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Fabrication of diamond drum resonators via laser engraving and Si wet etching for high precision temperature sensing

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Affiliation of Author(s):新一代半导体材料研究院

Journal:Diamond and Related Materials

First Author:杜运超

Document Code:3E7CF9BD79264A68A5B7F10E559E5D2A

Issue:153

Page Number:112017

Translation or Not:no

Date of Publication:2025-01-21

Next One:Generation of narrow linewidth sidebands by resonant excitation of torsional mode in a microcantilever resonator

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