Enhanced 2nd-order resonance actuation and frequency response modulation of microcantilever by dual coplanar counter electrodes
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Institution:晶体材料研究所
Title of Paper:Enhanced 2nd-order resonance actuation and frequency response modulation of microcantilever by dual coplanar counter electrodes
Journal:chinese physics letters
First Author:Duo Liu
Document Code:lw-151200
Translation or Not:No
Date of Publication:2013-10
Release Time:2019-04-14