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Project Name:大容量高重频靶体重载机构防溅射单元转轮系统的研制
Institution:机械工程学院
Leading Scientist:卢国梁
Nature of Project:横向
Project Number:7DC48644C7954A419445539CC9AA9FA4
Date of Project Approval:2022-06-25
Scheduled Completion Time:2024-06-30
Date of Project Completion:2024-06-30
Date of Project Initiation:2022-06-25
Release Time:2024-04-16