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    Removal mechanism and surface quality of crystal semiconductor materials in scratching tests with Berkovich indenter

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    • Institution:机械工程学院

    • Title of Paper:Removal mechanism and surface quality of crystal semiconductor materials in scratching tests with Berkovich indenter

    • Journal:Materials Science in Semiconductor Processing

    • First Author:章程

    • All the Authors:朱洪涛,姜兆亮,黄传真

    • Document Code:578217B901CD48C7AE0CCBFDEA0BB182

    • Volume:105

    • Page Number:104746

    • Number of Words:8

    • Translation or Not:No

    • Date of Publication:2019-09

    • Release Time:2020-01-11
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