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    Removal mechanism and surface quality of crystal semiconductor materials in scratching tests with Berkovich indenter

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    • Institution:机械工程学院

    • Title of Paper:Removal mechanism and surface quality of crystal semiconductor materials in scratching tests with Berkovich indenter

    • Journal:Materials Science in Semiconductor Processing

    • First Author:章程

    • Document Code:40B8D041581C417A9E901BE623065151

    • Volume:105

    • Translation or Not:No

    • Date of Publication:2020-01

    • Release Time:2021-06-01
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