Affiliation of Author(s): : 机械工程学院
Title of Paper: : 3英寸SiC衬底无架行星式双面抛光运动学分析
Journal: : 《功能材料》
First Author: : fengxianying
Indexed by: : Applied Research
Document Code: : lw-172096
Translation or Not: : no
Date of Publication: : 2015-09-13
Professor
Supervisor of Doctorate Candidates
Supervisor of Master's Candidates
Gender : Male
Education Level : Postgraduate (Doctoral)
Degree : Doctor
Status : Employed
School/Department : 机械工程学院
Date of Employment : 1987-07-01
Business Address : 山东大学千佛山校区创新大厦
Contact Information : 0531-88392873
Email : fxying@sdu.edu.cn
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