 1.355319 0 Td 43.439716 Tz (10 ) Tj 0.640426 0 Td 34.751773 Tz (, ) Tj 0.148936 0 Td 60.401891 Tz (215 ) Tj 1.191489 0 Td 34.751773 Tz (, ) Tj 0.134043 0 Td 60.401891 Tz (692 ) Tj 1.370213 0 Td 74.468085 Tz (B2 ) Tj 60.068027 0 0 60.068027 0 2916.078965 Tm 5.42718 0 Td 44.394111 Tz (core ) Tj 1.231937 0 Td 48.09362 Tz (108 ) Tj 0.948924 0 Td 51.528879 Tz (whereby ) Tj 2.363986 0 Td 43.469234 Tz (the ) Tj 0.849037 0 Td 49.943375 Tz (waveguide ) Tj 2.86342 0 Td 44.394111 Tz (core ) Tj 1.315176 0 Td 43.469234 Tz (108 ) Tj 0.98222 0 Td 30.520951 Tz (is ) Tj 0.615968 0 Td 45.318988 Tz (suspended ) Tj 2.696942 0 Td 42.313137 Tz (over ) Tj 2.363986 0 Td 43.997735 Tz (geously ) Tj 2.247452 0 Td 38.844847 Tz (isolated ) Tj 2.280747 0 Td 38.844847 Tz (from ) Tj 1.514949 0 Td 45.318988 Tz (the ) Tj 1.181993 0 Td 51.330691 Tz (SiO2 ) Tj 1.564892 0 Td 38.289921 Tz (layer ) Tj 1.181993 0 Td 33.295583 Tz (. ) Tj 0.499434 0 Td 33.295583 Tz (In ) Tj 0.849037 0 Td 39.677237 Tz (particular ) Tj 2.363986 0 Td 33.295583 Tz (, ) Tj 0.44949 0 Td 45.318988 Tz (the ) Tj 51.428571 0 0 51.428571 0 2876.47749 Tm 6.241667 0 Td 50.771605 Tz (the ) Tj 1.205556 0 Td 38.888889 Tz (air ) Tj 0.991667 0 Td 45.37037 Tz (slot ) Tj 1.283333 0 Td 49.691358 Tz (106 ) Tj 1.263889 0 Td 53.472222 Tz (by ) Tj 0.972222 0 Td 49.691358 Tz (the ) Tj 1.147222 0 Td 52.391975 Tz (second ) Tj 2.158333 0 Td 52.662037 Tz (material ) Tj 2.722222 0 Td 46.018519 Tz (layer ) Tj 1.711111 0 Td 49.691358 Tz (110 ) Tj 0.933333 0 Td 32.407407 Tz (. ) Tj 0.505556 0 Td 32.407407 Tz (It ) Tj 0.622222 0 Td 43.75 Tz (will ) Tj 1.244444 0 Td 64.814815 Tz (be ) Tj 2.216667 0 Td 58.333333 Tz (waveguide ) Tj 3.422222 0 Td 48.611111 Tz (core ) Tj 1.555556 0 Td 49.691358 Tz (108 ) Tj 1.225 0 Td 32.407407 Tz (is ) Tj 0.661111 0 Td 53.652263 Tz (suspended ) Tj 3.169444 0 Td 55.902778 Tz (over ) Tj 1.555556 0 Td 49.691358 Tz (the ) Tj 1.147222 0 Td 39.969136 Tz (air ) Tj 0.933333 0 Td 45.37037 Tz (slot ) Tj 1.4 0 Td 43.209877 Tz (106 ) Tj 1.069444 0 Td 63.194444 Tz (by ) Tj 1.05 0 Td 32.407407 Tz (a ) Tj 57.402597 0 0 57.402597 0 2832.720294 Tm 5.644344 0 Td 44.871795 Tz (appreciated ) Tj 3.118326 0 Td 53.714178 Tz (by ) Tj 0.905882 0 Td 34.841629 Tz (a ) Tj 0.383258 0 Td 45.487682 Tz (person ) Tj 1.881448 0 Td 39.819005 Tz (skilled ) Tj 1.985973 0 Td 21.776018 Tz (in ) Tj 0.627149 0 Td 39.680744 Tz (the ) Tj 0.888462 0 Td 39.680744 Tz (art ) Tj 0.871041 0 Td 42.100302 Tz (that ) Tj 1.167195 0 Td 39.680744 Tz (the ) Tj 0.975566 0 Td 34.841629 Tz (air ) Tj 0.766516 0 Td 39.9227 Tz (slot ) Tj 1.149774 0 Td 45.487682 Tz (106 ) Tj 2.14276 0 Td 48.270173 Tz (material ) Tj 2.508597 0 Td 41.809955 Tz (layer ) Tj 1.654977 0 Td 44.519859 Tz (110 ) Tj 1.167195 0 Td 44.640837 Tz (disposed ) Tj 2.473756 0 Td 47.181373 Tz (over ) Tj 1.428507 0 Td 47.423328 Tz (the ) Tj 1.06267 0 Td 52.585051 Tz (waveguide ) Tj 3.118326 0 Td 42.826169 Tz (core ) Tj 1.49819 0 Td 43.552036 Tz (108 ) Tj 55.714286 0 0 55.714286 0 2790.342857 Tm 5.74359 0 Td 66.809117 Tz (may ) Tj 1.453846 0 Td 55.34188 Tz (be ) Tj 0.879487 0 Td 42.628205 Tz (referred ) Tj 2.387179 0 Td 41.880342 Tz (to ) Tj 0.807692 0 Td 53.846154 Tz (by ) Tj 0.933333 0 Td 44.871795 Tz (other ) Tj 1.597436 0 Td 58.034188 Tz (names ) Tj 1.723077 0 Td 32.905983 Tz (, ) Tj 0.466667 0 Td 45.619658 Tz (such ) Tj 1.471795 0 Td 41.880342 Tz (as ) Tj 0.879487 0 Td 32.905983 Tz (air ) Tj 0.825641 0 Td 43.874644 Tz (cavity ) Tj 1.669231 0 Td 32.905983 Tz (, ) Tj 0.394872 0 Td 39.88604 Tz (air ) Tj 2.1 0 Td 49.85755 Tz (and ) Tj 1.238462 0 Td 43.874644 Tz (the ) Tj 1.112821 0 Td 43.376068 Tz (insulating ) Tj 2.907692 0 Td 44.273504 Tz (layer ) Tj 1.741026 0 Td 49.85755 Tz (104 ) Tj 1.25641 0 Td 44.871795 Tz (as ) Tj 0.879487 0 Td 56.239316 Tz (shown ) Tj 2.046154 0 Td 22.435897 Tz (in ) Tj 0.753846 0 Td 44.871795 Tz (FIG ) Tj 1.112821 0 Td 32.905983 Tz (. ) Tj 0.484615 0 Td 32.905983 Tz (1 ) Tj 0.287179 0 Td 32.905983 Tz (. ) Tj 0.394872 0 Td 73.290598 Tz (As ) Tj 1.076923 0 Td 44.871795 Tz (the ) Tj 45.714286 0 0 45.714286 0 2751.609911 Tm 7.153125 0 Td 59.375 Tz (channel ) Tj 2.471875 0 Td 32.8125 Tz (, ) Tj 0.525 0 Td 52.864583 Tz (or ) Tj 0.91875 0 Td 55.902778 Tz (the ) Tj 1.35625 0 Td 50.130208 Tz (like ) Tj 1.203125 0 Td 32.8125 Tz (. ) Tj 0.546875 0 Td 34.635417 Tz (In ) Tj 0.940625 0 Td 55.208333 Tz (various ) Tj 2.66875 0 Td 64.583333 Tz (example ) Tj 3.0625 0 Td 64.962121 Tz (embodiments ) Tj 4.396875 0 Td 32.8125 Tz (, ) Tj 0.546875 0 Td 49.826389 Tz (the ) Tj 1.61875 0 Td 32.8125 Tz (5 ) Tj 0.875 0 Td 59.700521 Tz (material ) Tj 2.953125 0 Td 52.5 Tz (layer ) Tj 1.815625 0 Td 61.979167 Tz (110 ) Tj 1.334375 0 Td 43.75 Tz (is ) Tj 0.7875 0 Td 52.135417 Tz (interfaced ) Tj 3.303125 0 Td 54.6875 Tz (with ) Tj 1.75 0 Td 49.826389 Tz (the ) Tj 1.05 0 Td 67.24537 Tz (waveguide ) Tj 3.80625 0 Td 55.598958 Tz (core ) Tj 1.596875 0 Td 60.763889 Tz (108 ) Tj 1.159375 0 Td 32.8125 Tz (, ) Tj 45.714286 0 0 45.714286 0 2711.407713 Tm 7.065625 0 Td 52.662037 Tz (substrate ) Tj 3.28125 0 Td 60.763889 Tz (102 ) Tj 1.44375 0 Td 32.8125 Tz (is ) Tj 0.7875 0 Td 32.8125 Tz (a ) Tj 0.590625 0 Td 48.958333 Tz (silicon ) Tj 2.45 0 Td 51.446759 Tz (substrate ) Tj 2.821875 0 Td 32.8125 Tz (, ) Tj 0.503125 0 Td 49.826389 Tz (the ) Tj 1.246875 0 Td 52.5 Tz (insulating ) Tj 3.4125 0 Td 55.416667 Tz (layer ) Tj 2.0125 0 Td 54.6875 Tz (104 ) Tj 2.75625 0 Td 54.6875 Tz (the ) Tj 1.246875 0 Td 60.15625 Tz (material ) Tj 3.084375 0 Td 65.625 Tz (of ) Tj 1.071875 0 Td 49.826389 Tz (the ) Tj 1.159375 0 Td 57.877604 Tz (material ) Tj 3.19375 0 Td 52.5 Tz (layer ) Tj 1.96875 0 Td 55.902778 Tz (110 ) Tj 1.44375 0 Td 32.8125 Tz (is ) Tj 0.896875 0 Td 52.408854 Tz (selected ) Tj 2.93125 0 Td 41.927083 Tz (so ) Tj 1.028125 0 Td 54.6875 Tz (as ) Tj 1.00625 0 Td 43.75 Tz (to ) Tj 45.714286 0 0 45.714286 0 2668.744452 Tm 7.13125 0 Td 32.8125 Tz (is ) Tj 0.765625 0 Td 32.8125 Tz (a ) Tj 0.6125 0 Td 47.916667 Tz (silicon ) Tj 2.428125 0 Td 57.291667 Tz (dioxide ) Tj 2.690625 0 Td 32.8125 Tz (\( ) Tj 0.175 0 Td 54.6875 Tz (S10 ) Tj 1.378125 0 Td 32.8125 Tz (, ) Tj 0.35 0 Td 32.8125 Tz (\) ) Tj 0.48125 0 Td 51.770833 Tz (layer ) Tj 1.61875 0 Td 32.8125 Tz (, ) Tj 0.371875 0 Td 65.625 Tz (and ) Tj 1.421875 0 Td 54.6875 Tz (the ) Tj 1.290625 0 Td 43.020833 Tz (first ) Tj 1.35625 0 Td 59.700521 Tz (material ) Tj 3.01875 0 Td 55.416667 Tz (layer ) Tj 3.346875 0 Td 59.375 Tz (provide ) Tj 2.84375 0 Td 54.6875 Tz (the ) Tj 1.26875 0 Td 66.840278 Tz (waveguide ) Tj 4.003125 0 Td 54.6875 Tz (core ) Tj 1.815625 0 Td 60.763889 Tz (108 ) Tj 1.465625 0 Td 58.333333 Tz (with ) Tj 1.946875 0 Td 32.8125 Tz (a ) Tj 0.74375 0 Td 47.699653 Tz (sufficiently ) Tj 3.871875 0 Td 70.182292 Tz (wide ) Tj 45.714286 0 0 45.714286 0 2627.64486 Tm 7.196875 0 Td 55.902778 Tz (108 ) Tj 1.53125 0 Td 30.989583 Tz (is ) Tj 0.83125 0 Td 32.8125 Tz (a ) Tj 0.678125 0 Td 48.4375 Tz (silicon ) Tj 2.45 0 Td 52.5 Tz (layer ) Tj 1.640625 0 Td 32.8125 Tz (. ) Tj 0.56875 0 Td 55.092593 Tz (Therefore ) Tj 3.128125 0 Td 32.8125 Tz (, ) Tj 0.56875 0 Td 32.8125 Tz (in ) Tj 0.9625 0 Td 54.6875 Tz (such ) Tj 1.79375 0 Td 55.729167 Tz (various ) Tj 2.75625 0 Td 68.055556 Tz (embodi ) Tj 2.384375 0 Td 32.8125 Tz (- ) Tj 1.8375 0 Td 65.219907 Tz (waveguide ) Tj 3.915625 0 Td 54.991319 Tz (transmission ) Tj 4.265625 0 Td 69.878472 Tz (window ) Tj 2.66875 0 Td 32.8125 Tz (. ) Tj 0.525 0 Td 55.902778 Tz (For ) Tj 1.378125 0 Td 61.979167 Tz (example ) Tj 3.01875 0 Td 59.548611 Tz (and ) Tj 1.378125 0 Td 63.020833 Tz (without ) Tj 51.552795 0 0 51.552795 0 2585.748974 Tm 6.207229 0 Td 60.13253 Tz (ments ) Tj 1.823373 0 Td 32.329317 Tz (, ) Tj 0.48494 0 Td 44.1834 Tz (the ) Tj 1.163855 0 Td 48.032129 Tz (optical ) Tj 2.133735 0 Td 58.551986 Tz (waveguide ) Tj 3.452771 0 Td 45.620259 Tz (structure ) Tj 2.832048 0 Td 54.959839 Tz (100 ) Tj 1.319036 0 Td 32.329317 Tz (is ) Tj 0.717711 0 Td 53.666667 Tz (based ) Tj 1.978554 0 Td 42.028112 Tz (on ) Tj 0.96988 0 Td 43.644578 Tz (an ) Tj 2.114337 0 Td 44.937751 Tz (limitation ) Tj 2.793253 0 Td 32.329317 Tz (, ) Tj 0.56253 0 Td 33.945783 Tz (if ) Tj 0.775904 0 Td 44.1834 Tz (the ) Tj 1.144458 0 Td 54.421017 Tz (second ) Tj 2.269518 0 Td 53.343373 Tz (material ) Tj 2.793253 0 Td 46.554217 Tz (layer ) Tj 1.862169 0 Td 49.57162 Tz (110 ) Tj 1.280241 0 Td 33.945783 Tz (is ) Tj 0.698313 0 Td 68.699799 Tz (made ) Tj 1.959157 0 Td 63.042169 Tz (of ) Tj 1.04747 0 Td 32.329317 Tz (a ) Tj 51.428571 0 0 51.428571 0 2544.069149 Tm 6.280556 0 Td 71.296296 Tz (SOI ) Tj 1.458333 0 Td 43.75 Tz (platform ) Tj 2.469444 0 Td 32.407407 Tz (. ) Tj 0.427778 0 Td 32.407407 Tz (In ) Tj 0.777778 0 Td 50.925926 Tz (various ) Tj 2.333333 0 Td 55.092593 Tz (example ) Tj 2.644444 0 Td 58.922559 Tz (embodiments ) Tj 3.888889 0 Td 32.407407 Tz (, ) Tj 0.427778 0 Td 44.290123 Tz (the ) Tj 1.088889 0 Td 55.092593 Tz (second ) Tj 2.488889 0 Td 32.407407 Tz (10 ) Tj 0.991667 0 Td 44.074074 Tz (dielectric ) Tj 2.916667 0 Td 52.662037 Tz (material ) Tj 2.877778 0 Td 53.472222 Tz (Si ) Tj 0.894444 0 Td 32.407407 Tz (N ) Tj 0.486111 0 Td 32.407407 Tz (, ) Tj 0.583333 0 Td 55.092593 Tz (and ) Tj 1.458333 0 Td 44.290123 Tz (the ) Tj 1.147222 0 Td 58.333333 Tz (waveguide ) Tj 3.597222 0 Td 46.990741 Tz (core ) Tj 1.652778 0 Td 50.771605 Tz (108 ) Tj 1.380556 0 Td 32.407407 Tz (is ) Tj 51.474654 0 0 51.474654 0 2501.58227 Tm 6.216652 0 Td 52.614891 Tz (material ) Tj 2.642077 0 Td 49.21516 Tz (layer ) Tj 1.709579 0 Td 50.726151 Tz (110 ) Tj 1.24333 0 Td 32.378395 Tz (is ) Tj 0.699373 0 Td 32.378395 Tz (a ) Tj 0.446822 0 Td 43.387049 Tz (dielectric ) Tj 2.914056 0 Td 39.663533 Tz (thin ) Tj 1.321038 0 Td 33.997314 Tz (film ) Tj 1.321038 0 Td 45.97732 Tz (layer ) Tj 1.554163 0 Td 67.994628 Tz (made ) Tj 1.806714 0 Td 63.137869 Tz (of ) Tj 0.699373 0 Td 32.378395 Tz (, ) Tj 0.427395 0 Td 44.250472 Tz (for ) Tj 2.117547 0 Td 67.185169 Tz (made ) Tj 2.09812 0 Td 53.424351 Tz (of ) Tj 0.971352 0 Td 53.424351 Tz (Si ) Tj 1.029633 0 Td 32.378395 Tz (\( ) Tj 0.213697 0 Td 32.378395 Tz (i ) Tj 0.213697 0 Td 32.378395 Tz (. ) Tj 0.213697 0 Td 32.378395 Tz (e ) Tj 0.271979 0 Td 32.378395 Tz (. ) Tj 0.135989 0 Td 32.378395 Tz (, ) Tj 0.660519 0 Td 45.329752 Tz (SizN ) Tj 1.37932 0 Td 32.378395 Tz (_ ) Tj 0.271979 0 Td 32.378395 Tz (/ ) Tj 0.135989 0 Td 63.137869 Tz (Si ) Tj 0.699373 0 Td 32.378395 Tz (\) ) Tj 0.213697 0 Td 32.378395 Tz (, ) Tj 0.563384 0 Td 49.646872 Tz (the ) Tj 1.223903 0 Td 59.72015 Tz (waveguide ) Tj 3.594002 0 Td 48.567592 Tz (transmission ) Tj 51.428571 0 0 51.428571 0 2460.850136 Tm 6.3 0 Td 58.333333 Tz (example ) Tj 2.975 0 Td 49.691358 Tz (and ) Tj 1.380556 0 Td 55.092593 Tz (without ) Tj 2.780556 0 Td 44.722222 Tz (limitation ) Tj 2.8 0 Td 32.407407 Tz (, ) Tj 0.680556 0 Td 53.472222 Tz (aluminum ) Tj 3.325 0 Td 55.092593 Tz (oxide ) Tj 2.080556 0 Td 32.407407 Tz (\( ) Tj 0.272222 0 Td 32.407407 Tz (e ) Tj 0.291667 0 Td 32.407407 Tz (. ) Tj 0.272222 0 Td 32.407407 Tz (g ) Tj 0.272222 0 Td 32.407407 Tz (. ) Tj 0.155556 0 Td 32.407407 Tz (, ) Tj 1.633333 0 Td 58.333333 Tz (window ) Tj 2.586111 0 Td 55.092593 Tz (has ) Tj 1.166667 0 Td 52.662037 Tz (been ) Tj 1.652778 0 Td 54.444444 Tz (found ) Tj 1.925 0 Td 32.407407 Tz (to ) Tj 0.719444 0 Td 45.37037 Tz (significantly ) Tj 3.888889 0 Td 55.555556 Tz (improve ) Tj 2.566667 0 Td 43.75 Tz (to ) Tj 0.855556 0 Td 32.407407 Tz (a ) Tj 0.486111 0 Td 55.092593 Tz (range ) Tj 51.510204 0 0 51.510204 0 2417.724894 Tm 6.348257 0 Td 61.476492 Tz (A1203 ) Tj 1.824881 0 Td 32.356049 Tz (\) ) Tj 0.21355 0 Td 32.356049 Tz (, ) Tj 0.388273 0 Td 44.836239 Tz (silicon ) Tj 2.213154 0 Td 45.760697 Tz (nitride ) Tj 2.213154 0 Td 32.356049 Tz (\( ) Tj 0.21355 0 Td 32.356049 Tz (e ) Tj 0.271791 0 Td 32.356049 Tz (. ) Tj 0.291204 0 Td 32.356049 Tz (g ) Tj 0.271791 0 Td 32.356049 Tz (. ) Tj 0.21355 0 Td 32.356049 Tz (, ) Tj 0.446513 0 Td 55.652404 Tz (SizN4 ) Tj 1.650158 0 Td 32.356049 Tz (\) ) Tj 0.21355 0 Td 32.356049 Tz (, ) Tj 0.504754 0 Td 54.645771 Tz (germanium ) Tj 3.26149 0 Td 32.356049 Tz (, ) Tj 0.465927 0 Td 43.680666 Tz (or ) Tj 0.873613 0 Td 42.062863 Tz (silicon ) Tj 3.377971 0 Td 53.38748 Tz (of ) Tj 0.834786 0 Td 56.299525 Tz (about ) Tj 2.077258 0 Td 32.356049 Tz (1 ) Tj 0.194136 0 Td 32.356049 Tz (. ) Tj 0.291204 0 Td 32.356049 Tz (2 ) Tj 0.582409 0 Td 53.38748 Tz (um ) Tj 1.203645 0 Td 43.680666 Tz (to ) Tj 0.912441 0 Td 55.652404 Tz (about ) Tj 1.902536 0 Td 32.356049 Tz (6 ) Tj 0.349445 0 Td 32.356049 Tz (. ) Tj 0.21355 0 Td 32.356049 Tz (6 ) Tj 0.582409 0 Td 53.38748 Tz (um ) Tj 1.300713 0 Td 32.356049 Tz (\( ) Tj 0.174723 0 Td 53.06392 Tz (based ) Tj 1.960777 0 Td 53.38748 Tz (on ) Tj 1.087163 0 Td 32.356049 Tz (a ) Tj 0.504754 0 Td 58.600399 Tz (waveguide ) Tj 61.428571 0 0 61.428571 0 2374.85 Tm 5.290698 0 Td 32.55814 Tz (\( ) Tj 0.211628 0 Td 32.55814 Tz (e ) Tj 0.276744 0 Td 32.55814 Tz (. ) Tj 0.211628 0 Td 32.55814 Tz (g ) Tj 0.211628 0 Td 32.55814 Tz (. ) Tj 0.146512 0 Td 32.55814 Tz (, ) Tj 0.439535 0 Td 37.209302 Tz (crystal ) Tj 1.774419 0 Td 43.410853 Tz (or ) Tj 0.7 0 Td 49.741602 Tz (amorphous ) Tj 2.946512 0 Td 42.054264 Tz (Si ) Tj 0.504651 0 Td 32.55814 Tz (\) ) Tj 0.211628 0 Td 32.55814 Tz (. ) Tj 54.285714 0 0 54.285714 0 2375.913043 Tm 23.910526 0 Td 49.122807 Tz (propagation ) Tj 3.628947 0 Td 41.447368 Tz (loss ) Tj 1.215789 0 Td 47.076023 Tz (within ) Tj 2.118421 0 Td 33.77193 Tz (2 ) Tj 0.589474 0 Td 55.263158 Tz (dBcm ) Tj 2.210526 0 Td 33.77193 Tz (\) ) Tj 0.221053 0 Td 33.77193 Tz (. ) Tj 0.405263 0 Td 64.473684 Tz (As ) Tj 0.939474 0 Td 54.922027 Tz (mentioned ) Tj 3.205263 0 Td 54.239766 Tz (herein ) Tj 51.428571 0 0 51.428571 0 2335.537275 Tm 7 0 Td 55.092593 Tz (With ) Tj 1.691667 0 Td 44.290123 Tz (the ) Tj 1.030556 0 Td 55.092593 Tz (above ) Tj 1.866667 0 Td 46.018519 Tz (structural ) Tj 2.916667 0 Td 48.611111 Tz (configuration ) Tj 3.908333 0 Td 32.407407 Tz (, ) Tj 0.311111 0 Td 50.771605 Tz (the ) Tj 1.108333 0 Td 48.148148 Tz (optical ) Tj 2.119444 0 Td 64.00463 Tz (wave ) Tj 1.633333 0 Td 32.407407 Tz (- ) Tj 0.719444 0 Td 32.407407 Tz (15 ) Tj 0.894444 0 Td 50.771605 Tz (before ) Tj 1.886111 0 Td 32.407407 Tz (, ) Tj 0.602778 0 Td 47.962963 Tz (other ) Tj 1.827778 0 Td 45.775463 Tz (suitable ) Tj 2.644444 0 Td 44.074074 Tz (dielectric ) Tj 2.916667 0 Td 51.851852 Tz (materials ) Tj 3.227778 0 Td 44.290123 Tz (for ) Tj 1.186111 0 Td 44.290123 Tz (the ) Tj 1.225 0 Td 55.092593 Tz (second ) Tj 45.714286 0 0 45.714286 0 2297.887438 Tm 7.196875 0 Td 56.875 Tz (guide ) Tj 1.990625 0 Td 49.016204 Tz (structure ) Tj 3.040625 0 Td 54.6875 Tz (100 ) Tj 1.334375 0 Td 58.59375 Tz (advantageously ) Tj 5.315625 0 Td 55.497685 Tz (possesses ) Tj 3.325 0 Td 32.8125 Tz (a ) Tj 0.546875 0 Td 49.639423 Tz (significantly ) Tj 5.5125 0 Td 59.700521 Tz (material ) Tj 3.040625 0 Td 51.041667 Tz (layer ) Tj 1.859375 0 Td 54.6875 Tz (110 ) Tj 1.1375 0 Td 82.638889 Tz (may ) Tj 1.684375 0 Td 63.802083 Tz (be ) Tj 1.05 0 Td 51.953125 Tz (selected ) Tj 2.603125 0 Td 32.8125 Tz (, ) Tj 0.415625 0 Td 55.902778 Tz (including ) Tj 3.15 0 Td 65.625 Tz (but ) Tj 1.246875 0 Td 61.979167 Tz (not ) Tj 1.26875 0 Td 52.604167 Tz (limited ) Tj 58.571429 0 0 58.571429 0 2249.936538 Tm 5.446341 0 Td 52.926829 Tz (wider ) Tj 1.843902 0 Td 51.535682 Tz (waveguide ) Tj 3.090244 0 Td 44.342818 Tz (transmission ) Tj 3.482927 0 Td 51.693767 Tz (window ) Tj 2.407317 0 Td 34.146341 Tz (\( ) Tj 0.204878 0 Td 34.146341 Tz (i ) Tj 0.204878 0 Td 34.146341 Tz (. ) Tj 0.136585 0 Td 34.146341 Tz (e ) Tj 0.290244 0 Td 34.146341 Tz (. ) Tj 0.136585 0 Td 34.146341 Tz (, ) Tj 0.478049 0 Td 39.399625 Tz (significantly ) Tj 4.439024 0 Td 31.300813 Tz (to ) Tj 0.802439 0 Td 49.085366 Tz (aluminum ) Tj 2.868293 0 Td 46.097561 Tz (oxide ) Tj 1.707317 0 Td 34.146341 Tz (\( ) Tj 0.204878 0 Td 34.146341 Tz (e ) Tj 0.204878 0 Td 34.146341 Tz (. ) Tj 0.290244 0 Td 34.146341 Tz (g ) Tj 0.204878 0 Td 34.146341 Tz (. ) Tj 0.204878 0 Td 34.146341 Tz (, ) Tj 0.341463 0 Td 65.447154 Tz (A1 ) Tj 0.717073 0 Td 34.146341 Tz (, ) Tj 0.187805 0 Td 65.447154 Tz (03 ) Tj 0.785366 0 Td 34.146341 Tz (\) ) Tj 0.153659 0 Td 34.146341 Tz (, ) Tj 0.460976 0 Td 48.690154 Tz (germanium ) Tj 2.885366 0 Td 34.146341 Tz (, ) Tj 0.409756 0 Td 50.271003 Tz (and ) Tj 1.195122 0 Td 39.02439 Tz (silicon ) Tj 45.714286 0 0 45.714286 0 2215.11402 Tm 7.04375 0 Td 64.166667 Tz (wider ) Tj 2.165625 0 Td 60.520833 Tz (wavelength ) Tj 4.1125 0 Td 57.118056 Tz (transparency ) Tj 4.221875 0 Td 32.8125 Tz (\) ) Tj 0.6125 0 Td 49.826389 Tz (for ) Tj 1.26875 0 Td 51.041667 Tz (light ) Tj 1.771875 0 Td 56.344697 Tz (propagation ) Tj 3.89375 0 Td 32.8125 Tz (. ) Tj 0.546875 0 Td 61.979167 Tz (For ) Tj 2.821875 0 Td 32.8125 Tz (\( ) Tj 0.284375 0 Td 32.8125 Tz (e ) Tj 0.284375 0 Td 32.8125 Tz (. ) Tj 0.2625 0 Td 32.8125 Tz (g ) Tj 0.35 0 Td 32.8125 Tz (. ) Tj 0.21875 0 Td 32.8125 Tz (, ) Tj 0.546875 0 Td 51.041667 Tz (crystal ) Tj 2.428125 0 Td 52.864583 Tz (or ) Tj 0.896875 0 Td 66.435185 Tz (amorphous ) Tj 4.003125 0 Td 52.864583 Tz (Si ) Tj 0.65625 0 Td 32.8125 Tz (\) ) Tj 0.21875 0 Td 32.8125 Tz (. ) Tj 51.614907 0 0 51.614907 0 2169.032374 Tm 6.296631 0 Td 57.661452 Tz (example ) Tj 2.479904 0 Td 32.290413 Tz (, ) Tj 0.484356 0 Td 33.904934 Tz (in ) Tj 0.755596 0 Td 49.511967 Tz (the ) Tj 1.259326 0 Td 46.821099 Tz (case ) Tj 1.433694 0 Td 59.41436 Tz (where ) Tj 2.05367 0 Td 49.511967 Tz (the ) Tj 1.239952 0 Td 54.355529 Tz (second ) Tj 2.18929 0 Td 51.261031 Tz (material ) Tj 2.69302 0 Td 50.373045 Tz (layer ) Tj 1.898676 0 Td 49.511967 Tz (110 ) Tj 3.158002 0 Td 32.290413 Tz (In ) Tj 0.929964 0 Td 52.125953 Tz (various ) Tj 2.538026 0 Td 57.829194 Tz (embodiments ) Tj 3.855475 0 Td 32.290413 Tz (, ) Tj 0.600602 0 Td 41.977537 Tz (as ) Tj 0.988087 0 Td 41.683988 Tz (illustrated ) Tj 3.293622 0 Td 32.290413 Tz (in ) Tj 0.929964 0 Td 43.053884 Tz (FIG ) Tj 1.084958 0 Td 32.290413 Tz (. ) Tj 0.697473 0 Td 32.290413 Tz (1 ) Tj 0.271239 0 Td 32.290413 Tz (, ) Tj 0.561853 0 Td 45.206578 Tz (the ) Tj 61.428571 0 0 61.428571 0 2125.61734 Tm 5.290698 0 Td 42.325581 Tz (supporting ) Tj 2.604651 0 Td 32.55814 Tz (/ ) Tj 0.195349 0 Td 43.023256 Tz (holding ) Tj 2.213953 0 Td 39.793282 Tz (the ) Tj 1.106977 0 Td 39.341085 Tz (core ) Tj 1.302326 0 Td 50.344531 Tz (waveguide ) Tj 3.076744 0 Td 44.315245 Tz (108 ) Tj 1.22093 0 Td 32.55814 Tz (is ) Tj 0.651163 0 Td 56.976744 Tz (made ) Tj 1.774419 0 Td 42.054264 Tz (of ) Tj 0.862791 0 Td 32.55814 Tz (20 ) Tj 0.911628 0 Td 42.50646 Tz (second ) Tj 1.75814 0 Td 45.106589 Tz (material ) Tj 2.295349 0 Td 42.325581 Tz (layer ) Tj 1.513953 0 Td 44.315245 Tz (110 ) Tj 1.139535 0 Td 44.315245 Tz (comprises ) Tj 2.686047 0 Td 31.20155 Tz (at ) Tj 0.618605 0 Td 39.612403 Tz (least ) Tj 1.367442 0 Td 44.315245 Tz (one ) Tj 1.074419 0 Td 49.612403 Tz (through ) Tj 51.564626 0 0 51.564626 0 2085.281291 Tm 6.30277 0 Td 58.17942 Tz (SizN4 ) Tj 1.648417 0 Td 32.3219 Tz (, ) Tj 0.601187 0 Td 43.095866 Tz (the ) Tj 1.04723 0 Td 59.615948 Tz (waveguide ) Tj 3.529551 0 Td 48.752199 Tz (transmission ) Tj 3.859235 0 Td 60.334213 Tz (window ) Tj 2.71504 0 Td 53.331135 Tz (of ) Tj 0.892084 0 Td 49.560246 Tz (the ) Tj 1.144195 0 Td 48.021108 Tz (optical ) Tj 3.374406 0 Td 53.331135 Tz (hole ) Tj 1.551451 0 Td 32.3219 Tz (\( ) Tj 0.252111 0 Td 48.021108 Tz (release ) Tj 2.210818 0 Td 52.523087 Tz (hole ) Tj 1.29934 0 Td 32.3219 Tz (\) ) Tj 0.543008 0 Td 49.560246 Tz (112 ) Tj 1.202375 0 Td 33.937995 Tz (in ) Tj 0.892084 0 Td 34.907652 Tz (fluid ) Tj 1.473879 0 Td 56.19038 Tz (communication ) Tj 4.69314 0 Td 45.25066 Tz (with ) Tj 1.532058 0 Td 45.25066 Tz (the ) Tj 1.105409 0 Td 38.78628 Tz (air ) Tj 55.714286 0 0 55.714286 0 2041.550562 Tm 5.761538 0 Td 55.840456 Tz (waveguide ) Tj 3.338462 0 Td 42.877493 Tz (structure ) Tj 2.692308 0 Td 49.85755 Tz (100 ) Tj 1.220513 0 Td 49.85755 Tz (has ) Tj 1.25641 0 Td 50.106838 Tz (been ) Tj 1.687179 0 Td 47.264957 Tz (found ) Tj 1.830769 0 Td 31.410256 Tz (to ) Tj 0.897436 0 Td 40.959895 Tz (significantly ) Tj 4.702564 0 Td 36.645299 Tz (slot ) Tj 1.292308 0 Td 44.871795 Tz (106 ) Tj 0.915385 0 Td 32.905983 Tz (. ) Tj 0.610256 0 Td 49.85755 Tz (The ) Tj 1.328205 0 Td 46.153846 Tz (through ) Tj 1.992308 0 Td 32.905983 Tz (- ) Tj 0.215385 0 Td 50.106838 Tz (hole ) Tj 1.579487 0 Td 49.85755 Tz (112 ) Tj 1.220513 0 Td 32.905983 Tz (is ) Tj 0.84359 0 Td 50.854701 Tz (formed ) Tj 2.24359 0 Td 32.905983 Tz (in ) Tj 0.84359 0 Td 43.874644 Tz (the ) Tj 1.076923 0 Td 50.356125 Tz (second ) Tj 58.571429 0 0 58.571429 0 1999.40784 Tm 5.514634 0 Td 50.406504 Tz (improve ) Tj 2.407317 0 Td 31.300813 Tz (to ) Tj 0.682927 0 Td 34.146341 Tz (a ) Tj 0.478049 0 Td 47.804878 Tz (range ) Tj 1.673171 0 Td 42.682927 Tz (of ) Tj 0.7 0 Td 51.219512 Tz (about ) Tj 1.690244 0 Td 34.146341 Tz (1 ) Tj 0.239024 0 Td 34.146341 Tz (. ) Tj 0.256098 0 Td 34.146341 Tz (2 ) Tj 0.478049 0 Td 42.682927 Tz (um ) Tj 1.007317 0 Td 31.300813 Tz (to ) Tj 0.682927 0 Td 34.146341 Tz (6 ) Tj 0.341463 0 Td 34.146341 Tz (. ) Tj 0.153659 0 Td 34.146341 Tz (6 ) Tj 0.529268 0 Td 44.105691 Tz (um ) Tj 1.07561 0 Td 34.146341 Tz (\( ) Tj 0.187805 0 Td 45.528455 Tz (based ) Tj 1.690244 0 Td 42.682927 Tz (on ) Tj 0.853659 0 Td 34.146341 Tz (a ) Tj 1.434146 0 Td 45.528455 Tz (material ) Tj 2.339024 0 Td 42.682927 Tz (layer ) Tj 1.45122 0 Td 49.322493 Tz (100 ) Tj 0.990244 0 Td 42.682927 Tz (to ) Tj 0.7 0 Td 44.579946 Tz (enable ) Tj 1.758537 0 Td 44.579946 Tz (the ) Tj 1.007317 0 Td 49.593496 Tz (removal ) Tj 2.202439 0 Td 42.682927 Tz (of ) Tj 0.665854 0 Td 44.579946 Tz (the ) Tj 0.836585 0 Td 43.089431 Tz (portion ) Tj 2.065854 0 Td 42.682927 Tz (of ) Tj 0.682927 0 Td 39.837398 Tz (the ) Tj 51.632653 0 0 51.632653 0 1963.79089 Tm 6.236364 0 Td 59.537403 Tz (waveguide ) Tj 3.389328 0 Td 51.646904 Tz (propagation ) Tj 3.757312 0 Td 43.577075 Tz (loss ) Tj 1.278261 0 Td 48.956961 Tz (within ) Tj 2.207905 0 Td 32.279315 Tz (2 ) Tj 0.581028 0 Td 58.102767 Tz (dBcm ) Tj 1.704348 0 Td 32.279315 Tz (- ) Tj 0.56166 0 Td 32.279315 Tz (\) ) Tj 0.290514 0 Td 32.279315 Tz (. ) Tj 0.406719 0 Td 33.893281 Tz (In ) Tj 0.813439 0 Td 48.418972 Tz (contrast ) Tj 2.266008 0 Td 32.279315 Tz (, ) Tj 1.665613 0 Td 47.450593 Tz (insulating ) Tj 3.273123 0 Td 46.482213 Tz (layer ) Tj 1.936759 0 Td 49.494949 Tz (104 ) Tj 1.375099 0 Td 51.646904 Tz (under ) Tj 2.052964 0 Td 45.191041 Tz (the ) Tj 1.220158 0 Td 58.102767 Tz (waveguide ) Tj 3.583004 0 Td 50.839921 Tz (core ) Tj 1.743083 0 Td 49.494949 Tz (108 ) Tj 1.394466 0 Td 44.115064 Tz (for ) Tj 51.428571 0 0 51.428571 0 1921.662112 Tm 6.3 0 Td 53.472222 Tz (as ) Tj 0.7 0 Td 57.253086 Tz (mentioned ) Tj 3.344444 0 Td 34.027778 Tz (in ) Tj 0.7 0 Td 49.691358 Tz (the ) Tj 0.972222 0 Td 58.333333 Tz (background ) Tj 3.5 0 Td 32.407407 Tz (, ) Tj 0.369444 0 Td 43.209877 Tz (the ) Tj 1.011111 0 Td 50.462963 Tz (longest ) Tj 2.216667 0 Td 54.12037 Tz (wavelength ) Tj 3.519444 0 Td 47.800926 Tz (that ) Tj 1.613889 0 Td 43.75 Tz (25 ) Tj 1.088889 0 Td 52.777778 Tz (forming ) Tj 2.45 0 Td 47.530864 Tz (the ) Tj 1.069444 0 Td 39.969136 Tz (air ) Tj 0.952778 0 Td 40.509259 Tz (slot ) Tj 1.225 0 Td 49.691358 Tz (106 ) Tj 1.225 0 Td 42.592593 Tz (therein ) Tj 2.119444 0 Td 55.092593 Tz (and ) Tj 1.244444 0 Td 32.407407 Tz (to ) Tj 0.758333 0 Td 44.907407 Tz (release ) Tj 2.177778 0 Td 44.290123 Tz (the ) Tj 0.933333 0 Td 60.133745 Tz (waveguide ) Tj 55.714286 0 0 55.714286 0 1876.393786 Tm 5.851282 0 Td 44.871795 Tz (can ) Tj 1.184615 0 Td 41.880342 Tz (be ) Tj 0.84359 0 Td 48.860399 Tz (supported ) Tj 2.817949 0 Td 62.820513 Tz (by ) Tj 1.041026 0 Td 32.905983 Tz (a ) Tj 0.538462 0 Td 48.361823 Tz (conventional ) Tj 3.679487 0 Td 66.809117 Tz (SOI ) Tj 1.112821 0 Td 32.905983 Tz (- ) Tj 0.14359 0 Td 49.65812 Tz (based ) Tj 1.812821 0 Td 53.846154 Tz (waveguide ) Tj 4.325641 0 Td 44.123932 Tz (core ) Tj 1.328205 0 Td 49.85755 Tz (108 ) Tj 1.148718 0 Td 44.123932 Tz (such ) Tj 1.25641 0 Td 44.123932 Tz (that ) Tj 1.202564 0 Td 43.874644 Tz (the ) Tj 0.861538 0 Td 55.508072 Tz (waveguide ) Tj 3.158974 0 Td 45.619658 Tz (core ) Tj 1.328205 0 Td 49.85755 Tz (108 ) Tj 1.076923 0 Td 32.905983 Tz (is ) Tj 0.592308 0 Td 50.189934 Tz (suspended ) Tj 2.907692 0 Td 48.611111 Tz (over ) Tj 55.714286 0 0 55.714286 0 1834.004444 Tm 5.707692 0 Td 64.814815 Tz (may ) Tj 1.489744 0 Td 52.350427 Tz (be ) Tj 0.915385 0 Td 49.65812 Tz (about ) Tj 1.848718 0 Td 32.905983 Tz (3 ) Tj 0.197436 0 Td 32.905983 Tz (. ) Tj 0.287179 0 Td 32.905983 Tz (7 ) Tj 0.538462 0 Td 44.871795 Tz (um ) Tj 1.148718 0 Td 32.905983 Tz (\( ) Tj 0.14359 0 Td 49.65812 Tz (based ) Tj 1.866667 0 Td 41.880342 Tz (on ) Tj 0.915385 0 Td 32.905983 Tz (a ) Tj 0.502564 0 Td 53.846154 Tz (waveguide ) Tj 3.194872 0 Td 46.231546 Tz (propagation ) Tj 4.630769 0 Td 43.874644 Tz (the ) Tj 1.184615 0 Td 32.905983 Tz (air ) Tj 1.148718 0 Td 38.141026 Tz (slot ) Tj 1.364103 0 Td 43.874644 Tz (106 ) Tj 1.292308 0 Td 55.34188 Tz (by ) Tj 1.130769 0 Td 43.874644 Tz (the ) Tj 1.220513 0 Td 50.356125 Tz (second ) Tj 2.135897 0 Td 49.732906 Tz (material ) Tj 2.728205 0 Td 43.675214 Tz (layer ) Tj 1.776923 0 Td 45.868946 Tz (110 ) Tj 0.933333 0 Td 32.905983 Tz (. ) Tj 0.574359 0 Td 32.905983 Tz (In ) Tj 55.714286 0 0 55.714286 0 1795.494824 Tm 5.887179 0 Td 39.636752 Tz (loss ) Tj 1.166667 0 Td 44.373219 Tz (within ) Tj 1.95641 0 Td 32.905983 Tz (2 ) Tj 0.430769 0 Td 56.089744 Tz (dBcm ) Tj 1.669231 0 Td 32.905983 Tz (- ) Tj 0.287179 0 Td 32.905983 Tz (1 ) Tj 0.197436 0 Td 32.905983 Tz (\) ) Tj 0.215385 0 Td 32.905983 Tz (, ) Tj 0.394872 0 Td 49.85755 Tz (and ) Tj 1.166667 0 Td 31.410256 Tz (in ) Tj 0.646154 0 Td 42.777778 Tz (particular ) Tj 2.548718 0 Td 32.905983 Tz (, ) Tj 0.448718 0 Td 41.132479 Tz (from ) Tj 1.435897 0 Td 50.854701 Tz (about ) Tj 1.687179 0 Td 32.905983 Tz (1 ) Tj 0.287179 0 Td 32.905983 Tz (. ) Tj 0.197436 0 Td 32.905983 Tz (2 ) Tj 0.466667 0 Td 52.350427 Tz (um ) Tj 2.225641 0 Td 43.076923 Tz (particular ) Tj 2.566667 0 Td 32.905983 Tz (, ) Tj 0.430769 0 Td 42.877493 Tz (the ) Tj 1.058974 0 Td 46.153846 Tz (through ) Tj 2.082051 0 Td 32.905983 Tz (- ) Tj 0.14359 0 Td 48.611111 Tz (hole ) Tj 1.579487 0 Td 43.874644 Tz (112 ) Tj 1.112821 0 Td 47.115385 Tz (provides ) Tj 2.620513 0 Td 32.905983 Tz (a ) Tj 0.538462 0 Td 47.863248 Tz (passage ) Tj 2.423077 0 Td 38.888889 Tz (for ) Tj 0.933333 0 Td 44.871795 Tz (an ) Tj 51.593407 0 0 51.593407 0 1752.371711 Tm 6.338019 0 Td 32.303869 Tz (to ) Tj 0.814058 0 Td 56.208733 Tz (about ) Tj 1.899468 0 Td 32.303869 Tz (3 ) Tj 0.290735 0 Td 32.303869 Tz (. ) Tj 0.213206 0 Td 32.303869 Tz (7 ) Tj 0.58147 0 Td 53.301384 Tz (um ) Tj 0.949734 0 Td 32.303869 Tz (. ) Tj 0.542705 0 Td 49.5326 Tz (Therefore ) Tj 2.732907 0 Td 32.303869 Tz (, ) Tj 0.387646 0 Td 50.070998 Tz (with ) Tj 1.569968 0 Td 49.5326 Tz (the ) Tj 1.162939 0 Td 55.562655 Tz (above ) Tj 1.957614 0 Td 45.548456 Tz (structural ) Tj 3.081789 0 Td 49.5326 Tz (con ) Tj 0.988498 0 Td 32.303869 Tz (- ) Tj 1.725027 0 Td 49.378772 Tz (etchant ) Tj 2.248349 0 Td 32.303869 Tz (to ) Tj 0.678381 0 Td 50.394036 Tz (reach ) Tj 1.705644 0 Td 54.916578 Tz (and ) Tj 1.317998 0 Td 56.531771 Tz (remove ) Tj 2.287114 0 Td 49.5326 Tz (the ) Tj 1.007881 0 Td 58.793042 Tz (above ) Tj 1.783174 0 Td 32.303869 Tz (- ) Tj 0.155059 0 Td 55.634442 Tz (mentioned ) Tj 3.294995 0 Td 48.455804 Tz (portion ) Tj 2.306496 0 Td 53.301384 Tz (of ) Tj 58.571429 0 0 58.571429 0 1712.198684 Tm 5.54878 0 Td 40.121951 Tz (figuration ) Tj 2.458537 0 Td 34.146341 Tz (, ) Tj 0.443902 0 Td 42.682927 Tz (the ) Tj 1.07561 0 Td 42.276423 Tz (optical ) Tj 1.963415 0 Td 51.535682 Tz (waveguide ) Tj 3.090244 0 Td 38.572719 Tz (structure ) Tj 2.509756 0 Td 44.579946 Tz (100 ) Tj 1.246341 0 Td 21.341463 Tz (is ) Tj 0.64878 0 Td 45.528455 Tz (capable ) Tj 2.339024 0 Td 31.300813 Tz (30 ) Tj 0.836585 0 Td 44.579946 Tz (the ) Tj 1.058537 0 Td 41.260163 Tz (insulating ) Tj 2.8 0 Td 41.544715 Tz (layer ) Tj 1.604878 0 Td 44.579946 Tz (104 ) Tj 1.058537 0 Td 52.642276 Tz (by ) Tj 0.973171 0 Td 41.869919 Tz (etching ) Tj 1.792683 0 Td 34.146341 Tz (. ) Tj 0.409756 0 Td 45.528455 Tz (After ) Tj 1.553659 0 Td 44.579946 Tz (the ) Tj 1.041463 0 Td 37.940379 Tz (air ) Tj 0.904878 0 Td 41.971545 Tz (slot ) Tj 1.263415 0 Td 44.579946 Tz (106 ) Tj 55.714286 0 0 55.714286 0 1668.039136 Tm 5.797436 0 Td 52.350427 Tz (of ) Tj 0.592308 0 Td 32.905983 Tz (/ ) Tj 0.197436 0 Td 42.254274 Tz (suitable ) Tj 2.405128 0 Td 37.891738 Tz (for ) Tj 0.933333 0 Td 49.85755 Tz (use ) Tj 1.166667 0 Td 32.905983 Tz (in ) Tj 0.84359 0 Td 32.905983 Tz (an ) Tj 0.789744 0 Td 44.017094 Tz (optical ) Tj 2.117949 0 Td 49.85755 Tz (gas ) Tj 1.112821 0 Td 48.361823 Tz (sensor ) Tj 1.992308 0 Td 43.874644 Tz (for ) Tj 1.005128 0 Td 44.207028 Tz (detecting ) Tj 2.692308 0 Td 32.905983 Tz (a ) Tj 1.651282 0 Td 49.65812 Tz (under ) Tj 1.794872 0 Td 43.874644 Tz (the ) Tj 1.023077 0 Td 54.178538 Tz (waveguide ) Tj 3.141026 0 Td 44.123932 Tz (core ) Tj 1.471795 0 Td 44.871795 Tz (108 ) Tj 1.148718 0 Td 32.905983 Tz (is ) Tj 0.771795 0 Td 48.860399 Tz (formed ) Tj 1.884615 0 Td 32.905983 Tz (, ) Tj 0.358974 0 Td 43.874644 Tz (the ) Tj 1.058974 0 Td 48.717949 Tz (through ) Tj 2.082051 0 Td 32.905983 Tz (- ) Tj 0.251282 0 Td 44.123932 Tz (hole ) Tj 60.171429 0 0 60.171429 0 1626.10664 Tm 5.384615 0 Td 38.565028 Tz (significantly ) Tj 3.207502 0 Td 47.641659 Tz (wider ) Tj 1.62868 0 Td 47.087686 Tz (range ) Tj 1.545584 0 Td 51.242482 Tz (of ) Tj 0.781102 0 Td 43.394534 Tz (gas ) Tj 0.963913 0 Td 43.763849 Tz (types ) Tj 1.296296 0 Td 33.238367 Tz (/ ) Tj 0.182811 0 Td 42.339348 Tz (species ) Tj 1.861349 0 Td 33.238367 Tz (. ) Tj 0.299145 0 Td 48.934262 Tz (For ) Tj 1.130104 0 Td 46.691991 Tz (example ) Tj 3.423552 0 Td 39.701382 Tz (112 ) Tj 0.897436 0 Td 61.860293 Tz (may ) Tj 1.396011 0 Td 34.623299 Tz (also ) Tj 1.2132 0 Td 40.440013 Tz (serve ) Tj 1.479107 0 Td 44.317822 Tz (as ) Tj 0.731244 0 Td 33.238367 Tz (a ) Tj 0.481956 0 Td 44.713517 Tz (passage ) Tj 2.160494 0 Td 34.161655 Tz (for ) Tj 0.914055 0 Td 45.24111 Tz (gas ) Tj 0.947293 0 Td 33.238367 Tz (to ) Tj 0.81434 0 Td 36.00823 Tz (flow ) Tj 1.196581 0 Td 33.238367 Tz (in ) Tj 0.681387 0 Td 45.24111 Tz (and ) Tj 1.146724 0 Td 45.24111 Tz (out ) Tj 45.714286 0 0 45.714286 0 1587.887908 Tm 7.0875 0 Td 59.548611 Tz (and ) Tj 1.4 0 Td 59.895833 Tz (without ) Tj 2.778125 0 Td 51.041667 Tz (limitation ) Tj 3.15 0 Td 32.8125 Tz (, ) Tj 0.35 0 Td 54.6875 Tz (with ) Tj 1.75 0 Td 53.472222 Tz (the ) Tj 1.246875 0 Td 63.802083 Tz (improved ) Tj 3.303125 0 Td 65.625 Tz (waveguide ) Tj 3.828125 0 Td 50.3125 Tz (trans ) Tj 1.61875 0 Td 32.8125 Tz (- ) Tj 1.88125 0 Td 63.802083 Tz (of ) Tj 1.05 0 Td 54.6875 Tz (the ) Tj 1.378125 0 Td 42.534722 Tz (air ) Tj 1.26875 0 Td 49.21875 Tz (slot ) Tj 1.684375 0 Td 49.826389 Tz (106 ) Tj 1.071875 0 Td 32.8125 Tz (, ) Tj 0.590625 0 Td 63.4375 Tz (which ) Tj 2.471875 0 Td 59.244792 Tz (enhances ) Tj 3.325 0 Td 55.902778 Tz (gas ) Tj 1.4875 0 Td 51.041667 Tz (diffusion ) Tj 3.259375 0 Td 32.8125 Tz (in ) Tj 1.00625 0 Td 59.548611 Tz (gas ) Tj 55.714286 0 0 55.714286 0 1543.294049 Tm 5.707692 0 Td 50 Tz (mission ) Tj 2.494872 0 Td 55.840456 Tz (window ) Tj 2.638462 0 Td 38.888889 Tz (for ) Tj 0.951282 0 Td 43.076923 Tz (light ) Tj 1.579487 0 Td 47.591298 Tz (propagation ) Tj 3.158974 0 Td 32.905983 Tz (, ) Tj 0.520513 0 Td 43.874644 Tz (the ) Tj 1.148718 0 Td 44.444444 Tz (optical ) Tj 2.117949 0 Td 55.34188 Tz (wave ) Tj 2.997436 0 Td 46.581197 Tz (sensing ) Tj 51.428571 0 0 51.428571 0 1503.814371 Tm 6.3 0 Td 55.092593 Tz (guide ) Tj 2.022222 0 Td 45.37037 Tz (structure ) Tj 2.897222 0 Td 56.17284 Tz (100 ) Tj 1.341667 0 Td 43.75 Tz (is ) Tj 0.913889 0 Td 43.75 Tz (suitable ) Tj 2.586111 0 Td 44.290123 Tz (for ) Tj 1.166667 0 Td 49.691358 Tz (use ) Tj 1.322222 0 Td 32.407407 Tz (in ) Tj 0.933333 0 Td 43.75 Tz (an ) Tj 1.05 0 Td 45.833333 Tz (optical ) Tj 2.294444 0 Td 49.691358 Tz (gas ) Tj 1.458333 0 Td 32.407407 Tz (35 ) Tj 1.75 0 Td 63.194444 Tz (As ) Tj 1.088889 0 Td 62.222222 Tz (shown ) Tj 2.275 0 Td 32.407407 Tz (in ) Tj 0.855556 0 Td 44.290123 Tz (FIG ) Tj 1.166667 0 Td 32.407407 Tz (. ) Tj 0.563889 0 Td 32.407407 Tz (1 ) Tj 0.272222 0 Td 32.407407 Tz (, ) Tj 0.563889 0 Td 44.290123 Tz (the ) Tj 1.127778 0 Td 55.092593 Tz (second ) Tj 2.294444 0 Td 52.662037 Tz (material ) Tj 2.877778 0 Td 47.314815 Tz (layer ) Tj 1.769444 0 Td 49.691358 Tz (110 ) Tj 1.380556 0 Td 34.027778 Tz (is ) Tj 55.844156 0 0 55.844156 0 1461.839179 Tm 5.855581 0 Td 47.254522 Tz (sensor ) Tj 2.041395 0 Td 38.79845 Tz (for ) Tj 0.984884 0 Td 46.093885 Tz (detecting ) Tj 2.757674 0 Td 66.653747 Tz (CO2 ) Tj 1.486279 0 Td 32.829457 Tz (\( ) Tj 0.286512 0 Td 43.77261 Tz (strong ) Tj 1.916047 0 Td 45.364341 Tz (absorption ) Tj 3.062093 0 Td 48.498062 Tz (peak ) Tj 1.54 0 Td 44.767442 Tz (at ) Tj 0.877442 0 Td 32.829457 Tz (4 ) Tj 0.286512 0 Td 32.829457 Tz (. ) Tj 0.17907 0 Td 43.275194 Tz (26 ) Tj 2.041395 0 Td 45.513566 Tz (disposed ) Tj 2.471163 0 Td 47.751938 Tz (over ) Tj 1.378837 0 Td 43.77261 Tz (the ) Tj 0.94907 0 Td 55.710594 Tz (waveguide ) Tj 3.205349 0 Td 45.513566 Tz (core ) Tj 1.396744 0 Td 44.767442 Tz (108 ) Tj 1.110233 0 Td 48.498062 Tz (such ) Tj 1.432558 0 Td 44.021318 Tz (that ) Tj 1.199767 0 Td 44.767442 Tz (the ) Tj 1.002791 0 Td 50.239018 Tz (second ) Tj 55.714286 0 0 55.714286 0 1419.300473 Tm 5.815385 0 Td 53.846154 Tz (um ) Tj 0.879487 0 Td 32.905983 Tz (\) ) Tj 0.215385 0 Td 32.905983 Tz (, ) Tj 0.412821 0 Td 65.811966 Tz (CO ) Tj 1.130769 0 Td 32.905983 Tz (\( ) Tj 0.287179 0 Td 43.376068 Tz (strong ) Tj 1.866667 0 Td 44.57265 Tz (absorption ) Tj 2.961538 0 Td 48.611111 Tz (peak ) Tj 1.579487 0 Td 44.871795 Tz (at ) Tj 0.717949 0 Td 32.905983 Tz (4 ) Tj 0.287179 0 Td 32.905983 Tz (. ) Tj 0.161538 0 Td 53.846154 Tz (65 ) Tj 0.933333 0 Td 44.871795 Tz (um ) Tj 0.861538 0 Td 32.905983 Tz (\) ) Tj 0.215385 0 Td 32.905983 Tz (, ) Tj 0.358974 0 Td 66.809117 Tz (SO2 ) Tj 1.382051 0 Td 32.905983 Tz (\( ) Tj 0.233333 0 Td 46.367521 Tz (strong ) Tj 2.961538 0 Td 47.863248 Tz (material ) Tj 2.387179 0 Td 44.273504 Tz (layer ) Tj 1.687179 0 Td 44.871795 Tz (110 ) Tj 1.112821 0 Td 47.863248 Tz (covers ) Tj 1.902564 0 Td 32.905983 Tz (a ) Tj 0.520513 0 Td 43.874644 Tz (top ) Tj 1.112821 0 Td 44.017094 Tz (surface ) Tj 2.135897 0 Td 49.85755 Tz (120 ) Tj 1.112821 0 Td 50.854701 Tz (and ) Tj 1.166667 0 Td 54.843305 Tz (two ) Tj 1.220513 0 Td 59.230769 Tz (oppos ) Tj 45.714286 0 0 45.714286 0 1381.64 Tm 7.0875 0 Td 55.052083 Tz (absorption ) Tj 3.653125 0 Td 61.067708 Tz (peak ) Tj 1.903125 0 Td 41.927083 