Institution:机械工程学院
Title of Paper:大尺寸碳化硅单晶生长环境研究
Journal:《半导体光电》
Key Words:物理气相输运法;碳化硅;数值模拟;温度场;气相流场;
First Author:李鹏程
Document Code:F8467809B3EF420AA80132FFF81F382D
Issue:2021,42(05)
Page Number:672
Number of Words:5
Translation or Not:No
Date of Publication:2021-10
Release Time:2022-01-18
Professor
Supervisor of Doctorate Candidates
Supervisor of Master's Candidates
Gender : Male
Education Level : Postgraduate (Doctoral)
Degree : Doctor
Status : Employed
School/Department : 机械工程学院
Date of Employment : 1987-07-01
Faculty/School : School of Mechanical Engineering
Business Address : 山东大学千佛山校区创新大厦
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