Affiliation of Author(s): : 机械工程学院
Title of Paper: : 大尺寸碳化硅单晶生长环境研究
Journal: : 《半导体光电》
Key Words: : 物理气相输运法;碳化硅;数值模拟;温度场;气相流场;
First Author: : 李鹏程
Document Code: : F8467809B3EF420AA80132FFF81F382D
Issue: : 2021,42(05)
Page Number: : 672
Number of Words: : 5
Translation or Not: : no
Date of Publication: : 2021-10-15
Professor
Supervisor of Doctorate Candidates
Supervisor of Master's Candidates
Gender : Male
Education Level : Postgraduate (Doctoral)
Degree : Doctor
Status : Employed
School/Department : 机械工程学院
Date of Employment : 1987-07-01
Business Address : 山东大学千佛山校区创新大厦
Contact Information : 0531-88392873
Email : fxying@sdu.edu.cn
The Last Update Time : ..