Tz (at ) Tj 0.853125 0 Td 32.8125 Tz (4 ) Tj 0.590625 0 Td 52.864583 Tz (um ) Tj 1.09375 0 Td 32.8125 Tz (\) ) Tj 0.196875 0 Td 32.8125 Tz (, ) Tj 0.459375 0 Td 59.548611 Tz (and ) Tj 1.4 0 Td 74.739583 Tz (CH ) Tj 1.225 0 Td 32.8125 Tz (, ) Tj 0.56875 0 Td 32.8125 Tz (\( ) Tj 0.153125 0 Td 55.295139 Tz (strong ) Tj 2.31875 0 Td 55.052083 Tz (absorption ) Tj 3.675 0 Td 60.15625 Tz (peak ) Tj 3.303125 0 Td 49.826389 Tz (ing ) Tj 1.509375 0 Td 55.143229 Tz (sidewall ) Tj 3.215625 0 Td 53.776042 Tz (surfaces ) Tj 3.215625 0 Td 59.548611 Tz (122 ) Tj 1.553125 0 Td 65.625 Tz (of ) Tj 1.290625 0 Td 49.826389 Tz (the ) Tj 1.421875 0 Td 65.219907 Tz (waveguide ) Tj 4.046875 0 Td 56.510417 Tz (core ) Tj 1.96875 0 Td 59.548611 Tz (108 ) Tj 1.159375 0 Td 32.8125 Tz (. ) Tj 45.900621 0 0 45.900621 0 1336.875171 Tm 7.036942 0 Td 52.649977 Tz (at ) Tj 1.154668 0 Td 32.679296 Tz (6 ) Tj 0.348579 0 Td 32.679296 Tz (. ) Tj 0.348579 0 Td 32.679296 Tz (1 ) Tj 0.697158 0 Td 65.358593 Tz (um ) Tj 1.198241 0 Td 32.679296 Tz (\) ) Tj 0.196076 0 Td 32.679296 Tz (, ) Tj 0.675372 0 Td 62.764998 Tz (whereas ) Tj 3.158999 0 Td 55.675838 Tz (the ) Tj 1.503248 0 Td 63.90618 Tz (above ) Tj 1.917185 0 Td 32.679296 Tz (- ) Tj 0.108931 0 Td 64.551696 Tz (mentioned ) Tj 4.095805 0 Td 59.912043 Tz (conventional ) Tj 5.991204 0 Td 55.675838 Tz (Therefore ) Tj 3.050068 0 Td 32.679296 Tz (, ) Tj 0.653586 0 Td 49.624117 Tz (the ) Tj 1.241813 0 Td 65.762041 Tz (waveguide ) Tj 3.986874 0 Td 55.373252 Tz (core ) Tj 1.808254 0 Td 61.72756 Tz (108 ) Tj 1.612179 0 Td 30.86378 Tz (is ) Tj 0.827876 0 Td 59.54894 Tz (surrounded ) Tj 4.00866 0 Td 72.620659 Tz (by ) Tj 1.263599 0 Td 50.834461 Tz (the ) Tj 55.714286 0 0 55.714286 0 1293.685551 Tm 5.797436 0 Td 64.814815 Tz (SOI ) Tj 1.112821 0 Td 32.905983 Tz (- ) Tj 0.179487 0 Td 50.854701 Tz (based ) Tj 1.848718 0 Td 53.846154 Tz (waveguide ) Tj 3.141026 0 Td 53.846154 Tz (would ) Tj 2.010256 0 Td 49.85755 Tz (not ) Tj 1.130769 0 Td 42.628205 Tz (suitable ) Tj 2.423077 0 Td 41.282051 Tz (since ) Tj 1.615385 0 Td 43.874644 Tz (the ) Tj 1.076923 0 Td 53.247863 Tz (above ) Tj 2.064103 0 Td 32.905983 Tz (40 ) Tj 0.951282 0 Td 50.356125 Tz (second ) Tj 1.95641 0 Td 48.985043 Tz (material ) Tj 2.476923 0 Td 44.871795 Tz (layer ) Tj 1.561538 0 Td 49.85755 Tz (110 ) Tj 1.238462 0 Td 46.866097 Tz (except ) Tj 1.866667 0 Td 41.880342 Tz (at ) Tj 0.735897 0 Td 43.874644 Tz (the ) Tj 0.897436 0 Td 46.367521 Tz (bottom ) Tj 2.207692 0 Td 44.444444 Tz (surface ) Tj 2.153846 0 Td 49.85755 Tz (124 ) Tj 51.648352 0 0 51.648352 0 1254.866234 Tm 6.25383 0 Td 52.921986 Tz (types ) Tj 1.684468 0 Td 62.925532 Tz (of ) Tj 0.871277 0 Td 48.404255 Tz (gas ) Tj 1.02617 0 Td 55.933806 Tz (molecules ) Tj 3.155957 0 Td 37.647754 Tz (all ) Tj 0.890638 0 Td 55.664894 Tz (have ) Tj 1.70383 0 Td 45.177305 Tz (fingerprint ) Tj 3.136596 0 Td 48.72695 Tz (absorption ) Tj 3.117234 0 Td 63.73227 Tz (wave ) Tj 1.645745 0 Td 32.269504 Tz (- ) Tj 1.665106 0 Td 49.326241 Tz (thereof ) Tj 2.207234 0 Td 54.858156 Tz (which ) Tj 1.974894 0 Td 33.882979 Tz (is ) Tj 0.658298 0 Td 54.397163 Tz (exposed ) Tj 2.633191 0 Td 32.269504 Tz (to ) Tj 0.697021 0 Td 49.479905 Tz (the ) Tj 1.084255 0 Td 38.723404 Tz (air ) Tj 0.716383 0 Td 32.269504 Tz (/ ) Tj 0.23234 0 Td 50.555556 Tz (gas ) Tj 1.161702 0 Td 33.882979 Tz (in ) Tj 0.67766 0 Td 49.479905 Tz (the ) Tj 1.084255 0 Td 44.101655 Tz (air ) Tj 1.006809 0 Td 41.950355 Tz (slot ) Tj 1.335957 0 Td 43.026005 Tz (106 ) Tj 0.91 0 Td 32.269504 Tz (. ) Tj 0.425957 0 Td 32.269504 Tz (In ) Tj 55.714286 0 0 55.714286 0 1208.476158 Tm 5.851282 0 Td 45.299145 Tz (lengths ) Tj 2.207692 0 Td 51.452991 Tz (which ) Tj 2.010256 0 Td 45.868946 Tz (are ) Tj 1.112821 0 Td 46.581197 Tz (outside ) Tj 2.315385 0 Td 52.350427 Tz (of ) Tj 0.879487 0 Td 27.920228 Tz (its ) Tj 0.879487 0 Td 53.51377 Tz (waveguide ) Tj 3.320513 0 Td 46.118234 Tz (transmission ) Tj 4.810256 0 Td 43.874644 Tz (the ) Tj 1.076923 0 Td 54.74359 Tz (embodiment ) Tj 3.517949 0 Td 52.350427 Tz (of ) Tj 0.84359 0 Td 43.874644 Tz (FIG ) Tj 1.076923 0 Td 32.905983 Tz (. ) Tj 0.484615 0 Td 32.905983 Tz (1 ) Tj 0.215385 0 Td 32.905983 Tz (, ) Tj 0.520513 0 Td 22.435897 Tz (it ) Tj 0.592308 0 Td 44.871795 Tz (can ) Tj 1.166667 0 Td 52.350427 Tz (be ) Tj 0.969231 0 Td 44.123932 Tz (seen ) Tj 1.4 0 Td 42.628205 Tz (that ) Tj 1.25641 0 Td 43.874644 Tz (the ) Tj 1.076923 0 Td 48.361823 Tz (second ) Tj 47.142857 0 0 47.142857 0 1171 Tm 6.745455 0 Td 68.350168 Tz (window ) Tj 2.672727 0 Td 31.818182 Tz (. ) Tj 55.714286 0 0 55.714286 0 1169.265306 Tm 23.171795 0 Td 49.358974 Tz (material ) Tj 2.530769 0 Td 43.675214 Tz (layer ) Tj 1.579487 0 Td 44.871795 Tz (110 ) Tj 1.076923 0 Td 32.905983 Tz (is ) Tj 0.55641 0 Td 47.863248 Tz (disposed ) Tj 2.638462 0 Td 39.262821 Tz (directly ) Tj 2.135897 0 Td 52.350427 Tz (over ) Tj 1.453846 0 Td 32.905983 Tz (\( ) Tj 0.14359 0 Td 41.880342 Tz (directly ) Tj 2.279487 0 Td 44.871795 Tz (on ) Tj 0.646154 0 Td 32.905983 Tz (\) ) Tj 0.466667 0 Td 44.871795 Tz (the ) Tj 50 0 0 50 0 1130.580939 Tm 7.24 0 Td 58.571429 Tz (Without ) Tj 2.68 0 Td 57.619048 Tz (wishing ) Tj 2.7 0 Td 33.333333 Tz (to ) Tj 0.76 0 Td 65 Tz (be ) Tj 0.98 0 Td 62 Tz (bound ) Tj 2.18 0 Td 63.333333 Tz (by ) Tj 1.12 0 Td 51.111111 Tz (theory ) Tj 1.82 0 Td 33.333333 Tz (, ) Tj 0.42 0 Td 60 Tz (but ) Tj 1.34 0 Td 50 Tz (the ) Tj 1.2 0 Td 48.095238 Tz (optical ) Tj 3.5 0 Td 59.62963 Tz (waveguide ) Tj 3.74 0 Td 50.833333 Tz (core ) Tj 1.72 0 Td 54.444444 Tz (108 ) Tj 1.46 0 Td 61.111111 Tz (and ) Tj 1.5 0 Td 50 Tz (the ) Tj 1.44 0 Td 47.666667 Tz (insulating ) Tj 3.36 0 Td 49.333333 Tz (layer ) Tj 2 0 Td 48.888889 Tz (104 ) Tj 1 0 Td 33.333333 Tz (. ) Tj 0.72 0 Td 54.444444 Tz (The ) Tj 45.714286 0 0 45.714286 0 1090.21995 Tm 7 0 Td 66.840278 Tz (waveguide ) Tj 3.89375 0 Td 51.446759 Tz (structure ) Tj 3.19375 0 Td 54.6875 Tz (100 ) Tj 1.378125 0 Td 30.989583 Tz (is ) Tj 0.678125 0 Td 58.854167 Tz (advantageously ) Tj 5.446875 0 Td 55.78125 Tz (configured ) Tj 3.71875 0 Td 54.6875 Tz (such ) Tj 1.946875 0 Td 41.927083 Tz (45 ) Tj 1.1375 0 Td 52.604167 Tz (portion ) Tj 2.58125 0 Td 65.625 Tz (of ) Tj 0.940625 0 Td 55.902778 Tz (the ) Tj 1.203125 0 Td 61.371528 Tz (second ) Tj 2.40625 0 Td 60.15625 Tz (material ) Tj 3.01875 0 Td 55.416667 Tz (layer ) Tj 1.88125 0 Td 54.6875 Tz (110 ) Tj 1.465625 0 Td 57.421875 Tz (covering ) Tj 3.10625 0 Td 32.8125 Tz (\( ) Tj 0.13125 0 Td 57.421875 Tz (disposed ) Tj 51.677019 0 0 51.677019 0 1045.969557 Tm 6.23101 0 Td 48.377404 Tz (that ) Tj 1.354567 0 Td 44.07719 Tz (the ) Tj 0.928846 0 Td 59.84464 Tz (waveguide ) Tj 3.444471 0 Td 46.764824 Tz (core ) Tj 1.451322 0 Td 49.452457 Tz (108 ) Tj 1.122356 0 Td 43.539663 Tz (is ) Tj 0.657933 0 Td 54.827724 Tz (not ) Tj 1.103005 0 Td 46.764824 Tz (interfaced ) Tj 3.01875 0 Td 49.989984 Tz (with ) Tj 1.509375 0 Td 32.251603 Tz (a ) Tj 0.348317 0 Td 52.408854 Tz (material ) Tj 3.986298 0 Td 53.215144 Tz (on ) Tj 1.161058 0 Td 49.452457 Tz (the ) Tj 1.064303 0 Td 58.411236 Tz (waveguide ) Tj 3.521875 0 Td 47.571114 Tz (core ) Tj 1.528726 0 Td 49.452457 Tz (108 ) Tj 1.064303 0 Td 72.028579 Tz (may ) Tj 1.528726 0 Td 62.890625 Tz (be ) Tj 1.044952 0 Td 45.958534 Tz (referred ) Tj 2.515625 0 Td 32.251603 Tz (to ) Tj 0.81274 0 Td 41.927083 Tz (as ) Tj 0.851442 0 Td 32.251603 Tz (a ) Tj 0.464423 0 Td 73.372396 Tz (wave ) Tj 45.714286 0 0 45.714286 0 1005.199296 Tm 7.0875 0 Td 52.5 Tz (layer ) Tj 1.990625 0 Td 45.572917 Tz (that ) Tj 1.4 0 Td 65.625 Tz (would ) Tj 2.428125 0 Td 54.6875 Tz (cause ) Tj 2.034375 0 Td 55.902778 Tz (the ) Tj 1.203125 0 Td 65.219907 Tz (waveguide ) Tj 3.959375 0 Td 54.6875 Tz (core ) Tj 1.728125 0 Td 54.6875 Tz (108 ) Tj 1.44375 0 Td 34.635417 Tz (to ) Tj 0.83125 0 Td 62.890625 Tz (have ) Tj 1.859375 0 Td 52.864583 Tz (an ) Tj 2.515625 0 Td 56.875 Tz (guide ) Tj 2.165625 0 Td 56.510417 Tz (core ) Tj 1.859375 0 Td 57.877604 Tz (covering ) Tj 3.15 0 Td 55.208333 Tz (portion ) Tj 2.8 0 Td 55.902778 Tz (126 ) Tj 1.203125 0 Td 32.8125 Tz (, ) Tj 0.590625 0 Td 59.548611 Tz (and ) Tj 1.553125 0 Td 54.6875 Tz (the ) Tj 1.334375 0 Td 54.6875 Tz (portion ) Tj 2.8 0 Td 65.625 Tz (of ) Tj 1.1375 0 Td 49.826389 Tz (the ) Tj 50 0 0 50 0 962.983829 Tm 6.44 0 Td 51.818182 Tz (undesirably ) Tj 3.86 0 Td 46.666667 Tz (limited ) Tj 2.32 0 Td 59.62963 Tz (waveguide ) Tj 3.56 0 Td 50.833333 Tz (transmission ) Tj 4 0 Td 63.333333 Tz (window ) Tj 2.42 0 Td 33.333333 Tz (, ) Tj 0.58 0 Td 46.666667 Tz (such ) Tj 2.84 0 Td 55 Tz (second ) Tj 2.2 0 Td 52.5 Tz (material ) Tj 2.8 0 Td 48.666667 Tz (layer ) Tj 1.76 0 Td 50 Tz (110 ) Tj 1.36 0 Td 52.916667 Tz (covering ) Tj 2.88 0 Td 33.333333 Tz (\( ) Tj 0.16 0 Td 52.916667 Tz (disposed ) Tj 2.88 0 Td 53.333333 Tz (on ) Tj 1.24 0 Td 50 Tz (the ) Tj 1.2 0 Td 57.5 Tz (insu ) Tj 51.530612 0 0 51.530612 0 923.426194 Tm 6.306931 0 Td 53.366337 Tz (as ) Tj 0.950891 0 Td 49.592959 Tz (the ) Tj 1.280792 0 Td 44.20242 Tz (Sio ) Tj 1.164356 0 Td 32.343234 Tz (, ) Tj 0.543366 0 Td 49.808581 Tz (layer ) Tj 1.96 0 Td 49.592959 Tz (104 ) Tj 0.989703 0 Td 32.343234 Tz (. ) Tj 0.582178 0 Td 54.983498 Tz (For ) Tj 1.358416 0 Td 54.983498 Tz (example ) Tj 2.386931 0 Td 32.343234 Tz (, ) Tj 0.679208 0 Td 22.640264 Tz (in ) Tj 0.873267 0 Td 44.20242 Tz (the ) Tj 1.222574 0 Td 48.514851 Tz (case ) Tj 1.591287 0 Td 53.366337 Tz (of ) Tj 0.950891 0 Td 49.592959 Tz (the ) Tj 2.367525 0 Td 43.663366 Tz (lating ) Tj 1.901782 0 Td 46.574257 Tz (layer ) Tj 1.688317 0 Td 50.671067 Tz (110 ) Tj 1.106139 0 Td 71.155116 Tz (may ) Tj 1.513663 0 Td 64.686469 Tz (be ) Tj 0.970297 0 Td 46.493399 Tz (referred ) Tj 2.542178 0 Td 32.343234 Tz (to ) Tj 0.71802 0 Td 53.366337 Tz (as ) Tj 0.892673 0 Td 32.343234 Tz (a ) Tj 0.426931 0 Td 52.827283 Tz (planar ) Tj 1.998812 0 Td 49.438944 Tz (portion ) Tj 2.503366 0 Td 49.592959 Tz (128 ) Tj 1.009109 0 Td 32.343234 Tz (. ) Tj 50 0 0 50 0 877.853077 Tm 6.38 0 Td 61.481481 Tz (waveguide ) Tj 3.58 0 Td 52.5 Tz (core ) Tj 1.52 0 Td 56 Tz (being ) Tj 1.98 0 Td 46.666667 Tz (interfaced ) Tj 3.16 0 Td 50.833333 Tz (with ) Tj 1.66 0 Td 33.333333 Tz (a ) Tj 0.58 0 Td 62.5 Tz (SiO2 ) Tj 1.64 0 Td 50 Tz (layer ) Tj 1.72 0 Td 53.333333 Tz (as ) Tj 0.84 0 Td 50.833333 Tz (with ) Tj 1.84 0 Td 43.333333 Tz (50 ) Tj 1.16 0 Td 33.333333 Tz (In ) Tj 0.78 0 Td 49.583333 Tz (addition ) Tj 2.5 0 Td 33.333333 Tz (, ) Tj 0.46 0 Td 43.333333 Tz (as ) Tj 0.84 0 Td 65.333333 Tz (shown ) Tj 2.28 0 Td 33.333333 Tz (in ) Tj 0.84 0 Td 45.555556 Tz (FIG ) Tj 1.18 0 Td 33.333333 Tz (. ) Tj 0.56 0 Td 33.333333 Tz (1 ) Tj 0.28 0 Td 33.333333 Tz (, ) Tj 0.42 0 Td 50 Tz (the ) Tj 1.14 0 Td 57.777778 Tz (second ) Tj 2.3 0 Td 54.166667 Tz (material ) Tj 2.76 0 Td 50 Tz (layer ) Tj 51.746032 0 0 51.746032 0 839.637261 Tm 6.280675 0 Td 52.070552 Tz (conventional ) Tj 4.019632 0 Td 71.932515 Tz (SOI ) Tj 1.159509 0 Td 32.208589 Tz (- ) Tj 0.231902 0 Td 50.889571 Tz (based ) Tj 1.893865 0 Td 56.687117 Tz (waveguides ) Tj 3.439877 0 Td 32.208589 Tz (, ) Tj 0.425153 0 Td 49.386503 Tz (the ) Tj 1.082209 0 Td 59.406953 Tz (waveguide ) Tj 3.420552 0 Td 48.312883 Tz (trans ) Tj 1.488037 0 Td 32.208589 Tz (- ) Tj 1.777914 0 Td 45.092025 Tz (110 ) Tj 1.19816 0 Td 45.092025 Tz (further ) Tj 2.222393 0 Td 53.680982 Tz (comprises ) Tj 3.053374 0 Td 60.122699 Tz (two ) Tj 1.391411 0 Td 49.118098 Tz (sidewall ) Tj 2.608896 0 Td 49.923313 Tz (portions ) Tj 2.647546 0 Td 54.754601 Tz (130 ) Tj 1.256135 0 Td 51.891616 Tz (extending ) Tj 58.571429 0 0 58.571429 0 793.188377 Tm 5.446341 0 Td 47.96748 Tz (mission ) Tj 2.219512 0 Td 53.590786 Tz (window ) Tj 2.253659 0 Td 31.300813 Tz (is ) Tj 0.631707 0 Td 39.02439 Tz (limited ) Tj 1.878049 0 Td 55.487805 Tz (by ) Tj 0.819512 0 Td 44.579946 Tz (the ) Tj 1.041463 0 Td 53.353659 Tz (SiO2 ) Tj 1.365854 0 Td 40.406504 Tz (layer ) Tj 1.468293 0 Td 31.300813 Tz (to ) Tj 0.665854 0 Td 40.54878 Tz (only ) Tj 1.229268 0 Td 52.642276 Tz (be ) Tj 0.802439 0 Td 44.817073 Tz (able ) Tj 2.407317 0 Td 37.703252 Tz (from ) Tj 1.382927 0 Td 44.579946 Tz (the ) Tj 1.041463 0 Td 42.682927 Tz (planar ) Tj 1.809756 0 Td 43.495935 Tz (portion ) Tj 2.1 0 Td 49.322493 Tz (128 ) Tj 1.160976 0 Td 45.528455 Tz (toward ) Tj 1.963415 0 Td 44.579946 Tz (the ) Tj 1.007317 0 Td 42.050587 Tz (substrate ) Tj 2.629268 0 Td 44.579946 Tz (102 ) Tj 0.819512 0 Td 34.146341 Tz (. ) Tj 0.478049 0 Td 50.271003 Tz (The ) Tj 45.714286 0 0 45.714286 0 757.941844 Tm 7.0875 0 Td 43.75 Tz (to ) Tj 0.984375 0 Td 56.25 Tz (support ) Tj 2.821875 0 Td 32.8125 Tz (a ) Tj 0.590625 0 Td 59.427083 Tz (wavelength ) Tj 4.06875 0 Td 65.625 Tz (of ) Tj 0.984375 0 Td 65.625 Tz (up ) Tj 1.203125 0 Td 32.8125 Tz (to ) Tj 0.984375 0 Td 32.8125 Tz (3 ) Tj 0.35 0 Td 32.8125 Tz (. ) Tj 0.284375 0 Td 32.8125 Tz (7 ) Tj 0.6125 0 Td 63.802083 Tz (um ) Tj 1.44375 0 Td 59.548611 Tz (due ) Tj 1.421875 0 Td 43.75 Tz (to ) Tj 1.00625 0 Td 54.6875 Tz (the ) Tj 1.334375 0 Td 49.583333 Tz (large ) Tj 3.28125 0 Td 60.763889 Tz (two ) Tj 1.44375 0 Td 55.143229 Tz (sidewall ) Tj 2.8875 0 Td 56.966146 Tz (portions ) Tj 3.040625 0 Td 60.763889 Tz (130 ) Tj 1.421875 0 Td 49.826389 Tz (are ) Tj 1.18125 0 Td 58.333333 Tz (spaced ) Tj 2.40625 0 Td 56.875 Tz (apart ) Tj 2.034375 0 Td 44.965278 Tz (for ) Tj 1.09375 0 Td 62.5 Tz (forming ) Tj 2.909375 0 Td 60.763889 Tz (two ) Tj 51.6 0 0 51.6 0 714.713359 Tm 6.317829 0 Td 48.126615 Tz (absorption ) Tj 3.217054 0 Td 46.834625 Tz (loss ) Tj 1.356589 0 Td 53.294574 Tz (of ) Tj 0.813953 0 Td 49.52627 Tz (the ) Tj 1.065891 0 Td 50.602929 Tz (SiO ) Tj 1.162791 0 Td 32.299742 Tz (, ) Tj 0.406977 0 Td 49.741602 Tz (layer ) Tj 1.666667 0 Td 45.219638 Tz (for ) Tj 0.930233 0 Td 56.671365 Tz (wavelengths ) Tj 3.953488 0 Td 55.555556 Tz (above ) Tj 1.976744 0 Td 32.299742 Tz (3 ) Tj 0.290698 0 Td 32.299742 Tz (. ) Tj 0.271318 0 Td 32.299742 Tz (7 ) Tj 1.763566 0 Td 54.505814 Tz (opposing ) Tj 2.829457 0 Td 49.52627 Tz (sidewalls ) Tj 2.790698 0 Td 62.984496 Tz (of ) Tj 0.852713 0 Td 49.52627 Tz (the ) Tj 0.988372 0 Td 39.836348 Tz (air ) Tj 1.007752 0 Td 41.989664 Tz (slot ) Tj 1.24031 0 Td 48.449612 Tz (106 ) Tj 1.22093 0 Td 33.914729 Tz (to ) Tj 0.620155 0 Td 62.984496 Tz (be ) Tj 0.968992 0 Td 47.526763 Tz (created ) Tj 2.209302 0 Td 59.754522 Tz (when ) Tj 1.782946 0 Td 45.219638 Tz (the ) Tj 51.428571 0 0 51.428571 0 673.298108 Tm 6.3 0 Td 53.472222 Tz (um ) Tj 0.952778 0 Td 32.407407 Tz (. ) Tj 0.427778 0 Td 63.194444 Tz (As ) Tj 0.952778 0 Td 43.75 Tz (an ) Tj 0.972222 0 Td 55.555556 Tz (example ) Tj 2.683333 0 Td 55.092593 Tz (and ) Tj 1.244444 0 Td 44.290123 Tz (for ) Tj 1.088889 0 Td 42.12963 Tz (illustration ) Tj 3.286111 0 Td 53.877315 Tz (purposes ) Tj 2.897222 0 Td 47.800926 Tz (only ) Tj 1.225 0 Td 32.407407 Tz (, ) Tj 0.447222 0 Td 44.290123 Tz (FIG ) Tj 1.088889 0 Td 32.407407 Tz (. ) Tj 0.680556 0 Td 43.75 Tz (55 ) Tj 0.933333 0 Td 49.074074 Tz (portion ) Tj 2.391667 0 Td 53.472222 Tz (of ) Tj 0.816667 0 Td 48.611111 Tz (the ) Tj 1.205556 0 Td 46.342593 Tz (insulating ) Tj 3.091667 0 Td 46.018519 Tz (layer ) Tj 1.691667 0 Td 55.092593 Tz (104 ) Tj 1.302778 0 Td 51.58179 Tz (therebetween ) Tj 4.083333 0 Td 55.092593 Tz (and ) Tj 1.263889 0 Td 55.092593 Tz (under ) Tj 50 0 0 50 0 630.580831 Tm 6.58 0 Td 33.333333 Tz (2 ) Tj 0.52 0 Td 49.52381 Tz (depicts ) Tj 2.36 0 Td 33.333333 Tz (a ) Tj 0.54 0 Td 53.333333 Tz (schematic ) Tj 3.18 0 Td 58.095238 Tz (drawing ) Tj 2.66 0 Td 53.333333 Tz (of ) Tj 0.9 0 Td 33.333333 Tz (a ) Tj 0.54 0 Td 52.777778 Tz (conventional ) Tj 4 0 Td 71.111111 Tz (SOI ) Tj 1.26 0 Td 33.333333 Tz (- ) Tj 0.14 0 Td 57.333333 Tz (based ) Tj 3.3 0 Td 50 Tz (the ) Tj 1.08 0 Td 61.481481 Tz (waveguide ) Tj 3.56 0 Td 51.666667 Tz (core ) Tj 1.6 0 Td 55.555556 Tz (108 ) Tj 1.4 0 Td 33.333333 Tz (is ) Tj 0.76 0 Td 51.388889 Tz (subsequently ) Tj 4.1 0 Td 59.047619 Tz (removed ) Tj 2.62 0 Td 33.333333 Tz (. ) Tj 0.38 0 Td 67.222222 Tz (Accord ) Tj 51.428571 0 0 51.428571 0 589.903431 Tm 6.202778 0 Td 53.472222 Tz (buried ) Tj 2.294444 0 Td 37.592593 Tz (strip ) Tj 1.633333 0 Td 57.613169 Tz (waveguide ) Tj 3.441667 0 Td 55.092593 Tz (200 ) Tj 1.341667 0 Td 61.111111 Tz (whereby ) Tj 2.916667 0 Td 44.290123 Tz (the ) Tj 1.166667 0 Td 40.185185 Tz (strip ) Tj 1.594444 0 Td 58.333333 Tz (waveguide ) Tj 4.666667 0 Td 46.018519 Tz (ingly ) Tj 1.4 0 Td 32.407407 Tz (, ) Tj 0.447222 0 Td 21.064815 Tz (it ) Tj 0.486111 0 Td 50.771605 Tz (can ) Tj 1.088889 0 Td 63.194444 Tz (be ) Tj 0.836111 0 Td 54.768519 Tz (understood ) Tj 3.422222 0 Td 46.990741 Tz (that ) Tj 1.283333 0 Td 49.691358 Tz (the ) Tj 1.05 0 Td 60.493827 Tz (two ) Tj 1.225 0 Td 51.041667 Tz (sidewall ) Tj 2.566667 0 Td 49.826389 Tz (portions ) Tj 2.586111 0 Td 55.092593 Tz (130 ) Tj 50 0 0 50 0 546.991781 Tm 6.46 0 Td 52.5 Tz (core ) Tj 1.74 0 Td 33.333333 Tz (is ) Tj 0.7 0 Td 53.333333 Tz (buried ) Tj 2.38 0 Td 33.333333 Tz (in ) Tj 0.92 0 Td 50 Tz (the ) Tj 1.26 0 Td 50 Tz (SiO ) Tj 1.18 0 Td 33.333333 Tz (, ) Tj 0.64 0 Td 46 Tz (layer ) Tj 1.46 0 Td 33.333333 Tz (. ) Tj 0.56 0 Td 33.333333 Tz (In ) Tj 0.96 0 Td 47.5 Tz (such ) Tj 1.7 0 Td 33.333333 Tz (a ) Tj 0.68 0 Td 54.166667 Tz (conventional ) Tj 5.28 0 Td 71.111111 Tz (may ) Tj 1.46 0 Td 63.333333 Tz (be ) Tj 0.92 0 Td 52.5 Tz (arranged ) Tj 2.64 0 Td 33.333333 Tz (/ ) Tj 0.26 0 Td 51 Tz (configured ) Tj 3.3 0 Td 43.333333 Tz (to ) Tj 0.72 0 Td 63.333333 Tz (be ) Tj 0.96 0 Td 53.888889 Tz (spaced ) Tj 2.2 0 Td 51.333333 Tz (apart ) Tj 1.6 0 Td 63.333333 Tz (by ) Tj 1.04 0 Td 33.333333 Tz (a ) Tj 0.44 0 Td 51.25 Tz (distance ) Tj 51.677019 0 0 51.677019 0 506.151719 Tm 6.23101 0 Td 59.486289 Tz (waveguide ) Tj 3.696034 0 Td 49.452457 Tz (200 ) Tj 1.00625 0 Td 32.251603 Tz (, ) Tj 0.619231 0 Td 44.07719 Tz (the ) Tj 1.19976 0 Td 58.411236 Tz (waveguide ) Tj 3.599279 0 Td 49.989984 Tz (transmission ) Tj 4.005649 0 Td 60.202991 Tz (window ) Tj 2.82524 0 Td 33.864183 Tz (is ) Tj 2.0125 0 Td 43.539663 Tz (as ) Tj 0.735337 0 Td 46.073718 Tz (desired ) Tj 2.264063 0 Td 45.152244 Tz (for ) Tj 0.928846 0 Td 45.612981 Tz (setting ) Tj 2.147957 0 Td 32.251603 Tz (a ) Tj 0.387019 0 Td 50.957532 Tz (width ) Tj 1.857692 0 Td 53.215144 Tz (of ) Tj 0.754688 0 Td 49.452457 Tz (the ) Tj 1.083654 0 Td 38.701923 Tz (air ) Tj 0.909495 0 Td 41.927083 Tz (slot ) Tj 1.219111 0 Td 50.527511 Tz (106 ) Tj 1.238462 0 Td 32.251603 Tz (to ) Tj 0.619231 0 Td 62.890625 Tz (be ) Tj 0.986899 0 Td 52.677618 Tz (formed ) Tj 2.0125 0 Td 32.251603 Tz (. ) Tj 51.428571 0 0 51.428571 0 466.153439 Tm 6.3 0 Td 50.673401 Tz (undesirably ) Tj 3.636111 0 Td 44.907407 Tz (limited ) Tj 2.080556 0 Td 63.194444 Tz (by ) Tj 0.991667 0 Td 49.691358 Tz (the ) Tj 1.069444 0 Td 49.691358 Tz (SiO ) Tj 1.166667 0 Td 32.407407 Tz (, ) Tj 0.427778 0 Td 46.666667 Tz (layer ) Tj 1.555556 0 Td 53.619529 Tz (surrounding ) Tj 3.752778 0 Td 44.290123 Tz (the ) Tj 0.913889 0 Td 64.00463 Tz (wave ) Tj 1.672222 0 Td 32.407407 Tz (- ) Tj 0.622222 0 Td 42.12963 Tz (60 ) Tj 1.127778 0 Td 46.018519 Tz (After ) Tj 1.905556 0 Td 44.290123 Tz (the ) Tj 1.205556 0 Td 48.611111 Tz (portion ) Tj 2.508333 0 Td 53.472222 Tz (of ) Tj 0.952778 0 Td 48.611111 Tz (the ) Tj 1.341667 0 Td 46.018519 Tz (insulating ) Tj 3.305556 0 Td 47.314815 Tz (layer ) Tj 1.847222 0 Td 55.092593 Tz (104 ) Tj 1.380556 0 Td 55.092593 Tz (under ) Tj 2.080556 0 Td 49.691358 Tz (the ) Tj 50 0 0 50 0 423.06221 Tm 6.52 0 Td 55.333333 Tz (guide ) Tj 1.84 0 Td 50.833333 Tz (core ) Tj 1.5 0 Td 33.333333 Tz (to ) Tj 0.72 0 Td 51.666667 Tz (only ) Tj 1.44 0 Td 65 Tz (be ) Tj 0.94 0 Td 51.666667 Tz (able ) Tj 1.5 0 Td 51.904762 Tz (support ) Tj 2.4 0 Td 33.333333 Tz (a ) Tj 0.44 0 Td 57 Tz (wavelength ) Tj 3.68 0 Td 65 Tz (of ) Tj 0.86 0 Td 53.333333 Tz (up ) Tj 0.88 0 Td 43.333333 Tz (to ) Tj 0.86 0 Td 33.333333 Tz (3 ) Tj 0.28 0 Td 33.333333 Tz (. ) Tj 0.28 0 Td 33.333333 Tz (7 ) Tj 1.78 0 Td 61.481481 Tz (waveguide ) Tj 3.66 0 Td 47.5 Tz (core ) Tj 1.58 0 Td 54.444444 Tz (108 ) Tj 1.42 0 Td 55.555556 Tz (and ) Tj 1.28 0 Td 60.47619 Tz (bounded ) Tj 2.88 0 Td 63.333333 Tz (by ) Tj 1.12 0 Td 50 Tz (the ) Tj 1.2 0 Td 57.777778 Tz (second ) Tj 2.28 0 Td 54.583333 Tz (material ) Tj 47.142857 0 0 47.142857 0 377 Tm 6.830303 0 Td 65.40404 Tz (um ) Tj 1.081818 0 Td 31.818182 Tz (. ) Tj 46.153846 0 0 46.153846 0 380.505435 Tm 28.166667 0 Td 53.444444 Tz (layer ) Tj 1.841667 0 Td 60.185185 Tz (110 ) Tj 1.386667 0 Td 39.722222 Tz (is ) Tj 0.715 0 Td 66.547619 Tz (removed ) Tj 2.903333 0 Td 32.5 Tz (, ) Tj 0.498333 0 Td 49.351852 Tz (the ) Tj 1.083333 0 Td 43.333333 Tz (air ) Tj 1.17 0 Td 47.847222 Tz (slot ) Tj 1.516667 0 Td 49.351852 Tz (106 ) Tj 1.278333 0 Td 65 Tz (would ) Tj 2.188333 0 Td 74.027778 Tz (be ) Tj 1.17 0 Td 59.583333 Tz (formed ) Tj 2.47 0 Td 61.388889 Tz (and ) Tj 51.428571 0 0 51.428571 0 340.375321 Tm 7.136111 0 Td 32.407407 Tz (In ) Tj 0.738889 0 Td 48.611111 Tz (contrast ) Tj 2.255556 0 Td 32.407407 Tz (, ) Tj 0.486111 0 Td 58.627946 Tz (embodiments ) Tj 4.083333 0 Td 53.472222 Tz (of ) Tj 0.836111 0 Td 49.691358 Tz (the ) Tj 1.069444 0 Td 51.851852 Tz (present ) Tj 2.352778 0 Td 48.611111 Tz (invention ) Tj 2.955556 0 Td 53.472222 Tz (do ) Tj 0.913889 0 Td 55.092593 Tz (not ) Tj 2.430556 0 Td 49.691358 Tz (the ) Tj 1.011111 0 Td 58.333333 Tz (waveguide ) Tj 3.363889 0 Td 48.611111 Tz (core ) Tj 1.477778 0 Td 49.691358 Tz (108 ) Tj 1.108333 0 Td 57.037037 Tz (would ) Tj 1.925 0 Td 63.194444 Tz (be ) Tj 0.875 0 Td 47.395833 Tz (released ) Tj 2.605556 0 Td 55.092593 Tz (and ) Tj 1.186111 0 Td 53.652263 Tz (suspended ) Tj 3.111111 0 Td 63.194444 Tz (by ) Tj 45.714286 0 0 45.714286 0 300.7109 Tm 7.13125 0 Td 56.770833 Tz (dispose ) Tj 2.7125 0 Td 54.6875 Tz (the ) Tj 1.203125 0 Td 65.219907 Tz (waveguide ) Tj 3.959375 0 Td 50.130208 Tz (core ) Tj 1.61875 0 Td 34.635417 Tz (in ) Tj 0.83125 0 Td 63.802083 Tz (or ) Tj 1.09375 0 Td 47.851562 Tz (directly ) Tj 2.734375 0 Td 52.864583 Tz (on ) Tj 0.809375 0 Td 32.8125 Tz (, ) Tj 0.546875 0 Td 44.965278 Tz (for ) Tj 1.159375 0 Td 63.020833 Tz (example ) Tj 2.778125 0 Td 32.8125 Tz (, ) Tj 1.79375 0 Td 54.6875 Tz (the ) Tj 1.3125 0 Td 60.763889 Tz (second ) Tj 2.49375 0 Td 57.421875 Tz (material ) Tj 2.975 0 Td 55.416667 Tz (layer ) Tj 2.0125 0 Td 54.6875 Tz (110 ) Tj 1.35625 0 Td 63.802083 Tz (over ) Tj 1.75 0 Td 54.6875 Tz (the ) Tj 1.3125 0 Td 42.534722 Tz (air ) Tj 1.115625 0 Td 50.130208 Tz (slot ) Tj 1.53125 0 Td 54.6875 Tz (106 ) Tj 1.159375 0 Td 32.8125 Tz (. ) Tj 0.590625 0 Td 67.083333 Tz (There ) Tj 58.571429 0 0 58.571429 0 252.86192 Tm 5.514634 0 Td 44.579946 Tz (the ) Tj 1.007317 0 Td 54.065041 Tz (SiO2 ) Tj 1.468293 0 Td 41.544715 Tz (layer ) Tj 1.246341 0 Td 34.146341 Tz (, ) Tj 0.290244 0 Td 50.271003 Tz (but ) Tj 1.092683 0 Td 42.682927 Tz (configure ) Tj 2.629268 0 Td 38.888889 Tz (the ) Tj 0.853659 0 Td 52.800361 Tz (waveguide ) Tj 3.12439 0 Td 40.54878 Tz (core ) Tj 1.331707 0 Td 44.579946 Tz (108 ) Tj 1.02439 0 Td 34.146341 Tz (to ) Tj 0.64878 0 Td 55.487805 Tz (be ) Tj 1.02439 0 Td 42.682927 Tz (65 ) Tj 1.02439 0 Td 36.99187 Tz (fore ) Tj 0.887805 0 Td 34.146341 Tz (, ) Tj 0.358537 0 Td 44.579946 Tz (the ) Tj 0.973171 0 Td 47.899729 Tz (second ) Tj 1.77561 0 Td 45.528455 Tz (material ) Tj 2.339024 0 Td 41.544715 Tz (layer ) Tj 1.570732 0 Td 42.682927 Tz (110 ) Tj 0.904878 0 Td 46.595528 Tz (provides ) Tj 2.42439 0 Td 34.146341 Tz (a ) Tj 0.409756 0 Td 46.341463 Tz (support ) Tj 1.912195 0 Td 34.146341 Tz (/ ) Tj 0.221951 0 Td 49.512195 Tz (frame ) Tj 45.714286 0 0 45.714286 0 216.81057 Tm 7.0875 0 Td 60.358796 Tz (suspended ) Tj 3.696875 0 Td 59.244792 Tz (over ) Tj 1.61875 0 Td 52.864583 Tz (an ) Tj 0.984375 0 Td 43.75 Tz (air ) Tj 1.1375 0 Td 50.130208 Tz (slot ) Tj 1.44375 0 Td 54.6875 Tz (106 ) Tj 1.334375 0 Td 52.864583 Tz (as ) Tj 0.9625 0 Td 47.064394 Tz (illustrated ) Tj 3.5 0 Td 30.989583 Tz (in ) Tj 0.809375 0 Td 49.826389 Tz (FIG ) Tj 1.35625 0 Td 32.8125 Tz (. ) Tj 0.546875 0 Td 32.8125 Tz (1 ) Tj 0.21875 0 Td 32.8125 Tz (. ) Tj 0.415625 0 Td 61.979167 Tz (With ) Tj 3.346875 0 Td 49.826389 Tz (structure ) Tj 3.215625 0 Td 49.826389 Tz (for ) Tj 1.3125 0 Td 57.8125 Tz (holding ) Tj 2.49375 0 Td 32.8125 Tz (/ ) Tj 0.2625 0 Td 59.791667 Tz (suspending ) Tj 3.98125 0 Td 54.6875 Tz (the ) Tj 1.378125 0 Td 65.219907 Tz (waveguide ) Tj 4.003125 0 Td 50.130208 Tz (core ) Tj 1.815625 0 Td 54.6875 Tz (108 ) Tj 56.428571 0 0 56.428571 0 170.975657 Tm 5.794937 0 Td 46.518987 Tz (such ) Tj 1.453165 0 Td 35.443038 Tz (a ) Tj 0.567089 0 Td 44.303797 Tz (configuration ) Tj 3.508861 0 Td 35.443038 Tz (, ) Tj 0.460759 0 Td 44.303797 Tz (the ) Tj 1.04557 0 Td 53.164557 Tz (waveguide ) Tj 3.189873 0 Td 47.257384 Tz (core ) Tj 1.453165 0 Td 46.272855 Tz (108 ) Tj 1.205063 0 Td 32.489451 Tz (is ) Tj 0.691139 0 Td 48.523207 Tz (advanta ) Tj 3.632911 0 Td 52.57384 Tz (above ) Tj 1.807595 0 Td 46.272855 Tz (the ) Tj 0.992405 0 Td 36.427567 Tz (air ) Tj 0.939241 0 Td 43.565401 Tz (slot ) Tj 1.222785 0 Td 46.272855 Tz (106 ) Tj 0.956962 0 Td 32.489451 Tz (. ) Tj ET Q endstream endobj 122 0 obj << /Length 1 >> stream q endstream endobj 123 0 obj << /Length 58007 >> stream Q q 0.24 0 0 0.24 0 0 cm BT /F1 1 Tf 3 Tr 70 0 0 70 0 3024 Tm 15.214286 0 Td 85.714286 Tz (US ) Tj 1.4 0 Td 30.952381 Tz (10 ) Tj 0.542857 0 Td 33.333333 Tz (, ) Tj 0.142857 0 Td 55.555556 Tz (215 ) Tj 1.114286 0 Td 33.333333 Tz (, ) Tj 0.142857 0 Td 61.111111 Tz (692 ) Tj 1.4 0 Td 63.095238 Tz (B2 ) Tj 58.571429 0 0 58.571429 0 2915.667976 Tm 6.180488 0 Td 50.271003 Tz (For ) Tj 1.126829 0 Td 36.99187 Tz (illustration ) Tj 2.936585 0 Td 48.018293 Tz (purposes ) Tj 2.560976 0 Td 43.394309 Tz (only ) Tj 1.058537 0 Td 34.146341 Tz (, ) Tj 0.37561 0 Td 38.888889 Tz (FIG ) Tj 1.02439 0 Td 34.146341 Tz (. ) Tj 0.426829 0 Td 34.146341 Tz (3 ) Tj 0.546341 0 Td 41.463415 Tz (depicts ) Tj 1.980488 0 Td 34.146341 Tz (a ) Tj 0.529268 0 Td 43.495935 Tz (perspec ) Tj 1.912195 0 Td 34.146341 Tz (- ) Tj 1.434146 0 Td 53.116531 Tz (waveguide ) Tj 2.987805 0 Td 32.723577 Tz (to ) Tj 0.563415 0 Td 55.487805 Tz (be ) Tj 0.921951 0 Td 46.476965 Tz (formed ) Tj 1.72439 0 Td 34.146341 Tz (. ) Tj 0.290244 0 Td 43.252033 Tz (After ) Tj 1.553659 0 Td 42.276423 Tz (etching ) Tj 1.792683 0 Td 34.146341 Tz (, ) Tj 0.392683 0 Td 37.940379 Tz (the ) Tj 0.956098 0 Td 46.747967 Tz (exposed ) Tj 2.134146 0 Td 44.461382 Tz (surfaces ) Tj 45.714286 0 0 45.714286 0 2876.612774 Tm 7.0875 0 Td 50.130208 Tz (tive ) Tj 1.596875 0 Td 53.776042 Tz (view ) Tj 1.771875 0 Td 63.802083 Tz (of ) Tj 0.984375 0 Td 55.902778 Tz (the ) Tj 1.290625 0 Td 53.645833 Tz (optical ) Tj 2.428125 0 Td 66.030093 Tz (waveguide ) Tj 3.89375 0 Td 51.041667 Tz (structure ) Tj 3.19375 0 Td 60.763889 Tz (100 ) Tj 1.509375 0 Td 67.8125 Tz (shown ) Tj 2.384375 0 Td 32.8125 Tz (in ) Tj 2.23125 0 Td 63.802083 Tz (of ) Tj 0.91875 0 Td 55.902778 Tz (the ) Tj 1.1375 0 Td 65.625 Tz (waveguide ) Tj 3.80625 0 Td 54.6875 Tz (core ) Tj 1.6625 0 Td 60.763889 Tz (108 ) Tj 1.334375 0 Td 60.763889 Tz (and ) Tj 1.44375 0 Td 49.826389 Tz (the ) Tj 1.115625 0 Td 60.520833 Tz (oxide ) Tj 2.1 0 Td 51.041667 Tz (layer ) Tj 1.946875 0 Td 54.6875 Tz (104 ) Tj 1.225 0 Td 76.5625 Tz (may ) Tj 1.70625 0 Td 45.572917 Tz (also ) Tj 45.714286 0 0 45.714286 0 2835.352273 Tm 7.0875 0 Td 49.826389 Tz (FIG ) Tj 1.35625 0 Td 32.8125 Tz (. ) Tj 0.546875 0 Td 32.8125 Tz (1 ) Tj 0.284375 0 Td 32.8125 Tz (. ) Tj 0.546875 0 Td 43.75 Tz (In ) Tj 0.9625 0 Td 57.291667 Tz (various ) Tj 2.734375 0 Td 63.967803 Tz (embodiments ) Tj 4.309375 0 Td 32.8125 Tz (, ) Tj 0.459375 0 Td 54.6875 Tz (the ) Tj 1.3125 0 Td 60.763889 Tz (second ) Tj 2.384375 0 Td 61.523438 Tz (material ) Tj 3.19375 0 Td 52.5 Tz (layer ) Tj 3.10625 0 Td 72.916667 Tz (be ) Tj 1.115625 0 Td 55.598958 Tz (polished ) Tj 2.975 0 Td 34.635417 Tz (in ) Tj 0.853125 0 Td 32.8125 Tz (a ) Tj 0.371875 0 Td 72.309028 Tz (manner ) Tj 2.8 0 Td 72.916667 Tz (known ) Tj 2.40625 0 Td 41.927083 Tz (to ) Tj 0.853125 0 Td 32.8125 Tz (a ) Tj 0.48125 0 Td 57.725694 Tz (person ) Tj 2.5375 0 Td 47.395833 Tz (skilled ) Tj 2.296875 0 Td 34.635417 Tz (in ) Tj 0.853125 0 Td 53.472222 Tz (the ) Tj 1.1375 0 Td 49.826389 Tz (art ) Tj 0.875 0 Td 32.8125 Tz (. ) Tj 51.428571 0 0 51.428571 0 2792.666667 Tm 6.416667 0 Td 48.611111 Tz (110 ) Tj 1.225 0 Td 53.472222 Tz (of ) Tj 0.894444 0 Td 49.691358 Tz (the ) Tj 1.147222 0 Td 48.148148 Tz (optical ) Tj 2.158333 0 Td 58.333333 Tz (waveguide ) Tj 3.441667 0 Td 46.090535 Tz (structure ) Tj 2.936111 0 Td 50.771605 Tz (100 ) Tj 1.263889 0 Td 54.372428 Tz (comprises ) Tj 3.15 0 Td 61.574074 Tz (two ) Tj 3.286111 0 Td 64.00463 Tz (Next ) Tj 1.516667 0 Td 32.407407 Tz (, ) Tj 0.291667 0 Td 53.472222 Tz (as ) Tj 0.855556 0 Td 62.222222 Tz (shown ) Tj 2.138889 0 Td 34.027778 Tz (in ) Tj 0.777778 0 Td 45.37037 Tz (FIG ) Tj 1.108333 0 Td 32.407407 Tz (. ) Tj 0.447222 0 Td 53.472222 Tz (5C ) Tj 0.816667 0 Td 32.407407 Tz (, ) Tj 0.427778 0 Td 44.290123 Tz (the ) Tj 1.05 0 Td 51.851852 Tz (oxide ) Tj 1.808333 0 Td 46.018519 Tz (layer ) Tj 1.691667 0 Td 55.092593 Tz (104 ) Tj 1.322222 0 Td 34.027778 Tz (is ) Tj 0.661111 0 Td 50.231481 Tz (etched ) Tj 45.714286 0 0 45.714286 0 2751.76184 Tm 7.065625 0 Td 68.359375 Tz (rows ) Tj 1.6625 0 Td 32.8125 Tz (/ ) Tj 0.153125 0 Td 54.6875 Tz (arrays ) Tj 2.40625 0 Td 65.625 Tz (of ) Tj 1.05 0 Td 57.8125 Tz (through ) Tj 2.603125 0 Td 32.8125 Tz (- ) Tj 0.109375 0 Td 60.520833 Tz (holes ) Tj 2.275 0 Td 32.8125 Tz (\( ) Tj 0.2625 0 Td 53.125 Tz (release ) Tj 2.603125 0 Td 57.604167 Tz (holes ) Tj 1.8375 0 Td 32.8125 Tz (\) ) Tj 0.65625 0 Td 54.6875 Tz (112 ) Tj 1.575 0 Td 59.548611 Tz (formed ) Tj 3.15 0 Td 32.8125 Tz (5 ) Tj 1.05 0 Td 34.635417 Tz (to ) Tj 0.91875 0 Td 45.572917 Tz (form ) Tj 1.728125 0 Td 65.625 Tz (two ) Tj 1.4875 0 Td 56.054688 Tz (trenches ) Tj 2.821875 0 Td 66.840278 Tz (504 ) Tj 1.575 0 Td 50 Tz (therein ) Tj 2.49375 0 Td 59.548611 Tz (and ) Tj 1.4 0 Td 54.6875 Tz (are ) Tj 1.26875 0 Td 58.333333 Tz (spaced ) Tj 2.428125 0 Td 54.6875 Tz (apart ) Tj 1.946875 0 Td 47.395833 Tz (from ) Tj 51.552795 0 0 51.552795 0 2710.506321 Tm 6.323614 0 Td 50.514558 Tz (arranged ) Tj 2.676867 0 Td 44.337349 Tz (therein ) Tj 2.211325 0 Td 48.493976 Tz (such ) Tj 1.493614 0 Td 47.685743 Tz (that ) Tj 1.260843 0 Td 49.57162 Tz (the ) Tj 0.989277 0 Td 58.551986 Tz (waveguide ) Tj 3.394578 0 Td 46.87751 Tz (core ) Tj 1.435422 0 Td 49.57162 Tz (108 ) Tj 1.222048 0 Td 33.945783 Tz (is ) Tj 0.620723 0 Td 47.108434 Tz (located ) Tj 3.627349 0 Td 47.685743 Tz (each ) Tj 1.513012 0 Td 47.200803 Tz (other ) Tj 1.435422 0 Td 32.329317 Tz (. ) Tj 0.48494 0 Td 33.945783 Tz (In ) Tj 0.756506 0 Td 43.644578 Tz (this ) Tj 1.319036 0 Td 49.57162 Tz (regard ) Tj 1.920361 0 Td 32.329317 Tz (, ) Tj 0.407349 0 Td 49.57162 Tz (the ) Tj 1.12506 0 Td 54.959839 Tz (two ) Tj 1.319036 0 Td 49.706325 Tz (trenches ) Tj 2.676867 0 Td 54.959839 Tz (504 ) Tj 1.357831 0 Td 44.1834 Tz (are ) Tj 1.12506 0 Td 51.726908 Tz (spaced ) Tj 51.428571 0 0 51.428571 0 2668.695597 Tm 6.163889 0 Td 57.87037 Tz (between ) Tj 2.780556 0 Td 44.290123 Tz (the ) Tj 1.011111 0 Td 61.574074 Tz (two ) Tj 1.380556 0 Td 58.333333 Tz (rows ) Tj 1.380556 0 Td 32.407407 Tz (/ ) Tj 0.175 0 Td 48.611111 Tz (arrays ) Tj 1.944444 0 Td 53.472222 Tz (of ) Tj 0.836111 0 Td 50 Tz (through ) Tj 2.236111 0 Td 32.407407 Tz (- ) Tj 0.213889 0 Td 51.203704 Tz (holes ) Tj 1.866667 0 Td 48.611111 Tz (112 ) Tj 1.088889 0 Td 53.472222 Tz (as ) Tj 0.777778 0 Td 62.222222 Tz (shown ) Tj 3.441667 0 Td 47.314815 Tz (apart ) Tj 1.594444 0 Td 45.37037 Tz (for ) Tj 1.030556 0 Td 49.016204 Tz (defining ) Tj 2.566667 0 Td 60.493827 Tz (two ) Tj 1.283333 0 Td 55.092593 Tz (opposing ) Tj 2.916667 0 Td 47.890947 Tz (sidewalls ) Tj 2.838889 0 Td 53.472222 Tz (of ) Tj 0.816667 0 Td 49.691358 Tz (the ) Tj 1.088889 0 Td 39.969136 Tz (air ) Tj 1.011111 0 Td 40.509259 Tz (slot ) Tj 1.302778 0 Td 44.290123 Tz (106 ) Tj 45.714286 0 0 45.714286 0 2627.838777 Tm 7.13125 0 Td 32.8125 Tz (in ) Tj 0.809375 0 Td 55.902778 Tz (FIG ) Tj 1.35625 0 Td 32.8125 Tz (. ) Tj 0.48125 0 Td 32.8125 Tz (3 ) Tj 0.35 0 Td 32.8125 Tz (. ) Tj 0.415625 0 Td 41.927083 Tz (In ) Tj 0.940625 0 Td 55.729167 Tz (various ) Tj 2.603125 0 Td 65.293561 Tz (embodiments ) Tj 4.375 0 Td 32.8125 Tz (, ) Tj 0.503125 0 Td 49.826389 Tz (the ) Tj 1.1375 0 Td 65.219907 Tz (waveguide ) Tj 3.871875 0 Td 51.041667 Tz (core ) Tj 1.684375 0 Td 54.6875 Tz (108 ) Tj 2.734375 0 Td 41.927083 Tz (to ) Tj 0.74375 0 Td 74.739583 Tz (be ) Tj 1.1375 0 Td 61.979167 Tz (formed ) Tj 2.5375 0 Td 34.635417 Tz (in ) Tj 0.91875 0 Td 32.8125 Tz (a ) Tj 0.525 0 Td 60.885417 Tz (subsequent ) Tj 3.85 0 Td 45.572917 Tz (step ) Tj 1.509375 0 Td 32.8125 Tz (\( ) Tj 0.21875 0 Td 55.902778 Tz (see ) Tj 1.290625 0 Td 49.826389 Tz (FIG ) Tj 1.290625 0 Td 32.8125 Tz (. ) Tj 0.39375 0 Td 63.802083 Tz (5F ) Tj 0.91875 0 Td 32.8125 Tz (\) ) Tj 0.284375 0 Td 32.8125 Tz (. ) Tj 0.459375 0 Td 61.067708 Tz (That ) Tj 1.640625 0 Td 34.635417 Tz (is ) Tj 0.56875 0 Td 32.8125 Tz (, ) Tj 0.328125 0 Td 54.6875 Tz (the ) Tj 51.657143 0 0 51.657143 0 2586.733234 Tm 6.330199 0 Td 33.877212 Tz (is ) Tj 0.677544 0 Td 53.235619 Tz (shaped ) Tj 2.264934 0 Td 32.264012 Tz (in ) Tj 0.832412 0 Td 44.094149 Tz (the ) Tj 1.180863 0 Td 41.136615 Tz (form ) Tj 1.548673 0 Td 53.235619 Tz (of ) Tj 0.890487 0 Td 32.264012 Tz (a ) Tj 0.561394 0 Td 36.135693 Tz (strip ) Tj 1.258296 0 Td 32.264012 Tz (, ) Tj 0.464602 0 Td 49.471485 Tz (and ) Tj 1.316372 0 Td 20.971608 Tz (in ) Tj 0.696903 0 Td 50.815819 Tz (such ) Tj 1.606748 0 Td 58.075221 Tz (embodiments ) Tj 3.852323 0 Td 32.264012 Tz (, ) Tj 1.664823 0 Td 61.301622 Tz (two ) Tj 1.471239 0 Td 49.605918 Tz (trenches ) Tj 2.845686 0 Td 53.773353 Tz (504 ) Tj 1.393805 0 Td 43.018682 Tz (are ) Tj 1.238938 0 Td 50.412518 Tz (arranged ) Tj 2.865044 0 Td 41.943215 Tz (to ) Tj 0.948562 0 Td 53.235619 Tz (be ) Tj 1.064712 0 Td 51.622419 Tz (spaced ) Tj 2.381084 0 Td 46.460177 Tz (apart ) Tj 1.684181 0 Td 62.914823 Tz (by ) Tj 1.180863 0 Td 32.264012 Tz (a ) Tj 45.714286 0 0 45.714286 0 2543.95595 Tm 7.109375 0 Td 54.6875 Tz (the ) Tj 1.18125 0 Td 54.166667 Tz (optical ) Tj 2.40625 0 Td 66.840278 Tz (waveguide ) Tj 3.871875 0 Td 51.851852 Tz (structure ) Tj 3.128125 0 Td 60.763889 Tz (100 ) Tj 1.290625 0 Td 76.5625 Tz (may ) Tj 1.684375 0 Td 58.333333 Tz (thus ) Tj 1.509375 0 Td 74.739583 Tz (be ) Tj 1.1375 0 Td 51.041667 Tz (referred ) Tj 2.821875 0 Td 32.8125 Tz (to ) Tj 1.203125 0 Td 32.8125 Tz (10 ) Tj 1.028125 0 Td 55.143229 Tz (distance ) Tj 2.975 0 Td 54.6875 Tz (as ) Tj 0.875 0 Td 54.6875 Tz (desired ) Tj 2.75625 0 Td 49.826389 Tz (for ) Tj 1.159375 0 Td 48.4375 Tz (setting ) Tj 2.40625 0 Td 32.8125 Tz (a ) Tj 0.503125 0 Td 57.604167 Tz (width ) Tj 2.14375 0 Td 63.802083 Tz (of ) Tj 0.984375 0 Td 54.6875 Tz (the ) Tj 1.225 0 Td 43.75 Tz (air ) Tj 1.1375 0 Td 49.21875 Tz (slot ) Tj 1.53125 0 Td 49.826389 Tz (106 ) Tj 1.334375 0 Td 43.75 Tz (to ) Tj 61.428571 0 0 61.428571 0 2500.612167 Tm 5.306977 0 Td 43.410853 Tz (as ) Tj 0.716279 0 Td 42.054264 Tz (an ) Tj 0.765116 0 Td 40.310078 Tz (optical ) Tj 1.904651 0 Td 32.015504 Tz (strip ) Tj 1.172093 0 Td 49.741602 Tz (waveguide ) Tj 2.962791 0 Td 37.080103 Tz (structure ) Tj 2.1 0 Td 32.55814 Tz (. ) Tj 51.428571 0 0 51.428571 0 2498 Tm 25.180556 0 Td 63.194444 Tz (be ) Tj 1.030556 0 Td 55.632716 Tz (formed ) Tj 2.119444 0 Td 32.407407 Tz (. ) Tj 61.428571 0 0 61.428571 0 2456.083446 Tm 5.95814 0 Td 43.904158 Tz (Accordingly ) Tj 2.913953 0 Td 32.55814 Tz (, ) Tj 0.35814 0 Td 38.888889 Tz (the ) Tj 0.895349 0 Td 39.534884 Tz (optical ) Tj 1.855814 0 Td 47.631352 Tz (waveguide ) Tj 2.783721 0 Td 38.28596 Tz (structure ) Tj 2.360465 0 Td 43.410853 Tz (100 ) Tj 0.87907 0 Td 60.594315 Tz (may ) Tj 1.351163 0 Td 43.410853 Tz (be ) Tj 2.393023 0 Td 50.193798 Tz (Next ) Tj 1.204651 0 Td 32.55814 Tz (, ) Tj 0.325581 0 Td 43.410853 Tz (as ) Tj 0.716279 0 Td 51.007752 Tz (shown ) Tj 1.774419 0 Td 31.20155 Tz (in ) Tj 0.732558 0 Td 33.462532 Tz (FIG ) Tj 0.927907 0 Td 32.55814 Tz (. ) Tj 0.293023 0 Td 54.263566 Tz (5D ) Tj 0.748837 0 Td 32.55814 Tz (, ) Tj 0.423256 0 Td 32.55814 Tz (a ) Tj 0.406977 0 Td 37.170543 Tz (dielectric ) Tj 2.360465 0 Td 43.75 Tz (material ) Tj 2.344186 0 Td 41.375969 Tz (such ) Tj 1.237209 0 Td 43.410853 Tz (as ) Tj 51.587302 0 0 51.587302 0 2419.383091 Tm 6.319385 0 Td 46.038462 Tz (referred ) Tj 2.597538 0 Td 33.923077 Tz (to ) Tj 0.891692 0 Td 42 Tz (as ) Tj 0.930462 0 Td 32.307692 Tz (a ) Tj 0.620308 0 Td 41.192308 Tz (free ) Tj 1.124308 0 Td 32.307692 Tz (- ) Tj 0.193846 0 Td 50.884615 Tz (standing ) Tj 2.752615 0 Td 48 Tz (optical ) Tj 2.229231 0 Td 58.512821 Tz (waveguide ) Tj 3.528 0 Td 45.948718 Tz (structure ) Tj 4.051385 0 Td 53.307692 Tz (aluminum ) Tj 3.101538 0 Td 51.692308 Tz (oxide ) Tj 1.860923 0 Td 32.307692 Tz (\( ) Tj 0.213231 0 Td 32.307692 Tz (e ) Tj 0.271385 0 Td 32.307692 Tz (. ) Tj 0.290769 0 Td 32.307692 Tz (g ) Tj 0.271385 0 Td 32.307692 Tz (. ) Tj 0.213231 0 Td 32.307692 Tz (, ) Tj 0.407077 0 Td 63 Tz (A1 ) Tj 0.717231 0 Td 32.307692 Tz (, ) Tj 0.232615 0 Td 74.307692 Tz (0z ) Tj 0.814154 0 Td 32.307692 Tz (\) ) Tj 0.484615 0 Td 32.307692 Tz (is ) Tj 0.620308 0 Td 50.974359 Tz (deposited ) Tj 3.024 0 Td 44.826923 Tz (directly ) Tj 2.442462 0 Td 52.5 Tz (over ) Tj 1.512 0 Td 49.538462 Tz (the ) Tj 51.428571 0 0 51.428571 0 2377.690577 Tm 6.338889 0 Td 55.092593 Tz (and ) Tj 1.302778 0 Td 45.37037 Tz (can ) Tj 1.186111 0 Td 53.472222 Tz (be ) Tj 0.913889 0 Td 49.583333 Tz (configured ) Tj 3.344444 0 Td 32.407407 Tz (to ) Tj 0.777778 0 Td 53.472222 Tz (be ) Tj 0.933333 0 Td 45.775463 Tz (suitable ) Tj 2.547222 0 Td 44.290123 Tz (for ) Tj 1.088889 0 Td 49.691358 Tz (gas ) Tj 1.108333 0 Td 50 Tz (sensing ) Tj 2.430556 0 Td 32.407407 Tz (in ) Tj 0.544444 0 Td 32.407407 Tz (, ) Tj 0.505556 0 Td 44.290123 Tz (for ) Tj 2.197222 0 Td 58.333333 Tz (waveguide ) Tj 3.519444 0 Td 46.990741 Tz (core ) Tj 1.594444 0 Td 49.691358 Tz (108 ) Tj 1.322222 0 Td 56.17284 Tz (and ) Tj 1.380556 0 Td 43.209877 Tz (the ) Tj 1.127778 0 Td 51.851852 Tz (oxide ) Tj 1.944444 0 Td 46.666667 Tz (layer ) Tj 1.769444 0 Td 55.092593 Tz (104 ) Tj 1.458333 0 Td 37.808642 Tz (for ) Tj 1.108333 0 Td 53.240741 Tz (forming ) Tj 55.714286 0 0 55.714286 0 2336.152797 Tm 5.851282 0 Td 51.709402 Tz (example ) Tj 2.24359 0 Td 32.905983 Tz (, ) Tj 0.520513 0 Td 43.874644 Tz (the ) Tj 1.041026 0 Td 60.826211 Tz (Mid ) Tj 1.238462 0 Td 32.905983 Tz (- ) Tj 0.233333 0 Td 32.905983 Tz (IR ) Tj 0.879487 0 Td 50.25641 Tz (wavelength ) Tj 3.535897 0 Td 42.877493 Tz (region ) Tj 1.651282 0 Td 32.905983 Tz (. ) Tj 0.502564 0 Td 57.58547 Tz (Compared ) Tj 3.176923 0 Td 22.435897 Tz (to ) Tj 0.807692 0 Td 32.905983 Tz (a ) Tj 0.717949 0 Td 32.905983 Tz (15 ) Tj 0.951282 0 Td 39.487179 Tz (dielectric ) Tj 2.764103 0 Td 38.888889 Tz (thin ) Tj 1.4 0 Td 30.662393 Tz (film ) Tj 1.292308 0 Td 47.863248 Tz (layer ) Tj 1.848718 0 Td 43.874644 Tz (110 ) Tj 1.130769 0 Td 44.444444 Tz (thereon ) Tj 2.010256 0 Td 32.905983 Tz (. ) Tj 0.520513 0 Td 48.290598 Tz (Various ) Tj 2.315385 0 Td 45.470085 Tz (deposition ) Tj 51.746032 0 0 51.746032 0 2295.377027 Tm 6.3 0 Td 51.533742 Tz (conventional ) Tj 4.116258 0 Td 36.717791 Tz (strip ) Tj 1.642638 0 Td 57.97546 Tz (waveguide ) Tj 3.594479 0 Td 45.449898 Tz (structure ) Tj 2.879448 0 Td 47.776074 Tz (buried ) Tj 2.261043 0 Td 33.819018 Tz (in ) Tj 0.985583 0 Td 41.871166 Tz (silicon ) Tj 3.304601 0 Td 51.855828 Tz (techniques ) Tj 3.285276 0 Td 66.349693 Tz (known ) Tj 2.299693 0 Td 33.819018 Tz (in ) Tj 0.850307 0 Td 44.018405 Tz (the ) Tj 1.062883 0 Td 44.018405 Tz (art ) Tj 0.946933 0 Td 71.932515 Tz (may ) Tj 1.526687 0 Td 62.806748 Tz (be ) Tj 1.024233 0 Td 47.392638 Tz (applied ) Tj 2.396319 0 Td 32.208589 Tz (to ) Tj 0.773006 0 Td 47.852761 Tz (deposit ) Tj 2.357669 0 Td 44.018405 Tz (the ) Tj 51.517857 0 0 51.517857 0 2253.681275 Tm 6.308492 0 Td 52.224148 Tz (dioxide ) Tj 2.484575 0 Td 32.351242 Tz (\( ) Tj 0.135875 0 Td 49.605238 Tz (SiO ) Tj 1.261698 0 Td 32.351242 Tz (, ) Tj 0.213518 0 Td 32.351242 Tz (\) ) Tj 0.562912 0 Td 32.351242 Tz (\( ) Tj 0.213518 0 Td 32.351242 Tz (e ) Tj 0.27175 0 Td 32.351242 Tz (. ) Tj 0.291161 0 Td 32.351242 Tz (g ) Tj 0.27175 0 Td 32.351242 Tz (. ) Tj 0.213518 0 Td 32.351242 Tz (, ) Tj 0.465858 0 Td 44.213364 Tz (see ) Tj 1.125823 0 Td 49.605238 Tz (FIG ) Tj 1.203466 0 Td 32.351242 Tz (. ) Tj 0.562912 0 Td 32.351242 Tz (2 ) Tj 0.27175 0 Td 32.351242 Tz (\) ) Tj 0.213518 0 Td 32.351242 Tz (, ) Tj 0.485269 0 Td 44.213364 Tz (the ) Tj 1.184055 0 Td 41.247834 Tz (free ) Tj 1.125823 0 Td 32.351242 Tz (- ) Tj 0.194107 0 Td 50.953206 Tz (standing ) Tj 2.698094 0 Td 48.064702 Tz (optical ) Tj 3.513345 0 Td 43.350664 Tz (dielectric ) Tj 2.756326 0 Td 52.975159 Tz (material ) Tj 2.717504 0 Td 46.909301 Tz (such ) Tj 1.416984 0 Td 53.379549 Tz (as ) Tj 0.77643 0 Td 54.997111 Tz (but ) Tj 1.087002 0 Td 54.997111 Tz (not ) Tj 1.184055 0 Td 47.602542 Tz (limited ) Tj 2.232236 0 Td 33.968804 Tz (to ) Tj 0.757019 0 Td 54.18833 Tz (chemical ) Tj 2.87279 0 Td 53.056037 Tz (vapor ) Tj 58.571429 0 0 58.571429 0 2209.652695 Tm 5.446341 0 Td 53.116531 Tz (waveguide ) Tj 3.209756 0 Td 39.521229 Tz (structure ) Tj 2.543902 0 Td 44.579946 Tz (100 ) Tj 1.195122 0 Td 45.884146 Tz (provides ) Tj 2.492683 0 Td 48.943089 Tz (lower ) Tj 1.77561 0 Td 42.682927 Tz (optical ) Tj 2.082927 0 Td 35.569106 Tz (loss ) Tj 1.212195 0 Td 50.271003 Tz (and ) Tj 2.202439 0 Td 43.821138 Tz (deposition ) Tj 2.987805 0 Td 34.146341 Tz (\( ) Tj 0.153659 0 Td 65.447154 Tz (CVD ) Tj 1.4 0 Td 34.146341 Tz (\) ) Tj 0.460976 0 Td 44.579946 Tz (and ) Tj 1.229268 0 Td 45.528455 Tz (atomic ) Tj 1.963415 0 Td 40.406504 Tz (layer ) Tj 1.570732 0 Td 42.682927 Tz (deposition ) Tj 2.953659 0 Td 34.146341 Tz (\( ) Tj 0.153659 0 Td 65.447154 Tz (ALD ) Tj 1.314634 0 Td 34.146341 Tz (\) ) Tj 0.221951 0 Td 34.146341 Tz (. ) Tj 0.409756 0 Td 34.146341 Tz (In ) Tj 51.632653 0 0 51.632653 0 2169.455396 Tm 6.216996 0 Td 57.457181 Tz (wider ) Tj 1.839921 0 Td 53.583663 Tz (wavelength ) Tj 3.583004 0 Td 48.687967 Tz (transmission ) Tj 3.834783 0 Td 57.02679 Tz (window ) Tj 2.227273 0 Td 32.279315 Tz (. ) Tj 0.445455 0 Td 49.853609 Tz (Therefore ) Tj 2.769565 0 Td 32.279315 Tz (, ) Tj 0.348617 0 Td 49.494949 Tz (the ) Tj 1.103953 0 Td 41.963109 Tz (free ) Tj 1.12332 0 Td 32.279315 Tz (- ) Tj 1.665613 0 Td 40.349144 Tz (this ) Tj 1.220158 0 Td 47.1278 Tz (deposition ) Tj 2.963241 0 Td 32.279315 Tz (, ) Tj 0.329249 0 Td 49.494949 Tz (the ) Tj 1.103953 0 Td 43.254282 Tz (dielectric ) Tj 2.769565 0 Td 52.857378 Tz (material ) Tj 2.498419 0 Td 59.393939 Tz (would ) Tj 2.149802 0 Td 41.963109 Tz (also ) Tj 1.375099 0 Td 29.051383 Tz (fill ) Tj 0.871542 0 Td 44.115064 Tz (the ) Tj 1.04585 0 Td 60.254721 Tz (two ) Tj 61.428571 0 0 61.428571 0 2125.210736 Tm 5.323256 0 Td 42.732558 Tz (standing ) Tj 2.425581 0 Td 40.310078 Tz (optical ) Tj 1.953488 0 Td 48.535745 Tz (waveguide ) Tj 3.027907 0 Td 38.28596 Tz (structure ) Tj 2.588372 0 Td 45.219638 Tz (100 ) Tj 0.765116 0 Td 32.55814 Tz (, ) Tj 0.569767 0 Td 38.888889 Tz (for ) Tj 1.025581 0 Td 48.062016 Tz (example ) Tj 2.051163 0 Td 32.55814 Tz (, ) Tj 0.569767 0 Td 32.55814 Tz (20 ) Tj 0.830233 0 Td 42.393411 Tz (trenches ) Tj 2.197674 0 Td 49.741602 Tz (504 ) Tj 1.172093 0 Td 39.922481 Tz (created ) Tj 1.904651 0 Td 31.20155 Tz (in ) Tj 0.683721 0 Td 32.55814 Tz (a ) Tj 0.35814 0 Td 45.784884 Tz (previous ) Tj 2.376744 0 Td 37.984496 Tz (step ) Tj 1.172093 0 Td 32.55814 Tz (\( ) Tj 0.227907 0 Td 38.888889 Tz (see ) Tj 0.944186 0 Td 38.888889 Tz (FIG ) Tj 0.927907 0 Td 32.55814 Tz (. ) Tj 0.309302 0 Td 54.263566 Tz (5C ) Tj 0.748837 0 Td 32.55814 Tz (\) ) Tj 0.423256 0 Td 32.55814 Tz (so ) Tj 0.683721 0 Td 42.054264 Tz (as ) Tj 45.714286 0 0 45.714286 0 2088.203093 Tm 7.0875 0 Td 53.776042 Tz (successfully ) Tj 4.221875 0 Td 65.625 Tz (overcomes ) Tj 3.85 0 Td 54.6875 Tz (the ) Tj 1.246875 0 Td 51.40625 Tz (limitation ) Tj 3.5 0 Td 52.864583 Tz (from ) Tj 1.8375 0 Td 54.6875 Tz (the ) Tj 1.246875 0 Td 55.902778 Tz (Sio ) Tj 1.35625 0 Td 32.8125 Tz (, ) Tj 0.415625 0 Td 66.536458 Tz (mate ) Tj 3.63125 0 Td 41.927083 Tz (to ) Tj 0.9625 0 Td 48.307292 Tz (form ) Tj 1.8375 0 Td 65.625 Tz (two ) Tj 1.53125 0 Td 55.143229 Tz (sidewall ) Tj 2.996875 0 Td 53.776042 Tz (portions ) Tj 2.953125 0 Td 61.979167 Tz (130 ) Tj 1.421875 0 Td 64.166667 Tz (which ) Tj 2.340625 0 Td 49.826389 Tz (are ) Tj 1.246875 0 Td 58.940972 Tz (spaced ) Tj 2.5375 0 Td 55.416667 Tz (apart ) Tj 1.640625 0 Td 32.8125 Tz (. ) Tj 55.714286 0 0 55.714286 0 2040.544402 Tm 5.815385 0 Td 39.636752 Tz (rial ) Tj 1.112821 0 Td 43.974359 Tz (associated ) Tj 2.8 0 Td 47.115385 Tz (with ) Tj 1.471795 0 Td 47.863248 Tz (conventional ) Tj 3.625641 0 Td 60.826211 Tz (SOI ) Tj 1.005128 0 Td 32.905983 Tz (- ) Tj 0.269231 0 Td 48.461538 Tz (based ) Tj 1.633333 0 Td 52.350427 Tz (waveguides ) Tj 3.212821 0 Td 32.905983 Tz (. ) Tj 0.287179 0 Td 64.316239 Tz (As ) Tj 2.153846 0 Td 50.25641 Tz (These ) Tj 1.920513 0 Td 54.843305 Tz (two ) Tj 1.471795 0 Td 45.99359 Tz (sidewall ) Tj 2.530769 0 Td 46.741453 Tz (portions ) Tj 2.638462 0 Td 49.85755 Tz (130 ) Tj 1.382051 0 Td 53.846154 Tz (would ) Tj 2.082051 0 Td 42.179487 Tz (constitute ) Tj 3.051282 0 Td 48.860399 Tz (two ) Tj 61.428571 0 0 61.428571 0 1999.954244 Tm 5.290698 0 Td 38.662791 Tz (will ) Tj 1.123256 0 Td 54.263566 Tz (be ) Tj 0.781395 0 Td 42.50646 Tz (described ) Tj 2.572093 0 Td 37.44186 Tz (later ) Tj 1.074419 0 Td 32.55814 Tz (, ) Tj 0.390698 0 Td 32.55814 Tz (an ) Tj 0.748837 0 Td 40.697674 Tz (optical ) Tj 1.888372 0 Td 44.315245 Tz (gas ) Tj 0.976744 0 Td 43.410853 Tz (sensor ) Tj 1.774419 0 Td 42.576029 Tz (incorporating ) Tj 4.525581 0 Td 46.463178 Tz (opposing ) Tj 2.539535 0 Td 40.999139 Tz (sidewalls ) Tj 2.474419 0 Td 54.263566 Tz (of ) Tj 0.830233 0 Td 44.315245 Tz (the ) Tj 1.025581 0 Td 33.462532 Tz (air ) Tj 0.993023 0 Td 33.914729 Tz (slot ) Tj 1.172093 0 Td 37.984496 Tz (106 ) Tj 1.139535 0 Td 32.55814 Tz (to ) Tj 0.716279 0 Td 54.263566 Tz (be ) Tj 0.960465 0 Td 43.863049 Tz (formed ) Tj 1.676744 0 Td 32.55814 Tz (. ) Tj 0.406977 0 Td 63.75969 Tz (As ) Tj 51.680672 0 0 51.680672 0 1962.128933 Tm 6.269268 0 Td 49.448961 Tz (the ) Tj 1.180325 0 Td 45.149051 Tz (free ) Tj 1.122276 0 Td 32.249322 Tz (- ) Tj 0.174146 0 Td 51.195799 Tz (standing ) Tj 2.689593 0 Td 48.373984 Tz (optical ) Tj 2.089756 0 Td 59.84041 Tz (waveguide ) Tj 3.444228 0 Td 45.507377 Tz (structure ) Tj 2.86374 0 Td 49.448961 Tz (100 ) Tj 1.064228 0 Td 70.948509 Tz (may ) Tj 1.644715 0 Td 41.924119 Tz (also ) Tj 2.438049 0 Td 57.332129 Tz (mentioned ) Tj 3.424878 0 Td 50.792683 Tz (hereinbefore ) Tj 3.695772 0 Td 32.249322 Tz (, ) Tj 0.541789 0 Td 47.084011 Tz (other ) Tj 1.741463 0 Td 45.955285 Tz (suitable ) Tj 2.476748 0 Td 43.536585 Tz (dielectric ) Tj 2.941138 0 Td 49.448961 Tz (materials ) Tj 45.714286 0 0 45.714286 0 1920.707837 Tm 7 0 Td 74.739583 Tz (be ) Tj 1.35625 0 Td 63.304924 Tz (implemented ) Tj 4.68125 0 Td 59.953704 Tz (according ) Tj 3.828125 0 Td 55.729167 Tz (various ) Tj 2.865625 0 Td 65.625 Tz (embodiments ) Tj 4.9 0 Td 52.864583 Tz (of ) Tj 1.159375 0 Td 49.826389 Tz (the ) Tj 1.44375 0 Td 52.864583 Tz (25 ) Tj 1.203125 0 Td 49.826389 Tz (for ) Tj 1.05 0 Td 54.6875 Tz (the ) Tj 1.159375 0 Td 57.421875 Tz (material ) Tj 2.909375 0 Td 55.416667 Tz (layer ) Tj 1.815625 0 Td 55.902778 Tz (110 ) Tj 1.290625 0 Td 76.5625 Tz (may ) Tj 1.61875 0 Td 49.21875 Tz (also ) Tj 1.4 0 Td 74.739583 Tz (be ) Tj 1.05 0 Td 52.864583 Tz (selected ) Tj 2.646875 0 Td 32.8125 Tz (, ) Tj 0.415625 0 Td 56.30787 Tz (including ) Tj 3.128125 0 Td 66.840278 Tz (but ) Tj 51.534392 0 0 51.534392 0 1878.705171 Tm 6.306468 0 Td 51.74538 Tz (present ) Tj 2.522587 0 Td 47.792608 Tz (invention ) Tj 2.61961 0 Td 32.340862 Tz (, ) Tj 0.582136 0 Td 45.277207 Tz (offering ) Tj 2.639014 0 Td 49.589322 Tz (the ) Tj 1.241889 0 Td 49.050308 Tz (sensor ) Tj 2.173306 0 Td 46.085729 Tz (with ) Tj 1.668789 0 Td 40.749487 Tz (ultra ) Tj 1.338912 0 Td 32.340862 Tz (- ) Tj 0.155236 0 Td 60.061602 Tz (compact ) Tj 3.880903 0 Td 54.979466 Tz (not ) Tj 1.377721 0 Td 44.353183 Tz (limited ) Tj 2.250924 0 Td 42.043121 Tz (to ) Tj 0.912012 0 Td 42.967146 Tz (silicon ) Tj 2.212115 0 Td 45.277207 Tz (nitride ) Tj 2.212115 0 Td 32.340862 Tz (\( ) Tj 0.271663 0 Td 32.340862 Tz (e ) Tj 0.271663 0 Td 32.340862 Tz (. ) Tj 0.291068 0 Td 32.340862 Tz (g ) Tj 0.271663 0 Td 32.340862 Tz (. ) Tj 0.135832 0 Td 32.340862 Tz (, ) Tj 0.523922 0 Td 55.626283 Tz (SizN4 ) Tj 1.727002 0 Td 32.340862 Tz (\) ) Tj 0.194045 0 Td 32.340862 Tz (, ) Tj 0.523922 0 Td 54.620123 Tz (germanium ) Tj 3.259959 0 Td 32.340862 Tz (, ) Tj 0.446304 0 Td 53.362423 Tz (or ) Tj 51.428571 0 0 51.428571 0 1837.363019 Tm 6.319444 0 Td 42.939815 Tz (size ) Tj 1.088889 0 Td 32.407407 Tz (, ) Tj 0.447222 0 Td 47.800926 Tz (cost ) Tj 1.4 0 Td 47.364672 Tz (effectiveness ) Tj 3.752778 0 Td 32.407407 Tz (, ) Tj 0.369444 0 Td 55.092593 Tz (and ) Tj 1.263889 0 Td 54.444444 Tz (wafer ) Tj 1.730556 0 Td 32.407407 Tz (- ) Tj 0.194444 0 Td 46.666667 Tz (level ) Tj 1.633333 0 Td 55.452675 Tz (packaging ) Tj 3.266667 0 Td 48.206019 Tz (capabile ) Tj 3.752778 0 Td 45.833333 Tz (silicon ) Tj 2.275 0 Td 32.407407 Tz (\( ) Tj 0.213889 0 Td 32.407407 Tz (e ) Tj 0.272222 0 Td 32.407407 Tz (. ) Tj 0.291667 0 Td 32.407407 Tz (g ) Tj 0.272222 0 Td 32.407407 Tz (. ) Tj 0.213889 0 Td 32.407407 Tz (, ) Tj 0.408333 0 Td 47.685185 Tz (crystal ) Tj 2.216667 0 Td 43.75 Tz (or ) Tj 0.758333 0 Td 61.574074 Tz (amorphous ) Tj 3.558333 0 Td 53.472222 Tz (Si ) Tj 0.622222 0 Td 32.407407 Tz (\) ) Tj 0.213889 0 Td 32.407407 Tz (. ) Tj 51.428571 0 0 51.428571 0 1795.495935 Tm 6.377778 0 Td 34.567901 Tz (ity ) Tj 0.680556 0 Td 32.407407 Tz (. ) Tj 0.505556 0 Td 32.407407 Tz (It ) Tj 0.641667 0 Td 49.691358 Tz (can ) Tj 1.225 0 Td 64.814815 Tz (be ) Tj 1.088889 0 Td 51.203704 Tz (understood ) Tj 3.480556 0 Td 46.180556 Tz (that ) Tj 1.4 0 Td 44.290123 Tz (the ) Tj 1.127778 0 Td 48.148148 Tz (optical ) Tj 2.333333 0 Td 49.691358 Tz (gas ) Tj 1.166667 0 Td 52.932099 Tz (sensor ) Tj 2.177778 0 Td 55.092593 Tz (has ) Tj 1.302778 0 Td 32.407407 Tz (a ) Tj 2.411111 0 Td 64.00463 Tz (Next ) Tj 1.438889 0 Td 32.407407 Tz (, ) Tj 0.602778 0 Td 43.75 Tz (as ) Tj 0.913889 0 Td 62.222222 Tz (shown ) Tj 2.275 0 Td 32.407407 Tz (in ) Tj 0.913889 0 Td 45.37037 Tz (FIG ) Tj 1.108333 0 Td 32.407407 Tz (. ) Tj 0.583333 0 Td 53.472222 Tz (5E ) Tj 0.816667 0 Td 32.407407 Tz (, ) Tj 0.486111 0 Td 49.691358 Tz (the ) Tj 1.127778 0 Td 52.256944 Tz (material ) Tj 2.877778 0 Td 46.018519 Tz (layer ) Tj 1.847222 0 Td 49.691358 Tz (110 ) Tj 1.361111 0 Td 34.027778 Tz (is ) Tj 51.632653 0 0 51.632653 0 1756.23169 Tm 6.216996 0 Td 62.944664 Tz (wide ) Tj 1.898024 0 Td 43.346509 Tz (variety ) Tj 2.362846 0 Td 53.26087 Tz (of ) Tj 1.007115 0 Td 48.418972 Tz (applications ) Tj 3.85415 0 Td 49.853609 Tz (including ) Tj 2.711462 0 Td 32.279315 Tz (, ) Tj 0.63913 0 Td 44.115064 Tz (for ) Tj 1.12332 0 Td 57.641634 Tz (example ) Tj 2.788933 0 Td 59.178744 Tz (and ) Tj 2.614625 0 Td 47.342995 Tz (etched ) Tj 2.16917 0 Td 43.577075 Tz (to ) Tj 0.968379 0 Td 45.191041 Tz (form ) Tj 1.762451 0 Td 32.279315 Tz (a ) Tj 0.658498 0 Td 43.039087 Tz (plurality ) Tj 2.788933 0 Td 53.26087 Tz (of ) Tj 0.929644 0 Td 52.108037 Tz (through ) Tj 2.324111 0 Td 32.279315 Tz (- ) Tj 0.116206 0 Td 52.29249 Tz (holes ) Tj 2.0917 0 Td 49.494949 Tz (112 ) Tj 1.336364 0 Td 33.893281 Tz (in ) Tj 0.910277 0 Td 38.735178 Tz (fluid ) Tj 51.428571 0 0 51.428571 0 1712.262989 Tm 6.241667 0 Td 55.092593 Tz (without ) Tj 2.644444 0 Td 44.722222 Tz (limitation ) Tj 2.8 0 Td 32.407407 Tz (, ) Tj 0.583333 0 Td 50.771605 Tz (indoor ) Tj 2.197222 0 Td 38.888889 Tz (air ) Tj 1.108333 0 Td 43.981481 Tz (quality ) Tj 2.236111 0 Td 49.789562 Tz (supervision ) Tj 3.383333 0 Td 32.407407 Tz (, ) Tj 0.525 0 Td 47.685185 Tz (disease ) Tj 2.566667 0 Td 32.407407 Tz (30 ) Tj 1.030556 0 Td 56.089744 Tz (communication ) Tj 4.705556 0 Td 46.180556 Tz (with ) Tj 1.477778 0 Td 49.691358 Tz (the ) Tj 1.05 0 Td 48.611111 Tz (portion ) Tj 2.469444 0 Td 50.771605 Tz (105 ) Tj 1.186111 0 Td 53.472222 Tz (of ) Tj 0.816667 0 Td 49.691358 Tz (the ) Tj 1.069444 0 Td 53.796296 Tz (oxide ) Tj 1.866667 0 Td 46.666667 Tz (layer ) Tj 1.691667 0 Td 55.092593 Tz (104 ) Tj 55.714286 0 0 55.714286 0 1666.498959 Tm 5.815385 0 Td 45.868946 Tz (diagnosis ) Tj 2.764103 0 Td 49.85755 Tz (and ) Tj 1.220513 0 Td 46.866097 Tz (treatment ) Tj 2.494872 0 Td 32.905983 Tz (, ) Tj 0.394872 0 Td 49.358974 Tz (personal ) Tj 2.423077 0 Td 52.564103 Tz (medical ) Tj 2.494872 0 Td 41.132479 Tz (care ) Tj 1.058974 0 Td 32.905983 Tz (, ) Tj 0.412821 0 Td 49.85755 Tz (and ) Tj 1.220513 0 Td 46.068376 Tz (indus ) Tj 1.453846 0 Td 32.905983 Tz (- ) Tj 1.561538 0 Td 31.410256 Tz (to ) Tj 0.825641 0 Td 55.34188 Tz (be ) Tj 0.951282 0 Td 56.410256 Tz (removed ) Tj 2.728205 0 Td 44.871795 Tz (so ) Tj 0.915385 0 Td 41.880342 Tz (as ) Tj 0.933333 0 Td 32.905983 Tz (to ) Tj 0.807692 0 Td 42.877493 Tz (create ) Tj 1.974359 0 Td 32.905983 Tz (a ) Tj 0.628205 0 Td 41.452991 Tz (release ) Tj 2.171795 0 Td 55.840456 Tz (window ) Tj 2.548718 0 Td 32.905983 Tz (in ) Tj 0.84359 0 Td 43.874644 Tz (the ) Tj 55.714286 0 0 55.714286 0 1628.25974 Tm 5.833333 0 Td 36.495726 Tz (trial ) Tj 1.292308 0 Td 40.883191 Tz (safety ) Tj 1.54359 0 Td 32.905983 Tz (. ) Tj 51.428571 0 0 51.428571 0 1627.982301 Tm 25.161111 0 Td 53.06713 Tz (material ) Tj 2.741667 0 Td 46.666667 Tz (layer ) Tj 1.730556 0 Td 48.611111 Tz (110 ) Tj 0.913889 0 Td 32.407407 Tz (. ) Tj 0.505556 0 Td 32.407407 Tz (In ) Tj 0.777778 0 Td 43.209877 Tz (the ) Tj 1.069444 0 Td 57.407407 Tz (example ) Tj 2.644444 0 Td 61.898148 Tz (embodiment ) Tj 3.694444 0 Td 32.407407 Tz (, ) Tj 0.35 0 Td 49.691358 Tz (the ) Tj 1.088889 0 Td 47.222222 Tz (release ) Tj 67.142857 0 0 67.142857 0 1582.592233 Tm 5.43617 0 Td 33.92435 Tz (FIG ) Tj 0.848936 0 Td 34.751773 Tz (. ) Tj 0.282979 0 Td 34.751773 Tz (4 ) Tj 0.506383 0 Td 35.815603 Tz (depicts ) Tj 1.668085 0 Td 34.751773 Tz (a ) Tj 0.431915 0 Td 37.588652 Tz (general ) Tj 1.77234 0 Td 31.028369 Tz (flow ) Tj 1.057447 0 Td 39.007092 Tz (diagram ) Tj 1.965957 0 Td 43.439716 Tz (of ) Tj 0.640426 0 Td 34.751773 Tz (a ) Tj 0.297872 0 Td 46.749409 Tz (method ) Tj 1.861702 0 Td 43.853428 Tz (400 ) Tj 0.982979 0 Td 42.198582 Tz (of ) Tj 1.593617 0 Td 45.094563 Tz (window ) Tj 2.040426 0 Td 22.340426 Tz (is ) Tj 0.446809 0 Td 33.510638 Tz (in ) Tj 0.670213 0 Td 33.096927 Tz (the ) Tj 0.908511 0 Td 32.269504 Tz (form ) Tj 1.131915 0 Td 43.439716 Tz (of ) Tj 0.655319 0 Td 43.853428 Tz (two ) Tj 1.057447 0 Td 44.680851 Tz (rows ) Tj 1.02766 0 Td 34.751773 Tz (/ ) Tj 0.223404 0 Td 36.820331 Tz (arrays ) Tj 1.548936 0 Td 32.269504 Tz (of ) Tj 0.551064 0 Td 39.716312 Tz (through ) Tj 1.742553 0 Td 34.751773 Tz (- ) Tj 0.193617 0 Td 40.70922 Tz (holes ) Tj 55.714286 0 0 55.714286 0 1543.26178 Tm 5.815385 0 Td 43.240093 Tz (fabricating ) Tj 3.176923 0 Td 43.874644 Tz (the ) Tj 1.005128 0 Td 44.017094 Tz (optical ) Tj 1.974359 0 Td 55.508072 Tz (waveguide ) Tj 3.248718 0 Td 41.215575 Tz (structure ) Tj 2.476923 0 Td 49.525166 Tz (according ) Tj 2.925641 0 Td 31.410256 Tz (to ) Tj 0.717949 0 Td 44.871795 Tz (an ) Tj 2.046154 0 Td 44.871795 Tz (112 ) Tj 1.166667 0 Td 31.410256 Tz (in ) Tj 0.7 0 Td 43.874644 Tz (the ) Tj 0.897436 0 Td 49.358974 Tz (material ) Tj 2.602564 0 Td 44.273504 Tz (layer ) Tj 1.669231 0 Td 43.874644 Tz (110 ) Tj 1.041026 0 Td 41.880342 Tz (with ) Tj 1.417949 0 Td 43.874644 Tz (the ) Tj 1.023077 0 Td 53.846154 Tz (waveguide ) Tj 3.141026 0 Td 47.863248 Tz (core ) Tj 1.471795 0 Td 44.871795 Tz (108 ) Tj 45.714286 0 0 45.714286 0 1503.4 Tm 7.175 0 Td 67.8125 Tz (embodiment ) Tj 4.528125 0 Td 52.864583 Tz (of ) Tj 1.071875 0 Td 54.6875 Tz (the ) Tj 1.509375 0 Td 57.8125 Tz (present ) Tj 2.84375 0 Td 53.877315 Tz (invention ) Tj 3.084375 0 Td 32.8125 Tz (. ) Tj 0.809375 0 Td 59.548611 Tz (The ) Tj 1.378125 0 Td 71.09375 Tz (method ) Tj 3.128125 0 Td 60.763889 Tz (400 ) Tj 1.728125 0 Td 41.927083 Tz (35 ) Tj 1.1375 0 Td 54.6875 Tz (located ) Tj 2.515625 0 Td 63.020833 Tz (between ) Tj 2.93125 0 Td 54.6875 Tz (the ) Tj 1.203125 0 Td 65.625 Tz (two ) Tj 1.465625 0 Td 67.447917 Tz (rows ) Tj 1.553125 0 Td 32.8125 Tz (/ ) Tj 0.240625 0 Td 55.295139 Tz (arrays ) Tj 2.121875 0 Td 65.625 Tz (of ) Tj 0.940625 0 Td 57.291667 Tz (through ) Tj 2.625 0 Td 60.520833 Tz (holes ) Tj 2.078125 0 Td 54.6875 Tz (112 ) Tj 1.225 0 Td 63.802083 Tz (as ) Tj 51.552795 0 0 51.552795 0 1463.392049 Tm 6.323614 0 Td 53.882195 Tz (comprises ) Tj 3.161807 0 Td 32.329317 Tz (a ) Tj 0.543133 0 Td 40.411647 Tz (step ) Tj 1.377229 0 Td 59.270415 Tz (402 ) Tj 1.319036 0 Td 53.343373 Tz (of ) Tj 0.834096 0 Td 52.445337 Tz (providing ) Tj 3.064819 0 Td 32.329317 Tz (a ) Tj 0.523735 0 Td 45.979473 Tz (structure ) Tj 2.793253 0 Td 53.666667 Tz (comprising ) Tj 3.510964 0 Td 32.329317 Tz (a ) Tj 1.823373 0 Td 44.1834 Tz (for ) Tj 1.105663 0 Td 54.497992 Tz (example ) Tj 2.73506 0 Td 41.440307 Tz (illustrated ) Tj 3.14241 0 Td 32.329317 Tz (in ) Tj 0.834096 0 Td 44.1834 Tz (FIG ) Tj 1.183253 0 Td 32.329317 Tz (. ) Tj 0.504337 0 Td 32.329317 Tz (3 ) Tj 0.349157 0 Td 32.329317 Tz (. ) Tj 0.504337 0 Td 48.817269 Tz (Thereafter ) Tj 2.909639 0 Td 32.329317 Tz (, ) Tj 0.446145 0 Td 53.343373 Tz (as ) Tj 0.950482 0 Td 62.072289 Tz (shown ) Tj 2.17253 0 Td 32.329317 Tz (in ) Tj 55.714286 0 0 55.714286 0 1417.888415 Tm 5.815385 0 Td 42.877493 Tz (substrate ) Tj 2.853846 0 Td 50.854701 Tz (102 ) Tj 0.933333 0 Td 32.905983 Tz (, ) Tj 0.646154 0 Td 32.905983 Tz (an ) Tj 1.005128 0 Td 42.179487 Tz (insulating ) Tj 2.997436 0 Td 44.273504 Tz (layer ) Tj 1.776923 0 Td 49.85755 Tz (104 ) Tj 1.328205 0 Td 45.245726 Tz (disposed ) Tj 2.728205 0 Td 44.871795 Tz (on ) Tj 1.112821 0 Td 44.871795 Tz (the ) Tj 2.153846 0 Td 38.888889 Tz (FIG ) Tj 1.023077 0 Td 32.905983 Tz (. ) Tj 0.305128 0 Td 53.846154 Tz (5F ) Tj 0.682051 0 Td 32.905983 Tz (, ) Tj 0.358974 0 Td 43.874644 Tz (the ) Tj 1.023077 0 Td 41.880342 Tz (portion ) Tj 2.171795 0 Td 44.871795 Tz (105 ) Tj 1.005128 0 Td 53.846154 Tz (of ) Tj 0.771795 0 Td 43.874644 Tz (the ) Tj 1.023077 0 Td 42.877493 Tz (buried ) Tj 1.884615 0 Td 48.461538 Tz (oxide ) Tj 1.651282 0 Td 44.273504 Tz (layer ) Tj 1.561538 0 Td 43.874644 Tz (104 ) Tj 1.130769 0 Td 50.25641 Tz (under ) Tj 55.714286 0 0 55.714286 0 1375.507152 Tm 5.851282 0 Td 42.877493 Tz (substrate ) Tj 2.65641 0 Td 49.85755 Tz (102 ) Tj 0.915385 0 Td 32.905983 Tz (, ) Tj 0.341026 0 Td 49.85755 Tz (and ) Tj 1.202564 0 Td 32.905983 Tz (a ) Tj 0.55641 0 Td 29.91453 Tz (first ) Tj 1.041026 0 Td 46.741453 Tz (material ) Tj 2.494872 0 Td 44.273504 Tz (layer ) Tj 1.561538 0 Td 49.85755 Tz (108 ) Tj 1.130769 0 Td 47.489316 Tz (disposed ) Tj 2.476923 0 Td 53.846154 Tz (on ) Tj 0.915385 0 Td 43.874644 Tz (the ) Tj 2.171795 0 Td 43.874644 Tz (the ) Tj 0.933333 0 Td 55.508072 Tz (waveguide ) Tj 3.230769 0 Td 43.376068 Tz (core ) Tj 1.507692 0 Td 43.874644 Tz (108 ) Tj 1.076923 0 Td 49.85755 Tz (and ) Tj 1.076923 0 Td 54.700855 Tz (bounded ) Tj 2.512821 0 Td 62.820513 Tz (by ) Tj 0.987179 0 Td 44.871795 Tz (the ) Tj 0.951282 0 Td 48.985043 Tz (material ) Tj 2.494872 0 Td 43.076923 Tz (layer ) Tj 55.714286 0 0 55.714286 0 1334.241517 Tm 5.851282 0 Td 43.675214 Tz (insulating ) Tj 2.853846 0 Td 44.871795 Tz (layer ) Tj 1.579487 0 Td 49.85755 Tz (104 ) Tj 0.933333 0 Td 32.905983 Tz (, ) Tj 0.412821 0 Td 32.905983 Tz (a ) Tj 0.520513 0 Td 38.141026 Tz (step ) Tj 1.202564 0 Td 54.843305 Tz (404 ) Tj 1.166667 0 Td 55.34188 Tz (of ) Tj 0.807692 0 Td 47.435897 Tz (etching ) Tj 2.225641 0 Td 43.874644 Tz (the ) Tj 1.041026 0 Td 31.111111 Tz (first ) Tj 1.041026 0 Td 49.732906 Tz (material ) Tj 3.751282 0 Td 44.871795 Tz (110 ) Tj 1.220513 0 Td 31.410256 Tz (is ) Tj 0.664103 0 Td 54.273504 Tz (removed ) Tj 2.692308 0 Td 32.905983 Tz (to ) Tj 0.807692 0 Td 42.877493 Tz (obtain ) Tj 1.920513 0 Td 43.874644 Tz (the ) Tj 1.184615 0 Td 40.384615 Tz (free ) Tj 1.041026 0 Td 32.905983 Tz (- ) Tj 0.233333 0 Td 45.619658 Tz (standing ) Tj 2.548718 0 Td 44.444444 Tz (optical ) Tj 2.028205 0 Td 68.055556 Tz (wave ) Tj 50 0 0 50 0 1295.805871 Tm 6.52 0 Td 46 Tz (layer ) Tj 1.7 0 Td 50 Tz (108 ) Tj 1.24 0 Td 33.333333 Tz (to ) Tj 0.74 0 Td 44.166667 Tz (form ) Tj 1.64 0 Td 33.333333 Tz (a ) Tj 0.36 0 Td 61.851852 Tz (waveguide ) Tj 3.54 0 Td 50.833333 Tz (core ) Tj 1.44 0 Td 53.333333 Tz (of ) Tj 0.76 0 Td 50 Tz (the ) Tj 1.06 0 Td 50 Tz (optical ) Tj 2.18 0 Td 59.62963 Tz (waveguide ) Tj 3.72 0 Td 43.333333 Tz (40 ) Tj 1.1 0 Td 55.333333 Tz (guide ) Tj 2.02 0 Td 55.555556 Tz (100 ) Tj 1.38 0 Td 65 Tz (by ) Tj 1.14 0 Td 53.333333 Tz (using ) Tj 2.02 0 Td 33.333333 Tz (a ) Tj 0.68 0 Td 47.142857 Tz (release ) Tj 2.44 0 Td 45.833333 Tz (etch ) Tj 1.52 0 Td 52.857143 Tz (process ) Tj 2.28 0 Td 33.333333 Tz (. ) Tj 0.46 0 Td 56.666667 Tz (Release ) Tj 2.84 0 Td 40.833333 Tz (etch ) Tj 51.481481 0 0 51.481481 0 1255.72241 Tm 6.332374 0 Td 45.683453 Tz (structure ) Tj 2.797122 0 Td 49.640288 Tz (100 ) Tj 0.990647 0 Td 32.374101 Tz (, ) Tj 0.34964 0 Td 32.374101 Tz (a ) Tj 0.485612 0 Td 41.276978 Tz (step ) Tj 1.282014 0 Td 50.719424 Tz (406 ) Tj 1.282014 0 Td 43.705036 Tz (of ) Tj 0.679856 0 Td 51.079137 Tz (disposing ) Tj 2.991367 0 Td 32.374101 Tz (a ) Tj 0.466187 0 Td 54.496403 Tz (second ) Tj 1.961871 0 Td 52.607914 Tz (material ) Tj 2.641727 0 Td 50.503597 Tz (layer ) Tj 2.991367 0 Td 50.873587 Tz (process ) Tj 2.564029 0 Td 32.374101 Tz (is ) Tj 0.679856 0 Td 68.633094 Tz (known ) Tj 2.466906 0 Td 32.374101 Tz (in ) Tj 0.91295 0 Td 44.244604 Tz (the ) Tj 1.223741 0 Td 45.323741 Tz (art ) Tj 1.146043 0 Td 32.374101 Tz (\( ) Tj 0.213669 0 Td 32.374101 Tz (e ) Tj 0.271942 0 Td 32.374101 Tz (. ) Tj 0.291367 0 Td 32.374101 Tz (g ) Tj 0.271942 0 Td 32.374101 Tz (. ) Tj 0.213669 0 Td 32.374101 Tz (, ) Tj 0.505036 0 Td 52.446043 Tz (using ) Tj 1.981295 0 Td 53.093525 Tz (vapor ) Tj 1.942446 0 Td 55.035971 Tz (hydrogen ) Tj 61.428571 0 0 61.428571 0 1206.40361 Tm 5.323256 0 Td 44.315245 Tz (110 ) Tj 1.269767 0 Td 40.01938 Tz (over ) Tj 1.367442 0 Td 43.410853 Tz (the ) Tj 1.074419 0 Td 50.344531 Tz (waveguide ) Tj 3.109302 0 Td 40.697674 Tz (core ) Tj 1.465116 0 Td 38.888889 Tz (108 ) Tj 0.765116 0 Td 32.55814 Tz (, ) Tj 0.537209 0 Td 44.315245 Tz (and ) Tj 1.286047 0 Td 32.55814 Tz (a ) Tj 0.634884 0 Td 33.236434 Tz (step ) Tj 1.302326 0 Td 49.741602 Tz (408 ) Tj 1.237209 0 Td 52.906977 Tz (of ) Tj 1.823256 0 Td 37.306202 Tz (fluoride ) Tj 2.067442 0 Td 32.55814 Tz (\( ) Tj 0.130233 0 Td 65.116279 Tz (HF ) Tj 0.781395 0 Td 32.55814 Tz (\) ) Tj 0.406977 0 Td 42.054264 Tz (as ) Tj 0.716279 0 Td 32.55814 Tz (an ) Tj 0.765116 0 Td 41.860465 Tz (etchant ) Tj 1.75814 0 Td 32.55814 Tz (\) ) Tj 0.325581 0 Td 44.315245 Tz (and ) Tj 1.106977 0 Td 39.341085 Tz (thus ) Tj 1.106977 0 Td 44.767442 Tz (need ) Tj 1.318605 0 Td 44.315245 Tz (not ) Tj 1.025581 0 Td 42.054264 Tz (be ) Tj 0.765116 0 Td 40.094746 Tz (described ) Tj 45.714286 0 0 45.714286 0 1173.339917 Tm 7.0875 0 Td 65.169271 Tz (removing ) Tj 3.390625 0 Td 32.8125 Tz (a ) Tj 0.525 0 Td 52.083333 Tz (portion ) Tj 2.58125 0 Td 55.902778 Tz (105 ) Tj 1.35625 0 Td 65.625 Tz (of ) Tj 0.940625 0 Td 49.826389 Tz (the ) Tj 1.18125 0 Td 52.864583 Tz (insulating ) Tj 3.434375 0 Td 51.770833 Tz (layer ) Tj 1.8375 0 Td 60.763889 Tz (104 ) Tj 1.4 0 Td 58.333333 Tz (under ) Tj 1.990625 0 Td 54.6875 Tz (the ) Tj 2.8 0 Td 20.052083 Tz (in ) Tj 0.765625 0 Td 51.041667 Tz (detail ) Tj 2.0125 0 Td 55.902778 Tz (herein ) Tj 2.14375 0 Td 32.8125 Tz (. ) Tj 55.714286 0 0 55.714286 0 1126.343434 Tm 5.761538 0 Td 55.840456 Tz (waveguide ) Tj 3.230769 0 Td 45.619658 Tz (core ) Tj 1.471795 0 Td 44.871795 Tz (108 ) Tj 1.148718 0 Td 32.905983 Tz (to ) Tj 0.735897 0 Td 41.132479 Tz (form ) Tj 1.54359 0 Td 44.871795 Tz (an ) Tj 0.84359 0 Td 38.888889 Tz (air ) Tj 1.005128 0 Td 37.393162 Tz (slot ) Tj 1.238462 0 Td 44.871795 Tz (106 ) Tj 1.148718 0 Td 41.025641 Tz (therein ) Tj 2.135897 0 Td 49.85755 Tz (and ) Tj 1.112821 0 Td 44.871795 Tz (to ) Tj 2.602564 0 Td 65.811966 Tz (As ) Tj 0.897436 0 Td 52.516619 Tz (mentioned ) Tj 3.069231 0 Td 47.115385 Tz (hereinbefore ) Tj 3.392308 0 Td 32.905983 Tz (, ) Tj 0.376923 0 Td 43.874644 Tz (the ) Tj 1.076923 0 Td 44.444444 Tz (optical ) Tj 1.95641 0 Td 54.178538 Tz (waveguide ) Tj 3.194872 0 Td 48.461538 Tz (struc ) Tj 45.714286 0 0 45.714286 0 1088.57072 Tm 7.065625 0 Td 53.645833 Tz (release ) Tj 2.49375 0 Td 54.6875 Tz (the ) Tj 1.05 0 Td 67.24537 Tz (waveguide ) Tj 3.89375 0 Td 51.041667 Tz (core ) Tj 1.596875 0 Td 54.6875 Tz (108 ) Tj 1.35625 0 Td 54.6875 Tz (such ) Tj 1.61875 0 Td 51.041667 Tz (that ) Tj 1.4 0 Td 54.6875 Tz (the ) Tj 1.071875 0 Td 66.840278 Tz (waveguide ) Tj 3.871875 0 Td 50.130208 Tz (core ) Tj 1.815625 0 Td 52.864583 Tz (45 ) Tj 1.225 0 Td 47.395833 Tz (ture ) Tj 1.4875 0 Td 60.763889 Tz (100 ) Tj 1.35625 0 Td 60.763889 Tz (according ) Tj 3.521875 0 Td 34.635417 Tz (to ) Tj 0.896875 0 Td 64.962121 Tz (embodiments ) Tj 4.484375 0 Td 63.802083 Tz (of ) Tj 0.984375 0 Td 49.826389 Tz (the ) Tj 1.115625 0 Td 57.8125 Tz (present ) Tj 2.66875 0 Td 53.877315 Tz (invention ) Tj 51.688312 0 0 51.688312 0 1047.599869 Tm 6.384422 0 Td 49.441653 Tz (108 ) Tj 1.199497 0 Td 33.856784 Tz (is ) Tj 0.619095 0 Td 53.024381 Tz (suspended ) Tj 3.172864 0 Td 51.59129 Tz (over ) Tj 1.431658 0 Td 45.142379 Tz (the ) Tj 1.00603 0 Td 37.618649 Tz (air ) Tj 1.025377 0 Td 41.111809 Tz (slot ) Tj 1.218844 0 Td 45.142379 Tz (106 ) Tj 1.06407 0 Td 62.876884 Tz (by ) Tj 0.986683 0 Td 48.366834 Tz (the ) Tj 1.025377 0 Td 54.278336 Tz (second ) Tj 2.031407 0 Td 52.800461 Tz (material ) Tj 3.830653 0 Td 72.012842 Tz (may ) Tj 1.528392 0 Td 62.876884 Tz (be ) Tj 0.986683 0 Td 56.281407 Tz (implemented ) Tj 3.96608 0 Td 32.244556 Tz (in ) Tj 0.812563 0 Td 43.530151 Tz (an ) Tj 0.88995 0 Td 47.906198 Tz (optical ) Tj 2.244221 0 Td 49.441653 Tz (gas ) Tj 1.122111 0 Td 51.59129 Tz (sensor ) Tj 2.108794 0 Td 44.06756 Tz (for ) Tj 0.986683 0 Td 48.366834 Tz (detecting ) Tj 52.857143 0 0 52.857143 0 1005.487805 Tm 6.186486 0 Td 43.513514 Tz (layer ) Tj 1.702703 0 Td 45.195195 Tz (110 ) Tj 0.927027 0 Td 34.684685 Tz (. ) Tj 55.714286 0 0 55.714286 0 1005.836478 Tm 23.297436 0 Td 48.290598 Tz (sensing ) Tj 2.225641 0 Td 49.85755 Tz (gas ) Tj 0.861538 0 Td 32.905983 Tz (, ) Tj 0.323077 0 Td 49.85755 Tz (and ) Tj 1.184615 0 Td 28.418803 Tz (in ) Tj 0.682051 0 Td 43.376068 Tz (particular ) Tj 2.566667 0 Td 32.905983 Tz (, ) Tj 0.376923 0 Td 44.055944 Tz (identifying ) Tj 3.105128 0 Td 49.85755 Tz (gas ) Tj 1.094872 0 Td 44.871795 Tz (type ) Tj 1.094872 0 Td 32.905983 Tz (\( ) Tj 0.287179 0 Td 32.905983 Tz (s ) Tj 0.215385 0 Td 32.905983 Tz (\) ) Tj 0.394872 0 Td 49.85755 Tz (and ) Tj 1.005128 0 Td 32.905983 Tz (/ ) Tj 0.179487 0 Td 44.871795 Tz (or ) Tj 45.714286 0 0 45.714286 0 964.817698 Tm 7.940625 0 Td 43.75 Tz (In ) Tj 0.896875 0 Td 55.416667 Tz (order ) Tj 1.990625 0 Td 51.041667 Tz (that ) Tj 1.4875 0 Td 55.902778 Tz (the ) Tj 1.203125 0 Td 57.291667 Tz (present ) Tj 2.646875 0 Td 53.472222 Tz (invention ) Tj 3.171875 0 Td 82.638889 Tz (may ) Tj 1.70625 0 Td 63.802083 Tz (be ) Tj 1.115625 0 Td 50 Tz (readily ) Tj 2.49375 0 Td 59.791667 Tz (under ) Tj 3.740625 0 Td 59.659091 Tz (determining ) Tj 4.24375 0 Td 54.6875 Tz (gas ) Tj 1.246875 0 Td 54.967949 Tz (concentration ) Tj 4.4625 0 Td 32.8125 Tz (. ) Tj 0.39375 0 Td 49.826389 Tz (FIG ) Tj 1.35625 0 Td 32.8125 Tz (. ) Tj 0.30625 0 Td 76.5625 Tz (6A ) Tj 1.225 0 Td 55.208333 Tz (depicts ) Tj 2.603125 0 Td 32.8125 Tz (a ) Tj 0.6125 0 Td 57.118056 Tz (schematic ) Tj 51.632653 0 0 51.632653 0 923.938272 Tm 6.313834 0 Td 48.418972 Tz (stood ) Tj 1.820553 0 Td 54.874835 Tz (and ) Tj 1.12332 0 Td 60.254721 Tz (put ) Tj 1.258893 0 Td 40.349144 Tz (into ) Tj 1.278261 0 Td 48.060313 Tz (practical ) Tj 2.73083 0 Td 46.805007 Tz (effect ) Tj 1.568775 0 Td 32.279315 Tz (, ) Tj 0.48419 0 Td 43.577075 Tz (an ) Tj 0.890909 0 Td 53.798858 Tz (exemplary ) Tj 3.079447 0 Td 61.330698 Tz (method ) Tj 2.556522 0 Td 53.26087 Tz (of ) Tj 2.111067 0 Td 54.874835 Tz (drawing ) Tj 2.769565 0 Td 53.26087 Tz (of ) Tj 0.987747 0 Td 43.577075 Tz (an ) Tj 1.103953 0 Td 48.418972 Tz (optical ) Tj 2.459684 0 Td 49.494949 Tz (gas ) Tj 1.316996 0 Td 49.494949 Tz (sensor ) Tj 2.188538 0 Td 60.254721 Tz (600 ) Tj 1.549407 0 Td 52.364222 Tz (according ) Tj 3.331225 0 Td 32.279315 Tz (to ) Tj 0.949012 0 Td 43.577075 Tz (an ) Tj 51.428571 0 0 51.428571 0 882.127942 Tm 6.319444 0 Td 47.138047 Tz (fabricating ) Tj 3.344444 0 Td 49.691358 Tz (the ) Tj 1.05 0 Td 48.148148 Tz (optical ) Tj 2.177778 0 Td 58.333333 Tz (waveguide ) Tj 3.383333 0 Td 45.730453 Tz (structure ) Tj 2.858333 0 Td 50.771605 Tz (100 ) Tj 1.108333 0 Td 51.041667 Tz (will ) Tj 1.4 0 Td 55.092593 Tz (now ) Tj 1.380556 0 Td 63.194444 Tz (be ) Tj 1.263889 0 Td 32.407407 Tz (50 ) Tj 1.030556 0 Td 55.092593 Tz (example ) Tj 2.566667 0 Td 60.277778 Tz (embodiment ) Tj 3.772222 0 Td 53.472222 Tz (of ) Tj 0.758333 0 Td 49.691358 Tz (the ) Tj 0.972222 0 Td 52.314815 Tz (present ) Tj 2.391667 0 Td 48.251029 Tz (invention ) Tj 2.644444 