Project Name: : SiC多层外延生长技术开发

Affiliation of Participant(s): : 新一代半导体材料研究院

Leading Scientist: : 韩吉胜

Nature of Project: : 横向

Project Number: : 0628167E55D80B98E063BE07C2CA1FAC

Date of Project Approval: : 2023-10-01

Scheduled completion time: : 2023-12-31

Date of Project Completion: : 2023-12-31

Date of Project Initiation: : 2023-10-01