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Removal mechanism and surface quality of crystal semiconductor materials in scratching tests with Berkovich indenter

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  • Affiliation of Author(s):机械工程学院

  • Journal:Materials Science in Semiconductor Processing

  • All the Authors:zhuhongtao,jiangzhaoliang,huangchuanzhen

  • First Author:章程

  • Document Code:578217B901CD48C7AE0CCBFDEA0BB182

  • Volume:105

  • Page Number:104746

  • Number of Words:8

  • Translation or Not:no

  • Date of Publication:2019-09-22

  • Date of Publication:2019-09-22
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