Title : 一种SiC器件欧姆接触及其制备方法和应用
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Title:一种SiC器件欧姆接触及其制备方法和应用
Affilication of Author(s):新一代半导体材料研究院
Type of Patent:发明
Application Number:202310696789.8
Number of Inventors:8
Service Invention or Not:no
Application Date:2023-06-13
Publication Date:2025-02-11
Authorization Date:2025-02-11
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