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实现悬臂梁微谐振器频率调谐和频谱展宽的方法和装置

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Affilication of Author(s):新一代半导体材料研究院

Type of Patent:发明

Application Number:202410256777.8

Number of Inventors:1

Service Invention or Not:no

Application Date:2024-03-07

Publication Date:2024-05-24

Authorization Date:2024-05-24

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