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Project Name:高温压电晶体制备及 MEMS 压力传感器研制

Institution:晶体材料研究院（晶体材料全国重点实验室）

Leading Scientist:于法鹏

Supported by:2022 National Key R&D Program for Technology-based Small and Medium-sized Enterprises Project -- Qingdao Xinsheng Micro-Nano Electronics Technology Co., Ltd.

Nature of Project:纵向

Project Level:National

Project Number:0F0B34054B0A7FFBE063BE07C2CA82D8

Project Approval Number:2023YFB3210700

Date of Project Approval:2023-12-01

Scheduled Completion Time:2026-11-30

Date of Project Completion:2026-11-30

Date of Project Initiation:2023-12-01

Release Time:2024-04-17