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Enhanced 2nd-order resonance actuation and frequency response modulation of microcantilever by dual coplanar counter electrodes

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Affiliation of Author(s):晶体材料研究院

Journal:chinese physics letters

All the Authors:Duo Liu

First Author:Duo Liu

Document Code:lw-151200

Number of Words:3

Translation or Not:no

Date of Publication:2013-10-01

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