Fabrication of diamond drum resonators via laser engraving and Si wet etching for high precision temperature sensing
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Institution:新一代半导体材料研究院
Title of Paper:Fabrication of diamond drum resonators via laser engraving and Si wet etching for high precision temperature sensing
Journal:Diamond and Related Materials
First Author:杜运超
Document Code:3E7CF9BD79264A68A5B7F10E559E5D2A
Issue:153
Page Number:112017
Translation or Not:No
Date of Publication:2025-01
Release Time:2025-05-16