fqNnYUMAK3HPcmC1L8xnOYNDRYAfkfV9xaDYZEgFFDT2P6p08gDWdPFmr9d2
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山东工业大学

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Home > Scientific Research > Patents

基于梳状栅格的MOEMS无线振动传感器及其工作方法

Release Time:2019-01-26 Hits:

Title:基于梳状栅格的MOEMS无线振动传感器及其工作方法
Institution:控制科学与工程学院
Type of Patent:发明
Application Number:201710034536.9
Number of Inventors:5
Service Invention or Not:No
Application Date:2017-01-18
Publication Date:2023-08-18
Authorization Date:2023-08-18
Release Time:2019-01-26

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