山东大学教师主页陈腾一种半导体加工晶圆超声悬浮驱动装置 Home

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School/Department:控制科学与工程学院

Gender:Male

Current position: Home / Scientific Research / Patents

一种半导体加工晶圆超声悬浮驱动装置

Release Time:2023-09-07 | Hits:

Institution:控制科学与工程学院

Type of Patent:Invent

Application Number:202210652114.9

Number of Inventors:5

Service Invention or Not:No

Application Date:2022-06-10

Publication Date:2024-05-03

Authorization Date:2024-05-03