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超临界二氧化碳用于半导体纳米器件清洗和刻蚀工艺的研究

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Affiliation of Participant(s):微电子学院

Leading Scientist:Li Yuxiang

Status:结题

Supported by:国家基金委

Type of Project:科研

Nature of Project:纵向

Supported by:National Natural Science Foundation of China (NSFC)

Project level:省、部委级

Project Participants:Li Yuxiang,Li Yuxiang,Li Yuxiang,Li Yuxiang,jiangran

Project Number:13346

Classification of Disciplines:Engineering

First-Level Discipline:Electronic Science and Techonology

Date of Project Approval:2009-01-01

Scheduled completion time:2011-12-30

Date of Project Completion:2011-12-30

Date of Project Initiation:2009-01-01

Project Approval Number:60876075

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