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碳电阻膜激光精密刻蚀技术研究

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Affiliation of Participant(s):机械工程学院

Leading Scientist:蔡玉奎

Nature of Project:横向

Project Number:E200EDA9062B08D6E053BE07C2CA2237

Date of Project Approval:2022-01-01

Scheduled completion time:2023-06-30

Date of Project Completion:2023-06-30

Date of Project Initiation:2022-01-01

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