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发表刊物：
IEEE SENSORS JOURNAL
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关键字：
Optical waveguides, semiconductor devices, optical interferometry, velocity measurement, optical
sensors, sensor systems and applications.
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是否译文：
否
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发表时间：
2022-07-01
摘要：
An integrated optical waveguide-type laser
velocimeter has been proposed and demonstrated at the
central wavelength of 1550 nm. The micro-fabricated and
photo-lithographically defined the integrated sensor head
has dimensions in the range of 0.25 mm × 3.50 mm. The
velocities in the range of 5.0×10-2 μm·s-1 to 2.2×106
μm·s-1
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and a resolution of 5.0×10-2 μm·s-1 have been achieved in
the experiment. Through three experimental
measurements and data calculation in the measured
velocity range, the average relative error is less than
0.52%. This small size semiconductor sensor velocimeter
uses semiconductor materials (silicon dioxide, SiO2) to
make key sensor elements. The refractive indexes of
waveguide core, upper cladding and lower cladding
material are 1.448, 1.442 and 1.444. The optical
interference fringes were used for velocity measurement,
and the collected scattered light signal was used for
velocity analysis. The apparent advantages of small size,
high precision with large dynamic range, low cost, and
high batch-fabrication uniformity make the velocimeter
suitable for non-invasive measurement of ultra-low speeds of gases, liquids or solids at the near-surface.
