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Removal mechanism and surface quality of crystal semiconductor materials in scratching tests with Berkovich indenter

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  • Affiliation of Author(s):机械工程学院

  • Journal:Materials Science in Semiconductor Processing

  • First Author:章程

  • Indexed by:Applied Research

  • Document Code:40B8D041581C417A9E901BE623065151

  • Volume:105

  • Translation or Not:no

  • Date of Publication:2020-01-01

  • Date of Publication:2020-01-01
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