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Project Name:集成电路制造效率提升关键技术研究一期项目

Institution:集成电路学院

Leading Scientist:洪利国

Nature of Project:横向

Project Number:2D902C5BDDB9D98EE0635C00A8C0EC1D

Date of Project Approval:2025-01-02

Scheduled Completion Time:2025-07-30

Date of Project Completion:2025-07-30

Date of Project Initiation:2025-01-02

Release Time:2025-02-13