0 Td 32.407407 Tz (, ) Tj 0.427778 0 Td 49.109687 Tz (incorporating ) Tj 51.623377 0 0 51.623377 0 838.663219 Tm 6.295597 0 Td 50.580014 Tz (described ) Tj 2.944403 0 Td 50.041929 Tz (with ) Tj 1.549686 0 Td 48.427673 Tz (reference ) Tj 2.847547 0 Td 43.584906 Tz (to ) Tj 0.794214 0 Td 65.377358 Tz (FIGS ) Tj 1.607799 0 Td 32.285115 Tz (. ) Tj 0.329308 0 Td 64.570231 Tz (5A ) Tj 1.123522 0 Td 33.899371 Tz (to ) Tj 0.736101 0 Td 53.27044 Tz (5F ) Tj 0.987925 0 Td 52.014908 Tz (according ) Tj 3.002516 0 Td 43.584906 Tz (to ) Tj 0.832956 0 Td 43.584906 Tz (an ) Tj 2.111447 0 Td 49.503843 Tz (the ) Tj 1.104151 0 Td 45.199161 Tz (optical ) Tj 2.014591 0 Td 59.548102 Tz (waveguide ) Tj 3.351195 0 Td 45.557885 Tz (structure ) Tj 2.789434 0 Td 49.503843 Tz (100 ) Tj 1.007296 0 Td 32.285115 Tz (. ) Tj 0.348679 0 Td 32.285115 Tz (In ) Tj 0.755472 0 Td 45.199161 Tz (the ) Tj 1.026667 0 Td 57.190776 Tz (example ) Tj 2.653836 0 Td 64.032145 Tz (embodi ) Tj 55.714286 0 0 55.714286 0 795.274949 Tm 5.851282 0 Td 51.709402 Tz (example ) Tj 2.728205 0 Td 55.042735 Tz (embodiment ) Tj 3.733333 0 Td 55.34188 Tz (of ) Tj 1.058974 0 Td 43.874644 Tz (the ) Tj 1.184615 0 Td 49.145299 Tz (present ) Tj 2.458974 0 Td 44.207028 Tz (invention ) Tj 2.494872 0 Td 32.905983 Tz (. ) Tj 0.646154 0 Td 32.905983 Tz (In ) Tj 0.987179 0 Td 43.874644 Tz (the ) Tj 2.028205 0 Td 61.324786 Tz (ment ) Tj 1.453846 0 Td 32.905983 Tz (, ) Tj 0.520513 0 Td 43.874644 Tz (the ) Tj 1.058974 0 Td 41.880342 Tz (optical ) Tj 2.1 0 Td 45.868946 Tz (gas ) Tj 1.130769 0 Td 48.361823 Tz (sensor ) Tj 1.920513 0 Td 55.840456 Tz (600 ) Tj 1.292308 0 Td 50.189934 Tz (comprises ) Tj 2.961538 0 Td 32.905983 Tz (a ) Tj 0.574359 0 Td 43.076923 Tz (light ) Tj 1.54359 0 Td 46.866097 Tz (source ) Tj 45.714286 0 0 45.714286 0 757.895887 Tm 7.04375 0 Td 65.625 Tz (example ) Tj 3.0625 0 Td 67.8125 Tz (embodiment ) Tj 4.025 0 Td 32.8125 Tz (, ) Tj 0.415625 0 Td 49.826389 Tz (the ) Tj 1.09375 0 Td 54.6875 Tz (optical ) Tj 2.340625 0 Td 67.24537 Tz (waveguide ) Tj 3.828125 0 Td 51.446759 Tz (structure ) Tj 3.15 0 Td 54.6875 Tz (100 ) Tj 1.26875 0 Td 32.8125 Tz (is ) Tj 2.165625 0 Td 60.763889 Tz (602 ) Tj 1.575 0 Td 56.145833 Tz (configured ) Tj 3.80625 0 Td 43.75 Tz (to ) Tj 0.9625 0 Td 58.333333 Tz (emit ) Tj 1.771875 0 Td 51.770833 Tz (light ) Tj 1.4875 0 Td 32.8125 Tz (, ) Tj 0.56875 0 Td 32.8125 Tz (a ) Tj 0.721875 0 Td 54.6875 Tz (gas ) Tj 1.334375 0 Td 57.291667 Tz (sensing ) Tj 2.8 0 Td 51.5625 Tz (section ) Tj 2.275 0 Td 32.8125 Tz (/ ) Tj 0.2625 0 Td 54.079861 Tz (region ) Tj 56.964286 0 0 56.964286 0 711.818892 Tm 5.793103 0 Td 46.812957 Tz (formed ) Tj 2.106583 0 Td 54.127482 Tz (on ) Tj 1.070846 0 Td 40.961338 Tz (an ) Tj 1.018182 0 Td 59.491466 Tz (SOI ) Tj 1.26395 0 Td 42.424242 Tz (platform ) Tj 2.685893 0 Td 46.227795 Tz (using ) Tj 1.825705 0 Td 32.183908 Tz (a ) Tj 0.64953 0 Td 73.876698 Tz (CMOS ) Tj 2.141693 0 Td 48.568443 Tz (compatible ) Tj 4.178056 0 Td 57.540927 Tz (604 ) Tj 1.667712 0 Td 46.812957 Tz (comprising ) Tj 3.352978 0 Td 45.837687 Tz (the ) Tj 1.351724 0 Td 43.887147 Tz (optical ) Tj 2.211912 0 Td 54.615117 Tz (waveguide ) Tj 3.510972 0 Td 41.286427 Tz (structure ) Tj 2.843887 0 Td 45.837687 Tz (100 ) Tj 58.571429 0 0 58.571429 0 670.509091 Tm 5.6 0 Td 39.32003 Tz (fabrication ) Tj 2.885366 0 Td 47.520325 Tz (technology ) Tj 2.834146 0 Td 31.300813 Tz (. ) Tj 50 0 0 50 0 672.523342 Tm 24.92 0 Td 43.333333 Tz (55 ) Tj 1.04 0 Td 60.952381 Tz (whereby ) Tj 2.84 0 Td 50 Tz (the ) Tj 1.04 0 Td 50.47619 Tz (optical ) Tj 2.28 0 Td 61.481481 Tz (waveguide ) Tj 3.52 0 Td 47.037037 Tz (structure ) Tj 2.94 0 Td 48.888889 Tz (100 ) Tj 1.28 0 Td 33.333333 Tz (is ) Tj 0.64 0 Td 52.5 Tz (arranged ) Tj 2.84 0 Td 43.333333 Tz (to ) Tj 55.714286 0 0 55.714286 0 626.113993 Tm 6.533333 0 Td 62.820513 Tz (As ) Tj 0.987179 0 Td 56.239316 Tz (shown ) Tj 1.974359 0 Td 31.410256 Tz (in ) Tj 0.753846 0 Td 39.88604 Tz (FIG ) Tj 1.041026 0 Td 32.905983 Tz (. ) Tj 0.341026 0 Td 65.811966 Tz (5A ) Tj 0.915385 0 Td 32.905983 Tz (, ) Tj 0.484615 0 Td 43.874644 Tz (the ) Tj 1.005128 0 Td 42.696193 Tz (fabrication ) Tj 3.015385 0 Td 56.837607 Tz (method ) Tj 2.24359 0 Td 66.809117 Tz (may ) Tj 1.525641 0 Td 40.08547 Tz (start ) Tj 2.530769 0 Td 42.735043 Tz (receive ) Tj 2.1 0 Td 43.874644 Tz (the ) Tj 1.041026 0 Td 43.076923 Tz (light ) Tj 1.471795 0 Td 41.880342 Tz (from ) Tj 1.471795 0 Td 43.874644 Tz (the ) Tj 1.076923 0 Td 38.888889 Tz (light ) Tj 1.346154 0 Td 46.866097 Tz (source ) Tj 1.938462 0 Td 54.843305 Tz (602 ) Tj 1.166667 0 Td 55.840456 Tz (and ) Tj 1.25641 0 Td 45.99359 Tz (transmit ) Tj 2.387179 0 Td 43.874644 Tz (the ) Tj 51.642857 0 0 51.642857 0 591.290839 Tm 6.215768 0 Td 50.829876 Tz (with ) Tj 1.665284 0 Td 32.272937 Tz (a ) Tj 0.580913 0 Td 69.924696 Tz (SOI ) Tj 1.3361 0 Td 53.573075 Tz (wafer ) Tj 1.95574 0 Td 53.573075 Tz (comprising ) Tj 3.504841 0 Td 32.272937 Tz (a ) Tj 0.639004 0 Td 41.954818 Tz (silicon ) Tj 2.071923 0 Td 49.054864 Tz (layer ) Tj 1.762102 0 Td 32.272937 Tz (\( ) Tj 0.271093 0 Td 34.209313 Tz (first ) Tj 1.181189 0 Td 52.846934 Tz (material ) Tj 3.969571 0 Td 45.82757 Tz (light ) Tj 1.49101 0 Td 51.233287 Tz (received ) Tj 2.769018 0 Td 50.714615 Tz (through ) Tj 2.439834 0 Td 49.48517 Tz (the ) Tj 1.161826 0 Td 47.948363 Tz (optical ) Tj 2.071923 0 Td 58.091286 Tz (waveguide ) Tj 3.44675 0 Td 45.5407 Tz (structure ) Tj 2.846473 0 Td 49.48517 Tz (100 ) Tj 1.006916 0 Td 32.272937 Tz (, ) Tj 50 0 0 50 0 547.083744 Tm 6.52 0 Td 49.333333 Tz (layer ) Tj 1.54 0 Td 33.333333 Tz (\) ) Tj 0.46 0 Td 55.555556 Tz (108 ) Tj 1.16 0 Td 61.111111 Tz (and ) Tj 1.32 0 Td 33.333333 Tz (a ) Tj 0.42 0 Td 53.333333 Tz (buried ) Tj 2.18 0 Td 55.333333 Tz (oxide ) Tj 1.88 0 Td 46.666667 Tz (layer ) Tj 1.68 0 Td 33.333333 Tz (\( ) Tj 0.22 0 Td 48.666667 Tz (insulating ) Tj 3.14 0 Td 50 Tz (layer ) Tj 1.46 0 Td 33.333333 Tz (\) ) Tj 0.54 0 Td 50 Tz (104 ) Tj 1.16 0 Td 53.333333 Tz (on ) Tj 2.34 0 Td 50 Tz (and ) Tj 1.5 0 Td 33.333333 Tz (a ) Tj 0.78 0 Td 44.666667 Tz (light ) Tj 1.82 0 Td 50 Tz (detector ) Tj 2.8 0 Td 55.555556 Tz (606 ) Tj 1.64 0 Td 50.416667 Tz (arranged ) Tj 3.04 0 Td 33.333333 Tz (to ) Tj 1.02 0 Td 49.52381 Tz (receive ) Tj 2.62 0 Td 50 Tz (the ) Tj 1.34 0 Td 48.666667 Tz (light ) Tj 54.285714 0 0 54.285714 0 502 Tm 5.968421 0 Td 33.77193 Tz (a ) Tj 0.552632 0 Td 40.350877 Tz (silicon ) Tj 2.136842 0 Td 43.664717 Tz (substrate ) Tj 2.689474 0 Td 50.146199 Tz (102 ) Tj 0.994737 0 Td 33.77193 Tz (. ) Tj 51.428571 0 0 51.428571 0 504.822281 Tm 25.238889 0 Td 49.200337 Tz (transmitted ) Tj 3.636111 0 Td 45.37037 Tz (from ) Tj 1.691667 0 Td 44.290123 Tz (the ) Tj 1.127778 0 Td 48.148148 Tz (optical ) Tj 2.255556 0 Td 58.333333 Tz (waveguide ) Tj 3.538889 0 Td 45.37037 Tz (structure ) Tj 2.897222 0 Td 50.771605 Tz (100 ) Tj 1.244444 0 Td 55.092593 Tz (and ) Tj 51.428571 0 0 51.428571 0 465.454039 Tm 7.077778 0 Td 52.121914 Tz (Subsequently ) Tj 3.830556 0 Td 32.407407 Tz (, ) Tj 0.369444 0 Td 53.472222 Tz (as ) Tj 0.894444 0 Td 58.981481 Tz (shown ) Tj 2.1 0 Td 34.027778 Tz (in ) Tj 0.7 0 Td 49.691358 Tz (FIG ) Tj 1.186111 0 Td 32.407407 Tz (. ) Tj 0.35 0 Td 63.194444 Tz (5B ) Tj 0.913889 0 Td 32.407407 Tz (, ) Tj 0.35 0 Td 49.691358 Tz (the ) Tj 1.088889 0 Td 44.907407 Tz (silicon ) Tj 2.197222 0 Td 46.666667 Tz (layer ) Tj 1.711111 0 Td 50.771605 Tz (108 ) Tj 1.4 0 Td 43.75 Tz (60 ) Tj 1.147222 0 Td 49.583333 Tz (configured ) Tj 3.383333 0 Td 32.407407 Tz (to ) Tj 0.855556 0 Td 48.070988 Tz (detect ) Tj 2.080556 0 Td 32.407407 Tz (a ) Tj 0.583333 0 Td 50.771605 Tz (gas ) Tj 1.244444 0 Td 32.407407 Tz (in ) Tj 0.797222 0 Td 49.691358 Tz (the ) Tj 1.322222 0 Td 50.771605 Tz (gas ) Tj 1.186111 0 Td 50 Tz (sensing ) Tj 2.547222 0 Td 45.833333 Tz (section ) Tj 2.255556 0 Td 59.41358 Tz (604 ) Tj 51.547619 0 0 51.547619 0 423.463617 Tm 6.343649 0 Td 32.332564 Tz (is ) Tj 0.814781 0 Td 49.576597 Tz (etched ) Tj 2.250346 0 Td 32.332564 Tz (to ) Tj 0.85358 0 Td 43.879908 Tz (pattern ) Tj 2.366744 0 Td 49.576597 Tz (the ) Tj 1.105774 0 Td 60.354119 Tz (waveguide ) Tj 3.608314 0 Td 46.882217 Tz (core ) Tj 1.222171 0 Td 32.332564 Tz (. ) Tj 0.620785 0 Td 32.332564 Tz (In ) Tj 0.814781 0 Td 49.576597 Tz (the ) Tj 1.338568 0 Td 54.503464 Tz (example ) Tj 3.78291 0 Td 54.318707 Tz (based ) Tj 1.978753 0 Td 53.34873 Tz (on ) Tj 0.950577 0 Td 49.576597 Tz (the ) Tj 1.222171 0 Td 45.265589 Tz (light ) Tj 1.493764 0 Td 50.51963 Tz (received ) Tj 2.463741 0 Td 32.332564 Tz (, ) Tj 0.465589 0 Td 47.690531 Tz (such ) Tj 1.513164 0 Td 53.34873 Tz (as ) Tj 0.872979 0 Td 49.576597 Tz (the ) Tj 1.066975 0 Td 52.944573 Tz (presence ) Tj 2.774134 0 Td 63.048499 Tz (of ) Tj 0.911778 0 Td 32.332564 Tz (a ) Tj 0.562587 0 Td 51.732102 Tz (type ) Tj 51.428571 0 0 51.428571 0 380.022621 Tm 6.3 0 Td 61.898148 Tz (embodiment ) Tj 3.694444 0 Td 32.407407 Tz (, ) Tj 0.388889 0 Td 49.691358 Tz (the ) Tj 1.263889 0 Td 43.055556 Tz (silicon ) Tj 2.275 0 Td 46.666667 Tz (layer ) Tj 1.75 0 Td 55.092593 Tz (108 ) Tj 1.4 0 Td 32.407407 Tz (is ) Tj 0.816667 0 Td 49.691358 Tz (etched ) Tj 2.197222 0 Td 32.407407 Tz (to ) Tj 0.894444 0 Td 53.148148 Tz (shape ) Tj 1.905556 0 Td 47.530864 Tz (the ) Tj 2.391667 0 Td 53.472222 Tz (of ) Tj 0.777778 0 Td 50.771605 Tz (gas ) Tj 1.030556 0 Td 55.092593 Tz (and ) Tj 1.108333 0 Td 32.407407 Tz (/ ) Tj 0.155556 0 Td 53.472222 Tz (or ) Tj 0.816667 0 Td 32.407407 Tz (a ) Tj 0.466667 0 Td 49.109687 Tz (concentration ) Tj 4.102778 0 Td 53.472222 Tz (of ) Tj 0.758333 0 Td 49.691358 Tz (the ) Tj 1.088889 0 Td 49.691358 Tz (gas ) Tj 0.875 0 Td 32.407407 Tz (. ) Tj 0.427778 0 Td 55.092593 Tz (The ) Tj 1.186111 0 Td 47.890947 Tz (principle ) Tj 2.8 0 Td 44.290123 Tz (for ) Tj 0.972222 0 Td 44.290123 Tz (the ) Tj 55.714286 0 0 55.714286 0 335.770563 Tm 5.761538 0 Td 55.840456 Tz (waveguide ) Tj 3.374359 0 Td 45.619658 Tz (core ) Tj 1.507692 0 Td 31.410256 Tz (in ) Tj 0.84359 0 Td 43.874644 Tz (the ) Tj 1.25641 0 Td 41.132479 Tz (form ) Tj 1.525641 0 Td 55.34188 Tz (of ) Tj 0.969231 0 Td 32.905983 Tz (a ) Tj 0.610256 0 Td 34.102564 Tz (strip ) Tj 1.220513 0 Td 32.905983 Tz (. ) Tj 0.592308 0 Td 46.581197 Tz (Various ) Tj 2.315385 0 Td 46.581197 Tz (etching ) Tj 3.338462 0 Td 44.207028 Tz (detection ) Tj 2.728205 0 Td 53.846154 Tz (of ) Tj 0.879487 0 Td 32.905983 Tz (a ) Tj 0.592308 0 Td 42.628205 Tz (type ) Tj 1.417949 0 Td 44.871795 Tz (of ) Tj 0.84359 0 Td 43.874644 Tz (gas ) Tj 1.238462 0 Td 49.85755 Tz (and ) Tj 1.184615 0 Td 43.874644 Tz (the ) Tj 0.987179 0 Td 56.293706 Tz (measurement ) Tj 3.930769 0 Td 52.350427 Tz (of ) Tj 0.879487 0 Td 32.905983 Tz (a ) Tj 0.610256 0 Td 44.871795 Tz (gas ) Tj 51.666667 0 0 51.666667 0 299.883279 Tm 6.232258 0 Td 51.935484 Tz (techniques ) Tj 3.367742 0 Td 65.806452 Tz (known ) Tj 2.380645 0 Td 32.258065 Tz (in ) Tj 0.832258 0 Td 49.462366 Tz (the ) Tj 1.23871 0 Td 37.634409 Tz (art ) Tj 0.851613 0 Td 76.344086 Tz (may ) Tj 1.587097 0 Td 62.903226 Tz (be ) Tj 1.103226 0 Td 47.465438 Tz (applied ) Tj 2.4 0 Td 32.258065 Tz (to ) Tj 0.870968 0 Td 52.903226 Tz (shape ) Tj 1.916129 0 Td 49.462366 Tz (the ) Tj 2.419355 0 Td 48.883375 Tz (concentration ) Tj 4.141935 0 Td 49.032258 Tz (using ) Tj 1.8 0 Td 49.462366 Tz (the ) Tj 1.16129 0 Td 44.700461 Tz (characteristic ) Tj 4.083871 0 Td 47.926267 Tz (optical ) Tj 2.245161 0 Td 48.387097 Tz (absorption ) Tj 3.329032 0 Td 53.225806 Tz (of ) Tj 50 0 0 50 0 253.587343 Tm 6.38 0 Td 61.481481 Tz (waveguide ) Tj 3.76 0 Td 47.5 Tz (core ) Tj 1.6 0 Td 50.833333 Tz (such ) Tj 1.66 0 Td 53.333333 Tz (as ) Tj 0.98 0 Td 54.444444 Tz (but ) Tj 1.32 0 Td 55.555556 Tz (not ) Tj 1.32 0 Td 46.666667 Tz (limited ) Tj 2.42 0 Td 43.333333 Tz (to ) Tj 0.96 0 Td 56.666667 Tz (chemical ) Tj 3.08 0 Td 50 Tz (dry ) Tj 1.42 0 Td 43.333333 Tz (65 ) Tj 1.08 0 Td 50 Tz (the ) Tj 1.14 0 Td 50 Tz (gas ) Tj 1.22 0 Td 48.888889 Tz (specie ) Tj 1.84 0 Td 33.333333 Tz (/ ) Tj 0.06 0 Td 57.407407 Tz (molecules ) Tj 3.42 0 Td 44.444444 Tz (are ) Tj 1 0 Td 57.5 Tz (well ) Tj 1.56 0 Td 67.333333 Tz (known ) Tj 2.3 0 Td 33.333333 Tz (in ) Tj 0.76 0 Td 50 Tz (the ) Tj 1.06 0 Td 45.555556 Tz (art ) Tj 1.08 0 Td 55.555556 Tz (and ) Tj 1.3 0 Td 51.666667 Tz (thus ) Tj 51.428571 0 0 51.428571 0 212.73057 Tm 6.338889 0 Td 50 Tz (etching ) Tj 2.119444 0 Td 32.407407 Tz (, ) Tj 0.622222 0 Td 53.148148 Tz (using ) Tj 1.613889 0 Td 32.407407 Tz (, ) Tj 0.777778 0 Td 44.290123 Tz (for ) Tj 1.263889 0 Td 57.87037 Tz (example ) Tj 2.508333 0 Td 32.407407 Tz (, ) Tj 0.7 0 Td 50.411523 Tz (tetrafluoromethane ) Tj 5.463889 0 Td 32.407407 Tz (, ) Tj 0.680556 0 Td 48.070988 Tz (sulfur ) Tj 3.091667 0 Td 56.712963 Tz (need ) Tj 1.633333 0 Td 55.092593 Tz (not ) Tj 1.088889 0 Td 64.814815 Tz (be ) Tj 1.011111 0 Td 48.971193 Tz (described ) Tj 2.994444 0 Td 32.407407 Tz (in ) Tj 0.777778 0 Td 45.910494 Tz (detail ) Tj 1.808333 0 Td 48.070988 Tz (herein ) Tj 1.886111 0 Td 32.407407 Tz (. ) Tj 0.35 0 Td 60.493827 Tz (For ) Tj 1.302778 0 Td 55.092593 Tz (example ) Tj 2.411111 0 Td 32.407407 Tz (, ) Tj 0.427778 0 Td 60.277778 Tz (gener ) Tj 58.571429 0 0 58.571429 0 170.525099 Tm 5.497561 0 Td 45.291328 Tz (hexafluoride ) Tj 3.209756 0 Td 34.146341 Tz (, ) Tj 0.546341 0 Td 42.682927 Tz (or ) Tj 0.870732 0 Td 40.54878 Tz (chlorine ) Tj 2.339024 0 Td 44.579946 Tz (gas ) Tj 0.785366 0 Td 34.146341 Tz (, ) Tj 0.512195 0 Td 31.300813 Tz (to ) Tj 0.768293 0 Td 44.579946 Tz (define ) Tj 1.895122 0 Td 44.579946 Tz (the ) Tj 1.109756 0 Td 47.235772 Tz (shape ) Tj 1.690244 0 Td 54.065041 Tz (of ) Tj 0.904878 0 Td 38.888889 Tz (the ) Tj 2.065854 0 Td 34.857724 Tz (ally ) Tj 0.853659 0 Td 34.146341 Tz (, ) Tj 0.341463 0 Td 56.910569 Tz (when ) Tj 1.72439 0 Td 40.406504 Tz (light ) Tj 1.4 0 Td 24.186992 Tz (is ) Tj 0.546341 0 Td 42.424242 Tz (transmitted ) Tj 3.12439 0 Td 45.528455 Tz (along ) Tj 1.639024 0 Td 44.579946 Tz (the ) Tj 1.007317 0 Td 40.243902 Tz (optical ) Tj 1.895122 0 Td 51.851852 Tz (waveguide ) Tj ET Q endstream endobj 124 0 obj << /Length 1 >> stream q endstream endobj 125 0 obj << /Length 57780 >> stream Q q 0.24 0 0 0.24 0 0 cm BT /F1 1 Tf 3 Tr 67.142857 0 0 67.142857 0 3024 Tm 15.861702 0 Td 84.397163 Tz (US ) Tj 1.355319 0 Td 43.439716 Tz (10 ) Tj 0.640426 0 Td 34.751773 Tz (, ) Tj 0.223404 0 Td 54.609929 Tz (215 ) Tj 1.117021 0 Td 34.751773 Tz (, ) Tj 0.134043 0 Td 60.401891 Tz (692 ) Tj 1.474468 0 Td 63.297872 Tz (B2 ) Tj 64.285714 0 0 64.285714 0 2968 Tm 26.802222 0 Td 63.518519 Tz (10 ) Tj 55.714286 0 0 55.714286 0 2917.317716 Tm 5.869231 0 Td 40.883191 Tz (structure ) Tj 2.8 0 Td 44.871795 Tz (100 ) Tj 0.897436 0 Td 32.905983 Tz (, ) Tj 0.466667 0 Td 44.871795 Tz (an ) Tj 1.058974 0 Td 48.461538 Tz (evanescent ) Tj 3.338462 0 Td 33.504274 Tz (field ) Tj 1.382051 0 Td 55.840456 Tz (607 ) Tj 1.489744 0 Td 22.435897 Tz (is ) Tj 0.789744 0 Td 46.20133 Tz (generated ) Tj 2.853846 0 Td 54.843305 Tz (and ) Tj 2.351282 0 Td 51.452991 Tz (Fabry ) Tj 1.597436 0 Td 32.905983 Tz (- ) Tj 0.251282 0 Td 46.068376 Tz (Perot ) Tj 1.723077 0 Td 35.39886 Tz (filter ) Tj 1.25641 0 Td 32.905983 Tz (, ) Tj 0.466667 0 Td 49.85755 Tz (and ) Tj 1.25641 0 Td 44.871795 Tz (so ) Tj 0.987179 0 Td 41.880342 Tz (on ) Tj 0.646154 0 Td 32.905983 Tz (\) ) Tj 0.574359 0 Td 32.905983 Tz (is ) Tj 0.735897 0 Td 45.619658 Tz (used ) Tj 1.471795 0 Td 41.880342 Tz (to ) Tj 0.897436 0 Td 41.381766 Tz (select ) Tj 1.848718 0 Td 32.905983 Tz (a ) Tj 0.610256 0 Td 40.17094 Tz (certain ) Tj 51.428571 0 0 51.428571 0 2878.935129 Tm 6.3 0 Td 50.636574 Tz (portions ) Tj 2.586111 0 Td 50.925926 Tz (thereof ) Tj 2.236111 0 Td 48.611111 Tz (outside ) Tj 2.313889 0 Td 49.691358 Tz (the ) Tj 1.05 0 Td 48.611111 Tz (optical ) Tj 2.119444 0 Td 58.333333 Tz (waveguide ) Tj 3.383333 0 Td 45.730453 Tz (structure ) Tj 2.8 0 Td 48.611111 Tz (100 ) Tj 2.430556 0 Td 53.796296 Tz (wavelength ) Tj 3.558333 0 Td 55.092593 Tz (which ) Tj 2.022222 0 Td 51.446759 Tz (overlays ) Tj 2.605556 0 Td 50.231481 Tz (with ) Tj 1.575 0 Td 49.691358 Tz (the ) Tj 1.225 0 Td 45.664983 Tz (fingerprint ) Tj 3.15 0 Td 54.444444 Tz (wavelength ) Tj 58.571429 0 0 58.571429 0 2833.817073 Tm 5.514634 0 Td 41.260163 Tz (interact ) Tj 2.082927 0 Td 43.394309 Tz (with ) Tj 1.4 0 Td 44.579946 Tz (and ) Tj 0.939024 0 Td 52.845528 Tz (measure ) Tj 2.458537 0 Td 44.579946 Tz (the ) Tj 1.02439 0 Td 39.837398 Tz (optical ) Tj 1.878049 0 Td 44.390244 Tz (absorption ) Tj 2.834146 0 Td 55.487805 Tz (of ) Tj 0.802439 0 Td 49.322493 Tz (any ) Tj 1.126829 0 Td 44.579946 Tz (gas ) Tj 2.15122 0 Td 42.682927 Tz (of ) Tj 0.904878 0 Td 44.579946 Tz (gas ) Tj 1.195122 0 Td 42.682927 Tz (specie ) Tj 1.621951 0 Td 34.146341 Tz (. ) Tj 0.495122 0 Td 62.601626 Tz (By ) Tj 1.07561 0 Td 60.704607 Tz (way ) Tj 1.553659 0 Td 44.105691 Tz (of ) Tj 0.921951 0 Td 48.018293 Tz (examples ) Tj 2.8 0 Td 40.54878 Tz (only ) Tj 1.468293 0 Td 50.271003 Tz (and ) Tj 1.280488 0 Td 48.780488 Tz (without ) Tj 57.080745 0 0 57.080745 0 2789.648649 Tm 5.711208 0 Td 43.797606 Tz (specie ) Tj 1.576714 0 Td 32.118244 Tz (/ ) Tj 0.087595 0 Td 51.583847 Tz (molecules ) Tj 3.135909 0 Td 32.118244 Tz (\( ) Tj 0.210229 0 Td 43.067646 Tz (that ) Tj 1.366485 0 Td 32.118244 Tz (is ) Tj 0.402938 0 Td 32.118244 Tz (, ) Tj 0.420457 0 Td 50.805223 Tz (based ) Tj 1.839499 0 Td 54.017048 Tz (on ) Tj 1.033624 0 Td 42.824326 Tz (the ) Tj 1.121219 0 Td 48.664007 Tz (absorbing ) Tj 2.873123 0 Td 57.666848 Tz (wave ) Tj 3.013275 0 Td 40.585782 Tz (limitation ) Tj 2.487704 0 Td 35.038085 Tz (, ) Tj 0.385419 0 Td 43.797606 Tz (the ) Tj 0.998585 0 Td 43.380486 Tz (tunable ) Tj 2.172361 0 Td 30.171684 Tz (filter ) Tj 1.27889 0 Td 51.583847 Tz (608 ) Tj 1.086181 0 Td 69.10289 Tz (may ) Tj 1.384004 0 Td 41.851046 Tz (select ) Tj 1.751904 0 Td 35.038085 Tz (a ) Tj 0.315343 0 Td 50.513239 Tz (wavelength ) Tj 3.29358 0 Td 54.017048 Tz (of ) Tj 51.428571 0 0 51.428571 0 2753.056604 Tm 6.358333 0 Td 45.910494 Tz (length ) Tj 1.808333 0 Td 32.407407 Tz (\( ) Tj 0.213889 0 Td 32.407407 Tz (s ) Tj 0.35 0 Td 32.407407 Tz (\) ) Tj 0.466667 0 Td 45.37037 Tz (characteristic ) Tj 4.102778 0 Td 53.472222 Tz (of ) Tj 0.894444 0 Td 49.691358 Tz (the ) Tj 1.244444 0 Td 48.611111 Tz (gas ) Tj 1.166667 0 Td 46.990741 Tz (specie ) Tj 1.788889 0 Td 32.407407 Tz (/ ) Tj 0.058333 0 Td 55.812757 Tz (molecules ) Tj 3.091667 0 Td 32.407407 Tz (, ) Tj 0.486111 0 Td 53.796296 Tz (which ) Tj 2.313889 0 Td 32.407407 Tz (5 ) Tj 0.972222 0 Td 32.407407 Tz (4 ) Tj 0.291667 0 Td 32.407407 Tz (. ) Tj 0.213889 0 Td 53.472222 Tz (24 ) Tj 0.913889 0 Td 53.472222 Tz (um ) Tj 1.244444 0 Td 44.290123 Tz (for ) Tj 0.991667 0 Td 48.971193 Tz (detecting ) Tj 2.936111 0 Td 63.194444 Tz (Co ) Tj 0.972222 0 Td 32.407407 Tz (, ) Tj 0.525 0 Td 50.771605 Tz (gas ) Tj 1.108333 0 Td 53.472222 Tz (or ) Tj 0.894444 0 Td 32.407407 Tz (a ) Tj 0.447222 0 Td 54.12037 Tz (wavelength ) Tj 3.616667 0 Td 53.472222 Tz (of ) Tj 0.894444 0 Td 32.407407 Tz (4 ) Tj 0.291667 0 Td 32.407407 Tz (. ) Tj 0.136111 0 Td 63.194444 Tz (64 ) Tj 0.991667 0 Td 53.472222 Tz (um ) Tj 51.623377 0 0 51.623377 0 2712.642999 Tm 6.198742 0 Td 72.103424 Tz (may ) Tj 1.704654 0 Td 53.27044 Tz (be ) Tj 1.065409 0 Td 46.409853 Tz (referred ) Tj 2.673208 0 Td 32.285115 Tz (to ) Tj 0.852327 0 Td 53.27044 Tz (as ) Tj 1.026667 0 Td 33.361286 Tz (its ) Tj 1.046038 0 Td 46.960168 Tz (fingerprint ) Tj 3.370566 0 Td 50.36478 Tz (absorption ) Tj 3.44805 0 Td 46.582809 Tz (spectra ) Tj 2.111447 0 Td 32.285115 Tz (\) ) Tj 1.743396 0 Td 44.122991 Tz (for ) Tj 0.929811 0 Td 48.427673 Tz (detecting ) Tj 2.808805 0 Td 74.255765 Tz (CO ) Tj 1.239748 0 Td 49.503843 Tz (gas ) Tj 1.142893 0 Td 43.584906 Tz (so ) Tj 0.774843 0 Td 47.620545 Tz (that ) Tj 1.336604 0 Td 44.122991 Tz (the ) Tj 1.046038 0 Td 45.199161 Tz (light ) Tj 1.433459 0 Td 50.849057 Tz (received ) Tj 2.595723 0 Td 62.955975 Tz (by ) Tj 0.987925 0 Td 49.503843 Tz (the ) Tj 1.065409 0 Td 48.427673 Tz (optical ) Tj 55.714286 0 0 55.714286 0 2666.495352 Tm 5.797436 0 Td 48.290598 Tz (present ) Tj 2.171795 0 Td 50.356125 Tz (around ) Tj 2.082051 0 Td 43.874644 Tz (the ) Tj 1.005128 0 Td 44.444444 Tz (optical ) Tj 1.974359 0 Td 53.846154 Tz (waveguide ) Tj 3.176923 0 Td 40.883191 Tz (structure ) Tj 2.548718 0 Td 49.85755 Tz (100 ) Tj 1.148718 0 Td 32.905983 Tz (\( ) Tj 0.269231 0 Td 32.905983 Tz (e ) Tj 0.215385 0 Td 32.905983 Tz (. ) Tj 0.215385 0 Td 32.905983 Tz (g ) Tj 0.269231 0 Td 32.905983 Tz (. ) Tj 0.215385 0 Td 32.905983 Tz (, ) Tj 0.358974 0 Td 32.905983 Tz (in ) Tj 1.848718 0 Td 54.178538 Tz (waveguide ) Tj 3.248718 0 Td 42.877493 Tz (structure ) Tj 2.692308 0 Td 44.871795 Tz (100 ) Tj 1.292308 0 Td 37.891738 Tz (can ) Tj 1.184615 0 Td 36.495726 Tz (fully ) Tj 1.561538 0 Td 40.010684 Tz (interact ) Tj 2.207692 0 Td 46.367521 Tz (with ) Tj 1.633333 0 Td 43.874644 Tz (gas ) Tj 1.005128 0 Td 71.794872 Tz (mol ) Tj 45.714286 0 0 45.714286 0 2628.871672 Tm 7.109375 0 Td 54.6875 Tz (the ) Tj 1.35625 0 Td 59.548611 Tz (gas ) Tj 1.4 0 Td 57.8125 Tz (sensing ) Tj 2.8 0 Td 52.083333 Tz (section ) Tj 2.625 0 Td 65.625 Tz (604 ) Tj 1.26875 0 Td 32.8125 Tz (\) ) Tj 0.284375 0 Td 32.8125 Tz (. ) Tj 0.65625 0 Td 55.497685 Tz (Therefore ) Tj 3.040625 0 Td 32.8125 Tz (, ) Tj 0.590625 0 Td 52.864583 Tz (an ) Tj 1.115625 0 Td 53.645833 Tz (optical ) Tj 2.559375 0 Td 44.357639 Tz (signal ) Tj 3.303125 0 Td 21.875 Tz (e ) Tj 0.65625 0 Td 56.145833 Tz (cules ) Tj 1.990625 0 Td 63.802083 Tz (of ) Tj 1.05 0 Td 50.130208 Tz (interest ) Tj 2.7125 0 Td 41.927083 Tz (to ) Tj 0.91875 0 Td 65.625 Tz (be ) Tj 1.203125 0 Td 54.6875 Tz (detected ) Tj 3.084375 0 Td 32.8125 Tz (\( ) Tj 0.240625 0 Td 51.041667 Tz (with ) Tj 1.8375 0 Td 47.851562 Tz (specific ) Tj 2.821875 0 Td 53.030303 Tz (fingerprint ) Tj 45.714286 0 0 45.714286 0 2589.709635 Tm 7.13125 0 Td 32.8125 Tz (\( ) Tj 0.284375 0 Td 50.3125 Tz (light ) Tj 1.53125 0 Td 32.8125 Tz (\) ) Tj 0.328125 0 Td 63.802083 Tz (having ) Tj 2.471875 0 Td 32.8125 Tz (a ) Tj 0.503125 0 Td 59.791667 Tz (wavelength ) Tj 4.003125 0 Td 52.864583 Tz (selected ) Tj 2.75625 0 Td 59.791667 Tz (based ) Tj 2.034375 0 Td 63.802083 Tz (on ) Tj 1.05 0 Td 54.6875 Tz (the ) Tj 1.159375 0 Td 56.510417 Tz (absorption ) Tj 5.096875 0 Td 59.791667 Tz (wavelength ) Tj 4.15625 0 Td 58.333333 Tz (absorbed ) Tj 2.975 0 Td 32.8125 Tz (\) ) Tj 0.503125 0 Td 60.763889 Tz (and ) Tj 1.4 0 Td 67.083333 Tz (would ) Tj 2.428125 0 Td 50.130208 Tz (then ) Tj 1.70625 0 Td 51.041667 Tz (carry ) Tj 1.96875 0 Td 52.864583 Tz (on ) Tj 1.071875 0 Td 54.6875 Tz (the ) Tj 1.334375 0 Td 52.864583 Tz (signal ) Tj 1.903125 0 Td 32.8125 Tz (/ ) Tj 45.714286 0 0 45.714286 0 2544.549784 Tm 7.13125 0 Td 52.698864 Tz (fingerprint ) Tj 3.434375 0 Td 32.8125 Tz (/ ) Tj 0.21875 0 Td 50.520833 Tz (characteristic ) Tj 4.50625 0 Td 65.625 Tz (of ) Tj 0.940625 0 Td 49.826389 Tz (the ) Tj 1.225 0 Td 55.902778 Tz (gas ) Tj 1.203125 0 Td 53.472222 Tz (specie ) Tj 1.96875 0 Td 32.8125 Tz (/ ) Tj 0.0875 0 Td 64.00463 Tz (molecules ) Tj 3.609375 0 Td 54.6875 Tz (desired ) Tj 3.040625 0 Td 30.989583 Tz (10 ) Tj 1.159375 0 Td 55.350379 Tz (information ) Tj 4.15625 0 Td 32.8125 Tz (\( ) Tj 0.284375 0 Td 32.8125 Tz (e ) Tj 0.2625 0 Td 32.8125 Tz (. ) Tj 0.284375 0 Td 32.8125 Tz (g ) Tj 0.35 0 Td 32.8125 Tz (. ) Tj 0.21875 0 Td 32.8125 Tz (, ) Tj 0.546875 0 Td 51.041667 Tz (light ) Tj 1.75 0 Td 68.541667 Tz (power ) Tj 2.1 0 Td 32.8125 Tz (/ ) Tj 0.196875 0 Td 49.826389 Tz (intensity ) Tj 3.215625 0 Td 51.704545 Tz (attenuation ) Tj 3.675 0 Td 32.8125 Tz (\) ) Tj 0.525 0 Td 43.75 Tz (to ) Tj 0.91875 0 Td 59.548611 Tz (the ) Tj 51.576355 0 0 51.576355 0 2502.781733 Tm 6.340115 0 Td 32.31455 Tz (to ) Tj 0.853104 0 Td 53.319007 Tz (be ) Tj 1.046991 0 Td 48.067892 Tz (detected ) Tj 2.772588 0 Td 32.31455 Tz (\( ) Tj 0.213276 0 Td 32.31455 Tz (i ) Tj 0.213276 0 Td 32.31455 Tz (. ) Tj 0.213276 0 Td 32.31455 Tz (e ) Tj 0.271442 0 Td 32.31455 Tz (. ) Tj 0.213276 0 Td 32.31455 Tz (, ) Tj 0.445941 0 Td 53.642152 Tz (wavelength ) Tj 3.683859 0 Td 55.581025 Tz (which ) Tj 2.171538 0 Td 51.703279 Tz (overlaps ) Tj 2.714422 0 Td 52.511143 Tz (with ) Tj 1.764374 0 Td 44.163218 Tz (the ) Tj 2.268481 0 Td 45.240369 Tz (light ) Tj 1.551098 0 Td 48.067892 Tz (detector ) Tj 2.481757 0 Td 54.934734 Tz (606 ) Tj 1.473543 0 Td 45.240369 Tz (for ) Tj 0.775549 0 Td 32.31455 Tz (, ) Tj 0.426552 0 Td 32.31455 Tz (e ) Tj 0.271442 0 Td 32.31455 Tz (. ) Tj 0.271442 0 Td 32.31455 Tz (g ) Tj 0.290831 0 Td 32.31455 Tz (. ) Tj 0.135721 0 Td 32.31455 Tz (, ) Tj 0.445941 0 Td 48.471824 Tz (detecting ) Tj 2.908309 0 Td 44.163218 Tz (the ) Tj 1.163324 0 Td 49.548976 Tz (gas ) Tj 1.124546 0 Td 48.968971 Tz (concentration ) Tj 3.916523 0 Td 32.31455 Tz (. ) Tj 52.721088 0 0 52.721088 0 2459.307641 Tm 6.164516 0 Td 48.473118 Tz (strong ) Tj 2.086452 0 Td 49 Tz (absorption ) Tj 3.395226 0 Td 49 Tz (peak ) Tj 1.650194 0 Td 50.580645 Tz (of ) Tj 0.986323 0 Td 47.419355 Tz (the ) Tj 1.213935 0 Td 51.634409 Tz (gas ) Tj 1.289806 0 Td 46.365591 Tz (specie ) Tj 1.745032 0 Td 31.612903 Tz (/ ) Tj 0.132774 0 Td 54.444444 Tz (molecules ) Tj 2.977935 0 Td 31.612903 Tz (\) ) Tj 0.550065 0 Td 47.419355 Tz (can ) Tj 2.560645 0 Td 47.103226 Tz (Thereafter ) Tj 2.826194 0 Td 34.774194 Tz (, ) Tj 0.474194 0 Td 46.365591 Tz (the ) Tj 1.176 0 Td 44.890323 Tz (light ) Tj 1.631226 0 Td 47.419355 Tz (signal ) Tj 1.953677 0 Td 50.580645 Tz (reaches ) Tj 2.408903 0 Td 46.365591 Tz (the ) Tj 1.176 0 Td 44.890323 Tz (light ) Tj 1.669161 0 Td 47.419355 Tz (detector ) Tj 2.503742 0 Td 52.688172 Tz (606 ) Tj 51.623377 0 0 51.623377 0 2418.950194 Tm 6.373082 0 Td 44.795597 Tz (interact ) Tj 2.227673 0 Td 50.041929 Tz (with ) Tj 1.569057 0 Td 49.503843 Tz (the ) Tj 1.181635 0 Td 49.503843 Tz (gas ) Tj 1.104151 0 Td 48.427673 Tz (specie ) Tj 1.840252 0 Td 32.285115 Tz (/ ) Tj 0.058113 0 Td 55.602143 Tz (molecules ) Tj 3.234969 0 Td 54.884696 Tz (and ) Tj 1.297862 0 Td 49.503843 Tz (the ) Tj 1.08478 0 Td 58.75891 Tz (power ) Tj 1.859623 0 Td 32.285115 Tz (/ ) Tj 0.193711 0 Td 41.324948 Tz (inten ) Tj 1.472201 0 Td 32.285115 Tz (- ) Tj 1.646541 0 Td 54.238994 Tz (which ) Tj 2.053333 0 Td 32.285115 Tz (is ) Tj 0.736101 0 Td 49.396226 Tz (configured ) Tj 3.293082 0 Td 43.584906 Tz (to ) Tj 0.871698 0 Td 48.831237 Tz (generate ) Tj 2.673208 0 Td 43.584906 Tz (an ) Tj 1.007296 0 Td 43.262055 Tz (electrical ) Tj 2.828176 0 Td 47.351502 Tz (signal ) Tj 1.975849 0 Td 53.808526 Tz (indica ) Tj 55.714286 0 0 55.714286 0 2374.183727 Tm 5.887179 0 Td 33.653846 Tz (sity ) Tj 1.202564 0 Td 52.350427 Tz (of ) Tj 0.969231 0 Td 45.868946 Tz (the ) Tj 1.148718 0 Td 44.017094 Tz (optical ) Tj 2.1 0 Td 45.868946 Tz (signal ) Tj 1.884615 0 Td 53.846154 Tz (would ) Tj 2.064103 0 Td 47.863248 Tz (thus ) Tj 1.4 0 Td 55.34188 Tz (be ) Tj 1.023077 0 Td 44.57265 Tz (attenuated ) Tj 2.746154 0 Td 32.905983 Tz (. ) Tj 0.610256 0 Td 49.85755 Tz (The ) Tj 2.279487 0 Td 41.132479 Tz (tive ) Tj 1.130769 0 Td 52.350427 Tz (of ) Tj 0.771795 0 Td 43.874644 Tz (the ) Tj 0.84359 0 Td 49.358974 Tz (presence ) Tj 2.530769 0 Td 49.85755 Tz (and ) Tj 1.005128 0 Td 32.905983 Tz (/ ) Tj 0.179487 0 Td 44.871795 Tz (or ) Tj 0.664103 0 Td 44.871795 Tz (the ) Tj 1.058974 0 Td 45.101907 Tz (concentration ) Tj 3.733333 0 Td 52.350427 Tz (of ) Tj 0.682051 0 Td 43.874644 Tz (the ) Tj 1.005128 0 Td 43.874644 Tz (gas ) Tj 0.969231 0 Td 48.461538 Tz (based ) Tj 55.714286 0 0 55.714286 0 2335.875414 Tm 5.851282 0 Td 45.332018 Tz (concentration ) Tj 3.984615 0 Td 49.85755 Tz (and ) Tj 0.933333 0 Td 32.905983 Tz (/ ) Tj 0.179487 0 Td 44.871795 Tz (or ) Tj 0.879487 0 Td 43.874644 Tz (the ) Tj 1.148718 0 Td 47.115385 Tz (presence ) Tj 2.638462 0 Td 53.846154 Tz (of ) Tj 0.897436 0 Td 43.874644 Tz (the ) Tj 1.166667 0 Td 44.871795 Tz (gas ) Tj 1.220513 0 Td 41.880342 Tz (specie ) Tj 1.597436 0 Td 32.905983 Tz (/ ) Tj 0.071795 0 Td 66.809117 Tz (mol ) Tj 1.184615 0 Td 32.905983 Tz (- ) Tj 0.646154 0 Td 32.905983 Tz (15 ) Tj 0.951282 0 Td 43.376068 Tz (on ) Tj 0.933333 0 Td 43.874644 Tz (the ) Tj 1.094872 0 Td 51.851852 Tz (change ) Tj 2.189744 0 Td 32.905983 Tz (in ) Tj 0.771795 0 Td 41.215575 Tz (intensity ) Tj 2.297436 0 Td 32.905983 Tz (/ ) Tj 0.179487 0 Td 54.444444 Tz (power ) Tj 2.028205 0 Td 22.435897 Tz (in ) Tj 0.753846 0 Td 43.874644 Tz (the ) Tj 1.112821 0 Td 42.696193 Tz (fingerprint ) Tj 3.069231 0 Td 67.307692 Tz (wave ) Tj 45.714286 0 0 45.714286 0 2297.659091 Tm 7.109375 0 Td 53.472222 Tz (ecules ) Tj 2.275 0 Td 54.6875 Tz (can ) Tj 1.26875 0 Td 49.21875 Tz (then ) Tj 1.44375 0 Td 72.916667 Tz (be ) Tj 1.071875 0 Td 58.697917 Tz (determined ) Tj 3.915625 0 Td 50.130208 Tz (from ) Tj 1.771875 0 Td 49.826389 Tz (the ) Tj 1.18125 0 Td 48.125 Tz (light ) Tj 1.640625 0 Td 67.8125 Tz (power ) Tj 2.078125 0 Td 32.8125 Tz (/ ) Tj 0.196875 0 Td 49.421296 Tz (intensity ) Tj 4.4625 0 Td 51.649306 Tz (length ) Tj 2.253125 0 Td 56.770833 Tz (regions ) Tj 2.58125 0 Td 65.625 Tz (of ) Tj 0.940625 0 Td 49.826389 Tz (the ) Tj 1.18125 0 Td 51.041667 Tz (light ) Tj 1.640625 0 Td 55.598958 Tz (received ) Tj 2.84375 0 Td 32.8125 Tz (. ) Tj 0.371875 0 Td 58.996212 Tz (Accordingly ) Tj 3.959375 0 Td 32.8125 Tz (, ) Tj 0.39375 0 Td 55.902778 Tz (the ) Tj 1.203125 0 Td 54.6875 Tz (optical ) Tj 51.428571 0 0 51.428571 0 2252.007823 Tm 6.319444 0 Td 47.727273 Tz (attenuation ) Tj 3.461111 0 Td 53.796296 Tz (based ) Tj 2.061111 0 Td 53.472222 Tz (on ) Tj 0.680556 0 Td 32.407407 Tz (, ) Tj 0.544444 0 Td 43.209877 Tz (for ) Tj 1.166667 0 Td 55.555556 Tz (example ) Tj 2.411111 0 Td 32.407407 Tz (, ) Tj 0.505556 0 Td 49.691358 Tz (the ) Tj 1.147222 0 Td 55.902778 Tz (Beer ) Tj 1.438889 0 Td 32.407407 Tz (- ) Tj 0.194444 0 Td 60.185185 Tz (Lambert ) Tj 2.819444 0 Td 44.290123 Tz (law ) Tj 2.469444 0 Td 58.333333 Tz (waveguide ) Tj 3.188889 0 Td 32.407407 Tz (- ) Tj 0.233333 0 Td 53.796296 Tz (based ) Tj 1.866667 0 Td 48.611111 Tz (detection ) Tj 2.975 0 Td 50.771605 Tz (can ) Tj 1.147222 0 Td 64.814815 Tz (be ) Tj 1.011111 0 Td 51.851852 Tz (used ) Tj 1.594444 0 Td 32.407407 Tz (to ) Tj 0.797222 0 Td 47.685185 Tz (replace ) Tj 2.391667 0 Td 62.654321 Tz (conven ) Tj 45.714286 0 0 45.714286 0 2213.735705 Tm 7 0 Td 73.645833 Tz (known ) Tj 2.5375 0 Td 34.635417 Tz (in ) Tj 0.853125 0 Td 53.472222 Tz (the ) Tj 1.1375 0 Td 49.826389 Tz (art ) Tj 0.875 0 Td 32.8125 Tz (. ) Tj 0.415625 0 Td 60.763889 Tz (For ) Tj 1.378125 0 Td 62.5 Tz (example ) Tj 2.690625 0 Td 32.8125 Tz (, ) Tj 0.39375 0 Td 55.902778 Tz (the ) Tj 1.26875 0 Td 62.586806 Tz (change ) Tj 2.5375 0 Td 34.635417 Tz (in ) Tj 0.853125 0 Td 47.800926 Tz (intensity ) Tj 2.909375 0 Td 65.625 Tz (of ) Tj 0.940625 0 Td 55.902778 Tz (the ) Tj 2.646875 0 Td 51.649306 Tz (tional ) Tj 2.0125 0 Td 49.21875 Tz (free ) Tj 1.465625 0 Td 58.333333 Tz (space ) Tj 2.034375 0 Td 55.208333 Tz (configurations ) Tj 4.834375 0 Td 49.826389 Tz (for ) Tj 1.05 0 Td 53.776042 Tz (high ) Tj 1.6625 0 Td 49.05303 Tz (sensitivity ) Tj 3.521875 0 Td 54.282407 Tz (detection ) Tj 51.764706 0 0 51.764706 0 2172.180628 Tm 6.317045 0 Td 45.075758 Tz (light ) Tj 1.506818 0 Td 48.697917 Tz (received ) Tj 2.588636 0 Td 62.784091 Tz (by ) Tj 0.985227 0 Td 49.368687 Tz (the ) Tj 1.101136 0 Td 45.719697 Tz (light ) Tj 1.564773 0 Td 47.49053 Tz (detector ) Tj 2.472727 0 Td 54.734848 Tz (606 ) Tj 1.352273 0 Td 59.027778 Tz (due ) Tj 1.294318 0 Td 32.19697 Tz (to ) Tj 0.772727 0 Td 45.075758 Tz (light ) Tj 1.468182 0 Td 52.051768 Tz (absorp ) Tj 2.009091 0 Td 32.19697 Tz (- ) Tj 1.719318 0 Td 49.368687 Tz (and ) Tj 1.255682 0 Td 45.075758 Tz (low ) Tj 1.275 0 Td 60.530303 Tz (power ) Tj 2.125 0 Td 54.442149 Tz (consumption ) Tj 3.709091 0 Td 32.19697 Tz (. ) Tj 55.714286 0 0 55.714286 0 2128.170799 Tm 5.815385 0 Td 41.132479 Tz (tion ) Tj 1.274359 0 Td 52.350427 Tz (by ) Tj 0.951282 0 Td 44.871795 Tz (the ) Tj 1.094872 0 Td 44.871795 Tz (gas ) Tj 1.041026 0 Td 44.871795 Tz (specie ) Tj 1.705128 0 Td 32.905983 Tz (/ ) Tj 0.125641 0 Td 51.187085 Tz (molecules ) Tj 3.033333 0 Td 32.905983 Tz (is ) Tj 0.664103 0 Td 46.367521 Tz (proportional ) Tj 3.535897 0 Td 32.905983 Tz (to ) Tj 0.771795 0 Td 43.874644 Tz (the ) Tj 1.094872 0 Td 44.871795 Tz (gas ) Tj 1.292308 0 Td 32.905983 Tz (20 ) Tj 1.579487 0 Td 50.3108 Tz (Accordingly ) Tj 3.302564 0 Td 32.905983 Tz (, ) Tj 0.574359 0 Td 41.880342 Tz (from ) Tj 1.561538 0 Td 43.874644 Tz (FIG ) Tj 1.076923 0 Td 32.905983 Tz (. ) Tj 0.430769 0 Td 64.316239 Tz (6A ) Tj 0.825641 0 Td 32.905983 Tz (, ) Tj 0.628205 0 Td 19.444444 Tz (it ) Tj 0.628205 0 Td 44.871795 Tz (can ) Tj 1.130769 0 Td 62.820513 Tz (be ) Tj 1.023077 0 Td 46.503497 Tz (appreciated ) Tj 3.482051 0 Td 43.874644 Tz (the ) Tj 55.714286 0 0 55.714286 0 2084.662083 Tm 5.797436 0 Td 46.712689 Tz (concentration ) Tj 4.146154 0 Td 49.85755 Tz (and ) Tj 1.364103 0 Td 47.115385 Tz (thus ) Tj 1.507692 0 Td 44.871795 Tz (reveals ) Tj 2.441026 0 Td 42.378917 Tz (quantitative ) Tj 3.535897 0 Td 47.047397 Tz (information ) Tj 4.505128 0 Td 44.017094 Tz (optical ) Tj 2.171795 0 Td 45.868946 Tz (gas ) Tj 1.130769 0 Td 48.361823 Tz (sensor ) Tj 1.920513 0 Td 55.840456 Tz (600 ) Tj 1.4 0 Td 32.905983 Tz (is ) Tj 0.664103 0 Td 48.504274 Tz (advantageously ) Tj 4.487179 0 Td 45.769231 Tz (configured ) Tj 3.176923 0 Td 44.123932 Tz (such ) Tj 45.714286 0 0 45.714286 0 2045.167522 Tm 7.065625 0 Td 57.928241 Tz (regarding ) Tj 3.390625 0 Td 54.6875 Tz (the ) Tj 1.4 0 Td 54.6875 Tz (concentration ) Tj 4.55 0 Td 63.802083 Tz (of ) Tj 0.9625 0 Td 55.902778 Tz (the ) Tj 1.378125 0 Td 55.902778 Tz (gas ) Tj 1.290625 0 Td 52.864583 Tz (specie ) Tj 2.05625 0 Td 32.8125 Tz (/ ) Tj 0.2625 0 Td 54.407051 Tz (concentration ) Tj 6.08125 0 Td 51.041667 Tz (that ) Tj 1.553125 0 Td 49.826389 Tz (the ) Tj 1.290625 0 Td 55.208333 Tz (sensing ) Tj 2.75625 0 Td 48.125 Tz (light ) Tj 1.70625 0 Td 56.510417 Tz (signal ) Tj 2.31875 0 Td 59.548611 Tz (and ) Tj 1.4875 0 Td 55.902778 Tz (reference ) Tj 3.28125 0 Td 51.770833 Tz (light ) Tj 1.815625 0 Td 56.510417 Tz (signal ) Tj 2.296875 0 Td 54.6875 Tz (can ) Tj 52.653061 0 0 52.653061 0 2004.766756 Tm 6.24845 0 Td 22.157623 Tz (in ) Tj 0.721705 0 Td 48.535745 Tz (the ) Tj 1.120543 0 Td 48.535745 Tz (gas ) Tj 1.177519 0 Td 48.837209 Tz (sensing ) Tj 2.336047 0 Td 49.063307 Tz (region ) Tj 1.994186 0 Td 59.086994 Tz (604 ) Tj 1.158527 0 Td 31.653747 Tz (. ) Tj 58.571429 0 0 58.571429 0 1999.409449 Tm 22.246341 0 Td 41.544715 Tz (share ) Tj 1.45122 0 Td 34.146341 Tz (a ) Tj 0.478049 0 Td 59.281843 Tz (common ) Tj 2.321951 0 Td 52.168022 Tz (waveguide ) Tj 3.056098 0 Td 44.579946 Tz (100 ) Tj 1.058537 0 Td 43.631436 Tz (and ) Tj 1.041463 0 Td 44.579946 Tz (can ) Tj 1.02439 0 Td 