Paper Publications
Title of Award : Effects of carbon pre-germanidation implant into Ge on the thermal stability of NiGe films
Hits :
Institution:晶体材料研究院（晶体材料全国重点实验室）
Title of Paper:Effects of carbon pre-germanidation implant into Ge on the thermal stability of NiGe films
Journal:Microelectronic Engineering
First Author:刘宏
All the Authors:刘宏
Document Code:lw-173047
Translation or Not:No
Date of Publication:2015-01
Release Time:2019-10-24