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Affiliation of Author(s):新一代半导体材料研究院
Journal:JOURNAL OF ALLOYS AND COMPOUNDS
First Author:韩素芹
Document Code:51BBC6FBB78C423B82A00B3352ADCF1F
Issue:934
Page Number:167945
Number of Words:6
Translation or Not:no
Date of Publication:2022-11-07