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超洁净清洗方法与装置研究
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Affiliation of Participant(s):机械工程学院
Leading Scientist:liuzengwen
Supported by:中国工程物理研究院机械制造工艺研究所
Nature of Project:纵向
Project level:地(市、州)级
Project Participants:liuzengwen
Project Number:kyxm-50426
Project Approval Number:H1310-KS139
Date of Project Approval:2013-07-01
Date of Project Initiation:2013-07-01
Scheduled completion time:2016-07-30
Date of Project Completion:2016-07-30