一种基于双层传输线结构的硅基电光调制器行波电极及其制备方法
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Title:一种基于双层传输线结构的硅基电光调制器行波电极及其制备方法
Institution:信息科学与工程学院
Type of Patent:Invent
Application Number:202110638960.0
Number of Inventors:1
Service Invention or Not:No
Application Date:2021-06-08
Publication Date:2023-11-10
Authorization Date:2023-11-10
Release Time:2021-10-09