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Photoresistless fabrication of periodic patterns on GaAs by laser interference photochemical lithography

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Institution:晶体材料研究院(晶体材料全国重点实验室)

Title of Paper:Photoresistless fabrication of periodic patterns on GaAs by laser interference photochemical lithography

Journal:RSC advances

First Author:Duo Liu

All the Authors:Duo Liu

Document Code:lw-184993

Number of Words:4

Translation or Not:No

Date of Publication:2016-04

Release Time:2019-10-24

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