Shizhen Li
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Development of a novel monolithic compliant Lorentz-force-driven XY nanopositioning system
  • Affiliation of Author(s):
    海洋研究院
  • Journal:
    JOURNAL OF MICROMECHANICS AND MICROENGINEERING
  • First Author:
    杨旭
  • Document Code:
    DFD29FEB371B4FE0AEE5244E0D74CF9B
  • Volume:
    34
  • Issue:
    055001
  • Page Number:
    1
  • Number of Words:
    7
  • Translation or Not:
    no
  • Date of Publication:
    2024-05-01

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