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Polymerizable Nonionic Perfluorinated Photoacid Generators for High-Resolution Lithography

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Affiliation of Author(s):国家胶体材料工程技术研究中心

Journal:Small Methods

First Author:刘越

Document Code:533736FE7D2B402691291006680EE4E5

Issue:2400112

Number of Words:8

Translation or Not:no

Date of Publication:2024-09-23

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