Enhanced 2nd-order resonance actuation and frequency response modulation of microcantilever by dual coplanar counter electrodes

发布时间:2019-04-14|点击次数:

所属单位:晶体材料研究所

论文名称:Enhanced 2nd-order resonance actuation and frequency response modulation of microcantilever by dual coplanar counter electrodes

发表刊物:chinese physics letters

第一作者:刘铎

论文类型:基础研究

论文编号:lw-151200

是否译文:否

发表时间:2013-10-01