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Growth mechanism of [100]-oriented TaON film through an endotaxial transformation from a (012)-LiTaO3 single crystal substrate

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Affiliation of Author(s):晶体材料研究院
Journal:CRYSTENGCOMM
First Author:秦学森
Document Code:D5E2591675674A948E2B408530DE69E1
Volume:25
Issue:19
Page Number:2897
Number of Words:3
Translation or Not:no
Date of Publication:2023-05-17
Date of Publication:2023-05-17

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Growth mechanism of [100]-oriented TaON film through an endotaxial transformation from a (012)-LiTaO<sub>3</sub> single crystal substrate