何京良   

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Patents

Title : 一种蓝宝石模板上GaN单晶衬底高温激光剥离装置及剥离方法

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Title:一种蓝宝石模板上GaN单晶衬底高温激光剥离装置及剥离方法

Affilication of Author(s):新一代半导体材料研究院

Type of Patent:发明

Application Number:202110855731.4

Number of Inventors:10

Service Invention or Not:no

Application Date:2021-07-28

Publication Date:2024-03-22

Authorization Date:2024-03-22

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