Yifei Philip Zhang
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A unipolar nano-diode detector with improved performance using the high-k material SiNx
  • Affiliation of Author(s):
    微电子学院
  • Journal:
    Semiconductor Science and Technology
  • Key Words:
    self-switching diode;SiNx;high-k;nano-rectifier;Coatings;Diodes;Electric field effects;Electric rectifiers;Plasma enhanced chemical vapor deposition;Semiconductor switches;Silicon
  • First Author:
    张翼飞
  • Document Code:
    28AE00F0E7084656AC7130A02B9E9384
  • Volume:
    33
  • Issue:
    11
  • Page Number:
    114016
  • Number of Words:
    2000
  • Translation or Not:
    no
  • Date of Publication:
    2018-11-01

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