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Photoresistless fabrication of periodic patterns on GaAs by laser interference photochemical lithography

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Institution:晶体材料研究所

Title of Paper:Photoresistless fabrication of periodic patterns on GaAs by laser interference photochemical lithography

Journal:RSC advances

First Author:Duo Liu

Document Code:lw-184993

Translation or Not:No

Date of Publication:2016-04

Release Time:2019-04-14

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