Title : Effect of depositing parameters on microstructures and properties of multi arc ion plating ZrTiN films

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Affiliation of Author(s):机械工程学院

Title of Paper:Effect of depositing parameters on microstructures and properties of multi arc ion plating ZrTiN films

Journal:SURFACE ENGINEERING

First Author:dengjianxin

Indexed by:Unit Twenty Basic Research

Document Code:lw-137543

Volume:28

Issue:1

Page Number:17

Translation or Not:no

Date of Publication:2012-08-30