刘宏   

Title:Professor

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Language：English

Paper Publications

Title : Effects of carbon pre-germanidation implant into Ge on the thermal stability of NiGe films

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Affiliation of Author(s):晶体材料研究院

Title of Paper:Effects of carbon pre-germanidation implant into Ge on the thermal stability of NiGe films

Journal:Microelectronic Engineering

All the Authors:liuhong

First Author:Liu Hong

Document Code:lw-173047

Translation or Not:no

Date of Publication:2015-01-09

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