Date of Publication:2018-11-01 Hits:
Affiliation of Author(s):微电子学院
Journal:Semiconductor Science and Technology
Key Words:self-switching diode;SiNx;high-k;nano-rectifier;Coatings;Diodes;Electric field effects;Electric rectifiers;Plasma enhanced chemical vapor deposition;Semiconductor switches;Silicon
First Author:张翼飞
Document Code:28AE00F0E7084656AC7130A02B9E9384
Volume:33
Issue:11
Page Number:114016
Number of Words:2000
Translation or Not:no
Date of Publication:2018-11-01
Date of Publication:2018-11-01