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Project Name:碳电阻膜激光精密刻蚀技术研究

Institution:机械工程学院

Leading Scientist:蔡玉奎

Nature of Project:横向

Project Number:E200EDA9062B08D6E053BE07C2CA2237

Date of Project Approval:2022-01-01

Scheduled Completion Time:2023-06-30

Date of Project Completion:2023-06-30

Date of Project Initiation:2022-01-01

Release Time:2024-04-16