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Experimental and Simulation Research on Femtosecond Laser Induced Controllable Morphology of Monocrystalline SiC

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Institution:机械工程学院

Title of Paper:Experimental and Simulation Research on Femtosecond Laser Induced Controllable Morphology of Monocrystalline SiC

Journal:micromachine

First Author:Yang Hua

Document Code:1795025144785715202

Volume:15

Issue:5

Number of Words:10

Translation or Not:No

Date of Publication:2024-04

Release Time:2025-05-31

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