Title : Effects of nitrogen flowrates on properties of TiSiN coatings deposited by arc ion plating combining with medium-frequency magnetron sputtering

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Affiliation of Author(s):机械工程学院

Title of Paper:Effects of nitrogen flowrates on properties of TiSiN coatings deposited by arc ion plating combining with medium-frequency magnetron sputtering

Journal:International Journal of Refractory Metals and Hard Materials

First Author:dengjianxin

Indexed by:Unit Twenty Basic Research

Document Code:lw-153979

Volume:42

Page Number:108

Translation or Not:no

Date of Publication:2014-01-30