实现悬臂梁微谐振器频率调谐和频谱展宽的方法和装置
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Title:实现悬臂梁微谐振器频率调谐和频谱展宽的方法和装置
Institution:新一代半导体材料研究院
Type of Patent:Invent
Application Number:202410256777.8
Number of Inventors:1
Service Invention or Not:No
Application Date:2024-03-07
Publication Date:2024-05-24
Authorization Date:2024-05-24
Release Time:2024-05-31