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Affiliation of Participant(s):新一代半导体材料集成攻关大平台

Leading Scientist:xuxiangang

Type of Project:研究与发展成果应用

Nature of Project:横向

Project Participants:huxiaobo,chenxiufang,pengyan,xumingsheng,xiexuejian,Duo Liu

Project Number:A3733C2A75E9153AE053BE07C2CA99B9

Date of Project Approval:2019-09-01

Scheduled completion time:2022-08-30

Date of Project Completion:2022-08-30

Date of Project Initiation:2019-09-01