Patents
Title of Award : 一种径向羽流多组分气体测量遥感系统
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Title:一种径向羽流多组分气体测量遥感系统
Institution:新一代半导体材料研究院
Type of Patent:Invent
Application Number:201911380938.X
Number of Inventors:4
Service Invention or Not:No
Application Date:2019-12-27
Publication Date:2021-09-17
Authorization Date:2021-09-17
Release Time:2021-10-22