• Shuzhen Fan
  • Associate Professor
  • Center for Optics Research and Engineering
Current position: Home >> Scientific Research >> Paper Publications
Highly integrated multiplexed microscopy system for integrated circuit failure analysis

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Institution:光学高等研究中心

Title of Paper:Highly integrated multiplexed microscopy system for integrated circuit failure analysis

Journal:OPTICS LETTERS

First Author:李昊天

Document Code:DC407ACF089E4FC6BEFB00692BC19DC0

Volume:50

Issue:9

Number of Words:4

Translation or Not:No

Date of Publication:2025-04

Release Time:2025-06-18

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