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一种利用局域等离激元结构提高光热激发微悬臂梁振动能量转换效率的方法

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Title:一种利用局域等离激元结构提高光热激发微悬臂梁振动能量转换效率的方法

Institution:晶体材料研究所

Application Number:2017101785169

Number of Inventors:1

Service Invention or Not:No

Application Date:2017-03-23

Release Time:2019-01-26

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