Title of Project : 低温等离子体辅助MOCVD技术制备AlInN薄膜材料的生长及掺杂特性研究

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Project Name:低温等离子体辅助MOCVD技术制备AlInN薄膜材料的生长及掺杂特性研究

Affiliation of Participant(s):物理学院

Leading Scientist:jifeng,jifeng

Supported by:国家基金委

Nature of Project:纵向

Project level:National

Project Participants:jifeng,jifeng,Fujian Zong,luancaina,zhangxijian

Project Number:kyxm-14368

Date of Project Approval:2011-01-01

Scheduled completion time:2013-12-31

Date of Project Completion:2013-12-31

Date of Project Initiation:2011-01-01

Project Approval Number:51072101