Surface integrity analysis of Si3N4 under cryogenic assisted femtosecond laser ablation
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Institution:机械工程学院
Title of Paper:Surface integrity analysis of Si3N4 under cryogenic assisted femtosecond laser ablation
Journal:Ceramics International
First Author:于锡潼
Document Code:1787758662056697858
Number of Words:5
Translation or Not:No
Date of Publication:2024-07
Release Time:2024-11-24
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