Hits:

Title of Paper:EXPERIMENTAL STUDY ON ULTRASONIC VIBRATION-ASSISTED WECDM OF GLASS MICROSTRUCTURES WITH A HIGH ASPECT RATIO

Journal:MICROMACHINES

First Author:陈岩

Document Code:876171E3DA5F4A1D97F8082084F19D86

Volume:12

Issue:2

Number of Words:5

Translation or Not:No

Date of Publication:2021-02

Release Time:2021-09-23