52.642276 Tz (be ) Tj 0.802439 0 Td 45.884146 Tz (switched ) Tj 2.407317 0 Td 55.487805 Tz (by ) Tj 0.819512 0 Td 39.837398 Tz (the ) Tj 51.614907 0 0 51.614907 0 1962.372588 Tm 7.110349 0 Td 32.290413 Tz (In ) Tj 0.716847 0 Td 50.280786 Tz (various ) Tj 2.402407 0 Td 58.709842 Tz (embodiments ) Tj 3.855475 0 Td 32.290413 Tz (, ) Tj 0.426233 0 Td 44.130231 Tz (the ) Tj 1.065584 0 Td 47.974328 Tz (optical ) Tj 2.247413 0 Td 49.511967 Tz (gas ) Tj 1.123706 0 Td 51.664661 Tz (sensor ) Tj 1.956799 0 Td 61.351785 Tz (600 ) Tj 1.356197 0 Td 49.24288 Tz (pref ) Tj 1.239952 0 Td 32.290413 Tz (- ) Tj 1.666185 0 Td 47.974328 Tz (tunable ) Tj 2.441155 0 Td 37.672149 Tz (filter ) Tj 1.530566 0 Td 60.275438 Tz (608 ) Tj 1.201203 0 Td 32.290413 Tz (. ) Tj 0.50373 0 Td 54.893702 Tz (For ) Tj 1.2787 0 Td 54.893702 Tz (example ) Tj 2.402407 0 Td 32.290413 Tz (, ) Tj 0.484356 0 Td 44.130231 Tz (the ) Tj 1.181829 0 Td 45.206578 Tz (light ) Tj 1.588688 0 Td 51.664661 Tz (source ) Tj 2.111793 0 Td 60.275438 Tz (602 ) Tj 1.336823 0 Td 71.038909 Tz (may ) Tj 51.428571 0 0 51.428571 0 1922.224173 Tm 6.338889 0 Td 46.990741 Tz (erably ) Tj 2.119444 0 Td 44.907407 Tz (further ) Tj 2.197222 0 Td 54.372428 Tz (comprises ) Tj 3.247222 0 Td 32.407407 Tz (a ) Tj 0.583333 0 Td 47.685185 Tz (tunable ) Tj 2.469444 0 Td 34.027778 Tz (filter ) Tj 1.516667 0 Td 55.092593 Tz (608 ) Tj 1.419444 0 Td 50.231481 Tz (configured ) Tj 3.344444 0 Td 32.407407 Tz (to ) Tj 1.05 0 Td 32.407407 Tz (25 ) Tj 1.011111 0 Td 52.662037 Tz (emit ) Tj 1.497222 0 Td 45.37037 Tz (light ) Tj 1.536111 0 Td 34.027778 Tz (in ) Tj 0.777778 0 Td 49.691358 Tz (the ) Tj 1.05 0 Td 65.895062 Tz (Mid ) Tj 1.322222 0 Td 32.407407 Tz (- ) Tj 0.291667 0 Td 32.407407 Tz (IR ) Tj 0.797222 0 Td 53.796296 Tz (wavelength ) Tj 3.636111 0 Td 48.611111 Tz (region ) Tj 2.1 0 Td 56.17284 Tz (and ) Tj 1.341667 0 Td 43.209877 Tz (the ) Tj 1.108333 0 Td 40.833333 Tz (light ) Tj 1.516667 0 Td 32.407407 Tz (is ) Tj 55.714286 0 0 55.714286 0 1876.606081 Tm 5.815385 0 Td 46.153846 Tz (receive ) Tj 2.189744 0 Td 44.871795 Tz (the ) Tj 1.058974 0 Td 42.478632 Tz (light ) Tj 1.54359 0 Td 41.880342 Tz (from ) Tj 1.471795 0 Td 43.874644 Tz (the ) Tj 1.112821 0 Td 40.08547 Tz (light ) Tj 1.435897 0 Td 47.863248 Tz (source ) Tj 1.920513 0 Td 60.826211 Tz (602 ) Tj 1.292308 0 Td 49.85755 Tz (and ) Tj 1.310256 0 Td 40.792541 Tz (selectively ) Tj 4.146154 0 Td 47.364672 Tz (passed ) Tj 2.082051 0 Td 46.581197 Tz (through ) Tj 2.297436 0 Td 43.874644 Tz (the ) Tj 1.058974 0 Td 45.726496 Tz (tunable ) Tj 2.24359 0 Td 34.900285 Tz (filter ) Tj 1.453846 0 Td 55.840456 Tz (608 ) Tj 1.041026 0 Td 32.905983 Tz (. ) Tj 0.466667 0 Td 60.826211 Tz (Two ) Tj 1.346154 0 Td 51.670552 Tz (wavelengths ) Tj 3.64359 0 Td 32.905983 Tz (\( ) Tj 0.215385 0 Td 32.905983 Tz (a ) Tj 51.428571 0 0 51.428571 0 1839.803618 Tm 6.241667 0 Td 51.446759 Tz (transmit ) Tj 2.605556 0 Td 49.691358 Tz (the ) Tj 1.147222 0 Td 45.37037 Tz (light ) Tj 1.477778 0 Td 55.632716 Tz (having ) Tj 2.236111 0 Td 32.407407 Tz (a ) Tj 0.427778 0 Td 54.095442 Tz (predetermined ) Tj 4.433333 0 Td 53.796296 Tz (wavelength ) Tj 3.616667 0 Td 32.407407 Tz (to ) Tj 0.661111 0 Td 49.691358 Tz (the ) Tj 2.508333 0 Td 33.055556 Tz (first ) Tj 1.322222 0 Td 54.12037 Tz (wavelength ) Tj 3.772222 0 Td 51.851852 Tz (being ) Tj 2.022222 0 Td 49.691358 Tz (the ) Tj 1.361111 0 Td 45.37037 Tz (fingerprint ) Tj 3.286111 0 Td 53.796296 Tz (wavelength ) Tj 3.752778 0 Td 53.472222 Tz (of ) Tj 0.972222 0 Td 49.691358 Tz (the ) Tj 51.428571 0 0 51.428571 0 1797.861882 Tm 6.3 0 Td 48.148148 Tz (optical ) Tj 2.1 0 Td 58.693416 Tz (waveguide ) Tj 3.5 0 Td 43.569959 Tz (structure ) Tj 2.761111 0 Td 49.691358 Tz (100 ) Tj 1.011111 0 Td 32.407407 Tz (. ) Tj 0.427778 0 Td 55.092593 Tz (The ) Tj 1.263889 0 Td 49.537037 Tz (tunable ) Tj 2.372222 0 Td 37.808642 Tz (filter ) Tj 1.458333 0 Td 55.092593 Tz (608 ) Tj 1.205556 0 Td 71.296296 Tz (may ) Tj 2.858333 0 Td 44.830247 Tz (target ) Tj 2.158333 0 Td 48.611111 Tz (gas ) Tj 1.302778 0 Td 56.17284 Tz (and ) Tj 1.516667 0 Td 32.407407 Tz (a ) Tj 0.738889 0 Td 55.092593 Tz (second ) Tj 2.352778 0 Td 55.740741 Tz (wavelength ) Tj 3.85 0 Td 51.851852 Tz (being ) Tj 2.080556 0 Td 32.407407 Tz (a ) Tj 0.758333 0 Td 48.251029 Tz (reference ) Tj 51.587302 0 0 51.587302 0 1756.607969 Tm 6.203077 0 Td 63 Tz (be ) Tj 1.104923 0 Td 48.138462 Tz (configured ) Tj 3.295385 0 Td 32.307692 Tz (to ) Tj 0.697846 0 Td 59.769231 Tz (have ) Tj 1.744615 0 Td 32.307692 Tz (a ) Tj 0.445846 0 Td 53.953846 Tz (wavelength ) Tj 3.663692 0 Td 50.076923 Tz (tuning ) Tj 2.074154 0 Td 52.984615 Tz (range ) Tj 1.764 0 Td 57.507692 Tz (based ) Tj 1.977231 0 Td 53.307692 Tz (on ) Tj 2.190462 0 Td 53.630769 Tz (wavelength ) Tj 3.372923 0 Td 32.307692 Tz (\) ) Tj 0.465231 0 Td 45.230769 Tz (are ) Tj 1.046769 0 Td 46.038462 Tz (selected ) Tj 2.461846 0 Td 47.384615 Tz (periodically ) Tj 3.760615 0 Td 53.846154 Tz (and ) Tj 1.279385 0 Td 47.874126 Tz (transmitted ) Tj 3.469846 0 Td 51.046154 Tz (along ) Tj 51.428571 0 0 51.428571 0 1712.482051 Tm 6.3 0 Td 49.691358 Tz (the ) Tj 1.127778 0 Td 43.981481 Tz (variety ) Tj 2.236111 0 Td 53.472222 Tz (of ) Tj 0.855556 0 Td 50.771605 Tz (gas ) Tj 1.030556 0 Td 55.452675 Tz (molecules ) Tj 3.305556 0 Td 46.296296 Tz (desired ) Tj 2.294444 0 Td 32.407407 Tz (to ) Tj 0.680556 0 Td 64.814815 Tz (be ) Tj 1.011111 0 Td 48.206019 Tz (detected ) Tj 2.352778 0 Td 32.407407 Tz (, ) Tj 0.466667 0 Td 47.800926 Tz (such ) Tj 1.555556 0 Td 42.12963 Tz (as ) Tj 1.069444 0 Td 32.407407 Tz (30 ) Tj 0.972222 0 Td 49.691358 Tz (the ) Tj 1.147222 0 Td 48.611111 Tz (optical ) Tj 2.177778 0 Td 60.133745 Tz (waveguide ) Tj 3.5 0 Td 46.090535 Tz (structure ) Tj 2.858333 0 Td 55.092593 Tz (100 ) Tj 1.030556 0 Td 32.407407 Tz (. ) Tj 0.602778 0 Td 55.092593 Tz (The ) Tj 1.283333 0 Td 45.37037 Tz (light ) Tj 1.613889 0 Td 48.021886 Tz (transmitted ) Tj 51.542857 0 0 51.542857 0 1670.245105 Tm 6.189024 0 Td 61.437546 Tz (but ) Tj 1.222284 0 Td 54.970436 Tz (not ) Tj 1.16408 0 Td 47.117517 Tz (limited ) Tj 2.308758 0 Td 32.335551 Tz (to ) Tj 0.756652 0 Td 54.970436 Tz (about ) Tj 1.823725 0 Td 32.335551 Tz (2 ) Tj 0.523836 0 Td 53.353659 Tz (um ) Tj 1.16408 0 Td 32.335551 Tz (to ) Tj 0.717849 0 Td 56.263858 Tz (about ) Tj 1.920732 0 Td 32.335551 Tz (7 ) Tj 0.543237 0 Td 43.652993 Tz (um ) Tj 0.853659 0 Td 32.335551 Tz (, ) Tj 0.388027 0 Td 53.353659 Tz (or ) Tj 0.853659 0 Td 55.617147 Tz (about ) Tj 1.90133 0 Td 32.335551 Tz (2 ) Tj 0.446231 0 Td 53.353659 Tz (um ) Tj 2.425166 0 Td 50.351072 Tz (through ) Tj 2.444568 0 Td 49.581178 Tz (the ) Tj 1.008869 0 Td 48.04139 Tz (optical ) Tj 2.095344 0 Td 58.203991 Tz (waveguide ) Tj 3.375831 0 Td 45.988339 Tz (structure ) Tj 2.793792 0 Td 49.581178 Tz (100 ) Tj 1.183481 0 Td 54.970436 Tz (and ) Tj 1.183481 0 Td 48.90752 Tz (received ) Tj 2.522173 0 Td 64.671101 Tz (by ) Tj 61.428571 0 0 61.428571 0 1623.8461 Tm 5.339535 0 Td 21.705426 Tz (to ) Tj 0.651163 0 Td 45.03876 Tz (about ) Tj 1.562791 0 Td 32.55814 Tz (5 ) Tj 0.439535 0 Td 54.263566 Tz (um ) Tj 0.813953 0 Td 32.55814 Tz (. ) Tj 0.374419 0 Td 44.315245 Tz (For ) Tj 1.106977 0 Td 44.96124 Tz (example ) Tj 2.018605 0 Td 32.55814 Tz (, ) Tj 0.35814 0 Td 38.888889 Tz (the ) Tj 0.911628 0 Td 42.635659 Tz (tunable ) Tj 2.132558 0 Td 30.297158 Tz (filter ) Tj 1.269767 0 Td 44.315245 Tz (608 ) Tj 1.05814 0 Td 61.498708 Tz (may ) Tj 1.334884 0 Td 42.054264 Tz (be ) Tj 1.75814 0 Td 38.888889 Tz (the ) Tj 0.993023 0 Td 39.612403 Tz (light ) Tj 1.448837 0 Td 39.680233 Tz (detector ) Tj 2.165116 0 Td 44.315245 Tz (606 ) Tj 1.139535 0 Td 32.55814 Tz (is ) Tj 0.732558 0 Td 39.341085 Tz (then ) Tj 1.269767 0 Td 43.410853 Tz (processed ) Tj 2.62093 0 Td 32.55814 Tz (to ) Tj 0.716279 0 Td 41.149871 Tz (detect ) Tj 1.725581 0 Td 38.888889 Tz (the ) Tj 1.025581 0 Td 44.315245 Tz (gas ) Tj 51.809524 0 0 51.809524 0 1588.259213 Tm 6.272978 0 Td 49.540441 Tz (configured ) Tj 3.358456 0 Td 43.428309 Tz (to ) Tj 0.926471 0 Td 48.65579 Tz (transmit ) Tj 2.644301 0 Td 45.036765 Tz (light ) Tj 1.544118 0 Td 55.223652 Tz (having ) Tj 2.335478 0 Td 32.169118 Tz (a ) Tj 0.52114 0 Td 53.722426 Tz (wavelength ) Tj 3.705882 0 Td 45.438879 Tz (selected ) Tj 3.821691 0 Td 48.748586 Tz (concentration ) Tj 3.918199 0 Td 32.169118 Tz (. ) Tj 0.424632 0 Td 50.091912 Tz (Various ) Tj 2.393382 0 Td 49.862132 Tz (signal ) Tj 1.930147 0 Td 51.470588 Tz (processing ) Tj 3.28125 0 Td 51.470588 Tz (techniques ) Tj 3.28125 0 Td 68.841912 Tz (known ) Tj 55.714286 0 0 55.714286 0 1542.92036 Tm 5.725641 0 Td 52.051282 Tz (based ) Tj 1.866667 0 Td 44.871795 Tz (on ) Tj 0.861538 0 Td 32.905983 Tz (\( ) Tj 0.179487 0 Td 48.237179 Tz (overlaps ) Tj 2.476923 0 Td 41.880342 Tz (with ) Tj 1.184615 0 Td 32.905983 Tz (\) ) Tj 0.448718 0 Td 43.874644 Tz (the ) Tj 1.058974 0 Td 42.424242 Tz (fingerprint ) Tj 2.889744 0 Td 50.25641 Tz (wavelength ) Tj 3.374359 0 Td 32.905983 Tz (\( ) Tj 0.233333 0 Td 45.868946 Tz (strong ) Tj 3.015385 0 Td 31.410256 Tz (in ) Tj 0.7 0 Td 43.874644 Tz (the ) Tj 0.933333 0 Td 38.888889 Tz (art ) Tj 0.951282 0 Td 37.891738 Tz (for ) Tj 0.951282 0 Td 47.319347 Tz (determining ) Tj 3.392308 0 Td 43.874644 Tz (the ) Tj 1.005128 0 Td 43.874644 Tz (gas ) Tj 1.094872 0 Td 45.101907 Tz (concentration ) Tj 3.697436 0 Td 49.65812 Tz (based ) Tj 1.705128 0 Td 52.350427 Tz (on ) Tj 0.915385 0 Td 43.874644 Tz (the ) Tj 50 0 0 50 0 1503.702551 Tm 6.46 0 Td 51.333333 Tz (absorption ) Tj 3.4 0 Td 56.666667 Tz (peak ) Tj 1.48 0 Td 33.333333 Tz (\) ) Tj 0.5 0 Td 53.333333 Tz (of ) Tj 0.9 0 Td 50 Tz (the ) Tj 1.24 0 Td 48.888889 Tz (gas ) Tj 1.18 0 Td 49.444444 Tz (specie ) Tj 1.84 0 Td 33.333333 Tz (/ ) Tj 0.06 0 Td 59.259259 Tz (molecules ) Tj 3.46 0 Td 48.095238 Tz (desired ) Tj 2.44 0 Td 33.333333 Tz (to ) Tj 0.66 0 Td 75 Tz (be ) Tj 1.38 0 Td 33.333333 Tz (35 ) Tj 0.94 0 Td 52.083333 Tz (received ) Tj 2.8 0 Td 52.380952 Tz (sensing ) Tj 2.48 0 Td 45.333333 Tz (light ) Tj 1.62 0 Td 48.888889 Tz (signal ) Tj 1.9 0 Td 54.444444 Tz (and ) Tj 1.26 0 Td 51.851852 Tz (reference ) Tj 3.06 0 Td 47.333333 Tz (light ) Tj 1.58 0 Td 52.222222 Tz (signal ) Tj 1.92 0 Td 71.111111 Tz (may ) Tj 51.623377 0 0 51.623377 0 1461.468099 Tm 6.295597 0 Td 47.620545 Tz (detected ) Tj 2.421384 0 Td 32.285115 Tz (. ) Tj 0.387421 0 Td 43.584906 Tz (In ) Tj 0.813585 0 Td 50.272537 Tz (various ) Tj 2.402013 0 Td 58.70021 Tz (embodiments ) Tj 3.854843 0 Td 32.285115 Tz (, ) Tj 0.426164 0 Td 49.503843 Tz (the ) Tj 1.104151 0 Td 45.199161 Tz (light ) Tj 1.510943 0 Td 52.19427 Tz (source ) Tj 2.033962 0 Td 61.341719 Tz (602 ) Tj 1.355975 0 Td 60.265549 Tz (and ) Tj 2.479497 0 Td 64.570231 Tz (be ) Tj 1.181635 0 Td 47.966457 Tz (applied ) Tj 2.111447 0 Td 32.285115 Tz (. ) Tj 0.484277 0 Td 54.884696 Tz (For ) Tj 1.45283 0 Td 54.42348 Tz (example ) Tj 2.789434 0 Td 53.808526 Tz (and ) Tj 1.297862 0 Td 54.884696 Tz (without ) Tj 2.615094 0 Td 46.167715 Tz (limitation ) Tj 2.789434 0 Td 32.285115 Tz (, ) Tj 0.639245 0 Td 32.285115 Tz (a ) Tj 0.54239 0 Td 52.301887 Tz (basic ) Tj 61.428571 0 0 61.428571 0 1417.508899 Tm 5.274419 0 Td 38.888889 Tz (the ) Tj 1.05814 0 Td 39.612403 Tz (light ) Tj 1.416279 0 Td 42.054264 Tz (detector ) Tj 2.230233 0 Td 49.741602 Tz (606 ) Tj 1.204651 0 Td 60.594315 Tz (may ) Tj 1.497674 0 Td 42.054264 Tz (be ) Tj 0.927907 0 Td 38.527132 Tz (fabricated ) Tj 2.702326 0 Td 43.410853 Tz (on ) Tj 0.960465 0 Td 39.793282 Tz (the ) Tj 1.025581 0 Td 36.821705 Tz (silicon ) Tj 2.865116 0 Td 41.149871 Tz (signal ) Tj 1.595349 0 Td 42.868217 Tz (processing ) Tj 2.751163 0 Td 42.807924 Tz (technique ) Tj 2.588372 0 Td 33.462532 Tz (for ) Tj 0.813953 0 Td 44.397463 Tz (determining ) Tj 3.14186 0 Td 38.888889 Tz (the ) Tj 0.846512 0 Td 44.315245 Tz (gas ) Tj 1.009302 0 Td 50.193798 Tz (concen ) Tj 55.714286 0 0 55.714286 0 1376.476281 Tm 5.851282 0 Td 44.123932 Tz (chip ) Tj 1.130769 0 Td 32.905983 Tz (/ ) Tj 0.197436 0 Td 42.877493 Tz (substrate ) Tj 2.566667 0 Td 54.843305 Tz (612 ) Tj 1.202564 0 Td 44.871795 Tz (or ) Tj 0.646154 0 Td 48.361823 Tz (hybrid ) Tj 2.064103 0 Td 43.076923 Tz (integrated ) Tj 2.835897 0 Td 32.905983 Tz (\( ) Tj 0.215385 0 Td 32.905983 Tz (i ) Tj 0.215385 0 Td 32.905983 Tz (. ) Tj 0.215385 0 Td 32.905983 Tz (e ) Tj 0.197436 0 Td 32.905983 Tz (. ) Tj 0.215385 0 Td 32.905983 Tz (, ) Tj 0.287179 0 Td 54.843305 Tz (bonded ) Tj 2.028205 0 Td 32.905983 Tz (\) ) Tj 0.358974 0 Td 53.846154 Tz (on ) Tj 0.915385 0 Td 43.874644 Tz (the ) Tj 2.171795 0 Td 39.74359 Tz (tration ) Tj 1.95641 0 Td 31.410256 Tz (is ) Tj 0.574359 0 Td 47.863248 Tz (based ) Tj 1.669231 0 Td 53.846154 Tz (on ) Tj 0.825641 0 Td 47.115385 Tz (dividing ) Tj 2.458974 0 Td 43.874644 Tz (the ) Tj 0.951282 0 Td 47.863248 Tz (received ) Tj 2.548718 0 Td 45.726496 Tz (sensing ) Tj 2.189744 0 Td 38.290598 Tz (light ) Tj 1.382051 0 Td 44.871795 Tz (signal ) Tj 55.714286 0 0 55.714286 0 1333.25 Tm 5.887179 0 Td 38.461538 Tz (silicon ) Tj 1.992308 0 Td 41.132479 Tz (chip ) Tj 1.130769 0 Td 32.905983 Tz (/ ) Tj 0.197436 0 Td 42.877493 Tz (substrate ) Tj 2.548718 0 Td 55.840456 Tz (612 ) Tj 1.041026 0 Td 32.905983 Tz (. ) Tj 55.714286 0 0 55.714286 0 1333.20274 Tm 23.207692 0 Td 62.820513 Tz (by ) Tj 1.202564 0 Td 43.874644 Tz (the ) Tj 1.148718 0 Td 46.20133 Tz (reference ) Tj 2.979487 0 Td 40.08547 Tz (light ) Tj 1.579487 0 Td 45.868946 Tz (signal ) Tj 1.633333 0 Td 32.905983 Tz (. ) Tj 0.574359 0 Td 31.410256 Tz (In ) Tj 1.005128 0 Td 44.444444 Tz (various ) Tj 2.315385 0 Td 54.118104 Tz (embodiments ) Tj 3.589744 0 Td 32.905983 Tz (, ) Tj 61.428571 0 0 61.428571 0 1292.127944 Tm 5.909302 0 Td 47.631352 Tz (According ) Tj 2.751163 0 Td 32.55814 Tz (to ) Tj 0.7 0 Td 32.55814 Tz (an ) Tj 0.765116 0 Td 46.124031 Tz (example ) Tj 2.246512 0 Td 50.193798 Tz (embodiment ) Tj 2.930233 0 Td 32.55814 Tz (, ) Tj 0.35814 0 Td 44.315245 Tz (the ) Tj 0.960465 0 Td 40.310078 Tz (optical ) Tj 1.74186 0 Td 53.585271 Tz (wave ) Tj 1.351163 0 Td 32.55814 Tz (- ) Tj 0.537209 0 Td 43.410853 Tz (40 ) Tj 0.846512 0 Td 46.124031 Tz (multi ) Tj 1.351163 0 Td 32.55814 Tz (- ) Tj 0.17907 0 Td 44.315245 Tz (gas ) Tj 0.993023 0 Td 39.190353 Tz (detection ) Tj 2.376744 0 Td 37.984496 Tz (can ) Tj 0.993023 0 Td 33.914729 Tz (also ) Tj 1.106977 0 Td 42.054264 Tz (be ) Tj 0.716279 0 Td 37.306202 Tz (realized ) Tj 1.986047 0 Td 52.906977 Tz (by ) Tj 0.862791 0 Td 41.782946 Tz (using ) Tj 1.416279 0 Td 39.793282 Tz (the ) Tj 0.944186 0 Td 40.310078 Tz (tunable ) Tj 51.496599 0 0 51.496599 0 1255.812213 Tm 6.311096 0 Td 54.372523 Tz (guide ) Tj 1.922457 0 Td 45.310436 Tz (structure ) Tj 2.854557 0 Td 49.625716 Tz (100 ) Tj 1.203963 0 Td 32.364597 Tz (is ) Tj 0.757332 0 Td 50.165125 Tz (arranged ) Tj 2.524439 0 Td 32.364597 Tz (/ ) Tj 0.291281 0 Td 49.517834 Tz (configured ) Tj 3.28177 0 Td 32.364597 Tz (to ) Tj 0.835007 0 Td 44.501321 Tz (form ) Tj 1.611757 0 Td 32.364597 Tz (a ) Tj 0.543725 0 Td 45.310436 Tz (spiral ) Tj 3.204095 0 Td 33.982827 Tz (filter ) Tj 1.339894 0 Td 60.413915 Tz (608 ) Tj 1.417569 0 Td 32.364597 Tz (to ) Tj 0.737913 0 Td 45.849846 Tz (select ) Tj 1.88362 0 Td 45.310436 Tz (different ) Tj 2.563276 0 Td 48.084544 Tz (optical ) Tj 2.077807 0 Td 56.314399 Tz (wavelength ) Tj 3.553633 0 Td 54.372523 Tz (based ) Tj 1.922457 0 Td 53.401585 Tz (on ) Tj 0.951519 0 Td 49.625716 Tz (the ) Tj 51.428571 0 0 51.428571 0 1214.192044 Tm 6.3 0 Td 43.981481 Tz (pattern ) Tj 2.158333 0 Td 59.41358 Tz (620 ) Tj 1.341667 0 Td 53.472222 Tz (as ) Tj 0.933333 0 Td 40.656566 Tz (illustrated ) Tj 3.052778 0 Td 32.407407 Tz (in ) Tj 0.777778 0 Td 44.290123 Tz (FIG ) Tj 1.088889 0 Td 32.407407 Tz (. ) Tj 0.35 0 Td 64.814815 Tz (6A ) Tj 0.913889 0 Td 32.407407 Tz (. ) Tj 0.525 0 Td 56.17284 Tz (The ) Tj 1.205556 0 Td 45.37037 Tz (spiral ) Tj 1.788889 0 Td 46.296296 Tz (pattern ) Tj 2.216667 0 Td 60.493827 Tz (620 ) Tj 2.683333 0 Td 45.959596 Tz (fingerprint ) Tj 3.305556 0 Td 54.12037 Tz (wavelength ) Tj 3.772222 0 Td 53.472222 Tz (of ) Tj 1.030556 0 Td 44.290123 Tz (the ) Tj 1.263889 0 Td 44.830247 Tz (target ) Tj 1.963889 0 Td 51.203704 Tz (gases ) Tj 1.963889 0 Td 48.611111 Tz (desired ) Tj 2.508333 0 Td 34.027778 Tz (to ) Tj 0.836111 0 Td 63.194444 Tz (be ) Tj 45.714286 0 0 45.714286 0 1173.852071 Tm 7.0875 0 Td 58.333333 Tz (enables ) Tj 2.909375 0 Td 32.8125 Tz (a ) Tj 0.678125 0 Td 75.651042 Tz (much ) Tj 2.384375 0 Td 57.725694 Tz (longer ) Tj 2.559375 0 Td 53.645833 Tz (optical ) Tj 2.66875 0 Td 47.395833 Tz (path ) Tj 1.771875 0 Td 57.8125 Tz (through ) Tj 3.01875 0 Td 55.902778 Tz (the ) Tj 1.4 0 Td 54.166667 Tz (optical ) Tj 3.915625 0 Td 55.143229 Tz (detected ) Tj 2.734375 0 Td 32.8125 Tz (. ) Tj 55.714286 0 0 55.714286 0 1126.032877 Tm 5.761538 0 Td 55.840456 Tz (waveguide ) Tj 3.338462 0 Td 41.547958 Tz (structure ) Tj 2.620513 0 Td 49.85755 Tz (100 ) Tj 1.220513 0 Td 32.905983 Tz (to ) Tj 0.682051 0 Td 65.811966 Tz (be ) Tj 1.076923 0 Td 44.017094 Tz (created ) Tj 2.153846 0 Td 44.373219 Tz (within ) Tj 2.028205 0 Td 32.905983 Tz (a ) Tj 0.574359 0 Td 40.982906 Tz (relatively ) Tj 4.558974 0 Td 31.410256 Tz (in ) Tj 0.753846 0 Td 49.145299 Tz (various ) Tj 2.351282 0 Td 53.030303 Tz (embodiments ) Tj 3.589744 0 Td 32.905983 Tz (, ) Tj 0.430769 0 Td 43.874644 Tz (the ) Tj 1.130769 0 Td 46.153846 Tz (tunable ) Tj 2.315385 0 Td 31.908832 Tz (filter ) Tj 1.453846 0 Td 49.85755 Tz (608 ) Tj 1.184615 0 Td 65.811966 Tz (may ) Tj 1.54359 0 Td 55.34188 Tz (be ) Tj 45.714286 0 0 45.714286 0 1088.083903 Tm 7.065625 0 Td 59.0625 Tz (small ) Tj 2.121875 0 Td 51.953125 Tz (area ) Tj 1.290625 0 Td 32.8125 Tz (/ ) Tj 0.21875 0 Td 59.0625 Tz (space ) Tj 1.88125 0 Td 32.8125 Tz (, ) Tj 0.39375 0 Td 56.770833 Tz (thereby ) Tj 2.8 0 Td 57.421875 Tz (allowing ) Tj 3.0625 0 Td 52.864583 Tz (an ) Tj 1.05 0 Td 45.9375 Tz (ultra ) Tj 1.509375 0 Td 32.8125 Tz (- ) Tj 0.240625 0 Td 66.145833 Tz (compact ) Tj 3.084375 0 Td 57.118056 Tz (sensor ) Tj 2.515625 0 Td 52.864583 Tz (45 ) Tj 1.225 0 Td 54.6875 Tz (tuned ) Tj 2.14375 0 Td 65.625 Tz (by ) Tj 1.35625 0 Td 59.375 Tz (thermal ) Tj 2.45 0 Td 32.8125 Tz (, ) Tj 0.74375 0 Td 48.854167 Tz (electrical ) Tj 3.303125 0 Td 63.802083 Tz (or ) Tj 1.00625 0 Td 65.625 Tz (mechanical ) Tj 4.221875 0 Td 70.729167 Tz (mechanisms ) Tj 4.15625 0 Td 32.8125 Tz (. ) Tj 51.614907 0 0 51.614907 0 1044.420281 Tm 6.335379 0 Td 32.290413 Tz (to ) Tj 0.678099 0 Td 62.966306 Tz (be ) Tj 0.968712 0 Td 45.852387 Tz (fabricated ) Tj 2.886763 0 Td 32.290413 Tz (. ) Tj 0.426233 0 Td 54.893702 Tz (For ) Tj 1.220578 0 Td 54.893702 Tz (example ) Tj 2.615523 0 Td 54.893702 Tz (and ) Tj 1.201203 0 Td 56.738869 Tz (without ) Tj 2.557401 0 Td 44.56077 Tz (limitation ) Tj 2.789892 0 Td 32.290413 Tz (, ) Tj 0.368111 0 Td 53.602086 Tz (based ) Tj 3.196751 0 Td 53.602086 Tz (These ) Tj 1.724308 0 Td 62.643402 Tz (mechanisms ) Tj 3.894224 0 Td 44.130231 Tz (are ) Tj 0.91059 0 Td 66.518251 Tz (known ) Tj 2.247413 0 Td 32.290413 Tz (in ) Tj 0.697473 0 Td 49.511967 Tz (the ) Tj 1.084958 0 Td 38.748496 Tz (art ) Tj 0.91059 0 Td 54.893702 Tz (and ) Tj 1.201203 0 Td 48.43562 Tz (thus ) Tj 1.356197 0 Td 51.664661 Tz (need ) Tj 1.530566 0 Td 54.893702 Tz (not ) Tj 1.046209 0 Td 53.279182 Tz (be ) Tj 51.428571 0 0 51.428571 0 1006.183174 Tm 6.3 0 Td 53.472222 Tz (on ) Tj 0.972222 0 Td 49.691358 Tz (the ) Tj 1.088889 0 Td 45.37037 Tz (spiral ) Tj 1.866667 0 Td 43.981481 Tz (pattern ) Tj 2.158333 0 Td 59.41358 Tz (620 ) Tj 1.186111 0 Td 32.407407 Tz (, ) Tj 0.408333 0 Td 32.407407 Tz (a ) Tj 0.641667 0 Td 32.407407 Tz (1 ) Tj 0.486111 0 Td 32.407407 Tz (m ) Tj 0.855556 0 Td 43.75 Tz (length ) Tj 1.963889 0 Td 48.611111 Tz (optical ) Tj 2.158333 0 Td 48.611111 Tz (path ) Tj 1.4 0 Td 71.296296 Tz (may ) Tj 1.536111 0 Td 63.194444 Tz (be ) Tj 2.255556 0 Td 48.971193 Tz (described ) Tj 2.916667 0 Td 48.070988 Tz (herein ) Tj 1.886111 0 Td 32.407407 Tz (. ) Tj 61.428571 0 0 61.428571 0 960.622329 Tm 5.290698 0 Td 42.732558 Tz (obtained ) Tj 2.27907 0 Td 39.793282 Tz (within ) Tj 1.725581 0 Td 32.55814 Tz (a ) Tj 0.488372 0 Td 32.55814 Tz (1 ) Tj 0.244186 0 Td 76.873385 Tz (mm ) Tj 1.513953 0 Td 36.627907 Tz (area ) Tj 1.172093 0 Td 43.410853 Tz (on ) Tj 0.781395 0 Td 32.55814 Tz (a ) Tj 0.423256 0 Td 36.627907 Tz (chip ) Tj 0.976744 0 Td 32.55814 Tz (. ) Tj 0.374419 0 Td 45.106589 Tz (Although ) Tj 2.360465 0 Td 45.219638 Tz (the ) Tj 0.993023 0 Td 35.723514 Tz (spiral ) Tj 3.190698 0 Td 37.984496 Tz (FIG ) Tj 0.927907 0 Td 32.55814 Tz (. ) Tj 0.34186 0 Td 32.55814 Tz (7 ) Tj 0.374419 0 Td 40.310078 Tz (depicts ) Tj 1.937209 0 Td 32.55814 Tz (a ) Tj 0.472093 0 Td 42.248062 Tz (general ) Tj 1.953488 0 Td 33.914729 Tz (flow ) Tj 1.204651 0 Td 40.697674 Tz (diagram ) Tj 2.067442 0 Td 54.263566 Tz (of ) Tj 0.748837 0 Td 32.55814 Tz (a ) Tj 0.309302 0 Td 49.741602 Tz (method ) Tj 2.051163 0 Td 49.741602 Tz (700 ) Tj 1.025581 0 Td 52.906977 Tz (of ) Tj 51.746032 0 0 51.746032 0 924.562585 Tm 6.280675 0 Td 43.711656 Tz (pattern ) Tj 2.203067 0 Td 60.122699 Tz (620 ) Tj 1.256135 0 Td 70.858896 Tz (may ) Tj 1.546012 0 Td 53.144172 Tz (be ) Tj 0.908282 0 Td 47.597137 Tz (preferred ) Tj 2.860123 0 Td 51.533742 Tz (according ) Tj 3.092025 0 Td 33.819018 Tz (to ) Tj 0.830982 0 Td 56.804239 Tz (embodiments ) Tj 4.077607 0 Td 53.144172 Tz (of ) Tj 2.125767 0 Td 46.263246 Tz (fabricating ) Tj 3.478528 0 Td 49.386503 Tz (the ) Tj 1.372086 0 Td 45.092025 Tz (optical ) Tj 2.338344 0 Td 54.754601 Tz (gas ) Tj 1.410736 0 Td 49.923313 Tz (sensor ) Tj 2.183742 0 Td 60.122699 Tz (600 ) Tj 1.546012 0 Td 52.249489 Tz (according ) Tj 3.323926 0 Td 32.208589 Tz (to ) Tj 0.946933 0 Td 43.481595 Tz (an ) Tj 51.428571 0 0 51.428571 0 879.714286 Tm 6.3 0 Td 49.691358 Tz (the ) Tj 1.127778 0 Td 50.462963 Tz (present ) Tj 2.372222 0 Td 48.251029 Tz (invention ) Tj 2.722222 0 Td 32.407407 Tz (, ) Tj 0.447222 0 Td 22.685185 Tz (it ) Tj 0.486111 0 Td 51.041667 Tz (will ) Tj 1.380556 0 Td 63.194444 Tz (be ) Tj 0.913889 0 Td 52.824074 Tz (understood ) Tj 3.5 0 Td 46.180556 Tz (that ) Tj 1.322222 0 Td 49.691358 Tz (the ) Tj 1.069444 0 Td 51.851852 Tz (present ) Tj 2.644444 0 Td 32.407407 Tz (50 ) Tj 1.030556 0 Td 60.277778 Tz (embodiment ) Tj 3.927778 0 Td 63.194444 Tz (of ) Tj 1.069444 0 Td 49.691358 Tz (the ) Tj 1.263889 0 Td 51.851852 Tz (present ) Tj 2.586111 0 Td 48.251029 Tz (invention ) Tj 2.722222 0 Td 32.407407 Tz (. ) Tj 0.738889 0 Td 55.092593 Tz (The ) Tj 1.302778 0 Td 60.493827 Tz (method ) Tj 2.722222 0 Td 55.092593 Tz (700 ) Tj 51.428571 0 0 51.428571 0 837.803815 Tm 6.377778 0 Td 48.251029 Tz (invention ) Tj 2.936111 0 Td 32.407407 Tz (is ) Tj 0.622222 0 Td 54.012346 Tz (not ) Tj 1.263889 0 Td 44.907407 Tz (limited ) Tj 2.216667 0 Td 42.12963 Tz (to ) Tj 0.797222 0 Td 49.691358 Tz (the ) Tj 1.147222 0 Td 46.450617 Tz (spiral ) Tj 1.788889 0 Td 46.296296 Tz (pattern ) Tj 2.275 0 Td 55.092593 Tz (and ) Tj 1.283333 0 Td 44.290123 Tz (the ) Tj 1.069444 0 Td 48.148148 Tz (optical ) Tj 3.538889 0 Td 52.211934 Tz (comprises ) Tj 3.169444 0 Td 32.407407 Tz (a ) Tj 0.622222 0 Td 41.319444 Tz (step ) Tj 1.341667 0 Td 61.574074 Tz (702 ) Tj 1.341667 0 Td 53.472222 Tz (of ) Tj 0.913889 0 Td 51.131687 Tz (disposing ) Tj 3.052778 0 Td 32.407407 Tz (a ) Tj 0.563889 0 Td 45.37037 Tz (light ) Tj 1.594444 0 Td 51.851852 Tz (source ) Tj 2.138889 0 Td 60.493827 Tz (602 ) Tj 1.322222 0 Td 53.472222 Tz (on ) Tj 1.030556 0 Td 32.407407 Tz (a ) Tj 55.714286 0 0 55.714286 0 795.075708 Tm 5.779487 0 Td 55.508072 Tz (waveguide ) Tj 3.392308 0 Td 41.547958 Tz (structure ) Tj 2.692308 0 Td 49.85755 Tz (100 ) Tj 1.25641 0 Td 60.826211 Tz (may ) Tj 1.507692 0 Td 53.846154 Tz (be ) Tj 1.130769 0 Td 45.245726 Tz (arranged ) Tj 2.207692 0 Td 32.905983 Tz (/ ) Tj 0.269231 0 Td 45.769231 Tz (configured ) Tj 3.141026 0 Td 44.871795 Tz (to ) Tj 2.010256 0 Td 42.545109 Tz (substrate ) Tj 2.494872 0 Td 55.840456 Tz (612 ) Tj 1.328205 0 Td 32.905983 Tz (\( ) Tj 0.287179 0 Td 32.905983 Tz (e ) Tj 0.197436 0 Td 32.905983 Tz (. ) Tj 0.215385 0 Td 32.905983 Tz (g ) Tj 0.287179 0 Td 32.905983 Tz (. ) Tj 0.197436 0 Td 32.905983 Tz (, ) Tj 0.412821 0 Td 41.452991 Tz (silicon ) Tj 2.028205 0 Td 42.877493 Tz (substrate ) Tj 2.387179 0 Td 32.905983 Tz (\) ) Tj 0.215385 0 Td 32.905983 Tz (, ) Tj 0.448718 0 Td 43.874644 Tz (the ) Tj 1.041026 0 Td 42.478632 Tz (light ) Tj 1.507692 0 Td 47.863248 Tz (source ) Tj 1.902564 0 Td 55.840456 Tz (612 ) Tj 45.714286 0 0 45.714286 0 758.309979 Tm 7.175 0 Td 48.307292 Tz (form ) Tj 1.859375 0 Td 56.875 Tz (other ) Tj 1.990625 0 Td 54.231771 Tz (patterns ) Tj 2.996875 0 Td 52.864583 Tz (as ) Tj 0.984375 0 Td 61.067708 Tz (long ) Tj 1.815625 0 Td 52.864583 Tz (as ) Tj 1.00625 0 Td 55.902778 Tz (the ) Tj 1.3125 0 Td 51.041667 Tz (pattern ) Tj 2.734375 0 Td 54.166667 Tz (enables ) Tj 2.75625 0 Td 32.8125 Tz (a ) Tj 0.7 0 Td 58.333333 Tz (long ) Tj 2.975 0 Td 61.25 Tz (being ) Tj 2.23125 0 Td 54.322917 Tz (configured ) Tj 3.740625 0 Td 32.8125 Tz (to ) Tj 0.875 0 Td 59.244792 Tz (emit ) Tj 1.728125 0 Td 51.041667 Tz (light ) Tj 1.465625 0 Td 32.8125 Tz (, ) Tj 0.48125 0 Td 32.8125 Tz (a ) Tj 0.6125 0 Td 49.21875 Tz (step ) Tj 1.553125 0 Td 60.763889 Tz (704 ) Tj 1.465625 0 Td 63.802083 Tz (of ) Tj 1.05 0 Td 60.416667 Tz (forming ) Tj 2.8875 0 Td 32.8125 Tz (a ) Tj 0.590625 0 Td 59.548611 Tz (gas ) Tj 55.714286 0 0 55.714286 0 711.35809 Tm 5.833333 0 Td 44.017094 Tz (optical ) Tj 1.95641 0 Td 40.384615 Tz (path ) Tj 1.310256 0 Td 32.905983 Tz (to ) Tj 0.646154 0 Td 52.350427 Tz (be ) Tj 0.789744 0 Td 51.851852 Tz (formed ) Tj 2.1 0 Td 43.376068 Tz (on ) Tj 0.789744 0 Td 32.905983 Tz (a ) Tj 0.394872 0 Td 40.982906 Tz (relatively ) Tj 2.764103 0 Td 47.863248 Tz (small ) Tj 1.615385 0 Td 41.132479 Tz (area ) Tj 1.041026 0 Td 32.905983 Tz (/ ) Tj 0.179487 0 Td 47.863248 Tz (space ) Tj 1.489744 0 Td 32.905983 Tz (. ) Tj 0.287179 0 Td 62.820513 Tz (As ) Tj 2.189744 0 Td 45.299145 Tz (sensing ) Tj 2.189744 0 Td 42.735043 Tz (section ) Tj 2.135897 0 Td 55.840456 Tz (604 ) Tj 1.364103 0 Td 44.871795 Tz (on ) Tj 0.879487 0 Td 48.860399 Tz (the ) Tj 1.094872 0 Td 42.877493 Tz (substrate ) Tj 2.602564 0 Td 55.840456 Tz (612 ) Tj 1.041026 0 Td 32.905983 Tz (, ) Tj 0.448718 0 Td 43.874644 Tz (the ) Tj 1.148718 0 Td 43.874644 Tz (gas ) Tj 1.112821 0 Td 46.581197 Tz (sensing ) Tj 51.428571 0 0 51.428571 0 674.1 Tm 6.338889 0 Td 42.12963 Tz (an ) Tj 0.933333 0 Td 58.333333 Tz (example ) Tj 2.741667 0 Td 55.092593 Tz (and ) Tj 1.380556 0 Td 54.166667 Tz (without ) Tj 2.527778 0 Td 44.722222 Tz (limitation ) Tj 2.780556 0 Td 32.407407 Tz (, ) Tj 0.505556 0 Td 44.290123 Tz (the ) Tj 1.127778 0 Td 48.148148 Tz (optical ) Tj 2.255556 0 Td 58.333333 Tz (waveguide ) Tj 3.655556 0 Td 43.75 Tz (55 ) Tj 1.05 0 Td 43.981481 Tz (section ) Tj 2.119444 0 Td 60.493827 Tz (604 ) Tj 1.361111 0 Td 54.12037 Tz (comprising ) Tj 3.480556 0 Td 49.691358 Tz (the ) Tj 1.147222 0 Td 45.833333 Tz (optical ) Tj 2.1 0 Td 58.333333 Tz (waveguide ) Tj 3.383333 0 Td 45.730453 Tz (structure ) Tj 2.858333 0 Td 49.691358 Tz (100 ) Tj 45.714286 0 0 45.714286 0 634.020584 Tm 7.109375 0 Td 51.041667 Tz (structure ) Tj 3.19375 0 Td 54.6875 Tz (100 ) Tj 1.26875 0 Td 82.638889 Tz (may ) Tj 1.771875 0 Td 63.802083 Tz (be ) Tj 1.09375 0 Td 56.966146 Tz (arranged ) Tj 2.84375 0 Td 32.8125 Tz (/ ) Tj 0.240625 0 Td 56.145833 Tz (configured ) Tj 3.71875 0 Td 43.75 Tz (to ) Tj 0.984375 0 Td 48.307292 Tz (form ) Tj 1.8375 0 Td 32.8125 Tz (a ) Tj 0.7 0 Td 51.649306 Tz (folded ) Tj 3.5875 0 Td 66.145833 Tz (whereby ) Tj 3.128125 0 Td 55.902778 Tz (the ) Tj 1.18125 0 Td 54.6875 Tz (optical ) Tj 2.49375 0 Td 65.219907 Tz (waveguide ) Tj 3.80625 0 Td 51.041667 Tz (structure ) Tj 3.19375 0 Td 54.6875 Tz (100 ) Tj 1.44375 0 Td 34.635417 Tz (is ) Tj 0.721875 0 Td 56.966146 Tz (arranged ) Tj 3.128125 0 Td 34.635417 Tz (to ) Tj 51.428571 0 0 51.428571 0 588.351978 Tm 6.3 0 Td 43.981481 Tz (pattern ) Tj 2.294444 0 Td 54.012346 Tz (630 ) Tj 1.341667 0 Td 53.472222 Tz (as ) Tj 0.952778 0 Td 49.358974 Tz (schematically ) Tj 4.316667 0 Td 40.951178 Tz (illustrated ) Tj 3.130556 0 Td 32.407407 Tz (in ) Tj 0.836111 0 Td 45.37037 Tz (FIG ) Tj 1.108333 0 Td 32.407407 Tz (. ) Tj 0.427778 0 Td 63.194444 Tz (6B ) Tj 0.894444 0 Td 32.407407 Tz (. ) Tj 0.505556 0 Td 32.407407 Tz (It ) Tj 0.641667 0 Td 49.691358 Tz (can ) Tj 2.488889 0 Td 49.537037 Tz (receive ) Tj 2.333333 0 Td 49.691358 Tz (the ) Tj 1.108333 0 Td 45.37037 Tz (light ) Tj 1.613889 0 Td 44.560185 Tz (from ) Tj 1.497222 0 Td 50.771605 Tz (the ) Tj 1.166667 0 Td 44.074074 Tz (light ) Tj 1.575 0 Td 52.391975 Tz (source ) Tj 2.061111 0 Td 59.41358 Tz (602 ) Tj 1.361111 0 Td 56.17284 Tz (and ) Tj 1.302778 0 Td 49.016204 Tz (transmit ) Tj 2.586111 0 Td 49.691358 Tz (the ) Tj 57.285714 0 0 57.285714 0 544.332896 Tm 5.586035 0 Td 44.368246 Tz (also ) Tj 1.291771 0 Td 62.551953 Tz (be ) Tj 0.9601 0 Td 43.376407 Tz (appreciated ) Tj 3.264339 0 Td 42.186201 Tz (from ) Tj 1.501247 0 Td 39.761707 Tz (FIG ) Tj 1.047382 0 Td 34.912718 Tz (. ) Tj 0.331671 0 Td 77.098919 Tz (GA ) Tj 1.291771 0 Td 40.731505 Tz (that ) Tj 1.204489 0 Td 39.761707 Tz (the ) Tj 1.064838 0 Td 43.931837 Tz (functional ) Tj 2.82793 0 Td 39.761707 Tz (ele ) Tj 2.356608 0 Td 38.40399 Tz (light ) Tj 1.309227 0 Td 45.095594 Tz (received ) Tj 2.426434 0 Td 46.550291 Tz (through ) Tj 2.25187 0 Td 42.6711 Tz (the ) Tj 0.942643 0 Td 45.719036 Tz (optical ) Tj 2.024938 0 Td 52.369077 Tz (waveguide ) Tj 3.089776 0 Td 41.701302 Tz (structure ) Tj 2.583541 0 Td 42.6711 Tz (100 ) Tj 0.872818 0 Td 32.003325 Tz (, ) Tj 50 0 0 50 0 505.9089 Tm 6.36 0 Td 62.666667 Tz (ments ) Tj 1.9 0 Td 33.333333 Tz (/ ) Tj 0.26 0 Td 58.333333 Tz (components ) Tj 3.86 0 Td 65 Tz (of ) Tj 1 0 Td 50 Tz (the ) Tj 1.2 0 Td 50 Tz (optical ) Tj 2.4 0 Td 50 Tz (gas ) Tj 1.26 0 Td 52.222222 Tz (sensor ) Tj 2.22 0 Td 54.444444 Tz (600 ) Tj 1.52 0 Td 33.333333 Tz (\( ) Tj 0.2 0 Td 33.333333 Tz (i ) Tj 0.14 0 Td 33.333333 Tz (. ) Tj 0.28 0 Td 33.333333 Tz (e ) Tj 0.28 0 Td 33.333333 Tz (. ) Tj 0.14 0 Td 33.333333 Tz (, ) Tj 0.58 0 Td 50 Tz (the ) Tj 2.42 0 Td 55.555556 Tz (and ) Tj 1.42 0 Td 33.333333 Tz (a ) Tj 0.68 0 Td 45.833333 Tz (step ) Tj 1.48 0 Td 55.555556 Tz (706 ) Tj 1.5 0 Td 53.333333 Tz (of ) Tj 0.98 0 Td 52.592593 Tz (disposing ) Tj 3.26 0 Td 33.333333 Tz (a ) Tj 0.64 0 Td 47.333333 Tz (light ) Tj 1.68 0 Td 49.583333 Tz (detector ) Tj 2.72 0 Td 55.555556 Tz (606 ) Tj 1.56 0 Td 53.333333 Tz (on ) Tj 1.12 0 Td 50 Tz (the ) Tj 45.714286 0 0 45.714286 0 464.63225 Tm 7.0875 0 Td 55.729167 Tz (tunable ) Tj 2.75625 0 Td 38.28125 Tz (filter ) Tj 1.6625 0 Td 65.625 Tz (608 ) Tj 1.26875 0 Td 32.8125 Tz (, ) Tj 0.503125 0 Td 55.902778 Tz (the ) Tj 1.159375 0 Td 54.6875 Tz (optical ) Tj 2.471875 0 Td 66.030093 Tz (waveguide ) Tj 3.89375 0 Td 51.851852 Tz (structure ) Tj 3.128125 0 Td 60.763889 Tz (100 ) Tj 1.159375 0 Td 32.8125 Tz (, ) Tj 0.459375 0 Td 64.409722 Tz (and ) Tj 1.70625 0 Td 41.927083 Tz (60 ) Tj 1.18125 0 Td 50.231481 Tz (substrate ) Tj 3.0625 0 Td 66.840278 Tz (612 ) Tj 1.53125 0 Td 66.145833 Tz (whereby ) Tj 3.128125 0 Td 54.6875 Tz (the ) Tj 1.26875 0 Td 50.3125 Tz (light ) Tj 1.6625 0 Td 54.6875 Tz (detector ) Tj 2.865625 0 Td 60.763889 Tz (606 ) Tj 1.553125 0 Td 34.635417 Tz (is ) Tj 0.7875 0 Td 57.421875 Tz (arranged ) Tj 3.10625 0 Td 43.75 Tz (to ) Tj 55.714286 0 0 55.714286 0 419.828552 Tm 5.815385 0 Td 49.85755 Tz (the ) Tj 1.184615 0 Td 40.08547 Tz (light ) Tj 1.489744 0 Td 44.871795 Tz (detector ) Tj 2.423077 0 Td 55.840456 Tz (606 ) Tj 1.112821 0 Td 32.905983 Tz (\) ) Tj 0.574359 0 Td 37.891738 Tz (are ) Tj 1.076923 0 Td 47.863248 Tz (disposed ) Tj 2.333333 0 Td 32.905983 Tz (/ ) Tj 0.233333 0 Td 50.356125 Tz (formed ) Tj 2.189744 0 Td 52.350427 Tz (on ) Tj 1.023077 0 Td 43.874644 Tz (the ) Tj 1.094872 0 Td 61.324786 Tz (same ) Tj 2.728205 0 Td 45.299145 Tz (receive ) Tj 2.261538 0 Td 49.85755 Tz (the ) Tj 1.202564 0 Td 42.478632 Tz (light ) Tj 1.54359 0 Td 44.599845 Tz (transmitted ) Tj 3.35641 0 Td 41.880342 Tz (from ) Tj 1.597436 0 Td 44.871795 Tz (the ) Tj 1.166667 0 Td 43.589744 Tz (optical ) Tj 2.117949 0 Td 53.846154 Tz (waveguide ) Tj 51.428571 0 0 51.428571 0 381.443106 Tm 6.319444 0 Td 45.730453 Tz (substrate ) Tj 2.702778 0 Td 59.41358 Tz (612 ) Tj 1.108333 0 Td 32.407407 Tz (, ) Tj 0.427778 0 Td 53.796296 Tz (which ) Tj 1.905556 0 Td 53.240741 Tz (advantageously ) Tj 4.705556 0 Td 43.981481 Tz (results ) Tj 2.158333 0 Td 22.685185 Tz (in ) Tj 0.622222 0 Td 53.472222 Tz (an ) Tj 1.011111 0 Td 44.722222 Tz (integrated ) Tj 4.258333 0 Td 46.090535 Tz (structure ) Tj 3.013889 0 Td 50.771605 Tz (100 ) Tj 1.322222 0 Td 55.092593 Tz (and ) Tj 1.458333 0 Td 32.407407 Tz (is ) Tj 0.855556 0 Td 48.611111 Tz (configured ) Tj 3.402778 0 Td 34.027778 Tz (to ) Tj 0.933333 0 Td 50.636574 Tz (generate ) Tj 2.819444 0 Td 43.75 Tz (an ) Tj 1.05 0 Td 45.37037 Tz (electrical ) Tj 55.714286 0 0 55.714286 0 338.276074 Tm 5.887179 0 Td 43.589744 Tz (optical ) Tj 2.028205 0 Td 49.85755 Tz (gas ) Tj 1.148718 0 Td 47.364672 Tz (sensor ) Tj 1.812821 0 Td 55.840456 Tz (600 ) Tj 1.274359 0 Td 48.860399 Tz (having ) Tj 2.082051 0 Td 32.905983 Tz (a ) Tj 0.538462 0 Td 54.273504 Tz (compact ) Tj 2.548718 0 Td 39.636752 Tz (chip ) Tj 1.328205 0 Td 36.645299 Tz (size ) Tj 1.041026 0 Td 32.905983 Tz (. ) Tj 55.714286 0 0 55.714286 0 336.714286 Tm 23.333333 0 Td 44.871795 Tz (signal ) Tj 1.812821 0 Td 47.264957 Tz (based ) Tj 1.741026 0 Td 44.871795 Tz (on ) Tj 0.897436 0 Td 43.874644 Tz (the ) Tj 0.969231 0 Td 42.478632 Tz (light ) Tj 1.435897 0 Td 45.99359 Tz (received ) Tj 2.548718 0 Td 37.891738 Tz (for ) Tj 0.933333 0 Td 44.207028 Tz (detecting ) Tj 2.620513 0 Td 32.905983 Tz (a ) Tj 0.538462 0 Td 43.874644 Tz (gas ) Tj 1.094872 0 Td 31.410256 Tz (in ) Tj 0.7 0 Td 43.874644 Tz (the ) Tj 51.785714 0 0 51.785714 0 300.411374 Tm 6.990345 0 Td 75.632184 Tz (As ) Tj 1.062069 0 Td 43.448276 Tz (an ) Tj 0.888276 0 Td 57.471264 Tz (example ) Tj 2.471724 0 Td 32.183908 Tz (, ) Tj 0.308966 0 Td 49.885057 Tz (with ) Tj 1.641379 0 Td 43.984674 Tz (the ) Tj 1.081379 0 Td 48.028294 Tz (configuration ) Tj 4.074483 0 Td 53.103448 Tz (of ) Tj 0.811034 0 Td 49.348659 Tz (the ) Tj 1.13931 0 Td 48.275862 Tz (optical ) Tj 2.25931 0 Td 49.348659 Tz (gas ) Tj 2.433103 0 Td 49.348659 Tz (gas ) Tj 1.177931 0 Td 49.655172 Tz (sensing ) Tj 2.336552 0 Td 45.977011 Tz (section ) Tj 2.297931 0 Td 59.003831 Tz (604 ) Tj 1.081379 0 Td 32.183908 Tz (. ) Tj 55.714286 0 0 55.714286 0 254.217127 Tm 5.851282 0 Td 47.863248 Tz (sensor ) Tj 1.938462 0 Td 54.843305 Tz (600 ) Tj 1.25641 0 Td 52.350427 Tz (as ) Tj 0.861538 0 Td 56.837607 Tz (shown ) Tj 