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Acoustic frequency comb generation on a composite diamond/silicon microcantilever in ambient air

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Affiliation of Author(s):新一代半导体材料研究院

Journal:MICROSYSTEMS & NANOENGINEERING

First Author:赵志新

Document Code:B7518D31C26F4B93ADB03B7E40F7425A

Issue:11

Page Number:12

Number of Words:5

Translation or Not:no

Date of Publication:2025-01-17

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