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无微管缺陷六英寸SiC 单晶的制备

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Affiliation of Author(s):新一代半导体材料研究院

Journal:硅酸盐学报

First Author:张福生

Indexed by:Unit Twenty Basic Research

Document Code:8245878551654D7C9C9736E456888510

Issue:4

Number of Words:6455

Translation or Not:no

Date of Publication:2021-04-04

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