2.082051 0 Td 22.435897 Tz (in ) Tj 0.771795 0 Td 37.891738 Tz (FIG ) Tj 1.005128 0 Td 32.905983 Tz (. ) Tj 0.430769 0 Td 62.820513 Tz (6A ) Tj 0.84359 0 Td 32.905983 Tz (, ) Tj 0.430769 0 Td 43.874644 Tz (the ) Tj 1.112821 0 Td 43.076923 Tz (light ) Tj 1.54359 0 Td 41.880342 Tz (from ) Tj 1.54359 0 Td 41.880342 Tz (the ) Tj 1.041026 0 Td 43.076923 Tz (light ) Tj 1.687179 0 Td 32.905983 Tz (65 ) Tj 1.597436 0 Td 51.187085 Tz (According ) Tj 3.033333 0 Td 22.435897 Tz (to ) Tj 0.646154 0 Td 44.871795 Tz (an ) Tj 0.771795 0 Td 57.136752 Tz (embodiment ) Tj 3.464103 0 Td 55.34188 Tz (of ) Tj 0.771795 0 Td 43.874644 Tz (the ) Tj 0.933333 0 Td 48.290598 Tz (present ) Tj 2.153846 0 Td 45.868946 Tz (invention ) Tj 2.494872 0 Td 32.905983 Tz (, ) Tj 0.376923 0 Td 43.874644 Tz (the ) Tj 45.714286 0 0 45.714286 0 217.313779 Tm 7.153125 0 Td 55.902778 Tz (source ) Tj 2.31875 0 Td 66.840278 Tz (602 ) Tj 1.553125 0 Td 34.635417 Tz (is ) Tj 0.853125 0 Td 41.666667 Tz (firstly ) Tj 2.209375 0 Td 55.729167 Tz (coupled ) Tj 2.821875 0 Td 42.838542 Tz (into ) Tj 1.53125 0 Td 32.8125 Tz (a ) Tj 0.6125 0 Td 48.4375 Tz (silicon ) Tj 2.428125 0 Td 65.625 Tz (waveguide ) Tj 3.80625 0 Td 61.979167 Tz (614 ) Tj 1.290625 0 Td 32.8125 Tz (. ) Tj 1.79375 0 Td 54.6875 Tz (optical ) Tj 2.559375 0 Td 60.763889 Tz (gas ) Tj 1.334375 0 Td 58.940972 Tz (sensor ) Tj 2.428125 0 Td 32.8125 Tz (is ) Tj 0.7875 0 Td 61.523438 Tz (packaged ) Tj 3.45625 0 Td 44.965278 Tz (via ) Tj 1.203125 0 Td 32.8125 Tz (a ) Tj 0.590625 0 Td 60.520833 Tz (wafer ) Tj 1.946875 0 Td 32.8125 Tz (- ) Tj 0.175 0 Td 52.5 Tz (level ) Tj 1.88125 0 Td 50.130208 Tz (chip ) Tj 1.6625 0 Td 52.5 Tz (scale ) Tj 58.571429 0 0 58.571429 0 170.067917 Tm 5.634146 0 Td 48.373984 Tz (Then ) Tj 1.212195 0 Td 34.146341 Tz (, ) Tj 0.460976 0 Td 39.837398 Tz (the ) Tj 0.939024 0 Td 44.715447 Tz (tunable ) Tj 2.202439 0 Td 32.723577 Tz (filter ) Tj 1.314634 0 Td 55.01355 Tz (608 ) Tj 1.246341 0 Td 34.146341 Tz (\( ) Tj 0.273171 0 Td 40.54878 Tz (such ) Tj 1.280488 0 Td 55.487805 Tz (as ) Tj 0.819512 0 Td 42.682927 Tz (ring ) Tj 1.365854 0 Td 29.878049 Tz (filter ) Tj 1.092683 0 Td 34.146341 Tz (, ) Tj 0.392683 0 Td 38.414634 Tz (disk ) Tj 1.382927 0 Td 29.878049 Tz (filter ) Tj 1.092683 0 Td 34.146341 Tz (, ) Tj 1.417073 0 Td 50 Tz (package ) Tj 2.356098 0 Td 34.146341 Tz (\( ) Tj 0.187805 0 Td 67.154472 Tz (WLCSP ) Tj 2.134146 0 Td 34.146341 Tz (\) ) Tj 0.341463 0 Td 46.160795 Tz (technique ) Tj 2.680488 0 Td 31.300813 Tz (to ) Tj 0.665854 0 Td 45.934959 Tz (provide ) Tj 2.117073 0 Td 34.146341 Tz (a ) Tj 0.426829 0 Td 48.943089 Tz (wafer ) Tj 1.468293 0 Td 34.146341 Tz (- ) Tj 0.221951 0 Td 42.113821 Tz (level ) Tj 1.331707 0 Td 60.46748 Tz (pack ) Tj ET Q endstream endobj 126 0 obj << /Length 1 >> stream q endstream endobj 127 0 obj << /Length 56231 >> stream Q q 0.24 0 0 0.24 0 0 cm BT /F1 1 Tf 3 Tr 51.428571 0 0 51.428571 0 2970 Tm 14.544444 0 Td 81.018519 Tz (11 ) Tj 70 0 0 70 0 3024 Tm 15.214286 0 Td 85.714286 Tz (US ) Tj 1.4 0 Td 30.952381 Tz (10 ) Tj 0.542857 0 Td 33.333333 Tz (, ) Tj 0.142857 0 Td 55.555556 Tz (215 ) Tj 1.114286 0 Td 33.333333 Tz (, ) Tj 0.142857 0 Td 61.111111 Tz (692 ) Tj 1.4 0 Td 63.095238 Tz (B2 ) Tj 55.714286 0 0 55.714286 0 2969 Tm 31.033333 0 Td 55.34188 Tz (12 ) Tj 51.632653 0 0 51.632653 0 2919.16443 Tm 6.236364 0 Td 55.950812 Tz (age ) Tj 1.394466 0 Td 48.880105 Tz (enabled ) Tj 2.459684 0 Td 46.482213 Tz (integrated ) Tj 3.156917 0 Td 47.957839 Tz (optical ) Tj 2.324111 0 Td 49.494949 Tz (gas ) Tj 1.181423 0 Td 50.032938 Tz (sensor ) Tj 2.111067 0 Td 45.191041 Tz (for ) Tj 1.103953 0 Td 59.025033 Tz (compact ) Tj 2.711462 0 Td 54.874835 Tz (and ) Tj 2.459684 0 Td 45.777937 Tz (traditional ) Tj 3.311858 0 Td 54.874835 Tz (gas ) Tj 1.239526 0 Td 51.646904 Tz (sensors ) Tj 2.556522 0 Td 32.279315 Tz (1 ) Tj 0.619763 0 Td 53.798858 Tz (and ) Tj 1.413834 0 Td 32.279315 Tz (2 ) Tj 0.271146 0 Td 32.279315 Tz (, ) Tj 0.406719 0 Td 51.108915 Tz (noises ) Tj 2.24664 0 Td 45.998024 Tz (from ) Tj 1.665613 0 Td 45.836627 Tz (light ) Tj 1.665613 0 Td 49.494949 Tz (source ) Tj 1.820553 0 Td 32.279315 Tz (, ) Tj 57.204969 0 0 57.204969 0 2873.121056 Tm 5.698806 0 Td 42.731331 Tz (low ) Tj 1.188708 0 Td 42.974122 Tz (cost ) Tj 1.328556 0 Td 41.517372 Tz (solution ) Tj 2.027796 0 Td 32.048498 Tz (. ) Tj 0.52443 0 Td 42.974122 Tz (This ) Tj 1.293594 0 Td 42.731331 Tz (can ) Tj 1.04886 0 Td 61.183496 Tz (be ) Tj 0.926493 0 Td 48.072747 Tz (achieved ) Tj 2.517264 0 Td 49.945711 Tz (because ) Tj 2.359935 0 Td 42.731331 Tz (the ) Tj 1.101303 0 Td 40.788997 Tz (fabri ) Tj 2.674593 0 Td 44.95114 Tz (sensing ) Tj 2.185125 0 Td 47.448426 Tz (channel ) Tj 2.132682 0 Td 34.961998 Tz (\( ) Tj 0.157329 0 Td 45.64483 Tz (gas ) Tj 1.04886 0 Td 37.875498 Tz (cell ) Tj 0.943974 0 Td 34.961998 Tz (\) ) Tj 0.332139 0 Td 50.500664 Tz (and ) Tj 1.136265 0 Td 40.206298 Tz (light ) Tj 1.276113 0 Td 44.430872 Tz (detector ) Tj 2.220087 0 Td 53.899747 Tz (of ) Tj 0.716721 0 Td 45.64483 Tz (the ) Tj 1.013898 0 Td 41.371697 Tz (integrated ) Tj 50 0 0 50 0 2835.262484 Tm 6.56 0 Td 46.111111 Tz (cation ) Tj 1.98 0 Td 63.333333 Tz (of ) Tj 0.92 0 Td 50 Tz (the ) Tj 1.12 0 Td 50.47619 Tz (optical ) Tj 2.32 0 Td 54.444444 Tz (gas ) Tj 1.28 0 Td 52.222222 Tz (sensor ) Tj 2.08 0 Td 61.111111 Tz (600 ) Tj 1.46 0 Td 33.333333 Tz (is ) Tj 0.74 0 Td 54 Tz (compatible ) Tj 3.48 0 Td 50.833333 Tz (with ) Tj 1.66 0 Td 50 Tz (the ) Tj 2.38 0 Td 48.095238 Tz (optical ) Tj 2.28 0 Td 48.888889 Tz (gas ) Tj 1.02 0 Td 54.444444 Tz (sensor ) Tj 2.1 0 Td 54.074074 Tz (according ) Tj 3.14 0 Td 33.333333 Tz (to ) Tj 0.66 0 Td 50 Tz (the ) Tj 1.2 0 Td 57.142857 Tz (example ) Tj 2.66 0 Td 63.333333 Tz (embodiment ) Tj 3.92 0 Td 44.444444 Tz (can ) Tj 55.714286 0 0 55.714286 0 2790.501666 Tm 5.797436 0 Td 79.273504 Tz (CMOS ) Tj 2.135897 0 Td 47.008547 Tz (process ) Tj 2.24359 0 Td 49.85755 Tz (and ) Tj 1.238462 0 Td 43.874644 Tz (the ) Tj 1.112821 0 Td 39.636752 Tz (chip ) Tj 1.292308 0 Td 42.628205 Tz (size ) Tj 1.328205 0 Td 45.99359 Tz (obtained ) Tj 2.584615 0 Td 20.940171 Tz (is ) Tj 0.376923 0 Td 32.905983 Tz (, ) Tj 0.448718 0 Td 38.888889 Tz (for ) Tj 1.005128 0 Td 51.709402 Tz (example ) Tj 2.189744 0 Td 32.905983 Tz (, ) Tj 1.471795 0 Td 62.820513 Tz (be ) Tj 0.951282 0 Td 41.880342 Tz (greatly ) Tj 2.135897 0 Td 49.145299 Tz (reduced ) Tj 2.387179 0 Td 41.282051 Tz (since ) Tj 1.489744 0 Td 47.115385 Tz (both ) Tj 1.489744 0 Td 48.290598 Tz (sensing ) Tj 2.24359 0 Td 48.461538 Tz (wavelength ) Tj 3.35641 0 Td 49.85755 Tz (and ) Tj 1.220513 0 Td 49.85755 Tz (ref ) Tj 45.714286 0 0 45.714286 0 2753.010959 Tm 7.13125 0 Td 53.776042 Tz (only ) Tj 1.684375 0 Td 55.208333 Tz (several ) Tj 2.384375 0 Td 96.614583 Tz (mm ) Tj 1.79375 0 Td 32.8125 Tz (. ) Tj 0.39375 0 Td 54.6875 Tz (FIG ) Tj 1.35625 0 Td 32.8125 Tz (. ) Tj 0.48125 0 Td 32.8125 Tz (8 ) Tj 0.6125 0 Td 54.166667 Tz (depicts ) Tj 2.603125 0 Td 32.8125 Tz (a ) Tj 0.6125 0 Td 57.118056 Tz (schematic ) Tj 3.478125 0 Td 63.020833 Tz (drawing ) Tj 2.909375 0 Td 63.802083 Tz (of ) Tj 0.984375 0 Td 32.8125 Tz (a ) Tj 0.984375 0 Td 32.8125 Tz (5 ) Tj 1.00625 0 Td 56.510417 Tz (erence ) Tj 2.428125 0 Td 60.520833 Tz (wavelength ) Tj 4.15625 0 Td 54.6875 Tz (are ) Tj 1.421875 0 Td 56.25 Tz (sharing ) Tj 2.75625 0 Td 49.826389 Tz (the ) Tj 1.4 0 Td 66.536458 Tz (same ) Tj 1.946875 0 Td 51.041667 Tz (light ) Tj 1.88125 0 Td 55.902778 Tz (source ) Tj 2.121875 0 Td 32.8125 Tz (, ) Tj 0.546875 0 Td 54.6875 Tz (the ) Tj 51.428571 0 0 51.428571 0 2709.388419 Tm 6.241667 0 Td 57.685185 Tz (wafer ) Tj 1.730556 0 Td 32.407407 Tz (- ) Tj 0.291667 0 Td 46.018519 Tz (level ) Tj 1.477778 0 Td 55.092593 Tz (packaged ) Tj 2.936111 0 Td 48.611111 Tz (optical ) Tj 2.197222 0 Td 49.691358 Tz (gas ) Tj 1.05 0 Td 51.851852 Tz (sensor ) Tj 2.002778 0 Td 55.092593 Tz (800 ) Tj 1.283333 0 Td 50.411523 Tz (according ) Tj 2.975 0 Td 32.407407 Tz (to ) Tj 0.7 0 Td 49.691358 Tz (the ) Tj 2.430556 0 Td 60.763889 Tz (same ) Tj 1.75 0 Td 48.611111 Tz (gas ) Tj 1.166667 0 Td 50.462963 Tz (sensing ) Tj 2.372222 0 Td 54.62963 Tz (channel ) Tj 2.275 0 Td 32.407407 Tz (, ) Tj 0.486111 0 Td 55.092593 Tz (and ) Tj 1.283333 0 Td 44.290123 Tz (the ) Tj 1.069444 0 Td 64.814815 Tz (same ) Tj 1.788889 0 Td 45.37037 Tz (light ) Tj 1.555556 0 Td 47.800926 Tz (detector ) Tj 2.294444 0 Td 32.407407 Tz (. ) Tj 51.428571 0 0 51.428571 0 2667.540245 Tm 6.3 0 Td 61.898148 Tz (embodiment ) Tj 3.694444 0 Td 32.407407 Tz (. ) Tj 0.311111 0 Td 43.75 Tz (In ) Tj 0.816667 0 Td 49.691358 Tz (the ) Tj 1.166667 0 Td 60.277778 Tz (embodiment ) Tj 3.577778 0 Td 32.407407 Tz (, ) Tj 0.369444 0 Td 49.691358 Tz (the ) Tj 1.05 0 Td 48.148148 Tz (optical ) Tj 2.255556 0 Td 50.771605 Tz (gas ) Tj 1.147222 0 Td 49.691358 Tz (sensor ) Tj 1.983333 0 Td 55.092593 Tz (600 ) Tj 3.363889 0 Td 32.407407 Tz (It ) Tj 0.563889 0 Td 49.691358 Tz (can ) Tj 1.166667 0 Td 63.194444 Tz (be ) Tj 0.933333 0 Td 52.824074 Tz (understood ) Tj 3.480556 0 Td 43.75 Tz (that ) Tj 1.263889 0 Td 49.691358 Tz (the ) Tj 1.069444 0 Td 47.685185 Tz (optical ) Tj 2.275 0 Td 48.611111 Tz (gas ) Tj 1.108333 0 Td 49.151235 Tz (sensor ) Tj 2.080556 0 Td 48.971193 Tz (described ) Tj 58.571429 0 0 58.571429 0 2625.243615 Tm 5.531707 0 Td 40.243902 Tz (further ) Tj 1.963415 0 Td 47.425474 Tz (comprises ) Tj 2.74878 0 Td 34.146341 Tz (a ) Tj 0.546341 0 Td 38.888889 Tz (cap ) Tj 0.973171 0 Td 48.943089 Tz (wafer ) Tj 1.758537 0 Td 50.271003 Tz (802 ) Tj 1.126829 0 Td 39.837398 Tz (for ) Tj 0.904878 0 Td 45.212285 Tz (enclosing ) Tj 2.458537 0 Td 34.146341 Tz (/ ) Tj 0.221951 0 Td 44.105691 Tz (covering ) Tj 2.373171 0 Td 34.146341 Tz (a ) Tj 1.587805 0 Td 46.476965 Tz (according ) Tj 2.765854 0 Td 32.723577 Tz (to ) Tj 0.819512 0 Td 50.702143 Tz (embodiments ) Tj 3.704878 0 Td 42.682927 Tz (of ) Tj 0.819512 0 Td 38.888889 Tz (the ) Tj 0.990244 0 Td 46.747967 Tz (present ) Tj 2.117073 0 Td 42.999097 Tz (invention ) Tj 2.612195 0 Td 50.271003 Tz (has ) Tj 1.246341 0 Td 34.146341 Tz (a ) Tj 51.428571 0 0 51.428571 0 2586.488712 Tm 6.319444 0 Td 46.990741 Tz (side ) Tj 1.380556 0 Td 53.472222 Tz (of ) Tj 0.836111 0 Td 49.691358 Tz (the ) Tj 1.069444 0 Td 47.685185 Tz (optical ) Tj 2.236111 0 Td 49.691358 Tz (gas ) Tj 1.244444 0 Td 49.151235 Tz (sensor ) Tj 1.963889 0 Td 55.092593 Tz (600 ) Tj 1.341667 0 Td 53.472222 Tz (on ) Tj 0.855556 0 Td 57.037037 Tz (which ) Tj 2.061111 0 Td 49.691358 Tz (the ) Tj 1.166667 0 Td 49.691358 Tz (gas ) Tj 1.088889 0 Td 52.777778 Tz (sensing ) Tj 3.655556 0 Td 58.333333 Tz (wide ) Tj 1.905556 0 Td 43.981481 Tz (variety ) Tj 2.255556 0 Td 64.814815 Tz (of ) Tj 1.011111 0 Td 48.611111 Tz (applications ) Tj 3.869444 0 Td 50.771605 Tz (including ) Tj 2.761111 0 Td 32.407407 Tz (, ) Tj 0.602778 0 Td 44.290123 Tz (for ) Tj 1.244444 0 Td 55.555556 Tz (example ) Tj 2.8 0 Td 56.17284 Tz (and ) Tj 45.714286 0 0 45.714286 0 2543.482353 Tm 7.0875 0 Td 51.5625 Tz (section ) Tj 2.471875 0 Td 66.840278 Tz (604 ) Tj 1.553125 0 Td 34.635417 Tz (is ) Tj 0.74375 0 Td 61.979167 Tz (formed ) Tj 2.559375 0 Td 30.989583 Tz (to ) Tj 0.875 0 Td 49.21875 Tz (form ) Tj 1.771875 0 Td 32.8125 Tz (a ) Tj 0.525 0 Td 66.666667 Tz (chamber ) Tj 3.084375 0 Td 59.548611 Tz (804 ) Tj 1.35625 0 Td 50 Tz (therein ) Tj 2.31875 0 Td 32.8125 Tz (, ) Tj 0.371875 0 Td 60.763889 Tz (and ) Tj 1.44375 0 Td 34.635417 Tz (in ) Tj 1.203125 0 Td 30.989583 Tz (10 ) Tj 0.984375 0 Td 62.5 Tz (without ) Tj 2.778125 0 Td 49.583333 Tz (limitation ) Tj 3.15 0 Td 32.8125 Tz (, ) Tj 0.284375 0 Td 64.0625 Tz (medical ) Tj 2.909375 0 Td 53.776042 Tz (applications ) Tj 4.15625 0 Td 32.8125 Tz (\( ) Tj 0.284375 0 Td 32.8125 Tz (e ) Tj 0.284375 0 Td 32.8125 Tz (. ) Tj 0.284375 0 Td 32.8125 Tz (g ) Tj 0.35 0 Td 32.8125 Tz (. ) Tj 0.196875 0 Td 32.8125 Tz (, ) Tj 0.35 0 Td 55.902778 Tz (detecting ) Tj 3.259375 0 Td 74.739583 Tz (CO ) Tj 1.159375 0 Td 32.8125 Tz (, ) Tj 51.428571 0 0 51.428571 0 2502.312864 Tm 6.3 0 Td 46.342593 Tz (particular ) Tj 2.780556 0 Td 32.407407 Tz (, ) Tj 0.330556 0 Td 42.12963 Tz (to ) Tj 0.855556 0 Td 39.699074 Tz (form ) Tj 1.536111 0 Td 32.407407 Tz (a ) Tj 0.505556 0 Td 49.691358 Tz (gas ) Tj 0.972222 0 Td 32.407407 Tz (- ) Tj 0.213889 0 Td 50.555556 Tz (photo ) Tj 1.886111 0 Td 44.781145 Tz (interaction ) Tj 3.227778 0 Td 59.722222 Tz (chamber ) Tj 2.508333 0 Td 32.407407 Tz (. ) Tj 0.427778 0 Td 55.092593 Tz (The ) Tj 1.205556 0 Td 49.691358 Tz (cap ) Tj 2.45 0 Td 51.851852 Tz (with ) Tj 1.594444 0 Td 39.699074 Tz (fast ) Tj 1.166667 0 Td 49.259259 Tz (speed ) Tj 1.808333 0 Td 49.691358 Tz (and ) Tj 1.166667 0 Td 50.231481 Tz (high ) Tj 1.477778 0 Td 42.718855 Tz (sensitivity ) Tj 3.188889 0 Td 44.290123 Tz (for ) Tj 0.855556 0 Td 46.843434 Tz (respiration ) Tj 3.305556 0 Td 45.37037 Tz (rate ) Tj 1.166667 0 Td 32.407407 Tz (/ ) Tj 0.136111 0 Td 51.203704 Tz (depth ) Tj 51.428571 0 0 51.428571 0 2461.123506 Tm 6.241667 0 Td 57.685185 Tz (wafer ) Tj 2.1 0 Td 55.092593 Tz (804 ) Tj 1.419444 0 Td 52.572016 Tz (comprises ) Tj 3.305556 0 Td 55.092593 Tz (one ) Tj 1.283333 0 Td 53.472222 Tz (or ) Tj 0.797222 0 Td 65.625 Tz (more ) Tj 2.022222 0 Td 47.530864 Tz (apertures ) Tj 3.013889 0 Td 50.771605 Tz (806 ) Tj 1.380556 0 Td 32.407407 Tz (in ) Tj 1.011111 0 Td 35 Tz (fluid ) Tj 2.702778 0 Td 46.8107 Tz (detection ) Tj 2.897222 0 Td 48.881173 Tz (applications ) Tj 3.519444 0 Td 32.407407 Tz (\) ) Tj 0.213889 0 Td 32.407407 Tz (, ) Tj 0.408333 0 Td 53.148148 Tz (automotive ) Tj 3.441667 0 Td 48.206019 Tz (industry ) Tj 2.663889 0 Td 32.407407 Tz (\( ) Tj 0.213889 0 Td 32.407407 Tz (e ) Tj 0.272222 0 Td 32.407407 Tz (. ) Tj 0.272222 0 Td 32.407407 Tz (g ) Tj 0.291667 0 Td 32.407407 Tz (. ) Tj 0.213889 0 Td 32.407407 Tz (, ) Tj 0.369444 0 Td 46.090535 Tz (detection ) Tj 45.714286 0 0 45.714286 0 2419.660315 Tm 7.0875 0 Td 63.942308 Tz (communication ) Tj 5.359375 0 Td 53.776042 Tz (with ) Tj 1.79375 0 Td 54.6875 Tz (the ) Tj 1.4 0 Td 63.541667 Tz (chamber ) Tj 3.128125 0 Td 60.763889 Tz (804 ) Tj 1.509375 0 Td 32.8125 Tz (\( ) Tj 0.284375 0 Td 32.8125 Tz (i ) Tj 0.21875 0 Td 32.8125 Tz (. ) Tj 0.196875 0 Td 32.8125 Tz (e ) Tj 0.35 0 Td 32.8125 Tz (. ) Tj 0.21875 0 Td 32.8125 Tz (, ) Tj 0.6125 0 Td 54.6875 Tz (gas ) Tj 1.35625 0 Td 44.357639 Tz (inlets ) Tj 1.75 0 Td 32.8125 Tz (/ ) Tj 0.109375 0 Td 61.979167 Tz (out ) Tj 1.1375 0 Td 32.8125 Tz (- ) Tj 1.88125 0 Td 63.802083 Tz (of ) Tj 0.896875 0 Td 54.6875 Tz (polluting ) Tj 3.346875 0 Td 59.0625 Tz (gases ) Tj 2.05625 0 Td 52.864583 Tz (from ) Tj 1.815625 0 Td 56.510417 Tz (vehicles ) Tj 2.75625 0 Td 32.8125 Tz (\) ) Tj 0.196875 0 Td 32.8125 Tz (, ) Tj 0.56875 0 Td 57.725694 Tz (indoor ) Tj 2.428125 0 Td 43.75 Tz (air ) Tj 1.05 0 Td 52.083333 Tz (quality ) Tj 2.40625 0 Td 86.588542 Tz (moni ) Tj 55.714286 0 0 55.714286 0 2374.334853 Tm 5.779487 0 Td 41.880342 Tz (lets ) Tj 0.987179 0 Td 32.905983 Tz (\) ) Tj 0.502564 0 Td 39.88604 Tz (for ) Tj 0.951282 0 Td 49.85755 Tz (gas ) Tj 1.112821 0 Td 42.877493 Tz (diffusion ) Tj 2.65641 0 Td 22.435897 Tz (in ) Tj 0.717949 0 Td 44.871795 Tz (gas ) Tj 1.041026 0 Td 49.145299 Tz (sensing ) Tj 2.046154 0 Td 32.905983 Tz (. ) Tj 0.394872 0 Td 49.85755 Tz (For ) Tj 1.130769 0 Td 51.709402 Tz (example ) Tj 2.261538 0 Td 32.905983 Tz (, ) Tj 0.358974 0 Td 49.85755 Tz (the ) Tj 1.094872 0 Td 27.920228 Tz (cap ) Tj 1.974359 0 Td 20.940171 Tz (t ) Tj 0.466667 0 Td 46.666667 Tz (oring ) Tj 1.633333 0 Td 32.905983 Tz (\( ) Tj 0.215385 0 Td 32.905983 Tz (e ) Tj 0.269231 0 Td 32.905983 Tz (. ) Tj 0.215385 0 Td 32.905983 Tz (g ) Tj 0.287179 0 Td 32.905983 Tz (. ) Tj 0.125641 0 Td 32.905983 Tz (, ) Tj 0.448718 0 Td 38.888889 Tz (for ) Tj 0.969231 0 Td 47.863248 Tz (smart ) Tj 1.54359 0 Td 68.803419 Tz (home ) Tj 1.723077 0 Td 49.85755 Tz (and ) Tj 1.076923 0 Td 49.957265 Tz (automotive ) Tj 3.248718 0 Td 44.871795 Tz (cars ) Tj 1.076923 0 Td 32.905983 Tz (\) ) Tj 0.215385 0 Td 32.905983 Tz (, ) Tj 0.323077 0 Td 60.683761 Tz (manufac ) Tj 45.714286 0 0 45.714286 0 2336.692308 Tm 7.04375 0 Td 64.166667 Tz (wafer ) Tj 2.14375 0 Td 66.840278 Tz (802 ) Tj 1.4 0 Td 82.638889 Tz (may ) Tj 1.75 0 Td 65.625 Tz (be ) Tj 1.05 0 Td 51.5625 Tz (affixed ) Tj 2.515625 0 Td 43.75 Tz (to ) Tj 0.853125 0 Td 59.548611 Tz (the ) Tj 1.246875 0 Td 54.6875 Tz (optical ) Tj 2.66875 0 Td 54.6875 Tz (gas ) Tj 1.225 0 Td 57.118056 Tz (sensor ) Tj 2.253125 0 Td 71.701389 Tz (600 ) Tj 1.70625 0 Td 42.534722 Tz (via ) Tj 1.4875 0 Td 32.8125 Tz (15 ) Tj 1.115625 0 Td 53.472222 Tz (turing ) Tj 2.1875 0 Td 56.25 Tz (process ) Tj 2.821875 0 Td 55.208333 Tz (control ) Tj 2.625 0 Td 32.8125 Tz (\( ) Tj 0.284375 0 Td 32.8125 Tz (e ) Tj 0.2625 0 Td 32.8125 Tz (. ) Tj 0.284375 0 Td 32.8125 Tz (g ) Tj 0.35 0 Td 32.8125 Tz (. ) Tj 0.21875 0 Td 32.8125 Tz (, ) Tj 0.459375 0 Td 43.75 Tz (in ) Tj 0.91875 0 Td 53.693182 Tz (agriculture ) Tj 3.89375 0 Td 59.548611 Tz (and ) Tj 1.4875 0 Td 59.244792 Tz (food ) Tj 1.771875 0 Td 65.625 Tz (indus ) Tj 51.6 0 0 51.6 0 2294.075958 Tm 6.317829 0 Td 47.372954 Tz (solder ) Tj 2.015504 0 Td 54.909561 Tz (808 ) Tj 1.25969 0 Td 43.604651 Tz (as ) Tj 0.794574 0 Td 41.108762 Tz (illustrated ) Tj 3.062016 0 Td 33.914729 Tz (in ) Tj 0.794574 0 Td 44.14298 Tz (FIG ) Tj 1.085271 0 Td 32.299742 Tz (. ) Tj 0.503876 0 Td 32.299742 Tz (8 ) Tj 0.271318 0 Td 32.299742 Tz (. ) Tj 0.406977 0 Td 43.604651 Tz (In ) Tj 0.833333 0 Td 46.027132 Tz (addition ) Tj 2.325581 0 Td 32.299742 Tz (, ) Tj 0.329457 0 Td 49.52627 Tz (the ) Tj 1.104651 0 Td 47.372954 Tz (substrate ) Tj 4.069767 0 Td 39.836348 Tz (try ) Tj 0.833333 0 Td 32.299742 Tz (\) ) Tj 0.213178 0 Td 32.299742 Tz (, ) Tj 0.465116 0 Td 49.52627 Tz (gas ) Tj 1.046512 0 Td 53.063861 Tz (leakage ) Tj 2.383721 0 Td 48.808498 Tz (detection ) Tj 2.945736 0 Td 32.299742 Tz (in ) Tj 0.736434 0 Td 54.505814 Tz (chemical ) Tj 2.771318 0 Td 51.218162 Tz (process ) Tj 2.422481 0 Td 46.834625 Tz (industry ) Tj 2.55814 0 Td 54.909561 Tz (and ) Tj 51.428571 0 0 51.428571 0 2252.995862 Tm 6.280556 0 Td 60.493827 Tz (612 ) Tj 1.652778 0 Td 52.572016 Tz (comprises ) Tj 3.363889 0 Td 60.493827 Tz (two ) Tj 1.691667 0 Td 45.37037 Tz (vias ) Tj 1.613889 0 Td 32.407407 Tz (\( ) Tj 0.233333 0 Td 49.537037 Tz (through ) Tj 2.216667 0 Td 32.407407 Tz (- ) Tj 0.252778 0 Td 43.055556 Tz (silicon ) Tj 2.430556 0 Td 46.180556 Tz (vias ) Tj 1.730556 0 Td 32.407407 Tz (\( ) Tj 0.213889 0 Td 70.486111 Tz (TSVs ) Tj 1.672222 0 Td 32.407407 Tz (\) ) Tj 0.213889 0 Td 32.407407 Tz (\) ) Tj 1.730556 0 Td 49.151235 Tz (energy ) Tj 2.275 0 Td 46.585648 Tz (industry ) Tj 2.722222 0 Td 44.290123 Tz (for ) Tj 1.088889 0 Td 45.37037 Tz (safety ) Tj 2.1 0 Td 51.49177 Tz (conscious ) Tj 2.819444 0 Td 32.407407 Tz (, ) Tj 0.544444 0 Td 49.691358 Tz (and ) Tj 1.302778 0 Td 57.928241 Tz (consumer ) Tj 3.188889 0 Td 55.902778 Tz (elec ) Tj 51.593407 0 0 51.593407 0 2209.652527 Tm 6.338019 0 Td 44.302449 Tz (therein ) Tj 1.938232 0 Td 32.303869 Tz (, ) Tj 0.348882 0 Td 33.919063 Tz (in ) Tj 0.736528 0 Td 46.194533 Tz (particular ) Tj 2.75229 0 Td 32.303869 Tz (, ) Tj 0.348882 0 Td 32.303869 Tz (a ) Tj 0.50394 0 Td 36.826411 Tz (first ) Tj 1.201704 0 Td 44.148621 Tz (via ) Tj 1.007881 0 Td 61.377352 Tz (812 ) Tj 1.201704 0 Td 55.993374 Tz (having ) Tj 2.228967 0 Td 32.303869 Tz (a ) Tj 0.348882 0 Td 59.43912 Tz (metal ) Tj 1.957614 0 Td 52.404055 Tz (conductor ) Tj 4.264111 0 Td 46.609869 Tz (tronics ) Tj 2.151438 0 Td 32.303869 Tz (\( ) Tj 0.290735 0 Td 32.303869 Tz (e ) Tj 0.271353 0 Td 32.303869 Tz (. ) Tj 0.271353 0 Td 32.303869 Tz (g ) Tj 0.290735 0 Td 32.303869 Tz (. ) Tj 0.135676 0 Td 32.303869 Tz (, ) Tj 0.407029 0 Td 54.270501 Tz (smart ) Tj 1.802556 0 Td 55.454976 Tz (phones ) Tj 2.228967 0 Td 54.916578 Tz (and ) Tj 1.08541 0 Td 54.51278 Tz (wearable ) Tj 2.965495 0 Td 57.339368 Tz (consumer ) Tj 2.926731 0 Td 52.493788 Tz (electron ) Tj 51.428571 0 0 51.428571 0 2170.104265 Tm 6.338889 0 Td 44.444444 Tz (therein ) Tj 2.216667 0 Td 53.796296 Tz (communicatively ) Tj 5.191667 0 Td 52.777778 Tz (coupled ) Tj 2.469444 0 Td 32.407407 Tz (to ) Tj 0.7 0 Td 44.290123 Tz (the ) Tj 1.05 0 Td 45.37037 Tz (light ) Tj 1.438889 0 Td 51.311728 Tz (source ) Tj 2.080556 0 Td 55.092593 Tz (602 ) Tj 1.263889 0 Td 56.17284 Tz (and ) Tj 2.566667 0 Td 38.888889 Tz (ics ) Tj 0.758333 0 Td 32.407407 Tz (\) ) Tj 0.213889 0 Td 32.407407 Tz (. ) Tj 45.714286 0 0 45.714286 0 2128.560102 Tm 7.13125 0 Td 32.8125 Tz (a ) Tj 0.590625 0 Td 61.371528 Tz (second ) Tj 2.515625 0 Td 49.826389 Tz (via ) Tj 1.203125 0 Td 61.979167 Tz (814 ) Tj 1.4 0 Td 63.194444 Tz (having ) Tj 2.5375 0 Td 32.8125 Tz (a ) Tj 0.459375 0 Td 65.625 Tz (metal ) Tj 2.253125 0 Td 58.333333 Tz (conductor ) Tj 3.45625 0 Td 47.395833 Tz (therein ) Tj 2.559375 0 Td 78.020833 Tz (commu ) Tj 2.40625 0 Td 32.8125 Tz (- ) Tj 0.74375 0 Td 41.927083 Tz (20 ) Tj 2.078125 0 Td 63.802083 Tz (Throughout ) Tj 3.98125 0 Td 49.826389 Tz (the ) Tj 1.1375 0 Td 57.291667 Tz (present ) Tj 2.515625 0 Td 51.322115 Tz (specification ) Tj 4.178125 0 Td 32.8125 Tz (, ) Tj 0.415625 0 Td 34.635417 Tz (it ) Tj 0.590625 0 Td 54.6875 Tz (can ) Tj 1.203125 0 Td 72.916667 Tz (be ) Tj 0.984375 0 Td 59.427083 Tz (understood ) Tj 45.714286 0 0 45.714286 0 2088.438088 Tm 7.065625 0 Td 52.864583 Tz (nicatively ) Tj 3.696875 0 Td 57.8125 Tz (coupled ) Tj 2.953125 0 Td 32.8125 Tz (to ) Tj 0.984375 0 Td 54.6875 Tz (the ) Tj 1.4 0 Td 51.041667 Tz (light ) Tj 1.815625 0 Td 54.6875 Tz (detector ) Tj 2.996875 0 Td 61.979167 Tz (606 ) Tj 1.290625 0 Td 32.8125 Tz (. ) Tj 0.65625 0 Td 58.333333 Tz (That ) Tj 1.79375 0 Td 30.989583 Tz (is ) Tj 0.48125 0 Td 32.8125 Tz (, ) Tj 0.634375 0 Td 54.6875 Tz (the ) Tj 2.646875 0 Td 51.041667 Tz (that ) Tj 1.4875 0 Td 71.09375 Tz (when ) Tj 2.23125 0 Td 32.8125 Tz (a ) Tj 0.634375 0 Td 51.770833 Tz (layer ) Tj 1.903125 0 Td 54.6875 Tz (or ) Tj 1.071875 0 Td 61.979167 Tz (element ) Tj 2.909375 0 Td 30.989583 Tz (is ) Tj 0.875 0 Td 51.041667 Tz (referred ) Tj 2.8875 0 Td 32.8125 Tz (to ) Tj 0.940625 0 Td 52.864583 Tz (as ) Tj 0.940625 0 Td 61.25 Tz (being ) Tj 2.1875 0 Td 32.8125 Tz ( ) Tj 0.328125 0 Td 65.625 Tz (on ) Tj 0.853125 0 Td 32.8125 Tz ( ) Tj 51.428571 0 0 51.428571 0 2043.806452 Tm 6.358333 0 Td 71.296296 Tz (TSVs ) Tj 1.808333 0 Td 60.493827 Tz (812 ) Tj 1.127778 0 Td 32.407407 Tz (, ) Tj 0.427778 0 Td 55.092593 Tz (814 ) Tj 1.283333 0 Td 47.395833 Tz (function ) Tj 2.644444 0 Td 53.472222 Tz (as ) Tj 0.972222 0 Td 43.101852 Tz (electrical ) Tj 2.8 0 Td 49.358974 Tz (interconnects ) Tj 4.122222 0 Td 50 Tz (through ) Tj 3.752778 0 Td 50.462963 Tz (another ) Tj 2.333333 0 Td 46.666667 Tz (layer ) Tj 1.555556 0 Td 53.472222 Tz (or ) Tj 0.797222 0 Td 54.62963 Tz (element ) Tj 2.275 0 Td 32.407407 Tz (, ) Tj 0.35 0 Td 49.691358 Tz (the ) Tj 1.05 0 Td 46.018519 Tz (layer ) Tj 1.633333 0 Td 43.75 Tz (or ) Tj 0.797222 0 Td 54.166667 Tz (element ) Tj 2.45 0 Td 48.611111 Tz (can ) Tj 1.088889 0 Td 53.472222 Tz (be ) Tj 0.913889 0 Td 42.939815 Tz (directly ) Tj 55.714286 0 0 55.714286 0 1999 Tm 5.851282 0 Td 43.874644 Tz (the ) Tj 1.005128 0 Td 50.854701 Tz (semiconductor ) Tj 4.2 0 Td 42.877493 Tz (substrate ) Tj 2.530769 0 Td 54.843305 Tz (612 ) Tj 1.094872 0 Td 32.905983 Tz (. ) Tj 50 0 0 50 0 2001.09596 Tm 25.96 0 Td 53.333333 Tz (on ) Tj 1 0 Td 52.380952 Tz (another ) Tj 2.48 0 Td 49.333333 Tz (layer ) Tj 1.7 0 Td 53.333333 Tz (or ) Tj 0.84 0 Td 56.666667 Tz (element ) Tj 2.64 0 Td 33.333333 Tz (\( ) Tj 0.2 0 Td 33.333333 Tz (i ) Tj 0.22 0 Td 33.333333 Tz (. ) Tj 0.28 0 Td 33.333333 Tz (e ) Tj 0.28 0 Td 33.333333 Tz (. ) Tj 0.14 0 Td 33.333333 Tz (, ) Tj 0.38 0 Td 56.666667 Tz (without ) Tj 2.6 0 Td 55.555556 Tz (any ) Tj 1.3 0 Td 50.25641 Tz (intermediatel ) Tj 51.428571 0 0 51.428571 0 1961.694801 Tm 7.038889 0 Td 53.619529 Tz (Accordingly ) Tj 3.616667 0 Td 32.407407 Tz (, ) Tj 0.738889 0 Td 57.449495 Tz (embodiments ) Tj 4.472222 0 Td 43.75 Tz (of ) Tj 1.088889 0 Td 49.691358 Tz (the ) Tj 1.419444 0 Td 51.851852 Tz (present ) Tj 2.741667 0 Td 47.890947 Tz (invention ) Tj 4.180556 0 Td 49.494949 Tz (intervening ) Tj 3.558333 0 Td 46.450617 Tz (layers ) Tj 2.061111 0 Td 43.75 Tz (or ) Tj 0.952778 0 Td 50.636574 Tz (elements ) Tj 2.8 0 Td 51.58179 Tz (therebetween ) Tj 3.908333 0 Td 32.407407 Tz (\) ) Tj 0.447222 0 Td 53.472222 Tz (or ) Tj 0.972222 0 Td 44.074074 Tz (indirectly ) Tj 45.714286 0 0 45.714286 0 1921.111604 Tm 7.021875 0 Td 60.416667 Tz (advantageously ) Tj 5.359375 0 Td 58.789062 Tz (provides ) Tj 3.01875 0 Td 52.864583 Tz (an ) Tj 0.984375 0 Td 53.125 Tz (optical ) Tj 2.275 0 Td 67.24537 Tz (waveguide ) Tj 3.828125 0 Td 50.636574 Tz (structure ) Tj 3.128125 0 Td 59.548611 Tz (100 ) Tj 1.61875 0 Td 52.864583 Tz (25 ) Tj 1.1375 0 Td 63.802083 Tz (on ) Tj 1.159375 0 Td 58.854167 Tz (another ) Tj 2.84375 0 Td 52.5 Tz (layer ) Tj 1.925 0 Td 52.864583 Tz (or ) Tj 1.071875 0 Td 59.375 Tz (element ) Tj 2.8875 0 Td 32.8125 Tz (\( ) Tj 0.21875 0 Td 32.8125 Tz (i ) Tj 0.240625 0 Td 32.8125 Tz (. ) Tj 0.240625 0 Td 32.8125 Tz (e ) Tj 0.35 0 Td 32.8125 Tz (. ) Tj 0.13125 0 Td 32.8125 Tz (, ) Tj 0.503125 0 Td 53.776042 Tz (with ) Tj 1.8375 0 Td 66.840278 Tz (one ) Tj 1.553125 0 Td 52.864583 Tz (or ) Tj 0.853125 0 Td 72.005208 Tz (more ) Tj 2.121875 0 Td 56.145833 Tz (inter ) Tj 45.714286 0 0 45.714286 0 1880.32606 Tm 7.065625 0 Td 62.586806 Tz (having ) Tj 2.603125 0 Td 32.8125 Tz (a ) Tj 0.590625 0 Td 50.480769 Tz (significantly ) Tj 4.33125 0 Td 63.4375 Tz (wider ) Tj 2.165625 0 Td 60.520833 Tz (wavelength ) Tj 4.025 0 Td 56.206597 Tz (transmission ) Tj 4.440625 0 Td 60.763889 Tz (win ) Tj 1.3125 0 Td 32.8125 Tz (- ) Tj 1.70625 0 Td 63.020833 Tz (mediate ) Tj 2.975 0 Td 51.041667 Tz (layers ) Tj 2.14375 0 Td 52.864583 Tz (or ) Tj 0.91875 0 Td 59.244792 Tz (elements ) Tj 3.10625 0 Td 58.940972 Tz (therebetween ) Tj 4.41875 0 Td 32.8125 Tz (\) ) Tj 0.196875 0 Td 32.8125 Tz (. ) Tj 0.525 0 Td 55.497685 Tz (Therefore ) Tj 3.040625 0 Td 32.8125 Tz (, ) Tj 0.459375 0 Td 56.510417 Tz (unless ) Tj 51.428571 0 0 51.428571 0 1837.246006 Tm 6.3 0 Td 61.574074 Tz (dow ) Tj 1.419444 0 Td 51.851852 Tz (while ) Tj 1.905556 0 Td 51.446759 Tz (enabling ) Tj 2.683333 0 Td 49.691358 Tz (the ) Tj 1.127778 0 Td 44.486532 Tz (fabrication ) Tj 3.305556 0 Td 53.472222 Tz (of ) Tj 0.875 0 Td 42.12963 Tz (an ) Tj 0.797222 0 Td 53.472222 Tz (on ) Tj 0.758333 0 Td 32.407407 Tz (- ) Tj 0.252778 0 Td 47.800926 Tz (chip ) Tj 1.497222 0 Td 45.37037 Tz (integrated ) Tj 4.297222 0 Td 46.450617 Tz (stated ) Tj 1.886111 0 Td 51.49177 Tz (otherwise ) Tj 2.838889 0 Td 32.407407 Tz (, ) Tj 0.330556 0 Td 51.041667 Tz (such ) Tj 1.438889 0 Td 53.472222 Tz (an ) Tj 0.913889 0 Td 50.231481 Tz (expression ) Tj 3.247222 0 Td 50.771605 Tz (should ) Tj 2.061111 0 Td 63.194444 Tz (be ) Tj 0.913889 0 Td 45.37037 Tz (interpreted ) Tj 3.266667 0 Td 42.12963 Tz (to ) Tj 48.695652 0 0 48.695652 0 1795.998065 Tm 6.6125 0 Td 53.295068 Tz (optical ) Tj 2.484821 0 Td 51.339286 Tz (gas ) Tj 1.170536 0 Td 55.332341 Tz (sensor ) Tj 2.238393 0 Td 57.614087 Tz (having ) Tj 2.382143 0 Td 41.071429 Tz (an ) Tj 0.8625 0 Td 43.809524 Tz (ultra ) Tj 1.519643 0 Td 30.803571 Tz (- ) Tj 0.225893 0 Td 62.585034 Tz (compact ) Tj 2.813393 0 Td 47.061012 Tz (size ) Tj 1.458036 0 Td 55.902778 Tz (and ) Tj 1.29375 0 Td 58.869048 Tz (wafer ) Tj 3.59375 0 Td 56.130952 Tz (cover ) Tj 1.848214 0 Td 50.483631 Tz (both ) Tj 1.560714 0 Td 53.392857 Tz (cases ) Tj 1.663393 0 Td 34.22619 Tz (. ) Tj 0.390179 0 Td 34.22619 Tz (It ) Tj 0.657143 0 Td 50.768849 Tz (should ) Tj 2.176786 0 Td 44.494048 Tz (also ) Tj 1.29375 0 Td 66.741071 Tz (be ) Tj 0.985714 0 Td 56.130952 Tz (understood ) Tj 3.614286 0 Td 45.349702 Tz (that ) Tj 1.273214 0 Td 59.325397 Tz (any ) Tj 1.314286 0 Td 58.184524 Tz (terms ) Tj 51.5625 0 0 51.5625 0 1754.572433 Tm 6.244848 0 Td 50.424242 Tz (level ) Tj 1.726061 0 Td 54.949495 Tz (packaging ) Tj 3.277576 0 Td 45.89899 Tz (capability ) Tj 3.2 0 Td 32.323232 Tz (in ) Tj 0.833939 0 Td 32.323232 Tz (a ) Tj 0.698182 0 Td 46.868687 Tz (cost ) Tj 1.338182 0 Td 45.611672 Tz (effective ) Tj 2.715152 0 Td 62.491582 Tz (manner ) Tj 2.230303 0 Td 32.323232 Tz (. ) Tj 0.504242 0 Td 54.949495 Tz (For ) Tj 2.482424 0 Td 46.868687 Tz (such ) Tj 1.706667 0 Td 53.333333 Tz (as ) Tj 1.105455 0 Td 32.323232 Tz ( ) Tj 0.349091 0 Td 44.175084 Tz (top ) Tj 0.892121 0 Td 32.323232 Tz ( ) Tj 0.290909 0 Td 32.323232 Tz (, ) Tj 0.698182 0 Td 32.323232 Tz ( ) Tj 0.290909 0 Td 49.023569 Tz (bottom ) Tj 2.075152 0 Td 32.323232 Tz ( ) Tj 0.290909 0 Td 32.323232 Tz (, ) Tj 0.620606 0 Td 32.323232 Tz ( ) Tj 0.368485 0 Td 52.525253 Tz (base ) Tj 1.299394 0 Td 32.323232 Tz ( ) Tj 0.290909 0 Td 32.323232 Tz (, ) Tj 0.698182 0 Td 32.323232 Tz ( ) Tj 0.290909 0 Td 67.070707 Tz (down ) Tj 1.667879 0 Td 32.323232 Tz ( ) Tj 0.271515 0 Td 32.323232 Tz (, ) Tj 0.620606 0 Td 32.323232 Tz ( ) Tj 0.407273 0 Td 54.949495 Tz (sideways ) Tj 2.598788 0 Td 32.323232 Tz ( ) Tj 0.349091 0 Td 32.323232 Tz (, ) Tj 51.428571 0 0 51.428571 0 1713.115789 Tm 6.3 0 Td 58.333333 Tz (example ) Tj 2.508333 0 Td 32.407407 Tz (, ) Tj 0.427778 0 Td 49.691358 Tz (the ) Tj 1.127778 0 Td 48.148148 Tz (optical ) Tj 2.255556 0 Td 58.333333 Tz (waveguide ) Tj 3.441667 0 Td 46.090535 Tz (structure ) Tj 2.955556 0 Td 48.611111 Tz (100 ) Tj 1.244444 0 Td 49.691358 Tz (can ) Tj 1.244444 0 Td 53.472222 Tz (be ) Tj 1.011111 0 Td 48.611111 Tz (con ) Tj 1.069444 0 Td 32.407407 Tz (- ) Tj 0.7 0 Td 32.407407 Tz (30 ) Tj 0.972222 0 Td 32.407407 Tz ( ) Tj 0.291667 0 Td 62.654321 Tz (downwards ) Tj 3.344444 0 Td 32.407407 Tz ( ) Tj 0.35 0 Td 32.407407 Tz (, ) Tj 0.466667 0 Td 43.75 Tz (or ) Tj 0.875 0 Td 44.290123 Tz (the ) Tj 1.127778 0 Td 45.37037 Tz (like ) Tj 1.108333 0 Td 32.407407 Tz (, ) Tj 0.369444 0 Td 64.814815 Tz (when ) Tj 1.788889 0 Td 52.662037 Tz (used ) Tj 1.691667 0 Td 34.027778 Tz (in ) Tj 0.836111 0 Td 44.290123 Tz (the ) Tj 1.069444 0 Td 51.851852 Tz (present ) Tj 2.391667 0 Td 57.037037 Tz (speci ) Tj 45.714286 0 0 45.714286 0 1672.639037 Tm 7.109375 0 Td 53.125 Tz (figured ) Tj 2.58125 0 Td 43.75 Tz (to ) Tj 0.91875 0 Td 63.802083 Tz (have ) Tj 1.88125 0 Td 54.6875 Tz (low ) Tj 1.553125 0 Td 51.953125 Tz (loss ) Tj 1.53125 0 Td 43.75 Tz (in ) Tj 1.00625 0 Td 49.826389 Tz (the ) Tj 1.1375 0 Td 70.486111 Tz (Mid ) Tj 1.509375 0 Td 32.8125 Tz (- ) Tj 0.2625 0 Td 43.75 Tz (IR ) Tj 1.115625 0 Td 58.697917 Tz (wavelength ) Tj 4.06875 0 Td 54.6875 Tz (region ) Tj 3.80625 0 Td 46.028646 Tz (fication ) Tj 2.5375 0 Td 49.826389 Tz (are ) Tj 1.159375 0 Td 57.421875 Tz (used ) Tj 1.728125 0 Td 49.826389 Tz (for ) Tj 1.115625 0 Td 60.32197 Tz (convenience ) Tj 4.2 0 Td 64.409722 Tz (and ) Tj 1.334375 0 Td 41.927083 Tz (to ) Tj 0.83125 0 Td 49.826389 Tz (aid ) Tj 1.18125 0 Td 59.174679 Tz (understanding ) Tj 4.790625 0 Td 63.802083 Tz (of ) Tj 61.428571 0 0 61.428571 0 1623.418679 Tm 5.290698 0 Td 44.315245 Tz (and ) Tj 1.123256 0 Td 42.50646 Tz (strong ) Tj 1.823256 0 Td 46.395349 Tz (evanescent ) Tj 2.897674 0 Td 40.697674 Tz (optical ) Tj 2.002326 0 Td 48.837209 Tz (power ) Tj 1.481395 0 Td 32.55814 Tz (. ) Tj 0.423256 0 Td 32.55814 Tz (In ) Tj 0.830233 0 Td 42.635659 Tz (various ) Tj 2.018605 0 Td 51.098191 Tz (embodi ) Tj 1.839535 0 Td 32.55814 Tz (- ) Tj 1.383721 0 Td 38.323643 Tz (relative ) Tj 2.034884 0 Td 40.39621 Tz (positions ) Tj 2.393023 0 Td 32.55814 Tz (or ) Tj 0.618605 0 Td 39.883721 Tz (directions ) Tj 2.393023 0 Td 32.55814 Tz (, ) Tj 0.35814 0 Td 44.315245 Tz (and ) Tj 1.025581 0 Td 44.315245 Tz (not ) Tj 0.960465 0 Td 41.715116 Tz (intended ) Tj 2.213953 0 Td 32.55814 Tz (to ) Tj 0.651163 0 Td 37.984496 Tz (limit ) Tj 1.237209 0 Td 44.315245 Tz (the ) Tj 45.714286 0 0 45.714286 0 1588.346979 Tm 6.934375 0 Td 66.354167 Tz (ments ) Tj 2.078125 0 Td 32.8125 Tz (, ) Tj 0.634375 0 Td 32.8125 Tz (a ) Tj 0.590625 0 Td 51.041667 Tz (chip ) Tj 1.44375 0 Td 32.8125 Tz (- ) Tj 0.240625 0 Td 48.854167 Tz (scale ) Tj 1.815625 0 Td 61.25 Tz (multi ) Tj 1.859375 0 Td 32.8125 Tz (- ) Tj 0.30625 0 Td 54.6875 Tz (gas ) Tj 1.334375 0 Td 58.940972 Tz (sensor ) Tj 2.471875 0 Td 54.6875 Tz (can ) Tj 1.334375 0 Td 63.802083 Tz (be ) Tj 1.159375 0 Td 55.598958 Tz (obtained ) Tj 3.084375 0 Td 54.6875 Tz (with ) Tj 3.15 0 Td 51.041667 Tz (orientation ) Tj 3.740625 0 Td 63.802083 Tz (of ) Tj 0.91875 0 Td 54.6875 Tz (the ) Tj 1.225 0 Td 53.125 Tz (optical ) Tj 2.3625 0 Td 65.219907 Tz (waveguide ) Tj 3.871875 0 Td 49.826389 Tz (structure ) Tj 3.0625 0 Td 52.864583 Tz (or ) Tj 0.91875 0 Td 53.645833 Tz (optical ) Tj 2.45 0 Td 59.548611 Tz (gas ) Tj 55.714286 0 0 55.714286 0 1542.726651 Tm 5.797436 0 Td 44.871795 Tz (high ) Tj 1.507692 0 Td 35.897436 Tz (fidelity ) Tj 2.153846 0 Td 32.905983 Tz (\( ) Tj 0.233333 0 Td 41.132479 Tz (self ) Tj 1.148718 0 Td 42.777778 Tz (calibrated ) Tj 2.835897 0 Td 51.452991 Tz (using ) Tj 1.741026 0 Td 49.957265 Tz (wavelength ) Tj 3.338462 0 Td 45.868946 Tz (switch ) Tj 1.776923 0 Td 32.905983 Tz (\) ) Tj 0.466667 0 Td 49.85755 Tz (and ) Tj 2.315385 0 Td 47.863248 Tz (sensor ) Tj 1.687179 0 Td 32.905983 Tz (. ) Tj 58.571429 0 0 58.571429 0 1501.001327 Tm 5.446341 0 Td 49.512195 Tz (multi ) Tj 1.434146 0 Td 34.146341 Tz (- ) Tj 0.273171 0 Td 44.579946 Tz (gas ) Tj 1.365854 0 Td 43.902439 Tz (sensing ) Tj 2.339024 0 Td 40.691057 Tz (capability ) Tj 3.021951 0 Td 34.146341 Tz (\( ) Tj 0.119512 0 Td 54.776423 Tz (wide ) Tj 1.758537 0 Td 47.804878 Tz (wavelength ) Tj 3.534146 0 Td 43.631436 Tz (tuning ) Tj 2.031707 0 Td 31.300813 Tz (35 ) Tj 1.485366 0 Td 49.512195 Tz (While ) Tj 1.878049 0 Td 50.184775 Tz (embodiments ) Tj 3.602439 0 Td 42.682927 Tz (of ) Tj 0.734146 0 Td 44.579946 Tz (the ) Tj 1.058537 0 Td 41.102078 Tz (invention ) Tj 2.509756 0 Td 52.642276 Tz (have ) Tj 1.468293 0 Td 46.239837 Tz (been ) Tj 1.502439 0 Td 45.528455 Tz (particu ) Tj 55.844156 0 0 55.844156 0 1460.16581 Tm 5.783953 0 Td 49.542636 Tz (range ) Tj 1.54 0 Td 32.829457 Tz (\) ) Tj 0.214884 0 Td 32.829457 Tz (. ) Tj 0.41186 0 Td 32.829457 Tz (In ) Tj 0.787907 0 Td 46.472868 Tz (various ) Tj 2.256279 0 Td 53.992248 Tz (embodiments ) Tj 3.599302 0 Td 32.829457 Tz (, ) Tj 0.41186 0 Td 32.829457 Tz (a ) Tj 0.608837 0 Td 44.341085 Tz (coating ) Tj 1.916047 0 Td 32.829457 Tz (- ) Tj 0.268605 0 Td 36.560078 Tz (free ) Tj 1.307209 0 Td 44.767442 Tz (gas ) Tj 1.110233 0 Td 37.803618 Tz (sensor ) Tj 2.775581 0 Td 48.348837 Tz (larly ) Tj 1.629535 0 Td 56.108527 Tz (shown ) Tj 1.89814 0 Td 49.741602 Tz (and ) Tj 1.074419 0 Td 46.425495 Tz (described ) Tj 2.686047 0 Td 46.25969 Tz (with ) Tj 1.325116 0 Td 45.762274 Tz (reference ) Tj 2.686047 0 Td 31.337209 Tz (to ) Tj 0.698372 0 Td 39.917636 Tz (specific ) Tj 2.148837 0 Td 60.187339 Tz (embodi ) Tj 51.428571 0 0 51.428571 0 1419.358296 Tm 6.3 0 Td 49.691358 Tz (can ) Tj 1.108333 0 Td 63.194444 Tz (be ) Tj 0.952778 0 Td 49.421296 Tz (obtained ) Tj 2.605556 0 Td 46.8107 Tz (resulting ) Tj 2.741667 0 Td 34.027778 Tz (in ) Tj 0.7 0 Td 50.771605 Tz (longer ) Tj 2.041667 0 Td 34.027778 Tz (life ) Tj 1.011111 0 Td 58.333333 Tz (time ) Tj 1.555556 0 Td 55.092593 Tz (and ) Tj 1.108333 0 Td 49.691358 Tz (low ) Tj 1.341667 0 Td 39.537037 Tz (drift ) Tj 1.419444 0 Td 32.407407 Tz (\( ) Tj 0.155556 0 Td 53.472222 Tz (no ) Tj 2.041667 0 Td 61.574074 Tz (ments ) Tj 1.925 0 Td 32.407407 Tz (, ) Tj 0.35 0 Td 34.027778 Tz (it ) Tj 0.525 0 Td 51.311728 Tz (should ) Tj 2.061111 0 Td 63.194444 Tz (be ) Tj 0.972222 0 Td 50.87963 Tz (understood ) Tj 3.227778 0 Td 63.194444 Tz (by ) Tj 0.991667 0 Td 48.611111 Tz (those ) Tj 1.75 0 Td 41.666667 Tz (skilled ) Tj 2.022222 0 Td 34.027778 Tz (in ) Tj 0.777778 0 Td 44.290123 Tz (the ) Tj 1.030556 0 Td 43.209877 Tz (art ) Tj 0.933333 0 Td 47.800926 Tz (that ) Tj 51.688312 0 0 51.688312 0 1378.039439 Tm 6.307035 0 Td 45.142379 Tz (carry ) Tj 1.489698 0 Td 32.244556 Tz (- ) Tj 0.232161 0 Td 50.785176 Tz (over ) Tj 1.528392 0 Td 46.754606 Tz (effect ) Tj 1.644472 0 Td 32.244556 Tz (\) ) Tj 0.444975 0 Td 54.815745 Tz (and ) Tj 1.373618 0 Td 44.06756 Tz (low ) Tj 1.373618 0 Td 43.852596 Tz (cross ) Tj 1.470352 0 Td 32.244556 Tz (- ) Tj 0.174121 0 Td 51.839325 Tz (contamination ) Tj 4.430402 0 Td 32.244556 Tz (\( ) Tj 0.251508 0 Td 43.969849 Tz (selectivity ) Tj 4.430402 0 Td 50.20938 Tz (various ) Tj 2.476382 0 Td 53.894472 Tz (changes ) Tj 2.592462 0 Td 32.244556 Tz (in ) Tj 0.967337 0 Td 41.111809 Tz (form ) Tj 1.663819 0 Td 53.740927 Tz (and ) Tj 1.257538 0 Td 46.217197 Tz (detail ) Tj 1.89598 0 Td 70.938023 Tz (may ) Tj 1.625126 0 Td 53.203518 Tz (be ) Tj 0.870603 0 Td 71.744137 Tz (made ) Tj 2.031407 0 Td 44.221106 Tz (therein ) Tj 58.421053 0 0 58.421053 0 1335.049351 Tm 5.545946 0 Td 46.715465 Tz (provided ) Tj 2.464865 0 Td 57.057057 Tz (by ) Tj 0.992793 0 Td 46.596597 Tz (gas ) Tj 1.027027 0 Td 43.363363 Tz (absorption ) Tj 2.995495 0 Td 42.436186 Tz (spectrum ) Tj 2.327928 0 Td 34.234234 Tz (, ) Tj 0.325225 0 Td 52.302302 Tz (not ) Tj 1.12973 0 Td 42.792793 Tz (coating ) Tj 2.156757 0 Td 48.023023 Tz (chemis ) Tj 3.200901 0 Td 48.906049 Tz (without ) Tj 2.173874 0 Td 45.328662 Tz (departing ) Tj 2.67027 0 Td 35.660661 Tz (from ) Tj 1.335135 0 Td 42.792793 Tz (the ) Tj 0.975676 0 Td 37.087087 Tz (spirit ) Tj 1.472072 0 Td 47.547548 Tz (and ) Tj 1.163964 0 Td 45.075075 Tz (scope ) Tj 1.557658 0 Td 49.924925 Tz (of ) Tj 0.718919 0 Td 41.841842 Tz (the ) Tj 1.00991 0 Td 41.841842 Tz (invention ) Tj 47.142857 0 0 47.142857 0 1297.75 Tm 6.893939 0 Td 44.781145 Tz (try ) Tj 0.912121 0 Td 31.818182 Tz (\) ) Tj 0.212121 0 Td 31.818182 Tz (. ) Tj 50 0 0 50 0 1294.257215 Tm 24.94 0 Td 43.333333 Tz (40 ) Tj 1.02 0 Td 53.333333 Tz (as ) Tj 0.82 0 Td 50 Tz (defined ) Tj 2.38 0 Td 63.333333 Tz (by ) Tj 1.06 0 Td 50 Tz (the ) Tj 1.16 0 Td 55.833333 Tz (appended ) Tj 3.08 0 Td 54.444444 Tz (claims ) Tj 1.9 0 Td 33.333333 Tz (. ) Tj 0.52 0 Td 54.444444 Tz (The ) Tj 1.28 0 Td 56.666667 Tz (scope ) Tj 1.84 0 Td 65 Tz (of ) Tj 0.92 0 Td 50 Tz (the ) Tj 1.12 0 Td 60.666667 Tz (inven ) Tj 51.632653 0 0 51.632653 0 1255.548544 Tm 7.06917 0 Td 43.039087 Tz (FIG ) Tj 1.084585 0 Td 32.279315 Tz (. ) Tj 0.619763 0 Td 62.944664 Tz (9A ) Tj 1.316996 0 Td 44.729908 Tz (depicts ) Tj 2.382213 0 Td 32.279315 Tz (a ) Tj 0.658498 0 Td 49.225955 Tz (plot ) Tj 1.626877 0 Td 55.592153 Tz (comparing ) Tj 3.428063 0 Td 49.494949 Tz (the ) Tj 1.278261 0 Td 45.5497 Tz (effective ) Tj 2.905138 0 Td 45.836627 Tz (light ) Tj 2.788933 0 Td 42.770092 Tz (tion ) Tj 1.375099 0 Td 22.59552 Tz (is ) Tj 0.581028 0 Td 48.418972 Tz (thus ) Tj 1.336364 0 Td 48.418972 Tz (indicated ) Tj 2.711462 0 Td 62.944664 Tz (by ) Tj 0.968379 0 Td 49.494949 Tz (the ) Tj 1.007115 0 Td 56.08531 Tz (appended ) Tj 3.021344 0 Td 52.184892 Tz (claims ) Tj 2.033597 0 Td 53.798858 Tz (and ) Tj 1.181423 0 Td 38.735178 Tz (all ) Tj 0.910277 0 Td 53.952569 Tz (changes ) Tj 45.714286 0 0 45.714286 0 1213.256426 Tm 7.0875 0 Td 55.052083 Tz (absorption ) Tj 3.71875 0 Td 49.826389 Tz (for ) Tj 1.159375 0 Td 55.902778 Tz (the ) Tj 1.203125 0 Td 59.548611 Tz (conventional ) Tj 4.528125 0 Td 49.21875 Tz (free ) Tj 1.44375 0 Td 59.0625 Tz (space ) Tj 2.0125 0 Td 57.421875 Tz (approach ) Tj 3.215625 0 Td 60.763889 Tz (and ) Tj 1.35625 0 Td 54.6875 Tz (the ) Tj 2.625 0 Td 63.4375 Tz (which ) Tj 2.253125 0 Td 74.739583 Tz (come ) Tj 1.88125 0 Td 55.902778 Tz (within ) Tj 2.3625 0 Td 49.826389 Tz (the ) Tj 1.028125 0 Td 68.75 Tz (meaning ) Tj 3.128125 0 Td 59.548611 Tz (and ) Tj 1.35625 0 Td 57.604167 Tz (range ) Tj 1.96875 0 Td 63.802083 Tz (of ) Tj 0.940625 0 Td 57.339015 Tz (equivalency ) Tj 4.090625 0 Td 63.802083 Tz (of ) Tj 51.696429 0 0 51.696429 0 1170.976044 Tm 6.209326 0 Td 60.180388 Tz (waveguide ) Tj 3.423834 0 Td 53.598158 Tz (approach ) Tj 2.920898 0 Td 52.299623 Tz (according ) Tj 3.114335 0 Td 32.239493 Tz (to ) Tj 0.812435 0 Td 41.911341 Tz (an ) Tj 0.870466 0 Td 57.570524 Tz (example ) Tj 2.746805 0 Td 60.287853 Tz (embodiment ) Tj 5.029361 0 Td 49.43389 Tz (the ) Tj 1.179965 0 Td 54.269814 Tz (claims ) Tj 2.050432 0 Td 44.060641 Tz (are ) Tj 1.160622 0 Td 48.35924 Tz (therefore ) Tj 2.862867 0 Td 49.971215 Tz (intended ) Tj 2.688774 0 Td 43.523316 Tz (to ) Tj 0.812435 0 Td 53.195164 Tz (be ) Tj 1.005872 0 Td 56.01612 Tz (embraced ) Tj 2.804836 0 Td 32.239493 Tz (. ) Tj 46.153846 0 0 46.153846 0 1130.002554 Tm 7.041667 0 Td 65 Tz (of ) Tj 0.845 0 Td 55.37037 Tz (the ) Tj 1.105 0 Td 56.746032 Tz (present ) Tj 2.535 0 Td 55.771605 Tz (invention ) Tj 3.076667 0 Td 32.5 Tz (. ) Tj 0.411667 0 Td 49.351852 Tz (FIG ) Tj 1.256667 0 Td 32.5 Tz (. ) Tj 0.411667 0 Td 63.194444 Tz (9A ) Tj 1.083333 0 Td 69.333333 Tz (shows ) Tj 2.253333 0 Td 49.652778 Tz (that ) Tj 1.321667 0 Td 64.097222 Tz (compared ) Tj 3.358333 0 Td 43.333333 Tz (to ) Tj 0.866667 0 Td 49.351852 Tz (the ) Tj 64.285714 0 0 64.285714 0 1082.820336 Tm 5.133333 0 Td 33.703704 Tz (free ) Tj 1.088889 0 Td 38.888889 Tz (space ) Tj 1.446667 0 Td 42.12963 Tz (approach ) Tj 2.115556 0 Td 33.703704 Tz (, ) Tj 0.357778 0 Td 37.333333 Tz (light ) Tj 1.337778 0 Td 39.666667 Tz (absorption ) Tj 2.628889 0 Td 38.888889 Tz (can ) Tj 1.057778 0 Td 42.777778 Tz (be ) Tj 0.793333 0 Td 39.212963 Tz (obtained ) Tj 2.193333 0 Td 22.037037 Tz (in ) Tj 0.668889 0 Td 33.703704 Tz (a ) Tj 0.56 0 Td 32.407407 Tz (45 ) Tj 1.368889 0 Td 57.037037 Tz (What ) Tj 1.508889 0 Td 32.407407 Tz (is ) Tj 0.622222 0 Td 41.851852 Tz (claimed ) Tj 1.96 0 Td 32.407407 Tz (is ) Tj 0.42 0 Td 33.703704 Tz (: ) Tj 60.357143 0 0 60.357143 0 1043.843193 Tm 5.43432 0 Td 40.631164 Tz (shorter ) Tj 1.888757 0 Td 45.101907 Tz (gas ) Tj 1.076923 0 Td 37.968442 Tz (cell ) Tj 0.861538 0 Td 33.136095 Tz (' ) Tj 0.215385 0 Td 33.136095 Tz (s ) Tj 0.430769 0 Td 40.959895 Tz (length ) Tj 1.855621 0 Td 33.136095 Tz (\( ) Tj 0.132544 0 Td 45.364892 Tz (sensing ) Tj 2.170414 0 Td 45.364892 Tz (channel ) Tj 1.905325 0 Td 33.136095 Tz (' ) Tj 0.215385 0 Td 33.136095 Tz (s ) Tj 0.430769 0 Td 37.73833 Tz (length ) Tj 1.557396 0 Td 33.136095 Tz (\) ) Tj 0.430769 0 Td 39.579224 Tz (for ) Tj 0.960947 0 Td 39.579224 Tz (the ) Tj 2.667456 0 Td 33.136095 Tz (1 ) Tj 0.198817 0 Td 33.136095 Tz (. ) Tj 0.347929 0 Td 60.749507 Tz (An ) Tj 0.994083 0 Td 38.658777 Tz (optical ) Tj 1.855621 0 Td 49.397326 Tz (waveguide ) Tj 2.932544 0 Td 38.351961 Tz (structure ) Tj 2.153846 0 Td 33.136095 Tz (, ) Tj 0.430769 0 Td 44.457594 Tz (comprising ) Tj 2.700592 0 Td 33.136095 Tz (: ) Tj 59.591837 0 0 59.591837 0 1001.607182 Tm 5.353082 0 Td 51.58549 Tz (waveguide ) Tj 3.05411 0 Td 45.448059 Tz (approach ) Tj 2.24863 0 Td 33.561644 Tz (. ) Tj 0.486644 0 Td 41.952055 Tz (This ) Tj 1.241781 0 Td 52.579909 Tz (shows ) Tj 1.745205 0 Td 41.952055 Tz (that ) Tj 1.208219 0 Td 33.561644 Tz (a ) Tj 0.486644 0 Td 43.350457 Tz (very ) Tj 1.325685 0 Td 38.59589 Tz (short ) Tj 1.510274 0 Td 41.019787 Tz (gas ) Tj 0.990068 0 Td 39.155251 Tz (cell ) Tj 2.785616 0 Td 30.76484 Tz (a ) Tj 0.469863 0 Td 41.019787 Tz (substrate ) Tj 2.198288 0 Td 30.76484 Tz (; ) Tj 55.428571 0 0 55.428571 0 961.335974 Tm 5.809278 0 Td 45.103093 Tz (with ) Tj 1.371134 0 Td 48.861684 Tz (high ) Tj 1.443299 0 Td 40.182755 Tz (sensitivity ) Tj 2.92268 0 Td 43.766705 Tz (detection ) Tj 2.706186 0 Td 47.107675 Tz (can ) Tj 1.064433 0 Td 58.634021 Tz (be ) Tj 0.847938 0 Td 46.982388 Tz (obtained ) Tj 2.525773 0 Td 47.508591 Tz (based ) Tj 1.659794 0 Td 57.130584 Tz (on ) Tj 0.884021 0 Td 47.107675 Tz (the ) Tj 2.850515 0 Td 49.613402 Tz (an ) Tj 0.902062 0 Td 42.998282 Tz (insulating ) Tj 2.850515 0 Td 43.900344 Tz (layer ) Tj 1.515464 0 Td 47.358247 Tz (disposed ) Tj 2.525773 0 Td 49.613402 Tz (on ) Tj 0.902062 0 Td 46.105384 Tz (the ) Tj 1.100515 0 Td 41.762123 Tz (substrate ) Tj 2.32732 0 Td 30.068729 Tz (, ) Tj 0.396907 0 Td 41.093929 Tz (the ) Tj 1.046392 0 Td 45.962199 Tz (insulat ) Tj 53.061224 0 0 53.061224 0 924.939024 Tm 6.049615 0 Td 58.632479 Tz (waveguide ) Tj 3.354615 0 Td 49.863782 Tz (approach ) Tj 2.751538 0 Td 50.954416 Tz (according ) Tj 2.958846 0 Td 42.403846 Tz (to ) Tj 0.753846 0 Td 48.162393 Tz (the ) Tj 1.130769 0 Td 53.397436 Tz (example ) Tj 2.581923 0 Td 58.737179 Tz (embodiment ) Tj 50.793651 0 0 50.793651 0 921.323481 Tm 27.09 0 Td 49.21875 Tz (ing ) Tj 1.18125 0 Td 45.9375 Tz (layer ) Tj 1.673437 0 Td 54.46875 Tz (comprising ) Tj 3.602812 0 Td 42.65625 Tz (an ) Tj 0.885937 0 Td 42.65625 Tz (air ) Tj 1.043438 0 Td 45.9375 Tz (slot ) Tj 1.397812 0 Td 54.6875 Tz (formed ) Tj 2.28375 0 Td 45.46875 Tz (therein ) Tj 2.067187 0 Td 32.8125 Tz (; ) Tj 45.714286 0 0 45.714286 0 881.125936 Tm 7.04375 0 Td 63.802083 Tz (of ) Tj 0.9625 0 Td 55.902778 Tz (the ) Tj 1.3125 0 Td 57.291667 Tz (present ) Tj 2.625 0 Td 53.877315 Tz (invention ) Tj 3.084375 0 Td 32.8125 Tz (. ) Tj 0.48125 0 Td 51.041667 Tz (FIG ) Tj 1.26875 0 Td 32.8125 Tz (. ) Tj 0.590625 0 Td 52.864583 Tz (9B ) Tj 1.071875 0 Td 55.208333 Tz (depicts ) Tj 2.690625 0 Td 32.8125 Tz (a ) Tj 0.546875 0 Td 54.6875 Tz (plot ) Tj 1.575 0 Td 64.409722 Tz (comparing ) Tj 4.003125 0 Td 41.927083 Tz (50 ) Tj 1.990625 0 Td 32.8125 Tz (a ) Tj 0.7 0 Td 42.291667 Tz (first ) Tj 1.465625 0 Td 59.244792 Tz (material ) Tj 3.15 0 Td 51.770833 Tz (layer ) Tj 1.946875 0 Td 60.763889 Tz (suspended ) Tj 3.71875 0 Td 59.244792 Tz (over ) Tj 1.8375 0 Td 49.826389 Tz (the ) Tj 1.26875 0 Td 43.75 Tz (air ) Tj 1.225 0 Td 49.21875 Tz (slot ) Tj 1.465625 0 Td 65.625 Tz (of ) Tj 0.984375 0 Td 59.548611 Tz (the ) Tj 56.722689 0 0 56.722689 0 836.509804 Tm 5.712 0 Td 45.753086 Tz (various ) Tj 2.291852 0 Td 47.012346 Tz (parameters ) Tj 3.226222 0 Td 57.296296 Tz (of ) Tj 0.987259 0 Td 47.502058 Tz (conventional ) Tj 3.719852 0 Td 45.053498 Tz (gas ) Tj 1.216444 0 Td 44.493827 Tz (sensors ) Tj 2.309481 0 Td 49.950617 Tz (and ) Tj 1.286963 0 Td 45.053498 Tz (the ) Tj 3.543556 0 Td 41.723457 Tz (insulating ) Tj 2.767852 0 Td 45.837037 Tz (layer ) Tj 1.286963 0 Td 35.259259 Tz (, ) Tj 0.387852 0 Td 47.99177 Tz (the ) Tj 1.163556 0 Td 34.671605 Tz (first ) Tj 1.163556 0 Td 45.54321 Tz (material ) Tj 2.450519 0 Td 45.249383 Tz (layer ) Tj 1.569037 0 Td 42.849794 Tz (constituting ) Tj 3.420148 0 Td 35.259259 Tz (a ) Tj 50 0 0 50 0 797.517532 Tm 6.52 0 Td 48.333333 Tz (integrated ) Tj 3.44 0 Td 48.095238 Tz (optical ) Tj 2.52 0 Td 50 Tz (gas ) Tj 1.4 0 Td 55 Tz (sensor ) Tj 2.38 0 Td 55.925926 Tz (according ) Tj 3.5 0 Td 33.333333 Tz (to ) Tj 0.98 0 Td 53.333333 Tz (an ) Tj 1.22 0 Td 57.142857 Tz (example ) Tj 45.714286 0 0 45.714286 0 798.002635 Tm 29.946875 0 Td 67.24537 Tz (waveguide ) Tj 3.89375 0 Td 51.041667 Tz (core ) Tj 1.4875 0 Td 63.802083 Tz (of ) Tj 0.896875 0 Td 54.6875 Tz (the ) Tj 1.246875 0 Td 53.125 Tz (optical ) Tj 2.275 0 Td 67.24537 Tz (waveguide ) Tj 3.80625 0 Td 51.041667 Tz (structure ) Tj 2.909375 0 Td 32.8125 Tz (; ) Tj 0.371875 0 Td 65.625 Tz (and ) Tj 51.578947 0 0 51.578947 0 754.494396 Tm 6.320408 0 Td 61.394558 Tz (embodiment ) Tj 3.819388 0 Td 53.316327 Tz (of ) Tj 0.736735 0 Td 49.546485 Tz (the ) Tj 1.085714 0 Td 51.70068 Tz (present ) Tj 2.384694 0 Td 45.95616 Tz (invention ) Tj 2.656122 0 Td 32.312925 Tz (. ) Tj 0.387755 0 Td 49.056895 Tz (Traditional ) Tj 3.392857 0 Td 49.546485 Tz (gas ) Tj 1.105102 0 Td 49.007937 Tz (sensor ) Tj 4.071429 0 Td 32.312925 Tz (a ) Tj 0.465306 0 Td 52.239229 Tz (second ) Tj 2.055102 0 Td 52.912415 Tz (material ) Tj 2.636735 0 Td 47.176871 Tz (layer ) Tj 1.570408 0 Td 50.488946 Tz (disposed ) Tj 2.714286 0 Td 52.508503 Tz (over ) Tj 1.454082 0 Td 49.546485 Tz (the ) Tj 0.930612 0 Td 59.599395 Tz (waveguide ) Tj 3.431633 0 Td 48.469388 Tz (core ) Tj 1.221429 0 Td 32.312925 Tz (, ) Tj 50 0 0 50 0 713.730819 Tm 6.58 0 Td 33.333333 Tz (1 ) Tj 0.52 0 Td 54.444444 Tz (has ) Tj 1.18 0 Td 61.111111 Tz (one ) Tj 1.36 0 Td 52.380952 Tz (sensing ) Tj 2.48 0 Td 45.333333 Tz (light ) Tj 1.58 0 Td 56.190476 Tz (channel ) Tj 2.54 0 Td 33.333333 Tz (\( ) Tj 0.24 0 Td 54.444444 Tz (gas ) Tj 1.28 0 Td 41.666667 Tz (cell ) Tj 1 0 Td 33.333333 Tz (\) ) Tj 0.22 0 Td 33.333333 Tz (, ) Tj 0.44 0 Td 61.111111 Tz (one ) Tj 1.32 0 Td 48.666667 Tz (light ) Tj 1.58 0 Td 51.111111 Tz (source ) Tj 1.98 0 Td 33.333333 Tz (, ) Tj 50 0 0 50 0 711.123386 Tm 27.4 0 Td 55.714286 Tz (wherein ) Tj 2.68 0 Td 50 Tz (the ) Tj 1.18 0 Td 59.62963 Tz (waveguide ) Tj 3.58 0 Td 48.333333 Tz (core ) Tj 1.5 0 Td 33.333333 Tz (is ) Tj 0.74 0 Td 55.555556 Tz (suspended ) Tj 3.34 0 Td 55 Tz (over ) Tj 1.6 0 Td 50 Tz (the ) Tj 1.16 0 Td 38.888889 Tz (air ) Tj 50.971429 0 0 50.971429 0 669.769689 Tm 6.39574 0 Td 55.586697 Tz (and ) Tj 1.314462 0 Td 61.036373 Tz (one ) Tj 1.392937 0 Td 45.77728 Tz (light ) Tj 1.549888 0 Td 50.681988 Tz (detector ) Tj 2.393498 0 Td 32.698057 Tz (, ) Tj 0.451233 0 Td 55.586697 Tz (but ) Tj 1.196749 0 Td 53.951794 Tz (no ) Tj 1.118274 0 Td 49.047085 Tz (reference ) Tj 3.0213 0 Td 51.849776 Tz (channel ) Tj 2.197309 0 Td 32.698057 Tz (. ) Tj 0.568946 0 Td 32.698057 Tz (In ) Tj 0.84361 0 Td 45.77728 Tz (tradi ) Tj 1.3537 0 Td 32.698057 Tz (- ) Tj 0.686659 0 Td 44.142377 Tz (55 ) Tj 2.491592 0 Td 44.959828 Tz (slot ) Tj 1.216368 0 Td 52.316891 Tz (of ) Tj 0.706278 0 Td 49.047085 Tz (the ) Tj 1.137892 0 Td 47.739163 Tz (insulating ) Tj 3.080157 0 Td 45.123318 Tz (layer ) Tj 1.589126 0 Td 52.316891 Tz (by ) Tj 0.961323 0 Td 49.047085 Tz (the ) Tj 1.059417 0 Td 53.951794 Tz (second ) Tj 2.099215 0 Td 51.499439 Tz (material ) Tj 2.668161 0 Td 48.393124 Tz (layer ) Tj 1.432175 0 Td 32.698057 Tz (, ) Tj 54.114286 0 0 54.114286 0 628.377131 Tm 5.987328 0 Td 46.198522 Tz (tional ) Tj 1.903379 0 Td 45.171888 Tz (gas ) Tj 1.071806 0 Td 49.79174 Tz (sensor ) Tj 2.051214 0 Td 33.878916 Tz (1 ) Tj 0.277191 0 Td 33.878916 Tz (, ) Tj 0.425026 0 Td 40.038719 Tz (all ) Tj 0.887012 0 Td 56.978177 Tz (of ) Tj 0.794615 0 Td 51.331691 Tz (the ) Tj 1.108765 0 Td 47.738472 Tz (noises ) Tj 1.995776 0 Td 42.348645 Tz (from ) Tj 1.607709 0 Td 40.038719 Tz (the ) Tj 1.071806 0 Td 40.654699 Tz (light ) Tj 1.496832 0 Td 45.685205 Tz (source ) Tj 1.718585 0 Td 33.878916 Tz (, ) Tj 2.956705 0 Td 52.358325 Tz (and ) Tj 1.312038 0 Td 30.799014 Tz (a ) Tj 0.425026 0 Td 47.518479 Tz (surface ) Tj 2.254488 0 Td 50.818374 Tz (of ) Tj 0.757656 0 Td 47.225155 Tz (the ) Tj 1.034847 0 Td 57.491494 Tz (waveguide ) Tj 3.381732 0 Td 44.658571 Tz (core ) Tj 1.330517 0 Td 30.799014 Tz (is ) Tj 0.702218 0 Td 50.158395 Tz (exposed ) Tj 2.402323 0 Td 40.038719 Tz (to ) Tj 0.813094 0 Td 43.11862 Tz (the ) Tj 55.714286 0 0 55.714286 0 585.875622 Tm 5.815385 0 Td 48.290598 Tz (sensing ) Tj 2.225641 0 Td 51.282051 Tz (channel ) Tj 2.046154 0 Td 32.905983 Tz (, ) Tj 0.412821 0 Td 49.85755 Tz (and ) Tj 1.148718 0 Td 43.874644 Tz (the ) Tj 1.058974 0 Td 42.478632 Tz (light ) Tj 1.417949 0 Td 45.245726 Tz (detector ) Tj 2.315385 0 Td 45.868946 Tz (can ) Tj 1.112821 0 Td 44.373219 Tz (affect ) Tj 1.723077 0 Td 33.903134 Tz (its ) Tj 0.771795 0 Td 52.350427 Tz (perfor ) Tj 52.44898 0 0 52.44898 0 591.813896 Tm 26.254086 0 Td 38.132296 Tz (air ) Tj 0.953307 0 Td 41.309987 Tz (slot ) Tj 1.182101 0 Td 61.964981 Tz (of ) Tj 0.896109 0 Td 48.7246 Tz (the ) Tj 1.105837 0 Td 46.712062 Tz (insulating ) Tj 3.088716 0 Td 46.394293 Tz (layer ) Tj 1.372763 0 Td 31.776913 Tz (. ) Tj 51.428571 0 0 51.428571 0 549.452969 Tm 6.222222 0 Td 62.87037 Tz (mance ) Tj 2.022222 0 Td 32.407407 Tz (. ) Tj 0.447222 0 Td 50.05144 Tz (Therefore ) Tj 2.780556 0 Td 32.407407 Tz (, ) Tj 0.427778 0 Td 44.486532 Tz (traditional ) Tj 3.15 0 Td 55.092593 Tz (gas ) Tj 1.225 0 Td 50.231481 Tz (sensor ) Tj 2.119444 0 Td 32.407407 Tz (1 ) Tj 0.35 0 Td 72.376543 Tz (may ) Tj 1.536111 0 Td 64.814815 Tz (be ) Tj 0.952778 0 Td 50.231481 Tz (regarded ) Tj 4.802778 0 Td 32.407407 Tz (2 ) Tj 0.35 0 Td 32.407407 Tz (. ) Tj 0.427778 0 Td 55.092593 Tz (The ) Tj 1.263889 0 Td 48.148148 Tz (optical ) Tj 2.177778 0 Td 58.333333 Tz (waveguide ) Tj 3.480556 0 Td 45.37037 Tz (structure ) Tj 2.780556 0 Td 50.05144 Tz (according ) Tj 3.033333 0 Td 32.407407 Tz (to ) Tj 0.816667 0 Td 42.12963 Tz (claim ) Tj 1.905556 0 Td 32.407407 Tz (1 ) Tj 0.272222 0 Td 32.407407 Tz (, ) Tj 50 0 0 50 0 504.999349 Tm 6.42 0 Td 59.333333 Tz (being ) Tj 1.98 0 Td 53.333333 Tz (based ) Tj 1.96 0 Td 53.333333 Tz (on ) Tj 1.1 0 Td 33.333333 Tz (a ) Tj 0.5 0 Td 63.333333 Tz (no ) Tj 1.06 0 Td 51.333333 Tz (noise ) Tj 1.86 0 Td 50 Tz (reduction ) Tj 3.14 0 Td 53.333333 Tz (approach ) Tj 2.68 0 Td 33.333333 Tz (. ) Tj 0.52 0 Td 50 Tz (Traditional ) Tj 4.7 0 Td 55.714286 Tz (wherein ) Tj 2.74 0 Td 50 Tz (the ) Tj 1.34 0 Td 55 Tz (second ) Tj 2.26 0 Td 54.583333 Tz (material ) Tj 2.88 0 Td 48.666667 Tz (layer ) Tj 1.86 0 Td 55.185185 Tz (comprises ) Tj 3.26 0 Td 53.333333 Tz (at ) Tj 0.86 0 Td 48 Tz (least ) Tj 1.72 0 Td 61.111111 Tz (one ) Tj 58.571429 0 0 58.571429 0 459.076923 Tm 5.6 0 Td 44.579946 Tz (gas ) Tj 1.058537 0 Td 45.528455 Tz (sensor ) Tj 1.912195 0 Td 34.146341 Tz (2 ) Tj 0.426829 0 Td 50.271003 Tz (has ) Tj 1.126829 0 Td 44.817073 Tz (both ) Tj 1.434146 0 Td 44.308943 Tz (sensing ) Tj 2.134146 0 Td 42.682927 Tz (light ) Tj 1.434146 0 Td 46.747967 Tz (channel ) Tj 2.236585 0 Td 44.579946 Tz (and ) Tj 1.126829 0 Td 43.315266 Tz (reference ) Tj 2.731707 0 Td 42.682927 Tz (60 ) Tj 0.939024 0 Td 45.121951 Tz (through ) Tj 2.014634 0 Td 34.146341 Tz (- ) Tj 0.153659 0 Td 45.528455 Tz (hole ) Tj 1.417073 0 Td 22.764228 Tz (in ) Tj 0.665854 0 Td 33.577236 Tz (fluid ) Tj 1.382927 0 Td 49.906191 Tz (communication ) Tj 4.131707 0 Td 43.394309 Tz (with ) Tj 1.45122 0 Td 39.837398 Tz (the ) Tj 0.939024 0 Td 37.940379 Tz (air ) Tj 0.939024 0 Td 37.703252 Tz (slot ) Tj 0.887805 0 Td 34.146341 Tz (. ) Tj 45.714286 0 0 45.714286 0 424.969697 Tm 7.109375 0 Td 50.3125 Tz (light ) Tj 1.859375 0 Td 59.895833 Tz (channel ) Tj 2.471875 0 Td 32.8125 Tz (, ) Tj 0.48125 0 Td 66.840278 Tz (one ) Tj 1.61875 0 Td 48.125 Tz (light ) Tj 1.815625 0 Td 55.902778 Tz (source ) Tj 2.45 0 Td 59.548611 Tz (and ) Tj 1.4875 0 Td 60.763889 Tz (two ) Tj 1.53125 0 Td 51.041667 Tz (light ) Tj 1.728125 0 Td 53.877315 Tz (detectors ) Tj 2.975 0 Td 32.8125 Tz (. ) Tj 0.6125 0 Td 32.8125 Tz (In ) Tj 3.15 0 Td 32.8125 Tz (3 ) Tj 0.35 0 Td 32.8125 Tz (. ) Tj 0.48125 0 Td 66.840278 Tz (The ) Tj 1.509375 0 Td 53.645833 Tz (optical ) Tj 2.3625 0 Td 67.24537 Tz (waveguide ) Tj 3.89375 0 Td 50.636574 Tz (structure ) Tj 3.128125 0 Td 57.523148 Tz (according ) Tj 3.45625 0 Td 43.75 Tz (to ) Tj 0.875 0 Td 48.125 Tz (claim ) Tj 2.23125 0 Td 32.8125 Tz (1 ) Tj 0.2625 0 Td 32.8125 Tz (, ) Tj 61.428571 0 0 61.428571 0 375.911417 Tm 5.274419 0 Td 39.217759 Tz (traditional ) Tj 2.718605 0 Td 43.410853 Tz (gas ) Tj 0.911628 0 Td 43.410853 Tz (sensor ) Tj 1.75814 0 Td 32.55814 Tz (2 ) Tj 0.276744 0 Td 32.55814 Tz (, ) Tj 0.276744 0 Td 32.55814 Tz (a ) Tj 0.488372 0 Td 43.410853 Tz (gas ) Tj 0.927907 0 Td 42.248062 Tz (sensing ) Tj 1.937209 0 Td 40.697674 Tz (signal ) Tj 1.611628 0 Td 49.741602 Tz (and ) Tj 1.05814 0 Td 32.55814 Tz (a ) Tj 0.423256 0 Td 41.602067 Tz (reference ) Tj 3.418605 0 Td 46.511628 Tz (wherein ) Tj 2.327907 0 Td 44.315245 Tz (the ) Tj 1.090698 0 Td 46.576227 Tz (second ) Tj 1.937209 0 Td 44.767442 Tz (material ) Tj 2.425581 0 Td 39.069767 Tz (layer ) Tj 1.546512 0 Td 32.55814 Tz (is ) Tj 0.748837 0 Td 42.732558 Tz (disposed ) Tj 2.45814 0 Td 42.732558 Tz (over ) Tj 1.432558 0 Td 39.793282 Tz (the ) Tj 55.714286 0 0 55.714286 0 336.227154 Tm 5.815385 0 Td 45.868946 Tz (signal ) Tj 1.95641 0 Td 44.871795 Tz (can ) Tj 1.130769 0 Td 62.820513 Tz (be ) Tj 1.041026 0 Td 49.57265 Tz (readout ) Tj 2.405128 0 Td 46.367521 Tz (simultaneously ) Tj 4.34359 0 Td 41.880342 Tz (from ) Tj 1.615385 0 Td 43.874644 Tz (the ) Tj 1.112821 0 Td 54.843305 Tz (two ) Tj 1.328205 0 Td 43.076923 Tz (light ) Tj 2.566667 0 Td 53.846154 Tz (waveguide ) Tj 3.158974 0 Td 43.376068 Tz (core ) Tj 1.238462 0 Td 47.115385 Tz (such ) Tj 1.435897 0 Td 39.636752 Tz (that ) Tj 1.184615 0 Td 43.874644 Tz (the ) Tj 0.951282 0 Td 49.85755 Tz (second ) Tj 1.920513 0 Td 49.732906 Tz (material ) Tj 2.512821 0 Td 44.871795 Tz (layer ) Tj 1.507692 0 Td 46.866097 Tz (covers ) Tj 1.902564 0 Td 32.905983 Tz (a ) Tj 51.428571 0 0 51.428571 0 297.594539 Tm 6.319444 0 Td 47.890947 Tz (detectors ) Tj 2.644444 0 Td 32.407407 Tz (. ) Tj 0.525 0 Td 43.75 Tz (This ) Tj 1.302778 0 Td 50.771605 Tz (can ) Tj 1.322222 0 Td 51.311728 Tz (reduce ) Tj 2.1 0 Td 49.691358 Tz (the ) Tj 1.030556 0 Td 52.5 Tz (noise ) Tj 1.827778 0 Td 45.37037 Tz (from ) Tj 1.613889 0 Td 49.691358 Tz (the ) Tj 1.069444 0 Td 52.314815 Tz (sensing ) Tj 2.488889 0 Td 46.990741 Tz (chan ) Tj 1.341667 0 Td 32.407407 Tz (- ) Tj 1.672222 0 Td 45.37037 Tz (top ) Tj 1.380556 0 Td 47.222222 Tz (surface ) Tj 2.430556 0 Td 60.493827 Tz (and ) Tj 1.516667 0 Td 61.574074 Tz (two ) Tj 1.497222 0 Td 55.902778 Tz (opposing ) Tj 3.111111 0 Td 48.611111 Tz (sidewall ) Tj 2.858333 0 Td 49.421296 Tz (surfaces ) Tj 2.780556 0 Td 53.472222 Tz (of ) Tj 1.030556 0 Td 49.691358 Tz (the ) Tj 58.571429 0 0 58.571429 0 251.570209 Tm 5.497561 0 Td 44.579946 Tz (nel ) Tj 0.956098 0 Td 50.271003 Tz (and ) Tj 1.092683 0 Td 39.837398 Tz (the ) Tj 0.921951 0 Td 38.699187 Tz (light ) Tj 1.280488 0 Td 42.208672 Tz (source ) Tj 1.621951 0 Td 34.146341 Tz (, ) Tj 0.221951 0 Td 50.271003 Tz (but ) Tj 1.058537 0 Td 38.888889 Tz (the ) Tj 0.836585 0 Td 46.097561 Tz (noise ) Tj 1.621951 0 Td 36.99187 Tz (from ) Tj 1.246341 0 Td 44.579946 Tz (the ) Tj 0.990244 0 Td 40.406504 Tz (light ) Tj 1.178049 0 Td 43.947606 Tz (detectors ) Tj 2.697561 0 Td 42.682927 Tz (65 ) Tj 0.904878 0 Td 51.219512 Tz (waveguide ) Tj 3.12439 0 Td 39.126016 Tz (core ) Tj 1.02439 0 Td 34.146341 Tz (. ) Tj 51.70068 0 0 51.70068 0 215.567235 Tm 6.305526 0 Td 33.526316 Tz (still ) Tj 1.450658 0 Td 45.131579 Tz (exist ) Tj 1.682763 0 Td 43.519737 Tz (as ) Tj 0.909079 0 Td 49.429825 Tz (the ) Tj 1.218553 0 Td 53.72807 Tz (performances ) Tj 4.216579 0 Td 62.861842 Tz (of ) Tj 0.986447 0 Td 49.429825 Tz (the ) Tj 1.237895 0 Td 55.877193 Tz (two ) Tj 1.392632 0 Td 45.776316 Tz (light ) Tj 1.605395 0 Td 49.429825 Tz (detectors ) Tj 4.874211 0 Td 32.236842 Tz (4 ) Tj 0.348158 0 Td 32.236842 Tz (. ) Tj 0.444868 0 Td 60.175439 Tz (The ) Tj 1.353947 0 Td 47.434211 Tz (optical ) Tj 2.050263 0 Td 58.384503 Tz (waveguide ) Tj 3.442895 0 Td 45.489766 Tz (structure ) Tj 2.785263 0 Td 51.578947 Tz (according ) Tj 2.998026 0 Td 41.907895 Tz (to ) Tj 0.831711 0 Td 41.907895 Tz (claim ) Tj 1.895526 0 Td 32.236842 Tz (1 ) Tj 0.290132 0 Td 32.236842 Tz (, ) Tj 55.714286 0 0 55.714286 0 168.94418 Tm 5.851282 0 Td 48.860399 Tz (cannot ) Tj 2.028205 0 Td 65.811966 Tz (be ) Tj 1.148718 0 Td 43.874644 Tz (the ) Tj 1.25641 0 Td 57.58547 Tz (same ) Tj 1.310256 0 Td 32.905983 Tz (. ) Tj 0.574359 0 Td 39.88604 Tz (FIG ) Tj 1.041026 0 Td 32.905983 Tz (. ) Tj 0.574359 0 Td 55.34188 Tz (9A ) Tj 1.166667 0 Td 56.239316 Tz (shows ) Tj 2.064103 0 Td 42.628205 Tz (that ) Tj 1.435897 0 Td 50.854701 Tz (compared ) Tj 2.961538 0 Td 32.905983 Tz (to ) Tj 1.884615 0 Td 49.57265 Tz (wherein ) Tj 2.387179 0 Td 48.860399 Tz (the ) Tj 1.094872 0 Td 49.85755 Tz (second ) Tj 1.992308 0 Td 49.732906 Tz (material ) Tj 2.584615 0 Td 43.076923 Tz (layer ) Tj 1.687179 0 Td 49.525166 Tz (comprises ) Tj 2.835897 0 Td 55.840456 Tz (two ) Tj 1.364103 0 Td 45.99359 Tz (sidewall ) Tj ET Q endstream endobj 128 0 obj << /Length 1 >> stream q endstream endobj 129 0 obj << /Length 43273 >> stream Q q 0.24 0 0 0.24 0 0 cm BT /F1 1 Tf 3 Tr 75.714286 0 0 75.714286 0 2964 Tm 9.839623 0 Td 61.63522 Tz (13 ) Tj 52.857143 0 0 52.857143 0 2307 Tm 26.637838 0 Td 56.756757 Tz (and ) Tj 45.714286 0 0 45.714286 0 2127 Tm 27.278125 0 Td 45.572917 Tz (20 ) Tj 70 0 0 70 0 3024 Tm 15.285714 0 Td 76.190476 Tz (US ) Tj 1.285714 0 Td 41.666667 Tz (10 ) Tj 0.571429 0 Td 33.333333 Tz (, ) Tj 0.228571 0 Td 50.793651 Tz (215 ) Tj 1.028571 0 Td 33.333333 Tz (, ) Tj 0.142857 0 Td 61.111111 Tz (692 ) Tj 1.4 0 Td 63.095238 Tz (B2 ) Tj 57.142857 0 0 57.142857 0 2969 Tm 30.24 0 Td 53.958333 Tz (14 ) Tj 58.730159 0 0 58.730159 0 2915.899931 Tm 5.482703 0 Td 43.631757 Tz (portions ) Tj 2.485946 0 Td 44.774775 Tz (extending ) Tj 2.826486 0 Td 48.648649 Tz (towards ) Tj 2.298649 0 Td 43.513514 Tz (the ) Tj 1.08973 0 Td 41.306306 Tz (substrate ) Tj 2.571081 0 Td 49.189189 Tz (and ) Tj 1.26 0 Td 38.783784 Tz (are ) Tj 1.055676 0 Td 47.297297 Tz (spaced ) Tj 4.307838 0 Td 45.760135 Tz (arranged ) Tj 2.417838 0 Td 31.216216 Tz (to ) Tj 0.766216 0 Td 41.351351 Tz (receive ) Tj 1.958108 0 Td 43.513514 Tz (the ) Tj 0.970541 0 Td 43.135135 Tz (light ) Tj 1.396216 0 Td 41.148649 Tz (from ) Tj 1.396216 0 Td 44.459459 Tz (the ) Tj 0.970541 0 Td 39.72973 Tz (light ) Tj 1.362162 0 Td 45.878378 Tz (source ) Tj 1.89 0 Td 44.459459 Tz (and ) Tj 58.571429 0 0 58.571429 0 2873.738896 Tm 5.514634 0 Td 44.390244 Tz (apart ) Tj 1.587805 0 Td 37.940379 Tz (for ) Tj 0.973171 0 Td 44.715447 Tz (forming ) Tj 2.134146 0 Td 55.01355 Tz (two ) Tj 1.263415 0 Td 48.018293 Tz (opposing ) Tj 2.543902 0 Td 43.631436 Tz (sidewalls ) Tj 2.526829 0 Td 55.487805 Tz (of ) Tj 0.768293 0 Td 43.631436 Tz (the ) Tj 1.02439 0 Td 32.249322 Tz (air ) Tj 0.939024 0 Td 37.703252 Tz (slot ) Tj 0.887805 0 Td 34.146341 Tz (. ) Tj 55.714286 0 0 55.714286 0 2872.313475 Tm 24.64359 0 Td 45.245726 Tz (transmit ) Tj 2.512821 0 Td 43.874644 Tz (the ) Tj 1.041026 0 Td 43.076923 Tz (light ) Tj 1.507692 0 Td 45.619658 Tz (received ) Tj 2.566667 0 Td 46.581197 Tz (through ) Tj 2.369231 0 Td 43.874644 Tz (the ) Tj 1.094872 0 Td 43.589744 Tz (optical ) Tj 2.028205 0 Td 68.055556 Tz (wave ) Tj 56.734694 0 0 56.734694 0 2831.929592 Tm 6.415827 0 Td 35.251799 Tz (5 ) Tj 0.29964 0 Td 35.251799 Tz (. ) Tj 0.546403 0 Td 50.919265 Tz (The ) Tj 1.198561 0 Td 44.484412 Tz (optical ) Tj 2.044604 0 Td 55.162537 Tz (waveguide ) Tj 3.278417 0 Td 41.779909 Tz (structure ) Tj 2.591007 0 Td 47.655209 Tz (according ) Tj 2.996403 0 Td 37.014388 Tz (claim ) Tj 1.797842 0 Td 35.251799 Tz (1 ) Tj 0.211511 0 Td 35.251799 Tz (, ) Tj 2.890647 0 Td 46.414868 Tz (guide ) Tj 1.67446 0 Td 41.779909 Tz (structure ) Tj 2.291367 0 Td 29.376499 Tz (; ) Tj 0.334892 0 Td 49.940048 Tz (and ) Tj 61.623377 0 0 61.623377 0 2786.439486 Tm 5.176607 0 Td 45.591851 Tz (wherein ) Tj 2.190727 0 Td 38.765952 Tz (the ) Tj 0.876291 0 Td 50.18538 Tz (waveguide ) Tj 2.888514 0 Td 40.56902 Tz (core ) Tj 1.217071 0 Td 20.28451 Tz (is ) Tj 0.519283 0 Td 44.625922 Tz (shaped ) Tj 1.817492 0 Td 32.455216 Tz (in ) Tj 0.649104 0 Td 39.667486 Tz (the ) Tj 0.892518 0 Td 36.512118 Tz (form ) Tj 1.265753 0 Td 54.092027 Tz (of ) Tj 0.74647 0 Td 32.455216 Tz (a ) Tj 0.421918 0 Td 31.373375 Tz (strip ) Tj 1.038567 0 Td 32.455216 Tz (. ) Tj 2.012223 0 Td 32.455216 Tz (a ) Tj 0.438145 0 Td 39.487179 Tz (light ) Tj 1.363119 0 Td 39.89287 Tz (detector ) Tj 2.206955 0 Td 41.921321 Tz (arranged ) Tj 2.30432 0 Td 31.102915 Tz (to ) Tj 0.697787 0 Td 41.728135 Tz (receive ) Tj 1.931085 0 Td 38.765952 Tz (the ) Tj 1.006112 0 Td 36.241658 Tz (light ) Tj 1.249526 0 Td 40.56902 Tz (transmitted ) Tj 58.285714 0 0 58.285714 0 2745.964852 Tm 6.296569 0 Td 31.454248 Tz (6 ) Tj 0.27451 0 Td 31.454248 Tz (. ) Tj 0.446078 0 Td 47.657952 Tz (The ) Tj 1.115196 0 Td 43.300654 Tz (optical ) Tj 1.887255 0 Td 52.106028 Tz (waveguide ) Tj 3.036765 0 Td 40.985839 Tz (structure ) Tj 2.436275 0 Td 46.069354 Tz (according ) Tj 2.710784 0 Td 31.454248 Tz (to ) Tj 0.703431 0 Td 38.316993 Tz (claim ) Tj 1.715686 0 Td 31.454248 Tz (1 ) Tj 0.188725 0 Td 31.454248 Tz (, ) Tj 0.737745 0 Td 31.454248 Tz (5 ) Tj 2.110294 0 Td 36.458333 Tz (from ) Tj 1.303922 0 Td 40.985839 Tz (the ) Tj 1.012255 0 Td 42.892157 Tz (optical ) Tj 1.852941 0 Td 50.835149 Tz (waveguide ) Tj 2.968137 0 Td 40.350399 Tz (structure ) Tj 2.419118 0 Td 45.751634 Tz (and ) Tj 1.115196 0 Td 44.321895 Tz (configured ) Tj 2.882353 0 Td 34.313725 Tz (to ) Tj 58.857143 0 0 58.857143 0 2705.57074 Tm 5.504854 0 Td 45.307443 Tz (wherein ) Tj 2.259709 0 Td 42.475728 Tz (the ) Tj 1.036408 0 Td 31.148867 Tz (first ) Tj 1.070388 0 Td 45.307443 Tz (material ) Tj 2.412621 0 Td 40.776699 Tz (layer ) Tj 1.461165 0 Td 32.564725 Tz (is ) Tj 0.679612 0 Td 33.980583 Tz (a ) Tj 0.509709 0 Td 36.407767 Tz (silicon ) Tj 1.885922 0 Td 41.343042 Tz (layer ) Tj 1.223301 0 Td 33.980583 Tz (. ) Tj 56.309524 0 0 56.309524 0 2697.882759 Tm 24.365328 0 Td 45.877378 Tz (detect ) Tj 1.775899 0 Td 32.55814 Tz (a ) Tj 0.479493 0 Td 49.330514 Tz (gas ) Tj 0.976744 0 Td 32.55814 Tz (in ) Tj 0.728118 0 Td 43.410853 Tz (the ) Tj 0.923467 0 Td 49.330514 Tz (gas ) Tj 1.012262 0 Td 46.511628 Tz (sensing ) Tj 2.077801 0 Td 44.820296 Tz (section ) Tj 1.989006 0 Td 52.093023 Tz (based ) Tj 1.669345 0 Td 53.276956 Tz (on ) Tj 0.887949 0 Td 44.397463 Tz (the ) Tj 0.905708 0 Td 41.437632 Tz (light ) Tj 52.077922 0 0 52.077922 0 2671.093185 Tm 7.02793 0 Td 32.003325 Tz (7 ) Tj 0.268828 0 Td 32.003325 Tz (. ) Tj 0.518454 0 Td 54.405653 Tz (The ) Tj 1.228928 0 Td 47.547797 Tz (optical ) Tj 2.169825 0 Td 57.605985 Tz (waveguide ) Tj 3.417955 0 Td 45.160248 Tz (structure ) Tj 2.649875 0 Td 52.983283 Tz (according ) Tj 3.091521 0 Td 32.003325 Tz (to ) Tj 0.806484 0 Td 42.244389 Tz (claim ) Tj 1.881796 0 Td 32.003325 Tz (1 ) Tj 0.268828 0 Td 32.003325 Tz (, ) Tj 61.428571 0 0 61.428571 0 2651.27668 Tm 22.4 0 Td 40.697674 Tz (received ) Tj 2.018605 0 Td 32.55814 Tz (, ) Tj 0.260465 0 Td 44.96124 Tz (wherein ) Tj 2.116279 0 Td 39.793282 Tz (the ) Tj 0.895349 0 Td 39.922481 Tz (optical ) Tj 1.75814 0 Td 50.043066 Tz (waveguide ) Tj 2.832558 0 Td 37.984496 Tz (structure ) Tj 2.295349 0 Td 65.116279 Tz (com ) Tj 58.857143 0 0 58.857143 0 2620.730137 Tm 5.402913 0 Td 47.734628 Tz (wherein ) Tj 2.429612 0 Td 44.363538 Tz (the ) Tj 1.002427 0 Td 47.667206 Tz (second ) Tj 1.936893 0 Td 45.307443 Tz (material ) Tj 2.395631 0 Td 44.7411 Tz (layer ) Tj 1.563107 0 Td 31.148867 Tz (is ) Tj 0.679612 0 Td 33.980583 Tz (a ) Tj 0.526699 0 Td 38.228155 Tz (dielectric ) Tj 2.616505 0 Td 36.104369 Tz (thin ) Tj 1.274272 0 Td 26.193366 Tz (film ) Tj 52.857143 0 0 52.857143 0 2614.06383 Tm 26.013514 0 Td 43.618619 Tz (prises ) Tj 1.627027 0 Td 34.684685 Tz (: ) Tj 52.142857 0 0 52.142857 0 2585.988506 Tm 6.194521 0 Td 48.584475 Tz (layer ) Tj 1.419178 0 Td 35.159817 Tz (. ) Tj 56.190476 0 0 56.190476 0 2563.072848 Tm 24.434746 0 Td 32.627119 Tz (a ) Tj 0.533898 0 Td 42.514124 Tz (substrate ) Tj 2.366949 0 Td 32.627119 Tz (; ) Tj 50.119048 0 0 50.119048 0 2545.786951 Tm 7.302613 0 Td 33.254157 Tz (8 ) Tj 0.279335 0 Td 33.254157 Tz (. ) Tj 0.518765 0 Td 60.965954 Tz (The ) Tj 1.316865 0 Td 47.980998 Tz (optical ) Tj 2.174822 0 Td 61.704935 Tz (waveguide ) Tj 3.511639 0 Td 47.294801 Tz (structure ) Tj 2.833254 0 Td 53.206651 Tz (according ) Tj 3.172447 0 Td 43.230404 Tz (to ) Tj 0.917815 0 Td 42.565321 Tz (claim ) Tj 1.895487 0 Td 33.254157 Tz (7 ) Tj 0.279335 0 Td 33.254157 Tz (, ) Tj 0.678385 0 Td 43.230404 Tz (10 ) Tj 58.730159 0 0 58.730159 0 2496.67129 Tm 5.414595 0 Td 47.837838 Tz (wherein ) Tj 2.52 0 Td 39.72973 Tz (the ) Tj 0.953514 0 Td 38.878378 Tz (dielectric ) Tj 2.724324 0 Td 36.182432 Tz (thin ) Tj 1.345135 0 Td 26.959459 Tz (film ) Tj 1.242973 0 Td 40.297297 Tz (layer ) Tj 1.617568 0 Td 43.277027 Tz (includes ) Tj 2.332703 0 Td 34.054054 Tz (a ) Tj 0.527838 0 Td 46.114865 Tz (material ) Tj 58.857143 0 0 58.857143 0 2522.357759 Tm 23.395631 0 Td 32.564725 Tz (an ) Tj 0.798544 0 Td 40.776699 Tz (insulating ) Tj 2.599515 0 Td 41.343042 Tz (layer ) Tj 1.529126 0 Td 43.891586 Tz (disposed ) Tj 2.36165 0 Td 42.475728 Tz (on ) Tj 0.798544 0 Td 44.363538 Tz (the ) Tj 1.053398 0 Td 39.014743 Tz (substrate ) Tj 2.208738 0 Td 33.980583 Tz (, ) Tj 0.339806 0 Td 44.363538 Tz (the ) Tj 1.002427 0 Td 50.970874 Tz (insu ) Tj 61.587302 0 0 61.587302 0 2478.506998 Tm 22.89433 0 Td 36.984536 Tz (lating ) Tj 1.607474 0 Td 38.427835 Tz (layer ) Tj 1.46134 0 Td 44.92268 Tz (comprising ) Tj 2.938918 0 Td 32.474227 Tz (an ) Tj 0.763144 0 Td 33.376289 Tz (air ) Tj 0.860567 0 Td 33.150773 Tz (slot ) Tj 1.006701 0 Td 47.358247 Tz (formed ) Tj 1.980928 0 Td 37.5 Tz (therein ) Tj 1.672423 0 Td 32.474227 Tz (; ) Tj 51.714286 0 0 51.714286 0 2459.214286 Tm 6.226519 0 Td 48.342541 Tz (selected ) Tj 2.649171 0 Td 41.09116 Tz (from ) Tj 1.508287 0 Td 32.228361 Tz (a ) Tj 0.541436 0 Td 50.276243 Tz (group ) Tj 1.779006 0 Td 49.631676 Tz (consisting ) Tj 3.132597 0 Td 53.176796 Tz (of ) Tj 0.792818 0 Td 54.788214 Tz (aluminum ) Tj 3.11326 0 Td 51.565378 Tz (oxide ) Tj 1.585635 0 Td 32.228361 Tz (, ) Tj 0.38674 0 Td 45.119705 Tz (silicon ) Tj 51.688312 0 0 51.688312 0 2437.536903 Tm 26.621106 0 Td 32.244556 Tz (a ) Tj 0.580402 0 Td 33.534338 Tz (first ) Tj 1.199497 0 Td 51.994347 Tz (material ) Tj 2.689196 0 Td 46.432161 Tz (layer ) Tj 1.625126 0 Td 53.740927 Tz (suspended ) Tj 3.269598 0 Td 51.59129 Tz (over ) Tj 1.412312 0 Td 49.441653 Tz (the ) Tj 1.180151 0 Td 39.768286 Tz (air ) Tj 0.967337 0 Td 41.917923 Tz (slot ) Tj 1.238191 0 Td 53.203518 Tz (of ) Tj 0.83191 0 Td 49.441653 Tz (the ) Tj 45.714286 0 0 45.714286 0 2418.9 Tm 7 0 Td 51.5625 Tz (nitride ) Tj 2.253125 0 Td 32.8125 Tz (, ) Tj 0.525 0 Td 61.168981 Tz (germanium ) Tj 3.675 0 Td 32.8125 Tz (, ) Tj 0.4375 0 Td 60.763889 Tz (and ) Tj 1.509375 0 Td 48.4375 Tz (silicon ) Tj 2.1875 0 Td 32.8125 Tz (. ) Tj 52.222222 0 0 52.222222 0 2397.773109 Tm 27.038298 0 Td 46.914894 Tz (insulating ) Tj 3.025532 0 Td 45.957447 Tz (layer ) Tj 1.378723 0 Td 31.914894 Tz (, ) Tj 0.344681 0 Td 44.680851 Tz (the ) Tj 1.034043 0 Td 36.382979 Tz (first ) Tj 1.187234 0 Td 52.260638 Tz (material ) Tj 2.604255 0 Td 45.957447 Tz (layer ) Tj 1.646809 0 Td 46.010638 Tz (constituting ) Tj 3.523404 0 Td 31.914894 Tz (a ) Tj 61.558442 0 0 61.558442 0 2374.833547 Tm 5.94557 0 Td 32.489451 Tz (9 ) Tj 0.211181 0 Td 32.489451 Tz (. ) Tj 0.357384 0 Td 32.489451 Tz (A ) Tj 0.373629 0 Td 51.892874 Tz (method ) Tj 2.014346 0 Td 54.149086 Tz (of ) Tj 0.682278 0 Td 39.627286 Tz (fabricating ) Tj 2.794093 0 Td 32.489451 Tz (an ) Tj 0.682278 0 Td 40.225035 Tz (optical ) Tj 1.75443 0 Td 48.132521 Tz (waveguide ) Tj 2.810338 0 Td 38.806845 Tz (structure ) Tj 2.079325 0 Td 32.489451 Tz (, ) Tj 52.857143 0 0 52.857143 0 2337.141141 Tm 6.148649 0 Td 44.144144 Tz (the ) Tj 0.945946 0 Td 62.537538 Tz (method ) Tj 2.591892 0 Td 51.081081 Tz (comprising ) Tj 3.140541 0 Td 31.531532 Tz (: ) Tj 51.785714 0 0 51.785714 0 2353.829337 Tm 27.188966 0 Td 59.36143 Tz (waveguide ) Tj 3.475862 0 Td 48.275862 Tz (core ) Tj 1.448276 0 Td 53.103448 Tz (of ) Tj 0.868966 0 Td 49.348659 Tz (the ) Tj 1.13931 0 Td 48.275862 Tz (optical ) Tj 2.162759 0 Td 57.931034 Tz (waveguide ) Tj 3.437241 0 Td 45.41507 Tz (structure ) Tj 2.510345 0 Td 32.183908 Tz (; ) Tj 34.285714 0 0 34.285714 0 2340 Tm 36.370833 0 Td 53.472222 Tz (15 ) Tj 61.746032 0 0 61.746032 0 2293.090561 Tm 5.84653 0 Td 43.787489 Tz (providing ) Tj 2.526478 0 Td 32.390746 Tz (a ) Tj 0.42108 0 Td 38.98886 Tz (structure ) Tj 2.218766 0 Td 44.537275 Tz (comprising ) Tj 2.866581 0 Td 32.390746 Tz (a ) Tj 0.42108 0 Td 38.089117 Tz (substrate ) Tj 2.153985 0 Td 32.390746 Tz (, ) Tj 0.259126 0 Td 43.187661 Tz (an ) Tj 0.728792 0 Td 39.948586 Tz (insulating ) Tj 46 0 0 46 0 2254.960843 Tm 8.73913 0 Td 50.724638 Tz (layer ) Tj 1.978261 0 Td 56.612319 Tz (disposed ) Tj 3.152174 0 Td 65.217391 Tz (on ) Tj 1.282609 0 Td 54.347826 Tz (the ) Tj 1.347826 0 Td 51.932367 Tz (substrate ) Tj 2.891304 0 Td 32.608696 Tz (, ) Tj 0.586957 0 Td 59.178744 Tz (and ) Tj 1.630435 0 Td 32.608696 Tz (a ) Tj 0.695652 0 Td 43.478261 Tz (first ) Tj 1.5 0 Td 59.782609 Tz (material ) Tj 51.428571 0 0 51.428571 0 2271.213068 Tm 26.775 0 Td 32.407407 Tz (a ) Tj 0.641667 0 Td 51.851852 Tz (second ) Tj 2.080556 0 Td 52.662037 Tz (material ) Tj 2.819444 0 Td 46.018519 Tz (layer ) Tj 1.691667 0 Td 50.636574 Tz (disposed ) Tj 2.858333 0 Td 51.851852 Tz (over ) Tj 1.536111 0 Td 49.691358 Tz (the ) Tj 1.147222 0 Td 58.333333 Tz (waveguide ) Tj 58.77551 0 0 58.77551 0 2211.011952 Tm 6.873611 0 Td 40.833333 Tz (layer ) Tj 1.378125 0 Td 44.307002 Tz (disposed ) Tj 2.467014 0 Td 43.952546 Tz (on ) Tj 0.884722 0 Td 43.479938 Tz (the ) Tj 0.969792 0 Td 40.833333 Tz (insulating ) Tj 2.722222 0 Td 40.833333 Tz (layer ) Tj 1.310069 0 Td 34.027778 Tz (; ) Tj 52.063492 0 0 52.063492 0 2228.380058 Tm 27.139939 0 Td 45.617378 Tz (core ) Tj 1.190854 0 Td 32.012195 Tz (, ) Tj 0.384146 0 Td 50.304878 Tz (wherein ) Tj 2.516159 0 Td 49.085366 Tz (the ) Tj 0.979573 0 Td 59.400407 Tz (waveguide ) Tj 3.399695 0 Td 51.219512 Tz (core ) Tj 1.498171 0 Td 32.012195 Tz (is ) Tj 0.672256 0 Td 52.997967 Tz (suspended ) Tj 3.15 0 Td 55.221037 Tz (over ) Tj 52.142857 0 0 52.142857 0 2170.485994 Tm 7 0 Td 49.315068 Tz (etching ) Tj 2.282192 0 Td 49.010654 Tz (the ) Tj 1.227397 0 Td 31.96347 Tz (first ) Tj 1.131507 0 Td 52.340183 Tz (material ) Tj 2.684932 0 Td 46.027397 Tz (layer ) Tj 1.668493 0 Td 31.96347 Tz (to ) Tj 0.824658 0 Td 39.155251 Tz (form ) Tj 1.591781 0 Td 31.96347 Tz (a ) Tj 0.421918 0 Td 59.309995 Tz (waveguide ) Tj 3.394521 0 Td 48.744292 Tz (core ) Tj 58.714286 0 0 58.714286 0 2181.784127 Tm 23.997567 0 Td 44.471479 Tz (the ) Tj 1.107056 0 Td 38.794269 Tz (air ) Tj 0.970803 0 Td 39.030819 Tz (slot ) Tj 1.226277 0 Td 55.352798 Tz (of ) Tj 0.817518 0 Td 44.471479 Tz (the ) Tj 1.141119 0 Td 40.875912 Tz (insulating ) Tj 2.793187 0 Td 40.308191 Tz (layer ) Tj 1.532847 0 Td 55.352798 Tz (by ) Tj 0.970803 0 Td 43.525277 Tz (the ) Tj 1.090024 0 Td 47.783185 Tz (second ) Tj 45.952381 0 0 45.952381 0 2128.476091 Tm 8.66114 0 Td 63.471503 Tz (of ) Tj 0.979275 0 Td 54.404145 Tz (the ) Tj 1.283938 0 Td 53.367876 Tz (optical ) Tj 2.415544 0 Td 65.284974 Tz (waveguide ) Tj 3.873575 0 Td 51.180196 Tz (structure ) Tj 2.807254 0 Td 32.642487 Tz (; ) Tj 56.190476 0 0 56.190476 0 2140.165877 Tm 25.039831 0 Td 47.086864 Tz (material ) Tj 2.491525 0 Td 43.305085 Tz (layer ) Tj 1.299153 0 Td 32.627119 Tz (. ) Tj 45.952381 0 0 45.952381 0 2105.859972 Tm 29.160622 0 Td 54.404145 Tz (18 ) Tj 0.739896 0 Td 32.642487 Tz (. ) Tj 0.478756 0 Td 66.493955 Tz (The ) Tj 1.392746 0 Td 54.404145 Tz (optical ) Tj 2.546114 0 Td 54.404145 Tz (gas ) Tj 1.262176 0 Td 58.031088 Tz (sensor ) Tj 2.328497 0 Td 59.643063 Tz (according ) Tj 3.460104 0 Td 41.709845 Tz (to ) Tj 0.979275 0 Td 44.248705 Tz (claim ) Tj 2.067358 0 Td 52.590674 Tz (17 ) Tj 0.739896 0 Td 32.642487 Tz (, ) Tj 0.478756 0 Td 50.259067 Tz (further ) Tj 58.75 0 0 58.75 0 2084.553425 Tm 6.212766 0 Td 44.129236 Tz (disposing ) Tj 2.740426 0 Td 34.042553 Tz (a ) Tj 0.544681 0 Td 47.754137 Tz (second ) Tj 2.008511 0 Td 46.099291 Tz (material ) Tj 2.502128 0 Td 41.41844 Tz (layer ) Tj 1.565957 0 Td 43.262411 Tz (over ) Tj 1.429787 0 Td 44.444444 Tz (the ) Tj 1.021277 0 Td 52.324665 Tz (waveguide ) Tj 58.571429 0 0 58.571429 0 2038 Tm 6.812195 0 Td 43.394309 Tz (core ) Tj 1.126829 0 Td 34.146341 Tz (; ) Tj 0.409756 0 Td 44.579946 Tz (and ) Tj 52.380952 0 0 52.380952 0 2064.883355 Tm 24.837273 0 Td 52.5 Tz (comprising ) Tj 3.512727 0 Td 31.818182 Tz (a ) Tj 0.534545 0 Td 50 Tz (tunable ) Tj 2.424545 0 Td 36.590909 Tz (filter ) Tj 1.603636 0 Td 50.590909 Tz (configured ) Tj 3.321818 0 Td 42.954545 Tz (to ) Tj 0.897273 0 Td 48.636364 Tz (receive ) Tj 2.348182 0 Td 48.787879 Tz (the ) Tj 1.183636 0 Td 44.545455 Tz (light ) Tj 58.730159 0 0 58.730159 0 2003.867841 Tm 6.112703 0 Td 50.016892 Tz (removing ) Tj 2.877568 0 Td 34.054054 Tz (a ) Tj 0.612973 0 Td 40.540541 Tz (portion ) Tj 2.128378 0 Td 55.337838 Tz (of ) Tj 0.919459 0 Td 42.567568 Tz (the ) Tj 1.106757 0 Td 40.864865 Tz (insulating ) Tj 2.843514 0 Td 41.432432 Tz (layer ) Tj 1.668649 0 Td 45.972973 Tz (under ) Tj 1.770811 0 Td 43.513514 Tz (the ) Tj 58.888889 0 0 58.888889 0 2017.690341 Tm 22.109434 0 Td 41.745283 Tz (from ) Tj 1.528302 0 Td 44.339623 Tz (the ) Tj 1.086792 0 Td 40.188679 Tz (light ) Tj 1.630189 0 Td 42.45283 Tz (source ) Tj 1.901887 0 Td 49.056604 Tz (and ) Tj 1.256604 0 Td 40.137221 Tz (selectively ) Tj 3.107547 0 Td 41.745283 Tz (transmit ) Tj 2.445283 0 Td 39.622642 Tz (the ) Tj 1.120755 0 Td 39.056604 Tz (light ) Tj 52.321429 0 0 52.321429 0 1983.979394 Tm 24.827304 0 Td 52.028821 Tz (having ) Tj 2.102389 0 Td 31.85438 Tz (a ) Tj 0.43959 0 Td 52.192176 Tz (predetermined ) Tj 4.185666 0 Td 54.789534 Tz (wavelength ) Tj 3.574061 0 Td 31.85438 Tz (to ) Tj 0.688055 0 Td 48.843383 Tz (the ) Tj 0.974744 0 Td 47.326507 Tz (optical ) Tj 2.083276 0 Td 57.337884 Tz (waveguide ) Tj 45.974026 0 0 45.974026 0 1962.534712 Tm 8.613559 0 Td 65.657041 Tz (waveguide ) Tj 3.784746 0 Td 55.28484 Tz (core ) Tj 1.566102 0 Td 32.627119 Tz (to ) Tj 0.826554 0 Td 47.12806 Tz (form ) Tj 1.718362 0 Td 52.565913 Tz (an ) Tj 0.891808 0 Td 43.502825 Tz (air ) Tj 1.065819 0 Td 48.940678 Tz (slot ) Tj 1.348588 0 Td 47.645951 Tz (therein ) Tj 2.392655 0 Td 60.42059 Tz (and ) Tj 1.370339 0 Td 34.439736 Tz (to ) Tj 0.717797 0 Td 53.34275 Tz (release ) Tj 58.831169 0 0 58.831169 0 1917.893817 Tm 6.833113 0 Td 38.717194 Tz (the ) Tj 0.917881 0 Td 53.196795 Tz (waveguide ) Tj 3.144592 0 Td 45.327447 Tz (core ) Tj 1.410817 0 Td 39.661516 Tz (such ) Tj 1.342826 0 Td 43.202723 Tz (that ) Tj 1.257837 0 Td 44.383125 Tz (the ) Tj 1.036865 0 Td 50.36383 Tz (waveguide ) Tj 3.042605 0 Td 44.619205 Tz (core ) Tj 1.427815 0 Td 31.16262 Tz (is ) Tj 0.730905 0 Td 42.494481 Tz (25 ) Tj 0.900883 0 Td 43.910964 Tz (Si ) Tj 45.714286 0 0 45.714286 0 1934 Tm 28.4375 0 Td 51.446759 Tz (structure ) Tj 2.821875 0 Td 32.8125 Tz (. ) Tj 58.701299 0 0 58.701299 0 1876.872253 Tm 6.780088 0 Td 48.582432 Tz (suspended ) Tj 2.759735 0 Td 49.686578 Tz (over ) Tj 1.328761 0 Td 38.802852 Tz (the ) Tj 0.988053 0 Td 32.177974 Tz (air ) Tj 0.766593 0 Td 37.619838 Tz (slot ) Tj 0.971018 0 Td 55.365044 Tz (of ) Tj 0.698451 0 Td 44.481318 Tz (the ) Tj 0.988053 0 Td 41.452802 Tz (insulating ) Tj 2.572345 0 Td 40.884956 Tz (layer ) Tj 1.430973 0 Td 44.008112 Tz (by ) Tj 0.817699 0 Td 38.802852 Tz (the ) Tj 52.02381 0 0 52.02381 0 1895.953058 Tm 25.795881 0 Td 43.249428 Tz (19 ) Tj 0.576659 0 Td 32.036613 Tz (. ) Tj 0.538215 0 Td 49.122807 Tz (The ) Tj 1.153318 0 Td 45.308924 Tz (optical ) Tj 2.133638 0 Td 50.190694 Tz (gas ) Tj 1.134096 0 Td 49.656751 Tz (sensor ) Tj 1.979863 0 Td 51.970506 Tz (according ) Tj 3.017849 0 Td 33.638444 Tz (to ) Tj 0.749657 0 Td 41.647597 Tz (claim ) Tj 1.864531 0 Td 43.249428 Tz (17 ) Tj 0.576659 0 Td 32.036613 Tz (, ) Tj 0.384439 0 Td 51.258581 Tz (wherein ) Tj 61.714286 0 0 61.714286 0 1830.744475 Tm 6.546296 0 Td 42.759774 Tz (second ) Tj 1.668981 0 Td 46.585648 Tz (material ) Tj 2.365741 0 Td 38.348765 Tz (layer ) Tj 1.18287 0 Td 32.407407 Tz (, ) Tj 0.372685 0 Td 43.595679 Tz (wherein ) Tj 2.138889 0 Td 32.407407 Tz (a ) Tj 0.486111 0 Td 42.438272 Tz (surface ) Tj 1.895833 0 Td 54.012346 Tz (of ) Tj 0.761574 0 Td 38.708848 Tz (the ) Tj 0.891204 0 Td 60.763889 Tz (wave ) Tj 51.571429 0 0 51.571429 0 1854.817549 Tm 25.207756 0 Td 44.167436 Tz (the ) Tj 1.202216 0 Td 46.168052 Tz (optical ) Tj 2.307479 0 Td 49.553709 Tz (gas ) Tj 1.279778 0 Td 52.246845 Tz (sensor ) Tj 2.268698 0 Td 44.78301 Tz (further ) Tj 2.268698 0 Td 54.221812 Tz (comprises ) Tj 3.238227 0 Td 32.317636 Tz (a ) Tj 0.65928 0 Td 50.630963 Tz (cap ) Tj 1.260388 0 Td 56.87904 Tz (wafer ) Tj 2.132964 0 Td 44.167436 Tz (for ) Tj 55.714286 0 0 55.714286 0 1795.125567 Tm 7.215385 0 Td 48.461538 Tz (guide ) Tj 1.741026 0 Td 45.619658 Tz (core ) Tj 1.364103 0 Td 32.905983 Tz (is ) Tj 0.735897 0 Td 49.145299 Tz (exposed ) Tj 2.423077 0 Td 31.410256 Tz (to ) Tj 0.771795 0 Td 43.874644 Tz (the ) Tj 1.005128 0 Td 38.888889 Tz (air ) Tj 0.987179 0 Td 43.376068 Tz (slot ) Tj 1.25641 0 Td 43.376068 Tz (of ) Tj 0.735897 0 Td 43.874644 Tz (the ) Tj 1.130769 0 Td 43.974359 Tz (insulating ) Tj 45.833333 0 0 45.833333 0 1814.158752 Tm 28.407273 0 Td 56.161616 Tz (enclosing ) Tj 3.381818 0 Td 32.727273 Tz (a ) Tj 0.610909 0 Td 50 Tz (side ) Tj 1.461818 0 Td 65.454545 Tz (of ) Tj 1.003636 0 Td 54.545455 Tz (the ) Tj 1.287273 0 Td 52.987013 Tz (optical ) Tj 2.509091 0 Td 54.545455 Tz (gas ) Tj 1.243636 0 Td 59.393939 Tz (sensor ) Tj 2.378182 0 Td 52.727273 Tz (on ) Tj 1.047273 0 Td 60.363636 Tz (which ) Tj 2.290909 0 Td 55.757576 Tz (the ) Tj 1.265455 0 Td 60.606061 Tz (gas ) Tj 55 0 0 55 0 1754.909091 Tm 7.272727 0 Td 46.060606 Tz (layer ) Tj 1.345455 0 Td 36.363636 Tz (. ) Tj 46.233766 0 0 46.233766 0 1771.105118 Tm 28.096348 0 Td 57.677903 Tz (sensing ) Tj 2.703652 0 Td 50.983146 Tz (section ) Tj 2.573876 0 Td 43.258427 Tz (is ) Tj 0.886798 0 Td 57.227294 Tz (disposed ) Tj 3.092978 0 Td 41.455993 Tz (to ) Tj 0.973315 0 Td 45.962079 Tz (form ) Tj 1.795225 0 Td 32.44382 Tz (a ) Tj 0.692135 0 Td 64.88764 Tz (chamber ) Tj 2.941573 0 Td 49.953184 Tz (therein ) Tj 2.314326 0 Td 32.44382 Tz (, ) Tj 0.475843 0 Td 55.274657 Tz (the ) Tj 51.818182 0 0 51.818182 0 1721.895058 Tm 7.101754 0 Td 41.812865 Tz (10 ) Tj 0.617544 0 Td 32.163743 Tz (. ) Tj 0.521053 0 Td 53.606238 Tz (The ) Tj 1.119298 0 Td 61.111111 Tz (method ) Tj 2.450877 0 Td 51.819363 Tz (according ) Tj 3.068421 0 Td 32.163743 Tz (to ) Tj 0.791228 0 Td 40.526316 Tz (claim ) Tj 1.852632 0 Td 32.163743 Tz (9 ) Tj 0.270175 0 Td 32.163743 Tz (. ) Tj 0.463158 0 Td 45.948204 Tz (further ) Tj 2.142105 0 Td 53.070175 Tz (comprising ) Tj 3.74386 0 Td 32.163743 Tz (30 ) Tj 0.984211 0 Td 48.245614 Tz (cap ) Tj 1.215789 0 Td 52.748538 Tz (wafer ) Tj 1.87193 0 Td 53.391813 Tz (comprising ) Tj 3.512281 0 Td 56.822612 Tz (one ) Tj 1.292982 0 Td 51.461988 Tz (or ) Tj 0.791228 0 Td 61.915205 Tz (more ) Tj 1.852632 0 Td 48.602989 Tz (apertures ) Tj 2.85614 0 Td 32.163743 Tz (in ) Tj 0.887719 0 Td 37.309942 Tz (fluid ) Tj 1.505263 0 Td 80.409357 Tz (com ) Tj 58.701299 0 0 58.701299 0 1666.615282 Tm 5.604646 0 Td 47.050147 Tz (forming ) Tj 2.282743 0 Td 42.588496 Tz (at ) Tj 0.732522 0 Td 38.045723 Tz (least ) Tj 1.396903 0 Td 55.83825 Tz (one ) Tj 1.260619 0 Td 44.616519 Tz (through ) Tj 1.993142 0 Td 34.070796 Tz (- ) Tj 0.170354 0 Td 44.71792 Tz (hole ) Tj 1.48208 0 Td 21.294248 Tz (in ) Tj 0.766593 0 Td 39.749263 Tz (the ) Tj 0.988053 0 Td 48.266962 Tz (second ) Tj 2.010177 0 Td 46.137537 Tz (material ) Tj 50.285714 0 0 50.285714 0 1685.439803 Tm 25.752841 0 Td 55.018939 Tz (munication ) Tj 3.639205 0 Td 51.373106 Tz (with ) Tj 1.551136 0 Td 49.715909 Tz (the ) Tj 1.252841 0 Td 58.712121 Tz (chamber ) Tj 2.525568 0 Td 33.143939 Tz (. ) Tj 52.077922 0 0 52.077922 0 1628.627939 Tm 6.279052 0 Td 46.724855 Tz (layer ) Tj 1.651372 0 Td 33.603491 Tz (to ) Tj 0.76808 0 Td 62.406484 Tz (be ) Tj 0.9601 0 Td 33.603491 Tz (in ) Tj 0.940898 0 Td 35.203658 Tz (fluid ) Tj 1.459352 0 Td 55.63655 Tz (communication ) Tj 4.685287 0 Td 47.204904 Tz (with ) Tj 1.555362 0 Td 49.071765 Tz (the ) Tj 1.132918 0 Td 46.176226 Tz (portion ) Tj 2.246633 0 Td 64.00665 Tz (of ) Tj 0.979302 0 Td 44.804655 Tz (the ) Tj 52.142857 0 0 52.142857 0 1645.761696 Tm 25.717808 0 Td 43.150685 Tz (20 ) Tj 0.652055 0 Td 31.96347 Tz (. ) Tj 0.536986 0 Td 31.96347 Tz (A ) Tj 0.536986 0 Td 63.394216 Tz (method ) Tj 2.665753 0 Td 52.739726 Tz (of ) Tj 0.939726 0 Td 45.911166 Tz (fabricating ) Tj 3.375342 0 Td 43.150685 Tz (an ) Tj 0.99726 0 Td 47.945205 Tz (optical ) Tj 2.282192 0 Td 50.076104 Tz (gas ) Tj 1.265753 0 Td 49.010654 Tz (sensor ) Tj 1.821918 0 Td 31.96347 Tz (, ) Tj 0.479452 0 Td 49.010654 Tz (the ) Tj 58.571429 0 0 58.571429 0 1584.123515 Tm 5.582927 0 Td 41.260163 Tz (insulating ) Tj 2.697561 0 Td 42.682927 Tz (layer ) Tj 1.468293 0 Td 34.146341 Tz (to ) Tj 0.64878 0 Td 55.487805 Tz (be ) Tj 0.921951 0 Td 51.219512 Tz (removed ) Tj 2.219512 0 Td 34.146341 Tz (. ) Tj 51.904762 0 0 51.904762 0 1602.62543 Tm 24.872477 0 Td 61.009174 Tz (method ) Tj 2.562385 0 Td 53.623853 Tz (comprising ) Tj 3.217431 0 Td 32.110092 Tz (: ) Tj 61.558442 0 0 61.558442 0 1541.587482 Tm 6.010549 0 Td 32.489451 Tz (11 ) Tj 0.406118 0 Td 32.489451 Tz (. ) Tj 0.471097 0 Td 44.221753 Tz (The ) Tj 0.958439 0 Td 52.795359 Tz (method ) Tj 2.111814 0 Td 43.920925 Tz (according ) Tj 2.64789 0 Td 20.305907 Tz (to ) Tj 0.682278 0 Td 33.030942 Tz (claim ) Tj 1.510759 0 Td 32.489451 Tz (9 ) Tj 0.211181 0 Td 32.489451 Tz (, ) Tj 0.341139 0 Td 44.092827 Tz (wherein ) Tj 2.225527 0 Td 42.416784 Tz (disposing ) Tj 61.558442 0 0 61.558442 0 1557.705056 Tm 21.637975 0 Td 44.522582 Tz (disposing ) Tj 2.64789 0 Td 32.489451 Tz (a ) Tj 0.487342 0 Td 37.362869 Tz (light ) Tj 1.397046 0 Td 40.611814 Tz (source ) Tj 1.835654 0 Td 31.135724 Tz (on ) Tj 0.747257 0 Td 32.489451 Tz (a ) Tj 0.568565 0 Td 38.205188 Tz (substrate ) Tj 2.079325 0 Td 32.489451 Tz (, ) Tj 0.357384 0 Td 44.221753 Tz (the ) Tj 0.974684 0 Td 40.611814 Tz (light ) Tj 1.397046 0 Td 42.868026 Tz (source ) Tj 53 0 0 53 0 1503.801956 Tm 6.169811 0 Td 31.446541 Tz (a ) Tj 0.528302 0 Td 52.93501 Tz (second ) Tj 2.056604 0 Td 49.921384 Tz (material ) Tj 2.641509 0 Td 45.283019 Tz (layer ) Tj 1.584906 0 Td 51.100629 Tz (over ) Tj 1.471698 0 Td 48.218029 Tz (the ) Tj 1.037736 0 Td 57.302586 Tz (waveguide ) Tj 3.358491 0 Td 47.169811 Tz (core ) Tj 1.433962 0 Td 51.013277 Tz (comprises ) Tj 3.264151 0 Td 42.45283 Tz (35 ) Tj 53.428571 0 0 53.428571 0 1521.378981 Tm 25.772727 0 Td 48.039216 Tz (configured ) Tj 3.181818 0 Td 31.194296 Tz (to ) Tj 0.786096 0 Td 50.690731 Tz (emit ) Tj 1.534759 0 Td 40.552585 Tz (light ) Tj 1.179144 0 Td 31.194296 Tz (; ) Tj 61.571429 0 0 61.571429 0 1456.87931 Tm 5.294664 0 Td 42.708602 Tz (disposing ) Tj 2.549884 0 Td 38.798659 Tz (the ) Tj 0.990719 0 Td 45.11472 Tz (second ) Tj 1.75406 0 Td 43.986852 Tz (material ) Tj 2.354988 0 Td 38.437742 Tz (layer ) Tj 1.396752 0 Td 31.129157 Tz (to ) Tj 0.779582 0 Td 43.851508 Tz (cover ) Tj 1.510441 0 Td 32.482599 Tz (a ) Tj 0.50348 0 Td 38.798659 Tz (top ) Tj 0.941995 0 Td 42.150039 Tz (surface ) Tj 58.701299 0 0 58.701299 0 1476.106686 Tm 22.725221 0 Td 49.483776 Tz (forming ) Tj 2.401991 0 Td 34.070796 Tz (a ) Tj 0.545133 0 Td 43.534907 Tz (gas ) Tj 1.039159 0 Td 44.210914 Tz (sensing ) Tj 2.163496 0 Td 40.560472 Tz (section ) Tj 2.095354 0 Td 44.008112 Tz (on ) Tj 0.85177 0 Td 44.481318 Tz (the ) Tj 1.039159 0 Td 41.326614 Tz (substrate ) Tj 2.248673 0 Td 34.070796 Tz (, ) Tj 0.44292 0 Td 43.534907 Tz (the ) Tj 1.07323 0 Td 44.481318 Tz (gas ) Tj 51.571429 0 0 51.571429 0 1419.786616 Tm 6.301939 0 Td 50.630963 Tz (and ) Tj 1.202216 0 Td 60.326254 Tz (two ) Tj 1.376731 0 Td 54.536011 Tz (opposing ) Tj 2.869806 0 Td 49.688366 Tz (sidewall ) Tj 2.6759 0 Td 48.880425 Tz (surfaces ) Tj 2.540166 0 Td 53.3241 Tz (of ) Tj 0.833795 0 Td 49.553709 Tz (the ) Tj 1.066482 0 Td 58.171745 Tz (waveguide ) Tj 3.432133 0 Td 47.668513 Tz (core ) Tj 1.221607 0 Td 32.317636 Tz (. ) Tj 46.122449 0 0 46.122449 0 1439.891566 Tm 29.790265 0 Td 56.784661 Tz (sensing ) Tj 2.645133 0 Td 51.622419 Tz (section ) Tj 2.471681 0 Td 60.346608 Tz (comprising ) Tj 3.815929 0 Td 52.396755 Tz (an ) Tj 0.975664 0 Td 53.171091 Tz (optical ) Tj 2.363274 0 Td 64.64274 Tz (waveguide ) Tj 3.772566 0 Td 55.648968 Tz (struc ) Tj 56.103896 0 0 56.103896 0 1376.082749 Tm 6.559259 0 Td 41.589506 Tz (12 ) Tj 0.57037 0 Td 32.677469 Tz (. ) Tj 0.445602 0 Td 49.511317 Tz (The ) Tj 1.015972 0 Td 56.442901 Tz (method ) Tj 2.31713 0 Td 47.530864 Tz (according ) Tj 2.816204 0 Td 32.677469 Tz (to ) Tj 0.730787 0 Td 37.430556 Tz (claim ) Tj 1.711111 0 Td 32.677469 Tz (9 ) Tj 0.267361 0 Td 32.677469 Tz (, ) Tj 0.427778 0 Td 41.589506 Tz (further ) Tj 2.01412 0 Td 47.827932 Tz (comprising ) Tj 52.222222 0 0 52.222222 0 1397.909589 Tm 26.310638 0 Td 43.085106 Tz (ture ) Tj 1.110638 0 Td 31.914894 Tz (, ) Tj 0.402128 0 Td 44.680851 Tz (the ) Tj 1.07234 0 Td 45.136778 Tz (optical ) Tj 2.068085 0 Td 57.446809 Tz (waveguide ) Tj 3.408511 0 Td 43.971631 Tz (structure ) Tj 2.546809 0 Td 54.893617 Tz (being ) Tj 1.914894 0 Td 50.265957 Tz (arranged ) Tj 2.623404 0 Td 43.085106 Tz (to ) Tj 51.746032 0 0 51.746032 0 1338.360223 Tm 6.319325 0 Td 50.153374 Tz (etching ) Tj 2.454294 0 Td 45.092025 Tz (the ) Tj 1.19816 0 Td 45.736196 Tz (insulating ) Tj 3.18865 0 Td 46.380368 Tz (layer ) Tj 1.739264 0 Td 33.819018 Tz (to ) Tj 0.888957 0 Td 45.092025 Tz (form ) Tj 1.661963 0 Td 61.196319 Tz (two ) Tj 1.488037 0 Td 49.923313 Tz (trenches ) Tj 2.705521 0 Td 44.171779 Tz (therein ) Tj 52.285714 0 0 52.285714 0 1350.312057 Tm 26.278689 0 Td 48.724954 Tz (receive ) Tj 2.295082 0 Td 43.564056 Tz (the ) Tj 1.032787 0 Td 47.814208 Tz (light ) Tj 1.587432 0 Td 44.626594 Tz (from ) Tj 1.510929 0 Td 48.876746 Tz (the ) Tj 1.10929 0 Td 44.626594 Tz (light ) Tj 1.568306 0 Td 48.876746 Tz (source ) Tj 1.95082 0 Td 54.189435 Tz (and ) Tj 1.300546 0 Td 48.212659 Tz (transmit ) Tj 2.543716 0 Td 48.876746 Tz (the ) Tj 51.688312 0 0 51.688312 0 1295.815077 Tm 6.229648 0 Td 58.040201 Tz (which ) Tj 1.95402 0 Td 49.441653 Tz (are ) Tj 1.044724 0 Td 51.59129 Tz (spaced ) Tj 2.147487 0 Td 50.946399 Tz (apart ) Tj 1.451005 0 Td 32.244556 Tz (, ) Tj 0.309548 0 Td 53.433836 Tz (wherein ) Tj 2.553769 0 Td 51.233017 Tz (disposing ) Tj 2.979397 0 Td 32.244556 Tz (a ) Tj 0.464322 0 Td 54.815745 Tz (second ) Tj 2.050754 0 Td 52.397404 Tz (material ) Tj 2.882663 0 Td 43.530151 Tz (40 ) Tj 52.142857 0 0 52.142857 0 1313.512032 Tm 26.389041 0 Td 44.748858 Tz (light ) Tj 1.49589 0 Td 47.945205 Tz (received ) Tj 2.646575 0 Td 49.771689 Tz (through ) Tj 2.416438 0 Td 43.683409 Tz (the ) Tj 1.054795 0 Td 47.945205 Tz (optical ) Tj 2.071233 0 Td 59.309995 Tz (waveguide ) Tj 3.432877 0 Td 44.748858 Tz (structure ) Tj 2.473973 0 Td 31.96347 Tz (; ) Tj 61.785714 0 0 61.785714 0 1251.645939 Tm 5.308671 0 Td 37.764933 Tz (layer ) Tj 1.310983 0 Td 44.508671 Tz (over ) Tj 1.310983 0 Td 44.059088 Tz (the ) Tj 0.954913 0 Td 47.95547 Tz (waveguide ) Tj 2.848555 0 Td 40.462428 Tz (core ) Tj 1.294798 0 Td 36.99422 Tz (further ) Tj 1.861272 0 Td 43.759366 Tz (comprises ) Tj 2.621965 0 Td 42.260758 Tz (disposing ) Tj 46.363636 0 0 46.363636 0 1211.395946 Tm 7.031373 0 Td 50.326797 Tz (the ) Tj 1.207843 0 Td 61.111111 Tz (second ) Tj 2.372549 0 Td 59.313725 Tz (material ) Tj 2.976471 0 Td 51.045752 Tz (layer ) Tj 1.876471 0 Td 45.833333 Tz (into ) Tj 1.531373 0 Td 49.12854 Tz (the ) Tj 1.121569 0 Td 65.904139 Tz (two ) Tj 1.466667 0 Td 55.718954 Tz (trenches ) Tj 2.976471 0 Td 34.150327 Tz (to ) Tj 0.927451 0 Td 44.934641 Tz (form ) Tj 1.703922 0 Td 63.507625 Tz (two ) Tj 50.142857 0 0 50.142857 0 1227.899557 Tm 26.623932 0 Td 52.812071 Tz (disposing ) Tj 3.330484 0 Td 33.238367 Tz (a ) Tj 0.777778 0 Td 45.204179 Tz (light ) Tj 1.754986 0 Td 49.85755 Tz (detector ) Tj 2.792023 0 Td 53.181387 Tz (on ) Tj 1.25641 0 Td 49.85755 Tz (the ) Tj 1.296296 0 Td 48.380289 Tz (substrate ) Tj 2.672365 0 Td 33.238367 Tz (, ) Tj 0.638177 0 Td 49.85755 Tz (the ) Tj 1.316239 0 Td 48.528015 Tz (light ) Tj 52.222222 0 0 52.222222 0 1169.356696 Tm 6.165957 0 Td 51.06383 Tz (sidewall ) Tj 2.623404 0 Td 49.069149 Tz (portions ) Tj 2.489362 0 Td 56.808511 Tz (which ) Tj 2.029787 0 Td 48.93617 Tz (are ) Tj 1.091489 0 Td 51.595745 Tz (spaced ) Tj 2.144681 0 Td 45.957447 Tz (apart ) Tj 1.551064 0 Td 54.255319 Tz (and ) Tj 1.340426 0 Td 43.723404 Tz (constitute ) Tj 2.891489 0 Td 59.574468 Tz (two ) Tj 45.892857 0 0 45.892857 0 1188.849003 Tm 29.89572 0 Td 54.928664 Tz (detector ) Tj 2.919844 0 Td 56.744488 Tz (arranged ) Tj 3.094163 0 Td 32.684825 Tz (to ) Tj 0.893385 0 Td 54.993515 Tz (receive ) Tj 2.592996 0 Td 55.685257 Tz (the ) Tj 1.263813 0 Td 50.843061 Tz (light ) Tj 1.743191 0 Td 53.484259 Tz (transmitted ) Tj 3.965759 0 Td 49.027237 Tz (from ) Tj 52.077922 0 0 52.077922 0 1127.900741 Tm 6.25985 0 Td 54.005611 Tz (opposing ) Tj 2.995511 0 Td 48.716173 Tz (sidewalls ) Tj 3.014713 0 Td 52.805486 Tz (of ) Tj 0.940898 0 Td 49.071765 Tz (the ) Tj 1.305736 0 Td 38.40399 Tz (air ) Tj 1.094514 0 Td 45.604738 Tz (slot ) Tj 1.401746 0 Td 33.603491 Tz (to ) Tj 0.825686 0 Td 62.406484 Tz (be ) Tj 1.190524 0 Td 52.272098 Tz (formed ) Tj 2.419451 0 Td 32.003325 Tz (in ) Tj 0.883292 0 Td 42.404406 Tz (said ) Tj 55.918367 0 0 55.918367 0 1145.026746 Tm 24.55365 0 Td 49.675588 Tz (the ) Tj 1.287591 0 Td 43.430657 Tz (optical ) Tj 2.128102 0 Td 54.643147 Tz (waveguide ) Tj 3.379927 0 Td 43.383347 Tz (structure ) Tj 2.789781 0 Td 49.675588 Tz (and ) Tj 1.394891 0 Td 45.60219 Tz (configured ) Tj 3.236861 0 Td 32.785888 Tz (to ) Tj 51.607143 0 0 51.607143 0 1091.123656 Tm 6.258824 0 Td 58.535179 Tz (removing ) Tj 3.100346 0 Td 32.295271 Tz (a ) Tj 0.503806 0 Td 46.136101 Tz (portion ) Tj 2.364014 0 Td 53.287197 Tz (of ) Tj 0.833218 0 Td 49.519416 Tz (the ) Tj 1.182007 0 Td 46.182238 Tz (insulating ) Tj 3.080969 0 Td 45.859285 Tz (layer ) Tj 1.375779 0 Td 32.295271 Tz (. ) Tj 45.952381 0 0 45.952381 0 1105.797395 Tm 29.835233 0 Td 55.008636 Tz (detect ) Tj 2.176166 0 Td 32.642487 Tz (a ) Tj 0.587565 0 Td 54.404145 Tz (gas ) Tj 1.218653 0 Td 34.455959 Tz (in ) Tj 0.826943 0 Td 49.568221 Tz (the ) Tj 1.153368 0 Td 59.240069 Tz (gas ) Tj 1.240415 0 Td 58.031088 Tz (sensing ) Tj 2.589637 0 Td 51.295337 Tz (section ) Tj 2.502591 0 Td 58.031088 Tz (based ) Tj 1.980311 0 Td 63.471503 Tz (on ) Tj 1.066321 0 Td 49.568221 Tz (the ) Tj 1.17513 0 Td 50.777202 Tz (light ) Tj 58.690476 0 0 58.690476 0 1041.79073 Tm 6.321298 0 Td 31.237323 Tz (13 ) Tj 0.460041 0 Td 34.077079 Tz (. ) Tj 0.477079 0 Td 49.222448 Tz (The ) Tj 0.971197 0 Td 53.482082 Tz (method ) Tj 2.146856 0 Td 47.013748 Tz (according ) Tj 2.675051 0 Td 44.016227 Tz (to ) Tj 0.81785 0 Td 35.780933 Tz (claim ) Tj 1.584584 0 Td 34.077079 Tz (9 ) Tj 0.272617 0 Td 34.077079 Tz (, ) Tj 0.357809 0 Td 45.841785 Tz (wherein ) Tj 2.249087 0 Td 38.810007 Tz (the ) Tj 0.851927 0 Td 65.314402 Tz (wave ) Tj 64.285714 0 0 64.285714 0 1057.234917 Tm 21.388889 0 Td 39.537037 Tz (received ) Tj 1.96 0 Td 33.703704 Tz (, ) Tj 0.202222 0 Td 44.444444 Tz (wherein ) Tj 2.037778 0 Td 38.888889 Tz (the ) Tj 0.886667 0 Td 38.888889 Tz (optical ) Tj 1.633333 0 Td 48.106996 Tz (waveguide ) Tj 2.737778 0 Td 37.44856 Tz (structure ) Tj 2.146667 0 Td 66.54321 Tz (com ) Tj 61.558442 0 0 61.558442 0 1001.738866 Tm 5.312025 0 Td 42.777778 Tz (guide ) Tj 1.559494 0 Td 39.934951 Tz (core ) Tj 1.299578 0 Td 20.305907 Tz (is ) Tj 0.519831 0 Td 43.770511 Tz (shaped ) Tj 1.884388 0 Td 32.489451 Tz (in ) Tj 0.731013 0 Td 38.806845 Tz (the ) Tj 0.958439 0 Td 37.90436 Tz (form ) Tj 1.267089 0 Td 54.149086 Tz (of ) Tj 0.779747 0 Td 32.489451 Tz (a ) Tj 0.454852 0 Td 30.864979 Tz (strip ) Tj 1.055907 0 Td 32.489451 Tz (. ) Tj 47.142857 0 0 47.142857 0 1025.336842 Tm 29.166667 0 Td 50.673401 Tz (prises ) Tj 1.866667 0 Td 31.818182 Tz (: ) Tj 55.833333 0 0 55.833333 0 960.5625 Tm 6.555224 0 Td 41.791045 Tz (14 ) Tj 0.573134 0 Td 32.835821 Tz (. ) Tj 0.537313 0 Td 49.751244 Tz (The ) Tj 1.074627 0 Td 57.21393 Tz (method ) Tj 2.41791 0 Td 47.761194 Tz (according ) Tj 2.901493 0 Td 32.835821 Tz (to ) Tj 0.80597 0 Td 36.41791 Tz (claim ) Tj 1.755224 0 Td 32.835821 Tz (9 ) Tj 0.286567 0 Td 32.835821 Tz (, ) Tj 0.41194 0 Td 49.89339 Tz (wherein ) Tj 2.471642 0 Td 43.781095 Tz (the ) Tj 1.128358 0 Td 34.626866 Tz (first ) Tj 53.333333 0 0 53.333333 0 975.071895 Tm 25.74375 0 Td 34.375 Tz (a ) Tj 0.525 0 Td 45.486111 Tz (substrate ) Tj 2.53125 0 Td 34.375 Tz (; ) Tj 52.44898 0 0 52.44898 0 920.724816 Tm 6.063035 0 Td 52.034695 Tz (material ) Tj 2.745525 0 Td 45.758755 Tz (layer ) Tj 1.658755 0 Td 31.776913 Tz (is ) Tj 0.74358 0 Td 31.776913 Tz (a ) Tj 0.552918 0 Td 41.763943 Tz (silicon ) Tj 2.135409 0 Td 45.758755 Tz (layer ) Tj 1.372763 0 Td 31.776913 Tz (. ) Tj 56 0 0 56 0 935.815186 Tm 24.517857 0 Td 41.666667 Tz (an ) Tj 0.857143 0 Td 42.261905 Tz (insulating ) Tj 2.875 0 Td 40.47619 Tz (layer ) Tj 1.482143 0 Td 47.619048 Tz (disposed ) Tj 2.571429 0 Td 44.642857 Tz (on ) Tj 0.803571 0 Td 43.650794 Tz (the ) Tj 1.017857 0 Td 42.65873 Tz (substrate ) Tj 2.375 0 Td 32.738095 Tz (, ) Tj 0.375 0 Td 43.650794 Tz (the ) Tj 1.035714 0 Td 55.059524 Tz (insu ) Tj 58.571429 0 0 58.571429 0 875.701613 Tm 6.317073 0 Td 31.300813 Tz (15 ) Tj 0.478049 0 Td 34.146341 Tz (. ) Tj 0.460976 0 Td 49.322493 Tz (The ) Tj 0.973171 0 Td 54.065041 Tz (method ) Tj 2.185366 0 Td 45.212285 Tz (according ) Tj 2.697561 0 Td 31.300813 Tz (to ) Tj 0.7 0 Td 35.853659 Tz (claim ) Tj 1.519512 0 Td 34.146341 Tz (9 ) Tj 0.273171 0 Td 34.146341 Tz (, ) Tj 0.358537 0 Td 45.934959 Tz (wherein ) Tj 2.185366 0 Td 44.579946 Tz (the ) Tj 0.939024 0 Td 47.899729 Tz (second ) Tj 2.168293 0 Td 44.105691 Tz (50 ) Tj 45.873016 0 0 45.873016 0 898.535937 Tm 30.802422 0 Td 50.259516 Tz (lating ) Tj 2.158131 0 Td 52.318339 Tz (layer ) Tj 1.831142 0 Td 59.948097 Tz (comprising ) Tj 4.011073 0 Td 41.782007 Tz (an ) Tj 1.046367 0 Td 42.387543 Tz (air ) Tj 1.111765 0 Td 49.048443 Tz (slot ) Tj 1.460554 0 Td 61.764706 Tz (formed ) Tj 2.594118 0 Td 50.346021 Tz (therein ) Tj 2.245329 0 Td 32.698962 Tz (; ) Tj 50 0 0 50 0 836.455224 Tm 6.42 0 Td 54.166667 Tz (material ) Tj 2.76 0 Td 50 Tz (layer ) Tj 1.78 0 Td 33.333333 Tz (is ) Tj 0.76 0 Td 33.333333 Tz (a ) Tj 0.58 0 Td 44 Tz (dielectric ) Tj 3.08 0 Td 40 Tz (thin ) Tj 1.4 0 Td 34.166667 Tz (film ) Tj 1.46 0 Td 46.666667 Tz (layer ) Tj 1.4 0 Td 33.333333 Tz (. ) Tj 61.688312 0 0 61.688312 0 850.894964 Tm 22.289474 0 Td 32.421053 Tz (a ) Tj 0.518737 0 Td 28.638596 Tz (first ) Tj 1.005053 0 Td 41.877193 Tz (material ) Tj 2.172211 0 Td 41.066667 Tz (layer ) Tj 1.475158 0 Td 45.02924 Tz (suspended ) Tj 2.690947 0 Td 43.22807 Tz (over ) Tj 1.215789 0 Td 44.128655 Tz (the ) Tj 0.940211 0 Td 33.321637 Tz (air ) Tj 0.859158 0 Td 33.77193 Tz (slot ) Tj 1.037474 0 Td 41.877193 Tz (of ) Tj 0.648421 0 Td 44.128655 Tz (the ) Tj 45.974026 0 0 45.974026 0 798.393312 Tm 8.00452 0 Td 41.690207 Tz (16 ) Tj 0.717797 0 Td 32.627119 Tz (. ) Tj 0.739548 0 Td 64.045825 Tz (The ) Tj 1.435593 0 Td 70.69209 Tz (method ) Tj 3.045198 0 Td 59.614982 Tz (according ) Tj 3.762994 0 Td 34.439736 Tz (to ) Tj 1.087571 0 Td 47.853107 Tz (claim ) Tj 2.283898 0 Td 52.565913 Tz (15 ) Tj 0.804802 0 Td 32.627119 Tz (, ) Tj 0.565537 0 Td 59.039548 Tz (wherein ) Tj 3.197458 0 Td 49.544884 Tz (the ) Tj 58.888889 0 0 58.888889 0 811.911111 Tm 24.028302 0 Td 40.754717 Tz (insulating ) Tj 2.598113 0 Td 42.45283 Tz (layer ) Tj 1.256604 0 Td 33.962264 Tz (, ) Tj 0.30566 0 Td 42.45283 Tz (the ) Tj 0.984906 0 Td 30.566038 Tz (first ) Tj 0.984906 0 Td 45.636792 Tz (material ) Tj 2.343396 0 Td 41.320755 Tz (layer ) Tj 1.358491 0 Td 41.509434 Tz (constituting ) Tj 3.209434 0 Td 33.962264 Tz (a ) Tj 58.714286 0 0 58.714286 0 750.688859 Tm 5.552311 0 Td 38.605028 Tz (dielectric ) Tj 2.554745 0 Td 36.192214 Tz (thin ) Tj 1.209246 0 Td 25.547445 Tz (film ) Tj 1.158151 0 Td 42.011354 Tz (layer ) Tj 1.498783 0 Td 42.933901 Tz (includes ) Tj 2.265207 0 Td 34.06326 Tz (a ) Tj 0.306569 0 Td 45.41768 Tz (material ) Tj 2.435523 0 Td 40.450122 Tz (selected ) Tj 2.248175 0 Td 36.901865 Tz (from ) Tj 1.36253 0 Td 34.06326 Tz (a ) Tj 51.785714 0 0 51.785714 0 773.846479 Tm 27.169655 0 Td 60.076628 Tz (waveguide ) Tj 3.514483 0 Td 47.471264 Tz (core ) Tj 1.428966 0 Td 53.103448 Tz (of ) Tj 0.888276 0 Td 49.348659 Tz (the ) Tj 1.12 0 Td 48.275862 Tz (optical ) Tj 2.182069 0 Td 57.931034 Tz (waveguide ) Tj 3.437241 0 Td 45.41507 Tz (structure ) Tj 2.491034 0 Td 32.183908 Tz (; ) Tj 37.142857 0 0 37.142857 0 734 Tm 37.961538 0 Td 76.282051 Tz (and ) Tj 52 0 0 52 0 714.004981 Tm 6.307692 0 Td 50.641026 Tz (group ) Tj 1.884615 0 Td 47.115385 Tz (consisting ) Tj 2.980769 0 Td 62.5 Tz (of ) Tj 0.884615 0 Td 54.487179 Tz (aluminum ) Tj 3.096154 0 Td 53.846154 Tz (oxide ) Tj 1.557692 0 Td 32.051282 Tz (, ) Tj 0.403846 0 Td 43.956044 Tz (silicon ) Tj 2.115385 0 Td 45.32967 Tz (nitride ) Tj 1.846154 0 Td 32.051282 Tz (, ) Tj 0.442308 0 Td 66.025641 Tz (germa ) Tj 55.714286 0 0 55.714286 0 665 Tm 5.851282 0 Td 45.619658 Tz (nium ) Tj 1.346154 0 Td 32.905983 Tz (, ) Tj 0.394872 0 Td 49.85755 Tz (and ) Tj 1.184615 0 Td 41.452991 Tz (silicon ) Tj 1.776923 0 Td 32.905983 Tz (. ) Tj 62.857143 0 0 62.857143 0 686.626573 Tm 21.843182 0 Td 34.469697 Tz (a ) Tj 0.556818 0 Td 43.75 Tz (second ) Tj 1.718182 0 Td 44.744318 Tz (material ) Tj 2.290909 0 Td 38.181818 Tz (layer ) Tj 1.447727 0 Td 40.435606 Tz (disposed ) Tj 2.306818 0 Td 44.412879 Tz (over ) Tj 1.304545 0 Td 38.888889 Tz (the ) Tj 0.875 0 Td 48.021886 Tz (waveguide ) Tj 58.571429 0 0 58.571429 0 629.255952 Tm 6.282927 0 Td 42.682927 Tz (17 ) Tj 0.495122 0 Td 34.146341 Tz (. ) Tj 0.443902 0 Td 55.487805 Tz (An ) Tj 0.939024 0 Td 42.682927 Tz (optical ) Tj 1.963415 0 Td 44.579946 Tz (gas ) Tj 1.058537 0 Td 45.528455 Tz (sensor ) Tj 1.895122 0 Td 46.382114 Tz (comprising ) Tj 2.8 0 Td 34.146341 Tz (: ) Tj 52.063492 0 0 52.063492 0 648.301291 Tm 27.082317 0 Td 51.219512 Tz (core ) Tj 1.28689 0 Td 32.012195 Tz (, ) Tj 0.307317 0 Td 53.04878 Tz (wherein ) Tj 2.535366 0 Td 49.085366 Tz (the ) Tj 1.056402 0 Td 57.621951 Tz (waveguide ) Tj 3.322866 0 Td 50.419207 Tz (core ) Tj 1.498171 0 Td 32.012195 Tz (is ) Tj 0.672256 0 Td 52.642276 Tz (suspended ) Tj 3.15 0 Td 54.420732 Tz (over ) Tj 50.178571 0 0 50.178571 0 590.82449 Tm 7.234164 0 Td 33.214709 Tz (a ) Tj 0.577936 0 Td 48.493476 Tz (light ) Tj 1.634164 0 Td 52.036378 Tz (source ) Tj 2.172242 0 Td 50.486358 Tz (configured ) Tj 3.447687 0 Td 33.214709 Tz (to ) Tj 0.876868 0 Td 52.313167 Tz (emit ) Tj 1.594306 0 Td 45.172005 Tz (light ) Tj 1.275445 0 Td 33.214709 Tz (; ) Tj 56.142857 0 0 56.142857 0 603.345336 Tm 25.096692 0 Td 43.539723 Tz (the ) Tj 1.175573 0 Td 37.602488 Tz (air ) Tj 1.050891 0 Td 41.560645 Tz (slot ) Tj 1.282443 0 Td 44.529262 Tz (of ) Tj 0.908397 0 Td 39.581566 Tz (the ) Tj 1.086514 0 Td 43.638677 Tz (insulating ) Tj 2.92112 0 Td 42.748092 Tz (layer ) Tj 1.603053 0 Td 54.919423 Tz (by ) Tj 1.033079 0 Td 44.529262 Tz (the ) Tj 1.139949 0 Td 50.466497 Tz (second ) Tj 55.714286 0 0 55.714286 0 546.479282 Tm 6.551282 0 Td 32.905983 Tz (a ) Tj 0.646154 0 Td 43.874644 Tz (gas ) Tj 1.076923 0 Td 46.581197 Tz (sensing ) Tj 2.351282 0 Td 41.880342 Tz (section ) Tj 2.135897 0 Td 48.760684 Tz (comprising ) Tj 3.284615 0 Td 43.376068 Tz (an ) Tj 0.897436 0 Td 44.017094 Tz (optical ) Tj 2.046154 0 Td 55.508072 Tz (waveguide ) Tj 56.190476 0 0 56.190476 0 560.150943 Tm 25.039831 0 Td 47.457627 Tz (material ) Tj 2.473729 0 Td 43.305085 Tz (layer ) Tj 1.299153 0 Td 32.627119 Tz (. ) Tj 51.836735 0 0 51.836735 0 505.144158 Tm 7.697244 0 Td 45.37037 Tz (structure ) Tj 2.527165 0 Td 32.152231 Tz (, ) Tj 0.848819 0 Td 45.013123 Tz (the ) Tj 1.466142 0 Td 48.228346 Tz (optical ) Tj 2.507874 0 Td 57.874016 Tz (waveguide ) Tj 3.858268 0 Td 45.37037 Tz (structure ) Tj 2.990157 0 Td 55.301837 Tz (being ) Tj 54.285714 0 0 54.285714 0 1267 Tm 25.273684 0 Td 57.309942 Tz (and ) Tj 28.571429 0 0 28.571429 0 1093 Tm 43.47 0 Td 84.583333 Tz (45 ) Tj 51.428571 0 0 51.428571 0 669 Tm 24.091667 0 Td 58.333333 Tz (55 ) Tj ET Q endstream endobj xref 4 1 0001645100 00000 n 9 1 0001645368 00000 n 14 1 0001645638 00000 n 19 1 0001645909 00000 n 24 1 0001646182 00000 n 29 1 0001646455 00000 n 34 1 0001646728 00000 n 39 1 0001647001 00000 n 44 1 0001647274 00000 n 49 1 0001647547 00000 n 54 1 0001647821 00000 n 59 1 0001648095 00000 n 64 1 0001648369 00000 n 69 1 0001648643 00000 n 74 1 0001648917 00000 n 79 1 0001649191 00000 n 84 1 0001649465 00000 n 89 1 0001649739 00000 n 94 36 0001650013 00000 n 0001650065 00000 n 0001682850 00000 n 0001682902 00000 n 0001693708 00000 n 0001693760 00000 n 0001726455 00000 n 0001726508 00000 n 0001728143 00000 n 0001728196 00000 n 0001733537 00000 n 0001733590 00000 n 0001768355 00000 n 0001768408 00000 n 0001785566 00000 n 0001785619 00000 n 0001786821 00000 n 0001786874 00000 n 0001792868 00000 n 0001792921 00000 n 0001803024 00000 n 0001803077 00000 n 0001812795 00000 n 0001812848 00000 n 0001857996 00000 n 0001858049 00000 n 0001904704 00000 n 0001904757 00000 n 0001964424 00000 n 0001964477 00000 n 0002022540 00000 n 0002022593 00000 n 0002080429 00000 n 0002080482 00000 n 0002136769 00000 n 0002136822 00000 n trailer << /Size 130 /Prev 1643061 /Root 1 0 R /Info 2 0 R /ID [ (gEk#{2i> startxref 2180151 %%EOF