超临界二氧化碳微乳液在半导体纳米器件清洗技术中的应用
Release time:2018-05-15
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- Affiliation of Participant(s):
- 微电子学院
- Leading Scientist:
- Li Yuxiang
- Status:
- 结题
- Supported by:
- 5E470481-351B-46FC-A309-821B4385D570
- Type of Project:
- 09A79753-BED9-40F1-96A0-9F697AEFE37C
- Nature of Project:
- 超临界二氧化碳微乳液在半导体纳米器件清洗技术中的应用
- Supported by:
- Provincial municipal and autonomous regional science and technology projects
- Project level:
- B034596B-92BC-431D-A796-505B6C05CE0B
- Project Participants:
- Li Yuxiang,xiaohongdi,Jianqiang Liu,zhaolili,Li Yuxiang,Li Yuxiang
- Project Number:
- 3514
- Classification of Disciplines:
- Engineering
- First-Level Discipline:
- Electronic Science and Techonology
- Date of Project Approval:
- 2008-01-01
- Scheduled completion time:
- 2010-12-31
- Date of Project Completion:
- 2010-12-31
- Date of Project Initiation:
- 2008-01-01
- Project Approval Number:
- 8GG3003007
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