Affiliation of Participant(s):新一代半导体材料集成攻关大平台
Leading Scientist:Zhitai Jia
Supported by:广东省重点研发计划-山东大学深圳研究院
Type of Project:研究与发展成果应用
Nature of Project:纵向
Project level:省、部委级
Project Participants:huqiangqiang,yinyanru,wangshanpeng,liuyang,wanglei,gaozeliang,Wenxiang Mu,zhangjian,zhangguodong
Project Number:A66F7FE10F25660DE053BE07C2CADDF9
Date of Project Approval:2019-11-01
Scheduled completion time:2022-12-31
Date of Project Completion:2022-12-31
Date of Project Initiation:2019-11-01
Project Approval Number:2020B010174002