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Fabrication of a polycrystalline SiGe-and Ge-on-insulator by Ge condensation of amorphous SiGe on a SiO2/Si substrate

Release Time:2021-11-29| Hits:

Title of Paper:Fabrication of a polycrystalline SiGe-and Ge-on-insulator by Ge condensation of amorphous SiGe on a SiO2/Si substrate

Journal:Semiconductor Science and Technology

First Author:Guangyang Lin

Correspondence Author:Yuping Zeng

All the Authors:Dongxue Liang,Zhiwei Huang,Chunyu Yu,Peng Cui,Jie Zhang,Jianyuan Wang,Jianfang Xu,Songyan Chen,Cheng Li

Volume:35

Issue:9

Page Number:095016

DOI Number:10.1088/1361-6641/ab9d0a

Translation or Not:No

Date of Publication:2020-07

Included Journals:SCI

Release Time:2021-11-29

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