The evolution mechanism of femtosecond laser-induced periodic structure on monocrystalline silicon with scanning rate and the associated material rearrangement process
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所属单位：机械工程学院
发表刊物：Materials Science in Semiconductor Processing
第一作者：刘雪飞
论文编号：2E95B69D5A724BEC89DB59D4685F19A3
期号：197
字数：6
是否译文：否
发表时间：2025-05-31
发表时间：2025-05-31
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