Paper Publications
Title of Award : Effects of nitrogen flowrates on properties of TiSiN coatings deposited by arc ion plating combining with medium-frequency magnetron sputtering
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Institution:机械工程学院
Title of Paper:Effects of nitrogen flowrates on properties of TiSiN coatings deposited by arc ion plating combining with medium-frequency magnetron sputtering
Journal:International Journal of Refractory Metals and Hard Materials
First Author:邓建新
All the Authors:邓建新
Document Code:lw-153979
Volume:42
Page Number:108
Number of Words:5
Translation or Not:No
Date of Publication:2014-01
Release Time:2019-10-24