Polymerizable Nonionic Perfluorinated Photoacid Generators for High-Resolution Lithography
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Institution:国家胶体材料工程技术研究中心
Title of Paper:Polymerizable Nonionic Perfluorinated Photoacid Generators for High-Resolution Lithography
Journal:Small Methods
First Author:刘越
Document Code:533736FE7D2B402691291006680EE4E5
Issue:2400112
Number of Words:8
Translation or Not:No
Date of Publication:2024-09
Release Time:2024-12-19