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Project Name:光子晶圆及芯片缺陷检测关键技术研究

Institution:晶体材料研究院（晶体材料全国重点实验室）

Leading Scientist:刘宝安

Nature of Project:纵向

Project Number:295914AD4EAB2026E063BE07C2CA2046

Project Approval Number:202305a12020028

Date of Project Approval:2024-07-01

Scheduled Completion Time:2026-06-30

Date of Project Completion:2026-06-30

Date of Project Initiation:2024-07-01

Release Time:2024-12-19